JP4168433B2 - Fixing method of moving carriage for substrate transfer device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a moving carriage for a substrate transfer apparatus and a fixing method thereof, and more particularly to a moving carriage for a substrate transfer apparatus for transferring a glass substrate for a plasma display panel (PDP) in a clean room and a fixing method thereof. Is.
[0002]
[Prior art]
FIG. 6 is a perspective view of a cassette containing a plurality of glass substrates and the like.
The cassette a is configured to horizontally support both end portions of the substrate b, and accommodates a plurality of sheets (15 to 20 sheets) at predetermined intervals in the vertical direction.
[0003]
FIG. 7 is a plan view of the substrate transfer robot.
A substrate transfer robot c (articulated arm robot) is used to take out the substrate b from the cassette a. The multi-joint arm robot c has two joint arms d, and has a thin hand e at the tip of the joint arm d. The hand e is inserted horizontally between the substrates b of the cassette a, After being supported from the lower surface of the substrate b, it is lifted slightly upward and taken out from the cassette a.
[0004]
Up to now, thin substrates have been taken out of cassette a by the substrate transport robot in this way, held horizontally and transferred to a horizontal inspection table or the like, but when the substrate becomes larger, the substrate transport robot becomes larger. Accordingly, the transport distance of the substrate is also increased. Therefore, the substrate transfer robot uses a multi-joint robot having a high weight and a high moment.
[0005]
[Problems to be solved by the invention]
However, if the substrate transfer robot becomes large, it is difficult to use a crane or the like in the clean room, so it is difficult to load a large substrate transfer robot into the clean room, and the floor of the clean room is grating. The problem arises that the substrate transfer robot cannot be fixed to the floor with anchor bolts.
[0006]
The present invention has been devised in view of the various problems described above. That is, the present invention provides a substrate transfer device on a moving carriage, moves onto a grating floor in a clean room by a free wheel provided on the lower surface of the moving carriage, and fixes the moving carriage and the joist supporting the floor to the carriage. It is an object of the present invention to provide a moving carriage for a substrate transfer apparatus and a fixing method thereof that can be clamped up and down by a jig and can withstand a large falling moment.
[0007]
[Means for Solving the Problems]
In order to achieve the above object, the present invention provides a moving carriage for a substrate transfer apparatus that holds and transfers a substrate in a clean room, and the moving carriage has a steel bar girder and an octagon surrounding it. A carriage for a substrate transfer apparatus, comprising: a carriage main body comprising a frame body; a free wheel provided on a central lower surface of each oblique side of the octagonal frame; and level adjusters provided on both sides of the free wheel. I will provide a.
[0008]
According to a preferred embodiment of the present invention, the mold steel is an H-shaped steel.
[0009]
According to the second invention of the present application, there is provided a method for installing a substrate transfer device provided on the movable carriage on a floor in a clean room formed by placing a grating on a joist, wherein a level adjuster is provided. After moving down and adjusting the horizontal level of the moving carriage, the octagonal frame and the joist supporting the floor are fixed by holding the carriage up and down with a carriage fixing jig near the level adjuster. A method for securing a mobile carriage is provided.
[0010]
According to a preferred embodiment of the present invention, the cart fixing jig is fitted into a lower presser member that presses the bottom surface of the joist, an upper presser member that presses the top surface of the cart body, and through holes provided at both ends of each presser member. Bolts and nuts.
[0011]
Next, the operation of the present invention will be described.
When installing the substrate transfer device on the grating floor in the clean room, install the substrate transfer device on the moving carriage, move it on the floor with the free wheel provided on the lower surface of the carriage body, stop it, Align the level adjusters on the floor with the joists that support the floor on the lower surface of the floor, lower each level adjuster onto the floor, press the lower end of the level adjuster against the upper floor of the joists, and slightly lift the lower end of the free wheel from the upper surface of the floor After adjusting the level of the moving carriage, the frame and joist of the moving carriage are clamped up and down by a carriage fixing jig and fixed.
[0012]
The main body of the carriage is made up of a girder and octagonal frame so that the air flow flowing from top to bottom in the clean room is not disturbed as much as possible, and in order to withstand the large falling moment of the substrate transfer device. This is because the shape of is close to a circle and is desired to be fixed at the periphery. Further, since the frame body is fixed to the joist with the cart fixing jig, it can withstand a large overturning moment.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a plan view of a mobile carriage for a substrate transfer apparatus according to the present invention, in which the right half from the center line C is a plan view and the left half is a bottom view. 2 is a view taken along the line AA in FIG. 1, FIG. 3 is a view taken along the line BB in FIG. 1, FIG. 4 is a side sectional view of the floor, and FIG. is there.
[0014]
1 to 4, reference numeral 1 denotes a moving carriage for a substrate transfer apparatus. The movable carriage 1 includes a carriage main body 2 composed of an H-shaped steel well girder 2a and an octagonal frame body 2b surrounding it, and four pieces provided on the central lower surface of each hypotenuse of the octagonal frame body 2b. A universal wheel 4 and eight level adjusters 5 provided inside the universal wheel 4 are provided. In addition, 2c is an attachment part of the board | substrate transfer apparatus 3 (one-dot chain line of FIG. 2) provided in the upper surface of the trolley | bogie main body 2, 2d is a universal wheel attachment part provided in the lower surface of the trolley | bogie main body 2 (FIG. 1). ).
[0015]
As shown in FIG. 3, the universal wheel 4 is composed of a wheel 4a and a turning part 4b, and is fixed to a universal wheel mounting part 2b on the lower surface of the frame 2b by bolts and nuts. In order to facilitate the movement, the wheel width is formed wider than the opening of the grating.
[0016]
As shown in FIG. 3, the level adjuster 5 is provided at each corner of both sides of each free wheel 4 of the frame 2b, and is composed of a bolt 5a having a base 5b at the lower end and a nut 5c. Yes.
[0017]
As shown in FIG. 4, the floor 6 is placed on a large number of square joists 6 a provided on a large number of pillars 7 erected on a foundation 8 in the clean room, and in the clean room. Grating is used to flow clean air.
[0018]
According to the second method of the present invention for transferring a moving carriage for a substrate transfer apparatus, a substrate transfer provided on the moving carriage 1 is placed on a floor 6 in a clean room formed by placing a grating on a joist 6a. In this method, the level adjuster 5 is lowered to adjust the level of the movable carriage 1, and then the octagonal frame 2b and the joist 6a that supports the floor 6 are arranged in the vicinity of the level adjuster 5. The upper holding member 9b of the fixing jig 9, that is, the carriage fixing jig 9, is attached to the upper surface of the carriage main body 2 and the lower holding member 9a is attached to the lower surface of the joist 6a, and the bolt 9c of the carriage fixing jig 9 is attached to the grating floor. 6, the upper and lower ends of the bolt 9 c are passed through the bolt holes 9 e at both ends of the upper and lower pressing members 9 b, 9 a, and the cart body 2 and the joist 6 a are clamped up and down by the cart fixing jig 9. Then hard It is obtained by way.
[0019]
Next, the operation of the embodiment of the present invention will be described.
When the substrate transfer device 3 is installed on the grating floor 6 in the clean room, the substrate transfer device 3 is provided on the movable carriage 1 and moved on the floor 6 by the free wheel 4 provided on the lower surface of the carriage body 2. The level adjuster 5 provided on the carriage body 2 is made to coincide with the joists 6a that support the floor 6 on the lower surface of the floor 6, each level adjuster 5 is lowered onto the floor 6, and the lower ends of the level adjusters 5 are placed on the joists 6a. After pressing the floor 6 to slightly lift the lower end of the free wheel 4 from the upper surface of the floor 6 to adjust the level of the moving carriage 1, the frame 2 b and the joist 6 a of the moving carriage 1 are moved up and down by the carriage fixing jig 9. Clamp and fix.
[0020]
The carriage body 2 is formed of the cross beam 2a and the octagonal frame 2b in order to prevent the air flow flowing from the top to the bottom in the clean room as much as possible and to the large falling moment of the substrate transfer device 3 This is because the shape of the bogie body 2 is close to a circle in order to endure, and it is desired to be fixed at the periphery. Moreover, since the frame 2b is fixed to the joist 6a by the carriage fixing jig 9, it is possible to withstand a large overturning moment.
[0021]
In addition, this invention is not limited to the said embodiment, Of course, it can change variously in the range which does not deviate from the summary of this invention.
[0022]
【The invention's effect】
According to the moving carriage for a substrate transfer apparatus and the method thereof according to the present invention described above, the moving carriage main body is formed of a cross girder and an octagonal frame, so that the air flow flowing from top to bottom in the clean room is obstructed. Since the free wheel is provided on the lower surface of the carriage, it can be moved on the grating floor. In addition, since the movable carriage and joist are fixed by sandwiching them up and down with the carriage fixing jig, there are excellent effects such as being able to withstand a large falling moment of the substrate transfer device.
[Brief description of the drawings]
FIG. 1 is a plan view of a mobile carriage for a substrate transfer apparatus according to the present invention, in which a right half from a center line C is a plan view and a left half is a bottom view.
FIG. 2 is a view taken in the direction of arrows AA in FIG.
FIG. 3 is a view taken along arrow BB in FIG. 1;
FIG. 4 is a side sectional view of the floor.
FIG. 5 is a diagram showing a state in which a cart body is attached to joists.
FIG. 6 is a perspective view of a cassette containing a plurality of glass substrates and the like.
FIG. 7 is a plan view of a substrate transfer robot.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Board | carriage for board | substrate transfer apparatuses 2 Cargo body 2a Well beam 2b Frame 3 Board | substrate transfer apparatus 4 Swivel wheel 5 Level adjuster 6 Floor 6a joist 7 Floor support 8 Foundation 9 Fixing jig

Claims (2)

A method of fixing on a floor a moving carriage for a substrate transfer device that moves on a floor in a clean room formed by placing a grating on a joist, wherein the moving carriage for a substrate transfer device is shaped steel A main body made up of a steel well girder and an octagonal frame surrounding it, four universal wheels provided on the lower central surface of every other side of the octagonal frame, 8 level adjusters provided on both sides, the universal wheel has a cylindrical wheel, the width of the wheel is wider than the opening of the grating, and the level adjuster is After adjusting the level of the moving carriage, the octagonal frame and the joist that supports the floor are clamped up and down by the carriage fixing jig in the vicinity of the level adjuster. Features of the moving carriage for the substrate transfer device Constant method. The cart fixing jig is composed of a lower presser member that presses the lower surface of the joist, an upper presser member that presses the upper surface of the cart body, and bolts and nuts fitted in through holes provided at both ends of each presser member. Item 2. A method for fixing a movable carriage for a substrate transfer apparatus according to Item 1 .

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