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JP4172005B2 - Low noise and high efficiency vacuum pump - Google Patents
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JP4172005B2 - Low noise and high efficiency vacuum pump - Google Patents

Low noise and high efficiency vacuum pump Download PDF

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Publication number
JP4172005B2
JP4172005B2 JP2000531666A JP2000531666A JP4172005B2 JP 4172005 B2 JP4172005 B2 JP 4172005B2 JP 2000531666 A JP2000531666 A JP 2000531666A JP 2000531666 A JP2000531666 A JP 2000531666A JP 4172005 B2 JP4172005 B2 JP 4172005B2
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JP
Japan
Prior art keywords
vacuum pump
cam
radial dimension
main axis
suction
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000531666A
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Japanese (ja)
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JP2002503786A (en
Inventor
ピエール デラファイ
ジャン−ピエール ボワソー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bosch Systemes de Freinage SAS
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Bosch Systemes de Freinage SAS
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B27/00Multi-cylinder pumps specially adapted for elastic fluids and characterised by number or arrangement of cylinders
    • F04B27/02Multi-cylinder pumps specially adapted for elastic fluids and characterised by number or arrangement of cylinders having cylinders arranged oppositely relative to main shaft
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B27/00Multi-cylinder pumps specially adapted for elastic fluids and characterised by number or arrangement of cylinders
    • F04B27/04Multi-cylinder pumps specially adapted for elastic fluids and characterised by number or arrangement of cylinders having cylinders in star- or fan-arrangement
    • F04B27/0404Details, component parts specially adapted for such pumps
    • F04B27/0414Cams

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Reciprocating Pumps (AREA)

Description

【0001】
本発明は、同一径の第1及び第2シリンダを包含しており、これらシリンダ内には、偏心輪によって各々動かされる第1及び第2ピストンが、第1及び第2容積室をそれぞれ画定し、各シリンダが、逆止め吸込弁を取付けた入口と、逆止め吐出弁を取付けた出口を備えている。
【0002】
回転ポンプが広まる以前に産業界において広く使用されていたこの型式の真空ポンプは、潤滑を必要としない乾式ポンプを形成できるという利点がある。
【0003】
他方、これらのポンプは、ピストンが逆位相で作動する、すなわち、両シリンダ内のピストンによって画定される容積室の瞬間合計が略一定に保たれるように、慣例的に設計されている。
【0004】
この作動方法は、バランスさせるのが難しい往復運動質量のため、望ましくない振動を発生するばかりでなく、最適化した偏心輪の使用を妨げ、バランスの困難性を増すこととなる。
【0005】
本発明はこれに関連するもので、その目的は、周知のポンプよりも少ない振動を発生するが、それにもかかわらず高効率を有する真空ポンプを提供することにある。
【0006】
このため、上記序文に従う本発明の真空ポンプは、本質的に、シリンダが互いに整合し、主軸線に対して対称的に配設され、ピストンが、主軸線に対して対称的で且つ第1及び第2容積室が増大する吸込運動と、主軸線に対して対称的で且つ第1及び第2容積室が減少する吐出運動とでそれぞれ同時に駆動され、吸込及び吐出運動がそれぞれ異なる第1及び第2継続時間を有し、第1継続時間が第2継続時間よりも長いことを特徴としている。
【0007】
可動の荷重を不均衡にすることなしに吸込工程を最適化するこれらの特徴は、厄介な振動を高めることなしにポンプの効率を改善することを可能にしている。
【0008】
本発明の有益な実施例によると、各偏心輪が、主軸線を中心として等回転運動で駆動される1つの同じカムにガイドの形状で形成され、このカムがこの主軸線を対称の一次軸線として受け入れることができ、ピストンの吸込運動が第1角度幅にわたるカムの回転から起こり、ピストンの吐出運動が第2角度幅にわたるカムの回転から起こり、第1角度幅が第2角度幅よりも大きくなるように設けることが可能である。
【0009】
例えば、カムが二次軸線対称の閉曲線として形造られ、最小長さの半径方向寸法と最大長さの半径方向寸法とを有し、これらの間で90度以外の角度が形成されるようにしてよい。
【0010】
この場合、カムの最小長さ及び最大長さの半径方向寸法の間で形成される角度が、少なくとも70度に等しい最小値と、多くとも110度に等しい最大値とを有するようにすることが好ましい。
【0011】
カムは、歪像により楕円形から得られた形状を有していてもよいし、あるいは他方では、最小長さの半径方向寸法に平行に、最小長さの半径方向寸法よりも大きく且つ最大長さの半径方向寸法よりも小さい中間長さを有していてもよい。
【0012】
本発明の他の特徴及び利点は、非限定的な例として添付図面を参照して行う本発明の下記説明から明らかとなるであろう。
【0013】
本発明の真空ポンプは、周知の態様で、同一径Dの第1及び第2シリンダ1及び2を包含しており、これらシリンダ内では、第1及び第2ピストン3及び4が密封態様で摺動する。
【0014】
各シリンダ1,2は、逆止め吸込弁13,23が設置してある入口11,21と、逆止め吐出弁14,24が設置してある出口12,22とを備えている。
【0015】
入口11,21は室6に接続され、この中のガスをポンプが空にするのであり、出口12,22は例えば大気中へ吐出する。
【0016】
第1及び第2ピストン3,4は偏心輪51,52によってそれぞれ動かされ、シリンダ1及び2内に第1及び第2容積室V1,V2をそれぞれ画定する。
【0017】
本発明によると、シリンダ1,2は互いに整合し、図の平面に直角である主軸線Xに対して対称である。
【0018】
ピストン3,4の各々は、第1及び第2容積室V1,V2が増大するMA1及びMA2のような吸込運動と、第1及び第2容積室V1,V2が減少するMR1及びMR2のような吐出運動とで交互に駆動される。
【0019】
しかしながら、第1及び第2ピストン3,4のそれぞれの吸込運動MA1,MA2は、これら2つのピストン3,4に関して同時に且つ主軸線Xに対して対称的に起こる。
【0020】
同様に、第1及び第2ピストン3,4のそれぞれの吐出運動MR1,MR2は、これら2つのピストン3,4に関して同時に且つ主軸線Xに対して対称的に起こる。
【0021】
さらに、吸込及び吐出運動MA1,MA2及びMR1,MR2はそれぞれ異なる第1及び第2継続時間t1,t2を有しており、各吸込運動MA1,MA2は、各吐出運動MR1,MR2の継続時間t2よりも長い継続時間t1を有する。
図1に示した好適な実施例では、各偏心輪51,52は、主軸線Xを中心として等回転運動で駆動される1つの同じカム5にガイドの形状で形成されている。
【0022】
各ピストン3,4の案内は、例えば、図1に示した実施例の場合のように圧縮あるいは引張り状態で作用する7及び8のようなスプリングを用いながら、この並進運動するピストンに固着された31,41のようなローラをカム5の輪郭に対して押圧することによって、得られる。
【0023】
主軸線Xを中心として回転するカム5は、この軸線を、対称の一次軸線として、すなわち、このカムの輪郭が軸線Xを中心とする2×PI/Nラジアンの回転に関して不変であるものとしても受け入れることができ、Nは整偶数である。
【0024】
より詳細には、図示の実施例では、ピストン3,4の吸込運動MA1,MA2は第1角度幅A1にわたるカム5の回転から起こるのに対し、ピストン3,4の吐出運動MR1,MR2は第2角度幅A2にわたるカム5の回転から起こり、第1角度幅A1は第2角度幅A2よりも大きい。
【0025】
これを達成するため、図2及び3に示すように、この場合二次軸線対称の閉曲線として形造られているカム5は、最小長さL1の半径方向寸法と最大長さL2の半径方向寸法とを有しており、これらの間では90度以外の角度A1,A2が形成される。
【0026】
換言すると、カム5は、軸線Xを中心とした径L2の円によって全体的にカバーされるとともに、軸線Xを中心とした径L1の円を全体的にカバーしており、カムに対して接線をなしているこれらの円に対する接線T1,T2又はT'1,T’2は、それらの間に補完的な角度A1及びA2を形成し、第1角度A1は第2角度A2よりも大きい。
【0027】
好適には、角度A1は多くとも110度であり、従って角度A2は少なくとも70度に等しい。
【0028】
カム5は、図3に示すように、歪像により楕円形から得られた形状を有していてよい。
【0029】
しかしながら、ピストン3及び4に伝えられる加速度を減少させるため、最小長さL1の半径方向寸法に平行に、最小長さL1の半径方向寸法よりも大きく且つ最大長さL2の半径方向寸法よりも小さい中間幅L3を有する図2に示したカムと同様のカムを用いることが好ましい。
【図面の簡単な説明】
【図1】 本発明による真空ポンプの概略図である。
【図2】 本発明による真空ポンプに使用され得る第1カムの概略図である。
【図3】 本発明による真空ポンプに使用され得る第2カムの概略図である。
[0001]
The present invention includes first and second cylinders of the same diameter, in which first and second pistons respectively moved by eccentric rings define first and second volume chambers, respectively. Each cylinder has an inlet to which a check suction valve is attached and an outlet to which a check discharge valve is attached.
[0002]
This type of vacuum pump, which was widely used in the industry before the spread of rotary pumps, has the advantage of being able to form dry pumps that do not require lubrication.
[0003]
On the other hand, these pumps are conventionally designed such that the pistons operate in antiphase, i.e. the instantaneous sum of the volume chambers defined by the pistons in both cylinders is kept substantially constant.
[0004]
This method of operation not only produces undesirable vibrations due to the reciprocating mass that is difficult to balance, but also prevents the use of optimized eccentrics and increases the difficulty of balancing.
[0005]
The present invention is related to this, and its object is to provide a vacuum pump that generates less vibration than known pumps but nevertheless has high efficiency.
[0006]
For this reason, the vacuum pump of the present invention according to the above introduction essentially has cylinders aligned with each other and arranged symmetrically with respect to the main axis, the piston being symmetrical with respect to the main axis and the first and The first and second suction chambers are simultaneously driven by a suction motion in which the second volume chamber increases and a discharge motion that is symmetric with respect to the main axis and the first and second volume chambers decrease, respectively. It has two durations, and the first duration is longer than the second duration.
[0007]
These features of optimizing the suction process without imbalance the moving load make it possible to improve the efficiency of the pump without increasing the troublesome vibrations.
[0008]
According to an advantageous embodiment of the invention, each eccentric is formed in the form of a guide on one and the same cam that is driven in an isorotational movement about the main axis, which cam is symmetrical about the main axis. The piston suction movement occurs from the cam rotation over the first angular width, the piston discharge movement occurs from the cam rotation over the second angular width, and the first angular width is greater than the second angular width. It can be provided.
[0009]
For example, the cam may be shaped as a closed secondary axisymmetric curve with a minimum radial dimension and a maximum radial dimension between which an angle other than 90 degrees is formed. It's okay.
[0010]
In this case, the angle formed between the minimum length and the maximum length radial dimension of the cam may have a minimum value equal to at least 70 degrees and a maximum value equal to at most 110 degrees. preferable.
[0011]
The cam may have a shape derived from an ellipse from the distorted image, or on the other hand, parallel to the minimum length radial dimension and greater than the minimum length radial dimension and the maximum length. It may have an intermediate length smaller than the radial dimension.
[0012]
Other features and advantages of the present invention will become apparent from the following description of the invention which refers to the accompanying drawings as a non-limiting example.
[0013]
The vacuum pump of the present invention includes, in a well-known manner, first and second cylinders 1 and 2 having the same diameter D, in which the first and second pistons 3 and 4 slide in a sealed manner. Move.
[0014]
Each cylinder 1 and 2 is provided with inlets 11 and 21 where check suction valves 13 and 23 are installed, and outlets 12 and 22 where check discharge valves 14 and 24 are installed.
[0015]
The inlets 11 and 21 are connected to the chamber 6, and the pump empties the gas therein. The outlets 12 and 22 are discharged into the atmosphere, for example.
[0016]
The first and second pistons 3 and 4 are moved by eccentric rings 51 and 52, respectively, and define first and second volume chambers V1 and V2 in the cylinders 1 and 2, respectively.
[0017]
According to the invention, the cylinders 1, 2 are aligned with each other and are symmetric with respect to the main axis X, which is perpendicular to the plane of the drawing.
[0018]
Each of the pistons 3 and 4 has a suction movement such as MA1 and MA2 in which the first and second volume chambers V1 and V2 increase, and MR1 and MR2 in which the first and second volume chambers V1 and V2 decrease. It is driven alternately with the discharge motion.
[0019]
However, the respective suction movements MA1, MA2 of the first and second pistons 3, 4 occur simultaneously and symmetrically with respect to the main axis X with respect to these two pistons 3, 4.
[0020]
Similarly, the respective discharge movements MR1, MR2 of the first and second pistons 3, 4 occur simultaneously and symmetrically with respect to the main axis X with respect to these two pistons 3, 4.
[0021]
Furthermore, the suction and discharge movements MA1, MA2 and MR1, MR2 have different first and second durations t1, t2, respectively, and each suction movement MA1, MA2 has a duration t2 of each discharge movement MR1, MR2. Longer duration t1.
In the preferred embodiment shown in FIG. 1, each of the eccentric wheels 51 and 52 is formed in the shape of a guide on one and the same cam 5 that is driven around the main axis X by an equal rotational motion.
[0022]
The guides of the pistons 3 and 4 are fixed to the translational pistons using springs such as 7 and 8 acting in a compressed or tensile state as in the embodiment shown in FIG. It is obtained by pressing rollers 31 and 41 against the contour of the cam 5.
[0023]
The cam 5 that rotates about the main axis X may have this axis as a symmetric primary axis, that is, the cam contour may be invariant with respect to rotation of 2 × PI / N radians about the axis X. Acceptable, N is an even number.
[0024]
More specifically, in the illustrated embodiment, the suction movements MA1, MA2 of the pistons 3, 4 result from the rotation of the cam 5 over the first angular width A1, whereas the discharge movements MR1, MR2 of the pistons 3, 4 are the first. It arises from the rotation of the cam 5 over two angular widths A2, and the first angular width A1 is larger than the second angular width A2.
[0025]
In order to achieve this, as shown in FIGS. 2 and 3, the cam 5, which in this case is shaped as a closed curve symmetrical to the secondary axis, has a radial dimension with a minimum length L1 and a radial dimension with a maximum length L2. And angles A1 and A2 other than 90 degrees are formed between them.
[0026]
In other words, the cam 5 is entirely covered by a circle with a diameter L2 centered on the axis X, and also covers a circle with a diameter L1 centered on the axis X, and is tangential to the cam. The tangents T1, T2 or T′1, T′2 for these circles forming a complementary angle A1 and A2 between them, the first angle A1 being larger than the second angle A2.
[0027]
Preferably, angle A1 is at most 110 degrees, so angle A2 is at least equal to 70 degrees.
[0028]
As shown in FIG. 3, the cam 5 may have a shape obtained from an elliptical shape by a distorted image.
[0029]
However, in order to reduce the acceleration transmitted to the pistons 3 and 4, parallel to the radial dimension of the minimum length L1, larger than the radial dimension of the minimum length L1 and smaller than the radial dimension of the maximum length L2. It is preferable to use a cam similar to the cam shown in FIG. 2 having an intermediate width L3.
[Brief description of the drawings]
FIG. 1 is a schematic view of a vacuum pump according to the present invention.
FIG. 2 is a schematic view of a first cam that can be used in a vacuum pump according to the present invention.
FIG. 3 is a schematic view of a second cam that can be used in a vacuum pump according to the present invention.

Claims (5)

同一径(D)の第1及び第2シリンダ(1,2)を包含しており、これらシリンダ内には、偏心輪(51,52)によって各々動かされる第1及び第2ピストン(3,4)が、第1及び第2容積室(V1,V2)をそれぞれ画定し、各シリンダが、逆止め吸込弁(13,23)を取付けた入口(11,21)と、逆止め吐出弁(14,24)を取付けた出口(12,22)を備えている真空ポンプにおいて、シリンダ(1,2)が互いに整合し、主軸線(X)に対して対称的に配設され、ピストン(3,4)が、主軸線(X)に対して対称的で且つ第1及び第2容積室(V1,V2)が増大する吸込運動(MA1,MA2)と、主軸線(X)に対して対称的で且つ第1及び第2容積室(V1,V2)が減少する吐出運動(MR1,MR2)とでそれぞれ同時に駆動され、吸込及び吐出運動(MA1,MA2,MR1,MR2)がそれぞれ異なる第1及び第2継続時間(t1,t2)を有し、第1継続時間(t1)が第2継続時間(t2)よりも長いことを特徴とする真空ポンプ。First and second cylinders (1, 2) having the same diameter (D) are included, and in these cylinders, first and second pistons (3,4) respectively moved by eccentric rings (51, 52). ) Define first and second volume chambers (V1, V2), respectively, and each cylinder has an inlet (11, 21) to which a check suction valve (13, 23) is attached and a check discharge valve (14). , 24), the cylinders (1, 2) are aligned with each other and arranged symmetrically with respect to the main axis (X), and the piston (3, 22) 4) is symmetric with respect to the main axis (X) and symmetric with respect to the main axis (X) and the suction movement (MA1, MA2) in which the first and second volume chambers (V1, V2) increase. And a discharge motion (MR1, MR2) in which the first and second volume chambers (V1, V2) are reduced, and Each of the suction and discharge motions (MA1, MA2, MR1, MR2) is driven simultaneously and has different first and second durations (t1, t2), and the first duration (t1) is the second duration ( A vacuum pump characterized by being longer than t2). 請求項1記載の真空ポンプにおいて、各偏心輪(51,52)が、主軸線(X)を中心として等回転運動で駆動される1つの同じカム(5)にガイドの形状で形成され、このカムがこの主軸線を対称の一次軸線として受け入れることができ、ピストン(3,4)の吸込運動(MA1,MA2)が第1角度幅(A1)にわたるカム(5)の回転から起こり、ピストン(3,4)の吐出運動(MR1,MR2)が第2角度幅(A2)にわたるカム(5)の回転から起こり、第1角度幅(A1)が第2角度幅(A2)よりも大きいことを特徴とする真空ポンプ。2. The vacuum pump according to claim 1, wherein each eccentric ring (51, 52) is formed in the shape of a guide on one same cam (5) driven by equal rotational movement about the main axis (X). The cam can accept this main axis as a symmetric primary axis, and the suction movement (MA1, MA2) of the piston (3, 4) arises from the rotation of the cam (5) over the first angular width (A1) and the piston ( 3 and 4) that the discharge motion (MR1, MR2) results from the rotation of the cam (5) over the second angular width (A2) and that the first angular width (A1) is greater than the second angular width (A2). A featured vacuum pump. 請求項2記載の真空ポンプにおいて、カム(5)が二次軸線対称の閉曲線として形造られ、最小長さ(L1)の半径方向寸法と最大長さ(L2)の半径方向寸法とを有し、これらの間で90度以外の角度(A1,A2)が形成されることを特徴とする真空ポンプ。3. The vacuum pump according to claim 2, wherein the cam (5) is shaped as a closed curve symmetrical about the secondary axis and has a radial dimension with a minimum length (L1) and a radial dimension with a maximum length (L2). The vacuum pump is characterized in that an angle (A1, A2) other than 90 degrees is formed between them. 請求項3記載の真空ポンプにおいて、カム(5)の最小長さ及び最大長さ(L1,L2)の半径方向寸法の間で形成される角度(A1,A2)が、少なくとも70度に等しい最小値と、多くとも110度に等しい最大値とを有することを特徴とする真空ポンプ。4. The vacuum pump according to claim 3, wherein the angle (A1, A2) formed between the radial lengths of the minimum length and the maximum length (L1, L2) of the cam (5) is at least equal to 70 degrees. Vacuum pump characterized in that it has a value and a maximum value equal to at most 110 degrees. 請求項2又は3記載の真空ポンプにおいて、カム(5)が、最小長さ(L1)の半径方向寸法に平行に、最小長さ(L1)の半径方向寸法よりも大きく且つ最大長さ(L2)の半径方向寸法よりも小さい中間長さ(L3)を有することを特徴とする真空ポンプ。The vacuum pump according to claim 2 or 3, wherein the cam (5) is parallel to the radial dimension of the minimum length (L1) and is larger than the radial dimension of the minimum length (L1) and has a maximum length (L2). A vacuum pump characterized by having an intermediate length (L3) smaller than the radial dimension of
JP2000531666A 1998-02-12 1999-02-08 Low noise and high efficiency vacuum pump Expired - Fee Related JP4172005B2 (en)

Applications Claiming Priority (3)

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FR9801664A FR2774727B1 (en) 1998-02-12 1998-02-12 LOW NOISE AND HIGH EFFICIENCY VACUUM PUMP
FR98/01664 1998-02-12
PCT/FR1999/000284 WO1999041501A1 (en) 1998-02-12 1999-02-08 Low noise high performance vacuum pump

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CN102094776B (en) * 2009-12-09 2015-03-11 上海汽车制动系统有限公司 Oppositely arranged swing piston type vacuum pump used for automobiles
CN102345582A (en) * 2011-10-10 2012-02-08 中国人民解放军第四军医大学 Horizontally opposed dual-cylinder vacuum pump
CN109595137B (en) * 2018-12-20 2020-03-27 杨爱钗 Negative pressure steam generating device
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US3834840A (en) * 1972-06-07 1974-09-10 E Hartley Compact reciprocating piston machine
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JPS5867978A (en) * 1981-10-16 1983-04-22 Nippon Denso Co Ltd Reciprocating compressor
US5482443A (en) * 1992-12-21 1996-01-09 Commonwealth Scientific And Industrial Research Organization Multistage vacuum pump

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