JP4177014B2 - SEALING DEVICE AND METHOD OF OPERATING THE SAME - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a sealing device for sealing two spaces having different pressures and an operation method thereof, and more particularly to a sealing device suitable for sealing two spaces having different pressures in a semiconductor manufacturing device in a non-contact manner and an operating method thereof. is there.
[0002]
[Prior art]
Conventionally, as a sealing device for sealing two spaces having different pressures of this kind, there are techniques disclosed in US Pat. No. 4,180,842, US Pat. No. 4,191,385 and US Pat. No. 4,425,508. These techniques have been used when it is desired to achieve a high-speed or smooth operation without contaminating the clean space when moving objects (rotational motion, linear motion) in a clean space represented by a vacuum space. .
[0003]
The usage method has at least two directions. One of them is a case where a movement drive source, a guide mechanism, and the like are arranged outside the clean space, and only a minimum structure and a sample to be moved are arranged and used in the clean space. The second is a case where two spaces are sealed without impairing the merit of the non-contact bearing when a hydrostatic bearing (for example, an air bearing) is used. In this second case, as "two spaces", (1) the bearing is used in the clean space, the bearing fluid space and the clean space are sealed, and (2) the bearing is used outside the clean space, The clean space and the outside may be sealed.
[0004]
The sealing device has the feature that it is possible to separate the two spaces in a non-contact state, and this feature is understood as a sufficient advantage and tends to be applied to a specific device. In the steady state where the sealing function of the sealing device is acting, it is apt to be understood as an advantage that the function of non-contact sealing is certainly prominent. However, when considering from a comprehensive point of view, such as specific device start-up time, contamination at the time of start-up, maintenance of cleanliness, etc., when the seal device is started, when it stops, the operation method after stopping (operation method) ) Needs to be fully understood.
[0005]
The influence on the apparatus by the operation method (operation method) after stopping when starting, stopping, and stopping the sealing apparatus will be described with reference to FIG. First, attention is paid to the startup of the sealing device. As shown in the figure, the sealing device connects the first space 1 and the second space 2 with a sealing passage 3 having a small cross-sectional area. First, it is assumed that the first space 1, the second space 2, and the sealing passage 3 are at the same pressure, for example, atmospheric pressure. Here, the first space 1 is, for example, a space that is brought into a high vacuum state when a substrate for semiconductor manufacturing is processed, and the second space 2 is, for example, a space provided with a transport mechanism for transporting the substrate. When the sealing device is activated in a low-clean space or a clean room atmosphere space, the following problems occur depending on the activation method.
[0006]
[Case 1]
The vacuum pump 4 in the vacuum exhaust line L1 is started, the valve 6 is opened and exhaust is started. Subsequently, the vacuum pump 5 in the vacuum exhaust line L2 is started, the valve 7 is opened and exhaust is started, and the pressure in the first space 1 is started. P1 (vacuum degree V1), pressure P2 in the second space 2 (vacuum degree V2), pressure P3 in the seal passage 3 (vacuum degree V3), and the pressure relationship in a steady state is P1 <P3 <P2 If V1>V3> V2), the valve 6 is opened transiently and the exhaust from the vacuum exhaust line L1 is started. Therefore, P1 <P3 <P2 or P1 <P3 = P2 (for example, P1 is several Torr) , P3 is atmospheric pressure to several hundred Torr, and P2 is atmospheric pressure). For this reason, a state in which the amount of gas flowing from the second space 2 into the first space 1 is very large occurs transiently.
[0007]
After that, when the valve 7 is opened and exhaust from the vacuum exhaust line L2 is started, most of the inflow gas from the second space 2 flows into the vacuum exhaust line L2, and hardly flows into the first space 1, and is in a steady state. P1 <P3 <P2 (for example, P1 is 1E-6 Torr, P3 is 1E-3 Torr, and P2 is atmospheric pressure), and the activation is completed.
[0008]
Therefore, the cleanliness of the first space 1 is reduced due to the large amount of gas existing in the second space 2 flowing into the first space 1. For example, if air with a humidity of 50% flows from the second space 2 into the first space 1, the ultimate vacuum of the first space 1 also decreases. In addition, there may be an accident in which dust accidentally enters the second space 2 enters the sealing passage 3 with a narrow gap and clogs the sealing passage 3. Incidentally, the gap of the sealing passage 3 is usually 1 mm or less, and recently, there is also a high-performance sealing device of about 0.005 mm = 5 μm.
[0009]
[Case 2]
The vacuum pump 5 is started, the valve 7 is opened and the exhaust through the vacuum exhaust line L2 is started. Subsequently, the vacuum pump 4 is started, the valve 6 is opened and the exhaust through the vacuum exhaust line L1 is started. P1 <P3 <P2 (V1>V3> V2 in terms of the degree of vacuum). Since the exhaust from the valve 7 is started transiently, the relationship of P1> P3 <P2 (for example, P1 is several hundred Torr, P3 is several Torr, and P2 is atmospheric pressure) is established. Flows into the sealing passage 3.
[0010]
Thereafter, when exhausting from the valve 6 is started, a slight gas inflow from the second space 2 to the first space 1 occurs. Then, the steady state P1 <P3 <P2 (for example, P1 is 1E-6 Torr, P3 is 1E-3 Torr, and P2 is atmospheric pressure), and the activation is completed. For this reason, an accident may occur in which the dust that accidentally enters the second space 2 flows into the airflow and clogs the sealing passage 3 with a narrow gap.
[0011]
Next, problems that occur due to the stopping procedure of the sealing device will be described. In the initial state, the differential exhaust seal function is functioning in a steady state. The pressure relationship is P1 <P3 <P2 (the degree of vacuum relationship is P1>P3> P2, for example, P1 is 1E-6 Torr, P3 is 1E-3 Torr, and P2 is atmospheric pressure).
[0012]
[Case 3]
When both the valve 6 and the valve 7 are closed at the same time, the vacuum chamber is in the same state as a crack called “seal passage 3”. That is, the gas in the second space 2 flows into the first space 1 through the sealing passage 3 at a stretch. Therefore, the cleanliness of the first space 1 is reduced due to the large amount of gas existing in the second space 2 flowing into the first space 1. For example, if air with a humidity of 50% flows from the second space 2 into the first space 1, the ultimate vacuum in the first space 1 also decreases. In addition, there may be an accident in which dust that accidentally enters the second space 2 enters a narrow gap in the sealing passage 3 and clogs the sealing passage 3.
[0013]
[Case 4]
When the valve 7 is closed and then the valve 6 is closed, when viewed from the first space 1, this is the same state as the occurrence of the crack “sealing passage 3”. That is, the gas in the second space 2 flows into the first space 1 at a stretch. In addition, the vacuum pump 4 that has pulled the first space 1 into a high vacuum has the same effect as an atmospheric rush accident, and uses a turbo molecular pump that rotates the turbine blades at high speed to kick off the molecules. If so, an excessive external force acts on the blade, and in some cases, the blade is damaged.
[0014]
Therefore, the cleanliness of the first space 1 is reduced due to a large amount of gas existing in the second space 2 flowing into the first space 1. For example, if air with a humidity of 50% flows from the second space 2 into the first space 1, the ultimate vacuum of the first space 1 also decreases. In addition, an accident may occur in which dust that accidentally enters the second space 2 enters a narrow gap in the sealing passage 3 and clogs the sealing passage 3.
[0015]
[Case 5]
When the valve 6 is closed and then the valve 7 is closed, a large amount of gas in the second space 2 flows into the first space 1 through the gap of the sealing passage 3 until P1 = P3 or P1> P3. Therefore, the cleanliness of the first space 1 is reduced. For example, if air with a humidity of 50% flows from the second space 2 into the first space 1, the ultimate vacuum of the first space 1 also decreases. In addition, an accident may occur in which dust that accidentally enters the second space 2 enters a narrow gap in the sealing passage 3 and clogs the sealing passage 3.
[0016]
Next, the influence of the sealing passage 3 on the apparatus after the sealing apparatus is stopped will be described.
[0017]
[Case 6]
The gas in the second space 2 flows into the first space 1 by any stop operation of the cases 3, 4, and 5. If this state is left untreated, the vacuum chamber lid is opened for the first space 1. If the gas occupying the outside space is, for example, clean room air, the inner surface is exposed to a moist gas having a humidity of about 50%. Therefore, the ultimate vacuum when evacuation is started again decreases. In other words, since the set vacuum level is not easily reached, the apparatus start-up time is greatly extended.
[0018]
[Case 7]
When the filling gas when making the pressure of the first space 1 the same as that of the second space 2 can be a dry gas by any method, the first space 1 and the second space 2 are connected to the sealing passage. For example, when the gas in the second space 2 is a moist gas, the humidity of the entire space changes to reach an equilibrium state. That is, the gas in the first space 1 is like a dry sponge and absorbs the moisture of the gas occupying the second space 2. Accordingly, moisture is adsorbed on the inner surface of the first space 1. Therefore, the ultimate vacuum when evacuation is started again decreases. In other words, since the set vacuum level is not easily reached, the apparatus start-up time is greatly extended.
[0019]
For example, if air with a humidity of 50% is filled in the first space 1, starting up the apparatus after one day will cause the first space 1 to reach the set vacuum level, and one month of vacuuming is required It may become.
[0020]
[Problems to be solved by the invention]
The present invention has been made in view of the above-described points, and does not contaminate a space requiring high cleanliness, and suppresses adhesion of moisture adhering to the inner surface of the space requiring high cleanliness. An object of the present invention is to provide a sealing device that can shorten the re-start-up time of the vacuum device and an operation method thereof.
[0021]
[Means for Solving the Problems]
In order to solve the above-mentioned problem, the invention described in claim 1 is a sealing device in which a first space and a second space are communicated by a sealing passage, and a vacuum exhaust line is provided in the first space and the sealing passage. Gas supply line for supplying dry gas to the passage In addition, there is a difference in cleanliness between the first space and the second space. The position where the first space is the high clean space, the second space is the low clean space, and the gas supply line is provided is the second most in the seal passage. Between the vacuum exhaust line closer to the space and the second space It is in the sealing device characterized by this.
[0022]
As described above, a gas supply line for supplying dry gas to the seal passage is provided. , By controlling the timing of starting and stopping the supply of dry gas by the gas supply line, and the timing of starting and stopping the exhaust of the vacuum exhaust line provided in the first space and the vacuum exhaust line provided in the seal passage , Qing A large amount of gas that occupies the second space with a low degree of cleanness can be prevented from flowing into the first space with a high degree of cleanness, and the adhesion of moisture adhering to the inner surface of the first space where a high degree of cleanliness is required is suppressed. Equipment re-startup time can be shortened. Further, the position where the gas supply line is provided is between the vacuum exhaust line closest to the second space of the seal passage and the second space, so that a highly clean space for gas occupying the second space which is a low clean space. It is possible to effectively prevent the inflow into the first space. .
[0027]
Claims 2 The invention described in claim 1 The sealing device described in To drive A method is characterized in that the sealing device is activated by the following first to fourth procedures.
First, supply dry gas from the gas supply line,
Secondly, the dry gas supply flow rate from the gas supply line is set so that the pressure of the gas supply port portion of the gas supply line of the seal passage is always the same as or higher than the pressure of the second space. Adjust
Third, start exhausting the vacuum exhaust line of the seal passage,
Fourth, evacuation by the vacuum evacuation line in the first space is started.
[0028]
By starting the sealing device in the first to fourth procedures, it is possible to prevent a large amount of gas occupying the second space from flowing into the first space. Therefore, the gas occupying the second space with a lower cleanness does not flow into the first space with a higher cleanness, and the cleanliness within the first space is not reduced. Moisture adheres to the inner surface due to the humidity of the gas flowing into the first space, and the ultimate vacuum is not lowered. The dust in the second space does not enter the narrow gap of the sealing passage and clog the sealing passage.
[0029]
Claims 3 The invention described in claim 1 Sealing equipment as described in To drive The sealing method is characterized in that the sealing device is stopped by the following first to fourth procedures.
First, supply dry gas from the gas supply line,
Secondly, the dry gas supply flow rate from the gas supply line is set so that the pressure of the gas supply port portion of the gas supply line of the seal passage is always the same as or higher than the pressure of the second space. Adjust
Third, stop the exhaust by the vacuum exhaust line of the first space,
Fourthly, the exhaust by the vacuum exhaust line of the seal passage is stopped.
[0030]
By stopping the sealing device in the first to fourth procedures, a large amount of gas occupying the second space can be prevented from flowing into the first space. Therefore, the gas occupying the second space with a lower cleanness does not flow into the first space with a higher cleanness, and the cleanliness within the first space is not reduced. In addition, since moisture can be prevented from adhering to the inner surface due to the humidity of the gas flowing into the first space, the time for restarting the vacuum apparatus can be shortened. Further, the dust in the second space does not enter the narrow gap of the sealing passage and clog the sealing passage.
[0031]
Claims 4 The invention described in claim 1 The sealing device described in To drive In the method, after the sealing device is stopped, the dry gas is supplied from the gas supply line, the dry gas supply flow rate from the gas supply line is set to the second pressure of the gas supply port of the gas supply line of the sealing passage. The pressure is adjusted so as to be always the same as or higher than the pressure in the second space.
[0032]
After the sealing device is stopped as described above, the dry gas supply flow rate from the gas supply line is set so that the pressure of the gas supply port portion of the gas supply line of the sealing passage is always the same as the pressure of the second space or the second space. By adjusting the pressure to be higher than the pressure, it is possible to prevent the gas occupying the second space from flowing into the first space. Therefore, the gas occupying the second space with a lower cleanness does not flow into the first space with a higher cleanness, and the cleanliness within the first space is not reduced. In addition, since moisture can be prevented from adhering to the inner surface due to the humidity of the gas flowing into the first space, the time for restarting the vacuum apparatus can be shortened.
[0033]
Claims 5 The invention described in claim 4 The dry gas supplied from the gas supply line is a gas having substantially the same components as air and having a humidity of 5% or less.
[0034]
The dry gas supplied from the gas supply line has substantially the same components as air and has a humidity of 5% or less, so that moisture does not adhere to the inner surface of the first space, and the second space Even if it is a space where humans can enter, it will not interfere with humans entering the second space.
[0035]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings. First, a problem that occurs due to the start-up operation of the sealing device is as follows. (1) Gas that occupies the second space 2 having a lower cleanness flows into the first space 1 to lower the cleanness in the first space 1. thing. {Circle around (2)} Further, since the moisture adheres to the inner surface of the first space 1 due to the humidity of the inflowing gas, the ultimate vacuum is lowered. (3) The dust in the second space 2 enters the narrow gap of the sealing passage 3 and clogs the sealing passage 3. It is.
[0036]
FIG. 2 is a diagram showing a configuration example of a sealing device according to the present invention. This sealing device is provided with a sealing passage 3 between the first space 1 and the second space 2, a vacuum exhaust line L 1 having a valve 6 and a vacuum pump 4 in the first space 1, and a valve in the sealing passage 3. 7 and a vacuum exhaust line L2 having a vacuum pump 5 are connected to each other, and a gas supply line L3 comprising a valve 8 and a dry gas supply source (not shown) for supplying a dry gas 9 is connected to the first space 1. The point is the same as the sealing device of FIG. Here, a filter 10 is provided on the second space 2 side of the sealing passage 3 in order to solve the problem of dust inflow in the second space 2, which is a problem common to the case 1 and the case 2. As a result, the filter 10 captures dust that enters the sealing passage 3 from the second space 2.
[0037]
The purpose of providing a sealing passage 3 between the first space 1 and the second space 2 to provide a sealing function by differential pressure exhaust is to separate the first space 1 and the second space 2 in a non-contact state. is there. The reason why the non-contact state is required is that the distance between the two opposing faces of the sealing passage 3 is constant and it is desired to relatively displace the face in the tangential direction. Therefore, in many cases, attaching the filter 10 as described above does not provide a solution.
[0038]
Therefore, as shown in FIG. 3, a valve 11 and a dry gas 14 are newly provided between the vacuum exhaust port (or exhaust groove) 3-1 of the seal passage 3 and the opening 3-2 on the second space 2 side. A gas supply line L4 including a dry gas supply source (not shown) is provided.
[0039]
In the sealing device of this configuration, P1 = P3 = P4 = P2 (where P3 is the pressure of the vacuum exhaust port 3-1 of the vacuum exhaust line L2 of the seal passage 3 and P4 is the gas supply of the gas supply line L4) As the pressure of the port 3-3), the starting procedure for solving the common problem of the case 1 and the case 2 is as follows.
[0040]
The valve 11 is opened and the dry gas 14 is supplied to the sealing passage 3 from the gas supply line L4. As a result, the dry gas supply flow rate is always controlled so that at least the pressure relationship is P4 = P2. Desirably, the supply flow rate of the dry gas 14 is controlled so that P4> P2. Subsequently, the valve 7 or the valve 6 or both valves are opened to start exhausting. At this time, the supply flow rate of the dry gas 14 from the gas supply line L4 is adjusted so that the pressure relationship maintains P4 = P2 or P4> P2. Desirably, the valve 7 is opened and exhaust is started by the vacuum exhaust line L2. A large amount of gas occupying the second space 2 into the first space 1 can be prevented by the operation procedure as described above. Of course, when the sealing function by the sealing passage 3 is functioning in a steady state, the supply of the dry gas 14 from the gas supply line L4 may be stopped.
[0041]
Further, in an apparatus in which there is no problem dust even if the second space 2 is caught in the seal passage 3, the operation procedure shown in the case 2, that is, the vacuum pump 5 is started, the valve 7 is opened, and the vacuum is exhausted. An operation procedure is preferred in which evacuation is started by the line L2, then the vacuum pump 4 is started, the valve 6 is opened, and evacuation is started by the vacuum exhaust line L1. According to such a procedure, it is possible to prevent a large amount of gas occupying the second space 2 from entering the first space 1 without providing a new gas supply line L4 as shown in FIG.
[0042]
Next, measures adopted by the present invention in order to solve the problems caused by the stop operation of the sealing device will be described. First, in order to solve the problem caused by the large inflow of the gas occupying the second space 2 into the first space 1, as shown in FIGS. 2 and 3, one vacuum exhaust line is provided in the sealing passage 3. In some cases, L2 is provided, but practically, a plurality of (three in the figure) vacuum exhaust lines L5-1, L5-2, and L5-3 are provided in the sealing passage 3 shown in FIG. Constitute. The vacuum exhaust lines L5-1, L5-2, and L5-3 include vacuum pumps 12-1, 12-2, and 12-3, and valves 13-1, 13-2, and 13-3, respectively.
[0043]
As shown in FIG. 4, three vacuum exhaust lines L5-1, L5-2, and L5-3 are provided, and the vacuum degree of the first space 1 is further increased by gradually increasing the vacuum degree of each exhaust port. Easy to make high vacuum. Therefore, the connection position of the gas supply line L4 to the sealing passage 3 is preferably between the vacuum exhaust line L5-3 and the second space 2 that are closest to the second space 2.
[0044]
In the sealing device shown in FIG. 4, a stop procedure for preventing a large amount of gas occupying the second space 2 from flowing into the first space 1 will be described below. P1 <P5-1 <P5-2 <P5-3 <P2 (where P5-1, P5-2, and P5-3 are the vacuum exhaust lines L5-1, respectively) when the seal device is in steady operation. , L5-2, L5-3 vacuum exhaust port pressure). For example, P1 is 1E-6 Torr, P5-1 is 1E-3 Torr, P5-2 is 1E-1 Torr, P5-3 is tens of Torr, and P2 is atmospheric pressure.
[0045]
First, in the first stage of the stop operation, the valve 11 is opened and the dry gas 14 is supplied from the gas supply line L4. If the dry gas 14 is constantly supplied from the gas supply line L4, the supply state of the dry gas 14 is confirmed. Even when the pressures P1, P5-1, P5-2, and P5-3 vary, the supply flow rate of the dry gas 14 from the gas supply line L4 is adjusted so that the pressure relationship is P4 = P2, preferably P4> P2. For this adjustment, the gas flow rate is controlled by detecting the pressure with a regulator (not shown).
[0046]
Subsequently, case 3 (when both the valve 6 and the valve 7 are closed at once), case 4 (when the valve 7 is closed and then the valve 6 is closed), case 5 (the valve 6 is closed and then the valve 7 is closed) When closing). The sealing device shown in FIG. 4 can stop the pressure fluctuation moderately by making a difference in the stop timing of the three stages of the vacuum exhaust lines L5-1, L5-2, and L5-3 of the sealing passage 3.
[0047]
In FIG. 4, the stop procedure when the gas supply line L4 is not provided is shown below. (1) First, the valve 6 is closed, the exhaust from the vacuum exhaust line L1 is stopped, the valve 8 is opened, and the dry gas 9 is supplied from the gas supply line L3. Preferably, the supply amount of the dry gas 9 by the valve 8 of the gas supply line L3 is gradually increased while the exhaust amount by the valve 6 of the vacuum exhaust line L1 is reduced. (2) When the pressure relation becomes P1 = P5-1, the valve 13-1 is closed to stop the exhaust, and (3) when P1 = P5-1 = P5-2, then the valve 13- 2 is closed and the exhaust from the vacuum exhaust line L5-2 is stopped. (4) Further, when P1 = P5-1 = P5-2 = P5-3, the valve 13-3 is closed and the vacuum exhaust line L5-3. Stop exhausting from. As a result, all evacuation by the evacuation line is stopped. (5) When P1 = P5-1 = P5-2 = P5-3 = P2 = atmospheric pressure, the valve 8 is closed to stop the supply of the dry gas 9 from the gas supply line L3.
[0048]
More preferably, a gas supply line L4 having a valve 11 is provided, and the valve 11 is adjusted so that P4 = P2, preferably P4> P2, and the dry gas flow rate from the gas supply line L4 is adjusted. The above operations (1) to (5) are performed. Finally, the valve 11 is closed, and the supply of the dry gas 14 from the gas supply line L4 is stopped.
[0049]
Next, a method for solving a problem that occurs after the sealing by the sealing passage 3 is stopped will be described. Both the cases 6 and 7 have a problem caused by the gas occupying the second space 2 adhering to the inner surface of the first space 1. In particular, when moisture adheres to the inner surface of the first space 1, the ultimate vacuum in the first space 1 is significantly reduced. For this reason, there is a problem that the restart time of the entire apparatus is extended. A solution to this will be described.
[0050]
Preferably, a gas supply line L4 having a valve 11 is provided as shown in FIG. 4, and after the apparatus is stopped, a small amount of dry gas is adjusted by adjusting the valve 11 so that the pressure P4 is slightly higher than P2. Keep gas 14 flowing. The dry gas 14 is preferably dry air (air having a humidity of 5% or less) when the second space 2 communicates with a space where a human enters.
[0051]
When the gas supply line L4 provided with the valve 11 is not provided, the dry gas 9 is supplied from the gas supply line L3 provided with the valve 8, and the pressure P1 in the first space 1 is set in the second space 2. The flow rate may be adjusted to be slightly higher than the pressure P2.
[0052]
【The invention's effect】
As described above, according to the invention described in each claim, the following excellent effects can be obtained.
[0053]
According to the first aspect of the present invention, the gas supply line for supplying the dry gas to the sealing passage is provided. , By controlling the timing of starting and stopping the supply of dry gas by the gas supply line and the timing of starting and stopping the exhaust of the vacuum exhaust line provided in the first space and the vacuum exhaust line provided in the seal passage, A large amount of gas occupying the second space with low cleanliness in the high first space can be prevented, and adhesion of moisture adhering to the inner surface of the first space where high cleanliness is required can be suppressed. Start-up time can be shortened. Further, the position where the gas supply line is provided is between the vacuum exhaust line closest to the second space of the seal passage and the second space, so that a highly clean space for gas occupying the second space which is a low clean space. It is possible to effectively prevent the inflow into the first space. .
[0056]
Claim 2 According to the above-described invention, it is possible to prevent a large amount of gas from occupying the second space from flowing into the first space by starting the sealing device in the first to fourth procedures. Therefore, the gas occupying the second space with a lower cleanness does not flow into the first space with a higher cleanness, and the cleanliness within the first space is not reduced. Moisture adheres to the inner surface due to the humidity of the gas flowing into the first space, and the ultimate vacuum is not lowered. The dust in the second space does not enter the narrow gap of the sealing passage and clog the sealing passage.
[0057]
Claim 3 According to the invention described in (1), by stopping the sealing device in the first to fourth procedures, it is possible to prevent a large amount of gas occupying the second space from flowing into the first space. Therefore, the gas occupying the second space with a lower cleanness does not flow into the first space with a higher cleanness, and the cleanliness within the first space is not reduced. In addition, since moisture can be prevented from adhering to the inner surface due to the humidity of the gas flowing into the first space, the time for restarting the vacuum apparatus can be shortened. Further, the dust in the second space does not enter the narrow gap of the sealing passage and clog the sealing passage.
[0058]
Claim 4 According to the invention described in the above, after the sealing device is stopped, the dry gas supply flow rate from the gas supply line is set so that the pressure of the gas supply port portion of the gas supply line of the sealing passage is always the same as the pressure of the second space, or By adjusting the pressure to be higher than the pressure in the second space, it is possible to prevent the gas occupying the second space from flowing into the first space. Therefore, the gas occupying the second space with a lower cleanness does not flow into the first space with a higher cleanness, and the cleanliness within the first space is not reduced. In addition, since moisture can be prevented from adhering to the inner surface due to the humidity of the gas flowing into the first space, the time for restarting the vacuum apparatus can be shortened.
[0059]
Claim 5 Since the dry gas supplied from the gas supply line has substantially the same components as air and has a humidity of 5% or less, moisture is attached to the inner surface of the first space. In addition, even if the second space is a space where humans can enter, there is no obstacle to humans entering the second space.
[Brief description of the drawings]
FIG. 1 is a diagram showing a configuration example of a conventional sealing device.
FIG. 2 is a diagram showing a configuration example of a sealing device according to the present invention.
FIG. 3 is a diagram showing a configuration example of a sealing device according to the present invention.
FIG. 4 is a diagram showing a configuration example of a sealing device according to the present invention.
[Explanation of symbols]
1 First space
2 Second space
3 Sealing passage
4 Vacuum pump
5 Vacuum pump
6 Valve
7 Valve
8 Valve
9 Dry gas
10 Filter
11 Valve
12-1-3 Vacuum pump
13-1-3 Valve
14 Dry gas
L1 vacuum exhaust line
L2 vacuum exhaust line
L3 gas supply line
L4 gas supply line
L5-1-3 Vacuum exhaust line

Claims (5)

The first space and the second space communicates with the seal passage, in the sealing apparatus provided with a vacuum exhaust line to the first space and the seal passage, Ru provided the gas supply lines for supplying a dry gas to the seal passage In addition, there is a difference in cleanliness between the first space and the second space, the first space is a highly clean space, the second space is a low clean space, and the position where the gas supply line is provided is the most in the seal passage. A sealing device characterized by being between the evacuation line and the second space near the second space . A method for operating the sealing device according to claim 1 , wherein the sealing device is activated by the following first to fourth procedures.
First, dry gas is supplied from the gas supply line,
Second, the dry gas supply flow rate from the gas supply line is set so that the pressure of the gas supply port portion of the gas supply line of the sealing passage is always the same as or higher than the pressure of the second space. Adjust so that
Third, start exhausting by the vacuum exhaust line of the seal passage,
Fourth, evacuation by the vacuum evacuation line of the first space is started. A method for operating the sealing device according to claim 1 , wherein the sealing device is stopped by the following first to fourth procedures.
First, dry gas is supplied from the gas supply line,
Second, the dry gas supply flow rate from the gas supply line is set so that the pressure of the gas supply port portion of the gas supply line of the sealing passage is always the same as or higher than the pressure of the second space. Adjust so that
Thirdly, the exhaust by the vacuum exhaust line of the first space is stopped,
Fourth, the exhausting of the sealing passage by the vacuum exhaust line is stopped. The method for operating the sealing device according to claim 1 , wherein after the sealing device is stopped, dry gas is supplied from the gas supply line, and a dry gas supply flow rate is supplied from the gas supply line to the sealing passage. A method for operating a sealing device, wherein the pressure of a gas supply port portion of a gas supply line is adjusted so as to be always the same as or higher than the pressure of the second space. The operating method of the sealing device according to claim 4 , wherein the dry gas supplied from the gas supply line is a gas having substantially the same component as air and having a humidity of 5% or less. how to drive.

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