JP4186320B2 - Synchrotron radiation mirror device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a radiation mirror apparatus.
[0002]
[Prior art]
When an electron moving at a speed close to the speed of light is bent in the traveling direction by a magnetic field or an electric field, an electromagnetic wave (light) called radiated light is emitted in the tangential direction of the orbit of the electron.
[0003]
FIG. 10 shows an example of synchrotron radiation generating means. Reference numeral 1 denotes a linear accelerator, and the linear accelerator 1 includes an electron generator 2 that emits electrons (charged particles) e and one end of the electron generator 2. And a high-frequency accelerator 4 that accelerates the electron e by applying a high frequency to the electron e moving inside the acceleration duct 3.
[0004]
One end of a curved tubular deflection duct 5 is connected to the other end of the acceleration duct 3, and the deflection duct 5 is provided with a deflection electromagnet 6 for bending the trajectory of electrons e moving inside the acceleration duct 3. .
[0005]
Reference numeral 7 denotes a synchrotron (electron storage ring), and the synchrotron 7 has an endless duct 8 for causing the electron e to form a circular orbit. The other end of the deflection duct 5 is connected.
[0006]
The bending portion of the endless duct 8 is provided with a deflecting electromagnet 9 for bending the trajectory of the electrons e moving inside the endless duct 8, and the inside of the endless duct 8 is moved to a required portion of the endless duct 8. A high frequency acceleration device 10 is provided that accelerates the electrons e by applying a high frequency to the electrons e.
[0007]
Further, the end portion of the endless duct 8 receives a radiation light beam S emitted by bending the traveling direction of the electrons e moving at a speed close to the speed of light in the end portion of the endless duct 8. One end of a beam line 11 for leading to the outside is connected, and the other end of the beam line 11 is provided with an experimental apparatus 12 for performing an experiment using the radiated light beam S as an irradiation light source.
[0008]
Furthermore, a beryllium window (not shown) is provided at the other end of the beam line 11 to keep the inside of the beam line 11 in a vacuum state.
[0009]
When the synchrotron radiation generating means shown in FIG. 10 emits the synchrotron beam S, the inside of the acceleration duct 3, the deflection duct 5, the endless duct 8, and the beam line 11 is depressurized to an ultra-high vacuum state, and the electron e Then, the electron e is emitted from the electron generator 2.
[0010]
The electrons e emitted from the electron generator 2 are accelerated by the high-frequency accelerator 4 and are incident on the endless duct 8 by being bent by the deflecting electromagnet 6.
[0011]
The electrons e incident on the endless duct 8 are accelerated by the high-frequency accelerator 10, and the trajectory is bent at each bending portion by the deflecting electromagnet 9, thereby radiating from the electrons e in the tangential direction of the trajectory of the electrons e. A light beam S is emitted.
[0012]
The radiated light beam S emitted from the curved portion at a predetermined location of the endless duct 8 is incident on the experimental apparatus 12 via the beam line 11.
[0013]
The radiated light beam S is a divergent light that includes an electromagnetic wave having a wavelength ranging from the visible region to the X-ray region, and spreads in the traveling direction on the orbit of the electron e that circulates the endless duct 8.
[0014]
Therefore, when the experiment apparatus 12 performs an experiment using electromagnetic waves in the X-ray region, a synchrotron radiation mirror device that collects the electromagnetic waves in the X-ray region included in the synchrotron radiation beam S is incorporated in the beam line 11. I am doing so.
[0015]
FIGS. 5 to 9 show an example of a conventional radiant light mirror device. The radiant light mirror device includes a long mirror 13, a swing holder 14 that holds both ends of the long mirror 13, A support holder 15 that pivotally supports the swing holder 14 so that the long mirror 13 can bend, a bending elastic body 16 that connects the swing holder 14 to each other, and the long mirror 13. A holder 14, a support holder 15, and a mirror chamber 17 in which a bending elastic body 16 is housed are provided.
[0016]
The long mirror 13 is formed by forming a silicon carbide (SiC) or silicon (Si) single crystal and silicon carbide into a square bar shape, and the upper surface is a reflection surface 18 that can reflect electromagnetic waves in the X-ray region. .
[0017]
The swing holder 14 is in contact with the vicinity of the left and right edges of the lower surface of the end of the long mirror 13 from below, and has a shape in which a gap is formed with respect to the long mirror 13 at the center in the width direction of the long mirror 13. The lower component member 19, the left and right side component members 20 whose one surface is in contact with the right side surface or the left side surface of the long mirror 13 and the lower end portion is bolted near the left and right edges of the lower component member 19, and the lower surface An upper constituent member 21 that faces the upper surface of the long mirror 13 and is bolted to the upper end portion of the side constituent member 20 near the left and right edges, and between the upper constituent member 21 and the upper surface of the long mirror 13. The presser member 22 is interposed, and a presser bolt 23 that is screwed into the upper component member 21 and presses the presser member 22 against the long mirror 13.
[0018]
When the end of the long mirror 13 is attached to the swing holder 14 or when the end of the long mirror 13 is detached from the swing holder 14, the upper component 21 with respect to the side component 20 The bolt fastening is released and the upper component 21 is removed.
[0019]
Further, a pivot shaft 24 extending in the width direction of the long mirror 13 is fitted into each of the side component members 20 so as to be coaxial with each other and located at the center in the thickness direction of the long mirror 13.
[0020]
Further, the lower component member 19 is provided with an elastic body receiving portion 25 protruding downward.
[0021]
The support holder 15 has a lower component 26 arranged immediately below the swing holder 14, one surface faces the right or left side of the swing holder 14, and a lower end near the left and right edges of the lower component 26. The left and right side component members 27 that are bolted and the upper component member 28 that is disposed immediately above the swing holder 14 and that is bolted to the upper end portion of the side component member 27 near the left and right edges. Yes.
[0022]
As described above, when the end of the long mirror 13 is attached to the swing holder 14 or when the end of the long mirror 13 is detached from the swing holder 14, the side component member 27 is used. The bolt fastening of the upper structural member 28 is released, and the upper structural member 28 is removed.
[0023]
The side component member 27 supports the pivot shaft 24 through a bearing 29.
[0024]
Two metallic round bars each having the same shape are applied to the bending elastic body 16.
[0025]
The bending elastic bodies 16 are arranged below the long mirror 13 so as to be substantially parallel to the reflecting surface 18 and in parallel with the long mirror width direction. Is inserted into a thrust bush 30 mounted on the elastic body receiving portion 25 of one swing holder 14 so as to allow minute movement in the axial direction, and the vicinity of the other end of each bending elastic body 16 is the other Is inserted into a thrust bush 30 mounted on the elastic body receiving portion 25 of the swing holder 14 so as to allow minute movement in the axial direction.
[0026]
Further, a snap ring (a slip-out preventing member) 50 for preventing the curving elastic body 16 from slipping out of the thrust bush 30 is attached to the end of each curving elastic body 16.
[0027]
The mirror chamber 17 in which the long mirror 13, the swing holder 14, the support holder 15, and the bending elastic body 16 are housed is formed so that one side can be opened as shown in FIG. The short pipes 31 and 32 extending substantially horizontally are provided at one end and the other end of the chamber 17. The one short pipe 31 has a beam line 11 connected to the endless duct 8 (see FIG. 10). The upstream portion of the radiated light in the traveling direction is flange-connected, and the other short tube 32 is flange-connected to the downstream portion of the beam line 11 connected to the experimental apparatus 12 in the radiated light traveling direction.
[0028]
Further, a bracket 34 for fixing the mirror chamber 17 to a pedestal 33 described later is fixed to one end outer portion and the other end outer portion of the mirror chamber 17.
[0029]
As shown in FIG. 9, the gantry 33 is arranged between a pedestal 35 installed on the floor of the building, a column member 36 erected on both ends of the pedestal 35, and the front and rear column members 36. The mirror chamber 17 includes a beam member 37 that is supported substantially horizontally at the middle portion in the vertical direction of both column members 36, and the mirror chamber 17 is a height adjustment bolt 38 that extends substantially vertically and is screwed into the bracket 34. Is mounted on the gantry 33 so that the lower end of the two abuts against the receiving seat 39 at the upper end of both column members 36.
[0030]
Position adjusting actuators 41 each including a rod 40 that protrudes substantially vertically upward and can be moved up and down by a stepping motor and a gear reduction mechanism are attached to a portion near one end and a portion near the other end of the beam member 37, respectively. .
[0031]
The rod 40 of the position adjusting actuator 41 penetrates the bottom of the mirror chamber 17 so as to be movable up and down, and the lower constituent member 26 of the support holder 15 described above is connected to the tip of both rods 40. A light wave such as a radiated light beam S traveling from one short tube 31 toward the inside of the mirror chamber 17 passes through a gap between one end of the long mirror 13 and the upper component member 21 of one swing holder 14. As described above, the light wave traveling from the inside of the mirror chamber 17 toward the other short tube 32 passes through the gap between the other end of the long mirror 13 and the upper component member 21 of the other swing holder 14. It has come to pass.
[0032]
Further, the casings of both the position adjusting actuators 41 respectively support both ends of the other beam members 42 disposed above the beam member 37 so as to be positioned in parallel to the beam member 37.
[0033]
A bending amount adjusting actuator 44 including a rod 43 that protrudes substantially vertically upward and can be moved up and down by a stepping motor and a gear mechanism is attached to an intermediate portion of the beam member 42.
[0034]
The rod 43 of the bending amount adjusting actuator 44 penetrates the bottom of the mirror chamber 17 so as to be movable up and down, and a displacement holder 47 is attached to the tip of the rod 43.
[0035]
The displacement holder 47 includes a short cylindrical upper displacement transmission member 45 and a lower displacement transmission member 46 extending substantially horizontally in a direction orthogonal to the bending elastic body 16 described above. The transmission member 45 can come into contact with the axial intermediate portion of the bending elastic body 16 from above, and the lower displacement transmission member 46 can come into contact with the axial intermediate portion of the bending elastic body 16 from below. It is like that.
[0036]
Further, in the rod 40 of each position adjusting actuator 41, a bellows 48 is loosely fitted in a portion located between the beam member 42 and the mirror chamber 17, and in the rod 43 of the bending amount adjusting actuator 44, A bellows 49 is loosely fitted in a portion located between the beam member 42 and the mirror chamber 17.
[0037]
The upper ends of the bellows 48 and 49 are fixed so as to be in close contact with the bottom of the mirror chamber 17, and the lower ends of the bellows 48 and 49 are fixed so as to be in close contact with the upper surface of the beam member 42. The bellows 48 and 49 prevent the outside air from entering the inside of the mirror chamber 17 so that the vacuum inside the mirror chamber 17 is maintained.
[0038]
When the electromagnetic wave in the X-ray region included in the radiated light beam S is collected by the radiated light mirror device shown in FIGS. 5 to 9, each position adjusting actuator 41 is appropriately operated, and one short tube The angle of the long mirror 13 is adjusted so that the radiation beam S traveling from 31 to the inside of the mirror chamber 17 can be obliquely incident on the reflecting surface 18 of the long mirror 13.
[0039]
Next, when the bending amount adjusting actuator 44 is operated to lower the displacement holder 47, the upper displacement transmission member 45 abuts against the central portion in the axial direction of the bending elastic body 16 to push down the portion, and both swing holders The long mirror 13 is curved so that the reflecting surface 18 has a concave curved surface shape.
[0040]
Thereby, the radiated light beam S traveling from the one short tube 31 toward the inside of the mirror chamber 17 passes through the gap between the one end of the long mirror 13 and the upper component member 21 of the one swing holder 14. The electromagnetic wave in the X-ray region included in the radiated light beam S is condensed into substantially parallel light by the reflecting surface 18 and enters the reflecting surface 18 of the long mirror 13 having a concave curved surface. An X-ray beam X is emitted from the other short tube 32 to the other short tube 32, and the X-ray beam X passes through the gap between the other end of the long mirror 13 and the upper component member 21 of the other swing holder 14. .
[0041]
Further, when the displacement holder 47 is raised from the position where it has been lowered by the bending amount adjusting actuator 44, the amount of depression of the bending elastic body 16 decreases. Rotates around the respective pivot shafts 24, and the reflecting surface 18 of the long mirror 13 returns to a shape close to a flat plate.
[0042]
[Problems to be solved by the invention]
In order to efficiently use the X-ray beam X, the reflecting surface 18 is arranged so that the X-ray beam X emitted from the reflecting surface 18 is condensed at a predetermined position downstream of the long mirror 13 in the beam traveling direction. It is desirable to set an ellipse or parabolic concave curved surface.
[0043]
However, in the above-described synchrotron radiation mirror device, the displacement holder 47 is fitted to the central portion in the axial direction of the two bending elastic bodies 16 in a uniform state over the entire length. The bending moment applied to each end portion of the long mirror 13 via the holder 14 becomes substantially equal, so that the reflection surface 18 of the long mirror 13 is set to a substantially circular curved surface.
[0044]
The present invention has been made in view of the above-described circumstances, and an object of the present invention is to provide a synchrotron radiation mirror device in which a reflecting surface can be a substantially elliptical or parabolic concave curved surface.
[0045]
[Means for Solving the Problems]
In order to achieve the above object, in the synchrotron radiation mirror device of the present invention, a long mirror that reflects an electromagnetic wave in the X-ray region included in the synchrotron beam incident on the reflecting surface as an X-ray beam, and the long mirror A swing holder for holding each end of the long mirror, a support holder for pivotally supporting each swing holder so that the long mirror can be curved, and along the reflective surface side of the long mirror or the back surface side of the reflective surface A bending elastic body which is arranged and inserted in the vicinity of both ends of the swinging holder so that a minute movement in the axial direction can be allowed, and is fitted into the bending elastic body at two locations and is attached to a long mirror. On the other hand, a displacement holder that can approach and separate is provided, and the fitting position of the displacement holder to the bending elastic body is set asymmetrically in the axial direction of the bending elastic body.
[0046]
In the synchrotron radiation mirror device of the present invention, the two positions asymmetric in the axial direction of the bending elastic body are moved close to and away from the long mirror by the displacement holder, and the long position is passed through the swinging holder. A bending moment having a different size is applied to each end of the mirror, and the reflecting surface of the long mirror is set to a substantially elliptical or parabolic concave curved surface.
[0047]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0048]
FIGS. 1 to 4 show an example of an embodiment of a radiation mirror device of the present invention. In the drawings, the same reference numerals as those in FIGS. 5 to 9 denote the same components.
[0049]
The radiation mirror apparatus includes a long mirror 13, a swing holder 14 that holds each end of the long mirror 13, a support holder 15 that pivotally supports each swing holder 14, and a long mirror 13. Two bending elastic bodies 16 which are arranged along the back surface side of the reflecting surface 18 and in which the portions near both ends are inserted into the elastic body receiving portion 25 of the swinging holder 14 and the long mirror 13. A possible displacement holder 51 is provided.
[0050]
The displacement holder 51 includes two lower fitting members 53 having curved grooves 52 fitted to the left and right bending elastic bodies 16 from below, and curved grooves 54 fitted to the left and right bending elastic bodies 16 from above. And an upper fitting member 55 that can be individually bolted to each of the lower fitting members 53, and the lower fitting members 53 pinned at predetermined intervals in the axial direction of the bending elastic body 16. It is comprised with the displacement transmission member 56 couple | bonded.
[0051]
The curved grooves 52 and 54 of the fitting members 53 and 55 are formed in a shape that linearly contacts the outer peripheral surface of the bending elastic body 16 at the center in the axial direction.
[0052]
Further, the fitting position of one fitting member 53, 55 to the bending elastic body 16 and the fitting position of the other fitting member 53, 55 to the bending elastic body 16 are the axis of the bending elastic body. The direction is set asymmetrically.
[0053]
Further, the displacement transmission member 56 is screwed at the longitudinal intermediate portion thereof to the upper end portion of the rod 43 of the bending amount adjusting actuator 44 (see FIG. 9), and the displacement holder 51 is attached to the long mirror 13 together with the rod 43. Are coming close to each other.
[0054]
When the electromagnetic wave in the X-ray region included in the radiated light beam S is collected as the X-ray beam X by the radiated light mirror device shown in FIGS. 1 to 4, the bending amount adjusting actuator 44 (FIG. 9). When the displacement holder 51 is lowered in the reference), the two asymmetrical portions in the axial direction of the bending elastic body 16 are pushed down as the displacement holder 51 is lowered, and both ends of the bending elastic bodies 16 and 16 are held. The two oscillating holders 14 and 14 bend the long mirror 13 around the pivot shaft 24 so that the reflecting surface 18 has a concave curved surface.
[0055]
At this time, the magnitude of the bending moment applied to the end of the long mirror 13 via one swinging holder 14 holding one end of the bending elastic body 16, 16, and the bending elastic body Since the magnitude of the bending moment applied to the end of the long mirror 13 via the other swinging holder 14 holding the other end of the 16, 16 is different, the reflecting surface 18 of the long mirror 13 is different. Is set to a substantially elliptical or parabolic concave curved surface.
[0056]
As a result, the radiated light beam S passes between one end of the long mirror 13 and the upper component member 21 of one of the swing holders 14 and is incident on the reflecting surface 18 of the long mirror 13, and radiated light. The electromagnetic wave in the X-ray region included in the beam S is condensed into substantially parallel light by the reflecting surface 18, and the X-ray beam X emitted from the reflecting surface 18 is changed between the other end of the long mirror 13 and the other fluctuation. It passes through the gap between the moving holder 14 and the upper component 21.
[0057]
Further, when the displacement holder 51 is lifted from the position where it has been lowered by the bending amount adjusting actuator 44, the two asymmetrical push-downs in the axial direction of the bending elastic bodies 16 and 16 are accompanied with the rise of the displacement holder 51. The amount is reduced, both the swinging holders 14 and 14 are rotated about the respective pivot shafts 24, and the reflecting surface 18 of the long mirror 13 returns to a shape close to a flat plate.
[0058]
As described above, in the synchrotron radiation mirror device shown in FIGS. 1 to 4, when the two asymmetrical portions in the axial direction of the bending elastic bodies 16 and 16 are pushed down by the displacement holder 51, the swinging holders 14 and 14 are interposed. Since bending moments having different sizes are applied to the respective end portions of the long mirror 13, the reflecting surface 18 of the long mirror 13 can be set to a substantially elliptical or parabolic concave curved surface, and thus X-ray It is possible to efficiently collect electromagnetic waves in the region.
[0059]
Further, since the rod 43 of the bending amount adjusting actuator 44 (see FIG. 9) is located at the center of the long mirror 13 in the longitudinal direction, the long mirror 13 and the mirror chamber 17 (see FIG. 9) are arranged in the longitudinal direction. Even when the dimensions are small, the distance between the front and rear rods 40 with respect to the rod 43 is equal, and accordingly, the bellows 49 attached to the bending amount adjusting actuator 44 and the bellows 48 attached to the position adjusting actuator 44 shown in FIG. Interference can be avoided.
[0060]
The radiation mirror device of the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the present invention.
[0061]
【The invention's effect】
As described above, according to the synchrotron radiation mirror device of the present invention, the two asymmetrical portions in the axial direction of the elastic body for bending, in which the portions near both ends are respectively inserted into the swing holder, are made into a long mirror by the displacement holder. The bending mirrors are moved close to and away from each other, and bending moments having different sizes are applied to the respective end portions of the long mirror through the swinging holder, so that the reflecting surface becomes a substantially elliptical or parabolic concave curved surface. Therefore, it is possible to obtain an excellent effect that the electromagnetic waves in the X-ray region included in the radiation light beam can be efficiently condensed as the X-ray beam.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an example of an embodiment of a radiation mirror device of the present invention.
FIG. 2 is a side view showing the concept of the radiation mirror apparatus related to FIG. 1;
FIG. 3 is a view taken in the direction of arrows III-III in FIG. 2;
4 is a view taken along arrow IV-IV in FIG. 3;
FIG. 5 is a conceptual diagram showing an example of a conventional radiation mirror device.
6 is a view taken along arrow VI-VI in FIG. 5;
7 is a view taken along arrow VII-VII in FIG. 5;
8 is a view taken along arrow VIII-VIII in FIG. 5;
9 is a conceptual diagram showing a beam line in which the synchrotron radiation mirror device shown in FIG. 5 is incorporated.
FIG. 10 is a conceptual diagram showing an example of emitted light generation means.
[Explanation of symbols]
13 Long mirror 14 Oscillating holder 15 Support holder 16 Bending elastic body 18 Reflecting surface 51 Displacement holder

Claims (1)

A long mirror that reflects an electromagnetic wave in the X-ray region contained in the radiation beam incident on the reflecting surface as an X-ray beam, a swing holder that holds each end of the long mirror, and a long mirror Are arranged along the reflection surface side of the long mirror or the back surface side of the reflection surface, and the portions near both ends are respectively axially directed to the oscillation holder. A bending elastic body comprising a bending elastic body inserted so as to allow a minute movement, and a displacement holder that is fitted to the bending elastic body at two locations and can be moved toward and away from the long mirror. A synchrotron radiation mirror device characterized in that a fitting position of the displacement holder to the body is set asymmetrically in the axial direction of the elastic body for bending.

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