JP4189178B2 - Semiconductor wafer storage container - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a semiconductor wafer storage container.
[0002]
[Prior art]
As a storage container for transporting and storing a semiconductor wafer (hereinafter simply referred to as a wafer), a cylindrical container body capable of storing a plurality of wafers in a stacked manner, and a cylinder covering the cylindrical part of the container body And a structure in which a screw is cut between the container main body and the lid body, and is attached by screwing the lid body onto the container main body (for example, USP 4,787, 508).
[0003]
The container described in the above-mentioned USP 4,787,508 has a structure in which, when a lid is attached to the container body, the tubular container body is covered with a cylindrical lid, and both are rotated by at least 360 ° or more. A non-slip rotlet is formed on the peripheral surface of the bottom of the container main body and the peripheral surface of the top of the lid body, which is formed of streak-like uneven grooves.
[0004]
[Problems to be solved by the invention]
When the container is attached to or detached from the container body, it is necessary to rotate both of them 360 degrees or more. Therefore, the attachment and detachment work between the container body and the cover is troublesome, and generally the diameter of the container body is determined by an operator. Since it is a size that is difficult to grip, it is easy to cause operational mistakes such as accidentally dropping the container body when the lid is attached and detaching and damaging the semiconductor. In addition, since there are a plurality of fine concave and convex grooves such as a rotlet, there is a problem that dust accumulates in the grooves and is difficult to remove easily. On the other hand, there is also a known container that allows the container body and the lid to be attached and detached by locking the locking claw and the locking hole. The protection performance was still insufficient.
[0005]
The present invention has been made in view of the above points, and provides a semiconductor wafer storage container having a structure in which a container body and a lid can be easily attached and detached, dust is less likely to accumulate, and external impacts are not easily transmitted to a wafer. Objective.
[0006]
[Means for Solving the Problems]
That is, the present invention
(1) A semiconductor wafer storage container comprising a container main body and a lid for closing the container main body,
The container body has a bottom plate, a wafer storage stand-shaped portion formed by rising from the top surface of the bottom plate, and a wafer storage space surrounded by a main body side wall portion rising above the inner side of the rising periphery of the wafer storage stand-shaped portion. A plurality of ribs projecting from the outer peripheral surface of the side wall portion, the lid body having a lid upper surface plate and a lid side wall portion depending from the lower surface of the upper surface plate, the lid side wall portion being a container When the lid is attached to the main body, the lid side wall portion covers the container main body side wall portion and the rib protruding from the outer peripheral surface of the side wall portion, and at least part of the rising periphery of the wafer storage platform. Formed into
While a locking piece having a locking claw at the upper end is erected from the bottom plate of the container body, a locking hole is formed at a position corresponding to the locking piece of the top plate of the lid, and the locking piece is The container main body and the lid body are detachably mounted by the engagement between the latching pieces and the latching holes by inserting the latching claw into the lid upper surface portion around the latching hole and
A semiconductor wafer characterized in that a gap is formed between the inner surface of the side wall of the lid body and the projecting edge of the rib projecting from the outer peripheral surface of the side wall of the container body when the lid is attached to the container body. Storage container,
(2) While having a notch in the lid side wall, a label attaching plate is provided at the position corresponding to the notch in the lid side wall when the container body is closed on the container side wall with the lid. The semiconductor wafer storage container according to (1), wherein the label attachment plate is fitted into the notch portion of the lid side wall when the lid is attached to the main body,
(3) The semiconductor wafer according to (1) or (2), wherein the container body bottom plate and the lid body top plate are formed in a rectangular shape, and the container body sidewall and the lid sidewall are formed in a cylindrical shape. Storage container,
Is the gist.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described with reference to the drawings.
FIG. 1 shows an embodiment of the present invention, FIG. 1 and FIG. 2 show a semiconductor wafer storage container 1 of the present invention, and FIGS. 3 to 6 show a container main body 2 constituting the container 1 of the present invention. Indicates the lid 3 respectively.
[0008]
The container main body 2 and the lid 3 constituting the storage container 1 of the present invention are preferably formed of conductive plastic. Examples of the conductive plastic include a plastic added with a conductive filler and a polymer alloy-treated plastic. Examples of the conductive filler include carbon black, graphite carbon, graphite, carbon fiber, metal powder, metal fiber, metal oxide powder, metal-coated inorganic fine powder, organic fine powder and fiber.
[0009]
As shown in FIGS. 3 to 6, the container main body 2 includes a bottom plate 4, a wafer storage table-like portion 5 formed by rising from the top surface of the bottom plate 4, and a rising peripheral edge 5 a of the wafer storage table-like part 5. The main body side wall portion 6 that rises upward from the inside is provided, and the space surrounded by the base portion 5 and the main body side wall portion 6 forms a wafer storage space. A plurality of ribs 7 extending in the vertical direction of the main body side wall 6 are formed on the outer peripheral surface of the main body side wall 6. The rib 7 increases the strength of the main body side wall 6. At the corner of the bottom plate 4 of the container body 2, a locking piece 9 having a locking claw 8 is provided.
[0010]
The main body side wall 6 is usually formed in a cylindrical shape in accordance with the disk-shaped wafer shape. The disk-shaped wafer has a nominal size of 5 inches, 6 inches, 8 inches, etc., and the side wall portion 6 is formed in a size corresponding to the size of the wafer to be stored. The body side wall 6 is provided with a notch 6a, and the side wall 6 above the notch 6a is provided with a notch 6b. The notch 6a serves as an insertion opening for the automatic machine arm when the semiconductor way is taken out. The notch 6b serves as an index of the upper limit position when a plurality of wafers are stacked and stored.
[0011]
The container body side wall 6 is provided with a label attaching plate 6c for attaching a wafer identification label or the like. As shown in FIG. 6, a plurality of ribs 10 and ring-shaped ribs 11 are provided on the back surface of the bottom plate 4 of the container body 2 to reinforce the bottom plate 4. A lip 12 is provided on the peripheral edge of the back surface side of the bottom plate 4 of the container body 2.
[0012]
As shown in FIGS. 7 to 9, the lid body 3 includes an upper surface plate 13 and a lid body side wall portion 14 depending from the lower surface of the upper surface plate 13. Locking holes 15 for locking the locking pieces 9 of the container body 2 are provided at the corners of the top plate 13 of the lid 3. The lid body side wall portion 14 is provided with a notch portion 14a, and when the lid body 3 is attached to the container body 2, the label attaching plate 6c provided on the side surface of the container body 2 is attached to the notch portion 14a. It is configured to fit. A plurality of ring-shaped ribs 16 for increasing the strength of the lid upper surface plate 13 are provided on the inner surface side of the lid upper surface plate 13. The lid side wall portion 14 is provided with a reinforcing portion 17 for preventing deformation and distortion of the side wall portion 14 due to an external force. The lid upper plate 13 is provided with reinforcing ribs 18 on the upper surface, and a lip 19 is formed on the periphery thereof (FIG. 10).
[0013]
The container main body side wall portion 6 and the lid body side wall portion 13 are usually formed in a cylindrical shape corresponding to the shape of the wafer. However, if the container main body bottom plate 4 and the lid upper surface plate 13 are formed in a rectangular shape, the lid upper surface plate 13 and the corner portion of the container main body bottom plate 4 can be easily gripped, so that the container 1 can be easily carried. Further, the stability of the container 1 is improved, and it is possible to place the container 1 horizontally as well as standing.
[0014]
When the lid 3 is mounted on the container body 2, the side wall 14 of the lid 3 covers the container body side wall 6 and the rib 7 projecting from the outer peripheral surface of the side wall 6. It is formed in a size that covers at least a part of the rising edge (the rising edge 5a) of the wafer storage platform 5 (FIGS. 1 and 2). The container body 2 and the lid body 3 are configured such that the locking piece 9 of the container body 2 is inserted into the locking hole 15 of the lid body, and the locking claw 8 is locked to the upper surface portion of the lid upper surface plate 13 around the locking hole 15. It is attached by letting. The lid 3 can be easily removed by releasing the locking by the locking claw 8.
[0015]
If one of the lip 12 at the peripheral edge of the back surface of the bottom plate 4 of the container body and the lip 19 at the peripheral edge of the top surface of the lid upper surface plate 13 is formed slightly inside the peripheral edge (in the illustrated example, The lip 12 is provided on the periphery of the back surface of the bottom plate 4 of the container main body, and the lip 19 is provided on the top surface 13 of the top plate 13 of the lid 3 slightly inside the periphery. It becomes.
[0016]
The container 1 of the present invention is used when a wafer is transported and stored. At this time, as shown in FIG. 11, first, a cushioning sheet 20 is laid on the wafer storage platform 5 of the container body 2. A plurality of wafers 22 are accommodated on the separator 21, the wafer 22, the separator 21, the wafer 22, the separator 21. At this time, the notch 6b provided on the upper portion of the notch 6a of the container body side wall 6 is the upper limit position for wafer storage. By placing the separator 21 and the cushioning sheet 20 on the uppermost wafer 21 and mounting the lid 3, the storage of the wafer 22 in the container 1 is completed.
[0017]
The ring-shaped rib 16 provided on the inner surface side of the lid upper surface plate 13 has a reinforcing function for the upper surface plate 13 as described above. However, when the plurality of wafers 22 are accommodated as shown in FIG. It also has the effect of preventing the rattling of the wafer by holding down.
[0018]
As shown in FIG. 11, when the lid 3 is attached to the container main body 2, the container 1 of the present invention has the protruding end edge 7a of the rib 7 provided on the container main body side wall 6 and the inner surface of the lid side wall 14. It is preferable that a gap is formed between the two sides. When such a gap is provided, even when a strong external force is applied to the lid side wall portion 14, the external force is not directly applied to the container body side wall portion 6, so that the protection of the wafer 22 is further improved.
[0019]
【The invention's effect】
As described above, the semiconductor wafer storage container of the present invention can be attached and detached only by engaging / disengaging the locking means with the container main body and the lid. Therefore, the container main body and the lid can be rotated 360 ° or more to open the lid. Since the mounting of the lid is easier than in a conventional container in which the body is attached / detached, there is less possibility of the wafer being accidentally dropped and damaged when the lid is attached / detached. When the lid is attached to the container main body, the lid side wall covers the container main body side wall and the rib protruding from the outer peripheral surface of the side wall, and at least part of the rising peripheral edge of the wafer storage platform is covered. Since it is formed in a size that covers it, even if an external force is applied to the lid side wall, the lid side wall is supported by the peripheral edge of the rising portion of the wafer storage and there is no risk of further deformation. Therefore, damage to the wafer due to external force can be prevented. Further, since the container of the present invention does not have a deep gap or a fine groove, there is no possibility that dust or the like will accumulate, and cleaning is easy.
[0020]
Further, when the lid is attached to the container body, the lid side wall portion is configured such that a gap is formed between the inner surface of the lid side wall and the projecting edge of the rib projecting from the outer peripheral surface of the container body side wall. Even when a strong external force is applied to the container body, the external force is not directly applied to the container body side wall 6, so that the protection of the wafer 21 is further improved.
[0021]
In addition to providing a notch in the lid side wall, a label attaching plate is provided at a position corresponding to the notch in the lid side wall of the container main body when the container main body is closed with the lid. When the lid is attached to the main body, if the label attaching plate is fitted into the notch portion of the lid side wall portion, the label indicating the type of wafer stored in the label attaching plate can be attached. In addition, the stored wafer can be identified before and after mounting the lid.
[0022]
Furthermore, if the container body bottom plate and the lid top plate are formed in a rectangular shape, and the container body side wall and the lid side wall are formed in a cylindrical shape, the container is easy to carry and the stability of the container is improved. There is an effect such that both vertical and horizontal storage is possible.
[Brief description of the drawings]
FIG. 1 is a front view of a container of the present invention.
FIG. 2 is a side view of the container of the present invention.
FIG. 3 is a front view of the container body.
FIG. 4 is a side view of the container body.
FIG. 5 is a plan view of the container body.
FIG. 6 is a bottom view of the container body.
FIG. 7 is a front view of the lid.
FIG. 8 is a side view of the lid.
FIG. 9 is a bottom view of the lid.
FIG. 10 is a plan view showing a state where a lid is attached to the container body.
11 is a longitudinal sectional view taken along line XI-XI in FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Semiconductor wafer storage container 2 Container main body 3 Cover body 4 Container main body bottom plate 5 Wafer storage stand-shaped part 5a Standing peripheral edge 6 Container main body side wall part 6c Label attaching plate 7 Rib 8 Locking claw 9 Locking piece 13 Lid upper surface plate 14 Lid side wall 14a Notch 15 Locking hole

Claims (3)

A semiconductor wafer storage container comprising a container body and a lid for closing the container body,
The container body has a bottom plate, a wafer storage space formed by rising from the top surface of the bottom surface plate, and a wafer storage space surrounded by a main body side wall rising from the inside of the rising periphery of the wafer storage platform. A plurality of ribs projecting from the outer peripheral surface of the side wall portion, the lid body includes a lid upper surface plate and a lid side wall portion depending from the lower surface of the upper surface plate, and the lid side wall portion is a container When the lid is attached to the main body, the lid side wall portion covers the container main body side wall portion, the rib protruding from the outer peripheral surface of the side wall portion, and covers at least a part of the rising periphery of the wafer storage platform. Formed into
While a locking piece having a locking claw at the upper end is erected from the bottom plate of the container body, a locking hole is formed at a position corresponding to the locking piece of the top surface plate of the lid, and the locking piece is locked into the locking hole. The container main body and the lid body are detachably mounted by the engagement between the latching piece and the latching hole by inserting the latching claw into the top surface of the lid body around the latching hole,
A semiconductor wafer characterized in that a gap is formed between the inner surface of the side wall of the lid body and the protruding edge of the rib protruding from the outer peripheral surface of the side wall of the container body when the lid is attached to the container body. Storage container.   While the lid side wall has a notch, when the container body is closed on the container body side wall with the lid, a label attaching plate is provided at the position corresponding to the notch on the lid side wall to cover the container body. The semiconductor wafer storage container according to claim 1, wherein the label attaching plate is fitted into the cutout portion of the lid side wall when the body is mounted.   The semiconductor wafer storage container according to claim 1 or 2, wherein the container main body bottom plate and the lid upper plate are formed in a rectangular shape, and the container main body side wall and the lid side wall are formed in a cylindrical shape.

Images