JP4192597B2 - Fine shape transfer method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a production method for mass production and reproduction of a display having a fine uneven shape on the surface, and in particular, the uneven shape is transferred from an original plate having an uneven shape of a diffraction grating, which is used when replicating a display having a diffraction grating pattern. The present invention relates to a method for producing a duplicate plate.
[0002]
[Prior art]
Conventionally, when a display having a diffraction grating pattern is replicated, a method of performing replication using a replica (stamper) obtained by imposing and transferring a plurality of concave and convex shapes of a diffraction grating of an original plate has been widely employed.
[0003]
As a process for producing an original display having a diffraction grating pattern by two-beam interference, for example, interference fringes by two-beam interference are successively exposed on the surface of the photosensitive material substrate by changing the pitch, direction and light intensity. The method of doing is proposed (for example, refer patent document 1).
[0004]
However, since such a master production process requires a lot of time, it is difficult to produce a stamper with a large area, and a method for accurately transferring a plurality of concave and convex shapes of the diffraction grating of the master is necessary. .
[0005]
As a method for transferring the concavo-convex shape of the original plate, there is a method of transferring the concavo-convex shape of the original plate by bringing the original plate into close contact with a thermoplastic resin and applying heat and pressure.
[0006]
However, with this method, it is difficult to fill the resin with the details of the unevenness, and the moldability is not sufficient, so that the precise uneven shape transfer cannot be performed.
[0007]
In addition, as another method, there is a method of transferring the concave / convex shape of the original by curing the resin by ultraviolet irradiation while the resin is in close contact with the original using a photo-curing resin or an ultraviolet-curing resin (for example, Patent Document 2). reference.).
[0008]
However, since the ultraviolet curable resin undergoes curing shrinkage when cured, if the molded film thickness is increased by this method, distortion due to curing shrinkage occurs, and fine cracks (microcracks) are generated.
[0009]
Further, if the curing shrinkage is large, the moldability becomes insufficient, and a fine uneven shape cannot be transferred and molded with high accuracy.
[0010]
[Patent Document 1]
Patent 02139127 [Patent Document 2]
Patent 027989597
FIG. 1 is a schematic view showing a cross section of an apparatus in a conventional multi-surface imposition method using an ultraviolet curable resin.
[0012]
In FIG. 1, an elevating head 2 that moves in the vertical direction with respect to the surface of the glass substrate 1 is disposed. On the surface of the elevating head 2 facing the glass substrate 1, a Ni original plate 3 having an uneven shape on the surface is attached.
[0013]
Here, the uneven shape on the surface of the Ni original plate shows the shape of a saw blade-shaped blazed diffraction grating, but the actual distance between the diffraction gratings is about 1 μm and is enlarged for convenience.
[0014]
The surface of the glass substrate 1 is subjected to silane coupling treatment 4 using a silane coupling agent.
[0015]
Silane coupling treatment is to improve the adhesion between glass and UV curable resin.Silane coupling agent has a reactive group that chemically bonds with inorganic material in the molecule and a chemical bond with organic material. It has two or more different reactive groups.
[0016]
For this reason, the glass which surface-treated with the silane coupling agent becomes very strong adhesion with the ultraviolet curable resin after hardening.
[0017]
On the surface of the glass substrate 1 subjected to the above surface treatment, an uncured ultraviolet curable resin 5 is dropped at a position where the Ni original plate 3 is lowered.
[0018]
Next, FIG. 2 shows a schematic diagram showing a cross section of a curing process by pressure bonding and ultraviolet irradiation in a conventional multi-face mounting method using an ultraviolet curable resin.
[0019]
The raising / lowering head 2 is lowered to the ultraviolet curable resin 5, the Ni original plate 3 is brought into close contact, the glass substrate 1 and the Ni original plate 3 are kept in a parallel state, and the ultraviolet ray 6 passing through the glass substrate 1 is irradiated. Harden.
[0020]
Here, a high-pressure mercury lamp is used as the ultraviolet light source used for the ultraviolet ray 6, and an optical system (collimator) that guides the inside of the fiber by a reflector and makes it parallel light at the fiber exit is arranged as parallel light. Irradiate.
[0021]
Further, as the irradiation range, since the same area as the Ni original plate is irradiated, the irradiation range is determined by arranging the mask after the parallel light.
[0022]
Next, FIG. 3 shows a schematic diagram showing a cross section of the peeling process in the conventional multi-face mounting method using an ultraviolet curable resin.
[0023]
Here, the ascending / descending head 2 and the Ni original plate 3 are raised, and the Ni original plate 3 is peeled off from the cured transfer pattern 7, so that the uneven shape of the Ni original plate 3 is transferred and formed on the transfer pattern 7.
[0024]
Next, FIG. 4 shows a schematic diagram showing a cross section of a moving step and a second ultraviolet curable resin dropping step in a conventional multi-face mounting method using an ultraviolet curable resin.
[0025]
The glass substrate 1 on which the transfer pattern 7 is formed is moved, and an uncured ultraviolet curable resin 8 is newly dropped onto the position of the Ni original plate 3 on the glass substrate 1.
[0026]
Next, FIG. 5 is a schematic diagram showing a cross section of a second crimping and curing process by ultraviolet irradiation in a conventional multi-face mounting method using an ultraviolet curable resin.
[0027]
Similar to the process shown in FIG. 2, the elevating head 2 is lowered to the ultraviolet curable resin 8, the Ni original plate 3 is brought into close contact, the glass substrate 1 and the Ni original plate 3 are kept in a parallel state, and ultraviolet rays that pass through the glass substrate 1 are transmitted. 9 is irradiated to cure the ultraviolet curable resin 8.
[0028]
Here, the ultraviolet light 9 is irradiated with the same parallel light as the ultraviolet light 6 shown in FIG.
[0029]
Next, FIG. 6 shows a schematic diagram showing a cross section of the second peeling step in the conventional multi-face mounting method using an ultraviolet curable resin.
[0030]
The ascending / descending head 2 and the Ni original plate 3 are raised, and the Ni original plate 3 is peeled from the cured transfer pattern 10, whereby the uneven shape of the Ni original plate 3 is transferred and formed on the transfer pattern 10.
[0031]
Through the steps described above, the transfer pattern 7 and the transfer pattern 10 that are transferred and formed by curing the ultraviolet curable resin on the surface of the glass substrate 1 are disposed adjacent to each other.
[0032]
Furthermore, by repeating the same process, a plurality of uneven shapes of the Ni original plate 3 can be arranged and transferred on the glass substrate.
[0033]
However, when transfer molding is performed in the above process, if the molded film thickness is increased, when the UV curable resin is cured, distortion occurs inside the resin due to curing shrinkage, and micro cracks occur. Resulting in.
[0034]
Further, if the curing shrinkage is large, the moldability becomes insufficient, and a fine uneven shape cannot be transferred and molded with high accuracy.
[0035]
[Problems to be solved by the invention]
As described above, as a conventional method, if the molding film thickness is increased, distortion due to curing shrinkage occurs, microcracks occur, moldability is not sufficient, and fine uneven shapes cannot be accurately transferred and molded. There was a problem.
[0036]
The present invention has been made to solve the above-described problems. The purpose of the present invention is to provide a step of applying a photo-curing resin to the surface of a flat transparent substrate and a flat master plate having a fine uneven shape. The step of gradually adhering to the photo-curing resin, placing the transparent substrate and the original plate close in parallel, and irradiating the transparent substrate from the opposite side of the original plate to cure the photo-curing resin, In a fine shape transfer method comprising a step of peeling from a transparent substrate, there is provided a transfer method capable of transferring and forming a fine concavo-convex shape with high accuracy while preventing generation of microcracks even when the molding film thickness is increased. It is in.
[0037]
[Means for Solving the Problems]
The invention described in claim 1
A step of applying a photocurable resin to the surface of a flat transparent substrate, a step of closely adhering a fine concavo-convex planar original plate to the photocurable resin, and arranging the transparent substrate and the original plate close to each other, and the transparent In a fine shape transfer method comprising a step of irradiating a substrate with a light beam from the side opposite to the original plate to cure the photo-curing resin and peeling the original plate from the transparent substrate, as a method of irradiating the light beam, a slit-shaped light beam is used. , The light irradiation position is moved in a direction substantially perpendicular to the slit direction, and the photo-curing resin is sequentially cured.
[0039]
The invention described in claim 2
A step of applying a photocurable resin to the surface of a flat transparent substrate, a step of closely adhering a fine concavo-convex planar original plate to the photocurable resin, and arranging the transparent substrate and the original plate close to each other, and the transparent In the fine shape transfer method comprising the steps of irradiating the substrate from the opposite side of the original and irradiating light to cure the photocurable resin, and peeling the original from the transparent substrate,
The method of irradiating the light beam is a fine shape transfer method in which a beam-like light beam is scanned and moved to sequentially cure the photocurable resin.
[0040]
The invention according to claim 3
3. The fine shape transfer method according to claim 1 or 2 , wherein the fine uneven shape of the original plate is a surface relief hologram.
[0041]
The invention according to claim 4
3. The fine shape transfer method according to claim 1 , wherein the fine uneven shape of the original plate is a diffraction grating.
[0042]
The invention described in claim 5
5. The fine shape transfer method according to claim 4 , wherein the diffraction grating is a saw blade blazed diffraction grating.
[0043]
The invention described in claim 6
3. The fine shape transfer method according to claim 1 , wherein the fine uneven shape of the original plate is a microlens array.
[0044]
The invention described in claim 7
The fine shape transfer method according to any one of claims 1 to 6 , wherein the transparent substrate is a glass substrate, and the surface of the glass substrate is subjected to sand erasing treatment or non-glare treatment. This is a transfer method.
[0045]
The invention according to claim 8 provides:
The fine shape transfer method according to any one of claims 1 to 7 , wherein the transparent substrate is a glass substrate, and the surface of the glass substrate is subjected to silane coupling treatment. This is a transfer method.
[0046]
The invention according to claim 9 is:
A plate having a fine shape produced by the fine shape transfer method according to any one of claims 1 to 8 is used as a duplicate plate, and a reverse fine shape of the fine shape is produced on a support. This is a feature of a fine shape transfer method.
[0047]
[Action]
Therefore, in the fine shape transfer method of the present invention, in order to cure the photo-curing resin, as a method of irradiating the light beam, irradiate a slit-shaped light beam, moved in a direction substantially perpendicular to the slit direction, By sequentially curing the photo-curing resin, an amount of uncured resin cured and shrunk into the slit-shaped cured part is supplied from the uncured part, distortion due to curing shrinkage is suppressed, and microcracks are not generated. Therefore, a fine shape can be transferred and molded with high accuracy.
[0048]
In addition, as a method of irradiating the light beam, a slit-shaped light beam is irradiated, the transparent substrate and the original plate are moved together in a direction substantially orthogonal to the slit direction, and the photo-curing resin is sequentially cured. However, the amount of uncured resin that has been cured and shrunk to the slit-shaped cured part is supplied from the uncured part, distortion due to curing shrinkage is suppressed, microcracks are not generated, and a fine shape is transferred and molded with high accuracy. Can do.
[0049]
Further, as a method of irradiating the light beam, the beam-shaped light beam is scanned and moved, and the photo-curing resin is sequentially cured, so that an amount of uncured resin that has been cured and shrunk into the beam-shaped cured portion is obtained. Supplied from an uncured portion, distortion due to curing shrinkage is suppressed, microcracks are not generated, and a fine shape can be transferred and molded with higher accuracy.
[0050]
In addition, since the fine uneven shape of the original plate is a surface relief hologram, a high spatial frequency surface relief hologram, which has been difficult to transfer with the conventional transfer method, can be obtained with high accuracy without a decrease in diffraction efficiency. Can be transfer molded.
[0051]
In addition, since the fine uneven shape of the original plate is a diffraction grating, a high spatial frequency diffraction grating, which has been difficult to transfer with the conventional transfer method, can be transferred with high accuracy without a reduction in diffraction efficiency. Can do.
[0052]
Furthermore, since the fine irregular shape of the original plate is a saw blade-shaped blazed diffraction grating, a saw blade-shaped blazed diffraction grating, which has been difficult to transfer with the conventional transfer method, is reduced in diffraction efficiency. Transfer molding with high accuracy.
[0053]
In addition, since the fine uneven shape of the original plate is a microlens array, the microlens array shape, which has been difficult to transfer by the conventional transfer method, can be transferred and molded with high accuracy without deformation.
[0054]
In addition, the transparent substrate is a glass substrate, and the surface of the glass substrate is subjected to sand erasing treatment or non-glare treatment, so that the transfer-cured photo-curing resin and the glass substrate can be firmly adhered.
[0055]
Further, the transparent substrate is a glass substrate, and the surface of the glass substrate is subjected to a silane coupling treatment, whereby the photo-curing resin and the glass substrate that have been transfer-molded can be more firmly adhered to each other.
[0056]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings, but the present invention is not limited thereto.
[0057]
FIG. 7 is a perspective view showing components in one embodiment of the fine shape transfer method according to the present invention.
[0058]
The molding surface of the non-glare glass substrate 11 uses non-glare (anti-glare) -treated glass, and is further subjected to silane coupling treatment.
[0059]
By the way, non-glare treatment is a treatment method in which the glass surface is dissolved with a chemical solution and the surface is finely roughened to prevent reflection of the surface of the glass. By this method, the glass surface is roughened and cured resin is used. Such treatment was performed to strengthen the adhesion of the glass.
[0060]
Further, as another method of roughening the glass surface, a method of spraying fine iron powder or sand on the glass surface to roughen the surface can be realized, and such a method is called a sand removal treatment.
[0061]
Next, the ultraviolet curable resin 12 is applied (dropped) on the surface of the non-glare glass substrate 11, and the lifting head 14 to which the Ni original plate 13 is attached is gradually lowered and placed close to the non-glare glass substrate 11 in parallel. .
[0062]
Next, the laser light oscillated from the He-Cd laser 15 whose wavelength of the oscillating light is ultraviolet light is reflected by the mirror 16 and enters the mirror of the X scanner 18 through the shutter 17.
[0063]
Further, the laser beam scanned by the X scanner 18 enters the mirror of the Y scanner 19 and scans in a direction orthogonal to the scanning direction of the X scanner 18.
[0064]
By the way, the fine unevenness | corrugation by the non-glare process of the surface of the non-glare glass substrate 11 is filled with the ultraviolet curable resin 12 apply | coated to the surface, and it becomes a transparent substrate apparently.
[0065]
Here, in FIG. 7, the non-glare glass substrate 11 and the Ni original plate 13 are illustrated as being separated from each other, but when actually irradiating the laser beam, the ultraviolet curable resin 12 and the Ni original plate 13 are in close contact with each other. is doing.
[0066]
Further, the distance between the Ni original plate 13 and the non-glare glass substrate 11 that are arranged close to each other is the thickness of the resin layer that is cured and molded.
[0067]
The above description is an embodiment in which a beam-shaped light beam is irradiated. However, it is possible to irradiate a slit-shaped light beam by using a cylindrical lens or irradiating a light beam through a slit.
[0068]
Next, FIG. 8 is a cross-sectional view showing components in one embodiment of the fine shape transfer method according to the present invention.
[0069]
The figure shows that the non-glare glass substrate 21 is subjected to a silane coupling treatment 22, an ultraviolet curable resin 23 is dropped, and an elevating head 25 to which an Ni original plate 24 is attached is disposed in close contact with the ultraviolet curable resin 23.
[0070]
Here, the ultraviolet rays 26 are moved while being irradiated from the side opposite to the surface of the non-glare glass substrate 21 where the ultraviolet curable resin 23 is dropped.
[0071]
The resin is cured at the portion irradiated with the ultraviolet ray 26 of the ultraviolet curable resin 23, and the range of the resin cured portion 27 is cured.
[0072]
Here, the shrinkage that occurs when the resin cured part 27 is cured is supplied as an uncured resin from the resin uncured part 28 around the resin cured part 27, so that the resin cured part 27 is cured without contraction. Can do.
[0073]
That is, by moving the ultraviolet ray 26, the uncured resin is supplied from the uncured portion 28 to the next, so that the entire ultraviolet curable resin 23 can be cured without contraction.
[0074]
Then, the Ni original plate 24 is peeled off from the non-glare glass substrate 21. At this time, the cured ultraviolet curable resin remains on the non-glare glass substrate 21.
Therefore, distortion due to curing shrinkage is suppressed, microcracks are not generated, and a fine shape can be transferred and molded with higher accuracy.
[0075]
Next, a replica plate (stamper) can be produced by conducting a conductive treatment on the surface of the non-glare glass substrate that has been resin-imposed by the steps described above, and further performing electroforming plating or chemical plating. .
[0076]
If a plurality of diffraction gratings or the like are preliminarily provided on the original plate, it is of course possible to produce a multifaceted duplicate plate.
[0077]
Next, an embodiment in which a diffraction grating or the like is produced using the duplicate plate produced as described above will be described.
For example, a transparent substrate or a transparent film is used as a support, and an ultraviolet curable resin is applied on the transparent substrate or transparent film, and the duplicate plate is adhered to the ultraviolet curable resin. And a diffraction grating etc. can be produced by hardening an ultraviolet curable resin by irradiating an ultraviolet-ray from the transparent substrate or the transparent film side, and peeling a replication plate.
[0078]
【The invention's effect】
As described above, according to the present invention, the step of applying a photocuring resin to the surface of a flat transparent substrate, and the flat master plate having a fine uneven shape are brought into close contact with the photocuring resin, and the transparent substrate In the fine shape transfer method comprising the steps of placing the original and the original, and the step of irradiating the transparent substrate from the opposite side of the original with light to cure the photocurable resin and peeling the original from the transparent substrate. As a method of irradiating the light beam, the slit-shaped light beam is irradiated, or the beam-shaped light beam is scanned and moved, and the photo-curing resin is sequentially cured, so that the slit-shaped or beam-shaped cured portion is applied. A method of transferring and molding a fine shape with higher accuracy by suppressing the distortion caused by curing shrinkage by supplying an amount of uncured resin that has been cured and shrunk from an uncured part, and without generating microcracks. It can be provided.
[0079]
[Brief description of the drawings]
FIG. 1 is a schematic view showing a cross section of an apparatus in a conventional multi-face mounting method using an ultraviolet curable resin.
FIG. 2 is a schematic diagram showing a cross-section of a curing process by pressure bonding and ultraviolet irradiation in a conventional multi-face mounting method using an ultraviolet curable resin.
FIG. 3 is a schematic view showing a cross-section of a peeling process in a conventional multi-face mounting method using an ultraviolet curable resin.
FIG. 4 is a schematic diagram showing a cross section of a moving step and a second ultraviolet curable resin dropping step in a conventional multi-face mounting method using an ultraviolet curable resin.
FIG. 5 is a schematic diagram showing a cross-section of a second crimping and curing process by ultraviolet irradiation in a conventional multi-face mounting method using an ultraviolet curable resin.
FIG. 6 is a schematic diagram showing a cross section of a second peeling step in a conventional multi-face mounting method using an ultraviolet curable resin.
FIG. 7 is a perspective view showing components in an embodiment of a fine shape transfer method according to the present invention.
FIG. 8 is a cross-sectional view showing components in an embodiment of a fine shape transfer method according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Glass substrate 2, 14, 25 ... Elevating head 3, 13, 24 ... Ni original plate 4, 22 ... Silane coupling process 5, 8, 12, 23 ... UV curable resin 6, 9, 26 ... Ultraviolet 7, 10, 10 ... Transfer pattern 11, 21 ... Non-glare glass substrate 15 ... He-Cd laser 16 ... Mirror 17 ... Shutter 18 ... X scanner 19 ... Y scanner 27 ... Resin cured part 28 ... Resin uncured part

Claims (9)

A step of applying a photocurable resin to the surface of a flat transparent substrate, a step of closely adhering a fine concavo-convex planar original plate to the photocurable resin, and arranging the transparent substrate and the original plate close to each other, and the transparent In the fine shape transfer method comprising the step of irradiating the substrate from the opposite side of the original and irradiating light to cure the photocurable resin, and peeling the original from the transparent substrate,
As a method for irradiating the light beam, a fine shape transfer method in which a slit-shaped light beam is irradiated, the irradiation position of the light beam is moved in a direction substantially orthogonal to the slit direction, and the photo-curing resin is sequentially cured. . A step of applying a photocurable resin to the surface of a flat transparent substrate, a step of closely adhering a fine concavo-convex planar original plate to the photocurable resin, and arranging the transparent substrate and the original plate close to each other, and the transparent In the fine shape transfer method comprising the step of irradiating the substrate from the opposite side of the original and irradiating light to cure the photocurable resin, and peeling the original from the transparent substrate,
As a method of irradiating the light beam, a fine shape transfer method in which a beam-shaped light beam is scanned and moved to sequentially cure the photocurable resin. 3. The fine shape transfer method according to claim 1 , wherein the fine uneven shape of the original plate is a surface relief hologram. 3. The fine shape transfer method according to claim 1 , wherein the fine uneven shape of the original plate is a diffraction grating. 5. The fine shape transfer method according to claim 4 , wherein the diffraction grating is a saw blade-shaped blazed diffraction grating. 3. The fine shape transfer method according to claim 1 or 2 , wherein the fine uneven shape of the original plate is a microlens array. The fine shape transfer method according to any one of claims 1 to 6 , wherein the transparent substrate is a glass substrate, and the surface of the glass substrate is subjected to sand erasing treatment or non-glare treatment. Transfer method. The fine shape transfer method according to any one of claims 1 to 7 , wherein the transparent substrate is a glass substrate, and a surface of the glass substrate is subjected to silane coupling treatment. Transcription method. A plate having a fine shape produced by the fine shape transfer method according to any one of claims 1 to 8 is used as a duplicate plate, and a reverse fine shape of the fine shape is produced on a support. A fine shape transfer method characterized.

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