JP4192690B2 - Luminescent display device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To suppress the secular degradation of a thin film transistor in a current light emitting element which is driven by thin film transistors. <P>SOLUTION: In the light emission display device, at least one of transistors constituting a pixel circuit is defined as a p-channel type transistor. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a light emitting device including a light emitting element such as an organic electroluminescence (hereinafter referred to as EL) element and a method for manufacturing the same.
[0002]
[Prior art]
The inventor of the present invention scrutinized the thin film transistor driving organic EL display element. As a result, the following was found.
[0003]
(1) In the organic EL display element driven by a thin film transistor, since the organic EL display element is a direct current element, direct current also flows through the thin film transistors inserted in series to control the organic EL display element.
[0004]
(2) Thin film transistors are classified into n-channel and p-channel types. The n-channel type and the p-channel type have very different aspects of deterioration with time.
[0005]
[Problems to be solved by the invention]
Accordingly, an object of the present invention is to suppress deterioration of a thin film transistor with time in a current light emitting element driven by the thin film transistor.
[0006]
[Means for Solving the Problems]
A first light-emitting display device of the present invention is a light-emitting display device including a scan line, a data line, and a pixel, and the pixel is controlled in conduction by a potential of the scan line. A transistor, a storage capacitor that holds an image signal supplied from the data line via the first transistor, a second transistor that controls conduction between the pixel electrode and the common electrode by the potential of the storage capacitor, A light-emitting element between the pixel electrode and the counter electrode, and at least one of the first transistor and the second transistor is a p-channel transistor.
[0007]
A second light-emitting display device of the present invention is a light-emitting display device including a scan line, a data line, and a pixel. The first light-emitting display device whose conduction is controlled by a potential of the scan line. A transistor, a storage capacitor that holds an image signal supplied from the data line via the first transistor, a second transistor that controls conduction between the pixel electrode and the common electrode by the potential of the storage capacitor, A light-emitting element between the pixel electrode and the counter electrode, and the second transistor is a p-channel transistor.
[0008]
A third light-emitting display device of the present invention is a light-emitting display device including a scan line, a data line, and a pixel, and the pixel is controlled in conduction by the potential of the scan line. A transistor, a light-emitting element between the pixel electrode and the counter electrode, a storage capacitor for holding an image signal supplied from the data line via the first transistor, and the pixel electrode and the common line And at least one of the first transistor and the second transistor is a p-channel transistor.
[0009]
A fourth light-emitting display device of the present invention is a light-emitting display device including a scan line, a data line, and a pixel, and the pixel is controlled in conduction by the potential of the scan line. A transistor, a light-emitting element between the pixel electrode and the counter electrode, a storage capacitor for holding an image signal supplied from the data line via the first transistor, and the pixel electrode and the common line And a second transistor inserted in series with the second transistor, wherein the second transistor is a p-channel transistor.
[0010]
A fifth display device of the present invention is a light-emitting display device including a scan line, a data line, and a pixel, and the pixel is a first transistor whose conduction is controlled by the potential of the scan line. A storage capacitor that holds an image signal supplied from the data line via the first transistor, a second transistor that controls conduction between the pixel electrode and the common electrode by the potential of the storage capacitor, A light emitting element between a pixel electrode and a counter electrode, wherein the first transistor and the second transistor are an n-channel transistor and a p-type transistor, respectively.
[0011]
A sixth light emitting display device of the present invention includes a substrate, a plurality of scanning lines provided on the substrate, a plurality of data lines provided on the substrate, the plurality of scanning lines, and the plurality of data. A plurality of pixels provided in a matrix by crossing lines, and a scanning line driving circuit provided on the substrate for outputting a scanning signal to the plurality of scanning lines. Each pixel includes a first transistor whose conduction is controlled by the scanning signal, a storage capacitor that holds an image signal supplied from the data line via the first transistor, and a pixel that is driven by the potential of the storage capacitor. A second transistor for controlling conduction between the electrode and the common electrode, and a light emitting element between the pixel electrode and the counter electrode, wherein at least one of the first transistor and the second transistor is p It is Yaneru type transistors, and wherein.
[0012]
In the above light-emitting display device, the scan side driver circuit preferably includes a transistor, and the transistor is preferably a thin film transistor together with the first transistor and the second transistor.
[0013]
In the above light-emitting display device, it is preferable that at least one of the first transistor and the second transistor and the thin film transistor included in the scanning side driver circuit are formed in the same process.
[0014]
A seventh light-emitting display device of the present invention includes a substrate, a plurality of scanning lines provided on the substrate, a plurality of data lines provided on the substrate, the plurality of scanning lines, and the plurality of data. A plurality of pixels provided in a matrix by crossing the lines, a scanning side driving circuit provided on the substrate for outputting a scanning signal to the plurality of scanning lines, and the plurality of data lines A data-side driving circuit provided on the substrate for outputting an image signal, wherein each of the plurality of pixels includes a first transistor whose conduction is controlled by the scanning signal, and the first transistor A storage capacitor for holding an image signal supplied from the data line via a transistor; a second transistor for controlling conduction between the pixel electrode and the common electrode by a potential of the storage capacitor; the pixel electrode and a counter electrode; Between Wherein the optical element, the at least one of the first transistor and the second transistor being a p-channel transistor, and wherein.
[0015]
In the above light-emitting display device, it is preferable that the data side driving circuit and the scanning side driving circuit include a transistor, and the transistor is a thin film transistor together with the first transistor and the second transistor.
[0016]
In the above light-emitting display device, the thin film transistor included in the scanning side driving circuit and the data side driving circuit and at least one of the first transistor and the second transistor are formed in the same process. It is preferable.
[0017]
An eighth light-emitting display device of the present invention includes a substrate, a plurality of scanning lines provided on the substrate, a plurality of data lines provided on the substrate, the plurality of scanning lines, and the plurality of data. A plurality of pixels provided in a matrix by crossing lines, and a driving circuit provided on the substrate for outputting signals to the plurality of scanning lines or the plurality of data lines, Each of the pixels includes a first transistor whose conduction is controlled by the scanning signal, a storage capacitor that holds an image signal supplied from the data line via the first transistor, and a potential of the storage capacitor A second transistor that controls conduction between the pixel electrode and the common electrode, and a light-emitting element between the pixel electrode and the counter electrode, and includes a small number of the first transistor and the second transistor. Both it One is a p-channel transistor, and wherein.
[0018]
In the above light-emitting display device, at least one of the first transistor and the second transistor is a p-channel thin film transistor, the driving circuit includes a thin film transistor, and the thin film transistor includes the p-channel thin film transistor, It is preferable to be formed by the same process.
[0019]
In the above light-emitting display device, the driving circuit includes a complementary thin film transistor, and the first transistor and the second transistor are an N-channel thin film transistor and a P-channel thin film transistor, respectively. And
[0020]
In the method for manufacturing the light emitting display device, an N-channel thin film transistor of the complementary thin film transistor is formed in the same process as the first transistor, and a P-channel thin film transistor of the complementary thin film transistor is formed with the second transistor. It is characterized by forming by the same process. According to this, a high-performance light-emitting display device with little deterioration with time can be provided without increasing the number of manufacturing steps.
[0021]
(1) Further, the present invention provides a current driven light emitting display device in which a plurality of scanning lines and a plurality of data lines are formed, and a thin film transistor and a current light emitting element are formed corresponding to each intersection of the scanning lines and the data lines. In the above, at least one of the thin film transistors is a p-channel thin film transistor.
[0022]
According to the above invention, the deterioration of the thin film transistor with time can be suppressed.
[0023]
(2) Further, according to the present invention, a plurality of scanning lines, a plurality of data lines, a common electrode, and a counter electrode are formed, and the first thin film transistor, the second thin film transistor, and the holding are provided corresponding to each intersection of the scanning line and the data line. A capacitor, a pixel electrode, and a current light emitting element are formed. The first thin film transistor controls conduction between the data line and the storage capacitor by the potential of the scanning line, and the second thin film transistor has a common electrode by the potential of the storage capacitor. The second thin film transistor is a p-channel thin film transistor in a current-driven light emitting display device that controls a current flowing through the current light emitting element between the pixel electrode and the counter electrode by controlling conduction between the second thin film transistor and the pixel electrode. Features.
[0024]
(3) Further, in the above invention, a drive circuit for driving the light emitting element is formed on the substrate together with the plurality of scanning lines, the plurality of data lines, the thin film transistor, and the current light emitting element. Thus, the p-channel thin film transistor is preferably formed in the same process as the thin film transistor in the driver circuit.
[0025]
In the above invention, the thin film transistor is preferably a polysilicon thin film transistor.
[0026]
Further, in the above invention, the driving circuit is composed of complementary thin film transistors, and the first thin film transistor and the N channel thin film transistor in the driving circuit are formed in the same process, and the second thin film transistor and the driving circuit are formed in the driving circuit. The p-channel thin film transistor is preferably formed by the same process.
[0027]
  According to this, it is possible to provide a high-performance light-emitting device that does not deteriorate with time without increasing the number of manufacturing steps.
  Furthermore, the light-emitting device of the present invention is a light-emitting device including a scan line, a data line, and a pixel, and the pixel includes a first transistor whose conduction state is controlled by a potential of the scan line; A second transistor whose conduction state is controlled according to an image signal supplied from the data line via the first transistor, and a pixel electrode and a counter electrode;Organic EL that does not emit light when the potential difference between the pixel electrode and the counter electrode is less than or equal to a threshold value, and emits light by direct current when the threshold value is exceededAn element, and depending on a conduction state of the second transistor,Organic ELWhen the amount of current supplied to the element is set and the pixel is turned off,A driving circuit for outputting a predetermined signal as the image signal to the data line; the predetermined signal is supplied to the gate electrode of the second transistor via the first transistor; The potential is a potential that does not completely turn off the second transistor, and the potential of the pixel electrode that is set by the resistance between the source and drain of the second transistor and the resistance value of the organic EL element, The potential difference with respect to the potential of the counter electrode is not more than the threshold value.It is characterized by.
  In the above light-emitting device, it is preferable that the light-emitting device further includes a common line, and the common line and the light-emitting element are electrically connected via the second transistor.
  In the above light-emitting device, even if a capacitor line is further included, the gate electrode of the second transistor is connected to the first electrode of the storage capacitor, and the second electrode of the storage capacitor is connected to the capacitor line. Good.
  In the above light-emitting device, the gate electrode of the second transistor may be connected to a first electrode of a storage capacitor, and the second electrode of the storage capacitor may be connected to a scan line adjacent to the scan line. .
[0028]
DETAILED DESCRIPTION OF THE INVENTION
(Overall structure of organic EL display element)
Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
As shown in FIG. 1, the central portion on the substrate 1 is a display unit. A data side drive circuit 3 that outputs an image signal to the data line 112 is configured on the upper side of the outer peripheral portion of the transparent substrate 1 in the drawing, and a scanning line 111 is formed on the left side in the drawing. Thus, a scanning side drive circuit 4 for outputting a scanning signal is configured. In these drive circuits 3 and 4, an N-type thin film transistor and a P-type thin film transistor constitute a complementary TFT, and this complementary thin film transistor includes a shiftless transistor circuit, a level shifter circuit, an analog switch circuit, and the like.
[0029]
On the transparent substrate 1, a plurality of scanning lines 111 and a plurality of data lines 112 extending in a direction intersecting with the extending direction of the scanning lines 111 are configured, and the data lines 112 and the scanning lines 111 are configured. Pixels 7 are formed in a matrix by crossing with.
[0030]
  Each pixel 7 includes a first thin film transistor (hereinafter referred to as a switching thin film transistor) 121 in which a scanning signal is supplied to a gate electrode 21 (first gate electrode) via a scanning line 111. One of the source / drain regions of the switching thin film transistor 121 is electrically connected to the data line 112, and the other source / drain region holds the potential.electrode113 is electrically connected. A common line 114 is arranged in parallel with the scanning line 111, and a storage capacitor 123 is formed between the common line 114 and the potential holding electrode 113. The common line is held at a constant potential. Therefore, when the switching thin film transistor 121 is selected by the scanning signal and turned on, an image signal is written from the data line 112 to the storage capacitor 123 via the switching thin film transistor.
[0031]
  A gate electrode of a second thin film transistor (hereinafter referred to as a current thin film transistor) 122 is electrically connected to the potential holding electrode 113, and one of the source / drain regions of the current thin film transistor 122 is electrically connected to the common line 114. On the other hand, the other source / drain region is electrically connected to one electrode 115 of the light emitting element 131. When the current thin film transistor 122 is turned on, the current of the common line 114 flows to the light emitting element 131 such as an organic EL display element through the current thin film transistor 122, and the light emitting element 131 emits light. In this configuration, one electrode of the storage capacitor is connected to the common line 114. However, instead of being connected to the common line 114, another capacitor line may be provided and connected to the capacitor line. Good. Further, one electrode of the storage capacitor may be connected to the adjacent gate line. Example 1
  Figure2These are the equivalent circuit schematics of the organic electroluminescent display element provided with the thin-film transistor based on Example 1 of this invention, FIG.3These are the drive voltage figure of an organic electroluminescent display element provided with the thin-film transistor which concerns on Example 1 of this invention, FIG.4FIG. 3 is a current-voltage characteristic diagram of the current thin film transistor according to the first embodiment of the invention.5These are the current-voltage characteristics figure of the organic electroluminescent display element which concerns on Example 1 of this invention.
[0032]
  Figure2, 111 is a scanning line, 112 is a data line, 113 is a holding electrode, 114 is a common line, 115 is a pixel electrode made of Al, 116 is a counter electrode made of ITO, 121 is a switching thin film transistor, and 122 is n Channel-type current thin film transistor, 123 is a storage capacitor, 131 isCounter electrodeOrganic EL display elements (hereinafter, referred to as “fixed organic EL display elements”) 13 and 141 that emit light by current flowing from 116 toward the pixel electrode 115 are current directions of the organic EL display elements.
[0033]
  Figure3, 211 is a scanning potential, 212 is a signal potential, 213 is a holding potential, 214 is a common potential, 215 is a pixel potential, and 216 is a counter potential. The figure3Shows only a part of each potential in order to explain each potential relationship. The potential of the scanning line 111 is the scanning potential 211, the potential of the data line 112 is the signal potential 212, the potential of the holding electrode 113 is the holding potential 213, the potential of the common line 114 is the common potential 214, and the potential of the pixel electrode 115 formed by Al. Is the pixel potential 215, and the potential of the counter electrode 116 formed of ITO (Indium Tin Oxide) corresponds to the counter potential 216. The figure3Is a partial schematic description of each signal potential.
[0034]
Reference numeral 221 denotes a period in which the pixel is in a display state, and current flows through the normal organic EL display element 131 to emit light. Reference numeral 222 denotes a period in which the pixel is in a non-display state. Does not flow and does not emit light.
[0035]
In FIG. 4, 31 is a current-voltage characteristic of the n-channel current thin film transistor 122 when the drain voltage is 4V, and 32 is a current-voltage characteristic of the n-channel current thin film transistor 122 when the drain voltage is 8V. In either drain voltage, when the gate voltage is low, the n-channel current thin film transistor 122 is turned off, a small drain current flows, the source-drain resistance becomes high resistance, and when the gate voltage is high, n It can be seen that the channel current thin film transistor 122 is turned on, a large drain current flows, and the resistance between the source and the drain becomes low.
[0036]
In FIG. 5, reference numeral 4 denotes current-voltage characteristics of the in-place organic EL display element 131. Here, the voltage represents the counter potential 216 with respect to the pixel potential 215, and the current represents the current flowing from the counter electrode 116 to the pixel electrode 115. The normal organic EL display element 131 is turned off below a certain threshold voltage, has high resistance, no current flows, and does not emit light. Above the threshold voltage, the transistor is turned on, and current flows and emits light with low resistance. Here, the threshold voltage is approximately 2V.
[0037]
The operation of the organic EL display element including the thin film transistor of this embodiment will be described with reference to FIGS. 2, 3, 4 and 5. FIG.
[0038]
The switching thin film transistor 121 controls conduction between the data line 112 and the holding electrode 113 by the potential of the scanning line 111. That is, the conduction between the signal potential 212 and the holding potential 213 is controlled by the scanning potential 211. Note that the switching thin film transistor 121 is an n-channel thin film transistor here, but may be a p-channel thin film transistor.
[0039]
In the period 221 in which the pixel is in a display state, the signal potential 212 is high and the high potential is held in the holding potential 213. In the period 222 in which the pixel is in the non-display state, the signal potential 212 is low and the low potential is held in the holding potential 213.
[0040]
  The n-channel current thin film transistor 122 is shown in FIG.4The conduction between the common line 114 and the pixel electrode 115 is controlled by the potential of the holding electrode 113. That is, the holding potential 213 causes the common potential 214 and the pixel potential.215Controls continuity with. Since the holding potential 213 is high for the period 221 in which the pixel is in the display state, the common line 114 and the pixel electrode 115 are electrically connected, and the holding potential is in the period 222 in which the pixel is in the non-display state. Since 213 has a low potential, the common line 114 and the pixel electrode 115 are disconnected.
[0041]
The organic EL display element 131 has the characteristics shown in FIG. 5, and during the period 221 in which the pixel is in a display state, a current flows between the pixel electrode 115 and the counter electrode 116, and the organic EL display element 131 emits light. In the period 222 in which the pixel is not displayed, no current flows and no light is emitted.
[0042]
6A is a cross-sectional view of a thin film transistor organic EL display element (pixel) according to an embodiment of the present invention, and FIG. 6B is a cross-sectional view of a thin film transistor organic EL display element (one pixel) according to an embodiment of the present invention. It is a top view. The cross section A-A ′ in FIG. 6A corresponds to the cross section A-A ′ in FIG.
[0043]
  Figure6 (a), 132 is a hole injection layer, 133 is an organic EL layer, and 151 is a resist.
[0044]
Here, regarding the switching thin film transistor 121 and the n-channel current thin film transistor 122, the structure and process of the low-temperature polysilicon thin film transistor used in the thin film transistor liquid crystal display element, that is, the top gate structure and the process having a maximum temperature of 600 degrees or less. Although used, other structures and processes may be used.
[0045]
The pixel electrode 115 made of Al, the counter electrode 116 made of ITO, the hole injection layer 132, and the organic EL layer 133 form an in-place organic EL display element 131. In this regular organic EL display element 131, the current direction 141 of the organic EL display element can be set from the counter electrode 116 made of ITO to the pixel electrode 115 made of Al. In addition, even if it is not the structure used here regarding the organic EL display element, as long as the direction of current 141 of the organic EL display element can be changed from the counter electrode to the pixel electrode, other structures may be used. It doesn't matter.
[0046]
Here, the hole injection layer 132 and the organic EL layer 133 are formed by an inkjet printing method using the resist 151 as a separation structure between the pixels, and the counter electrode 116 formed of ITO is formed by a sputtering method. Although formed, other methods may be used.
[0047]
In this embodiment, the common potential 214 is lower than the counter potential 216. The current thin film transistor is an n-channel current thin film transistor 122.
[0048]
  In the period 221 in which the pixel is in a display state, the n-channel current thin film transistor 122 is turned on. The current flowing through the normal organic EL display element 131, that is, the on-current of the n-channel current thin film transistor 122 is shown in FIG.4As shown in FIG. Here, the gate voltage is a potential difference between the holding potential 213 and the lower potential of the common potential 214 and the pixel potential 215. According to this embodiment, since the common potential 214 is lower than the pixel potential 215, the gate voltage is a potential difference between the holding potential 213 and the common potential 214. Since this potential difference is sufficiently large, a sufficiently large on-current can be obtained. Note that the on-current of the n-channel current thin film transistor 122 also depends on the drain voltage, but the conclusion here is not changed.
[0049]
Conversely, in order to obtain a required on-current, the holding potential 213 can be set to a lower potential, and the amplitude of the signal potential 212 and thus the amplitude of the scanning potential 211 can be reduced. That is, in the switching thin film transistor 121 and the n-channel current thin film transistor 122, it is possible to reduce the driving voltage without causing deterioration in image quality, abnormal operation, or a decrease in operable frequency.
Further, in this embodiment, the signal potential 212 for the pixel to be displayed is lower than the counter potential 216.
[0050]
As described above, in the period 221 in which the pixel is in the display state, the on-state current of the n-channel current thin film transistor 122 depends on the potential difference between the holding potential 213 and the common potential 214, and the potential difference between the holding potential 213 and the counter potential 216. Is not directly dependent on. Therefore, the holding potential 213, that is, the signal potential 212 for the pixel to be displayed can be set lower than the counter potential 216 while ensuring a sufficiently large on-current in the n-channel current thin film transistor 122. Thus, the amplitude of the signal potential 212 and the amplitude of the scanning potential 211 can be reduced. That is, in the switching thin film transistor 121 and the n-channel current thin film transistor 122, it is possible to reduce the driving voltage without causing deterioration in image quality, abnormal operation, or a decrease in operable frequency.
[0051]
  Further, in this embodiment, the signal potential 212 for the pixel to be in the non-display state is higher than the common potential 214. In the period 222 in which the pixel is in a non-display state, when the signal potential 212 is slightly higher than the common potential 214, the n-channel current thin film transistor 122 is not completely turned off. However, the resistance between the source and drain of the n-channel current thin film transistor 122 is4As shown in FIG. For this reason, the pixel potential 215 determined by dividing the common potential 214 and the counter potential 216 by the resistance value of the n-channel current thin film transistor 122 and the resistance value of the in-place organic EL display element 131 is the counter potential 216. The potential is close to.
[0052]
  The voltage applied to the in-place organic EL display element 131 is a potential difference between the pixel potential 215 and the counter potential 216. However, as shown in FIG. Does not emit light. Ie, in-placeYesBy using the threshold voltage of the EL display element 131, the signal potential 212 is slightly higher than the common potential 214, and the n-channel current thin film transistor 122 is not completely turned off. In both cases, the positive organic EL display element 131 can be prevented from emitting light.
[0053]
Here, by setting the signal potential 212 for the pixel in the non-display state to a higher potential than the common potential 214, the amplitude of the signal potential 212, and hence the amplitude of the scanning potential 211, can be reduced. . That is, in the switching thin film transistor 121 and the n-channel current thin film transistor 122, it is possible to reduce the driving voltage without causing deterioration in image quality, abnormal operation, or a decrease in operable frequency.
[0054]
  Note that the operation of the organic EL display device including the thin film transistor of this embodiment is not simple as described above, and operates based on more complicated voltage and current relationships. The explanation of is valid.
(Example 2)
  FIG. 7 is an equivalent circuit diagram of an organic EL display device including a thin film transistor according to Example 2 of the invention.8These are the drive voltage figure of the organic electroluminescent display element provided with the thin-film transistor which concerns on Example 2 of this invention, FIG.9FIG. 4 is a current-voltage characteristic diagram of the current thin film transistor according to the second embodiment of the present invention.10These are the current-voltage characteristics figure of the organic electroluminescent display element which concerns on Example 2 of this invention.
[0055]
  In FIG. 7, reference numeral 615 denotes a pixel electrode made of ITO, 616 denotes a counter electrode made of Al, 622 denotes a p-channel current thin film transistor, and 631 denotes a pixel electrode 615.Counter electrodeAn organic EL display element that emits light by current flowing through 616 (hereinafter referred to as an inverted organic EL display element). Reference numeral 641 denotes the current direction of the organic EL display element.2Is the opposite direction. Otherwise, Example 1 and figure above2It is the same.
[0056]
  In FIG. 8, the level of each potential is shown in FIG.3Is different. Otherwise, figure3It is the same.
[0057]
In FIG. 9, 81 is the current-voltage characteristic of the p-channel current thin film transistor 622 when the drain voltage is 4V, and 82 is the current-voltage characteristic of the p-channel current thin film transistor 622 when the drain voltage is 8V.
[0058]
In FIG. 10, 9 is the current-voltage characteristic of the inverted organic EL display element 631. The operation of the organic EL display device including the thin film transistor of this example is the same as that of Example 1 except that the current thin film transistor is a p-channel thin film transistor 622 and the potential relation related to the current thin film transistor is inverted. It is.
[0059]
  11A is a cross-sectional view of an organic EL display element (one pixel) provided with a thin film transistor according to an embodiment of the present invention, and FIG. 11B is a thin film transistor organic EL display element according to an embodiment 2 of the present invention. It is a top view of (one pixel). A cross-section A-A ′ of FIG.11This corresponds to the cross section A-A 'in (b).
[0060]
  Figure11 (a), 632 is a hole injection layer, and 633 is an organic EL layer. Otherwise, figure6 (a)It is the same. A reverse organic EL display element 631 is formed by the pixel electrode 615 made of ITO, the counter electrode 616 made of Al, the hole injection layer 632 and the organic EL layer 633. In the inverted organic EL display element 631, the current direction 641 of the organic EL display element can be changed from the pixel electrode 615 formed of ITO to the counter electrode 616 formed of Al.
[0061]
In this embodiment, the common potential 714 is higher than the counter potential 716. The current thin film transistor is a p-channel current thin film transistor 622.
[0062]
Furthermore, in this embodiment, the signal potential 712 for the pixel to be displayed is higher than the counter potential 716.
Further, in this embodiment, the signal potential 712 with respect to the pixel to be set in the non-display state is lower than the common potential 714.
[0063]
  All the effects of the thin film transistor organic EL display element of the present embodiment are the same as those of the first embodiment except that the current thin film transistor is a p-channel thin film transistor 622 and the potential relationship related to the current thin film transistor is inverted. is there.
[0064]
In this embodiment, the current thin film transistor 122 is a p-channel thin film transistor. With this configuration, deterioration with time of the current thin film transistor 122 can be significantly reduced. In addition, by using a p-channel type polysilicon thin film transistor, deterioration with time of the current thin film transistor 122 can be further reduced.
[0065]
FIG. 14 is a manufacturing process diagram of the current drive type light emitting display device including the thin film transistor according to the embodiment of the present invention. First, as shown in FIG. 14 (a), an amorphous silicon layer of 200 to 600 angstroms is formed on the entire surface of the substrate 1 and annealed with a laser or the like to polycrystallize the amorphous silicon. Form a layer. Thereafter, the polycrystalline silicon layer is patterned to form the silicon thin film 421 that becomes the source / drain / channel region of the switching thin film transistor 121, the first electrode 423 of the storage capacitor 123, and the source / drain / channel region of the current thin film transistor 122. A silicon thin film 422 is formed.
[0066]
Next, an insulating film 424 serving as a gate insulating film is formed over the silicon thin films 421 and 422 and the first electrode 423. Next, phosphorus (P) ions are selectively implanted into the first electrode 423 to reduce resistance. Next, as shown in FIG. 14B, gate electrodes 111 and 111 'made of a TaN layer are formed on the silicon thin films 421 and 422 via a gate insulating film.
[0067]
Next, a resist mask 42 is formed on the silicon layer 422 to be a current thin film transistor, and phosphorus (P) is ion-implanted by self-alignment using the gate electrode as a mask to form n-type source / drain regions in the silicon layer 421. Form. Next, as shown in FIG. 14C, a resist mask 412 ′ is formed on the first silicon layer 421 and the first electrode, and boron (self-aligned boron ( B) is ion-implanted to form p-type source / drain regions in the silicon layer 422. As described above, the switching thin film transistor 121 is formed by the n-channel impurity doping 411. At this time, the current thin film transistor 122 is protected by the resist mask 42 and the n-channel impurity doping 411 is not performed. Next, the current thin film transistor 122 is formed by the p-channel impurity doping 412.
[0068]
Although not shown, when a thin film transistor constituting a shift register, a sample hold circuit, or the like of a driving circuit unit that drives the switching transistor 121 is formed on the same substrate, it can be simultaneously formed by the same process as the above process. is there. The second electrode 425 of the storage capacitor is the same as the gate electrodes 111 and 111 '.
You may form with one material and may form with another material. Next, as shown in FIG. 14D, after forming the interlayer insulating film 43, after forming contact holes, electrode layers 426, 427, 428 and 429 made of aluminum or ITO are formed.
[0069]
  Next, after an interlayer insulating film 44 is formed and planarized, a contact hole is formed, and ITO 45 is formed at 1000 to 2000 angstroms, preferably about 1600 angstroms so that one electrode of the current thin film transistor is connected. Next, bank layers 46 and 47 having a thickness of 2.0 μm or more are partitioned and formed for each pixel region. Next, an organic EL layer 48 is formed in an area surrounded by the bank layers 46 and 47 by an inkjet method or the like. After forming the organic EL 48, aluminum lithium made of 6000 to 8000 angstroms is formed on the organic EL layer 48 as the counter electrode 49. Between the organic EL 48 and the counter electrode 496 (a)A hole injection layer may be provided as shown in FIG.
[0070]
Through the above-described steps, a high-performance thin film transistor-driven organic EL display element can be formed. Further, since polysilicon has a remarkably high carrier mobility compared to amorphous silicon, it can operate at high speed. In particular, in this embodiment, when the p-type current thin film transistor 122 and the n-type switching thin film transistor 121 are formed, the p-type and n-type thin film transistors of the complementary thin film transistors constituting the shift register, the sample hold circuit, etc. of the drive circuit are formed. Can be formed simultaneously using the above embodiments. According to this configuration, it is possible to obtain a configuration that reduces deterioration with time of the current thin film transistor 122 without an increase in the manufacturing process.
[0071]
As described above, in the first embodiment, the current thin film transistor is an n-channel type, and in the second embodiment, the current thin film transistor is a p-channel type. However, the deterioration with time of the p-channel type and the n-channel type thin film transistor is examined here. To do.
[0072]
FIG. 12 and FIG. 13 are diagrams showing the deterioration over time of n-channel and p-channel thin film transistors, particularly polysilicon thin film transistors, under the same voltage application conditions. 511 and 512 in FIG. 12 show transfer characteristics of the n-channel thin film transistor at Vd = 4V and Vd = 8V before voltage application. Reference numerals 521 and 522 denote transfer characteristics of the n-channel thin film transistor at Vg = 0 V, Vd = 15 V, Vd = 4 V, and Vd = 8 V after voltage application of about 1000 seconds.
[0073]
Reference numerals 811 and 812 in FIG. 13 indicate transfer characteristics of the p-channel thin film transistor at Vd = 4 V and Vd = 8 V before voltage application. Reference numerals 821 and 822 denote transfer characteristics of the p-channel thin film transistor at Vg = 0V, Vd = 15V, Vd = 4V, and Vd = 8V after voltage application of about 1000 seconds. Obviously, the p-channel thin film transistor has a smaller decrease in on-current and increase in off-current.
[0074]
Considering the difference in aging characteristics of the p-type and n-type thin film transistors shown in FIGS. 12 and 13, at least one of the switching thin film transistor and the current thin film transistor is formed of a p-channel thin film transistor, particularly a p-type polysilicon thin film transistor. As a result, deterioration with time can be suppressed. Furthermore, not only the current thin film transistor but also the switching thin film transistor is formed of a p-type thin film transistor, whereby the characteristics of the display element can be further maintained.
[0075]
Moreover, although the above-mentioned Example demonstrated using the organic EL display element as a light emitting element, it cannot be overemphasized that it is applicable not only to an organic EL display element but to an inorganic EL element or other current drive type light emitting elements. .
[0076]
(Industrial application fields)
The display device according to the present invention can be used as a display device including various current-driven light-emitting elements such as organic EL display elements and inorganic EL elements and switching elements such as thin film transistors for driving the light-emitting elements.
[Brief description of the drawings]
FIG. 1 is a block diagram showing a basic configuration of a display device to which the present invention is applied.
FIG. 2 is an equivalent circuit diagram of a display element including a thin film transistor according to the first embodiment of the invention.
FIG. 3 is a drive voltage diagram of a display element including a thin film transistor according to the first embodiment of the invention.
FIG. 4 is a current-voltage characteristic diagram of the current thin film transistor according to the first embodiment of the invention.
FIG. 5 is a current-voltage characteristic diagram of the organic EL display element according to Example 1 of the invention.
6A is a cross-sectional view of an organic EL display device including a thin film transistor according to Example 1 of the present invention, and FIG. 6B is a plan view of an organic EL display device including a thin film transistor according to Example 1 of the present invention. FIG.
FIG. 7 is an equivalent circuit diagram of an organic EL display device including a thin film transistor according to Example 2 of the invention.
FIG. 8 is a drive voltage diagram of an organic EL display device including a thin film transistor according to Example 2 of the invention.
FIG. 9 is a current-voltage characteristic diagram of the current thin film transistor according to the second embodiment of the invention.
10 is a current-voltage characteristic diagram of an organic EL display element according to Example 2 of the invention. FIG.
11A is a cross-sectional view of an organic EL display element including a thin film transistor according to Example 2 of the present invention, and FIG. 11B is a plan view of an organic EL display element including a thin film transistor according to Example 2 of the present invention. FIG.
FIG. 12 is a graph showing deterioration over time of an n-channel thin film transistor.
FIG. 13 shows the process of a p-channel thin film transistor.TimeIt is a figure which shows deterioration.
FIG. 14 is a manufacturing process diagram of an organic EL display element driven by a thin film transistor according to the present invention.
[Explanation of symbols]
111 scan lines
112 data lines
113Potential holding electrode
114Common line
A pixel electrode formed of 115 Al
116 Counter electrode made of ITO
121 switching thin film transistor
122 n-channel current thin film transistor
123 Retention capacity
131 In-place organic EL display element
132 Hole injection layer
133 Organic EL layer
141 Current direction of current light emitting device
151 resist
211 Scanning potential
212 Signal potential
213 Holding potential
214 Common potential
215 pixel potential
216 Counter potential
221 period when pixel is in display state
222 period during which pixels are not displayed
31 Current-voltage characteristics of an n-channel current thin film transistor when the drain voltage is 4V
32 Current-voltage characteristics of n-channel current thin film transistor when drain voltage is 8V
4 Current-voltage characteristics of in-place organic EL display elements
611 scan line
612 data line
613Potential holding electrode
614Common line
615 Pixel electrode made of ITO
Counter electrode made of 616 Al
621 Switching thin film transistor
622 p-channel current thin film transistor
623 Retention capacity
631 Reverse organic EL display element
632 Hole injection layer
633 Organic EL layer
641 Current direction of current light emitting device
651 resist
711 Scanning potential
712 Signal potential
713 Holding potential
714 Common potential
715 pixel potential
716 Counter potential
721 Period of pixel display state
722 Period in which pixels are not displayed
81 Current-voltage characteristics of p-channel current thin-film transistor when drain voltage is 4V
82 Current-voltage characteristics of p-channel current thin film transistor when drain voltage is 8V
9 Current-voltage characteristics of inverted organic EL display elements
511 Transfer characteristics of n-channel thin film transistor at Vd = 4 V before voltage application
512 Transfer characteristics of n-channel thin film transistor at Vd = 8 V before voltage application
521 Transfer characteristics of n-channel thin film transistor at Vd = 4 V after voltage application
522 Transfer characteristics of n-channel thin film transistor at Vd = 8V after voltage application
811 Transfer characteristics of p-channel thin film transistor at Vd = 4 V before voltage application
812 Transfer characteristics of p-channel thin film transistor at Vd = 8V before voltage application
821 Transfer characteristics of p-channel thin film transistor at Vd = 4V after voltage application
822 Transfer characteristics of p-channel thin film transistor at Vd = 8V after voltage application

Claims (4)

A light emitting device including a scanning line, a data line, and a pixel,
The pixel is
A first transistor whose conduction state is controlled by the potential of the scanning line;
A second transistor whose conduction state is controlled according to an image signal supplied from the data line via the first transistor;
Organic that is provided between the pixel electrode and the counter electrode, does not emit light when the potential difference between the pixel electrode and the counter electrode is below a threshold value, and emits light by a direct current when the threshold value is exceeded An EL element,
The amount of current supplied to the organic EL element is set according to the conduction state of the second transistor,
A drive circuit that outputs a predetermined signal to the data line as the image signal when the pixel is turned off ;
The predetermined signal is supplied to the gate electrode of the second transistor through the first transistor,
The potential of the predetermined signal is a potential that does not completely turn off the second transistor, and is set by the resistance between the source and drain of the second transistor and the resistance value of the organic EL element A light-emitting device, wherein a potential difference between an electrode potential and the counter electrode potential is equal to or less than the threshold value . The light-emitting device according to claim 1.
Including common lines,
The common line and the organic EL element are electrically connected via the second transistor;
A light emitting device characterized by the above. The light-emitting device according to claim 1 or 2,
In addition, including capacitance lines
A gate electrode of the second transistor is connected to a first electrode of a storage capacitor;
The second electrode of the storage capacitor is connected to the capacitor line;
A light emitting device characterized by the above. The light-emitting device according to claim 1 or 2,
A gate electrode of the second transistor is connected to a first electrode of a storage capacitor;
The second electrode of the storage capacitor is connected to a scanning line adjacent to the scanning line;
A light emitting device characterized by the above.

Images