JP4196150B2 - Manufacturing method of microlens array - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a microlens array, a manufacturing method thereof, and an optical device.
[0002]
BACKGROUND OF THE INVENTION
So far, a microlens array configured by arranging a plurality of minute lenses has been applied to, for example, a liquid crystal panel. A black matrix may be provided on the microlens array. The black matrix is formed by using a lithography technique. However, the alignment accuracy required for the formation of the black matrix has become stricter as the image quality is improved, and the conventional method cannot meet the requirement.
[0003]
The present invention solves such a conventional problem, and an object of the present invention is to provide a microlens array having a film formed at an accurate position, a manufacturing method thereof, and an optical apparatus.
[0004]
[Means for Solving the Problems]
(1) In the method for manufacturing a microlens array according to the present invention, a solution in which a solute is dissolved in a solvent is provided on a member having a plurality of convex curved surface portions and a concave portion between the convex curved surface portions. Forming a film by reducing at least the solute in the recess.
[0005]
According to the present invention, even if the solution is provided so as to cover the convex curved surface portion, the solution flows from the convex curved surface portion to the concave portion as the solvent decreases. Therefore, it is possible to easily avoid the convex curved surface portion and leave the solute in the concave portion, and it is possible to easily form a film in this region. In the present invention, the convex curved surface portion is a portion having a surface that can be a lens surface, and includes a polyhedron as long as the surface can be substantially regarded as a curved surface.
[0006]
(2) In this method of manufacturing a microlens array,
After forming the film in the concave portion, a light transmissive layer precursor is provided on the convex curved surface portion and the film, and the light transmission has a plurality of lens surfaces formed by transferring the shape of the convex curved surface portion. Forming a sex layer,
You may further include peeling the said light transmissive layer from the said member in which the said convex-curved surface part and the said recessed part were formed with the said film | membrane.
[0007]
According to this, the light transmissive layer becomes at least a part of the microlens array.
[0008]
(3) In this method of manufacturing a microlens array,
The member in which the convex curved surface portion and the concave portion are formed may be a light transmissive layer, and a surface of the convex curved surface portion may be a lens surface.
[0009]
According to this, the member in which the convex curved surface portion and the concave portion are formed becomes at least a part of the microlens array.
[0010]
(4) In this method of manufacturing a microlens array,
The surface of the convex curved surface portion may have a low affinity with the solution.
[0011]
According to this, the solution easily flows down from the convex curved surface portion to the concave portion.
[0012]
(5) In the manufacturing method of the microlens array,
The solute may be a light shielding material.
[0013]
(6) In the method of manufacturing the microlens array,
The solvent may be volatilized to deposit the solute in the recess.
[0014]
(7) In the method of manufacturing the microlens array,
The concave portion may be formed surrounding each convex curved surface portion.
[0015]
(8) The microlens array according to the present invention is manufactured by the above method.
[0016]
(9) The microlens array according to the present invention includes a light-transmitting layer in which a plurality of convex curved surface portions and a concave portion surrounding each convex curved surface portion are formed on the same side with the same material;
A film formed in the recess with a material different from that of the light transmissive layer;
Have
[0017]
According to the present invention, since the concave portion is formed so as to surround the convex curved surface portion, the film formed in the concave portion is formed at an accurate position with respect to the convex curved surface portion. In the present invention, the convex curved surface portion is a portion having a surface that can be a lens surface, and includes a polyhedron as long as the surface can be substantially regarded as a curved surface.
[0018]
(10) In this microlens array,
The film may be formed of a light shielding material.
[0019]
(11) An optical device according to the present invention includes the microlens array.
[0020]
(12) This optical device may further include a light source.
[0021]
(13) This optical apparatus may further include an image sensor.
[0022]
DETAILED DESCRIPTION OF THE INVENTION
Preferred embodiments of the present invention will be described below with reference to the drawings.
[0023]
(First embodiment)
FIG. 1A to FIG. 1D are diagrams for explaining a manufacturing method for the microlens array according to the first embodiment to which the present invention is applied.
[0024]
(Master)
FIG. 1A shows a master 10. The master 10 is used to transfer the shape to the light transmissive layer precursor 22 (see FIG. 2A). A plurality of convex curved surface portions 12 are formed on the master 10. The surface of the convex curved surface portion 12 may be any of a spherical surface, an aspherical surface (ellipsoidal surface, parabolic surface, etc.), and a cylindrical surface. The convex curved surface portion 12 has an inverted shape of the lens surface 28 formed in the light transmissive layer (see FIG. 2C).
[0025]
A recess 14 is formed in the master 10. The concave portion 14 is formed avoiding the convex curved surface portion 12. For example, a region between adjacent convex curved surface portions 12 is the concave portion 14. The concave portion 14 is formed so as to surround each convex curved surface portion 12. The recess 14 shown in FIG. 1A is formed by a flat bottom surface and a side surface that rises perpendicularly from the bottom surface. The surface of the convex curved surface portion 12 is formed continuously from the side surface of the concave portion 14.
[0026]
In this embodiment, a film 20 (see FIG. 1D) is provided in the recess 14. If the film 20 is made of a light shielding material, a black matrix can be formed in the light transmissive layer 26. As the light-shielding material, various materials can be applied as long as they are materials that do not transmit light and have durability. For example, a black dye or black pigment dissolved in a solvent together with a binder resin is used as the light shielding material. The solvent is not particularly limited to the type, and water or various organic solvents can be applied. Examples of the organic solvent include propylene glycol monomethyl ether acetate, propylene glycol monopropyl ether, methoxymethyl propionate, ethoxyethyl propionate, ethyl lactate, ethyl pyruvate, methyl amyl ketone, cyclohexanone, xylene, toluene, butyl acetate. One or a plurality of mixed solutions can be used.
[0027]
For example, as shown in FIG. 1B, a solution 16 in which a solute is dissolved in a solvent is provided on the master 10 (the surface on which the convex curved surface portion 12 is formed). The squeegee 18 may be used to provide the solution 16 in the concave portion 14 so as not to exceed the height of the convex curved surface portion 12. As shown in FIG. 1C, when the solution 16 is provided on the convex curved surface portion 12 and the concave portion 14, the solvent of the solution 16 is decreased as shown in FIG. The solvent may be removed. For example, the solvent is volatilized. Then, the film 20 is formed by leaving at least the solute in the solution 16 in the recess 14. It is preferable to leave the solute avoiding the convex curved surface portion 12. By doing so, the film 20 can be prevented from adhering to the lens surface 22 of the light transmissive layer 26. If the surface of the convex curved surface portion 12 has a property of low affinity with the solution 16, it is easy to form the film 20 avoiding this portion. The film 20 may be formed so as to completely fill the recess 14 or may be formed shallowly only at the lower part of the recess 14.
[0028]
(Light transmissive layer)
Next, as shown in FIG. 2A, at least a part of the shape of the master 10 is transferred to the light transmissive layer precursor 22. The light transmissive layer precursor 22 is preferably a liquid or a liquefiable substance. By being liquid, it becomes easy to fill the light transmissive layer precursor 22 between the convex curved surface portions 12. As the liquid substance, a substance curable by applying energy can be used, and as the liquefiable substance, a plastic substance can be used.
[0029]
The light transmissive layer precursor 22 is not particularly limited as long as it has the required characteristics such as light transmissive properties when the light transmissive layer 26 is formed, but is preferably a resin. . As the resin, one having energy curability or one having plasticity is easily obtained, which is preferable.
[0030]
It is desirable that the resin having energy curability be curable by applying at least one of light and heat. The use of light and heat can use a general-purpose exposure apparatus, a heating apparatus such as a baking furnace or a heater, and can reduce equipment costs. As the resin having energy curability, for example, an acrylic resin, an epoxy resin, a melamine resin, a polyimide resin, or the like can be used. In particular, an acrylic resin is suitable because it can be easily cured in a short time by irradiation with light by using various precursors and photosensitizers (photopolymerization initiators) on the market. Specific examples of the basic composition of the photocurable acrylic resin include prepolymers or oligomers, monomers, and photopolymerization initiators. Examples of the prepolymer or oligomer include acrylates such as epoxy acrylates, urethane acrylates, polyester acrylates, polyether acrylates, spiroacetal acrylates, epoxy methacrylates, urethane methacrylates, polyester methacrylates, and polyethers. Methacrylates such as methacrylates can be used.
[0031]
Examples of the monomer include 2-ethylhexyl acrylate, 2-ethylhexyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, N-vinyl-2-pyrrolidone, carbitol acrylate, tetrahydrofurfuryl acrylate, isobornyl acrylate, Monofunctional monomers such as dicyclopentenyl acrylate and 1,3-butanediol acrylate, 1,6-hexanediol diacrylate, 1,6-hexanediol dimethacrylate, neopentyl glycol diacrylate, neopentyl glycol dimethacrylate, ethylene Bifunctional monomers such as glycol diacrylate, polyethylene glycol diacrylate, pentaerythritol diacrylate, and trimethylo Propane triacrylate, trimethylol propane trimethacrylate, pentaerythritol triacrylate, polyfunctional monomers such as dipentaerythritol hexaacrylate available.
[0032]
Examples of the photopolymerization initiator include acetophenones such as 2,2-dimethoxy-2-phenylacetophenone, butylphenones such as α-hydroxyisobutylphenone and p-isopropyl-α-hydroxyisobutylphenone, and p-tert-butyl. Halogenated acetophenones such as dichloroacetophenone, p-tert-butyltrichloroacetophenone, α, α-dichloro-4-phenoxyacetophenone, benzophenones such as benzophenone, N, N-tetraethyl-4,4-diaminobenzophenone, benzyl, benzyl Benzyls such as dimethyl ketal, benzoins such as benzoin and benzoin alkyl ether, oximes such as 1-phenyl-1,2-propanedione-2- (o-ethoxycarbonyl) oxime, 2-methyl Thioxanthone, 2-xanthones such as chlorothioxanthone, Michler's ketone, radical generating compounds such as benzyl methyl ketal are available.
[0033]
If necessary, a compound such as amines may be added for the purpose of preventing curing inhibition by oxygen, or a solvent component may be added for the purpose of facilitating coating. The solvent component is not particularly limited, and various organic solvents such as propylene glycol monomethyl ether acetate, methoxymethyl propionate, ethoxyethyl propionate, ethyl lactate, ethyl pyruvate, methyl amyl ketone, etc. Is available. These substances are preferable because they have excellent releasability from silicon or quartz, which is excellent as a material of the master 10 in that high-precision etching is possible.
[0034]
As the resin having plasticity, for example, a resin having thermoplasticity such as a polycarbonate-based resin, a polymethyl methacrylate-based resin, and an amorphous polyolefin-based resin can be used. Such a resin is plasticized by heating above the softening point temperature and used as a liquid.
[0035]
The light transmissive layer precursor 22 is provided on the convex curved surface portion 12 of the master 10 as shown in FIG. Further, the light transmissive layer precursor 22 is also provided on the film 20 formed in the recess 14 of the master 10. Then, a step of spreading the light transmissive layer precursor 22 is performed. For example, the light-transmitting layer precursor 22 is spread to a predetermined area by bringing the master 10 and the substrate 24 into close contact via the light-transmitting layer precursor 22.
[0036]
The substrate 24 only needs to have at least a function required for spreading the light transmissive layer precursor 22. One surface of the substrate 24 may be flat, and in that case, the flat surface may be in close contact with the light transmissive layer precursor 22. When the substrate 24 is left in close contact with the light-transmitting layer 26, the substrate 24 satisfies optical properties such as light transmittance required for the microlens array and characteristics such as mechanical strength. It is not particularly limited as long as it is used. For example, it is possible to use quartz or glass, or a plastic substrate or film such as polycarbonate, polyarylate, polyethersulfone, polyethylene terephthalate, polymethyl methacrylate, or amorphous polyolefin. Is possible. If the substrate 24 is peeled off in a later step, the substrate 24 may not be light transmissive.
[0037]
If necessary, when the master 10 and the substrate 24 are brought into close contact with each other via the light transmissive layer precursor 22, the light transmissive layer precursor 22 is pressurized via at least one of the master 10 and the substrate 24. May be. By pressurizing, the time during which the light transmissive layer precursor 22 spreads can be shortened, so that workability is improved, and filling of the light transmissive layer precursor 22 between the convex curved surface portions 12 formed on the master 10 is achieved. It will be certain.
[0038]
In the example shown in FIG. 2A, the light-transmitting layer precursor 22 is placed on the master 10, and the substrate 24 and the master 10 are brought into close contact with each other. Instead of this method, the light-transmitting layer precursor 22 is placed on the substrate 24 and the master 10 is placed thereon, so that the light-transmitting layer precursor 22 is provided on the master 10, and the substrate 24 and the master 10 transmit light. The conductive layer precursor 22 may be spread out. Further, the light transmissive layer precursor 22 may be provided on both the master 10 and the substrate 24 in advance.
[0039]
Through the above steps, a layer made of the light transmissive layer precursor 22 is formed between the master 10 and the substrate 24 as shown in FIG. And the solidification process according to the light transmissive layer precursor 22 is performed. For example, if a photo-curable resin is used, light is irradiated under predetermined conditions. Note that when the light transmissive layer 26 is formed of a photocurable material, at least one of the substrate 24 and the master 10 needs to have light transmissive properties. Alternatively, when a resin that has been plasticized by heating to a temperature higher than the softening point is used as the light-transmitting layer precursor 22, it can be solidified by cooling. Thus, the light transmissive layer 26 can be formed.
[0040]
Next, as shown in FIG. 2C, the light transmissive layer 26 is peeled from the master 10. The film 20 is peeled off from the master 10 together with the light transmissive layer 26. It is preferable that the peelability between the light-transmitting layer 26 and the master 10 (particularly the convex curved surface portion 12) is high (for example, low affinity or low adhesion). Moreover, it is preferable that the peelability between the light transmitting layer 26 and the film 20 is low (for example, the affinity or the adhesiveness is high). Further, it is preferable that the peelability between the master 10 (particularly the recess 14) and the film 20 is high (for example, low affinity or low adhesion).
[0041]
Thus, the light transmissive layer 26 in which the film 20 is integrated can be obtained. The light transmissive layer 26 has a plurality of lens surfaces 28. The lens surface 28 has an inverted shape of the convex curved surface portion 12 described above. The lens surface 28 shown in FIG. 2C is a concave surface (concave lens surface). The lens formed by the lens surface 28 may be a spherical lens, an aspherical lens (lens such as an ellipsoid or a paraboloid), or a cylindrical lens.
[0042]
A film 20 formed of a material different from that of the light transmissive layer 26 surrounds each lens surface 28 on the side where the lens surface 28 is formed in the light transmissive layer 26. Specifically, the film 20 is formed on the periphery of each lens surface 28. If the film 20 is a light-shielding material, the layer made of the film 20 constitutes a black matrix.
[0043]
As shown in FIG. 3A, the second light transmissive layer precursor 32 may be provided on the light transmissive layer 26. Specifically, the second light transmitting layer precursor 32 is provided on the side where the lens surface 28 is formed. The second light transmissive layer precursor 32 may also be provided on the film 20. As the second light transmissive layer precursor 32, a material that can be selected as the light transmissive layer precursor 22 described above can be used. Then, as shown in FIG. 3B, a second light transmissive layer 36 may be formed. The substrate 34 may be used for the formation. Specifically, the description of the method for forming the light transmissive layer 26 using the substrate 24 is applicable.
[0044]
(Micro lens array)
As shown in FIG. 3B, the microlens array according to the present embodiment includes a light transmissive layer 26. The light transmissive layer 26 only needs to have a property of transmitting light, and may be transparent or colored. The light transmittance of the light transmissive layer 26 may not be 100% unless it is 0%. The light transmissive layer 26 has a plurality of lens surfaces 28. In the present embodiment, the lens surface 28 is a concave lens surface. The film 20 is integrally formed on the light transmissive layer 26. If the film 20 is made of a light-shielding material, it forms a black matrix.
[0045]
In the present embodiment, the microlens array has a second light transmissive layer 36. The second light transmissive layer 36 is formed in close contact with the lens surface 28 of the light transmissive layer 26. The lens surface 28 is also an interface between the first and light transmissive layers 26 and 36. When the above-described method is applied to the manufacturing method, the microlens array has a configuration obtained as a result. The present invention is not limited to the above embodiment, and various modifications can be made. Hereinafter, other embodiments will be described.
[0046]
(Second Embodiment)
FIG. 4A to FIG. 4D are views for explaining a method for manufacturing a microlens array according to a second embodiment to which the present invention is applied. In the present embodiment, a light transmissive layer 40 shown in FIG. 4A is prepared. The light transmissive layer 40 has a convex curved surface portion 42 and a concave portion 44. The shapes of the convex curved surface portion 42 and the concave portion 44 correspond to the contents of the convex curved surface portion 12 and the concave portion 14 of the master 10 described in the first embodiment. The material constituting the light transmissive layer 40 is not particularly limited as long as it satisfies optical properties such as light transmittance required for the microlens array and characteristics such as mechanical strength. For example, the light transmissive layer 40 may be formed of a material that can be selected as the light transmissive layer precursor 22 described above, or a substrate that can be selected as the substrate 24 described above may be used as the light transmissive layer 40.
[0047]
And the film | membrane 46 is formed in the recessed part 44 through the process shown to FIG. 4 (B)-FIG.4 (D). The details of this process are the same as the process of forming the film 20 in the recess 14 in the first embodiment (see FIGS. 1B to 1D).
[0048]
In this way, the microlens array shown in FIG. 4D can be manufactured. The microlens array includes a light transmissive layer 40 in which a plurality of convex curved surface portions 42 and a concave portion 44 surrounding each curved surface portion 42 are formed of the same material and on the same side. Here, the convex curved surface portion 42 is formed by a lens surface 48. The surface of the convex curved surface portion 42 includes a polyhedron if it can be substantially regarded as a curved surface. A film 46 is formed in the recess 44. If the film 46 is formed of a light shielding material, the film 46 forms a black matrix. That is, the black matrix is integrally provided in the microlens array according to the present embodiment.
[0049]
Other contents correspond to the contents described in the first embodiment. Also in this embodiment, the effect described in the first embodiment can be achieved.
[0050]
(Third embodiment)
FIG. 5 is a diagram for explaining an optical device according to a third embodiment to which the present invention is applied. This optical device is a liquid crystal panel including a microlens array. The microlens array has the light transmissive layer 40 described in the second embodiment (see FIGS. 4A to 4D). The light transmissive layer 40 has a plurality of convex curved surface portions 42, and a film 46 is integrally formed. A substrate 50 is provided on the light-transmissive layer 40 on the convex curved surface portion 42 side. The substrate 50 is a part of the liquid crystal panel. The substrate 50 is provided on the light transmissive layer 40 via a light transmissive layer (in this case, an adhesive layer) 52.
[0051]
It can also be said that the lens surface 48 serving as the surface of each convex bent portion 42 is an interface between the light-transmitting layer 40 and the medium outside thereof (light-transmitting layer 52). In the present embodiment, the light transmissive layer 40 is disposed with the concave surface (concave lens surface) of the lens surface 48 facing the light source. Refractive index of light transmissive layers 40 and 52 (for example, absolute refractive index as a refractive index with respect to vacuum) n₁, N₂Is
n₂<N₁
Have the relationship. By having this relationship, the light incident on the light transmissive layer 52 from the light transmissive layer 40 is incident on the concave surface of the lens surface 48 and away from the normal line of the lens surface 48 (direction approaching the optical axis). Refract.
[0052]
Such a microlens array is attached to the liquid crystal panel. When the microlens array is incorporated in an optical device that displays an image with a plurality of pixels, each lens surface 48 is arranged to correspond to each pixel (sub-pixel in the case of color display). The liquid crystal panel includes a substrate 50 and a substrate (TFT substrate) 54. A common electrode 56 and an alignment film 58 are formed on the substrate 50. An individual electrode 60 and a thin film transistor 62 are provided on the substrate 54, and an alignment film 64 is formed thereon. A liquid crystal 66 is sealed between the alignment films 58 and 64, and the liquid crystal 66 is driven by a voltage controlled by the thin film transistor 62.
[0053]
(Fourth embodiment)
FIG. 6 is a diagram showing an imaging apparatus as an example of an optical apparatus according to the fourth embodiment to which the present invention is applied. The imaging device has an imaging element (image sensor). For example, in the case of a two-dimensional image sensor, a light receiving unit (for example, a photodiode) 70 is provided corresponding to each of a plurality of pixels. If it is a CCD (Charge Coupled Device) type image pickup device, it has a transfer section 72 and transfers charges from the light receiving section 70 of each pixel at high speed. A color filter 74 is provided in the color image sensor.
[0054]
A microlens array to which the present invention is applied is attached to this image sensor. The microlens array has a light transmissive layer 40 to which the contents described in the second embodiment (see FIG. 4D) correspond. According to the present embodiment, a lot of light is collected and incident on the light receiving unit 70, so that a clear image can be generated. Detailed operational effects are as described in the second embodiment.
[0055]
(Fifth embodiment)
FIG. 7 is a diagram showing an optical device according to a fifth embodiment to which the present invention is applied. This optical device is a projection display device (liquid crystal projector).
[0056]
The optical device 100 includes a light source 102 and a plurality of liquid crystal panels 104, 106, and 108. The liquid crystal panels 104, 106, and 108 are respectively a liquid crystal light valve (for red) corresponding to red (liquid crystal light shutter array), a liquid crystal light valve (for green) corresponding to green (liquid crystal light shutter array), and blue (For blue) liquid crystal light valve (liquid crystal light shutter array).
[0057]
A microlens array (not shown) is attached to the liquid crystal panels 104, 106, and 108. The contents described in any of the embodiments correspond to the microlens array.
[0058]
The optical device 100 includes an illumination optical system including a plurality of integrator lenses, a color separation optical system (light guide optical system) including a plurality of dichroic mirrors, a dichroic mirror surface 110 that reflects only red light, and blue light. A dichroic prism (color combining optical system) 114 on which a dichroic mirror surface 112 that reflects only the light is formed, and a projection lens (projection optical system) 116.
[0059]
The illumination optical system includes integrator lenses 118 and 120. The color separation optical system includes mirrors 122, 124, and 126, a dichroic mirror 128 that reflects blue light and green light (transmits only red light), a dichroic mirror 130 that reflects only green light, and a dichroic that reflects only blue light. A mirror (or a mirror that reflects blue light) 132 and condenser lenses 134, 136, 138, 140, and 142 are included.
[0060]
A first polarizing plate (not shown) is bonded to the incident surface side of the liquid crystal panel 104 (the surface side where the microlens substrate is located, that is, the side opposite to the dichroic prism 114), and the liquid crystal panel exit surface side (microlens) A second polarizing plate (not shown) is bonded to the surface facing the substrate, that is, the dichroic prism 114 side. The liquid crystal panels 106 and 108 have the same configuration as the liquid crystal panel 104. These liquid crystal panels 104, 106 and 108 are connected to a drive circuit (not shown).
[0061]
In the optical device 100, the dichroic prism 114 and the projection lens 116 constitute an optical block 144. The optical block 144 and the liquid crystal panels 104, 106, and 108 fixedly installed with respect to the dichroic prism 114 constitute a display unit 146.
[0062]
Hereinafter, the operation of the optical device 100 will be described. White light (white light flux) emitted from the light source 102 passes through the integrator lenses 118 and 120. The light intensity (luminance distribution) of the white light is made uniform by the integrator lenses 118 and 120. The white light transmitted through the integrator lenses 118 and 120 is reflected by the mirror 122, and blue light (B) and green light (G) of the reflected light are respectively reflected by the dichroic mirror 128 and red light (R). Passes through the dichroic mirror 128. The red light transmitted through the dichroic mirror 128 is reflected by the mirror 124, and the reflected light is shaped by the condenser lens 134 and enters the red liquid crystal panel 104. Green light out of blue light and green light reflected by the dichroic mirror 128 is reflected by the dichroic mirror 130, and the blue light is transmitted through the dichroic mirror 130. The green light reflected by the dichroic mirror 130 is shaped by the condenser lens 136 and enters the green liquid crystal panel 106. The blue light transmitted through the dichroic mirror 130 is reflected by the dichroic mirror (or mirror) 132, and the reflected light is reflected by the mirror 126. The blue light is shaped by the condenser lenses 138, 140, and 142 and is incident on the blue liquid crystal panel.
[0063]
As described above, the white light emitted from the light source 102 is separated into three primary colors of red, green, and blue by the color separation optical system, and is guided and incident on the corresponding liquid crystal panel. At this time, each pixel (thin film transistor and pixel electrode connected thereto) of the liquid crystal panel included in the liquid crystal panel 104 is subjected to switching control (on / off) by a drive circuit (drive means) that operates based on an image signal for red. ), That is, modulated. Similarly, green light and blue light enter the liquid crystal panels 106 and 108, respectively, and are modulated by the respective liquid crystal panels, thereby forming a green image and a blue image. At this time, each pixel of the liquid crystal panel included in the liquid crystal panel 106 is switching-controlled by a drive circuit that operates based on the green image signal, and each pixel of the liquid crystal panel included in the liquid crystal panel 108 is converted into a blue image signal. Switching control is performed by a drive circuit that operates based on the above. Thereby, the red light, the green light, and the blue light are respectively modulated by the liquid crystal panels 104, 106, and 108, and an image for red, an image for green, and an image for blue are formed, respectively.
[0064]
The red image formed by the liquid crystal panel 104, that is, red light from the liquid crystal panel 104, enters the dichroic prism 114 from the surface 148, is reflected by the dichroic mirror surface 110, is transmitted through the dichroic mirror surface 112, and is emitted. The light exits from the surface 150. A green image formed by the liquid crystal panel 106, that is, green light from the liquid crystal panel 106 enters the dichroic prism 114 from the surface 152, passes through the dichroic mirror surfaces 110 and 112, and exits from the exit surface 150. . The blue image formed by the liquid crystal panel 108, that is, the blue light from the liquid crystal panel 108 is incident on the dichroic prism 114 from the surface 156, reflected by the dichroic mirror surface 112, transmitted through the dichroic mirror surface 110, and emitted. The light exits from the surface 150.
[0065]
As described above, the light of each color from the liquid crystal panels 104, 106 and 108, that is, the respective images formed by the liquid crystal panels 104, 106 and 108 are combined by the dichroic prism 114, thereby forming a color image. This image is projected (enlarged projection) onto the screen 154 installed at a predetermined position by the projection lens 116.
[Brief description of the drawings]
FIG. 1A to FIG. 1D are diagrams for explaining a method for manufacturing a microlens array according to a first embodiment to which the present invention is applied.
FIGS. 2A to 2C are views for explaining a method of manufacturing a microlens array according to a first embodiment to which the present invention is applied.
FIGS. 3A to 3B are diagrams illustrating a method for manufacturing a microlens array according to a first embodiment to which the present invention is applied. FIGS.
FIGS. 4A to 4D are views for explaining a method of manufacturing a microlens array according to a second embodiment to which the present invention is applied.
FIG. 5 is a diagram showing an optical apparatus according to a third embodiment to which the present invention is applied.
FIG. 6 is a diagram showing an optical apparatus according to a fourth embodiment to which the present invention is applied.
FIG. 7 is a diagram showing an optical apparatus according to a fifth embodiment to which the present invention is applied.
[Explanation of symbols]
10 Master disc
12 Convex surface
14 Recess
16 solutions
20 membranes
22 Light transmissive layer precursor
26 Light transmissive layer
28 Lens surface
40 Light transmissive layer
42 Convex surface
44 recess
46 Membrane
48 Lens surface

Claims (6)

A film in which a solute is dissolved in a solvent is provided on a member having a plurality of convex curved surface portions and concave portions between the plurality of convex curved surface portions, and the solvent is reduced to leave at least the solute in the concave portions. Forming a step;
A first light-transmitting layer precursor is provided on the plurality of convex curved surface portions and the film, and the lens surface includes a plurality of concave curved surface portions formed by transferring the shape of the plurality of convex curved surface portions. Forming a first light transmissive layer;
Peeling the first light-transmitting layer together with the film from the member;
Providing a second light transmissive precursor on the plurality of concave curved surface portions and the film of the first light transmissive layer, and forming a second light transmissive layer;
A method of manufacturing a microlens array including: In the manufacturing method of the micro lens array of Claim 1,
The method for manufacturing a microlens array, wherein the member on which the plurality of convex curved surface portions and the concave portions are formed is a light-transmitting layer, and a surface of the convex curved surface portion is a lens surface. In the manufacturing method of the microlens array in any one of Claim 1 or Claim 2,
The method of manufacturing a microlens array, wherein surfaces of the plurality of convex curved surface portions have low affinity with the solution. In the manufacturing method of the micro lens array in any one of Claims 1-3,
The method for producing a microlens array, wherein the solute is a light shielding material. In the manufacturing method of the microlens array in any one of Claims 1-4,
A method of manufacturing a microlens array, wherein the solvent is volatilized and the solute is deposited in the recess. In the manufacturing method of the micro lens array in any one of Claims 1-5,
The concave portion is a method of manufacturing a microlens array formed so as to surround each convex curved surface portion.

Images