JP4199736B2 - Liquid processing method and liquid processing apparatus - Google Patents
Liquid processing method and liquid processing apparatus Download PDFInfo
- Publication number
- JP4199736B2 JP4199736B2 JP2005013056A JP2005013056A JP4199736B2 JP 4199736 B2 JP4199736 B2 JP 4199736B2 JP 2005013056 A JP2005013056 A JP 2005013056A JP 2005013056 A JP2005013056 A JP 2005013056A JP 4199736 B2 JP4199736 B2 JP 4199736B2
- Authority
- JP
- Japan
- Prior art keywords
- horn
- liquid
- flow path
- stirring
- end surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Mixers With Rotating Receptacles And Mixers With Vibration Mechanisms (AREA)
Description
本発明は、超音波を利用して液体を撹拌する液体処理方法および液体処理装置に関する。 The present invention relates to a liquid processing method and a liquid processing apparatus for stirring a liquid using ultrasonic waves.
従来、超音波を利用して液体を撹拌する方法、装置としては、例えば、特許文献1または2に記載されたものがあった。特許文献1に記載されたものは、撹拌容器(反応容器)の内底部に超音波振動子を配置すると共に、撹拌容器内の中間または上部側に循環補助部材を配置し、超音波照射によって生じる液体の音響流を前記循環補助部材により積極的に循環させるようにしている。また、特許文献2に記載されたものは、超音波振動子に連設されたホーンまたはホーンに接続されたチップを液体に浸漬して、液体に超音波振動を伝達するようにしている。
しかしながら、上記特許文献1に記載される液体の撹拌方法、装置によれば、音響流による液体の対流を期待するものであるため、撹拌に時間がかかり、また、特許文献2に記載される撹拌方法、装置によれば、ホーンまたはチップの周辺にしか撹拌効果が及ばず、何れも撹拌能力が不十分である、という問題があった。また、特許文献1に記載される液体の撹拌方法、装置によれば、容器内に循環補助部材を配置する必要があるため、装置構造が複雑化する、という問題もある。 However, according to the liquid stirring method and apparatus described in Patent Document 1, the liquid is expected to be convected by acoustic flow, so that stirring takes time, and stirring described in Patent Document 2 is required. According to the method and the apparatus, there is a problem that the stirring effect is exerted only around the horn or the tip, and the stirring ability is insufficient. In addition, according to the liquid stirring method and apparatus described in Patent Document 1, it is necessary to dispose the circulation assisting member in the container, which causes a problem that the apparatus structure becomes complicated.
本発明は、上記した従来技術の問題点に鑑みてなされたもので、その課題とするところは、超音波を利用して液体を高能率に撹拌できる液体処理方法、装置を提供することにある。 The present invention has been made in view of the above-described problems of the prior art, and the object of the present invention is to provide a liquid processing method and apparatus capable of efficiently stirring a liquid using ultrasonic waves. .
上記課題を解決するための第1の方法発明は、撹拌容器内の液体に、超音波振動子に連接され、内部に先端面から側面または後端面へ抜ける流路を有するホーンの先端部を浸漬し、前記ホーンからの超音波照射によって該ホーンの先端面付近にキャビテーションを集中的に発生させると共に、前記ホーン内の流路を通して液体を循環させて撹拌することを特徴とする。 A first method invention for solving the above-described problem is to immerse the tip of a horn having a flow path extending from a tip surface to a side surface or a rear end surface connected to an ultrasonic vibrator in a liquid in a stirring vessel. Then, cavitation is intensively generated in the vicinity of the front end face of the horn by ultrasonic irradiation from the horn, and the liquid is circulated through the flow path in the horn and stirred.
また、上記課題を解決するための第2の方法発明は、撹拌容器内の液体に、超音波振動子に連接され、内部に先端面から側面または後端面へ抜ける流路を有するホーンの先端部を浸漬し、前記ホーンからの超音波照射によって該ホーンの先端面付近にキャビテーションを集中的に発生させると共に、前記ホーン内の流路を通して液体を循環させて撹拌し、しかる後、前記超音波照射を継続しながら、前記ホーン内の流路を経て、撹拌容器内の液体をその外部へ輸送することを特徴とする。 In addition, the second method invention for solving the above-mentioned problem is that the tip of the horn has a flow path that is connected to the ultrasonic vibrator and is connected to the ultrasonic vibrator and passes from the tip surface to the side surface or the rear end surface. Then, cavitation is intensively generated in the vicinity of the front end surface of the horn by ultrasonic irradiation from the horn, and the liquid is circulated through the flow path in the horn and stirred, and then the ultrasonic irradiation is performed. The liquid in the stirring vessel is transported to the outside through the flow path in the horn.
上記第1の方法発明においては、超音波照射によってホーンの先端面付近にキャビテーションを集中的に発生させるので、ポンピング作用により撹拌容器内の液体がホーン内の流路を通して循環し、効率よく撹拌される。また、上記第2の方法発明においては、前記第1の方法発明の作用に加え、撹拌後の液体が、同様のポンピング作用でホーン内の流路を通して撹拌容器外へ高能率に輸送される。 In the first method invention, since cavitation is intensively generated near the tip surface of the horn by ultrasonic irradiation, the liquid in the stirring vessel is circulated through the flow path in the horn by the pumping action and efficiently stirred. The Further, in the second method invention, in addition to the operation of the first method invention, the liquid after stirring is transported out of the stirring vessel with high efficiency through the flow path in the horn by the same pumping action.
上記課題を解決するための第1の装置発明は、上記第1の方法発明の実施に用いられるもので、超音波振動子に連接されたホーンに、その先端面から側面または後端面に抜ける流路を形成し、該ホーンを、その先端部が撹拌容器内の液体に浸漬されるように配設し、前記撹拌容器内には、前記ホーンの先端面と所定の間隙で対向配置される台座を配設したことを特徴とする。 A first device invention for solving the above-mentioned problems is used for carrying out the first method invention, and a horn connected to an ultrasonic transducer is caused to flow from a front end surface to a side surface or a rear end surface. A pedestal that forms a passage and is disposed so that the tip of the horn is immersed in the liquid in the stirring vessel, and is disposed in the stirring vessel so as to face the tip surface of the horn with a predetermined gap. Is provided.
上記課題を解決するための第2の装置発明は、上記第2の方法発明の実施に用いられるもので、超音波振動子に連接されたホーンに、その先端面から側面または後端面に抜ける流路を形成し、該ホーンを、その先端部が撹拌容器内の液体に浸漬されるように配設し、前記撹拌容器内には、前記ホーンの先端面と所定の間隙で対向配置される台座を配設し、さらに、前記ホーンの側面または後端面に開口する、前記流路の口部から吐出される液体を受けて撹拌容器内に戻す還流手段と、前記口部から吐出される液体を受けて撹拌容器の外部へ輸送する輸送手段と、前記還流手段と前記輸送手段とを前記口部に対して切換える切換手段とを備えていることを特徴とする。 A second device invention for solving the above-described problem is used for carrying out the second method invention, and the horn connected to the ultrasonic transducer is caused to flow from the front end surface to the side surface or the rear end surface. A pedestal that forms a passage and is disposed so that the tip of the horn is immersed in the liquid in the stirring vessel, and is disposed in the stirring vessel so as to face the tip surface of the horn with a predetermined gap. And a reflux means that opens to the side face or rear end face of the horn and receives the liquid discharged from the mouth of the flow path and returns it to the stirring vessel, and the liquid discharged from the mouth. It is characterized by comprising transport means for receiving and transporting to the outside of the stirring vessel, and switching means for switching the reflux means and the transport means with respect to the mouth portion.
上記第1の装置発明においては、ホーンの先端面と台座との間隙内でキャビテーションが集中的に発生し、ホーンの先端面に開口する、流路の口部付近に強いポンピング作用が生じる。また、上記第2の装置発明においては、還流手段と輸送手段とを切換えることで、撹拌後の液体が、同様のポンピング作用でホーン内の流路を通して撹拌容器外へ高能率に輸送される。 In the first device invention, cavitation is intensively generated in the gap between the tip surface of the horn and the pedestal, and a strong pumping action is generated in the vicinity of the mouth of the flow path that opens to the tip surface of the horn. In the second device invention, by switching between the reflux means and the transport means, the liquid after stirring is transported out of the stirring container with high efficiency through the flow path in the horn by the same pumping action.
第1の方法発明および第1の装置発明によれば、撹拌容器内の液体を超音波を利用して高能率に撹拌することができ、生産性の向上に大きく寄与する効果を奏する。 According to the first method invention and the first device invention, the liquid in the stirring vessel can be stirred with high efficiency using ultrasonic waves, and the effect of greatly contributing to the improvement in productivity is achieved.
また、第2の方法発明および第2の装置発明によれば、撹拌容器内の液体を超音波を利用して高能率に撹拌することができることに加え、撹拌を終えた液体を撹拌容器の外へ高能率に輸送することができ、各種処理設備の付帯設備としてきわめて有用となる。 Further, according to the second method invention and the second device invention, in addition to being able to stir the liquid in the stirring container with high efficiency using ultrasonic waves, the liquid after stirring is removed from the stirring container. It is very useful as ancillary equipment for various processing equipment.
以下、本発明を実施するための最良の形態を添付図面も参照して説明する。 The best mode for carrying out the present invention will be described below with reference to the accompanying drawings.
図1は、本発明に係る液体処理装置の一つの実施形態を示したものである。同図において、1は、有底円筒形状をなす撹拌容器、2は、発振器3により駆動される超音波振動子4に連接された超音波照射用ホーンである。ホーン2は、超音波振動子3と一体に撹拌容器1内に直立する姿勢で配設され、一方、撹拌容器1の内底には、前記ホーン2の先端面と所定の間隙で対向配置される台座5が配設されている。台座5は、ここでは、ホーン2の先端面との間にわずかの間隙(一例として、1〜5mm)を形成するようにその高さが設定されると共に、ホーン2よりも小径となるようにその直径が設定されている。本実施形態としての液体処理装置は、水に薬剤である粉末粒子6を溶解して均一な処理液(液体)を得るためのもので、撹拌容器1の上方には、該撹拌容器1内に水を供給するための給水管7と前記粉末粒子6を供給するためのシュート8とが配設されている。 FIG. 1 shows one embodiment of a liquid processing apparatus according to the present invention. In the figure, 1 is a stirring vessel having a bottomed cylindrical shape, and 2 is an ultrasonic irradiation horn connected to an ultrasonic transducer 4 driven by an oscillator 3. The horn 2 is disposed so as to stand upright in the stirring vessel 1 integrally with the ultrasonic transducer 3, and is arranged on the inner bottom of the stirring vessel 1 so as to face the front end surface of the horn 2 with a predetermined gap. A pedestal 5 is provided. Here, the height of the pedestal 5 is set so as to form a slight gap (for example, 1 to 5 mm) between the front end surface of the horn 2 and a smaller diameter than that of the horn 2. Its diameter is set. The liquid processing apparatus according to the present embodiment is for obtaining a uniform processing liquid (liquid) by dissolving powder particles 6 that are drugs in water, and above the stirring vessel 1, A water supply pipe 7 for supplying water and a chute 8 for supplying the powder particles 6 are disposed.
本実施形態において、上記ホーン2の内部には、その先端面から側面へ抜ける流路9が形成されている。また、撹拌容器1の側壁の一部には、前記ホーン2の側面に開口する、流路9の口部(以下、これを吐出口という)9aの前方を遮蔽可能な遮蔽板(還流手段)10が固設されている。撹拌容器1は、回転ユニット(切換手段)11の回転体11a上に載置されており、前記遮蔽板10は、この回転ユニット11により撹拌容器1が回転することで、前記吐出口9aの前方を遮蔽する位置と、該吐出口9aの前方から退避する位置とに任意位置決めされるようになっている。一方、撹拌容器1の側方には、前記吐出口9aに対して進退動可能に輸送管(輸送手段)12が配設されており、輸送管12は、前記遮蔽板10が吐出口9aの前方から退避した状態で、該吐出口9aの近傍に前進できるようになっている。なお、撹拌容器1の底面には排液口が設けられており、この排液口は、常時は栓13により封止されている。 In the present embodiment, a flow path 9 is formed inside the horn 2 so as to pass from the front end surface to the side surface. Further, a part of the side wall of the stirring vessel 1 is provided with a shielding plate (refluxing means) capable of shielding the front of the mouth portion (hereinafter referred to as a discharge port) 9a of the flow passage 9 that opens to the side surface of the horn 2. 10 is fixed. The stirring container 1 is placed on a rotating body 11a of a rotating unit (switching means) 11, and the shielding plate 10 is moved forward of the discharge port 9a by rotating the stirring container 1 by the rotating unit 11. Is arbitrarily positioned at a position where the light is blocked and a position where the discharge port 9a is retracted from the front. On the other hand, on the side of the stirring vessel 1, a transport pipe (transport means) 12 is disposed so as to be movable back and forth with respect to the discharge port 9a. The transport pipe 12 has the shielding plate 10 connected to the discharge port 9a. It can move forward in the vicinity of the discharge port 9a in a state of being retracted from the front. Note that a drainage port is provided on the bottom surface of the stirring vessel 1, and this drainage port is normally sealed with a stopper 13.
以下、上記のように構成された液体処理装置による液体処理方法を、図2および図3も参照して説明する。 Hereinafter, a liquid processing method using the liquid processing apparatus configured as described above will be described with reference to FIGS.
液体処理に際しては、図2に示されるように、先ず給水管7を通じて撹拌容器1内に一定量の水Wを供給し、続いて発振器3により超音波振動子4を駆動してホーン2から撹拌容器1内の水Wに超音波を照射する。すると、ホーン2の先端面と台座5との間隙内で集中的にキャビテーションが発生し、ホーン2の先端面に開口する、流路9の口部9b付近に強いポンピング作用が生じる。そして、このポンピング作用により撹拌容器1内の水Wが前記口部9bから流路9内に吸引され、さらにその吐出口9aから前方へ向けて吐出される。この時、吐出口9aの前方には、遮蔽板10が位置決めされており、吐出口9aから吐出された水Wは、この遮蔽板10に衝突して撹拌容器1内に流下する。すなわち、撹拌容器1内の水Wは、ホーン2内の流路9を経て循環し、これにより激しく撹拌される。 In the liquid treatment, as shown in FIG. 2, first, a certain amount of water W is supplied into the stirring vessel 1 through the water supply pipe 7, and then the ultrasonic vibrator 4 is driven by the oscillator 3 to stir from the horn 2. The water W in the container 1 is irradiated with ultrasonic waves. Then, cavitation occurs intensively in the gap between the front end surface of the horn 2 and the pedestal 5, and a strong pumping action is generated in the vicinity of the mouth portion 9 b of the flow path 9 that opens to the front end surface of the horn 2. And by this pumping effect | action, the water W in the stirring container 1 is attracted | sucked in the flow path 9 from the said opening part 9b, and is further discharged toward the front from the discharge port 9a. At this time, the shielding plate 10 is positioned in front of the discharge port 9a, and the water W discharged from the discharge port 9a collides with the shielding plate 10 and flows down into the stirring vessel 1. That is, the water W in the stirring vessel 1 circulates through the flow path 9 in the horn 2 and is vigorously stirred thereby.
次に、同じく図2に示されるように、シュート8を通じて粉末粒子6が一定量ずつ撹拌容器1内の水Wに投入される。すると、この投入された粉末粒子6は、激しく撹拌されている水W中に速やかに溶解し、その必要量の投入により所望の濃度を有する処理液Lが短時間で得られるようになる。 Next, as shown in FIG. 2, the powder particles 6 are introduced into the water W in the stirring vessel 1 by a certain amount through the chute 8. Then, the charged powder particles 6 are quickly dissolved in the vigorously stirred water W, and the treatment liquid L having a desired concentration can be obtained in a short time by adding the necessary amount.
その後、図3に示されるように、回転ユニット11の作動で、撹拌容器1が180度回転して、遮蔽板10が前記吐出口9aの反対側に移動退避し、一方、この回転にタイミングを合せて、輸送管12がホーン2の側面の吐出口9aの近傍に進出する。しかして、この間、ホーン2からの超音波照射が継続されており、前記撹拌を終えた処理液Lは、上記撹拌時と同様に、ホーン2内の流路9を通って前記吐出口9aから吐出され、そのまま輸送管12内に流入する。輸送管12の他端部は、例えば、該処理液Lを必要とする他の処理設備(一例として、排水処理設備)へ延ばされており、前記処理液Lは、この輸送管12を通して他の処理設備へ輸送される。 After that, as shown in FIG. 3, the stirring unit 1 is rotated 180 degrees by the operation of the rotating unit 11, and the shielding plate 10 is moved and retracted to the opposite side of the discharge port 9a. At the same time, the transport pipe 12 advances to the vicinity of the discharge port 9 a on the side surface of the horn 2. During this time, the irradiation of ultrasonic waves from the horn 2 is continued, and the processing liquid L after the stirring is passed through the flow passage 9 in the horn 2 from the discharge port 9a in the same manner as in the stirring. It is discharged and flows into the transport pipe 12 as it is. The other end of the transport pipe 12 is extended to, for example, another processing facility that requires the processing liquid L (for example, wastewater processing equipment). It is transported to the processing facility.
上記処理液Lの輸送は、撹拌容器1内の処理液Lの液面がホーン2の先端面に開口する口部9bのレベルまで下がると停止されるので、この段階でホーン2からの超音波照射が中断される。また、これと同時に回転ユニット11の作動で撹拌容器1が180度回転し、遮蔽板10が、吐出口9aの前方に再び位置決めされる。そして、撹拌容器1内に所定量の水Wが再び供給され、前記操作が繰返えされて処理液Lの製造および処理液Lの他設備への輸送が順次行われ、以降、前記操作の繰返しで他設備に対して間欠的に処理液が輸送される。なお、他設備で必要とする量の処理液Lの輸送を終えたら、栓13を抜いて撹拌容器1内に残っている処理液Lを排出し、これにて一連の液体処理が終了する。 Since the transport of the processing liquid L is stopped when the liquid level of the processing liquid L in the stirring vessel 1 falls to the level of the opening 9b that opens at the front end surface of the horn 2, the ultrasonic wave from the horn 2 is at this stage. Irradiation is interrupted. At the same time, the stirring container 1 is rotated 180 degrees by the operation of the rotating unit 11, and the shielding plate 10 is positioned again in front of the discharge port 9a. Then, a predetermined amount of water W is supplied again into the stirring vessel 1, the operation is repeated, and the production of the processing liquid L and the transportation to the other equipment of the processing liquid L are sequentially performed. The processing liquid is intermittently transported to other equipment by repetition. When the transportation of the amount of processing liquid L required by other equipment is finished, the stopper 13 is pulled out, the processing liquid L remaining in the stirring vessel 1 is discharged, and the series of liquid processing is completed.
ここで、上記実施形態においては、ホーン2内にその先端面から側面に抜ける流路9を形成したが、この流路は、ホーンの先端面から後端面に抜けるように形成してもよいもので、この場合は、超音波振動子4に前記流路を延長する流路を設けて、超音波振動子4の上端側から水Wを撹拌容器1内に還流させるようにする。また、この場合は、水を撹拌容器1内に還流させる手段を始め、処理液を他設備へ輸送する手段、それらの切換手段は、前記超音波振動子4の上端の吐出口に合せて、適宜の設置形態とする。 Here, in the above-described embodiment, the flow path 9 is formed in the horn 2 that extends from the front end surface to the side surface. However, the flow path may be formed so as to extend from the front end surface of the horn to the rear end surface. In this case, the ultrasonic transducer 4 is provided with a flow channel extending the flow channel so that the water W is refluxed into the stirring vessel 1 from the upper end side of the ultrasonic transducer 4. Further, in this case, a means for refluxing water into the stirring vessel 1, a means for transporting the processing liquid to other equipment, and a switching means thereof are adapted to the discharge port at the upper end of the ultrasonic transducer 4, Use an appropriate installation form.
なお、上記実施形態においては、水Wに粉末粒子6を撹拌溶解させる処理に適用した例を示したが、本発明は、液体と液体との撹拌混合させる処理に適用してもよいことはもちろんである。 In the above-described embodiment, an example in which the powder particles 6 are stirred and dissolved in the water W has been described. However, the present invention may be applied to a process in which liquid and liquid are stirred and mixed. It is.
1 撹拌容器
2 ホーン
3 発振器
4 超音波振動子
5 台座
9 流路
9a 吐出口(ホーン側面に開口する、流路の口部)
10 遮蔽板(還流手段)
11 回転ユニット(切換手段)
12 輸送管(輸送手段)
DESCRIPTION OF SYMBOLS 1 Stirring container 2 Horn 3 Oscillator 4 Ultrasonic vibrator 5 Base 9 Flow path 9a Discharge port (The opening of the flow path that opens on the side of the horn)
10 Shield plate (refluxing means)
11 Rotating unit (switching means)
12 Transport pipe (transportation means)
Claims (4)
In the horn connected to the ultrasonic vibrator, a flow path extending from the front end surface to the side surface or the rear end surface is formed, and the horn is disposed so that the front end portion is immersed in the liquid in the stirring vessel, A pedestal disposed opposite to the front end surface of the horn with a predetermined gap is disposed in the stirring vessel, and is further discharged from the mouth portion of the flow path that opens to the side surface or the rear end surface of the horn. A reflux means for receiving liquid and returning it into the stirring container; a transport means for receiving the liquid discharged from the mouth portion and transporting it to the outside of the stirring container; and the reflux means and the transport means for the mouth portion. A liquid processing apparatus comprising switching means for switching.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005013056A JP4199736B2 (en) | 2005-01-20 | 2005-01-20 | Liquid processing method and liquid processing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005013056A JP4199736B2 (en) | 2005-01-20 | 2005-01-20 | Liquid processing method and liquid processing apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006198527A JP2006198527A (en) | 2006-08-03 |
| JP4199736B2 true JP4199736B2 (en) | 2008-12-17 |
Family
ID=36956982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005013056A Expired - Fee Related JP4199736B2 (en) | 2005-01-20 | 2005-01-20 | Liquid processing method and liquid processing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4199736B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7964958B2 (en) | 2007-02-20 | 2011-06-21 | Panasonic Corporation | Heatsink structure for solid-state image sensor |
-
2005
- 2005-01-20 JP JP2005013056A patent/JP4199736B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7964958B2 (en) | 2007-02-20 | 2011-06-21 | Panasonic Corporation | Heatsink structure for solid-state image sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006198527A (en) | 2006-08-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI415694B (en) | Substrate processing device and processing method thereof | |
| Rivas et al. | Sonoluminescence and sonochemiluminescence from a microreactor | |
| KR101191549B1 (en) | Method and apparatus for cleaning substrate, and program recording medium | |
| JP2008246486A (en) | Nano fluid generator and cleaning apparatus | |
| EP3858501B1 (en) | Metal pipe cleaning method and cleaning device | |
| JP2008119642A (en) | Cleaning method and cleaning apparatus | |
| JP2014076425A (en) | Gas-liquid mixture generating apparatus, method for producing nano-bubble water, nano-bubble liquid, and electronic apparatus | |
| KR20130132270A (en) | Ultrasonic cleaning method and ultrasonic cleaning apparatus | |
| KR101061946B1 (en) | Substrate cleaning method, substrate cleaning apparatus and program recording medium | |
| JP4199736B2 (en) | Liquid processing method and liquid processing apparatus | |
| TW200904555A (en) | Ultrasonic cleaning method | |
| JP4623706B2 (en) | Ultrasonic cleaning equipment | |
| JP4085121B1 (en) | Dental gargle water supply device | |
| CN211385094U (en) | Analytical table device for experiments | |
| KR20130051284A (en) | High precision cleaning apparatus with a nano bubble generator | |
| JP2007253120A (en) | Ultrasonic cleaning method | |
| JP7163541B2 (en) | ultrasonic chemical reactor | |
| KR101745837B1 (en) | A powerless mixer for a biological treatment apparatus | |
| CN107831056A (en) | The residual extraction element of agriculture for handling vegetables | |
| JP2005230728A (en) | Waste water treatment apparatus | |
| JP2006305427A (en) | Ultrasonic treatment apparatus and ultrasonic treatment method | |
| JP2018008240A (en) | Liquid emulsifier | |
| JP2009021539A (en) | Substrate cleaning method, substrate cleaning apparatus, program, and program recording medium | |
| JPH11253744A (en) | Exhaust gas desulfurizer | |
| JP2001238655A (en) | Apparatus for cleaning treatment of foods |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070409 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20080911 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20080917 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20081003 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111010 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111010 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111010 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121010 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131010 Year of fee payment: 5 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |