JP4200733B2 - Discharge device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an ejection apparatus that ejects a liquid material into droplets, a device manufacturing method, and a device.
[0002]
[Prior art]
An ejection device having an ejection head having a nozzle array for ejecting liquid material in the form of droplets, and a drive system for moving the ejection head and the workpiece relative to each other is less wasteful in use of the material and is desired at a desired position. There is an advantage that it is easy to accurately arrange the amount of material.
[0003]
Some of these ejection devices change the arrangement pitch of the nozzles by changing the arrangement angle of the ejection head with respect to the direction of relative movement (see, for example, Patent Document 1).
In addition, there is one in which a plurality of ejection heads (nozzle rows) are arranged in parallel to improve the ejection capacity (see, for example, Patent Document 2).
[0004]
[Patent Document 1]
JP-A-5-301353 (FIG. 1)
[Patent Document 2]
Japanese Patent Laid-Open No. 9-300664 (FIG. 4)
[0005]
[Problems to be solved by the invention]
In a discharge device, since the size of the discharge head is limited, the discharge head is often small relative to the workpiece. In this case, in order to dispose the liquid material over the entire application region of the work, it is necessary to reciprocate the discharge head many times relative to the work.
[0006]
On the other hand, it is possible to widen the discharge width by arranging a plurality of discharge heads (nozzle rows) in series in a direction orthogonal to the direction of relative movement. When the discharge width is widened with respect to the workpiece, the number of reciprocating movements of the discharge head described above is reduced, and the throughput can be improved.
[0007]
However, when arranging a plurality of ejection heads in series, if the arrangement angle of the ejection heads is changed, the arrangement pitch of the nozzles is partially disturbed at the portion between the ejection heads. A partial disturbance in the arrangement pitch of the nozzles may cause a decrease in the placement accuracy of the liquid material.
[0008]
The present invention has been made in view of the above-described circumstances, and in the case where a plurality of ejection heads are arranged in series, partial disturbance in the arrangement pitch of the nozzles accompanying adjustment of the arrangement angle of the nozzle rows is caused. It is an object of the present invention to provide a discharge device that is prevented.
Another object of the present invention is to provide a device manufacturing method capable of improving the throughput or improving the placement accuracy of the liquid material.
Another object of the present invention is to provide a device capable of reducing cost and improving quality.
[0009]
[Means for Solving the Problems]
  An ejection apparatus according to the present invention includes a plurality of ejection heads having a nozzle row in which nozzles for ejecting liquid droplets are arranged, and a drive system that relatively moves the plurality of ejection heads and a workpiece along a scanning direction. Two support arms arranged in parallel to each other, a plurality of connection arms connected to each of the two support arms and arranged in parallel to each other, the two support arms, and the plurality of A link mechanism having a plurality of nodes connected to the connection arm, and the same position as one node of the link mechanismAt the center of rotation of the entire link mechanismA fulcrum, a linear motion guide that linearly guides another node of the link mechanism along the scanning direction, and a drive device that changes an angle between the support arm and the connection arm, The plurality of ejection heads are respectively disposed on at least two of the plurality of coupling arms, and the plurality of ejection heads are arranged at least along a direction intersecting the scanning direction, and the support arm and the coupling arm The angle of the support arm with respect to the scanning direction changes, so that the adjacent ejection heads among the plurality of ejection heads are related to the direction perpendicular to the scanning direction. A predetermined positional relationship between the nozzle rows is maintained.
  In the above-described ejection device, the arrangement direction of the plurality of ejection heads is adjusted so that each nozzle row intersects the workpiece scanning direction, so that these nozzle rows are orthogonal to the relative movement direction. Are arranged in series. For this reason, the droplets are arranged in a wide area on the workpiece at once by ejecting the droplets from the plurality of ejection heads and relatively moving the workpiece and the workpiece. The plurality of ejection heads are connected to each other via a link mechanism, and the arrangement direction thereof is adjusted simultaneously via the link mechanism. By adjusting the arrangement direction of the ejection heads, the arrangement pitch of the nozzles is adjusted, and the landing density of droplets on the workpiece, that is, the coating density is adjusted. Further, in this discharge device, the entire arrangement angle of the link mechanism is adjusted, whereby the nozzle rows are maintained in a predetermined positional relationship between adjacent discharge heads among the plurality of discharge heads. Therefore, in the case where the nozzle rows of the plurality of ejection heads are arranged in series, it is possible to prevent partial disturbance of the nozzle arrangement pitch accompanying the adjustment of the arrangement angle of the nozzle rows.
  Here, the “nozzle arrangement pitch” refers to an interval (distance) between nozzles in a direction (scanning direction of the ejection head) perpendicular to the direction of relative movement of the ejection head, unless otherwise specified (described later). (See FIG. 4).
[0010]
  In the above discharge device, the predetermined positional relationship isScan directionBetween the adjacent ejection heads, one end nozzle on the side close to the other ejection head and one ejection head in the nozzle array of the other ejection head between the adjacent ejection heads It is preferable that the nozzle at one end on the near side be in the same position.
  In this case, between the adjacent ejection heads,Scan directionWith respect to the direction orthogonal to, the relationship in which the positions of the nozzles at the end of the nozzle row are the same is maintained, so that the above-described partial disturbance in the arrangement pitch is prevented.
[0011]
  Further, in the above-described ejection device, the predetermined positional relationship isScan directionBetween the adjacent ejection heads, one end nozzle on the side close to the other ejection head and one ejection head in the nozzle array of the other ejection head between the adjacent ejection heads It is preferable that the distance between the nozzles on one side closer to the nozzle is the same as the arrangement pitch of the nozzles.
  In this case, between the adjacent ejection heads, there is a relationship in which the distance between the nozzle at one end of the nozzle row of one ejection head and the nozzle at one end of the nozzle row of the other ejection head is the same as the arrangement pitch of the nozzles. Since it is maintained, the above-mentioned partial disturbance of the arrangement pitch is prevented.
[0012]
  In the above-described discharge device,The node of the link mechanism located at the same position as the fulcrum and the node guided by the linear motion guide may be arranged on the same axis along the scanning direction.
  Accordingly, the nozzle rows can be reliably maintained in a predetermined positional relationship between the adjacent ejection heads.
[0013]
  In the above-described discharge device,The plurality of connection arms on which the discharge heads are arranged are arranged in parallel with each other at equal intervals, and between the connection arms on which the discharge heads are arranged and adjacent to each other, between one connection arm and one support arm. A node and a node between the other connecting arm and the other support arm can be arranged on the same axis along the scanning direction.
  Thereby, between the adjacent ejection heads,Scan directionWith respect to the direction orthogonal to the nozzle rows, the nozzle rows can be reliably maintained in a predetermined positional relationship.
[0014]
In the above-described ejection device, the link mechanism may include a node disposed at a nozzle position at an end of the nozzle row.
In this case, it is possible to reliably maintain the relationship in which the positions of the nozzles at the ends of the nozzle row are the same between the adjacent ejection heads.
[0015]
The device manufacturing method of the present invention is a device manufacturing method including a step of disposing a liquid material on a workpiece, wherein the liquid material is disposed using the above-described ejection device.
According to the device manufacturing method described above, by arranging the nozzle rows in series, the liquid material can be arranged in a wide area by one relative movement. Therefore, throughput can be improved. In addition, since partial disturbance of the arrangement pitch is prevented, the arrangement accuracy of the liquid material can be improved.
[0016]
The device of the present invention is manufactured using the device manufacturing method described above.
According to the device described above, the throughput can be improved, so that the cost can be reduced. In addition, since the placement accuracy of the liquid material is improved, the quality can be improved.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.
A discharge head that discharges a liquid material in the form of droplets, a so-called inkjet head, ejects minute ink droplets (droplets) in a dot shape with high accuracy. Therefore, application to the manufacturing field of various parts is expected by using a functional material such as a special ink, a coating material, a luminescent or photosensitive material as the liquid material to be discharged.
[0018]
FIG. 1 shows an embodiment of a discharge device 10 of the present invention.
In FIG. 1, a discharge device 10 is provided on a base 112, a substrate stage 22 that is provided on the base 112 and supports a substrate 20 as a workpiece, and is interposed between the base 112 and the substrate stage 22. A first movement device 114 that is movably supported, a liquid ejection head 21 that ejects a processing liquid toward the substrate 20 supported by the substrate stage 22, and a second movement device that movably supports the liquid ejection head 21. 116 and a control device 23 that controls the liquid droplet ejection operation of the liquid ejection head 21. Further, the discharge device 10 includes an electronic balance (not shown) as a weight measuring device provided on the base 112, a capping unit 25, and a cleaning unit 24. The operation of the ejection device 10 including the first moving device 114 and the second moving device 116 is controlled by the control device 23.
[0019]
The first moving device 114 is installed on the base 112 and is positioned along the Y direction. The second moving device 116 is mounted upright with respect to the base 112 using the support columns 16A and 16A, and is mounted at the rear portion 12A of the base 112. The X direction (second direction) of the second moving device 116 is a direction orthogonal to the Y direction (first direction) of the first moving device 114. Here, the Y direction is a direction along the front 12B and rear 12A directions of the base 112. On the other hand, the X direction is a direction along the left-right direction of the base 112 and is horizontal. The Z direction is a direction perpendicular to the X direction and the Y direction.
[0020]
The first moving device 114 is constituted by, for example, a linear motor, and includes guide rails 140 and 140 and a slider 142 provided to be movable along the guide rail 140. The slider 142 of the first moving device 114 of this linear motor type can be positioned by moving in the Y direction along the guide rail 140.
[0021]
Further, the slider 142 includes a motor 144 for rotating around the Z axis (θZ). The motor 144 is, for example, a direct drive motor, and the rotor of the motor 144 is fixed to the substrate stage 22. Thus, by energizing the motor 144, the rotor and the substrate stage 22 can rotate along the θZ direction to index (rotate index) the substrate stage 22. That is, the first moving device 114 can move the substrate stage 22 in the Y direction (first direction) and the θZ direction.
[0022]
The substrate stage 22 holds the substrate 20 and positions it at a predetermined position. The substrate stage 22 has a suction holding device (not shown), and the suction holding device operates to suck and hold the substrate 20 on the substrate stage 22 through the hole 46A of the substrate stage 22.
[0023]
The second moving device 116 is constituted by a linear motor, and is supported by a column 16B fixed to the columns 16A and 16A, a guide rail 62A supported by the column 16B, and movable in the X direction along the guide rail 62A. The slider 160 is provided. The slider 160 can be positioned by moving in the X direction along the guide rail 62 </ b> A, and the liquid discharge head 21 is attached to the slider 160.
[0024]
The electronic balance (not shown) measures, for example, the weight of one droplet discharged from the nozzle of the liquid discharge head 21 and manages, for example, 5000 droplets from the nozzle of the liquid discharge head 21. receive. The electronic balance can accurately measure the weight of one droplet by dividing the weight of the 5000 droplet by the number of 5000. Based on the measured amount of droplets, the amount of droplets ejected from the liquid ejection head 21 can be optimally controlled.
[0025]
The cleaning unit 24 can clean the nozzles and the like of the liquid discharge head 21 periodically or at any time during the device manufacturing process or during standby. The capping unit 25 covers the droplet discharge surface during standby when the device is not manufactured in order to prevent the droplet discharge surface of the liquid discharge head 21 from drying.
[0026]
By moving the liquid discharge head 21 in the X direction by the second moving device 116, the liquid discharge head 21 can be selectively positioned above the electronic balance, the cleaning unit 24, or the capping unit 25. That is, even during the device manufacturing operation, the weight of the droplet can be measured by moving the liquid discharge head 21 to the electronic balance side, for example. If the liquid discharge head 21 is moved onto the cleaning unit 24, the liquid discharge head 21 can be cleaned. If the liquid ejection head 21 is moved onto the capping unit 25, a cap is attached to the liquid droplet ejection surface of the liquid ejection head 21 to prevent drying.
[0027]
That is, the electronic balance, the cleaning unit 24, and the capping unit 25 are disposed on the rear end side on the base 112 and directly below the movement path of the liquid discharge head 21 and separated from the substrate stage 22. Since the supply work and the discharge work of the substrate 20 with respect to the substrate stage 22 are performed on the front end side of the base 112, the electronic balance, the cleaning unit 24, or the capping unit 25 does not hinder the work.
[0028]
As shown in FIG. 1, a preliminary discharge area (preliminary discharge) for the liquid discharge head 21 to discard or test-drop (preliminary discharge) droplets on a portion of the substrate stage 22 other than supporting the substrate 20. (Region) 152 is provided separately from the cleaning unit 24. As shown in FIG. 1, the preliminary discharge area 152 is provided along the X direction on the rear end side of the substrate stage 22. This preliminary discharge area 152 is fixed to the substrate stage 22 and has a concave-shaped receiving member that opens upward, and an absorbent material that is exchangeably installed in the concave portion of the receiving member and absorbs the discharged droplets. It is composed of
[0029]
Here, the substrate 20 is not limited to a silicon substrate, and a substrate made of another material such as a glass substrate, a quartz substrate, a ceramic substrate, a metal substrate, a plastic substrate, or a plastic film substrate is also applicable. The liquid material applied on the substrate 20 includes, for example, a radiation photosensitive liquid such as a resist (photoresist), color ink, a liquid material for a protective film, and a liquid material for forming a coated silicon oxide film. (Spin On Glass), a low-k material for forming a low dielectric constant interlayer insulating film, a functional film liquid material such as a PI film, a liquid containing metal fine particles, and other volatile liquid materials. The present invention is applicable to the manufacture of other electronic devices such as color filters and touch panels in addition to devices such as liquid crystal display devices, EL devices, semiconductor devices, imaging devices (CCDs, etc.), magnetic heads, and the like. It is also effective for large electronic devices for manufacturing plasma display panels.
[0030]
By ejecting the liquid material from the liquid ejection head 21 while relatively moving the substrate 20 and the liquid ejection head 21, the liquid material is disposed on the substrate 20. The liquid ejection head 21 includes a plurality of the nozzles described above arranged in a row, and the control device 23 controls the voltage applied to the piezo element, that is, controls the drive signal, thereby controlling each of the plurality of nozzles. In contrast, the discharge control of the liquid material is performed. Specifically, the control device 23 can change the volume of droplets ejected from the nozzle, the number of droplets ejected per unit time, the distance between droplets, and the like. For example, the distance between the plurality of droplets can be changed by selectively using the nozzles that discharge the droplets among the plurality of nozzles arranged in a line.
[0031]
In the ejection device 10 of the present embodiment, the liquid ejection head 21 includes a plurality (three in this example) of ejection heads 201, 202, and 203, and the plurality of ejection heads 201, 202, and 203 are arranged in series with each other. Has been. Hereinafter, the configuration of the liquid ejection head 21 will be described in more detail.
[0032]
FIGS. 2A to 2C are diagrams showing the configuration of the liquid discharge head 21 of this example including a plurality of discharge heads 201, 202, and 203. FIG. 3 is a perspective view schematically showing the liquid discharge head 21. FIG. It is.
In these drawings, each of the plurality of ejection heads 201, 202, 203 is provided with nozzle rows 211, 212, 213 composed of a plurality of nozzles arranged at a predetermined pitch. The nozzle arrangement pitch is the same among the plurality of ejection heads 201, 202, 203. The plurality of ejection heads 201, 202, and 203 are connected to each other via a link mechanism 250.
[0033]
The link mechanism 250 includes a parallel link in which a plurality of ejection heads 201, 202, and 203 are connected to each other such that the nozzle rows 211, 212, and 213 of the plurality of ejection heads 201, 202, and 203 are parallel to each other. At the positions of the nozzles at both ends of each nozzle row of the discharge heads 201, 202, and 203, a node serving as a rotation center is provided. More specifically, the link mechanism 250 includes a plurality of support arms 260 and 261 arranged in parallel to each other, and a plurality of link mechanisms 250 and 261 connected to the two support arms 260 and 261 via the nodes 251 to 258, respectively. Connecting arms 262, 263, 264, and 265, and the plurality of connecting arms 262 to 265 are arranged at equal pitch intervals and in parallel with each other. The discharge heads 201, 202, and 203 are disposed on the connecting arms 262, 263, and 264 so that the nozzle positions at both ends of the nozzle rows 211, 212, and 213 coincide with the positions of the nodes 251 to 256. ing.
[0034]
In the link mechanism 250, the arrangement angle of the connection arms 262 to 265 is adjusted by the first adjustment mechanism 270. The first adjustment mechanism 270 includes a drive device 271 that changes the arrangement angle of the arms around one of the nodes of the link mechanism. For example, the driving device 271 has a fixed portion fixed to one arm (support arm 261) and a driving portion fixed to the other arm (connecting arm 265). The arrangement angle of the other arm changes with respect to one arm by the operation (for example, rotation) of the driving portion. Thereby, the arrangement | positioning angle of the some connection arms 262-265 arrange | positioned in parallel mutually mutually changes simultaneously.
[0035]
In the present embodiment, the entire arrangement angle of the link mechanism 250 is also adjusted by the second adjustment mechanism 280. The second adjusting mechanism 280 directly guides the fulcrum 281 serving as the rotation center of the entire link mechanism 250, the drive device 271, and one of the nodes of the link mechanism 250 (node 257) in a straight line along the scanning direction. A moving guide 282 and the like. The fulcrum 281 serving as the rotation center of the entire link mechanism 250 is located at the same position as one of the nodes (nodes 256) provided at the positions of the nozzles at both ends of the nozzle row. On the axis. As described above, the linear guide 282 guides a predetermined node 257 on the guide shaft, and this axis is parallel to the scanning direction. Therefore, the node 257 and the fulcrum 281 (node 256) are always It is arranged on the same axis parallel to the scanning direction. Further, the connecting arm 264 having the pivot point 281 (node 256) as the rotation center and the connecting arm 265 having the node 257 as the rotation center are adjacent to each other. In the link mechanism 250, the plurality of connecting arms 262 to 265 are arranged at equal pitch intervals and in parallel to each other, and therefore the other adjacent connecting arms have the same relationship as the connecting arms 264 and 265 described above. That is, between the adjacent connection arms of the plurality of connection arms 262 to 265, the node on the support arm 261 side of one connection arm and the node on the support arm 260 side of the other connection arm are always scanned. It is arranged on the same axis parallel to the direction.
[0036]
In the ejection apparatus of the present embodiment having the above configuration, the plurality of ejection heads 201 to 203 are arranged in a direction orthogonal to the scanning direction, and the nozzle rows 211 to 213 are arranged in series in the direction orthogonal to the scanning direction. That is, a plurality of nozzle rows 211, 212, and 213 are arranged in order in a direction orthogonal to the scanning direction. Therefore, by discharging the liquid material from the nozzle rows 211 to 213 of the plurality of discharge heads 201 to 203 and relatively moving them and the substrate, the liquid material is arranged at once on a wide area on the substrate.
[0037]
The plurality of ejection heads 201 to 203 are connected to each other via a link mechanism 250, and the arrangement angles of the nozzle rows 211 to 213 are simultaneously adjusted via the link mechanism 250 by the first adjustment mechanism 270. . By adjusting the arrangement angles of the nozzle rows 211 to 213, the nozzle arrangement pitch is adjusted in the direction orthogonal to the scanning direction.
[0038]
4A and 4B are diagrams showing the relationship between the nozzle array arrangement angle and the nozzle arrangement pitch.
As shown in FIGS. 4A and 4B, the arrangement pitch of the nozzles is changed in the direction orthogonal to the scanning direction by changing the arrangement angle of the nozzle rows (P1 → P2). Thereby, the landing density of the liquid material on the substrate, that is, the coating density is adjusted. That is, as shown in FIG. 4A, when the arrangement angle (θ1) of the nozzle row is small, the nozzle arrangement pitch increases and the coating density decreases. On the other hand, as shown in FIG. 4B, when the arrangement angle (θ2) of the nozzle row is large, the arrangement pitch of the nozzles is reduced and the coating density is increased.
[0039]
FIGS. 5A to 5C are diagrams schematically showing how the arrangement angles of a plurality of nozzle rows change.
As shown in FIGS. 5A to 5C and FIGS. 2A to 2C, in this discharge device, the entire arrangement of the link mechanism 250 is arranged by the second adjustment mechanism 280 (see FIG. 2). The installation angle is adjusted, whereby the nozzle rows are maintained in a predetermined positional relationship between the adjacent ejection heads of the plurality of ejection heads 201, 202, 203. That is, between the adjacent ejection heads, the nozzle at one end of the nozzle row of one ejection head and the nozzle at one end of the nozzle row of the other ejection head are always arranged on the same axis parallel to the scanning direction. Therefore, in the case where the nozzle rows of the plurality of ejection heads are arranged in series, partial disturbance of the nozzle arrangement pitch accompanying the adjustment of the arrangement angle of the nozzle rows is prevented.
[0040]
By preventing the partial disturbance of the nozzle arrangement pitch described above, the placement accuracy of the liquid material can be improved. In addition, during wiping, suction, flushing, etc., the angle of the ejection head can be adjusted to the most effective state in each operation. For example, work efficiency can be improved by making all the ejection heads parallel to each other during wiping.
[0041]
In the above-described embodiment, the fulcrum 281 serving as the rotation center of the entire link mechanism 250 is at the same position as one of the nodes (nodes 256) provided at the positions of the nozzles at both ends of the nozzle row. Since the position is on the guide shaft of the linear motion guide 282, partial disturbance of the arrangement pitch of the nozzles between adjacent nozzle rows is prevented with a simple configuration. However, the configuration for preventing partial disturbance in the nozzle arrangement pitch between adjacent nozzle rows is not limited to this, and other configurations may be used.
[0042]
For example, in the above-described embodiment, the positions of the nozzles at the end of the nozzle row are arranged on the same axis parallel to the scanning direction between the adjacent ejection heads. The distance between the nozzle at one end of the nozzle row of the ejection head and the nozzle at one end of the nozzle row of the other ejection head is the same as the arrangement pitch of the nozzle row in the direction orthogonal to the scanning direction. Also good. Also in this case, the distance between the nozzle at one end of the nozzle row of one discharge head and the nozzle at one end of the nozzle row of the other discharge head is the relative movement between the discharge head and the workpiece between adjacent discharge heads. The relationship that is the same as the nozzle arrangement pitch (when projected in a straight line in the direction orthogonal to the direction of relative movement) with respect to the direction orthogonal to the direction is maintained. Therefore, the partial disturbance of the arrangement pitch described above is prevented.
[0043]
Next, a liquid crystal display device will be described as an example of the display device of the present invention.
FIG. 6 shows a planar layout of signal electrodes and the like on the first substrate of the liquid crystal display device according to this embodiment. The liquid crystal device according to this embodiment includes the first substrate, a second substrate (not shown) provided with scanning electrodes and the like, and a liquid crystal (not shown) sealed between the first substrate and the second substrate. )).
[0044]
As shown in FIG. 6, a plurality of signal electrodes 310 are provided in a multiple matrix form in the pixel region 303 on the first substrate 300. In particular, each signal electrode 310 is composed of a plurality of pixel electrode portions 310a provided corresponding to each pixel and signal wiring portions 310b that connect them in a multiplex matrix, and extends in the Y direction. ing.
Reference numeral 350 denotes a liquid crystal driving circuit having a one-chip structure, and the liquid crystal driving circuit 350 and one end side (lower side in the figure) of the signal wiring portions 310b... Are connected via first routing wirings 331.
Further, reference numeral 340... Is a vertical conduction terminal, and the vertical conduction terminals 340... Are connected to terminals provided on a second substrate (not shown) by vertical conduction members 341. Further, the vertical conduction terminals 340... And the liquid crystal driving circuit 350 are connected via the second routing wirings 332.
[0045]
In this embodiment, the signal wiring portions 310b..., The first routing wiring 331... And the second routing wiring 332... Provided on the first substrate 300 are each formed using the above-described ejection device. . Therefore, defects such as disconnection and short circuit of the above-mentioned wirings are unlikely to occur, and it is easy to realize miniaturization and thinning.
[0046]
FIG. 7 is a cross-sectional view of the liquid crystal display device. In FIG. 7, a liquid crystal display device 450 is configured by combining a color filter 400 and a counter substrate 466 between upper and lower polarizing plates 462 and 467 and enclosing a liquid crystal composition 465 therebetween. Further, alignment films 461 and 464 are formed between the color filter 400 and the counter substrate 466, and a TFT (thin film transistor) element (not shown) and a pixel electrode 463 are formed on the inner surface of one counter substrate 466. Are formed in a matrix.
[0047]
The color filter 400 includes pixels (filter elements) arranged in a matrix, and the boundary between the pixels is partitioned by a partition (bank) 413. One of the inks (filter material) of red (R), green (G), and blue (B) is introduced into each pixel. That is, the color filter 400 includes a light-transmitting substrate 411 and a light-shielding partition 413. The portion where the partition 413 is not formed (removed) constitutes the pixel. Each color ink introduced into this pixel constitutes a colored layer 421. An overcoat layer 422 and an electrode layer 423 are formed on the top surfaces of the partition 413 and the colored layer 421.
[0048]
In this embodiment, the R, G, and B inks are introduced into the pixels formed by the partition 413 by a liquid ejection method. That is, ink droplets of R, G, and B are selectively ejected for each colored layer formation region by the liquid ejection head. Next, the applied ink is dried to obtain the colored layer 421. Similarly, the overcoat layer 422 is formed by a liquid discharge method.
[0049]
In the present embodiment, in the formation of the colored layer 421, the inclination angle of the ejection head (nozzle row) is appropriately changed and adjusted so that the pitch of each nozzle and the pitch of the pixels coincide with each other. In the formation of 422, the inclination angle of the discharge head (nozzle row) is appropriately changed to adjust the film thickness.
[0050]
Next, an organic EL device and a manufacturing method thereof will be described with reference to FIG. As shown in the figure, in the organic EL device 500, a circuit element unit 502 is laminated on a glass substrate 501, and a main organic EL element 504 is laminated on the circuit element unit 502. A sealing substrate 505 is formed above the organic EL element 504 with an inert gas space.
[0051]
In the organic EL element 504, a bank 512 is formed by an inorganic bank layer 512 a and an organic bank layer 512 b superimposed on the inorganic bank layer 512 a, and a matrix pixel is defined by the bank 512. In each pixel, the light emitting layer 510b and the hole injection / transport layer 510a of the pixel electrodes 511, R, G, and B are stacked from the lower side, and a plurality of thin films such as Ca and Al are stacked as a whole. The counter electrode 503 is covered.
[0052]
In this embodiment, the R, G, and B light emitting layers 510b and the hole injection / transport layer 510a are formed by a liquid discharge method. Similarly, after the hole injection / transport layer 510a is formed, the counter electrode 503 is formed by using a liquid metal material such as Ca or Al by a liquid discharge method. Note that when this portion is sealed with a highly airtight resin instead of the sealing substrate 505, this is preferably performed by a liquid discharge method.
[0053]
Also in the present embodiment, in the formation of the light emitting layer 510b and the hole injection / transport layer 510a, the inclination angle of the ejection head is appropriately changed, and the pitch of each nozzle and the pitch of the pixel are adjusted to match each other. In forming the electrode 503, the tilt angle of the ejection head is appropriately changed to adjust the film thickness.
[0054]
9A to 9C show an embodiment of the electronic device of the present invention.
The electronic apparatus of this example includes the display device of the present invention, such as the above-described liquid crystal display device, as display means.
FIG. 9A is a perspective view showing an example of a mobile phone. In FIG. 9A, reference numeral 600 denotes a mobile phone body, and reference numeral 601 denotes a display unit using the display device.
FIG. 9B is a perspective view illustrating an example of a portable information processing apparatus such as a word processor or a personal computer. In FIG. 9B, reference numeral 700 denotes an information processing apparatus, reference numeral 701 denotes an input unit such as a keyboard, reference numeral 703 denotes an information processing apparatus body, and reference numeral 702 denotes a display unit using the display device.
FIG. 9C is a perspective view showing an example of a wristwatch type electronic device. In FIG. 9C, reference numeral 800 denotes a watch body, and reference numeral 801 denotes a display unit using the display device.
Each of the electronic devices shown in FIGS. 9A to 9C includes the display device of the present invention as a display unit, so that display with excellent quality can be realized.
[0055]
As described above, the preferred embodiments according to the present invention have been described with reference to the accompanying drawings, but the present invention is not limited to the examples. Various shapes, combinations, and the like of the constituent members shown in the above-described examples are examples, and various modifications can be made based on design requirements and the like without departing from the gist of the present invention.
[Brief description of the drawings]
FIG. 1 is a diagram showing an embodiment of a discharge device according to the present invention.
FIG. 2 is a diagram illustrating a configuration example of a liquid ejection head including a plurality of ejection heads.
FIG. 3 is a perspective view schematically showing a configuration example of a liquid discharge head.
FIG. 4 is a diagram illustrating a relationship between an arrangement angle of nozzle rows and an arrangement pitch of nozzles.
FIG. 5 is a diagram schematically showing how the arrangement angles of a plurality of nozzle rows change.
FIG. 6 is a diagram showing a planar layout of a liquid crystal display device.
FIG. 7 is a cross-sectional view illustrating a liquid crystal display device.
FIG. 8 is a cross-sectional view showing an organic EL device.
FIG. 9 is a diagram showing an embodiment of an electronic apparatus according to the invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 ... Discharge device, 20 ... Board | substrate (base | substrate), 201,202,203 ... Discharge head, 211,212,213 ... Nozzle row | line | column, 250 ... Link mechanism, 251-258 ... Section 270 ... 1st adjustment mechanism, 271 ... Drive device, 280 ... second adjustment mechanism, 281 ... fulcrum, 282 ... linear motion guide.

Claims (5)

A discharge device comprising a plurality of discharge heads having a nozzle row in which nozzles for discharging liquid droplets are arranged, and a drive system for relatively moving the plurality of discharge heads and the workpiece along a scanning direction,
Two support arms arranged parallel to each other, a plurality of connection arms connected to each of the two support arms and arranged parallel to each other, the two support arms and the plurality of connection arms A link mechanism having a plurality of connected nodes;
A fulcrum that is at the same position as one node of the link mechanism and serves as a rotation center of the entire link mechanism ;
A linear guide that linearly guides another node of the link mechanism along the scanning direction;
A drive device that changes an angle between the support arm and the connection arm,
The plurality of ejection heads are respectively disposed on at least two of the plurality of connection arms, and the plurality of ejection heads are arranged at least along a direction intersecting the scanning direction.
The node of the link mechanism at the same position as the fulcrum and the node guided by the linear motion guide are arranged coaxially along the scanning direction,
When the angle between the support arm and the connection arm changes, the angle of the support arm with respect to the scanning direction changes, so that the scanning is performed between adjacent ejection heads among the plurality of ejection heads. A discharge device characterized in that a predetermined positional relationship between the nozzle rows in a direction orthogonal to the direction is maintained. The plurality of connecting arms on which the discharge heads are arranged are arranged in parallel to each other at equal intervals,
Between the connecting arms where the ejection head is arranged and adjacent, a node between one connecting arm and one support arm and a node between the other connecting arm and the other supporting arm are along the scanning direction. The discharge device according to claim 1 , wherein the discharge device is arranged on the same axis. The predetermined positional relationship is such that, with respect to a direction orthogonal to the scanning direction, between the adjacent ejection heads, one end nozzle near the other ejection head in the nozzle array of one ejection head and the other ejection head. 3. The ejection device according to claim 1, wherein the nozzle at one end of the nozzle row of the head closer to one ejection head is in the same position. The predetermined positional relationship is such that, with respect to a direction orthogonal to the scanning direction, between the adjacent ejection heads, one end nozzle near the other ejection head in the nozzle array of one ejection head and the other ejection head. 3. The ejection device according to claim 1, wherein a distance between the nozzle array of the heads and a nozzle at one end closer to one ejection head is the same as an arrangement pitch of the nozzles. . At least one section of the link mechanism, the discharge device according to any one of claims 1 to 4, characterized in that it is arranged at a position of the nozzle end of the nozzle row.

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