JP4215978B2 - Manufacturing method and manufacturing apparatus of liquid crystal display element - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for manufacturing a liquid crystal display element having a reflective film made of silver and an alloy containing silver, and an apparatus for manufacturing a liquid crystal display element.
[0002]
[Prior art]
Conventionally, as a display for a personal computer, a transmissive liquid crystal display that performs display using a backlight has been mainstream. However, in recent years, a display for a mobile electronic device such as a personal digital assistant (PDA) or a mobile phone is used. The demand for devices is increasing rapidly, and a reflective liquid crystal display element capable of reducing power consumption as compared with a transmissive liquid crystal display element has attracted attention. This reflective liquid crystal display element performs display by reflecting incident light from the outside with a reflecting plate, and since no backlight is required, the power consumption is saved, and the transmissive liquid crystal display element is There is an advantage that the electronic device can be driven for a long time as compared with the case where it is adopted.
[0003]
The position of the reflection plate used in the reflective liquid crystal display element includes an external method in which a reflection plate is installed outside the cell formed by a pair of substrates facing each other, and an internal structure in which the reflection plate is formed as a reflection film inside the cell. There are two ways of attaching.
[0004]
Of these, the external mounting method can reduce the manufacturing cost because the reflector mounting method is simple, and it is often used for a super twist nematic type liquid crystal display element that requires a particularly low cost.
[0005]
However, in the external method, parallax occurs due to the structure in which the reflector is installed outside the cell through the glass, resulting in insufficient visibility.
[0006]
On the other hand, the internal method can realize excellent visibility because a reflection film is formed inside the cell, and is mainly used in, for example, a thin film transistor (hereinafter referred to as TFT) liquid crystal display that emphasizes image quality. ing.
[0007]
Further, this internal reflection film has another advantage that the reflection film can have the function of an electrode for driving the liquid crystal. For this reason, aluminum, silver, or the like, which has a low resistance and a high reflectance, is used as a material for the reflective film.
[0008]
Conventionally, aluminum that exhibits excellent workability has been mainly used to facilitate the production of a reflective film, but recently, silver that exhibits higher reflectivity has been focused on enhancing display characteristics. Or the use of alloys containing silver is increasing.
[0009]
[Problems to be solved by the invention]
However, silver or an alloy containing silver is more difficult to handle than aluminum, and there are various disadvantages in the production of a reflective film. As one of them, after producing a reflective film made of silver or an alloy containing silver, if the reflective film is left in an exposed state, the surface of the reflective film turns yellow, and as a result, the display quality of the display is impaired. is there.
[0010]
It is said that the yellow discoloration of the reflective film made of silver or an alloy containing silver is caused by silver sulfidation or oxidation. In particular, in a clean room where TFTs are manufactured, a positive resist used in a photolithography process and a sulfur-containing substance such as sulfuric acid used in an etching process exist, so that a reflective film made of silver or an alloy containing silver An atmosphere that promotes the sulfidation of the water inevitably occurs.
[0011]
Therefore, in order to suppress discoloration of the reflective film, measures such as limiting the time for which the reflective film is exposed and allowed to stand and starting the polyimide coating process within a certain time are taken. Such a method of shortening the standing time has a large manufacturing restriction such as time adjustment of the entire manufacturing process.
[0012]
In addition, research and development of silver-containing alloys that are unlikely to cause discoloration due to neglect have been conducted, but no material having such characteristics has yet been discovered.
[0013]
Therefore, the present invention has been proposed in view of such a conventional situation, and a liquid crystal display element capable of improving display quality by improving discoloration of a reflective film made of silver or an alloy containing silver. An object of the present invention is to provide a manufacturing method and a liquid crystal display device manufacturing apparatus.
[0015]
If a reflective film made of silver or a silver-containing alloy is left for a certain period of time in a clean room where liquid crystal display element components such as a reflective film are manufactured, the surface of the reflective film turns yellow and the quality of the liquid crystal display element is improved. The problem of being damaged arises.
[0017]
Further, the method for manufacturing a liquid crystal display element according to the present invention includes a liquid crystal layer between a pair of substrates arranged opposite to each other, and a reflective film made of silver or an alloy containing silver is provided on one of the pair of substrates. A method of manufacturing a liquid crystal display element formed, wherein the reflective film is subjected to a chemical treatment with an alkaline chemical before the next step after the formation of the reflective film.
[0018]
In the manufacturing method of the liquid crystal display element as described above, for example, before moving to the next step such as the alignment film forming step, the reflective film is treated with an alkaline chemical solution to improve the surface state of the discolored reflective film, The reflective film recovers the excellent characteristics inherent to silver or an alloy containing silver. For this reason, a reflective film having excellent characteristics without discoloration can be used for manufacturing a liquid crystal display element without being restricted in the manufacturing process.
[0019]
Further, the method for manufacturing a liquid crystal display element according to the present invention includes a liquid crystal layer between a pair of substrates arranged opposite to each other, and a reflective film made of silver or an alloy containing silver is provided on one of the pair of substrates. A method for producing a liquid crystal display device, wherein the reflective film is subjected to a heat treatment and a chemical treatment with an alkaline chemical before the next step after the formation of the reflective film.
[0020]
In the manufacturing method of the liquid crystal display element as described above, the surface state of the discolored reflective film is improved by subjecting the reflective film to a heat treatment and a chemical treatment with an alkaline chemical before moving to the next step such as an alignment film formation step. In addition, the reflective film restores the excellent characteristics inherent to silver or an alloy containing silver. For this reason, a reflective film having excellent characteristics without discoloration can be used for manufacturing a liquid crystal display element without being restricted in the manufacturing process.
[0023]
The apparatus for manufacturing a liquid crystal display element according to the present invention has a liquid crystal layer between a pair of substrates arranged opposite to each other, and a reflective film made of silver or an alloy containing silver is provided on one of the pair of substrates. An apparatus for manufacturing a liquid crystal display element formed, comprising: a chemical treatment unit for treating the reflective film with an alkaline chemical before the next step after the formation of the reflective film.
[0024]
In the apparatus for manufacturing a liquid crystal display element as described above, the surface state of the discolored reflective film is obtained by, for example, treating the reflective film with an alkaline chemical solution in the chemical treatment unit before proceeding to the next step such as an alignment film forming step. And the reflective film restores the excellent properties inherent to silver or silver-containing alloys. For this reason, a reflective film having excellent characteristics without discoloration can be used for manufacturing a liquid crystal display element without being restricted in the manufacturing process.
[0025]
The apparatus for manufacturing a liquid crystal display element according to the present invention has a liquid crystal layer between a pair of substrates arranged opposite to each other, and a reflective film made of silver or an alloy containing silver is provided on one of the pair of substrates. An apparatus for manufacturing a liquid crystal display element, comprising: a heat treatment unit that heat-treats the reflective film after the formation of the reflective film, and a chemical treatment unit that performs chemical treatment with an alkaline chemical before the next step. And
[0026]
In the liquid crystal display device manufacturing apparatus as described above, for example, the heat treatment unit heat-treats the reflective film and the chemical treatment unit treats the reflective film with an alkaline chemical before proceeding to the next process such as the alignment film formation process. As a result, the surface state of the discolored reflective film is improved, and the reflective film recovers the excellent characteristics inherent to silver or an alloy containing silver. For this reason, a reflective film having excellent characteristics without discoloration can be used for manufacturing a liquid crystal display element without being restricted in the manufacturing process.
[0027]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a method for manufacturing a liquid crystal display element and an apparatus for manufacturing a liquid crystal display element to which the present invention is applied will be described in detail with reference to the drawings.
[0028]
First, a reflective liquid crystal display element employing an active matrix method manufactured by applying the manufacturing method of the present invention will be described with reference to FIG.
[0029]
The reflective liquid crystal display element 1 includes a first substrate 2 disposed on a light incident side and a second substrate 3 disposed opposite to the first substrate with a predetermined gap. Configured.
[0030]
The first substrate 2 is made of a transparent material such as glass. A transparent electrode 4 made of a transparent conductive material such as ITO (indium tin oxide) and a first alignment film 5 made of polyimide or the like are laminated in this order on the main surface of the first substrate 2 facing the second substrate 3. Being done.
[0031]
The second substrate 3 is made of, for example, borosilicate glass or the like, and covers the TFT 6 as a switching element for driving the liquid crystal and the second substrate 3 and the TFT 6 on the main surface facing the first substrate 2. The first interlayer insulating film 7 formed on the first interlayer insulating film 7, the second interlayer insulating film 8 overlaid on the first interlayer insulating film 7, and the TFT 6 electrically through the opening of the second interlayer insulating film 8. The reflective film 9 is connected, and the second interlayer insulating film 8 and the second alignment film 10 made of polyimide or the like formed on the reflective film 9 are included.
[0032]
The reflective film 9 shown in FIG. 1 shares the function of a reflective plate that reflects light incident from the first substrate 2 side and the function of an electrode that drives a liquid crystal layer described later. The reflective film 9 is made of silver or an alloy containing silver. Examples of the alloy containing silver include Ag—Pd—Cu (APC) and Ag—Pd—Au (APA).
[0033]
The TFT 6 includes a gate electrode 11 made of Mo, MoW, or the like formed on the second substrate 3, a gate insulating film 12 made of SiO ₂ superimposed on the upper surface of the gate electrode 11, and the gate insulating film 12 interposed therebetween. A semiconductor thin film 13 made of polysilicon is formed above the gate electrode 11. A source electrode 14 is drawn from the source of the semiconductor thin film 13 through the opening of the first interlayer insulating film 7. A drain electrode 15 made of Al is drawn from the drain of the semiconductor thin film 13 while being electrically connected to the reflective film 9.
[0034]
A liquid crystal layer 16 is provided in the gap between the first substrate 2 and the second substrate 3. The liquid crystal layer 16 is aligned in the uniaxial direction by the first alignment film 5 and the second alignment film 10, and the alignment direction is changed by applying a voltage between the transparent electrode 4 and the reflective film 9.
[0035]
In the liquid crystal display element 1, light incident from the first substrate 2 side passes through the liquid crystal layer 16 aligned by the transparent electrode 4 and the reflective film 9, reaches the reflective film 9, and is reflected by the reflective film 9. An arbitrary image is displayed by emitting reflected light from the liquid crystal layer 16 to the outside of the first substrate 2 again.
[0036]
Hereinafter, a method for manufacturing the above-described liquid crystal display element will be described.
[0037]
First, a gate electrode 11, a gate insulating film 12, and amorphous silicon are sequentially deposited and patterned on a second substrate 3 made of, for example, a transparent glass substrate, and the amorphous silicon is crystallized by annealing with an excimer laser to form a semiconductor thin film. 13, TFT 6 is formed. Further, impurities such as P and B are introduced into regions on both sides of the gate electrode 11 of the semiconductor thin film 13 to form a source and a drain. A first interlayer insulating film 7 is formed above the second substrate 3 so as to cover the TFT 6.
[0038]
Next, the first interlayer insulating film 7 corresponding to the source and drain of the semiconductor thin film 13 is opened by, for example, etching, and the source electrode 14 connected to the source through this opening and the drain electrode connected to the drain 15 is formed by patterning into a predetermined shape.
[0039]
Next, on the second substrate 3 so as to cover the TFT 6, the source electrode 14, and the drain electrode 15, a second interlayer having both a function as a scattering layer that causes scattering reflection and a function as an interlayer insulating film. An insulating film 8 is formed. A portion of the second interlayer insulating film 8 corresponding to the drain electrode 15 is opened by, for example, etching to form an opening.
[0040]
Next, a reflective film 9 as shown in FIG. 2 is formed by patterning a thin film made of silver or an alloy containing silver into a predetermined shape by sputtering or vacuum deposition, for example.
[0041]
Next, immediately before the next step, that is, the step of applying polyimide, for example, as the second alignment film 10, heat treatment is performed on the reflective film 9 for the purpose of improving the surface characteristics of the reflective film 9. If the reflective film 9 made of silver or an alloy containing silver is formed and then left in a clean room, there arises a problem that the surface of the reflective film 9 turns yellow due to sulfur in the atmosphere in the clean room. However, discoloration of the surface of the reflective film 9 can be improved by the heat treatment. That is, sulfur can be diffused from the surface of the discolored reflective film 9 by heat treatment, and the original excellent characteristics of silver or an alloy containing silver can be recovered.
[0042]
The specific temperature of the heat treatment is preferably performed within a range of 140 ° C. to 200 ° C., and thereby, an effect of improving discoloration can be reliably obtained. On the other hand, if the heat treatment temperature is less than 140 ° C., the diffusion of sulfur does not proceed and the discoloration improving effect becomes insufficient. Conversely, if the heat treatment temperature exceeds 200 ° C., the reflective film may become cloudy. .
[0043]
Also, the surface characteristics of the reflective film 9 can be improved by performing chemical treatment with an alkaline chemical solution on the discolored reflective film 9 as in the case of the heat treatment described above.
[0044]
The alkaline chemical solution has a stronger discoloration improving effect as the alkalinity becomes stronger. In particular, by using an alkaline chemical solution having a pH of 10 or more, the effect of the present invention can be obtained reliably and sufficiently. Further, the treatment method with an alkaline chemical solution is not particularly limited, and any method such as showering or dipping may be used.
[0045]
Specific alkaline chemicals include chemicals obtained by adding ammonia to pure water, chemicals obtained by adding tetramethylammonium hydroxide (TMAH) to pure water, and hydrogen added to these chemicals by bubbling or the like. And a chemical solution obtained by adding hydrogen to pure water.
[0046]
In addition, in order to improve discoloration, the chemical treatment of the alkaline chemical solution described above and heat treatment may be used in combination, and the order is arbitrary.
[0047]
Actually, the reflective film made of silver having undergone discoloration was treated with an alkaline chemical solution to confirm the effect of the present invention.
[0048]
A reflective film made of silver was formed on the substrate, and this substrate was left in the vicinity of a photolithography apparatus in a clean room for 72 hours to change the color. This discolored substrate was treated with pH 9 ammonia added water, pH 12 ammonia added water and pH 13.5 ammonia added water, respectively, and then the chromaticity of the surface of the reflective film was measured. The measurement result of the surface chromaticity of the reflective film is shown in FIG.
[0049]
FIG. 3 shows that the original chromaticity of silver immediately after the formation of the reflective film is recovered by treating the discolored reflective film with an alkaline chemical solution. In particular, it can be seen that the stronger the alkaline chemical solution is, the more drastically improved the discoloration improvement effect and the closer to the original chromaticity of silver immediately after the formation of the reflective film.
[0050]
After improving the surface state of the reflective film 9 as described above, the process of forming the alignment film 10 is immediately started. That is, for example, polyimide is applied on the reflective film 9 and dried to form the second alignment film 10. Further, rubbing is performed on the second alignment film 10.
[0051]
Also, the first substrate 2 in which the transparent electrode 4 and the first alignment film 5 are laminated in this order is prepared, and the first substrate 2 and the second substrate 3 are assembled to face each other, and further, liquid crystal is injected to liquid crystal. The reflective liquid crystal display element 1 shown in FIG. 1 is obtained by forming the layer 16 and bonding the polarizing plates.
[0052]
Conventionally, it is necessary to take measures to suppress the discoloration of the reflection film made of silver or an alloy containing silver, for example, to keep the standing time between the reflection film formation process and the next process within a certain time. Time adjustment of the entire manufacturing process was performed, and manufacturing restrictions were large.
[0053]
On the other hand, in the manufacturing method of the present invention, for example, before the next step such as the alignment film forming step, the reflective film is subjected to heat treatment and / or chemical treatment of an alkaline chemical solution to cause reflection of the discoloration. By improving the surface state of the film, the reflection characteristic inherent to silver or an alloy containing silver is recovered in the reflection film. For this reason, the excellent characteristics inherent to the silver or the silver-containing alloy are sufficiently extracted at a desired timing without being restricted in production when the silver or the silver-containing alloy is used as the reflective film. The reflecting film in the state can be used for the next step. Therefore, according to the present invention, a liquid crystal display element exhibiting excellent display quality can be manufactured relatively easily.
[0054]
Next, an example of a manufacturing apparatus for realizing the above-described method for improving the discoloration of the reflective film will be described with reference to FIG. The processing apparatus 20 shown in FIG. 4 is attached to the megasonic unit 21 that performs chemical treatment using an alkaline chemical, the rinse unit 22 that cleans the alkaline chemical used in the megasonic unit 21, and the rinse unit 22. An air knife 23 that removes moisture by wind pressure and a bake unit 24 that has a temperature raising device and performs heat treatment are provided in the order of steps.
[0055]
In order to improve the discoloration of the reflection film 9 by the processing apparatus 20, first, the second substrate 3 on which the reflection film 9 and the like are formed is held on the transfer carrier 25, and the transfer carrier 25 is then connected to the megasonic unit by the transfer robot. 21.
[0056]
In the megasonic unit 21, an alkaline chemical solution is sprayed onto the second substrate 3 and ultrasonic cleaning is performed to treat the reflective film 9 with a chemical solution.
[0057]
Next, the transport carrier 25 is moved to the rinsing unit 22, and the second substrate 3 on which the reflective film 9 is formed is sufficiently cleaned with, for example, pure water so that the alkaline chemical used in the megasonic unit 21 does not remain.
[0058]
Next, air is blown onto the cleaned second substrate 3 by an air knife 23 to drain water.
[0059]
Next, the transport carrier 25 is moved to the bake unit 24 to sufficiently dry the second substrate 3 on which the reflective film 9 is formed, and heat treatment is performed under a predetermined temperature condition of 140 ° C. to 200 ° C., for example.
[0060]
Finally, the transport carrier 25 is unloaded from the bake unit 24. Thereby, the discoloration of the surface of the reflective film 9 is improved, and the reflective film 9 that has recovered the excellent reflective properties inherent to silver or an alloy containing silver is obtained.
[0061]
Then, the second substrate 3 is used to immediately start the next process such as the alignment film forming process.
[0062]
By using the above-described processing apparatus, the surface state of the reflective film that has undergone discoloration is improved by heat-treating and / or treating the reflective film with an alkaline chemical before the next process such as an alignment film forming process. Thus, the reflective properties inherent to silver or an alloy containing silver are recovered in the reflective film. For this reason, the excellent characteristics inherent to the silver or the silver-containing alloy are sufficiently extracted at a desired timing without being restricted in production when the silver or the silver-containing alloy is used as the reflective film. The reflecting film in the state can be used for the next step. Therefore, according to the processing apparatus of the present invention, a reflective liquid crystal display element exhibiting excellent display quality can be manufactured relatively easily.
[0063]
In the above description, an apparatus including both a megasonic unit that performs a chemical treatment of an alkaline chemical solution and a bake unit that performs a heat treatment is given as an example of the processing apparatus. A configuration having only one of them may be used.
[0064]
In the above description, a so-called reflective liquid crystal display element has been described as an example. However, the present invention can also be applied to a method of manufacturing a liquid crystal display element using both a reflective type and a transmissive type, and this manufacturing apparatus.
[0065]
【Example】
Hereinafter, specific examples to which the present invention is applied will be described based on experimental results.
[0066]
[Example 1]
First, a TFT, a first interlayer insulating film, and a second interlayer insulating film as switching elements were formed on a borosilicate glass (Corning 7059) as a second substrate. Further, a thin film made of silver was formed thereon and patterned into a predetermined shape to form a reflective film. The series of steps was performed in a clean room. Next, the second substrate on which the reflective film was formed was left in the vicinity of the photolithography apparatus in the clean room for 3 days to sufficiently change the surface of the reflective film.
[0067]
Next, immediately before forming the alignment film, the second substrate on which the reflective film was formed was heat-treated at 160 ° C. for 5 minutes on a hot plate. When the reflective film was confirmed after the heat treatment, the discoloration was improved and the reflective film was restored to its original silver color.
[0068]
Immediately after the heat treatment, an alignment film was formed on the reflective film, and a reflective liquid crystal display element was produced through a known rubbing process, assembly process, liquid crystal injection process, and polarizing plate attaching process.
[0069]
When the characteristics of the manufactured reflective liquid crystal display element were confirmed, it showed excellent characteristics equivalent to those of the reflective liquid crystal display element manufactured without leaving for 3 days after the formation of the reflective film.
[0070]
[Example 2]
A reflective film was formed on the second substrate in the same manner as in Example 1 described above, and was left in the vicinity of a photolithography apparatus in a clean room for 3 days to sufficiently change the surface of the reflective film.
[0071]
Next, immediately before forming the alignment film, the second substrate on which the reflective film was formed was dipped in a 2.38% aqueous solution of tetramethylammonium (TMAH) as an alkaline chemical solution for 3 minutes. Thereafter, the second substrate on which the reflective film was formed was rinsed with pure water and then sufficiently dried.
[0072]
After the chemical treatment with an alkaline chemical, an alignment film was immediately formed on the reflective film, and a reflective liquid crystal display device was produced through a known rubbing process, assembly process, liquid crystal injection process, and polarizing plate attaching process.
[0073]
When the characteristics of the manufactured reflective liquid crystal display element were confirmed, it showed excellent characteristics equivalent to those of the reflective liquid crystal display element manufactured without leaving for 3 days after the formation of the reflective film.
[0074]
Example 3
A reflective film was formed on the second substrate in the same manner as in Example 1 described above, and was left in the vicinity of a photolithography apparatus in a clean room for 3 days to sufficiently change the surface of the reflective film.
[0075]
Next, immediately before forming the alignment film, a single substrate cleaning by megasonic is performed for 1 minute on the second substrate on which the reflective film is formed with a solution obtained by dissolving hydrogen in a 10 mmol aqueous solution of ammonia as an alkaline chemical solution. went. Thereafter, the second substrate on which the reflective film was formed was rinsed with pure water and then sufficiently dried.
[0076]
After the chemical treatment with an alkaline chemical, an alignment film was immediately formed on the reflective film, and a reflective liquid crystal display device was produced through a known rubbing process, assembly process, liquid crystal injection process, and polarizing plate attaching process.
[0077]
When the characteristics of the manufactured reflective liquid crystal display element were confirmed, it showed excellent characteristics equivalent to those of the reflective liquid crystal display element manufactured without leaving for 3 days after the formation of the reflective film.
[0078]
Example 4
A reflective film was formed on the second substrate in the same manner as in Example 1 described above, and was left in the vicinity of a photolithography apparatus in a clean room for 3 days to sufficiently change the surface of the reflective film.
[0079]
Next, just before the alignment film is formed, a single wafer cleaning by megasonic is performed on the second substrate on which the reflective film is formed with a solution obtained by dissolving hydrogen in a 10 mmol aqueous solution of ammonia as an alkaline chemical solution. Went for a minute. Thereafter, the second substrate on which the reflective film was formed was rinsed with pure water, drained with an air knife, and then heat treated at 180 ° C. for 5 minutes on a hot plate.
[0080]
After the chemical treatment with an alkaline chemical, an alignment film was immediately formed on the reflective film, and a reflective liquid crystal display device was produced through a known rubbing process, assembly process, liquid crystal injection process, and polarizing plate attaching process.
[0081]
When the characteristics of the manufactured reflective liquid crystal display element were confirmed, it showed excellent characteristics equivalent to those of the reflective liquid crystal display element manufactured without leaving for 3 days after the formation of the reflective film.
[0082]
[Comparative example]
A reflective film was formed on the second substrate in the same manner as in Example 1 described above, and was left in the vicinity of a photolithography apparatus in a clean room for 3 days to sufficiently change the surface of the reflective film.
[0083]
Next, without performing heat treatment or chemical treatment, an alignment film is formed as it is on the discolored reflective film, and after undergoing a known rubbing process, assembly process, liquid crystal injection process, and polarizing plate attaching process, a reflective liquid crystal display element Was made.
[0084]
When the characteristics of the manufactured reflective liquid crystal display device were confirmed, the yellow color of the reflective film was reflected, and the entire reflective liquid crystal display device was colored yellow, and the display quality was higher than in Examples 1 to 4. Was damaged.
[0085]
Based on the above results, the surface state of the reflective film that has undergone discoloration has been improved by performing heat treatment, chemical treatment with an alkaline chemical solution, or combined treatment with heat treatment and chemical treatment with an alkaline chemical solution prior to the alignment film formation step. It has been found that the display quality of the reflective liquid crystal display element can be improved.
[0086]
【The invention's effect】
As is clear from the above description, the method for manufacturing a liquid crystal display device according to the present invention includes, for example, heat-treating the reflective film and / or treating with a chemical solution of an alkaline chemical solution before proceeding to the next step such as an alignment film forming step. Thus, the surface state of the discolored reflective film is improved, and the reflective film recovers the excellent characteristics inherent in silver or an alloy containing silver. For this reason, a reflective film having excellent characteristics without discoloration can be used for manufacturing a liquid crystal display element without being restricted in the manufacturing process. Therefore, according to the present invention, it is easy to use silver or an alloy containing silver, which is difficult to handle in manufacture, as a reflective film, and a liquid crystal display element with excellent display quality can be manufactured.
[0087]
In addition, the liquid crystal display device manufacturing apparatus according to the present invention may be configured such that, for example, the reflective film is heat-treated with a heat treatment unit and / or a chemical solution treatment unit with an alkaline chemical solution before the next step such as an alignment film forming step. By processing, the surface state of the discolored reflective film is improved, and the reflective film recovers the excellent characteristics inherent to silver or an alloy containing silver. For this reason, a reflective film having excellent characteristics without discoloration can be used for manufacturing a liquid crystal display element without being restricted in the manufacturing process. Therefore, according to the present invention, it is possible to provide an apparatus for manufacturing a liquid crystal display element capable of facilitating the manufacture of a liquid crystal display element having excellent display quality.
FIG. 1 is a schematic cross-sectional view of a reflective liquid crystal display element to which the present invention is applied.
FIG. 2 is a schematic cross-sectional view of a second substrate in a state where a reflection film is formed.
FIG. 3 is a characteristic diagram showing the measurement result of the surface chromaticity of the reflective film.
FIG. 4 is a plan view showing a processing apparatus.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Reflective type liquid crystal display element 2 1st board | substrate 3 2nd board | substrate 6 TFT
9 Reflective film 10 Second alignment film 16 Liquid crystal layer

Claims (12)

A liquid crystal layer between a pair of substrates disposed oppositely, silver or Ranaru reflective film on one of the pair of substrates in a manufacturing method of a liquid crystal display device formed by formed by patterning into a predetermined shape There,
After the formation of the reflective film, the manufacturing method of the chemical treatment to that liquid crystal display device in alkaline chemical to the surface of the reflective film. Method of manufacturing a liquid crystal display device after the reflection film is chemical treatment with an alkaline chemical, 請 Motomeko 1, wherein you implement an orientation film formation process. The chemical method for manufacturing a liquid crystal display device of the pure water added to Na Ru請 Motomeko 1, wherein the ammonia. The chemical solution further method of manufacturing a liquid crystal display device of 請 Motomeko 3 wherein ing the addition of hydrogen. The chemical method for manufacturing a liquid crystal display element of pure water 請 Motomeko 1 wherein ing the addition of hydrogen. The chemical method for manufacturing a liquid crystal display device of the pure water added to Na Ru請 Motomeko 1 wherein tetramethylammonium hydroxide. The chemical method for manufacturing a liquid crystal display device of pH10 or Der Ru請 Motomeko 1 wherein. Facing a liquid crystal layer between a pair of substrates arranged in, while the silver or Ranaru reflective film of the pair of substrates a manufacturing method of a liquid crystal display element formed consisting now been patterned into a predetermined shape And
After the formation of the reflective film, the manufacturing method of the chemical treatment to that liquid crystal display device surface in the heat treatment and alkaline chemical liquid of the reflective film. The reflective film is chemical treatment with an alkaline chemical solution, then the method of manufacturing the liquid crystal display device to that請 Motomeko 8, wherein the heat treatment. Method of manufacturing a liquid crystal display device of the reflective film by heat-treating, then 請 Motomeko 8 wherein you chemical treatment with an alkaline chemical liquid. It has a liquid crystal layer between a pair of substrates disposed oppositely, silver or Ranaru reflective film one of the pair of substrates in the manufacturing apparatus of the liquid crystal display element formed by formed by patterning into a predetermined shape There,
After the formation of the reflective film, the manufacturing apparatus of the liquid crystal display element Ru with a chemical treatment unit for chemical treatment of the surface of the reflective film in an alkaline chemical solution. A liquid crystal layer between a pair of substrates disposed oppositely, silver or Ranaru reflective film on one of the pair of substrates in a manufacturing method of a liquid crystal display device formed by formed by patterning into a predetermined shape There,
After the formation of the reflective film, the manufacturing apparatus of the thermal processing unit and alkaline chemical in chemical processing to chemical processing unit Ru provided with a liquid crystal display device for heat treatment of the surface of the reflective film.

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