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JP4230376B2 - Nitrogen production equipment - Google Patents
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JP4230376B2 - Nitrogen production equipment - Google Patents

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JP4230376B2
JP4230376B2 JP2004026585A JP2004026585A JP4230376B2 JP 4230376 B2 JP4230376 B2 JP 4230376B2 JP 2004026585 A JP2004026585 A JP 2004026585A JP 2004026585 A JP2004026585 A JP 2004026585A JP 4230376 B2 JP4230376 B2 JP 4230376B2
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nitrogen
compressor
air
gas
production apparatus
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JP2005221092A (en
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秀幸 本田
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Nippon Sanso Holdings Corp
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/044Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using a single pressure main column system only
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04006Providing pressurised feed air or process streams within or from the air fractionation unit
    • F25J3/04012Providing pressurised feed air or process streams within or from the air fractionation unit by compression of warm gaseous streams; details of intake or interstage cooling
    • F25J3/04018Providing pressurised feed air or process streams within or from the air fractionation unit by compression of warm gaseous streams; details of intake or interstage cooling of main feed air
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04006Providing pressurised feed air or process streams within or from the air fractionation unit
    • F25J3/04109Arrangements of compressors and /or their drivers
    • F25J3/04115Arrangements of compressors and /or their drivers characterised by the type of prime driver, e.g. hot gas expander
    • F25J3/04121Steam turbine as the prime mechanical driver
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04006Providing pressurised feed air or process streams within or from the air fractionation unit
    • F25J3/04109Arrangements of compressors and /or their drivers
    • F25J3/04115Arrangements of compressors and /or their drivers characterised by the type of prime driver, e.g. hot gas expander
    • F25J3/04133Electrical motor as the prime mechanical driver
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04006Providing pressurised feed air or process streams within or from the air fractionation unit
    • F25J3/04109Arrangements of compressors and /or their drivers
    • F25J3/04139Combination of different types of drivers mechanically coupled to the same compressor, possibly split on multiple compressor casings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04248Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04284Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using internal refrigeration by open-loop gas work expansion, e.g. of intermediate or oxygen enriched (waste-)streams
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04521Coupling of the air fractionation unit to an air gas-consuming unit, so-called integrated processes
    • F25J3/04563Integration with a nitrogen consuming unit, e.g. for purging, inerting, cooling or heating
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2200/00Processes or apparatus using separation by rectification
    • F25J2200/72Refluxing the column with at least a part of the totally condensed overhead gas
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2245/00Processes or apparatus involving steps for recycling of process streams
    • F25J2245/40Processes or apparatus involving steps for recycling of process streams the recycled stream being air
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2245/00Processes or apparatus involving steps for recycling of process streams
    • F25J2245/42Processes or apparatus involving steps for recycling of process streams the recycled stream being nitrogen

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Separation By Low-Temperature Treatments (AREA)

Description

本発明は、窒素製造装置に関し、詳しくは、圧縮、精製、冷却した原料空気を精留塔に導入し、精留分離することによって製品窒素(窒素ガス及び/又は液化窒素)を製造するための窒素製造装置に関する。   The present invention relates to a nitrogen production apparatus, and more particularly, to produce product nitrogen (nitrogen gas and / or liquefied nitrogen) by introducing compressed, purified and cooled raw material air into a rectification column and performing rectification separation. The present invention relates to a nitrogen production apparatus.

工業的に窒素を製造する方法として、原料となる空気を圧縮して冷却・液化し、精留分離する空気液化分離方法が多く採用されている。この空気液化分離方法を採用した窒素製造装置における窒素の製造コストは、設備費と共に電力等のユーティリティ費で構成され、原料である空気を圧縮する動力がユーティリティ費の大部分を占めている。   As a method for industrially producing nitrogen, an air liquefaction separation method in which air as a raw material is compressed, cooled and liquefied, and rectified and separated is widely employed. The production cost of nitrogen in the nitrogen production apparatus employing this air liquefaction separation method is comprised of utility costs such as electric power as well as equipment costs, and the power for compressing the raw material air accounts for the majority of utility costs.

窒素製造装置での空気の圧縮には、そのほとんどが電動機で駆動する圧縮機が使用されている。電動機駆動型以外の大型圧縮機としては、スチームタービンで駆動する圧縮機が知られている。一般的に、スチームタービン駆動型の圧縮機と同敷地内において多量の余剰スチームが得られる場合には、スチームタービン駆動型の採用による動力節約のメリットは大きい。しかし、スチームタービン駆動型の場合、スチームを安定的に連続供給しなければならないという問題があり、常に一定のスチームを供給し続けることは、一般的に困難である。このため、スチームタービン駆動型圧縮機を採用する場合には、電動機駆動型圧縮機との並列使用といった対策が必要だった。   Most of the air compression in the nitrogen production apparatus uses a compressor driven by an electric motor. A compressor driven by a steam turbine is known as a large compressor other than the motor driven type. In general, when a large amount of surplus steam is obtained on the same site as the steam turbine driven compressor, the advantage of saving power by using the steam turbine driven type is great. However, in the case of the steam turbine drive type, there is a problem that the steam must be stably and continuously supplied, and it is generally difficult to always supply a constant steam. For this reason, when adopting a steam turbine driven compressor, measures such as parallel use with an electric motor driven compressor were required.

また、その他の圧縮機として、電動機駆動とスチームタービン駆動とを組み合わせた併用型の圧縮機がある。このような併用型圧縮機は、PSA式酸素製造装置の真空ポンプ(原理は圧縮機と同じ)として使用されたり(例えば、特許文献1参照。)、作業用の圧縮空気や計装空気等の圧縮に使用されたりすることがあった。   In addition, as another compressor, there is a combined type compressor in which an electric motor drive and a steam turbine drive are combined. Such a combined compressor is used as a vacuum pump (the principle is the same as that of a compressor) of a PSA oxygen production apparatus (for example, refer to Patent Document 1), compressed air for working, instrumented air, etc. It was sometimes used for compression.

上述の併用型圧縮機の場合、スチーム供給の安定性が多少損なわれても、電動機駆動で圧縮を継続できるメリットがある。しかし、併用型圧縮機の場合でも、スチームが途絶えるとタービン側が圧縮機として作動し、その圧縮熱によってタービンが過熱してしまうという問題がある。このため、併用型圧縮機でも、最低限のスチーム供給がないと安定した運転ができない。   In the case of the above-mentioned combined compressor, there is an advantage that the compression can be continued by driving the electric motor even if the stability of the steam supply is somewhat impaired. However, even in the case of a combined compressor, there is a problem that if steam is interrupted, the turbine side operates as a compressor, and the turbine is overheated by the compression heat. For this reason, even a combined compressor cannot be operated stably without a minimum steam supply.

また、スチームタービン駆動型は、軸受けの潤滑油にスチームが混入しやすいという問題点があり、タービンと軸受との間にシールガスを導入し、スチームと潤滑油とが混合することを避ける必要がある。シールガスは、一般に乾燥空気が用いられるが、タービン軸にシールガスを供給し続けるためには、乾燥空気供給設備等を併設する必要があり、イニシャルコストが高くなるうえ、設置面積が増加するなどの問題がある。したがって、併用型圧縮機も、一般的にあまり普及していなかった。   In addition, the steam turbine drive type has a problem that steam tends to be mixed into the lubricating oil of the bearing, and it is necessary to introduce a seal gas between the turbine and the bearing to avoid mixing the steam and the lubricating oil. is there. As the seal gas, dry air is generally used. However, in order to continue supplying the seal gas to the turbine shaft, it is necessary to install a dry air supply facility, etc., which increases the initial cost and increases the installation area. There is a problem. Therefore, the combined compressor has generally not been widely used.

特に、空気液化分離装置では、PSA式酸素製造装置等とは異なり、原料空気の供給が不安定になって精留塔内の精留状態が崩れると、再度、正常な状態に戻すのに、極めて長時間を要する装置である。したがって、原料空気圧縮機には、信頼性と運転の安定した継続性とが要求されるため、これまで電動機駆動・スチームタービン駆動併用型の圧縮機を、単独で空気液化分離装置に採用する例はなかった。   In particular, in the air liquefaction separation apparatus, unlike the PSA type oxygen production apparatus, etc., when the supply of the raw material air becomes unstable and the rectification state in the rectification column collapses, to return to the normal state again, It is a device that takes an extremely long time. Therefore, since the raw material air compressor is required to have reliability and stable continuity of operation, an example in which an electric motor / steam turbine combined compressor has been used alone in an air liquefaction separation apparatus until now. There was no.

近年、空気液化分離装置からの大量の高純度窒素需要がある半導体製造工場において、高い経済性と省エネ効果に注目し、工場内の電力供給に、コ・ジェネレーションシステムを採用する例が出てきている。コ・ジェネレーションシステムでは、発電の際に生じる排熱の利用により、高い圧力のスチームを得ることができる。
特開2002−210320号公報
In recent years, in semiconductor manufacturing factories where a large amount of high-purity nitrogen from air liquefaction separators is required, attention has been focused on high economic efficiency and energy-saving effects, and examples of using co-generation systems for power supply in factories have come out. Yes. In the co-generation system, high pressure steam can be obtained by using exhaust heat generated during power generation.
JP 2002-210320 A

発明者らは、このコ・ジェネレーションシステムで発生するスチームに着目し、複数台の併用型圧縮機や、他の電動機駆動の圧縮機と並列使用することなしに、電動機駆動とスチームタービン駆動併用型の圧縮機を空気液化分離方法による窒素製造装置に用いることを検討した。   The inventors pay attention to the steam generated in this cogeneration system, and without using in parallel with a plurality of combined compressors or other motor-driven compressors, combined use of motor drive and steam turbine drive The use of this compressor was investigated for the nitrogen production equipment by the air liquefaction separation method.

その結果、気液化分離方法による窒素製造装置に、電動機・スチームタービン駆動併用型圧縮機を単独で使用するとともに、窒素製造装置内で発生した水分を含まないガスを、タービンのシールガスとして用いることにより、動力削減を実現できることを見出した。   As a result, in the nitrogen production apparatus using the gas-liquefaction separation method, an electric motor / steam turbine drive combined compressor is used alone, and a gas not containing moisture generated in the nitrogen production apparatus is used as a turbine seal gas. It was found that power reduction can be realized.

本発明は、電動機・スチームタービン駆動併用型圧縮機を窒素製造装置に効果的に適用することにより、動力費を大幅に削減できる窒素製造装置を提供することを目的としている。   An object of the present invention is to provide a nitrogen production apparatus that can significantly reduce the power cost by effectively applying the compressor combined with electric motor and steam turbine drive to the nitrogen production apparatus.

上記目的を達成するため、本発明の窒素製造装置は、原料空気圧縮機で昇圧した原料空気を精製器で精製し、熱交換器で冷却して精留塔に導入し、液化精留分離を行うことにより窒素を製造する窒素製造装置において、前記原料空気圧縮機の駆動源として電動機とスチームタービンとを一体に備えた圧縮機を単独で使用するとともに、前記精製器で原料空気を精製した精製空気及び前記精留塔から抜き出されて前記熱交換器で昇温した製品窒素ガスのいずれか少なくとも一方の一部を、前記スチームタービンのタービン軸にシールガスとして供給する経路を備えていることを特徴としている。   In order to achieve the above object, the nitrogen production apparatus of the present invention purifies the raw air pressurized by the raw air compressor with a purifier, cools it with a heat exchanger, introduces it into the rectification tower, and performs liquefaction rectification separation. In a nitrogen production apparatus that produces nitrogen by performing purification using a compressor that integrally includes an electric motor and a steam turbine as a drive source for the raw air compressor, and purifying the raw air with the purifier A path for supplying a part of at least one of air and product nitrogen gas extracted from the rectification tower and heated by the heat exchanger as a seal gas to the turbine shaft of the steam turbine; It is characterized by.

さらに、本発明の窒素製造装置は、窒素製造装置に設置されているバックアップ設備から得られる窒素ガスを前記スチームタービンのタービン軸にシールガスとして供給する経路を備えていることを特徴としている。   Furthermore, the nitrogen production apparatus of the present invention is characterized by comprising a path for supplying nitrogen gas obtained from a backup facility installed in the nitrogen production apparatus as a seal gas to the turbine shaft of the steam turbine.

本発明の窒素製造装置によれば、原料空気圧縮機の駆動源の一部をスチームタービンで賄うようにしているので、電動機の電力消費量を削減して製品窒素の動力原単位を低減することができる。   According to the nitrogen production apparatus of the present invention, a part of the drive source of the raw material air compressor is covered by the steam turbine, so that the power consumption of the product nitrogen can be reduced and the power consumption of the product nitrogen can be reduced. Can do.

図1は本発明の一形態例を示す窒素製造装置の系統図である。この窒素製造装置は、原料空気を昇圧する原料空気圧縮機11と、昇圧された原料空気を精製する精製器としての前処理吸着器12と、精製された原料空気を冷却する主熱交換器13と、冷却された原料空気を窒素と酸素富化空気とに精留分離する精留塔14と、バックアップ設備として設けられた液化窒素貯槽15とを備えている。   FIG. 1 is a system diagram of a nitrogen production apparatus showing an embodiment of the present invention. This nitrogen production apparatus includes a raw material air compressor 11 that pressurizes the raw material air, a pretreatment adsorber 12 that serves as a purifier for purifying the pressurized raw material air, and a main heat exchanger 13 that cools the purified raw material air. And a rectifying tower 14 for rectifying and separating the cooled raw material air into nitrogen and oxygen-enriched air, and a liquefied nitrogen storage tank 15 provided as a backup facility.

原料空気圧縮機11は、駆動源として電動機16とスチームタービン17とを有する電動機駆動・スチームタービン駆動併用型圧縮機を単独で使用している。スチームタービン17のタービン軸17aには、窒素製造装置内で発生する水分を含まないガスが、シールガス経路18を通って供給されている。   The raw material air compressor 11 uses an electric motor drive / steam turbine drive type compressor having an electric motor 16 and a steam turbine 17 as drive sources. The turbine shaft 17 a of the steam turbine 17 is supplied with a gas that does not contain moisture generated in the nitrogen production apparatus through the seal gas path 18.

濾過器21を通して吸入された所定量の原料空気は、電動機16及びスチームタービン17で駆動される各圧縮段11a,11b,11cで圧縮されるとともに、インタークーラー11d,11e及びアフタークーラー11fで冷却され、所定圧力、所定温度の昇圧原料空気となる。   A predetermined amount of raw material air sucked through the filter 21 is compressed by the compression stages 11a, 11b, and 11c driven by the electric motor 16 and the steam turbine 17, and cooled by the intercoolers 11d and 11e and the aftercooler 11f. The pressurized raw material air has a predetermined pressure and a predetermined temperature.

昇圧原料空気は、前処理吸着器12の一方の吸着筒12aに導入され、水分、二酸化炭素等の不純物が吸着除去されて精製原料空気となる。この精製原料空気は、主熱交換器13に導入され、戻りガスと熱交換することによって液化点付近まで冷却される。冷却された原料空気は、精留塔14の下部に導入され、この精留塔14内での精留操作によって塔上部の高純度窒素ガスと塔底部の酸素富化液化空気とに分離する。   The pressurized raw material air is introduced into one adsorption cylinder 12a of the pretreatment adsorber 12, and impurities such as moisture and carbon dioxide are adsorbed and removed to become purified raw material air. This purified raw material air is introduced into the main heat exchanger 13 and cooled to near the liquefaction point by exchanging heat with the return gas. The cooled raw material air is introduced into the lower part of the rectifying column 14, and is separated into high-purity nitrogen gas at the upper part of the column and oxygen-enriched liquefied air at the bottom of the column by the rectifying operation in the rectifying column 14.

このとき、精留塔14の内部では、上昇ガス及び下降液において、塔下部の大気組成(酸素約21%)から塔上部の製品窒素純度(酸素約1ppm)までの組成分布が発生している。装置の運転を停止すると、全ての液が塔底部に流下して塔内部の組成分布が解消されてしまうので、これを正常な組成分布に戻すためには極めて長時間を必要とする。また、原料空気の導入量や導入圧力が変化しても、塔内の組成分布が変動するので原料空気の供給は、安定していることが望まれる。   At this time, in the ascending gas and descending liquid, a composition distribution from the atmospheric composition in the lower part of the tower (oxygen of about 21%) to the product nitrogen purity in the upper part of the tower (oxygen of about 1 ppm) occurs in the rectifying column 14. . When the operation of the apparatus is stopped, all the liquid flows down to the bottom of the tower and the composition distribution inside the tower is eliminated. Therefore, it takes a very long time to restore this to the normal composition distribution. Further, since the composition distribution in the tower fluctuates even if the introduction amount or introduction pressure of the raw air changes, it is desirable that the supply of the raw air is stable.

塔底部の酸素富化液化空気は、精留塔14の底部から抜き出され、減圧弁22で減圧され、凝縮器23で気化し、一部が膨張タービン24で断熱膨張した後、前記主熱交換器13で原料空気と熱交換し、常温に昇温して廃ガスとして抜き出される。この廃ガスの一部は加熱器25を有する再生経路を通り、前処理吸着器12の他方の吸着筒12bの再生ガスとして用いられる。   The oxygen-enriched liquefied air at the bottom of the column is extracted from the bottom of the rectifying column 14, decompressed by the pressure reducing valve 22, vaporized by the condenser 23, and partially adiabatically expanded by the expansion turbine 24. The exchanger 13 exchanges heat with the raw material air, raises the temperature to room temperature, and is extracted as waste gas. Part of this waste gas passes through the regeneration path having the heater 25 and is used as the regeneration gas for the other adsorption cylinder 12b of the pretreatment adsorber 12.

塔上部の高純度窒素ガスは一部が凝縮器23で液化して精留塔14の下降液となり、残部の高純度窒素ガスが、主熱交換器13で原料空気と熱交換し、常温に昇温してから弁26を通って製品窒素ガスとして採取される。装置の起動時には、液化窒素貯槽15内の液化窒素を蒸発器27で気化させて窒素ガスとした後、弁28を通って装置系内に導入される。   A portion of the high-purity nitrogen gas at the top of the column is liquefied by the condenser 23 to become the descending liquid of the rectifying column 14, and the remaining high-purity nitrogen gas is heat-exchanged with the raw material air by the main heat exchanger 13 to reach room temperature After the temperature rises, it is collected as product nitrogen gas through the valve 26. At startup of the apparatus, liquefied nitrogen in the liquefied nitrogen storage tank 15 is vaporized by the evaporator 27 to form nitrogen gas, and then introduced into the apparatus system through the valve 28.

また、前記シールガス経路18には、前記前処理吸着器12で精製された精製原料空気の一部、前記弁26を通って採取される製品窒素ガスの一部、液化窒素貯槽15内の液化窒素を蒸発器27で気化して弁28から装置系内に導入される窒素ガス(導入窒素ガス)の一部の3種のガスを導入できるようにしている。すなわち、弁31を有する経路32から精製原料空気の一部、あるいは、弁33を有する経路34から製品窒素ガスの一部又は導入窒素ガスの一部を装置の運転状況等に応じてシールガス経路18に供給し、タービン軸17aのシールガスとして供給できるように形成している。   Further, in the seal gas path 18, a part of the purified raw material air purified by the pretreatment adsorber 12, a part of the product nitrogen gas collected through the valve 26, and the liquefaction in the liquefied nitrogen storage tank 15. Nitrogen is vaporized by the evaporator 27 and a part of three types of nitrogen gas (introduced nitrogen gas) introduced from the valve 28 into the system can be introduced. That is, a part of the purified raw material air from the path 32 having the valve 31 or a part of the product nitrogen gas or a part of the introduced nitrogen gas from the path 34 having the valve 33 according to the operating condition of the apparatus, etc. 18 so that it can be supplied as a seal gas for the turbine shaft 17a.

なお、精製原料空気の一部と製品窒素ガスの一部とは、いずれか一方のみを供給できるようにしてもよいが、精製原料空気や製品窒素ガスが十分に得られない装置起動時にもタービン軸17aのシールガスを供給するため、前記導入窒素ガスをシールガスとして供給する経路は設置しておくべきである。また、装置の運転状態に関係なく得ることが可能な導入窒素ガスのみをシールガスとして供給するように形成し、他の経路は設けないようにしてもよい。さらに、シールガスとして用いるのに適当な圧力を有していれば、精留塔14の適当な位置から抜き出したガス(抜き出した液を気化させたものを含む)をシールガスとして供給することが可能である。   It should be noted that only one of the purified raw material air and part of the product nitrogen gas may be supplied. In order to supply the seal gas for the shaft 17a, a path for supplying the introduced nitrogen gas as the seal gas should be provided. Further, only the introduced nitrogen gas that can be obtained regardless of the operation state of the apparatus may be supplied as the seal gas, and no other path may be provided. Furthermore, if it has a pressure suitable for use as a sealing gas, a gas extracted from an appropriate position of the rectifying column 14 (including a gas obtained by vaporizing the extracted liquid) can be supplied as a sealing gas. Is possible.

このように形成した窒素製造装置は、原料空気圧縮機11として電動機駆動とスチームタービン駆動とを併用した圧縮機を単独で使用しているので、電動機駆動の従来の原料空気圧縮機に比べて電動機の電力消費量を大幅に削減することができる。また、電動機駆動とスチームタービン駆動とを併用することにより、スチーム供給量が変動するような場合でも、電動機によって所定の原料空気圧縮能力を得ることができるので、製品窒素の製造に必要な圧力及び流量の圧縮空気を安定して得ることができる。   Since the nitrogen production apparatus formed in this way uses a compressor that uses both electric motor drive and steam turbine drive alone as the raw material air compressor 11, the electric motor compared to a conventional raw material air compressor driven by an electric motor. The power consumption can be greatly reduced. In addition, by using both the electric motor drive and the steam turbine drive, even when the steam supply amount fluctuates, a predetermined raw material air compression capability can be obtained by the electric motor. A flow of compressed air can be obtained stably.

さらに、装置運転中は、装置内で安定した状態で発生する精製原料空気の一部や製品窒素ガスの一部、あるいは、バックアップ設備からの窒素ガスをタービン軸17aのシールガスとして供給することにより、従来のように乾燥空気供給設備等を併設する必要がなく、イニシャルコストを削減できるとともに、設置面積が増加することもない。   Further, during operation of the apparatus, a part of the purified raw material air generated in a stable state in the apparatus, a part of the product nitrogen gas, or a nitrogen gas from the backup equipment is supplied as a seal gas for the turbine shaft 17a. Thus, there is no need to install a dry air supply facility or the like as in the prior art, and the initial cost can be reduced and the installation area does not increase.

加えて、電力やスチームの発生源としてコ・ジェネレーションシステムを組み合わせることにより、より効果的な運転を行うことができ、動力費のさらなる低減を図ることができる。   In addition, by combining a co-generation system as a source of electric power and steam, more effective operation can be performed, and the power cost can be further reduced.

図1に示す系統を有する窒素製造装置において、原料空気圧縮機で3800Nm/hの原料空気を760kPa(7.6bar)まで昇圧し、シールガスとして精製原料空気の一部20Nm/hを使用し、製品窒素ガスを1530Nm/h生産する場合、原料空気圧縮機の所要圧縮動力は440kWとなる。 In the nitrogen production apparatus having the system shown in FIG. 1, the feed air compressor is used to pressurize the feed air of 3800 Nm 3 / h to 760 kPa (7.6 bar), and a part of purified feed air 20 Nm 3 / h is used as the seal gas. When the product nitrogen gas is produced at 1530 Nm 3 / h, the required compression power of the raw material air compressor is 440 kW.

原料空気圧縮機の駆動源として、定格500kWの電動機と定格400kWのスチームタービンとを一体に備えた圧縮機を単独で使用し、スチームタービンに1800kPa(18bar)、273℃のスチームを供給すると、スチームタービンで膨張し、800kPa(8bar)に減圧して返送される状態となった。定格運転点において、スチームタービンに約14ton/hのスチームを供給すると、このスチームタービンで約396kWの動力が発生し、不足する約44kWが電動機からの動力となる。   When a compressor equipped with a 500 kW motor and a 400 kW steam turbine is used alone as a driving source for the raw air compressor, steam at 1800 kPa (18 bar) and 273 ° C is supplied to the steam turbine. It was expanded by a turbine, and returned to a state where the pressure was reduced to 800 kPa (8 bar). When steam of about 14 ton / h is supplied to the steam turbine at the rated operating point, about 396 kW of power is generated in the steam turbine, and about 44 kW which is insufficient becomes power from the electric motor.

したがって、3800Nm/hの原料空気を760kPa(7.6bar)まで昇圧するのに、電動機のみを駆動源としたときは、その電力消費量が440kWであるのに対し、スチームタービンを併用することにより、電動機の電力消費量を44kWにまで大幅に削減できる。 Therefore, when the pressure of the raw material air of 3800 Nm 3 / h is increased to 760 kPa (7.6 bar), when only the electric motor is used as the driving source, the power consumption is 440 kW, but the steam turbine is used together. As a result, the power consumption of the electric motor can be significantly reduced to 44 kW.

本発明の一形態例を示す窒素製造装置の系統図である。It is a systematic diagram of the nitrogen manufacturing apparatus which shows one example of this invention.

符号の説明Explanation of symbols

11…原料空気圧縮機、11a,11b,11c…圧縮段、11d,11e…インタークーラー、11f…アフタークーラー、12…前処理吸着器、12a,12b…吸着筒、13…主熱交換器、14…精留塔、15…液化窒素貯槽、16…電動機、17…スチームタービン、17a…タービン軸、18…シールガス経路、21…濾過器、22…減圧弁、23…凝縮器、24…膨張タービン、25…加熱器、27…蒸発器、26,28,31,33…弁、32,34…経路   DESCRIPTION OF SYMBOLS 11 ... Raw material air compressor, 11a, 11b, 11c ... Compression stage, 11d, 11e ... Intercooler, 11f ... After cooler, 12 ... Pre-treatment adsorber, 12a, 12b ... Adsorption cylinder, 13 ... Main heat exchanger, 14 ... Rectifying tower, 15 ... liquefied nitrogen storage tank, 16 ... electric motor, 17 ... steam turbine, 17a ... turbine shaft, 18 ... seal gas path, 21 ... filter, 22 ... pressure reducing valve, 23 ... condenser, 24 ... expansion turbine, 25 ... heater, 27 ... evaporator, 26, 28, 31, 33 ... valve, 32, 34 ... path

Claims (2)

原料空気圧縮機で昇圧した原料空気を精製器で精製し、熱交換器で冷却して精留塔に導入し、液化精留分離を行うことにより窒素を製造する窒素製造装置において、前記原料空気圧縮機の駆動源として電動機とスチームタービンとを一体に備えた圧縮機を単独で使用するとともに、前記精製器で原料空気を精製した精製空気及び前記精留塔から抜き出されて前記熱交換器で昇温した製品窒素ガスのいずれか少なくとも一方の一部を、前記スチームタービンのタービン軸にシールガスとして供給する経路を備えていることを特徴とする窒素製造装置。   In the nitrogen production apparatus for producing nitrogen by purifying the raw air pressurized by the raw air compressor with a purifier, cooling it with a heat exchanger, introducing it into a rectifying column, and performing liquefaction rectification separation, the raw air A compressor that integrally includes an electric motor and a steam turbine is used alone as a driving source for the compressor, and purified air obtained by refining raw material air by the purifier and the heat exchanger extracted from the rectification tower A nitrogen production apparatus comprising a path for supplying at least a part of any one of the product nitrogen gas heated in step 1 as a seal gas to a turbine shaft of the steam turbine. 窒素製造装置に設置されているバックアップ設備から得られる窒素ガスを前記スチームタービンのタービン軸にシールガスとして供給する経路を備えていることを特徴とする請求項1記載の窒素製造装置。   The nitrogen production apparatus according to claim 1, further comprising a path for supplying nitrogen gas obtained from a backup facility installed in the nitrogen production apparatus as a seal gas to a turbine shaft of the steam turbine.
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