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JP4252005B2 - Method for manufacturing glass base material for hole fiber, hole fiber and method for manufacturing the same - Google Patents
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JP4252005B2 - Method for manufacturing glass base material for hole fiber, hole fiber and method for manufacturing the same - Google Patents

Method for manufacturing glass base material for hole fiber, hole fiber and method for manufacturing the same Download PDF

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JP4252005B2
JP4252005B2 JP2004080456A JP2004080456A JP4252005B2 JP 4252005 B2 JP4252005 B2 JP 4252005B2 JP 2004080456 A JP2004080456 A JP 2004080456A JP 2004080456 A JP2004080456 A JP 2004080456A JP 4252005 B2 JP4252005 B2 JP 4252005B2
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glass
glass preform
holey fiber
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JP2005263576A (en
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哲也 乙坂
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Shin Etsu Chemical Co Ltd
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Priority to KR1020050003785A priority patent/KR101164672B1/en
Priority to PCT/JP2005/003919 priority patent/WO2005090247A1/en
Priority to TW094108479A priority patent/TW200533618A/en
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    • EFIXED CONSTRUCTIONS
    • E02HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
    • E02DFOUNDATIONS; EXCAVATIONS; EMBANKMENTS; UNDERGROUND OR UNDERWATER STRUCTURES
    • E02D29/00Independent underground or underwater structures; Retaining walls
    • E02D29/02Retaining or protecting walls
    • E02D29/0258Retaining or protecting walls characterised by constructional features
    • E02D29/0266Retaining or protecting walls characterised by constructional features made up of preformed elements
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/01205Manufacture of preforms for drawing fibres or filaments starting from tubes, rods, fibres or filaments
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2203/00Fibre product details, e.g. structure, shape
    • C03B2203/10Internal structure or shape details
    • C03B2203/14Non-solid, i.e. hollow products, e.g. hollow clad or with core-clad interface
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2203/00Fibre product details, e.g. structure, shape
    • C03B2203/42Photonic crystal fibres, e.g. fibres using the photonic bandgap PBG effect, microstructured or holey optical fibres
    • EFIXED CONSTRUCTIONS
    • E02HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
    • E02DFOUNDATIONS; EXCAVATIONS; EMBANKMENTS; UNDERGROUND OR UNDERWATER STRUCTURES
    • E02D2200/00Geometrical or physical properties
    • E02D2200/16Shapes
    • E02D2200/165Shapes polygonal
    • E02D2200/1664Shapes polygonal made from multiple elements
    • EFIXED CONSTRUCTIONS
    • E02HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
    • E02DFOUNDATIONS; EXCAVATIONS; EMBANKMENTS; UNDERGROUND OR UNDERWATER STRUCTURES
    • E02D2200/00Geometrical or physical properties
    • E02D2200/16Shapes
    • E02D2200/1685Shapes cylindrical
    • EFIXED CONSTRUCTIONS
    • E02HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
    • E02DFOUNDATIONS; EXCAVATIONS; EMBANKMENTS; UNDERGROUND OR UNDERWATER STRUCTURES
    • E02D2600/00Miscellaneous
    • E02D2600/20Miscellaneous comprising details of connection between elements
    • EFIXED CONSTRUCTIONS
    • E02HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
    • E02DFOUNDATIONS; EXCAVATIONS; EMBANKMENTS; UNDERGROUND OR UNDERWATER STRUCTURES
    • E02D2600/00Miscellaneous
    • E02D2600/40Miscellaneous comprising stabilising elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02Optical fibres with cladding with or without a coating
    • G02B6/02295Microstructured optical fibre
    • G02B6/02314Plurality of longitudinal structures extending along optical fibre axis, e.g. holes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Manufacturing & Machinery (AREA)
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  • Organic Chemistry (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Mining & Mineral Resources (AREA)
  • Paleontology (AREA)
  • Civil Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structural Engineering (AREA)
  • Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Description

本発明は、全長にわたって複数の孔があいた光ファイバ(以下、単に空孔ファイバと称する)の純度を高めた空孔ファイバ用ガラス母材の製造方法、空孔ファイバ及びその製造方法に関する。   The present invention relates to a method for producing a glass preform for a holey fiber with improved purity of an optical fiber having a plurality of holes over its entire length (hereinafter simply referred to as a holey fiber), a holey fiber, and a method for manufacturing the holey fiber.

通常、広く使用されている光ファイバは、石英ガラス等の中心部にコアと称される屈折率の高い領域を持たせた、中実の構造を有している。これに対し、特許文献1で開示されているフォトニック結晶ファイバやホーリーファイバといった、内部に空孔を有する光ファイバが現在注目されている。フォトニック結晶ファイバは、規則正しく配列した孔をファイバ中に設けることによりフォトニックバンドギャップを形成し、これに欠陥を付与することで光を導波するものである。   In general, a widely used optical fiber has a solid structure in which a region having a high refractive index called a core is provided at the center of quartz glass or the like. On the other hand, optical fibers having pores inside such as photonic crystal fibers and holey fibers disclosed in Patent Document 1 are currently attracting attention. A photonic crystal fiber forms a photonic band gap by providing regularly arranged holes in the fiber, and guides light by adding defects to the photonic band gap.

ホーリーファイバは、クラッド中に孔を設け、クラッドの実効屈折率を低下させてコアとの間に屈折率差を与えるものであり、その導波原理には、従来の光ファイバと同様に全反射が用いられる。その他、従来の光ファイバのコア周辺に孔を開けた形状を有する空孔付加型ファイバも提案されている。
これらのファイバはいずれも空孔を有しており、その形状、大きさ及び配列等がその伝送特性に大きな影響を与える。
A holey fiber has a hole in the cladding and lowers the effective refractive index of the cladding to give a difference in refractive index from the core. The waveguide principle is totally reflected like conventional optical fibers. Is used. In addition, a hole-added fiber having a shape in which a hole is formed around the core of a conventional optical fiber has been proposed.
All of these fibers have holes, and their shape, size, arrangement, etc. have a great influence on their transmission characteristics.

これらのファイバの製造には、特許文献2で開示されているようなガラス細管(キャピラリー)を束ねたものを線引きする方法(キャピラリー法、又はスタックアンドドロー法)と、特許文献3,4で開示されているようなガラスロッドに孔を開けて線引きする方法(孔開け法)とがある。なお、フォトニック結晶ファイバ、ホーリーファイバ、空孔付加型ファイバ等の空孔を有する光ファイバを、以下、空孔ファイバと総称する。
孔開け法は、図1に示すように、多孔質ガラス母材を合成し、透明化した後に孔開け加工を行うものである。
For the production of these fibers, a method of drawing a bundle of glass capillaries (capillary) as disclosed in Patent Document 2 (capillary method or stack and draw method) and disclosed in Patent Documents 3 and 4 There is a method (drilling method) in which a hole is formed in a glass rod as described above. Hereinafter, optical fibers having holes, such as photonic crystal fibers, holey fibers, and hole-added fibers, are collectively referred to as hole fibers.
As shown in FIG. 1, the perforating method synthesizes a porous glass base material and makes it transparent, and then performs perforation processing.

特表2002−506533号公報JP 2002-506533 A 特開2002−97034号公報JP 2002-97034 A 特開2002−293562号公報JP 2002-293562 A 特開2002−145634号公報JP 2002-145634 A

しかしながら、キャピラリー法には、線引きする際に、空隙がファイバ中に残ったり、孔の形状が崩れやすい問題がある。さらに、キャピラリを用いるために、その外表面でOH基/不純物汚染が起こりやすく、低損失化が難しいという問題がある。   However, the capillary method has a problem that voids are likely to remain in the fiber or the shape of the hole tends to collapse when drawing. Further, since the capillary is used, there is a problem that OH group / impurity contamination is likely to occur on the outer surface, and it is difficult to reduce the loss.

他方、孔開け法では、非常に硬い石英ガラスに細い深孔を開けること自体が難しく、超音波振動研削などの特殊な方法を用いねばならない。さらに、多数の孔が開いたファイバを製造するには、加工コストがきわめて高くなり、かつ長い加工時間を要する。また、石英ガラスは難削材であるため、研削工具を高速回転させる必要があるが、孔を深く研削するために研削工具の長さを長くすると、高速回転にともない軸振れが生じ、加工できなくなるという問題がある。   On the other hand, in the drilling method, it is difficult to make a fine deep hole in a very hard quartz glass, and a special method such as ultrasonic vibration grinding must be used. Furthermore, in order to manufacture a fiber having a large number of holes, the processing cost is extremely high and a long processing time is required. In addition, because quartz glass is a difficult-to-cut material, it is necessary to rotate the grinding tool at a high speed. There is a problem of disappearing.

本発明は、上記事情に鑑みなされたものであり、空孔ファイバの製造に好適な、大型で不純物の少ない空孔ファイバ用ガラス母材を、低コストでの製造を可能とする空孔ファイバ用ガラス母材の製造方法、空孔ファイバ及びその製造方法を提供することを目的としている。   The present invention has been made in view of the above circumstances, and is suitable for manufacturing a holey fiber. For a holey fiber that enables low-cost manufacturing of a large-sized glass fiber for a holey fiber with less impurities. It aims at providing the manufacturing method of a glass base material, a hole fiber, and its manufacturing method.

本発明の空孔ファイバ用ガラス母材の製造方法は、軸方向に、全長にわたって複数の孔があいた光ファイバ用ガラス母材の製造方法において、ガラス微粒子を回転する出発部材棒に堆積させて多孔質ガラス母材を形成し、該多孔質ガラス母材の端部から軸方向へ複数の孔を開け、塩素又はフッ素含有雰囲気下で加熱処理、好ましくは700〜1200℃で加熱処理した後、多孔質ガラス母材が透明化する温度に加熱することを特徴としている。また、出発部材棒に堆積させて多孔質ガラス母材を形成し、該多孔質ガラス母材の端部から軸方向へ複数の孔を開け、塩素による脱水処理、フッ素による処理後に透明化する温度に加熱してもよい。   The method for producing a glass preform for a holey fiber according to the present invention is a method for producing a glass preform for an optical fiber having a plurality of holes in its entire length in the axial direction. A porous glass base material is formed, a plurality of holes are formed in the axial direction from the end of the porous glass base material, heat-treated in an atmosphere containing chlorine or fluorine, preferably 700 to 1200 ° C., and then porous. It is characterized by heating to a temperature at which the glass base material becomes transparent. Also, a porous glass base material is formed by depositing on the starting member rod, a plurality of holes are opened in the axial direction from the end of the porous glass base material, and the temperature becomes transparent after dehydration treatment with chlorine and fluorine treatment. You may heat to.

出発部材棒には、高純度石英ガラスやドーパントを含む石英ガラスが用いられ、これにガラス原料とともにドーパント原料を供給して生成したガラス微粒子が堆積される。
ガラス微粒子の堆積は、出発部材棒の先端から軸方向に向かって、又は出発部材棒の側面に沿って軸方向に、あるいは出発部材棒の側面に該出発部材棒の軸と垂直方向に向かって行われるが、いずれの方向に向かって堆積するものであってもよい。
As the starting member rod, high-purity quartz glass or quartz glass containing a dopant is used, and glass fine particles generated by supplying the dopant raw material together with the glass raw material are deposited thereon.
The deposition of glass particulates may be axially from the tip of the starting member rod, axially along the side of the starting member rod, or perpendicular to the axis of the starting member rod on the side of the starting member rod. Although it is performed, it may be deposited in any direction.

また、複数の孔を開ける工程に先立って、1100〜1450℃で加熱処理し、多孔質ガラス母材の密度を0.25〜0.80g/cm3に調整する工程を設けるとよい。この密度の調整は、塩素又はフッ素含有雰囲気下で行うのが好ましい。
さらに、複数の孔を開ける工程に先立って、多孔質ガラス母材の端部を切除し、該端面を中心軸に垂直な平面に加工してから孔を開けるとよい。
Prior to the step of opening a plurality of holes, a step of heat treatment at 1100 to 1450 ° C. to adjust the density of the porous glass base material to 0.25 to 0.80 g / cm 3 may be provided. This density adjustment is preferably performed in an atmosphere containing chlorine or fluorine.
Furthermore, prior to the step of opening a plurality of holes, the end of the porous glass base material may be cut out, and the end surface may be processed into a plane perpendicular to the central axis before the holes are formed.

多孔質ガラス母材の透明化は、ドーパントを含む雰囲気下で行うようにしてもよい。その他、透明化されたガラス母材の孔の内面を、鏡面研磨するのが好ましい。
このようにして製造された空孔ファイバ用ガラス母材を、加熱し線引きすることで空孔ファイバが得られる。
The transparent glass base material may be made transparent in an atmosphere containing a dopant. In addition, it is preferable that the inner surface of the hole of the transparent glass base material is mirror-polished.
A holey fiber can be obtained by heating and drawing the holey fiber glass preform thus manufactured.

本発明によれば、多孔質ガラス母材の密度を削孔に適した密度に調整してから孔開けを行うので、硬いガラスロッドに孔を開ける方法に比べて深い孔を容易に開けることができ、低コストで大型の空孔ファイバ用ガラス母材を容易に製造することができる。さらに、多孔質ガラス母材の段階で孔開け加工を施した後、高純度化処理を施すため、空孔ファイバ用ガラス母材の純度を向上することができる。   According to the present invention, since the hole is formed after adjusting the density of the porous glass base material to a density suitable for drilling, it is possible to easily open a deep hole as compared with the method of making a hole in a hard glass rod. In addition, it is possible to easily manufacture a large glass fiber for a holey fiber at a low cost. Furthermore, since the high purity treatment is performed after the perforating process is performed at the stage of the porous glass base material, the purity of the glass base material for the hole fiber can be improved.

本発明の空孔ファイバ用ガラス母材の製造方法は、例えば、ガラス原料の火炎加水分解反応で生成したガラス微粒子を堆積させて多孔質ガラス母材を製造し、得られた多孔質ガラス母材を必要に応じて脱水処理時、又は脱水処理後に1100〜1450℃で加熱して多孔質ガラス母材を収縮させ、その嵩密度が削孔に適した0.25〜0.80g/cm3となるように調整した後に、多孔質ガラス母材をその軸方向に孔開け加工した後、脱水・高純度化処理及び透明化処理を行うものである。 The method for producing a glass preform for a holey fiber according to the present invention includes, for example, depositing glass fine particles generated by a flame hydrolysis reaction of a glass raw material to produce a porous glass preform, and the obtained porous glass preform. Is heated at 1100 to 1450 ° C. at the time of dehydration treatment or after dehydration treatment as necessary to shrink the porous glass base material, and its bulk density is 0.25 to 0.80 g / cm 3 suitable for drilling. After adjusting so that the porous glass base material is perforated in the axial direction, dehydration / purification treatment and clarification treatment are performed.

本発明において、空孔ファイバ用ガラス母材の製造方法は、図2に示すように、(1)多孔質ガラス母材の製造工程、(2)密度調整工程、(3)孔開け加工工程、(4)脱水・高純度化工程、(5)透明化工程、の5つの工程からなっている。なお、必要に応じて(6)孔研磨工程が加えられる。その後、(7)線引き工程で空孔ファイバが製造される。
以下、これらの工程について順に説明する。
In the present invention, as shown in FIG. 2, a method for producing a glass preform for a holey fiber includes (1) a production process of a porous glass preform, (2) a density adjustment process, (3) a drilling process, It consists of five steps: (4) dehydration / purification step and (5) clarification step. In addition, (6) hole polishing process is added as needed. Thereafter, (7) a holey fiber is manufactured in a drawing process.
Hereinafter, these steps will be described in order.

先ず、(1)多孔質ガラス母材の製造工程は、多孔質ガラス母材を従来から知られている気相軸付け法(VAD法)、外付けVAD法、外付け法(OVD法)といった方法を用いて製造するものであり、これらの方法は、いずれもガラス原料をバーナ火炎中で火炎加水分解させることでガラス微粒子を合成し、これを回転する出発部材棒上に堆積させるものである。   First, (1) the manufacturing process of the porous glass base material includes a conventionally known vapor-phase axial method (VAD method), external VAD method, external method (OVD method), etc. These methods are used to synthesize glass particles by flame hydrolysis of a glass raw material in a burner flame, and deposit these on a rotating starting member rod. .

VAD法は、出発部材棒の先端からその軸方向に向けて堆積・成長させる方法である。外付けVAD法は、バーナを出発部材棒の軸端部からこれと平行に一方向に移動させつつ、出発部材棒の側面にガラス微粒子を堆積させることにより、出発部材棒の側面に沿って母材を成長させる。OVD法では、出発部材棒の側面に向けてガラス微粒子を堆積させつつ、バーナを出発部材棒の軸と平行に往復移動させて、出発部材棒の側面にこの軸と垂直方向に向けて母材を成長させる。   The VAD method is a method of depositing and growing from the tip of a starting member rod toward its axial direction. In the external VAD method, glass particles are deposited on the side surface of the starting member rod while moving the burner in one direction parallel to the axial end of the starting member rod, thereby forming the mother along the side surface of the starting member rod. Growing materials. In the OVD method, while the glass particles are deposited toward the side surface of the starting member rod, the burner is reciprocated in parallel with the axis of the starting member rod, and the base material is directed toward the side surface of the starting member rod in a direction perpendicular to the axis. Grow.

堆積に際して、ガラス原料と共にドーパント原料を供給することで、あるいは出発部材棒に高純度石英ガラスやドーパントを含む石英ガラスを用いることにより、ガラスの屈折率や光感受性などの様々な特性を変化させることができる。   Various properties such as refractive index and photosensitivity of glass can be changed by supplying dopant raw material together with glass raw material during deposition, or by using high purity quartz glass or quartz glass containing dopant for the starting member rod. Can do.

このようにして得られた多孔質ガラス母材は、孔開け加工に先立ち、切削加工に適した密度に調整するため、1100〜1450℃に加熱された炉内で熱処理され、0.25〜0.80g/cm3の密度に調整される。なお、密度が0.25g/cm3未満では、脆過ぎて切削加工時に破損しやすく、他方、0.80g/cm3を超えると硬くなり過ぎて、切削加工時にクラックが入りやすく加工が困難となるため、密度は上記範囲に調整される。特に好ましい範囲は、0.4近傍であり、塩素による脱水を効率よく行うことができ、なおかつ加工性も良いためである。 The porous glass base material thus obtained is heat-treated in a furnace heated to 1100 to 1450 ° C. in order to adjust to a density suitable for cutting prior to drilling, and 0.25 to 0 Adjusted to a density of 80 g / cm 3 . If the density is less than 0.25 g / cm 3, it is too brittle and easily damaged during cutting. On the other hand, if it exceeds 0.80 g / cm 3 , it becomes too hard and cracks easily occur during cutting. Therefore, the density is adjusted to the above range. A particularly preferable range is around 0.4, because dehydration with chlorine can be performed efficiently and processability is also good.

多孔質ガラス母材の密度調整の際、ガラス微粒子が僅かに溶融して互いに溶着するため、主にガラス微粒子の表面に存在するOH基や不純物がガラス内部に取り込まれる可能性がある。これを防ぐには、密度調整工程において塩素又はフッ素化合物を含む雰囲気中で加熱することにより、OH基や不純物を取り除くことができる。なお、多孔質ガラス母材の製造工程で密度を調整し、予め上記範囲内に納めておくことで、密度調整工程を省略することもできる。   When adjusting the density of the porous glass base material, the glass fine particles are slightly melted and welded to each other, so that OH groups and impurities mainly present on the surface of the glass fine particles may be taken into the glass. In order to prevent this, OH groups and impurities can be removed by heating in an atmosphere containing chlorine or a fluorine compound in the density adjusting step. In addition, a density adjustment process can also be abbreviate | omitted by adjusting a density by the manufacturing process of a porous glass base material, and storing in the said range previously.

次に、加工に適した密度に調整された多孔質ガラス母材は、機械研削により孔開け加工が行われる。孔開け加工は、超硬ドリルやダイヤモンドドリルなどの難削材用のものを用いると、工具寿命が長いため刃の交換間隔を長くすることができ、作業性や加工精度が向上する。このときの加工速度は、孔径や深さ、嵩密度などによっても異なるが、0.1mm〜数十mm/秒以上とすることができ、硬い透明ガラスの孔開け加工に比べて遥かに速い速度で孔開けできる。   Next, the porous glass base material adjusted to a density suitable for processing is punched by mechanical grinding. When drilling is performed for difficult-to-cut materials such as carbide drills and diamond drills, the tool life is long, so the blade replacement interval can be increased, and workability and processing accuracy are improved. The processing speed at this time varies depending on the hole diameter, depth, bulk density, etc., but can be 0.1 mm to several tens of mm / second or more, which is a much faster speed than the drilling of hard transparent glass. Can be drilled.

多孔質ガラス母材がVAD法、外付けVAD法、OVD法のいずれの方法で作られたものであっても、その端部は、軸と垂直な平面になっていない。そのため、多孔質ガラス母材の端部を軸と垂直に切断して、予め端部に平面を設けておくことで、その後の孔開け加工が容易となる。これにより、孔の深さを揃えることができ、孔の位置精度が向上すると共に歩留まりが向上する。   Even if the porous glass base material is made by any of the VAD method, the external VAD method, and the OVD method, the end portion thereof is not a plane perpendicular to the axis. For this reason, the end of the porous glass base material is cut perpendicularly to the axis, and a flat surface is provided in the end in advance to facilitate subsequent drilling. Thereby, the depth of a hole can be equalized, the positional accuracy of the hole is improved, and the yield is improved.

端部の切断は、中心に透明ガラスロッドを有していない場合は、金鋸や糸鋸、木工用の鋸、回転切断砥石、ワイヤーソー、バンドソー等、金属や木材、新建材、ガラス等を切断できるものを用いることができる。中心に透明ガラスロッドがある場合には、多孔質部分をこれらの切断手段を用いて除去した後に、透明ガラスロッドを切断又は切除すればよい。   For cutting the end, if there is no transparent glass rod in the center, cut metal, wood, new building materials, glass, etc., such as gold saws, yarn saws, saws for woodwork, rotary cutting whetstones, wire saws, band saws, etc. What can be used can be used. When there is a transparent glass rod in the center, the transparent glass rod may be cut or excised after removing the porous portion using these cutting means.

孔開け加工を施した多孔質ガラス母材は、必要に応じて塩素又はフッ素化合物を含有する雰囲気で700〜1200℃に加熱することで、脱水・高純度化処理がなされる。この後、透明化する温度まで昇温することにより、空孔を有する透明なガラス母材となる。
脱水・高純度化処理と透明化工程は、温度勾配を設けた加熱炉中で同時に行うこともできる。また、透明化の際にドーパントを含む雰囲気とすることで、得られるガラスの屈折率や光感受性などの様々な特性を変化させることができる。
The porous glass base material that has been subjected to perforation processing is heated to 700 to 1200 ° C. in an atmosphere containing chlorine or a fluorine compound as necessary to be dehydrated and purified. Thereafter, the glass is heated to a temperature at which it becomes transparent, whereby a transparent glass base material having pores is obtained.
The dehydration / purification treatment and the clarification step can be simultaneously performed in a heating furnace provided with a temperature gradient. Moreover, various characteristics, such as a refractive index of the glass obtained and photosensitivity, can be changed by setting it as the atmosphere containing a dopant in the case of transparency.

孔開け加工前の多孔質ガラス母材の密度や孔開けの加工方法によっては、得られる透明ガラス母材の孔の内面に荒れが生じる場合がある。このような場合、研磨剤を用いて孔の内面を鏡面研磨することで、ガラス母材の光の散乱を抑制し、これから得られる空孔ファイバの伝送損失を小さくすることができる。孔の内面を鏡面研磨するには、例えば、炭化珪素や酸化セリウムの粉末といった、通常のガラスの研削・研磨に用いることができるものを使用して、研削・研磨する方法が挙げられる。   Depending on the density of the porous glass base material before the perforating process and the processing method for perforating, the inner surface of the hole of the obtained transparent glass base material may be roughened. In such a case, the inner surface of the hole is mirror-polished using an abrasive, so that the light scattering of the glass base material can be suppressed and the transmission loss of the holey fiber obtained therefrom can be reduced. In order to mirror-polish the inner surface of the hole, for example, there can be mentioned a method of grinding / polishing using a material that can be used for grinding / polishing of normal glass such as powder of silicon carbide or cerium oxide.

本発明の空孔ファイバ用ガラス母材を用いることにより、純度の高い空孔ファイバが低コストで得られる。   By using the glass preform for a hole fiber of the present invention, a hole fiber having high purity can be obtained at a low cost.

従来の孔開け加工を説明する工程フロー図である。It is a process flow figure explaining the conventional drilling process. 本発明の孔開け加工を説明する工程フロー図である。It is a process flow figure explaining the drilling process of this invention.

Claims (15)

軸方向に、全長にわたって複数の孔があいた光ファイバ用ガラス母材の製造方法において、ガラス微粒子を回転する出発部材棒に堆積させて多孔質ガラス母材を形成し、該多孔質ガラス母材の端部から軸方向へ複数の孔を開け、塩素又はフッ素含有雰囲気下で加熱処理した後、多孔質ガラス母材が透明化する温度に加熱することを特徴とする空孔ファイバ用ガラス母材の製造方法。 In a manufacturing method of a glass preform for an optical fiber having a plurality of holes in the entire length in the axial direction, a porous glass preform is formed by depositing glass particles on a rotating starting member rod, and the porous glass preform A glass base material for a holey fiber, characterized in that a plurality of holes are made in the axial direction from the end, and after heat treatment in a chlorine or fluorine-containing atmosphere, the porous glass base material is heated to a temperature at which it becomes transparent. Production method. 多孔質ガラス母材の透明化に先立ち、塩素又はフッ素含有雰囲気下700〜1200℃で加熱処理する請求項1に記載の空孔ファイバ用ガラス母材の製造方法。 The method for producing a glass preform for holey fibers according to claim 1, wherein heat treatment is performed at 700 to 1200 ° C in a chlorine or fluorine-containing atmosphere prior to the transparent glass preform. 出発部材棒が、高純度石英ガラスである請求項1又は2に記載の空孔ファイバ用ガラス母材の製造方法。 The method for producing a glass preform for a holey fiber according to claim 1 or 2, wherein the starting member bar is high-purity quartz glass. 出発部材棒が、ドーパントを含む石英ガラスである請求項1又は2に記載の空孔ファイバ用ガラス母材の製造方法。 The method for producing a glass preform for a holey fiber according to claim 1 or 2, wherein the starting member bar is quartz glass containing a dopant. ガラス原料とともにドーパント原料を供給してガラス微粒子を生成する請求項1乃至4のいずれかに記載の空孔ファイバ用ガラス母材の製造方法。 The method for producing a glass preform for a holey fiber according to any one of claims 1 to 4, wherein the dopant raw material is supplied together with the glass raw material to produce glass fine particles. ガラス微粒子の堆積が、出発部材棒の先端から軸方向に向かってなされる請求項1乃至5のいずれかに記載の空孔ファイバ用ガラス母材の製造方法。 The method for producing a glass preform for a holey fiber according to any one of claims 1 to 5, wherein the glass fine particles are deposited in the axial direction from the tip of the starting member rod. ガラス微粒子の堆積が、出発部材棒の側面に沿って軸方向になされる請求項1乃至5のいずれかに記載の空孔ファイバ用ガラス母材の製造方法。 The method for producing a glass preform for a holey fiber according to any one of claims 1 to 5, wherein the glass fine particles are deposited in an axial direction along a side surface of the starting member rod. ガラス微粒子の堆積が、出発部材棒の側面に、該出発部材棒の軸と垂直方向に向かってなされる請求項1乃至5のいずれかに記載の空孔ファイバ用ガラス母材の製造方法。 The method for producing a glass preform for a holey fiber according to any one of claims 1 to 5, wherein the glass fine particles are deposited on a side surface of the starting member rod in a direction perpendicular to the axis of the starting member rod. 複数の孔を開ける工程に先立って、1100〜1450℃で加熱処理することにより、多孔質ガラス母材の密度を0.25〜0.80g/cm3に調整する工程を有する請求項1乃至8のいずれかに記載の空孔ファイバ用ガラス母材の製造方法。 The process of adjusting the density of a porous glass base material to 0.25-0.80 g / cm < 3 > by heat-processing at 1100-1450 degreeC prior to the process of opening a some hole. The manufacturing method of the glass preform | base_material for hole fibers in any one of these. 密度を調整する工程が、塩素又はフッ素含有雰囲気下で行われる請求項9に記載の空孔ファイバ用ガラス母材の製造方法。 The method for producing a glass preform for a holey fiber according to claim 9, wherein the step of adjusting the density is performed in an atmosphere containing chlorine or fluorine. 複数の孔を開ける工程に先立って、多孔質ガラス母材の端部を切除し、該端面を中心軸に垂直な平面とする請求項1乃至10のいずれかに記載の空孔ファイバ用ガラス母材の製造方法。 The glass base for a holey fiber according to any one of claims 1 to 10, wherein an end of the porous glass base material is cut out prior to the step of forming a plurality of holes, and the end face is made a plane perpendicular to the central axis. A method of manufacturing the material. 多孔質ガラス母材の透明化が、ドーパントを含む雰囲気下で行われる請求項1乃至11のいずれかに記載の空孔ファイバ用ガラス母材の製造方法。 The method for producing a glass preform for a holey fiber according to any one of claims 1 to 11, wherein the transparent glass preform is made transparent in an atmosphere containing a dopant. 透明化されたガラス母材の孔の内面を、鏡面研磨する請求項1乃至12のいずれかに記載の空孔ファイバ用ガラス母材の製造方法。 The method for producing a glass preform for a holey fiber according to any one of claims 1 to 12, wherein the inner surface of the hole of the transparent glass preform is mirror-polished. 請求項1乃至13のいずれかに記載の製造方法を用いて製造された空孔ファイバ用ガラス母材を、加熱し線引きする空孔ファイバの製造方法。 A method for producing a holey fiber, wherein the glass preform for holey fiber manufactured using the method according to any one of claims 1 to 13 is heated and drawn. 請求項14に記載の製造方法を用いて製造してなる空孔ファイバ。 A holey fiber manufactured using the manufacturing method according to claim 14.
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