JP4253218B2 - Cleaning device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a cleaning apparatus. More specifically, the present invention relates to an improvement in the structure of a cleaning apparatus that cleans a workpiece that is an object to be cleaned using a solvent.
[0002]
[Prior art]
Various cleaning tanks, such as boiling cleaning tanks and ultrasonic cleaning tanks, and workpiece transfer devices for moving workpieces, etc., are used to clean machine articles such as products or parts (herein referred to as “workpieces”). A cleaning apparatus is used that automatically immerses a workpiece, which is an object to be cleaned, in each of these tanks and automatically cleans the workpiece (see, for example, Patent Document 1 and Patent Document 2).
[0003]
Some of these cleaning devices have a structure in which the work transfer device is rotated by a rotating shaft that penetrates upward from the center lower portion of the device main body, but a structure in which a heater and an ultrasonic device are installed at the lower portion of the cleaning tank. Due to the above reasons or due to a request to use a DC geared motor and timing belt to improve the accuracy of workpiece movement and improve reliability, a motor or the like is driven at the top of the device instead of the rotating shaft that penetrates in this way. There is a structure in which an apparatus is provided to rotate a rotating shaft, a workpiece transfer apparatus, and the like.
[0004]
That is, at first, if a driving device such as a motor is installed at the upper part of the cleaning tank, it may be affected by the solvent rising as vapor from the cleaning tank. Although it was installed at the bottom of the washing tank that is not affected by the solvent, in reality, most of the solvent vapor can be condensed and recovered as a regenerated liquid by the cooling pipe at the top of the washing tank. Since it has been found that even if the device is arranged on the upper part, whether or not it is affected by the solvent, it has been found that the effect is small, so that a driving device is provided on the upper side of the device. For example, if the drive unit is arranged on the upper side where only the washing tank can be rotated with respect to the fixed tank (drain tank), the rotational load becomes lighter and the wiring of the heater and the ultrasonic transducer is fixed. The merit that it becomes possible is also obtained. In consideration of the risk of the influence of the solvent on the upper part of the drive unit, the motor and the sensor may be offset from the opening of the cooling pipe using a timing belt.
[0005]
[Patent Document 1]
JP-A-60-78679
[Patent Document 2]
Japanese Examined Patent Publication No. 7-106345
[0006]
[Problems to be solved by the invention]
However, in the cleaning apparatus having such a structure, since the driving means is installed above the cleaning tank, the maintenance of the cleaning tank may not be easy or the maintenance work may not be performed as it is. In such a case, maintenance and maintenance work of the cleaning device becomes complicated.
[0007]
Also, in the case of a distillation purification type cleaning apparatus that simultaneously purifies the solvent by evaporating the cleaning solvent and then condensing it back to the cleaning tank, by returning the liquefied solvent to the final cleaning tank Although high cleanliness in this final washing tank can be realized, water may be mixed into this final washing tank during distillation purification, not only deteriorating the cleanliness, but also depending on the work in some cases. There is also a problem that rust is caused on the surface of the workpiece due to the adhesion of moisture.
[0008]
Further, such a distillation purification type cleaning apparatus has a problem of securing an appropriate amount of evaporation and condensation of the solvent. In other words, solvent purification is performed by repeating evaporation and condensation by appropriate amounts.If the solvent evaporates beyond the condensing capacity of the cooler, washing is performed without recovering a part of the vapor. It leaks out of the apparatus and the recovery balance in solvent purification is lost. On the other hand, if the amount of evaporation is far below the condensing capacity of the cooler, the amount of purification may not be sufficient.
[0009]
Accordingly, an object of the present invention is to provide a cleaning apparatus that can easily perform maintenance work for a cleaning tank and the like, and further, a cleaning that can prevent problems when water enters the cleaning tank. It is another object of the present invention to provide an apparatus and a cleaning apparatus capable of ensuring an appropriate amount of evaporation and condensation of the solvent.
[0010]
[Means for Solving the Problems]
  In order to achieve such an object, the invention described in claim 1 is directed to a cleaning tank for cleaning a workpiece that is an object to be cleaned using a solvent, a heater for heating and evaporating the solvent, and condensing the vapor of the evaporated solvent. A cooler that recovers the workpiece, a workpiece transfer device that holds the workpiece and immerses it in the cleaning tank, a rotation drive device that relatively rotates one of the workpiece transfer device and the cleaning tank, and a lift drive device that moves the workpiece transfer device up and down And at least one of the rotation driving device and the lifting drive device is disposed above the cleaning tank, and the rotation driving device and the lifting drive device that are disposed above the cleaning tank are used as the cleaning tank. RemovableAnd a controller that detects the amount of solvent evaporation based on the surface temperature of the cooler and adjusts the temperature of the heater based on the detected amount.It is characterized by that.
[0011]
  In this cleaning device, the rotary drive device and the lift drive device that are arranged above the cleaning tank can be attached to and detached from the cleaning tank. For example, if the rotary drive device is arranged above, the cleaning tank Maintenance work can be performed by removing the rotary drive device from the side, and maintenance such as cleaning of the washing tank or the like can be performed with the rotary drive device removed. For this reason, according to this washing | cleaning apparatus, the operation | work of a maintenance and a maintenance does not become complicated.
Also, when the amount of solvent evaporation is large, the solvent may have evaporated beyond the condensing capacity of the cooler, while when the amount of evaporation is small, the amount of purification is not sufficient and there is still room There is also. On the other hand, in the present invention, the temperature control of the heater is performed based on the detection result of the evaporation amount of the solvent. As a result, the amount of the solvent exceeding the condensation capability of the cooler is evaporated in the cleaning device or compared with the condensation capability. Thus, it is possible to improve the situation where only a very small amount is evaporated and to obtain a state where an appropriate amount of solvent is always distilled and purified by balancing the evaporation amount and the condensation amount. Also, when purifying by distilling the solvent as in this cleaning device, if the amount of evaporation of the solvent is large, the amount of heat exchange and liquefaction in the cooler increases accordingly, and the surface temperature of the cooler is increased by the heat of condensation. However, when the amount of solvent evaporation is not large, the heat exchange amount and the liquefaction amount do not increase so much and the surface temperature of the cooler remains low. Attention is focused on detecting the amount of solvent evaporation based on the measured surface temperature and its change.
[0012]
The invention according to claim 2 is characterized in that, in the cleaning apparatus according to claim 1, a water separation mechanism for separating water floating on the solvent in the tank is provided in the cleaning tank in which the final cleaning is performed among the cleaning tanks. To do. When this cleaning apparatus is a distillation purification type cleaning apparatus that simultaneously purifies the solvent by once evaporating the cleaning solvent and returning it to the cleaning tank, the tank in which the liquefied solvent is returned (for example, the final cleaning tank) Even if water is mixed in, this water can be separated from a predetermined region (for example, a cleaning region necessary for workpiece cleaning) by the water separation mechanism. For this reason, deterioration of the cleanliness in the final cleaning tank or the like can be prevented, and furthermore, the occurrence of rust on the workpiece surface can be prevented.
[0013]
In the invention according to claim 3, the water separation mechanism is divided into a cleaning area necessary for immersing and cleaning at least the upper layer portion including the liquid level in the cleaning tank and an external area other than the partition tank from the outside. The partition plate is configured to prevent water flowing into the external region from flowing into the cleaning region. According to this partition plate, it is possible to prevent water from flowing into the cleaning region by a simple configuration in which only the upper layer portion in the cleaning tank is partitioned while securing a cleaning region necessary for cleaning the workpiece.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the configuration of the present invention will be described in detail based on an example of an embodiment shown in the drawings.
[0016]
1 to 25 show an embodiment of the present invention. A cleaning apparatus 1 according to the present invention includes cleaning tanks 3 to 5 for cleaning (including degreasing) a workpiece 2 that is an object to be cleaned using a solvent, a heater 7 for heating and evaporating the solvent, and an evaporated solvent. A cooler 8 that condenses and collects steam, a workpiece transfer device 9 that holds the workpiece 2 and immerses it in the cleaning tanks 3 to 5, and relatively rotates one of the workpiece transfer device 9 and the cleaning tanks 3 to 5. A distillation-integrated apparatus that includes a rotary drive device 10 and a lift drive device 11 that raises and lowers the workpiece transfer device 9 and that evaporates and distills the solvent while cleaning the workpiece 2 to maintain the cleanliness of the cleaning solvent. In addition, at least one of the rotary drive device 10 and the lift drive device 11 is disposed above the cleaning tanks 3 to 5 and the rotary drive device 10 and the lift drive device 11 are disposed above the cleaning tanks 3 to 5. Washing tank 3 5 to those that are detachable.
[0017]
Hereinafter, the cleaning device 1 in which both the rotary drive device 10 and the lift drive device 11 are disposed above the cleaning tanks 3 to 5 and both the rotary drive device 10 and the lift drive device 11 are detachable will be described. To do. In the present embodiment, a compact structure in which the space occupied by the entire apparatus is reduced by adopting a distiller-integrated structure in which both the rotary drive device 10 and the lift drive device 11 are arranged above the cleaning tanks 3 to 5 in this way. The device is realized.
[0018]
The cleaning apparatus 1 has three round-bottomed cleaning tanks 3 to 5 and a single round-bottomed or flat-bottomed drying tank 6 like test tubes. The workpiece 2 that has been immersed in and washed stepwise is dried in a drying tank 6 (see FIG. 3). These four tanks 3 to 6 are arranged on the rotating disk 30 at equal intervals around the vertical rotating shafts 14 and 15 to form a rotating washing tank that rotates in the drain tank 17 in an integrated state. (See FIG. 2). Further, a punching metal 16 that prevents the solvent in the drain tank 17 from splashing but allows the passage of the solvent vapor is fixed to the bottom of the rotating disk 30 with a screw 16b via a spacer 16c (FIG. 2). FIG. 15). The punching metal 16 is provided with a recess 16a slightly larger than each of the tanks 3 to 6 into which the tanks 3 to 6 can be fitted (see FIG. 5). When ultrasonic waves are applied, the solvent containing oil in the drain tank 17 bubbles or rises from the liquid level as a mist, but this punching metal 16 becomes a physical obstacle and absorbs the physical energy of the solvent vapor. In addition, excess solvent vapor is prevented from being brought into each tank 3-6. In addition, when there is no small hole in the metal, it is possible to completely suppress the trouble that extra solvent vapor is brought into each tank 3-6, but another trouble that prevents solvent regeneration occurs, so both troubles are comparatively considered. Thus, it is desirable to determine the size, number, arrangement, etc. of the small holes of the punching metal 16. Further, although one punching metal 16 is sufficient, when a plurality of punching metals 16 are used, it is possible to more reliably absorb the energy of the solvent vapor.
[0019]
These tanks 3 to 6 are arranged in the order of processing performed on the workpiece 2. For example, in the present embodiment, the first cleaning tank 3, the second cleaning tank 4, the third cleaning tank 5 and the drying tank 6 are arranged on the rotating disk 30 in this order clockwise (see FIG. 3). The rotating disk 30 (and the punching metal 16) is rotated counterclockwise. Each of the tanks 3 to 6 is installed at a height at least the bottom of which is immersed in the waste liquid in the drain tank 17, and is poured into the hot water through the heated waste liquid (see FIG. 2).
[0020]
Further, in the three cleaning tanks 3 to 5, the solvent that overflows the third cleaning tank 5 flows into the second cleaning tank 4, and the solvent that overflows the second cleaning tank 4 enters the first cleaning tank 3. In order to flow in, the liquid level is gradually lowered in the order of the third cleaning tank 5 → the second cleaning tank 4 → the first cleaning tank 3 (see FIG. 4). For this reason, as the solvent after distillation flowing into the third cleaning tank 5 flows from the second cleaning tank 4 to the first cleaning tank 3, the cleanliness gradually decreases. The degree of cleanliness of the solvent is higher in the second cleaning tank 4 than in the first cleaning tank 3, and higher in the third cleaning tank 5 than in the second cleaning tank 4. The third cleaning tank 5 and the second cleaning tank 4 are provided with flow paths 18 and 19 for guiding the overflowed solvent to the lower cleaning tank (the second cleaning tank 4 or the first cleaning tank 3). Yes. The first cleaning tank 3 is provided with a waste liquid port 20 for draining the solvent into the drain tank 17 (see FIG. 3).
[0021]
In the present embodiment, the work 2 is roughly cleaned in the first cleaning tank 3 in which the work 2 is first immersed, and the solvent in the cleaning tank 3 is heated to boil and distill (hereinafter, “ This first cleaning tank having the main function of “ultrasonic wave + boiling cleaning” is also referred to as “boil cleaning tank”). The solvent that has flowed into the boiling washing tank 3 is thereby vaporized, or is drained into the drain tank 17 through the waste liquid port 20 described above. In the second cleaning tank 4, the workpiece 2 after the rough cleaning is ultrasonically cleaned (hereinafter, this second cleaning tank having a main function of “ultrasonic wave + rinsing” is also referred to as “ultrasonic rinsing tank”. ). An ultrasonic transducer 21 that generates ultrasonic waves is provided at the bottom of the drain tank 17 (see FIG. 1 and the like). Although not particularly shown in the present embodiment, a circulating path for circulating the solvent and returning it to the original is provided in the bottom of the boiling washing tank 3 in some cases. The circulating path includes a valve, a Y-type strainer, and a pump. A pressure gauge, a filter case, etc. are provided. Further, in the third cleaning tank 5, final cleaning is performed with a solvent having the highest cleanliness (hereinafter, this third cleaning tank having a main function of “ultrasonic wave + final rinse” is referred to as “final cleaning tank”. Say). The cleaning solvent for cleaning the workpiece 2 is, for example, chlorofluorocarbon solvents (HFC, HFE, HCFC), chlorine solvents, bromine solvents, alcohol solvents, or these solvents and glycol ethers or hydrocarbon solvents. A low boiling solvent such as a mixture is used.
[0022]
The final cleaning tank 5 is designed to maintain a high degree of cleanliness of the solvent in the tank by the flow of the distilled purified solvent. In the present embodiment, a liquid recovery dish 22 is provided in the upper center of the rotating disk 30 so that the distilled solvent dropped on the dish flows into the final cleaning tank 5 (see FIGS. 2 and 3). In this case, considering that water may be mixed in the inflowing solvent, a water separation mechanism 12 is provided for separating the water from the viewpoint of preventing the occurrence of rust on the workpiece surface. Is preferred. In the present embodiment, the partition plate 12a subjected to the water repellent treatment is provided in the upper layer portion including the liquid surface of the solvent, and the inside of the final cleaning tank 5 is partitioned into the cleaning area A1 and the other external area A2, and the outside from the outside of the tank The water that has flowed into the region A2 is prevented from flowing into the cleaning region A1 (see FIGS. 3 and 4). In this case, the cleaning area A1 has a size that allows at least the work 2 to be lowered together with the work holder 46 and immersed in the bath. In this embodiment, since a liquid having a specific gravity greater than that of water is used as the solvent, the water that has flowed into the final cleaning tank 5 flows out of the tank while floating on the surface layer of the solvent. Therefore, it is possible to prevent water from staying in the final cleaning tank 5 as much as possible. Further, since the water separation mechanism 12 is formed by a simple configuration in which the partition plate 12a is provided in the final cleaning tank 5, the apparatus is compared with a case where a device for water separation is provided separately from the cleaning device 1. This is advantageous in terms of downsizing.
[0023]
The drying tank 6 is a tank for drying the surface of the workpiece 2 that has been finally cleaned, and is disposed as a fourth tank positioned next to the final cleaning tank 5 (see FIG. 3 and the like). The drying tank 6 has a main function of “vapor cleaning + drying” (that is, a function of performing vapor cleaning and a function of performing drying).
[0024]
Further, in the rotary cleaning tank as described above, it is also preferable to partition the space above the tank, which requires particularly cleanliness, from other parts. In such a case, the atmosphere of the workpiece 2 in the final stage of the cleaning or the final process can be kept clean. In this embodiment, the partition walls 29 are provided so as to partition the upper space of the drying tank 6 and the final cleaning tank 5 from the upper space of the boiling cleaning tank 3 and the ultrasonic rinsing tank 4 (see FIG. 3). The partition wall 29 is bent in a V shape near the center so as not to interfere with the shafts 14 and 15 and the liquid collection dish 22.
[0025]
The rotation driving device 10 for rotating the rotary cleaning tank composed of the cleaning tanks 3 to 5, the drying tank 6, the rotating disk 30 and the punching metal 16 includes a cleaning tank rotating motor 23, a timing belt 24, pulleys 25 and 26, and a shaft. 14 and 15 (see FIGS. 1 and 11 to 13). In this embodiment, the DC geared motor placed vertically is used as a washing tank rotation motor 23, and power is transmitted to the shafts 14 and 15 by the timing belt 24. The rotation amount of the cleaning tank rotation motor 23 can be detected by a rotation sensor dog 27 which is attached to the rotation shaft of the cleaning tank rotation motor 23 and rotates by the same amount and a rotation sensor 28 which reads the rotation amount of the dog (FIGS. 11 and 11). 13). From the viewpoint of avoiding the influence of the solvent vapor flowing out from the upper opening of the cooling pipe 61, the cleaning tank rotation motor 23, the rotation sensor dog 27, and the rotation sensor 28 are in front (or rear) and below the upper opening. It is preferable that it is installed.
[0026]
The shafts 14 and 15 are double shafts having a double structure for integrally rotating the washing tanks 3 to 5 and the drying tank 6 through the rotating disk 30 (see FIG. 2). Of these two shafts, the shaft 14 is a hollow shaft having a pulley 26 attached to the outer periphery, and the power is transmitted by a timing belt 24 wound around the pulley 26 to rotate. On the other hand, the shaft 15 is a solid axis longer than the hollow shaft 14, and can rotate in the hollow shaft 14 and move in the axial direction (that is, the vertical direction) (see FIG. 11). The shafts 14 and 15 have an engagement / disengagement mechanism 31 having the following structure, for example, which can be selected from a locked state in which the shafts 14 and 15 rotate integrally or an unlocked state in which the shafts 14 and 15 do not rotate integrally. (See FIGS. 2 and 6). That is, a cap member 32 that rotates integrally with the upper shaft end of the solid shaft 15 is attached, and a drive pin 33 that protrudes toward the center of rotation is provided at the cap portion. A crank-shaped engagement groove 34 is provided in the crank member 35 attached to a portion facing 33. The engagement groove 34 rotates the shafts 14 and 15 integrally with a position where a later-described locking pin 38 is not hooked to the joint block 36 (drive portion removal position) and the locking pin 38 is hooked to the joint block 36. It has a crank shape with a rotational position at a position opened approximately 90 degrees (see FIG. 6). Further, a step is provided between the rotation position and the removal position, and the rotation position is higher than the removal position by the level difference. Therefore, in order to move the drive pin 33 in the removal position to the rotation position, it is necessary to perform an operation of rotating 90 degrees while overcoming the step on the way. In the present embodiment, the height of the drive pin 33 at the rotational position is made higher than that at the removal position, and the solid shaft 15 is moved upward by the height during rotation. An engaging claw 35a for engaging the drive pin 33 with the crank member 35 is provided at the rotational position (see FIG. 6). When the driving pin 33 is engaged with the engaging claw 35a, the rotational driving force of the washing tank rotating motor 23 is motor 23 → pulley 25 → timing timing belt 24 → pulley 26 → shaft 14 → crank member 35 → driving pin. 33 → shade member 32 → shaft 15 is transmitted.
[0027]
Moreover, the lower end part of the hollow shaft 14 and the solid shaft 15 becomes a structure which can be attached or detached with respect to the rotation disc 30 (refer FIG. 2, FIG. 7). For example, in the present embodiment, a joint block 36 is provided on the liquid collection tray 22, and the lower ends of the shafts 14 and 15 can be attached to or detached from the joint block 36. The lower end of the hollow shaft 14 is provided with, for example, a quadrangular prism-shaped engagement block 37 having an engagement protrusion 37a, and the joint block 36 is provided with an engagement block 37 (and an engagement protrusion, for example, by protrusions at four corners as shown). A recess in which 37a) fits is formed. In a state where the engagement block 37 (and the engagement protrusion 37a) are fitted in the concave portion of the joint block 36, the rotating disk 30 (and each of the tanks 3 to 6) and the hollow shaft 14 are not integrally rotatable. Engage with.
[0028]
Further, a locking pin 38 that protrudes horizontally from the shaft 15 is provided near the lower end of the solid shaft 15, while a long hole 39 through which the locking pin 36 can pass is provided in the joint block 36. (See FIG. 7). After the lower end portion of the solid shaft 15 and the locking pin 38 are inserted into the long hole 39, when the locking pin 38 is rotated together with the solid shaft 15, the locking pin 38 is locked and the solid shaft 15 is locked. The joint block 36 cannot be removed. At this time, since the engagement block 37 is already fitted in the joint block 36, the hollow shaft 14 and the joint block 36 are integrated and rotate by the same amount. Further, when the locking pin 38 is rotated together with the solid shaft 15, the driving pin 33 is simultaneously locked with the locking pin 38 by the joint block 36 by rotating it 90 degrees while being lifted so as to exceed the step. Can be engaged with the rotational position of the crank member 35 (see FIG. 6). Thereby, the hollow shaft 14, the solid shaft 15, the joint block 36, the rotating disk 30 and the like are integrated and rotated by the same amount. In addition, as the drive pin 33 is lifted by the crank step of the engagement groove 34, the solid shaft 15, the locking pin 38, the joint block 36, the rotating disk 30, the punching metal 16, the tanks 3-6, etc. The same amount can be lifted. In this embodiment, until the rotary disk 30 is locked to the inner wall of the drain tank 17 until it is lifted in this way, the tanks 3 to 6 are kept in a non-rotatable state and the rotary disk 30 is lifted. Thus, the locked state is released so that the tanks 3 to 6 can be rotated.
[0029]
Subsequently, a structure for liquid replacement and liquid amount confirmation of the cleaning solvent in the cleaning apparatus 1 of the present embodiment will be described.
[0030]
In the present embodiment, a waste drain pipe 40 for draining the solvent accumulated in the drain tank 17 is installed on the outer peripheral side of the drain tank 17 (see FIGS. 1 and 14 to 15). The waste liquid drain pipe 40 communicates with the lower part of the drain tank 17 through a communication pipe 40a at the lower part thereof, and has a structure capable of turning in a vertical plane around the horizontal communication pipe 40. A plug 40c is provided at the tip of the swivelable tube portion 40b (see FIG. 1). However, when the tip is always held at a position higher than the liquid level in the drain tank 17 except during waste liquid. It is also possible to omit the stopper 40c. On the outer periphery of the drain tank 17, a holding device 40d for keeping the pipe portion 40b vertical is provided (see FIG. 15). The solvent in the drain tank 17 can be drained by tilting the pipe portion 40b.
[0031]
Further, a drain tank liquid level pipe 41 is provided on the outer periphery of the drain tank 17 so that the amount of waste liquid in the tank can be visually recognized (see FIGS. 1 and 14 to 16). The drain tank liquid level pipe 41 is provided at the upper and lower parts of the drain tank 17 and communicates with the communication pipes 41a and 41b and the transparent or translucent tube 41c provided between the communication pipes 41a and 41b. It consists of and. According to the drain tank liquid level pipe 41, the height of the waste liquid at that time in the drain tank 17, that is, the amount of the waste liquid accumulated in the tank can be confirmed by visually checking the liquid level in the tube 41c. .
[0032]
Next, the workpiece transfer device 9 will be described. The workpiece transfer device 9 is a device that supplies the workpiece 2 to the cleaning device 1 or discharges the cleaned workpiece 2 from the cleaning device 1 (this supply operation and discharge operation are collectively referred to as “supply / discharge” in this specification). ). In the cleaning apparatus 1 of this embodiment, the workpiece 2 is held up and down a plurality of times at that position, and the tanks 3 to 6 are rotated together with the rotating disk 30 in the meantime to sequentially advance the cleaning process. ing. Hereinafter, the configuration of the workpiece transfer device 9 will be described (see FIGS. 1, 8, 9, 17 to 21, etc.). The “intermediate position” shown in FIG. 9 is a stop position when the work 2 is stopped at a position where the solvent vapor exists when the work 2 is moved between the cleaning tanks 3 to 5. The “drying position” indicates the work position (height) in the drying tank 6.
[0033]
In the present embodiment, the workpiece transfer device 9 includes a pair of left and right upper and lower guide shafts 42 and 43, a bridge 44 connecting the upper ends of the upper and lower guide shafts 42 and 43, a workpiece holding component 45 provided in the middle of the bridge 44, and the like. The work 2 held on the work holder 46 at the lower end of the work holding part 45 is moved up and down together with the upper and lower guide shafts 42, 43, etc. (see FIG. 1). The upper and lower guide shafts 42 and 43 are guided in the vertical direction by the upper and lower guide bearing portions 50 provided in the upper portions of the tanks 3 to 6 and the drain tank 17. The up / down amount of the upper and lower guide shafts 42 and 43 is detected by an upper / lower sensor dog 51 attached to one upper / lower guide shaft (for example, the upper / lower guide shaft 43) and moving up / down by the same amount and an up / down sensor 52 that reads the up / down amount of the upper / lower sensor dog 51. (See FIG. 1).
[0034]
A work holding part 45 for holding the work 2 is suspended substantially at the center of the bridge 44 (see FIG. 8 and the like). An attachment member 48 is provided at the upper end of the workpiece holding component 45 so that the workpiece holding component 45 itself can be attached to and detached from the bridge 44. The material for connecting the mounting member 48 and the work holder 46 is not particularly limited in material, thickness, shape, etc., but the surface area that comes into contact with the solvent when the work 2 is immersed is as small as possible. When the surface area is reduced in this way, the amount of the solvent adhering to the connecting member can be reduced each time the workpiece 2 is moved up and down, and the evaporation amount of the solvent can be suppressed. For example, in this embodiment, two steel wires 47 are suspended in parallel, and the work holder 46 is supported at the lower end thereof. Here, the steel wire 47 includes high carbon steel such as a so-called piano wire. When strength is required as the connecting member, a sheet metal or the like can be used instead of the steel wire 47. In addition, the work holder 46 is made of resin and is formed according to the shape of the bottom of the work 2 to be transported, but the material, shape, size, etc. can be appropriately changed according to the work type. In addition to such a trapezoidal holder, a holder that is moved up and down while the workpiece 2 is housed in a cage, or a holder that is moved up and down while hooked with a wire, etc. may be adopted. it can. Further, in the present embodiment, a workpiece discharge port lid 49 is provided in the middle of the two steel wires 47 (see FIG. 1 and the like). When the work 2 is immersed in the solvent in the cleaning tanks 3 to 5 or positioned in the drying tank 6, the work supply / discharge port lid 49 covers the mouths of the tanks 3 to 6 (that is, the work supply / discharge ports). It is installed at a size and height that covers each tank 3-6. For example, when each of the cleaning tanks 3 to 5 during cleaning is covered with the work discharge port lid 49, the solvent recovery efficiency can be improved. As described above, in the workpiece transfer device 9 of the present embodiment, the workpiece holding component 45 can be attached to and detached from the bridge 44 by the mounting member 48, so that the type of the workpiece 2 or the depth of each of the tanks 3 to 6 is determined. It is possible to replace the workpiece holding part 45 with different specifications such as the holder shape and height according to the conditions.
[0035]
The raising / lowering driving device 11 is a device for raising and lowering the workpiece conveying device 9 composed of the upper and lower guide shafts 42, 43 and the like, and is constituted by a workpiece raising / lowering motor 53, a timing belt 54 and the like (see FIG. 19 and the like). In the present embodiment, a geared motor placed horizontally on the vertical guide bearing portion 50 is used as the workpiece vertical motor 53. The timing belt 54 is stretched in the vertical direction by attaching belt ends to upper and lower brackets 55 and 56 provided near the upper end and the lower end of the upper and lower guide shafts 42 and 43, and a part of the timing belt 54 is supported by the workpiece vertical motor 53. Is wound around the pulley 57 of the rotating shaft (see FIG. 18 and the like). Further, auxiliary pulleys 58 and 59 are provided above and below the pulley 57 to stretch the timing belt 54 in a V shape and increase the amount of winding around the pulley 57. According to the elevating drive device 11 described above, the rotational driving force of the workpiece vertical motor 53 is transmitted in the order of the motor 53 → the pulley 57 → the timing belt 54, whereby the timing belt 54, the brackets 55 and 56, the bridge 44, and the vertical guide. The shafts 42 and 43, the work holding component 45, etc. move up and down integrally.
[0036]
Note that it is also preferable that the horizontal position of the workpiece supply / discharge port lid 49 is positioned by the positioning member 60 only when the workpiece is at the lifted end (see FIG. 8 and the like). In such a case, the horizontal positioning reproducibility at the rising end of the work 2 is ensured, and the work holding component 45 is fixed when the work 2 is attached or detached, so that the work can be easily performed. In the present embodiment, a positioning pin 49 a is provided on the upper part of the work supply / discharge port lid 49, and the horizontal position of the positioning pin 49 a and thus the work supply / discharge port cover 49 is positioned by using a through hole provided in the positioning member 60. (See FIG. 22 and the like).
[0037]
Next, the cooler 8 will be described. The cooler 8 is a device that condenses and recovers evaporated solvent vapor, and includes a cooling pipe 61, a recovery plate 62, a Peltier element 64, and the like (see FIG. 2 and the like).
[0038]
The cooling pipe 61 is a pipe provided above the tanks 3 to 6 for cooling and condensing the solvent vapor. The cooling pipe 61 desirably has a long pipe length in terms of a normally open pipe that cools the steam, but when it also serves as an introduction pipe for the work 2, it is desirable that the pipe length be short from the viewpoint of shortening the work moving distance. Therefore, in this embodiment, the large diameter short axis vertical circular hole 61a and the small diameter long axis vertical hole 61b constitute a pipe, and the solvent vapor is condensed on the inner wall of these pipes (see FIG. 23). The vertical circular hole 61a is formed in such a size that the above-described work holder 46 can pass while holding the work 2. The cooling pipe 61 of this embodiment is provided with a bearing hole 61c at the center thereof, and also functions as a radial bearing of the hollow shaft 14 (see FIG. 2). In this embodiment, a cooling device for cooling the cooling pipe 61 is constituted by a Peltier element 64, a heat sink 65, and a fan motor 66 (see FIG. 23).
[0039]
The collecting plate 62 is a device that collects and collects the solvent cooled and condensed by the cooling pipe 61 in a part. For example, a funnel-shaped (inverted conical shape) that can be collected in the center is adopted, and the collecting plate 62 is formed through the collecting hole 62c in the center. The solvent is provided so as to flow out to the liquid collection tray 22 disposed below (see FIG. 2). Through holes 62a and 62b having substantially the same diameter are provided at positions where the recovery plate 62 overlaps the above-described vertical circular holes 61a and 61b. Around the through holes 62a and 62b, there are provided bank-like edges 62d that prevent the solvent flowing along the inclined surface of the recovery plate 62 from flowing downward from the through holes 62a and 62b. The recovery plate 62 is preferably formed of a material such as a resin so that heat transfer between the cooling pipe 61 and the cooling pipe 61 is prevented as much as possible, thereby further improving the heat insulation of the cooling pipe 61. Thus, the cooling efficiency can be increased. It is also preferable to interpose a heat insulating material 63 between the cooling pipe 61 and the recovery plate 62 in order to further improve the heat insulating property. In the present embodiment, the heat insulating material 63 is attached to the upper edge of the peripheral wall 67 of each of the tanks 3 to 6, the recovery plate 62 is attached to the lower portion of the heat insulating material 63, and the cooling pipe 61 is attached to the upper portion of the heat insulating material 63. Therefore, the loss of heat (cold heat) is reduced (see FIG. 2). As the heat insulating material 63, a plastic material having heat insulating property and solvent resistance such as PTFE resin (polytetrafluoroethylene), epoxy resin, POM resin (polyoxymethylene), or polyacetal resin is suitable.
[0040]
According to the cooler 8 having the above-described configuration, the solvent cooled and condensed on the inner wall of the cooling pipe 61 flows along the inner wall and drops onto the recovery plate 62, and further flows along the inclined surface through the recovery hole 62c. Drop it below. This solvent further flows along the surfaces of the hollow shaft 14, the engagement block 37, the joint block 36, etc., and is returned to the final cleaning tank 5 by the liquid recovery dish 22 (see FIG. 2).
[0041]
Furthermore, the control device 13 in the cleaning device 1 of the present embodiment will be described. The control device 13 is provided so as to detect the evaporation amount of the solvent based on the surface temperature of the cooler 8 and adjust the temperature of the heater 7 based on the detected amount. In the present embodiment, a liquefier temperature sensor 70 is provided on or near the surface of the cooling pipe 61 (see FIG. 10), and the temperature near the surface of the cooling pipe 61 is detected by this sensor 70. That is, when the amount of solvent evaporation is large, the amount of heat exchange and liquefaction increases and the surface temperature rises. On the other hand, when the amount of solvent evaporation is not large, the amount of heat exchange and liquefaction is small. Since the surface temperature remains low without increasing, the evaporation amount of the solvent in the cooler 8 is detected based on the measured surface temperature and the change thereof. Further, the temperature of the Peltier element 64 is detected by a cooler heat radiation part temperature sensor 71 provided in the Peltier element 64 (see FIG. 10). The cooler heat radiating portion temperature sensor 71 functions as a sensor that can detect malfunctions and failures of the cooler 8 based on the detected temperature. Both the liquefaction part temperature sensor 70 and the cooler heat radiation part temperature sensor 71 are connected to the CPU 72 (see FIG. 10). The CPU 72 controls the temperature of the heater 7 via a heater temperature controller 73 and an SSR (solid state relay) 74 based on information detected by the sensors 70 and 71. That is, when the amount of evaporation of the solvent is too large, the temperature of the heater 7 is lowered to suppress the amount of evaporation, while when the amount of evaporation is small, the temperature of the heater 7 is increased as necessary to increase the amount of evaporation. As a result of temperature control in this way, the situation where the amount of solvent exceeding the condensing capacity of the cooler 8 evaporates in the cleaning apparatus 1 or the situation where only a very small amount evaporates compared to the condensing capacity is improved. By balancing the evaporation amount and the condensation amount, an appropriate amount of solvent can always be distilled and purified. Moreover, according to this, since the solvent of the quantity suitable for the cooling capacity of the cooler 8 can be refine | purified stably, it contributes also to the energy saving of the washing | cleaning apparatus 1 whole. Furthermore, even when the amount of solvent evaporation increases due to heat generated by the ultrasonic vibrator 21 or the outside air temperature, the cleaning apparatus 1 of this embodiment detects the amount of evaporation based on the surface temperature of the heater 7. In this case, the detection sensitivity is high, and the time until the response of stopping the heater 7 is short. Therefore, it is possible to prevent the solvent from flowing out.
[0042]
Furthermore, the other structure of the control apparatus 13 and its circuit structure are demonstrated below (refer FIG. 1, FIG. 10). The CPU 72 is connected to motor drivers 75 and 76 of the cleaning tank rotating motor 23 and the workpiece vertical motor 53, respectively. Further, the origin sensor 28a and the index sensor 28b constituting the rotation sensor 28, and the rising end sensor 52a, the intermediate position sensor 52b and the falling end sensor 52c constituting the vertical sensor 52 are connected to the CPU 72. The Peltier element 64 and the fan motor 66 are driven by a pulse width modulated signal. A temperature sensor 77 that detects the temperature of the liquid in the drain tank 17 and further prevents emptying in the tank is connected to the heater temperature controller 73 described above. The temperature sensor 77 and the ultrasonic oscillator 78 that oscillates ultrasonic waves to the ultrasonic transducer 21 are connected to the power supply device 79 and the CPU 72, respectively. In addition, a communication interface 80, a communication HMI (Human Machine Interface) 81, a display device 82 such as an LED or an LCD, and a nonvolatile memory 83 are connected to the CPU 72. The nonvolatile memory 83 stores an operation program, a temperature control value, and the like.
[0043]
Further, in this embodiment, a frame 84 is provided by combining a bracket-like frame or plate material, the cleaning device 1 is provided thereon, and the above-described various control devices are arranged in the frame 84 (FIG. 1). Specifically, a heater temperature controller 73, an ultrasonic oscillator 78, a switch box (reference numeral 85a is a switch) 85, and the like are arranged on the top or bottom of the base plate 84. The gantry 84 is provided with a detachable connector 86 for connecting various devices of the cleaning device 1. The connector 86 is attached / detached when the upper side of the cleaning device 1 is removed from the lower control device 13 or attached to the control device 13.
[0044]
Subsequently, a structure in which a part of the inside of the cleaning apparatus 1 is visible will be described below. In the cleaning device 1 of the present embodiment, a viewing window 69 is provided on the peripheral wall 67, and it is possible to check the inside of the device 1 through the viewing window 69. Thereby, in this washing | cleaning apparatus 1, an operator and an administrator hold | maintain the workpiece | work 2 in the predetermined position on the workpiece holder 46, and each tank 3-6 is rotating 90 degree | times at predetermined timing. In addition, it is possible to visually confirm the progress and progress of the cleaning work, such as the work 2 being immersed in each of the tanks 3 to 5 and the solvent circulation amount being within an appropriate range. Moreover, since the visual recognition window 69 is provided on the peripheral wall 67, it is easier to grasp the situation in the rotary cleaning tank or the like than when looking through the upper opening of the cooling pipe 61, for example. In the present embodiment, a glass plate is used as the visual recognition window 69, but an acrylic plate or the like can also be adopted.
[0045]
Further, in the cleaning device 1, at least one of the rotation driving device 10 and the lifting / lowering driving device 11 is disposed above the cleaning tanks 3 to 5, and the cleaning tanks 3 to 5 of the rotation driving device 10 and the lifting / lowering driving device 11 are arranged. The thing arrange | positioned above is removable with respect to the washing tanks 3-5. Hereinafter, the attachment / detachment structure of the cleaning apparatus 1 of the present embodiment that is detachable as described above will be described.
[0046]
In this embodiment, both the rotary drive device 10 and the lift drive device 11 are disposed above the cleaning tanks 3 to 5 (and the drying tank 6) (see FIG. 1). Here, “arranged upward” includes not only the case of being arranged right above the tank but also the case of being arranged at a position higher than the washing tanks 3 to 5. In this embodiment, the peripheral wall surrounding each of the tanks 3 to 6 and the drain tank 17 is separated into the upper peripheral wall 67 and the lower peripheral wall 87 described above, and the upper portion can be removed from the peripheral wall 67 for rotation. The drive device 10 and the lift drive device 11 can be attached to and detached from the cleaning tanks 3 to 5 (and the drying tank 6 and the drain tank 17) (see FIG. 2). Specifically, the peripheral wall 67 and the peripheral wall 87 have the same diameter, the upper edge of the drain tank 17 has a flange shape that can be sandwiched between the peripheral walls 67, 87, and a plurality of attachments / detachments provided around the peripheral walls. These peripheral walls 67 and 87 can be integrated using the member 88 (refer FIG. 14 etc.). The detachable member 88 is preferably one that can reliably integrate the peripheral walls 67 and 87 and can be easily attached and detached. In this embodiment, a buckle device with a spring as shown in the figure is used as the attaching / detaching member 88, but other devices such as a clasp (hasp), a latch lock, a hose band, etc. may be used. Furthermore, in addition to these mechanical devices, a magnet type that can be attached and detached using magnetic force may be used. As an example of the magnet type, a magnet 89 is provided opposite to the lower end of the shaft 14 (or 15) and the center of the rotating disk 30, and the upper and lower portions of the cleaning device 1 are connected by attracting the two magnets 89 to each other. What is integrated is mentioned (refer FIG. 24, FIG. 25).
[0047]
The cleaning solvent has a small surface area and tends to swell or deteriorate the rubber sealing material. In order to attach and detach the peripheral walls 67 and 87, it is necessary to have a sealing effect that prevents the solvent from leaking to the outside, and it is necessary to devise a sealing method. The sealing material is preferably an O-ring or rubber plate using a highly solvent-resistant fluorine rubber, EPDM or the like, a PTFE sealing material, or the like. In order to obtain a high sealing effect, it is preferable that the attachment / detachment position of the sealing material is the upper part so that the solvent is not directly applied. In addition, it is preferable that a shaping | molding surface like an O-ring exists in the whole surface periphery. In the case of an elastomer such as PTFE, it is preferable that the pores on the porous surface are closed by coating on the side in contact with the liquid.
[0048]
As described above, according to the cleaning device 1 in which the rotation driving device 10 and the elevation driving device 11 are detachable, there is an advantage that maintenance of each component is facilitated. That is, since the rotary drive device 10 or the lift drive device 11 can be subjected to maintenance work such as inspection / maintenance after being removed from the apparatus main body, disassembly and the like are easy to perform and the degree of freedom of work is high. Further, if the upper part is removed from the peripheral wall 67, the cleaning tanks 3 to 5, the drying tank 6, and the drain tank 17 can be easily cleaned or removed from the gantry 84. .
[0049]
The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited thereto, and various modifications can be made without departing from the scope of the present invention. For example, in this embodiment, both the rotary drive device 10 and the lift drive device 11 are arranged above the cleaning tanks 3 to 5 and the devices 10 and 11 are detachable from the cleaning tanks 3 to 5, so-called tank rotation type. Although the upper fishing type rotation transmission type cleaning apparatus 1 has been described, the present invention is not particularly limited to such a structure. At least one of the apparatuses 10 and 11 is disposed above the cleaning tanks 3 to 5 and the apparatus 10 If the (or the apparatus 11) has a structure that can be attached to and detached from the cleaning tanks 3 to 5, work such as maintenance can be facilitated. Below, only the raising / lowering drive device 11 is arrange | positioned above the washing tanks 3-5 (and drying tank 6), and the rotation drive apparatus 10 is the tank rotation type lower part rotation transmission arrange | positioned below the washing tanks 3-5 etc. The type cleaning device 1 will be described (see FIG. 26).
[0050]
The cleaning apparatus 1 shown in FIG. 26 rotates the cleaning tanks 3 to 5 and the like by a cleaning tank rotating motor 23 arranged below the cleaning tanks 3 to 5 and the like. It is placed vertically so as to coincide with the rotation center of the washing tank. Although not particularly shown in FIG. 26, the configuration of each device such as the lifting drive device 11, each of the tanks 3 to 6, the heater 7, the cooler 8, and the work transfer device 9 is particularly different from that of the cleaning device 1 described above. Absent. In this cleaning device 1, since the upper side including the lifting drive device 11 can be removed, maintenance of each device including the lifting drive device 11 can be easily performed.
[0051]
Here, when the structure of each type of cleaning apparatus 1 described above is schematically shown, it is as shown in FIGS. Each of these cleaning apparatuses 1 moves the workpiece 2 up and down only on one vertical track and advances the cleaning process by sequentially rotating the rotary cleaning tank in accordance with the lifting operation. In order to sequentially immerse in the tanks 3 to 5 (and the drying tank 6), it is only necessary to relatively rotate one of the workpiece transfer device 9 and the cleaning tanks 3 to 5 (and the drying tank 6). Therefore, it is good also as a structure opposite to the washing | cleaning apparatus 1 of this embodiment, ie, the structure which rotates the work holder 46 etc. of the workpiece conveyance apparatus 9 instead, without rotating each tank 3-6. For example, the cleaning apparatus 1 whose outline is shown in FIG. 29 sequentially advances the cleaning process of each work 2 by rotating a single or a plurality of work holders 46 in the work transporting apparatus 9 with a rotary motor 23 ′. As shown in the example, after all, automatic cleaning can be performed by relatively rotating any one of the workpiece transfer device 9 and the cleaning tanks 3 to 5 (and the drying tank 6). . In FIGS. 27 to 29, the cleaning tanks are indicated by reference numerals 3 and 4, but this is only for convenience and does not mean that other cleaning tanks or drying tanks are excluded.
[0052]
【The invention's effect】
  As is clear from the above description, according to the cleaning device of the first aspect, the rotary drive device and the lift drive device that are arranged above the cleaning bath are made detachable from the cleaning bath. If the apparatus is disposed above, it is possible to perform operations such as cleaning the cleaning tank with the rotary drive device removed from the cleaning tank side. For this reason, according to this washing | cleaning apparatus, a maintenance and maintenance work do not become complicated, and it becomes possible to perform maintenance work, such as a washing tank, easily.
Also, if the amount of solvent evaporation is too high, the heater temperature is lowered to reduce the amount of evaporation, while if the amount of evaporation is small, the heater temperature is increased to increase the amount of evaporation. And the temperature control of the heater can be performed based on the detected amount. As a result, it is possible to prevent the recovery balance in the solvent refining from being lost, for example, the amount of purification becomes insufficient, and to ensure an appropriate amount of evaporation and condensation of the solvent. Moreover, this cleaning device uses the phenomenon that the surface temperature of the cooler rises when the amount of solvent evaporation is large, whereas the surface temperature of the cooler remains low when the amount of solvent evaporation is not large. By doing this, it is possible to detect the amount of evaporation of the solvent based on the measured surface temperature value and its change, and to control the temperature of the heater.
[0053]
Further, according to the cleaning apparatus of the second aspect provided with the water separation mechanism, for example, water mixed in the final cleaning tank can be separated from an area necessary for workpiece cleaning by the water separation mechanism. For this reason, deterioration of the cleanliness in the final cleaning tank or the like can be prevented, and furthermore, the occurrence of rust on the workpiece surface can be prevented.
[0054]
According to the cleaning apparatus of claim 3, the partition area constituting the water separation mechanism causes at least a cleaning region necessary for immersing and cleaning the upper layer portion including the liquid level in the cleaning tank and the other external region. In addition, it is possible to prevent the water flowing into the external region from the outside of the partition tank from flowing into the cleaning region. In this case, water can be prevented from flowing into the cleaning region with a simple configuration in which only the upper layer portion in the cleaning tank is partitioned while securing a cleaning region necessary for cleaning the workpiece.
[Brief description of the drawings]
FIG. 1 is a diagram showing an embodiment of the present invention, and represents the entire cleaning apparatus based on an actual viewpoint.
FIG. 2 is a longitudinal sectional view showing the structure of a shaft of a cleaning device, a rotary cleaning tank, and the like.
FIG. 3 is a plan view showing a shape example of a rotary cleaning tank and partition walls provided in the embodiment according to the present invention.
FIG. 4 is a schematic diagram showing the installation height of each cleaning tank and drying tank installed circumferentially so that the liquid level gradually decreases.
FIG. 5 is a plan view showing the shape of a punching metal.
FIG. 6 is a developed view showing the shape of an engagement groove provided in a crank member and the movement of a drive pin in the engagement groove.
FIG. 7 is a perspective view showing the shape of a joint block and the shape of an engagement block and the like at the lower end of a shaft detachably provided on the joint block.
FIG. 8 is a schematic view from the side showing a workpiece holding component constituting the workpiece transfer device.
9A is a schematic diagram for explaining a work stop position as a cleaning operation, and FIG. 9B is a diagram showing an operation sequence thereof.
FIG. 10 is a diagram illustrating an example of a circuit configuration of a control device in the cleaning device.
FIG. 11 is a partial longitudinal sectional view showing a structural example of a rotation drive device in a cleaning device.
FIG. 12 is a plan view showing a power transmission system from the cleaning tank rotating motor to the shaft.
FIG. 13 is a plan view of a rotation sensor dog and a rotation sensor.
FIG. 14 is a plan view showing a rotary cleaning tank and its outer shape.
15 is a longitudinal sectional view taken along line XV-XV in FIG.
FIG. 16 is a diagram showing a drain tank liquid level tube as seen from another angle.
FIG. 17 is a front view showing an outline of a part of the workpiece transfer device and the structure of the lifting drive device.
18 is a view showing the structure of a timing belt, a pulley, and the like in the elevating drive device shown in FIG.
19 is a cross-sectional view taken along line XIX-XIX of the elevating drive device shown in FIG.
20 is a rear view of the elevating drive device and the like shown in FIG.
21 is a bottom view of the elevating drive device etc. shown in FIG.
FIG. 22 is a partial view showing a workpiece supply / discharge port lid and a positioning member.
FIG. 23 is a plan view of a cleaning device in the present embodiment.
FIG. 24 is a plan view showing a rotary cleaning tank provided with a magnet in the center.
FIG. 25 is a diagram showing only a shaft provided with a magnet and a rotary cleaning tank.
FIG. 26 is a longitudinal sectional view of a tank rotation type lower rotation transmission type cleaning apparatus according to another embodiment of the present invention.
FIG. 27 is a schematic view of a tank rotation type upper fishing type rotation transmission type cleaning device.
FIG. 28 is a schematic view of a tank rotation type lower rotation transmission type cleaning apparatus.
FIG. 29 is a schematic view of a tank-fixed type upper rotation transmission type cleaning apparatus in which each tank is rotated without rotating the work transfer device.
[Explanation of symbols]
1 Cleaning device
2 Work
3 Boiling distillation tank (cleaning tank)
4 Ultrasonic cleaning tank (cleaning tank)
5 Final cleaning tank (cleaning tank)
6 Drying tank
7 Heater
8 Cooler
9 Work transfer device
10 Rotation drive
11 Lifting drive device
12 Water separation mechanism
13 Control device
A1 Cleaning area
A2 External area

Claims (3)

A cleaning tank for cleaning a workpiece that is an object to be cleaned using a solvent, a heater for heating and evaporating the solvent, a cooler for condensing and recovering the vapor of the evaporated solvent, and holding the workpiece In the cleaning apparatus, comprising: a work transfer device immersed in the cleaning tank; a rotation drive device that relatively rotates one of the work transfer device and the cleaning tank; and a lift drive device that moves the work transfer device up and down. At least one of the driving device and the lifting / lowering driving device is disposed above the cleaning tank, and among the rotation driving device and the lifting / lowering driving device, the one disposed above the cleaning tank is detachable from the cleaning tank , and , it has a control device for adjusting based on the detected amount of temperature of the heater and detects the amount of evaporation of the solvent on the basis of the surface temperature of the cooler Washing apparatus according to claim.   The cleaning apparatus according to claim 1, wherein a water separation mechanism for separating water floating on the solvent in the tank is provided in a cleaning tank that performs final cleaning among the cleaning tanks.   The water separation mechanism flows into the external region from outside the partition tank into a cleaning region necessary for immersing and cleaning at least the workpiece and cleaning the upper layer portion including the liquid level in the cleaning bath. The cleaning apparatus according to claim 2, wherein the cleaning apparatus is configured by a partition plate that prevents water from flowing into the cleaning region.

Images