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JP4257624B2 - Method for forming external terminals of laminated electronic components - Google Patents
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JP4257624B2 - Method for forming external terminals of laminated electronic components - Google Patents

Method for forming external terminals of laminated electronic components Download PDF

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Publication number
JP4257624B2
JP4257624B2 JP8079099A JP8079099A JP4257624B2 JP 4257624 B2 JP4257624 B2 JP 4257624B2 JP 8079099 A JP8079099 A JP 8079099A JP 8079099 A JP8079099 A JP 8079099A JP 4257624 B2 JP4257624 B2 JP 4257624B2
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JP
Japan
Prior art keywords
external terminal
forming
hole
ceramic green
electronic component
Prior art date
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JP8079099A
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Japanese (ja)
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JP2000277919A (en
Inventor
直行 佐藤
秀幸 中村
裕之 但井
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Proterial Ltd
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Hitachi Metals Ltd
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Priority to JP8079099A priority Critical patent/JP4257624B2/en
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Description

【0001】
【発明の属する技術分野】
本発明は、内部回路が内蔵された積層電子部品の外部端子の形成方法に関するものである。
【0002】
【従来の技術】
従来、内部回路用の導電パターンが形成されたセラミックグリーンシートを所要数積層し、一体焼成して形成される積層電子部品は、種々の構成のものが提案されている。この積層電子部品は、その内部回路と実装回路との接続を行うための外部端子が積層体の側面に形成されることが一般に行われている。
【0003】
この外部端子の形成方法として、一例が特開平5−327222号公報に開示されている。この方法は、セラミックグリーンシートに、内部導通用ビアホール孔と外部端子用の貫通スルーホール孔を開け、ビアホールと同時にスルーホールにも導体ペーストを充填した後ペーストを乾燥させる。この充填から乾燥までは、導体ペーストがスルーホールから落下するのを防止するために、平滑な板を台としてグリーンシートの下に敷く。その後、内部回路パターンの印刷を行い、導体ペーストを乾燥させ、積層する。そして、焼成し、切断することにより、外部端子を形成する方法である。
【0004】
また特開平6−112099号公報には、焼成済みでかつ外部電極を形成すべき位置に貫通孔が形成されたマザーボードを準備し、前記貫通孔内面で内部電極と接続されかつ前記マザーボードの主面に至るように外部電極を付与し、そして個々の素子に切断する方法が開示されている。この方法は、積層電子部品を焼成した後、外部端子を形成し、その後切断する方法である。
【0005】
【発明が解決しようとする課題】
特開平5−327222号公報に開示されている方法では、積層ずれ、又はグリーンシートを圧着する際の圧力による変形などにより、内部回路と外部端子との導通不良が生じる、又外部端子の変形による外部端子不良を生じる恐れがあった。
また、特開平6−112099号公報に開示されている方法では、焼成後の固い積層体に孔を開ける工程が必要であり、高コストとなるという問題があった。また、グリーンシートに孔を開けておき、積層体とした後、導電ペーストを塗布することも考えられるが、積層ずれ、又圧着時の変形などにより、スルーホールが変形し、導電ペーストをスルーホール内面の全面に塗布することが出来ないといった不具合が生じるという問題点があった。
【0006】
この積層電子部品では、小型化、低価格化、又高機能化が要求され、常に改良が進められている。この外部端子の形成方法も種々提案されているが、本発明は、製造が容易で、積層体と同時焼成可能なので安価である外部端子の形成方法を提供することを目的とする。
【0007】
【課題を解決するための手段】
本発明は、内部回路用の導電パターンが印刷されたセラミックグリーンシートを積層し、焼成されてなる積層電子部品の側面に形成される外部端子の形成方法において、前記セラミックグリーンシートの後に分割される分割線上に外部端子形成用の穴を開けておき、内部回路パターン又は内部回路接続用のビアホール等が形成されている所定のセラミックグリーンシートを積層した後、仮圧着し、その仮圧着体の連続した前記外部端子形成用穴に導電材を形成し、その後本圧着を行い、焼成されることを特徴とする積層電子部品の外部端子形成方法である。
【0008】
【発明の実施の形態】
本発明では、外部端子用の穴を各セラミックグリーンシートの後に分割される分割線上に予め形成しておく。そして、内部回路パターン又は内部回路パターンの接続用ビアホール等が形成されている、このセラミックグリーンシートを積層し、仮圧着する。この仮圧着体の状態で、外部端子用の導電材を形成するものである。つまり、本圧着をすると、圧力が強すぎて変形が起こる危険性が高いが、それよりも弱い力で仮圧着することにより、変形を抑えた状態で積層体を得ることができ、この状態で、外部端子用の導電材を形成するものである。尚、この外部端子は、分割されて側面に露出し、外部端子としての機能を果たす。
【0009】
この仮圧着は、20℃〜60℃、10〜200kg/cmの条件で加圧することが好ましい。更に好ましくは、40〜120kg/cmである。さらにこの仮圧着は、本圧着より弱い力で圧着されることが好ましい。また、この仮圧着体の状態は、各層が適度に密着し、仮圧着後のハンドリングで位置ずれなどをおこさず、かつ、積層された1枚1枚のグリーンシートが大きな変形をおこしていない状態、すなわち、外部端子形成用穴の内面に極端な凹凸がない、または外部端子用穴がつぶれていない状態である。
【0010】
また、外部端子用の導電材の形成方法は、メタルマスク印刷などの印刷法により導電ペーストをスルーホールに充填した後、本圧着を経て、900℃程度の温度で焼結させる方法が好ましい。このとき、導電材がスルーホールの表面に隙間なく、かつ、均一な厚さで充填されていることが好ましい。
【0011】
本発明に係る一実施例を図面を基に説明する。まず、セラミックグリーンシートを形成する。このセラミックグリーンシートは、所要のセラミック材料のスラリーを形成し、ドクターブレード等で形成することができる。このセラミックグリーンシート1に、外部端子形成用の穴2を形成する。これを図2に示す。この外部端子形成用の穴2は、後に分割される分割線6上に形成される。もちろん、外部端子の必要な箇所に形成する。また、この外部端子形成用の穴2を形成する際に、内部回路接続用のビアホール(図示してない)も適宜形成しておけば良い。次いで、所要のセラミックグリーンシート上に内部回路用の導電パターンが形成される。これは、Agを主成分とする導電ペーストをスクリーン印刷することにより、形成できる。そして、所定のセラミックグリーンシートを所要数積層する。このとき、内部回路の必要な部分は、ビアホールで接続される。
【0012】
その積層体を仮圧着して仮圧着体3を得る。これを図3に示す。この仮圧着体3は、前記外部端子形成用の穴2が積層され、上面から下面にかけて貫通するように形成されている。この仮圧着は、温度25℃、圧力100kg/cmで、60秒、仮圧着した。この仮圧着の温度は、20〜60℃が好ましい。その理由は、20℃未満では確実に圧着されず、積層された各グリーンシートがずれてしまうからである。また60℃を越えると圧着過剰となり、仮圧着体の外部端子形成用穴の内面が変形するからである。
【0013】
この仮圧着の圧力は、10〜200kg/cmが好ましい。その理由は、10kg/cm未満では確実に圧着されず、積層された各グリーンシートがずれてしまうからである。好ましくは40〜120kg/cm以上である。また、200kg/cmを越えると圧着過剰となり、仮圧着体の外部端子形成用穴の内面が変形するからである。
【0014】
この仮圧着体3の状態で、メタルマスク印刷法を用い導電ペーストを外部端子形成用穴の内面に塗布することにより、外部端子を形成した。印刷用メタルマスクおよび印刷前の仮圧着体を所定の位置に固定する。メタルマスクには仮圧着体の電極形成用穴と同じ位置に同程度の径の穴があり、印刷スキージの移動により、ここから導電ペーストが仮圧着体に供給される。導電ペーストは市販の銀ペースト(回転数100rpm、温度25℃で測定したときの粘度約30Pa・S)を用い、仮圧着体を吸引しながら印刷塗布した。仮圧着体では、外部端子形成用穴の内面が加圧による変形を起こしていないため、導電ペーストが穴内面を移動しやすい。従って、穴の上部で導電ペーストが止まってしまうことがなく、穴内面の全面に均一に導電ペーストが塗布できる。また全面にくまなく塗布できるので、穴内面と電極材との密着性が良く、電極としての信頼性にも優れている。この電極材を塗布した状態の断面図を図4に示す。仮圧着体3の上面から下面に貫通する穴の内面に、外部端子の電極材4が塗布されている。
【0015】
次に、仮圧着体3を本圧着する。この本圧着は、仮圧着体を加圧用治具にセットし、温度;85℃、圧力約110kg/cmで1分加圧することにより行った。この本圧着は、仮圧着よりも強い条件で行われる。そして、本圧着の条件としては、圧力10〜400kg/cmで、温度30〜100℃で行われることが好ましい。
【0016】
そして、その本圧着体を分割線で切断し、900℃で2時間焼成することにより、所望の積層電子部品を得た。この積層電子部品の斜視図を図1に示す。この外部端子5は、ニッケルメッキ、半田メッキ等を施しても良い。また、分割手段は、切込溝を形成し、分割する方法でも良い。もちろん、焼成後分割しても良い。
【0017】
本実施例によれば、仮圧着後に外部端子形成用穴に導電材を形成するので、本圧着後にみられるような穴の変形を抑制でき、外部端子形成用穴内面と導電材の密着性が良く、電極の信頼性が高い。
また、外部端子形成用穴に導電材を形成するのに、印刷法で電極を形成するので、製造が容易である。また、電極印刷時の吸引を精度よく制御しなくて良く、安価または容易に製造できる。
【0018】
本発明は、単素子を内蔵した電子部品、複数の素子を内蔵した複合部品、更に積層体上に電子部品を搭載する複合部品或いは積層基板に用いられ、効果を有するものである。
【0019】
【発明の効果】
本発明によれば、積層体を仮圧着した後導電材を形成し本圧着するという工程で外部端子を形成することによって、スルーホール内面との密着性が良く、製造が容易で低価格に外部端子を形成することができる。
【図面の簡単な説明】
【図1】本発明に係る一実施例の斜視図である。
【図2】本発明に係る一実施例のセラミックグリーンシートの平面図である。
【図3】本発明に係る一実施例の仮圧着体の斜視図である。
【図4】本発明に係る一実施例の外部端子部分の断面図である。
【符号の説明】
1 セラミックグリーンシート
2 外部端子用穴
3 仮圧着体
4 外部端子電極材
5 外部端子
6 分割線
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for forming an external terminal of a multilayer electronic component with an internal circuit built therein.
[0002]
[Prior art]
Conventionally, multilayer electronic components formed by laminating a required number of ceramic green sheets on which conductive patterns for internal circuits are formed and integrally firing have been proposed in various configurations. In this laminated electronic component, generally, external terminals for connecting the internal circuit and the mounting circuit are formed on the side surface of the laminated body.
[0003]
An example of a method for forming this external terminal is disclosed in JP-A-5-327222. In this method, a via hole hole for internal conduction and a through hole for an external terminal are formed in a ceramic green sheet, and the paste is dried after filling the through hole simultaneously with the via hole. From filling to drying, in order to prevent the conductive paste from falling from the through hole, a smooth plate is placed under the green sheet as a base. Thereafter, the internal circuit pattern is printed, and the conductor paste is dried and laminated. And it is the method of forming an external terminal by baking and cut | disconnecting.
[0004]
Japanese Patent Application Laid-Open No. 6-112999 prepares a mother board that has been baked and has a through hole formed at a position where an external electrode is to be formed. A method is disclosed in which external electrodes are applied so as to reach the thickness of each element and the individual elements are cut. This method is a method in which an external terminal is formed and then cut after firing the laminated electronic component.
[0005]
[Problems to be solved by the invention]
In the method disclosed in Japanese Patent Laid-Open No. 5-327222, poor conduction between the internal circuit and the external terminal occurs due to misalignment or deformation due to pressure when the green sheet is crimped, or due to deformation of the external terminal. There was a risk of defective external terminals.
Further, the method disclosed in Japanese Patent Application Laid-Open No. 6-1112099 requires a step of making a hole in the hard laminate after firing, which has a problem of high cost. In addition, it is conceivable to make a hole in the green sheet to make a laminate, and then apply the conductive paste. However, the through hole may be deformed due to misalignment or deformation at the time of pressure bonding, and the conductive paste may be removed. There was a problem that a problem that the coating could not be applied to the entire inner surface occurred.
[0006]
This multilayer electronic component is required to be reduced in size, price, and functionality, and is constantly being improved. Various methods for forming the external terminal have been proposed, but an object of the present invention is to provide a method for forming the external terminal which is easy to manufacture and can be co-fired with the laminated body and is inexpensive.
[0007]
[Means for Solving the Problems]
The present invention provides a method for forming an external terminal formed on a side surface of a laminated electronic component obtained by laminating and firing a ceramic green sheet on which a conductive pattern for an internal circuit is printed, and is divided after the ceramic green sheet. A hole for forming an external terminal is formed on the dividing line, and a predetermined ceramic green sheet in which an internal circuit pattern or a via hole for connecting an internal circuit is formed is laminated. A method for forming an external terminal of a laminated electronic component, comprising: forming a conductive material in the external terminal forming hole, performing a subsequent press-bonding, and firing the conductive material.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
In the present invention, holes for external terminals are formed in advance on a dividing line that is divided after each ceramic green sheet. Then, this ceramic green sheet in which an internal circuit pattern or a via hole for connecting the internal circuit pattern or the like is formed is laminated and temporarily pressed. A conductive material for an external terminal is formed in the state of this temporary press-bonded body. In other words, when the main pressure bonding is performed, there is a high risk of deformation due to the pressure being too strong, but by temporarily pressing with a force weaker than that, a laminate can be obtained with the deformation suppressed, and in this state A conductive material for external terminals is formed. This external terminal is divided and exposed to the side surface, and functions as an external terminal.
[0009]
This temporary pressure bonding is preferably performed under conditions of 20 ° C. to 60 ° C. and 10 to 200 kg / cm 2 . More preferably, it is 40-120 kg / cm < 2 >. Further, it is preferable that the temporary pressure bonding is performed with a weaker force than the main pressure bonding. Moreover, the state of this temporary press-bonded body is a state in which each layer is in close contact with each other, does not cause misalignment in handling after temporary press-bonding, and the stacked green sheets are not greatly deformed. That is, there is no extreme unevenness on the inner surface of the external terminal forming hole, or the external terminal hole is not crushed.
[0010]
In addition, the method for forming the conductive material for the external terminal is preferably a method in which the conductive paste is filled in the through holes by a printing method such as metal mask printing, and then sintered at a temperature of about 900 ° C. after being subjected to main pressure bonding. At this time, it is preferable that the conductive material is filled on the surface of the through hole with no gap and with a uniform thickness.
[0011]
An embodiment according to the present invention will be described with reference to the drawings. First, a ceramic green sheet is formed. The ceramic green sheet can be formed with a doctor blade or the like by forming a slurry of a required ceramic material. Holes 2 for forming external terminals are formed in the ceramic green sheet 1. This is shown in FIG. The external terminal forming hole 2 is formed on a dividing line 6 to be divided later. Of course, it forms in the required location of an external terminal. Further, when forming the external terminal forming hole 2, a via hole (not shown) for connecting an internal circuit may be appropriately formed. Next, a conductive pattern for an internal circuit is formed on a required ceramic green sheet. This can be formed by screen printing a conductive paste mainly composed of Ag. Then, a predetermined number of predetermined ceramic green sheets are stacked. At this time, necessary portions of the internal circuit are connected by via holes.
[0012]
The laminated body is temporarily pressure-bonded to obtain a temporary pressure-bonded body 3. This is shown in FIG. The temporary press-bonded body 3 is formed so that the holes 2 for forming the external terminals are stacked and penetrated from the upper surface to the lower surface. This temporary press-bonding was performed at a temperature of 25 ° C. and a pressure of 100 kg / cm 2 for 60 seconds. The temperature for this temporary pressure bonding is preferably 20 to 60 ° C. The reason is that if the temperature is lower than 20 ° C., the pressure-bonding is not reliably performed and the stacked green sheets are displaced. Further, when the temperature exceeds 60 ° C., the pressure bonding becomes excessive, and the inner surface of the external terminal forming hole of the temporary pressure bonded body is deformed.
[0013]
The pressure for this temporary pressure bonding is preferably 10 to 200 kg / cm 2 . The reason is that if it is less than 10 kg / cm 2, it is not surely pressed and the stacked green sheets are displaced. Preferably it is 40-120 kg / cm < 2 > or more. On the other hand, if it exceeds 200 kg / cm 2 , the pressure bonding becomes excessive, and the inner surface of the external terminal forming hole of the temporary pressure bonded body is deformed.
[0014]
In the state of the temporary press-bonded body 3, an external terminal was formed by applying a conductive paste to the inner surface of the external terminal forming hole using a metal mask printing method. The printing metal mask and the pre-printed pre-bonded body are fixed at predetermined positions. The metal mask has a hole of the same diameter at the same position as the electrode forming hole of the temporary press-bonded body, and the conductive paste is supplied to the temporary press-bonded body by the movement of the printing squeegee. As the conductive paste, a commercially available silver paste (viscosity of about 30 Pa · S when measured at a rotation speed of 100 rpm and a temperature of 25 ° C.) was used and printed and applied while sucking the temporary press-bonded body. In the temporary press-bonded body, since the inner surface of the external terminal forming hole is not deformed by pressurization, the conductive paste easily moves on the inner surface of the hole. Therefore, the conductive paste does not stop at the upper part of the hole, and the conductive paste can be uniformly applied to the entire inner surface of the hole. Moreover, since it can be applied to the entire surface, the adhesion between the hole inner surface and the electrode material is good, and the reliability as an electrode is also excellent. FIG. 4 shows a cross-sectional view of the electrode material applied. The electrode material 4 of the external terminal is applied to the inner surface of the hole penetrating from the upper surface to the lower surface of the temporary pressure bonding body 3.
[0015]
Next, the temporary press-bonding body 3 is finally press-bonded. This main press-bonding was performed by setting the temporary press-bonded body on a pressurizing jig and pressurizing at a temperature of 85 ° C. and a pressure of about 110 kg / cm 2 for 1 minute. The main press bonding is performed under conditions stronger than the temporary press bonding. And as conditions of this crimping | compression-bonding, it is preferable to carry out by the pressure of 10-400 kg / cm < 2 >, and the temperature of 30-100 degreeC.
[0016]
And the desired pressurized electronic component was obtained by cut | disconnecting this this crimped body with a parting line, and baking at 900 degreeC for 2 hours. A perspective view of the laminated electronic component is shown in FIG. The external terminal 5 may be subjected to nickel plating, solder plating, or the like. Further, the dividing means may be a method in which a cut groove is formed and divided. Of course, it may be divided after firing.
[0017]
According to this embodiment, since the conductive material is formed in the external terminal forming hole after the temporary pressure bonding, deformation of the hole as seen after the final pressure bonding can be suppressed, and the adhesion between the inner surface of the external terminal forming hole and the conductive material is improved. Good and reliable electrode.
In addition, since the electrode is formed by a printing method to form the conductive material in the external terminal forming hole, the manufacturing is easy. Moreover, it is not necessary to control the suction at the time of electrode printing with high precision, and it can be manufactured inexpensively or easily.
[0018]
INDUSTRIAL APPLICABILITY The present invention is effective for an electronic component incorporating a single element, a composite component incorporating a plurality of elements, a composite component in which an electronic component is mounted on a laminate, or a multilayer substrate.
[0019]
【The invention's effect】
According to the present invention, the external terminal is formed in the process of forming the conductive material after the laminated body is temporarily pressure-bonded and then performing the pressure-bonding. Terminals can be formed.
[Brief description of the drawings]
FIG. 1 is a perspective view of an embodiment according to the present invention.
FIG. 2 is a plan view of a ceramic green sheet according to an embodiment of the present invention.
FIG. 3 is a perspective view of a temporary press-bonded body according to an embodiment of the present invention.
FIG. 4 is a cross-sectional view of an external terminal portion of one embodiment according to the present invention.
[Explanation of symbols]
1 Ceramic Green Sheet 2 External Terminal Hole 3 Temporary Pressure Bonding Body 4 External Terminal Electrode Material 5 External Terminal 6 Dividing Line

Claims (3)

内部回路用の導電パターンが印刷されたセラミックグリーンシートを適宜積層し、焼成されてなる積層電子部品の側面に形成される外部端子の形成方法において、
前記セラミックグリーンシートの後に分割される分割線上に外部端子形成用の穴を開けておき、所定のセラミックグリーンシートを積層した後、セラミックグリーンシートの各層が密着するが、前記外部端子形成用の穴がつぶれない程度で仮圧着し、その仮圧着体の連続した前記外部端子形成用穴に導電材を形成し、その後、仮圧着よりも強い力で本圧着を行い、焼成されることを特徴とする積層電子部品の外部端子形成方法。
In the method of forming external terminals formed on the side surface of the laminated electronic component obtained by appropriately laminating ceramic green sheets on which conductive patterns for internal circuits are printed and firing,
A hole for forming an external terminal is formed on a dividing line divided after the ceramic green sheet, and after laminating a predetermined ceramic green sheet, each layer of the ceramic green sheet is in close contact with each other. It is characterized in that it is temporarily crimped to such an extent that it does not collapse , a conductive material is formed in the continuous hole for forming the external terminal of the temporary crimped body, and then the final crimping is performed with a stronger force than the temporary crimping and fired. A method for forming an external terminal of a laminated electronic component.
前記仮圧着の条件を圧力10〜200kg/cm、温度20〜60℃とする請求項1に記載の積層電子部品の外部端子形成方法。The method for forming an external terminal of a laminated electronic component according to claim 1, wherein the conditions of the temporary pressure bonding are a pressure of 10 to 200 kg / cm 2 and a temperature of 20 to 60 ° C. 導電ペーストをメタルマスク印刷法によって塗布することよって前記外部端子形成用穴に導電材を形成する請求項1または2に記載の積層電子部品の外部端子形成方法。  3. The method of forming an external terminal of a multilayer electronic component according to claim 1, wherein a conductive material is formed in the external terminal forming hole by applying a conductive paste by a metal mask printing method.
JP8079099A 1999-03-25 1999-03-25 Method for forming external terminals of laminated electronic components Expired - Lifetime JP4257624B2 (en)

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JP4765191B2 (en) * 2001-04-18 2011-09-07 株式会社デンソー Method for manufacturing ceramic laminate
DE10217097A1 (en) 2001-04-18 2002-11-21 Denso Corp Process for the production of a ceramic laminate
US20070002551A1 (en) * 2005-07-01 2007-01-04 Hon Hai Precision Industry Co., Ltd. Printed circuit board assembly

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