JP4278095B2 - Ultrasonic radiator, ultrasonic radiation unit, ultrasonic radiation device, and ultrasonic treatment device using the same - Google Patents

Description

  The present invention relates to an ultrasonic emitter, an ultrasonic emission device, and an ultrasonic processing apparatus using the same for emitting ultrasonic waves in a fluid such as air or liquid.

Conventionally, it is known to perform treatments such as irradiating a liquid or the like with ultrasonic waves to cause emulsification, dispersion, crushing, acceleration of chemical reaction, or washing a solid surface.
For example, Patent Document 1 describes a reaction apparatus in which an ultrasonic oscillator is attached to a tank inner wall in a stirring tank and ultrasonic waves are transmitted toward the center of the tank.
Further, in Patent Document 2, a columnar or cylindrical radiator that radiates ultrasonic energy is disposed at the center of a bottomed cylindrical reaction tank, and the side surface of the radiator, or the other end and the side surface are the radiation surface. The reaction apparatus which radiates | emits an ultrasonic wave in a reaction tank is described.

JP 2000-202277 A (2nd page, FIG. 1) JP 2003-200042 A (2nd page, FIG. 1)

  However, in the reaction apparatus described in Patent Document 1, an ultrasonic oscillator is disposed on a part of the tank wall surface, and the ultrasonic waves are radiated from the tank toward the center of the tank, and the radiation area of ultrasonic energy is small. , The distribution of the ultrasonic sound field in the layer becomes non-uniform. Moreover, since the emitted ultrasonic energy is also small, the reaction throughput is small. In addition, an ultrasonic oscillator is disposed in the tank, and when the liquid to be processed is at a high temperature or a low temperature, the performance of the oscillator may be deteriorated.

Moreover, in the reaction apparatus described in Patent Document 2, since the ultrasonic wave directed radially outward from the center of the tank is radiated, the distribution of the ultrasonic wave can be made more uniform than that of Patent Document 1. However, in the vicinity of the distal end portion (other surface) of the radiator, ultrasonic waves are emitted in the axial direction of the radiator and the radial direction perpendicular thereto, but no ultrasonic waves are emitted in the oblique tip direction. Accordingly, the ultrasonic field distribution around the radiator is also non-uniform.
Further, a cylindrical radiator or a cylindrical radiator having a diameter of λ / 3 to λ / 4 is used as the radiator. In a cylinder having such a small diameter, when the length is adjusted to be nλ / 2, the vibration in the axial direction due to resonance is excited and can be vibrated greatly in the axial direction. Therefore, strong ultrasonic waves can be emitted toward the tip of the cylinder. However, since this cylinder has a small diameter, it does not resonate in the radial direction, and vibration in the radial direction is difficult to be excited. Specifically, in the radial direction, only expansion and contraction in the radial direction appears in accordance with the Poisson's ratio with expansion and contraction due to longitudinal vibration. Therefore, even if this radiator is used, the intensity of ultrasonic vibration in the radial direction (side surface direction) cannot be increased so much.

  In view of this, it is conceivable to increase the diameter so as to form a disk-shaped or short-cylindrical radiator that resonates in the radial vibration. However, although these shapes of radiators provide a large amplitude in the radial direction, they have a short shape in the axial direction, and therefore can radiate ultrasonic vibration only in a short range in the axial direction.

Therefore, it is conceivable to increase the diameter of the radiator (cylinder) and make it long, that is, a thick and long rod. When the diameter of the radiator is increased so that radial resonance occurs, vibration in the radial direction is excited in addition to vibration in the axial direction. Therefore, it seems to vibrate greatly also in the radial direction.
However, it has been found that even in this way, a sufficiently large radial vibration cannot be obtained. When such a thick and long cylinder is vibrated, the axial vibration and the radial vibration influence each other. Therefore, the radial vibration is small and large in the axial direction of the radiator (cylinder). The portions are alternately arranged, and the vibrations between the adjacent portions having large radial vibrations are in opposite phases. For this reason, it is considered to be for inhibiting mutual radial vibration.
In addition, in this case, even though ultrasonic waves can be emitted from the distal end surface to the distal end side, from the proximal end surface to the proximal end side, and in the radial direction, ultrasonic waves cannot be emitted to the oblique proximal end side or the oblique distal end side. The sound field of sound waves is still non-uniform.

  The present invention has been made in view of such a problem, and is an ultrasonic radiator capable of emitting strong ultrasonic waves over a wide range of surroundings, and further, an ultrasonic radiator that facilitates uniform distribution of an ultrasonic sound field. The purpose is to provide. Moreover, it aims at providing the radiation | emission unit suitable for this. Furthermore, it aims at providing the ultrasonic radiation apparatus which radiates | emits an ultrasonic wave using these ultrasonic radiators. Furthermore, it is an object of the present invention to provide an ultrasonic processing apparatus that can use this to make the ultrasonic sound field distribution more uniform or process more fluid.

And the solution means is an ultrasonic radiator having a form extending in the axial direction, the large-diameter radiation portion having a relatively large radial dimension in the radial direction orthogonal to the axial direction, and the adjacent diameter. A small radiating portion having a radial dimension relatively smaller than the large radiating portion includes a radiating portion alternately arranged in order of the small radiating portion and the large radiating portion from the axial base end side, The radiating part resonates with the small-diameter radiating part as an antinode and the large-diameter radiating part as a node in the axial direction when an ultrasonic vibration of a predetermined frequency is applied to the ultrasonic radiating body. each of the large-diameter radiation unit at a primary resonance in the radial direction, and the large-diameter radiation portion between the adjacent have a shape which oscillates in the opposite phase, among the plurality of the small-diameter radiation unit, at least one of The smaller the radiating part, the farther away from the adjacent large radiating part, the above An ultrasound emitter comprising reduced diameter emitting portion in the form of dimension decreases gradually.

The ultrasonic radiator of the present invention includes a radiating portion in which a small-diameter radiating portion and a large-diameter radiating portion are alternately arranged, and the radiating portion has a small-diameter radiating portion as an abdomen in the axial direction. While resonating as a node, the large radiating portions resonate in the radial direction at this frequency, and adjacent large radiating portions vibrate in opposite phases.
As described above, since the resonance is also performed in the axial direction, if an appropriate value is selected as the axial dimension, a plurality of small-diameter radiating portions and large-diameter radiating portions are alternately formed, so that they are long in the axial direction. An ultrasonic emitter can be formed. Therefore, ultrasonic waves can be emitted over a wide range in the axial direction.
On the other hand, since each large-radiation part resonates primarily in the radial direction, large vibrations can be obtained in the radial direction, and powerful ultrasonic waves can be radiated from each large-radiation part in the radial direction.
That is, in this ultrasonic radiator, since the radiating portion is arranged with the small-diameter radiating portion and the large-diameter radiating portion alternately, the ultrasonic wave is radially directed in the axial direction by the number of the large-diameter radiating portions. A radiating part can be created, and a large radial amplitude can be obtained over a long range in the axial direction.

Further, in this ultrasonic radiator, a small-diameter radiation portion having a smaller diameter is located between the large-diameter radiation portions. Since the small-diameter radiation portion has a small-diameter configuration, vibration in the axial direction is greatly generated at the time of resonance, but vibration in the radial direction is not so much generated. For this reason, even if adjacent large-diameter radiating portions vibrate in opposite phases with each other, the presence of the small-diameter radiating portions does not inhibit each other's vibration. Directional vibration can be excited. Thus, with this ultrasonic radiator, it is possible to radiate powerful ultrasonic waves in the radial direction from the large-diameter radiation portion.
Moreover, in the ultrasonic radiator of the present invention, the surface of the reduced-diameter radiating portion is oblique in both the axial direction and the radial direction. Moreover, in the radiating portion, resonance with the small-diameter radiating portion as an antinode occurs in the axial direction at a certain frequency, and in the radial direction, primary resonance occurs in the large-diameter radiating portion. For this reason, since the surface of the reduced diameter radiating portion adjacent to the large diameter radiating portion vibrates, ultrasonic waves are also emitted from the reduced diameter radiating portion. Moreover, the direction is a direction oblique to the axial direction and the radial direction, that is, an oblique proximal direction (a direction inclined toward the proximal side from the radial direction), or an oblique distal direction (a direction inclined toward the distal side from the radial direction). ) For this reason, the intensity of the sound field formed by the ultrasonic waves radiated from the radiator in the container or the like is easily made uniform by the ultrasonic waves radiated in the oblique direction.
In addition, it is good to change the position of the reduced diameter radiation | emission part, the number, etc. according to the shape of a processing tank, the sound field distribution of the desired ultrasonic wave, etc.

As the shape of the ultrasonic radiation of the present invention consists example, between the adjacent large diameter radiating portion of the circular column (prismatic) shape, a truncated cone connected thereto (truncated pyramid) shape of the reduced diameter portion smaller diameter Examples include a radiation portion or a shape having a small diameter radiation portion sandwiched between a reduced diameter portion and a disk-shaped (square plate-shaped) buffer portion connected thereto.
Further, there may be mentioned a shape in which partially-notched spheres from which part of the upper and lower portions are removed are in contact with each other at the notched portion or connected vertically via a disk-shaped buffer portion. In the ultrasonic radiator of this form, the partially-notched spheres generate respiratory vibrations whose diameters expand and contract. In the case of the ultrasonic radiator of this form, the boundary between the large-diameter radiating portion and the small-diameter radiating portion is not clear, but among the partially cut-out spheres, the diameter is approximately the same as the diameter of the sphere. The part with the dimensions is the large-diameter radiating part, and the part of the notch sphere on the proximal side or the distal end side, or in addition to this, the buffer part is considered as the small-diameter radiating part. Good.

The reduced-diameter radiating portion only needs to have a form in which the radial dimension gradually decreases as the distance from the large-radiating portion increases, and in addition to a case where the diameter is reduced at a constant rate (conical frustum, truncated pyramid shape), a smooth concave shape, It can also be a smooth convex shape such as a spherical shape.
In order to secure a certain area of the inclined surface in the reduced diameter radiating portion, the radial dimension of the reduced diameter radiating portion farthest from the large radiating portion is 60% or less of the radial dimension of the large radiating portion. And good.
In addition, when a plurality of reduced-diameter radiating portions are provided, the reduced-diameter radiating portions may have the same shape (or symmetrical shape), depending on the shape of the treatment tank and the desired sound field distribution of the ultrasonic wave. Different shapes are possible.

  Further, in the above-described ultrasonic radiator, it is preferable that, among the plurality of small-diameter radiating portions, the proximal-side small-diameter radiating portion is an ultrasonic radiator including the reduced-diameter radiating portion.

  In the ultrasonic radiator of the present invention, the most small-diameter radiation portion on the proximal end side includes the reduced-diameter radiation portion. In the reduced-diameter radiation portion, the surface is oblique in both the axial direction and the radial direction, while the surface vibrates, so that ultrasonic waves are also emitted from the reduced-diameter radiation portion. In addition, the direction is the oblique base end direction (a direction inclined toward the base end side from the radial direction) that is oblique to the axial direction and the radial direction in the radially small radial portion on the most base end side. For this reason, since it is possible to radiate ultrasonic waves in a direction obliquely proximal to the radiator, it is easy to uniformly make the intensity of the sound field formed in the processing tank by the ultrasonic waves radiated from the radiator. .

  Further, in the ultrasonic radiator according to any one of the above items 2, a small-diameter radiation portion located on a distal end side from a large-diameter radiation portion located on the most distal side among the plurality of small-diameter radiation portions. It is preferable to use an ultrasonic radiator including the reduced-diameter radiation portion.

In the ultrasonic radiator of the present invention, the most small-diameter radiation portion on the most distal end side includes the reduced-diameter radiation portion. In the reduced-diameter radiation portion, the surface is oblique in both the axial direction and the radial direction, while the surface vibrates, so that ultrasonic waves are also emitted from the reduced-diameter radiation portion. In addition, the direction is the oblique tip direction (a direction inclined toward the tip side from the radial direction) that obliquely crosses the axial direction and the radial direction in the small-diameter radiation portion on the most distal side. For this reason, since an ultrasonic wave can be radiated in the direction toward the oblique tip side of the radiator, the intensity of the sound field formed in the processing tank is easily made uniform by the ultrasonic wave radiated from the radiator.

Furthermore, the ultrasonic radiator according to any one of the above, wherein the Young's modulus E and the density ρ of the material forming the radiating portion of the ultrasonic radiator are used, and the predetermined frequency fr is used. For the wavelength λz of the longitudinal vibration obtained by
λz = (E / ρ) ^1/2 / fr (1)
It is preferable that the smallest radial dimension in each of the small-diameter radiating portions is an ultrasonic radiator having λz / 2.6 or less.

In general, it is known that for a thin rod having a sufficiently small diameter compared to the wavelength of longitudinal vibration (vibration in the axial direction), longitudinal vibration is easily excited and the magnitude of radial vibration is very small. When the Young's modulus of the material forming the radiating portion is E, the density is ρ, and the frequency is fr, the sound velocity Cz of the longitudinal vibration is given by Cz = √ (E / ρ) = (E / ρ) ^1/2 . The wavelength λz is given by λz = Cz / fr = (E / ρ) ^1/2 / fr.
However, when the diameter of the rod increases, not only longitudinal vibration but also radial vibration (radial stretching wave) orthogonal to this is excited, so that these waves are coupled to each other and affect each other. Become.

  In an ultrasonic radiator in which a small-diameter radiating portion and a large-diameter radiating portion are alternately arranged, when driven by applying ultrasonic vibration in the axial direction to the ultrasonic radiator from the base end side, the self-radiation portion is transmitted through the small-diameter radiating portion. The ultrasonic vibration in the axial direction is transmitted to the large-diameter radiation portion on the tip side. At this time, it is assumed that the minimum radial dimension in the small-diameter radiation portion is about half (λz / 2) or more of the longitudinal vibration wavelength λz. Then, when transmitting ultrasonic vibration through the small-diameter radiation portion to the large-diameter radiation portion on the tip side, not only the axial vibration but also the radial direction in the portion having the smallest radial dimension in the small-diameter radiation portion. Vibration occurs, and its magnitude cannot be ignored. For this reason, in transmitting the ultrasonic vibration in the axial direction to the tip side through the portion having the smallest radial dimension among the small-diameter radiating portions, the transmission efficiency is lowered, and as a result, the ultrasonic radiation that can be radiated from the ultrasonic radiator is reduced. It is thought that the sonic energy decreases.

  On the other hand, if it is smaller than about λz / 2, specifically, the smallest radial dimension of the small-diameter radiation portion is λz / 2.6 or less as in the ultrasonic radiator of the present invention, In the portion having the smallest radial dimension in the small-diameter radiating portion, the vibration in the axial direction is selectively excited mainly, so that the ultrasonic vibration energy is efficiently transmitted to the large-diameter radiating portion on the tip side through this portion. I can tell you well.

  Furthermore, it is preferable that the ultrasonic radiator according to any one of the above-described items is an ultrasonic radiator made of an integral metal lump having no connection portion.

Since the ultrasonic radiator of the present invention is made of an integral metal lump without a connecting portion, there is no worry that the connecting screw of the connecting portion is loosened or a part of the ultrasonic radiator is dropped from the connecting portion. Durability and reliability are good even when used under severe conditions such as under low temperature, low temperature, thermal cycle, and thermal shock.

  According to another aspect of the present invention, there is provided an ultrasonic radiator according to any one of the above-described embodiments, wherein a plurality of radiation units each having a connection portion connected to each other are positioned in the small-diameter radiation portion. It is a sound wave emitter.

The ultrasonic radiator of the present invention is constituted by connecting a plurality of radiation units. For this reason, it is possible to easily cope with a change or repair of the shape of the ultrasonic radiator.
In addition, a radiation unit is used in which the connecting portions connected to each other are located in the small-diameter radiation portion. As described above, since the small-diameter radiation portion is small in diameter, vibration in the axial direction is mainly excited. For this reason, the transmission of ultrasonic energy from one radiation unit to the other radiation unit is mainly performed in the longitudinal vibration ( Axial vibration) is transmitted, and ultrasonic energy can be transmitted efficiently.

  In addition, when the radiation unit is formed and connected and integrated to form an ultrasonic radiator, the ultrasonic radiator is formed of an integral metal lump without a connecting portion as described above, and is cut from the metal lump. It becomes cheaper than manufacturing by etc. Moreover, the resonance frequency can be adjusted for each radiation unit, and the frequency adjustment of each part and the whole of the ultrasonic radiator is easy.

The plurality of radiation units used for this ultrasonic radiator may be the same shape or different shapes. In addition, a radiation unit in which one large-diameter radiating portion is included in one radiating unit is also a radiation in which a plurality of large-diameter radiating portions (and thus also small-diameter radiating portions are included between them). It can be a unit.
Further, the radiation units may be coupled to each other as long as they can be firmly coupled to each other and can appropriately transmit ultrasonic vibrations. For example, there is a technique in which screw holes are drilled in the connecting surfaces, the connecting surfaces are butted together and fastened with bolts that are embedded and arranged so as to straddle both screw holes. It is also possible to take a technique in which one radiation unit is screwed to the other radiation unit.

Furthermore, it is good to set it as the radiation | emission unit used as one of several said radiation | emission units which comprise said ultrasonic radiator.
Alternatively, at least at the end in the axial direction, there is a connection structure capable of connecting other radiation units or ultrasonic radiation sources of the same type or different types, and by connecting to the other radiation units, Preferably, the radiation unit forms part of the described ultrasonic emitter.

  By using the radiation unit of the present invention, a unit having an appropriate shape is selected according to the shape of the treatment tank, the distribution of the sound field in the treatment tank, the amount of ultrasonic vibration energy supplied from the ultrasonic vibration source, and the like. Thus, an ultrasonic radiator having appropriate performance and characteristics can be formed.

  Alternatively, the ultrasonic radiator according to any one of the above, an ultrasonic vibration source fixed to the ultrasonic radiator, and applying ultrasonic vibration to the ultrasonic radiator from the axial direction proximal end side; An ultrasonic radiation device including

The ultrasonic radiation apparatus of the present invention includes the above-described ultrasonic radiator and an ultrasonic vibration source that applies ultrasonic vibrations thereto. According to this ultrasonic radiation device, an ultrasonic radiation device capable of emitting powerful ultrasonic waves over a wide range can be obtained. Moreover, it is easy to make the distribution of the ultrasonic sound field uniform, and an ultrasonic radiation device having a large radiation area can be obtained.
The ultrasonic vibration source includes a known ultrasonic vibrator such as a bolted Langevin type ultrasonic vibrator, an ultrasonic vibrator, and an ultrasonic transmission body connected to the ultrasonic vibrator for transmitting ultrasonic energy. Things. Further, an ultrasonic vibration source including a plurality of ultrasonic vibrators and a power synthesizer for collecting and transmitting these vibration energies is also included.

  Furthermore, the ultrasonic radiator of any one of Claims 1-7 which arrange | positions the said radiation | emission part in the processing tank which accommodates a fluid, and the said processing tank, This ultrasonic radiator And an ultrasonic vibration source that applies ultrasonic vibration to the ultrasonic radiator from the axial base end side.

  In the ultrasonic processing apparatus of this invention, the processing tank, the above-mentioned ultrasonic radiator which has arrange | positioned the radiation | emission part in the processing tank, and the ultrasonic vibration source are provided. For this reason, an ultrasonic sound field can be created over a wide range in the treatment tank. Alternatively, an ultrasonic sound field having a uniform distribution can be created, and many objects to be processed can be appropriately ultrasonicated. In addition, when an ultrasonic radiator is formed by connecting radiation units, by appropriately combining the radiation units, appropriate ultrasonic waves are radiated to various places according to the shape of the treatment tank, and suitable for processing. An ultrasonic sound field can be formed.

In addition to gases and liquids, the object to be treated was immersed in a fluid (such as a fluid solid-liquid mixture), a fluid such as a supercritical fluid, or a liquid such as water, a solvent, or a cleaning liquid. Examples include objects to be cleaned such as machine parts.
In addition, the ultrasonic treatment includes any treatment as long as it is a treatment that imparts a desired change to the workpiece by irradiating the workpiece with ultrasonic waves. For example, emulsification, dispersion, crushing, defoaming, promotion of chemical reaction, water treatment of sludge, fuel reforming, washing of objects to be washed, etc. by ultrasonic irradiation can be mentioned.

  Examples 1, 2, and 4 and modifications 1 to 4 and 6 relating to an embodiment of the present invention will be described with reference to the drawings.

  First, a first embodiment of the present invention will be described with reference to FIGS. The ultrasonic processing apparatus 100 according to the first embodiment includes an ultrasonic vibration source 4, an ultrasonic oscillation circuit 5, a processing tank 60, and an ultrasonic radiator 10. Among these, the ultrasonic vibration source 4 includes a known bolted Langevin type ultrasonic vibrator 2 using a piezoelectric ceramic and ultrasonic transmission for transmitting the ultrasonic vibration generated thereby to the ultrasonic radiator 10. It consists of body 3. The ultrasonic oscillation circuit 5 is a known drive circuit for driving the ultrasonic transducer 2 at a predetermined frequency (resonance frequency fr). The ultrasonic radiator 10 is disposed in the processing tank 60 and emits ultrasonic waves to the processing fluid P in the processing tank 60 by the ultrasonic vibration transmitted from the ultrasonic vibration source 4. The desired treatment (emulsification, dispersion, crushing, etc.) is performed. The processing tank 60 is connected to the processing tank main body 61, the center of the side surface of the processing tank main body 61 in the height direction, and an inflow pipe 62 for allowing the fluid P to be processed to flow into the processing tank main body 61. It consists of two discharge pipes 63 </ b> A and 63 </ b> B that are connected to the upper and lower portions of the side surface of the tank body 61 and discharge the processed fluid P to be processed from the process tank body 61.

  As described above, the ultrasonic vibration source 4 includes the ultrasonic transducer 2 and the ultrasonic transmission body 3, is arranged concentrically along the axis AX, and is connected to each other by the connecting screw 6. The ultrasonic radiator 10 is connected by a connecting screw 7 at the tip of the ultrasonic transmitter 30 (the lower end in FIG. 1B).

The ultrasonic radiator 10 is a metal block body formed by cutting a metal lump of stainless steel (SUS304). As shown in FIG.
23. Further, the base end side of the large-diameter radiating portion 21 on the most proximal side (upper side in FIG. 1B), between the large-diameter radiating portions 21 and 22, 22 and 23, and the most distal side (see FIG. 1B). ) On the tip side of the large-diameter radiating portion 23), the small-diameter radiating portions 11, 12, 13, and 14 are smaller than the large-diameter radiating portion.

In the present embodiment, the radiating unit 80 that radiates ultrasonic waves is equal to the ultrasonic radiating body 10 as a whole. Of these, the large-diameter radiating portions 21, 22, and 23 are all disk-shaped with a diameter Dmax, and are the most in the radial direction perpendicular to the axis AX (the left-right direction in the figure) as compared to the small-diameter radiating portion 11 and the like. It has a large diameter form.
On the other hand, the small-diameter radiating portion 11 has a truncated cone-shaped radiating portion 11 having a proximal end surface 10B (11B: diameter D1) as an upper bottom surface and having a diameter reduced in the radial direction toward the proximal end side (upward in the drawing). Yes. The tip radiating portion 14 also has a truncated cone-shaped reduced-radiation portion 14 that has a tip surface 10T (14T: diameter D4) as an upper bottom surface and is radially reduced toward the tip side (downward in the drawing). In addition, the small-diameter radiation portion 12 has the virtual minimum diameter surface 10K1 (diameter D2) at the center in the axial direction as the upper bottom surface, and is arranged so that the diameter decreases toward the virtual minimum diameter surface 10K1 in the radial direction. It consists of two truncated cone-shaped radiation portions 12A and 12B. Further, the small-diameter radiation portion 13 is also arranged such that the virtual minimum diameter surface 10K2 (diameter D3) at the center in the axial direction is the upper bottom surface, and the diameter decreases in the radial direction as the virtual minimum diameter surface 10K2 is approached. It consists of two frustoconical reduced-diameter radiation portions 13A and 13B. As described above, in the ultrasonic radiator 10 of the first embodiment, the smallest diameters of the small-diameter radiating portions 11 and the like are all the same size (D1 = D2 = D3 = D4).

As can be easily understood with reference to FIG. 2, the first portion 81 including the small-diameter radiating portion 11, the large-diameter radiating portion 21, and the small-diameter radiating portion 12 A of the ultrasonic radiator 10, The second portion 82 composed of the radiation portion 12B, the large-diameter radiation portion 22, and the small-diameter radiation portion 13A, and the third portion 83 composed of the small-diameter radiation portion 13B, the large-diameter radiation portion 23, and the small-diameter radiation portion 14 , Have a congruent form.
Therefore, the dimensions AX direction dimensions H1, H2, and H3 of these portions 81, 82, and 83 are all the same.
A connecting screw hole 18 for coupling with the ultrasonic transmission body 30 is formed in the base end face 10B of the ultrasonic radiator 10.

In the ultrasonic processing apparatus 100, when the ultrasonic oscillator 2 is vibrated in the direction along the axis AX (hereinafter also referred to as longitudinal vibration) as indicated by an arrow in FIG. The longitudinal vibration is also transmitted to the ultrasonic radiator 10 through the base end face 10B.
In addition, the flange part 3F of the ultrasonic transmission body 3 is selected at a position where it does not vibrate as a node of longitudinal vibration, and the ultrasonic transmission body 3 is processed by a known fixing means (not shown). The ultrasonic vibrator 2 and the ultrasonic radiator 10 are also fixed to the processing tank main body 61 by being fixed to the tank main body 61.

By the way, the acoustic velocity Cz of the longitudinal vibration obtained from the Young's modulus Ez and the density ρ of the material forming the ultrasonic radiator 10 is Cz = √ (Ez / ρ). Therefore, the wavelength λz in the case of the frequency fr is λz = (Ez / ρ) ^1/2 / fr.
Therefore, in the ultrasonic radiator 10 of the first embodiment, the maximum diameter Dmax of the ultrasonic radiator 10 (large-radiation portion 21 or the like) exceeds λz / 2.6, and further exceeds λz / 2. In this ultrasonic radiator 10, in particular, each large-diameter radiating portion 21 and the like are configured to excite radial vibration.

In a large-diameter (thick) resonator such as the first, second, and third portions 81, 82, and 83 of the ultrasonic radiator 10, longitudinal vibration and radial vibration interact and couple with each other. With respect to longitudinal vibration, the apparent speed of longitudinal vibration is slower than the speed of longitudinal vibration when traveling through a thin rod. Moreover, the apparent sound speed in the radial direction is slower than the sound speed of the radial vibration of the thin disk.
Therefore, in this embodiment, the shape of the ultrasonic radiator 10 (first, second, and third portions 81, 82, and 83) is determined in consideration of the relationship between the sound speed and dimensions of longitudinal vibration and radial vibration. When longitudinal vibration of a predetermined frequency fr is transmitted from the base end face 10B, the central portion of each portion 81 or the like is a node, and a form of primary resonance is formed both in the axial direction and in the radial direction. Therefore, the entire ultrasonic radiator 10 is configured to resonate in the direction of the axis AX with the small-diameter radiating portion as an antinode and the large-diameter radiating portion as a node. More specifically, as indicated by arrows in FIG. 2, the base end surface 10B, the virtual minimum diameter surfaces 10K1 and 10K2, and the front end surface 10T are antinodes, and the central portions of the large-diameter radiating portions 21, 22, and 23 are respectively nodes. This is a form in which resonance occurs. Further, in each of the large-diameter radiating portions 21, 22, and 23, a shape that performs primary resonance with the center (axis portion) of the large-diameter radiating portion as a node and the side surfaces 21S, 22S, and 23S as antinodes also in the radial direction. Specifically, the shape is as described above.

Next, FIG. 3 shows a deformed state when the ultrasonic radiator 10 is resonated with respect to the first portion 81 of the ultrasonic radiator 10. As shown in FIG. 3, the ultrasonic radiator 10 has a large-diameter radiating portion 21 at the time when the phase φ shown by the two-dot chain line is 90 degrees as compared to the shape when the phase φ shown by the solid line is 0 °. In addition, the diameter (Dmax) is increased, and the large-diameter radiating portion 21 and the reduced-diameter radiating portions 11 and 12A are deformed so that the thickness (H1, vertical dimension in the figure) is small (thin).
Although not shown in the figure, at the time when the phase φ = −90 degrees, the diameter of the large-radiation portion 2 is reduced and the thickness of the first portion 81 is increased. Deform. Also, in FIG. 3, the deformation amount is emphasized for easy understanding of the deformation state, but the actual deformation amount is much smaller than that shown in FIG.

Similar deformations occur in the other portions of the ultrasonic radiator 10, that is, the second portion 82 and the third portion 83.
However, the second portion 82 adjacent to the first portion 81 vibrates in opposite phases to the first portion 81 in both the axial direction and the radial direction, and the third portion 83 adjacent to the second portion 82 is The second portion 82 vibrates and deforms in a phase opposite to that of the second portion 82 and thus in phase with the first portion 81.
That is, as shown by the arrows in FIG. 2, the large radiating portions 21, 22, and 23 resonate in the radial direction, but adjacent large radiating portions (for example, 21, 22, 22). And 23) vibrate in opposite phases.

  In the ultrasonic radiator 10 that has caused such resonance, the side surfaces 21S, 22S, and 23S (cylindrical surfaces) vibrate greatly due to the primary resonance in the radial direction in each of the large-diameter radiation portions 21, 22, and 23. Then, as indicated by arrows in FIG. 2, powerful ultrasonic waves can be emitted in the radial direction. Also, the base end face 10B and the front end face 10T can vibrate greatly in the axial direction, and strong ultrasonic waves can be emitted to the base end side and the front end side (upper and lower in the figure) in the axial direction.

Further, as can be seen by comparing the solid line and the two-dot chain line in FIG. 3, it can be seen that the first portion 81 hardly deforms in the radial direction at the base end face 10 </ b> B. That is, it can be seen that only axial vibration (longitudinal vibration) occurs on the base end face 10B. This is presumably because the diameter D1 of the base end face 10B is reduced (thinned) so that D1 ≦ λz / 2.6.
For this reason, the longitudinal vibration transmitted from the ultrasonic vibration source 4 (ultrasonic transmission body 3) can be efficiently received by the base end face 10B, and the ultrasonic vibration energy can be transmitted to the distal end side (downward in the figure).
The same applies to the virtual minimum diameter surface 10K1 shown in FIG. That is, the ultrasonic vibration transmitted from the base end face 10B excites radial vibration in the large-diameter radiating portion 21 and causes only longitudinal vibration in the virtual minimum diameter face 10K1. Therefore, ultrasonic vibration energy can be efficiently transmitted to the second portion 82 adjacent to the first portion 81 through the virtual minimum diameter surface 10K1.
Furthermore, the ultrasonic vibration energy transmitted to the second portion 82 is similarly transmitted to the third portion 83 in the same manner.
Thus, the ultrasonic radiator 10 radiates ultrasonic waves radially and obliquely to the proximal end side and the distal end side while efficiently transmitting ultrasonic vibration energy received from the proximal end face 10B to the distal end side one after another. be able to.

Further, as can be seen by comparing the solid line and the two-dot chain line in FIG. 3, in the ultrasonic radiator 10 of the present embodiment, the inclined surface and the distal end of the reduced-diameter radiating portion 11 that is reduced in diameter toward the proximal end side. It can be seen that the inclined surface 3S of the reduced-diameter radiating portion 12A and the inclined surface 4S of the distal-end radiating portion 4 that have a diameter reduced toward the side also have vibration components in a direction perpendicular to the inclined surfaces 11S and 12AS. In other words, in the ultrasonic radiator 10 of the present embodiment, the inclined surfaces 11S and 11AS of the reduced-diameter radiation portions 11 and 12A are also orthogonal to the inclined surfaces, that is, the directions oblique to the axis AX, specifically It can be seen that ultrasonic waves are emitted toward the oblique proximal end side or the oblique distal end side.
The same applies to the second portion 82 and the third portion 83, and from the inclined surfaces 12BS, 13AS, 13BS, and 14S of the reduced-diameter radiation portions 12B, 13A, 13B, and 14, respectively, from the oblique base end side or obliquely. Ultrasonic waves are emitted toward the tip side.

For example, as can be understood by assuming a cylindrical ultrasonic radiator having the same diameter as the base end face 10B, even a cylindrical ultrasonic radiator can emit ultrasonic waves in the radial direction and the axial direction. However, unlike the ultrasonic radiator 10 of the first embodiment, ultrasonic waves cannot be emitted toward the oblique base end side or the oblique distal end side.
Therefore, if the ultrasonic radiator 10 of the first embodiment is installed in the processing tank main body 61 and radiates ultrasonic waves, not only strong ultrasonic waves can be radiated in the radial direction and the axial direction, but also each inclined surface. From 11S to 14S, it is possible to radiate ultrasonic waves to the oblique proximal end side and the oblique distal end side of the ultrasonic radiator 1 respectively. Thus, it is easy to make the sound field of the ultrasonic wave generated in the processing tank main body 61 uniform. Therefore, it becomes easy to uniformly treat the fluid P to be processed. In particular, the inclined surface 11S can radiate ultrasonic waves toward the oblique base end side from the radiating portion 80, and the inclined surface 14S can radiate ultrasonic waves toward the oblique distal end side from the radiating portion 80. Ultrasonic radiators can irradiate ultrasonic waves to areas that are difficult to reach, making it easier to create a more uniform sound field.

  Furthermore, since this ultrasonic radiator 1 has inclined surfaces 11S to 14S and can emit ultrasonic waves to the oblique proximal end side and the oblique distal end side, it is more than a cylindrical ultrasonic radiator. Large ultrasonic radiation area. For this reason, according to the ultrasonic radiation device 1 using this ultrasonic radiator 10, the ultrasonic vibration energy transmitted through the base end face 10B can be efficiently radiated toward the fluid P to be processed. Thus, in the ultrasonic processing apparatus 100 using the ultrasonic radiator 10, a large amount of fluid P to be processed can be processed in the processing tank 60.

(Modification 1)
Next, a first modification of the first embodiment will be described with reference to FIG. The ultrasonic radiator 210 according to the first modification is made of stainless steel as in the first embodiment. However, as can be easily understood when compared with the ultrasonic radiator 10 of the first embodiment (see FIG. 2), the large-diameter radiation portions 221, 222, 223 and the small-diameter radiation portions 211, 212, 213, 214 are included. The radiation part 280 has substantially the same shape as the radiation part 80 including the large-diameter radiation parts 21, 22, 23 and the small-diameter radiation parts 11, 12, 13, 14 of the first embodiment.
However, the difference is that the ultrasonic radiator 10 and the ultrasonic transmission body 30 in Example 1 are integrally formed. That is, in Example 1 mentioned above, the ultrasonic emitter 10 was connected with the ultrasonic transmission body 30 with the connection screw 7 (refer FIG. 1). On the other hand, the ultrasonic radiator 210 according to the first modification includes an ultrasonic transmission unit in addition to the radiation units 280 including the large-diameter radiation units 221, 222, and 223 and the small-diameter radiation units 211, 212, 213, and 214. The difference is that 231 is integrally provided.
The ultrasonic radiator 210 has a connecting screw hole 231 </ b> N for connecting to the ultrasonic transducer 2 formed in the connecting surface 231 </ b> C of the ultrasonic transmission unit 231.

Therefore, instead of the ultrasonic radiator 10 and the ultrasonic transmitter 30 of the first embodiment, the ultrasonic radiator 210 of the first modification is attached to the ultrasonic transducer 2 using the connection screw hole 231N, and the ultrasonic A sound wave radiating device can be used, and an ultrasonic processing device using the sound wave radiating device can be used. Also in this ultrasonic processing apparatus, if the ultrasonic transducer 2 is ultrasonically vibrated, the radiation portion 280 is in the axis AX direction, the large-diameter radiation portions 221, 222, and 223 are nodes, and the small-diameter radiation portions 211 and 212 are. , 213, 214 as the belly. At the same time, the large-diameter radiation portions 221, 222, and 223 also perform primary resonance in the radial direction. Therefore, this ultrasonic radiator 210 also emits strong ultrasonic waves in the radial direction from the side surfaces 21S, 22S, 23S, from the upper bottom surface 211B to the axial base end side, and from the front end surface 210T to the axial front end side. Can radiate. In addition, ultrasonic waves can be radiated from the inclined surfaces of the respective reduced-diameter radiation portions 221, 212A, 212B, 213A, 213B, and 214 toward the oblique proximal end side or the oblique distal end side.

  Thus, even in the ultrasonic radiation apparatus using the ultrasonic radiator 210 according to the first modification, the oblique proximal end of the most proximal reduced diameter radiation portion 211 and the oblique distal end of the most distal reduced radiation portion 214 may be used. Ultrasound can also be emitted to the side. Therefore, in the ultrasonic processing apparatus using the ultrasonic radiator 210, the ultrasonic sound field generated in the processing tank main body 61 can be easily made uniform. Therefore, even in the ultrasonic processing apparatus using the ultrasonic radiator 210, it becomes easy to uniformly process the fluid P to be processed.

  Furthermore, since this ultrasonic radiator 210 is also provided with the small-diameter radiation portion 211 and the like, it is possible to radiate ultrasonic waves to the oblique proximal end side and the oblique distal end side, so that the ultrasonic radiation area can be increased. . The energy of ultrasonic vibration transmitted through the base end upper bottom surface 203B can be efficiently radiated toward the processing fluid P. Accordingly, even with the ultrasonic processing apparatus using the ultrasonic radiator 210, a large amount of the fluid P to be processed can be processed in the processing tank 60.

  Furthermore, in the ultrasonic radiator 210 of the first modification, an ultrasonic transmission unit 231 that transmits ultrasonic vibrations and a radiation unit 280 that emits ultrasonic waves (a large-diameter radiation unit 221 and the like, a small-diameter radiation unit 211 and the like) ) And an integral metal block. Therefore, unlike the ultrasonic treatment apparatus 1 and the ultrasonic radiation apparatus 100 of the first embodiment in which the ultrasonic radiator 10 and the ultrasonic transmission body 30 are connected by the connecting screw 7, the high temperature, high pressure, low temperature, etc. It can also be used when using ultrasonic treatment equipment under severe conditions such as treatment, treatment of highly corrosive liquid, treatment of highly clean liquid, thermal cycle, thermal shock, etc. 7 is not used, the connection screw 7 is not loosened, and the durability and reliability such as easy cleaning are good.

(Modification 2)
Next, a second modification of the first embodiment will be described with reference to FIG. The ultrasonic radiator 310 according to the second modification is formed by connecting a plurality (N) of radiation units 311, 312,..., 3N1 having the same shape as the first portion 81 and the like in the first embodiment. Each of the radiation units 311, 321,..., 3 N 1 has a disk-shaped large diameter portion 312, 322,..., 3 N 2 and a truncated cone-shaped small diameter portion 313, 323 that is adjacent to the base end side. .., 3N3 and frustoconical small diameter portions 314, 324,..., 3N4 adjacent to the large diameter portion on the tip side.

In addition, these radiation units 311 and the like are arranged on the surfaces of the unit base end surfaces 311B, 321B,..., 3N1B and the unit front end surfaces 311B, 321B,. Connecting screw holes 318, 319, 328,
329,..., 3N8 are drilled.
Accordingly, the radiation units 311 and the like have a congruent form except that there is no connection screw hole on the unit front end surface 3N1T of the radiation unit 3N1.

Each radiation unit 311 etc. are mutually connected using the connection screw 332 grade | etc.,. Specifically, for example, the radiation units 311 and 321 are brought into contact with the unit front end surface 311T and the unit base end surface 321B, and are connected (fastened) by the connection screws 332 using the connection screw holes 319 and 328. Has been. Thus, as a whole, each radiation unit 311 or the like has an ultrasonic radiator 310 (radiation unit 380) in which the large diameter portion 312 or the like is the large diameter radiation portion 312 or the like and the small diameter portion 313 or the like is the small diameter radiation portion 313 or the like. Is configured.
The radiation units 311 and 321 constitute one small-diameter radiation portion 302 with the small-diameter portions 314 and 323 adjacent to each other. Similarly, small-diameter radiation portions 303,..., 30N are configured. Further, the small diameter portions 313 and the like of the respective radiation units 311 and the like are reduced diameter radiation portions 313, 314, 323,..., 3N3 and 3N4 each having a truncated cone shape.

  This ultrasonic radiator 310 (radiator 380) is also connected to the ultrasonic transmission body 3 in the same manner as the ultrasonic radiator 10 according to the first embodiment, and the ultrasonic transducer 2 can be vibrated ultrasonically. For example, the radiating portion 380 resonates in the axis AX direction with the large-diameter radiating portions 321, 322,..., 3N2 as nodes and the small-diameter radiating portions 313, 302, 303, 30N, 3N4 as antinodes. At the same time, the large-diameter radiating portions 312, 322,..., 3N2 also perform primary resonance in the radial direction. Accordingly, this ultrasonic radiator 310 is also strong in the radial direction from the side surface of the large-diameter radiating portion 321 and the like, from the proximal end surface 310B to the axially proximal end side, and from the distal end surface 310T to the axially distal end side. Can radiate various ultrasonic waves. In addition, it is possible to radiate ultrasonic waves from the inclined surfaces of the respective reduced diameter radiation portions 313 and the like toward the oblique proximal end side or the oblique distal end side.

  Thus, even in the ultrasonic radiating device using the ultrasonic radiating body 310 of the second modification, ultrasonic waves can be radiated to the oblique proximal end side of the reduced diameter radiating portion 313 and the oblique distal end side of the reduced diameter radiating portion 3N4. it can. Therefore, in the ultrasonic processing apparatus using the ultrasonic radiator 310, it is easy to make the ultrasonic sound field generated in the processing tank main body uniform. Therefore, even in the ultrasonic processing apparatus using the ultrasonic radiator 310, the processing of the fluid P to be processed can be made uniform easily.

  Further, since this ultrasonic radiator 310 is also provided with the small-diameter radiation portions 313, 302, etc., the radiation area of the ultrasonic waves can be increased, and the energy of the ultrasonic vibration is efficiently radiated toward the fluid P to be processed. be able to. Therefore, even with the ultrasonic processing apparatus using the ultrasonic radiator 310, a large amount of the fluid P to be processed can be processed in the processing tank.

Furthermore, since the ultrasonic radiator 310 of the second modification uses the radiation unit 311 and the like, an appropriate number of radiation units 311 and the like are combined in accordance with the shape (for example, depth) of the processing tank, and an appropriate axial direction There is an advantage that an ultrasonic radiator having a length can be formed or the shape can be appropriately changed in accordance with the change of the treatment tank or the like.
Further, compared to the ultrasonic radiators 10 and 210 according to the first embodiment and the first modification described above, each radiation unit 311 and the like can be easily manufactured and made inexpensive. For this reason, the ultrasonic radiator 310 as a whole can be made inexpensive. Further, even if a part of the ultrasonic radiator is damaged or other defects, it is sufficient to repair or replace the radiation unit including the part, so that repair or replacement can be easily and inexpensively performed.

Furthermore, since the ultrasonic radiator 310 can be configured by adjusting the resonance frequency fr of each radiation unit 311 and the like and then assembling each other, it is easy to adjust and it is easy to obtain an ultrasonic radiator with good characteristics. There are also advantages.
On the other hand, in the ultrasonic radiators 10 and 210 according to the first embodiment and the first modification, the radiation unit 80 is used.
, 280 is composed of a single metal block as a whole, so that the connecting screw will not loosen and the radiation unit will not fall off even under severe conditions such as high temperature, high pressure, low temperature, thermal shock, thermal cycle, etc. Has the advantages of high reliability and durability.

(Modification 3)
Next, a third modification of the first embodiment will be described with reference to FIG. As can be easily understood with reference to FIG. 1, in the ultrasonic processing apparatus 400 according to the third modification, the ultrasonic radiator 10 is the same as the ultrasonic radiator 10 according to the first embodiment.
However, as can be understood by comparing with FIG. 1, the single ultrasonic transducer 2 is used in the first embodiment, whereas the ultrasonic transmission of the ultrasonic radiation source 404 is used in the third modification. The ultrasonic transducer 409 connected to the body 3 is different in that the outputs of the two ultrasonic transducers 402A and 402B are synthesized by the power synthesizer 407. Further, since the two ultrasonic transducers 402A and 402B are simultaneously driven in the same phase, the difference is that an ultrasonic oscillation circuit 405 having a large output is used.

In the power synthesizer 407 according to the third modification, the power assembly plate 407A is a substantially annular plate-shaped metal block, and the ultrasonic transducer 402A is located at a position on the side surface thereof that is opposed to the axis. And 402B are connected using connecting screws 406A and 406B. In addition, a substantially columnar conversion column 407B is closely fitted and inserted into the inner periphery of the power collecting plate 407A in an interference fit state.
Therefore, when the two ultrasonic transducers 402A and 402B are vibrated in the same phase, the power assembly plate 407A resonates to generate radial vibration (horizontal vibration in FIG. 6B). Then, the conversion column 407B inserted into the power assembly plate 407 resonates in the direction of the axis AX as indicated by an arrow in the figure. Therefore, the vibration in the axial direction (longitudinal vibration) is transmitted to the ultrasonic radiator 10 via the ultrasonic transmission body 3.

  At this time, the ultrasonic energy that can be extracted from the ultrasonic transmission body 3 is approximately the sum of the energy output from the two ultrasonic transducers 402A and 402B. Therefore, in the ultrasonic processing apparatus 400 according to the third modification, by using the two ultrasonic transducers 402A and 402B, a stronger ultrasonic wave is emitted from the ultrasonic radiator 10 than in the first embodiment. Thus, the fluid P to be processed can be processed with stronger ultrasonic waves.

  Next, an ultrasonic radiator 510 according to Embodiment 2 of the present invention will be described with reference to FIGS. The ultrasonic radiator 510 according to the second embodiment is made of stainless steel as in the first embodiment. Further, as can be easily understood when compared with the ultrasonic radiator 10 of the first embodiment (see FIG. 2), the large-diameter radiation portions 521, 522, 523 and the reduced-diameter radiation portions 511A, 512A, 512B, 513A, 513B. , 514A have substantially the same shape as the large-diameter radiation portions 21, 22, 23 and the reduced-diameter radiation portions 11, 12A, 12B, 13A, 13B, 14 of the first embodiment.

However, in the ultrasonic radiator 510 of the second embodiment, each of the small-diameter radiation portions 511, 512, 513, and 514 includes the buffer portions 511C, 512C, 513C, and 514C, respectively. Different from the ultrasonic emitter 10. Specifically, a disc-shaped buffer portion 511C is provided on the proximal end side (upper side in the drawing) of the reduced diameter radiation portion 511A on the most proximal side. Further, disc-shaped buffer portions 512C and 513C are provided between the reduced diameter radiation portions 512A and 512B and between the reduced diameter radiation portions 513A and 513B, respectively. Further, a disc-shaped buffer portion 514C is also provided on the distal end side (lower side in the drawing) of the most reduced diameter radiation portion 514A. For this reason, the small-diameter radiation part 511 includes a reduced-diameter radiation part 511A and a buffer part 511C. Similarly, the small-diameter radiation portion 512 includes the reduced-diameter radiation portions 512A and 512B and the buffer portion 512C, and the small-diameter radiation portion 513 includes the reduced-diameter radiation portions 513A and 513B and the buffer portion 513C. 514 is
It consists of a reduced diameter radiation part 514A and a buffer part 514C.

The ultrasonic radiator 510 according to the second embodiment includes a radiation portion 580 including large-diameter radiation portions 521, 522, and 523 and small-diameter radiation portions 511, 512, 513, and 514, and this radiation portion that emits ultrasonic waves. 580 is equal to the entire ultrasonic emitter 510. Among these, the large-diameter radiating portions 521, 522, and 523 are all in the shape of a disk having a diameter Dmax as in the first embodiment, and are in the radial direction (in the drawing) perpendicular to the axis AX as compared with the small-diameter radiating portion 511 and the like. It has the largest diameter shape in the left-right direction).
On the other hand, each of the small-diameter radiation portions 511 and the like includes a truncated cone-shaped reduced-diameter radiation portion 511A and the like, a buffer portion 511C, and the like. Of these, the buffer portion 511C and the like having the smallest diameter are all examples. 1 (D1 = D2 = D3 = D4).

  Further, among the ultrasonic radiator 510, the small-diameter radiation portion 511 (the buffer portion 511 </ b> C and the reduced-diameter radiation portion 511 </ b> A), the large-diameter radiation portion 521, and the small-diameter radiation portion 512 of the proximal end side half (reduced diameter). The axial dimension H1 ′ of the first portion 581 including the radiating portion 512A and the buffer portion 512C is a value slightly different from that of the first embodiment so as to resonate in the axial direction. Of the small-diameter radiation portion 512, the distal half (the distal half of the buffer portion 512C and the reduced-diameter radiation portion 512B), the large-diameter radiation portion 522, and the small-diameter radiation portion 513, the proximal half (small-diameter radiation portion). An axial dimension H2 ′ of the second portion 582 including 513A and the base end side half of the buffer portion 513C is H2′H1 ′. Further, the tip side half of the small diameter radiation part 513 (the tip side half of the buffer part 513C and the reduced diameter radiation part 513B), the large diameter radiation part 523, and the small diameter radiation part 514 (the reduced diameter radiation part 514A and the buffer part 514C). The dimension H3 ′ in the axial direction of the third portion 583 consisting of is also H3′H1 ′.

The ultrasonic radiator 510 of the second embodiment can be attached to the ultrasonic transmission body 3 using the connecting screw hole 518 instead of the ultrasonic radiator 10 of the first embodiment shown in FIG. For example, it can resonate in the direction of the axis AX, and primary resonance can also occur in the radial direction in the large-diameter radiation portion 521 and the like.
FIG. 7 shows a deformed state when the ultrasonic radiator 510 is resonated with respect to the first portion 581 of the ultrasonic radiator 510. Also in this ultrasonic radiator 510, in the same manner as in the case of the first embodiment, the diameter at the time of phase φ = 0 degrees shown by the solid line is the diameter at the time of phase φ = 90 degrees shown by the two-dot chain line. The large radiating portion 521 is deformed so that the diameter (Dmax) is increased and the thickness (H1 ′) of the first portion 581 is decreased (thinned).
Therefore, this ultrasonic radiator 510 also has a powerful super-radius from the side surface of each large-radiation part, from the base end surface 510B to the base end side in the axial direction, and from the front end surface 510T to the front end side in the axial direction. Can emit sound waves. In addition, ultrasonic waves can be emitted from the respective reduced diameter radiation portions 511A, 512A and the like to the oblique proximal end side or the oblique distal end side. Thus, even if this ultrasonic radiator 510 is used, the sound field in the processing tank main body 61 can be made uniform, and a large amount of fluid P to be processed can be processed in the processing tank 60.

  In the ultrasonic radiator 510 of the second embodiment, since the disk-shaped buffer portions 511C and 512C having a small diameter (D1 and the like) are provided, the portion having the smallest diameter compared to the case of the first embodiment. In the (buffer section), only the vibration in the axis AX direction (longitudinal vibration) is reliably selectively excited. For this reason, the transmission efficiency of ultrasonic vibration energy is further improved, and even when driven using the same ultrasonic vibrator, more energy can be emitted as ultrasonic waves.

(Modification 4)
Next, a modified example (modified example 4) of the second embodiment will be described with reference to FIG. The ultrasonic radiator 610 according to the fourth modification is formed by connecting a plurality (N) of radiation units 611, 612,..., 6N1 having the same shape as the first portion 581 in the second embodiment. Each radiation unit 611, 6
.., 6N1 are disk-shaped large diameter portions 612, 622,..., 6N2, and frustoconical small diameter portions 613, 623,. .., 6N4 having a truncated cone shape adjacent to the large-diameter portion on the tip side.

Further, the small diameter portions 613, 614 and the like include truncated cone-shaped reduced diameter portions 613A, 614A, 623A, 624A,..., 6N3A, 6N4A, and subsequent disk-shaped buffer portions 613C, 614C, 623C, 624C, ..., 6N3C, 6N4C.
Further, these radiation units 611 and the like are respectively provided with connection screw holes 618, 619, 628, 629,..., 6N8, and each of the radiation units 611 and the like is connected to the distal end side of the radiation unit 6N1. Except for the absence of holes, they are congruent to each other.

The radiation units 611 and the like are connected to each other using a connection screw 632 and the like. Specifically, for example, the radiation units 611 and 621 are connected (fastened) by a connection screw 632 using connection screw holes 619 and 628. Thus, as a whole, each of the radiation units 611 and the like is an ultrasonic radiator 610 (radiation unit 680) in which the large-diameter portion 612 and the like are the large-diameter radiation portion 612 and the small-diameter portion 613 and the like are the small-diameter radiation portion 613 and the like. Is configured.
The radiation units 611 and 621 constitute one small-diameter radiation portion 602 with the small-diameter portions 614 and 623 adjacent to each other. Similarly, small-diameter radiation portions 603, ..., 60N are configured.

  This ultrasonic radiator 610 (radiator 680) is also connected to the ultrasonic transmission body 3 in the same manner as the ultrasonic radiator 510 according to Example 2 described above, and the ultrasonic transducer 2 can be vibrated ultrasonically. For example, the radiating portion 680 resonates in the axis AX direction with the large diameter radiating portions 621, 622,..., 6N2 as nodes and the small diameter radiating portions 613, 602, 603, 60N, 6N4 as antinodes. At the same time, the large-diameter radiation portions 612, 622,..., 6N2 also perform primary resonance in the radial direction. Therefore, this ultrasonic radiator 610 is also strong in the radial direction from the side face of the large-diameter radiation portion 621, from the base end face 610B to the base end side in the axial direction, and from the front end face 610T to the tip end in the axial direction. Can radiate various ultrasonic waves. In addition, it is possible to radiate ultrasonic waves from the inclined surfaces of the respective reduced diameter radiation portions 613 and the like toward the oblique base end side or the oblique distal end side. Thus, even when this ultrasonic radiator 610 is used, the sound field in the processing tank body can be made uniform, and a large amount of fluid P to be processed can be processed in the processing tank.

Further, since the radiation unit 611 and the like are used in the ultrasonic radiator 610 of the present modification 4 as in the above-described modification 2, an appropriate number of radiation units 611 and the like are matched to the shape (for example, depth) of the processing tank. There is an advantage that an ultrasonic radiator having an appropriate axial length can be formed by combining the above, and the shape can be changed as appropriate in accordance with changes in the processing tank or the like.
Further, each radiation unit 611 and the like can be manufactured at a low cost as compared with an integral ultrasonic radiator, and the ultrasonic radiator 610 as a whole is inexpensive. In addition, the repair and replacement of the ultrasonic radiator can be performed easily and inexpensively. For each radiation unit 611 and the like, it is easy to adjust the resonance frequency and the like, and it is easy to obtain an ultrasonic radiator having good characteristics.

(Reference Example 1)
Next, Reference Example 1 will be described with reference to FIGS. The ultrasonic processing apparatus 700 according to the reference example 1 includes a processing tank 760 and an ultrasonic radiator 710 in addition to the ultrasonic vibration source 4 and the ultrasonic oscillation circuit 5 similar to those of the first embodiment.
Among these, the ultrasonic radiator 710 is disposed in the processing tank 760 and radiates ultrasonic waves to the fluid P to be processed in the processing tank 760 by the ultrasonic vibration transmitted from the ultrasonic vibration source 4. A desired process is performed on the processing fluid P. In addition, the processing tank 760 of the present Reference Example 1 is connected to the upper part of the side surface of the processing tank main body 761 and the processing tank main body 761, and an inflow pipe 762 for flowing the processing target fluid P into the processing tank main body 761. It comprises a discharge pipe 763 that is connected to the lower part of the side surface of the processing tank body 761 and discharges the processed fluid P to be processed from the processing tank body 761.

The ultrasonic radiator 710 according to the first reference example is made of stainless steel like that of the first example. The ultrasonic radiator 710 includes four thick, low-height (thin) disk-shaped large-diameter radiation portions 721, 722, 723, and 724, and a base between the large-diameter radiation portion 721 and the large-diameter radiation portion 721. It is located on the end side and the distal end side of the large-diameter radiating portion 724, and is composed of disk-shaped buffer portions 711, 712, 713, 714, 715 smaller in diameter than the large-diameter radiating portion 721 and the like. As can be easily understood when compared with the sound wave emitter 10 (see FIG. 2), the cone-shaped reduced-diameter radiation portion is not provided.

Each of the large-diameter radiation portions 721 and the like has a disk shape with a diameter Dmax and a thickness Tm, and each of the buffer portions 711 and the like has a disk shape with a diameter Dk.
A connecting screw hole 718 for coupling to the ultrasonic transmission body 30 is formed in the base end surface 710B of the ultrasonic radiator 710.

  In this ultrasonic processing apparatus 700, when the ultrasonic oscillator 2 is longitudinally vibrated in the direction of the axis AX as shown by an arrow in FIG. 10 by the ultrasonic oscillation circuit 5, the ultrasonic radiator 710 is also transmitted through the base end face 710B. Longitudinal vibration is transmitted.

Of this ultrasonic radiator 710, the dimension (thickness) Tm in the axial direction of the large-diameter radiation portion 721 and the like is considerably smaller than λz / 2. For this reason, in such a large-diameter radiating portion 721 (resonator) having a large diameter (thick) and a small thickness compared to this, radial vibration is mainly excited. If the diameter Dmax is selected so that the large-radiation portion 721 and the like are primarily resonated in the radial direction, extremely large radial vibration can be obtained.
On the other hand, the diameter Dk of the buffer portion 711 or the like is λz / 2.6 or less. For this reason, since the axial vibration (longitudinal vibration) is mainly excited in a small (thin) portion having a small diameter such as the buffer portion 711, it is directed from the base end side (upper side in the figure) to the distal end side (lower side in the figure). Thus, ultrasonic vibration energy can be transmitted one after another. Further, as indicated by arrows in FIG. 11, in the large-diameter radiating portions 721, 722, etc., the adjacent large-diameter radiating portions vibrate in the radial direction opposite to each other. However, there is no radial vibration between them, and there is a buffer portion 711 or the like that vibrates in the longitudinal direction. Therefore, the radial vibrations of the large radiating portions 721 and the like do not mutually suppress each other. . For this reason, each large diameter radiation | emission part 721 grade | etc., Can each be vibrated efficiently and radial direction.

If the ultrasonic radiator 710 of the reference example 1 shown in FIG. 10 is attached to the ultrasonic transmission body 3 using the connection screw hole 718 and the connection screw 7 and is ultrasonically vibrated, it resonates in the direction of the axis AX and has a diameter. In the large radiation portion 721 and the like, primary resonance can also be performed in the radial direction.
FIG. 12 shows a deformation state when the ultrasonic radiator 710 is resonated with respect to a part of the ultrasonic radiator 710. Also in this ultrasonic radiator 710, in the same manner as in the case of the first embodiment, the diameter at the time of phase φ = 90 degrees indicated by the two-dot chain line is different from the shape at the time of phase φ = 0 degrees indicated by the solid line. The large radiating portion 721 is deformed so that the diameter (Dmax) is increased and the thicknesses of the large radiating portion 721 and the buffer portions 711 and 712 are reduced (thin).

  Therefore, also with this ultrasonic radiator 710, the radial direction from the side surface of each large-radiation part, the proximal end side surface 721B of the proximal end surface 710B and the large-diameter radiation part 711, the axial direction proximal end side, and the distal end Powerful ultrasonic waves can be radiated from the surface 710T and the tip side surface 724T of the large-diameter radiation portion 714 to the tip in the axial direction. Thus, even if this ultrasonic radiator 710 is used, a large amount of fluid P to be processed can be processed in the processing tank 760.

(Reference Example 2)
Next, a modification ( Reference Example 2 ) of Reference Example 1 will be described with reference to FIG. The ultrasonic radiating body 810 according to the reference example 2 includes a plurality of radiating units 811, 812,..., 8 N 1 having the same shape as the large-diameter radiating part 721 and the buffer parts 711, 712 adjacent thereto in the reference example 1 . Do it. Each of the radiation units 811, 821,..., 8N1 has a disk-shaped large diameter portion 82, 822,..., 8N2, and a small-diameter disk-shaped small diameter portion 813 adjacent to the proximal end side thereof. , 823,..., 8N3, and small diameter disk-shaped small portions 814, 824,.

  Further, these radiation units 811 and the like are respectively provided with connection screw holes 818, 819, 828, 829,..., 8N8, and each of the radiation units 811 and the like is connected to the distal end side of the radiation unit 8N1. Except for the absence of holes, they are congruent to each other.

The radiation units 811 and the like are connected to each other using a connection screw 832 and the like. Specifically, for example, the radiation units 811 and 821 are connected (fastened) by a connection screw 832 using connection screw holes 819 and 828. Thus, as a whole, each of the radiation units 811 and the like is an ultrasonic radiator 810 (radiation unit 880) in which the large-diameter portion 812 and the like are the large-diameter radiation portion 812 and the small-diameter portion 813 and the like are the small-diameter radiation portion 813 and the like. Is configured.
In addition, the radiation units 811 and 821 constitute one small-diameter radiation portion 802 with the small-diameter portions 814 and 823 adjacent to each other. Similarly, small-diameter radiation portions 803,..., 80N are configured.

Similarly to the ultrasonic radiator 710 according to Reference Example 1 described above, this ultrasonic radiator 810 (radiator 880) can be connected to the ultrasonic transmitter 3 and the ultrasonic transducer 2 can be vibrated ultrasonically. For example, the radiating portion 880 resonates in the axis AX direction with the large-diameter radiating portions 821, 822,..., 8N2 as nodes and the small-diameter radiating portions 813, 802, 803,. At the same time, the large-diameter radiating portions 812, 822,..., 8N2 also perform primary resonance in the radial direction. Therefore, also in this ultrasonic radiator 810, from the side surface of the large-diameter radiating portion 821 and the like, from the base end surface 810B and the base end side surface 812B of the large-diameter radiating portion 812 to the base end side in the axial direction, Powerful ultrasonic waves can be radiated from the surface 810T and the distal end side surface 8N2T of the large-diameter radiation portion 8N2 to the distal end side in the axial direction. Thus, even if this ultrasonic radiator 810 is used, a large amount of fluid P to be processed can be processed in the processing tank.

Further, in the ultrasonic radiator 810 of the present reference example 2 , since the radiation unit 811 and the like are used as in the second and fourth modifications, an appropriate number of radiation units are matched to the shape (for example, depth) of the processing tank. 811 and the like can be combined to form an ultrasonic emitter having an appropriate axial length, and the shape can be changed as appropriate in accordance with changes in the treatment tank and the like.
Further, each radiation unit 811 and the like can be manufactured at a lower cost than an integrated ultrasonic radiator. The entire ultrasonic radiator 810 is also inexpensive. In addition, the repair and replacement of the ultrasonic radiator can be performed easily and inexpensively. For each radiation unit 811 and the like, it is easy to adjust the resonance frequency and the like, and it is easy to obtain an ultrasonic radiator having good characteristics.

Example 4
Next, a fourth embodiment of the present invention will be described with reference to FIGS. The ultrasonic processing apparatus 900 according to the fourth embodiment includes a processing tank 960 and an ultrasonic radiator 910 in addition to the ultrasonic vibration source 4 and the ultrasonic oscillation circuit 5 similar to those of the first embodiment.
Among these, the ultrasonic radiator 910 is disposed in the processing tank 960 and emits ultrasonic waves to the fluid P to be processed in the processing tank 960 by the ultrasonic vibration transmitted from the ultrasonic vibration source 4. A desired process is performed on the processing fluid P. In addition, the processing tank 960 of the fourth embodiment is connected to the processing tank main body 961 on the left side in the drawing from the axis AX on the upper surface of the processing tank main body 961, and the fluid P to be processed flows into the processing tank main body 961. An inflow pipe 962 to be discharged, and a discharge pipe 963 that is connected to the right side of the axis AX on the lower surface of the processing tank main body 961 and discharges the processed fluid P to be processed from the processing tank main body 961.

The ultrasonic radiator 910 according to the fourth embodiment is made of stainless steel like that of the first embodiment. The ultrasonic radiator 910 has a shape in which partially cut-out spherical first, second, and third portions 981, 982, and 983 are partially connected to each other at the cut-out portions. ing.
Each of the first portions 981 and the like has a partially cut spherical shape having a diameter Dmax and an axial direction dimension (height) Tb.

In the ultrasonic radiator 910 of Example 4, the boundary between the large-diameter radiating portion and the small-diameter radiating portion is not clear. However, in the first, second, and third portions 981, 982, and 983, the central portions in the axial direction (vertical direction in the figure), that is, the portions that are approximately the same size as the diameter of the sphere in the radial direction. Are considered to be large-diameter radiation portions 921, 922, and 923, and the proximal end side or the distal end side portion thereof are regarded as reduced-diameter radiation portions 911, 912A, 912B, 913A, 913B, and 914. Further, the reduced diameter radiation portions 911 and 914 are the small diameter radiation portions 911 and 914, the reduced diameter radiation portions 912A and 912B are the small diameter radiation portions 912, the reduced diameter radiation portions 913A and 913B, and the small diameter radiation portion 913. Can think.
Note that a connecting screw hole 918 for coupling to the ultrasonic transmission body 30 is formed in the base end surface 910B of the ultrasonic radiator 910.

In this ultrasonic processing apparatus 900, when the ultrasonic vibrator 2 is longitudinally vibrated in the direction of the axis AX as shown by an arrow in FIG. 14 by the ultrasonic oscillation circuit 5, the ultrasonic radiator 910 is also transmitted through the base end face 910B. Longitudinal vibration is transmitted.
Then, in the first portion 981 of the ultrasonic radiator 910 and the like, primary resonance occurs both in the radial direction, in the axial direction, and in the oblique direction as shown in FIG. When the phase φ is 90 degrees with respect to the time of 0 degrees, the first portion 981 expands as a whole with the central portion as a node. That is, in the ultrasonic radiator 910, the first portion 981 and the like vibrate and vibrate repeatedly repeating expansion and contraction due to resonance.
Moreover, as can be easily understood by referring to the arrows in FIG. 15, it can be seen that the first, second, and third portions 981, 982, and 983 perform respiratory vibrations in phases opposite to each other.

  Therefore, if the ultrasonic radiator 910 of Example 4 shown in FIG. 14 is attached to the ultrasonic transmission body 3 using the connection screw hole 918 and the connection screw 7 and is ultrasonically vibrated and ultrasonically vibrated by 2, the axis line The first, second, and third portions 981, 982, and 983 can resonate and vibrate, respectively, by resonating in the AX direction, the radial direction, and the oblique direction.

  Therefore, according to the ultrasonic radiator 910, not only the ultrasonic waves are radiated from the proximal end surface 910B and the distal end surface 910T in the proximal end direction and the distal end direction, but the first, second, and third portions 981, 982 are also emitted. , 983 can emit powerful ultrasonic waves in almost all directions. Thus, by using this ultrasonic radiator 910, the sound field in the processing tank body 961 can be made more uniform. In addition, a large amount of fluid P to be processed can be processed in the processing tank 960.

(Modification 6)
Next, a modified example (modified example 6) of the fourth embodiment will be described with reference to FIG. The ultrasonic radiator 1010 according to the sixth modification is formed by connecting a plurality (N) of radiation units 1011, 1012,..., 10N1 having the same shape as the first portion 981 in the fourth embodiment. Except for the radiation unit 10N1, each of the radiation units 1011, 1021,... Has a partially cut-out spherical shape with the upper and lower parts of the sphere partially removed. Further, the radiation unit 10N1 arranged on the most distal end side has a partially cut-out sphere shape in which only the upper part of the sphere is partially removed.
In these radiation units, the boundary between the large diameter portion and the small diameter portion is not clear. However, in each radiation unit 1011, 1021, etc., the central portion in the axial direction (vertical direction in the figure), that is, the portion having a dimension approximately the same as the diameter of the sphere in the radial direction is the large diameter portion 1012, 1022. ,..., 10N2, and the base end side or distal end side portion may be considered as small diameter portions 1013, 1014, 1023, 1024,.

  Further, these radiation units 1011 and the like are respectively provided with connection screw holes 1018, 1019, 1028, 1029,..., 10N8, and each of the radiation units 1011 and the like is connected to the distal end side of the radiation unit 10N1. Except for having no holes and not being notched, they are in a congruent form.

The radiation units 1011 and the like are connected to each other using a connection screw 1032 and the like. Thus, as a whole, each radiation unit 1011 or the like has an ultrasonic radiator 1010 (radiation unit 1080) in which the large diameter portion 1012 or the like is the large diameter radiation portion 1012 or the like, and the small diameter portion 1013 or the like is the small diameter radiation portion 1013 or the like. Is configured.
The radiating units 1011 and 1021 constitute one small radiating portion 1002 with the small diameter portions 1014 and 1023 adjacent to each other. Similarly, small-diameter radiation portions 1003,..., 100N are configured.

This ultrasonic radiator 1010 (radiator 1080) can also be connected to the ultrasonic transmitter 3 and ultrasonically vibrate the ultrasonic transducer 2 in the same manner as the ultrasonic radiator 910 according to Example 4 described above. For example, the radiating portion 1080 resonates in the axis AX direction with the large-diameter radiating portions 1021, 1022,..., 10N2 as nodes and the small-diameter radiating portions 1013, 1002, 1003,. At the same time, the large-diameter radiating portions 1012, 1022,..., 10N2 also perform primary resonance in the radial direction. Furthermore, each radiation unit 1011 etc. vibrate also in the direction oblique to the axial direction and the radial direction, and as a whole vibrate.
Therefore, according to the ultrasonic radiator 1010, not only the ultrasonic waves are radiated from the base end face 1010B in the base end direction, but also powerful ultrasonic waves are radiated from the respective radiating units 1011 in almost all directions. it can. Thus, if this ultrasonic radiator 1010 is used, the sound field in the processing tank body 961 can be made more uniform. In addition, a large amount of fluid P to be processed can be processed in the processing tank 960.

Further, the ultrasonic radiator 1010 according to the sixth modification also uses the radiation unit 1011 and the like as in the second and fourth modifications and the second reference example, and therefore, an appropriate number according to the shape (for example, depth) of the processing tank. There is an advantage that the ultrasonic radiation body having an appropriate axial length can be formed by combining the individual radiation units 1011 and the like, or the shape can be appropriately changed according to the change of the treatment tank or the like.
In addition, each radiation unit 1011 and the like can be manufactured at a lower cost than an integrated ultrasonic radiator. The entire ultrasonic radiator 1010 is also inexpensive. In addition, the repair and replacement of the ultrasonic radiator can be performed easily and inexpensively. For each radiation unit 1011 and the like, it is easy to adjust the resonance frequency and the like, and it is easy to obtain an ultrasonic radiator having good characteristics.
Further, in the ultrasonic radiator 1010 according to the sixth modification, the radiation unit 1N01 disposed at the distal end has a spherical shape without a connection screw hole on the distal end side and without a notch. Thereby, since the ultrasonic wave can be radiated evenly in the tip direction of the ultrasonic radiator 1010, it is further preferable.

In the above, the present invention has been described with reference to the embodiments. However, the present invention is not limited to the above embodiments, and it is needless to say that the present invention can be appropriately modified and applied without departing from the gist thereof.
For example, although the buffer part is not provided in Example 4 and Modification 6, it can also be set as the ultrasonic radiator of the form which provides a buffer part like Example 2 with respect to Example 1. FIG.
In the above-described embodiments and modifications, the first portion 81 and the radiation unit 311 and the like have the same shape. In other words, the first parts having the same shape are arranged in the axial direction. However, if the first part or the like that resonates at the same resonance frequency, or a radiation unit, different shapes may be mixed as appropriate, for example, the first part 81 large diameter portion 722 shown in the first embodiment, FIG. Reference), a second part shown in Reference Example 1 (see FIG. 11), and a third part 983 shown in Example 4 (see FIG. 15) can be used in an ultrasonic radiator. Similarly, radiation units having different shapes can be appropriately connected to form an ultrasonic radiator.

Furthermore, in the above-described Examples 1 and 2 , Reference Example 1, Modifications 1 to 4, Reference Example 2 and the like, the large-diameter radiation portion 21 and the like have a cylindrical shape. However, for example, a prismatic shape such as a regular octagonal prism can be used. good. Along with this, the reduced-diameter radiation portion can also be formed in a truncated pyramid shape. However, since the intensity of the emitted ultrasonic wave may fluctuate in the circumferential direction of the axis AX, a cylindrical shape is preferable.

  In Examples 1 and 2 and Modifications 1 to 4 described above, the reduced-diameter radiation portion has a truncated cone shape, and the inclined surface has a conical surface. However, the reduced-diameter radiating portion only needs to have a form in which the diameter is reduced toward the proximal end side or the distal end side, and may be a smooth concave shape or a smooth convex shape such as a spherical shape. Further, the tip radiating portion does not have the top bottom surface of the tip, and can be a conical shape (cone, pyramid shape), a smooth concave shape, a smooth convex shape such as a spherical shape, or the like.

  Further, in the above-described modification examples 2, 4, and 6, all of the radiation units include only one large-diameter portion (large-diameter radiation portion). It can also be set as the form containing a small diameter part.

  Furthermore, the processing tank main body 61 and the like such as the processing tank 60 have a substantially rectangular parallelepiped shape in each of the above-described embodiments. However, the shape is not limited to this, and a cylindrical shape having the axis AX as the central axis, and other properties of the fluid to be processed. Depending on the degree of uniformity of the ultrasonic field generated in the treatment tank, the shape can be made appropriate. In order to make it difficult for standing waves to be generated and improve the uniformity of the ultrasonic sound field, the wall surface of the processing tank body should be a plane or curved surface that is oblique to the axis AX or the radial direction perpendicular thereto. Can do. In addition, the diameter, number, and position of the inflow pipe and the outflow pipe may be appropriately selected according to the properties of the fluid to be processed and the object to be processed. In addition, in order to perform batch processing instead of continuous processing, it is possible to use a processing tank that does not include an inflow pipe or an outflow pipe.

Moreover, in the above-described embodiments, etc., an example in which the ultrasonic radiator 10 or the like is made of stainless steel has been shown. However, an appropriate material may be selected according to the object to be processed, processing conditions, etc. Metals such as hastelloy, inconel, titanium, titanium alloy, aluminum, and duralumin, ceramics such as alumina, silicon nitride, and silicon carbide can be used.
Further, in the examples, etc., an example in which a bolted Langevin type ultrasonic vibrator using piezoelectric ceramic is used as the ultrasonic vibrator 2 is shown. However, if the ultrasonic vibrator is an ultrasonic vibrator capable of generating ultrasonic vibration, For example, an ultrasonic vibrator using a magnetostrictive material or an electrostrictive material can also be used.
Moreover, in the Example etc., the processing tank P was filled with the to-be-processed fluid P, and the example which processes emulsification etc. about this to-be-processed fluid was shown. However, it is also possible to put water, a cleaning liquid, and the like and machine parts and other objects to be treated into the treatment tank and clean the objects to be treated with ultrasonic waves.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the ultrasonic radiator concerning Example 1, an ultrasonic radiation apparatus, and an ultrasonic processing apparatus, (a) is a top view in the state which saw through the upper surface of the processing tank, (b) fractured | ruptured the processing tank It is a front view shown. 1 is a front view of an ultrasonic radiator according to Example 1. FIG. It is explanatory drawing for demonstrating the vibration mode produced when the ultrasonic radiator which concerns on Example 1 is resonated, and the shape of the ultrasonic radiator at the time of phase 0 degree (solid line) and phase 90 degrees (dashed line) It is explanatory drawing which shows. It is a front view which shows the shape of the ultrasonic radiator which concerns on the modification 1. FIG. It is a front view which shows the shape of the radiation | emission unit which concerns on the modification 2, and the ultrasonic radiator which connected this. It is a figure which shows the ultrasonic radiator concerning a modification 3, an ultrasonic radiation apparatus, and an ultrasonic processing apparatus, (a) is a top view, (b) is a front view which fractures | ruptures and shows a processing tank, (c). FIG. 3 is a side view showing the processing tank in a broken state. 6 is a front view of an ultrasonic radiator according to Embodiment 2. FIG. It is explanatory drawing for demonstrating the vibration mode produced when the ultrasonic radiator which concerns on Example 2 is made to resonate, and the shape of the ultrasonic radiator at the time of phase 0 degree (solid line) and phase 90 degrees (dashed line) It is explanatory drawing which shows. It is a front view which shows the shape of the radiation | emission unit which concerns on the modification 4, and the ultrasonic radiator which connected this. It is a figure which shows the ultrasonic radiator concerning a reference example 1 , an ultrasonic radiation apparatus, and an ultrasonic processing apparatus, (a) is a top view in the state which saw through the upper surface of the processing tank, (b) fractured | ruptured the processing tank It is a front view shown. 5 is a front view of an ultrasonic radiator according to Reference Example 1. FIG. It is explanatory drawing for demonstrating the vibration mode produced when the ultrasonic radiator which concerns on the reference example 1 is resonated, and the shape of the ultrasonic radiator at the time of phase 0 degrees (solid line) and phase 90 degrees (broken line) It is explanatory drawing which shows. It is a front view which shows the shape of the radiation unit which concerns on the reference example 2 , and the ultrasonic radiator which connected this. It is a figure which shows the ultrasonic radiator concerning Example 4, an ultrasonic radiation apparatus, and an ultrasonic processing apparatus, (a) is a top view in the state which saw through the upper surface of the processing tank, (b) fractured | ruptured the processing tank It is a front view shown. 6 is a front view of an ultrasonic radiator according to Example 4. FIG. It is explanatory drawing for demonstrating the vibration mode produced when the ultrasonic radiator which concerns on Example 4 is resonated, and the shape of the ultrasonic radiator at the time of phase 0 degree (solid line) and phase 90 degrees (dashed line) It is explanatory drawing which shows. It is a front view which shows the shape of the radiation | emission unit which concerns on the modification 6, and the ultrasonic radiator which connected this.

AX axis 1,401,701,901 Ultrasonic radiation apparatus 10, 210, 310, 410, 510, 610, 710, 810, 910, 1010 Ultrasonic radiator 100, 400, 700, 900 Ultrasonic treatment apparatus 2, 402A , 402B, 409 Ultrasonic vibrator 3 Ultrasonic transmission body 3F Flange portion 4,404 Ultrasonic vibration source 5,405 Ultrasonic oscillation circuit 6, 7, 406A, 406B Connection screw 407 Power synthesizer 407A Power assembly plate 407B Conversion column 60, 760, 960 Treatment tank 61, 761, 961 Treatment tank body 62, 762, 962 Inflow pipe 63, 763, 963 Outflow pipe 80, 280, 380, 480, 580, 680, 780, 880, 980, 1080 Radiation section 81,581,981 first part 82,582,982 second part 83,583 83 3rd part 10B Base end surface 10T, 210T, 310T, 510T, 610T Front end surface 10K1, 10K2 Virtual minimum diameter surface 11, 12, 12A, 12B, 13, 13A, 13B, 14 Small diameter radiation part (reduction diameter radiation part) 11B, 14T, 211B, 214T, 3N1T Upper bottom surface 11S, 12AS, 12BS, 13AS, 13BS, 14S Inclined surface 18, 518 Connecting screw holes 21, 22, 23 Large-radiation portions 211, 212, 212A, 212B, 213, 213A , 213B, 214 Small-diameter radiation part (reduced-diameter radiation part)
221, 222, 223 Large-diameter radiation part 231 Ultrasonic transmission part 231C Connection surface 231F Flange part 231N Connection screw hole 311, 321, 3N1 Radiation unit 311B, 321B, 3N1B Unit base end surface 311T, 321T, 3N1T Unit front end surface 313, 314 , 323, 324, 3N3, 3N4 Small diameter part, small diameter radiation part (reduction diameter radiation part) 302, 303, 30N Small diameter radiation part (reduction diameter radiation part)
312, 322, 3 N 2 Large diameter part, Large diameter radiation part 318, 319, 328, 329, 3 N 8 Connection screw hole 332, 333, 33 N Connection screw 511, 512, 513, 514 Small diameter radiation part 511 A, 512 A, 512 B, 513 A , 513B, 514A Reduced diameter radiation part 511C, 512C, 513C, 514C Buffer part 521, 522, 523 Large diameter radiation part 611, 621, 6N1 Radiation unit 602, 603, 60N Small diameter radiation part 612, 622, 6N2 Large diameter part , Large diameter radiation part 613, 614, 623, 624, 6N3, 6N4 small diameter part, small diameter radiation part 613A, 614A, 623A, 624A, 6N3A, 6N4A reduced diameter part, reduced diameter radiation part 613C, 614C, 623C, 624C , 6N3C, 6N4C Buffer 618, 619, 628, 629, 6N8 Hole 632,633,63N connecting screw 711,712,713,714,715 small diameter radiant section (buffer section)
721, 722, 723, 724 Large-diameter radiation part 811, 821, 8N1 Radiation unit 802, 803, 80N Small-diameter radiation part 812, 822, 8N2 Large-diameter part, large-diameter radiation part 813, 814, 823, 824, 8N3 8N4 small diameter part, small diameter radiation part (buffer part)
818, 819, 828, 829, 8N8 Connection screw holes 832, 833, 83N Connection screw 911, 912, 913, 914 Small diameter radiation part 921, 922, 923 Large diameter radiation part 911, 912A, 912B, 913A, 913B, 914 Reduced-radiation part 1011, 1021, 10N1 Radiation unit 1002, 1003, 100N Small-diameter radiation part 1012, 1022, 10N2 Large-diameter part, large-diameter radiation part 1013, 1014, 1023, 1024, 10N3, 10N4 Small-diameter part, small-diameter Radiation portion 1018, 1019, 1028, 1029, 10N8 connecting screw hole 1032, 1033, 103N connecting screw

Claims (9)

An ultrasonic emitter having a configuration extending in an axial direction,
A large-diameter radiation portion having a relatively large radial dimension in the radial direction perpendicular to the axial direction;
A small-diameter radiation portion having a relatively small radial dimension than the adjacent large-diameter radiation portion,
From the base end side in the axial direction, comprising a plurality of radiation portions alternately arranged in order of the small-diameter radiation portion, the large-diameter radiation portion,
The radiating part is
When ultrasonic vibration of a predetermined frequency is applied to this ultrasonic radiator,
In the axial direction, the small-diameter radiating portion is an antinode, the large-diameter radiating portion is a node and a resonance,
In each of the large-diameter radiation unit and the primary resonance in the radial direction and it has a shape in which large-diameter radiation portion adjacent to vibrate in opposite phase,
Among the plurality of small-diameter radiating portions, at least one of the small-diameter radiating portions is
An ultrasonic radiator including a reduced-diameter radiation portion having a configuration in which the radial dimension gradually decreases as the distance from the adjacent large-diameter radiation portion increases . The ultrasonic radiator according to claim 1 ,
Among the plurality of small-diameter radiating portions, an ultrasonic radiator in which the most small-diameter radiating portion on the proximal end side includes the reduced-diameter radiating portion. The ultrasonic radiator according to claim 1 or 2 , wherein
Among the plurality of small-diameter radiating portions, an ultrasonic radiator in which a small-diameter radiating portion located on the distal end side from the large-diameter radiating portion located closest to the distal end includes the reduced-diameter radiating portion. The ultrasonic radiator according to any one of claims 1 to 3 ,
Using the Young's modulus E and density ρ of the material forming the radiating portion of the ultrasonic radiator, and the predetermined frequency fr, with respect to the wavelength λz of the longitudinal vibration obtained by the following equation (1),
λz = (E / ρ) ^1/2 / fr (1)
An ultrasonic radiator in which the smallest radial direction dimension in each of the small-diameter radiation portions is λz / 2.6 or less. The ultrasonic radiator according to any one of claims 1 to 4 , wherein
An ultrasonic emitter consisting of an integral metal mass with no connecting parts. The ultrasonic radiator according to any one of claims 1 to 4 , wherein
An ultrasonic radiator formed by connecting a plurality of radiation units, each of which has a connecting portion connected to each other and located in the small-diameter radiation portion. A radiation unit that is one of a plurality of the radiation units forming the ultrasonic radiator according to claim 6 . The ultrasonic radiator according to any one of claims 1 to 6 ,
An ultrasonic vibration source that is fixed to the ultrasonic radiator and applies ultrasonic vibrations to the ultrasonic radiator from the axial base end side;
Including an ultrasonic radiation device. A processing tank for storing a fluid to be processed or a fluid and the processing target;
The ultrasonic radiator according to any one of claims 1 to 6 , wherein at least the radiation portion is disposed in the treatment tank.
An ultrasonic processing apparatus comprising: an ultrasonic vibration source that is fixed to the ultrasonic radiator and applies ultrasonic vibration to the ultrasonic radiator from the axial base end side.

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