JP4287528B2 - Nozzles in blasting equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a nozzle in a blast processing apparatus, and processes a workpiece into a textured pattern by spraying an abrasive material made of alumina or silicon carbide powder, glass beads, fine steel balls, etc. at a high speed together with a fluid such as air. It is also used for precision engraving of glass and silicon wafers, engraving of plasma display ribs, engraving of paint, and surface treatment such as pre-treatment of paint, and blasting that performs surface treatment. More specifically, the processing shape (referred to as “processing pattern” in this specification) formed on the surface of the workpiece by spraying the abrasive in one cycle of the processing process is enlarged, that is, A blasting machine that expands the work area and can evenly distribute the spray density of the abrasive in the machining pattern. On the nozzle in.
[0002]
Recently, sandblasting has been used to form partition walls for plasma displays, and it has become necessary to process large substrates uniformly at high speed. Normally, to process a large substrate uniformly, the nozzle is reciprocated back and forth at a high speed on a flat surface, and the processed substrate is reciprocated in the direction orthogonal to the nozzle movement direction, that is, left and right, or from right to left or from left to right. It is necessary to perform uniform processing by slowly moving in one direction, but the present invention is particularly suitable for dry sandblasting of large substrates such as the above-mentioned plasma display that has a relatively large processing surface. The present invention relates to a tip shape of a nozzle capable of enlarging a processing pattern and achieving uniform processing.
[0003]
[Prior art]
Conventionally, for example, a blast gun 10 as shown in FIG. 5 has been used as a suction type blast gun for this type of blasting apparatus.
[0004]
The blast gun 10 includes a gun body 11, which is a substantially cylindrical container through which abrasives are sucked from a recovery tank of a blast processing apparatus through an abrasive hose 31 to an abrasive inlet 24. A conical inner surface 16 is formed in a conical shape at the front end of the abrasive suction chamber 12, and a nozzle 14 penetrating the conical inner surface 16 is provided. Yes.
[0005]
The tip of a jet 13 communicating with a compressed air supply source (not shown) is inserted into the inner surface of the conical inner surface 16 from the rear of the suction chamber 12 for abrasive material. The compressed air supplied from a compressed air supply source (not shown) can be injected.
[0006]
Reference numeral 15 denotes a holder, which has a cylindrical shape with a tapered portion on the inner peripheral surface, and is a threaded portion provided on the outer periphery of the holder 15 by fitting the outer peripheral tapered portion of the nozzle 14 on the inner peripheral tapered portion of the holder 15. The nozzle 14 is fixed to the gun body 11 by being screwed to the gun body 11.
[0007]
In the blast gun 10 configured as described above, when high-pressure air is injected from the tip of the jet 13 communicated with the compressed air supply source via the hose 32, the inside of the abrasive suction chamber 12 becomes negative pressure. The negative pressure causes the abrasive in the collection tank (not shown) to be sucked into the abrasive suction chamber 12 via the abrasive hose 31.
[0008]
The abrasive in the abrasive suction chamber 12 is sucked into an annular gap between the inner surface 16 of the cone and the outer periphery of the jet 13, and rides on the air flow ejected from the jet 13 and diffuses outward from the nozzle 14 in a conical shape. While being sprayed, a substantially circular processing pattern is formed on the surface of the workpiece.
[0009]
In such a conventional suction type blast gun 10, the inner diameter of the injection hole of the jet 13 is reduced to increase the speed of the air flow injected from the jet 13. An effective spraying range in which uniform processing of the abrasive material sprayed on the air flow having a narrow cross-sectional area is determined by the inner diameter of the nozzle 14 and the processing pattern becomes narrow.
[0010]
Therefore, if the workpiece is to be blasted within the range of the desired shape, the blast gun 10 and / or the workpiece is moved and the machining pattern formed by the blast gun is continuously processed into the desired shape. There is a need to.
[0011]
However, in the case of the above-described processing method, if the above-described blast gun having a relatively small processing pattern is used, the range of movement of the blast gun or the workpiece becomes wide, and a single processing operation requires a relatively long time. In addition, in order to perform uniform processing on the workpiece, the blast gun or the workpiece needs to be accurately moved at a constant speed and at a constant interval, which is difficult. Therefore, there is a demand for the development of a blast gun having a large processing pattern and a uniform spray density of the abrasive within the processing pattern.
[0012]
However, in the suction type blast gun, the processing pattern cannot be enlarged by a simple method such as increasing the inner diameter (nozzle diameter) of the injection hole of the nozzle 14 of the blast gun 10. When the machining pattern is enlarged by enlarging the inner diameter of 13, the jet velocity and jet pressure of the air flow from the jet decrease, and if this jet velocity and jet pressure are kept constant, the compressed air supply source It is necessary to use a large-sized compressor or the like having a large capacity, which not only increases the size of the apparatus but also increases the cost. Furthermore, when the machining pattern is enlarged by enlarging the inner diameter of the nozzle, the inner diameter of the jet, etc., the spray density of the abrasive in the machining pattern can be uneven, and uniform grinding cannot be performed.
[0013]
In view of the shortcomings of the prior art, the applicant has substantially the same position so as to sandwich the jet of the mixed fluid with respect to the center of the jet of the mixed fluid of the abrasive and the compressed air injected from the blast gun. An application has already been filed for a method and apparatus for expanding the width of a machining pattern by, for example, injecting two air streams toward the surface (Japanese Patent Laid-Open No. 8-267360).
[0014]
[Problems to be solved by the invention]
According to the method and apparatus described in Japanese Patent Laid-Open No. 8-267360, the width of a machining pattern can be greatly increased as compared with the machining pattern of a conventional blast gun. The density can also be uniform.
[0015]
However, the processing pattern formed by the above method is limited to a circle or an ellipse, and it is difficult to change the processing pattern according to the material of the workpiece, processing conditions, processing shape, and the like. Therefore, there is a limit to the expansion of the processing pattern.
[0016]
As a type of blasting device, there is a direct pressure type blasting device in addition to the suction type blasting device described above. This direct pressure type blasting device is a tank in which powder is enclosed in an abrasive tank. As shown in FIG. 13, the jet 13 of the nozzle in the suction-type blasting apparatus has a structure in which the compressed air is fed into the inside and the powder discharged from the discharge port connected to the bottom of the tank is sprayed from the nozzle together with the compressed air. In addition, there is no member corresponding to the abrasive suction chamber 12, and therefore the machining pattern can be easily enlarged by enlarging the inner diameter of the nozzle.
[0017]
However, the direct pressure type blasting machine needs to stop the blasting machine itself and supply the abrasive material into the abrasive material tank once the abrasive material in the tank runs out. When the abrasive is sprayed continuously for a predetermined time due to the disadvantage that it is not suitable for continuous processing due to, and the amount of abrasive that is sprayed varies due to the change in the amount of abrasive present in the abrasive tank Has adverse effects such as variations in processing accuracy over time, especially precision processing and fine processing of sapphire, glass, silicon wafers, ceramics, etc. that are used in the formation of ribs or barriers in plasma displays and electronic devices such as semiconductors. It has the disadvantage that it is not suitable for use in the field of processing.
[0018]
Unlike the suction type sand blasting apparatus, the applicant described in Japanese Patent Laid-Open No. 10-249732 as a sandblasting means similar to the above-mentioned direct pressure type, in which an abrasive and high-pressure air mixed in advance are fed into a nozzle as a mixed gas and injected from the nozzle. In the previously proposed blasting process in which the abrasive in the abrasive recovery tank is sprayed from the injection nozzle to the workpiece by compressed air through the abrasive supply pipe, at least a part of the abrasive is in the abrasive recovery tank. Abrasive material is collected by a collection hole on the side surface of the collection rotating disk that rotates in the abrasive material, and is supplied to the injection nozzle through the abrasive material supply tube from the transmission / reception tube facing the rotation trajectory of the collection hole, and then injected. A pressure-feeding sandblasting device consisting of a structure that sends a mixture of abrasive and high-pressure air in advance to the nozzle as a mixed gas, Abrasive injected from the nozzle since the injection is hard to diffuse, but can be used regardless of the shape of the nozzle.
[0019]
Accordingly, a polishing material suction chamber communicating with the abrasive material supply source is provided in front of the nozzle of the pressure-feeding sandblasting device of JP-A-10-249732 or an air injection direction communicating with a compressed air supply source (not shown), and polishing the nozzle. The blast gun (FIG. 5) in the blast gun (FIG. 5) in the suction type blast processing apparatus provided with a confluence chamber communicating with the compressed air supply source in front of the mixed fluid injection direction of the material and high pressure air is shown in FIG. For example, the narrow side or the long side or the long side with respect to the short side or the short diameter is 10 times or more narrow and elongated in cross section through the abrasive material diffusion part 52a on the upstream side of the 52. Abrasive material of the abrasive rectification unit 52b including an abrasive material injection port 54 that defines an abrasive material diffusion chamber 52 having a rectangular cross-sectional shape constant up to a length of 10 times or more the short side or the short diameter. The applicant has already proposed a diffusion nozzle in another pressure-feed sandblasting device in which a mixed fluid of abrasive and high-pressure air is rectified into the cross-sectional shape of the abrasive rectifying unit 52b and injected from the injection port 54. (JP-A-10-58324).
[0020]
[Problems to be solved by the invention]
When the conventional rectangular horizontally long diffusion nozzle 51 (Japanese Patent Laid-Open No. 10-58324) shown in FIG. 6 is used, both ends in the longitudinal direction of the abrasive rectifying portion 52b of the diffusion nozzle formed in the rectangular rectangle having a horizontally long cross section are used. If the abrasive is evenly distributed from one end to the other and is pumped by the jetted air stream, it should be uniformly processed from end to end at both ends in the longitudinal direction of the abrasive rectifying portion 52b of the diffusion nozzle. is there. However, in reality, the supply of the abrasive material into the abrasive material diffusion portion 52a of the diffusion nozzle 51 is shorter than the longitudinal dimension of the abrasive material rectifying portion 52b or the abrasive material injection port 54 of the diffusion nozzle 51 such as a rubber hose or pipe 33. Or through a short-diameter member.
[0021]
Therefore, the diffused abrasive material collides with the even-angled both ends in the longitudinal direction of the abrasive material injection port 54 at the outlet of the abrasive material rectifying unit 52b, which is the injection port of the diffusion nozzle 51, There is a tendency that the injection amount in the vicinity thereof increases.
[0022]
The abrasive injection amount distribution in the longitudinal direction of the abrasive rectifying unit 52b or the abrasive injection port 54 of the diffusion nozzle 51 was measured.
[0023]
7 and 8, the horizontal axis indicates the longitudinal direction of the abrasive material injection port of the conventional rectangular horizontally long diffusion nozzle 51 shown in FIG. 6, and the vertical axis indicates the injection amount of the abrasive material. When measured at an inner pressure 0.3 kg / cm ² of the abrasive diffusion part 52a from the merging chamber of the nozzle in the suction type blasting apparatus, the distribution is large at both ends as shown in FIG. 8, and the inner pressure of the diffusion nozzle is 0.6 kg / cm. When measured at ² , the distribution is unevenly distributed at the center and both ends as shown in FIG.
[0024]
In this case, the dimensions and processing conditions of each part of the diffusion nozzle are the same as those in Comparative Example 1 described later.
[0025]
That is, when the internal pressure is low, the speed at which the abrasive enters the abrasive diffusing portion 52a of the diffusion nozzle 51 is slow, so that the abrasive easily diffuses in the abrasive diffusing chamber 52. Therefore, the abrasive as shown in FIG. Excessive abrasive material is distributed at both ends in the longitudinal direction of the injection port 54, and when the internal pressure is high, the speed at which the abrasive material enters the diffusion nozzle 51 is fast, so that the abrasive material is difficult to diffuse in the abrasive material diffusion chamber 52. Therefore, as shown in FIG. 7, the amount of abrasive in the center tends to be excessive. However, in any case, the amount of abrasive at both ends in the longitudinal direction of the abrasive jet 54 tends to increase.
[0026]
When the processing depth is measured when the diffusion nozzle 51 is reciprocated in the direction orthogonal to the longitudinal direction of the workpiece and the processed substrate as the workpiece is fixed, the figure is shown when the internal pressure is 0.3 kg / cm ² . As shown in FIG. 9, when the substrate is cut into a shape that is substantially vertically symmetric as shown in FIG. 8 and the internal pressure is 0.6 kg / cm ² , as shown in FIG. 10, the distribution of the injection amount in FIG. The substrate is shaved. Since both ends of the longitudinal direction of the abrasive rectifying portion 52b of the diffusion nozzle 51 are deeply processed, processing irregularities due to the locus of the nozzle occur when the substrate is moved for processing. This unevenness is actually an unevenness of 3% or less with respect to the processing depth, but becomes an unevenness of a constant pitch and can be recognized as unevenness by human eyes. Even when the machining speed was slowed down, the unevenness due to the machining trajectory could be recognized with the eyes only by making the uneven pitch fine. For this reason, when this diffusion nozzle 51 was used to form a partition of a plasma display and light was emitted as a display, the processing unevenness was slightly recognized on the display.
[0027]
When the processing substrate is fixed and processed by moving the nozzle (FIG. 5; reference numeral 14) having a circular cross section of the suction type sandblasting apparatus back and forth, the abrasive material sprayed from the nozzle diffuses, so that the substantially notched arc shape shown in FIG. It becomes.
[0028]
For example, when abrasive material is sprayed from a φ9 mm nozzle tip and this cross-sectional circular nozzle is reciprocated, setting the conveyance distance of the processed substrate to be within 5 mm allows complete uniform processing, resulting in uneven processing. Was not recognized. However, the processing time becomes extremely slow according to the movement of the processed substrate. When the transport distance of the processed substrate is 20 mm, there are many variations and processing unevenness occurs.
[0029]
Even if the nozzle shown in FIG. 5 is used in the suction type sandblasting apparatus, if the processed substrate is fed at a high speed, processing unevenness will occur.
[0030]
When the above-mentioned circular cross-section nozzle of the pumping type shown in FIG. 13 by the abrasive supply / injection method shown in Japanese Patent Laid-Open No. 10-249732 is used, the abrasive is difficult to diffuse after being injected from the nozzle tip, so that the V-shaped cross section shown in FIG. It becomes a U-shaped processing shape close to the shape. In this case, when the nozzle reciprocates using a 9 mm nozzle tip as in the suction type nozzle described above, even if the reciprocating movement is set so that the processing substrate is within 5 mm, uneven processing occurs and uniform processing is performed. I can't.
[0031]
[Means for Solving the Problems]
Accordingly, an object of the present invention is to increase the width of the processing pattern in the blast processing apparatus in which the injection amount of the abrasive is stable and can be operated continuously, and the abrasive in the expanded processing pattern. The purpose is to provide a blasting device nozzle that has a uniform spray density and can perform high-precision blasting. In the slit-shaped nozzle, the abrasive material is distributed horizontally and widely, and the workpiece can be distributed at high speed. The present invention provides a nozzle in a blasting apparatus that can be uniformly processed even when conveyed.
[0032]
In order to achieve the above object, the present invention comprises a blast gun that injects an air flow supplied from a compressed air supply source and an abrasive supplied from an abrasive supply source as a mixed fluid from an injection hole. In a blasting apparatus that communicates an abrasive diffusion chamber with an injection hole and rectifies and injects a jet flow of a mixed fluid injected from the blast gun into a cross-sectional shape of the abrasive diffusion chamber,
The abrasive material diffusion chamber defines an abrasive material diffusion chamber, and includes an abrasive material injection port for injecting an abrasive material at a front end,
The abrasive diffusion chamber is composed of an abrasive diffusion part whose widthwise cross section gradually narrows in the mixed fluid injection direction, and an abrasive rectification part formed in front of the abrasive diffusion part,
At least the abrasive rectification unit has a narrow and elongated cross-sectional shape with a long side or a long diameter of 10 times or more with respect to a short side or a short diameter, and the cross-sectional shape is 10 times or more with respect to the short side or the short diameter. It has a continuous left-right symmetrical cross-sectional shape that includes an abrasive nozzle that is constant up to the length,
The abrasive rectification unit including the abrasive injection port has a shorter central portion (including the center of the longitudinal direction 1/2) at the center in the longitudinal direction and a shorter side or shorter diameter than the central portion at both ends in the longitudinal direction. An edge including an acute angle that is a side or a minor axis is formed , and the distance (b) of the central portion is ½ of the distance (a) in the longitudinal direction of the abrasive rectifying portion including the abrasive injection port. It is formed below (b ≦ a / 2), and the remainder is the edge .
[0033]
Further, the abrasive rectifying section containing the abrasive jet port, abrasive rectification from the central portion of the long or major axis of at least one side edge (including the center of the longitudinal 1/2) containing the abrasive jet port The long side of the part or the other side edge of the long diameter is inclined toward both ends in the longitudinal direction, and can be formed at an acute angle.
[0034]
Abrasive rectifying section containing the abrasive jet port, without the cross-sectional shape vertically symmetrical, long side or major axis of the side edges of the abrasive rectifying section containing the abrasive ejection nozzle from the central portion long or major axis of the It can be inclined toward both ends in the longitudinal direction so as to form an acute angle.
[0036]
Moreover, it can form in a polygon, an acute angle, or a circular arc in the longitudinal direction both ends of the long side of a polishing material rectification | straightening part containing the said polishing material injection port, or a long diameter.
[0037]
DETAILED DESCRIPTION OF THE INVENTION
Description of the same parts as those of the above-described conventional technology is omitted.
[0038]
As shown in FIG. 1, the mixed fluid of the abrasive and compressed air is pumped from the abrasive hose 33 to the diffusion nozzle 51 having the above-mentioned cross-sectional shape in a state where the abrasive and high-pressure air are mixed. The abrasive material fed to the diffusion nozzle 51 is diffused by an abrasive material diffusion portion 52a that forms an abrasive material diffusion chamber 52 in the space in the nozzle. In the embodiment shown in FIG. 1, the diffused abrasive enters the abrasive rectifying section 52b having a substantially trapezoidal cross section and is accelerated and injected by high-pressure air.
[0039]
A test was performed by changing the shape of the abrasive rectifying portion of the diffusion nozzle 51.
[0040]
Comparative Example 1
The cross-sectional shape of the abrasive rectifying portion 52b and the abrasive injection port 54 is rectangular as shown in FIG. 6, and low-melting glass was processed in the partition forming process of a 42-inch plasma display by a known sandblasting apparatus.
[0041]
In order to easily recognize the processing unevenness, the processing was performed slightly sweeter under the above conditions.
[0042]
Inner diameter of nozzle-shaped abrasive pipe: φ19mm
Cross section of abrasive diffusion chamber: 100mm x 25mm
Abrasive diffusion chamber length: 80mm
Cross section of inner surface of abrasive rectifying part: long side; 100 mm × short side; 1.95 mm rectangular abrasive rectifying part length 50 mm
Processing conditions Low melting point glass height: 180μm
Rib pitch: 360 μm
Rib width: 80 μm
Substrate size: 650mm x 980mm
Nozzle movement width: 750mm
Nozzle internal pressure: 0.6kg / cm ²
Abrasive: S4- # 600 (Fuji Seisakusho)
Number of nozzles used: 8 Conveyor speed: 340 mm / min Machining results There were portions with hem widths of 140 μm and 150 μm at the bottom of the ribs, and machining irregularities that seemed to be nozzle tracks were recognized on the processed substrate.
[0043]
Example 1
The cross-sectional shapes of the abrasive material rectifying part 52b and the abrasive material injection port 54 are the dimensions shown in FIGS. 1 and 2, that is, the longitudinal direction, the width direction, and the distance between the short sides forming the trapezoidal shape. The distance (b) of the central portion parallel to the distance (a) is longer than the distance (a) in the longitudinal direction of the long side or the long diameter.
b ≦ a / 2, b ≧ 0
In this range, the low melting point glass was processed under the following processing conditions with a nozzle having the following shape by forming a partition wall of a 42-inch plasma display using a known sandblasting device having a trapezoidal shape.
[0044]
In order to easily recognize the processing unevenness, the processing was performed slightly sweeter under the above conditions.
[0045]
Inner diameter of nozzle-shaped abrasive pipe (33): φ19mm
Cross section of abrasive diffusion chamber: 100mm x 25mm
Abrasive diffusion chamber length: 80mm
Cross section of inner surface of abrasive rectifying part: a: 100 mm b: 300 mm c (width direction dimension): 3 mm
Abrasive rectifier length 50mm
Processing conditions Low melting point glass height: 180μm
Rib pitch: 360 μm
Rib width: 80 μm
Substrate size: 650mm x 980mm
Nozzle movement width: 750mm
Nozzle internal pressure: 0.6kg / cm ²
Abrasive: S4- # 600 (Fuji Seisakusho)
Number of nozzles used: 8 Conveyor speed: 400 mm / min Compared to the processing result comparison example 1, processing unevenness is not recognized, and the processing speed is uniform in the abrasive rectifying portion 52b of the abrasive and the abrasive outlet 54. Compared with the conventional rectangular nozzle (FIG. 6), the machining time was reduced by about 15%.
[0046]
Example 2
42 using a horizontally long hexagonal diffusion nozzle whose cross-sectional shape of the abrasive rectifying unit is shown in FIG. 3 directly without using the nozzle of FIG. 6 or FIG. 13 in the sand blasting apparatus shown in JP-A-10-249732. The low melting point glass was processed by forming the partition wall of the inch plasma display under the following processing conditions with a nozzle having the following shape.
[0047]
In order to easily recognize the processing unevenness, the processing was performed slightly sweeter under the above conditions.
[0048]
Inner diameter of nozzle-shaped abrasive pipe: φ19mm
Cross section of abrasive diffusion chamber: 100mm x 25mm
Abrasive diffusion chamber length: 80mm
Cross section of inner surface of abrasive rectifying part: a: 100 mm b: 30 mm c: 3 mm
Abrasive rectifier length 50mm
Processing conditions Low melting point glass height: 180μm
Rib pitch: 360 μm
Rib width: 80 μm
Substrate size: 650mm x 980mm
Nozzle movement width: 750mm
Nozzle internal pressure: 0.6kg / cm ²
Abrasive: S4- # 600 (Fuji Seisakusho)
Number of nozzles used: 8 Conveyor speed: 400 mm / min Processing result The processing result is the same as the trapezoidal shape. Compared to the nozzle, the processing time was reduced by about 15%.
[0049]
Comparative Example 2
Groove processing was performed on the soda glass substrate with a pressure-feed type round nozzle shown in FIG.
[0050]
Nozzle shape Nozzle 14 inner diameter: φ8mm
Length of the space sandwiched between the abrasive inlet 24 and the conical inner surface 16: 50 mm
Processing conditions Line pitch: 300μm
Line width: 80 μm
Substrate size: 300mm x 400mm
Nozzle movement width: 400mm
Nozzle internal pressure: 2kg / cm ²
Abrasive: C- # 600 (silicon carbide)
Number of nozzles used: 1 Conveyor speed: 80 mm / min Processing result The processing depth was 45 μm, but processing unevenness that seems to be the locus of the nozzle occurred.
[0051]
Processing unevenness of about 5 μm occurred.
[0052]
Example 5
The cross-sectional shapes of the abrasive rectification unit 52b and the abrasive injection port 54 are trapezoidal as shown in FIGS. 1 and 2 directly without using the nozzle of FIG. 6 or 13 in the sand blasting apparatus disclosed in Japanese Patent Laid-Open No. 10-249732. The soda glass substrate was grooved with a diffusion nozzle.
[0053]
Inner diameter of nozzle-shaped abrasive pipe: φ10mm
Cross section of abrasive diffusion chamber: 40mm x 25mm
Abrasive diffusion chamber length: 40mm
Cross section of inner surface of abrasive rectifying part: a: 40 mm b: 10 mm c: 2 mm
Abrasive rectifier length 40mm
Processing conditions Line pitch: 300μm
Line width: 80 μm
Substrate size: 300mm x 400mm
Nozzle movement width: 400mm
Nozzle internal pressure: 2kg / cm ²
Abrasive: C- # 600 (silicon carbide)
Number of nozzles used: 1 Conveyor speed: 80 mm / min Processing result Processing unevenness was not recognized at a processing depth of 45 μm.
[0054]
From the above results, machining unevenness occurs when the diffusion nozzle that is mixed with abrasive and high-pressure air is injected into the nozzle and injected, making the cross-sectional shape of the nozzle narrower at both ends in the longitudinal direction than the center. Proven to be difficult.
[Brief description of the drawings]
FIG. 1 is a perspective view of a diffusion nozzle showing an aspect of an embodiment of the present application. FIG. 2 is a partial cross-sectional view of an abrasive rectifying unit and an abrasive injection port showing an aspect of the embodiment of the present application. FIG. 4 is a partial cross-sectional view of an abrasive rectifying unit and an abrasive injection port showing another aspect of the present invention. FIG. 4 is a cross-sectional view of processing showing one aspect of the embodiment of the present application. FIG. 6 is a perspective view of a conventional diffusion nozzle. FIG. 7 is an abrasive amount distribution diagram in the longitudinal direction of an abrasive nozzle in one embodiment of the conventional diffusion nozzle. FIG. 8 is polishing in another embodiment of the conventional diffusion nozzle. FIG. 9 is a cross-sectional view of the substrate in the longitudinal direction of the abrasive material ejection port in one embodiment of the conventional diffusion nozzle. FIG. 10 is a view in another embodiment of the conventional diffusion nozzle. Cross section of the substrate in the longitudinal direction of the abrasive jet 11 is a sectional view of a substrate processed by a nozzle in a conventional suction blasting apparatus. FIG. 12 is a sectional view of a substrate processed by a sectional circular nozzle in the pressure-feeding blasting apparatus shown in FIG. Cross-sectional view of the nozzle [Explanation of symbols]
10 Blast gun 11 Gun body 12 Abrasive suction chamber 13 Jet 14 Nozzle (of blast gun 10)
15 Holder 16 Conical inner surface 18 Nozzle (42) tip (injection hole)
24 Abrasive material inlet 31 Abrasive material hose 32 Hose (for compressed air)
33 Hose 51 Diffusion nozzle 52 Abrasive material diffusion chamber 52a Abrasive material diffusion portion 52b Abrasive material rectifier 54 Abrasive material injection port

Claims (4)

A blast gun that injects the air flow supplied from the compressed air supply source and the abrasive supplied from the abrasive supply source from the injection hole as a mixed fluid, and communicates an abrasive diffusion chamber to the injection hole of the blast gun; In a blasting apparatus that rectifies and jets a jet flow of a mixed fluid jetted from the blast gun into a cross-sectional shape of the abrasive diffusion chamber,
The abrasive material diffusion chamber defines an abrasive material diffusion chamber, and includes an abrasive material injection port for injecting an abrasive material at a front end,
The abrasive diffusion chamber is composed of an abrasive diffusion part whose widthwise cross section gradually narrows in the mixed fluid injection direction, and an abrasive rectification part formed in front of the abrasive diffusion part,
At least the abrasive rectification unit has a narrow and elongated cross-sectional shape with a long side or a long diameter of 10 times or more with respect to a short side or a short diameter, and the cross-sectional shape is 10 times or more with respect to the short side or the short diameter. It has a continuous left-right symmetrical cross-sectional shape that includes an abrasive nozzle that is constant up to the length,
The abrasive rectification unit including the abrasive injection port has an edge including a central portion in the center in the longitudinal direction and an acute angle in which the short side or the short diameter further becomes a short side or a short diameter with respect to the central portion at both ends in the longitudinal direction. The distance between the central portions is formed to be 1/2 or less with respect to the distance in the longitudinal direction of the abrasive rectifying portion including the abrasive injection port, and the remaining portion is used as the edge. Nozzle in blast processing equipment. The longitudinal ends of the abrasive rectifying section comprising abrasive injection port is long or major axis of the other side edge of the abrasive rectifying section containing the abrasive jet port the long or major axis of the one side edge of the central portion The nozzle in the blast processing apparatus according to claim 1, wherein the nozzle is inclined toward the surface and formed at an acute angle. Abrasive rectifying section containing the abrasive jet port, without the cross-sectional shape vertically symmetrical, long side or major axis of the side edges of the abrasive rectifying section containing the abrasive ejection nozzle from the central portion long or major axis of the The nozzle in the blasting apparatus according to claim 1, wherein the nozzle is inclined toward both longitudinal ends of the other side edge and formed at an acute angle. The abrasive rectification unit including the abrasive injection port has a vertically symmetric cross-sectional shape, and is formed into a polygon, an acute angle, or an arc at both ends in the longitudinal direction of the long side or the long diameter of the abrasive rectification unit including the abrasive injection port. The nozzle in the blasting apparatus according to claim 1.

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