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JP4287735B2 - Measuring instrument for fluxgate magnetometer - Google Patents
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JP4287735B2 - Measuring instrument for fluxgate magnetometer - Google Patents

Measuring instrument for fluxgate magnetometer Download PDF

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JP4287735B2
JP4287735B2 JP2003401461A JP2003401461A JP4287735B2 JP 4287735 B2 JP4287735 B2 JP 4287735B2 JP 2003401461 A JP2003401461 A JP 2003401461A JP 2003401461 A JP2003401461 A JP 2003401461A JP 4287735 B2 JP4287735 B2 JP 4287735B2
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敬信 尾本
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Meisei Electric Co Ltd
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Description

本発明はフラックスゲート磁力計の計測装置に関するものである。   The present invention relates to a measuring device for a fluxgate magnetometer.

フラックスゲート磁力計は、磁気センサーを構成する軟磁性材料製コアの飽和磁束密度の対称性を利用して磁束密度を計測するものとして知られている。この磁気センサーとしては、例えば図5に示すように、リングコア型のものが提案されており、リング形状に形成された軟磁性材料製のコア3を励磁する励磁コイル4と、該コア3に誘起する磁束密度の変化を検出する検出コイル6とを有している。そして、図2に示す計測装置(詳細については実施の形態の説明において述べる)16の励磁回路7から前記励磁コイル4へ励磁電圧を印加することにより前記コア3を飽和領域まで交番磁界で励磁し、コア3に誘起する磁束密度の変化を前記検出コイル6から検出する。なお、図5において、磁気センサー1は、リングコア3を非磁性材からなる筺体2内に収納した構成としている。   A fluxgate magnetometer is known as a device that measures magnetic flux density by utilizing the symmetry of saturation magnetic flux density of a soft magnetic material core constituting a magnetic sensor. As this magnetic sensor, for example, as shown in FIG. 5, a ring core type has been proposed. An excitation coil 4 for exciting a core 3 made of a soft magnetic material formed in a ring shape, and induced in the core 3. And a detection coil 6 for detecting a change in magnetic flux density. 2 is excited by an alternating magnetic field up to a saturation region by applying an excitation voltage to the excitation coil 4 from the excitation circuit 7 of the measuring device 16 (details will be described in the description of the embodiment) shown in FIG. The change in magnetic flux density induced in the core 3 is detected from the detection coil 6. In FIG. 5, the magnetic sensor 1 has a configuration in which a ring core 3 is housed in a housing 2 made of a nonmagnetic material.

前記コア3に励磁磁界以外の磁界が印加されていない状態では、誘起する磁束密度も対称であり、前記検出コイル6には、励磁波の奇数時高調波しか発生しない。ここで、前記コア3にセンサー外部から磁界が印加されると、励磁磁界に該外部磁界が加算されるため、等価的に該コア3に加わる磁界に偏りが生じて磁束密度の変化が非対称となり、前記検出コイル6に偶数時高調波が発生する。   When no magnetic field other than the excitation magnetic field is applied to the core 3, the induced magnetic flux density is also symmetric, and the detection coil 6 generates only the odd-numbered harmonics of the excitation wave. Here, when a magnetic field is applied to the core 3 from the outside of the sensor, the external magnetic field is added to the exciting magnetic field, so that the magnetic field applied to the core 3 is equivalently biased and the change in magnetic flux density becomes asymmetric. , Even-numbered harmonics are generated in the detection coil 6.

フラックスゲート磁力計は、この偶数時高調波を検出することにより磁界を計測する。   The fluxgate magnetometer measures the magnetic field by detecting the even harmonics.

すなわち、高透磁率を備えた物質は、非直線的磁気特性を有しており、図6(a)に示すヒステリシス(履歴曲線:B−Hカーブ)を有するとした場合、前記励磁コイル4に図6(b)に示す1/Tとなる周波数でコアが十分に飽和する磁界Hで励振させると、コアは±Hで飽和し、誘導磁束Bは±Bとなる。 That is, a substance having a high magnetic permeability has non-linear magnetic characteristics and has the hysteresis (history curve: BH curve) shown in FIG. When core frequencies of 1 / T shown in FIG. 6 (b) is excited by the magnetic field H D that fully saturated, the core is saturated at ± H C, induction flux B is ± B S.

このコア3に二次コイル(検知コイル)を巻回し、該検知コイルから見た磁束は図6(c)に示すように、±Bで飽和値となった波形となる。 The core 3 in winding a secondary coil (detection coil), the magnetic flux seen from the detection coil as shown in FIG. 6 (c), a waveform becomes saturated value at ± B S.

そして、検知コイルに誘起される出力信号は、磁束の時間変化(dBR/dt)であって、図6(d)に示すように、±Bでパルスの開閉が行われる。 Then, the output signal induced in the sensing coil is a time change of magnetic flux (dB R / dt), as shown in FIG. 6 (d), opening and closing of the pulse is effected by ± B S.

ここで、図6(b)に示す状態で、外部磁場ΔHがなければ、図6(c)に示す波形は、B=0に対して正負の波形は対称となり、図6(d)における正負側のパルス出力周期が等しくなる。   Here, in the state shown in FIG. 6B, if there is no external magnetic field ΔH, the waveform shown in FIG. 6C is symmetric with respect to B = 0, and the positive and negative waveforms in FIG. The pulse output cycle on the side becomes equal.

これに対し、外部磁場ΔHが存在すると、ΔH+Hcosωtによって生じる誘導磁場は、図6(b)で励振する零点がずれるため、図6(c)に示すように、出力パルスの正側から負側までの時間がT/2(50%デューティ)でなくなる。   On the other hand, when the external magnetic field ΔH exists, the induced magnetic field generated by ΔH + H cos ωt shifts from the zero point excited in FIG. 6B, and therefore, from the positive side to the negative side of the output pulse as shown in FIG. 6C. Is no longer T / 2 (50% duty).

コアを構成する磁気検出材料としてパーマロイが用いられ、コアの形状としては、図5に示すリングコアを用いた磁気センサーにあっては、励磁電力が小さく、大きな出力が得られるという特性を有している。   Permalloy is used as the magnetic detection material that constitutes the core, and the shape of the core is that the magnetic sensor using the ring core shown in FIG. 5 has the characteristics that the excitation power is small and a large output can be obtained. Yes.

上記したリングコアを用いた磁気センサーは雑音が小さいため高精度の測定が可能であるが、さらなる高精度の測定を行うには限界があった。   The magnetic sensor using the above-described ring core can measure with high accuracy since the noise is small, but there is a limit to the measurement with higher accuracy.

図6(a)に示す履歴曲線は理想的なものであり、実際には図7に示すように、磁界Hが飽和磁界に達し、これ以降の飽和磁界領域で誘導磁束の変化割合が緩やかになる。そして、この磁界Hが飽和磁界に達する点を原点(H=0)として判別できることにより、図6(b)に示すようにΔHを求めることができるのである。   The hysteresis curve shown in FIG. 6A is ideal. Actually, as shown in FIG. 7, the magnetic field H reaches the saturation magnetic field, and the rate of change of the induced magnetic flux gradually decreases in the saturation magnetic field region thereafter. Become. Since the point where the magnetic field H reaches the saturation magnetic field can be determined as the origin (H = 0), ΔH can be obtained as shown in FIG.

しかし、磁力の測定について更なる高精度化を図ろうとする場合、この履歴曲線に生じる僅かなノイズが大きく影響する。   However, in order to further increase the accuracy of the magnetic force measurement, a slight noise generated in the history curve greatly affects.

本発明者はこのようなノイズの発生について検討した結果、以下のことを知見した。   As a result of examining the generation of such noise, the present inventor has found the following.

フラックスゲート磁力計は、コアを構成する磁気検出材料に交番磁界を与え、その磁束密度の変化が計測磁界により非対称となる成分を検出することにより磁界を計測するものであるから、飽和領域における飽和磁界に不均一性が存在するとこれが上記した履歴曲線にノイズとして現れるのではないかと推測した。   The fluxgate magnetometer measures the magnetic field by applying an alternating magnetic field to the magnetic detection material that constitutes the core, and detecting the component in which the change in magnetic flux density is asymmetric due to the measurement magnetic field. It was speculated that if there was inhomogeneity in the magnetic field, this would appear as noise in the above-mentioned hysteresis curve.

そして、飽和磁界に不均一性が生じる要因について磁気検出材料中の磁石単位である磁区に着目した。磁気検出材料中の磁区の大きさは一様ではないため、交番磁界により各磁区が飽和して各磁区における磁軸の反転が不均一なため、飽和の仕方にも不均一性が生じる。   Then, attention was paid to the magnetic domain, which is a magnet unit in the magnetic detection material, as a factor causing the non-uniformity in the saturation magnetic field. Since the size of the magnetic domains in the magnetic detection material is not uniform, each magnetic domain is saturated by the alternating magnetic field, and the reversal of the magnetic axis in each magnetic domain is non-uniform, resulting in non-uniformity in the saturation method.

つまり、飽和領域では、各磁区の飽和がまちまちで、コアを構成する磁気検出材料の透磁率の変化にムラが生じるが、磁束密度は電流と透磁率の積に比例するため、この透磁率変化のムラが磁束密度の変化に揺らぎを生じさせ、磁力計出力のノイズ発生の要因となると考えられる。   In other words, in the saturation region, the saturation of each magnetic domain varies and unevenness occurs in the change in permeability of the magnetic detection material constituting the core, but the magnetic flux density is proportional to the product of current and permeability. It is considered that the non-uniformity causes fluctuations in the magnetic flux density and causes noise in the magnetometer output.

このため、測定精度の高精度化に限界があった。   For this reason, there has been a limit to increasing the measurement accuracy.

本願発明の目的は、このような従来の問題に鑑みなされたもので、更なる磁力測定の高精度化を磁気センサーのコアを励磁させる励磁回路の改良によって達成するフラックスゲート磁力計の測定装置を提供しようとするものである。   The object of the present invention was made in view of such conventional problems, and is a flux gate magnetometer measuring device that achieves higher accuracy of magnetic force measurement by improving the excitation circuit that excites the core of the magnetic sensor. It is something to be offered.

第1の発明は、請求項1に記載のように、磁気センサーの励磁コイルへ励磁電流を通電することにより該磁気センサーの磁気検出材料に交番磁界を与える励磁回路を有し、前記磁気センサーの検出コイルで検出した計測磁界を反映した磁束の非対称成分により誘起した高調波に基づいて磁界を計測するフラックスゲート磁力計の計測装置において、前記励磁回路は、前記磁気検出材料の磁気飽和領域における前記励磁電流を緩やかに増加変動させる電流変動抑制回路を有することを特徴とする。   According to a first aspect of the present invention, there is provided an excitation circuit that applies an alternating current to the magnetic detection material of the magnetic sensor by passing an exciting current through the exciting coil of the magnetic sensor. In a measurement apparatus of a fluxgate magnetometer that measures a magnetic field based on a harmonic induced by an asymmetric component of a magnetic flux that reflects a measurement magnetic field detected by a detection coil, the excitation circuit includes the excitation circuit in the magnetic saturation region of the magnetic detection material. It is characterized by having a current fluctuation suppressing circuit for gradually increasing the exciting current.

第2の発明は、請求項2に記載のように、磁気センサーの励磁コイルへ励磁電流を通電することにより該磁気センサーの磁気検出材料に交番磁界を与える励磁回路を有し、前記磁気センサーの検出コイルで検出した計測磁界を反映した磁束の非対称成分により誘起した高調波に基づいて磁界を計測するフラックスゲート磁力計の計測装置において、前記励磁回路は、前記励磁電流を所定の電流値内に維持して出力すると共に、前記磁気検出材料の磁気飽和領域で増加変動する前記励磁電流が該所定の電流値に達するまでの時間を遅延させる電流変動抑制回路を有することを特徴とする。   According to a second aspect of the present invention, the magnetic sensor includes an excitation circuit that applies an alternating current to the magnetic detection material of the magnetic sensor by passing an exciting current through the exciting coil of the magnetic sensor. In a measuring apparatus of a fluxgate magnetometer that measures a magnetic field based on a harmonic induced by an asymmetric component of a magnetic flux that reflects a measurement magnetic field detected by a detection coil, the excitation circuit causes the excitation current to fall within a predetermined current value. It is characterized by having a current fluctuation suppressing circuit that delays the time until the exciting current that increases and fluctuates in the magnetic saturation region of the magnetic detection material reaches the predetermined current value while maintaining and outputting.

の発明は、請求項に記載のように、上記いずれかの発明で、前記電流変動抑制回路は、インダクタであることを特徴とする。 A third invention is as claimed in claim 3, said either of invention, the current variation suppressor is characterized by an inductor.

請求項1、2に係る発明によれば、前記励磁電流は前記磁気検出材料の磁気飽和領域で増加変動するが、この増加変動が急激に行われないため、磁気検出材料が完全に磁気飽和した状態で計測が行えるので、磁束密度変化に現れるムラ(揺らぎ)を抑え、磁力計の出力ノイズを低減化でき、計測精度を飛躍的に向上させることができた。   According to the first and second aspects of the present invention, the excitation current fluctuates in the magnetic saturation region of the magnetic detection material. However, since the increase fluctuation is not abruptly performed, the magnetic detection material is completely magnetically saturated. Since measurement can be performed in a state, the unevenness (fluctuation) appearing in the magnetic flux density change can be suppressed, the output noise of the magnetometer can be reduced, and the measurement accuracy can be greatly improved.

請求項に係る発明によれば、電流変動抑制回路としてインダクタを用いるという簡単な構成で計測精度を飛躍的に向上させることができる。
According to the invention of claim 3 , the measurement accuracy can be drastically improved with a simple configuration in which an inductor is used as the current fluctuation suppressing circuit.

図1および図2は本発明の実施の形態を示す。   1 and 2 show an embodiment of the present invention.

図2は本発明によるフラックスゲート磁力計の測定装置及びノイズ測定系を示すブロック図、図1はフラックスゲート磁力計の測定装置における励磁回路のブロック図を示し、(a)は本発明による実施の形態の励磁回路、(b)は従来の励磁回路を示す。また、磁気センサーとしては図5に示すリングコア型のものを使用している。   FIG. 2 is a block diagram showing a measuring apparatus and noise measurement system of a fluxgate magnetometer according to the present invention, FIG. 1 is a block diagram of an excitation circuit in the measuring apparatus of the fluxgate magnetometer, and FIG. (B) shows a conventional excitation circuit. As the magnetic sensor, a ring core type shown in FIG. 5 is used.

図2は、測定装置16、およびこの測定装置16にベクトルシグナルアナライザ11を接続して構成したノイズレベル測定系を示す。   FIG. 2 shows a measurement device 16 and a noise level measurement system configured by connecting the vector signal analyzer 11 to the measurement device 16.

測定装置16は、磁気センサー1の励磁コイル4に交番信号である励磁信号を印加する励磁回路7、検出コイル6からの検出信号を増幅する増幅器12と、増幅器12からの増幅した検出信号が入力される2次高調波増幅回路18、位相検波器9、ローパスフィルター13、フィードバック回路10、励磁回路7と位相検波器9に励磁信号、位相信号を出力する励磁・位相信号発生回路14、磁力計の電源を各回路などへ供給するEMIフィルター15などで構成されている。   The measuring device 16 receives an excitation circuit 7 for applying an excitation signal, which is an alternating signal, to the excitation coil 4 of the magnetic sensor 1, an amplifier 12 for amplifying the detection signal from the detection coil 6, and an amplified detection signal from the amplifier 12. Second harmonic amplifying circuit 18, phase detector 9, low-pass filter 13, feedback circuit 10, excitation circuit 7 and excitation / phase signal generation circuit 14 for outputting phase signal to phase detector 9, magnetometer EMI filter 15 for supplying the power to each circuit and the like.

励磁回路7から図6(b)に示すような励磁信号が励磁コイル4に印加されると、リングコア3は磁界が発生して徐々に磁界が増す。そして、飽和磁界にHに達すると、図7に示すように、飽和領域における誘導磁束Bの上昇角度が緩やかになる。検出コイル6からは前述したように、コア3に発生する磁束Bの非対称成分を電気信号として検出し増幅器12に出力し、増幅器12で増幅された検出信号は、2次高調波増幅回路8に出力される。 When an excitation signal as shown in FIG. 6B is applied from the excitation circuit 7 to the excitation coil 4, a magnetic field is generated in the ring core 3, and the magnetic field gradually increases. When the saturation magnetic field reaches H D, as shown in FIG. 7, increase the angle of the induced magnetic flux B in the saturation region becomes gentle. As described above, the asymmetric component of the magnetic flux B generated in the core 3 is detected from the detection coil 6 as an electric signal and output to the amplifier 12. The detection signal amplified by the amplifier 12 is sent to the second harmonic amplifying circuit 8. Is output.

2次高調波増幅回路8では、検出コイル6で検出した計測磁界を反映した磁束の非対称成分により誘起した2次高調波を増幅する。2次高調波増幅回路8で増幅した計測磁界が交流の電気信号として抽出される。   The second harmonic amplifying circuit 8 amplifies the second harmonic induced by the asymmetric component of the magnetic flux reflecting the measurement magnetic field detected by the detection coil 6. The measurement magnetic field amplified by the second harmonic amplifying circuit 8 is extracted as an AC electrical signal.

位相検波器9は、2次高調波増幅回路8で増幅された2次高調波である交流電気信号化された計測磁界を検波して直流電気信号に変換するもので、計測磁界が直流の電圧信号に変換される。   The phase detector 9 detects a measurement magnetic field converted into an AC electric signal, which is a second harmonic amplified by the second harmonic amplifying circuit 8, and converts it into a DC electric signal. The measurement magnetic field is a DC voltage. Converted to a signal.

そして、位相検波器9からの計測磁界を直流の電気信号に変換した信号がローパスフィルター(LPF)13を介してベクトルシグナルアナライザ11に出力される。また、位相検波器9からの出力信号はフィードバック回路10へ出力される。   Then, a signal obtained by converting the measurement magnetic field from the phase detector 9 into a DC electric signal is output to the vector signal analyzer 11 via a low pass filter (LPF) 13. The output signal from the phase detector 9 is output to the feedback circuit 10.

フィードバック回路10は、計測磁界を反映する直流電圧信号を電流に変換して検出コイルに6供給する。検出コイル6は、フィードバック回路10からの電流により、計測磁界を打ち消す方向のフィードバック磁界をコア3に与える。すなわち、検出コイル6と、2次高調波増幅回路8と、位相検波器9と、フィードバック回路10により、計測磁界は電気信号に変換され、帰還されるフィードバックループが構成される。このフィードバックループは、計測磁界とフィードバック磁界の差を増幅してこれを打ち消すように働くので、フィードバック磁界は計測磁界と等しく、これを作る電流は計測磁界に比例する。この電流を与える2次高調波増幅回路8が出力する直流電圧は、計測磁界と対応しているので、これを磁力計の出力として取り出すことにより、磁界が計測される。   The feedback circuit 10 converts a DC voltage signal reflecting the measurement magnetic field into a current and supplies 6 to the detection coil. The detection coil 6 provides the core 3 with a feedback magnetic field in a direction to cancel the measurement magnetic field by the current from the feedback circuit 10. That is, the detection coil 6, the second harmonic amplifying circuit 8, the phase detector 9, and the feedback circuit 10 form a feedback loop in which the measurement magnetic field is converted into an electric signal and fed back. Since this feedback loop works to amplify and cancel the difference between the measurement magnetic field and the feedback magnetic field, the feedback magnetic field is equal to the measurement magnetic field, and the current that creates it is proportional to the measurement magnetic field. Since the DC voltage output from the second harmonic amplifying circuit 8 that supplies this current corresponds to the measurement magnetic field, the magnetic field is measured by taking it out as the output of the magnetometer.

励磁回路7の構成について、従来の回路構成と比較して本実施の形態の構成を説明する。   Regarding the configuration of the excitation circuit 7, the configuration of the present embodiment will be described in comparison with the conventional circuit configuration.

図1(b)に示す従来の励磁回路は、励磁周波数基準信号を電力増幅器21で増幅し、直流成分除去コンデンサ22により電力増幅器21の出力成分に含まれる直流成分を除去する。そして、電流制限抵抗23により、励磁電流を電力増幅器21の出力内に維持し、励磁コイル4に励磁信号として出力する。   The conventional excitation circuit shown in FIG. 1B amplifies the excitation frequency reference signal by the power amplifier 21 and removes the DC component included in the output component of the power amplifier 21 by the DC component removal capacitor 22. Then, the exciting current is maintained in the output of the power amplifier 21 by the current limiting resistor 23 and is output to the exciting coil 4 as an exciting signal.

これに対し、図1(a)に示す本実施の形態の励磁回路7は、図1(b)に示す従来の励磁回路における電流制限抵抗23の後に、電流変動制御回路5を設け、この電流変動制御回路5からの出力で励磁コイル4を励磁するようにしている。   On the other hand, the excitation circuit 7 of the present embodiment shown in FIG. 1A is provided with a current fluctuation control circuit 5 after the current limiting resistor 23 in the conventional excitation circuit shown in FIG. The excitation coil 4 is excited by the output from the fluctuation control circuit 5.

電流変動制御回路5は、図7に示す飽和領域での励磁電流の上昇を緩やかにし、各磁区が飽和し終えるまで電流の上昇を遅らせる作用を有したもので、本実施の形態ではインダクタにより構成している。   The current fluctuation control circuit 5 has a function of slowing the increase of the excitation current in the saturation region shown in FIG. 7 and delaying the increase of the current until each magnetic domain has been saturated. is doing.

図3は励磁回路7から出力される励磁電流の波形図を示す。図3の波形図は、横軸が時間、縦軸が励磁コイルに流れる励磁電流で、図中Aの領域では励磁電流の増加に伴ってコア内の磁束密度が上昇し、飽和領域に入ると透磁率の減少に伴いインダクタンスが低下し、インピーダンスが下がるため励磁電流が上昇する。   FIG. 3 shows a waveform diagram of the excitation current output from the excitation circuit 7. In the waveform diagram of FIG. 3, the horizontal axis represents time, and the vertical axis represents the excitation current flowing through the excitation coil. In the region A in the figure, the magnetic flux density in the core increases as the excitation current increases and enters the saturation region. As the permeability decreases, the inductance decreases and the impedance decreases, so that the excitation current increases.

一方、前述したように、コアを構成する磁気検出材料の磁区の大きさの不均一性により、大きな磁区は磁軸の反転が遅れ、小さな磁区は磁軸の反転が早く、飽和領域では透磁率の変化にムラが生じる。
図3(b)は図2(b)に示す従来構成の励磁回路による励磁電流の波形図で、飽和領域に達してから一定値に達するまでのカーブが急峻(角度θ1)な傾斜で上昇する。
On the other hand, as described above, due to the non-uniformity of the magnetic domain size of the magnetic detection material constituting the core, the reversal of the magnetic axis is delayed for the large magnetic domain, the reversal of the magnetic axis is fast for the small magnetic domain, and the permeability is saturated in the saturation region. Unevenness occurs in the change of the.
FIG. 3B is a waveform diagram of the excitation current by the excitation circuit of the conventional configuration shown in FIG. 2B, and the curve from reaching the saturation region to reaching a certain value rises with a steep slope (angle θ1). .

このように、従来の励磁回路の構成では、飽和領域で励磁電流が急激に上昇するので、磁束密度は励磁電流と透磁率の積に比例することから磁束密度の変化に大きなムラが生じる、すなわち磁束密度の変動を冗長させ、出力ノイズを悪化させていると推定される。   As described above, in the configuration of the conventional excitation circuit, since the excitation current rapidly rises in the saturation region, the magnetic flux density is proportional to the product of the excitation current and the permeability, so that a large unevenness occurs in the change of the magnetic flux density. It is estimated that the fluctuation of the magnetic flux density is made redundant and the output noise is deteriorated.

これに対し、図3(a)は図2(a)に示す本実施の形態の励磁回路による励磁電流の波形図で、飽和領域に達してから一定値に達するまでのカーブが緩やか(角度θ2、θ1>θ2)な傾斜で上昇し、従来構成の励磁回路での励磁と比較して遅れており、結果として各磁区が飽和し終えるまで電流の上昇が遅れることになる(励磁電流の増加変動を抑制する)。このため、磁束密度の変化の揺らぎ(ムラ)を抑制し、フラックスゲート磁力計の出力ノイズを低減し、計測限界を向上させることが可能になった。   On the other hand, FIG. 3A is a waveform diagram of the excitation current by the excitation circuit of the present embodiment shown in FIG. 2A, and the curve from reaching the saturation region to reaching a constant value is gentle (angle θ2). , Θ1> θ2), and is delayed as compared with the excitation in the excitation circuit of the conventional configuration. As a result, the increase in current is delayed until each magnetic domain is saturated (increasing fluctuation in excitation current). Suppression). For this reason, fluctuation (unevenness) in the change in magnetic flux density can be suppressed, the output noise of the fluxgate magnetometer can be reduced, and the measurement limit can be improved.

図4は、出力ノイズを示す図で、(a)は図1(a)に示す本実施の形態による励磁回路を用いた場合の周波数対出力ノイズ密度、(b)は図1(b)に示す従来構成の励磁回路を用いた場合の周波数対出力ノイズ密度の関係を示す。この出力ノイズ密度は図2に示すベクトルシグナルアナライザ(アジレント・テクノロジー社製、Agilent Technology 89410A)により測定した。なお、磁力計感度は500pTmVに設定し、磁力計出力の周波数レスポンスは10Hzに設定した。   4A and 4B are diagrams showing output noise. FIG. 4A shows frequency versus output noise density when the excitation circuit according to this embodiment shown in FIG. 1A is used, and FIG. 4B shows FIG. The relationship between the frequency and the output noise density in the case of using the conventional excitation circuit shown is shown. This output noise density was measured by a vector signal analyzer (Agilent Technology 89410A, manufactured by Agilent Technologies) shown in FIG. The magnetometer sensitivity was set to 500 pTmV, and the frequency response of the magnetometer output was set to 10 Hz.

図4(b)に示す従来構成の励磁回路を用いた場合には、周波数1Hzで出力ノイズ密度(pTrms/rtHz)が20であったが、本実施の形態の励磁回路を用いた場合には、周波数1Hzで出力ノイズ密度(pTrms/rtHz)が0.35と驚異的に低減された。   When the excitation circuit having the conventional configuration shown in FIG. 4B is used, the output noise density (pTrms / rtHz) is 20 at a frequency of 1 Hz. However, when the excitation circuit of the present embodiment is used. The output noise density (pTrms / rtHz) at a frequency of 1 Hz was dramatically reduced to 0.35.

これにより、測定精度が飛躍的に向上し、従来では測定不可能であった範囲での磁力測定が可能となった。   As a result, the measurement accuracy has been greatly improved, and the magnetic force measurement in a range that could not be measured conventionally has become possible.

フラックスゲート磁力計の計測装置を構成する励磁回路のブロック図を示し、(a)は本発明の実施の形態の回路構成を示し、(b)は従来の回路構成を示す。The block diagram of the excitation circuit which comprises the measuring apparatus of a fluxgate magnetometer is shown, (a) shows the circuit structure of embodiment of this invention, (b) shows the conventional circuit structure. フラックスゲート磁力計の計測装置及びノイズ測定系の回路ブロック図。The circuit block diagram of the measuring device of a fluxgate magnetometer and a noise measurement system. (a)は図1(a)の励磁回路を用いた励磁電流の波形図、(b)は図1(b)の従来構成の励磁回路を用いた励磁電流の波形図。(A) is a waveform diagram of an excitation current using the excitation circuit of FIG. 1 (a), and (b) is a waveform diagram of an excitation current using the excitation circuit of the conventional configuration of FIG. 1 (b). (a)は図1(a)の励磁回路を用いた計測装置による周波数対出力ノイズ密度の測定結果を示し、(b)は図1(b)の従来構成の励磁回路を用いた計測装置による周波数対出力ノイズ密度の測定結果を示す。(A) shows the measurement result of the frequency vs. output noise density by the measuring device using the excitation circuit of FIG. 1 (a), and (b) is by the measuring device using the conventional excitation circuit of FIG. 1 (b). The measurement result of frequency versus output noise density is shown. 磁気センサーの分解斜視図。The exploded perspective view of a magnetic sensor. フラックスゲート磁力計の励磁原理を示し、(a)は履歴曲線、(b)は励磁信号の波形図、(c)は検知信号の波形図、(d)は出力信号のパルス波形図。The excitation principle of a fluxgate magnetometer is shown, (a) is a hysteresis curve, (b) is a waveform diagram of an excitation signal, (c) is a waveform diagram of a detection signal, and (d) is a pulse waveform diagram of an output signal. フラックス磁力計における磁気センサーの実際の履歴曲線を示す図。The figure which shows the actual hysteresis curve of the magnetic sensor in a flux magnetometer.

符号の説明Explanation of symbols

1 磁気センサー
2 センサー筺体
3 リングコア
4 励磁コイル
5 電流変動制御回路
6 検知コイル(ピックアップコイル)
7 励磁回路
8 2次高調波増幅回路
9 位相検波回路
10 フィードバック回路
11 ベクトルシグナルアナライザ
12 増幅器
13 LPF
14 励磁・位相信号発生回路
15 EMIフィルター
21 電力増幅器
22 直流成分除去コンデンサ
23 電流制限抵抗
DESCRIPTION OF SYMBOLS 1 Magnetic sensor 2 Sensor housing 3 Ring core 4 Excitation coil 5 Current fluctuation control circuit 6 Detection coil (pickup coil)
7 Excitation circuit 8 Second harmonic amplifying circuit 9 Phase detection circuit 10 Feedback circuit 11 Vector signal analyzer 12 Amplifier 13 LPF
14 Excitation / phase signal generation circuit 15 EMI filter 21 Power amplifier 22 DC component removal capacitor 23 Current limiting resistor

Claims (3)

磁気センサーの励磁コイルへ励磁電流を通電することにより該磁気センサーの磁気検出材料に交番磁界を与える励磁回路を有し、前記磁気センサーの検出コイルで検出した計測磁界を反映した磁束の非対称成分により誘起した高調波に基づいて磁界を計測するフラックスゲート磁力計の計測装置において、
前記励磁回路は、前記磁気検出材料の磁気飽和領域における前記励磁電流を緩やかに増加変動させる電流変動抑制回路を有することを特徴とするフラックスゲート磁力計の計測装置。
An excitation circuit that applies an alternating magnetic field to the magnetic detection material of the magnetic sensor by energizing an excitation current to the excitation coil of the magnetic sensor, and by an asymmetric component of the magnetic flux that reflects the measurement magnetic field detected by the detection coil of the magnetic sensor In a fluxgate magnetometer measuring device that measures the magnetic field based on the induced harmonics,
The flux gate magnetometer measuring apparatus, wherein the excitation circuit includes a current fluctuation suppressing circuit that gently increases and changes the excitation current in a magnetic saturation region of the magnetic detection material.
磁気センサーの励磁コイルへ励磁電流を通電することにより該磁気センサーの磁気検出材料に交番磁界を与える励磁回路を有し、前記磁気センサーの検出コイルで検出した計測磁界を反映した磁束の非対称成分により誘起した高調波に基づいて磁界を計測するフラックスゲート磁力計の計測装置において、
前記励磁回路は、前記励磁電流を所定の電流値内に維持して出力すると共に、前記磁気検出材料の磁気飽和領域で増加変動する前記励磁電流が該所定の電流値に達するまでの時間を遅延させる電流変動抑制回路を有することを特徴とするフラックスゲート磁力計の計測装置。
An excitation circuit that applies an alternating magnetic field to the magnetic detection material of the magnetic sensor by energizing an excitation current to the excitation coil of the magnetic sensor, and by an asymmetric component of the magnetic flux that reflects the measurement magnetic field detected by the detection coil of the magnetic sensor In a fluxgate magnetometer measuring device that measures the magnetic field based on the induced harmonics,
The excitation circuit maintains and outputs the excitation current within a predetermined current value, and delays the time until the excitation current that increases and varies in the magnetic saturation region of the magnetic detection material reaches the predetermined current value. An apparatus for measuring a fluxgate magnetometer, characterized by comprising a current fluctuation suppressing circuit for causing the current to flow.
前記電流変動抑制回路は、インダクタであることを特徴とする請求項1または2に記載のフラックスゲート磁力計の計測装置。 The current fluctuation suppression circuit, fluxgate magnetometer measuring apparatus according to claim 1 or 2, characterized in that an inductor.
JP2003401461A 2003-12-01 2003-12-01 Measuring instrument for fluxgate magnetometer Expired - Fee Related JP4287735B2 (en)

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