JP4291503B2 - Vibration isolator - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a vibration isolation device, and more particularly to a vibration isolation device that is directly or indirectly laid on a vibration isolation object and performs vibration isolation of the vibration isolation object.
[0002]
[Prior art]
For example, when a memory or an IC is manufactured in a semiconductor manufacturing apparatus, a stepper including a printing apparatus that applies a photographic technique to a circuit on a wafer substrate is used. In actual use of the stepper, it is necessary to move the wafer substrate and the baking apparatus to a predetermined position quickly and accurately in order to increase the production efficiency. However, the more agile moving and stopping is, the more inevitably the stepper has the problem of vibration. In particular, in today's specifications where high integration of ICs is required, even if micro-vibration is not completely removed, circuit lines may be doubled or shorted (circuit doubles). ) Occurs.
[0003]
In order to solve such a problem, various proposals have been made for a vibration isolator for removing fine vibrations of a stepper. As an example, there is a vibration isolation device 100 as shown in FIG. The vibration isolator 100 includes a cylinder part 110, a piston 115 accommodated therein, and a film-like diaphragm 117 interposed between the cylinder part 110 and the piston 115. A structure for directly or indirectly supporting a vibration isolation object is adopted (reference numeral 118 is a shaft, and reference numeral 119 is a bearing).
[0004]
[Problems to be solved by the invention]
However, although the conventional proposed vibration isolator 100 has a simple structure and a small spring constant in the vertical direction and excellent vibration isolation response, it has a drawback of extremely poor response to horizontal vibration. If an attempt is made to improve the basic structure shown in FIG. 5 by adding a vibration isolation function in the horizontal direction, there arises a problem that the apparatus structure becomes extremely complicated. On the other hand, as another conventional vibration isolator, there is a so-called seismic isolation laminated rubber in which metal plates and rubber plates are alternately laminated in multiple layers. However, this has a problem in that the vertical spring constant is large and the vibration isolation performance is poor. Furthermore, there is a problem that it is difficult to calculate the spring constant and is not suitable for downsizing of the apparatus.
[0005]
In order to solve such a problem, the applicant of the present application has already adopted a simple structure as an invention specified in JP-A-10-205578, JP-A-11-132285, and JP-A-11-132286. Various vibration isolators having a low natural frequency and extremely excellent vibration isolation performance in both the vertical and horizontal directions have been proposed.
[0006]
However, there is no limit to the demand for improvement and compactness of the device, and it is desired to provide a vibration isolation device capable of further downsizing the device as well as excellent vibration isolation performance. In particular, it is desired to provide a vibration isolator capable of performing vibration isolation with respect to horizontal vibration with a compact mechanism and good performance.
[0007]
[Means for Solving the Problems]
In order to solve the above problems, the present invention provides a vibration isolator that is directly or indirectly laid on a vibration isolation object and performs vibration isolation of the vibration isolation object. A ceiling plate that directly or indirectly contacts an object; a hanging plate that hangs down from a substantially peripheral edge of the ceiling plate; and a base portion that covers the ceiling plate and the hanging plate, and an inner surface of the ceiling plate. A vertical vibration isolation member is interposed between the base portion and the base plate so as to substantially support a vertical load. Between the standing plates erected from the section, a plurality of semi-circular cloth-filled rubber diaphragms are interposed so as to be opposed to each other, and the substantially semi-circular cloth-filled rubber diaphragms are interposed. Is provided with a substantially semicircular protrusion, and the tip of the protrusion abuts against the inner surface of the drooping plate. With respect to horizontal vibration, the ceiling plate is substantially centered by the change in the pressure-receiving area between the pair of opposed semi-circular type cloth-filled rubber diaphragms facing each other. It is comprised so that it may act.
[0008]
Further, in the present invention, the vertical vibration isolation member interposed between the inner surface of the ceiling plate and the base is mainly arranged to support a load in the vertical direction, and the inner surface of the hanging plate The cloth-filled rubber diaphragm interposed between the base plate and the standing plate is configured so as to mainly support a load in the horizontal direction.
[0009]
Moreover, in this invention, the said ceiling board and the said drooping board are integrated, and it has a function as a floating part, and the said base part is comprised so that it may have a function as a fixing | fixed part.
[0010]
Further, in the present invention, the vertical vibration isolation member is arranged in a state of being erected in the center, and a plurality of the substantially semicircular cloth-filled rubber diaphragms are divided at equal angles in the circumferential direction. And the tip of the substantially semicircular protrusion of the diaphragm is arranged in contact with the inner surface of the hanging plate.
[0011]
In the present invention, the internal space of the rubber diaphragm is configured to communicate with an air hole for introducing desired compressed air and to be controlled to a predetermined pressure.
[0012]
Further, in the present invention, the hanging plate that hangs from the substantially peripheral edge of the ceiling plate is formed in a cylindrical shape, and from the base portion between the outer peripheral surface of the vertical vibration isolation member and the cylindrical hanging plate. A plurality of plate-like standing plates to be erected are arranged, and the substantially diaphragm-shaped rubber diaphragm with cloth is fixed to the erected plate.
[0013]
Further, in the present invention, the hanging plate hanging from the substantially peripheral edge of the ceiling plate is formed in a square tube shape, and a base is provided between the outer peripheral surface of the vertical vibration isolation member and the rectangular tube-shaped hanging plate. A plurality of plate-like standing plates standing from the section are disposed, and the substantially semicircular cloth-filled rubber diaphragm is fixed to the standing plate.
[0014]
Further, in the present invention, the hanging plate hanging from the substantially peripheral edge of the ceiling plate is formed in a square tube shape, and a base is provided between the outer peripheral surface of the vertical vibration isolation member and the rectangular tube-shaped hanging plate. A rectangular tube-like standing plate standing from the section is formed, and the substantially semi-circular cloth-filled rubber diaphragm is fixed to the plane of the standing plate.
[0015]
Further, in the present invention, the hanging plate that hangs from the substantially peripheral edge of the ceiling plate is formed in a cylindrical shape, and from the base portion between the outer peripheral surface of the vertical vibration isolation member and the cylindrical hanging plate. An upright plate having a rectangular tube shape is formed, and the substantially diaphragm-shaped rubber diaphragm with cloth is fixed to the plane of the upright plate.
[0016]
In the present invention, the vertical vibration isolation member is configured as an air spring, a coil spring, or an anti-vibration rubber.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail. 1 to 3 are drawings for explaining a preferred example of the vibration isolator 1 of the present invention. FIG. 1 is a front sectional view of a vibration isolator 1 of the present invention. FIG. 2 is a plan view of FIG. 1 and shows a state in which the lower half of the drawing is a cross section. FIGS. 3A and 3B are a front view and a plan view, respectively, showing an example of the usage situation of the vibration isolator 1 of the present invention.
[0018]
As shown in FIGS. 3A and 3B, the vibration isolator 1 of the present invention is directly or under the plate-like stepper support base 4 on which the stepper 3 is placed, for example, as an object of vibration isolation. It is laid indirectly and is used so as to remove vibration generated by the stepper 3 (vibration isolation object) and not to transmit vibration from the floor to the stepper 3.
[0019]
In general, three or more vibration isolation devices 1 are used in consideration of the stability of placement, and are appropriately disposed at suitable positions.
[0020]
As shown in FIGS. 1 and 2, the vibration isolator 1 includes a disk-shaped ceiling plate 10 that directly or indirectly contacts a vibration isolation object, and a cylindrical hanging plate that hangs down from the periphery of the ceiling plate 10. 20 and a base portion 30 on which a combination of the ceiling plate 10 and the hanging plate 20 is covered.
[0021]
The ceiling board 10 and the hanging board 20 are fixed and integrated, and function as a “floating part” for so-called vibration removal used in a floating state in the vibration isolator 1. On the other hand, the base portion 30 functions as a so-called “fixed portion” used in a fixed state in the vibration isolation device 1.
[0022]
In the vibration isolator 1 according to the present invention, as shown in FIG. 1, a vertical vibration isolation member 70 is interposed between the inner surface of the ceiling board 10 and the base portion 30, and the vertical vibration isolation member 70. Are arranged mainly to support a load in the vertical direction. Examples of the vertical vibration isolation member 70 include air springs such as cloth-filled rubber bellows and cloth-filled rubber diaphragms, coil springs, and vibration-proof rubber. Here, as the vertical vibration isolation member 70, a rubber bellows 70 with three stages of cloth (having three peaks: hereinafter simply referred to as “bellows 70”) is taken as a preferred example (FIG. 1). And is specifically illustrated in FIG. 2) and will be described below.
[0023]
The bellows 70 is not limited to three stages as shown, and may be two stages or four or more stages. However, with two stages, the vibration isolation performance tends to be inferior to that with three stages, and with four stages or more, so-called buckling tends to occur.
[0024]
The bellows 70 suitably used in the present invention is formed by, for example, pressing and embedding a cloth (preferably a cloth pre-formed into a predetermined shape) formed of polyester or the like on a semi-vulcanized rubber molded body. Thereafter, it can be produced by vulcanization.
[0025]
One embodiment of a three-stage bellows 70 preferably used in the present invention is shown in FIG. As shown in this figure, the three-stage bellows 70 is configured so that a pair of opposed rubber-made opposing face portions 2A and 2B and the outer peripheral edge portions of the facing face portions 2A and 2B are connected to each other. And a rubber bellows-like wall surface portion 3 provided. Each of the facing surface portions 2A and 2B has a ring-shaped flat plate shape, and includes an opening 4 at the center, and a flange portion (not shown) is formed inside or outside the inner peripheral edge. The bellows-like wall surface portion 3 has three peak portions 3a and two valley portions 3b located between the peak portions 3a. In the bellows 70, a continuous cloth is embedded in the facing surface portions 2A and 2B and the bellows-like wall surface portion 3. In order to easily maintain the form of the three-step bellows 70, it is desirable that the two trough portions 3b are wound around the circumferential direction and a reinforcing ring 77 (FIG. 1).
[0026]
The thickness of the bellows 70 is about 0.10 to 2.0 mm, preferably about 0.4 to 1.5 mm.
[0027]
By interposing such a suitable three-stage bellows 70 between the inner surface of the ceiling plate 10 (shown in FIG. 1) and the base portion 30 as described above, a load in the vertical direction can be received. Mainly, the vibration isolation effect in the vertical direction can be expressed. Further, by using the bellows 70, the entire apparatus can be reduced in size.
[0028]
As shown in FIG. 1, the substantially disk-shaped bellows 70 has an upper portion of the bellows fixed to the inner surface of the ceiling plate 10 by a ring-shaped fixing member 71 and a lower portion of the bellows 70 that is a ring-shaped fixing member 75. Is fixed to the base 30.
[0029]
Further, as shown in FIG. 1, it is preferable that a stopper member 80 is provided inside the bellows 70. The stopper member 80 is a member similar to a safety device when so-called abnormal vibration occurs. For example, the stopper member 80 prevents the bellows from extending upward when the air pressure inside the bellows 70 becomes abnormally high. It acts so that the buckling of the bellows 70 does not occur when excessive rolling outside the range occurs. The stopper member 80 includes a stopper cylinder 81 and a loose fitting screw portion 85, and the lower portion of the stopper cylinder 81 is fixed to the base portion 30. On the other hand, the upper portion of the stopper cylinder 81 is indirectly fixed to the inner surface of the ceiling plate 10 by the loose fitting screw portion 85 with a certain gap (play) vertically and horizontally as shown in the figure. ing. That is, the loosely fitting screw portion 85 includes a loosely fitting plug 85a and a screw body 85b for fixing the loosely fitting plug 85a.
[0030]
Such an internal space of the bellows 70 is generally communicated with an air hole 79 (FIG. 2) through which desired compressed air is introduced, and the internal space is controlled to a predetermined pressure.
[0031]
The substantially rectangular base 30 in the present invention includes a standing plate 35 erected from the base 30, and a substantially half between the inner surface of the hanging plate 20 and the standing plate 35. A rubber diaphragm 40 containing a circular cloth (hereinafter simply referred to as “diaphragm 40”) is interposed, and the diaphragm 40 has a peripheral flange portion on the standing plate 35 by a ring-shaped pressing plate 45. It is fixed. That is, in the embodiment shown in FIG. 1, a plurality of the diaphragms 40 are equally divided in the circumferential direction (in the illustrated example, four are equally divided at an angle of 90 degrees) and The tip 40a of the substantially semicircular projection of the diaphragm 40 is in contact with the inner surface of the hanging plate 20 (generally, the tip 40a is pressed slightly and is crushed). Yes. The diaphragm 40 can receive a load in the horizontal direction, can mainly exhibit a horizontal vibration isolation effect, and can greatly contribute to downsizing of the entire apparatus due to its simple structure.
[0032]
In the present invention, the number of diaphragms 40 to be used is not particularly limited, but it is necessary to arrange all the diaphragms 40 in pairs, that is, to arrange the pair of diaphragms 40 to face each other. By arranging the pair of diaphragms 40 so as to oppose each other, the pressure receiving area of the opposing diaphragm 40 (the area in contact with the inner surface of the hanging plate 20) alternately changes and gradually decreases with respect to left and right vibrations in the horizontal direction. The centering force (force to return to the center) always works against the “floating part”. More specifically, for example, the crushing area (pressure-receiving area) of the semicircular tip of the diaphragm located on the left side with respect to the right side is larger than that of the diaphragm located on the right side. The movement which tries to correct to left shake works. Then, the crushing area (pressure receiving area) of the semicircular tip of the diaphragm located on the right side is now larger than that of the diaphragm located on the left side, due to the reaction force difference. A movement to correct left shaking to right shaking works. While this reciprocating action is repeated many times, the reaction force difference gradually decreases and centering is performed. Under such an action, vibration isolation in the horizontal direction can be performed with good performance. The mechanism itself is extremely compact.
[0033]
Such a diaphragm 40 is generally rich in flexibility and is manufactured by coating a high-strength base fabric with a thin rubber elastic body. The base fabric is responsible for strength and the rubber is responsible for airtightness. The internal space of each diaphragm 40 is communicated with air holes 49a and 49b for introducing desired compressed air as shown in FIG. 1 and is controlled to a predetermined pressure.
[0034]
Moreover, as a first modification of the embodiment shown in FIGS. 1 and 2, the ceiling plate 10 is formed in a square plate shape, and the hanging plate 20 hanging from the substantially peripheral edge of the ceiling plate 10 is formed in a square tube shape, A plurality of plate-like standing plates 35 erected from the base portion 30 are disposed between the outer peripheral surface of the rubber bellows 70 with cloth and the rectangular cylindrical hanging plate, and the above-mentioned standing plate 35 is provided with the above-described standing plate 35. You may make it fix the rubber diaphragm 40 with a substantially semicircle type cloth. In this case, since the drooping plate has a quadrangular cylindrical shape, the device is slightly larger than the embodiment shown in FIGS. 1 and 2, and the semicircular top portion 40 a of the diaphragm 40 is formed on the drooping plate. In order to make contact with the 20 planes (curved surface contact in the example of FIG. 1), the accuracy of enhancing the horizontal vibration isolation effect tends to be further improved. However, in this modification, it becomes somewhat difficult to make the specification that the fixing bolts 33 (FIG. 2) are arranged at the four corners of the base portion 30 as in the embodiment of FIG. 1.
[0035]
As a second modification of the embodiment shown in FIG. 1, the ceiling plate 10 is formed in a square plate shape, the hanging plate 20 hanging from the substantially peripheral edge of the ceiling plate 10 is formed in a square tube shape, and the cloth-containing rubber Between the outer peripheral surface of the bellows made 70 and the rectangular cylindrical hanging plate, a standing plate integrated in a square cylindrical shape from the base portion 30 is disposed, and a substantially semicircular type is disposed on the plane of the standing plate. You may make it fix the rubber-made diaphragm 40 containing cloth. In this case, since the standing plate is formed in an integrated rectangular tube shape, the standing strength of the standing plate is increased, and the operation is further stabilized.
[0036]
As a third modified example, the ceiling plate 10 of the second modified example may be formed in a disk shape, and the hanging plate 20 that hangs from the substantially peripheral edge of the ceiling plate 10 may be formed in a cylindrical shape.
[0037]
Of course, the quadrangular shape can be transformed into a polygonal shape, but the cost disadvantage tends to be slightly larger.
[0038]
It should be noted that depending on the number and arrangement of the vibration isolator 1 laid directly or indirectly on the object to be vibration-isolated, it is not necessary to provide four diaphragms 40 on the side surfaces for each of the vibration isolator 1; You may make it arrange | position only two in the position to perform.
[0039]
【The invention's effect】
As described above in detail, the present invention is a vibration isolation device that is directly or indirectly laid on a vibration isolation object and performs vibration isolation of the vibration isolation object. A ceiling plate that is in direct or indirect contact with an object, a hanging plate that hangs from a substantially peripheral edge of the ceiling plate, and a base portion that covers the ceiling plate and the hanging plate. A vertical vibration isolating member is disposed between the base portion and the main portion so as to substantially support a vertical load, and mainly for vibration isolation in the vertical direction. A plurality of substantially semi-circular cloth-filled rubber diaphragms are interposed between the standing-up plates standing upright from the side, and the substantially semi-circular cloth-filled rubber diaphragms are A substantially semi-circular protrusion, and the tip of the protrusion abuts against the inner surface of the drooping plate. With respect to horizontal vibration, the centering of the ceiling plate is substantially performed by a change in the pressure-receiving area between the pair of opposed semi-circular type cloth-filled rubber diaphragms facing each other. In particular, the vibration isolation in the horizontal direction can be performed with a compact mechanism and good performance.
[Brief description of the drawings]
FIG. 1 is a front sectional view of a vibration isolator 1 of the present invention.
FIG. 2 is a plan view of FIG. 1 with the lower half of the drawing showing a cross-sectional state.
FIG. 3A is a front view showing a state in which a vibration isolator is laid directly or indirectly under a plate-like stepper support base on which a stepper as a vibration isolation object is placed. , (B) is a plan view of (a).
FIG. 4 is a view showing an embodiment of a three-stage bellows used as a preferred aspect of the present invention.
FIG. 5 is a schematic diagram showing an example of a conventional vibration isolation device.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Vibration isolator 10 ... Ceiling board 20 ... Drooping board 30 ... Base part 35 ... Standing board 40 ... Rubber diaphragm 70 with cloth ... Rubber bellows with cloth

Claims (10)

A vibration isolation device that is laid directly or indirectly on a vibration isolation object and performs vibration isolation of the vibration isolation object,
The vibration isolator includes a ceiling plate that is in direct or indirect contact with an object to be vibration-isolated, a hanging plate that hangs from a substantially peripheral edge of the ceiling plate, and a base portion that covers the ceiling plate and the hanging plate. ,
Between the inner surface of the ceiling plate and the base portion, a vertical vibration isolating member is disposed so as to substantially support a vertical load and is mainly interposed for vibration isolation in the vertical direction.
Between the inner surface of the hanging plate and the standing plate erected from the base portion, a plurality of substantially semi-circular cloth-filled rubber diaphragms are interposed so as to face each other.
The substantially semi-circular cloth-filled rubber diaphragm includes a substantially semi-circular protrusion, the tip of the protrusion is in contact with the inner surface of the hanging plate, and the horizontal diaphragm. With respect to vibration, the ceiling plate is substantially centered by a change in the pressure-receiving area between the opposing pair of substantially semi-circular cloth-filled rubber diaphragms. Vibration isolator. The vertical vibration isolation member interposed between the inner surface of the ceiling plate and the base is mainly arranged to support a load in the vertical direction,
The vibration isolator according to claim 1, wherein the rubber diaphragm with cloth interposed between the inner side surface of the drooping plate and the upright plate of the base portion is arranged so as to mainly support a load in the horizontal direction. . The vibration isolator according to claim 1 or 2, wherein the ceiling plate and the hanging plate are integrated to have a function as a floating portion, and the base portion has a function as a fixing portion. The vertical vibration isolation member is arranged in a state where one is erected in the center,
The semi-circular cloth-filled rubber diaphragm is divided into a plurality of circumferentially equal angles, and the tip of the substantially semi-circular protrusion of the diaphragm is in contact with the inner surface of the drooping plate. The vibration isolator according to any one of claims 1 to 3, wherein the vibration isolator is arranged in a state of being engaged. The vibration isolator according to any one of claims 1 to 4, wherein the internal space of the rubber diaphragm is communicated with an air hole through which desired compressed air is introduced and controlled to a predetermined pressure. . The drooping plate that hangs from the substantially peripheral edge of the ceiling plate is formed in a cylindrical shape, and a plurality of plates that are erected from the base portion between the outer peripheral surface of the vertical vibration isolation member and the cylindrical drooping plate. A vibration isolation device according to any one of claims 1 to 5, wherein a standing upright plate is disposed, and the rubber diaphragm containing the substantially semicircular cloth is fixed to the upright plate. The drooping plate that hangs from the substantially peripheral edge of the ceiling plate is formed in a square tube shape, and a plurality of erected from the base portion between the outer peripheral surface of the vertical vibration isolation member and the rectangular tube-shaped drooping plate. The vibration isolator according to any one of claims 1 to 5, wherein a plate-like standing plate is disposed, and the substantially semi-circular cloth-filled rubber diaphragm is fixed to the standing plate. The drooping plate that hangs from the substantially peripheral edge of the ceiling plate is formed in a square tube shape, and is a square that is erected from the base portion between the outer peripheral surface of the vertical vibration isolation member and the rectangular tube-shaped drooping plate. The vibration isolator according to any one of claims 1 to 5, wherein a cylindrical standing plate is formed, and the substantially semicircular cloth-filled rubber diaphragm is fixed to a plane of the standing plate. . The drooping plate that hangs from the substantially peripheral edge of the ceiling plate is formed in a cylindrical shape, and is a rectangular tube shape standing from the base portion between the outer peripheral surface of the vertical vibration isolation member and the cylindrical drooping plate. The vibration isolator according to any one of claims 1 to 5, wherein an upright plate is formed, and the substantially semicircular cloth-filled rubber diaphragm is fixed to a plane of the upright plate. The vibration isolator according to any one of claims 1 to 9, wherein the vertical vibration isolation member is an air spring, a coil spring, or an anti-vibration rubber.

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