JP4292137B2 - Transmission electron microscope equipment - Google Patents

Description

  The present invention relates to a transmission electron microscope apparatus, and more particularly to image processing in a transmission electron microscope apparatus equipped with a CCD camera.

  In recent years, in a transmission electron microscope apparatus, an interlaced CCD (Charged Coupled Device) camera is used instead of a film in order to capture a transmission image. The CCD has an advantage that the image signal can be easily processed. In order to obtain a higher resolution image than a CCD camera, a CCD having a large number of pixels may be used. However, as the number of pixels increases, the price of the CCD increases.

JP 2004-127760 A JP 2003-287508 A Japanese Patent Laid-Open No. 10-93871

  As described above, in a transmission electron microscope, the number of CCD pixels may be increased in order to obtain a high-resolution image. However, increasing the number of pixels increases the price and the structure of the CCD camera.

  An object of the present invention is to obtain a high-resolution image with a low-cost and simple structure in a transmission electron microscope equipped with a CCD camera.

  According to the present invention, first, when an imaging target is found, a transmission image at that time is captured by the CCD. This is the first image. Next, the transmission image is picked up by moving by 0.5 pixels in the x direction with respect to the CCD. This is the second image. Next, the transmission image is picked up by moving 0.5 pixels in the y direction with respect to the CCD. This is the third image. Next, the transmission image is picked up by moving by 0.5 pixels in the x and y directions with respect to the CCD. This is the fourth image. By synthesizing the four images thus obtained, an image identical to the image obtained on the assumption that the light receiving portion is arranged on the entire surface of the CCD is generated.

  According to the present invention, an image by a high resolution CCD can be obtained with a simple structure at a low price. For example, a high-resolution image of 2048 × 2048 pixels or more can be obtained using a 1024 × 1024 pixel CCD camera.

  An example of a transmission electron microscope apparatus according to the present invention will be described with reference to FIG. The transmission electron microscope apparatus of this example includes an electron gun 1, first and second irradiation lens coils 2 and 3, an objective lens coil 6, first and second electromagnetic sample image moving coils 7 and 8, 1 and 2 intermediate lens coils 9 and 10, 1 and 2 projection lens coils 11 and 12, 1st and 2nd deflection coils 4 and 5, excitation power supplies 13 to 23, digital analog converter (DAC) 24 to 34, a microprocessor 35, a storage device 36, an arithmetic device 37, a CRT controller 38, a CRT (monitor) 39, an interface (I / F) 40 to 41, a magnification switching rotary encoder 42, an input rotary encoder 43, A keyboard 44, a mouse 45, a RAM 46, a ROM 47, an image capturing interface 48, a TV camera control unit 49, and a TV camera 50 are provided. The TV camera 50 includes an optical lens 51 and a CCD 52. A sample stage 53 and a scintillator 54 are provided on the optical axis.

  Next, an imaging procedure using a transmission electron microscope will be briefly described. The observer uses the keyboard 44 and the mouse 45 to search for an imaging target from the field of view. When changing the magnification, the lens data stored in the ROM 47 is read and supplied to the digital-analog converters (DACs) 24-34. Digital-analog converters (DACs) 24 to 34 convert lens system data into analog signals and supply them to excitation power supplies 13 to 23. The excitation power supplies 13 to 23 output current to the lens coils 2, 3, 6, 9 to 12 of each lens system.

  The electron beam generated by the electron gun 1 is converged by the first and second irradiation lens coils 2 and 3, is imaged by the objective lens coil 6, and is irradiated onto the sample on the sample stage 53. The electron beams that have passed through the sample are the first and second electromagnetic sample image moving coils 7 and 8, the first and second intermediate lens coils 9 and 10, and the first and second projection lens coils 11 and 12. , And projected onto the scintillator 54 via the first and second deflection coils 4, 5. The first and second deflection coils 4 and 5 deflect the transmitted image by a predetermined distance in a predetermined direction with respect to the optical axis. The function of the deflection coil will be described later with reference to FIG.

  The scintillator 54 has a phosphor coated on transparent glass. Therefore, the phosphor emits a transmission image of the sample. The transmitted transmission image is transmitted through the transparent glass and is received by the CCD 52 through the optical lens 51. The CCD 52 converts the received transmission image into an electric signal and transmits it to the TV camera control unit 49. The TV camera control unit 49 transmits the image data to the microprocessor 35, the storage device 36, and the arithmetic device 37 via the image capture interface 48. The transmission image is stored in the storage device 36 and displayed on the monitor 39.

  With reference to FIG. 2, an outline of the structure of a CCD (charge imaging device) will be described. FIG. 2A shows a planar configuration of the CCD, and FIG. 2B shows a sectional configuration of the CCD. The surface of the CCD has a light receiving portion 201 and other non-light receiving portions 200 that are arranged vertically and horizontally at predetermined intervals. The number of pixels of this CCD is 1024 × 1024 pixels. Accordingly, 1024 light receiving units 201 are regularly arranged in the vertical and horizontal directions.

  The pitch of the light receiving portions 201 is 7 μm, which is the pixel size. The dimension of the light receiving unit 201 is 3.5 μm, which is half the pixel size. That is, 1 pixel = 7 μm and 0.5 pixel = 3.5 μm. As shown in FIG.2 (b), the part which actually light-receives among the light-receiving parts 201 is slightly smaller than 3.5 micrometers. The non-light receiving unit 200 is formed with a transfer unit.

  The concept of the present invention will be described with reference to FIG. FIG. 3 schematically shows the surface of the CCD. The surface of the CCD includes a light receiving unit 201 and non-light receiving units 202, 203, and 204. As shown in the figure, reference numeral 202 is a non-light receiving part on the right side of the light receiving part 201, reference numeral 203 is a non-light receiving part on the lower side of the light receiving part 201, and reference numeral 204 is a non-light receiving part on the lower right side of the light receiving part 201. A light receiving part is shown.

  In the CCD, 1/4 of the total surface area is a light receiving portion, and the remaining 3/4 is a non-light receiving portion. Of the total surface area of the CCD, a transmission image is generated by pixel signals from a quarter of the surface area. Therefore, in the present invention, it is considered to obtain a pixel signal from the entire surface area of the CCD. First, when an imaging target is found, a transmission image at that time is captured by the CCD. The image obtained thereby is defined as a first image. Next, the transmission image is picked up by moving the CCD by 0.5 pixels in the x direction, that is, 3.5 μm. The image obtained thereby is defined as a second image. The second image is the same as an image obtained on the assumption that the light receiving unit is arranged in the non-light receiving unit 202 on the right side of the light receiving unit 201. Next, the transmission image is picked up by moving the CCD by 0.5 pixels in the y direction, that is, 3.5 μm. The image obtained thereby is defined as a third image. The third image is the same as an image obtained on the assumption that the light receiving unit is arranged in the non-light receiving unit 203 below the light receiving unit 201. Next, the transmission image is picked up by moving by 0.5 pixels, that is, 3.5 μm in the x and y directions with respect to the CCD. The image obtained thereby is defined as a fourth image. The fourth image is the same as the image obtained on the assumption that the light receiving unit is arranged in the non-light receiving unit 204 on the lower right side of the light receiving unit 201. By synthesizing the four images thus obtained, an image identical to the image obtained on the assumption that the light receiving portion is arranged on the entire surface of the CCD is generated.

  In order to move the transmitted image by 0.5 pixels, the sample may be moved by the sample stage 53, but the deflection coils 4 and 5 may be used. A method of moving the transmission image by the deflection coil will be described later with reference to FIG.

The transmission electron microscope apparatus of the present invention has the following characteristics.
1) A 2048 × 2048 high resolution image can be created with a 1024 × 1024 CCD camera.
2) A composite image without brightness spots can be created.
3) A composite image independent of the peripheral distortion peculiar to the transmission electron microscope can be created.

  A method for generating one composite image from four images will be described with reference to FIG. The pixel in the m-th row and the n-th column of the first image 401 is assumed to be p1 (m, n). However, m = 1 to 1024 and n = 1 to 1024. Similarly, the pixel in the m-th row and the n-th column of the second image 402 is p2 (m, n), the pixel in the m-th row and the n-th column of the third image 403 is p3 (m, n), and the fourth image 404 The pixel in the m-th row and the n-th column is assumed to be p4 (m, n). The pixel in the M-th row and the N-th column of the composite image 405 is assumed to be p5 (M, N). However, M = 1 to 2048 and N = 1 to 2048.

  FIG. 4B is an enlarged view of the upper left corner of the composite image. A grid-like cell indicates a pixel of the composite image, an upper stage in the cell indicates a matrix number of the pixel of the composite image, and a lower stage in the cell indicates a matrix of the pixel of the original image. In order to generate a composite image, the pixel signals of the second, third, and fourth images may be inserted between the pixel signals of the first image. The first row and first column p5 (1,1) of the composite image is a pixel signal of the first row and first column p1 (1,1) of the first image. The first row and second column p5 (1,2) of the composite image is a pixel signal of the first row and first column p2 (1,1) of the second image, and the second row and first column p5 ( 2, 1) is the pixel signal of the first row and first column p3 (1, 1) of the third image, and the second row and second column p5 (2, 2) of the composite image is the second signal of the fourth image. This is a pixel signal of one row and first column p4 (1, 1). Thus, a composite signal of 2048 × 2048 pixels is obtained from the four 1024 × 1024 pixel signals.

  Here, the case where the movement amount of the transmission image is 0.5 pixel has been described. However, the amount of movement of the transmission image may be 0.25, 0.5, or 0.75 pixels. In this case, the first image to the sixth image can be created, and a 4096 × 4096 image can be created.

  A method of moving the transmission image will be described with reference to FIG. In this example, the transmission image is moved using the first and second deflection coils 4 and 5. The electron beam 502 transmitted through the sample 501 is deflected by the magnetic field from the deflection coils 4 and 5 and generates an image 504 at a position shifted from the optical axis 503 of the electron beam.

  With reference to FIG. 6, the 1st example of the imaging method by the transmission microscope by this invention is demonstrated in detail. In step S101, if an imaging target within the field of view is found, it is imaged by the CCD camera. Thus, the first image is obtained. The position on the visual field where the first image is captured is taken as the reference position. In step S102, the current signals to the deflection coils 4 and 5 are controlled so that the transmitted image moves in the x direction by 0.5 pixels, that is, 3.5 μm. In step S103, a transmission image is captured by the CCD camera. A second image is thus obtained. In step S104, the distance in the x direction and the degree of coincidence between the first image and the second image are calculated. The distance between two images and the degree of coincidence are obtained by the phase only correlation method. Details of the phase only correlation method will be described later with reference to FIG. The distance between two images and the degree of coincidence may be displayed on the monitor.

  In step S105, it is determined whether or not the transmitted image has moved by exactly 0.5 pixels. Here, it is determined whether the distance in the x direction between the two images is 3.5 μm and the degree of coincidence between the two images is greater than 5%. If the distance between the two images in the x direction is not 3.5 μm or the degree of coincidence between the two images is 5% or less, it is determined that the amount of movement of the transmission image by the deflection coils 4 and 5 is not accurate. Return to step S102. In step S102, the current signal to the deflection coils 4 and 5 is feedback-controlled so that the transmitted image moves in the x direction by the amount of movement error. Steps S103 and S104 are repeated. Thus, by repeating Steps S102, S103, and S104, in Step S105, the distance in the x direction between the two images is accurately 3.5 μm, and the degree of coincidence between the two images is greater than 5%. A second image is thus obtained.

  In step S106, the current signal to the deflection coils 4 and 5 is controlled so that the transmitted image moves 0.5 pixels from the reference position in the x and y directions. Here, since it has already moved 0.5 pixels in the x direction, the current signal to the deflection coils 4 and 5 is controlled so that it further moves 0.5 pixels in the y direction. In step S107, a transmission image is captured by the CCD camera to obtain a fourth image. In step S108, the distance in the y direction and the degree of coincidence between the second image and the fourth image are calculated. In step S109, it is determined whether or not the distance in the y direction between the two images is 3.5 μm and the degree of coincidence between the two images is greater than 5%. When the distance in the x direction between the two images is not 3.5 μm or the coincidence is 5% or less, it is determined that the amount of movement of the transmission image by the deflection coils 4 and 5 is not accurate, and the process proceeds to step S106. Return. In step S106, the current signals to the deflection coils 4 and 5 are feedback-controlled so that the transmitted image moves in the y direction by the amount of movement error. By repeating steps S106, S107, and S108, the distance in the y direction between the two images is accurately 3.5 μm in step S109, and the degree of coincidence between the two images is greater than 5%. A fourth image is thus obtained.

  In step S110, the current signal to the deflection coils 4 and 5 is controlled to return the transmitted image to the initial position, that is, the reference position. Next, the current signal to the deflection coils 4 and 5 is controlled so that the transmitted image moves in the y direction by 0.5 pixels. In step S111, a transmission image is captured by the CCD camera to obtain a third image. In step S112, the distance in the y direction and the degree of coincidence between the first image and the third image are calculated. In step S113, it is determined whether the distance in the y direction between the two images is 3.5 μm and the degree of coincidence is greater than 5%. If the distance between the two images in the x direction is not 3.5 μm or the degree of coincidence is 5% or less, it is determined that the amount of movement of the transmission image by the deflection coils 4 and 5 is not accurate, and the process proceeds to step S110. Return. In step S110, the current signal to the deflection coils 4 and 5 is controlled so that the transmitted image moves in the y direction by the amount of movement error.

By repeating steps S110, S111, and S112, in step S113, the distance in the y direction between the two images is accurately 3.5 μm, and the degree of coincidence between the two images is greater than 5%. A third image is thus obtained.
Finally, in step S114, one composite image is generated from the four images.

  With reference to FIG. 7, a second example of an imaging method using a transmission microscope according to the present invention will be described in detail. In this example, the sample stage 53 is used as a method for moving the transmission image. Therefore, in the imaging method of this example, only Step S202, Step S206, and Step S210 for moving the transmission image are different, and the other steps are the same as the example of FIG.

  With reference to FIG. 8, a third example of the imaging method using the transmission microscope according to the present invention will be described in detail. In the above-described example, the deflection coils 4 and 5 are feedback-controlled so that the transmitted image moves accurately by 0.5 pixels. Therefore, the current signals of the deflection coils 4 and 5 must be controlled many times until the transmitted image moves exactly 0.5 pixels. In this example, the transmission image is moved only once to obtain an image signal. The amount of movement at this time is calculated, and if it is not 0.5 pixels, the image signal when the amount of movement is 0.5 pixels is calculated by the complement method.

  In step S301, if an imaging target is found in the field of view, it is imaged by a CCD camera. Thus, the first image is obtained. The position on the visual field where the first image is captured is taken as the reference position. In step S302, the transmission image is moved in the x direction by controlling the current signal to the deflection coils 4 and 5 or by moving the sample stage 53. The movement amount may be approximately 0.5 pixels, that is, approximately 3.5 μm, and may not necessarily be exactly 0.5 pixels. In step S303, a transmission image is captured by the CCD camera. A second image is thus obtained.

  In step S304, a distance in the x direction between the first image and the second image, that is, a moving distance of the transmission image is calculated. The distance between two images is obtained by the phase only correlation method. Details of the phase only correlation method will be described later with reference to FIG. The distance between the two images may be displayed on the monitor.

  In step S305, an estimated image obtained when the transmission image is moved in the x direction by exactly 0.5 pixels is calculated from the image data of the second image by a complement method. A modified second image is thus obtained. Details of the complement method will be described later with reference to FIG. In step S306, the transmission image is moved in the x and y directions from the reference position by controlling the current signal to the deflection coils 4 and 5 or by moving the sample stage 53. Here, since it has already moved in the x direction, the transmitted image is further moved in the y direction. The movement amount may be approximately 0.5 pixels, that is, approximately 3.5 μm, and may not necessarily be exactly 0.5 pixels. In step S307, a transmission image is captured by the CCD camera. A fourth image is thus obtained. In step S308, the distance in the y direction between the second image and the fourth image, that is, the movement distance in the y direction of the transmitted image is calculated. The distance between two images is obtained by the phase only correlation method. In step S309, an estimated image obtained when the transmission image is moved in the y direction by exactly 0.5 pixels is calculated from the image data of the second image by the complement method. A modified fourth image is thus obtained. Next, an estimated image obtained when the transmission image is moved further in the x direction by exactly 0.5 pixels is calculated from the image data of the corrected fourth image by the complement method. In this way, a re-corrected fourth image is obtained. In step S310, the transmission image is returned to the initial position, that is, the reference position by controlling the current signal to the deflection coils 4 and 5 or by moving the sample stage 53. Next, the current signal to the deflection coils 4 and 5 is controlled or the sample stage 53 is moved so that the transmitted image moves in the y direction by 0.5 pixels. In step S311, a transmission image is captured by the CCD camera. A third image is thus obtained. In step S312, the distance in the y direction between the first image and the third image, that is, the moving distance of the transmission image is calculated. The distance between two images is obtained by the phase only correlation method. In step S313, the estimated image obtained when the transmitted image is moved in the x direction by exactly 0.5 pixels is calculated from the image data of the third image by the complement method. A modified third image is thus obtained. Finally, in step S314, one composite image is generated from the first image, the corrected second image, the corrected third image, and the re-corrected fourth image.

With reference to FIG. 9, a method for estimating and calculating an image by a complementing method will be described. The vertical axis in FIG. 9 is the gradation of the image, and the horizontal axis is the amount of movement of the transmission image. Here, the relationship between the gradation of the image and the movement amount is approximated by a quadratic curve 901.
Y (gradation) = aX ² + bX + c (1)

Here, Y is a gradation, and X is a movement amount. a, b, and c are constants, and are determined when three points are given. Here, the case of step S305 is calculated. The position of the pixel in the first row and the first column p1 (1, 1) of the first image is X1, the gradation is Y1, and this is displayed as P1 (X1, Y1). Similarly, the pixel in the first row and the second column p1 (1,2) of the first image is P3 (X3, Y3), and the pixel of the second image is P2 (X2, Y2). Substituting these three points (X1, Y1) (X2, Y2) (X3, Y3) into equation (1) to obtain a, b, and c yields the following.
b = {(Y2-Y3) (X1 2 -X2 2) - (X2 2 -X3 2) (Y1-Y2)} / {(X1 2 -X2 2) (X2-X1) - (X2 2 -X3 2 ) (X1-X3)}
(2)
a = {(Y1-Y2)-(X1-X2) b} / (X1 ² -X2 ² ) (3)
c = Y3-aX3 ² -bX3 (4)

  In the case of step S305, X1 = 0 and X3 = 1. Assume that the amount of movement of the second image is 0.3 pixels. X2 = 0.3. From these values and the actually measured values of the gradations Y1, Y2, and Y3, values of a, b, and c are obtained. In order to obtain the gradation of the corrected second image, X = 0.5 may be substituted into Equation (1). A point P4 (X4, Y4) on the curve 901 represents the pixel position and gradation of the modified second image. Such a complementary calculation is performed for all the pixels of the image.

  Here, the complementary formula is approximated by a quadratic curve when three points are given, but the complementary formula may be approximated by a linear line when two points are given. Similarly, the corrected third image, the corrected fourth image, and the re-corrected fourth image are obtained by the complement method.

  The phase only correlation method will be described with reference to FIG. The first image 1001 has an M × N number of pixels, and this is recorded as an image vector f1 (m, n). The second image 1002 has an M × N number of pixels, and this is recorded as an image vector f2 (m, n). The two images 1001 and 1002 are natural images (not including imaginary numbers), and m = 0, 1, 2,... M−1 and n = 0, 1, 2,.

Discrete Fourier images F1 (m, n) and F2 (m, n) of the vector f1 (m, n) of the first image 1001 and the vector f2 (m, n) of the second image 1002 are expressed by Equation (5), respectively. , Defined by (6).
F1 (u, v) = A (u, v) ejθ (u, v) (5)
F2 (u, v) = B (u, v) ejφ (u, v) (6)
However, u = 0,1,2, ... M-1, v = 0,1,2, ... N-1

  Here, A (u, v) and B (u, v) are amplitude spectra, and θ (u, v) and φ (u, v) are phase spectra. In phase correlation, when there is parallel movement of an image between two images, the position of the correlation peak is shifted by the amount of movement of the image. Accordingly, in order to obtain the parallel movement amount of the images between the images, the movement amount of the correlation peak position is obtained. It is assumed that the second image 1002 has moved by r ′ in the x direction with respect to the first image 1001. The vector of the second image is f4 (m, n) = f2 (m + r ′, n).

When the discrete Fourier image F4 (u, v) of the second image vector f4 (m, n) is obtained in the same manner as the equation (2), the equation (7) is obtained.
F4 (u, v) = ΣΣ f2 (m + r ', n) e -j2π (mu / M + nv / N)
= B (u, v) ej (φ + 2πr'u / M) (7)

Assuming that the amplitude spectrum B (u, v) is a constant, the discrete Fourier image F4 (u, v) is a phase image that does not depend on the contrast of the image. The phase image F′4 (u, v) of the vector f4 (m, n) of the second image is expressed by Expression (8).
F4 '(u, v) = ej (φ + 2πr'u / M) (8)

By multiplying the phase image F′1 (u, v) by the complex role of F′2 (u, v), a vector H14 (u, v) of the combined phase image 1003 of Expression (9) is obtained.
H14 (u, v) = F'1 (u, v) (F'2 (u, v)) *
= Ej (θ-φ-2πru / M) (9)

By performing inverse Fourier transform on the vector H14 (u, v) of the synthesized phase image 1003, the vector G14 (r, s) of the correlation intensity image 1004 of Expression (10) is obtained.
G14 (r, s) = ΣΣ (H14 (u, v)) ej2π (ur / M + us / N)
= ΣΣ (ej (θ-φ-2πr'u / M)) ej2π (ur / M + us / N)
= G12 (r-r ') (10)

  From equation (10), it can be seen that when there is a positional shift amount r ′ in the X direction between two images, the peak position of the correlation intensity image is shifted by −r ′. That is, the movement amount r ′ in the X direction between the two images can be obtained by obtaining the movement amount −r ′ of the peak position from the correlation intensity image.

As described above, the correlation calculation in this example is an operation using only the phase component, and the correlation strength image G14 (r, s) includes only the phase component. Therefore, even if there is a difference in brightness or contrast between the two images, the amount of movement between the two images can be obtained.
.

When there is a positional shift amount in the X direction between two images, a peak occurs at a position 1006 at ΔG (pixel) from the center 1005 of the correlation intensity image 1004. For example, if there is a shift of two pixels in the X direction between two images, the vector H14 of the combined phase image 1003 becomes a two-cycle wave. When this is subjected to inverse Fourier transform, a vector G12 of the correlation intensity image 1004 is obtained. In the vector G12 of the correlation intensity image 1004, a peak occurs at a position 1006 that is shifted from the center 1005 by ΔG = 2 pixels. This ΔG (pixel) corresponds to the amount of movement on the light receiving surface of the CCD of the TV camera 50. Here, the movement amount ΔG on the CCD is converted into an actual movement amount Δx on the sample surface. When the diameter of the light receiving surface of the CCD is L, the magnification of the transmitted and transmitted image on the light receiving surface is M, and the number of pixels Lm of the light receiving surface of the CCD, the movement amount Δx is expressed by equation (11).
Δx ＝ ΔG (pixel) × L / Lm (pixel) / M (11)
Δx is a relative movement amount in the X direction on the sample surface between the two images.

  Next, the accuracy between images will be described. In the correlation calculation using only the phase component, since only the phase is used mathematically, the peak appearing in the correlation strength is the δ peak. For example, if the image is shifted by 1.5 pixels between two images, the composite image becomes a wave of 1.5 cycles. When this is subjected to inverse Fourier transform, a δ peak appears at a position shifted by 1.5 pixels from the center of the correlation intensity image. However, since there is no 1.5 pixel, the value of the δ peak is assigned to the first pixel and the second pixel.

Here, taking the center of gravity of a pixel having a high degree of coincidence and calculating the true δ peak position from this assigned value, a calculation result with an accuracy of about 1/10 pixel can be obtained. Further, since the correlation intensity image is a δ peak, the similarity between the two images is evaluated based on the peak height of the correlation intensity image. When the image f1 (m, n) and the peak height Peak (pixel) are assumed, the degree of coincidence (%) is shown in Expression (12).
Match (%) = (Peak) / (m x n) x 100 (12)
For example, when the number of processed pixels is 128 pixels × 128 pixels and the peak is 16384 (pixels), the degree of coincidence = (16384) / (128 × 128) × 100 = 100 (%).

  The example of the present invention has been described above, but the present invention is not limited to the above-described example, and various modifications can be made by those skilled in the art within the scope of the invention described in the claims. It will be understood.

It is a figure which shows the outline of the transmission electron microscope apparatus by this invention. It is a figure which shows the outline of the structure of CCD. It is explanatory drawing for demonstrating the outline of this invention. It is explanatory drawing for demonstrating the method to synthesize | combine an image by this invention. It is explanatory drawing for demonstrating the method to move a transmitted image. It is explanatory drawing for demonstrating the 1st example of operation | movement of the transmission electron microscope apparatus by this invention. It is explanatory drawing for demonstrating the 2nd example of operation | movement of the transmission electron microscope apparatus by this invention. It is explanatory drawing for demonstrating the 3rd example of operation | movement of the transmission electron microscope apparatus by this invention. It is explanatory drawing for demonstrating the method of estimating and calculating an image by the complementation method. It is explanatory drawing for demonstrating a phase only correlation method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Electron gun, 2 ... 1st irradiation lens coil, 3 ... 2nd irradiation lens coil, 4 ... 1st deflection coil, 5 ... 2nd deflection coil, 6 ... Objective lens coil, 7 ... 1st deflection coil, 8 ... Second deflection coil, 9 ... first intermediate lens coil, 10 ... second intermediate lens coil, 11 ... first projection lens coil, 12 ... second projection lens coil, 13-23 ... excitation power supply, 24-34 ... DAC, 35 ... Microprocessor, 36 ... Storage device, 37 ... Calculation device, 38 ... CRT controller, 39 ... CRT (monitor), 40-41 ... I / F, 42 ... Rotary encoder for switching magnification, 43 ... Rotary encoder for input 44 ... Keyboard, 45 ... Mouse, 46 ... RAM, 47 ... ROM, 48 ... Image capture interface, 49 ... TV camera control unit, 50 ... TV camera, 51 ... Optical lens, 5 ... CCD, 53 ... sample stage 54 ... scintillator, 201 ... receiving portion, 200,202,203,204 ... non-light-receiving portion

Claims (13)

An irradiation optical system for irradiating the sample with an electron beam, an imaging device having a CCD for capturing a transmission image of the sample, a transmission image moving device for moving the transmission image, and a movement for calculating the movement amount of the transmission image Combines a plurality of images with a quantity calculation unit, a calculation unit that estimates and calculates an image that is estimated to be obtained when the transmission image moves by a predetermined input value, using the movement amount of the transmission image. And an image composition unit for generating one image,
The image combining unit combines the image obtained from the transmission image and the image estimated and calculated by the calculating unit, thereby obtaining the same image as the image obtained on the assumption that the light receiving unit is arranged in the non-light receiving unit of the CCD. A transmission electron microscope apparatus characterized by being produced. 2. The transmission electron microscope apparatus according to claim 1, wherein the calculation unit estimates and calculates an image estimated to be obtained when the transmission image is moved in the x direction by 0.5 pixels, and calculates the second image. and then, the image combining unit, a transmission electron microscope apparatus characterized by combining the first image and the second image obtained from the transmission image. 2. The transmission electron microscope apparatus according to claim 1, wherein the calculation unit estimates and calculates an image estimated to be obtained when the transmission image is moved in the y direction by 0.5 pixels, and calculates the third image. and then, the image combining unit, a transmission electron microscope apparatus characterized by combining the first image and the third image obtained from the transmission image. 2. The transmission electron microscope apparatus according to claim 1, wherein the calculation unit is estimated to be obtained when the transmission image moves in the x direction by 0.5 pixels and in the y direction by 0.5 pixels. that the image was estimated calculation, making it the fourth image, the image combining unit, a transmission electron microscope apparatus characterized by combining the first image and the fourth image obtained from the transmission image. 2. The transmission electron microscope apparatus according to claim 1, wherein the calculation unit estimates and calculates an image that is estimated to be obtained when a transmission image is moved by a size of 30% to 50% of one pixel, and the image synthesis is performed. The transmission electron microscope apparatus characterized in that the unit synthesizes the image obtained from the transmission image and the image estimated and calculated by the calculation unit.   2. The transmission electron microscope apparatus according to claim 1, wherein the transmission image moving device is a deflection coil for deflecting the transmission image or a sample stage for moving the sample. 2. The transmission electron microscope apparatus according to claim 1, wherein the movement amount calculation unit calculates a movement amount by a phase-only correlation method. 2. The transmission electron microscope apparatus according to claim 1, wherein the calculation unit estimates and calculates an image using a complementary expression indicating a relationship between a gradation of the image and a moving amount of the transmission image. apparatus. An irradiation optical system for irradiating the sample with an electron beam, an imaging device having a CCD for capturing a transmission image of the sample, a transmission image moving device for moving the transmission image, and a movement for calculating the movement amount of the transmission image A quantity calculation unit, a calculation unit that estimates and calculates an image by a complementing method, and an image synthesis unit that generates a single image by combining a plurality of images,
When the movement amount calculated by the movement amount calculation unit is different from the input value, the calculation unit calculates an image estimated to be obtained when the transmission image moves by the input value by a complement method, The image composition unit combines the image obtained from the transmission image and the image obtained by moving the transmission image, or combines the image obtained from the transmission image and the image estimated by the calculation unit. A transmission electron microscope apparatus that generates an image that is the same as an image obtained on the assumption that a light receiving portion is arranged in a non-light receiving portion of a CCD. 10. The transmission electron microscope apparatus according to claim 9, wherein the transmission image moving device is a deflection coil for deflecting the transmission image or a sample stage for moving the sample. The transmission electron microscope apparatus according to claim 9, wherein the movement amount calculation unit calculates a movement amount by a phase-only correlation method. 10. The transmission electron microscope apparatus according to claim 9, wherein the calculation unit estimates and calculates an image using a complementary expression indicating a relationship between a gradation of the image and a moving amount of the transmission image. apparatus. A transmission image obtained by irradiating the sample with an electron beam is captured by a CCD, and the image obtained thereby is stored as a first image;
And that said transmission image, with respect to the CCD, estimates calculated by complementing method an image that is estimated to be obtained when moved by 0.5 pixel in x direction and stores it as the second image,
And that said transmission image, relative to CCD, image estimating operation by a complementary method is estimated to be obtained when moved by 0.5 pixel in the y direction and stores it as third image,
That said transmission image, relative to CCD, an image that is estimated to be obtained when moved by 0.5 pixel in x and y directions is estimated calculated by complementing method, and stores it as fourth image When,
Combining the above four images to generate an image identical to the image obtained on the assumption that the light receiving portion is arranged on the entire surface of the CCD;
A method for picking up a transmission image with a transmission electron microscope apparatus.

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