JP4299764B2 - Sample stretching holder for scanning probe microscope and method for observing surface state of sample using the sample stretching holder - Google Patents

Description

The present invention relates to a sample stretching holder for a scanning probe microscope and a method for observing the surface state of a sample using the sample stretching holder. More particularly, the present invention is the heart is a scanning probe the observation area of the sample on the sample stage of the microscope is set up so as to be close to the needle probe of the probe, gripping a pair of opposed end portions of the sample A sample extension holder that grips the sample and distorts the sample so that the central part, which is the observed part of the sample, remains stationary, and the sample surface The present invention relates to a state observation method.

2. Description of the Related Art Conventionally, there are known methods for observing the surface state of a deformed sample using a scanning probe microscope and observing the surface state of the sample before and after deformation. For example, Patent Document 1 and Patent Document 2, a probe having a cantilever and probe, and a sample stage, by relatively moving with respect to the probe set on the sample stage sample, the sample A scanning probe microscope capable of observing the surface state and an observation method using the same are described.

  The scanning probe microscope includes a heating or cooling unit so that the surface state of the heated or cooled sample can be observed, and a stretching mechanism so that the surface state of the stretched sample can be observed.

However, in the case of the scanning probe microscope described in Patent Document 1 and Patent Document 2 and the observation method using the same, it is provided with a pair of fixing means for fixing the vicinity of both ends of the sample. for fixing means are oriented mechanism as strain is applied to the sample by relative movement, the relative position of the observed portion of the probe and the sample by distortion moves always surface in the observation area of the sample It was difficult to observe the state, and improvements were required.

  Moreover, when observing the surface state of the sample which consists of crystalline polymers including polyethylene and polypropylene using the scanning probe microscope of patent document 1 and patent document 2, the other fixation is carried out with respect to one fixing means. Since the stretching mechanism is such that the sample is distorted by the relative movement of the means, the end of the sample held by one fixing means of the pair of fixing means for fixing the vicinity of both ends of the sample. Since stress is concentrated and deformation due to necking occurs, it is difficult to observe the surface state by distorting the observed portion of the sample, and an improvement thereof has been demanded.

JP 2003-247931 A JP 2002-71543 A

The present invention has been made in view of the above circumstances, the central portion on the sample stage of a scanning probe microscope is the observation area of the sample is placed in proximity to the needle probe of the probe, both end portions of the sample A pair of gripping tools facing each other, the pair of gripping tools at the opposing positions can move in the opposite direction, and the sample is distorted so that the central part that is the observed part of the sample remains stationary It is an object of the present invention to provide a sample extending holder for a scanning probe microscope capable of performing the above and a method for observing the surface state of a sample using the sample extending holder.

As a result of intensive studies, the present inventors have found that the present invention can solve the above problems, and have completed the present invention.
That is, the sample stretching holder for a scanning probe microscope of the present invention is a sample stretching holder for stretching a sample installed in the scanning probe microscope, and includes a pair of gripping tools that grip both ends of the sample, A support member that movably supports the gripping tool, and a moving mechanism that moves the pair of gripping tools at opposite positions away from each other, and the support member has a convex center portion protruding upward. The central portion of the convex shape is composed of a flat surface at the center portion that supports the back surface of the observed portion of the sample, and tapered portions formed on both sides of the flat surface. is there.

  According to the present invention, it is possible to operate the moving mechanism and move the pair of gripping tools at the facing positions in a direction away from each other to extend the sample in the facing direction. Therefore, it is possible to observe the stretched state of the sample while the central portion, which is the observed portion of the sample, is kept stationary.

One aspect of the present invention, the moving mechanism, Ri feed screw Tona forming a left screw and right screw on each side of one axis, the pair of grippers corresponding to the left screw and right screw of the feed screw has a female thread, characterized Rukoto moving the pair of grippers by rotation of the feed screw.
According to the present invention, since the moving mechanism is composed of a feed screw in which a left screw and a right screw are formed on both sides of one shaft, a pair of gripping tools can be obtained simply by rotating the feed screw in one direction manually or using a motor or the like. Can be moved in directions away from each other, and the pair of gripping tools can be moved in directions close to each other only by rotating the feed screw in the opposite direction.

One aspect of the present invention is characterized in that the support member is made of a heat conductor, and the heat conductor is in contact with a heat source and in contact with the back surface of the sample.
According to the present invention, the heat conductor constituting the support member is in contact with the back side of the surface of the observed portion of the sample, and the heat source is in contact with the heat conductor. As a result, the heat conductor Heat is transferred between the sample and the heat source via the. A cartridge heater or the like may be used as the heat source, and a metal material such as an aluminum alloy or a copper alloy may be used as the heat conductor constituting the support member.

In this onset bright, the support member has a convex central portion protruding upward convex central portion, and the flat surface of the central portion for supporting the back surface of the sample, both sides of the flat surface that consists of a tapered portion formed on.
According to the present invention, the sample is supported by the flat surface of the convex central portion of the support member, and is guided by the tapered portion. Therefore, when the sample is stretched, the sample is supported on the flat surface while being guided by the taper portion, so that the sample is not distorted in a direction orthogonal to the stretching direction.

Further, method of observing the surface state of the sample of the present invention, a sample drawn holder for a scanning probe microscope described above, was placed as probe of the probe in the center is the observation area of the sample is close, constant temperature of Under the control, the surface state of the observed portion of the sample subjected to distortion is observed.

According to the present invention, since the pair of gripping tools at the opposing positions for gripping both ends of the sample can be moved away from each other, the central portion that is the observed portion of the sample is kept stationary. The sample can be distorted. Therefore, it is the relative position of the observed portion of the needle and the sample probe by the distortion of the sample without having to move always implement Surface analysis of the observation area of the sample.

  In addition, according to the present invention, stress is evenly applied to the pair of gripping tools that grip both ends of the sample, so that stress is not concentrated on the end of the sample, and deformation due to necking does not occur. Therefore, it is possible to reliably observe the surface state by distorting the observed portion of the sample.

Hereinafter, a basic configuration and an embodiment of a sample stretching holder for a scanning probe microscope according to the present invention and a method for observing a surface state of a sample using the sample stretching holder will be described.
1 and 2 are views showing a basic configuration of a sample extending holder for a scanning probe microscope according to the present invention.
FIG. 1 is a schematic cross-sectional view showing a basic configuration of a sample stretching holder for a scanning probe microscope of the present invention. 2A to 2C are diagrams showing the scanning probe microscope sample stretching holder shown in FIG. 1, and FIG. 2A is a schematic plan view of the scanning probe microscope sample stretching holder. 2 (b) is a schematic front view of a sample extending holder for a scanning probe microscope, and FIG. 2 (c) is a schematic side view of the sample extending holder for a scanning probe microscope.

  As shown in FIG. 1, the sample extension holder 1 includes a fixed base 2, a heat insulating material 3 disposed above the fixed base 2, a support member 4 disposed above the heat insulating material 3, and a support member 4. A heat source 5 provided on the lower surface, a pair of moving members 6, 6 supported movably on the support member 4, a feed screw 7 screwed to the pair of moving members 6, 6, and a pair of moving members 6 , 6 and a pair of presser plates 8, 8 for holding both ends of the sample 10. The sample extension holder 1 is installed and fixed on a sample table 21 of a scanning probe microscope by a fixing table 2.

  After placing the sample 10 on the pair of moving members 6, 6, the pair of holding plates 8, 8 are fixed to the pair of moving members 6, 6 by the fixing screws 19, so that the sample 10 is Both end portions are set on the sample stretching holder 1 with the pair of moving members 6 and 6 and the pair of presser plates 8 and 8 gripped. The moving member 6 and the presser plate 8 constitute a gripping tool 9 that grips the end of the sample 10. Further, the support member 4 constitutes a heat conductor with good thermal conductivity that conducts heat from the heat source 5 to the sample 10. That is, the central portion 4 a of the support member 4 has a function of contacting the back surface of the sample 10 to support the sample 10 and transferring heat from the heat source 5 to the sample 10.

  The pair of moving members 6 and 6 are formed with female screws 6a and 6b, whereas the feed screw 7 is formed with male screws 7a and 7b. The male screws 7a and 7b of the feed screw 7 are each composed of right and left screws, and similarly, the female screws 6a and 6b of the moving members 6 and 6 are composed of right and left screws, respectively. . The feed screw 7 is rotatably supported by the convex center part 4 a of the support member 4.

  Therefore, when the feed screw 7 is rotated, the pair of moving members 6 and 6 are moved in a direction toward or away from each other. One end of the sample 10 is held by a holding tool 9 including a moving member 6 and a holding plate 8, and the other end of the sample 10 is held by a holding tool 9 including a moving member 6 and a holding plate 8. When the pair of gripping tools 9 and 9 at the opposing positions move in the direction away from each other by the rotation of the feed screw 7, the sample 10 is pulled and extended from both opposing directions. In other words, the feed screw 7 constitutes a moving mechanism that moves the pair of gripping tools 9 and 9 at the opposing positions in a direction away from each other.

  The size and shape of the fixed base 2 of the present invention are not particularly limited, and may be determined according to the sample base 21 of a commercially available scanning probe microscope, but is preferably a disk having a diameter of 20 mm to 50 mm. Note that the sample stage 21 has substantially the same dimensions as the fixed stage 2. If the dimensions of the fixing table 2 and the sample table 21 are too small, it becomes difficult to design the heat source 5 and the moving member 6 mounted on the fixing table 2, and the size and the maximum draw ratio of the sample 10 are limited. Conversely, if the dimensions of the fixed table 2 and the sample table 21 become too large, there may be a problem that it is difficult to install the sample table 21 on the scanning probe microscope. Further, in the case of a scanning probe microscope that observes the surface state by scanning the sample stage 21, the weight of the sample stretching holder 1 increases and the characteristics of the piezo element become unstable due to heat conduction from the heat source. There may be a problem that the stability and operability of the measurement of the surface state of the sample is lowered.

  The constant temperature of the sample 10 is achieved by the heat source 5 and the heat conductor composed of the support member 4. The heat conductor composed of the support member 4 is in contact with the back side of the surface of the observed portion of the sample 10, and the heat source 5 is connected to the heat conductor, and the sample 10 and the heat source 5 are connected via the heat conductor. Heat is transferred to and from. A cartridge heater may be used as the heat source 5, and a metal material is preferable as the heat conductor, and an aluminum alloy or a copper alloy is particularly preferable from the viewpoint of the heat conductor. In some cases, a Peltier element can be used as the heat source 5.

  The constant temperature range is not particularly limited, and is −70 ° C. to 200 ° C., and it is preferable to control the temperature within the range with an accuracy of ± 1 ° C. The temperature detection method is not particularly limited, and a temperature detection method using a K thermocouple, a platinum resistance thermometer, or the like may be used. The method of temperature control is not particularly limited, and methods such as PID control of heater power by a temperature controller and flow rate control of liquid nitrogen are preferable.

  Further, when the sample stretching holder 1 of the present invention is installed in a scanning probe microscope that observes the surface state by scanning the sample stage 21, the heat insulating material 3 is inserted between the heat source 5 and the fixed stage 2. Desirably, since the heat conduction from the heat source 5 to the fixed base 2 is shielded by the heat insulating material 3, it is possible to prevent an adverse effect on the scanning function of the sample base 21 due to heat.

  The moving method of the pair of moving members 6 and 6 used in the sample stretching holder 1 of the present invention is a method of moving in a direction opposite to each other by a feed screw 7 having a right screw and a left screw on one shaft. The moving members 6 and 6 move in directions away from each other. The driving method for rotating the feed screw 7 is desirably a manual driving method or a driving method using a stepping motor or the like. If necessary, it can be driven using a computer from a position remote from the scanning probe microscope using a stepping motor control method by pulse output.

  As a method for fixing the sample 10 to the sample stretching holder 1, a method in which the holding plate 8 is used to sandwich and fix the moving member 6 on the moving member 6 may be used, and the method is not particularly limited. About the dimension and shape of the moving member 6 and the holding plate 8, it is a dimension and shape which can make the maximum draw ratio of the sample 10 200% or more. It is desirable to form a slip prevention groove on the contact surface of the moving member 6 and the holding plate 8 with the sample 10, and the moving member 6 and the holding plate 8 are preferably made of a metal material from the viewpoint of strength.

As the sample 10, both a sheet shape and a film shape can be used, but it is preferable to use a film from the viewpoint that the stretching stress can be reduced.
The material of the sample is not particularly limited, but rubber or polymer is preferable. As the polymer, either crystalline polymer or amorphous polymer can be used.
The shape of the sample 10 is not particularly limited, but is preferably a strip shape having a notch at the end of the central portion that is the observed portion. As for the shape of the notch, either a semicircular shape or a V-shape can be used.

The detailed structure of the sample stretching holder 1 will be further described with reference to FIGS. 2 (a) to 2 (c).
A through hole 14 is formed in the fixing base 2 and the heat insulating material 3, and a through hole 15 is also formed in the support member 4 and the heat insulating material 3. Then, the fixing table 2 and the heat insulating material 3 are fixed to the sample table 21 by inserting the fixing screws 22 through the through holes 14 of the fixing table 2 and the heat insulating material 3 and tightening the fixing screws 22 to the sample table 21. . Further, the fixing screw 23 is inserted into the through hole 15 of the support member 4 and the heat insulating material 3, and the fixing screw 23 is fastened to the fixing base 2, so that the heat source 5 is sandwiched between the support member 4 and the heat insulating material 3. Fixed.

  The heat source 5 is formed of a square heater, and a heater cable 18 is connected to the heat source 5 so that electric power is supplied to the heat source 5. The platinum sensor 16 is arranged so as to contact the heat source 5, and a platinum sensor cable 17 is connected to the platinum sensor 16 so that the temperature of the heat source 5 can be detected. And the electric power supplied to the heat source 5 is controlled based on the detection value of the platinum sensor 16, and the calorific value of the heat source 5 can be controlled.

  The support member 4 is made of an aluminum alloy disk having a convex shape at the central portion 4a, and four convex rails 20 extending left and right from the central portion 4a are formed on the support member 4. The support member 4 includes a feed screw insertion hole 24 into which the feed screw 7 is inserted into the convex center portion 4a, and two pin insertion holes 26 into which pins 25 are inserted in a direction orthogonal to the feed screw insertion hole 24. Have. Then, by inserting the two pins 25 into the pin insertion hole 26, the pin 25 is fitted into a circumferential groove formed on the outer peripheral surface of the central portion of the feed screw 7, and the feed screw 7 is attached to the support member 4. It is fixed and positioned.

  The moving member 6 has a concave groove 27, and the convex rail 20 formed on the support member 4 is fitted into the concave groove 27 of the moving member 6. Thus, by rotating the feed screw 7, the pair of moving members 6 can move in the opposite directions along the convex rails 20 formed on the support member 4. The sample 10 is set on the moving member 6 by fastening the fixing screw 19 via the presser plate 8. Therefore, when carrying out the tensile test, the sample 10 can move in a direction opposite to the outside from the center while the measured part at the center is kept stationary.

The sample stretching holder 1 is installed on the sample stage 21 of the scanning probe microscope, and one end of the sample 10 is held by the holding tool 9 including the moving member 6 and the holding plate 8, and similarly, the moving member 6 and the holding plate 8 are The other end of the sample 10 is held by the holding tool 9 made of In this state, the gripping tool 9 is moved in opposite directions by the feed screw 7 having a right screw and a left screw on one shaft, so that the central portion which is the observed portion of the sample 10 is stationary in a constant temperature atmosphere. Distortion is given to keep In this state, the probe 11 of the probe 13 (see FIG. 1) moves relative to the center is the observation area of the sample 10, or the sample stage 21 to the probe 11 of the probe 13 By moving relatively, the deflection of the cantilever 12 of the probe 13, the amplitude change of the cantilever 12, the vibration phase change of the cantilever 12, and the like are detected, and the surface of the central portion that is the observed portion of the stretched sample 10 The condition is observed. In some cases, the sample may be set in a constant temperature atmosphere after being stretched.

In the sample extending holder for a scanning probe microscope and the method for observing the surface state of a sample using the same according to the present invention, in the various measurement modes existing in a commercially available scanning probe microscope, A central surface condition can be observed. And by comparison of the surface state before and after deformation and comparison of the surface state of the central part, which is the observed portion of the sample 10 having different stretching ratios, for a sample made of a crystalline polymer such as polyethylene or polypropylene, It is thought that analysis as specified in
(1) Analysis of deformation, rotation, orientation and fracture behavior of spherulite lamellar structure (2) Elucidation of necking deformation behavior (3) Analysis of temperature dependence and spatial distribution of (1) and (2) above

  Next, an embodiment in which the sample extending holder for the scanning probe microscope shown in FIGS. 1 and 2 is further embodied will be described with reference to FIGS. 3 (a) to 3 (d). 3A is a front cross-sectional view of a sample extending holder for a scanning probe microscope, FIG. 3B is a plan view of the sample extending holder for a scanning probe microscope, and FIG. 3C is a sample extending for a scanning probe microscope. It is side surface sectional drawing of a holder. FIG. 3D is a cross-sectional view taken along line AA in FIG. 3 (a) to 3 (d), the same reference numerals as those in FIGS. 1 and 2 denote the same or corresponding parts.

  As shown in FIGS. 3A to 3D, the sample extension holder 1 includes a fixing base 2, a heat source 5 disposed above the fixing base 2, a heat insulating material 3 that holds the heat source 5, and A support member 4 disposed above the heat source 5, a platinum sensor 16 provided on the lower surface of the support member 4, a holder 32 that holds the platinum sensor 16, and a pair of movements supported by the support member 4 so as to be movable. The members 6, 6, the feed screw 7 screwed to the pair of moving members 6, 6, and the pair of press plates 8, 8 that grip both ends of the sample 10 between the pair of moving members 6, 6. I have.

  The sample extension holder 1 is installed and fixed on a sample table 21 of a scanning probe microscope by a fixing table 2. After placing the sample 10 on the pair of moving members 6, 6, the pair of holding plates 8, 8 are fixed to the pair of moving members 6, 6 by the fixing screws 19, so that the sample 10 is Both end portions are set on the sample stretching holder 1 with the pair of moving members 6 and 6 and the pair of presser plates 8 and 8 gripped. The edge portions of the presser plate 8 and the moving member 6 are rounded and chamfered so as not to damage the sample 10. The moving member 6 and the presser plate 8 constitute a gripping tool 9 that grips the end of the sample 10. The support member 4 constitutes a heat conductor that conducts heat from the heat source 5 to the sample 10.

  The pair of moving members 6 and 6 are formed with female screws 6a and 6b, whereas the feed screw 7 is formed with male screws 7a and 7b. The male screws 7a and 7b of the feed screw 7 are each composed of right and left screws, and similarly, the female screws 6a and 6b of the moving members 6 and 6 are composed of right and left screws, respectively. . The feed screw 7 is rotatably supported by the convex center part 4 a of the support member 4.

  Therefore, when the feed screw 7 is rotated, the pair of moving members 6 and 6 are moved in a direction toward or away from each other. One end of the sample 10 is held by a holding tool 9 including a moving member 6 and a holding plate 8, and the other end of the sample 10 is held by a holding tool 9 including a moving member 6 and a holding plate 8. Note that the holding plate 8 is formed so that the sample 10 side is bent downward and convex, and the holding plate 8 can hold the sample 10 as a whole. When the pair of gripping tools 9 and 9 at the opposing positions move in the direction away from each other by the rotation of the feed screw 7, the sample 10 is pulled and extended from both opposing directions. In other words, the feed screw 7 constitutes a moving mechanism that moves the pair of gripping tools 9 and 9 at the opposing positions in a direction away from each other.

  The heat insulating material 3 and the fixing base 2 are fixed by fixing screws 33, and the holder 32 and the heat insulating material 3 are fixed by fixing screws 34. The support member 4 and the holder 32 are fixed by fixing screws 35.

  The heat source 5 is formed of a square heater, and a heater cable 18 is connected to the heat source 5 so that electric power is supplied to the heat source 5. The platinum sensor 16 is disposed so as to contact the heat source 5 via the holder 32, and a platinum sensor cable 17 is connected to the platinum sensor 16, so that the temperature of the heat source 5 can be detected. . And the electric power supplied to the heat source 5 is controlled based on the detection value of the platinum sensor 16, and the calorific value of the heat source 5 can be controlled.

  The support member 4 is made of an aluminum alloy disc-shaped disk having a convex shape at the center 4a. The convex center part 4a is composed of a central flat surface 4af that supports the back surface of the sample 10, and tapered portions 4at formed on both sides of the flat surface 4af. The support member 4 includes a feed screw insertion hole 24 into which the feed screw 7 is inserted into the convex center portion 4a, and two pin insertion holes 26 into which pins 25 are inserted in a direction orthogonal to the feed screw insertion hole 24. Have. Then, by inserting the two pins 25 into the pin insertion hole 26, the pin 25 is fitted into a circumferential groove formed on the outer peripheral surface of the central portion of the feed screw 7, and the feed screw 7 is attached to the support member 4. It is fixed and positioned.

  According to the present embodiment, the sample 10 is supported by the flat surface 4af of the convex center portion 4a of the support member 4 and is guided by the tapered portion 4at. Therefore, when the sample 10 is stretched, the sample 10 is supported by the flat surface 4af while being guided by the taper portion 4at, so that the sample 10 is not distorted in a direction orthogonal to the stretching direction. .

  The moving member 6 is guided by both side surfaces (both side surfaces perpendicular to the screw 7) of the convex center portion 4a of the support member 4 so that the moving member 6 can move linearly in the direction along the feed screw 7. . Accordingly, by rotating the feed screw 7, the pair of moving members 6 can move in opposite directions along the axial direction of the feed screw 7. The sample 10 is set on the moving member 6 by fastening the fixing screw 19 via the presser plate 8. Therefore, when carrying out the tensile test, the sample 10 can move in a direction opposite to the outside from the center while the measured part at the center is kept stationary.

The sample stretching holder 1 is installed on the sample stage 21 of the scanning probe microscope, and one end of the sample 10 is held by the holding tool 9 including the moving member 6 and the holding plate 8, and similarly, the moving member 6 and the holding plate 8 are The other end of the sample 10 is held by the holding tool 9 made of In this state, the gripping tool 9 is moved in opposite directions by the feed screw 7 having a right screw and a left screw on one shaft, so that the central portion which is the observed portion of the sample 10 is stationary in a constant temperature atmosphere. Distortion is given to keep In this state a relatively, by probe 11 of the probe 13 moves relative to the center is the observation area of the sample 10, or the sample stage 21 with respect to probe 11 of the probe 13 By moving, the deflection of the cantilever 12 of the probe 13, the amplitude change of the cantilever 12, the vibration phase change of the cantilever 12, and the like are detected, and the surface state of the central portion that is the observed portion of the stretched sample 10 is observed. . In some cases, the sample may be set in a constant temperature atmosphere after being stretched.

FIG. 1 is a schematic cross-sectional view showing a basic configuration of a sample stretching holder for a scanning probe microscope of the present invention. 2A is a schematic plan view of a sample extending holder for a scanning probe microscope, FIG. 2B is a schematic front view of the sample extending holder for a scanning probe microscope, and FIG. 2C is a scanning probe microscope. It is a typical side view of the sample extending | stretching holder. 3A is a front cross-sectional view of a sample extending holder for a scanning probe microscope, FIG. 3B is a plan view of the sample extending holder for a scanning probe microscope, and FIG. 3C is a sample extending for a scanning probe microscope. FIG. 3D is a side sectional view of the holder, and FIG. 3D is a sectional view taken along line AA in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Sample extending | stretching holder 2 Fixing base 3 Heat insulating material 4 Support member 4a Center part 4af Flat surface 4at Tapered part 5 Heat source 6 Moving member 6a, 6b Female screw 7 Feed screw 7a, 7b Male screw 8 Holding plate 9 Holding tool 10 Sample 11 Search Needle 12 Cantilever 13 Probe 14, 15 Through hole 16 Platinum sensor 17 Platinum sensor cable 18 Heater cable 19, 22, 23, 33, 34, 35 Fixing screw 20 Rail 21 Sample base 24 Feed screw insertion hole 25 pin 26 pin Insertion hole 27 Groove 32 Holder

Claims (4)

A sample stretching holder for stretching a sample installed in a scanning probe microscope,
A pair of gripping tools for gripping both ends of the sample;
A support member that movably supports the pair of gripping tools;
A moving mechanism for moving a pair of gripping tools at opposite positions in a direction away from each other,
The support member has a convex center portion protruding upward, and the convex center portions are formed on a flat surface of a central portion that supports the back surface of the observed portion of the sample and on both sides of the flat surface. A sample stretching holder for a scanning probe microscope, characterized in that the sample stretching holder comprises a tapered portion. The moving mechanism, Ri feed screw Tona forming a left screw and right screw on each side of one axis, the pair of grippers has an internal thread corresponding to the left screw and right screw of the feed screw, wherein scanning probe microscope sample stretching holder according to claim 1, wherein Rukoto moving the pair of grippers by the rotation of the feed screw.   The sample extending holder for a scanning probe microscope according to claim 1 or 2, wherein the support member is made of a heat conductor, and the heat conductor is in contact with a heat source and in contact with the back surface of the sample. Samples stretched holder for a scanning probe microscope according to any one of claims 1 to 3, installed such probe of the probe in the center is the observation area of the sample is close, under a constant temperature of control A method for observing the surface state of a sample, comprising observing the surface state of a portion to be observed of the sample subjected to distortion.

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