JP4326426B2 - Spectroscopic analysis apparatus evaluation method and evaluation apparatus - Google Patents

Description

  The present invention relates to an incident part for making light incident from the outside, an optical means with a spectral function for spectrally separating the light incident from the incident part, and the intensity of light dispersed in the wavelength change direction by the optical means with the spectral function And measuring means for dividing the wavelength into wavelengths and outputting spectral spectrum data relates to an evaluation method and an evaluation apparatus for a spectroscopic analysis apparatus integrally assembled on a substrate.

  In such a spectroscopic analyzer, the optical means with a spectral function separates light incident from the outside through the incident portion, and the measuring means divides the light spectrally divided in the wavelength change direction by the optical means with the spectral function into wavelengths. The measurement means outputs the spectral spectrum data, and the measurement means receives the focal point (hereinafter sometimes abbreviated as the spectral projection focal point) for projecting the light dispersed in the optical means with the spectral function to the measurement means. The incident portion, the optical means with spectroscopic function, and the measurement means are configured to be integrally assembled to the base body in a state where the relative positional relationship between them is adjusted so as to match the surface. For example, disclosed in Patent Document 1 Has been.

Incidentally, the optical means with a spectroscopic function includes a spectroscopic means such as a diffraction grating that splits light incident through the incident part, or splits the light incident through the incident part in a state guided by a predetermined optical path. As described above, a reflecting mirror or the like is provided in addition to the spectroscopic means.
Further, the measuring means includes a plurality of unit measuring sections that measure the light split by the optical means with a spectroscopic function by dividing the light into wavelengths, and is constituted by, for example, a CCD line sensor.

JP 2002-98636 A

  In such a spectroscopic analyzer, the incident part, the optical means with a spectroscopic function, and the measuring means are integrally assembled to the substrate in a state where the relative positional relationship between them is adjusted, or in the state in which they are actually used. At the time of maintenance or the like, it is necessary to evaluate the adjustment state of the spectral projection focus of the optical means with the spectral function with respect to the light receiving surface of the measuring means.

  As a method for evaluating such a spectroscopic analyzer, generally, the wavelength band is a narrow band and the wavelength range of light received by the measuring means (hereinafter sometimes abbreviated as the received light wavelength range) is approximately the center. Projecting the single evaluation light set to the incident portion, obtaining the maximum value in the spectral data of the single evaluation light output from the measurement means, and measuring means based on the obtained maximum value The adjustment state of the spectral projection focus with respect to the light receiving surface is evaluated.

  That is, the spectral spectrum data of the evaluation light output from the measuring unit has a mountain shape having a single peak, and the spectral projection focus of the optical unit with a spectral function approaches the light receiving surface of the measuring unit. As the peak of the spectral data becomes steep and the maximum value increases, the maximum value is obtained, and the adjustment state of the spectral projection focus with respect to the light receiving surface of the measuring means is evaluated based on the maximum value. Is done.

  However, the adjustment state of the spectral projection focus with respect to the light receiving surface of the measuring means is based on a single evaluation light having a wavelength approximately in the center of the light receiving wavelength range, and simply based on the maximum value of the spectral spectrum data of the evaluation light. As described below, in the method for evaluating the spectral projection focus, the adjustment state of the spectral projection focus with respect to the light receiving surface of the measuring unit cannot be properly evaluated. It will be impossible.

That is, since evaluation is performed using a single evaluation light whose wavelength is set at substantially the center of the light receiving wavelength range, the spectrum for the light receiving surface of the measuring means is received at a portion that receives light having a wavelength approximately at the center of the light receiving wavelength range. Even if the adjustment state of the projection focal point can be evaluated, the spectrum of the light receiving surface of the measuring means on the short wavelength side where the light receiving wavelength is short or the light receiving surface of the measuring means on the long wavelength side where the light receiving wavelength is long The adjustment state of the projection focus cannot be evaluated.
Therefore, it is impossible to evaluate the adjustment state of the spectral projection focus with respect to the light receiving surface of the measuring unit over a wide range of the light receiving wavelength change direction on the light receiving surface of the measuring unit.

In addition, the light amount of the light source for forming the evaluation light changes depending on factors such as a temporal factor and the power supply state of the light source, and the light amount of the evaluation light also changes with the change of the light source. .
And when the amount of light for evaluation is large, the deviation of the spectral projection focal point with respect to the light receiving surface of the measuring means is large, and the maximum value is large even if the peak portion of the spectral spectrum data of the evaluation light is not steep, There is a risk of evaluating that the adjustment state of the spectral projection focus with respect to the light receiving surface of the measuring means is appropriate.
Also, when the light amount of the evaluation light is small, the maximum value is obtained even if the adjustment state of the spectral projection focus with respect to the light receiving surface of the measuring means is appropriate and the peak portion of the spectral spectrum data of the evaluation light is steep. Since it is small, there is a risk of evaluating that the adjustment state of the spectral projection focus with respect to the light receiving surface of the measuring means is not appropriate.
Therefore, when the change in the amount of the evaluation light is large, there is a possibility that the adjustment state of the spectral projection focus with respect to the light receiving surface of the measuring unit cannot be properly evaluated.

  In short, since the adjustment state of the spectral projection focal point with respect to the light receiving surface of the measuring means is evaluated only in the portion that receives light having a wavelength approximately at the center of the light receiving wavelength range, the evaluation also has a large change in the amount of light for evaluation. In some cases, it may not be possible to perform properly, and the adjustment state of the spectral projection focus with respect to the light receiving surface cannot be properly evaluated over a wide range of the light receiving wavelength change direction on the light receiving surface of the measuring means. The performance of the analyzer could not be properly evaluated.

  This invention is made | formed in view of this situation, The objective is to provide the evaluation method and evaluation apparatus of a spectroscopic analyzer which can evaluate the performance of a spectroscopic analyzer appropriately.

[Evaluation method of spectroscopic analyzer]
The method for evaluating a spectroscopic analysis apparatus according to the present invention includes an incident part for making light incident from the outside, an optical means with a spectral function for splitting light incident from the incident part, and a wavelength change direction by the optical means with the spectral function. A measuring means for measuring the intensity of the light split into wavelengths and dividing it into wavelengths and outputting spectral spectrum data is a method for evaluating a spectroscopic analysis apparatus integrated with a substrate,
A plurality of types of evaluation light having different wavelengths with a maximum intensity in a narrow band are selectively projected onto the incident part,
For each of a plurality of spectral data outputted from said measuring means corresponding to each of selectively projecting the evaluation light to the incident portion, the maximum value in the spectral data, the maximum value in the spectral data Shorter wavelength than the maximum value corresponding to the setting lower limit intensity for evaluation light set to a value smaller than the determination intensity in the spectral spectrum data, the width in the wavelength change direction at the determination intensity set to a smaller value A lower limit element number which is an element number on the side, and an upper limit element number which is an element number on the long wavelength side with respect to the maximum value corresponding to the set lower limit intensity for evaluation light in the spectral data. And

  That is, a plurality of types of evaluation light having a narrow band and different wavelengths with the maximum intensity are selectively projected onto the incident portion, and the measurement means responds to each of the evaluation light selectively projected onto the incident portion. For each of a plurality of output spectral spectrum data, find the maximum value in the spectral spectrum data and the width in the wavelength change direction at the determination intensity set to a value smaller than the maximum value in the spectral spectrum data. Based on the maximum value and the width of the wavelength change direction at the determination intensity, the adjustment state of the spectral projection focus with respect to the light receiving surface of the measuring means is evaluated. Incidentally, the determination intensity is set to a value such as 2/3, 1/2, 1/3 of the maximum value, for example. For example, when the determination intensity is set to ½ of the maximum value, the wavelength change direction width at the determination intensity is a so-called half-value width.

That is, the wavelength of each of the plurality of types of evaluation light is set so as to be dispersed over a wide range of light receiving wavelength. For example, when three types of evaluation light are used, the wavelengths of the three types of evaluation light are set to the short wavelength side portion, the central portion, and the long wavelength side portion, respectively, in the light receiving wavelength range.
Then, using the evaluation light in which each wavelength is dispersed over a wide light receiving wavelength range, based on the maximum value in the spectral spectrum data of each evaluation light and the wavelength change direction width at the determination intensity, Since the adjustment state of the spectral projection focus with respect to the light receiving surface is evaluated, it is possible to appropriately evaluate the adjustment state of the spectral projection focus with respect to the light receiving surface over a wide range of the light receiving wavelength change direction on the light receiving surface of the measuring means. It is.

In other words, the wavelength change direction width at the determination intensity in the spectral spectrum data of the evaluation light becomes narrower as the spectral projection focus of the optical means with spectral function approaches the light receiving surface of the measuring means and the peak portion becomes steeper. .
Therefore, the evaluation light is evaluated by evaluating the adjustment state of the spectral projection focus with respect to the light receiving surface of the measuring means based on the maximum value in the spectral spectrum data of the evaluation light and the wavelength change direction width at the determination intensity. Even when the change in the amount of light is large, it is possible to appropriately evaluate the adjustment state of the spectral projection focus with respect to the light receiving surface of the measuring means.
In other words, when the amount of light for evaluation is large and the deviation of the spectral projection focus with respect to the light receiving surface of the measuring means is large, even if the maximum value of the spectral spectrum data of the evaluation light is large, the peak portion is gentle. Since the wavelength change direction width at the judgment intensity becomes wide, it is evaluated that the adjustment state of the spectral projection focus with respect to the light receiving surface of the measuring unit is inappropriate based on the maximum value and the wavelength change direction width at the judgment intensity. It becomes possible.
In addition, when the light amount of the evaluation light is small and the adjustment state of the spectral projection focus with respect to the light receiving surface of the measuring means is appropriate, the peak portion is steep even if the maximum value of the spectral spectrum data of the evaluation light is small. Therefore, since the wavelength change direction width at the determination intensity is narrow, it is evaluated that the adjustment state of the spectral projection focus with respect to the light receiving surface of the measuring unit is appropriate based on the maximum value and the wavelength change direction width at the determination intensity. It becomes possible.

In addition, by using a plurality of types of evaluation light in which each wavelength is dispersed over a wide range of the light receiving wavelength range, evaluation is performed in each of a plurality of portions dispersed over a wide range in the light receiving wavelength change direction on the light receiving surface of the measuring means. Despite a large change in the amount of light used, it is possible to appropriately evaluate the adjustment state of the spectral projection focus with respect to the light receiving surface of the measuring means. Thus, it is possible to appropriately evaluate the adjustment state of the spectral projection focus with respect to the light receiving surface.
Accordingly, it is possible to provide a method for evaluating a spectroscopic analyzer that can appropriately evaluate the performance of the spectroscopic analyzer.

[Evaluation equipment for spectroscopic analyzer]
The apparatus for evaluating a spectroscopic analysis apparatus according to the present invention includes an incident part for making light incident from the outside, an optical unit with a spectral function for splitting light incident from the incident part, and a wavelength change direction by the optical means with the spectral function. The measuring means for measuring the intensity of the light split into the wavelength and outputting the spectral spectrum data is an evaluation apparatus for the spectroscopic analysis apparatus integrally assembled with the substrate,
Evaluation light projection means for selectively projecting a plurality of types of evaluation light having narrow wavelengths and different wavelengths with the maximum intensity onto the incident portion,
For each of a plurality of spectral data outputted from said measuring means corresponding to each of the evaluation light selectively projected onto the incident portion, the maximum value in the spectral data, the in the spectral data maximum Shorter than the maximum value corresponding to the width of the wavelength change direction at the determination intensity set to a value smaller than the value, and the setting lower limit intensity for evaluation light set to a value smaller than the determination intensity in the spectral spectrum data. Calculation means for obtaining a lower limit element number which is an element number on the wavelength side and an upper limit element number which is an element number on the long wavelength side with respect to the maximum value corresponding to the set lower limit intensity for evaluation light in the spectral data. When,
The maximum value obtained by the calculation means, the wavelength change width at decision intensity, the lower element number, and is characterized in that the output means are provided for outputting the upper element number.

  That is, the evaluation light projecting means selectively projects a plurality of types of evaluation light having different wavelengths with a narrow band and the maximum intensity, and selectively projects onto the incident part. For each of a plurality of spectral spectrum data output from the measuring means corresponding to each of the evaluation light, the maximum value in the spectral spectrum data, and the wavelength change direction width at the determination intensity is obtained, by the output means, The maximum value and the wavelength change direction width at the determination intensity for each of the plurality of spectral spectrum data obtained by the calculation means are output.

That is, by setting the wavelength of each of the plurality of types of evaluation light so as to be dispersed over a wide range of the light receiving wavelength range, as previously described in the description of the characteristic configuration of the evaluation method of the spectroscopic analyzer, Using multiple types of evaluation light with each wavelength dispersed over a wide range of light receiving wavelength range, measurement is based on the maximum value in the spectral spectrum data of each evaluation light and the wavelength change direction width at the judgment intensity It will evaluate the adjustment state of the spectral projection focus with respect to the light receiving surface of the means, and appropriately evaluate the adjustment state of the spectral projection focus with respect to the light receiving surface over a wide range of the light receiving wavelength change direction on the light receiving surface of the measuring means. It becomes possible.
Therefore, it is possible to provide a spectroscopic analyzer evaluation apparatus that can appropriately evaluate the performance of the spectroscopic analyzer.

In addition to the first feature configuration described above, the second feature configuration of the spectroscopic analyzer evaluation device includes:
The output means is configured to display and output a plurality of spectral spectrum data output from the measurement means corresponding to each of the evaluation light selectively projected onto the incident portion as an image. It is characterized by.

That is, since the output means displays and outputs a plurality of spectral spectrum data output from the measuring means corresponding to each of the evaluation light selectively projected onto the incident portion, the light receiving surface of the measuring means It is possible to evaluate the adjustment state of the spectral projection focus at each of the plurality of portions dispersed over a wide range of the light receiving wavelength range based on the spectral data of the evaluation light displayed in the image.
In other words, as the spectral projection focus of the optical means with spectral function approaches the light receiving surface of the measuring means, the peak portion of the spectral data of the evaluation light displayed in the image becomes steeper in the form of the spectrum on the light receiving surface of the measuring means. The adjustment state of the projection focus clearly appears in the image of the spectral data of the evaluation light.
Then, the adjustment state of the spectral projection focus with respect to the light receiving surface of the measuring means is evaluated by the spectral data image of the evaluation light in addition to the maximum value in the spectral data of the evaluation light and the wavelength change direction width at the determination intensity. By doing so, the evaluation becomes easier.
Accordingly, it is possible to provide an evaluation apparatus for a spectroscopic analyzer that makes it easier to evaluate the performance of the spectroscopic analyzer.

In addition to the first or second feature configuration described above, the third feature configuration of the spectroscopic analysis device evaluation apparatus includes:
Calibration light projection means for projecting calibration light having a maximum value or a minimum value at a plurality of different wavelengths to the incident portion is provided,
The output means is configured to display and output spectral spectrum data of calibration light output from the measurement means as an image.

  That is, the calibration light projection means projects the calibration light having the maximum value or the minimum value at a plurality of different wavelengths onto the incident portion, and the output means splits the calibration light output from the measurement means. Spectral data is displayed and output as an image.

That is, in such a spectroscopic analyzer, there is a case in which a so-called wavelength calibration is performed for checking the correspondence between each of the plurality of unit measuring units of the measuring means and the received light wavelength.
In such wavelength calibration, calibration light having a maximum or minimum light intensity at a plurality of different wavelengths with known wavelengths is projected onto the incident portion, and spectral spectrum data of the calibration light is obtained. Then, the wavelength calibration is performed by specifying the unit measurement unit in which the light intensity in the spectrum data becomes the maximum value or the minimum value.
Then, when performing wavelength calibration in this way, in each of the portions that receive light of a plurality of wavelengths whose light intensity is the maximum value or the minimum value among the spectrally calibrated light, the spectrum with respect to the light receiving surface of the measuring means is measured. If the adjustment state of the projection focus is not appropriate, the peak portion where the light intensity in the spectroscopic spectrum data exhibits the maximum value or the valley portion where the minimum value appears becomes gentle, and wavelength calibration cannot be performed properly. It is necessary to evaluate whether or not it can be performed properly.

Therefore, by projecting the calibration light onto the incident portion and causing the output means to display and output the spectral spectrum data of the calibration light as an image, the light intensity of the spectrally calibrated light is maximized or minimized. It becomes possible to evaluate the adjustment state of the spectral projection focus with respect to the light receiving surface of the measuring means in each of the portions that receive light having a plurality of wavelengths as values, and accordingly, wavelength calibration can be appropriately performed. It becomes possible to evaluate whether or not it is possible.
Accordingly, it is possible to provide an apparatus for evaluating a spectroscopic analyzer that can evaluate whether or not wavelength calibration can be performed properly.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
First, a schematic configuration of the spectroscopic analyzer will be described.
This spectroscopic analyzer measures internal quality information such as sugar content and acidity of an object to be measured such as fruit vegetables such as mandarin orange, and as shown in FIGS. 1 and 2, the object to be measured M is placed on a receiving tray 4t. Conveying conveyor 4 that transports via measurement point P in a mounted and supported state, light projecting unit 1 and light receiving unit 2 arranged on both sides of measurement point P, and operation of the spectroscopic analyzer The control unit 3 is configured to obtain control and internal quality information of the object M to be measured.

Hereinafter, each part of the spectroscopic analyzer will be described.
First, the transport conveyor 4 will be described.
As shown in FIGS. 1 and 2, the transport conveyor 4 is configured to be rotationally driven by attaching the receiving tray 4 t for placing an object to be measured at a set interval to an endless rotating chain (not shown). In the state where the object to be measured M is placed on the plurality of trays 4t, the measurement object P is transported in a single line in a row so as to sequentially pass through the measurement points P.

Next, the configuration of the light projecting unit 1 will be described in detail.
As shown in FIGS. 3 and 4, the light projecting unit 1 includes a light source 5 including two halogen lamps, and measures light from the two light sources 5 on different projection optical axes. It is configured to project on the measurement object M located at the place P. Further, the two optical axes for projection by the respective light sources 5 are configured to intersect at or near the surface portion of the measurement object M located at the measurement location P.
That is, two light sources 5 that are separated from each other in the transport direction by the transport conveyor 4 are provided, and the following optical system is provided corresponding to each of the two light sources 5. In other words, the concave light reflecting plate 6 for reflecting the light emitted from the light source 5 and focusing on the surface of the measurement object M is provided, and the focal position of the light collected by the light reflecting plate 6 is provided. Light that has passed through the diaphragm plate 7 and the diaphragm plate 7 that are positioned so as to correspond to each other and suppress the spread of the condensed light to the radially outward side by passing through the large diaphragm hole 7a. A light amount adjusting plate 8 that can be switched between a state in which light passes through, a state in which light passes through a small aperture 8a, and a state in which light is blocked, and a collimator lens that changes the light from the condensed light source 5 into parallel light 9. A reflecting plate 10 that reflects and bends light that has been changed into parallel light, and a condensing lens 11 that condenses the light reflected by the reflecting plate 10 are provided as an optical system for one light source 5. ing. Each light quantity adjusting plate 8 is integrally rocked by an electric motor 12 and can be switched to each state.
And this light projection part 1 becomes a structure by which each above-mentioned member was built in the casing 13, and was assembled in the unit form.

The casing 13 is configured in a substantially rectangular parallelepiped shape, and one side surface of the measurement location P side is configured by a mounting substrate 13s. The details of the casing 13 will be described later. The board 13s is configured to be suspended and supported on the support member 40 by the mounting board 13s in a posture along the vertical direction.
In a state in which the casing 13 is suspended and supported by the support member 40 in a posture in which the mounting substrate 13s is along the vertical direction, the reflector 10 directs the parallel light from the collimator lens 9 obliquely downward with respect to the horizontal direction. The condensing lens 11 is arranged so as to reflect the light so as to be inclined downward with respect to the vertical direction, and the light reflected by the reflecting plate 10 obliquely downward is transmitted obliquely downward and collected. It is arranged so as to be inclined obliquely downward with respect to the vertical direction so as to shine.
And it is comprised so that light can be projected on diagonally downward by the light projection part 1 in the state which the mounting board | substrate 13s suspended and supported by the support member 40 in the attitude | position which follows the perpendicular direction.

Next, the configuration of the light receiving unit 2 will be described.
As shown in FIG. 3, the light receiving unit 2 includes an upper-side condensing lens 14 that condenses the transmitted light from the measurement object M incident from the light incident tube 20 so as to be parallel light, and its upper-side condensing. A band-pass mirror 15 and a band-pass mirror 15 that reflect only the light in the wavelength range (600 nm to 1000 nm) of the measurement target among the light changed into parallel light by the lens 14 and pass light of other wavelengths as they are. A lower-side condensing lens 16 that condenses the measurement target light reflected by the light, an open state that allows the measurement target light that has passed through the lower-side condensing lens 16 to pass through as it is, and a shielding state that prevents passage of the measurement target light. Spectral spectrum data obtained by making the light that has passed through the shutter mechanism 17 switchable to the open state and the light passing through the shutter mechanism 17 in the open state be incident and spectrally divided, and measuring the intensity of the split light divided into wavelengths. Output spectral measurement unit to U, is configured to include a measurement control unit 19 for controlling the operation of the light receiving sensor 18 of the measuring unit provided in the spectroscopic measurement unit U.

  Further, the light receiving unit 2 is operated so that the light passage hole 22 is selectively positioned in each of a plurality of types of filters including the wavelength calibration filter 21 in the optical path of the light from the lower condenser lens 16. A freely configured filter switching mechanism 23 and a light amount detection sensor 24 for detecting the light amount of light that has passed through the band pass mirror 15 in a straight traveling state are also provided.

  The wavelength calibration filter 21 has a characteristic that the absorbance is large at at least two wavelengths within the light receiving wavelength range of the light receiving sensor 18, and is constituted by, for example, a V10 filter. That is, the wavelength calibration filter 21 forms calibration light having a minimum light intensity at at least two wavelengths within the light receiving wavelength range of the light receiving sensor 18.

  As shown in FIG. 3 and FIG. 5, the spectroscopic measurement unit U is an incident slit 51 as an incident portion for making light incident from the outside, and an optical means with a spectroscopic function that splits light incident from the incident slit 51. And the light receiving sensor 18 that outputs the spectral spectrum data by measuring the intensity of the light split in the direction of wavelength change by the wavelength and outputting the spectral spectrum data is integrated with a dark box 52 as a base. It is assembled and configured.

  As shown in FIG. 5, the spectroscopic unit B reflects the measurement target light incident from the incident slit 51 into the dark box 52 provided with the incident slit 51, and reflects the measurement target light in a state of being condensed. 53, a concave diffraction grating 54 that splits the measurement target light reflected by the upper concave reflecting mirror 53 into light of a plurality of wavelengths, and a state in which the measurement target light dispersed by the concave diffraction grating 54 is collected The lower-side concave reflecting mirror 55 that reflects the light is housed.

  The width of the entrance slit 51 is about 700 μm, which is considerably wider than the width of the entrance slit (for example, about 10 μm) in a general spectroscope, and the amount of light projected onto the measurement object M by the light projecting unit 1 is reduced. However, it is configured so that the analysis accuracy can be improved by increasing the amount of the measurement target light incident on the dark box 52.

  The light receiving sensor 18 simultaneously receives the light, which is spectrally reflected by the concave diffraction grating 54 and reflected by the lower concave reflecting mirror 55, for each wavelength, and converts it into a signal for each wavelength and outputs it. It is composed of a 1024 pixel charge storage type CCD line sensor. For example, a light receiving element at one end (corresponding to a unit measuring unit) receives light having a wavelength of 600 nm, and a light receiving element at the other end receives light. The wavelength of the received light becomes longer, and the light receiving wavelength range is set to about 600 to 1000 nm so that the light receiving element at the other end receives light having a wavelength of 1000 nm.

  The upper-side concave reflecting mirror 53, the concave-side diffraction grating 54, and the lower-side concave reflecting mirror 55 can be arranged on the spectroscopic substrate 52k that forms one surface of the dark box 52 having a substantially rectangular parallelepiped shape. It is supported separately using a position adjustable support C.

Next, based on FIG. 6, description will be given on the position-adjustable support C. 6A is a plan view in a partially cut state, and FIG. 6B is a perspective view.
The position-adjustable support C is a state in which a base plate 56 provided with two elongated holes 56h in parallel, a support column 57 standing on the support plate 56, and a plate surface along the longitudinal direction of the support column 57. In the state where the mounting plate 58 attached to the tip of the column 57 and provided with the four position adjusting holes 58h and the washer 59 are inserted, they are inserted into the two long holes 56h, respectively, and the spectroscopic part substrate 52k. The two front and rear adjustment bolts 60 screwed into the screw holes (not shown) and the washer 61 are inserted into the four position adjustment holes 58h, respectively, and the upper side It comprises four concave / convex adjusting bolts 62 screwed into screw holes formed on the back surface of the concave reflecting mirror 53, the concave diffraction grating 54 or the lower concave reflecting mirror 55. Each position adjustment hole 58h is a so-called fool hole formed with a diameter larger than that of the upper / lower / left / right adjustment bolts 62.

The upper-side concave reflecting mirror 53, the concave-surface diffraction grating 54, and the lower-side concave reflecting mirror 55 each have a position-adjustable support C erected on the spectroscopic substrate 52k using two front and rear adjustment bolts 60. Is attached to the mounting plate 58 by using four vertical / horizontal adjustment bolts 62, and is supported on the spectroscopic substrate 52k.
Each of the upper concave reflecting mirror 53, the concave diffraction grating 54, and the lower concave reflecting mirror 55 is loosened by two front / rear adjusting bolts 60, thereby allowing the two long holes 56h to be accommodated in the front / rear direction. The left and right direction and the left and right direction can be adjusted, and by loosening the four vertical and horizontal adjustment bolts 62, the interchange of the four position adjustment holes 58h makes it possible to adjust the horizontal direction, the vertical direction, the left and right diagonal directions, etc. The position can be adjusted.

Then, the upper concave concave surface is used by using the position-adjustable support C so that the light incident from the incident slit 51 is appropriately dispersed and the dispersed light is projected on the light receiving surface of the light receiving sensor 18. By adjusting the positions of the reflecting mirror 53, the concave diffraction grating 54, and the lower concave reflecting mirror 55, the relative positional relationship between the upper concave reflecting mirror 53 and the concave diffraction grating 54, the concave diffraction grating 54 and the lower concave reflection. Spectral section adjustment is performed to adjust the relative positional relationship between the mirror 55 and the relative positional relationship between the lower concave reflecting mirror 55 and the light receiving sensor 18.
Although details will be described later in this spectroscopic adjustment, the evaluation apparatus for a spectroscopic analyzer of the present invention is used.

  As shown in FIG. 5, the shutter mechanism 17 includes a circular plate 17 </ b> A in which a plurality of shutter slits 17 s are radially formed in a state of being rotated around a vertical axis by a pulse motor 17 </ b> B. The shutter slit 17 s is formed in substantially the same shape as the entrance slit 51 so as to be in an open state that allows light to pass through when it overlaps the entrance slit 51 and to be in a shut-off state that blocks light when displaced from the entrance slit 51. The disc 17A is arranged in a state of sliding in close contact with the entrance slit 51 of the dark box 52 so as not to leak light.

  As shown in FIG. 5, the filter switching mechanism 23 includes a plurality of filters including a wavelength calibration filter 21 and a circular plate 23A provided with light passage holes 22 dispersed in the circumferential direction by a pulse motor 23B. Each of the plurality of types of filters is configured to selectively position the light passage hole 22 in the optical path of the light from the lower condenser lens 16.

And as shown in FIG. 3, the said light-receiving part 2 becomes a structure where each above-mentioned member was built by the casing 25 and was assembled in the unit shape.
One side surface of the casing 25 on the side of the measurement point P is constituted by an attachment substrate 25s, which will be described in detail later. The casing 25 is in a state in which the attachment substrate 25s is in a posture along the vertical direction. It is comprised so that it may be suspended and supported by the support member 41.

  As shown in FIG. 1 and FIG. 2, the device frame F to which the light projecting unit 1 and the light receiving unit 2 are detachably attached has locations corresponding to the left and right sides of the conveyor 4 at the measurement location P. And it is provided in the state provided with a pair of attachment part with respect to the light projection part 1 and the light-receiving part 2 so that it may be set as the location for light reception.

  Further, the device frame F includes a vertical position adjusting mechanism 29 that can adjust the position of the light projecting unit 1 and the light receiving unit 2 in the vertical direction, and the light projecting unit 1 and the light receiving unit 2 respectively. Horizontal position adjustment that allows the position to be adjusted along the direction of approaching and moving away from the measurement object M located at the measurement point P with respect to the frame F, that is, the direction that is horizontal and orthogonal to the transport direction of the transport conveyor 4. A mechanism 30 is provided.

Next, the vertical position adjusting mechanism 29 will be described.
As shown in FIGS. 1, 2, and 7, four fixed support rods 31 are provided in a state where they are suspended from an upper portion of the apparatus frame F in a fixed state, and these four fixed support rods 31 are provided. A support base 32 is attached to the lower end of the base plate. A lifting platform 34 is supported on the four fixed support rods 31 by four sliding support portions 33 so as to be slidable in the vertical direction. Further, a feed screw 35 supported in a suspended state from an upper side portion of the apparatus frame F is rotatably provided by an electric motor 36, and a female screw member 37 provided on the lifting platform 34 is provided on the feed screw 35. They are screwed together, and the lifting platform 34 can be adjusted to move up and down to an arbitrary position by rotating the feed screw 35 with an electric motor 36. The feed screw 35 is also configured to be rotatable by a manual operation handle 38.

Next, the horizontal position adjusting mechanism 30 will be described.
As shown in FIGS. 1, 2, and 7, the lifting platform 34 is provided with two guide bars 39 that extend along the direction in which the light projecting unit 1 and the light receiving unit 2 are arranged. The support members 40 and 41 as the pair of attachment portions to which the assembled light projecting portion 1 and light receiving portion 2 are detachably attached are supported by the guide rods 39 so as to be slidable. Each guide bar 39 is connected by a connecting tool 39a at both ends in the longitudinal direction. The elevator 34 is provided with two feed screws 42 and 43 extending along the direction in which the light projecting unit 1 and the light receiving unit 2 are arranged, and can be rotated by horizontal position adjusting electric motors 44 and 45, respectively. The female screw portions 46 and 47 provided in the support members 40 and 41 are screwed into the feed screws 42 and 43, respectively. The electric motors 44 and 45 respectively adjust the feed screws 42 and 43 individually. By reversely rotating, the support members 40 and 41 can be adjusted in position along the horizontal direction perpendicular to the transport direction of the transport conveyor 4. Accordingly, the light projecting portion 1 and the light receiving portion 2 that are individually attached to the support members 40 and 41 are respectively rotated forward and backward by the electric motors 44 and 45 to rotate the feed screws 42 and 43 forward and backward, respectively. It becomes possible to change and adjust the direction, that is, the relative position in the direction approaching and separating from the measurement point P.

  Therefore, when the feed screw 35 is rotated by the electric motor 36 for adjusting the vertical position, the lifting platform 34 is adjusted up and down. Accordingly, the light projecting unit 1 and the light receiving unit 2 supported by the lifting platform 34 are moved. The horizontal direction that can be adjusted up and down integrally, and that each of the horizontal position adjusting electric motors 44 and 45 is rotated, the light projecting unit 1 and the light receiving unit 2 are orthogonal to the transport direction of the transport conveyor 4. You can adjust the movement along.

  When a description is given of the mounting structure of the light projecting unit 1 and the light receiving unit 2 to the support members 40 and 41, as shown in FIGS. A plurality of positioning projections 13a and 25a projecting laterally at appropriate intervals in the horizontal direction are provided on the mounting boards 13s and 25s, respectively, and a suspension arm supported downward on the support members 40 and 41. Positioning holes 26h and 27h corresponding to the positioning projections 13a and 25a are formed at the lower end portions of the supporting members 40 and 41, and the light projecting unit 1 and the light receiving unit 2 are attached to the support members 40 and 41, respectively. In the state where the positioning projections 13a and 25a are fitted and positioned in the positioning holes 26h and 27h, the light projecting portion 1 and the light receiving portion 2 are secured by bolting appropriate locations near them. And it has a configuration to mount.

  Moreover, when performing the maintenance of the light projecting unit 1 and the light receiving unit 2 by configuring the light projecting unit 1 and the light receiving unit 2 in a unit shape as described above and detachably mounting the support members 40 and 41, The light projecting unit 1 and the light receiving unit 2 can be removed from the support members 40 and 41, and the maintenance work is simplified.

  As shown in FIGS. 1 to 3, on the upper side of the measurement point P, it is positioned at a height that does not hinder the transfer of the object M to be measured by the transfer conveyor 4, and is moved downward from the support base 32. A reference filter 49 is provided in a state of being supported by the extended support arm 48. The reference filter 49 is composed of an optical filter having a predetermined absorbance characteristic, and is specifically composed of a pair of opal glasses.

  Then, by vertically moving and adjusting the light projecting unit 1 and the light receiving unit 2 by the vertical position adjusting mechanism 29, the light from the light projecting unit 1 is placed on the conveyor 4 as shown in FIGS. The normal measurement state in which the light receiving unit 2 receives light after passing through the object to be measured M and the light from the light projecting unit 1 are transmitted to the light receiving unit 2 after passing through the reference filter 49 (not shown). The reference measurement state in which light is received can be switched to.

Next, the control operation of the control unit 3 will be briefly described.
Prior to normal measurement of the measurement object M, the control unit 3 projects the light from the light projecting unit 1 onto the reference filter 49 instead of the measurement object M, and transmits the transmitted light from the reference filter 49. A reference data measurement mode in which spectral data obtained by spectrally separating the light received by the light receiving unit 2 and receiving the dispersed light is obtained as reference spectral data, and a measurement object M conveyed by the conveyor 4. In the normal data measurement mode in which light is projected from the light projecting unit 1 to obtain measurement spectrum data, and the internal quality of the measurement object M is analyzed based on the measurement spectrum data and the reference spectrum data. It is configured to be switchable.

  The storage unit (not shown) of the control unit 3 stores normal measurement conditions according to the type of the measurement object M and reference measurement conditions in the reference data measurement mode. A switching operation tool (not shown) is provided for artificially switching the setting position in accordance with the difference in varieties such as mandarin orange and apple of the measurement object M, and setting information of this switching operation tool is input to the control unit 3. The normal data measurement mode is executed under the normal measurement conditions corresponding to the input product M type.

The normal measurement conditions and the reference measurement conditions are composed of control information of the vertical position adjusting electric motor 36 and the horizontal position adjusting electric motors 44 and 45, and are set as follows.
The control information of the electric motor 36 for adjusting the vertical position under the normal measurement conditions includes the vertical position of the light projecting unit 1 and the projection position of the light projecting unit 1 with respect to the measurement object M located at the measurement location P. This is control information for adjusting the position so as to be the substantially equator part (substantially central part) of M, and is set according to the size of the measurement object M of each type according to the type of the measurement object M. It is.
The control information of the horizontal position adjusting electric motors 44 and 45 in the normal measurement conditions includes the position of the light projecting unit 1 in the horizontal direction and the focus position of the focused light emitted from the light projecting unit 1 as the measurement location P. The position of the light receiving unit 2 in the horizontal direction coincides with the substantially surface of the object M to be positioned, and the focal point on the light incident side of the upper condenser lens 14 substantially coincides with the outer peripheral surface of the object M to be measured. Control information for adjusting the position to be adjusted, and is set in accordance with the size of the measurement object M of each type according to the type of the measurement object M.

The control information of the electric motor 36 for adjusting the vertical position under the reference measurement conditions is such that the vertical position of the light projecting unit 1 is set, and the projection position of the light projecting unit 1 with respect to the reference filter 49 is the substantially central portion of the reference filter 49. Control information for adjusting to a set position for correct calibration.
The control information of the horizontal position adjusting electric motors 44 and 45 under the reference measurement conditions is the position of the light projecting unit 1 in the horizontal direction, and the focal position of the focused light emitted from the light projecting unit 1 is the reference filter 49. For adjusting the position of the light receiving unit 2 in the horizontal direction so that it substantially coincides with the surface, so that the focal point of the light incident side of the upper-side condenser lens 14 coincides with the substantially surface of the reference filter 49. Control information.

  When the control unit 3 executes the reference data measurement mode and the normal data measurement mode, the filter 3 is arranged so that the light passage hole 22 is positioned in the optical path of the light from the lower condenser lens 16. The operation of the switching mechanism 23 is configured to be controlled.

In the reference data measurement mode, the vertical position adjusting electric motor 36 and the horizontal position adjusting electric motors 44 and 45 are operated under reference measuring conditions. Then, the shutter mechanism 17 is switched to the open state, the light from the light projecting unit 1 is projected onto the reference filter 49 instead of the measurement object M, and the transmitted light from the reference filter 49 is received by the light receiving unit 2. Spectral data obtained by spectrally receiving and receiving the split light is measured as reference spectral data.
In the reference data measurement mode, the detection value (dark current data) of the light receiving sensor 18 in the non-lighted state where the light to the light receiving unit 2 is blocked is also measured. That is, the shutter mechanism 17 of the light receiving unit 2 is switched to the shielding state, and the detection value for each unit pixel of the light receiving sensor 18 at that time is obtained as dark current data.

In the normal data measurement mode, the vertical position adjusting electric motor 36 and the horizontal position adjusting electric motors 44 and 45 are operated under normal measuring conditions corresponding to the type of the object M to be measured. Then, the measurement object M passes through the measurement point P based on detection information by a passage detection sensor (not shown) that detects the passage of the measurement object M on the upper side of the measurement point P in the conveyance direction of the conveyor 4. In a state of detecting the period to be synchronized with the period, the charge accumulation process for receiving the dispersed light and executing the charge accumulation operation for a set time and the sending process for sending the accumulated charge are repeated at the set period. The operation of the light receiving sensor 18 is controlled.
That is, in the time zone in which each object to be measured M is predicted to pass through the measurement point P, the light receiving sensor 18 executes the charge accumulation process for the set time, and it is predicted that the object to be measured M does not exist at the measurement point P. The operation of the light receiving sensor 36 is controlled so as to execute a sending process for sending out the accumulated charge at a timing such that the vicinity of the intermediate position between the measured objects M is located at the measurement point P.

  Then, in the state where the light receiving sensor 18 performs the charge accumulation process, the control unit 3 switches the shutter state from the shield state to the open state, maintains the open state for the duration of the open maintenance time, and then returns the shutter to the shield state. The operation of the mechanism 17 is controlled.

In addition, the control unit 3 reaches the measurement point P based on the change in the actual value of the amount of light received by the light quantity detection sensor 24, that is, the light transmission amount of the measurement object M. The shutter mechanism 17 is switched to the open state when it is detected that the measurement object M has arrived, and the shutter mechanism 17 is shielded after the open state is maintained for the open maintaining time. The measurement process is terminated by switching to.
More specifically, the maximum value is output by the light projected from the light projecting unit 1 until the measurement object M arrives. However, when the measurement object M reaches the measurement point P, the measurement light is emitted. When the detection value (light reception amount) of the light amount detection sensor 24 starts to decrease and is reduced to a preset value or less, it is determined that the measurement object M has reached the measurement point P. When the set time has elapsed from that point, the shutter mechanism 17 is switched to the open state. Then, after maintaining the open state for the open maintaining time, the shutter mechanism 17 is switched to the shielding state.

And the said control part 3 is comprised so that the arithmetic processing which analyzes the internal quality of the to-be-measured object M may be performed using the spectral analysis method which is a well-known technique based on the various data obtained in this way. Yes.
That is, the measured spectrum data obtained as described above is normalized using the reference spectrum data obtained in the reference data measurement mode and the dark current data, and is obtained for each wavelength that has been separated. Absorbance spectrum data is obtained, and a second derivative value of the absorbance spectrum data is obtained. And it is comprised so that the analytical calculation process which calculates the component amount corresponding to the sugar content contained in the to-be-measured object M and the component amount corresponding to acidity by the secondary differential value and the preset calibration formula may be performed. ing.

  The absorbance spectrum data d is Rd as the reference spectrum data, Sd as the measured spectrum data, and Da as the dark current data.

[Equation 1]
d = log [(Rd−Da) / (Sd−Da)]

It is calculated by the following formula.
And the control part 3 uses the value of a specific wavelength among the values which carried out the second derivative of the absorbance spectrum data obtained in this way, and a calibration formula as shown in the following formula 2, A calibration value for calculating the component amount corresponding to the sugar content and acidity contained in M is obtained.

[Equation 2]
Y = K0 + K1 · A (λ1) + K2 · A (λ2)

However,
Y: calibration value corresponding to the component amount K0, K1, K2; coefficients A (λ1), A (λ2); second derivative of absorbance spectrum at specific wavelength λ

  A specific calibration equation, specific coefficients K0, K1, K2, wavelengths λ1, λ2, and the like are preset and stored for each component for which the component amount is calculated. The calibration value (component amount) of each component is calculated using a specific calibration formula.

Although illustration is omitted, an artificially operated wavelength calibration command unit for commanding the control unit 3 to execute wavelength calibration is provided. The wavelength calibration command by the wavelength calibration command unit is performed in a state where the measurement object M is not placed on the tray 4t.
When the wavelength calibration command is commanded from the wavelength calibration command unit, the control unit 3 switches the filter so that the wavelength calibration filter 21 is positioned in the optical path of the light from the lower condenser lens 16. By actuating the mechanism 23, the calibration light formed through the wavelength calibration filter 21 is spectrally separated by the light receiving unit 2, and the spectrally separated light is received to obtain spectral spectrum data for wavelength calibration. Based on the spectral spectrum data for wavelength calibration, the correspondence relationship between each of the plurality of light receiving elements of the light receiving sensor 18 and the light receiving wavelength is calibrated.
That is, the calibration light formed by passing through the wavelength calibration filter 21 has a minimum light intensity at at least two known wavelengths, and a plurality of minimum values in the spectral spectrum data for wavelength calibration. Since each wavelength is known, the correspondence relationship between each of the plurality of light receiving elements of the light receiving sensor 18 and the light receiving wavelength is calibrated by specifying the light receiving element that detects each of the plurality of minimum values in the spectral spectrum data for wavelength calibration. To do.

Next, an evaluation apparatus V for a spectroscopic analyzer will be described based on FIG.
The evaluation device V is configured to evaluate the spectroscopic measurement unit U of the spectroscopic analysis device described above, and includes an evaluation light projection unit R that can selectively project various types of light for evaluation, and an evaluation. Condensing the light projected from the light projection unit R and projecting it to the entrance slit 51 of the spectral measurement unit U to be evaluated, and the measurement control unit 19 described above, An evaluation measurement control unit 72 for controlling the operation of the light receiving sensor 18 of the spectral measurement unit U to be evaluated, an evaluation main control unit 73 for controlling the operation of the evaluation device V, and various controls on the evaluation main control unit 73. An operation unit 74 for instructing information and an image display unit 75 for displaying various types of information such as evaluation results are provided.

  The evaluation condensing lens 71 is the same as the lower condensing lens 16 provided in the light receiving unit 2 described above, and is substantially the same as the case where the spectroscopic measurement unit U to be evaluated is provided in the light receiving unit 2 described above. In the same state, various kinds of evaluation light are projected onto the entrance slit 51 of the spectroscopic measurement unit U to be evaluated.

The evaluation light projection unit R includes a so-called polychromator. The light source 76 is a halogen lamp, and the wavelength at which the light intensity from the light source 76 is narrow and the intensity is maximized. A narrowband light forming section 78 that can selectively project a plurality of types of evaluation light having different light from the projection hole 77, and a projection wavelength setting section 79 that sets the wavelength of the evaluation light projected by the narrowband light forming section 78. And a filter switching mechanism 82 for selectively positioning the wavelength calibration filter 80 and the diffuser plate 81 in front of the projection hole 77.
The wavelength calibration filter 80 is the same as the wavelength calibration filter 21 provided in the filter switching mechanism 23 of the light receiving unit 2 described above, and the diffusion plate 81 is made of, for example, opal glass.

  The evaluation light projection unit R includes an evaluation light projection state in which the narrowband light forming unit 78 projects evaluation light from the projection hole 77, and light source light that directly projects the light from the light source 76 from the projection hole 77. A projection state switching unit 83 configured to switch between the projection state and the evaluation light projection state and the light source light projection state is also provided.

Then, by operating the projection wavelength setting unit 79 in a state where the diffusion plate 81 is positioned in front of the projection hole 77 by the filter switching mechanism 82 and the projection state switching unit 83 is switched to the evaluation light projection state. It is possible to project evaluation light having a predetermined wavelength.
Further, when the projection state switching unit 83 is switched to the light source light projection state with the filter 80 for wavelength calibration positioned in front of the projection hole 77 by the filter switching mechanism 82, the light intensity is minimized at a plurality of different wavelengths. Calibration light having a value can be projected.
That is, by using the evaluation light projection unit R, evaluation light projection means R1 for selectively projecting a plurality of types of evaluation light having narrow wavelengths and different wavelengths with the maximum intensity onto the entrance slit 51, and Calibration light projection means R <b> 2 for projecting calibration light having minimum light intensity at a plurality of different wavelengths onto the entrance slit 51 is configured.

  The operation unit 74 sets an operating condition of the light receiving sensor 18, and switches between an evaluation light evaluation state evaluated using the evaluation light and a calibration light evaluation state evaluated using the calibration light. It is configured to do so. The operation condition of the light receiving sensor 18 set by the operation unit 74 is a processing cycle in which a charge storage operation for executing a charge storage operation for a set charge storage time and a charge storage / release process including a sending process for sending out the stored charge are repeated. And the charge accumulation time.

The evaluation main control unit 73 is configured to control the operation of the evaluation measurement control unit 72 so as to operate the light receiving sensor 18 under the operation condition commanded by the operation unit 74.
Further, when the evaluation light evaluation state is instructed by the operation unit 74, the evaluation main control unit 73 is measured by the light receiving sensor 18, and the evaluation measurement control unit 72 performs A / A The maximum value in the spectral spectrum data inputted after D conversion, the half-value width as the width in the wavelength change direction at the determination intensity set to a value smaller than the maximum value in the spectral spectrum data, and the maximum value in the spectral data Corresponding to the lower limit element number, which is the element number corresponding to the setting lower limit intensity for evaluation light on the short wavelength side, and the setting lower limit intensity for evaluation light on the long wavelength side with respect to the maximum value in the spectral data The upper limit element number that is the element number to be obtained is obtained, and the obtained maximum value, half width, lower limit element number and upper limit element number, and spectral spectrum data are shown in FIG. And it is configured such that the display on the image display unit 75 in Suyo.

  As described above, when the evaluation light evaluation state is commanded by the operation unit 74, the operator uses the evaluation light projection unit R to evaluate light having a plurality of different wavelengths as will be described later. Are sequentially projected onto the entrance slit 51 of the spectroscopic measurement unit U.

As shown in FIG. 9, the maximum value MAX is obtained as an A / D conversion value, for example, 77000, and the half-value width HW is determined from the maximum value MAX and the half-width width setting lower limit intensity S1 (for example, Then, the intensity (A / D conversion value) ½ of the difference from A / D conversion value 5000) is determined as the determination intensity, and the width in the wavelength change direction at the determination intensity is obtained by the number of light receiving elements.
Further, the set lower limit intensity S2 for evaluation light is set to, for example, 10,000 as an A / D conversion value, and the lower limit element number Nd is on the short wavelength side with respect to the maximum value MAX in the spectral data. An element number corresponding to the evaluation light setting lower limit intensity S2 is obtained, and the upper limit element number Nu is set as the evaluation light setting lower limit intensity S2 on the long wavelength side with respect to the maximum value MAX in the spectral data. The element number corresponding to is obtained.

As shown in FIG. 9A, the spectral spectrum data is displayed in a graph in a state where the element number of the light receiving sensor 18 is associated with the A / D conversion value of each received light intensity.
The maximum value, the half value width, the lower limit element number, and the upper limit element number are displayed in letters as shown in FIG.

Further, when the calibration light evaluation state is instructed by the operation unit 74, the evaluation main control unit 73 is measured by the light receiving sensor 18, and the evaluation measurement control unit 72 performs A / A As shown in FIG. 10, the spectral display data input after D conversion is configured to be the image display unit 75.
When the calibration light evaluation state is commanded, the evaluation main control unit 73 obtains a plurality of minimum values in the spectral data input from the evaluation measurement control unit 72, and the plurality of these minimum values. For each of the minimum values, the lower limit element number that is the element number corresponding to the set upper limit intensity on the short wavelength side with respect to the minimum value in the spectral data, and the long wavelength side with respect to the minimum value in the spectral data The upper limit element number that is the element number corresponding to the set upper limit strength is obtained, and the obtained minimum value and the lower limit element number and the upper limit element number corresponding to each of the plurality of minimum values are as shown in FIG. The image display unit 75 is configured to display it together with the spectral data.

  As described above, when the calibration light evaluation state is instructed by the operation unit 74, the operator transmits the calibration light to the spectroscopic measurement unit U by the evaluation light projection unit R as described later. The light is projected onto the entrance slit 51.

As shown in FIG. 10, each of the plurality of minimum values MIN is obtained by an A / D conversion value.
The set upper limit intensity S3 is set to, for example, 30000 as an A / D conversion value, and the lower limit element number Nd is set to the set upper limit intensity S3 on the short wavelength side with respect to the minimum value MIN in spectral spectrum data. A corresponding element number is obtained, and as the upper limit element number Nu, an element number corresponding to the set upper limit intensity S3 on the long wavelength side with respect to the minimum value MIN in the spectral data is obtained.

As shown in FIG. 10A, the spectral spectrum data is displayed in a graph in a state in which the element number of the light receiving sensor 18 is associated with the A / D conversion value of each received light intensity.
As shown in (b) of FIG. 10, the plurality of minimum values, and the lower limit element number and the upper limit element number corresponding to each minimum value, for each area corresponding to each of the plurality of minimum values, Displayed in characters. For example, in the example shown in FIG. 10, since there are two minimum values, the minimum value, the lower limit element number, and the upper limit element number are displayed as area 1 and area 2 for each area.

  Further, the evaluation main control unit 73 is as shown in FIG. 9C and FIG. 10C regardless of which of the evaluation light evaluation state and the calibration light evaluation state is instructed. In addition, the operation condition of the light receiving sensor 18 commanded from the operation unit 74 is displayed on the image display unit 75.

Next, an evaluation method for evaluating the spectroscopic measurement unit U using the above-described evaluation apparatus V will be described.
That is, when the operator uses the evaluation light to evaluate the spectroscopic measurement unit U, the operator instructs the evaluation light evaluation state using the operation unit 74, and the filter switching mechanism 82 moves the diffusion plate 81 to the projection hole 77. The evaluation light projection unit R is switched to the evaluation light projection state by the projection state switching unit 83, the projection wavelength setting unit 79 is operated, and the evaluation light projection unit R sequentially, A plurality of evaluation lights having different wavelengths are projected onto the entrance slit 51 of the spectroscopic measurement unit U.
For example, when three types of evaluation light having different wavelengths are used, the wavelengths of the three types of evaluation light are set to the short wavelength side portion, the central portion, and the long wavelength side portion, respectively, in the light receiving wavelength range.

  Corresponding to each of the evaluation light projected by the evaluation main control unit 73, the local maximum in the spectral spectrum data of the evaluation light input after being A / D converted by the evaluation measurement control unit 72. The value, the half width, the lower limit element number, and the upper limit element number are obtained, and the obtained maximum value, half width, lower limit element number, and upper limit element number are shown together with the spectral spectrum data of the evaluation light. 9, the image is displayed on the image display unit 75.

  Then, each time the operator projects the evaluation light, the light is separated from the light receiving sensor 18 based on the maximum value, the half-value width, the lower limit element number, and the upper limit element number displayed on the image display unit 75. Spectroscopy that adjusts the position of any or all of the upper-side concave reflecting mirror 53, the concave-surface diffractive grating 54, and the lower-side concave reflecting mirror 55 using the position-adjustable support C so that the light-receiving surface is focused and projected. It adjusts the part.

That is, the set minimum maximum value and the set maximum half-value width are set corresponding to the adjustment state of the spectral projection focus with respect to the light receiving surface of the light receiving sensor 18 being a predetermined appropriate state.
Further, since it is necessary to adjust the correspondence between the plurality of light receiving elements of the light receiving sensor 18 and the light receiving wavelength within a predetermined range, the set minimum / lower limit element is made to correspond to each wavelength of the plurality of types of evaluation light. Number and set maximum upper limit element number are set.

Then, the spectroscopic unit adjustment is performed so that the maximum value displayed on the image display unit 75 is equal to or greater than the set minimum maximum value, and the half-value width displayed on the image display unit 75 is equal to or less than the set maximum half-value width. By doing so, the spectral projection focus is adjusted to the light receiving surface of the light receiving sensor 18.
Further, the lower limit element number displayed on the image display unit 75 is larger than the set minimum lower limit element number, and the upper limit element number displayed on the image display unit 75 is smaller than the set maximum upper limit element number. In addition, by adjusting the spectroscopic section, the correspondence relationship between each of the plurality of light receiving elements of the light receiving sensor 18 and the light receiving wavelength is adjusted within a predetermined range.

  As described above, when the spectroscopic adjustment for each of the plurality of types of evaluation light is completed, the operator instructs the calibration light evaluation state by the operation unit 74 and the filter switching mechanism 82 is used for wavelength calibration. The filter 80 is positioned in front of the projection hole 77 and the projection light switching unit 83 is switched to the light source light projection state by the projection state switching unit 83 to project the calibration light onto the entrance slit 51 of the spectroscopic measurement unit U. Let

  Then, the evaluation main control unit 73 uses the calibration light spectral spectrum for each of the plurality of minimum values and the plurality of minimum values in the spectral spectrum data of the calibration light input from the evaluation measurement control unit 72. The lower limit element number and the upper limit element number in the spectrum data are obtained, and the obtained minimum values, the lower limit element numbers and the upper limit element numbers corresponding to the plurality of minimum values, together with the spectral spectrum data of the calibration light It is displayed on the image display unit 75.

Then, the operator, based on the spectral spectrum data of the calibration light displayed on the image display unit 75, the plurality of minimum values, and the lower limit element number and the upper limit element number corresponding to each of the plurality of minimum values, The adjustment state of the spectral projection focus with respect to the light-receiving surface of the light-receiving element 18 can be evaluated in each of the portions that receive light having a plurality of wavelengths at which the light intensity of the calibration light is a minimum value.
For example, the adjustment state of the spectral projection focus can be evaluated by the shape of the valley that exhibits the minimum value in the spectral spectrum data of the calibration light. That is, the steeper shape of the valley portion means that the spectral projection focus is closer to the light receiving surface of the light receiving element 18.
Alternatively, whether the displayed minimum value is less than or equal to the set maximum minimum value, whether the displayed lower limit element number is larger than the set minimum lower limit element number, and whether the displayed upper limit element number is smaller than the set maximum upper limit element number By determining each of the plurality of local minimum values, it is possible to evaluate the adjustment state of the spectral projection focus. Incidentally, the set maximum minimum value, the set minimum lower limit element number, and the set maximum upper limit element number are set corresponding to each of a plurality of minimum values.

That is, for each of a plurality of spectral spectrum data output from the light receiving sensor 18 corresponding to each of the evaluation light selectively projected to the incident slit 51, the maximum value in the spectral spectrum data, and the The evaluation main control unit 73 is configured to calculate the width of the wavelength change direction width at the determination intensity set to a value smaller than the maximum value in the spectral data.
Further, an output means for outputting the maximum value obtained by the evaluation main control unit 73 and the width in the wavelength change direction at the determination intensity is constituted by the image display unit 75, and the image display unit 75. Are a plurality of spectral spectrum data output from the light receiving sensor 18 corresponding to each of the evaluation light selectively projected onto the incident slit 51, and calibration light output from the light receiving sensor 18. The spectral spectrum data is displayed and output as an image.

[Another embodiment]
Next, another embodiment will be described.
(B) The evaluation main control unit 73 is configured so that each of the plurality of spectral spectrum data output from the light receiving sensor 18 corresponding to each of the evaluation light selectively projected onto the incident slit 51 A maximum element number Nmax that is an element number corresponding to the maximum value in the spectral data is obtained, and the maximum element number may be displayed on the image display unit 75 as shown in FIG. .
In this case, it becomes easier to evaluate whether or not the correspondence relationship between each of the plurality of light receiving elements of the light receiving sensor 18 and the light receiving wavelength is within a predetermined range.

(B) The evaluation main control unit 73 obtains a minimum value element number Nmin that is an element number corresponding to each of a plurality of minimum values in the spectral spectrum data of the calibration light output from the light receiving sensor 18, 12, the obtained minimum value element number Nmin may also be displayed on the image display unit 75.
In this case, it becomes easier to evaluate whether or not the correspondence relationship between each of the plurality of light receiving elements of the light receiving sensor 18 and the light receiving wavelength is within a predetermined range.

(C) The evaluation main control unit 73 performs spectral analysis on each of a plurality of spectral data output from the light receiving sensor 18 corresponding to each of the evaluation light selectively projected onto the entrance slit 51. The spectrum data may be secondarily differentiated to obtain second derivative spectrum data, and the obtained second derivative spectrum data may be displayed on the image display unit 75.
Further, the main controller for evaluation 73 secondarily differentiates the spectrum data of the calibration light output from the light receiving sensor 18 to obtain the second derivative spectrum data of the calibration light, and the obtained calibration. You may comprise so that the secondary differential spectrum data of the light for use may be displayed on the said image display part 75. FIG.
In these cases, it becomes easier to evaluate the adjustment state of the spectral projection focus with respect to the light receiving surface of the light receiving element 18.

(D) In the above embodiment, the determination intensity is set to ½ of the maximum value, and the half value width is obtained as the width in the wavelength change direction at the determination intensity in the spectral data, The determination intensity can be set to various values other than ½ of the maximum value, such as 2/3 or 1/3 of the maximum value.

(E) As the wavelength calibration filters 21 and 80 for forming the calibration light, various filters can be used in addition to the V10 filter exemplified in the above embodiment. For example, using light having a high transmissivity at at least two wavelengths within the light receiving wavelength range of the light receiving sensor 18, the calibration light has a maximum light intensity at a plurality of different wavelengths. You may comprise so that the light for a calibration may be formed.

(F) The specific configuration of the optical means with a spectroscopic function is not limited to the configuration exemplified in the above-described embodiment. For example, the optical means with the spectroscopic function may be configured with only spectroscopic means such as a diffraction grating, It is possible to configure in various ways, for example, with a reflecting mirror.

(G) The measuring means is not limited to the CCD line sensor exemplified in the above embodiment, and various devices such as a MOS type line sensor can be used.

(H) The types of evaluation light having different wavelengths projected to the incident slit 51 are not limited to the three types exemplified in the above embodiment, and may be two types or four or more types.

(R) The spectroscopic analysis apparatus to which the present invention is applied is not limited to the one exemplified in the above embodiment, but includes only the light receiving unit 2 described in the above embodiment, or spectroscopic measurement. The thing provided only with the unit U may be sufficient.

Front view of the spectroscopic analyzer Spectral analyzer vertical left side view Longitudinal front view of the main part of the spectroscopic analyzer Cross-sectional plan view of the light projecting part of the spectroscopic analyzer Vertical left side view of the spectroscopic measurement unit of the spectroscopic analyzer The figure which shows the position adjustable support tool in the spectroscopic measurement unit of a spectroscopic analyzer Plan view showing the vertical position adjustment mechanism and horizontal position adjustment mechanism of the spectroscopic analyzer Block diagram showing an evaluation device for a spectroscopic analyzer The figure which shows the example of a display of the evaluation apparatus of a spectroscopic analyzer The figure which shows the example of a display of the evaluation apparatus of a spectroscopic analyzer The figure which shows the example of a display of the evaluation apparatus of the spectroscopic analyzer concerning another embodiment The figure which shows the example of a display of the evaluation apparatus of the spectroscopic analyzer concerning another embodiment

Explanation of symbols

18 Measuring means 51 Incident part 52 Base 73 Calculation means 75 Output means B Optical means with spectral function
HW wavelength change direction width
MAX maximum
Nd lower limit element number
Nu upper element number R1 Evaluation light projection means R2 Calibration light projection means
S2 evaluation light set lower limit intensity

Claims (4)

An incident part for making light incident from the outside, an optical means with a spectral function for splitting light incident from the incident part, and the intensity of the light dispersed in the wavelength change direction by the optical means with the spectral function divided into wavelengths A measuring means for measuring and outputting spectral spectrum data is a method for evaluating a spectroscopic analyzer integrally assembled with a substrate,
A plurality of types of evaluation light having different wavelengths with a maximum intensity in a narrow band are selectively projected onto the incident part,
For each of a plurality of spectral data outputted from said measuring means corresponding to each of selectively projecting the evaluation light to the incident portion, the maximum value in the spectral data, the maximum value in the spectral data Shorter wavelength than the maximum value corresponding to the setting lower limit intensity for evaluation light set to a value smaller than the determination intensity in the spectral spectrum data, the width in the wavelength change direction at the determination intensity set to a smaller value Spectroscopy apparatus for obtaining a lower limit element number that is an element number on the side and an upper limit element number that is an element number on the long wavelength side with respect to the maximum value corresponding to the set lower limit intensity for evaluation light in the spectral spectrum data Evaluation method. An incident part for making light incident from the outside, an optical means with a spectral function for splitting light incident from the incident part, and the intensity of the light dispersed in the wavelength change direction by the optical means with the spectral function divided into wavelengths And measuring means for measuring and outputting spectral spectrum data is an evaluation apparatus for a spectroscopic analysis apparatus integrally assembled with a substrate,
Evaluation light projection means for selectively projecting a plurality of types of evaluation light having narrow wavelengths and different wavelengths with the maximum intensity onto the incident portion,
For each of a plurality of spectral data outputted from said measuring means corresponding to each of the evaluation light selectively projected onto the incident portion, the maximum value in the spectral data, the in the spectral data maximum Shorter than the maximum value corresponding to the width of the wavelength change direction at the determination intensity set to a value smaller than the value, and the setting lower limit intensity for evaluation light set to a value smaller than the determination intensity in the spectral spectrum data. Calculation means for obtaining a lower limit element number which is an element number on the wavelength side and an upper limit element number which is an element number on the long wavelength side with respect to the maximum value corresponding to the set lower limit intensity for evaluation light in the spectral data. When,
The maximum value obtained by the calculation means, the wavelength change width at decision intensity, the lower element number, and the evaluation device of the output unit and is being spectroscopic analyzing apparatus provided for outputting the upper element number .   The output means is configured to display and output a plurality of spectral spectrum data output from the measuring means corresponding to each of the evaluation light selectively projected onto the incident portion as an image. Item 3. The apparatus for evaluating a spectroscopic analyzer according to Item 2. Calibration light projection means for projecting calibration light having a maximum value or a minimum value at a plurality of different wavelengths to the incident portion is provided,
4. The spectroscopic analyzer evaluation apparatus according to claim 2, wherein the output unit is configured to display and output spectral spectrum data of calibration light output from the measuring unit as an image.

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