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JP4354121B2 - Dynamic light scattering particle size distribution analyzer - Google Patents
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JP4354121B2 - Dynamic light scattering particle size distribution analyzer - Google Patents

Dynamic light scattering particle size distribution analyzer Download PDF

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Publication number
JP4354121B2
JP4354121B2 JP2001016083A JP2001016083A JP4354121B2 JP 4354121 B2 JP4354121 B2 JP 4354121B2 JP 2001016083 A JP2001016083 A JP 2001016083A JP 2001016083 A JP2001016083 A JP 2001016083A JP 4354121 B2 JP4354121 B2 JP 4354121B2
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sample
particle size
measurement
size distribution
concentration
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JP2002221479A (en
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誠 梅沢
哲司 山口
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Horiba Ltd
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Horiba Ltd
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Description

【0001】
【発明の属する技術分野】
この発明は、動的光散乱式粒径分布測定装置に関する。
【0002】
【従来の技術】
粒径分布測定方法の一つに、動的光散乱式粒径分布測定装置を用いるものがある。この動的光散乱式粒径分布測定装置は、試料セル内に、分散媒中に粒子を分散させた測定試料を収容し、この測定試料に対してレーザ光を照射し、前記粒子により散乱された光の周波数強度分布に基づいて粒径分布を求めるもので、従来の有機顔料やセラミックスなどに加えて、近時においては、半導体ウェハやハードディスクの研磨剤や、インクジェットプリンタなど先端材料の研究開発の現場におけるニーズが高まっている。
【0003】
【発明が解決しようとする課題】
ところで、上記動的光散乱式粒径分布測定装置は、従来においては、測定の都度、試料セルに対して測定試料を供給する所謂バッチ処理が主流であるとともに、測定装置の測定可能濃度が非常に低く、測定試料として低濃度のものまたは高濃度のものを希釈して用いる必要があったため、試料を測定可能な範囲の濃度にまで自動的に希釈する手法が採用されることもあった。これは、従来においては、この種の装置を用いるユーザにおいて、希釈によって測定するノウハウやデータベースを多く持っていたことにもその原因があると思われる。
【0004】
そして、前記試料を希釈するに際しては、従来、試料を定量的に採取し、この試料に対して100倍あるいは1000倍と言うように希釈液を定量的に注入する方法が採用されていた。
【0005】
【発明が解決しようとする課題】
しかしながら、上記手法は、測定装置の測定可能濃度に測定試料を希釈調整することが目的であり、凝集しやすい試料(粒子)においては、希釈による凝集の影響を受けたまま測定されることになり、粒子の実際の現場における使用状態と異なった状態における測定になる場合もあった。そして、前記凝集が生じた状態で粒径分布測定を行うと、散乱光強度に大きな変化を生じたり、希釈しても散乱光強度が微弱となり、所定の測定を行えないことが生ずる。
【0006】
この発明は、上述の事柄に留意してなされたもので、その目的は、粒径分布測定前に測定に供される試料濃度を測定し、所望の測定濃度に達するまで自動的に試料を希釈するようにして、所定の粒径分布測定を効率よく行うことができるようにした動的光散乱式粒径分布測定装置を提供することである。
【0007】
【課題を解決するための手段】
上記目的を達成するため、この発明では、試料セル内に、分散媒中に粒子を分散させた測定試料を収容し、この測定試料に対してレーザ光を照射し、前記粒子により散乱された光の周波数強度分布に基づいて粒径分布を求めるようにした動的光散乱式粒径分布測定装置において、前記分散媒と粒子が供給され、分散媒中に粒子を分散させるための分散バスと前記試料セルとを循環流路で接続するとともに、粒径分布測定に先立って、前記分散バスから試料セルに対して測定試料を供給し、この測定試料に対してレーザ光を照射し、そのとき得られる散乱光強度に基づいて前記測定試料の濃度を測定し、この測定された濃度を予め設定されている目標濃度と比較し、この比較結果に基づいて前記測定試料の濃度調整を行えるようにしている。
【0008】
上記動的光散乱式粒径分布測定装置においては、測定に供される試料を、希釈したい濃度(または濃度範囲)まで自動的に希釈することができる。そして、希釈による試料の状態変化を防止しながら濃度の確認を行うことができるので、希釈しすぎになったり希釈不足を生ずることがない。
【0009】
【発明の実施の形態】
発明の実施の形態を、図面を参照しながら説明する。図1〜図5は、この発明の一つの実施例を示す。まず、図1は、この発明の動的光散乱式粒径分布測定装置の一例を概略的に示すもので、この図において、1は分散バス、2は試料セルで、両者1,2は循環流路3で接続されている。
【0010】
前記分散バス1は、例えば円筒状の液槽よりなり、測定対象試料である粒子4aとこれを分散させる分散媒4bとを混合して測定試料4とするもので、その底部外部には、発振器によって振動する超音波振動子5が設けられており、分散バス1内で粒子4aが凝集するのを防止するようにされている。
【0011】
前記試料セル2は、所謂フローセルよりなり、その一端に試料入口2aが形成され、他端に試料出口2bが形成されている。
【0012】
前記循環流路3は、一端が分散バス1の底部に接続され、他端が試料セル2の試料入口2aに接続された往路管3aと、一端が試料セル2の試料出口2bに接続され、他端が分散バス1の上部において分散バス1内に開口する復路管3bとから構成されている。
【0013】
前記分散バス1側の構成を説明すると、復路管3bの下流側には、三方電磁弁6と循環用ポンプ7が設けられており、より上流側に位置する三方電磁弁6は、その第1、第2のポート6a,6bが復路管3bにそれぞれ接続され、第3のポート6cには管8を介して分散媒貯留槽9が接続されている。そして、三方電磁弁6は、例えば、電源オフ時にはポート6b,6cが連通し、電源オン時にはポート6a,6bが連通するよう構成されている。また、分散バス1の上部には、別途秤量された粒子4aを分散バス1内に供給する粒子供給ホッパー10と、分散剤を分散バス1内に供給する分散剤供給管11が設けられている。さらに、往路管3aの分散バス1の底部に近い部分には、開閉弁12を備えた排水管13が分岐接続されている。
【0014】
なお、前記分散媒4bとしては、例えば水(純水)、エタノール、油などの液体が用いられるが、測定対象である粒子4aの種類によって適宜使い分けられる。また、前記分散剤は、粒子4aが分散媒4b中において分散しやすくするもので、例えば界面活性剤など粒子どうしを反発させるもので、必要により供給される。
【0015】
そして、前記試料セル2側の構成を説明すると、14は試料セル2の一側に設けられるレーザ光源で、このレーザ光源14と試料セル2との間の光路には、レーザ光源14からのレーザ光15をコリメートするレンズ16、ビームスプリッタ17、集光レンズ18がこの順で設けられている。前記ビームスプリッタ17は、例えば中央にレーザ光15を通過させる孔が設けられ、その反射面が試料セル2方向に形成されたミラーよりなり、レーザ光源14を発したレーザ光15の光軸と例えば45°の角度をなすように設けられており、前記孔を通過したレーザ光15が試料セル2内の粒子4bによる散乱光のドップラーシフトによって生じた干渉光19を90°以下の適宜の角度曲げて反射するように構成されている。そして、ミラー17で反射された干渉光19の光路にはこれを集光するレンズ20と、前記干渉光19を電気的な検出信号D(t)に変換する光検出器21が設けられている。
【0016】
また、22は信号処理部で、前記光検出器21の出力D(t)を必要により増幅しディジタル信号に変換処理する信号処理部23、この信号処理部23から出力される検出信号D(t)をデータ処理して粒径分布を求めるCPU24、装置の各部を制御したり、前記CPU24における処理結果を表示するための画像処理など種々の処理を行うパソコン25などよりなり、パソコン25には、粒径分布など処理結果を表示したり、各種の制御画面を表示するための表示装置26が付設されている。
【0017】
次に、上記構成の動的光散乱式粒径分布測定装置の作動について、図2〜図5をも参照しながら説明する。この実施例の動的光散乱式粒径分布測定装置は、以下の作動を、パソコン25に内蔵されているプログラムにしたがって自動的に行う。
【0018】
(1)まず、開閉弁12を閉状態にして、秤量された粒子4aおよび分散媒4bを分散バス1内に投入する(図2のステップS1)。分散媒4bの投入は、三方電磁弁6がオフの状態(ポート6b,6cが連通している状態)でポンプ7を適宜時間オンすることにより適宜量の分散媒4bが分散バス1内に供給される。このとき、必要に応じて分散剤を適量投入してもよい。
【0019】
(2)三方電磁弁6をオンにして、ポート6a,6bを連通させることにより循環流路3が開成され、ポンプ7をオンすることにより、分散バス1内の粒子4aおよび分散媒4bは、往路管3a、試料セル2、復路管3b、三方電磁弁6およびポンプ7を経て分散バス1に戻るようにして循環流路3内を循環し、これによって、粒子4aが分散媒4b内に分散して十分に攪拌混合された測定試料4になる(図2のステップS2)。この場合、超音波振動子5を動作させ、分散バス1内で粒子4aが凝集するのを防止するようにしてもよい。
【0020】
(3)前記測定試料4の循環を適宜行い、これを十分に攪拌混合した後、ポンプ7をオフにした状態で、レーザ光源14をオンにしてレーザ光15を試料セル2内の測定試料4に照射する。すなわち、レーザ光源14から出たレーザ光15は、コリメートレンズ16、ビームスプリッタ17および集光レンズ18を経て試料セル2内に集光する。このとき、一部のレーザ光はセル壁面を通過して、分散媒4b中に分散し、ブラウン運動する粒子4aに当たり、前記ブラウン運動によってドップラーシフトしたレーザ光(散乱光)が散乱する。一方、一部のレーザ光はセル壁面で散乱(非散乱光)して、もとの周波数のレーザ光が逆方向に進む。前記散乱光と非散乱光は互いに干渉し合って干渉光となり、集光レンズ18、ビームスプリッタ17、レンズ20を経て光検出器21上に集光する。
【0021】
前記干渉光は、光検出器21において電気的な検出信号D(t)に変換され、信号処理部23において適宜処理され、ディジタル化された光散乱データがCPU24に取り込まれる。前記光散乱データは、図3に示すように、測定試料4の濃度に応じた振幅Amを有しており、この振幅Amに基づいて測定試料4の濃度(測定濃度)を得ることができる(図2のステップS3)。なお、前記光散乱データをCPU24において高速フーリエ変換してパワースペクトルを求め、このパワースペクトルに基づいて粒子4aの粒径分布状態を求めるようにしてもよい。
【0022】
そして、パソコン25において、測定担当者が、図4に示す画面を用いて目標濃度(電圧値)を設定する。図4は、自動濃度調整を行うときの表示装置26における画面の一例を示し、この例では、目標濃度を表す電圧値は12.50Vである。そして、前記測定濃度を目標濃度と比較する(図2のステップS4)。ここで、図5に示すように、測定濃度(測定濃度電圧)が目標濃度(目標濃度電圧)と一致しているときは、測定試料濃度の調整が終了したことになり(図2のステップS5)、粒径分布測定に移行する。この粒径分布測定は、前記(3)で説明したように、レーザ光源14をオンにしてレーザ光15を試料セル2内の測定試料4に照射し、そのとき得られる、粒子4a粒子により散乱された光の周波数強度分布に基づいて粒径分布を求めるようにすればよい。
【0023】
これに対して、前記測定濃度が目標濃度と一致していないときは、図2に示すように、ステップS2に戻り、測定試料4の濃度調整をさらに行う必要がある。すなわち、前記測定濃度(測定濃度電圧)が、例えば図6の画面例に示すように、12.50Vというように、目標濃度(目標濃度電圧)10.50Vより大きいときは、希釈倍率を設定し、測定試料4の調整を行うのである。
【0024】
具体的には、開閉弁12を1〜2秒程度開いて分散バス1内の測定試料4の一部を排出した後、この排出量に等しい分散媒4bを分散媒貯留槽9から分散バス1に供給して希釈するのである。このとき、分散剤を適宜量供給してもよい。その後、前記(2)に記載した手法により、粒子4aおよび分散媒4bよりなる測定試料4を循環流路3を循環させることにより、十分に攪拌混合された測定試料4とする。
【0025】
そして、ステップS3に示すように、測定試料4の濃度を再度測定するのである。
【0026】
以下、測定試料4の濃度が目標濃度になるまで、上記作業を繰り返す。なお、測定試料4の濃度が目標濃度よりも小さい場合、粒子4aを分散バス1に加えるようにすればよい。また、目標濃度として、±の多少の許容範囲を設けておき、測定濃度がこの目標濃度の許容範囲内に入った場合に、粒径分布測定に移行するようにしてもよい。
【0027】
上述のように、この発明の動的光散乱式粒径分布測定装置においては、粒径分布測定に先立って、測定試料4の濃度を散乱光強度に基づいて確認し、試料濃度が測定可能範囲内にあるか否かを確認しながら希釈しているので、希釈しすぎになったり希釈不足を生ずることがない。そして、測定試料4が所定の濃度になった状態で粒径分布測定を行うことができるので、精度の高い測定結果を得ることができ、所定の粒径分布測定を効率よく行うことができる。
【0028】
特に、分散バス1と試料セル2とを循環流路3によって接続し、測定試料4を循環流路3内を繰り返し循環させることができるので、粒子4aと分散媒4bの混合攪拌が確実に行われるとともに、凝集による粒径の変化やそれに伴う散乱光強度の急激な変化を抑制することができる。
【0029】
なお、測定試料4の希釈方法として、濃度を定量的に2の倍数ずつ希釈するようにしてもよい。すなわち、分散バス1内の測定試料4の量を分散バス1に設けたセンサ(図示していない)によってモニターして、半量排水し、この排出量と同量の分散媒4bを供給して、2倍希釈し、この2倍希釈を回数から希釈倍率を簡単に求めるようにしてもよい。
【0030】
【発明の効果】
以上説明したように、この発明の動的光散乱式粒径分布測定装置においては、分散バスと試料セルとを循環流路で接続するとともに、粒径分布測定に先立って、記分散バスから試料セルに対して測定試料を供給し、この測定試料に対してレーザ光を照射し、そのとき得られる散乱光強度に基づいて前記測定試料の濃度を測定し、この測定された濃度を予め設定されている目標濃度と比較し、この比較結果に基づいて前記測定試料の濃度調整を行えるようにしているので、測定試料を希釈したい濃度にまで効率よく、自動的に(無人で)希釈することができる。そして、希釈による状態変化を防止しながら濃度の確認を行うことができ、したがって、最適な濃度状態で所望の粒径分布測定を行うことができ、精度の高い測定を効率よく行うことができる。
【図面の簡単な説明】
【図1】この発明の動的光散乱式粒径分布測定装置の一例を概略的に示す図である。
【図2】前記測定装置による粒径分布測定に先立って行われる測定試料の調整手順の一例を示すフローチャートである。
【図3】検出信号(光散乱データ)の一例を示す図である。
【図4】自動濃度調整を行うための画面の一例を示す図である。
【図5】自動濃度調整を行うための画面の一例を示す図である。
【図6】自動濃度調整を行うための画面の一例を示す図である。
【符号の説明】
1…分散バス、2…試料セル、3…循環流路、4…測定試料、4a…粒子、4b…分散媒、15…レーザ光。
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a dynamic light scattering type particle size distribution measuring apparatus.
[0002]
[Prior art]
One of the particle size distribution measuring methods uses a dynamic light scattering type particle size distribution measuring apparatus. This dynamic light scattering type particle size distribution measuring apparatus accommodates a measurement sample in which particles are dispersed in a dispersion medium in a sample cell, irradiates the measurement sample with laser light, and is scattered by the particles. In addition to conventional organic pigments and ceramics, recently, research and development of advanced materials such as abrasives for semiconductor wafers and hard disks, and inkjet printers. There is a growing need in the field.
[0003]
[Problems to be solved by the invention]
By the way, in the conventional dynamic light scattering type particle size distribution measuring apparatus, conventionally, so-called batch processing for supplying a measurement sample to a sample cell at each measurement is mainstream, and the measurable concentration of the measurement apparatus is very high. Therefore, it is necessary to dilute and use a low-concentration or high-concentration sample as a measurement sample, and thus a method of automatically diluting the sample to a measurable range of concentration may be employed. This seems to be due to the fact that, in the past, users using this type of apparatus had a lot of know-how and databases for measurement by dilution.
[0004]
In diluting the sample, conventionally, a method of quantitatively collecting the sample and injecting the diluted solution quantitatively so as to be 100 times or 1000 times the sample has been employed.
[0005]
[Problems to be solved by the invention]
However, the purpose of the above method is to adjust the dilution of the measurement sample to the measurable concentration of the measurement device, and the sample (particles) that easily aggregates will be measured while being affected by the aggregation due to dilution. In some cases, the measurement was performed in a state different from the actual use state of the particles. When the particle size distribution measurement is performed in the state where the aggregation occurs, the scattered light intensity greatly changes, or even if diluted, the scattered light intensity becomes weak, and predetermined measurement cannot be performed.
[0006]
The present invention has been made in consideration of the above-mentioned matters. The purpose of the present invention is to measure the sample concentration used for measurement before the particle size distribution measurement, and automatically dilute the sample until the desired measurement concentration is reached. Thus, it is an object to provide a dynamic light scattering type particle size distribution measuring apparatus capable of efficiently performing a predetermined particle size distribution measurement.
[0007]
[Means for Solving the Problems]
In order to achieve the above object, according to the present invention, a measurement sample in which particles are dispersed in a dispersion medium is accommodated in a sample cell, the laser beam is irradiated to the measurement sample, and the light scattered by the particles. In the dynamic light scattering type particle size distribution measuring apparatus for obtaining the particle size distribution based on the frequency intensity distribution of the dispersion medium, the dispersion medium and the particles are supplied, the dispersion bath for dispersing the particles in the dispersion medium, and the Prior to particle size distribution measurement, the sample cell is connected to the sample cell through a circulation channel, and the sample sample is supplied from the dispersion bath to the sample cell, and the measurement sample is irradiated with laser light. The concentration of the measurement sample is measured based on the scattered light intensity, the measured concentration is compared with a preset target concentration, and the concentration of the measurement sample can be adjusted based on the comparison result. Yes.
[0008]
In the dynamic light scattering particle size distribution measuring apparatus, a sample to be measured can be automatically diluted to a concentration (or concentration range) to be diluted. Since the concentration can be confirmed while preventing the change in the state of the sample due to dilution, there is no possibility of overdilution or insufficient dilution.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described with reference to the drawings. 1 to 5 show one embodiment of the present invention. FIG. 1 schematically shows an example of a dynamic light scattering particle size distribution measuring apparatus according to the present invention. In this figure, 1 is a dispersion bath, 2 is a sample cell, and 1 and 2 are circulating. They are connected by a flow path 3.
[0010]
The dispersion bath 1 is composed of, for example, a cylindrical liquid tank, and mixes particles 4a as a measurement target sample with a dispersion medium 4b for dispersing the sample to form a measurement sample 4. An ultrasonic vibrator 5 that vibrates due to the above is provided to prevent the particles 4 a from aggregating in the dispersion bath 1.
[0011]
The sample cell 2 is a so-called flow cell, and has a sample inlet 2a formed at one end and a sample outlet 2b formed at the other end.
[0012]
The circulation channel 3 has one end connected to the bottom of the dispersion bath 1 and the other end connected to the sample inlet 2a of the sample cell 2, and one end connected to the sample outlet 2b of the sample cell 2. The other end is formed of a return pipe 3 b that opens into the distribution bus 1 at the upper part of the distribution bus 1.
[0013]
Explaining the configuration of the distribution bus 1 side, a three-way solenoid valve 6 and a circulation pump 7 are provided on the downstream side of the return pipe 3b, and the three-way solenoid valve 6 located on the more upstream side is the first one. The second ports 6a and 6b are connected to the return pipe 3b, respectively, and the dispersion medium storage tank 9 is connected to the third port 6c via the pipe 8. The three-way solenoid valve 6 is configured such that, for example, the ports 6b and 6c communicate with each other when the power is off, and the ports 6a and 6b communicate with each other when the power is on. Further, a particle supply hopper 10 for supplying separately weighed particles 4 a into the dispersion bath 1 and a dispersant supply pipe 11 for supplying a dispersant into the dispersion bath 1 are provided on the top of the dispersion bath 1. . Further, a drain pipe 13 having an on-off valve 12 is branched and connected to a portion of the forward pipe 3a close to the bottom of the distribution bus 1.
[0014]
As the dispersion medium 4b, for example, a liquid such as water (pure water), ethanol, or oil is used, and the dispersion medium 4b is properly used depending on the type of the particle 4a to be measured. Moreover, the said dispersing agent is what makes particles 4a disperse | distribute easily in the dispersion medium 4b, for example, repels particles, such as surfactant, and is supplied as needed.
[0015]
The configuration on the sample cell 2 side will be described. A laser light source 14 is provided on one side of the sample cell 2, and a laser beam from the laser light source 14 is provided in the optical path between the laser light source 14 and the sample cell 2. A lens 16 for collimating the light 15, a beam splitter 17, and a condenser lens 18 are provided in this order. The beam splitter 17 is provided with, for example, a hole through which the laser beam 15 passes in the center, and a reflection surface thereof is formed of a mirror formed in the direction of the sample cell 2, and the optical axis of the laser beam 15 emitted from the laser light source 14 and, for example, The laser beam 15 passing through the hole is bent at an appropriate angle of 90 ° or less with respect to the interference light 19 generated by the Doppler shift of the scattered light caused by the particles 4b in the sample cell 2. It is configured to reflect. The optical path of the interference light 19 reflected by the mirror 17 is provided with a lens 20 that collects the interference light 19 and a photodetector 21 that converts the interference light 19 into an electrical detection signal D (t). .
[0016]
A signal processing unit 22 amplifies the output D (t) of the photodetector 21 and converts it into a digital signal if necessary, and a detection signal D (t) output from the signal processing unit 23. ) To obtain a particle size distribution by data processing, a computer 25 for controlling various parts of the apparatus, and for performing various processes such as image processing for displaying the processing results in the CPU 24. A display device 26 for displaying processing results such as particle size distribution and various control screens is attached.
[0017]
Next, the operation of the dynamic light scattering particle size distribution measuring apparatus having the above configuration will be described with reference to FIGS. The dynamic light scattering particle size distribution measuring apparatus of this embodiment automatically performs the following operations according to a program built in the personal computer 25.
[0018]
(1) First, the on-off valve 12 is closed, and the weighed particles 4a and the dispersion medium 4b are put into the dispersion bath 1 (step S1 in FIG. 2). The dispersion medium 4b is supplied by supplying the appropriate amount of the dispersion medium 4b into the dispersion bus 1 by turning on the pump 7 for an appropriate time while the three-way solenoid valve 6 is off (the ports 6b and 6c are in communication). Is done. At this time, an appropriate amount of a dispersant may be added as necessary.
[0019]
(2) By turning on the three-way solenoid valve 6 and connecting the ports 6a and 6b, the circulation flow path 3 is opened, and by turning on the pump 7, the particles 4a and the dispersion medium 4b in the dispersion bath 1 are It circulates in the circulation channel 3 so as to return to the dispersion bath 1 through the forward tube 3a, the sample cell 2, the return tube 3b, the three-way solenoid valve 6 and the pump 7, whereby the particles 4a are dispersed in the dispersion medium 4b. Thus, the measurement sample 4 is sufficiently stirred and mixed (step S2 in FIG. 2). In this case, the ultrasonic vibrator 5 may be operated to prevent the particles 4 a from aggregating in the dispersion bath 1.
[0020]
(3) The measurement sample 4 is appropriately circulated, and after sufficiently stirring and mixing, with the pump 7 turned off, the laser light source 14 is turned on and the laser light 15 is sent to the measurement sample 4 in the sample cell 2. Irradiate. That is, the laser light 15 emitted from the laser light source 14 is condensed in the sample cell 2 through the collimating lens 16, the beam splitter 17 and the condensing lens 18. At this time, a part of the laser light passes through the cell wall surface, is dispersed in the dispersion medium 4b, hits the particles 4a that undergo Brownian motion, and laser light (scattered light) that is Doppler shifted by the Brownian motion is scattered. On the other hand, part of the laser light is scattered (non-scattered light) on the cell wall surface, and the laser light of the original frequency travels in the reverse direction. The scattered light and non-scattered light interfere with each other to become interference light, and are condensed on the photodetector 21 through the condenser lens 18, the beam splitter 17, and the lens 20.
[0021]
The interference light is converted into an electrical detection signal D (t) by the photodetector 21, appropriately processed by the signal processing unit 23, and digitized light scattering data is taken into the CPU 24. As shown in FIG. 3, the light scattering data has an amplitude Am corresponding to the concentration of the measurement sample 4, and the concentration (measurement concentration) of the measurement sample 4 can be obtained based on the amplitude Am ( Step S3 in FIG. The light scattering data may be fast Fourier transformed in the CPU 24 to obtain a power spectrum, and the particle size distribution state of the particles 4a may be obtained based on the power spectrum.
[0022]
Then, in the personal computer 25, the person in charge of measurement sets the target concentration (voltage value) using the screen shown in FIG. FIG. 4 shows an example of a screen on the display device 26 when performing automatic density adjustment. In this example, the voltage value representing the target density is 12.50V. Then, the measured density is compared with the target density (step S4 in FIG. 2). Here, as shown in FIG. 5, when the measured concentration (measured concentration voltage) matches the target concentration (target concentration voltage), the adjustment of the measured sample concentration is completed (step S5 in FIG. 2). ), Shift to particle size distribution measurement. In this particle size distribution measurement, as described in the above (3), the laser light source 14 is turned on and the measurement sample 4 in the sample cell 2 is irradiated with the laser light 15 and scattered by the particles 4a obtained at that time. The particle size distribution may be obtained based on the frequency intensity distribution of the emitted light.
[0023]
On the other hand, when the measured density does not match the target density, it is necessary to return to step S2 and further adjust the density of the measurement sample 4 as shown in FIG. That is, when the measured concentration (measured concentration voltage) is larger than the target concentration (target concentration voltage) 10.50 V, for example, 12.50 V as shown in the screen example of FIG. The measurement sample 4 is adjusted.
[0024]
Specifically, after opening the on-off valve 12 for about 1 to 2 seconds and discharging a part of the measurement sample 4 in the dispersion bath 1, the dispersion medium 4 b equal to the discharge amount is transferred from the dispersion medium storage tank 9 to the dispersion bath 1. It is supplied to and diluted. At this time, an appropriate amount of the dispersant may be supplied. Thereafter, the measurement sample 4 composed of the particles 4a and the dispersion medium 4b is circulated through the circulation channel 3 by the method described in (2) above, thereby obtaining the measurement sample 4 which is sufficiently stirred and mixed.
[0025]
Then, as shown in step S3, the concentration of the measurement sample 4 is measured again.
[0026]
Thereafter, the above operation is repeated until the concentration of the measurement sample 4 reaches the target concentration. When the concentration of the measurement sample 4 is smaller than the target concentration, the particles 4a may be added to the dispersion bath 1. Further, as the target density, a slight tolerance range of ± may be provided, and when the measured density falls within the tolerance range of the target density, the process may be shifted to the particle size distribution measurement.
[0027]
As described above, in the dynamic light scattering particle size distribution measuring apparatus of the present invention, prior to the particle size distribution measurement, the concentration of the measurement sample 4 is confirmed based on the scattered light intensity, and the sample concentration can be measured. Since it is diluted while checking whether or not it is within the range, there is no possibility of overdilution or insufficient dilution. Since the particle size distribution measurement can be performed in a state where the measurement sample 4 has a predetermined concentration, a highly accurate measurement result can be obtained, and the predetermined particle size distribution measurement can be performed efficiently.
[0028]
In particular, since the dispersion bath 1 and the sample cell 2 are connected by the circulation flow path 3, and the measurement sample 4 can be repeatedly circulated in the circulation flow path 3, the mixing and stirring of the particles 4a and the dispersion medium 4b can be performed reliably. In addition, it is possible to suppress a change in particle diameter due to aggregation and a sudden change in the intensity of scattered light associated therewith.
[0029]
As a method for diluting the measurement sample 4, the concentration may be quantitatively diluted by a multiple of 2. That is, the amount of the measurement sample 4 in the dispersion bath 1 is monitored by a sensor (not shown) provided in the dispersion bath 1, half the amount is drained, and the same amount of the dispersion medium 4b as this discharge amount is supplied, It is also possible to dilute two times and simply determine the dilution factor from the number of times this two-fold dilution.
[0030]
【The invention's effect】
As described above, in the dynamic light scattering particle size distribution measuring apparatus of the present invention, the dispersion bath and the sample cell are connected by the circulation flow path, and the sample from the dispersion bath is measured prior to the particle size distribution measurement. Supply a measurement sample to the cell, irradiate the measurement sample with laser light, measure the concentration of the measurement sample based on the intensity of scattered light obtained at that time, and set the measured concentration in advance. Since the concentration of the measurement sample can be adjusted based on the comparison result, it is possible to efficiently and automatically (unattended) diluting the measurement sample to the desired concentration. it can. Then, the concentration can be confirmed while preventing a change in state due to dilution. Therefore, a desired particle size distribution measurement can be performed in an optimum concentration state, and a highly accurate measurement can be performed efficiently.
[Brief description of the drawings]
FIG. 1 is a diagram schematically showing an example of a dynamic light scattering particle size distribution measuring apparatus according to the present invention.
FIG. 2 is a flowchart illustrating an example of a procedure for adjusting a measurement sample performed prior to particle size distribution measurement by the measurement apparatus.
FIG. 3 is a diagram illustrating an example of a detection signal (light scattering data).
FIG. 4 is a diagram illustrating an example of a screen for performing automatic density adjustment.
FIG. 5 is a diagram illustrating an example of a screen for performing automatic density adjustment.
FIG. 6 is a diagram illustrating an example of a screen for performing automatic density adjustment.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Dispersion bath, 2 ... Sample cell, 3 ... Circulation flow path, 4 ... Measurement sample, 4a ... Particle, 4b ... Dispersion medium, 15 ... Laser beam.

Claims (1)

試料セル内に、分散媒中に粒子を分散させた測定試料を収容し、この測定試料に対してレーザ光を照射し、前記粒子により散乱された光の周波数強度分布に基づいて粒径分布を求めるようにした動的光散乱式粒径分布測定装置において、前記分散媒と粒子が供給され、分散媒中に粒子を分散させるための分散バスと前記試料セルとを循環流路で接続するとともに、粒径分布測定に先立って、前記分散バスから試料セルに対して測定試料を供給し、この測定試料に対してレーザ光を照射し、そのとき得られる散乱光強度に基づいて前記測定試料の濃度を測定し、この測定された濃度を予め設定されている目標濃度と比較し、この比較結果に基づいて前記測定試料の濃度調整を行えるようにしたことを特徴とする動的光散乱式粒径分布測定装置。A measurement sample in which particles are dispersed in a dispersion medium is accommodated in a sample cell, laser light is irradiated to the measurement sample, and the particle size distribution is determined based on the frequency intensity distribution of the light scattered by the particles. In the dynamic light scattering type particle size distribution measuring apparatus to be obtained, the dispersion medium and the particles are supplied, and a dispersion bath for dispersing the particles in the dispersion medium and the sample cell are connected by a circulation channel. Prior to the particle size distribution measurement, a measurement sample is supplied from the dispersion bath to the sample cell, the laser beam is irradiated to the measurement sample, and the measurement sample is measured based on the scattered light intensity obtained at that time. A dynamic light scattering type particle characterized in that the concentration is measured, the measured concentration is compared with a preset target concentration, and the concentration of the measurement sample can be adjusted based on the comparison result. Diameter distribution measuring device.
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