JP4359906B2 - Rotating brush for cleaning - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a rotary brush suitable for precision cleaning in the manufacturing process of electronic parts such as articles requiring extremely high surface accuracy and cleanliness, such as silicon wafers, photomasks, magnetic disk substrates, and glass substrates for liquid crystals. The present invention relates to a rotating brush suitable for scrub cleaning.
[0002]
[Prior art]
In recent years, in the electronics industry, the precision of various parts has been dramatically improved, as represented by, for example, the degree of integration of silicon wafers and the recording density of magnetic disks. The demand for cleanliness is also increasing. In particular, since chemical contamination and adhered particles on the surface of a component have a great influence on product yield and operational reliability, precision cleaning in the manufacturing process is very important.
[0003]
As a conventional precision cleaning method, a wet brush scrub method is known. The brush scrub method applies friction cleaning by pressing a rotating brush against an object to be cleaned while supplying water or other cleaning liquid. The structure of the device is simple, the cleaning cost is low, and excellent cleaning power is demonstrated. Therefore, it is widely used.
[0004]
The brush used for brush scrub cleaning includes a roller type and a cup type. The roller type brush makes line contact with the object to be cleaned, while the cup type brush makes surface contact with the object to be cleaned. For this reason, the cup-type brush has an advantage that it has a large contact area with the object to be cleaned and less cleaning spots than the roller type.
[0005]
As cup-type brushes, those in which a large number of synthetic fiber monofilaments are implanted or non-woven fabrics are generally used on the disk surface of the brush body.
[0006]
However, the cup-type brush using synthetic fiber monofilament or non-woven fabric as a contact portion with the object to be cleaned causes new problems such as damage to the surface of the object to be cleaned due to the rigidity of the fiber, contamination due to fiber dropping, etc. There was a fear.
[0007]
On the other hand, a cleaning rotary brush using a cylindrical protrusion-like polyvinyl acetal (hereinafter abbreviated as PVAt) type porous elastic body as a contact portion with an object to be cleaned has been proposed (Japanese Utility Model Publication No. 64-6953). (See the publication). The PVAt porous elastic body is excellent in water retention and abrasion resistance, and has a characteristic of exhibiting an appropriate flexibility by containing water. Accordingly, the cleaning rotary brush using the PVAt-based porous elastic body is suitable for precision cleaning of electronic parts because it hardly damages the object to be cleaned and has excellent durability.
[0008]
[Problems to be solved by the invention]
Here, in the cup-type brush, dirt and particles scraped from the surface of the object to be cleaned move to the outer peripheral side of the object to be cleaned together with the cleaning waste liquid after use, and finally discharged to the outside of the system. Is done.
[0009]
However, the conventional rotary brush using the PVAt porous elastic body is configured to take into account the flow of cleaning waste liquid on the surface of the object to be cleaned, but sufficiently copes with the recent increase in demand for precision cleaning. It is hard to say that it is possible. That is, there is a possibility that the cleaning waste liquid containing dirt and particles will unnecessarily stay on the surface of the object to be cleaned, and the surface of the object to be cleaned may be recontaminated by the dirt and particles that stay for a long time. It is desired to further reduce the occurrence of such recontamination by discharging dirt etc. scraped off from the system more quickly.
[0010]
In addition, when the staying particles are hard substances such as abrasive grains, if the staying particles are strongly pressed against the surface of the object to be cleaned, the surface of the object to be cleaned may be scratched by the particles. In the above conventional rotating brush, the PVAt porous elastic body that comes into contact with the surface of the object to be cleaned has flexibility, so that such inconvenience has been solved to some extent, but the demand for precision cleaning in recent years has increased. It cannot be said that it can be sufficiently dealt with, and from this point of view, it is desired to quickly discharge the staying particles and the like out of the system.
[0011]
The present invention has been made in view of the above-described circumstances, and can quickly remove dirt and the like scraped off from an object to be cleaned out of the system. It is for the purpose of provision.
[0012]
[Means for Solving the Problems]
In order to achieve the above object, the cleaning rotary brush according to the present invention has a hard plate-like base that rotates to face the portion to be cleaned, and a sheet portion that is disposed on the work surface of the base , At the periphery of the sheet portion, a mounting portion is provided that partitions a fitting recess into which the periphery of the base is fitted with the back surface of the sheet portion, and a cleaning portion projects from the front surface of the sheet portion. The top of the cleaning part rotates in a substantially coplanar plane and contacts the part to be cleaned, and the sheet part and the cleaning part are integrally formed of a polyvinyl acetal porous elastic body, In a state where the peripheral edge of the base is fitted in the fitting recess, the sheet portion is held by the base by its own elastic force, and relative rotation of the sheet portion with respect to the work surface is suppressed, and the cleaning portion Is the inner reference point on the rotation center side of the seat A plurality of first ridge-shaped protrusions that are arranged sequentially one by one to the plurality of first virtual curved line extending to the outer reference points of the peripheral side of the seat portion, the inner reference of the first virtual curved line A plurality of second ridges continuously arranged one by one on a plurality of second virtual curved lines extending from an inner reference point farther from the rotation center than the point to an outer reference point close to the periphery of the sheet portion and a Jo projection, the length of the longitudinal direction along said imaginary curved line of the ridged projections may be formed larger than the length in the width direction of該畝shaped protrusion, said first and second virtual Gulf The curved line is a rotating brush for cleaning that is curved and alternately arranged so as to bulge forward in the rotational direction of the base ,
The straight line passing through the arbitrary point on the first and second virtual curved lines and the rotation center, and the tangent line of the first and second virtual curved lines at the arbitrary point are the arbitrary point from the rotational center. As the distance increases, the tangent line of the first and second imaginary curved lines is set so as to be gradually inclined backward in the rotational direction at a crossing angle in the range of 0 ° to 45 ° with respect to the straight line. It is said.
[0013]
When cleaning the portion to be cleaned using the cleaning rotary brush having the above-described configuration, the hook-shaped protrusion that rotates at a high speed by the rotating shaft is pressed against the portion to be cleaned, and water or other cleaning liquid is supplied onto the portion to be cleaned. Thereby, the to-be-cleaned part is satisfactorily cleaned by the PVAt porous elastic body. The dirt and particles scraped off from the part to be cleaned move to the outer peripheral side together with the used cleaning waste liquid, and are finally discharged out of the system.
[0014]
At this time, since the hook-shaped protrusion continuously extends from the inner reference point on the rotation center side of the sheet portion to the outer reference point on the peripheral side, cleaning after use including dirt and particles scraped off from the cleaned portion The waste liquid receives a centrifugal force and is guided to the hook-shaped projections, and is well guided to the outer reference point. As a result, the cleaning waste liquid is quickly discharged out of the system, and the residence time of dirt and particles is remarkably reduced.
[0015]
In particular, a plurality of first virtual curved lines in which a plurality of first hook-shaped protrusions curved so as to bulge forward in the rotation direction of the base are arranged one by one, and a plurality of second hook-shaped protrusions In a plurality of second imaginary curve lines in which the protrusions are continuously arranged one by one, a straight line passing through an arbitrary point on the first and second imaginary curve lines and the rotation center, and the first at the arbitrary point And the tangent line of the second virtual curve line is a crossover in which the tangent line of the first and second virtual curve lines is in the range of 0 ° or more and 45 ° or less with respect to the straight line as the arbitrary point moves away from the rotation center. The cleaning waste liquid is smoothly and efficiently guided by the hook-shaped protrusions by being set so as to be gradually inclined to the rear in the rotation direction at an angle. Comparing the center side and the peripheral side of the sheet part, the relative speed with respect to dirt and the like adhering to the surface of the object to be cleaned is small on the central side and large on the peripheral side. Further, the amount of inclination of the first and second hook-shaped protrusions from the radial direction passing through the center is small on the center side and large on the peripheral side. Here, the relationship between the brushing performance for scrubbing dirt on the surface of the object to be cleaned and the relative speed with respect to the dirt etc. tends to improve the brushing performance as the relative speed increases. On the other hand, the relationship between the brushing performance and the amount of inclination from the radial direction tends to improve the brushing performance as the amount of inclination decreases. For this reason, the influence by the relative speed and the influence by the tilt amount on the brushing performance are satisfactorily offset between the center side and the peripheral side. Therefore, substantially the same brushing effect can be obtained in the entire area of the sheet portion 3 by the hook-shaped protrusions arranged in a balanced manner.
[0016]
Further, in the above configuration, only the first virtual curve line exists in the central portion of the sheet portion having a small area, and both the first and second virtual curve lines exist in the outer peripheral portion of the sheet portion having a large area. In addition, since the first and second virtual curved lines are alternately arranged, the hook-shaped protrusions are arranged in a well-balanced manner so that a sufficient flow path for the cleaning waste liquid is ensured in the entire area of the sheet portion.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to FIGS.
[0018]
1 is a plan view of a cleaning rotary brush according to the first embodiment, FIG. 2 is a cross-sectional view taken along the line AA in FIG. 1, FIG. 3 is a plan view in the direction of arrow B in FIG. Sectional drawing which shows the state which removed from the base, FIG. 5 is the principal part enlarged view of FIG.
[0019]
As shown in FIGS. 1 and 2, the cleaning rotary brush 1 includes a thin disc-shaped sheet portion 3 and a plurality of first and second cleaning portions protruding from the surface 3 a of the sheet portion 3. a ridge-shaped projections 5 and 7, and a mounting portion 9 provided over the entire circumference in the peripheral edge 3 c of the seat portion 3. The same number of first hook-like protrusions 5 and second hook-like protrusions 7 are provided (six in this embodiment). The sheet part 3, the hook-shaped protrusions 5 and 7, and the mounting part 9 are integrally formed of a polyvinyl acetal (PVAt) porous elastic body that has elasticity in a water-containing state.
[0020]
The mounting portion 9 protrudes from the peripheral edge 3 c of the sheet portion 3 to the upper side of the back surface 3 b and bends and extends toward the center 11 of the sheet portion 3. That is, the vicinity of the peripheral edge 3 c of the seat portion 3 and the mounting portion 9 form a substantially U-shaped cross section, and a bag-like fitting recess 15 is defined between the back surface 3 b of the seat portion 3 and the mounting portion 9. The
[0021]
In the fitting recess 15, a peripheral edge portion 13 b of a metal or resin hard base 13 formed in a substantially disc shape is fitted. As shown in FIG. 4, when the fitting recess 15 is removed from the peripheral edge portion 13 b of the base 13, the inner diameter Ri of the fitting recess 15 is slightly smaller than the outer diameter Ro (see FIG. 2) of the base 13. The sheet portion 3 has a diameter and is formed in a curved plate shape whose central portion is recessed toward the back surface 3b. As shown in FIG. 2, in the mounted state in which the peripheral edge portion 13 a of the base 13 is fitted in the fitting recess 15, the sheet portion 3 slightly extends as a whole, and the rotary brush 1 is applied to the base 13 by its own elastic force. The relative rotation of the sheet portion 3 with respect to the work surface 13a is suppressed. Moreover, the sheet | seat part 3 covers the surface (work surface) 13a of the base 13 in the contact | adherence state, and is maintained in the substantially planar shape along the work surface 3a. Further, the center 11 of the sheet portion 3 substantially coincides with the center of the base 13.
[0022]
The base 13 is fixed to the rotating shaft 17 and rotates together with the rotating shaft 17. The center of the base 13 and the rotation center of the rotating shaft 17 are substantially coincident. Therefore, the center 11 of the sheet portion 3 substantially coincides with the rotation center of the rotation shaft 17 in a state where the brush 1 is mounted on the base 13. The work surface 13a of the base 3 is positioned to face the surface 21 to be cleaned.
[0023]
The first hook-like protrusions 5 are a plurality (six) of first (first) protrusions extending from an inner reference point 31a close to the center 11 (rotation center of the base 13) 11 to an outer reference point 31b close to the peripheral edge 3c. Each one is continuously arranged on the virtual bending line 31. The second hook-like protrusions 7 are respectively formed on a plurality (six) second virtual curved lines 33 extending from the inner reference point 33a on the center 11 side of the sheet portion 3 to the outer reference point 33b adjacent to the peripheral edge 3c. One by one is arranged continuously.
[0024]
The first and second virtual curved lines 31 and 33 have the same radius of curvature Ra, and are alternately arranged on a radial arc 23 that passes through the center 11 and divides the periphery of the center 11 into 12 equal parts. Further, all the virtual curves 31 and 33 are inclined backward in the rotation direction C of the base portion 3 and bulge forward in the rotation direction C.
[0025]
That is, the first and second hook-shaped protrusions 5 and 7 extend from the outer reference points 31b and 33b on the peripheral edge 3c side of the seat portion 3 to the inner reference points 31a and 31b on the center 11 side, and forward in the rotation direction C. It has a curved shape that curves so as to bulge and tilts backward in the rotation direction C.
[0026]
The inner reference points 31a of the first virtual curve line 31 are set at equal intervals on the circumference 25 around the center 1, and the inner reference points 33a of the second virtual curve line 33 are outside the inner reference point 31a. It is set at equal intervals on a circumference 27 around the center 1 located. That is, the inner reference point 33 a of the second virtual curved line 33 is farther from the center 11 than the inner reference point 31 a of the first virtual curved line 31.
[0027]
The hook-shaped protrusions 5 and 7 have a substantially oval shape in plan view, and are formed in a substantially semicircular cross section in the width direction and a substantially rectangular cross section in the longitudinal direction. The top part which contacts the to-be-cleaned object surface 21 is comprised.
[0028]
In each bowl-shaped protrusion 5, 7, the length in the longitudinal direction along the virtual curved lines 31, 33 (the length of the virtual curved line 31) L 1, L 2 is the width direction along the normal direction of the virtual curved line 31. Is formed to be larger than the lengths D1 and D2. Each of the hook-shaped protrusions 5 and 7 has substantially the same protruding height H, and the tops of the hook-shaped protrusions 5 and 7 are in contact with the surface 21 to be cleaned while rotating in substantially the same plane. In consideration of the cleaning effect, the lengths L1 and L2 in the longitudinal direction are preferably at least twice as long as the lengths D1 and D2 in the width direction (L1> 2 × D1, L2> 2 × D2). The lengths D1 and D2 are preferably in the range of 1/20 or more and 1/10 or less of the diameter R of the sheet portion 3, and the height H of the hook-shaped projections 5 and 7 is preferably not more than the length D1 in the width direction. However, they are not limited to these ranges.
[0029]
Further, if the area of the sheet portion 3 where the hook-like protrusions 5 and 7 that come into contact with the surface 21 to be cleaned are different from the area where the cleaning liquid flows, the cleaning effect is reduced. From such a viewpoint, the occupied area of the entire hook-shaped protrusions 5 and 7 with respect to the total area of the sheet portion 3 is preferably 20% or more and 60% or less, and more preferably 30% or more and 50% or less.
[0030]
As shown in FIG. 5, in the first and second virtual bending lines 31, 33, the lengths along the virtual bending lines 31, 33 between the inner reference points 31a, 33a and the outer reference points 31b, 33b ( The tangent lines 41 and 51 of the virtual curved lines 31 and 33 at the center points 31c and 33c that bisect the longitudinal lengths L1 and L2) of the hook-shaped protrusions 5 and 7 shown in FIG. It is inclined backward in the rotational direction C with respect to straight lines 43 and 53 passing through 31c and 33c. The crossing angles θ1 and θ4 between the straight lines 43 and 53 and the tangent lines 41 and 51 are good in the range of 0 ° to 45 °. In this embodiment, θ1 is set to about 16 ° and θ4 is set to about 21 °. ing.
[0031]
Further, in each of the virtual curved lines 31 and 33, the crossing angle between the straight line passing through the arbitrary point on the virtual curved lines 31 and 33 and the center 11 and the tangent line of the virtual curved lines 31 and 33 at the arbitrary point is the arbitrary point. As the distance from the center 11 increases, the angle changes so as to approach 90 °. The crossing angle is preferably changed in the range of 0 ° to 45 °. In the first virtual curved line 31 of the present embodiment, the crossing angle θ2 at the inner reference point 31a is about 4 °, the crossing angle θ1 at the center point 31c is about 16 ° as described above, and the crossing angle θ3 at the outer reference point 31b. Is set to be about 28 °. In the second virtual curved line 33, the crossing angle θ5 at the inner reference point 33a is about 14 °, the crossing angle θ4 at the center point 33c is about 21 ° as described above, and The crossing angle θ6 at the reference point 33b is set to be about 28 °. That is, the hook-shaped protrusions 31 and 33 are arranged so as to be gradually inclined from the radial direction passing through the center 11 to the rear in the rotation direction C as it goes from the center 11 to the peripheral edge 3c.
[0032]
As a method for obtaining a PVAt porous elastic body, for example, one or more polyvinyl alcohols having an average polymerization degree of 300 to 2000 and a saponification degree of 80% or more are mixed to form an aqueous solution, and aldehydes and catalysts as a crosslinking agent. There can be mentioned a method of adding mineral acids and starch as a pore-forming material, injecting a mixed solution thereof into a predetermined mold, reacting at 50 to 80 ° C., and removing from the mold. It is not limited to. Further, after the reaction is completed, the PVAt porous elastic body taken out from the mold is used after being washed with pure water from which impurities such as particles, ions, and organic substances dissolved and suspended in water are removed.
[0033]
The PVAt porous elastic body obtained by the above method is cured in a dry state and softened in a wet state. Moreover, it is excellent in water absorption and water retention, exhibits favorable flexibility when wet and moderate rebound resilience, and is excellent in abrasion resistance.
[0034]
Further, the PVAt porous elastic body forming the rotating brush 1 has a porosity of 80% to 95%, an average pore diameter of 30 μm to 250 μm, and a moisture content of 250% to 400% with respect to the dry weight. It is preferable that the 30% compressive stress in such a state (hereinafter, this state is referred to as an appropriate water-containing state) is 15 g / cm ² or more and 150 g / cm ² or less.
[0035]
This is because if the porosity is less than 80%, the flexibility when wet is insufficient, and if the porosity is more than 95%, the practical strength is poor and none is suitable for cleaning applications. Further, if the average pore diameter is smaller than 30 μm, the elasticity when wet is insufficient and a sufficient cleaning effect cannot be obtained, and if it exceeds 250 μm, the eyes are too rough and the effect of precision cleaning is likely to be reduced. Because.
[0036]
The porosity here refers to a PVAT-based porous material that has been sufficiently dried by a dryer, measured by a dry automatic densimeter, and from the apparent volume and true volume of the rectangular parallelepiped, This is a calculated value.
[0037]
Porosity (%) = (apparent volume−true volume) / apparent volume × 100 (1)
The average pore diameter is a value determined by mercury porosimetry using a mercury porosimeter manufactured by PORUS MATERIALS, INC.
[0038]
Furthermore, if the 30% compressive stress in a proper water content is less than 15 g / cm ^2, it is too soft to obtain an appropriate elasticity, and if it exceeds 150 g / cm ² , it is too hard to obtain an appropriate elasticity. It is.
[0039]
The 30% compressive stress here refers to a PVAt porous elastic body that is in an appropriate water content state set on a digital load measuring device so that the entire end face is loaded, and the load when 30% is crushed is measured. , And obtained by dividing the load by the area of the end face.
[0040]
Next, the operation of this embodiment will be described.
[0041]
When the surface 21 to be cleaned is cleaned by the rotating brush 1, the hook-shaped protrusions 5 and 7 that rotate at high speed by the rotary shaft 17 are pressed against the surface 21 to be cleaned, and water or other cleaning liquid is placed on the surface 21 to be cleaned. Supply. Thus, the entire surface 21 of the object to be cleaned is satisfactorily cleaned by the hook-like projections 5 and 7 made of PVAt porous elastic body. Then, the dirt and particles scraped off from the surface 21 to be cleaned move to the outer peripheral side of the surface 21 to be cleaned together with the cleaning waste liquid after use, and finally outside the system (outside the surface 21 to be cleaned). ).
[0042]
At this time, the hook-shaped protrusions 5 and 7 continuously extend from the inner reference points 31a and 33a on the center 11 side of the sheet portion 3 to the outer reference points 31b and 33b on the peripheral side. The used cleaning waste liquid containing the scraped dirt and particles is guided to the hook-like projections 5 and 7 by the centrifugal force and is guided well to the outer reference points 31b and 33b. As a result, the cleaning waste liquid is quickly discharged out of the system from the surface 21 to be cleaned, and the residence time of dirt and particles is remarkably reduced.
[0043]
In particular, the hook-shaped protrusions 5 and 7 are curved so as to bulge forward in the rotation direction C, and the tangent lines 41 and 51 at the center points 31c and 33c of the virtual bending lines 31 and 33 are the center 11 and the center points 31c, Since the liquid is inclined backward in the rotational direction C with respect to the straight lines 43 and 53 passing through 33c, the cleaning waste liquid is smoothly and efficiently guided by the hook-shaped protrusions 5 and 7.
[0044]
In addition, only the first virtual curved line 31 (the first hook-like protrusion 5) exists in the central portion of the sheet portion 3 having a small area (the portion inside the circle passing through the inner reference point 33a). On the outer peripheral portion of the wide sheet portion 3 (the portion outside the circle passing through the inner reference point 33a), the first and second virtual curved lines 31, 33 (first and second hook-like projections 5, 7) are provided. Since both are present and the first and second virtual curved lines 31 and 33 (the first and second hook-like protrusions 5 and 7) are alternately arranged, the cleaning waste liquid is disposed in the entire area of the sheet portion 3. The hook-shaped protrusions 5 and 7 are arranged in a well-balanced manner so as to ensure a sufficient flow path.
[0045]
Further, when comparing the center 11 side and the peripheral edge 3c side of the sheet portion 3, the relative speed with respect to dirt or the like adhering to the surface 21 to be cleaned is small on the central 11 side and large on the peripheral 3c side. Further, the inclination amount of the hook-like protrusions 5 and 7 from the radial direction passing through the center 11 is small on the center 11 side and large on the peripheral edge 3c side. Here, the relationship between the brushing performance for scrubbing dirt and the like on the surface 21 to be cleaned and the relative speed with respect to the dirt tends to improve the brushing performance as the relative speed increases. On the other hand, the relationship between the brushing performance and the amount of inclination from the radial direction tends to improve the brushing performance as the amount of inclination decreases. For this reason, the influence by the relative speed and the influence by the tilt amount on the brushing performance are satisfactorily offset between the center 11 side and the peripheral edge 3c side. Therefore, substantially the same brushing effect can be obtained in the entire area of the sheet portion 3 by the hook-like protrusions 5 and 7 arranged in a balanced manner.
[0046]
Further, the sheet portion 3 has a curved plate shape in which the central portion is recessed toward the back surface 3b side when the rotary brush 1 is detached from the base 13, and is attached to the base 13 along the work surface 3a of the base 13. It is maintained in a substantially flat shape. For this reason, the hook-shaped protrusions 5 and 7 are surely located in substantially the same plane.
[0047]
Therefore, it is possible to reliably prevent the occurrence of recontamination of the surface 21 to be cleaned due to dirt and particles in the cleaning waste liquid. Moreover, even when the staying particles are a hard substance such as abrasive grains, it is possible to more reliably prevent the occurrence of scratches on the surface 21 to be cleaned.
[0048]
In addition, since the mounting of the rotating brush 1 to the rotating shaft 17 is completed simply by fitting the peripheral edge portion 13b of the base 13 into the fitting recess 15, the removal and mounting work of the rotating brush 1 is carried out, particularly with a jig or the like. It can be done easily and quickly without any need.
[0049]
As described above, according to the rotating brush 1 according to the present embodiment, the dirt and the like scraped off from the surface 21 to be cleaned can be quickly discharged out of the system, and the rotating brush has further excellent cleaning efficiency. 1 can be used.
[0050]
The hook-shaped protrusions 5 and 7 may have a substantially rectangular shape in plan view, and may have a cross-section in the width direction on a polygon such as a triangle or a square and rounded corners. The cross section may be substantially trapezoidal. Moreover, you may provide a several hook-shaped protrusion continuously with respect to each virtual curved line 31 and 33. FIG. Furthermore, the length in the width direction of the hook-shaped protrusions may be changed according to the distance from the center 11. Further, the curvatures of the virtual bending lines 31 and 33 may be made different or changed.
[0051]
【The invention's effect】
As described above, according to the present invention, cleaning waste liquid after use containing dirt and particles scraped from the part to be cleaned is guided to the outer protrusions and guided well to the outer reference point. Waste liquid is quickly discharged out of the system, and the residence time of dirt and particles is remarkably reduced.
[0052]
Therefore, it is possible to reliably prevent the recontamination of the portion to be cleaned due to dirt and particles in the cleaning waste liquid. Moreover, even when the staying particles are a hard substance such as abrasive grains, it is possible to more reliably prevent the occurrence of scratches on the portion to be cleaned.
[0053]
[Brief description of the drawings]
FIG. 1 is a plan view of a cleaning rotary brush according to an embodiment of the present invention.
FIG. 2 is a cross-sectional view taken along the line AA of FIG.
FIG. 3 is a plan view taken in the direction of arrow B in FIG. 1;
4 is a cross-sectional view showing a state where the rotating brush of FIG. 2 is removed from the base.
FIG. 5 is an enlarged view of a main part of FIG. 1;
[0054]
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Rotating brush 3 Sheet | seat part 3a The surface 3b of a sheet | seat part The back surface 5 of a sheet | seat part 1st hook-shaped protrusion (washing | cleaning part)
7 Second hook-shaped protrusion (cleaning part)
9 Mounting part 11 Center of seat part (rotation center)
13 Base 13a Work surface 21 Surface of object to be cleaned (cleaned part)
3 Sheet part 31 1st virtual curve line 31a Inner reference point 31b Outer reference point 31c Center point 33 Second virtual curve line 33a Inner reference point 33b Outer reference point 33c Center point

Claims (1)

It has a hard plate-like base that rotates opposite to the part to be cleaned, and a sheet part that is arranged on the work surface of this base, and the peripheral part of the base is fitted to the peripheral part of the sheet part A mounting portion that divides the fitting recess between the back surface of the seat portion and a cleaning portion that protrudes on the surface of the seat portion, and the top portion of the cleaning portion rotates within a substantially coplanar plane. The sheet portion and the cleaning portion are integrally formed of a polyvinyl acetal porous elastic body, and the peripheral portion of the base is fitted in the fitting recess, The sheet portion is held on the base by its own elastic force, and relative rotation of the sheet portion with respect to the work surface is suppressed, and the cleaning portion is moved from the inner reference point on the rotation center side of the sheet portion to the sheet portion. a plurality of first extending to outer reference points of the peripheral side of the A plurality of first ridge-shaped protrusions which are successively arranged one on each virtual curved line, from the inner reference point away from the center of rotation than the inner reference point of the first virtual curved line of the seat A plurality of second saddle-shaped protrusions continuously arranged one by one on a plurality of second virtual curved lines extending to an outer reference point adjacent to the periphery, and the virtual curved lines of the respective saddle-shaped protrusions The length in the longitudinal direction is formed to be larger than the length in the width direction of the hook-shaped protrusion, and the first and second virtual curved lines are curved so as to bulge forward in the rotational direction of the base. Rotating brushes for cleaning arranged alternately,
The straight line passing through the arbitrary point on the first and second virtual curved lines and the rotation center, and the tangent line of the first and second virtual curved lines at the arbitrary point are the arbitrary point from the rotational center. As the distance increases, the tangent line of the first and second imaginary curved lines is set so as to be gradually inclined backward in the rotational direction at a crossing angle in the range of 0 ° to 45 ° with respect to the straight line. Rotating brush for cleaning.

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