JP4365945B2 - Method for reducing color unevenness of color filter - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
  The present invention uses an ink jet recording system.Color filterApply ink onto the substrate, MosquitoError filterReduced uneven coloringDirectionTo the lawRelated.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, an ink jet recording method is an output unit of an information processing system, for example, a printer as an output terminal of a copying machine, a facsimile, an electronic typewriter, a word processor, a workstation, a personal computer, a host computer, an optical disk device, a video device. It is used as a recording method for a handy or portable printer included in the above.
[0003]
This ink jet method applies ink to a colored portion from a nozzle (also referred to as an ejection port) and records characters, figures, and the like, and has excellent advantages as a means for outputting a high-definition image and recording at high speed. . A recording apparatus (inkjet recording apparatus) to which the method is applied is a non-impact type recording apparatus that has low noise, that it is easy to record a color image by using multi-colored ink, and that the main body of the apparatus is It has features such as easy miniaturization and high image density, and is rapidly spreading in recent years.
[0004]
In recent years, with the development of personal computers, particularly portable personal computers, the demand for liquid crystal displays, particularly color liquid crystal displays, has been increasing. However, for further popularization, it is necessary to reduce the cost of the liquid crystal display. In particular, there is an increasing demand for cost reduction of a color filter having a high specific gravity. Conventionally, various methods have been tried to meet the above requirements while satisfying the required characteristics of the color filter, but no method has been established yet to satisfy all the required characteristics. Each method will be described below.
[0005]
The first method is a staining method. In the dyeing method, a water-soluble polymer material, which is a dyeing material, is applied onto a glass substrate, patterned into a desired shape by a photolithography process, and then the resulting pattern is immersed in a dyeing bath and colored. Get the pattern. By repeating this three times, R (red), G (green), and B (blue) color filter layers are obtained.
[0006]
The second method is a pigment dispersion method, which is the most frequently used method in recent years. In this method, a photosensitive resin layer in which a pigment is dispersed is formed on a substrate, and a monochromatic pattern is obtained by patterning the photosensitive resin layer. Further, this process is repeated three times to form R, G, and B color filter layers.
[0007]
There is an electrodeposition method as a third method. In this method, a transparent electrode is patterned on a substrate and immersed in an electrodeposition coating solution containing a pigment, a resin, an electrolytic solution, etc., and the first color is electrodeposited. This process is repeated three times to separate R, G, and B, and then the resin is thermally cured to form a color filter layer.
[0008]
A fourth method is a printing method. In this method, a pigment is dispersed in a thermosetting resin, R, G, and B are separately applied by repeating printing three times, and then the color filter layer is formed by thermosetting the resin. In any method, a protective layer is generally formed on the color filter layer.
[0009]
The point common to these methods is that it is necessary to repeat the same process three times in order to color the three colors of R, G, and B, resulting in high costs. In addition, there is a problem that the yield decreases as the number of processes increases. Furthermore, the electrodeposition method is limited in the pattern shape that can be formed. Therefore, the current technology cannot be applied to an active matrix type (so-called TFT type) color liquid crystal display using TFTs (thin transistors). Further, since the printing method has poor resolution and smoothness, a fine pitch pattern cannot be formed.
[0010]
In order to make up for these disadvantages, an ink jet method is used in Japanese Patent Laid-Open Nos. 59-75205, 63-235901, 63-294503, or 1-2217302. A method for manufacturing a color filter is described. Specifically, a method is described in which a light-shielding film is provided on a transparent substrate so as to have openings with a predetermined regularity, and ink is applied to the openings to form colored portions. .
[0011]
The color filter manufacturing method using the ink jet method can reduce the material cost because a colored portion is formed only in a necessary portion, and furthermore, since the three colors can be colored simultaneously, the manufacturing process is short and waste It is hard to be affected by. In addition, low material cost and high yield can be expected because the cost of the manufacturing apparatus can be suppressed, and it is possible to manufacture a color filter at a lower cost than other manufacturing methods. .
[0012]
[Problems to be solved by the invention]
Unlike a normal printer, an inkjet color filter manufacturing apparatus applies a predetermined amount of ink to a predetermined position on a transparent substrate, so that ink landing accuracy and color unevenness during coloring are the case of a general printer. Is required to have an accuracy that is almost an order of magnitude higher.
[0013]
For this reason, in a normal ink jet printer, ink is applied while reciprocating the ink jet head to record an image, whereas in a color filter manufacturing apparatus, the ink jet head is fixed and a transparent substrate is used because of the required accuracy. Ink is applied while scanning in the XY direction. In this apparatus, in order to keep the distance between the transparent substrate and the inkjet head constant, the transparent substrate is adsorbed on a highly accurate substrate chuck.
[0014]
However, an apparatus capable of coloring with higher accuracy in order to suppress uneven coloring has been desired.
[0015]
  The present inventionReducedColor filters that can produce color filtersReduced uneven coloringProviding a methodTheObjective.
[0017]
[Means for Solving the Problems]
  The present inventionOn substrate supportfixedColor filter substrateUpColoring areaTheColored by inkjet methodDoProcess andAnd heating the color filter substrate fixed on the substrate support table in this order.Having color filterReduced uneven coloringIn the method, the color filter substrateIs a glass substrate,The substrate supportBy sucking air from the multiple suction holesThe color filter substrateFixing the plurality of suction holesThe area of both0.03mm ² more than9mm²Of color filters characterized byReduced uneven coloringMethodIs.
[0019]
DETAILED DESCRIPTION OF THE INVENTION
The present inventor has found that the cause of the uneven coloring of the color filter manufactured by the ink jet method is the structure of the substrate support that holds the substrate in the manufacturing apparatus, and has achieved the present invention.
[0020]
First, the manufacturing method of the color filter using the manufacturing apparatus of this invention is demonstrated. There are roughly two types of color filter manufacturing methods according to the present invention. One of them is a method of forming a black matrix made of a black resin or the like on a transparent substrate and applying an ink containing a resin component and a coloring material to an opening of the black matrix from an inkjet recording apparatus to form a colored portion. It is. The other is to form a resin composition layer on the transparent substrate where the ink absorption is reduced or increased by light irradiation or light irradiation and heat treatment, and pattern exposure to form a portion with high and low ink absorption. Then, a colored portion is formed by applying ink to the colored portion from an ink jet recording apparatus and coloring the colored portion. Each step of the former method is shown in FIG. 1, and each step of the latter method is shown in FIG.
[0021]
In FIG. 1, (a) to (d) correspond to the following steps -a to d. In FIG. 1, 11 is a transparent substrate, 8 is a black matrix, 9 is ink, 17 is an ink jet recording apparatus, 18 is a colored portion, and 19 is a protective layer.
[0022]
Step-a
A partition wall is formed on the substrate 11. The partition wall is a member for avoiding color mixing between adjacent inks of different colors when ink is applied in step-b to be described later. In the step of FIG. 1, a black matrix 8 is also used as a light shielding layer. As the black matrix 8, a black pigment-containing resist is preferably used and patterned by a general photolithography method. The black matrix 8 is preferably provided with ink repellency in order to enhance the effect of preventing color mixing. Further, the thickness of the black matrix 8 is preferably 0.5 μm or more in consideration of the partition effect and the light shielding effect.
[0023]
Step-b
Using the ink jet recording apparatus 17, inks 9 of R, G, and B are applied so as to fill the openings of the black matrix 8. Since the ink used here forms a colored part by directly curing, a resin composition containing a coloring material and a resin that is cured by applying energy is preferably used.
[0024]
As the colorant, a direct dye, an acid dye, a reactive dye, a disperse dye, an oil-soluble dye, or the like is preferably used.
[0025]
Moreover, as resin hardened | cured by energy provision, what hardens | cures by heat, light, or combined use of heat and light, for example is preferable. Specifically, a combination of a known resin and a crosslinking agent can be used as the thermosetting resin. For example, a melamine resin, a hydroxyl group or carboxyl group-containing polymer and melamine, a hydroxyl group or carboxyl group-containing polymer and a polyfunctional epoxy compound, a hydroxyl group or carboxyl group-containing polymer as a fiber-reactive compound, an epoxy resin and a resole resin, an epoxy resin and an amine And epoxy resins and carboxylic acids or acid anhydrides and epoxy compounds. As the photocurable resin, a known photocurable resin, for example, a commercially available negative resist, is preferably used.
[0026]
Various solvents can be used for the ink. In particular, a mixed solvent of water and a water-soluble organic solvent is preferably used from the viewpoint of dischargeability when used in an inkjet method.
[0027]
In addition to the above components, surfactants, antifoaming agents, preservatives, etc. can be added to give desired properties as required, and commercially available water-soluble dyes can be added. You can also.
[0028]
Step-c
The ink 9 applied to the opening of the black matrix 8 undergoes a drying process as necessary, and is cured by performing necessary processes such as light irradiation and heat treatment to form the colored part 18.
[0029]
Step-d
If necessary, a protective layer 19 is formed on the colored portion 18. The protective layer 19 is formed by a photocurable, thermosetting, or combined heat / light curable resin composition layer, or by vapor deposition, sputtering, or the like. A formed inorganic film or the like can be used. In any case, any color filter can be used as long as it has transparency as a color filter and can withstand the subsequent ITO forming process, alignment film forming process, and the like.
[0030]
FIG. 2 is a process diagram in the case of using an ink receiving layer of a type in which the resin composition is cured by light irradiation and the ink absorbability is lowered, and (a) to (f) in the figure are the following processes a to f. Corresponding to In the figure, 12 is a black matrix, 13 is an ink receiving layer, 14 is a photomask, 15 is a non-colored portion, 17 is an ink jet recording apparatus, 18 is a colored portion, and 19 is a protective layer. Each step will be described below.
[0031]
Step-a
A black matrix 12 is formed on the substrate 11. In the present invention, a glass substrate is generally used as the substrate, but the substrate is not limited to a glass substrate as long as it has necessary characteristics such as transparency and mechanical strength as a color filter.
[0032]
In the embodiment shown in FIG. 2, the black matrix 12 is formed on the substrate. The black matrix is formed on the ink receiving layer after forming the ink receiving layer 13 described later or after coloring the ink receiving layer 13. You may do it. As a forming method thereof, a method of forming a metal thin film by sputtering or vapor deposition and patterning by a photolithography process is general, but is not limited thereto.
[0033]
Step-b
The ink receiving layer 13 is formed on the substrate 11 by applying a resin composition that is cured by light irradiation or light irradiation and heat treatment to reduce the ink absorbability of the light irradiated portion, and is pre-baked as necessary. As the base resin of such a resin composition, acrylic resin, epoxy resin, amide resin or the like is used, but is not particularly limited thereto. In these resins, a photoinitiator (crosslinking agent) can be used in order to advance the crosslinking reaction by light or a combination of light and heat. As the photoinitiator, dichromate, bisazide compound, radical initiator, cationic initiator, anionic initiator and the like can be used. In order to further advance the crosslinking reaction, heat treatment may be performed after the light irradiation.
[0034]
The ink receiving layer 13 can be formed by any coating method such as spin coating, roll coating, bar coating, spray coating, dip coating, etc., and is not particularly limited.
[0035]
Step-c
By pattern exposure of the resin composition layer on the black matrix 12 using the photomask 14, the resin composition layer is cured to reduce ink absorbability, and the non-colored portion 15 is formed. By forming the non-colored portion 5 having low ink absorbability in the ink receiving layer 13, color mixing between adjacent colored portions is prevented.
[0036]
Step-d
Using the inkjet recording device 17, R, G, and B inks are applied between the non-colored portions 15 in accordance with a predetermined coloring pattern to form the colored portions 18. As the ink used for coloring, both pigment-based and pigment-based inks can be used, and both liquid inks and solid inks can be used. However, when water-based ink is used, the ink receiving layer 13 is made of a water-absorbing layer. It is preferable to form with a high resin composition. Furthermore, as an ink jet method, a bubble jet type using an electrothermal transducer as an energy generating element, a piezo jet type using a piezoelectric element, or the like can be used, and the coloring area and coloring pattern can be arbitrarily set. it can.
[0037]
Step-e
After drying the ink as necessary, the colored portion 18 is cured by irradiating the entire surface of the substrate with light. You may heat-process instead of light irradiation.
[0038]
Step-f
A protective layer 19 is formed as necessary. As the protective layer, a photo-curing type, thermo-curing type or photo-heat combined type resin layer, an inorganic film formed by vapor deposition, sputtering, etc. can be used, and it has transparency when used as a color filter, Any material that can withstand the subsequent ITO formation process, alignment film formation process, and the like can be used.
[0039]
In FIG. 2, an example in which a resin composition whose ink absorbability is reduced by light irradiation is used for the ink receiving layer is shown, but a case where ink absorbability is increased by light irradiation or light irradiation and heat treatment is used. In particular, the resin composition is preferably a system that utilizes a reaction by chemical amplification. As such a resin, one obtained by esterifying the hydroxyl group of a cellulose derivative such as hydroxypropyl cellulose or hydroxyethyl cellulose, or Those blocked by acetyl groups (eg, cellulose acetate-based compounds); Polymeric alcohols such as polyvinyl alcohol and derivatives thereof and those blocked by acetyl groups (eg, polyvinyl acetate) Compounds such as cresols; novolac trees such as cresol novolac , Those that have been blocked hydroxyl group of poly-para-hydroxy Ji Ren and their derivatives such as with trimethylsilyl groups and the like are used. When such a resin composition is used, a black matrix is used as a substitute for a photomask, and pattern exposure is performed from the back surface of the transparent substrate to increase the ink absorbency of the exposed portion, thereby forming a non-colored portion. You can also.
[0040]
Next, an example of the arrangement of the colored portions of the color filter of the present invention is shown in FIG. Each of the colored portions colored with R (red), G (green), and B (blue) inks is one filter element, and has a substantially rectangular shape. If the longitudinal direction of one pixel is the X direction and the direction perpendicular to the X direction is the Y direction, the filter elements are all the same size, for example, 150 μm × 60 μm, the pitch in the X direction is 300 μm, and the pitch in the Y direction. Is 100 μm. The filter elements of the same color are arranged in a straight line in the X direction, and the filter elements are arranged in the Y direction so that the colors of adjacent filter elements are different. For example, the number of filter elements is 480 in the X direction, 1920 in the Y direction (640 for each color), the screen size is 144 mm x 192 mm, and the diagonal length is 240 mm. It corresponds. The color filter of the present invention is not limited to the above arrangement and size.
[0041]
FIG. 4 shows the overall configuration of a color filter manufacturing apparatus according to the present invention that implements the above-described color filter manufacturing method. In the figure, 21 is a surface plate for mounting the device, 22 is a vibration isolator for supporting the surface plate 21 and blocking external vibrations, 23 is an XY stage that is provided on the surface plate 21 and performs a large stroke movement, Reference numeral 24 denotes a θ, Z, tilt stage for θ, Z, and tilt alignment mounted on the XY stage 23; 25, a transparent substrate mounted on the θ, Z, tilt stage 24; 26, an inkjet head; An optical system for detecting the alignment of the transparent substrate 21 in the X, Y, and θ directions, 28 is an optical system for detecting Z, and 29 is an optical system for detecting the landing position of ink applied by the inkjet head 26.
[0042]
In the above configuration, a dummy substrate is mounted for assembling the apparatus, and an evaluation pattern is drawn by the alignment detection system 27. Further, the XY stage 23 is moved, and the landing position is measured by the landing position detection system 29. As a result, the coordinates of the alignment detection system 27 and the coordinates of the landing position of the drawing head 26 can be accurately measured. This coordinate value does not change even when another substrate is mounted. Therefore, the coordinate value may be set when the system parameters change, such as when the apparatus is assembled or when the drawing head is replaced. Further, the landing position may be measured by another apparatus, and the measured value may be reproduced by the color filter manufacturing apparatus.
[0043]
Next, FIG. 5 shows a configuration in which the transparent substrate 5 is mounted on the stage. FIG. 5 is an enlarged view of the periphery of the transparent substrate 5 in FIG. 4, 31 is a Y stage for moving a large stroke, 32 is an X stage for moving a large stroke, and 34 is a substrate support for holding the transparent substrate 5. is there. The substrate support is made of a material such as aluminum or ceramic.
[0044]
A plurality of suction holes 4 are formed in the support surface 34a of the substrate support table 34 as shown in FIG. By sucking air from the suction holes 4, the transparent substrate 5 disposed on the support surface 34a can be reliably fixed. The transparent substrate 5 is placed on the support surface 34a by a hand (not shown) with a vertical drive mechanism or moved to another place. A cutout 3 is formed in the substrate support base 34 so that the hand and the substrate support base do not interfere when the hand carries the transparent substrate 5.
[0045]
A region 6 indicated by a broken line is a colored region where a colored portion of the color filter is formed. In the example shown in FIG. 6, two color filters are finally extracted.
[0046]
As shown in FIG. 7, a lift pin hole 7 may be provided in the substrate support base 35 so that a lift pin (not shown) protrudes from the hole 7. Since the lift pins protrude from the holes 7, the transparent substrate 5 can be separated from the support surface 35a and held by the hand. In FIG. 7, the suction holes formed in the substrate support base 35 are omitted.
[0047]
When the transparent substrate 5 is placed on the substrate support, the suction hole 4, the notch 3, or the lift pin hole 7 becomes a non-contact portion where nothing contacts the transparent substrate 5. When the area of the non-contact portion in the coloring region 6 is large, the coloring density is different between the portion where the transparent substrate 5 and the substrate support base 35 are in contact with the non-contact portion, and uneven coloring occurs. As a result of examining various areas of one non-contact part, the area of one non-contact part is 9 mm.² It has been found that the following can prevent the occurrence of coloring unevenness.
[0048]
Although the cause of uneven coloring is not clearly understood, heat is difficult to escape at the non-contact portion, and heat is easily escaped at the portion where the substrate 5 and the substrate support are in contact with each other. Seems to occur.
[0049]
A more preferable area of one non-contact portion in the colored region is 7.1 mm.² It is as follows. Also, if the suction hole area is too small, the substrate cannot be firmly fixed on the substrate support stand, so the area of one suction hole is 0.03 mm.² The above is preferable. It is preferable to arrange the suction holes irregularly rather than regularly. When the movement of the substrate support is slow, it is possible to use a substrate support without an adsorption hole.
[0050]
The substrate support table 36 shown in FIG. 8 has a notch 50 formed in a square of the substrate support table 36 in order to avoid interference with the substrate transfer hand. The cutout 50 is formed so as to be outside the colored region 6.
[0051]
The substrate support 37 shown in FIG. 9 is formed to have a width slightly smaller than that of the transparent substrate 5, and allows the transparent substrate 5 to be carried in and out by hand using a portion protruding from the substrate support 37. In this way, it is not necessary to form a notch.
[0052]
Next, an active matrix liquid crystal element using a color filter manufactured using the color filter manufacturing apparatus of the present invention will be described with reference to FIG. In FIG. 10, 41 is a common electrode, 42 is an alignment film, 43 is a substrate, 44 is a pixel electrode, 45 is an alignment film, and 46 is a liquid crystal compound.
[0053]
The liquid crystal element for color display is generally a color filter side substrate (11) and a counter substrate. It is formed by enclosing the liquid crystal compound 46 together with the TFT substrate (43). TFTs (not shown) and transparent pixel electrodes 44 are formed in a matrix inside one substrate of the liquid crystal element. In addition, a color filter layer is disposed inside the other substrate 11 so that the R, G, and B colored portions 18 are arranged at positions facing the pixel electrode 44, and a transparent common electrode 41 is disposed thereon. Is formed on one side. The black matrix 12 is normally formed on the color filter side, but in the BM on-array type liquid crystal element, it is formed on the TFT substrate side. Furthermore, alignment films 42 and 45 are formed in the planes of both substrates, and liquid crystal molecules can be aligned in a certain direction by rubbing them.
[0054]
Polarizing plates (not shown) are bonded to the outside of the substrates 11 and 43, respectively, and a combination of a fluorescent lamp (not shown) and a scattering plate (not shown) is generally used as a backlight, and a liquid crystal compound is used as a backlight. Display is performed by functioning as an optical shutter that changes the transmittance.
[0055]
According to the color filter manufacturing apparatus of the present invention, a color filter without coloring unevenness can be efficiently manufactured by an inkjet method.
[0056]
Hereinafter, the color filter device of the present invention will be described more specifically with reference to examples.
[0057]
Example 1
An acrylic copolymer having the following composition on a glass substrate (Corning 1737) on which a black matrix of chromium is formed.
50 parts by weight of methyl methacrylate
30 parts by weight of hydroxyethyl methacrylate
N-methylolacrylamide 20 parts by weight
A resin composition prepared by dissolving 97 parts by weight and 3 parts by weight of triphenylsulfonium hexafluoroantimonate in ethyl cellosorb was spin-coated to a film thickness of 1 μm, and prebaked at 90 ° C. for 20 minutes to form an ink receiving layer. Formed.
[0058]
Next, a part of the resin layer on the black matrix is subjected to pattern exposure through a photomask having a stripe-shaped opening narrower than the width of the black matrix, and further heat-treated for 1 minute on a hot plate at 120 ° C. Was given. Next, R, G, and B dye inks were applied to the unexposed portions by the color filter manufacturing apparatus shown in FIG. 4 to color the ink receiving layer in a stripe shape.
[0059]
The substrate support table shown in FIG. 9 was used. The suction hole is 3mm in diameter (area 7.1mm)² ), The distance between the centers of adjacent suction holes is approximately 20 mm. The transparent substrate is arranged on the substrate support so as to protrude 20 mm from both ends of the substrate support.
[0060]
After coloring, the ink was left for 10 minutes and dried at 90 ° C. for 10 minutes. Subsequently, a heat treatment was performed at 230 ° C. for 30 minutes to cure the ink receiving layer.
[0061]
When the color state of the color filter prepared in this way was confirmed by visual observation, it was a good one without color unevenness.
[0062]
Example 2
A black resist (manufactured by Nippon Steel Chemical Co., Ltd.) was applied onto a glass substrate (Corning 1737) and subjected to predetermined exposure and development to prepare a substrate having a grid-like black matrix.
[0063]
Using an acrylic copolymer having the composition shown below as a thermosetting component, RGB inks were prepared with the following compositions.
[0064]
Methyl methacrylate: 50 parts by weight
Hydroxyethyl methacrylate: 30 parts by weight
N-methylolacrylamide: 20 parts by weight
R ink
C. I. Acid orange 148: 3.5 parts by weight
C. I. Acid red 289: 0.5 part by weight
Diethylene glycol: 30 parts by weight
Isopropyl alcohol: 20 parts by weight
Ion exchange water: 40 parts by weight
The above curing component: 6 parts by weight
G ink
C. I. Acid yellow 23: 2 parts by weight
Zinc phthalocyanine sulfoamide: 2 parts by weight
Diethylene glycol: 30 parts by weight
Isopropyl alcohol: 20 parts by weight
Ion exchange water: 40 parts by weight
The above curing component: 6 parts by weight
B ink
C. I. Direct blue 199: 4 parts by weight
Diethylene glycol: 30 parts by weight
Isopropyl alcohol: 20 parts by weight
Ion exchange water: 40 parts by weight
The above curing component: 6 parts by weight
[0065]
The above inks were applied to the openings of the black matrix using the same color filter manufacturing apparatus as in Example 1. Thereafter, the ink was left for 10 minutes, and ink drying was performed at 90 ° C. for 10 minutes. Subsequently, heat treatment was performed at 230 ° C. for 30 minutes to cure the ink.
[0066]
When the color state of the color filter prepared in this way was confirmed by visual observation, it was a good one without color unevenness.
[0067]
Comparative example
The substrate support used in Example 1 has a suction hole diameter of 5 mm (area 19.6 mm).² A color filter was prepared in the same manner as in Example 1 except that the substrate support was changed to (1).
[0068]
When the color state of the color filter thus prepared was confirmed by visual observation, coloring unevenness occurred.
[0069]
【The invention's effect】
According to the present invention, uneven coloring can be reduced and a high-quality color filter can be manufactured with high yield.
[Brief description of the drawings]
FIG. 1 is a process diagram showing an example of a method for producing a color filter of the present invention.
FIG. 2 is a process diagram showing another example of a method for producing a color filter of the present invention.
FIG. 3 is a diagram illustrating an arrangement example of coloring portions of the color filter of the present invention.
FIG. 4 is a perspective view showing an example of a color filter manufacturing apparatus according to the present invention.
FIG. 5 is a view showing an example of supporting a transparent substrate in the color filter manufacturing apparatus of the present invention.
FIG. 6 is a plan view showing a state where a transparent substrate is placed on an example of a substrate support used in the color filter manufacturing apparatus of the present invention.
FIG. 7 is a plan view showing a state in which a transparent substrate is placed on another example of a substrate support used in the color filter manufacturing apparatus of the present invention.
FIG. 8 is a plan view showing a state where a transparent substrate is placed on another example of a substrate support used in the color filter manufacturing apparatus of the present invention.
FIG. 9 is a plan view showing a state in which a transparent substrate is placed on another example of a substrate support used in the color filter manufacturing apparatus of the present invention.
FIG. 10 is a cross-sectional view showing an example of a liquid crystal element using a color filter manufactured by the method for manufacturing a color filter of the present invention.
[Explanation of symbols]
4 Substrate suction hole
5 Transparent substrate
6 Coloring area
7 Lift pin up / down holes
8 Black matrix
9 Ink
11 Substrate
12 Black matrix
13 Resin composition layer
14 Photomask
15 Uncolored part
17 Inkjet recording device
18 Coloring part
19 Protective layer
21 Surface plate
22 slow shaking table
23 XY stage
24 θ, Z, tilt stage
25 Transparent substrate
26 Z detection optical system
27 Drawing head unit
28 Optical system for alignment detection
29 Optical system for detecting drawing landing position
31 Y stage
32 X stage
34 Substrate chuck
41 Common electrode
42 Alignment film
43 substrates
44 Pixel electrode
45 Alignment film
46 Liquid crystal compounds

Claims (2)

Uneven coloration of color filters and a step of heating comprising the steps of coloring the colored region on the color filter substrate which is fixed to the substrate support table on by an inkjet method, a color filter substrate which is fixed to the substrate support table on this order In the reduction method,
The color filter substrate is a glass substrate;
Wherein fixing the color filter substrate of a plurality of suction holes substrate supporter has by sucking air, and wherein the area of said plurality of suction holes are both at 0.03 mm ² or more 9 mm ² or less A method for reducing coloring unevenness of a color filter. The method for reducing coloring unevenness of a color filter according to claim 1 , wherein each of the plurality of suction holes has an area of 7.1 mm ² or less.

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