JP4368142B2 - Optical waveguide parts - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an optical waveguide component that can function as an optical switch or the like.
[0002]
[Prior art]
In recent years, in the communication field, optical communication technology has attracted attention in order to achieve high-speed and large-capacity communication, and the functions of optical communication systems are rapidly becoming more sophisticated.
With the advancement of such optical communication systems, it has become necessary to connect a large number of optical communication devices. When connecting optical communication devices, switching of terminal devices and optical fiber cables is performed. The optical switch is indispensable.
[0003]
Furthermore, as the optical communication network expands not only to the backbone network, but also to the communications network between the backbone network and the terminal devices, and the communication network between the terminal devices, the optical switch is not only excellent in reliability but also inexpensive. Therefore, what is suitable for mass production is required.
[0004]
As a conventional optical switch, for example, there is an optical switch having a structure in which a film-like polymer waveguide is sandwiched between upper and lower pressing plates and a cutting process is performed at a waveguide intersection of the polymer waveguide (for example, Patent Document 1). This optical switch functions as an optical switch by switching between transmission and reflection of light by opening and closing a waveguide intersection that has been cut using a push rod.
[0005]
However, this optical switch has cuts at the intersections of the optical waveguides, and controls the transmission of the optical signal by opening and closing the cuts. Therefore, when the cuts are repeatedly opened and closed, the cuts are made. There is a problem that the optical waveguide wears out, the optical waveguide shifts when the cut portion is closed, or foreign matter is caught in the cut portion, resulting in a large transmission loss of the optical signal at the intersection of the optical waveguide. .
[0006]
[Patent Document 1]
JP 2002-274784 A
[0007]
[Means for Solving the Problems]
Therefore, the present inventor has intensively studied optical waveguide components that do not cause the above-described problems, and as a result, the optical waveguide is deformed by bending the optical waveguide to control the transmission of the optical signal. In the parts, it was found that the above-mentioned problems do not occur, and the optical waveguide part of the present invention was completed.
[0008]
That is, the optical waveguide component of the present invention comprises a deformable optical waveguide having two or more ends connected to the optical wiring, and a deformation means for deforming the optical waveguide, and by deforming the optical waveguide, An optical waveguide component that controls transmission of an optical signal,
The optical waveguide, after arranging the optical wiring so that one end of at least two optical wirings of the optical wiring are substantially facing each other, and both ends facing each other are immersed in the uncured photosensitive composition, Connect the two optical wirings formed by irradiating light through the optical wiringIncluding a core part made of a resin composition having flexibility, and having a branch part,
The optical waveguide is deformed by bending the optical waveguide by pushing the optical waveguide in a direction substantially parallel to the optical signal transmission direction and in the same direction as the transmission direction and / or in the opposite direction of the transmission direction.Functions as an optical switch or optical couplerIt is characterized by that.
[0010]
In the optical waveguide component, it is preferable that the optical waveguide has a branch portion.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
The optical waveguide component of the present invention includes a deformable optical waveguide having two or more ends connected to an optical wiring, and a deforming means for deforming the optical waveguide. By deforming the optical waveguide, an optical signal is obtained. An optical waveguide component that controls transmission of
The optical waveguide, after arranging the optical wiring so that one end of at least two optical wirings of the optical wiring are substantially facing each other, and both ends facing each other are immersed in the uncured photosensitive composition, Connect the two optical wirings formed by irradiating light through the optical wiringIncluding a core part made of a resin composition having flexibility, and having a branch part,
The optical waveguide is deformed by bending the optical waveguide by pushing the optical waveguide in a direction substantially parallel to the optical signal transmission direction and in the same direction as the transmission direction and / or in the opposite direction of the transmission direction.It functions as an optical switch or optical coupler.
[0012]
The optical waveguide component of the present invention has a function as, for example, an optical switch. As an optical switch, transmission of an optical waveguide can be performed even when ON / OFF operation is repeated or optical path switching is repeated. Loss does not increase and is excellent in reliability.
Further, as will be described later, the optical waveguide component of the present invention can be used as, for example, an optical attenuator (optical attenuator), an optical coupler (optical multiplexer / demultiplexer), etc., and used as an optical attenuator or optical coupler for a long time. Even in this case, the transmission loss of the optical waveguide does not increase and the reliability is excellent.
Moreover, since the optical waveguide component of the present invention can be manufactured using, for example, a self-forming method of an optical waveguide, it can be mass-produced at a low cost.
[0013]
In the optical waveguide component of the present invention, when the optical waveguide is composed of a single one having no branching portion, the optical waveguide component of the present invention is used as, for example, a 1 × 1 optical switch (ON / OFF switch). be able to.
Moreover, when the said optical waveguide has a branch part, it can be used as an mxn optical switch according to the number of this branch part.
[0014]
Hereinafter, the optical waveguide component of the present invention will be described with reference to the drawings.
1A and 1B are cross-sectional views schematically showing an example of an embodiment of an optical waveguide component of the present invention. FIG. 1 shows an optical waveguide component that does not have a branching portion and can function as a 1 × 1 optical switch.
[0015]
As shown in FIG. 1, in the optical waveguide component 100 of the present invention, both ends of the core 101 of the optical waveguide are connected to the optical wirings 103 and 104, respectively. The deformation means (not shown) is provided.
The optical waveguide formed in the optical waveguide component 100 is composed of a core 101 cured to a deformable extent and a liquid clad 102 filled around the core 101.
The optical waveguide component 100 having such a configuration can be used as, for example, a 1 × 1 optical switch.
[0016]
The material for the core is not particularly limited as long as it can form a deformable core, and examples thereof include organic materials.
Specific examples of the organic material include, for example, resin components such as PMMA (polymethyl methacrylate), deuterated PMMA, deuterated fluorinated PMMA, and fluorinated PMMA. Photosensitive compositions containing additives, sensitizers, solvents, etc .; epoxy resins, fluorinated epoxy resins, polyolefin resins, silicone resins such as deuterated silicone resins, resins comprising benzocyclobutene, etc. Resin compositions in which various additives are blended with the resin component as needed are exemplified.
[0017]
The resin composition may be a photosensitive composition. When the photosensitive composition is used, the epoxy resin or the olefin resin is imparted with photosensitivity, and these resins are necessary. Accordingly, a mixture containing a monomer, a photopolymerization initiator, a sensitizer and the like can be used as the photosensitive composition.
Examples of the method for imparting photosensitivity to the epoxy resin and polyolefin resin include a method of imparting an allyl group or an acryloyl group to the terminal or side chain of these resins.
[0018]
In addition, a photosensitive composition containing a polyene compound having an allyl group or an acryloyl group at the terminal or side chain of the molecule, a polythiol compound, a photopolymerization initiator, and various additives or a solvent as required. Can be used as
[0019]
In addition, the photosensitive composition may be any composition as long as the curing reaction proceeds by irradiating light. For example, by irradiating light such as an epoxy resin and an aromatic diazonium salt or aromatic iodonium salt. What contains the photoinitiator which generate | occur | produces a Lewis acid can also be used.
Further, those containing a photoinitiator that generates radicals by irradiating light such as benzoin alkyl ethers, acetophenone derivatives, benzophenone and derivatives thereof, and resin components that undergo polymerization by a radical polymerization mechanism, and chlorinated acetophenones In addition, a photosensitive composition that includes a photoinitiator that releases a strong acid when irradiated with light and a resin component that undergoes polymerization with an acid can be used.
[0020]
In this specification, the photosensitive composition includes not only a polymer that undergoes a chemical reaction when irradiated with light, but also a monomer that undergoes a photopolymerization reaction when irradiated with light, such as (meth) acrylic acid. It also includes methyl and the like, and further includes those in which two or more kinds of resin components and / or monomers cause a chemical reaction upon irradiation with light to form a resin complex.
[0021]
Moreover, it is desirable that the core has flexibility among those formed using these organic materials.
This is because it is desirable that the above-mentioned core is hard to apply stress to the optical fiber and the optical waveguide, and when a repetitive operation such as an optical switch is applied, the flexible core is more durable. Because.
[0022]
The core may contain particles such as resin particles, inorganic particles, and metal particles. This is because the thermal expansion coefficient of the optical waveguide can be adjusted by blending the particles.
[0023]
Examples of the resin particles include a thermosetting resin, a thermoplastic resin, a photosensitive resin, a resin in which a part of the thermosetting resin is made photosensitive, a resin composite of a thermosetting resin and a thermoplastic resin, Examples thereof include those composed of a composite of a photosensitive resin and a thermoplastic resin.
[0024]
Specifically, for example, thermosetting resins such as epoxy resins, phenol resins, polyimide resins, bismaleimide resins, polyphenylene resins, polyolefin resins, fluororesins; thermosetting groups of these thermosetting resins (for example, epoxy resins) (Epoxy group) in which methacrylic acid or acrylic acid is reacted to give an acrylic group; phenoxy resin, polyether sulfone (PES), polysulfone (PSF), polyphenylene sulfone (PPS), polyphenylene sulfide (PPES), Examples thereof include thermoplastic resins such as polyphenyl ether (PPE) and polyetherimide (PI); and photosensitive resins such as acrylic resins.
Moreover, what consists of the resin composite of the said thermosetting resin and the said thermoplastic resin, the resin to which the said acrylic group was provided, the said photosensitive resin, and the said thermoplastic resin can also be used.
Moreover, as the resin particles, resin particles made of rubber can be used.
[0025]
Examples of the inorganic particles include aluminum compounds such as alumina and aluminum hydroxide, calcium compounds such as calcium carbonate and calcium hydroxide, potassium compounds such as potassium carbonate, magnesium compounds such as magnesia, dolomite, and basic magnesium carbonate. And those composed of silicon compounds such as silica and zeolite.
Moreover, what consists of phosphorus or a phosphorus compound can also be used as said inorganic particle.
[0026]
Examples of the metal particles include those made of gold, silver, copper, palladium, nickel, platinum, iron, zinc, lead, aluminum, magnesium, calcium, and the like.
These resin particles, inorganic particles and metal particles may be used alone or in combination of two or more.
[0027]
Moreover, the shape of the said particle | grain is not specifically limited, For example, spherical shape, elliptical spherical shape, crushed shape, polyhedral shape etc. are mentioned. Among these, spherical or elliptical spheres are desirable. This is because spherical or elliptical particles do not have corners, so that cracks and the like are unlikely to occur in the optical waveguide.
[0028]
The particle size of the particles is preferably shorter than the communication wavelength. This is because if the particle size is longer than the communication wavelength, transmission of the optical signal may be hindered.
In the present specification, the particle diameter of the particle means the length of the longest part of the particle.
[0029]
When particles are contained in the optical waveguide, the lower limit of the blending amount is preferably 10% by weight and more preferably 20% by weight after curing. Further, the upper limit of the amount is desirably 80% by weight, and more desirably 70% by weight. If the blending amount of the particles is less than 10% by weight, the effect of blending the particles may not be obtained so much. On the other hand, if the blending amount of the particles exceeds 80% by weight, the transmission of the optical signal is inhibited. Because there is.
[0030]
The optical waveguide formed in the optical waveguide component 100 is composed of a core hardened to a degree that can be deformed and a liquid clad around the core. The cladding constituting the optical waveguide in the optical waveguide component according to the present invention. Is not necessarily limited to a liquid form, and may be a deformable solid, a gas, or a vacuum as long as it does not hinder the deformation of the core.
Therefore, examples of the cladding material include the same resin composition and photosensitive composition as the above-described core material, and a gas such as air. Further, when the cladding material is a resin composition or a photosensitive composition, particles may be contained in the same manner as the core.
As described above, the clad may be solid or gas as long as it does not hinder the deformation of the core, so the resin composition or the photosensitive composition is cured. It may be uncured.
[0031]
The shape of the core is not particularly limited, and may be a shape parallel to the traveling direction of the transmitted light, that is, a columnar shape, a quadrangular prism shape, or the like, or a vertical shape such as a tapered shape or a spindle shape. The cross-sectional shapes arbitrarily cut in the direction may be different from each other.
[0032]
Moreover, the optical waveguide component of the present invention includes a deformation means for deforming the optical waveguide in order to control transmission of an optical signal.
The deformation means is not particularly limited as long as it can deform the optical waveguide, and specific examples thereof include piezoelectric elements, various actuators such as solenoids, and the like.
In the optical waveguide component of the present invention, as long as the deformation means is arranged so that the optical waveguide can be deformed, the deformation means may be arranged directly on the optical waveguide, You may arrange | position to the optical wiring etc. which comprise.
Further, the deformation means may be, for example, an optical fine movement table, in which case the end of the optical waveguide and the optical wiring are placed on the optical fine movement table, The optical wiring may be deformed.
[0033]
Further, the number of deformation means provided in the optical waveguide component is not particularly limited, and may be appropriately selected in consideration of the configuration of the optical waveguide component. Specifically, for example, in the case of a 1 × 1 optical switch configured as shown in FIG. 1, the minimum number (that is, one) for providing a predetermined function may be used. A plurality of (for example, two) may be provided in order to provide an equivalent or higher function. Further, for example, in the case of a 1 × 2 optical switch having a configuration as shown in FIG. 2 described later, the minimum number (1) for providing a predetermined function may be used, or the same or more. In order to provide the above functions, a plurality of (two or three) may be provided. Although this depends on the configuration of the optical waveguide component, the optical waveguide component operates more smoothly and its performance is improved by disposing more deformation means than the minimum number for providing a predetermined function. Because there are things to do.
[0034]
Next, the operation of the optical waveguide component 100 that can be used as the 1 × 1 optical switch shown in FIG. 1 will be described.
Specifically, as shown in FIG. 1A, in the optical waveguide component 100, when the shape of the core 101 is linear, an optical signal can be transmitted through the optical waveguide.
[0035]
On the other hand, the optical waveguide component 100 pushes the core 101 in a direction substantially parallel to the optical signal transmission direction (the optical axis direction of the core 101), in the same direction as the transmission direction and in the opposite direction to the transmission direction. As shown in FIG. 1B, a part of the core 101 is deformed and curved.
Since the core 101 has such a shape that is partially curved, an optical signal cannot be transmitted through the optical waveguide.
In FIG. 1B, the optical waveguide is bent by pushing the core from both sides. However, in the optical waveguide component of the present invention, it is not always necessary to push the core from both sides. The core may be bent by pushing the core from either the direction substantially parallel to the transmission direction, the same direction as the transmission direction, or the opposite direction of the transmission direction.
[0036]
In addition, a core having a partially curved shape as shown in FIG. 1B is returned to the optical waveguide again by returning the core shape to a straight shape as shown in FIG. An optical signal can be transmitted.
Therefore, the optical waveguide component 100 shown in FIG. 1 can function as a 1 × 1 optical switch.
[0037]
Further, in the optical waveguide component 100 shown in FIG. 1, optical wiring is connected to both ends of the optical waveguide (both ends of the core). However, in the optical waveguide component of the present invention, both ends of the optical waveguide (both ends of the core). Each or any one of them may be connected to an optical component instead of the optical wiring.
Further, another optical component may be connected between the optical waveguides. This will be described later.
Examples of the optical component include light receiving elements such as pin-PD (PN junction type photodiode) and APD (avalanche photodiode), FP-LD (Fabry-Perot type semiconductor laser), DFB-LD (distributed feedback type − Examples thereof include light emitting elements such as semiconductor lasers, VCSELs (surface emitting lasers), and LEDs (light emitting diodes), and optical components such as mirrors, prisms, and filters.
[0038]
In the present specification, the optical wiring is not particularly limited as long as it transmits light such as ultraviolet rays, visible light, and infrared rays, thereby transmitting information. Specific examples thereof include, for example, optical Examples thereof include a fiber and an optical waveguide.
Further, the optical wiring may be composed only of the core, or may be composed of the core and the clad.
The material for the optical wiring is not particularly limited as long as it is a material that transmits light such as ultraviolet light, visible light, and infrared light, and may be an inorganic material or an organic material.
[0039]
Further, as described above, the optical waveguide component 100 shown in FIG. 1 can be used as an optical switch. However, the optical waveguide component of the present invention can be used not only as an optical switch but also as an optical attenuator. it can.
For example, in the optical waveguide component 100 shown in FIG. 1, when the optical waveguide is bent by pushing the core from both sides, the optical signal transmission is not completely blocked by adjusting the degree to which the optical waveguide is bent. The intensity of the optical signal can be reduced to a desired value and can be used as a fixed or variable optical attenuator.
[0040]
In the embodiment of the optical waveguide component of the present invention, if the optical signal transmission can be controlled by deforming the optical waveguide, and the optical waveguide is deformed by bending the optical waveguide, FIG. The present invention is not limited to the illustrated embodiment, and may be an embodiment as illustrated in FIGS.
[0041]
FIG. 2 is a cross-sectional view schematically showing another example of the embodiment of the optical waveguide component of the present invention. FIG. 2 shows an optical waveguide component in which the optical waveguide has one branch portion and can function as a 1 × 2 optical switch.
[0042]
In the optical waveguide component 200 shown in FIG. 2A, optical wirings 203, 204, 205 are connected to the end portions of the Y-shaped core 201 having one branch portion 201 a, respectively. Are provided with deformation means (not shown) for deforming the core 201.
The optical waveguide formed in the optical waveguide component 200 includes a core 201 that is hardened so as to be deformable, and a liquid clad 202 filled around the core 201.
[0043]
The optical waveguide component 200 having such a configuration can be used as a 1 × 2 optical switch.
Specifically, as shown in FIG. 2A, in the optical waveguide component 200, when the optical wiring 204 and the optical wiring 205 are in a straight line through the core 201, the optical wiring 204 and the optical wiring 205 are arranged. An optical signal can be transmitted between them.
In the form shown in FIG. 2A, an optical signal cannot be transmitted between the optical wiring 203 and the optical wiring 205.
[0044]
On the other hand, the core 201 is bent at the branching portion 201a using the deformation means provided in the optical wiring 205, and the optical wiring 203 and the optical wiring 205 are connected via the core 201 as shown in FIG. By deforming to be in a straight line, an optical signal can be transmitted between the optical wiring 203 and the optical wiring 205.
In the form shown in FIG. 2B, an optical signal cannot be transmitted between the optical wiring 204 and the optical wiring 205.
[0045]
Further, the optical wiring 203 and the optical wiring 205 as shown in FIG. 2B are arranged in a straight line through the core 201, and the optical wiring 204 and the optical wiring 205 as shown in FIG. By returning to the linear form via the core 201, an optical signal can be transmitted between the optical wiring 204 and the optical wiring 205 again.
Therefore, the optical waveguide component 200 shown in FIG. 2 can be used as a 1 × 2 optical switch.
[0046]
FIG. 3 is a cross-sectional view schematically showing another example of the embodiment of the optical waveguide component of the present invention. FIG. 3 shows an optical waveguide component that has an optical waveguide having two branch portions and can function as a 2 × 2 optical switch.
[0047]
In the optical waveguide component 300 shown in FIG. 3A, optical wirings 303, 304, 305, 306 are connected to the end portions of the core 301 having two branch portions 301a, 301b, respectively. Each of 306 is provided with a deformation means (not shown) for deforming the core 301.
The optical waveguide formed in the optical waveguide component 300 includes a core 301 that is hardened so as to be deformable, and a liquid clad 302 that is filled around the core 301.
[0048]
The optical waveguide component 300 having such a configuration can be used as a 2 × 2 optical switch.
Specifically, as shown in FIG. 3A, in the optical waveguide component 300, when the optical wiring 304 and the optical wiring 306 are in a straight line through the core 301, the optical wiring 304 and the optical wiring 306. An optical signal can be transmitted between them.
In the form shown in (a), an optical signal cannot be transmitted via the optical wiring 303, and an optical signal cannot be transmitted via the optical wiring 305.
[0049]
On the other hand, in the optical waveguide component in the state of FIG. 3A, the core 301 is bent at its branching portion 301a by using deformation means (not shown) disposed in the optical wiring 303 and the optical wiring 304. As shown in FIG. 3B, by deforming the optical wiring 303 and the optical wiring 306 so as to be in a straight line, an optical signal can be transmitted between the optical wiring 303 and the optical wiring 306. Become.
In the configuration shown in (b), the optical signal cannot be transmitted through the optical wiring 304, and the optical signal cannot be transmitted through the optical wiring 305.
[0050]
Further, in the optical waveguide component in the state of FIG. 3A, the core 301 is bent at the branch portion 301b by using the deformation means (not shown) disposed in the optical wiring 305 and the optical wiring 306. As shown in FIG. 3C, by deforming the optical wiring 304 and the optical wiring 305 so as to be in a straight line, an optical signal can be transmitted between the optical wiring 304 and the optical wiring 305. Become.
In the form shown in (c), an optical signal cannot be transmitted through the optical wiring 303, and an optical signal cannot be transmitted through the optical wiring 306.
[0051]
Further, in the optical waveguide component in the state of FIG. 3A, the core 301 is bent at the branch portion 301a by using a deformation means (not shown) disposed in the optical wiring 303 and the optical wiring 304, and The core 301 is bent at the branch portion 301b using the optical wiring 305 and deformation means (not shown) disposed in the optical wiring 306, and as shown in FIG. 3D, the optical wiring 303 and the optical wiring 305 are bent. And so as to be in a straight line, an optical signal can be transmitted between the optical wiring 303 and the optical wiring 305.
In the form shown in (d), an optical signal cannot be transmitted through the optical wiring 304, and an optical signal cannot be transmitted through the optical wiring 306.
[0052]
The optical wiring 303 and the optical wiring 305 or the optical wiring 306 are formed by bending and deforming the optical waveguide of the optical waveguide component 300 so as to have any one of the forms shown in FIGS. Or an optical signal can be transmitted between the optical wiring 304 and the optical wiring 305 or the optical wiring 306.
Therefore, the optical waveguide component 300 shown in FIG. 3 can be used as a 2 × 2 optical switch.
[0053]
FIG. 4 is a cross-sectional view schematically showing another example of the embodiment of the optical waveguide component of the present invention. FIG. 4 shows an optical waveguide component that has an optical waveguide having one branch portion and can function as a 1 × 2 optical switch.
[0054]
In the optical waveguide component 400 shown in FIG. 4A, optical wirings 403, 404, and 405 are connected to the ends of the Y-shaped core 401 having one branching portion 401a. Each 405 is provided with a deformation means (not shown) for deforming the core 401.
In addition, the optical waveguide formed in the optical waveguide component 400 includes a core 401 that has been hardened so as to be deformable, and a liquid clad 402 that is filled around the core 401.
[0055]
Further, in the configuration shown in FIG. 4A, the optical waveguide component 400 shown in FIG. 4A is provided between the optical wiring 403 and the optical wiring 404 and between the optical wiring 403 and the optical wiring 405, respectively. It is comprised so that an optical signal can be transmitted by. Therefore, the optical waveguide component 400 in the form of FIG. 4A can function as an optical coupler.
[0056]
As described above, the optical waveguide component 400 can also function as a 1 × 2 optical switch.
Specifically, as shown in FIG. 4A, an optical signal can be transmitted between the optical wiring 403 and the optical wiring 404 and between the optical wiring 403 and the optical wiring 405. In the optical waveguide component 400 shown in FIG. 4B, the portion between the branch portion 401a and the optical wiring 404 in the core 401 is pushed in a predetermined direction by the deformation means wired in the optical wiring 404, as shown in FIG. In addition, a portion of the core 401 between the branching portion 401a and the optical wiring 404 can be curved, and by bending a portion of the core 401 in this way, light is transmitted only between the optical wiring 403 and the optical wiring 405. A signal can be transmitted, and an optical signal cannot be transmitted between the optical wiring 403 and the optical wiring 404.
Here, the direction in which the core 401 is pushed is a direction substantially parallel to the transmission direction of the optical signal in the portion between the branching portion 401a and the optical wiring 404 in the core 401, and is the same direction as the transmission direction. Or it is the reverse direction of the said transmission direction.
[0057]
On the other hand, in the optical waveguide component 400 having the form as shown in FIG. 4A, the deforming means wired in the optical wiring 405 causes the portion of the core 401 between the branch portion 401a and the optical wiring 405 to be in a predetermined direction. By pushing, as shown in FIG. 4C, the portion of the core 401 between the branching portion 401a and the optical wiring 405 can be bent. In this way, by bending a portion of the core 401, An optical signal can be transmitted only between the optical wiring 403 and the optical wiring 404, and an optical signal cannot be transmitted between the optical wiring 403 and the optical wiring 405.
Here, the direction in which the core 401 is pushed is a direction substantially parallel to the transmission direction of the optical signal in the portion between the branching portion 401a and the optical wiring 404 in the core 401, and is the same direction as the transmission direction. Or it is the reverse direction of the said transmission direction.
[0058]
Further, in the optical waveguide component 400 having the form as shown in FIG. 4A, the deforming means wired in the optical wiring 403 causes the portion of the core 401 between the branching portion 401a and the optical wiring 403 to be in a predetermined direction. By pushing, as shown in FIG. 4C, the portion of the core 401 between the branching portion 401a and the optical wiring 403 can be curved, and by curving a part of the core 401 in this way, An optical signal cannot be transmitted between the optical wiring 403 and the optical wiring 404 and between the optical wiring 403 and the optical wiring 405.
Here, the direction in which the core 401 is pushed is a direction substantially parallel to the transmission direction of the optical signal in the portion between the branching portion 401a and the optical wiring 403 in the core 401, and is the same direction as the transmission direction. Or it is the reverse direction of the said transmission direction.
Therefore, the optical waveguide component 400 shown in FIG. 4 can function as a 1 × 2 optical switch, and can further function as an optical coupler.
[0059]
Further, as shown in FIGS. 4B to 4D, the optical waveguide component 400 shown in FIG. 4 is adjusted by adjusting the degree of bending when bending a part of the core 401, as shown in FIG. It can also be used as an optical coupler having the same optical attenuator function as the optical waveguide component 100 shown in FIG.
[0060]
FIG. 11 is a cross-sectional view schematically showing another example of the embodiment of the optical waveguide component of the present invention. FIG. 11 shows an optical waveguide component that has a configuration in which optical components are connected between optical waveguides and can function as a 1 × 1 optical switch.
[0061]
In the optical waveguide component 500 shown in FIG. 11A, the optical wirings 503 and 504 are connected to the respective ends of the core 501 (consisting of 501A and 501B) to which the mirror 505 is connected. Is provided with deformation means (not shown) for deforming the core 501.
The optical waveguide formed in the optical waveguide component 500 includes a core 501 that is hardened to a degree that can be deformed, and a liquid clad 502 that is filled around the core 501.
[0062]
In the configuration shown in FIG. 11A, the optical waveguide component 500 shown in FIG. 11 can transmit an optical signal between the optical wiring 503 and the optical wiring 504 via the optical waveguide and the mirror 505. It is configured. That is, the optical signal incident from the core 501A side is reflected by the mirror 505 and then transmitted through the core 501B. The optical signal incident from the core 501B side is reflected by the mirror 505, and then the core It is configured to be transmitted via 501B.
[0063]
In the optical waveguide component 500 shown in FIG. 11, mirrors are connected between the optical waveguides (between the cores), and transmission is performed via the mirrors. In the optical waveguide component having such a configuration, the optical component connected between the optical waveguides is not limited to the mirror, but the LD (laser diode), PD (photodiode), prism, filter, and the like as described above. It may be a simple optical component.
[0064]
The optical waveguide component 500 having such a configuration can be used as a 1 × 1 optical switch.
Specifically, as shown in FIG. 11A, in the optical waveguide component 500, the cores 501A and 501B are linear, and the optical axis of the core 501A and the normal line of the reflecting surface of the mirror 505 And the angle formed by the optical axis of the core 501B and the normal line of the reflecting surface of the mirror 505 are the same, the optical signal with the minimum loss between the optical wiring 503 and the optical wiring 504 is obtained. Can be transmitted.
[0065]
On the other hand, by using a deforming means provided in the optical wiring 503, by pushing a part of the core 501A in a predetermined direction (a direction substantially parallel to the transmission direction of the optical signal), as shown in FIG. A part of the core 501A is deformed and curved.
When the shape of the core 501 </ b> A is such a part that is curved, a signal cannot be transmitted through the core 501.
Further, by returning a partially curved core as shown in FIG. 11 (b) to a linear core as shown in FIG. 11 (a), an optical signal is again transmitted through the optical waveguide. Can be transmitted.
Therefore, the optical waveguide component 500 shown in FIG. 11 can function as a 1 × 1 optical switch. The optical waveguide component 500 can also function as a fixed or variable optical attenuator by adjusting the degree of bending of the core.
[0066]
In the optical waveguide component 500, the optical wiring 503 is provided with deformation means, and the optical signal transmission is turned on / off by bending or returning the core 501A to a linear shape. The present invention is not limited to such a configuration, and a configuration may be adopted in which the optical signal transmission is turned on / off by disposing the deforming means in the optical wiring 504 and deforming (curving) the core 501B. Good.
[0067]
Further, in the optical waveguide component having the structure shown in FIG. 11A, the optical signal transmission property is controlled by pushing the core in a direction substantially parallel to the optical signal transmission direction. The method of deforming the core in order to control the transmissibility is not limited to such a method.
Therefore, in the optical waveguide component having the structure shown in FIG. 11A, for example, the angle θ formed by the core 501A and the normal line of the reflecting surface of the mirror 505_AAnd the angle θ between the core 501B and the normal of the reflecting surface of the mirror 505_BThe optical signal transmission may be turned on / off by deforming the core 501A and / or the core 501B so that they are not the same.
[0068]
In addition, embodiment of the optical waveguide component of this invention is not necessarily limited to embodiment shown in FIGS. 1-4 and FIG. 11, According to a function as an m * n optical switch, an optical attenuator, and an optical coupler, What is necessary is just to select suitably the number, position, etc. of the branch part provided in an optical waveguide.
[0069]
Next, the manufacturing method of the optical waveguide component of this invention is demonstrated.
The method for producing the optical waveguide component of the present invention is not particularly limited. For example, a method using a self-forming method of an optical waveguide can be used.
Hereinafter, this method will be described with reference to the drawings. Here, first, a method for manufacturing the optical waveguide component of the embodiment shown in FIG. 1 will be described as an example.
[0070]
FIGS. 5A to 5D are schematic views for explaining an example of a method for producing the optical waveguide component of the present invention.
In this manufacturing method, first, the optical wiring is arranged so that one end of each of the different optical waveguides faces each other and at least one end facing each other is immersed in the uncured photosensitive composition.
[0071]
Specifically, first, the optical wirings 12 and 12 'are arranged so that the respective one ends face each other, and the photosensitive composition 11 is applied so as to surround the ends of the optical wirings 12 and 12'. Thus, both ends of the optical wirings 12 and 12 'are immersed in the photosensitive composition 11 (see FIG. 5A).
[0072]
Next, the light for curing the photosensitive composition 11 is irradiated from one optical wiring 12 toward the optical wiring 12 ′ arranged so as to face each other (see FIG. 5B).
Thus, by irradiating light from one optical wiring 12 to the other optical wiring 12 ', the photosensitive composition 11 is gradually cured from the optical wiring 12 side according to the light path, The core of the optical waveguide connecting the optical wiring 12 and the optical wiring 12 ′ is formed (see FIGS. 5C to 5D). Thereafter, an optical waveguide component can be manufactured by attaching various actuators or the like as deformation means.
In this specification, the cured product that is grown by irradiation with light includes a semi-cured product. Therefore, curing the photosensitive composition by irradiating light includes semi-curing the photosensitive composition.
In this optical waveguide component, the uncured photosensitive composition serves as a cladding.
[0073]
In the manufacturing method of the optical waveguide component that connects the two optical wirings described above, light is irradiated through only one optical wiring. Instead of this method, each of the two optical wirings is used. You may irradiate light toward the other optical wiring. In this case, light may be irradiated simultaneously through two optical wirings, or light may be alternately irradiated from each optical wiring.
[0074]
In this production method, the light irradiated when the photosensitive composition is cured is not particularly limited, and may be appropriately selected in consideration of the composition of the photosensitive composition. For example, the photosensitive composition is in the ultraviolet region. If it is a composition which has photosensitivity in, what is necessary is just to irradiate the light of the wavelength of an ultraviolet region. Moreover, as a light source which irradiates the light of the wavelength of an ultraviolet region, a high pressure mercury lamp etc. can be used, for example. A metal halide lamp, a xenon lamp, a laser, or the like can also be used.
[0075]
In this manufacturing method, the core is gradually formed from the side of the optical wiring irradiated with light according to the path of the irradiated light.
Therefore, it is desirable that the photosensitive composition used in this production method has a higher refractive index after curing than before curing. By increasing the refractive index after curing, the light irradiated through the optical wiring is confined in the core in which it is formed, and the light is intensively irradiated from the tip, so that the optical waveguide according to the light path is more reliable. This is because it can be manufactured.
[0076]
Further, the size of the refractive index of the photosensitive composition used when manufacturing the optical waveguide component by this manufacturing method is not particularly limited, and is appropriately selected in consideration of the connection form between the optical wiring and the optical waveguide. do it.
That is, when the optical wiring and the optical waveguide are connected in a straight line, it is desirable that the difference between the refractive index of the core of the optical wiring and the refractive index after curing of the photosensitive composition is small.
When the difference in refractive index is small, the end surface of the optical wiring is not particularly flattened, or the surface roughness of the end surface of the optical wiring based on JIS B 0601 is 0.1 μm or more. This is because the core of the optical waveguide having excellent connectivity with the optical wiring can be formed.
[0077]
In the present specification, the refractive index means a refractive index when light having an emission line of 589 nm of Na is passed.
The refractive index of resin or the like used for the optical wiring or the optical waveguide varies depending on the wavelength, but the ratio (the refractive index of the core of the optical waveguide / the refractive index of the core of the optical wiring) is, for example, ultraviolet There is almost no change in the region to the near infrared region.
[0078]
Further, when the optical wiring and the optical waveguide are connected in a straight line, the refractive index of the photosensitive composition before curing, that is, the refractive index of the photosensitive composition itself is also different from the core of the optical wiring. It is desirable that the difference in refractive index is small.
[0079]
Further, when the optical wiring and the optical waveguide are connected in a bent shape at the connection portion, it is desirable that the refractive index of the optical wiring and the refractive index of the optical waveguide are different.
When an optical signal is transmitted between an optical wiring and an optical waveguide having different refractive indexes, the light is refracted at the interface between the optical wiring and the optical waveguide, so that the optical wiring and the optical waveguide are bent at the connection portion. This is because an optical signal can be reliably transmitted even when connected in a different shape. The refractive indexes of the optical wiring and the optical waveguide may be appropriately selected in consideration of the bending condition at the connection portion between the optical wiring and the optical waveguide.
[0080]
In this production method, it is desirable to select and use a photosensitive composition having a desired refractive index. However, even if the photosensitive composition has a refractive index outside the above range, the refractive index is adjusted. Can be used with adjustment. Here, when adjusting the refractive index of the photosensitive composition or the like, it is desirable to adjust the refractive index before and after curing to a desired magnitude.
[0081]
In general, since the refractive index of a polymer increases as the ratio between molecular refraction and molecular volume increases, the refractive index of the polymer can be adjusted by adjusting molecular refraction and / or molecular volume.
[0082]
Specifically, when adjusting the molecular refraction (the sum of the atomic refractions of the individual groups constituting the polymer folding unit), for example, introduction of a group having a high polarizability such as chlorine and sulfur causes atomic refraction. This increases the molecular refraction.
Further, even when a double bond group or an aromatic ring group is introduced to lower the symmetry of the molecule, the polarizability increases and the atomic refraction increases, so that the molecular refraction can be increased.
[0083]
In addition, when adjusting the molecular volume (molecular weight / density), for example, the density may be adjusted. In this case, for example, the density can be increased by reducing the molecular weight between cross-linking points.
For example, since fluorine has a larger volume than the polarizability, the density can be increased also by introducing a group containing fluorine.
[0084]
In this specification, the refractive index of the core of the optical wiring means that the core of the optical wiring has a single refractive index like the core of a step index optical fiber (SI type optical fiber). The refractive index is used, and in the case of a graded index optical fiber having a refractive index within a certain range, the peak refractive index is used.
[0085]
Through these steps, an optical waveguide component in which both ends of the optical waveguide made of the core are connected to the optical wiring can be manufactured.
In the optical waveguide component manufactured through the above-described steps, the liquid photosensitive composition remaining uncured around the optical waveguide composed of the core serves as a cladding.
[0086]
Moreover, when the optical waveguide which consists of a core is manufactured with the manufacturing method mentioned above, you may form the clad hardened to the extent which can deform | transform around this core.
Specifically, for example, after forming an optical waveguide composed of a core, the surrounding uncured photosensitive composition is removed, and subsequently, the core is replaced with another resin composition (a photosensitive composition). Alternatively, the cured clad may be formed by immersing it in a resin composition and then subjecting the resin composition to a curing treatment.
However, this method is not practical because the core must be handled with great care when removing the uncured photosensitive composition.
[0087]
Therefore, in the case of forming a clad that has been cured to the extent that it can be deformed around the core, it is desirable to use, for example, the following method.
That is, in the photosensitive composition for forming the core of the optical waveguide (hereinafter also referred to as a core forming resin), a resin for forming a cladding (hereinafter also referred to as a cladding forming resin) is separately provided in advance. Mix.
Here, the clad forming resin is a photosensitive composition that is polymerized only when receiving light having a stronger intensity than that of the photosensitive composition for forming the core, and has a refractive index before and after curing. One smaller than the refractive index is selected in advance. As the clad forming resin, the above-described photosensitive composition can be appropriately selected and used as long as it has the above-described characteristics.
[0088]
Then, as described above, light is irradiated through the optical wiring. At that time, the core-forming resin can be polymerized, but the clad-forming resin is irradiated with light of an intensity that is substantially impossible.
Then, the core-forming resin having higher photosensitivity in the photosensitive composition selectively starts polymerization. Of the photosensitive composition containing the core-forming resin and the clad-forming resin, when the core-forming resin begins to polymerize, the uncured clad-forming resin maintains its fluidity, and therefore the core that hardens. It will be excluded from the forming resin. Further, since the refractive index of the core is larger than the refractive index of the uncured clad forming resin, the light irradiated through the optical wiring is concentrated on the tip while being confined in the formed core. As a result, the light irradiated from one end of the optical wiring preferentially cures the core forming resin according to the light path, and forms the core according to the light path, and the surroundings are uncured photosensitive. The sex composition is surrounded.
[0089]
After this, for example, the entire uncured photosensitive composition can be irradiated with light from a light source, and the output of the light source is increased to irradiate light with an intensity capable of polymerizing the clad forming resin. . Then, the clad forming resin and the uncured core forming resin are cured, and a hardened clad can be formed around the optical waveguide made of the core.
[0090]
Thus, when two types of photosensitive compositions having different light intensities in which a polymerization reaction proceeds are mixed in advance and a core and a clad are formed, as the core forming resin and the clad forming resin, for example, A resin that undergoes a polymerization reaction through different polymerization reaction mechanisms can be selected.
That is, a radical polymerization type photosensitive composition in which polymerization proceeds by radical polymerization reaction represented by an acrylic resin and a cationic polymerization system in which polymerization proceeds through an ion pair represented by an epoxy resin. The photosensitive composition can be selected. When these are selected, the radical polymerization type photosensitive composition proceeds more rapidly than the cationic polymerization type photosensitive composition. Therefore, when the light intensity is weak, only the acrylic resin is used. Will selectively polymerize.
[0091]
Moreover, you may make a difference further in the progress of superposition | polymerization of two above-mentioned photosensitive compositions so that superposition | polymerization of one photosensitive composition may advance more reliably.
This can be performed, for example, by increasing the polymerization reaction rate of the radical polymerization type photosensitive composition. Specifically, when an acrylic resin is taken as an example, the number of acrylic groups contained per unit mass of the acrylic resin is increased (that is, the acrylic equivalent is reduced), or the monomer concentration is increased. As a result, the concentration of the reactive groups involved in the polymerization can be increased to increase the polymerization reaction rate. Further, the polymerization reaction rate can be increased by increasing the quantum yield (the amount of radicals generated per photon amount) and the concentration of the photopolymerization initiator.
[0092]
In addition, the difference in the degree of polymerization of the two types of photosensitive compositions can be made by slowing the polymerization reaction rate of the cationic polymerization type photosensitive composition. Specifically, taking an epoxy resin as an example, the number of epoxy groups contained per unit mass of the epoxy resin is reduced (that is, the epoxy equivalent is increased), or the monomer concentration is reduced. By doing so, the concentration of the reactive group involved in the polymerization can be lowered to slow down the polymerization reaction rate. In addition, the non-nucleophilicity of ion pairs involved in polymerization is reduced, or the polymerization reaction rate is slowed by lowering the quantum yield (cation generation amount per photon amount) of the photopolymerization initiator. You can also.
[0093]
Moreover, even if photosensitive compositions in which a polymerization reaction proceeds through the same mechanism are mixed, only one of the photosensitive compositions can be selectively polymerized. In this case, since the reaction proceeds by the same mechanism, it is difficult to selectively polymerize even if photosensitive compositions having different photopolymerization initiators and sensitizers are mixed together. Only one photosensitive composition can be selectively polymerized by providing a difference in the concentration of reactive groups. For example, in the case of an acrylic resin of radical polymerization type, if there is a difference in the acrylic equivalent which is a reactive group, the one having a larger reactive group (that is, having a smaller acrylic equivalent) is selectively polymerized with a certain irradiation light.
[0094]
When an optical waveguide is formed using such a core forming resin and a cladding forming resin, the polymerization reaction of both can be performed with one type of light source, so that the equipment cost and the number of steps can be reduced.
When selecting the core forming resin and the clad forming resin, even when the curing wavelengths of the two are not exactly the same, the polymerization reaction of both is performed with a single light source by adding a sensitizer or the like. be able to. Even if the photosensitive composition has no absorption or only a small amount in the wavelength range of the irradiated light, an appropriate sensitizer having absorption in the wavelength range is added and the sensitization is performed. This is because the polymerization reaction can be advanced by utilizing the energy absorbed by the agent. That is, when a sensitizer is added, it has a large absorption within the wavelength range of the irradiated light, and as a result, the sensitivity can be increased. In general, such a sensitized absorption wavelength range is expanded to a longer wavelength side than the inherent absorption wavelength range of the radical generator, and the photons emitted from the light source can be used efficiently, so that the sensitivity increases.
[0095]
Further, instead of the photosensitive composition having the above-described characteristics, a resin composition in which polymerization proceeds only by performing heat treatment is selected as the clad forming resin, and after forming the core, the strength is increased. Instead of the method of irradiating the entire uncured photosensitive composition with intense light, a method of curing the uncured resin by heat curing may be used to form a clad cured to a deformable extent to form an optical waveguide.
[0096]
Furthermore, as a clad forming resin, a polymer that is polymerized for the first time by irradiating light having a wavelength different from that of the core forming resin, and the refractive index after curing is smaller than the refractive index of the core forming resin after curing. After forming the core, the clad is formed using a method of irradiating light of a wavelength at which the clad forming resin is polymerized to the entire uncured photosensitive composition, and a stable clad is formed around the core. It may be formed.
In addition, when using what contains 2 or more types of photosensitive compositions (for example, resin for core formation, and resin for clad formation), the mixing ratio is not specifically limited.
By using such a manufacturing method, it is possible to manufacture an optical waveguide that is excellent in connectivity with the optical wiring and solidified in the entire system and excellent in stability.
[0097]
Here, a method for manufacturing an optical waveguide by immersing one end of an optical wiring in a photosensitive composition has been described. At this time, instead of the optical wiring, an optical component such as a light emitting element is used, and its light emitting surface is used. The core directly attached to the light emitting surface of the optical component can be formed by immersing the (light emitting portion) in the photosensitive composition or applying the photosensitive composition to the light emitting surface.
As described above, in the optical wiring or the optical component in which the core is directly attached, alignment between the optical waveguide (core) and the optical wiring or the like is unnecessary.
[0098]
Further, when the optical waveguide component is manufactured by the above-described method, the optical axes of the two optical wirings arranged to face each other do not necessarily coincide with each other. This is because even in such a case, the cores of the optical waveguides connected to each of the two can be formed.
[0099]
That is, first, at least one end of each of the two optical wirings is immersed in the photosensitive composition. Here, although the optical axes of the two optical wirings are shifted from each other, the optical wirings are arranged so that one ends of the optical wirings are substantially opposed to each other.
Next, light for curing the photosensitive composition is irradiated from each of the two optical wirings toward the optical wiring on the other side. In this case, the intensity of the light is increased in a portion where the emitted lights emitted from the two optical wirings overlap each other. Therefore, by setting the intensity of the irradiation light so that only the intensity of the light at the overlapping portion of the light is the intensity at which the core-forming resin can be polymerized, each of the ends connected to the optical wiring The core of the waveguide can be formed.
[0100]
Here, the method for producing an optical waveguide using a photosensitive composition has been described, but when the optical waveguide constituting the optical waveguide component of the present invention is made of a resin composition other than the photosensitive composition, For example, the optical waveguide can be manufactured by the following method.
That is, different optical wirings are arranged so that each one end faces each other, and a cylindrical core forming member filled with a resin composition containing a thermosetting resin or the like is arranged between each one end. The core of the optical waveguide can be formed by heating at a predetermined temperature to form a core for connecting different optical wirings, and then removing the core forming member while leaving the core.
[0101]
Up to this point, a method for manufacturing an optical waveguide component in which the optical waveguide has no branching portion using the self-forming method of the optical waveguide has been described. However, an optical waveguide component in which the optical waveguide has a branching portion is also used for the optical waveguide. It can be manufactured using a self-forming method.
[0102]
Hereinafter, a method of manufacturing an optical waveguide component in which the optical waveguide has a branching portion using the optical waveguide self-forming method will be described with reference to the drawings. Here, a method for manufacturing the optical waveguide component of the embodiment described with reference to FIG. 6 will be described. 6A to 6D are schematic views for explaining another example of the method for producing the optical waveguide component of the present invention.
[0103]
(1) In this manufacturing method, first, one end of the optical wiring 22 is immersed in the photosensitive composition 21 by applying an uncured photosensitive composition 21 or the like so as to wrap one end of the optical wiring 22.
Next, light for curing the photosensitive composition 21 is irradiated into the photosensitive composition 21 through the optical wiring 22. By irradiating light into the photosensitive composition 21 in this manner, the photosensitive composition 21 is gradually cured from the optical wiring side according to the light path, and forms an optical waveguide according to the light path. be able to.
[0104]
Moreover, in this method, when irradiating light in the photosensitive composition 21, the contact board 25 is previously arrange | positioned on the path | route of light. As described above, by arranging the contact plate, an end surface having an angle formed by the optical axis of the optical waveguide 24 with a desired angle (acute angle) is formed at the end of the optical waveguide 24 opposite to the optical wiring 22 side. (See FIGS. 6A and 6B).
[0105]
(2) Next, the uncured photosensitive composition 21 is removed, and another photosensitive composition 26 having a refractive index after curing different from the refractive index of the optical waveguide 24 is placed at least on the optical wiring 22 side of the optical waveguide 24. Apply to wrap around the opposite end.
Thereafter, the photosensitive composition 26 is irradiated with light through the optical wiring 22 and the optical waveguide 4 (see FIG. 6C).
[0106]
Here, the reason for using another photosensitive composition having a refractive index after curing different from that of the optical waveguide 24 will be briefly described. That is, in the optical wiring connector obtained by this manufacturing method, the optical waveguide is bent at the branch portion, but when the refractive index is different across the branch portion, the optical waveguide is transmitted through the optical waveguide. This is because the transmitted light is refracted at the branching portion, so that the light is reliably transmitted even if the optical waveguide is bent.
[0107]
When using such a method to irradiate the photosensitive composition 26 with light, a part of the light irradiated through the optical wiring 22 and the optical waveguide 24 is transmitted through the end face of the optical waveguide 24 and the photosensitive composition 26. The object 26 is irradiated. Further, another part of the light irradiated through the optical wiring 22 and the optical waveguide 24 is reflected by the end surface of the optical waveguide 24 opposite to the optical wiring 22 side, and the side surface of the end portion of the optical waveguide 24 is reflected. Thus, the photosensitive composition 26 is irradiated.
Here, the side surface at the end of the optical waveguide means the side surface near the end of the optical waveguide.
[0108]
By irradiating the photosensitive composition 26 with light in this manner, the light irradiated through the end surface of the optical waveguide 24 and the light irradiated through the side surface of the end portion of the optical waveguide 24 are respectively lighted. The optical waveguide 27a and the optical waveguide 27b corresponding to the path are formed.
[0109]
(3) Next, by connecting an optical wiring (not shown) to each end of the optical waveguides 27a and 27b opposite to the side connected to the optical waveguide 24, and further attaching deformation means, The optical waveguide component of the present invention can be obtained.
Here, as a method of connecting the optical wiring, the optical wiring may be connected through an adhesive, or the irradiation is performed through the end face of the optical waveguide 24 as in the manufacturing method described with reference to FIG. By arranging different optical wirings in advance on the optical paths of the light and the light irradiated through the side surfaces of the end portions of the optical waveguide 24, the optical waveguides 27a and 27b and these optical wirings May be connected.
By passing through such a process, the optical waveguide component which an optical waveguide has a branch part can be manufactured.
[0110]
Further, when manufacturing an optical waveguide having an optical component connected between the optical waveguides as described above, a method using a self-forming method of the optical waveguide of the optical waveguide can be used.
In this case, first, as described above, when one end of the optical wiring is immersed in the photosensitive composition and light is irradiated into the photosensitive composition, an optical component such as a mirror is previously placed on the optical path. Further, another optical wiring is placed on the optical path of the irradiation light reflected through this mirror. Then, the optical waveguide having a configuration in which the optical wiring is connected to each other through the optical waveguide and the mirror by irradiating light into the photosensitive composition through the optical wiring, and the optical component is connected between the optical waveguides. Parts are obtained.
[0111]
In addition, as a method of manufacturing the optical waveguide component of the present invention, for example, a method using reactive ion etching, an exposure development method, a mold forming method, a resist forming method, a method combining these, or the like can be used. It is also possible to use a method of forming an optical waveguide having a shape, and thereafter arranging the deformation means and connecting the optical wiring as required.
[0112]
In the method using the method using reactive ion etching,
(I) First, a core-forming resin is applied onto a substrate, a release film, or a clad resin layer, and further subjected to a curing treatment to obtain a core-forming resin layer.
(Ii) Next, a mask-forming resin layer is formed on the core-forming resin layer, and then the mask-forming resin layer is subjected to exposure and development treatment, whereby the core-forming resin layer is formed. A mask (etching resist) is formed.
(Iii) Reactive ion etching is performed on the core-forming resin layer to remove the core-forming resin layer in the portion where the mask is not formed, thereby forming a core. Through such a process, the core of the optical waveguide can be manufactured.
[0113]
In addition, after forming the core, a clad forming resin may be applied so as to cover the core, and further, if necessary, a curing treatment may be performed to form a clad resin layer covering the core. .
When a core is formed on the clad resin layer and further the clad resin layer is formed so as to cover the core, an optical waveguide in which the core is entirely surrounded by the clad resin can be formed.
[0114]
After manufacturing the optical waveguide by such a method, if necessary, after connecting the optical wiring to the end of the optical waveguide through an adhesive or the like, the optical waveguide is peeled off from the substrate or the like, By attaching the deformation means, the optical waveguide component of the present invention can be obtained.
[0115]
In the method using the above-described exposure development method,
(I) First, a core-forming resin is applied on a substrate, a release film, or a clad resin layer, and then a core-forming resin layer is formed by performing a semi-curing treatment as necessary.
(Ii) Next, a mask on which a pattern corresponding to the core forming portion is drawn is placed on the core forming resin layer, and then a core is formed by performing an exposure development process. Through such a process, the core of the optical waveguide can be manufactured.
[0116]
In addition, after forming the core, a clad forming resin may be applied so as to cover the core, and further, if necessary, a curing treatment may be performed to form a clad resin layer covering the core. .
When a core is formed on the clad resin layer and further the clad resin layer is formed so as to cover the core, an optical waveguide in which the core is entirely surrounded by the clad resin can be formed.
[0117]
After manufacturing the optical waveguide by such a method, the optical waveguide component of the present invention is obtained by connecting the optical wiring, peeling the substrate, etc., and attaching the deformation means in the same manner as described above. Can do.
[0118]
In the method using the above mold forming method,
(I) First, a groove for forming a core is formed by forming a mold on a substrate, a release film, or a clad resin layer.
(Ii) Next, a core-forming resin is filled in the groove by printing, and then a curing process is performed to form a core. Through such a process, the core of the optical waveguide can be manufactured.
[0119]
In addition, after forming the core, a clad forming resin may be applied so as to cover the core, and further, if necessary, a curing treatment may be performed to form a clad resin layer covering the core. .
When a core is formed on the clad resin layer and further the clad resin layer is formed so as to cover the core, an optical waveguide in which the core is entirely surrounded by the clad resin can be formed.
[0120]
After manufacturing the optical waveguide by such a method, the optical waveguide component of the present invention is obtained by connecting the optical wiring, peeling the substrate, etc., and attaching the deformation means in the same manner as described above. Can do.
[0121]
In the method using the resist forming method,
(I) First, a resist resin composition is applied on a substrate, a release film, or a clad resin layer, and then exposed and developed to form a core on a non-core portion on the substrate or the like. A resist is formed.
(Ii) Next, a core-forming resin is applied to the non-resist forming portion, and after the core-forming resin is cured, the core-forming resist is peeled off to form a core. Through such a process, the core of the optical waveguide can be formed.
[0122]
In addition, after forming the core, a clad forming resin may be applied so as to cover the core, and further, if necessary, a curing treatment may be performed to form a clad resin layer covering the core. .
When a core is formed on the clad resin layer and further the clad resin layer is formed so as to cover the core, an optical waveguide in which the core is entirely surrounded by the clad resin can be formed.
[0123]
After manufacturing the optical waveguide by such a method, the optical waveguide component of the present invention is obtained by connecting the optical wiring, peeling the substrate, etc., and attaching the deformation means in the same manner as described above. Can do.
[0124]
In addition, when manufacturing optical waveguide components using these methods, if only the core of the optical waveguide is formed, it is connected to the optical wiring or attached with deformation means, and then the periphery of this core functions as a cladding. It may be filled with a liquid resin composition that can be used.
The optical waveguide component of the present invention can be manufactured using such various methods.
[0125]
【Example】
Hereinafter, the present invention will be described in more detail.
[0126]
(See Example 1: FIG. 7)
(1) Two GI-type quartz multimode fibers (Fujikura, core / cladding = 50 μm / 125 μm) having a length of about 1 m subjected to end face treatment were prepared.
(2) From one end of each fiber 12, 12 ', spectral distribution mainly in a wavelength range of 200 to 500 nm from an ultraviolet irradiation device 15 (Matsushita Machine and Vision, 5252L) using a 250 W high-pressure mercury lamp as a light source. The ultraviolet illuminance irradiated from the other end of each of the fibers 12 and 12 ′ on the output side is input by using an ultraviolet irradiator (Ushio Corporation, UIT-150). cm²It was adjusted to become.
[0127]
(3) Next, each of the fibers 12 and 12 'is fixed to each of the optical fiber fixing bases placed on two optical fine movement bases (XY stage) (not shown), and the respective fibers on the output side. The ends of 12 and 12 'are positioned together with the optical fiber V-groove substrate 16 (manufactured by Moritex Corp., quartz V-groove) with an interval of about 2000 μm. 11 (manufactured by Loctite, Loctite No. 358; the refractive index after curing at a wavelength of 589 nm is 1.51) was applied so as to be buried between the fibers 12 and 12 'without any gaps. Thereafter, the butt portion and the photosensitive composition 11 were sandwiched and fixed by a V groove pressing plate. However, in consideration of the indentation of the fiber, which will be described later, the amount of pinching was adjusted to such an extent that the fiber was movable by the optical fine movement table.
[0128]
(4) Next, while holding the fibers 12 and 12 ′ in the state of (3), the ultraviolet light whose illuminance is adjusted in the above (2) is simultaneously applied from the exit ends of the respective fibers 12 and 12 ′. 11 was irradiated for 10 seconds to form a core, and an optical waveguide component using an optical fine movement table as a deformation means was obtained.
Thereafter, the shape of the formed core was observed using a microscope (VH-7000, manufactured by Keyence Corporation). As a result, it was observed with a microscope that a core was formed from the exit ends of both fibers 12 and 12 ', and that each core was coupled near the middle.
[0129]
Furthermore, in the optical waveguide component manufactured through the above steps (1) to (4), visible light is irradiated from the emission end of the fiber 12 and light leakage from the optical waveguide is observed to follow the optical waveguide shape. As a result, it was confirmed that light emitted from the formed optical waveguide was confined in the optical waveguide.
[0130]
Further, an infrared ray having a wavelength of 850 nm is incident from the end of the fiber 12 opposite to the side connected to the optical waveguide, guided in the optical waveguide, and opposite to the side of the fiber 12 'connected to the optical waveguide. The intensity of infrared rays emitted from the end of each was measured, and the optical loss was calculated. As a result, the optical loss of the optical waveguide component was 1.8 dB.
[0131]
Next, using the above-mentioned optical fine movement table, the optical waveguide was pushed from one side by 50 μm in the direction substantially parallel to the optical signal transmission direction. When the optical waveguide in this state was observed with a microscope, it was confirmed that a part of the optical waveguide was curved.
In such a curved optical waveguide, when visible light is irradiated from the output end of the fiber 12 and light leakage from the optical waveguide is observed, radiated light is observed at the curved portion of the optical waveguide. It was confirmed that no light was trapped inside.
[0132]
Further, the optical loss in a state where a part of the optical waveguide was curved was measured and calculated using the same method as described above, and was 32 dB. This light quantity is reduced to 1/1000 (30 dB) or more compared to the light quantity measured before the optical waveguide is pushed.
From these results, it was revealed that the optical waveguide component manufactured in Example 1 functions as an optical attenuator having an extinction ratio of 30 dB or more.
[0133]
Further, using the above-mentioned optical fine movement table, the optical waveguide was pulled back from one side in a direction substantially parallel to the optical signal transmission direction, and the end thereof was pulled back to the original length by 50 μm. When the optical waveguide in this state is observed with a microscope, the optical waveguide is straight as in the initial state, and it is also possible to irradiate visible light from the emission end of the fiber 12 and observe light leakage from the optical waveguide. The light leakage was observed along the shape of the optical waveguide, and it was confirmed that the light emitted to the formed optical waveguide was confined in the optical waveguide. Regarding the optical loss in this state, when the optical loss was measured using the same method as described above, it was restored to the original equivalent state of 1.8 dB.
From these results, it was revealed that the optical waveguide component manufactured in Example 1 functions not only as an optical attenuator with an extinction ratio of 30 dB or more, but also as an optical switch having an ON / OFF function.
[0134]
Further, the shape of the optical waveguide is once returned to a linear shape using the optical fine movement table, and then the optical waveguide is pushed in steps of 10 μm in steps of 50 μm from one side in a direction substantially parallel to the optical signal transmission direction. I went. When the optical waveguide in this state was observed with a microscope, it was confirmed that a part of the optical waveguide was gradually curved.
In such an optical waveguide curved in stages, visible light was irradiated from the output end of the fiber 12 and leakage from the optical waveguide was observed. As a result, leakage along the shape of the optical waveguide was observed. However, radiated light was also observed at the part of the optical waveguide that gradually curved, and the degree increased with the amount of pushing, and it was thought that the light was not completely confined within the optical waveguide. .
[0135]
In addition, for an optical waveguide that bends in a stepwise manner as described above, the change in optical loss due to the amount of pressing was measured and calculated using the same method as described above. The results are shown in Table 12.
As is clear from the results in Table 12, the optical loss is 3.5 dB, 9.5 dB, 19.5 dB, 26.5 dB for each indentation amount (10 μm, 20 μm, 30 μm, 40 μm, 50 μm), It gradually changed to 32 dB. From these results, it is clear that the optical waveguide component manufactured in Example 1 also functions as a variable optical attenuator.
[0136]
In the optical switch manufactured through the steps (1) to (4), an ON / OFF switching operation for a 2000 μm optical waveguide, that is, an operation for pushing the optical waveguide by 50 μm (OFF) and an operation for pulling the optical waveguide back by 50 μm. (ON) was repeated 1000 times.
In such repeated switching operation, the response waveform was measured. A part of the result is shown in FIG. FIG. 13 shows the response waveforms at the 100th to 103rd times in the switching operation.
As is apparent from the response waveform of FIG. 13, the measured values are maintained at 32 dB or more (OFF) /1.8 dB (ON) with good reproducibility, and can withstand repeated operations. It was confirmed. FIG. 13 shows a part of the response waveform obtained when 1000 times of switching operations are performed, but similar response waveforms are obtained in the first to 1000th response switching operations. ing.
Therefore, by repeatedly performing the switching operation as described above, the optical waveguide component according to the present embodiment has a very small displacement of the optical waveguide of 50 μm, so that the optical fine movement table can be moved quickly. As shown in FIG. 13, it has become clear that a substantially rectangular response waveform can be obtained.
[0137]
As described above, the optical switch according to Example 1 sufficiently has a function as an optical switch. However, in this optical switch, as the switching time is shortened, in the response waveform shown in FIG. A slight increase in the loss value seen when switching from OFF to ON slows down the function as a switch. Therefore, in order to obtain a better response as an optical switch, a rectangular response waveform is further desired.
[0138]
In addition, when the switching time is shortened, the gentle loss value increases when the core is affected by the liquid cladding existing around the core when switching from OFF to ON. It is assumed that it is caused by the fact that it cannot return to the state immediately.
Therefore, in order to improve the responsiveness of the optical switch, the following examples were performed.
[0139]
(Example 2)
An optical switch was manufactured through steps similar to the steps (1) to (4) of Example 1, and an ON / OFF switching operation for a 2000 μm optical waveguide was performed. Here, after the optical waveguide is pushed in by 50 μm and turned off, when the optical waveguide is pulled back and turned on, it is pulled back once by 60 μm, that is, once pulled back excessively (ON₁) Immediately thereafter, return 10 μm and return it to the specified position (ON₂The optical waveguide was turned on through the operation.
FIG. 14 shows response waveforms obtained by repeating such ON / OFF operations. The response waveform was measured by the same method as in Example 1.
[0140]
As a result, an apparently rectangular response waveform was obtained as compared with the response waveform measured in Example 1.
Thus, when the optical waveguide is switched on, the state once pulled back 60 μm (ON₁), The tension is applied to the core of the optical waveguide because it is pulled back by an excess of 10 μm. Therefore, it is easy for the core to return to the predetermined state.₂), The core can immediately return to a predetermined state. As a result, a response waveform having a rectangular shape, that is, excellent response can be obtained as compared with the first embodiment.
[0141]
Note that, as described in Japanese Patent Application Laid-Open No. 2003-121677, the structure itself exists in a stable manner, and in this sense, the tensioned waveguide can be maintained in a state of being pulled. A rectangular response is obtained. However, as described in the same publication, since the loss value may decrease compared to the original state when the suction pressure is applied, in Example 2, the core is returned to the original state by immediately returning 10 μm. The operation of returning to the position is performed. Of course, this operation is not necessary when the loss value does not decrease even when the suction pressure is applied, or when no problem occurs even if the loss value decreases or increases for any reason.
In this manner, the response waveform obtained in the first embodiment can be improved by a slight operation improvement as in the second embodiment.
[0142]
(Example 3: See FIG. 8)
(1) On the flat quartz glass plate 38 (refractive index at a wavelength of 589 nm: 1.46), the photosensitive composition (Loctite No. 358) used in Example 1 was spin-coated, and the film thickness after curing was The core-forming resin layer was formed by coating to a thickness of 40 μm.
[0143]
(2) Next, a mask (not shown) on which a core pattern (width: 40 μm) having one branch portion 34a is drawn is placed on the core-forming resin layer, and then subjected to an exposure process. A core 34 (consisting of 34A, 34B and 34C) was formed. Here, the core is designed in such a shape that light is transmitted substantially only to one of the branched cores (34B or 34C) (see FIG. 8A).
[0144]
(3) Next, the fibers 32, 35, and 36 are connected to the end portions of the core 34 (34A, 34B, and 34C) using the photosensitive composition as an adhesive, and the quartz glass plate is removed. Thus, an optical waveguide component was obtained (see FIG. 8B). Further, the fiber connected here is fixed by an optical fiber fixing base, and the optical fiber fixing base to which the fiber 32 connected to the non-branched core is fixed is an optical fine movement base (XY stage) ( (Not shown). Therefore, the optical waveguide component manufactured in this example uses an optical fine movement table as a deformation means.
In the optical waveguide component manufactured in this example, the clad is made of air.
[0145]
Next, with respect to the optical waveguide component manufactured in this way, infrared light having a wavelength of 850 nm is incident from the end of the fiber 32 opposite to the side connected to the optical waveguide, and connected to the respective optical waveguides of the fibers 35 and 36. The intensity of infrared rays emitted from the opposite end to the measured side was measured, and the optical loss between the fiber 32 and the fiber 35 and the optical loss between the fiber 32 and the fiber 36 were calculated.
As a result, the optical loss between the fiber 32 and the fiber 36 was 1 dB. On the other hand, the optical loss calculated from the intensity of infrared rays emitted from the fiber 35 was 35 dB. Therefore, it has been clarified that the optical waveguide component produced here functions as an almost single optical waveguide for connecting the fiber 32 and the fiber 36.
[0146]
Next, the optical waveguide 34 is deformed by moving the fiber 32 using the optical fine movement table (the optical waveguide 34A is bent at the branching portion 34a), and the fiber 32 and the fiber 35 are in a straight line (the optical waveguide 34A and the optical waveguide are optically guided). The waveguide 34C is in a straight line (see FIG. 9).
Thereafter, the optical loss between the fiber 32 and the fiber 35 and the optical loss between the fiber 32 and the fiber 36 were calculated using the same method as described above. As a result, the optical loss between the fiber 32 and the fiber 35 was 1 dB. On the other hand, the optical loss calculated from the intensity of infrared rays emitted from the fiber 36 was 35 dB. Therefore, it has been clarified that this optical waveguide component functions as an almost single optical waveguide for connecting the fiber 32 and the fiber 35 by this deformation.
From these results, it is clear that the optical waveguide component manufactured in Example 3 functions as an optical switch.
[0147]
(Example 4: See FIG. 10)
(1) Three GI-type quartz multimode fibers (Fujikura, core / clad = 50 μm / 125 μm) having a length of about 1 m subjected to end face treatment were prepared. Further, each of the three fibers prepared here was fixed to an optical fiber fixing base placed on an optical fine movement table (XY stage) (not shown).
[0148]
(2) First, a photosensitive composition 41 (Loctite No. 358; refractive index after curing at a wavelength of 589 nm: 1.51) is applied to one end of one fiber, and a 250 W high-pressure mercury lamp is applied. An ultraviolet illuminance meter that emits ultraviolet light having a spectral distribution in a wavelength range of 200 to 500 nm from an ultraviolet irradiation device 25 (Matsushita Machine and Vision Co., Ltd., 5252L) as a light source and emits from the other end of the fiber 42. (Ushio Corporation, UIT-150) 0.3 mW / cm²It was adjusted to become.
[0149]
(3) Next, the end portion of the output-side fiber 42 is positioned on a V-groove substrate (not shown) for optical fiber (manufactured by Moritex Co., Ltd., quartz V-groove). The coating plate 45 is disposed so that the angle formed by the optical axis of the fiber 42 is 13 °, and the photosensitive composition 41 used in the above (2) is placed in the gap between the entire end of the fiber 42. It was applied so that it was completely buried. Thereafter, the end portion of the fiber 42 and the photosensitive composition 41 were sandwiched by the V groove pressing plate so as not to move.
[0150]
(4) Next, while holding the fiber 42 in the state of (3) above, the ultraviolet light whose illuminance is adjusted in (2) above is irradiated into the photosensitive composition 41 from the emission end of the fiber 42 (FIG. 10). An optical waveguide 44 having an end face with an angle of 13 ° with the optical axis was formed on the side opposite to the side connected to the fiber 42 (see (a)) (see FIG. 10B).
[0151]
(5) After the step (4) is completed, the V-groove holding plate is removed, the optical waveguide 44 is pulled up together with the fiber 42 from the V-groove, and the surrounding uncured resin composition 41 and the coating plate 45 are removed. Then, the photosensitive composition 43 (Daikin, Optodyne; refractive index after curing at a wavelength of 589 nm) is placed on a flat glass plate and is formed on the entire end face having an angle of 13 ° with the optical axis of the optical waveguide. : 1.48) was applied so as to be buried without gaps.
Next, using a UV irradiation device (5252L manufactured by Matsushita Machine and Vision Co., Ltd.) using a 250 W high-pressure mercury lamp as a light source, a spectral distribution is mainly distributed in a wavelength range of 200 to 500 nm through the fiber 42 and the optical waveguide 44. Ultraviolet light with an illuminance of 0.3 mW / cm²Then, the photosensitive composition 43 (Optodyne) was irradiated.
[0152]
When ultraviolet rays are irradiated in this step, a part of the ultraviolet rays are irradiated into the photosensitive composition 43 through the end face at the end portion forming an angle of 13 °, and the other part of the ultraviolet rays is light-guided. The light is reflected at the end of the waveguide 44 and is irradiated into the photosensitive composition 43 through the side surface of the end of the optical waveguide 44 (see FIG. 10C).
For this reason, in this embodiment, the ultraviolet light path irradiated through the end face of the optical waveguide 44 and the ultraviolet light path reflected by the end face of the optical waveguide 44 and irradiated through the side face of the end section. Fibers 48 and 49 were previously disposed in each of these, and further, these fibers and the photosensitive composition were sandwiched and fixed by a pressing plate. However, in consideration of the push-in amount of the fiber, which will be described later, the pinching amount is adjusted to such an extent that the fiber can be moved by the optical fine movement table.
[0153]
As described above, by arranging the fibers in advance on the optical path, the photosensitive composition 43 is gradually cured from the end portion side of the optical waveguide 44, and each of the two fibers 48 and 49 separately disposed. Thus, an optical waveguide connected to is formed (see FIG. 10D).
[0154]
Next, when the integrated optical waveguides 44, 46 and 47 formed in this example were observed using a microscope (VH-7000, manufactured by Keyence Corporation), the optical waveguide 47 was formed on the side surface of the end portion of the optical waveguide 44. In addition to being connected, the optical waveguide 46 was connected to the end face of the optical waveguide 44.
Further, when visible light is incident from the end of the fiber 42 connected to the optical waveguide 44 on the side opposite to the side connected to the optical waveguide 44, along the shape of the integrated optical waveguide, that is, along the branched shape. Light leakage was observed.
Further, when the intensity of light leakage from the respective ends of the fiber 48 and the fiber 49 is compared, it is approximately fiber 48: fiber 49 = 10: 1, and the optical waveguide component manufactured in this embodiment functions as an optical coupler. It became clear.
[0155]
Further, an infrared ray having a wavelength of 850 nm is incident from an end of the fiber 42 connected to the optical waveguide 44 on the side opposite to the side connected to the optical waveguide 44, and is connected to each of the optical waveguide 46 and the optical waveguide 47. Infrared intensity emitted from the ends of 48 and 49 was measured, and optical loss was measured. As a result, the optical loss through the optical waveguide 44 and the optical waveguide 46 was 2 dB, and the optical loss through the optical waveguide 44 and the optical waveguide 47 was 20 dB.
[0156]
Next, the optical waveguide 46 was pushed by 20 μm in a direction substantially parallel to the transmission direction of light travel using an optical fine movement table. When the optical waveguide in this state was observed with a microscope, it was confirmed that a part of the optical waveguide 46 was curved.
Further, in this state, when visible light was introduced into the optical waveguide using the same method as described above, it was confirmed that light was confined in the optical waveguide 44 and the optical waveguide 47. In the waveguide 46, the radiated light was observed at the curved portion, and it was confirmed that the light was not confined in the optical waveguide.
Further, when the optical loss was measured using the same method as described above, the optical loss through the optical waveguide 44 and the optical waveguide 47 was not changed, but the optical loss through the optical waveguide 44 and the optical waveguide 47 was not changed. It was 35 dB. This light quantity is reduced to 1/1000 (30 dB) or more compared to the light quantity measured before the optical waveguide is pushed.
[0157]
Further, the optical waveguide 46 was returned to the original linear shape, and then the optical waveguide 47 was pushed in by 10 μm in a direction substantially parallel to the transmission direction of the light travel using an optical fine movement table. When the optical waveguide in this state was observed with a microscope, it was confirmed that a part of the optical waveguide 47 was curved.
Further, in this state, when visible light was introduced into the optical waveguide using the same method as described above, it was confirmed that light was confined in the optical waveguide 44 and the optical waveguide 46. In the waveguide 47, the emitted light was observed at the curved portion, and it was confirmed that the light was not confined in the optical waveguide.
Further, when the optical loss was measured using the same method as described above, the optical loss through the optical waveguide 44 and the optical waveguide 46 did not change, but the optical loss through the optical waveguide 44 and the optical waveguide 47 did not change. It was 45 dB. This light quantity is reduced to 1/100 (20 dB) or more compared to the light quantity measured before the optical waveguide is pushed.
[0158]
Further, the optical waveguide 47 was returned to the original linear shape, and then the optical waveguide 44 was pushed by 20 μm in a direction substantially parallel to the optical signal transmission direction using an optical fine movement table. When the optical waveguide in this state was observed with a microscope, it was confirmed that a part of the optical waveguide 44 was curved.
Further, in this state, when visible light is introduced into the optical waveguide using the same method as described above, radiated light is observed in the curved portion of the optical waveguide 44, and the light is not confined in the optical waveguide. It was confirmed.
Further, when the optical loss was measured using the same method as described above, the optical loss through the optical waveguide 44 and the optical waveguide 46 and the optical loss through the optical waveguide 44 and the optical waveguide 47 were 35 dB and 45 dB, respectively. there were. The amount of light is reduced to 1/1000 and 1/100 (20 dB) or more, respectively, compared to the amount of light measured before pushing the optical waveguide.
In the optical waveguide formed in this example, the total length of the optical waveguide 44 and the optical waveguide 46 and the total length of the optical waveguide 44 and the optical waveguide 47 are 1500 μm and 1060 μm, respectively.
[0159]
Further, when each of the optical waveguide 44, the optical waveguide 46, and the optical waveguide 47 is pushed in a direction substantially parallel to the transmission direction of the optical signal, when the pushing distance is reduced to 1/10, Even when the optical waveguide is pushed, the optical loss of the optical waveguide increases, but the optical loss through the optical waveguide 44 and the optical waveguide 47 is 5 dB and 25 dB, respectively. Here, it is confirmed that some signals are transmitted although losses of 3 dB and 5 dB are generated, respectively, and the optical waveguide component manufactured in this embodiment can also be used as an optical coupler with an optical attenuator function. It became clear that we could do it.
[0160]
(Comparative Example 1)
(1) Two GI-type quartz multimode fibers (Fujikura, core / cladding = 50 μm / 125 μm) having a length of about 1 m subjected to end face treatment were prepared.
(2) Next, each of the two fibers 112 and 112 ′ is fixed to each of the optical fiber fixing bases placed on the two optical fine movement bases (XY stage), and the end of each outgoing side fiber is fixed. The portions 112a and 112a 'are aligned with the optical fiber V-groove substrate 116 (Mortex Corp., quartz V-groove) and positioned so that the gap between the end portions on the output side of both fibers is substantially eliminated (see FIG. 15). . Thereafter, the butt portion was sandwiched and fixed by a V groove pressing plate. However, in consideration of the movement of the fiber, which will be described later, the amount of pinching is adjusted to such an extent that the fiber is movable by the optical fine movement table.
[0161]
(3) An infrared ray having a wavelength of 850 nm is incident from the end of the fiber 112 opposite to the end facing the end 112a 'of the fiber 112', guided in the fiber, and the fiber 112 ' Infrared intensity emitted from the end opposite to the side facing the end 112a was measured to calculate the optical loss. As a result, the optical loss of the optical waveguide component was 0.5 dB.
[0162]
(4) Next, the optical fiber 112 is moved little by little in the direction substantially parallel to the optical signal transmission direction by using the optical fine movement table, and the gap amount is increased. The loss value caused by the gap was measured by the same method as in (3).
[0163]
As a result, the loss value increased with an increase in the gap amount at the fiber end. Specifically, a behavior of an increase in loss amount as shown in FIG. 16 was observed.
From this result, it was found that the loss value increased as the gap amount increased, and this operation also worked as a variable attenuator, but compared with the optical waveguide component functioning as the optical attenuator fabricated in Example 1. In this case, the amount of change in loss in this comparative example is very insensitive to the amount of displacement (= gap amount) of the fiber. To obtain a loss value of 10 dB, a loss value of about 600 μm and 20 dB is obtained. A displacement amount of about 7000 μm was required. Although the loss value increases with the amount of displacement, the increase is very smooth after the displacement amount exceeds about 4000 μm, and the loss value of 30 dB or more obtained in Example 1 is obtained. For this purpose, it is presumed that a displacement amount of several centimeters is necessary, and accordingly, a work necessary for the displacement is required, and it is considered that the attenuator device itself needs to be enlarged.
[0164]
Further, as in the first embodiment, the optical switch can be functioned by adjusting the gap amount. However, in order to function as an optical switch having an extinction ratio of 20 dB, the ON / OFF operation is repeated approximately 7000 μm. Displacement must be given. Therefore, the optical switch according to Comparative Example 1 has a very slow response waveform, and it is apparent that a rectangular response cannot be obtained at the same displacement speed as the optical switch according to Example 1.
[0165]
Furthermore, when the fibers are brought into contact with each other by the ON / OFF switching operation (when switched ON), the fiber end faces are chipped due to contact between the fibers unless careful attention is paid, and the broken state or chipping is not achieved. Due to the presence of debris between the fibers, reproducibility cannot be obtained when repeated operations are performed, and in order to obtain repetitive reproducibility as obtained with the optical switch according to Example 1, In addition, precise experimental operations must be performed. On the other hand, in the operation of the optical waveguide component of Example 1, it is impossible for the fibers to directly contact each other (because the displacement amount (because the pushing amount is 50 μm) with respect to the fiber interval of 2000 μm), The operation can be performed without worrying about damage to the optical waveguide.
[0166]
【The invention's effect】
As described above, the optical waveguide component of the present invention has a function as an optical switch, for example, when the ON / OFF operation is repeated or the optical path is repeatedly switched as the optical switch. However, the transmission loss of the optical waveguide does not increase, and the reliability is excellent.
In addition, the optical waveguide component of the present invention can be used as, for example, an optical attenuator (optical attenuator), an optical coupler (optical multiplexer / demultiplexer), etc., and even when used as an optical attenuator or optical coupler for a long time, The transmission loss of the optical waveguide does not increase, and the reliability is excellent.
Moreover, since the optical waveguide component of the present invention can be manufactured using, for example, a self-forming method of an optical waveguide, it can be mass-produced at a low cost.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view schematically showing an example of an optical waveguide component of the present invention.
FIG. 2 is a cross-sectional view schematically showing another example of the optical waveguide component of the present invention.
FIG. 3 is a cross-sectional view schematically showing another example of the optical waveguide component of the present invention.
FIG. 4 is a cross-sectional view schematically showing another example of the optical waveguide component of the present invention.
FIGS. 5A to 5C are schematic views for explaining an example of a method for producing the optical waveguide component of the present invention. FIGS.
6A to 6C are schematic views for explaining an example of a method for producing an optical waveguide component according to the present invention.
FIG. 7 is a schematic diagram for explaining a method of manufacturing an optical waveguide component performed in an example.
FIGS. 8A and 8B are schematic views for explaining a method for manufacturing an optical waveguide component of Example 2. FIGS.
9 is a schematic view for explaining an optical waveguide component manufactured in Example 2. FIG.
FIGS. 10A to 10D are schematic views for explaining a method for manufacturing an optical waveguide component of Example 2. FIGS.
11A and 11B are cross-sectional views schematically showing another example of the optical waveguide component of the present invention.
12 is a graph showing the relationship between the fiber push-in amount and the loss value in the optical waveguide component of Example 1. FIG.
13 is a chart showing a part of a response waveform when the optical waveguide component of Example 1 is repeatedly used as an optical switch. FIG.
14 is a chart showing a part of a response waveform when the optical waveguide component of Example 2 is repeatedly used as an optical switch. FIG.
15 is a schematic view for explaining an optical waveguide component manufactured in Comparative Example 1. FIG.
16 is a graph showing the relationship between the amount of fiber displacement and the loss value in the optical waveguide component of Comparative Example 1. FIG.
[Explanation of symbols]
100, 200, 300, 400, 500 Optical waveguide component
101, 201, 301, 401, 501 core
102, 202, 302, 402, 502 Cladding
103, 104, 203, 204, 205, 303, 304, 305, 306, 403, 404, 405, 503, 504 Optical wiring

Claims (2)

An optical waveguide component comprising: a deformable optical waveguide having two or more ends connected to an optical wiring; and a deforming means for deforming the optical waveguide, wherein the optical waveguide is controlled by deforming the optical waveguide. Because
The optical waveguide is disposed after placing the optical wiring so that one end of at least two optical wirings of the optical wiring are substantially facing each other, and both facing ends are immersed in the uncured photosensitive composition. Including a core part made of a resin composition having flexibility for connecting the two optical wirings formed by irradiating light through the optical wirings, and having a branching part,
The optical waveguide is deformed by bending the optical waveguide by pushing the optical waveguide in a direction substantially parallel to the optical signal transmission direction and in the same direction as the transmission direction and / or opposite to the transmission direction. An optical waveguide component that functions as an optical switch or an optical coupler . The optical waveguide component according to claim 1, wherein the optical waveguide also functions as an optical attenuator capable of adjusting an optical loss amount by adjusting an amount of pushing .

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