JP4370697B2 - Screen printing plate and manufacturing method thereof - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a screen printing plate used for screen printing and a method for producing the same, and in particular, improved printability for preventing formation of a mesh mark during thin film printing and enabling formation of a uniform paste print film. It is about.
[0002]
[Prior art and problems to be solved by the invention]
Multilayer ceramic electronic components, such as multilayer ceramic capacitors, are usually laminated by pressing and pasting a plurality of ceramic green sheets on which a large number of internal electrode patterns are arranged by printing and applying an electrode paste. It is manufactured through a process of firing after cutting out the element.
A screen printing method is generally used as a method for forming an electrode pattern having a predetermined shape by printing an electrode paste.
[0003]
By the way, in recent years, with the progress of miniaturization and higher capacity of multilayer ceramic electronic components, it is necessary to increase the number of stacked ceramic green sheets on which electrode patterns are formed, and in order to realize this, electrode paste Therefore, it is necessary to form an electrode pattern having a thin printed film thickness, excellent uniformity, and high dimensional accuracy.
[0004]
When trying to form a thin electrode pattern (paste printing film) by screen printing, it is effective to reduce the plate thickness of the screen printing plate, and in particular, it has a planar shape corresponding to the mesh portion and the printing pattern shape. A screen printing plate in which recesses are integrally formed by a plating method is suitable for thin film printing because the plate thickness can be reduced by controlling the plating amount and the depth of the recesses can be reduced.
[0005]
FIG. 6 is a perspective view showing a conventional screen printing plate used for screen printing, and FIG. 7 is a sectional view taken along line BB.
The screen printing plate 51 includes a mesh portion 52 having a planar shape substantially corresponding to a printed pattern shape formed by providing a plurality of mesh opening holes 52a through which a paste to be printed passes, and a non-opening portion through which the paste does not pass. 53 and a concave portion 55 having a planar shape corresponding to a predetermined print pattern shape, which is formed on the surface of the mesh portion 52 facing the substrate 54 (FIG. 8).
[0006]
As the shape (planar shape) of the mesh opening hole 52a, various shapes such as a triangle, a quadrangle, other polygons, and a circle can be adopted. A mesh opening hole 52a is formed.
[0007]
FIG. 8 is a cross-sectional view showing a state where printing is performed using the screen printing plate 51. When printing the paste 56 using the screen printing plate 51, as shown in FIG. 8, the paste 56 is moved to the screen printing plate 51 and moved in the horizontal direction. The paste 56 is printed by passing through the hole 52a and being transferred to the surface of the substrate 54.
[0008]
However, in the screen printing plate 51, the cross-sectional shape in the direction orthogonal to the longitudinal direction of the mesh linear portion 52b constituting the mesh portion 52 is a rectangle, and the surface (lower surface) 52c parallel to the printing medium 54 is used. Therefore, when the thickness of the screen printing plate 51 is reduced to obtain a paste printing film having a thin print coating thickness, the mesh portion 52 is pressed by the squeegee 57 from above (hereinafter, As shown in FIG. 8, the central portion of the mesh portion 52 and the vicinity thereof are deformed into a concave shape, and the lower surface 52 c of a part of the mesh linear portions 52 b comes into contact with the printing medium 54 (referred to as “squeegee pressure”). Surface contact).
[0009]
As described above, when the lower surface 52c of the mesh linear portion 52b and the printing medium 54 are in surface contact with each other, there is no space for the paste 56 that has passed through the mesh opening hole 52a to enter, as shown in FIG. In the paste print film 56a formed on the substrate 54, the paste 56 is not printed, or even if it is printed, a very thin area (so-called mesh mark) 56b is generated, and the film thickness is thin and uniform. There is a problem that a paste printing film cannot be obtained.
[0010]
The present invention solves the above problems, and an object thereof is to provide a screen printing plate capable of forming a paste printing film having a uniform film thickness even when the printing thickness is thin, and a method for producing the same. And
[0011]
[Means for Solving the Problems]
In order to achieve the above object, the screen printing plate of the present invention (Claim 1)
A mesh portion formed by arranging a plurality of mesh opening holes through which a paste to be printed passes, in a predetermined region having a shape substantially corresponding to a print pattern shape;
A non-opening portion that is provided around the mesh portion and does not allow the paste to pass;
A screen printing plate integrally provided with a concave portion having a planar shape corresponding to a predetermined printing pattern shape, which is formed on the printing surface side facing the printing body of the mesh portion,
The cross-sectional shape in a direction orthogonal to the longitudinal direction of the mesh linear portion constituting the mesh portion has a substantially semicircular shape or a substantially semielliptical shape such that an arc portion faces the print surface side. Yes.
[0012]
By making the cross-sectional shape in the direction perpendicular to the longitudinal direction of the mesh linear part constituting the mesh part into a substantially semicircular or substantially semi-elliptical shape with the arc part facing the printing surface, for example, screen printing from above Even when the squeegee is pressed against the plate and the lower surface of the mesh linear portion abuts on the substrate, the contact state between the lower surface of the mesh linear portion and the substrate is in a line contact state, and the above-described conventional screen printing is performed. Unlike the plate, the contact state between the lower surface of the mesh linear portion and the printing medium is not surface contact, so that a space for the paste that has passed through the mesh opening hole to enter is secured. Therefore, even when a thin paste printing film is to be formed, it is possible to form a uniform paste printing film without a so-called mesh mark in a region where the paste of the printing medium is to be printed.
[0013]
In the present invention, “the cross-sectional shape in the direction orthogonal to the longitudinal direction of the mesh linear portion has a substantially semicircular or semi-elliptical shape such that the arc portion faces the print surface”. In a strict sense, it is not a requirement that the cross-sectional shape of the mesh linear portion has a semicircle or semi-elliptical shape, but a shape having a rounded part in the cross-sectional shape. In addition, when the arc part (rounded part) is directed to the printing surface side and comes into contact with the printing surface, the semicircular shape or semi It is a broad concept including various shapes similar to an elliptical shape.
[0014]
In the present invention, the “paste” is a broad concept including a conductive paste, a resistance paste, an adhesive paste, and other various pastes.
[0015]
In the present invention, the “printed body” is a concept that means, for example, a green sheet, a ceramic sintered body, and other various printing objects used for manufacturing a multilayer ceramic electronic component.
[0016]
The screen printing plate of claim 2 is characterized in that the mesh portion has a thickness in the range of 1 to 30 μm and the concave portion has a depth in the range of 1 to 30 μm.
[0017]
The thickness of the mesh portion is 1 to 30 μm, and the depth of the concave portion having a planar shape corresponding to the print pattern shape is 1 to 30 μm (that is, the thickness around the mesh portion is 1 to 30 μm thicker than the thickness of the mesh portion). By doing so, it becomes possible to reliably form a paste printed film having a thin film thickness and high shape accuracy, and the present invention can be more effectively realized.
[0018]
The screen printing plate according to claim 3 is characterized in that at least the mesh portion and the non-opening portion are integrally formed from a metal material.
[0019]
By forming at least the mesh portion and the non-opening portion integrally using a metal material, it becomes possible to obtain a screen printing plate having high shape accuracy and excellent durability, and further clarifies the present invention. Can do.
[0020]
In addition, the method for producing a screen printing plate of the present invention (claim 4),
A method for producing the screen printing plate according to any one of claims 1 to 3,
(a) arranging a mesh opening hole forming resist on a substrate;
(b) A metal is deposited on the substrate by electroplating so that the film thickness is larger than the film thickness of the mesh opening hole forming resist and the cross-sectional shape is substantially semicircular or substantially semielliptical. Forming a mesh part forming metal film constituting the mesh linear part and the peripheral part of the mesh part by precipitating; and
(c) A concave portion forming resist is disposed on the mesh linear portion and the mesh opening hole forming resist and a part of the mesh portion forming metal film so as to have a shape corresponding to the concave portion. Process,
(d) Peripheral part forming metal constituting the peripheral part of the concave part by depositing metal on the mesh part forming metal film by electroplating except the region where the concave part forming resist is formed Forming a film;
(e) removing the mesh opening hole forming resist and the recess forming resist;
(f) A step of peeling the formed screen printing plate from the substrate.
[0021]
The method for producing a screen printing plate of the present invention is such that the screen printing plate is produced through the steps (a), (b), (c), (d), (e), and (f). Therefore, by controlling the plating amount with high precision, a screen printing plate having a small plate thickness and high dimensional accuracy in each part and suitable for thin film printing (that is, the screen printing plate according to claims 1 to 3 of the present application) is obtained. It becomes possible to manufacture reliably, and this invention can be demonstrated effectively.
[0022]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the features of the present invention will be described in more detail with reference to embodiments of the present invention.
[0023]
FIG. 1 is a perspective view showing a main part of a screen printing plate according to an embodiment of the present invention from the printing surface side. 2 is a cross-sectional view of the screen printing plate of FIG.
The screen printing plate 1 is integrally formed of a nickel metal material. Then, in a predetermined region having a shape substantially corresponding to the printed pattern shape, a mesh portion 2 in which a plurality of mesh opening holes 2a for allowing the paste to be printed to pass is provided, and provided around the mesh portion 2. The non-opening part 3 which does not let a paste pass, and the recessed part 5 which is formed in the printing surface side facing the to-be-printed body 4 (FIG. 3) of the mesh part 2 and which has a planar shape corresponding to a predetermined printing pattern shape are provided. Yes.
[0024]
And in this screen printing plate 1, the mesh linear part 2b which comprises the mesh part 2 is comprised so that the cross-sectional shape of the direction orthogonal to a longitudinal direction may be a substantially semicircle shape, and an arc part may face the printing surface side. Has been.
[0025]
Further, in the screen printing plate 1 of this embodiment, the thickness A (FIG. 2) of the mesh portion 2 is 1 to 30 μm, and the depth B (FIG. 2) of the concave portion 5 having a planar shape corresponding to the print pattern shape is 1. It is comprised so that it may become -30micrometer (namely, the thickness of the circumference | surroundings of the mesh part 2 may become 1-30 micrometers thicker than the thickness of the mesh part 2).
[0026]
[Print Paste]
Next, a method for printing a paste using the screen printing plate 1 of the above embodiment will be described.
FIG. 3 is a cross-sectional view showing a state in which the paste 6 is printed by the squeegee 7 using the screen printing plate 1 of this embodiment.
[0027]
As shown in FIG. 3, the paste 6 is supplied onto the screen printing plate 1 and the squeegee 7 is pressed against the screen printing plate 1 and moved in the horizontal direction, so that the paste 6 passes through the mesh opening 2a of the mesh portion 2. Then, it is transferred to the surface of the printing medium 4. At this time, since the depth B (FIG. 2) of the concave portion 5 of the screen printing plate 1 is shallow and the thickness A (FIG. 2) of the mesh portion 2 is thin, the pressing force of the squeegee 7 causes the mesh portion 2 to The central portion is deformed into a concave shape, and a part of the mesh linear portion 2 b is in a state where the lower surface thereof is in contact with the printing medium 4.
[0028]
However, as shown in FIG. 2, the mesh linear portion 2 b of the screen printing plate 1 is configured so that the cross-sectional shape in the direction orthogonal to the longitudinal direction is a substantially semicircular shape. The contact state between the lower surface of the mesh linear portion 2 b of the pressed screen printing plate 1 and the printing medium 4 is in a line contact state, and a space in which the paste 6 wraps around is secured in the recess 5.
As a result, as shown in FIG. 4, a so-called uniform paste print film 6 a having almost no mesh marks can be formed in a predetermined region of the substrate 4.
[0029]
[Manufacture of screen printing plates]
Next, the manufacturing method of the screen printing plate of this invention is demonstrated.
The screen printing plate of this embodiment can be easily and reliably manufactured using, for example, electroforming (electroforming method) as described below. Hereinafter, the manufacturing method of the screen printing plate 1 is demonstrated, referring FIG. 5 which shows a manufacturing process typically.
[0030]
(1) First, as shown in FIG. 5A, a mesh opening hole forming resist 12 is disposed on a base material 11 made of a metal material such as stainless steel. In this embodiment, the mesh opening hole forming resist 12 having a thickness of 0.1 μm is patterned by photolithography.
There are no particular restrictions on the method of forming the mesh opening hole forming resist 12, and it is possible to form the mesh opening hole by other methods. can do.
[0031]
(2) Then, as shown in FIG. 5 (b), nickel plating is performed on the substrate 11 by electroplating, and the film thickness is larger than 0.1 μm of the mesh opening hole forming resist. By depositing nickel (metal) so as to have a substantially semicircular shape, a mesh portion forming metal film 15 constituting the mesh linear portion 2b and the peripheral portion 14 of the mesh portion 2 is formed. In this embodiment, a nickel sulfamate bath was used as the plating bath.
In addition, it is preferable that the thickness of the mesh part 2 shall be 1-30 micrometers, and it was 18 micrometers in this embodiment.
[0032]
(3) Next, as shown in FIG. 5 (c), the mesh linear portion 2b and the mesh opening hole forming resist 12 and the mesh portion forming metal film 15 are partially covered with the recess 5. A recess forming resist 16 is disposed so as to have a shape.
In this embodiment, the recess forming resist 16 is formed by photolithography, and its thickness is set to 30 μm.
[0033]
(4) Then, as shown in FIG. 5D, the peripheral portion constituting the peripheral portion 17 of the concave portion 5 is formed on the mesh portion forming metal film 15 except for the region where the concave portion forming resist 16 is formed. A forming metal film 18 is formed. In this embodiment, a nickel metal film having a thickness of 12 μm is formed as the peripheral portion forming metal film 18 by electroplating. In this embodiment, a nickel sulfamate bath is used as the plating bath, as in the case of forming the mesh portion forming metal film 15.
[0034]
(5) Next, as shown in FIG. 5 (e), the mesh opening hole forming resist 12 and the recess forming resist 16 are removed.
[0035]
(6) Thereafter, as shown in FIG. 5 (f), the mesh portion 2 comprising the mesh opening hole 2a and the mesh linear portion 2b having a substantially semicircular cross-sectional shape by peeling and removing from the base material 11, A screen printing plate 1 according to an embodiment of the present invention having a non-opening 3 that does not allow paste to pass therethrough and the like provided around the recess 5 and the mesh 2 can be obtained. In addition, the thickness of the mesh part 2 of this screen printing plate 1 is 18 micrometers, and the depth of the recessed part 5 is 12 micrometers.
[0036]
In the above example, the case where a screen printing plate made of a nickel metal material is manufactured has been described as an example. However, the screen printing plate of the present invention has no particular restrictions on the constituent materials, and various materials other than nickel are used. It is possible to use.
[0037]
In the above embodiment, the case where the thickness of the mesh portion is 18 μm and the depth of the concave portion is 12 μm has been described as an example. However, the thickness of the mesh portion and the depth of the concave portion are not limited thereto, and the present invention is not limited thereto. It is possible to change arbitrarily within the range.
[0038]
In the above embodiment, the case where the cross-sectional shape of the mesh linear portion is a substantially semicircular shape has been described as an example. However, other shapes such as a substantially semielliptical shape can be used.
[0039]
The invention of the present application is not limited to the above embodiment in other respects, and various applications and modifications can be made within the scope of the invention with respect to the shape of the mesh portion and the planar shape of the mesh opening hole. It is possible to add.
[0040]
【The invention's effect】
As described above, the screen printing plate of the present invention (Claim 1) has a cross-sectional shape in a direction orthogonal to the longitudinal direction of the mesh linear portion constituting the mesh portion, and the arc portion is directed to the printing surface side. For example, when the squeegee is pressed against the screen printing plate from above, the mesh linear shape is also used when the lower surface of the mesh linear portion is in contact with the printing medium. The contact state between the lower surface of the print unit and the substrate to be printed is in a line contact state, and a space for the paste that has passed through the mesh opening hole to be secured is secured. A uniform paste print film without a so-called mesh mark can be formed in a region where the body paste is to be printed.
[0041]
Further, as in the screen printing plate according to claim 2, the thickness of the mesh portion is set to 1 to 30 μm, and the depth of the concave portion having a planar shape corresponding to the print pattern shape is set to 1 to 30 μm (that is, around the mesh portion). (1) to 30 μm thicker than the thickness of the mesh portion), it is possible to reliably form a paste print film with a thin film thickness and high shape accuracy, and the present invention is more effectively realized. be able to.
[0042]
Further, as in the screen printing plate of claim 3, by forming at least the mesh portion and the non-opening portion integrally using a metal material, a screen printing plate having high shape accuracy and excellent durability is obtained. Thus, the present invention can be further effectively realized.
[0043]
The screen printing plate manufacturing method according to the present invention (Claim 4) includes a step of disposing a resist for forming a mesh opening hole on a base material, and a mesh linear portion and a mesh on the base material by electroplating. Forming a concave portion forming resist on the step of forming the mesh portion forming metal film constituting the peripheral portion of the portion, the mesh linear portion, the mesh opening hole forming resist, and the like so as to have a shape corresponding to the concave portion. Screen printing plate through a process, a step of forming a metal film for forming a peripheral portion constituting the peripheral portion of the concave portion on the metal film for forming the mesh portion, a step of removing the resist for forming the mesh opening hole and the resist for forming the concave portion Therefore, by controlling the plating amount with high accuracy, the plate thickness is thin and the dimensional accuracy of each part is high, making it suitable for thin-film printing. KazuSatoshi, it is possible to reliably produce a screen printing plate) of the claims 1 to 3, it is possible to Arashimeru effective the present invention.
[Brief description of the drawings]
FIG. 1 is a perspective view showing a main part of a screen printing plate according to an embodiment of the present invention from the printing surface side.
FIG. 2 is a cross-sectional view taken along line AA in FIG.
FIG. 3 is a cross-sectional view showing a state where a paste is printed using a screen printing plate according to an embodiment of the present invention.
FIG. 4 is a perspective view showing a paste printing film formed on a substrate using a screen printing plate according to an embodiment of the present invention.
FIGS. 5A to 5F are diagrams schematically showing each step of a method for producing a screen printing plate according to an embodiment of the present invention.
FIG. 6 is a perspective view showing a conventional screen printing plate.
7 is a cross-sectional view taken along line BB in FIG.
FIG. 8 is a cross-sectional view showing a state in which a paste is printed using a conventional screen printing plate.
FIG. 9 is a perspective view showing a paste printing film formed on a printing medium using a conventional screen printing plate.
[Explanation of symbols]
A Mesh part thickness B Concave depth 1 Screen printing plate 2 Mesh part 2a Mesh opening hole 2b Mesh linear part 3 Non-opening part 4 Printed object 5 Concave part 6 Paste 6a Paste printing film 7 Squeegee 11 Base material 12 Mesh opening Hole forming resist 14 Mesh portion peripheral portion 15 Mesh portion forming metal film 16 Recessed portion forming resist 17 Recessed portion peripheral portion 18 Peripheral portion forming metal film

Claims (4)

A mesh portion formed by arranging a plurality of mesh opening holes through which a paste to be printed passes, in a predetermined region having a shape substantially corresponding to a print pattern shape;
A non-opening portion that is provided around the mesh portion and does not allow the paste to pass;
A screen printing plate integrally provided with a concave portion having a planar shape corresponding to a predetermined printing pattern shape, which is formed on the printing surface side facing the printing body of the mesh portion,
The cross-sectional shape in the direction orthogonal to the longitudinal direction of the mesh linear portion constituting the mesh portion has a substantially semicircular shape or a substantially semielliptical shape such that an arc portion faces the print surface side. Screen printing plate to do. 2. The screen printing plate according to claim 1, wherein the thickness of the mesh portion is in the range of 1 to 30 [mu] m, and the depth of the concave portion is in the range of 1 to 30 [mu] m. The screen printing plate according to claim 1 or 2, wherein at least the mesh portion and the non-opening portion are integrally formed from a metal material. A method for producing the screen printing plate according to any one of claims 1 to 3,
(a) arranging a mesh opening hole forming resist on a substrate;
(b) A metal is deposited on the substrate by electroplating so that the film thickness is larger than the film thickness of the mesh opening hole forming resist and the cross-sectional shape is substantially semicircular or substantially semielliptical. Forming a mesh part forming metal film constituting the mesh linear part and the peripheral part of the mesh part by precipitating; and
(c) A concave portion forming resist is disposed on the mesh linear portion and the mesh opening hole forming resist and a part of the mesh portion forming metal film so as to have a shape corresponding to the concave portion. Process,
(d) Peripheral part forming metal constituting the peripheral part of the concave part by depositing metal on the mesh part forming metal film by electroplating except the region where the concave part forming resist is formed Forming a film;
(e) removing the mesh opening hole forming resist and the recess forming resist;
(f) A method for producing a screen printing plate, comprising a step of peeling the formed screen printing plate from the substrate.

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