JP4370938B2 - Multi-chamber heat treatment equipment - Google Patents

Description

  The present invention relates to a multi-chamber heat treatment apparatus and a temperature measurement method.

Conventionally, when measuring the temperature of an object to be processed in a heat treatment furnace in a vacuum state, a temperature detector for detecting the temperature is attached to the temperature measurement location of the object to be processed, and a data recorder for storing data is connected to the temperature detector. The temperature measurement result of the processing object detected by the temperature detection unit is stored in the data recorder. At this time, the data recorder is disposed in the heat treatment furnace together with the object to be processed, and is housed in a case excellent in heat resistance and heat insulation. The data recorder is taken out from the heat treatment furnace after the heat treatment of the object to be treated, and the temperature measurement result stored in the data recorder is taken out. The temperature of the object to be processed in the heat treatment furnace can be measured by the temperature measuring device having the above-described configuration (for example, see Patent Document 1).
JP 9-280968 A

  However, according to the above-described conventional temperature measuring apparatus, the outer shape of the case is considerably large in order to accommodate the data recorder and to ensure heat resistance and heat insulation. For this reason, there is a problem that the temperature measuring apparatus occupies a considerable space in the heat treatment furnace, and a heat treatment furnace having a considerable size is required when the outer shape of the object to be treated is large.

  Further, according to the above-described conventional temperature measuring apparatus, the temperature measurement result of the processing object disposed in the heat treatment furnace is obtained by the data recorder taken out from the heat treatment furnace after the heat treatment is completed, and the temperature of the processing object is determined after the fact. Can only be grasped. For this reason, there exists a problem that the temperature of a process target object cannot be grasped | ascertained, performing heat processing.

  The present invention has been made in view of the above-described problems, and reduces the space occupied by the temperature measuring device disposed in the heat treatment furnace, ensures a wide space for disposing the processing object in the heat treatment furnace, and performs heat treatment. It aims at measuring the temperature of the processing object arranged in a furnace in real time.

  In order to achieve the above object, in the present invention, as a first means related to a multi-chamber heat treatment apparatus, a heating chamber for heat-treating a processing object, and a treatment object heat-treated in the heating chamber are cooled. A multi-chamber heat treatment apparatus comprising at least a cooling chamber, and a sensor unit fixed to a predetermined portion of a tray for conveying the object to be processed, and electrically connected to the sensor unit and externally A measuring unit to be arranged; a connecting line for electrically connecting the sensor unit and the measuring unit by connecting the sensor unit to one end and the measuring unit connected to the other end; and A configuration is adopted in which a reel unit that is disposed in the cooling chamber and that can wind up the connection line is provided.

  As a second means related to a multi-chamber heat treatment apparatus, in the first means, the connection line is fastened to a signal line for electrically connecting the sensor unit and the measurement unit to the tray. The structure which is provided with the fastening line to be adopted is adopted.

  As a third means related to the multi-chamber heat treatment apparatus, a configuration is adopted in which the fastening line is formed of graphite in the second means.

  As a fourth means related to the multi-chamber heat treatment apparatus, in any one of the first to third means, a configuration is adopted in which the connection line includes a hose portion into which at least the signal line is inserted.

  As a fifth means related to the multi-chamber heat treatment apparatus, in any one of the first to fourth means, the connection line is a buffer portion at a midway point in contact with the heating chamber door that is closed during the heat treatment. Adopting a configuration comprising

  In a multi-chamber heat treatment apparatus comprising at least a heating chamber that heat-treats the object to be treated and a cooling chamber that cools the object to be treated that has been heat-treated in the heating chamber in a vacuum atmosphere as a means related to the temperature measurement method. A temperature measurement method for measuring the temperature of a processing object based on a signal acquired from a sensor unit, and when measuring the temperature of the processing object in the heating process, a connection extending from the cooling chamber The sensor unit connected via a wire is disposed at a predetermined location in the heating chamber, the vacuum shield door provided in the cooling chamber is opened, and the heating chamber door provided in the heating chamber is bitten by the connecting wire. When the temperature of the object to be processed in the cooling process is measured, the sensor unit is wound by winding the connection line in a cooling chamber. Was placed at a predetermined position of the serial cooling chamber, a construction is adopted performed in a state of closing the vacuum shielding door.

  According to the multi-chamber heat treatment apparatus and the temperature measurement method according to the present invention, a signal indicating the temperature of the object to be processed is acquired by the sensor unit connected to one end of the connection line extending from the cooling chamber. For this reason, based on the signal acquired in the sensor unit, the temperature of the object to be processed can be measured by a measuring unit arranged outside, and a data recorder is installed in the heat treatment chamber like a conventional multi-chamber heat treatment apparatus. Need not be placed. Further, by electrically connecting the sensor unit and the measurement unit via a connection line, a signal acquired by the sensor unit is input to the measurement unit in real time. Therefore, according to the multi-chamber heat treatment apparatus and the temperature measurement method according to the present invention, the space occupied by the temperature measurement apparatus arranged in the heat treatment furnace is reduced, and a wide space for arranging the processing object in the heat treatment furnace is secured. In addition, it becomes possible to measure the temperature of the processing object arranged in the heat treatment furnace in real time.

  Hereinafter, an embodiment of a multi-chamber heat treatment apparatus and a temperature measurement method according to the present invention will be described with reference to the drawings. In the following drawings, the scale of each member is appropriately changed in order to make the size of each member recognizable.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 and 2 are schematic views of the overall configuration of a multi-chamber heat treatment apparatus 1 according to the present embodiment. FIG. 1 is a longitudinal sectional view, and FIG. 2 is a transverse sectional view. As shown in FIGS. 1 and 2, the multi-chamber heat treatment apparatus 1 includes a cooling chamber (heat treatment chamber) 2 that cools the processing object X and a heating chamber (heat treatment chamber) 3 that heats the processing object X. It is a chamber-type heat treatment apparatus, and in addition to these, an intermediate chamber 4 is provided between the cooling chamber 2 and the heating chamber 3.

  The cooling chamber 2 is set in a substantially cylindrical shape, and the posture is set so that the central axis of the cylindrical shape is horizontal. A clutch-type door 5 that horizontally moves in the axial direction of the cooling chamber 2 is installed on one side of the cooling chamber 2 (right side in FIGS. 1 and 2), and on the other side (left side in FIGS. 1 and 2). A clamp-type vacuum shield door 6 that opens and closes is installed. The inner space of the multi-chamber heat treatment apparatus 1 is in a sealed state that is shut off from the outside with the door 5 closed. Inside the cooling chamber 2, a substantially rectangular parallelepiped air passage chamber (heat treatment furnace) 7 that is long in the direction of the central axis of the cooling chamber 2 is installed, and the cooling in the cooling chamber 2 is above and below the air passage chamber 7. Gas flow guide plates 8a and 8b for adjusting the gas flow path direction are provided. Further, the inside of the cooling chamber 2 outside the air passage chamber 7 is divided into upper and lower portions by a partition plate (not shown).

  The side portion 7a on one side (right side in FIG. 1) of the air passage chamber 7 corresponding to the longitudinal direction of the air passage chamber 7 is opened, and the side portion 7b on the other side (left side in FIG. 1) is the vacuum shield door 6. And is detachable from the main body 7c of the air passage chamber. As shown in FIG. 2, a reel portion 40 for winding the connection wire 30 is disposed on the side of the furnace chamber 7 inside the cooling chamber 2, and the reel portion 40 is oriented in the vertical direction. The connection wire 30 can be wound up by rotating around the rotation axis. A pulley 50 is disposed between the side surface portion 7 a of the wind furnace chamber 7 and the door 5, and the connection line 30 extends from the reel portion 40 to the inside of the wind furnace chamber 7 through the pulley 50. Yes.

  As shown in FIG. 3, the connection line 30 is connected to one end of a sensor unit 31 for acquiring a signal indicating the temperature of the processing object X, and the processing object is based on the signal acquired by the sensor unit 31. A measuring unit 32 for measuring the temperature of X is connected to the other end. The connection line 30 includes the signal line 30 including a signal line 33, a fastening line 34, and a hose portion 35. In the present embodiment, a thermocouple is used as the sensor unit 31, and the signal line 33 is constituted by a pair (two types) of conductive wires. Specifically, as the signal line 33, for example, chromel-alumel, chromel-constant, iron-constant, copper-constant, nicrosyl-nisyl, platinum / rhodium (10%)-platinum, platinum / rhodium (13%)-platinum , Platinum / rhodium (30%)-platinum / rhodium (6%), chromel / gold / iron, iridium / iridium / rhodium (49%), tungsten / rhenium (5%) / tungsten / rhenium (26%), nickel -Nickel / molybdenum (18%), palladium / platinum / gold-gold / palladium is used.

  The hose portion 35 has the signal line 33 inserted therethrough and is formed of a flexible material such as resin. A signal line 33 extends from one end portion of the hose portion 35. By inserting the signal line 33 into the hose portion 35, the signal line 33 can be prevented from being damaged. The fastening line 34 is disposed outside the hose portion 35, and one end thereof is fastened to the tray 10 for transporting the processing object X. The fastening line 34 is set longer than the signal line 33 and the hose part 35, and thereby the hose part 35 connected to a plurality of intermediate portions of the fastening line 34 is supported in a slightly loose state. As described above, since the hose portion 35 is supported in a slightly loose state, even if tension is applied to the connecting wire 30 due to the driving of the reel portion 40 or the movement of the tray 10, the inside of the hose portion 35. It is possible to prevent the tension from being applied to the signal line 33 inserted through the. Such a fastening line 34 can be formed of graphite. Further, as described above, the fastening line 34 is fixed to the tray 10, whereby the sensor unit 31 connected to one end of the signal line 33 is fixed to the tray 10.

  The measurement unit 32 is disposed outside the cooling chamber 2. A through terminal (not shown) is inserted in the wall of the cooling chamber 2 in a state in which the inside and outside of the cooling chamber 2 are secured, and the measurement is performed with the signal line 33 of the connection line 30 through the through terminal. The unit 32 is connected.

Thus, the sensor unit 31 that acquires the signal indicating the temperature of the processing object X is fixed to the tray 10, and the measurement unit 32 that measures the temperature of the processing object X based on the signal of the sensor unit 31 is used as the cooling chamber 2. Therefore, it is not necessary to place a data recorder on the tray 10 as in the conventional multi-chamber heat treatment apparatus. Therefore, according to the multi-chamber heat treatment apparatus 1 according to the present embodiment, it is possible to secure a wide arrangement space for the processing object X.
Moreover, since the signal which shows the temperature of the process target object X from the sensor part 31 is input into the measurement part 32 in real time, it becomes possible to measure the temperature of the process target object X in real time.

  On the upper wall portion and the lower wall portion of the air passage chamber 7, lattice-like rectifying plates 9a and 9b that rectify and pass the cooling gas are respectively formed. In addition, a transfer table 11 for transferring the tray 10 on which the processing object X is placed in the axial direction of the cooling chamber 2 is installed inside the air channel chamber 7, and the transfer table 11 has a plurality of free rollers. 12 is rotatably provided in the transfer direction of the tray 10. Further, the tray 10 is formed, for example, in a lattice shape so that the cooling gas can pass therethrough.

  The door 5 is formed in a hollow shape, and a heat exchanger 15, a cooling fan 16, and dampers 17a and 17b are provided therein. The heat exchanger 15 cools the cooling gas by exchanging heat between water and the cooling gas, and is disposed inside the heat exchanger storage chamber 18 disposed in the door 5. The cooling fan 16 is for giving a flow to the cooling gas that has passed through the gas passage port 19a from within the heat exchanger 15, and is between the heat exchanger 15 and the inner peripheral surface of the door 5, that is, a cooling chamber. It arrange | positions so that it may space apart in the horizontal direction from the side surface of the process target object X mounted in 2. FIG. The cooling fan 16 is driven by a cooling fan motor 20 installed so as to protrude from the door 5. The dampers 17a and 17b determine the flow direction of the cooling gas by the cooling fan 16, and select a plurality of gas passage openings 19a, 19b, 19c and 19d formed above the heat exchanger storage chamber 18, respectively. Closed. The interior of the door 5 outside the heat exchanger storage chamber 18 is divided into upper and lower portions by a partition plate (not shown).

  On the other hand, the heating chamber 3 is formed in a substantially cylindrical shape with a water-cooled double wall, water is interposed between the inner wall and the outer wall, and is disposed to face the cooling chamber 2. Further, in the inside of the transfer rod storage chamber 21 connected to the heating chamber 3, the processing object X is transferred by transferring the tray 10 on which the processing object X is placed in the multi-chamber heat treatment apparatus 1. A conveying rod 22 is installed for conveying the.

  Inside the heating chamber 3, a heating container (heat treatment furnace) 23 having a substantially rectangular shape is installed. A heat insulating door 24 (heating chamber door) that opens and closes up and down is installed on one side (the side facing the cooling chamber 2) of the heating container 23, and the other side is for a transport rod that serves as an entrance and exit of the transport rod 22. A door 25 is installed. The transport rod door 25 is opened and closed in the vertical direction by an elevating mechanism 26 installed so as to protrude from the outer wall of the heating chamber 3. Inside the heating container 23, a transfer table 28 having a plurality of free rollers 27 for transferring the tray 10 on which the processing object X is placed in the axial direction of the heating chamber 3 is installed. It is arranged on the extension line of the transfer table 11 installed in the air channel chamber 7. The transport bar door 25, the transfer table 28, and the tray 10 are heat-insulated similarly to the heat-insulating door 24. In addition, a plurality of heaters 29 for heating the processing object X are installed in the heating container 23 above and below the processing object X so that the entire processing object X is evenly heated.

  On the other hand, as shown in FIG. 1, the intermediate chamber 4 is set in a hollow, substantially rectangular shape, and is disposed between the cooling chamber 2 and the heating chamber 3. In the upper part, an elevating mechanism 55a composed of a hoist or the like for elevating and lowering the vacuum shield door 6 and a heat insulating door elevating part 55b for elevating the heat insulating door 24 are installed. Further, as shown in FIG. 2, a decompression device 57 is installed outside the cooling chamber 2, the heating chamber 3, and the intermediate chamber 4. The decompression device 57 is for evacuating the inside of the cooling chamber 2 and the heating chamber 3, and is connected to the cooling chamber 2 and the heating chamber 3, respectively. A cooling gas supply device 56 is also installed outside the cooling chamber 2, the heating chamber 3, and the intermediate chamber 4. The cooling gas supply device 56 is for supplying a cooling gas into the cooling chamber 2 and is connected to the cooling chamber 2. In addition, since cooling gas may be supplied to the heating chamber 3 and the intermediate chamber 4 which are outside the cooling chamber 2 during the maintenance work of the multi-chamber heat treatment apparatus 1, the cooling gas supply device 56 has an intermediate position as shown in the figure. It is also connected to the chamber 4.

  Next, the operation of the multi-chamber heat treatment apparatus 1 configured as described above and the method for measuring the temperature of the processing object X will be described.

  First, the processing object X placed on the tray 10 in the state where the door 5 is separated from the cooling chamber 2 is placed on the transfer table 11 inside the air passage chamber 7. Here, the sensor portion 31 is fixed to the processing object X at a predetermined position by fastening the fastening line 34 of the connecting wire 30 extending from the reel portion 40 to the tray 10. Thereafter, the door 5 is brought into contact with the cooling chamber 2 and the cooling chamber 2 is sealed. The cooling chamber 2, the heating chamber 3, and the intermediate chamber 4 are evacuated by driving the decompression device 57. Subsequently, the lifting / lowering mechanism 26, the lifting / lowering mechanism 55a, and the heat-insulating door lifting / lowering portion 55b are driven to open the transport bar door 25, the vacuum shield door 6 and the heat-insulating door 24.

  Here, the processing object X is transferred from the transfer table 11 inside the air passage chamber 7 onto the transfer table 28 inside the heating container 23 by pulling the tray 10 engaged with the tip of the transfer rod 22. The At this time, the fastening line 34 fastened to the tray 10 is pulled out from the reel unit 40 along with the transfer of the tray 10. Along with this, the signal line 33 and the hose portion 35 are also pulled out from the reel portion 40. Then, the elevating mechanism 26 and the heat insulating door elevating part 55b are driven again, and the conveying bar door 25 and the heat insulating door 24 are closed. Here, the tension is applied to the fastening line 34 by the transfer of the tray 10, but since the signal line 33 is loosened with respect to the fastening line 34 as described above, the tension is applied to the signal line 33. It is possible to prevent the signal line 33 from being disconnected. At this time, the elevating mechanism 55a is not driven, and the vacuum shield door 6 is kept open. Further, the heat insulating door 24 is closed in a state where the connecting portion 30 is bitten. Further, as described above, the signal line 33 extends from the end portion of the hose portion 35, and when the heat insulating door 24 bites the connection portion 30, the hose portion 35 is positioned outside the heating container 23. ing.

  In this state, the processing object X is heated by the heater 25. At this time, the sensor unit 31 acquires a signal indicating the temperature of the processing object X, and this signal is sent to the measurement unit 32 via the signal line 33. Then, the measuring unit 32 measures the temperature of the processing object X based on the signal input from the sensor unit 31. Therefore, according to the multi-chamber heat treatment apparatus 1 and the temperature measurement method according to the present embodiment, the temperature of the processing object X during the heat treatment can be measured in real time. Thereafter, when the heating of the processing object X is completed, the transfer rod door 25 and the heat insulating door 24 are opened, and the processing object X is transferred again to the transfer table 11 inside the air passage chamber 7 by the transfer rod 22. At this time, the connecting wire 30 is wound by the reel unit 40 as the tray 10 is transferred. Thereby, since the tension is always applied to the fastening line 34 of the connection line 30, it is possible to prevent the connection line 30 from being caught by a member in the multi-chamber heat treatment apparatus 1. When the processing object X is transferred to the transfer table 11 of the air passage chamber 7, the vacuum shield door 6 is sealed.

  Subsequently, the cooling gas is supplied into the cooling chamber 2 by the cooling gas supply device 56, and this cooling gas is circulated through the cooling chamber 2 by the cooling fan 16, whereby the processing object X is cooled. Here, the direction in which the cooling gas flows is changed by changing the gas passage ports 19a to 19d that are closed every predetermined time by the dampers 17a and 17b, whereby the cooling gas is sprayed on the entire processing object X, The processing object X is uniformly cooled. And while the process target part X is cooled in this way, the sensor unit 31 acquires a signal indicating the temperature of the process target object X, and this signal is sent to the measurement unit 32 via the signal line 33, The measuring unit 32 measures the temperature of the processing object X based on the signal input from the sensor unit 31. Therefore, according to the multi-chamber heat treatment apparatus 1 and the temperature measurement method according to the present embodiment, the temperature of the processing object X during the cooling process can be measured in real time.

  When the processing object X is cooled to a predetermined temperature, the door 5 is detached from the cooling chamber 2 and the processing object X is carried out to the outside.

That is, according to the multi-chamber heat treatment apparatus 1 and the temperature measurement method according to the present embodiment, the temperature of the processing object X is indicated by the sensor unit 31 connected to one end of the connection line 33 extending from the cooling chamber 2. Get the signal. For this reason, based on the signal acquired in the sensor part 31, the temperature of the process target object X can be measured by the measurement part 32 arrange | positioned outside, and like the conventional multi-chamber heat treatment apparatus, This eliminates the need for a data recorder. Further, by electrically connecting the sensor unit 31 and the measurement unit 32 via the connection line 33, a signal acquired by the sensor unit 31 is input to the measurement unit 32 in real time.
Therefore, according to the multi-chamber heat treatment apparatus 1 and the temperature measurement method according to the present embodiment, the space occupied by the temperature measurement apparatus disposed in the cooling chamber 2 and the heating chamber 3 is reduced, and the cooling chamber 2 and the heating chamber are reduced. It is possible to secure a wide space for disposing the processing object X in 3 and to measure the temperature of the processing object X disposed in the cooling chamber 2 and the heating chamber 2 in real time.

  The preferred embodiments of the multi-chamber heat treatment apparatus 1 and the temperature measuring method according to the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to the above-described embodiments. Various shapes, combinations, and the like of the constituent members shown in the above-described embodiments are examples, and various modifications can be made based on design requirements and the like without departing from the gist of the present invention.

  For example, in the said embodiment, when heat-processing the process target object X, the vacuum shield door 6 was made into the open state. However, the present invention is not limited to this, and the vacuum shield door 6 may be in a half-open state during the heat treatment of the processing object X. Thereby, it becomes possible to suppress the temperature rise in the cooling chamber 2 due to radiant heat during the heat treatment of the processing object X.

  In addition, for example, a buffer portion made of heat-resistant rubber or the like may be disposed in the middle of the connection wire 30 being bitten by the heat insulating door 24. By disposing such a buffer portion, disconnection of the connecting wire 30 can be prevented, and the heating container 23 during the heat treatment can be more sealed, so that radiant heat to the outside of the heating container 23 in the heat treatment can be reduced. It becomes possible to deter.

It is the longitudinal cross-sectional view which showed schematic structure of the multi-chamber type heat processing apparatus 1 which concerns on one Embodiment of this invention. It is the cross-sectional view which showed schematic structure of the multi-chamber type heat processing apparatus 1 which concerns on one Embodiment of this invention. 3 is a schematic configuration diagram of a connection unit 30. FIG.

Explanation of symbols

1 ... Multi-chamber heat treatment equipment 2 ... Cooling room (heat treatment room)
3. Heating room (heat treatment room)
10 …… Tray 30 …… Connection part 31 …… Sensor part 32 …… Measurement part 33 …… Signal wire 34 …… Fastening wire 35 …… Hose part 40 …… Reel part X …… Processed object

Claims (3)

A multi-chamber heat treatment apparatus comprising at least a heating chamber that heat-treats a processing object and a cooling chamber that cools a processing object that has been heat-treated in the heating chamber,
A sensor unit fixed to a predetermined position of a tray for conveying the processing object;
A measurement unit that is electrically connected to the sensor unit and disposed outside;
Electrically connecting the fastening line fastened to the tray, the hose part supported in a loosened state with respect to the fastening line by being connected to a plurality of intermediate parts of the fastening line, and the sensor part and the measuring part A connection line having a signal line inserted into the hose part and connected to the hose part ,
A multi-chamber heat treatment apparatus, comprising: a reel portion disposed in the cooling chamber and capable of winding the connection wire. The multi-chamber heat treatment apparatus according to claim 1, wherein the fastening line is made of graphite . 3. The multi-chamber heat treatment apparatus according to claim 1, wherein the connection line includes a buffer portion at a midpoint of contact with a heating chamber door that is closed during the heat treatment.

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