JP4373236B2 - Optical switch and its assembly method - Google Patents

Description

  The present invention relates to an optical switch for optical communication and an assembling method thereof.

  As one of the techniques for realizing a large-scale optical switch, a three-dimensional space propagation type optical switch using a micromirror manufactured by a micromachine technique has been proposed.

  FIG. 6 is a diagram showing a basic configuration of a conventional optical switch using micromirrors. The optical switch 1 includes an input-side collimator array 3 to which terminal portions of a plurality of optical fibers 2a to 2p are connected, and an output-side collimator array 5 to which terminal portions of a plurality of optical fibers 4a to 4p are connected. The first micromirror array 6 including a plurality of micromirrors 6a to 6p and the second micromirror array 7 including a plurality of micromirrors 7a to 7p are provided. Incident light 8 from the input-side collimator array 3 is sequentially incident on the first and second micromirror arrays 6 and 7, so that one of the micromirrors 6 a to 6 p and 7 a to 7 p, for example, a micromirror Reflected by hitting 6l and 7m. The micromirrors 6a to 6p and 7a to 7p can be driven to rotate about two axes, and the incident light 8 is reflected at an angle corresponding to the rotation angle of the micromirrors 6a to 6p and 7a to 7p. Therefore, the incident light 8 can be coupled to an arbitrary port in the output side collimator 5 by appropriately controlling the micromirrors 6a to 6p and 7a to 7p.

In the optical switch 1 having such a structure, in order to realize a low-loss optical connection, when the optical switch 1 is assembled, the input-side collimator array 3, the output-side collimator array 5, and the first and second micromirror arrays 6 and 7 need to be aligned with high accuracy. As a method of alignment, a multi-degree-of-freedom driving stage capable of driving a target component to be aligned in, for example, a 6-degree-of-freedom direction so as to be used for alignment at the time of connection between optical fibers or between an optical fiber and a waveguide. The method mounted on is usually used. Such a multi-degree-of-freedom drive stage has already been developed and marketed for adjusting the optical axis. In this optical axis adjustment method, light is first incident on the optical connection path, the output light is monitored, the target part is scanned in the direction of multiple degrees of freedom, and the optical axis is adjusted so that the output light is optimal, The parts are fixed with an adhesive or the like at a position where the power of the output light is maximized. An example in which such an adjustment method is used for assembling an optical switch has also been reported (see, for example, Non-Patent Document 1).
“High-density digita1 free-space photonic-switching fabrics using excitation absorption reflection-switch (EARS) arrays and microbeamoptica1 interconnections”, IEEE Journa1 of se1ected topics in quantume1ectronics, p49, vo1.2, No.1, Apri1,1996)

  The applicant has not found any prior art documents closely related to the present invention by the time of filing other than the prior art documents specified by the prior art document information described in this specification.

  The above-described assembly method requires a multi-degree-of-freedom driving stage for alignment, and therefore requires a very large apparatus for assembly. In addition, since it takes a long time to find the optimum posture, there is a problem that the time required for the assembly becomes longer.

  The present invention has been made to solve the above-described conventional problems. The object of the present invention is to position objects to be positioned in a short time and with high accuracy by using mechanical positioning means. It is an object of the present invention to provide an optical switch and an assembly method thereof.

To achieve the above object, a first invention provides a collimator array, a mirror array provided corresponding to the collimator array, a package mounting the mirror array, and a base connecting the collimator array and the package. And a positioning means for mechanically positioning the collimator array and the base; and a positioning means for mechanically positioning the package and the base. On the other hand, fine adjustment is possible in the first and second axis directions orthogonal to each other in the mirror array plane, and fine adjustment is possible in the rotation direction around the third axis orthogonal to the mirror array plane. An adjustment mechanism is provided .

According to a second aspect of the present invention, there is provided an array assembly including a collimator array, a mirror array provided corresponding to the collimator array, a package on which the mirror array is mounted, and a base connecting the collimator array and the package. Positioning means for mechanically positioning the collimator array and the base; and positioning means for mechanically positioning the package and the base; and the collimator array with respect to the base. Provided with a fine adjustment mechanism that can be finely adjusted in the direction of the first axis and the second axis orthogonal to each other in the plane and finely adjustable in the rotation direction around the third axis orthogonal to the collimator array surface. is there.

According to a third aspect of the present invention, there is provided a first array assembly including an input side collimator array, a first package mounting the first mirror array and a first base, an output side collimator array, and a second mirror array A second array assembly including a second package and a second base, and a common base to which the first and second array assemblies are fixed in a predetermined positional relationship. Positioning means for mechanically positioning the input-side collimator array and the first base; positioning means for mechanically positioning the output-side collimator array and the second base; and the first package Positioning means for mechanically positioning the second base and the first base, positioning means for mechanically positioning the second package and the second base, and the first and second bases. Scan and the common base and each is provided with a positioning means for mechanically positioning.

In a fourth aspect based on the third invention, the first, the second mirror array first, to the second base, orthogonal in the plane of the first, second mirror array First and second fine adjustments that can be finely adjusted in the first and second axis directions and that can be finely adjusted in the rotation direction about a third axis orthogonal to the first and second mirror array surfaces. An adjustment mechanism is provided.
In a fifth aspect based on the third aspect, the input-side and output-side collimator arrays are orthogonal to the first and second bases in the plane of the input-side and output-side collimator arrays. First and second fine adjustments that can be finely adjusted in the first and second axis directions and that can be finely adjusted in the rotation direction about a third axis that is orthogonal to the collimator array surfaces on the input and output sides. An adjustment mechanism is provided.

According to a sixth invention, in any one of the first , second, fourth and fifth inventions, an adjustment mark for a fine adjustment mechanism is provided on the mirror array.

In a seventh aspect based on the sixth aspect , the adjustment mark is a surface that scatters or reflects light.

In an eighth aspect based on the seventh aspect , the adjustment mark is provided on a part of the grating of the mirror array.

According to a ninth invention, in any one of the first to eighth inventions, the positioning means is any one of a pin and a hole, a key groove and a key, or a convex portion and a convex portion. .

According to a tenth aspect of the present invention, in any one of the first , second, fourth, and fifth aspects, the fine adjustment mechanism includes an inner frame and an outer frame disposed so as to surround the inner frame. A spring that connects the inner frame and the outer frame, and the spring comprises four leaf springs bent in an L shape so as to surround each corner of the inner frame, and adjacent to the four leaf springs. One end of two matching leaf springs is connected to one side of the four sides of the inner frame, and the other end is connected to two sides of the four sides of the outer frame that are orthogonal to the one side of the inner frame. One end of each of the remaining two leaf springs is connected to a side facing the one side of the inner frame, and the other end is connected to the two sides of the outer frame.

An eleventh aspect of the invention is an optical switch assembly method according to the first aspect of the invention, a step of positioning and fixing a collimator array to a base, a step of positioning and fixing a package on which a mirror array is mounted to the base, The mirror array is finely adjusted with respect to the base in the first axis direction and the second axis direction orthogonal to each other in the mirror array plane, and finely adjusted in the rotation direction about the third axis orthogonal to the mirror array plane. And an adjusting step for adjusting.

In a twelfth aspect based on the eleventh aspect , in the eleventh aspect , the adjustment step for finely adjusting the mirror array includes the step of causing the reference light to enter an adjustment mark provided on the mirror array, and the reference light is scattered or reflected at the mark center And a step of moving the mirror array as described above.

In a thirteenth aspect based on the second aspect , the step of positioning and fixing the collimator array to the base, the step of positioning and fixing the package mounting the mirror array to the base, and the collimator array to the base And a fine adjustment in the direction of the first axis and the second axis orthogonal to each other in the plane of the collimator array and a fine adjustment in the rotation direction around the third axis orthogonal to the plane of the collimator array. It is a thing.

In a fourteenth aspect based on the thirteenth aspect , the adjustment step of finely adjusting the collimator array includes a step of entering reference light into an adjustment mark provided on the mirror array, and the reference light is scattered or reflected at the mark center. And a step of moving the collimator array.

In a fifteenth aspect based on the third aspect , the input-side collimator array and the first package mounting the first mirror array are respectively positioned and fixed with respect to the first base. The step of assembling the array assembly, the output side collimator array, and the second package mounting the second mirror array are positioned and fixed with respect to the second base, respectively. And a step of positioning and fixing the first and second array assemblies to a common base while maintaining a predetermined positional relationship.

Invention of the first 6, in the fifteenth aspect, in which the step of assembling the first array assembly assembling step and the second array assembly was back and forth.

According to a seventeenth aspect , in the fifteenth or sixteenth aspect , the first and second mirror arrays are arranged with respect to the first and second bases, respectively, by a first axis perpendicular to the mirror array plane and The adjusting step includes fine adjustment in the second axis direction and fine adjustment in the rotation direction around the third axis orthogonal to the mirror array surface .

In an eighteenth aspect based on the seventeenth aspect , the adjusting step for finely adjusting the first and second mirror arrays applies reference light to the adjustment marks provided on the first and second mirror arrays, respectively. An incident step; and the first and second so that the reference light is scattered or reflected at the center of the mark.

According to a nineteenth aspect of the present invention, in the fifteenth or sixteenth aspect , the input-side and output-side collimator arrays are orthogonal to the first and second bases in the plane of the collimator array orthogonal to each other . An adjustment process is provided in which fine adjustment is performed in the biaxial direction and fine adjustment is performed in the rotation direction about the third axis orthogonal to the collimator array surface .

In a twentieth aspect according to the nineteenth aspect , the adjustment step of finely adjusting the input-side and output-side collimator arrays applies reference light to the adjustment marks provided in the first and second mirror arrays, respectively. And a step of moving the collimator array on the input side and the output side so that the reference light is scattered or reflected at the center of the mark.

According to the optical switch and the assembling method thereof according to the present invention, the collimator array and the base, the package and the base, and the base and the common base are configured to be positioned by the mechanical positioning means, so that the positioning operation is simple, easy and complicated. An optical switch that does not require a multi-degree-of-freedom driving stage and enables low-loss optical connection can be realized.
Since the mechanical positioning means is any one of a pin and a hole, a keyway and a key, or a convex portion, the structure is simple and inexpensive.
In the invention provided with the fine adjustment mechanism, the mirror array and the collimator array can be finely adjusted with respect to the base, and the mounting error between the mirror array and the collimator array can be corrected.
For fine adjustment, if the adjustment mark is a scattering surface, the fine adjustment mechanism adjusts the incident light to scatter. If the adjustment mark is a reflection surface, the mirror array is obtained by monitoring the beam shape and the amount of light reflected by the mark. The position of the collimator array can be corrected with high accuracy.

Hereinafter, the present invention will be described in detail based on embodiments shown in the drawings.
FIG. 1 is an exploded perspective view showing a part of an embodiment of an optical switch according to the present invention, FIG. 2 is an exploded perspective view of a first (second) array assembly, FIG. (B), (c) is a plan view of the package, a sectional view taken along line AA and a bottom view, FIG. 4 is a sectional view showing a fine adjustment mechanism of the mirror array, and FIG. 5 is a view showing an adjustment mark. In these drawings, an optical switch generally indicated by reference numeral 10 is composed of first and second array assemblies 12 and 13 positioned and fixed to a pair of common bases 11 facing in parallel.

  The first array assembly 12 includes an input-side collimator array 14, a first package 16 on which a first mirror array 15 is mounted, a package base 17 to which the first package 16 is fixed, and the input. The first collimator array 14 and the package base 17 are positioned and fixed so as to be opposed to each other. The first base 18 is a pair of one pair, and the four distance rods 19 interposed between the first bases 18. It is configured. In the present embodiment, an example in which the package base 17 is interposed between the first package 16 and the first base 18 is shown, but the package base 17 is not always necessary, and the package base 17 is not necessarily provided. It may be formed integrally with the first package 16 and the package may be directly fixed to the first base 18. Further, the first base 18 and the distance rod 19 may be integrally formed.

  The input side collimator array 14 includes a plurality of micromirrors 20 and an optical fiber array 21 arranged in a matrix. In addition, two positioning holes 23 and one screw mounting hole 24 are formed in the vicinity of two sides vertically opposed in FIG. 2 of the surface on which the micromirror 20 of the input side collimator array 14 is formed. ing. One of the two positioning holes 23 provided on each side is a reference hole formed as a round hole, and the other is formed as a long hole.

  The first mirror array 15 has a plurality of micromirrors 25 and is fixed to a recessed portion 26 (FIG. 3B) provided on the surface side of the first package 16 by an adhesive, bonding, or the like. ing. Each micromirror 25 is configured to be independently angle-adjusted by being connected to a driving terminal 29 provided on the bottom surface side of the first package 16.

  The first package 16 is made of ceramic, and is formed such that two positioning holes 27 and screw mounting holes 28 are diagonally located at four corners. One of the two positioning holes 27 is a reference hole formed as a round hole, and the other is formed as a long hole that is long in the diagonal direction.

  The package base 17 has a rectangular opening 30 at the center by being formed into a rectangular frame having a size substantially the same as that of the first package 16. The opening 30 is formed to be slightly larger than the rectangular shape surrounding the entire micromirror 25 of the first mirror array 15. At the four corners of the package base 17, two positioning pins 31 and screw holes 32 are formed corresponding to the positioning holes 27 and screw mounting holes 28 of the first package 16, respectively. The two positioning pins 31 are fitted into the corresponding positioning holes 27 to position the first package 16 with respect to the package base 17, and screws (not shown) are screwed into the screw holes 32 from the screw mounting holes 28. As a result, the first package 16 is fixed to the package base 17. That is, the positioning hole 27 and the positioning pin 31 constitute mechanical positioning means for positioning the first package 16 and the package base 17. Further, two positioning holes 33 and one screw hole 34 are formed at the upper and lower edges of the opening 30 of the package base 17.

  On one side surface of the first base 18, two positioning pins 35 and one screw hole 36 are provided corresponding to the positioning holes 23 and the screw mounting holes 24 of the input side collimator array 14. . The positioning hole 23 and the positioning pin 35 constitute a mechanical positioning means for positioning the input-side collimator array 14 and the first base 18 by fitting with each other. On the other side of the first base 18 to which the package base 17 is fixed, that is, on the side opposite to the side on which the input side collimator array 14 is mounted, two positioning pins 37 and screw mounting holes are provided. 38 are provided corresponding to the positioning hole 33 and the screw hole 34 of the package base 17, respectively. The positioning hole 33 and the positioning pin 37 constitute mechanical positioning means for positioning the package base 17 and the first base 18 by fitting with each other.

  Further, the first base 18 is formed with two positioning holes 40, four screw holes 41, and four screw mounting holes 42 penetrating the front and back surfaces. The two positioning holes 40 are holes for positioning the first base 18 with respect to the common base 11. The four screw holes 41 are holes into which screws for fixing the common base 11 and the first base 18 are screwed. The four screw mounting holes 42 are holes through which screws for fixing the first base 18 and the distance rod 19 are inserted, and are formed at each corner of the first base 18.

  The second array assembly 13 includes an output-side collimator array 50, a second package 52 on which a second mirror array 51 is mounted, a package base 53 to which the second package 52 is fixed, and the output. A side collimator array 50 and the package base 53 are positioned and fixed, and a pair of second bases 54 are interposed between the second bases 54. The four bases are fixed by screws. It is composed of a distance rod 55 and the like. Since the second array assembly 13 has the same structure as the first array assembly 12, the detailed description thereof is omitted.

  The first array assembly 12 and the second array assembly 13 are disposed upside down in the horizontal direction so as to maintain a predetermined positional relationship, and the first and second bases 18 and 54 are disposed. It is positioned and fixed with respect to each common base 11. Therefore, each common base 11 is provided with four positioning pins 57 and eight screw mounting holes 58. The four positioning pins 57 are provided so as to be positioned on substantially the same straight line. In this case, the right two positioning pins 57 in FIG. 1 are fitted into the positioning holes 40 of the first base 18 to position the first base 18 with respect to the common base 11, and the left 2 The positioning pins 57 of the book are fitted into the positioning holes 40 of the second base 54 to position the second base 54 with respect to the common base 11. That is, the positioning holes 40 of the first and second bases 18 and 54 and the positioning pins 57 of the common base 11 constitute a mechanical positioning means for positioning these members by fitting with each other. is there. Then, after positioning, the first and second bases 18 and 54 are fixed to the common base 11 by screwing screws into the screw holes 41 of the first and second bases 18 and 54 through the screw mounting holes 58. Is done.

  In the optical switch 10 having such a structure, incident light from the input side collimator array 14 is guided to an arbitrary port of the output side collimator array 50 via the first mirror array 15 -the second mirror array 51. That is, when the incident light from the input side collimator array 14 is incident on the first mirror array 15, it strikes any one of the plurality of micromirrors 25 and is reflected at an angle corresponding to the rotation angle. The light enters the second mirror array 51. When incident light incident on the second mirror array 51 hits one of the plurality of micromirrors, that is, the micromirror corresponding to the reflection angle, the incident light is reflected at an angle corresponding to the rotation angle of the mirror, and output. A port corresponding to the reflection angle in the side collimator array 50 is coupled.

Next, a method for assembling the optical switch 10 having such a structure will be described.
The assembly process of the optical switch 10 includes a process of assembling the first array assembly 12, a process of assembling the second array assembly 13, and a pair of the first and second array assemblies 12 and 13. A step of positioning and fixing to the common base 11 and an adjustment step described later are provided.

  The step of assembling the first array assembly 12 includes a step of positioning and fixing the input-side collimator array 14 with respect to the first base 18, and a first package 16 mounting the first mirror array 15 as a package. A step of positioning and fixing the base 17 to the base 17, a step of positioning and fixing the package base 17 to the first base 18, and a fine adjustment of the first mirror array 15 to the first base 18. And an adjusting step.

  Positioning and fixing between the input-side collimator array 14 and the first base 18 is performed by fitting positioning pins 35 into the positioning holes 23 and screwing screws into the screw holes 36 from the screw mounting holes 24. The first package 16 and the package base 17 are positioned and fixed by fitting the positioning pins 31 into the positioning holes 27 and screwing the screws into the screw holes 32 from the screw mounting holes 28. The positioning and fixing of the package base 17 and the first base 18 are performed by fitting positioning pins 37 into the positioning holes 33 and screwing screws into the screw holes 34 from the screw mounting holes 38.

  In this case, the step of positioning and fixing the input-side collimator array 14 with respect to the first base 18 and the step of positioning and fixing the first package 16 on which the first mirror array 15 is mounted to the package base 17. And the process of positioning and fixing the package base 17 with respect to the first base 18 is not necessarily specified in this order, and can be performed in parallel or the order can be appropriately changed.

  The step of assembling the second array assembly 13 is a step of positioning and fixing the output-side collimator array 50 with respect to the second base 54 in the same manner as the step of assembling the first array assembly 12 described above. A step of positioning and fixing the second package 52 mounted with the second mirror array 51 to the package base 53, a step of positioning and fixing the package base 53 to the second base 54, and a second And an adjustment step of finely adjusting the mirror array 51 with respect to the second base 54.

  Also in this case, the step of positioning and fixing the input-side collimator array 50 with respect to the second base 54 and the step of positioning and fixing the second package 52 on which the second mirror array 51 is mounted to the package base 53. And the process of positioning and fixing the package base 53 with respect to the second base 54 is not necessarily specified in this order, and can be performed in parallel or the order can be appropriately changed.

  Also, the assembly process of the first array assembly 12 and the second array assembly 13 is not necessarily specified in this order, and can be performed in parallel or the order can be changed.

  After assembling the first and second array assemblies 12 and 13, these assemblies 12 and 13 are sequentially positioned and fixed with respect to the common base 11. That is, the positioning and fixing of the first array assembly 12 is performed by fitting the positioning pins 57 into the positioning holes 40 of the first base 18 and screwing the screws into the screw holes 41 from the screw mounting holes 58. Is called. The positioning and fixing of the second array assembly 13 is performed by fitting the positioning pins 57 into the positioning holes 40 of the second base 54 and screwing the screws into the screw holes 41 from the screw mounting holes 58. In addition, the assembly process with respect to the common base 11 of the 1st array assembly 12 and the 2nd array assembly 13 is not necessarily specified in this order, and the reverse may be sufficient.

  Thus, in the present invention, the positioning of the components of the first and second array assemblies 12 and 13 and the positioning of the first and second array assemblies 12 and 13 with respect to the common base 11 are required. By using mechanical positioning means composed of positioning pins and positioning holes manufactured with processing accuracy, the conventional collimator arrays 14 and 50 and the first and second mirror arrays 15 and 51 are used as in the prior art. It is not necessary to find an optimum posture by mounting the optical switch 10 on a multi-degree-of-freedom drive stage, and the optical switch 10 capable of realizing a good optical connection can be assembled easily and in a short time.

  When the first mirror array 15 is mounted on the first package 16, a bonding technique is usually used, but the positioning accuracy when mounting may be insufficient. In such a case, it is necessary to correct the position of the first mirror array 15 with respect to the first base 18.

FIG. 4 shows a fine adjustment mechanism for correcting the position of the first mirror array 15. In this example, a fine adjustment mechanism 60 is added to the package base 17 shown in FIG. 1, and the package 16 and the first base 18 are connected via the fine adjustment mechanism 60. The fine adjustment mechanism 60 includes three large, medium, and small frames 61, 62, and 63 arranged on the same plane. The first package 16 is screwed and fixed to an intermediate frame (medium frame) 62, and is the smallest. The first base 18 is fixed to the frame (inner frame) 63 with screws. The middle frame 62 is fitted to the outer frame 61 and fixed by four screws 64. The middle frame 62 is connected to the inner frame 63 by four leaf springs 65 and three adjustment screws 66A, 66B, 66C so as to be movable and adjustable in three degrees of freedom. Each leaf spring 65 is formed in an L shape in plan view so as to surround each corner of the inner frame 63, and one end is connected to the inner frame 62 and the other end is connected to the inner frame 63. Is supported with respect to the inner frame 63 so as to be movable in three degrees of freedom in translation in the X-axis (first axis) direction, Y-axis (second axis) direction and rotation around the Z-axis (third axis) . . Further, the connection structure of the leaf spring 65 to the inner frame 62 and the inner frame 63 will be described in detail. In FIG. 4, one end of each of the left two leaf springs 65 is connected to the central portion of the left side of the inner frame 63, and the other end is The middle frame 62 is connected to the central part of the two sides facing up and down. On the other hand, one end of the two leaf springs 65 on the right side is connected to the center part of the right side of the inner frame 63, and the other end is connected to the center part of two sides facing the top and bottom of the middle frame 62. However, the connection location for the middle frame 62 and the inner frame 63 of the leaf spring 65 is not necessarily limited to the central portion of the side. The middle frame 62 can be omitted when it is integrally formed with the outer frame 61.

  Of the three adjustment screws 66A, 66B, 66C, one adjustment screw 66A is attached to the middle portion of the right side of the middle frame 62 and screwed into the screw hole 68 of the inner frame 63. Therefore, when the adjustment screw 66A is rotated by a tool such as a screwdriver, the adjustment screw 66A advances and retreats with respect to the screw hole 68, so that the middle frame 62 is moved and adjusted relative to the inner frame 63 in the X direction.

  The remaining two adjustment screws 66B and 66C are attached to both ends of the other side (upper side in FIG. 4) orthogonal to the right side to which the adjustment screw 66A of the middle frame 62 is attached, It is screwed into the screw hole 69 of the inner frame 63. Therefore, when the two adjustment screws 66B and 66C are rotated by the same rotation angle in the same direction by a tool such as a screwdriver, the adjustment screws 66B and 66C advance and retreat with respect to the screw hole 69. Is adjusted in the Y direction. When the two adjusting screws 66B and 66C are rotated in opposite directions, the middle frame 62 is rotated and adjusted around the Z axis with respect to the inner frame 63.

  The outer frame 61 is formed with a hole 70 for rotating the adjusting screws 66A, 66B, 66C. The middle frame 62 is formed with two pins 71 that fit into the positioning holes 27 of the first package 16 and two screw holes 72 into which screws for fixing the first package 16 are screwed. The inner frame 63 has two positioning holes 74 for fitting the positioning pins 37 of the first base 18 and two screw holes 75 into which screws for fixing the first base 18 are screwed. ing. The middle frame 62, the inner frame 63, and the leaf spring 65 are integrally formed. The leaf spring 65 is formed with an insertion hole 76 through which the adjustment screws 66B and 66C are inserted in a non-contact state.

  As described above, the fine adjustment mechanism 60 is configured to translate the first mirror array 15 and the first package 16 with respect to the first base 18 in the X- and Y-axis directions and rotate about the Z-axis in the figure. Can be fine-tuned. When the position of the first mirror array 15 is corrected by the fine adjustment mechanism 60, a reference adjustment mark is required. This adjustment mark is preferably provided on the same chip as the first mirror array 15. The reason is that the position of the first mirror array 15 can be corrected with higher accuracy than when the mark is provided on the first package 16 or the fine adjustment mechanism 60. The adjustment mark is provided on a part of the grating of the first mirror array 15, and the adjustment mark is used as a reflection surface or a scattering surface, so that incident light from the input-side collimator array 14 is used and the first mirror array is used. 15 position corrections are possible.

  FIG. 5 shows an example when the scattering surface is an adjustment mark. In this example, concentric adjustment marks 80 and cross-shaped rectangular adjustment marks 81 are formed by etching, and light is scattered on these adjustment marks. The concentric adjustment mark 80 can easily recognize the center of the mark, and the cross-shaped rectangular adjustment mark 81 can easily recognize the direction of deviation when the light deviates from the mark. It is like that. Such adjustment marks 80 and 81 are provided at a plurality of positions on the lattice of the first mirror array 15, for example, at four corners.

  In the first mirror array 15 position correction method, light is first incident from the port of the input-side collimator array 14 corresponding to the mark position, and fine adjustment is performed so that incident light corresponding to each mark is scattered at all mark centers. The mechanism 60 adjusts the movement of the first mirror array 15. When the adjustment marks 80 and 81 are reflective surfaces, the position can be corrected by monitoring the beam shape and light quantity of the reflected light from the adjustment marks. After the input-side collimator array 14 and the first mirror array 15 are adjusted by the above method to assemble the first array assembly 12, the first array assembly 12 is positioned on the pair of common bases 11. It is positioned by a mechanical positioning means comprising a pin and a positioning hole, and is fixed by a screw.

  Similarly, the second array assembly 13 also includes the fine adjustment mechanism 60 described above, and after the output-side collimator array 50 and the second mirror array 51 are assembled with the position corrected with respect to the second base 54, The pair of common bases 11 are positioned by mechanical positioning means including positioning pins and positioning holes, and are fixed by screws. Thereby, the assembly work of the optical switch 10 is completed.

  In the above-described embodiment, the positioning pin and the positioning hole are used as the mechanical positioning means. However, the present invention is not limited to this. For example, the key groove and the key or the convex portion are connected to each other. It can also be used as mechanical positioning means.

  In the above-described embodiment, the fine adjustment mechanism 60 is provided between the package 16 and the first base 18 to correct the position of the mirror array with respect to the base. 16 between the collimator array and the base, not between 16 and the first base 18, and the input-side collimator array 14 is positioned with respect to the first base 18 or the output-side collimator array 50 is positioned with respect to the second base 54. The same effect can be obtained even if the correction is made. In the assembly process at that time, the adjustment process for finely adjusting the mirror array with respect to the base in the above-described assembly process may be replaced with the adjustment process for finely adjusting the collimator array with respect to the base.

1 is an exploded perspective view showing a part of an embodiment of an optical switch according to the present invention. It is a disassembled perspective view of a 1st (2nd) array assembly. (A), (b), (c) is a top view of a package, AA sectional view, and a bottom view. It is sectional drawing which shows the fine adjustment mechanism of a mirror array. It is a figure which shows the mark for adjustment. It is a figure which shows the basic composition of the conventional optical switch using a micromirror.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Optical switch, 11 ... Common base, 12 ... 1st array assembly, 13 ... 2nd array assembly, 14 ... Input side collimator array, 15 ... 1st mirror array, 16 ... 1st package, DESCRIPTION OF SYMBOLS 17 ... Package base, 18 ... 1st base, 31, 35, 37, 57 ... Positioning pin, 23, 27, 33, 40 ... Positioning hole, 50 ... Output side collimator array, 51 ... 2nd mirror array 52 ... second package, 53 ... package base, 54 ... second base, 60 ... fine adjustment mechanism, 80, 81 ... adjustment mark.

Claims (20)

A collimator array;
A mirror array provided corresponding to the collimator array;
A package carrying the mirror array;
An array assembly comprising a base connecting the collimator array and the package;
Positioning means for mechanically positioning the collimator array and the base;
Positioning means for mechanically positioning the package and the base ;
The mirror array can be finely adjusted with respect to the base in a first axis and a second axis direction orthogonal to each other in the mirror array plane, and a rotation direction about a third axis orthogonal to the mirror array plane An optical switch characterized in that a fine adjustment mechanism capable of fine adjustment is provided . A collimator array;
A mirror array provided corresponding to the collimator array;
A package carrying the mirror array;
An array assembly comprising a base connecting the collimator array and the package;
Positioning means for mechanically positioning the collimator array and the base;
Positioning means for mechanically positioning the package and the base;
The collimator array can be finely adjusted with respect to the base in a first axis and a second axis direction orthogonal to each other in the collimator array plane, and a rotation direction about a third axis orthogonal to the collimator array plane An optical switch characterized in that a fine adjustment mechanism capable of fine adjustment is provided . A first array assembly including an input-side collimator array, a first package carrying a first mirror array and a first base;
A second array assembly including an output collimator array, a second package carrying a second mirror array, and a second base;
A common base on which the first and second array assemblies are fixed in a predetermined positional relationship;
Positioning means for mechanically positioning the input-side collimator array and the first base;
Positioning means for mechanically positioning the output-side collimator array and the second base;
Positioning means for mechanically positioning the first package and the first base;
Positioning means for mechanically positioning the second package and the second base;
An optical switch comprising: positioning means for mechanically positioning the first and second bases and the common base, respectively . The optical switch according to claim 3 ,
The first and second mirror arrays can be finely adjusted with respect to the first and second bases in the first and second axis directions perpendicular to each other in the plane of the first and second mirror arrays. And an optical switch provided with first and second fine adjustment mechanisms that can be finely adjusted in a rotation direction about a third axis orthogonal to the first and second mirror array surfaces . The optical switch according to claim 3 ,
The input-side and output-side collimator arrays can be finely adjusted with respect to the first and second bases in the first and second axis directions orthogonal to each other in the plane of the input-side and output-side collimator arrays. An optical switch comprising first and second fine adjustment mechanisms that are finely adjustable in a rotation direction about a third axis orthogonal to the input and output collimator array surfaces . The optical switch according to any one of claims 1, 2, 4, and 5 ,
An optical switch characterized in that a fine adjustment mechanism adjustment mark is provided on the mirror array . The optical switch according to claim 6 .
The optical switch is characterized in that the adjustment mark is a surface that scatters or reflects light. The optical switch according to claim 7 , wherein
The optical switch is characterized in that the adjustment mark is provided on a part of a grating of a mirror array . In the optical switch as described in any one of Claims 1-8 ,
The optical switch is characterized in that the positioning means is any one of a pin and a hole, a keyway and a key, or a convex portion and a convex portion . The optical switch according to any one of claims 1, 2, 4, and 5,
The fine adjustment mechanism includes an inner frame, an outer frame arranged to surround the inner frame, and a spring connecting the inner frame and the outer frame,
The spring is composed of four leaf springs bent in an L shape so as to surround each corner of the inner frame, and one end of two leaf springs adjacent to each other among the four leaf springs is formed on four sides of the inner frame. One of the two sides is connected to each other, the other end is connected to two sides orthogonal to the one side of the inner frame among the four sides of the outer frame, and one end of the remaining two leaf springs is connected to the inner frame. An optical switch, wherein the optical switch is connected to a side opposite to one side and the other end is connected to the two sides of the outer frame . An assembly method of the optical switch according to claim 1 ,
Positioning and fixing the collimator array to the base;
Positioning and fixing the package carrying the mirror array to the base;
The mirror array is finely adjusted with respect to the base in the first axis direction and the second axis direction orthogonal to each other in the mirror array plane, and finely adjusted in the rotation direction about the third axis orthogonal to the mirror array plane. An optical switch assembling method comprising an adjusting step for adjusting. The method of assembling an optical switch according to claim 11 .
An adjustment step of finely adjusting the mirror array includes a step of entering reference light to an adjustment mark provided on the mirror array;
And a step of moving the mirror array so that the reference light is scattered or reflected at the center of the mark . An assembly method for an optical switch according to claim 2 ,
Positioning and fixing the collimator array to the base;
Positioning and fixing the package carrying the mirror array to the base;
The collimator array is finely adjusted with respect to the base in a first axis and a second axis direction orthogonal to each other in the collimator array plane and finely adjusted in a rotation direction around a third axis orthogonal to the collimator array plane. An optical switch assembly method comprising: an adjusting step for performing an optical switch. An optical switch assembling method according to claim 13 ,
An adjustment step of finely adjusting the collimator array includes a step of entering reference light to an adjustment mark provided on the mirror array;
And a step of moving the collimator array so that the reference light is scattered or reflected at the center of the mark . An optical switch assembling method according to claim 3 ,
Assembling the first array assembly by positioning and fixing the input-side collimator array and the first package mounting the first mirror array with respect to the first base, respectively;
Assembling the second array assembly by positioning and fixing the output-side collimator array and the second package mounting the second mirror array with respect to the second base, respectively;
And a step of positioning and fixing the first and second array assemblies to a common base while maintaining a predetermined positional relationship . An assembly method for an optical switch according to claim 15 ,
A method of assembling an optical switch, wherein the step of assembling the first array assembly and the step of assembling the second array assembly are reversed . The method of assembling an optical switch according to claim 15 or 16 ,
The first and second mirror arrays are finely adjusted with respect to the first and second bases in the first axis and second axis directions orthogonal to each other in the mirror array plane, and orthogonal to the mirror array plane. A method of assembling an optical switch, comprising: an adjustment step of finely adjusting the rotation direction about the third axis . The method of assembling an optical switch according to claim 17 .
An adjustment step of finely adjusting the first and second mirror arrays includes a step of causing reference light to enter adjustment marks provided on the first and second mirror arrays,
And a step of moving the first and second mirror arrays so that the reference light is scattered or reflected at the center of the mark . The method of assembling an optical switch according to claim 15 or 16 ,
The input-side and output-side collimator arrays are finely adjusted with respect to the first and second bases in the directions of the first axis and the second axis perpendicular to each other in the collimator array plane and orthogonal to the collimator array plane. A method of assembling an optical switch, comprising: an adjustment step of finely adjusting a rotation direction about a third axis . The method of assembling an optical switch according to claim 19,
  An adjustment step of finely adjusting the input-side and output-side collimator arrays includes a step of entering reference light into adjustment marks provided on the first and second mirror arrays,
  And a step of moving the input side and output side collimator arrays so that the reference light is scattered or reflected at the center of the mark.

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