JP4373375B2 - Workpiece machining method and machining system - Google Patents

Description

  The present invention relates to a workpiece processing method and a processing system for forming an aspherical shape symmetrical to a rotation axis of a workpiece on a workpiece such as an optical element.

  2. Description of the Related Art Conventionally, an aspherical shape symmetric with respect to a rotation axis of a workpiece has been formed on a workpiece such as an optical element. Patent Document 1 discloses a workpiece processing machine for forming an aspherical shape. Patent Document 2 discloses an evaluation method and an evaluation apparatus for evaluating the formed aspheric shape.

  Such a workpiece machining method in the prior art will be described with reference to the flowchart of FIG.

Initial calculation (S1)
Referring to FIG. 6, the design aspheric shape _{FP0 that} is the processing target of the actual aspheric shape F _R0 formed on the workpiece is defined as follows from the rotation axis O in the cylindrical coordinate system with the rotation axis O of the workpiece as the reference axis. The distance is Y, and the depth from the top of the design aspheric shape _FP0 is X, which is expressed by the following aspheric expression.

First to Nth points are arbitrarily set on the aspherical surface representing the design aspherical surface shape _FP0 by a computer connected to a processing machine that processes the workpiece into the actual aspherical surface shape _FR0 . The coordinate values of the Nth point are calculated. For example, first to seventh points 50a, 50b,..., 50f, 50g are set.

Transfer (S2)
Each calculated coordinate value is transferred from the computer to the processing machine, and each coordinate value is stored by the processing machine.

Trial processing (S3)
The workpiece is controlled so as to move the tool in order from the first point to the Nth point based on the stored coordinate values while rotating the workpiece in the direction around the rotation axis of the workpiece. An actual aspherical shape _FR0 is formed.

Measurement similarity deformation magnification measurement (S4)
Here, regarding the formed actual aspheric shape F _R0 , PV values, measurement similar deformation magnifications, and the like are used as evaluation items of accuracy with respect to the design aspheric shape _FP0 . The PV value will be described with reference to FIGS. In FIG. 7, the position of the design aspherical shape _{FP0 in the} direction of the rotation axis O with respect to the predetermined diameter direction D orthogonal to the rotation axis O of the workpiece is indicated by a broken line. Similarly, the actual aspherical shape F _R0 is indicated by a solid line. Here, at a predetermined position in the diametrical direction D, it referred the distance of the rotation axis O direction of the work between the design aspherical F _P0 and the actual aspheric F _R0 and shape error E _R0. FIG. 8 shows a shape error E _R0 with respect to a predetermined diameter direction D. The difference PV _R0 between the maximum value E _MAX and the minimum value E _MIN of the shape error E _R0 over the predetermined diameter direction D is referred to as a PV value.

Next, the measurement similarity deformation magnification M ₀ will be described with reference to FIGS. 9 and 10. By similarity transformation design aspheric F _P0 in similarity transformation magnification M, to form a similar aspherical shape F _M. Aspheric expression of similar aspherical shape F _M of the similarity transformation magnification M is expressed by the following equation.

In FIG. 9, as in FIG. 7, the positions of the design aspheric shape _FP0 and the actual aspheric shape _{FR0 in the} direction of the rotation axis O with respect to the predetermined diameter direction D are indicated by a broken line and a solid line, respectively. Likewise, the similar aspherical F _M, is shown by a chain line. Here, it referred to as errors in the actual aspheric F _R0 for similar aspherical shape F _M shape similar error E _M. 9, for a given diameter direction D, there is shown respectively a shape error E _R0 and similar shape error E _M in solid and dashed lines. The value of the similar deformation magnification M that minimizes the PV value (PV _M ) of the similar shape error E _M is referred to as a measured similar deformation magnification M ₀ for the actual aspheric shape _{FR 0} . In other words, the shape obtained by similar deformation of the design aspheric shape F _P0 at the measurement similar deformation magnification M ₀ is the overall shape of the actual aspheric shape F _R0 among the shapes obtained by similar deformation of the design aspheric shape F _P0 . The shape has the smallest difference.

In this step, the workpiece subjected to the trial machining is removed from the processing machine, and the actual aspherical shape F _R0 is measured by the measuring device to calculate the measurement similar deformation magnification M ₀ .

Correction calculation (S5)
Referring to FIG. 11, as a result of processing the design aspheric shape _FP0 represented by Expression (1) as a processing target, an actual aspheric shape F _R0 having a measurement similar deformation magnification M ₀ is formed. by processing the aspherical F _P0 a similarity transformation ratio 1 / M ₀ corrected design aspheric F _P1 corrected by similarity transformation at a forming target, actual aspheric F _R1 closer to the design value is obtained It is assumed that

In this process, enter the measured similarity transformation magnification M ₀ in the computer, the computer represents a corrected design aspherical F _P1, equation (2) to M = 1 / M ₀ were substituted corrected aspherical on formula Then, the first to Nth points are set again to calculate the corrected coordinate values.

Transfer (S6)
The corrected coordinate values are transferred from the computer to the processing machine, and the corrected coordinate values are stored by the processing machine.

Main processing (S7)
The actual aspherical shape _FR1 is formed on the workpiece based on the corrected coordinate values by the processing machine.

Hereinafter, the case of forming a solid aspherical F _R1 having the same shape the work performs the processing (S7) in succession. When the correction process is performed again, the processing returns to the similar deformation magnification measurement (S4), the correction calculation (S5) and the transfer (S6) are performed again, and then the main processing (S7) is performed.
JP 2003-25207 A Japanese Patent Laid-Open No. 11-295059

  In the conventional workpiece machining method, the correction calculation is complicated, and therefore it is necessary to perform the correction calculation by a computer, and it is necessary to transfer the corrected coordinate value from the computer to the processing machine. During this transfer, the worker usually only waits, so a wasteful time is generated and work efficiency is lowered.

  The present invention has been made paying attention to the above-mentioned problems, and its object is to provide a workpiece machining method and a machining system that can perform a correction process quickly and improve work efficiency. .

The invention according to claim 1 is a step of setting an aspheric expression representing a design aspheric shape that is a workpiece processing target and is symmetric with respect to the rotation axis of the workpiece, and calculating a coordinate value on the aspheric expression; Based on the coordinate value, the step of trial machining a part of the workpiece into an actual aspheric shape while rotating the workpiece around the rotation axis with the design aspheric shape as a processing target, and measuring the actual aspheric shape, Measurement similarity deformation of the design aspheric shape that minimizes the difference between the shape obtained by similar deformation of the design aspheric shape and the shape of the actual aspheric shape with respect to the similarity deformation magnification for similar deformation of the design aspheric shape calculating a magnification such that the designed aspheric shape in the same shape which are formed by similarity transformation magnification similarity transformation of the design aspheric inverse of the measured similarity transformation magnification is corrected, The serial coordinate values, by adding the correction value calculated by the default arithmetic function from the measured similarity transformation ratio, a step of correcting the coordinate values, based on the coordinate values after correction, the design of the corrected And a step of subjecting a part of the workpiece to a real aspherical shape while rotating the workpiece in the direction around the rotation axis with the aspherical shape as a machining target.

  The invention according to claim 2 is the workpiece machining method according to claim 1, wherein the trial machining step or the main machining step includes a machining step using a disk-shaped grindstone.

  The invention according to claim 3 is the workpiece processing method according to claim 1, wherein the workpiece includes an optical element.

According to a fourth aspect of the present invention, there is provided a processing machine that processes a workpiece while rotating the workpiece in a direction around the axis of the rotation axis, and an aspheric expression representing a design aspheric shape that is a workpiece target of the workpiece and that is symmetrical with respect to the rotation axis of the workpiece. An arithmetic device that calculates and calculates a coordinate value on the aspheric formula, and controls the processing machine, and based on the coordinate value input from the arithmetic device, the design aspheric shape is used as a processing target. A control device that trial-processes a part of the design aspherical shape , a shape obtained by measuring the real aspheric shape, and a similar deformation magnification for similar deformation of the design aspheric shape, A measurement device that calculates a measurement similarity deformation magnification of the designed aspheric shape that minimizes a difference in shape from the actual aspheric shape, and the control device converts the design aspheric shape to the measurement similarity. Deformation As the design aspheric shape in the same shape which are formed by similarity transformation at similarity transformation ratio of the reciprocal of the rate is corrected, the coordinates, the measured similarity transformation ratio calculated by the measuring device The coordinate value is corrected by adding a correction value calculated by a predetermined four arithmetic operation function, and the processing machine is controlled to correct the designed aspheric shape based on the corrected coordinate value. The workpiece machining system is characterized in that the actual aspherical shape is partially machined on a part of the workpiece while rotating the workpiece in the direction around the axis of rotation with the machining target as a machining target.

  A fifth aspect of the present invention is the workpiece machining system according to the fourth aspect, wherein the processing machine includes a disk-shaped grindstone for machining the workpiece.

  The invention of claim 6 is the workpiece processing system according to claim 4, wherein the workpiece includes an optical element.

  According to the work machining method of the present invention, since the correction calculation is only four arithmetic operations, the correction calculation can be performed by the control means for controlling the work machining means. In the correction process, the control means and other means Therefore, it is possible to improve the work efficiency by performing the correction process quickly.

  In the workpiece machining system according to the present invention, since the correction calculation is only four arithmetic operations, the correction calculation can be performed by the control device, and it is not necessary to perform communication between the control device and the arithmetic device in the correction process. The correction process is performed quickly, and the working efficiency can be improved.

  Hereinafter, an embodiment of the present invention will be described with reference to FIGS. In this embodiment, a substantially cylindrical optical glass is used as the workpiece.

  With reference to FIG.1 and FIG.2, the workpiece processing system 20 of this embodiment is demonstrated. The processing machine 24 of the workpiece processing system 20 includes a workpiece rotation mechanism 26a that rotates the workpiece 22 around the axis with the central axis as a rotation axis (hereinafter referred to as a workpiece rotation axis O1) (see arrow B1 in FIG. 1). . This work rotation mechanism 26a has a substantially cylindrical work holder 28 to which the work 22 is detachably mounted on the same axis at the tip. The proximal end portion of the work holder 28 is coaxially connected to the distal end portion of the work spindle 30a. The work spindle 30a is supported so as to be rotatable around the axis of its own central axis. A first pulley 32 a is disposed at the base end portion of the work spindle 30 a, and the first pulley 32 a is connected to the output shaft of the first rotation motor 34 via the drive belt 33. Connected to the second pulley 32b. That is, the work 22, the work holder 28, and the work spindle 30a are integrally rotated by the first rotation motor 34 in the direction around the work rotation axis O1.

  The processing machine 24 has a workpiece moving mechanism 36a that moves the workpiece 22 in the direction of the workpiece rotation axis O1 (see arrow C1 in FIG. 1). That is, the work spindle 30a and the first rotation motor 34 are placed on the first moving table 38a of the work moving mechanism 36a. The first moving table 38a is supported by a pair of first guides 40a arranged in parallel in the workpiece rotation axis O1 direction so as to be slidable in the workpiece rotation axis O1 direction. A first feed screw 42a is coupled to the first moving table 38a, and the first feed screw 42a is coupled to a first moving motor 44a. That is, the first moving table 38a is moved and positioned in the direction of the workpiece rotation axis O1 by rotating and stopping the first feed screw 42a by the first moving motor 44a.

  On the other hand, the grindstone 46 for processing the workpiece 22 has a disk shape in which a grindstone surface is formed on the outer peripheral surface. The processing machine 24 includes a grindstone rotating mechanism 26b that rotates the grindstone 46 around the axis with the central axis as a rotation axis (hereinafter referred to as a grindstone rotation axis O2) (see arrow B2 in FIG. 1). That is, the grindstone 46 is coaxially connected to the tip of a substantially cylindrical grindstone spindle 30b of the grindstone rotating mechanism 26b, and this grindstone spindle 30b is, for example, 10,000 to 70,000 rpm by a second rotation motor. It is rotated at a high speed.

  And the processing machine 24 has the grindstone moving mechanism 36b which moves the grindstone 46 in the direction perpendicular | vertical to the grindstone rotating shaft O2 (refer arrow C2 of FIG. 1). The grindstone moving mechanism 36b has the same configuration as that of the work moving mechanism 36a. In addition to the second moving table 38b on which the grindstone spindle 30b of the grindstone rotating mechanism 26b is placed, the second guide 40b, the second guide 40b, Feed screw 42b and second moving motor 44b.

  Furthermore, the processing machine 24 has a grindstone turning mechanism 36c for turning the grindstone 46 about a predetermined turning center O3 (see arrow D1 in FIG. 1). That is, the second guide 40b of the grindstone moving mechanism 36b is placed on the turning base 38c of the grindstone turning mechanism 36c. The turning base 38c is rotated around a predetermined turning center O3 by a turning motor 44c.

  The turning center O3 is one point fixed to the processing machine 24, and the workpiece rotation axis O1 of the workpiece rotating mechanism 26a and the workpiece moving mechanism 36a is disposed so as to pass through the turning center O3.

  The first moving motor 44a of the workpiece moving mechanism 36a, the second moving motor 44b of the grindstone moving mechanism 36b, and the turning motor 44c of the grindstone turning mechanism 36c are connected to the control device 47. The control device 47 is connected to a computer 48 as an arithmetic device, and is further connected to a measurement device 49 for calculating a measurement similarity deformation magnification. The control device 47 cooperates with the computer 48 and the measuring device 49 to drive the first moving motor 44a, the second moving motor 44b, and the turning motor 44c, thereby the first moving table 38a and the second moving motor. By operating the table 38b and the turning base 38c, the grindstone surface of the grindstone 46 in the rotating state is brought into contact with the rotating workpiece 22 by the work rotating mechanism 26a by the grindstone rotating mechanism 26b. Process.

  Next, the workpiece machining method of the present embodiment will be described using the flowchart of FIG. Detailed description of the same procedures as those of the prior art described in this specification will be omitted.

Initial calculation (S1)
In the processing method of this embodiment, a coordinate system based on the amount of movement of the workpiece 22 by the workpiece moving mechanism 36a, the amount of movement of the grindstone 46 by the grindstone moving mechanism 36b, and the amount of turning of the grindstone 46 by the grindstone turning mechanism 36c is adopted. That is, referring to FIG. 2, the distance between the turning center O3 and the tip surface 31 of the work spindle 30a is W, the distance between the turning center O3 and the grindstone rotating shaft O2 is T, and the turning center O3 is the center. A coordinate system (W, T, S) is adopted, where S is the rotation angle of the turning base 38c. Note that S is set to S = π / 2 when the turning base 38c is at a position where the tip surface of the workpiece 22 and the tip surface of the grindstone 46 face substantially in parallel, and S = π / 2. S = 0 when the turning base 38c is moved counterclockwise by π / 2, and S = π when the turning base 38c is moved clockwise by π / 2.

As described in the prior art, the aspheric expression representing the design aspheric shape _FP0 is expressed as Expression (1) in the cylindrical coordinate system (X, Y) with the workpiece rotation axis O1 as the reference axis. The coordinate system (X, Y) in the workpiece 22 is converted into the coordinate system (W, T, S) in the processing machine 24. That is, an arbitrary point (X _n , Y _n ) on the aspherical expression is converted as follows.

Here, t is the distance between the surface apex of the front end surface and the design aspherical F _P0 of the work spindle 30a, D _t is the diameter of the grinding wheel 46.

In this step, by the computer 48, the design on the aspheric expression representing the aspherical F _P0, set the U ₀ point corresponding to the vertex of the design aspherical F _P0, the point U ₁ in the order closer to the vertex, _..., U _{n, ...,} and set the _{U n,} each point _U 0, ..., _{U n} coordinate values _U 0 of _{(X 0, Y 0),} ..., U n (X n, Y n) to calculate the . Then, by converting the coordinate system of the workpiece 22 a (X, Y) coordinate system in machine 24 (W, T, S) to each point _U 0, ..., _{U N} each point _V 0, ..., _{V N} converted to each point _V 0, ..., the coordinate value _V 0 which _{V N (W 0, T 0} , S 0), ..., V N (W N, T N, S N) is calculated.

Transfer (S2)
In this step, each coordinate value after conversion calculated by the computer 48 is transferred from the computer 48 to the control device 47.

Trial processing (S3)
In this step, the work 22 is mounted on the work holder 28, the work rotating mechanism 26a is operated to hold the work 22 in a rotating state, and the grindstone rotating mechanism 26b is operated to hold the grindstone 46 in a rotating state. Subsequently, the control device 47 drives the first moving motor 44a, the second moving motor 44b, and the turning motor 44c to move the first moving table 38a, the second moving table 38b, and the turning base 38c. By operating, the grindstone surface of the grindstone 46 is moved to the point V ₀ (W ₀ , T ₀ , S ₀ ). Subsequently, the workpiece 22 is subjected to trial machining by moving the grindstone surface from the point V ₀ (W ₀ , T ₀ , S ₀ ) to the point V ₁ (W ₁ , T ₁ , S ₁ ). At this time, the first moving motor 44a and the like are controlled so that W, T, and S simultaneously reach W ₁ , T ₁ , and S ₁ . The grindstone surface is always controlled so as to be orthogonal to the normal direction of the designed aspherical shape _FP0 . In the same manner, the workpiece 22 is subjected to trial machining by moving the grindstone surface from the point V ₁ (W ₁ , T ₁ , S ₁ ) to the point V _N (W _N , T _N , S _N ). In this way, the actual aspherical shape F _R0 is formed on the workpiece 22.

Measurement similarity deformation magnification measurement (S4)
In this step, as in the prior art, the actual aspherical shape F _R0 of the workpiece 22 after the trial machining is measured by the measuring device 49, and a measurement similar deformation magnification M ₀ (hereinafter simply referred to as M) is calculated.

Correction calculation (S5)
In this process, in the control device 47, the design aspheric shape _FP0 is substantially the same shape as the shape formed by similar deformation of the design aspheric shape _FP0 with the similar deformation magnification 1 / M. The coordinate values V _n (W _n , T _n , S _n ) are corrected so as to be corrected to the spherical shape _FP1 . That is, based on the following formulas (4) and (5), the coordinate value V _n (W _n , T _n , S _n ) is changed to the coordinate value V _n ′ (W _n ′, T _n ′, S _n ′). to correct.

Here, the correction coefficient k is calculated in advance and stored in the control device 47. Hereinafter, a method for calculating the correction coefficient k will be described. First, to set the upper limit value M _U and a lower limit value M _L of similarity transformation ratio based on the diameter d of the workpiece 22. Based on this limit _{M U} and a lower limit value _{M L,} (the l integer) _M l by the following equation (6) to calculate the value of.

Then, for each l, by using the values of the constants R, P, and A _i according to the equations (2) and (3), the coordinate value V _n (W _n , T _n , S _n ) is set as M = M _l. And corresponding coordinate values V _n ′ (W _n ′, T _n ′, S _n ′) are calculated with M = 1. Then, T _(M) is calculated from the coordinate value V _n (W _n , T _n , S _n ) and the coordinate value V _n ′ (W _n ′, T _n ′, S _n ′) by Equation (4). Here, although M and T _(M) are not completely proportional, they can be approximated by a proportional relationship as expressed by Equation (5), so T _(M) for each M _l is calculated and the minimum The value of k is calculated by the square method.

Referring to FIG. 4, the corrected design aspheric F _P1 are spaced apart by T _(M) from the uncorrected design aspheric F _P0 in the normal direction of the pre-correction design aspheric F _P0. If only T is corrected, the position of the top surface of the design aspheric surface changes before and after correction, and therefore W is also corrected so that the position of the surface top does not change.

Main processing (S6)
Based on the coordinate values V _n ′ (W _n ′, T _n ′, S _n ′) of each point after correction, the workpiece 22 is subjected to main machining to form an actual aspherical shape _FR1 as in the trial machining.

Thereafter, when the actual aspherical shape _FR1 having the same shape is formed on the workpiece 22, the main machining (S7) is continuously performed. When the correction process is performed again, the processing returns to the similar deformation magnification measurement (S4), the correction calculation (S5) is performed again, and the main processing (S7) is performed.

Therefore, the workpiece machining system 20 of this embodiment has the following effects. In this embodiment, correction calculation is performed in order to obtain an actual aspherical shape _FR1 that is closer to the design value. This correction calculation is performed by four arithmetic operations as expressed by the equations (4) and (5). It has become only. For this reason, the correction calculation can be performed in the control device 47 that controls the processing machine 24, and it is not necessary to perform communication between the control device 47 and the computer 48 in the correction process. Work efficiency can be improved.

Next, other characteristic technical matters of the present application are appended as follows.
Record
(Additional Item 1) In the shape correction of the workpiece in the machining method for creating an axisymmetric aspherical shape by moving the machining tool on the plane including the rotation axis while rotating the workpiece, before the shape correction, Calculate only one correction value from the workpiece shape measurement result of the workpiece, and the aspherical shape of the workpiece to be machined next is the curve moved by the correction value in the normal direction from each point of the previously machined aspherical shape. A method for correcting an aspherical shape.

(Additional Item 2) The correction method according to Additional Item 1, wherein the processing tool is a disc-shaped grindstone.

(Additional Item 3) The correction method according to Additional Item 1, wherein the workpiece is an optical element.

  The present invention provides a workpiece machining method and machining for forming an aspheric shape symmetrical to the rotation axis of a workpiece on a workpiece such as an optical element, which can perform a correction process quickly and improve work efficiency. Provide a system.

Schematic which shows the workpiece processing system of one Embodiment of this invention. The top view which shows the processing machine of the workpiece processing system of one Embodiment of this invention. The figure which shows the flowchart of the workpiece processing method of one Embodiment of this invention. The schematic diagram which shows the design aspherical shape before and behind correction | amendment in the workpiece | work processing method of one Embodiment of this invention. The figure which shows the flowchart of the conventional workpiece | work processing method. The schematic diagram for demonstrating the process process of the workpiece | work in the conventional workpiece | work processing method. The schematic diagram for demonstrating the shape error in the conventional workpiece | work processing method. The schematic diagram for demonstrating PV value in the conventional workpiece | work processing method. The schematic diagram for demonstrating the shape error and the similar shape error in the conventional workpiece | work processing method. The schematic diagram for demonstrating the measurement similar deformation magnification in the conventional workpiece | work processing method. The schematic diagram which shows the design aspherical shape before and behind correction | amendment in the conventional workpiece | work processing method.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 20 ... Work processing system, 22 ... Work, 24 ... Processing machine, 47 ... Control apparatus, 48 ... Arithmetic unit, 49 ... Measuring apparatus.

Claims (6)

Setting an aspherical expression representing a design aspherical shape that is a workpiece processing target and symmetrical with respect to the rotation axis of the workpiece, and calculating a coordinate value on the aspherical expression;
Based on the coordinate values, a step of trial machining a part of the workpiece into an actual aspheric shape while rotating the workpiece around the axis of rotation with the design aspheric shape as a machining target;
The actual aspheric shape is measured, and the difference between the shape obtained by similar deformation of the design aspheric shape and the shape of the actual aspheric shape is minimized with respect to the similarity deformation magnification for similar deformation of the design aspheric shape. Calculating a measurement similarity deformation magnification of the designed aspheric shape ;
The measurement value is set to the coordinate value so that the design aspheric shape is corrected to the same shape as the shape formed by similar deformation of the design aspheric shape with a similar deformation magnification that is a reciprocal of the measurement similar deformation magnification. A step of correcting the coordinate value by adding a correction value calculated by a predetermined four arithmetic operation functions from the similarity deformation magnification;
Based on the corrected coordinate values, a step of subjecting a part of the workpiece to a real aspherical shape while rotating the workpiece around the rotation axis with the corrected design aspheric shape as a processing target;
A workpiece machining method comprising: The trial processing step or the main processing step includes a step of processing using a disk-shaped grindstone.
The workpiece machining method according to claim 1, wherein: The workpiece includes an optical element,
The workpiece machining method according to claim 1, wherein: A processing machine that processes the workpiece while rotating it around the axis of rotation,
An arithmetic device that sets an aspheric expression representing a design aspheric shape that is symmetric with respect to the rotation axis of the workpiece as a machining target of the workpiece, and calculates a coordinate value on the aspheric expression;
A control device that controls the processing machine and, based on the coordinate value input from the arithmetic unit, causes the design aspheric surface shape to be a processing target to testly machine a part of the workpiece into an actual aspheric surface shape;
The actual aspheric shape is measured, and the difference between the shape obtained by similar deformation of the design aspheric shape and the shape of the actual aspheric shape is minimized with respect to the similarity deformation magnification for similar deformation of the design aspheric shape. A measuring device for calculating the measurement similar deformation magnification of the designed aspheric shape ;
Comprising
The controller is
The measurement value is set to the coordinate value so that the design aspheric shape is corrected to the same shape as the shape formed by similar deformation of the design aspheric shape with a similar deformation magnification that is a reciprocal of the measurement similar deformation magnification. While correcting the coordinate value by adding a correction value calculated by a predetermined four arithmetic operation function from the measurement similarity deformation magnification calculated by the apparatus,
By controlling the processing machine and based on the corrected coordinate values, the actual aspherical shape is formed on a part of the workpiece while rotating the workpiece around the rotation axis with the corrected design aspherical shape as a processing target. Let this work,
A workpiece machining system characterized by this. The processing machine has a disk-shaped grindstone for processing the workpiece,
The workpiece machining system according to claim 4, wherein The workpiece includes an optical element,
The workpiece machining system according to claim 4, wherein

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