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JP4380283B2 - Crucible and method for growing calcium fluoride single crystal using crucible - Google Patents
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JP4380283B2 - Crucible and method for growing calcium fluoride single crystal using crucible - Google Patents

Crucible and method for growing calcium fluoride single crystal using crucible Download PDF

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JP4380283B2
JP4380283B2 JP2003336015A JP2003336015A JP4380283B2 JP 4380283 B2 JP4380283 B2 JP 4380283B2 JP 2003336015 A JP2003336015 A JP 2003336015A JP 2003336015 A JP2003336015 A JP 2003336015A JP 4380283 B2 JP4380283 B2 JP 4380283B2
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seed crystal
crucible
raw material
crystal
calcium fluoride
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JP2005104741A (en
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圭二 住谷
セングットバン ナチムス
浩之 石橋
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Resonac Corp
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Hitachi Chemical Co Ltd
Showa Denko Materials Co Ltd
Resonac Corp
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Priority to JP2003336015A priority Critical patent/JP4380283B2/en
Priority to US10/563,087 priority patent/US7399360B2/en
Priority to EP04746126A priority patent/EP1643017A4/en
Priority to PCT/JP2004/008624 priority patent/WO2005003413A1/en
Publication of JP2005104741A publication Critical patent/JP2005104741A/en
Priority to US11/968,916 priority patent/US7785416B2/en
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Description

本発明は、単結晶を育成するためのルツボ、及び、ルツボを用いたフッ化カルシウム(CaF)単結晶の育成方法に関する。 The present invention relates to a crucible for growing a single crystal and a method for growing a calcium fluoride (CaF 2 ) single crystal using the crucible.

従来、フッ化カルシウムの単結晶を製造する方法として垂直ブリッジマン(以下、VBと略記する)法が知られている。VB法は、フッ化カルシウムの原料を収容したルツボをフッ化カルシウムの原料の融点前後の温度勾配を有する結晶成長装置の炉の中で垂直に移動させる方法である。まずルツボを上昇させることによりフッ化カルシウムの原料を溶融させて、次にルツボを徐々に降下させる(すなわち冷却する)ことにより、下部から上部に徐々に結晶化させフッ化カルシウムの単結晶を成長させる方法である。なお、ルツボを昇温させずに結晶成長装置のヒータの温度制御のみでフッ化カルシウムの原料を溶融する方法もある。   Conventionally, a vertical Bridgman (hereinafter abbreviated as VB) method is known as a method for producing a single crystal of calcium fluoride. The VB method is a method in which a crucible containing a calcium fluoride raw material is moved vertically in a furnace of a crystal growth apparatus having a temperature gradient around the melting point of the calcium fluoride raw material. First, the calcium fluoride raw material is melted by raising the crucible, and then the crucible is gradually lowered (ie, cooled) to gradually crystallize from the lower part to the upper part to grow a single crystal of calcium fluoride. It is a method to make it. There is also a method of melting the calcium fluoride raw material only by controlling the temperature of the heater of the crystal growth apparatus without raising the temperature of the crucible.

このようなVB法で使用されるルツボとしては、例えば特許文献1のルツボが挙げられる。特許文献1のルツボは、原料収容部と、原料収容部の下側に配置された種結晶収容部とで構成されている。そして、種結晶収容部内に収容される種結晶の未溶融部分を種として単結晶を成長させることで、結晶方位の一定化を図ることができる。すなわち、種結晶収容部内の種結晶が全て溶融されると方位制御が全くできなくなる。一方、種結晶収容部の上端部近傍の種結晶だけが溶融された場合も、所望の結果を得ることができないことが分かっている。このような背景から、種結晶収容部の中間部近傍までの種結晶が溶融されると、その後の単結晶の育成が好適に行われることが経験的に知られている。そこで、従来、結晶成長装置のヒータの温度制御等を行い、種結晶収容部の中間部近傍までの種結晶を溶融するように調節を行っている。
特開平10−265296号公報
An example of the crucible used in such a VB method is the crucible disclosed in Patent Document 1. The crucible of Patent Document 1 is composed of a raw material container and a seed crystal container arranged below the raw material container. The crystal orientation can be made constant by growing the single crystal using the unmelted portion of the seed crystal accommodated in the seed crystal accommodating portion as a seed. That is, when all the seed crystals in the seed crystal accommodating portion are melted, the orientation control cannot be performed at all. On the other hand, it has been found that the desired result cannot be obtained even when only the seed crystal in the vicinity of the upper end of the seed crystal accommodating portion is melted. From such a background, it is empirically known that when the seed crystal up to the vicinity of the middle part of the seed crystal accommodating part is melted, the subsequent growth of the single crystal is suitably performed. Therefore, conventionally, the temperature of the heater of the crystal growth apparatus is controlled, and adjustment is performed so as to melt the seed crystal up to the vicinity of the intermediate portion of the seed crystal accommodating portion.
Japanese Patent Laid-Open No. 10-265296

しかしながら、材料の成分の相違や結晶成長炉内の真空度、冷却水でルツボの冷却を制御している場合には冷却水の温度等により、種結晶収容部内の種結晶を常に所望の位置まで溶融することが困難であった。このため、種結晶収容部内の種結晶を所望の位置まで溶融し、所望の単結晶が得られるようにするためには、試行錯誤を繰り返さなければならなかった。   However, when the crucible cooling is controlled by the difference in material components, the degree of vacuum in the crystal growth furnace, or the cooling water, the seed crystal in the seed crystal accommodating portion is always brought to the desired position depending on the temperature of the cooling water. It was difficult to melt. For this reason, trial and error had to be repeated in order to melt the seed crystal in the seed crystal accommodating portion to a desired position and obtain a desired single crystal.

本発明は、上記事情に鑑みてなされたものであり、種結晶の溶融部分と未溶融部分との境界位置を容易に定めることができるルツボを提供することを目的とする。   This invention is made | formed in view of the said situation, and it aims at providing the crucible which can determine easily the boundary position of the fusion | melting part of a seed crystal, and an unmelted part.

上記目的を達成するために、本発明によるルツボは、単結晶を育成するためのルツボにおいて、種結晶を収容する垂直方向に延びる有底の種結晶収容部と、単結晶の原料を収容する原料収容部であって、種結晶収容部の上方に配置され、種結晶収容部と連通する原料収容部と、種結晶収容部の内部温度を検出するための温度検出手段とを備えることを特徴としている。   In order to achieve the above object, a crucible according to the present invention is a crucible for growing a single crystal, a bottomed seed crystal containing portion that extends in the vertical direction that contains a seed crystal, and a raw material that contains a single crystal raw material A storage unit, which is disposed above the seed crystal storage unit and includes a raw material storage unit communicating with the seed crystal storage unit, and a temperature detecting means for detecting an internal temperature of the seed crystal storage unit. Yes.

また、上記のルツボを用いたフッ化カルシウム単結晶の育成方法としては、ルツボを用意するステップと、種結晶収容部にフッ化カルシウムの種結晶を収容するステップと、原料収容部にフッ化カルシウムの単結晶の原料を収容するステップと、ルツボを、内部が垂直方向に所定の温度勾配をもって加熱される結晶成長装置の炉内に配置し、ルツボを加熱して原料収容部に収容された原料及び種結晶収容部に収容された種結晶を、上方から下方へと漸次溶融するステップと、ルツボの加熱中に温度検出手段により種結晶収容部の内部温度を検出するステップと、温度検出手段により検出された種結晶収容部の内部温度に基づき、種結晶収容部に収容された種結晶の溶融部分と未溶融部分との境界位置が種結晶収容部の底端から所定の高さだけ上方の第1位置と、第1位置から所定の高さだけ上方の第2位置との間にあると判断された場合に、加熱を終了し、冷却を開始して単結晶を育成するステップとを含んでいる。   In addition, as a method for growing a calcium fluoride single crystal using the above-described crucible, a step of preparing a crucible, a step of storing a seed crystal of calcium fluoride in a seed crystal storage unit, and a calcium fluoride in a raw material storage unit And a crucible placed in a furnace of a crystal growth apparatus in which the inside is heated with a predetermined temperature gradient in the vertical direction, and the crucible is heated and the raw material received in the raw material storage part And gradually melting the seed crystal accommodated in the seed crystal accommodating portion from above to below, detecting the internal temperature of the seed crystal accommodating portion by the temperature detecting means during heating of the crucible, and by the temperature detecting means Based on the detected internal temperature of the seed crystal accommodating part, the boundary position between the melted part and the unmelted part of the seed crystal accommodated in the seed crystal accommodating part is a predetermined height from the bottom end of the seed crystal accommodating part. When it is determined that it is between the first position and the second position above the first position by a predetermined height, the heating is terminated, the cooling is started, and the single crystal is grown. Is included.

これによれば、温度検出手段によって種結晶収容部の内部温度を検出することができるので、この検出された内部温度に基づいて、種結晶収容部に収容された種結晶の溶融部分と未溶融部分との境界位置を容易に定めることができる。   According to this, since the internal temperature of the seed crystal accommodating part can be detected by the temperature detecting means, based on the detected internal temperature, the melted part of the seed crystal accommodated in the seed crystal accommodating part and the unmelted part The boundary position with the part can be easily determined.

温度検出手段としては熱電対があり、熱電対が種結晶収容部の側面の近傍位置に配置されていることが好適である。これによって熱電対が配置された付近の種結晶の温度を容易に計測することができる。   As the temperature detecting means, there is a thermocouple, and it is preferable that the thermocouple is disposed in the vicinity of the side surface of the seed crystal accommodating portion. Thereby, the temperature of the seed crystal in the vicinity where the thermocouple is arranged can be easily measured.

また、熱電対が複数個あり、垂直方向に互いに隔離して配置されていることが好適である。これによって各熱電対の配置と、各熱電対から計測された温度とを基に、種結晶収容部の温度勾配を理解することができる。   Further, it is preferable that there are a plurality of thermocouples and they are arranged separately from each other in the vertical direction. Thereby, the temperature gradient of the seed crystal accommodating portion can be understood based on the arrangement of each thermocouple and the temperature measured from each thermocouple.

ここで、2個の熱電対のうち一方が、種結晶収容部の深さの25〜50%に相当する高さだけ種結晶収容部の底端の高さ位置から上方の位置に配置され、他方が、種結晶収容部の深さの60〜80%に相当する高さだけ種結晶収容部の底端の高さ位置から上方の位置に配置されていることが有効である。この場合、2個の熱電対の配置に挟まれる範囲内まで種結晶が溶融されると、その後の単結晶の育成が好適に行われる。そしてこのような状態にあるかどうかは、2個の熱電対から計測される温度の間に種結晶の融点が存在するかどうかで容易に判断できる。   Here, one of the two thermocouples is disposed at an upper position from the height position of the bottom end of the seed crystal accommodating part by a height corresponding to 25 to 50% of the depth of the seed crystal accommodating part, It is effective that the other is disposed at a position above the height position of the bottom end of the seed crystal accommodating portion by a height corresponding to 60 to 80% of the depth of the seed crystal accommodating portion. In this case, when the seed crystal is melted within a range sandwiched between the two thermocouples, the subsequent growth of the single crystal is suitably performed. And whether it is in such a state can be easily judged by whether the melting | fusing point of a seed crystal exists between the temperature measured from two thermocouples.

フッ化カルシウム単結晶の育成方法においていえば、第1位置が、種結晶収容部の深さの25%に相当する高さだけ種結晶収容部の底端から上方の位置であり、第2位置が、種結晶収容部の深さの80%に相当する高さだけ種結晶収容部の底端から上方の位置であることが有効である。この第1位置と第2位置との範囲内に、種結晶収容部に収容された種結晶の溶融部分と未溶融部分との境界位置が来たとき加熱を終了し、冷却を開始して単結晶を育成すると、未溶融部分の種結晶の結晶面に沿ってフッ化カルシウムの単結晶が好適に育成されるからである。   In the growing method of the calcium fluoride single crystal, the first position is a position above the bottom end of the seed crystal accommodating part by a height corresponding to 25% of the depth of the seed crystal accommodating part, and the second position However, it is effective that the position is higher than the bottom end of the seed crystal accommodating part by a height corresponding to 80% of the depth of the seed crystal accommodating part. When the boundary position between the melted portion and the unmelted portion of the seed crystal accommodated in the seed crystal accommodating portion comes within the range between the first position and the second position, the heating is finished, and the cooling is started to simply This is because when the crystal is grown, a single crystal of calcium fluoride is preferably grown along the crystal plane of the seed crystal of the unmelted portion.

上述したような温度検出手段を備えるルツボによると、種結晶収容部に収容された種結晶の溶融部分と未溶融部分との境界位置を容易に定めることができるので、所望のフッ化カルシウムの単結晶をより確実に育成することができる。   According to the crucible including the temperature detecting means as described above, the boundary position between the molten portion and the unmelted portion of the seed crystal accommodated in the seed crystal accommodating portion can be easily determined. Crystals can be grown more reliably.

以下、図面を参照して本発明に係るフッ化カルシウム単結晶を育成するためのルツボの実施形態を説明する。参照する図面において、図1は本実施形態に係るルツボを備えた結晶成長装置の概略構造を示す模式図、図2は図1に示した本実施形態に係るルツボの構造を示す断面図である。   Hereinafter, an embodiment of a crucible for growing a calcium fluoride single crystal according to the present invention will be described with reference to the drawings. In the drawings to be referred to, FIG. 1 is a schematic view showing a schematic structure of a crystal growth apparatus provided with a crucible according to the present embodiment, and FIG. 2 is a cross-sectional view showing the structure of the crucible according to the present embodiment shown in FIG. .

図1に示すように、本実施形態に係るルツボ1は、VB法による結晶成長装置100としての真空VB炉2内において、主ヒータ2AA及び副ヒータ2ABの内側に配置される。このルツボ1は、シャフト2Bを介して極微速度で上昇されることにより、フッ化カルシウムの原料Mを溶融し、その後シャフト2Bを介して極微速度で下降されることにより、原料Mを冷却して、これをフッ化カルシウムの単結晶からなる種結晶Sの例えば(111)方位の結晶面に沿って単結晶に育成するためのものである。   As shown in FIG. 1, the crucible 1 according to this embodiment is disposed inside the main heater 2AA and the sub heater 2AB in a vacuum VB furnace 2 as a crystal growth apparatus 100 by the VB method. The crucible 1 is melted at a very low speed through the shaft 2B to melt the calcium fluoride raw material M, and then lowered at a very low speed through the shaft 2B to cool the raw material M. This is for growing the seed crystal S made of a single crystal of calcium fluoride into a single crystal along, for example, the (111) oriented crystal plane.

真空VB炉2の内部は、真空ポンプ2Cによって10−4Pa以下に減圧され、真空VB炉2内の上部は主ヒータ2AAによって例えば1600℃前後に加熱される。また、真空VB炉2内の下部は副ヒータ2ABによって加熱される。この真空VB炉2のシャフト2B内には、後述するウォータジャケット1Gに連通する冷却水通路2D、2Eが形成されている。 The inside of the vacuum VB furnace 2 is depressurized to 10 −4 Pa or less by the vacuum pump 2C, and the upper part in the vacuum VB furnace 2 is heated to, for example, about 1600 ° C. by the main heater 2AA. The lower part in the vacuum VB furnace 2 is heated by the auxiliary heater 2AB. In the shaft 2B of the vacuum VB furnace 2, cooling water passages 2D and 2E communicating with a water jacket 1G described later are formed.

ここで、図2に示すように、本実施形態のルツボ1は、ルツボ本体1Aと、ルツボ本体1Aの開口部を覆う蓋部材1Bとを備えて構成されている。ルツボ本体1Aは、耐熱性があり、かつ、内面の平滑度を高め、フッ化カルシウムの原料Mとの濡れ性を低くできる材料、すなわち高純度カーボン材を素材として構成されている。また、蓋部材1Bも、耐熱性のある高純度カーボン材で構成されている。   Here, as shown in FIG. 2, the crucible 1 of the present embodiment includes a crucible body 1A and a lid member 1B that covers an opening of the crucible body 1A. The crucible body 1A is made of a heat-resistant material that can increase the smoothness of the inner surface and reduce the wettability with the calcium fluoride raw material M, that is, a high-purity carbon material. The lid member 1B is also made of a heat-resistant high-purity carbon material.

ルツボ本体1Aには、フッ化カルシウムの原料M(図1参照)が収容される大径の原料収容部1Dが形成されている。また、ルツボ本体1Aの中心部から底部付近にわたって、例えば円柱状の種結晶S(図1参照)を収容する小径の種結晶収容部1Eがストレートな円形孔として形成されている。そして、原料主要部1Dと種結晶収容部1Eとの間には、原料収容部1Dの底を構成するコーン面1Fが形成されている。また、原料主要部1Dと種結晶収容部1Eとの境界面は、種結晶収容部1Eに挿入された種結晶Sの上端面とし、種結晶Sの長さによって決まるものとする。   The crucible body 1A is formed with a large-diameter raw material container 1D in which a calcium fluoride raw material M (see FIG. 1) is accommodated. Further, a small-diameter seed crystal accommodating portion 1E that accommodates, for example, a cylindrical seed crystal S (see FIG. 1) is formed as a straight circular hole from the center of the crucible body 1A to the vicinity of the bottom. A cone surface 1F that forms the bottom of the raw material container 1D is formed between the raw material main part 1D and the seed crystal container 1E. Further, the boundary surface between the raw material main portion 1D and the seed crystal accommodating portion 1E is the upper end surface of the seed crystal S inserted into the seed crystal accommodating portion 1E, and is determined by the length of the seed crystal S.

ルツボ本体1Aの底部には、種結晶収容部1Eに収容された種結晶S(図1参照)の下部を強制冷却して溶融を防止するため、種結晶収容部1Eの下部周辺にウォータジャケット1Gが形成されている。このウォータジャケット1Gは、シャフト2B内の冷却水通路2D、2E(図1参照)に連通して冷却水の循環路を構成している。   At the bottom of the crucible main body 1A, a water jacket 1G is formed around the lower portion of the seed crystal housing portion 1E to forcibly cool the lower portion of the seed crystal S (see FIG. 1) housed in the seed crystal housing portion 1E to prevent melting. Is formed. The water jacket 1G communicates with the cooling water passages 2D and 2E (see FIG. 1) in the shaft 2B to form a cooling water circulation passage.

ここで、原料収容部1Dの壁面1Hとコーン面1Fとの境界部分には凹曲面1Jが形成され、この凹曲面1Jを介して原料収容部1Dの壁面1Hとコーン面1Fとが滑らかに連続している。また、コーン面1Fと種結晶収容部1Eの壁面1Kとの間には凸曲面1Lが形成され、この凸曲面1Lを介してコーン面1Fと種結晶収容部1Eの壁面1Kとが滑らかに連続している。   Here, a concave curved surface 1J is formed at the boundary between the wall surface 1H of the raw material storage portion 1D and the cone surface 1F, and the wall surface 1H of the raw material storage portion 1D and the cone surface 1F are smoothly continuous via the concave curved surface 1J. is doing. Further, a convex curved surface 1L is formed between the cone surface 1F and the wall surface 1K of the seed crystal housing portion 1E, and the cone surface 1F and the wall surface 1K of the seed crystal housing portion 1E are smoothly connected via the convex curved surface 1L. is doing.

原料収容部1Dの壁面1Hはストレートに形成されており、その壁面1H間の内径は、例えば250mmに設定されている。また、種結晶収容部1Eの内径は例えば20mmに設定されている。   The wall surface 1H of the raw material container 1D is formed straight, and the inner diameter between the wall surfaces 1H is set to 250 mm, for example. Further, the inner diameter of the seed crystal accommodating portion 1E is set to 20 mm, for example.

ここで、本実施形態のルツボ1においては、種結晶収容部の内部温度を測定する温度検出手段として、種結晶収容部1Eの側面の近傍位置に、熱電対1CAと熱電対1CBとが垂直方向に互いに隔離して配置されている。この場合、ルツボ本体1Aの素材である高純度カーボン材は多孔質構造を有しているため加工しやすく、ルツボ内の温度に影響を与えない程度の熱電対挿入用の穴を好適に開けることができる。そして、高純度カーボン材は、熱電対に通常用いられる金属と反応を有さないため、熱電対をルツボ1内に好適に設置することができる。   Here, in the crucible 1 of the present embodiment, the thermocouple 1CA and the thermocouple 1CB are vertically positioned in the vicinity of the side surface of the seed crystal housing portion 1E as temperature detecting means for measuring the internal temperature of the seed crystal housing portion. Are separated from each other. In this case, the high-purity carbon material, which is the material of the crucible body 1A, has a porous structure, so that it can be easily processed, and a hole for inserting a thermocouple that does not affect the temperature in the crucible is suitably formed. Can do. And since a high purity carbon material does not react with the metal normally used for a thermocouple, a thermocouple can be installed in the crucible 1 suitably.

このとき、熱電対1CA,1CBとしては白金ロジウム合金を用いた熱電対であることが好ましい。このような熱電対は高温での精密測定に適しており、好適に種結晶収容部の内部温度を測定することができるからである。白金ロジウムを用いた熱電対としては、例えばJIS- B型(+脚:ロジウム30%を含む白金ロジウム合金、−脚:ロジウム6%を含む白金ロジウム合金)が挙げられる。   At this time, the thermocouples 1CA and 1CB are preferably thermocouples using a platinum rhodium alloy. This is because such a thermocouple is suitable for high-precision measurement at a high temperature and can suitably measure the internal temperature of the seed crystal accommodating portion. Examples of the thermocouple using platinum rhodium include JIS-B type (+ leg: platinum rhodium alloy containing 30% rhodium,-leg: platinum rhodium alloy containing 6% rhodium).

このような2つの熱電対によって、熱電対1CA及び熱電対1CBの設置された位置と、熱電対1CA及び熱電対1CBから測定された温度とを基に、種結晶収容部1Eの温度勾配を導き出すことができ、種結晶Sの融点を示す位置を割り出すことによって、種結晶収容部1Eの種結晶Sの溶融部分と未溶融部分との境界位置を容易に定めることができる。   With such two thermocouples, the temperature gradient of the seed crystal accommodating portion 1E is derived based on the positions where the thermocouples 1CA and 1CB are installed and the temperatures measured from the thermocouples 1CA and 1CB. By determining the position indicating the melting point of the seed crystal S, the boundary position between the molten portion and the unmelted portion of the seed crystal S in the seed crystal housing portion 1E can be easily determined.

さらに、熱伝対1CAは,結晶収容部の深さの25〜50%に相当する高さだけ種結晶収容部1Eの底端の高さ位置から上方の位置に配置され、熱電対1CBが、種結晶収容部1Eの深さの60〜80%に相当する高さだけ種結晶収容部1Eの底端の高さ位置から上方の位置に配置されていることが好ましい。この場合、熱伝対1CA及び熱電対1CBによって温度測定される種結晶収容部1Eの2箇所に挟まれた範囲内まで種結晶が溶融されると、その後の単結晶の育成が好適に行われる。そしてこのような状態にあるかどうかは、種結晶収容部1Eの温度勾配を導き出さなくとも、熱伝対1CA及び熱電対1CBから計測される温度の間に種結晶Sの融点が存在するかどうかだけで容易に判断できる。   Furthermore, the thermocouple 1CA is arranged at a position higher than the height of the bottom end of the seed crystal accommodating portion 1E by a height corresponding to 25 to 50% of the depth of the crystal accommodating portion, and the thermocouple 1CB is It is preferable that the height corresponding to 60 to 80% of the depth of the seed crystal accommodating part 1E is arranged at a position above the height of the bottom end of the seed crystal accommodating part 1E. In this case, when the seed crystal is melted within a range sandwiched between the two locations of the seed crystal accommodating portion 1E, the temperature of which is measured by the thermocouple 1CA and the thermocouple 1CB, the subsequent growth of the single crystal is suitably performed. . Whether or not such a state exists is whether or not the melting point of the seed crystal S exists between the temperatures measured from the thermocouple 1CA and the thermocouple 1CB without deriving the temperature gradient of the seed crystal container 1E. It can be easily judged by just

次に、上記ルツボ1を用いたフッ化カルシウム単結晶の育成方法について説明する。   Next, a method for growing a calcium fluoride single crystal using the crucible 1 will be described.

まずルツボ1を用意し、蓋部材1Bを取り外して、ルツボ1の種結晶収容部1Eにフッ化カルシウムからなる種結晶Sを収容する。その後、フッ化カルシウムの原料Mを原料収容部1Dに収容し、蓋部材1Bでルツボ本体1Aの原料収容部1Dを閉じる。このとき、ルツボ1はシャフト2Bにより下降された状態にある。   First, the crucible 1 is prepared, the lid member 1B is removed, and the seed crystal S made of calcium fluoride is accommodated in the seed crystal accommodating portion 1E of the crucible 1. Thereafter, the raw material M of calcium fluoride is housed in the raw material container 1D, and the raw material container 1D of the crucible body 1A is closed with the lid member 1B. At this time, the crucible 1 is lowered by the shaft 2B.

次に、真空VB炉2内を10−4Pa以下に減圧し、主ヒータ2AAを1600℃前後に加熱する。そして、シャフト2Bにより10mm/h程度の微速度でルツボ1を上昇させ、10時間ほど上昇位置に保持する。 Next, the inside of the vacuum VB furnace 2 is depressurized to 10 −4 Pa or less, and the main heater 2AA is heated to around 1600 ° C. Then, the crucible 1 is raised at a slow speed of about 10 mm / h by the shaft 2B and held at the raised position for about 10 hours.

このとき、熱電対1CA及び熱電対1CBによって種結晶収容部1Eの内部温度を計測し、この内部温度に基づいて、種結晶Sの溶融部分と未溶融部分との境界位置が種結晶収容部1Eの底端から所定の高さの範囲内にあると判断された場合に、ルツボ1の加熱を終了する。この所定の高さの範囲というのは、種結晶収容部1Eの深さの25%に相当する高さだけ種結晶収容部1Eの底端から上方の第1位置と、種結晶収容部1Eの深さの80%に相当する高さだけ種結晶収容部1Eの底端から上方の第2位置とに挟まれた範囲であることが好ましい。さらに、第1位置が種結晶収容部1Eの深さの40%に相当する高さだけ種結晶収容部1Eの底端から上方にあり、第2位置が種結晶収容部1Eの深さの70%に相当する高さだけ種結晶収容部1Eの底端から上方にあることがより好ましく、第1位置が種結晶収容部1Eの深さの50%に相当する高さだけ種結晶収容部1Eの底端から上方にあり、第2位置が種結晶収容部1Eの深さの60%に相当する高さだけ種結晶収容部1Eの底端から上方にあることが特に好ましい。これによって、未溶融部分の種結晶の結晶面に沿ってフッ化カルシウムの単結晶が好適に育成される状態となるからである。   At this time, the internal temperature of the seed crystal accommodating portion 1E is measured by the thermocouple 1CA and the thermocouple 1CB, and based on this internal temperature, the boundary position between the molten portion and the unmelted portion of the seed crystal S is the seed crystal accommodating portion 1E. When it is determined that it is within a predetermined height range from the bottom end of the crucible, the heating of the crucible 1 is terminated. The range of the predetermined height refers to the first position above the bottom end of the seed crystal accommodating part 1E by a height corresponding to 25% of the depth of the seed crystal accommodating part 1E, and the seed crystal accommodating part 1E. It is preferable that the height is equivalent to 80% of the depth and the range is sandwiched between the bottom end of the seed crystal accommodating portion 1E and the second position above. Further, the first position is above the bottom end of the seed crystal accommodating part 1E by a height corresponding to 40% of the depth of the seed crystal accommodating part 1E, and the second position is 70 of the depth of the seed crystal accommodating part 1E. It is more preferable that the height corresponding to% is above the bottom end of the seed crystal accommodating portion 1E, and the first position is the height corresponding to 50% of the depth of the seed crystal accommodating portion 1E. It is particularly preferable that the second position is above the bottom end of the seed crystal accommodating portion 1E by a height corresponding to 60% of the depth of the seed crystal accommodating portion 1E. This is because a single crystal of calcium fluoride is suitably grown along the crystal plane of the seed crystal of the unmelted portion.

ルツボ1の加熱を終了した後、続いて、ルツボ1をシャフト2Bにより1.0mm/h程度の極微速度で下降させ、5時間ほど真空VB炉2内の下降位置に保持する。これにより、溶融したフッ化カルシウムの原料Mが冷却して、種結晶Sの例えば(111)方位の結晶面に沿って単結晶に育成し、目的のフッ化カルシウム単結晶が得られる。   After the heating of the crucible 1 is finished, the crucible 1 is subsequently lowered at a very low speed of about 1.0 mm / h by the shaft 2B and held at the lowered position in the vacuum VB furnace 2 for about 5 hours. As a result, the molten calcium fluoride raw material M is cooled and grown into a single crystal along, for example, the (111) -oriented crystal surface of the seed crystal S, and the desired calcium fluoride single crystal is obtained.

以上、本発明の好適な実施形態について詳細に説明したが、本発明は上記実施形態に限定されないことは言うまでもない。また、ルツボ1はフッ化カルシウム単結晶の育成のみに限らず、他の単結晶の育成にも利用することができる。   As mentioned above, although preferred embodiment of this invention was described in detail, it cannot be overemphasized that this invention is not limited to the said embodiment. The crucible 1 can be used not only for growing calcium fluoride single crystals but also for growing other single crystals.

例えば、本実施形態ではルツボ1がシャフト2Bを介して極微速度で上昇されることにより、フッ化カルシウムの原料Mを溶融しているが、あらかじめルツボ1がシャフト2Bで上昇された状態で、主ヒータ2AAを制御してルツボ1を加熱した場合も、本実施形態と同様の作用を得ることができる。   For example, in this embodiment, the raw material M of calcium fluoride is melted by raising the crucible 1 at a very low speed via the shaft 2B, but in the state where the crucible 1 is raised by the shaft 2B in advance, Even when the crucible 1 is heated by controlling the heater 2AA, the same action as in the present embodiment can be obtained.

また、原料収容部1Dの側面の近傍位置にさらに熱電対を配置していれば、原料収容部1D内の内部温度を計測することができ、例えば主ヒータ2AA及び副ヒータ2ABの温度調節を行い易くできる。また、ウォータジャケット1Gに温度計を配置していれば、冷却水の温度調節を容易に行うことができ、種結晶Sの下部を冷却する温度をより一定に保つことができる。   Further, if a thermocouple is further arranged in the vicinity of the side surface of the raw material container 1D, the internal temperature in the raw material container 1D can be measured. For example, the temperature of the main heater 2AA and the sub heater 2AB is adjusted. Easy to do. Moreover, if the thermometer is arrange | positioned to the water jacket 1G, the temperature control of a cooling water can be performed easily and the temperature which cools the lower part of the seed crystal S can be kept more constant.

また、原料収容部1Dと種結晶収容部1Eとの境界面が凸曲面1Lよりも下部にある場合、凸曲面1Lと種結晶収容部1Eの壁面1Kとに挟まれた面の近傍位置と、種結晶収容部1Eの壁面1Kの近傍位置にそれぞれ熱電対を配置しても、種結晶収容部1Eの温度勾配を導き出すことができる。   Further, when the boundary surface between the raw material storage portion 1D and the seed crystal storage portion 1E is below the convex curved surface 1L, a position near the surface sandwiched between the convex curved surface 1L and the wall surface 1K of the seed crystal storage portion 1E; Even if a thermocouple is disposed in the vicinity of the wall surface 1K of the seed crystal housing part 1E, the temperature gradient of the seed crystal housing part 1E can be derived.

また、本実施形態ではルツボ1内に熱電対を2つ配置したが、種結晶収容部1Eの深さの25%に相当する高さだけ種結晶収容部1Eの底端から上方の第1位置と、種結晶収容部1Eの深さの80%に相当する高さだけ種結晶収容部1Eの底端から上方の第2位置とに挟まれた範囲内の種結晶収容部1Eの側面の近傍位置に熱電対を1つだけ配置してもよい。この場合、熱電対の温度が種結晶Sの融点に達すると、種結晶収容部1Eの種結晶Sの溶融部分と未溶融部分との境界位置が熱電対の温度計測位置に達したことになるので、このときにルツボ1の加熱を終了すると、未溶融部分の種結晶の結晶面に沿ってフッ化カルシウムの単結晶が好適に育成される。なお、第1位置及び第2位置のより好ましい位置、特に好ましい位置は本実施形態と同様である。   In the present embodiment, two thermocouples are arranged in the crucible 1, but the first position above the bottom end of the seed crystal accommodating part 1E by a height corresponding to 25% of the depth of the seed crystal accommodating part 1E. And the vicinity of the side surface of the seed crystal accommodating portion 1E within a range sandwiched between the bottom end of the seed crystal accommodating portion 1E and the second position above the height corresponding to 80% of the depth of the seed crystal accommodating portion 1E Only one thermocouple may be arranged at the position. In this case, when the temperature of the thermocouple reaches the melting point of the seed crystal S, the boundary position between the melted portion and the unmelted portion of the seed crystal S in the seed crystal housing portion 1E has reached the temperature measurement position of the thermocouple. Therefore, when heating of the crucible 1 is completed at this time, a single crystal of calcium fluoride is preferably grown along the crystal face of the seed crystal in the unmelted portion. In addition, the more preferable position of the 1st position and the 2nd position, The especially preferable position is the same as that of this embodiment.

以下本発明の実施例を説明する。本発明はこれらの実施例に限定されるものではない。   Examples of the present invention will be described below. The present invention is not limited to these examples.

(実施例1)
ルツボとして、高純度カーボン製で外径φ175mm×高さ325mm(うち単結晶収容部の内径φ10mm×高さ100mm)で、単結晶収容部の底端から50mm上方、単結晶収容部の底端から95mm上方、及び、原料収容部付近の3箇所にそれぞれ径φ3.5mm×長さ80mmの熱電対(JIS- B型)を取り付けたものを用意した。
Example 1
The crucible is made of high-purity carbon and has an outer diameter of 175 mm × height of 325 mm (including an inner diameter of φ10 mm × height of 100 mm), 50 mm above the bottom of the single crystal container, and from the bottom of the single crystal container A sample was prepared by attaching thermocouples (JIS-B type) each having a diameter of 3.5 mm and a length of 80 mm at three locations 95 mm above and near the raw material container.

ルツボ内部が空の状態で、真空VB炉内を10−4Pa以下に減圧し、主ヒータ及び副ヒータでルツボを加熱したときのルツボの位置と熱電対の温度との関係を図3に示す。ルツボの位置12は最初、図1の位置にあり、時間とともにルツボを下降させた。主ヒータの温度10は1500℃に維持し、副ヒータの温度11は950℃付近まで上昇させて、その後温度調節を行った。この場合、単結晶収容部の底端から50mm上方にある熱電対の温度13、単結晶収容部の底端から95mm上方にある熱電対の温度14、及び、原料収容部付近にある熱電対の温度15の、すなわちルツボの3箇所の温度は、主ヒータの温度10、副ヒータの温度11、及び、ルツボの位置12と相関関係を持つことが分かる。 FIG. 3 shows the relationship between the position of the crucible and the temperature of the thermocouple when the inside of the vacuum VB furnace is depressurized to 10 −4 Pa or less and the crucible is heated by the main heater and the sub heater while the crucible is empty. . The crucible position 12 was initially in the position of FIG. 1 and the crucible was lowered over time. The temperature 10 of the main heater was maintained at 1500 ° C., the temperature 11 of the sub heater was raised to around 950 ° C., and then the temperature was adjusted. In this case, the temperature 13 of the thermocouple 50 mm above the bottom end of the single crystal housing portion, the temperature 14 of the thermocouple 95 mm above the bottom end of the single crystal housing portion, and the temperature of the thermocouple near the raw material housing portion It can be seen that the temperature 15, that is, three temperatures of the crucible, have a correlation with the temperature 10 of the main heater, the temperature 11 of the auxiliary heater, and the position 12 of the crucible.

さて、上記のルツボに、種結晶として高純度フッ化カルシウム単結晶(日立化成工業(株)製、直径φ10mm×長さ100mm、長さ方向の結晶方位(111))を種結晶収容部に収容し、さらにフッ化カルシウムの原料として高純度フッ化カルシウム粉末(ステラケミファ(株)製)を原料収容部内に収容した。また、フッ化カルシウムの原料には添加剤として、高純度フッ化亜鉛粉末(ステラケミファ(株)製)を混合させた。このとき、ルツボの位置は最も降下された状態にした。   Now, a high-purity calcium fluoride single crystal (manufactured by Hitachi Chemical Co., Ltd., diameter φ10 mm × length 100 mm, lengthwise crystal orientation (111)) is accommodated in the above-mentioned crucible as a seed crystal in the seed crystal accommodating portion. Furthermore, high-purity calcium fluoride powder (manufactured by Stella Chemifa Co., Ltd.) was accommodated in the raw material container as a raw material for calcium fluoride. Moreover, high purity zinc fluoride powder (manufactured by Stella Chemifa Co., Ltd.) was mixed as an additive to the raw material of calcium fluoride. At this time, the position of the crucible was set to the lowest position.

その後、真空VB炉内を10−4Pa以下に減圧し、主ヒータを1500℃前後まで加熱して、ルツボの位置を10mm/hの速度で上昇させ、上昇位置に10時間程度保持した。このとき、熱電対で各部位の温度を計測して、種結晶収容部に収容された種結晶の溶融部分と未溶融部分との境界位置が、種結晶収容部の底端から50mm上方の位置にきたときに主ヒータの加熱を停止し、ルツボの位置を0.7mm/h以下の速度で下降させて、真空VB炉内の下降位置に5時間保持した。その後、真空VB炉内を50〜100℃/hの速度で冷却した。ルツボ内の温度が50℃以下になったら、真空VB炉内に窒素を大気圧になるまで入れ、ルツボ内の結晶を取り出した。 Thereafter, the inside of the vacuum VB furnace was depressurized to 10 −4 Pa or less, the main heater was heated to around 1500 ° C., the position of the crucible was raised at a speed of 10 mm / h, and held at the raised position for about 10 hours. At this time, the temperature of each part is measured with a thermocouple, and the boundary position between the molten portion and the unmelted portion of the seed crystal accommodated in the seed crystal accommodating portion is a position 50 mm above the bottom end of the seed crystal accommodating portion. The main heater was stopped when it came, and the crucible position was lowered at a speed of 0.7 mm / h or less and held at the lowered position in the vacuum VB furnace for 5 hours. Thereafter, the inside of the vacuum VB furnace was cooled at a rate of 50 to 100 ° C./h. When the temperature in the crucible became 50 ° C. or lower, nitrogen was placed in a vacuum VB furnace until atmospheric pressure was reached, and the crystals in the crucible were taken out.

(実施例2〜6)
主ヒータ及び副ヒータの加熱を停止したときの、種結晶収容部に収容された種結晶の溶融部分と未溶融部分との境界位置を、種結晶収容部の底端から80mm上方の位置とする以外は実施例1と同様にして、実施例2のフッ化カルシウムの結晶を得た。また、主ヒータ及び副ヒータの加熱を停止したときの、種結晶収容部に収容された種結晶の溶融部分と未溶融部分との境界位置を、種結晶収容部の底端から70mm上方の位置とする以外は実施例1と同様にして、実施例3のフッ化カルシウムの結晶を得た。また、主ヒータ及び副ヒータの加熱を停止したときの、種結晶収容部に収容された種結晶の溶融部分と未溶融部分との境界位置を、種結晶収容部の底端から60mm上方の位置とする以外は実施例1と同様にして、実施例4のフッ化カルシウムの結晶を得た。また、主ヒータ及び副ヒータの加熱を停止したときの、種結晶収容部に収容された種結晶の溶融部分と未溶融部分との境界位置を、種結晶収容部の底端から40mm上方の位置とする以外は実施例1と同様にして、実施例5のフッ化カルシウムの結晶を得た。また、主ヒータ及び副ヒータの加熱を停止したときの、種結晶収容部に収容された種結晶の溶融部分と未溶融部分との境界位置を、種結晶収容部の底端から25mm上方の位置とする以外は実施例1と同様にして、実施例6のフッ化カルシウムの結晶を得た。
(Examples 2 to 6)
When the heating of the main heater and the sub heater is stopped, the boundary position between the molten portion and the unmelted portion of the seed crystal accommodated in the seed crystal accommodating portion is set to a position 80 mm above the bottom end of the seed crystal accommodating portion. Except for the above, a calcium fluoride crystal of Example 2 was obtained in the same manner as Example 1. Further, when the heating of the main heater and the sub heater is stopped, the boundary position between the molten portion and the unmelted portion of the seed crystal accommodated in the seed crystal accommodating portion is a position 70 mm above the bottom end of the seed crystal accommodating portion. Except that, calcium fluoride crystals of Example 3 were obtained in the same manner as Example 1. In addition, when the heating of the main heater and the sub heater is stopped, the boundary position between the melted portion and the unmelted portion of the seed crystal accommodated in the seed crystal accommodating portion is a position 60 mm above the bottom end of the seed crystal accommodating portion. Except that, calcium fluoride crystals of Example 4 were obtained in the same manner as Example 1. In addition, when the heating of the main heater and the sub heater is stopped, the boundary position between the molten portion and the unmelted portion of the seed crystal accommodated in the seed crystal accommodating portion is a position 40 mm above the bottom end of the seed crystal accommodating portion. Except that, calcium fluoride crystals of Example 5 were obtained in the same manner as Example 1. In addition, when the heating of the main heater and the sub heater is stopped, the boundary position between the molten portion and the unmelted portion of the seed crystal accommodated in the seed crystal accommodating portion is a position 25 mm above the bottom end of the seed crystal accommodating portion. Except that, calcium fluoride crystals of Example 6 were obtained in the same manner as Example 1.

(比較例1,2)
主ヒータ及び副ヒータの加熱を停止したときの、種結晶収容部に収容された種結晶の溶融部分と未溶融部分との境界位置を、種結晶収容部の底端から85mm上方の位置とする以外は実施例1と同様にして、比較例1のフッ化カルシウムの結晶を得た。また、主ヒータ及び副ヒータの加熱を停止したときの、種結晶収容部に収容された種結晶の溶融部分と未溶融部分との境界位置を、種結晶収容部の底端から20mm上方の位置とする以外は実施例1と同様にして、比較例2のフッ化カルシウムの結晶を得た。
(Comparative Examples 1 and 2)
When the heating of the main heater and the sub heater is stopped, the boundary position between the molten portion and the unmelted portion of the seed crystal accommodated in the seed crystal accommodating portion is set to a position 85 mm above the bottom end of the seed crystal accommodating portion. Except for the above, a calcium fluoride crystal of Comparative Example 1 was obtained in the same manner as Example 1. Further, when the heating of the main heater and the sub heater is stopped, the boundary position between the molten portion and the unmelted portion of the seed crystal accommodated in the seed crystal accommodating portion is a position 20 mm above the bottom end of the seed crystal accommodating portion. Except that, calcium fluoride crystals of Comparative Example 2 were obtained in the same manner as Example 1.

実施例1〜6、比較例1,2のフッ化カルシウムの結晶において、各々その結晶を90°ずらした2枚の偏向フィルムで挟み、照明機で照明した場合の光の透過状態を目視で観察し、光の透過が見られないものを単結晶、透過部分があるものを多結晶と判断し、さらに切断機で円盤状(φ150mm×厚さ100mm)に加工し、鏡面研磨機で研磨した後、同様にして単結晶か多結晶かを再確認した。その後、X線−ラウエ法で結晶方位を確認した。各方法の判定は、得られた結晶が多結晶である場合を不良とし、単結晶部分、すなわち種結晶と同じ結晶方位(111)である部分の体積が50体積%未満である場合も不良とし、試験数(10個)に対する不良個数を評価した。実施例1〜6、比較例1,2の実施条件とその結果を図4にまとめて示した。   In each of the calcium fluoride crystals of Examples 1 to 6 and Comparative Examples 1 and 2, the crystals were sandwiched between two deflection films shifted by 90 °, and the light transmission state was observed visually when illuminated with an illuminator. After that, it is judged that single light is not seen through light transmission, and polycrystal is one with a transmission part, and is further processed into a disk shape (φ150mm x thickness 100mm) with a cutting machine and polished with a mirror polisher In the same manner, it was reconfirmed whether it was single crystal or polycrystal. Thereafter, the crystal orientation was confirmed by the X-ray-Laue method. Each method is judged as defective when the obtained crystal is polycrystalline, and when the volume of the single crystal portion, that is, the portion having the same crystal orientation (111) as the seed crystal is less than 50% by volume. The number of defects relative to the number of tests (10) was evaluated. The implementation conditions and results of Examples 1 to 6 and Comparative Examples 1 and 2 are collectively shown in FIG.

図4より明らかなように、実施例1及び実施例4がフッ化カルシウム単結晶の歩留りが特に良好であり、実施例3及び実施例5がフッ化カルシウム単結晶の歩留りが次に良好であり、実施例2及び実施例6がフッ化カルシウム単結晶の歩留りがその次に良好であることがわかった。また、比較例1及び比較例2においては、フッ化カルシウムの結晶状態が多結晶となってしまい、単結晶を得ることができなかった。   As is clear from FIG. 4, Examples 1 and 4 have particularly good yields of calcium fluoride single crystals, and Examples 3 and 5 have the next best yields of calcium fluoride single crystals. In Examples 2 and 6, it was found that the yield of the calcium fluoride single crystal was the next best. Moreover, in Comparative Example 1 and Comparative Example 2, the crystal state of calcium fluoride became polycrystalline, and a single crystal could not be obtained.

本発明の実施形態に係るルツボを備えた真空VB炉の概略構造を示す模式図である。It is a mimetic diagram showing a schematic structure of a vacuum VB furnace provided with a crucible concerning an embodiment of the present invention. 図1に示した一実施形態に係るルツボの構造を示す断面図である。It is sectional drawing which shows the structure of the crucible which concerns on one Embodiment shown in FIG. 本発明の実施例に係るルツボを備えた真空VB炉における、ルツボの位置とヒータの温度と熱電対の温度との関係図である。FIG. 3 is a relationship diagram of a crucible position, a heater temperature, and a thermocouple temperature in a vacuum VB furnace equipped with a crucible according to an embodiment of the present invention. 本発明の実施例1〜6、比較例1,2に係る結晶状態、歩留りの試験結果である。It is a test result of the crystal state and yield concerning Examples 1-6 of the present invention and comparative examples 1 and 2.

符号の説明Explanation of symbols

1…ルツボ、1A…ルツボ本体、1CA,1CB…熱電対(温度検出手段)、1D…原料収容部、1E…種結晶収容部、1K…種結晶収容部の壁面、2…真空VB炉(結晶成長装置の炉)、100…結晶成長装置、M…フッ化カルシウムの単結晶の原料、S…フッ化カルシウムの種結晶。   DESCRIPTION OF SYMBOLS 1 ... Crucible, 1A ... Crucible body, 1CA, 1CB ... Thermocouple (temperature detection means), 1D ... Raw material container, 1E ... Seed crystal container, 1K ... Wall surface of seed crystal container, 2 ... Vacuum VB furnace (crystal (Reactor of growth apparatus), 100 ... crystal growth apparatus, M ... raw material of single crystal of calcium fluoride, S ... seed crystal of calcium fluoride.

Claims (4)

単結晶を育成するためのルツボにおいて、
種結晶を収容する垂直方向に延びる有底の種結晶収容部と、
単結晶の原料を収容する原料収容部であって、前記種結晶収容部の上方に配置され、前記種結晶収容部と連通する前記原料収容部と、
前記種結晶収容部の内部温度を検出するための温度検出手段と
を備え、
前記温度検出手段が熱電対であり、前記熱電対が前記種結晶収容部の壁面の近傍位置に配置されており、
前記熱電対が複数個あり、
前記種結晶収容部の温度勾配を導き出して、前記種結晶収容部に収容された種結晶の溶融部分と未溶融部分との境界位置を割り出すべく、複数個の前記熱電対が垂直方向に互いに隔離して配置されていることを特徴とする、ルツボ。
In a crucible for growing single crystals,
A bottomed seed crystal accommodating portion extending in the vertical direction for accommodating the seed crystal;
A raw material storage unit for storing a single crystal raw material, the raw material storage unit disposed above the seed crystal storage unit and communicating with the seed crystal storage unit;
Temperature detecting means for detecting the internal temperature of the seed crystal storage unit,
The temperature detecting means is a thermocouple, and the thermocouple is disposed in the vicinity of the wall surface of the seed crystal accommodating portion;
A plurality of the thermocouples;
A plurality of the thermocouples are vertically separated from each other in order to derive a temperature gradient of the seed crystal accommodating part and to determine a boundary position between the molten part and the unmelted part of the seed crystal accommodated in the seed crystal accommodating part. A crucible characterized by being arranged in the form of
2個の前記熱電対のうち一方が、前記種結晶収容部の深さの25〜50%に相当する高さだけ前記種結晶収容部の底端の高さ位置から上方の位置に配置され、他方が、前記種結晶収容部の深さの60〜80%に相当する高さだけ前記種結晶収容部の底端の高さ位置から上方の位置に配置されていることを特徴とする請求項1に記載のルツボ。 One of the two thermocouples is arranged at an upper position from the height position of the bottom end of the seed crystal accommodating part by a height corresponding to 25 to 50% of the depth of the seed crystal accommodating part, claim the other, characterized in that disposed above the position from the height position of the bottom end of the seed by a height equivalent to 60-80% of the depth of the crystal housing part the seed crystal accommodation section The crucible according to 1 . 請求項1又は2に記載のルツボを用意するステップと、
前記種結晶収容部にフッ化カルシウムの種結晶を収容するステップと、
前記原料収容部に前記フッ化カルシウムの単結晶の原料を収容するステップと、
前記ルツボを、内部が垂直方向に所定の温度勾配をもって加熱される結晶成長装置の炉内に配置し、該ルツボを加熱して前記原料収容部に収容された原料及び前記種結晶収容部に収容された種結晶を、上方から下方へと漸次溶融するステップと、
前記ルツボの加熱中に、複数個の前記熱電対により前記種結晶収容部の内部温度を検出するステップと、
前記熱電対により検出された前記種結晶収容部の内部温度に基づき、前記種結晶収容部の温度勾配を導き出して、前記種結晶収容部に収容された種結晶の溶融部分と未溶融部分との境界位置が前記種結晶収容部の底端から所定の高さだけ上方の第1位置と、前記第1位置から所定の高さだけ上方の第2位置との間にあると判断された場合に、加熱を終了し、冷却を開始して単結晶を育成するステップと
を含むことを特徴とするフッ化カルシウム単結晶の育成方法。
Preparing a crucible according to claim 1 or 2 ,
Storing a seed crystal of calcium fluoride in the seed crystal storage unit;
Containing the calcium fluoride single crystal raw material in the raw material containing portion;
The crucible is disposed in a furnace of a crystal growth apparatus in which the inside is heated in a vertical direction with a predetermined temperature gradient, and the crucible is heated and accommodated in the raw material and seed crystal accommodating portion accommodated in the raw material accommodating portion. Gradually melting the formed seed crystal from above to below;
Detecting the internal temperature of the seed crystal accommodating portion with a plurality of the thermocouples during heating of the crucible;
Based on the internal temperature of the seed crystal accommodating part detected by the thermocouple, a temperature gradient of the seed crystal accommodating part is derived, and a melting portion and an unmelted part of the seed crystal accommodated in the seed crystal accommodating part are obtained. When it is determined that the boundary position is between a first position that is a predetermined height above the bottom end of the seed crystal container and a second position that is a predetermined height above the first position. And a step of growing the single crystal by terminating heating and starting cooling to grow a single crystal.
前記第1位置が、前記種結晶収容部の深さの25%に相当する高さだけ前記種結晶収容部の底端から上方の位置であり、前記第2位置が、前記種結晶収容部の深さの80%に相当する高さだけ前記種結晶収容部の底端から上方の位置であることを特徴とする請求項3に記載のフッ化カルシウム単結晶の育成方法。
The first position is a position above the bottom end of the seed crystal accommodating part by a height corresponding to 25% of the depth of the seed crystal accommodating part, and the second position is the position of the seed crystal accommodating part. 4. The method for growing a calcium fluoride single crystal according to claim 3 , wherein the height is equivalent to 80% of the depth, and the position is located above the bottom end of the seed crystal housing portion.
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