JP4381667B2 - Board inspection equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a substrate inspection apparatus, and more particularly to alignment of a glass substrate.
[0002]
[Prior art]
In a substrate inspection apparatus such as a liquid crystal substrate inspection apparatus, in order to obtain position information on a glass substrate, it is necessary to align the substrate with a predetermined position of the substrate inspection apparatus.
[0003]
In general, in order to inspect a glass substrate in a substrate inspection apparatus, the glass substrate is placed on a pallet and then moved to a predetermined position for alignment. FIG. 8 is a schematic diagram for explaining a substrate position alignment mechanism in a conventional substrate inspection apparatus. FIG. 8A is a cross-sectional view of the substrate position alignment mechanism, and FIG. 8B is a perspective view of the substrate position alignment mechanism.
[0004]
A substrate 3 such as a glass substrate is disposed on the pallet 4. The alignment on the pallet 4 is performed by the substrate position alignment mechanism 12 provided on the outer side of the pallet 4. The substrate position alignment mechanism 12 includes a plate 12 a that is aligned at a predetermined position with respect to the pallet 4. In order to align the substrate 3 with the predetermined position of the pallet 4, the plate plane 12 b of the plate 12 a is brought into contact with the substrate side surface 3 a of the substrate 3 and pressed by a pressing mechanism (not shown) to bring the substrate 3 into the predetermined position. It is moved. (For example, see Patent Document 1.)
[0005]
[Patent Document 1]
JP-A-5-100198 (FIG. 4, paragraph number 0065 to paragraph number 0067)
[0006]
[Problems to be solved by the invention]
In the conventional substrate inspection apparatus, in the substrate position alignment mechanism, the alignment operation is not smoothly performed, and therefore there is a possibility that accurate alignment is not performed.
[0007]
In the conventional substrate position alignment mechanism, alignment of the substrate is performed by contact between the side surface of the substrate and the pallet surface, and since this contact portion is surface contact, the plate surface and the substrate side surface are rubbed by friction due to the surface, There may be a case where the substrate does not move even when the pallet is pushed. Thus, when the movement of the substrate stops, it becomes difficult to move the substrate to a predetermined alignment position.
[0008]
SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to solve the above-described conventional problems and to ensure that the substrate is moved to the alignment position reliably and smoothly in a substrate inspection apparatus, thereby preventing a positioning error.
[0009]
[Means for Solving the Problems]
The present invention reduces friction by changing the contact with the substrate side surface from the sliding contact to the rolling contact, reduces the galling between the substrate side surface and the contact portion, facilitates the movement of the substrate to the alignment position, and positioning. Prevent errors.
[0010]
The substrate inspection apparatus of the present invention includes a substrate position alignment mechanism for aligning the substrate at a predetermined inspection position as a mechanism for this purpose. The substrate position alignment mechanism includes a contact portion that makes point contact with the side surface of the substrate, and a support pressing portion that rotatably supports the contact portion and presses it in a predetermined direction.
[0011]
The support pressing portion causes the contact portion to contact the substrate side surface, and further presses the substrate side surface in a predetermined direction while maintaining the contact state. By this pressing, the substrate is pressed by the contact portion, and the position with respect to the substrate inspection apparatus changes. At this time, if the positional relationship between the side surface of the substrate and the contact portion changes, a positional shift occurs. When there is friction between the side surface of the substrate and the contact portion, galling occurs.
[0012]
The substrate position alignment mechanism of the present invention rotates and supports the contact portion when the contact portion contacts the side surface of the substrate by rotating and supporting the contact portion. To prevent the occurrence of galling. In this state, when the contact portion is moved to the substrate side surface by the support pressing portion, the contact portion pushes the substrate side surface in a predetermined direction while rotating along the substrate side surface. As a result, the substrate is pushed in a predetermined direction by the substrate position alignment mechanism and aligned with a predetermined inspection position.
[0013]
The support pressing portion of the substrate position alignment mechanism includes a bellows whose inside is a predetermined pressure. One end of the bellows is fixed to the base side of the substrate inspection apparatus, and the other end is fixed to the contact portion side. The bellows presses the contact portion in a predetermined direction by deformation of the bellows caused by the difference between the pressure difference inside and outside the bellows and the restoring force of the bellows.
[0014]
A plurality of substrate position alignment mechanisms are arranged along the outer periphery of a predetermined inspection position of the substrate. In this configuration, when the substrate is arranged within the range surrounded by the substrate position alignment mechanism and the arranged substrate is pressed in each predetermined direction by the substrate position alignment mechanism arranged around, the substrate is pushed from a plurality of directions. . By setting the arrangement position and pressing direction of the substrate position alignment mechanism to a predetermined value, the substrate is aligned with a predetermined substrate inspection position.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a schematic perspective view for explaining a substrate inspection apparatus of the present invention. The substrate inspection apparatus 1 is an apparatus for inspecting a substrate such as a glass substrate 3 for liquid crystal. In the body shown in FIG. 1, the inspection is performed by placing the glass substrate 3 at a predetermined inspection position on the pallet 4 provided in the load lock chamber 5. The load lock chamber 5 is provided for adjusting the inspection conditions of the glass substrate 3 as an inspection object, and inspects the interior of the glass substrate 3 in a vacuum state by an exhaust device (not shown). The glass substrate 3 is brought into a vacuum state by an exhaust device (not shown) after being loaded into the load lock chamber 5 via an opening / closing mechanism (not shown), and a predetermined inspection is performed by, for example, irradiating an electron beam from an electron gun.
[0016]
The substrate inspection apparatus 1 of the present invention includes a substrate position alignment mechanism 2 for aligning the glass substrate 3 with a predetermined inspection position on the pallet 4. The glass substrate 3 to be inspected is loaded into the load lock chamber 5 and then placed on the pallet 4. The glass substrate 3 placed on the pallet 4 does not necessarily have a predetermined inspection position, and needs to be aligned with the predetermined inspection position.
[0017]
The substrate position alignment mechanism 2 moves the glass substrate 3 on the pallet 4 and aligns it with a predetermined inspection position. 1A shows a state in which the glass substrate 3 is carried into the load lock chamber 5, and FIG. 1B shows a state in which the glass substrate 3 is aligned by the substrate position alignment mechanism 2. .
[0018]
FIG. 2 is a sectional view and a perspective view for explaining the substrate position alignment mechanism of the substrate inspection apparatus of the present invention.
[0019]
The substrate position alignment mechanism 2 includes a contact portion 2a that makes point contact with the side surface 3a of the glass substrate 3, and a support pressing portion 2c that rotates and supports the contact portion 2a in a predetermined direction. For example, the contact portion 2a is formed in a cylindrical body so as to make point contact with the side surface 3a of the glass substrate 3, and is rotatable with respect to the support pressing portion 2c by a rotation shaft 2b and a bearing 2d provided coaxially. It is attached. The rotation support is not limited to the bearing, and any rotation support mechanism can be used.
[0020]
The support pressing portion 2c rotatably supports the contact portion 2a via a rotation support mechanism such as a bearing 2d and urges the contact portion 2a in a predetermined direction. The urging of the contact portion 2a presses the glass substrate 3 in contact with the contact portion 2a in a predetermined direction and aligns the glass substrate 3 at a predetermined position. An arbitrary mechanism such as a spring mechanism or a link mechanism can be used as the mechanism for pressing the contact portion 2a in a predetermined direction. In FIG. 2, this pressing mechanism is omitted.
[0021]
Thereby, the substrate position alignment mechanism 2 brings the contact portion 2a into contact with the side surface 3a of the glass substrate 3 placed on the pallet 4 by the pressing operation by the support pressing portion 2c, and further makes the glass substrate 3 in a predetermined direction. Press on.
[0022]
When the contact portion 2 a presses the glass substrate 3, if the pressing direction of the contact portion 2 a is not perpendicular to the direction of the side surface 3 a of the glass substrate 3, the side surface 3 a from the contact portion 2 a to the glass substrate 3. In addition to the force to move in a direction perpendicular to the side, a lateral force parallel to the side surface 3a is generated. This lateral force gives a rotational motion to the glass substrate 3, and aligns the glass substrate 3 with a predetermined inspection position along with the moving motion.
[0023]
On the other hand, the contact portion 2 a receives a reaction from the glass substrate 3. At this time, when the pressing direction of the contact portion 2a and the side surface 3a are not perpendicular to the glass substrate 3, a lateral force perpendicular to the pressing direction is applied to the contact portion 2a. This lateral force becomes a rotational force for rotating the contact portion 2a around the rotation shaft 2b, and rotates the contact portion 2a. Thus, even if a force is generated in the lateral direction at the contact point between the contact portion 2a and the side surface 3a of the glass substrate 3, the force is canceled in the lateral direction by the rotation of the contact portion 2a. The biting between the portion 2a and the side surface 3a of the glass substrate 3 can be prevented.
[0024]
3 and 4 are a plan view and a schematic perspective view showing the arrangement state of the substrate position alignment mechanism 2 and the alignment state of the glass substrate. In FIG. 3, a hatched portion 6 represents an inspection position, and a solid line portion 7 represents an outer shape portion of the glass substrate. 3 and 4 show an example in which five substrate position alignment mechanisms 2A to 2E are arranged.
[0025]
3 and 4, the substrate position alignment mechanisms 2 </ b> A to 2 </ b> E are arranged at the outer peripheral position of the inspection position 6 indicated by oblique lines. The inspection position 6 can be set at a predetermined position on a pallet (not shown).
[0026]
In this arrangement, a predetermined distance is provided between the substrate position alignment mechanisms 2 </ b> A to 2 </ b> E and the inspection position 6. Thereby, when the glass substrate 3 is placed on the pallet, interference with the substrate position alignment mechanisms 2A to 2E can be prevented. The distance between the substrate position alignment mechanisms 2A to 2E and the inspection position 6 is determined, for example, by the amount of deviation between the glass substrate immediately after being transferred onto the pallet by the rotor and the predetermined alignment position. In addition, when the movement distance by the press part of board | substrate position alignment mechanism 2A-2E is small, and sufficient distance margin is not obtained in order to prevent interference at the time of mounting of the glass substrate 3, board | substrate position alignment mechanism 2A- 2E is installed on a predetermined moving means such as a link mechanism, and after placing the glass substrate on the pallet, the substrate position alignment mechanisms 2A to 2E are brought close to the glass substrate 3, and then the substrate position alignment mechanisms 2A to 2E are used. You may make it the structure which aligns.
[0027]
FIG. 3A shows a state where the glass substrate is placed on the pallet, and the outer shape 7 of the glass substrate shows a state where the glass substrate is displaced from the inspection position 6. FIG. 3B and FIG. 4A show a state in which the contact portion is brought into contact with the side surface of the substrate by the support pressing portions provided in the substrate position alignment mechanisms 2A to 2E. In addition, the arrow in a figure has shown the pressing direction. By bringing the contact portion into contact with the side surface of the substrate, the glass substrate is subjected to movement and rotation and is aligned toward the inspection position 6.
[0028]
FIG. 3C and FIG. 4B show a state where the glass substrate is aligned with the inspection position 6. In the inspection position 6, the force applied to the glass substrate from each of the substrate position alignment mechanisms 2A to 2E is balanced and stable alignment is maintained.
[0029]
It should be noted that the force applied to the glass substrate from each of the substrate position alignment mechanisms 2 </ b> A to 2 </ b> E is in a direction to align the glass substrate with the inspection position 6, and the glass substrate is kept in an equilibrium state at the inspection position 6. In addition, the installation number of each substrate position alignment mechanism 2, the installation position, and the pressing force of each substrate position alignment mechanism 2 are determined in advance.
[0030]
Next, an example of the support pressing part 2c will be described with reference to FIGS. The illustrated example is a configuration example in which a pressing force is generated using a bellows. 5 is a view of the support pressing portion viewed from above, and FIG. 6 is a view of the support pressing portion viewed from the lateral direction.
[0031]
In the support pressing portion 2c, both ends of the pair of guides 2c3 are connected by a pair of plates 2c1 and 2c2, and the guide 2c3 is slidably supported by a slide bearing 2c4 fixed to the pallet 4 side. One plate 2c1 fixes the contact portion 2a, the other plate 2c2 fixes one end of the bellows 2c5, and the other end of the bellows 2c5 contacts the reference surface 8 on the substrate inspection apparatus side such as the pallet 4. Also, the slide bearing 2c4 is fixed to the substrate inspection apparatus side. Thereby, one end of the bellows is fixed to the base side of the substrate inspection apparatus, and the other end is fixed to the contact portion side. The bellows 2c5 presses the contact portion 2a in a predetermined direction by deformation of the bellows caused by the difference between the pressure difference inside and outside the bellows and the elastic force of the bellows.
[0032]
For example, in the case of a configuration in which the inside of the bellows 2c5 is decompressed, the compression force due to the pressure difference between the inside and outside of the bellows overcomes the elastic force of the bellows and the bellows 2c5 is compressed at atmospheric pressure. FIG. 5A and FIG. 6A show this compressed state. When the bellows 2c5 is compressed, one end of the bellows 2c5 is in contact with the reference plane 8, so the other end of the bellows 2c5 moves in the right direction in the figure. Since the other end of the bellows 2c5 is fixed to the plate 2c2, and this plate 2c2 is fixed to the guide 2c3, the contact portion 2a is pressed in a direction away from the reference plane 8 via the guide 2c3 and the plate 2c1.
[0033]
On the other hand, when the substrate position alignment mechanism 2 is placed in a vacuum state, the pressure difference between the inside and outside of the bellows decreases, and the bellows 2c5 expands due to the elastic force of the bellows. FIG. 5B and FIG. 6B show this expanded state. When the bellows 2c5 expands, one end of the bellows 2c5 is in contact with the reference surface 8, and therefore the other end of the bellows 2c5 moves to the left in the drawing. Since the other end of the bellows 2c5 is fixed to the plate 2c2, and this plate 2c2 is fixed to the guide 2c3, the contact portion 2a is pressed in a direction approaching the reference plane 8 via the guide 2c3 and the plate 2c1.
[0034]
In the configuration in which the contact portion 2a is arranged outside the pallet 4, FIGS. 5 (b) and 6 (b) show that the contact portion 2a moves the side surface 3a of the substrate 3 from the outside to the inside as the bellows expands. It will push toward. In FIG. 6, the contact portion 2a shows a state in which the side surface 3a of the substrate 3 is pressed leftward.
[0035]
In the above description, g shown for the configuration example in which the inside of the bellows is depressurized may be the same for the configuration example in which the inside of the bellows is pressurized.
[0036]
In this configuration example, the elastic force of the bellows is in a contracting direction. In the case of a configuration in which the inside of the bellows 2c5 is pressurized, the bellows 2c5 is compressed in the atmospheric pressure because the sum of the atmospheric pressure and the contraction force of the bellows overcomes the pressure in the bellows (FIG. 5A, FIG. a)) In the same manner as described above, the contact portion 2a is pressed in a direction away from the reference plane 8 via the guide 2c3 and the plate 2c1.
[0037]
On the other hand, when the substrate position alignment mechanism 2 is placed in a vacuum state, the pressure in the bellows overcomes the contraction force of the bellows and the bellows 2c5 expands (FIGS. 5B and 6B). The contact portion 2a is pressed in a direction approaching the reference plane 8 via the guide 2c3 and the plate 2c1.
[0038]
FIG. 7 shows an example in which the support pressing means 2 (2 </ b> A to 2 </ b> E) shown in FIGS. 5 and 6 is installed on the pallet 4 in the load chamber 5. In this configuration, the support pressing means 2 (2A to 2E) is disposed inside the pallet 4, the contact portion 2a that contacts the side surface 3a of the substrate is disposed outside the pallet 4, and the contact portion 2a is the side surface of the substrate. Are configured to contact from the outside and press toward the inside.
[0039]
In this configuration, the contact portion 2a can be brought into contact with the side surface of the substrate and pressed by using the pressure difference by exhausting the load chamber 5, and can be aligned with a predetermined inspection position.
[0040]
According to the embodiment of the present invention, the portion that contacts the side surface of the substrate is configured to be rotationally supported, so that it is possible to prevent galling with the substrate and to prevent a positioning error.
[0041]
Moreover, according to the form of this invention, the drive mechanism and drive source for pressing can be made unnecessary by using a pressure difference for the structure which presses and aligns a board | substrate. Further, by eliminating the need for a drive mechanism or drive source, wiring in the substrate inspection apparatus can be eliminated.
[0042]
【The invention's effect】
As described above, according to the substrate inspection apparatus of the present invention, the substrate inspection apparatus can surely and smoothly move the substrate to the alignment position.
[Brief description of the drawings]
FIG. 1 is a schematic view for explaining a substrate inspection apparatus of the present invention.
FIG. 2 is a cross-sectional view and a perspective view for explaining a substrate position alignment mechanism of the substrate inspection apparatus of the present invention.
FIG. 3 is a plan view showing an arrangement state of a substrate position alignment mechanism of the present invention and an alignment state of a glass substrate.
FIG. 4 is a schematic perspective view showing an arrangement state of a substrate position alignment mechanism of the present invention and an alignment state of a glass substrate.
FIG. 5 is a view of the support pressing portion of the present invention as viewed from above.
FIG. 6 is a view of the support pressing portion of the present invention viewed from the lateral direction.
FIG. 7 is a view showing an example in which a support pressing unit is installed on a pallet in a load chamber.
FIG. 8 is a schematic view for explaining a substrate position alignment mechanism in a conventional substrate inspection apparatus.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Board | substrate inspection apparatus, 2A-2E ... Board position alignment mechanism, 2a ... Contact part, 2b ... Rotating shaft, 2c ... Supporting press part, 2c1 ..., 2c2 ... Plate, 2c3 ... Guide, 2c4 ... Slide guide, 2c5 ... Bellows,
2d ... bearing, 3 ... glass substrate, 3a ... side face, 4 ... pallet, 5 ... load chamber, 6 ... inspection position, 7 ... outer shape, 8 ... reference plane, 9 ..., 12 ... substrate position alignment mechanism, 12a ... plate, 12b: Plate surface.

Claims (1)

The pallet comprising a plurality of substrate position alignment mechanisms for positioning a substrate placed on the pallet at a predetermined inspection position, and a load lock chamber into which the pallet is inserted, and the load lock chamber is placed in a vacuum state to form a substrate A substrate inspection apparatus for performing inspection,
The substrate position alignment mechanism is
A contact portion in point contact with the side surface of the substrate;
A support pressing portion for rotating and supporting the contact portion in a predetermined direction;
The support pressing portion includes a bellows having a predetermined pressure inside,
One end of the bellows is fixed to the base side of the load lock chamber and the other end is fixed to the contact portion side, and the bellows is deformed by the difference between the pressure difference in the bellows and the load lock chamber and the elastic force of the bellows. Generates a pressing force in a predetermined direction,
The support pressing portion, by pressing the substrate side in a predetermined direction through the contact portion, characterized by aligning the substrate in a predetermined inspection position, the substrate inspection device.

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