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JP4405782B2 - Heat exchanger - Google Patents
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JP4405782B2 - Heat exchanger - Google Patents

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JP4405782B2
JP4405782B2 JP2003365256A JP2003365256A JP4405782B2 JP 4405782 B2 JP4405782 B2 JP 4405782B2 JP 2003365256 A JP2003365256 A JP 2003365256A JP 2003365256 A JP2003365256 A JP 2003365256A JP 4405782 B2 JP4405782 B2 JP 4405782B2
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heat exchange
flow path
heat medium
main body
body member
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JP2005127646A (en
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哲夫 若松
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Tokuyama Corp
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Description

本発明は、窒化アルミニウム焼結体よりなる新規な接合構造の熱交換装置に関する。詳しくは、熱媒体を供給する熱媒体流路を精密に形成することが可能な構造を有する熱交換装置である。   The present invention relates to a heat exchange device having a novel joining structure made of an aluminum nitride sintered body. Specifically, the heat exchange device has a structure capable of precisely forming a heat medium flow path for supplying a heat medium.

従来、窒化アルミニウム焼結体は、高い熱伝導性及び電気絶縁性を有するため、金属に代わる熱伝導材料として使用されつつある。即ち、導電性等の影響により、金属等の材質が使用できない熱伝導のための用途として、熱交換装置がある。   Conventionally, an aluminum nitride sintered body has been used as a heat conductive material instead of a metal because it has high thermal conductivity and electrical insulation. That is, there is a heat exchange device as an application for heat conduction in which a material such as metal cannot be used due to the influence of conductivity or the like.

一般に、熱交換装置は、内部に熱媒体を通過せしめるための熱媒体流路が形成された熱導電性材料である金属よりなり、その表面に熱交換面が存在する。場合によっては、熱媒体流路を避けながら、内部にまで穴が設けられ、これに被熱交換流体を通過せしめて熱交換を行なうように成した構造もある。   Generally, a heat exchange device is made of a metal, which is a heat conductive material having a heat medium flow path through which a heat medium passes, and has a heat exchange surface on the surface thereof. In some cases, there is a structure in which a hole is provided in the interior while avoiding the heat medium flow path, and heat exchange is performed by passing a heat exchange fluid through the hole.

ところが、上記熱交換装置の材質として窒化アルミニウム焼結体を使用する場合、内部が中空の構造、特に熱媒体流路のように曲がりくねった空間部を有する構造物を一体成形品として製造することは困難である。仮に、一体成形により製造しようとした場合は、先ず、窒化アルミニウム焼結体よりなる外形が同一形状の塊状物を製造し、その内部を削り出すことによって得る方法が考えられるが、かかる方法は、生産効率が悪い上に歩留まりが低く、製造コストが高くなるという問題を有する。   However, when an aluminum nitride sintered body is used as the material for the heat exchange device, it is possible to manufacture a structure having a hollow interior, particularly a structure having a winding space like a heat medium flow path, as an integrally molded product. Have difficulty. Temporarily, when it is going to manufacture by integral molding, first, the method of obtaining the lump which has the same external shape which consists of an aluminum nitride sintered compact, and carving out the inside can be considered, but this method is, There are problems that the production efficiency is low, the yield is low, and the manufacturing cost is high.

そこで、上記熱媒体流路を構成するために、熱交換装置をその熱媒体流路の中心部を通る平面で分割して、それぞれ一体成形が可能な形状の部材に成形し、これらの部材を上下合わせて接合して熱媒体流路を有する熱交換装置とする方法が提案されている(特許文献1参照)。   Therefore, in order to configure the heat medium flow path, the heat exchange device is divided by a plane passing through the central portion of the heat medium flow path, and each member is molded into a shape that can be integrally molded. A method has been proposed in which a heat exchanging device having a heat medium flow path is formed by joining together in the vertical direction (see Patent Document 1).

しかしながら、熱媒体流路が小径化或いは複雑化するに連れ、分割成形した成形体に相互に形成された流路のパターンについて平面で位置合わせを行なうことが困難となり、流路の形成が不完全となったり、場合によっては切断する等の問題が懸念される。また、熱媒体流路を横方向のみならず、縦方向にも配列して設けようとした場合には、上記分割を複数箇所で行なう必要があり、製造工程が著しく複雑化する。   However, as the diameter of the heat medium flow path is reduced or complicated, it becomes difficult to align the flow path patterns formed on the divided molded body on a plane, and the flow path is not completely formed. There are concerns about problems such as cutting and cutting. Further, when it is intended to arrange the heat medium flow path not only in the horizontal direction but also in the vertical direction, it is necessary to perform the above division at a plurality of locations, and the manufacturing process becomes extremely complicated.

特開平10−107194号公報Japanese Patent Laid-Open No. 10-107194

従って、本発明の目的は、窒化アルミニウム焼結体よりなり、その内部に熱媒体流路を精密に形成することが極めて容易にできる構造を有する熱交換装置を提供することにある。   Accordingly, an object of the present invention is to provide a heat exchanging device which is made of an aluminum nitride sintered body and has a structure that can very easily form a heat medium flow path therein.

本発明者らは、上記目的を達成するため、鋭意研究を行なった。その結果、熱交換装置を、熱媒体流路の直管部の存在する本体部分とその両端部分とに分割して一体的に成形し、該本体部材には前記直管部となる貫通口を穿設すると共に、接合部分に該貫通孔の端部を結ぶ溝部を形成し、これらを接合するような構造とすることにより、熱媒体流路を極めて正確に形成し得ることを見出し、本発明を完成するに至った。   In order to achieve the above object, the present inventors have conducted intensive research. As a result, the heat exchanging device is divided into a main body portion where the straight pipe portion of the heat medium flow path exists and both end portions thereof, and is integrally formed, and the main body member has a through-hole serving as the straight pipe portion. It is found that the heat medium flow path can be formed very accurately by forming a groove portion connecting the end portions of the through-holes at the joint portion, and by joining the holes to the joining portion. It came to complete.

即ち、本発明によれば、窒化アルミニウム焼結体よりなる熱交換装置であって、(a)端面に開口する複数の貫通孔を内在させた本体部材と(b)該本体部材の両端面にそれぞれ接合された端部材とにより構成され、上記接合部において、本体部材及び/又は端部材に上記貫通孔の開口部を結ぶ溝部を設けて熱媒体流路が形成され、該熱媒体流路の両端はそれぞれ開口して、熱媒体の供給口及び熱媒体の排出口を構成し、更に、上記本体部材において、熱媒体流路に交差しない位置に被熱交換流体の流路を形成したことを特徴とする熱交換装置が提供される。
That is, according to the present invention, there is provided a heat exchange device made of an aluminum nitride sintered body, wherein (a) a main body member having a plurality of through-holes opened in the end face, and (b) both end faces of the main body member. And a heat medium flow path is formed by providing a groove portion connecting the opening of the through hole in the main body member and / or the end member at the joint portion. Both ends are opened to form a heat medium supply port and a heat medium discharge port, and further, in the main body member, a flow path for the heat exchange fluid is formed at a position not intersecting the heat medium flow path. A featured heat exchange device is provided.

本発明によれば、窒化アルミニウム焼結体によって構成される熱交換装置を、熱交換器の熱媒体流路を貫通口として形成した本体部材と、該貫通口同士を接続する構造を形成する端部材とに分割し、これを接合して構成することによって、該熱媒体流路を水平に切断するように分割したものを接合した構造の従来の熱交換装置に比べて、極めて精密且つ複雑な熱媒体流路をも正確に形成することが可能であり、本体部材が主となる熱交換面における高度な温度制御が可能である。   According to the present invention, a heat exchange device composed of an aluminum nitride sintered body is formed with a body member formed with a heat medium flow path of a heat exchanger as a through-hole and a structure that connects the through-holes. Compared to a conventional heat exchange device with a structure in which the heat medium flow path is cut horizontally, by dividing it into members and joining them, it is extremely precise and complicated. It is possible to accurately form the heat medium flow path, and it is possible to perform high-level temperature control on the heat exchange surface mainly composed of the main body member.

また、従来の装置では実質的に不可能であった、熱媒体流路が立体的に存在する熱交換装置をも実現することが可能である。   In addition, it is possible to realize a heat exchange device in which the heat medium flow path is three-dimensionally substantially impossible with conventional devices.

以下、本発明を添付図面に従って、更に具体的に説明するが、本発明は、これらの添付図面に限定されるものではない。   Hereinafter, the present invention will be described more specifically with reference to the accompanying drawings. However, the present invention is not limited to these accompanying drawings.

図1は、本発明の熱交換装置の代表的な態様の構造を示す概略図であり、図2は、上記構造の平面透視図である。   FIG. 1 is a schematic view showing the structure of a typical embodiment of the heat exchange apparatus of the present invention, and FIG. 2 is a plan perspective view of the structure.

本発明の熱交換装置1は、窒化アルミニウム焼結体よりなり、(a)端面に開口する複数の貫通孔5を内在させた本体部材2と(b)該本体部材2の両端面にそれぞれ接合された端部材3、4とにより構成され、上記接合部6、7において、本体部材2及び/又は端部材3、4に上記貫通孔の開口部を結ぶ溝部8を設けて熱媒体流路が形成され、該熱媒体流路の両端はそれぞれ開口して、熱媒体の供給口9及び熱媒体の排出口10を構成してなる。   The heat exchange device 1 of the present invention is made of an aluminum nitride sintered body, and (a) a main body member 2 having a plurality of through-holes 5 opened on the end face and (b) bonded to both end faces of the main body member 2, respectively. In the joint portions 6 and 7, the main body member 2 and / or the end members 3 and 4 are provided with groove portions 8 that connect the opening portions of the through holes to form a heat medium flow path. The both ends of the heat medium flow path are formed to form a heat medium supply port 9 and a heat medium discharge port 10.

本発明において、窒化アルミニウム焼結体は、公知の材質が特に制限なく使用されるが、特に、熱伝導率が70W/m・K以上、特に、180〜250W/m・Kであることが、熱交換装置として高い性能を発揮するために好ましい。また、装置の取扱い時、或いは使用時の耐久性を考慮すれば、強度曲げ強度は、200MPa以上、好ましくは、300〜600MPaであることが望ましい。   In the present invention, a known material is used for the aluminum nitride sintered body without any particular limitation. In particular, the thermal conductivity is 70 W / m · K or more, particularly 180 to 250 W / m · K. It is preferable for exhibiting high performance as a heat exchange device. In consideration of durability during handling or use of the apparatus, the strength bending strength is 200 MPa or more, preferably 300 to 600 MPa.

本発明の熱交換装置において、本体部材2は、端面に開口する複数の貫通孔5を内在させて成る。本体部材の形状は、特に制限されないが、その内部に貫通口5を形成させることのできる程度の厚みを有する形状である。かかる厚みの上限は、特に制限されず、用途に応じて適宜決定すればよい。また、その平面形状は、取り付け箇所の形状に応じて適宜決定すればよいが、図1に示す長方体をはじめ、楕円、円、多角形等が特に制限されず採用される。但し、端部材3との接合面の構造を平面化することが、各部材を成形する上での設計が容易であり、また、接合を確実に行なうために好ましい。平面形状が円の場合、好適な態様を具体的に示せば、本発明の熱交換装置の位置態様を示す平面図(断面)である図6に示す態様が挙げられる。   In the heat exchange device of the present invention, the main body member 2 has a plurality of through-holes 5 opened in the end face. The shape of the main body member is not particularly limited, but is a shape having a thickness that allows the through-hole 5 to be formed therein. The upper limit of the thickness is not particularly limited, and may be appropriately determined according to the application. In addition, the planar shape may be appropriately determined according to the shape of the attachment location, but a rectangular shape, an ellipse, a circle, a polygon, and the like shown in FIG. 1 are not particularly limited and are employed. However, it is preferable to planarize the structure of the joint surface with the end member 3 in order to easily design each member and to perform the joining reliably. In the case where the planar shape is a circle, if a preferred embodiment is specifically shown, the embodiment shown in FIG. 6 which is a plan view (cross section) showing the position embodiment of the heat exchange device of the present invention can be mentioned.

前記貫通孔5は、貫通口5は、熱媒体流路を形成するためのものである。該貫通孔5は、形成の容易性から、図1に示すように、直管であることが好ましい。また、貫通孔5の径、本数等は、熱交換装置の大きさ、用途に応じて適宜決定すればよい。   The through hole 5 is for forming a heat medium flow path. The through hole 5 is preferably a straight pipe as shown in FIG. Moreover, what is necessary is just to determine the diameter of the through-hole 5, a number, etc. suitably according to the magnitude | size of a heat exchange apparatus, and a use.

例えば、150mm×50mm×10mmの大きさの熱交換装置の場合、流路となる貫通孔5の直径は1〜8mm、また、該貫通孔5の本数は、2〜25本が一般的である。   For example, in the case of a heat exchange device having a size of 150 mm × 50 mm × 10 mm, the diameter of the through hole 5 serving as a flow path is generally 1 to 8 mm, and the number of the through holes 5 is generally 2 to 25. .

また、貫通孔5は、図1に示すように、平面方向に1列設ける態様の他、断面図を示す図4にように、複数列に形成することも可能である。   Further, the through holes 5 can be formed in a plurality of rows as shown in FIG. 4 showing a cross-sectional view in addition to a mode in which one row is provided in the plane direction as shown in FIG.

更に、熱媒体流路の端部となる貫通孔は、図1に示すように接合面に開口して、更に熱媒体の供給口9及び排出口10に連通させるのが一般的であるが、本体部材2の側面に開口せしめて熱媒体の供給口及び排出口を形成してもよい(図示せず)。   Furthermore, the through-hole serving as the end of the heat medium flow path is generally opened at the joint surface as shown in FIG. 1 and further communicated with the heat medium supply port 9 and the discharge port 10. You may open in the side surface of the main body member 2, and may form the supply port and discharge port of a heat carrier (not shown).

尚、本発明の熱交換装置は、熱媒体流路を本体部材2に上記貫通孔を設けて形成するようにしたため、その径が小さく且つ本数が多くても、該熱媒体流路を正確に形成することができる。   In the heat exchanging device of the present invention, the heat medium flow path is formed by providing the body member 2 with the above-described through-holes. Therefore, even if the diameter is small and the number is large, the heat medium flow path is accurately defined. Can be formed.

本発明において、端部材4は、これを本体部材2に接合することによって、上記貫通孔5の開口部を封止し、且つ必要箇所においてその端部を溝部8により連通せしめて連続した熱媒体流路を形成するためのものである。   In the present invention, the end member 4 is joined to the main body member 2 to seal the opening of the through-hole 5, and the end portion is communicated with the groove portion 8 at a necessary location to continuously heat the medium. It is for forming a flow path.

かかる連通孔5端部の開口部を連通せしめて熱媒体流路を形成する態様は、図1に示すように、本体部材2に上記貫通孔の開口部を結ぶ溝部8を設ける態様、端部材3、4に上記貫通孔の開口部を結ぶ溝部8を設ける態様、或いは、本体部材、端部材の双方に設ける態様が挙げられる。   As shown in FIG. 1, the embodiment in which the opening at the end of the communication hole 5 is communicated to form the heat medium flow path is an embodiment in which the groove portion 8 connecting the opening of the through hole is provided in the main body member 2, and the end member. A mode in which the groove portion 8 connecting the opening portions of the through holes to 3 and 4 is provided, or a mode in which both the main body member and the end member are provided.

しかし、接合において、溝部8と貫通孔5とを合致させる労力を低減させ、簡易に且つ正確に溝部を形成するには、図1に示すように、本体部材2側に各連通孔5の端部の開口部を結ぶ溝部8を設け、端部材3、4の接合面を平面とする態様が最も好ましい。   However, in order to reduce the labor for matching the groove 8 and the through-hole 5 in joining and form the groove easily and accurately, as shown in FIG. 1, the end of each communication hole 5 is formed on the body member 2 side. It is most preferable that the groove portion 8 connecting the opening portions is provided and the joining surfaces of the end members 3 and 4 are flat.

図1に示す態様は、端部材3、4に、上記熱媒体流路への熱媒体の供給口9と排出口10をそれぞれ開口せしめたものである。   In the embodiment shown in FIG. 1, the heat medium supply port 9 and the discharge port 10 for the heat medium flow path are respectively opened in the end members 3 and 4.

上記熱媒体の供給口9と排出口10には、必要に応じて、接続される配管との接続を行なうための構造、例えば、フランジ、ねじ等を設けることができる。   The supply port 9 and the discharge port 10 for the heat medium may be provided with a structure for connecting to a connected pipe, for example, a flange, a screw, or the like, if necessary.

本発明において、本体部材2と端部材3、4とは接合されて熱交換装置を構成する。かかる接合の仕方は、特に制限されないが、接合部の曲げ強度が未接合部の80%以上となるように接合されることが好ましい。   In the present invention, the main body member 2 and the end members 3 and 4 are joined to constitute a heat exchange device. The manner of joining is not particularly limited, but the joining is preferably performed so that the bending strength of the joined portion is 80% or more of the unjoined portion.

本発明の熱交換装置における他の態様は特に制限されない。好適な態様を例示すれば、本発明の熱交換装置1は、図5に示すように、貫通孔5と交差しない貫通孔11を設け、被熱交換流体の流路を形成し、該流路内で熱交換を行なわしめることもできる。また、図示しないが、本体部材の表面に凹凸、或いはフィンを設けてその表面積を増大せしめることも可能である。   Other aspects in the heat exchange apparatus of the present invention are not particularly limited. If a suitable aspect is illustrated, the heat exchange apparatus 1 of this invention will provide the through-hole 11 which does not cross | intersect the through-hole 5, and forms the flow path of a to-be-heat-exchanged fluid, as shown in FIG. Heat exchange can also be performed in the interior. Although not shown, it is also possible to increase the surface area by providing irregularities or fins on the surface of the main body member.

本発明の熱交換装置の製造方法は、本体部材と端部材とをそれぞれ製造し、両者を接合する態様が特に制限無く採用される。   In the manufacturing method of the heat exchange device of the present invention, a mode in which the main body member and the end member are manufactured and joined together is employed without any particular limitation.

本体部材、端部材の母体を得る方法としては、窒化アルミニウム粉末を、必要に応じて、公知の焼結助剤や、更に、バインダー、溶媒等と混合した後、プレス成形、鋳込み成形等の公知の方法により成形する方法が挙げられるが、これらの方法に制限されるものではない。   As a method for obtaining the main body member and the end member base, aluminum nitride powder is mixed with a known sintering aid, a binder, a solvent, etc., if necessary, and then known as press molding, casting molding, or the like. Although the method of shape | molding by this method is mentioned, It is not restrict | limited to these methods.

また、該本体部材の母体においては、必要箇所にドリル等により貫通孔を穿設し、また、その開口部の必要箇所に溝部を形成する。また、端部材の母体においては、本体部材において形成される熱媒体流路の端部となる箇所に穿設して熱媒体の供給口、排出口が一般に設けられる。   Further, in the base body of the main body member, a through-hole is drilled at a required location by a drill or the like, and a groove is formed at the required location of the opening. Further, in the base member of the end member, a supply port and a discharge port for the heat medium are generally provided by drilling at a portion that becomes an end portion of the heat medium flow path formed in the main body member.

しかる後、上記加工された母体を、それぞれの接合面で圧接せしめた状態で、必要に応じて、前記成形時に使用されたバインダー等の有機物の脱脂を行ない、次いで、焼結することによって本体部材と端部材とが接合された熱交換装置を得ることができる。   After that, in the state in which the processed base is press-contacted at each joint surface, if necessary, organic substances such as binder used at the time of molding are degreased, and then sintered to be a main body member And an end member can be obtained.

上記脱脂、焼結の条件は、公知の条件が特に制限無く採用される。例えば、脱脂は、還元、中性或いは酸化雰囲気下、400〜650℃で、1〜10時間行なう。また、焼結は、還元或いは中性雰囲気下、1650〜1950℃で、3〜20時間行なう。この場合、熱伝導度をより向上せしめるため、還元雰囲気下での焼結と中性雰囲気下での焼結を多段で行なうことが好ましい。   As the degreasing and sintering conditions, known conditions are employed without particular limitation. For example, degreasing is performed at 400 to 650 ° C. for 1 to 10 hours in a reducing, neutral or oxidizing atmosphere. Sintering is performed at 1650 to 1950 ° C. for 3 to 20 hours in a reducing or neutral atmosphere. In this case, in order to further improve the thermal conductivity, it is preferable to perform sintering in a reducing atmosphere and sintering in a neutral atmosphere in multiple stages.

また、前記接合に際し、接合面に窒化アルミニウム及び/又は焼結助剤のペーストを塗布した後、上記操作を行うことによって、より強固な接合を実現することができ、好ましい。   Moreover, in the case of the said joining, a stronger joining can be implement | achieved by performing the said operation after apply | coating the paste of aluminum nitride and / or a sintering auxiliary agent on a joining surface, and it is preferable.

また、他の接合方法として、上記加工された母体をそれぞれ脱脂、焼結した後、接合面に焼結助剤のペーストを塗布し、圧接した状態で1650〜1950℃の温度で加熱処理する方法も採用することができる。   Further, as another joining method, after the above processed mother bodies are degreased and sintered, respectively, a paste of a sintering aid is applied to the joining surface, and heat treatment is performed at a temperature of 1650 to 1950 ° C. in a pressed state. Can also be adopted.

本発明において、得られる熱交換装置の耐水性を高めるために、その表面に酸化層を形成することが好ましい。かかる酸化層の厚みは、0.2〜1μm程度が好ましく、形成方法は、公知の方法が特に制限無く採用される。   In the present invention, in order to increase the water resistance of the obtained heat exchange device, it is preferable to form an oxide layer on the surface thereof. The thickness of the oxide layer is preferably about 0.2 to 1 μm, and a known method is employed without particular limitation as the formation method.

本発明の熱交換装置は、金属を構成材料とする熱交換装置が使用できない分野において、有効に使用することができる。例えば、金属部材が使用できない、マイクロ波、ミリ波等を印加した状態で被熱交換流体の加熱或いは冷却を行なう用途に対して好適である。   The heat exchange apparatus of the present invention can be used effectively in a field where a heat exchange apparatus using a metal as a constituent material cannot be used. For example, it is suitable for applications in which a heat exchange fluid is heated or cooled in a state where a microwave, millimeter wave, or the like is applied, in which a metal member cannot be used.

以下、本発明を更に具体的に説明するため、実施例を示すが、本発明は、かかる実施例に限定されるものではない。   EXAMPLES Hereinafter, examples will be shown to describe the present invention more specifically, but the present invention is not limited to such examples.

尚、実施例において、窒化アルミニウム焼結体の熱伝導率の測定は一次元のレーザーフラッシュ法を用い、LF/TCM FA8510B(理学電機株式会社)により行った。3点曲げ強度の測定は、JIS R1601に従って行った。また、表面温度の測定は赤外線サーモグラフィ法を用い、ネオサーモTVS−700(日本アビオニクス株式会社)を用いて行った。   In the examples, the thermal conductivity of the aluminum nitride sintered body was measured by LF / TCM FA8510B (Rigaku Corporation) using a one-dimensional laser flash method. The three-point bending strength was measured according to JIS R1601. The surface temperature was measured using an infrared thermography method using Neothermo TVS-700 (Nippon Avionics Co., Ltd.).

実施例1
図1に示す150×50×10mm、流路直径φ3mmの構造の熱交換装置を以下の方法によって製造した。
Example 1
A heat exchange device having a structure of 150 × 50 × 10 mm and a channel diameter of 3 mm shown in FIG. 1 was manufactured by the following method.

窒化アルミニウム粉末(株式会社トクヤマ製、Hグレード)100重量部、焼結助剤として酸化イットリウム微粉末5重量部、有機バインダーとしてアクリル酸メチルエステル系4重量部、及びエタノール100重量部をボールミルにて24時間混合することによりスラリーを作成した。このスラリーをスプレードライヤーにて、100℃で造粒し、平均粒径80μmの顆粒を得た。該顆粒を圧力100MPaで油圧プレスすることにより、□200×t12mmの成形体を得た。次いで、この成形体1個を加工することにより、φ3.6mmの流路及びそれぞれの流路を繋ぐ溝部を有する156×60×12mmの本体部材3個、及びφ3.6の開口部を有する12×60×12mmの端部材6個を得た。   100 parts by weight of aluminum nitride powder (H grade made by Tokuyama Co., Ltd.), 5 parts by weight of fine yttrium oxide powder as sintering aid, 4 parts by weight of methyl acrylate ester as organic binder, and 100 parts by weight of ethanol in a ball mill A slurry was prepared by mixing for 24 hours. This slurry was granulated at 100 ° C. with a spray dryer to obtain granules having an average particle size of 80 μm. The granule was hydraulically pressed at a pressure of 100 MPa to obtain a molded body of □ 200 × t12 mm. Next, by processing this single molded body, there are three 156 × 60 × 12 mm main body members having a φ3.6 mm flow path and groove portions connecting the respective flow paths, and a φ3.6 opening 12. Six end members of × 60 × 12 mm were obtained.

一方、接合用ペーストは、窒化アルミニウム粉末100重量部、焼結助剤として酸化イットリウム5重量部、有機バインダーとしてエチルセルロース(グレード4センチポイズ)3重量部、及びビヒクルとしてテルピネオール50重量部を混合して調整した。   On the other hand, the bonding paste was prepared by mixing 100 parts by weight of aluminum nitride powder, 5 parts by weight of yttrium oxide as a sintering aid, 3 parts by weight of ethyl cellulose (grade 4 centipoise) as an organic binder, and 50 parts by weight of terpineol as a vehicle. did.

上記方法により得られたペーストを、本体部材1個と端部材2個の接合面に塗布し、接合した。   The paste obtained by the above method was applied to the joining surface of one main body member and two end members and joined.

上記の密着せしめた成形体を一昼夜室温で乾燥し、大気中600℃の条件で脱脂し、窒素雰囲気中1830℃の条件で焼成して窒化アルミニウム熱交換装置を得た。   The molded body thus adhered was dried at room temperature all day and night, degreased in the atmosphere at 600 ° C., and fired in a nitrogen atmosphere at 1830 ° C. to obtain an aluminum nitride heat exchanger.

得られた窒化アルミニウムの熱伝導率の測定は一次元法にて行った。測定用のサンプルの大きさはφ10×t4mmであり、このサンプルは、上記方法より得られた窒化アルミニウム熱交換装置から接合部を含み、かつ該接合部がサンプルの厚みの中央となるように切出した。   The obtained aluminum nitride was measured for thermal conductivity by a one-dimensional method. The size of the sample for measurement is φ10 × t4 mm, and this sample is cut out from the aluminum nitride heat exchange device obtained by the above method so that the joint is at the center of the thickness of the sample. It was.

また、該接合部を含まない母材部分よりなる同サイズのサンプルも作成して、熱伝導率を測定した。また、接合部の曲げ強度測定は、接合部が中央に来るようにサンプルを作成し、3点曲げ法で行った。その結果を表1に示した。   Moreover, the sample of the same size which consists of a base material part which does not contain this junction part was also created, and the heat conductivity was measured. Moreover, the bending strength measurement of a junction part was performed by the 3 point | piece bending method, creating a sample so that a junction part might come to the center. The results are shown in Table 1.

接合部の熱伝導率は母材部分が176W/m・Kであったのに対し、100%の熱伝導率を示し、また、曲げ強度は母材部分が337MPaであったのに対し、99%の強度を示した。   The thermal conductivity of the joint portion was 176 W / m · K in the base material portion, whereas it showed 100% thermal conductivity. The bending strength was 337 MPa in the base material portion, whereas it was 99 % Strength.

また、熱交換装置の流路に80℃の温水を1cm/secで流した場合の熱交換装置表面の温度分布を赤外線サーモグラフィで測定した。その結果、本体部材表面における温度分布差は、4deg以下であり、熱媒体流路は完璧に連通していたことが確認された。また、熱媒体の漏れも皆無であった。   Further, the temperature distribution on the surface of the heat exchanger when 80 ° C. warm water was passed through the flow path of the heat exchanger at 1 cm / sec was measured by infrared thermography. As a result, the temperature distribution difference on the surface of the main body member was 4 deg or less, and it was confirmed that the heat medium flow path was in perfect communication. In addition, there was no leakage of the heat medium.

本発明の熱交換装置の代表的な態様を示す斜視図The perspective view which shows the typical aspect of the heat exchange apparatus of this invention 図1の熱交換装置の流路の構造を示す平面図The top view which shows the structure of the flow path of the heat exchange apparatus of FIG. 本発明の熱交換装置において、端部材に溝部を設けた一態様を示す平面図The top view which shows the one aspect | mode which provided the groove part in the end member in the heat exchange apparatus of this invention. 本発明の熱交換装置において、本体部材に連通孔を多段に設けた一態様を示す断面図Sectional drawing which shows the one aspect | mode which provided the communication hole in the multistage in the main-body member in the heat exchange apparatus of this invention 本発明の熱交換装置において、本体部材に被熱交換流体の流路を設けた一態様を示す断面図Sectional drawing which shows the one aspect | mode which provided the flow path of the heat exchange fluid in the main-body member in the heat exchange apparatus of this invention. 本発明の熱交換装置において、平面形状が円である場合の一態様を示す平面図The heat exchange apparatus of this invention WHEREIN: The top view which shows one aspect | mode when a planar shape is a circle | round | yen

符号の説明Explanation of symbols

1 熱交換装置
2 本体部材
3、4 端部材
5 貫通孔
6、7 接合部
8 溝部
9 熱媒体供給口
10 熱媒体排出口
11 被熱交換流体の流路
DESCRIPTION OF SYMBOLS 1 Heat exchange apparatus 2 Main body member 3, 4 End member 5 Through-hole 6, 7 Joint part 8 Groove part 9 Heat medium supply port 10 Heat medium discharge port 11 Flow path of heat exchange fluid

Claims (2)

窒化アルミニウム焼結体よりなる熱交換装置であって、(a)端面に開口する複数の貫通孔を内在させた本体部材と(b)該本体部材の両端面にそれぞれ接合された端部材とにより構成され、上記接合部において、本体部材及び/又は端部材に上記貫通孔の開口部を結ぶ溝部を設けて熱媒体流路が形成され、該熱媒体流路の両端はそれぞれ開口して、熱媒体の供給口及び熱媒体の排出口を構成し、更に、上記本体部材において、熱媒体流路に交差しない位置に被熱交換流体の流路を形成したことを特徴とする熱交換装置。 A heat exchange device made of an aluminum nitride sintered body, comprising: (a) a main body member having a plurality of through-holes opened in the end face; and (b) end members joined respectively to both end faces of the main body member. The heat medium flow path is formed by providing the main body member and / or the end member with a groove portion that connects the opening portion of the through hole, and both ends of the heat medium flow path are opened to A heat exchange apparatus comprising a medium supply port and a heat medium discharge port, and further, a heat exchange fluid channel formed in a position not intersecting the heat medium channel in the main body member . 本体部材に上記貫通孔の開口部を結ぶ溝部を設けて熱媒体流路が形成された請求項1記載の熱交換装置。 The heat exchange device according to claim 1, wherein the main body member is provided with a groove portion that connects the opening portion of the through hole to form a heat medium flow path.
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