JP4416718B2

JP4416718B2 - Method and apparatus for controlling output light intensity of optical switch

Info

Publication number: JP4416718B2
Application number: JP2005255194A
Authority: JP
Inventors: 剛志関; 誠村上; 城治山口
Original assignee: Nippon Telegraph and Telephone Corp; NTT Inc USA
Current assignee: NTT Inc; NTT Inc USA
Priority date: 2005-09-02
Filing date: 2005-09-02
Publication date: 2010-02-17
Anticipated expiration: 2025-09-02
Also published as: JP2007065594A

Description

本発明は、複数の入出力ポート間で、任意の入力ポートから入力した信号光を２つのＭＥＭＳ（Micro Electric Mechanical System) ミラーによって連続的に反射させ、任意の出力ポートに出力する２枚のＭＥＭＳミラーアレイを用いたＭＥＭＳ光スイッチにおいて、信号光の出力経路を決める２つのＭＥＭＳミラーの角度調整を行い、出力ポートにおける出力光強度を制御する光スイッチの出力光強度制御方法および装置に関する。 The present invention continuously reflects signal light input from an arbitrary input port between a plurality of input / output ports by two MEMS (Micro Electric Mechanical System) mirrors, and outputs the output light to an arbitrary output port. In a MEMS optical switch using a mirror array, the present invention relates to an output light intensity control method and apparatus for an optical switch that adjusts the angle of two MEMS mirrors that determine the output path of signal light and controls the output light intensity at an output port.

図８は、ＭＥＭＳ光スイッチの構成例を示す。図８において、ＭＥＭＳ光スイッチは、複数のコリメータを２次元に配置した２つのコリメータアレイ６，７と、複数のミラーを２次元に配置した２つのＭＥＭＳミラーアレイ８，９を組み合わせた構成である。なお、入力側のコリメータアレイ６には、各コリメータに対応させて複数の光ファイバを２次元に配置した入力光ファイバアレイが接続され、出力側のコリメータアレイ７には、各コリメータに対応させて複数の光ファイバを２次元に配置した出力光ファイバアレイが接続される。また、各ミラーはＭＥＭＳ技術によりその角度が制御され、２つのＭＥＭＳミラーアレイ８，９で反射させるミラーの組み合わせによって任意の入出力光ファイバ間の接続（出力経路の切り替え）が可能になっている。 FIG. 8 shows a configuration example of the MEMS optical switch. In FIG. 8, the MEMS optical switch has a configuration in which two collimator arrays 6 and 7 in which a plurality of collimators are two-dimensionally arranged and two MEMS mirror arrays 8 and 9 in which a plurality of mirrors are two-dimensionally arranged. . The input-side collimator array 6 is connected to an input optical fiber array in which a plurality of optical fibers are two-dimensionally arranged corresponding to each collimator, and the output-side collimator array 7 is associated with each collimator. An output optical fiber array in which a plurality of optical fibers are two-dimensionally arranged is connected. In addition, the angle of each mirror is controlled by MEMS technology, and any input / output optical fiber can be connected (switching the output path) by a combination of mirrors reflected by the two MEMS mirror arrays 8 and 9. .

ところで、各ミラーは出力経路に応じた所定の角度が予め設定されるが、各ミラーの角度の微小変動により、出力側のコリメータ（出力ポート）に対して信号光の入射角あるいは入射位置が微小変動し、出力光強度が変動することがある。このような出力光強度を制御する方法として、出力光強度をモニタし、出力光強度が最大になるように各ミラーの角度調整を行う方法がとられる。このとき、出力光強度をモニタしながら各ミラーの角度をｘ軸方向、ｙ軸方向に調整する方法、各ミラーをスパイラルに角度変化させて出力光強度が最大になるように角度を調整する方法などが用いられている。 By the way, a predetermined angle corresponding to the output path is set in advance for each mirror, but the incident angle or the incident position of the signal light is very small with respect to the collimator (output port) on the output side due to a minute variation in the angle of each mirror. And the output light intensity may fluctuate. As a method for controlling the output light intensity, there is a method in which the output light intensity is monitored and the angle of each mirror is adjusted so that the output light intensity becomes maximum. At this time, a method of adjusting the angle of each mirror in the x-axis direction and the y-axis direction while monitoring the output light intensity, and a method of adjusting the angle so that the output light intensity is maximized by changing each mirror in a spiral angle. Etc. are used.

また、出力側に受光器アレイを配置し、受光器アレイに到達しているビーム形状から入射位置および角度を測定して最適な入射位置および角度を調整する方法も知られている（特許文献１）。
特開２００２−２３６２６４号公報 A method is also known in which a photoreceiver array is arranged on the output side, and the optimum incident position and angle are adjusted by measuring the incident position and angle from the beam shape reaching the photoreceiver array (Patent Document 1). ).
JP 2002-236264 A

ＭＥＭＳ光スイッチでは、出力ポートにおける出力光強度が最大になるように２つのミラーの角度調整が行われる。このとき図９に示すように、入力側のミラー１の角度をずらすと、出力ポート（出力側のコリメータ４）への入射角度および入射位置が変化する。したがって、従来はミラー１の角度調整に対応して出力側のミラー２の角度調整を行い、出力ポートにおける出力光強度が最大になるように制御される。しかし、ミラー１とミラー２はそれぞれ独立に角度調整が行われるために、出力ポートにおける出力光強度が各ミラーの角度調整のたびに変動し、出力光強度が最大かつ安定状態になるまでに時間がかかっていた。 In the MEMS optical switch, the angles of the two mirrors are adjusted so that the output light intensity at the output port is maximized. At this time, as shown in FIG. 9, when the angle of the input-side mirror 1 is shifted, the incident angle and the incident position on the output port (output-side collimator 4) change. Therefore, conventionally, the angle of the output-side mirror 2 is adjusted corresponding to the angle adjustment of the mirror 1, and the output light intensity at the output port is controlled to be maximized. However, since the angles of the mirror 1 and the mirror 2 are independently adjusted, the output light intensity at the output port fluctuates each time the angle of each mirror is adjusted, and it takes time until the output light intensity reaches the maximum and stable state. It was over.

ところで、各ミラーの角度調整を行うと出力ポートにおける出力光強度が変化するが、その出力光強度を検出しているのみでは、ミラー１とミラー２のどちらの角度が大きくずれているのか判断できない。すなわち、出力ポートにおける出力光強度は、出力ポート（出力側のコリメータ４）への入射角度および入射位置によって決定されるものの、２枚のミラーの角度状況を考慮せずに各ミラーの角度調整を行うことは効率的ではない。 By the way, when the angle of each mirror is adjusted, the output light intensity at the output port changes. However, it is impossible to determine which angle of the mirror 1 or the mirror 2 is greatly deviated only by detecting the output light intensity. . That is, the output light intensity at the output port is determined by the incident angle and the incident position on the output port (the collimator 4 on the output side), but the angle of each mirror can be adjusted without considering the angle status of the two mirrors. It is not efficient to do.

本発明は、複数の入出力ポート間で、２つのＭＥＭＳミラーの角度を制御して信号光の出力経路を切り替える光スイッチにおいて、出力ポートにおける出力光強度が最大になるように各ミラーの角度調整を効率よく行い、速やかに出力光強度が最大かつ安定状態になるように制御することができる光スイッチの出力光強度制御方法および装置を提供することを目的とする。 The present invention is an optical switch for switching the output path of signal light by controlling the angle of two MEMS mirrors between a plurality of input / output ports, and adjusting the angle of each mirror so that the output light intensity at the output port is maximized. It is an object of the present invention to provide an output light intensity control method and apparatus for an optical switch capable of efficiently performing control so that the output light intensity becomes maximum and stable.

第１の発明は、複数の入出力ポート間で、任意の入力ポートから入力した信号光を２つのＭＥＭＳミラーによって連続的に反射させて任意の出力ポートに出力する２枚のＭＥＭＳミラーアレイを用いた光スイッチに対して、信号光の出力経路を決める２つのＭＥＭＳミラーの角度調整を行い、出力ポートにおける出力光強度を制御する光スイッチの光出力強度制御方法において、第１の制御光を入力ポートから入力し、２つのＭＥＭＳミラーを介して出力ポートへ出力してその光強度を検出し、第１の制御光の入力ポートにおける光強度と等しい光強度の第２の制御光を出力ポートから入力し、出力ポートにおける第１の制御光の光強度と入力ポートにおける第２の制御光の光強度の光強度比を検出し、光強度比に応じて２つのＭＥＭＳミラーのうちずれが大きい方のＭＥＭＳミラーを判別し、光強度比が１になるようにずれが大きい一方のＭＥＭＳミラーの角度調整を行う第１の手順と、次に光強度比が所定値になるように他方のＭＥＭＳミラーの角度調整を行う第２の手順とを１サイクルとし、第１の手順で光強度比が１に調整されるときに第１の制御光の光強度と前サイクルにおける第１の制御光の光強度との変化量が所定値以下になるまで第１の手順と第２の手順を順番に繰り返す。 The first invention uses two MEMS mirror arrays in which signal light input from an arbitrary input port is continuously reflected by two MEMS mirrors and output to an arbitrary output port between a plurality of input / output ports. In the optical output intensity control method of the optical switch, the angle of the two MEMS mirrors that determine the output path of the signal light is adjusted to control the output light intensity at the output port, and the first control light is input. Input from the port, output to the output port through the two MEMS mirrors, detect the light intensity, and output the second control light having the same light intensity as the light intensity at the input port of the first control light from the output port. The light intensity ratio of the first control light at the output port and the light intensity of the second control light at the input port is detected, and two MEMS mirrors are detected according to the light intensity ratio. The first step of discriminating the MEMS mirror having the larger deviation from the above and adjusting the angle of the one MEMS mirror having the larger deviation so that the light intensity ratio becomes 1, and then the light intensity ratio becomes a predetermined value. Thus, the second procedure for adjusting the angle of the other MEMS mirror is defined as one cycle, and when the light intensity ratio is adjusted to 1 in the first procedure, the light intensity of the first control light and the second procedure in the previous cycle are adjusted. The first procedure and the second procedure are repeated in order until the amount of change in the light intensity of the first control light becomes a predetermined value or less.

第２の発明は、複数の入出力ポート間で、任意の入力ポートから入力した信号光を２つのＭＥＭＳミラーによって連続的に反射させて任意の出力ポートに出力する２枚のＭＥＭＳミラーアレイを用いた光スイッチに対して、信号光の出力経路を決める２つのＭＥＭＳミラーの角度調整を行い、出力ポートにおける出力光強度を制御する光スイッチの光出力強度制御方法において、第１の制御光を入力ポートから入力し、２つのＭＥＭＳミラーを介して出力ポートへ出力してその光強度を検出し、第１の制御光の入力ポートにおける光強度と等しい光強度の第２の制御光を出力ポートから入力し、２つのＭＥＭＳミラーを介して入力ポートへ出力してその光強度を検出し、出力ポートにおける第１の制御光の光強度と入力ポートにおける第２の制御光の光強度の少なくとも一方が検出されたときに、その光強度が大きくなる方向に２つのＭＥＭＳミラーの角度調整を行い、さらに出力ポートにおける第１の制御光の光強度と入力ポートにおける第２の制御光の光強度の両方が検出されたときに、第１の発明の方法をとる。 The second invention uses two MEMS mirror arrays in which signal light input from an arbitrary input port is continuously reflected by two MEMS mirrors and output to an arbitrary output port between a plurality of input / output ports. In the optical output intensity control method of the optical switch, the angle of the two MEMS mirrors that determine the output path of the signal light is adjusted to control the output light intensity at the output port, and the first control light is input. Input from the port, output to the output port through the two MEMS mirrors, detect the light intensity, and output the second control light having the same light intensity as the light intensity at the input port of the first control light from the output port. Input, output to the input port via the two MEMS mirrors to detect the light intensity, the light intensity of the first control light at the output port and the second intensity at the input port When at least one of the light intensities of the control light is detected, the angles of the two MEMS mirrors are adjusted in the direction in which the light intensity increases, and the light intensity of the first control light at the output port and the first light intensity at the input port are adjusted. When both of the two control light intensities are detected, the method of the first invention is adopted.

第３の発明は、第１の発明または第２の発明において、２つのＭＥＭＳミラーのうち入力ポートに近い方を第１ミラー、出力ポートに近い方を第２ミラーとし、出力ポートにおける第１の制御光の光強度をＰ１、入力ポートにおける第２の制御光の光強度をＰ２とし、その光強度比を（Ｐ１／Ｐ２）としたときに、光強度比が１より大きい場合に、光強度比が１になるように第２ミラーの角度調整を行う第１の手順と、光強度比が１になったときに第２ミラーの角度を固定し、光強度比が１より大きくなるように第１ミラーの角度調整を行う第２の手順と、光強度比が１より大きい所定値または最大値になったときに第１ミラーの角度を固定し、再度第１の手順に戻り、第１の手順と第２の手順を順番に繰り返し、光強度比が１より小さい場合に、光強度比が１になるように第１ミラーの角度調整を行う第１の手順と、光強度比が１になったときに第１ミラーの角度を固定し、光強度比が１より小さくなるように第２ミラーの角度調整を行う第２の手順と、光強度比が１より小さい所定値または最小値になったときに第２ミラーの角度を固定し、再度第１の手順に戻り、第１の手順と第２の手順を順番に繰り返す。 The third invention is the first invention or the second invention, the first mirror closer to the input port of the two MEMS mirrors, the closer to the output port and a second mirror, the first at the output port When the light intensity of the control light is P1, the light intensity of the second control light at the input port is P2, and the light intensity ratio is (P1 / P2), the light intensity ratio is greater than 1. The first procedure for adjusting the angle of the second mirror so that the ratio becomes 1, and the angle of the second mirror is fixed when the light intensity ratio becomes 1, so that the light intensity ratio becomes larger than 1. The second procedure for adjusting the angle of the first mirror, and the angle of the first mirror is fixed when the light intensity ratio reaches a predetermined value or maximum value greater than 1, and the process returns to the first procedure again. Repeat steps 2 and 2 in order, and the light intensity ratio is less than 1. In addition, the first procedure for adjusting the angle of the first mirror so that the light intensity ratio becomes 1, and the angle of the first mirror is fixed when the light intensity ratio becomes 1, so that the light intensity ratio becomes 1 The second procedure of adjusting the angle of the second mirror so as to decrease, and the angle of the second mirror is fixed when the light intensity ratio becomes a predetermined value or a minimum value smaller than 1, and the procedure is changed to the first procedure again. Return and repeat the first procedure and the second procedure in order.

第４の発明は、第１の発明または第２の発明において、２つのＭＥＭＳミラーのうち入力ポートに近い方を第１ミラー、出力ポートに近い方を第２ミラーとし、出力ポートにおける第１の制御光の光強度をＰ１、入力ポートにおける第２の制御光の光強度をＰ２とし、その光強度比を（Ｐ２／Ｐ１）としたときに、光強度比が１より大きい場合に、光強度比が１になるように第１ミラーの角度調整を行う第１の手順と、光強度比が１になったときに第１ミラーの角度を固定し、光強度比が１より大きくなるように第２ミラーの角度調整を行う第２の手順と、光強度比が１より大きい所定値または最大値になったときに第２ミラーの角度を固定し、再度第１の手順に戻り、第１の手順と第２の手順を順番に繰り返し、光強度比が１より小さい場合に、光強度比が１になるように第２ミラーの角度調整を行う第１の手順と、光強度比が１になったときに第２ミラーの角度を固定し、光強度比が１より小さくなるように第１ミラーの角度調整を行う第２の手順と、光強度比が１より小さい所定値または最小値になったときに第１ミラーの角度を固定し、再度第１の手順に戻り、第１の手順と第２の手順を順番に繰り返す。 The fourth invention is the first invention or the second invention, the first mirror closer to the input port of the two MEMS mirrors, the closer to the output port and a second mirror, the first at the output port When the light intensity of the control light is P1, the light intensity of the second control light at the input port is P2, and the light intensity ratio is (P2 / P1), the light intensity ratio is greater than 1. The first procedure for adjusting the angle of the first mirror so that the ratio becomes 1, and the angle of the first mirror is fixed when the light intensity ratio becomes 1, so that the light intensity ratio becomes larger than 1. The second procedure for adjusting the angle of the second mirror, the angle of the second mirror is fixed when the light intensity ratio reaches a predetermined value or maximum value greater than 1, and the process returns to the first procedure again. Repeat steps 2 and 2 in order, and the light intensity ratio is less than 1. In addition, the first procedure for adjusting the angle of the second mirror so that the light intensity ratio becomes 1, and the angle of the second mirror is fixed when the light intensity ratio becomes 1, so that the light intensity ratio becomes 1 A second procedure for adjusting the angle of the first mirror so as to decrease, and the angle of the first mirror is fixed when the light intensity ratio becomes a predetermined value or a minimum value smaller than 1, and the procedure is changed to the first procedure again. Return and repeat the first procedure and the second procedure in order.

第５の発明は、第１の発明または第２の発明において、第１の制御光として信号光を用いる。 According to a fifth invention, in the first invention or the second invention , signal light is used as the first control light.

第６の発明は、複数の入出力ポート間で、任意の入力ポートから入力した信号光を２つのＭＥＭＳミラーによって連続的に反射させて任意の出力ポートに出力する２枚のＭＥＭＳミラーアレイを用いた光スイッチに対して、信号光の出力経路を決める２つのＭＥＭＳミラーの角度調整を行い、出力ポートにおける出力光強度を制御する光スイッチの光出力強度制御装置において、第１の制御光を入力ポートから入力し、２つのＭＥＭＳミラーを介して出力ポートへ出力してその光強度を検出する第１の手段と、第１の制御光の入力ポートにおける光強度と等しい光強度の第２の制御光を出力ポートから入力し、２つのＭＥＭＳミラーを介して入力ポートへ出力してその光強度を検出する第２の手段と、出力ポートにおける第１の制御光の光強度と入力ポートにおける第２の制御光の光強度の光強度比を検出し、該光強度比に応じて２つのＭＥＭＳミラーのうちずれが大きい方のＭＥＭＳミラーを判別し、該光強度比が１になるようにずれが大きい一方のＭＥＭＳミラーの角度調整を行う第１の手順と、次に光強度比が所定値になるように他方のＭＥＭＳミラーの角度調整を行う第２の手順とを１サイクルとし、第１の手順で光強度比が１に調整されるときに第１の制御光の光強度と前サイクルにおける第１の制御光の光強度との変化量が所定値以下になるまで第１の手順と第２の手順を順番に繰り返す制御手段とを備える。 The sixth invention uses two MEMS mirror arrays in which signal light input from an arbitrary input port is continuously reflected by two MEMS mirrors and output to an arbitrary output port between a plurality of input / output ports. In the optical output intensity control device of the optical switch that adjusts the angle of the two MEMS mirrors that determine the output path of the signal light and controls the output light intensity at the output port, the first control light is input. A first means for inputting from the port, outputting to the output port through two MEMS mirrors and detecting the light intensity, and a second control having a light intensity equal to the light intensity at the input port of the first control light A second means for inputting light from the output port, outputting the light to the input port via two MEMS mirrors, and detecting the light intensity; and the intensity of the first control light at the output port The light intensity ratio of the second control light at the input port is detected, and the MEMS mirror with the larger deviation between the two MEMS mirrors is determined according to the light intensity ratio, and the light intensity ratio is 1 A first procedure for adjusting the angle of one MEMS mirror having a large deviation so as to be 1 and a second procedure for adjusting the angle of the other MEMS mirror so that the light intensity ratio becomes a predetermined value are 1 Cycle, and when the light intensity ratio is adjusted to 1 in the first procedure, until the amount of change between the light intensity of the first control light and the light intensity of the first control light in the previous cycle becomes a predetermined value or less. Control means for repeating the first procedure and the second procedure in order.

第７の発明は、複数の入出力ポート間で、任意の入力ポートから入力した信号光を２つのＭＥＭＳミラーによって連続的に反射させて任意の出力ポートに出力する２枚のＭＥＭＳミラーアレイを用いた光スイッチに対して、信号光の出力経路を決める２つのＭＥＭＳミラーの角度調整を行い、出力ポートにおける出力光強度を制御する光スイッチの光出力強度制御装置において、第１の制御光を入力ポートから入力し、２つのＭＥＭＳミラーを介して出力ポートへ出力してその光強度を検出する第１の手段と、第１の制御光の入力ポートにおける光強度と等しい光強度の第２の制御光を出力ポートから入力し、２つのＭＥＭＳミラーを介して入力ポートへ出力してその光強度を検出する第２の手段と、出力ポートにおける第１の制御光の光強度と入力ポートにおける第２の制御光の光強度の少なくとも一方が検出されたときに、その光強度が大きくなる方向に２つのＭＥＭＳミラーの角度調整を行い、さらに、出力ポートにおける第１の制御光の光強度と入力ポートにおける第２の制御光の光強度の両方が検出されたときに、その光強度比を検出し、該光強度比に応じて２つのＭＥＭＳミラーのうちずれが大きい方のＭＥＭＳミラーを判別し、該光強度比が１になるようにずれが大きい一方のＭＥＭＳミラーの角度調整を行う第１の手順と、次に光強度比が所定値になるように他方のＭＥＭＳミラーの角度調整を行う第２の手順とを１サイクルとし、第１の手順で光強度比が１に調整されるときに第１の制御光の光強度と前サイクルにおける第１の制御光の光強度との変化量が所定値以下になるまで第１の手順と第２の手順を順番に繰り返す制御手段とを備える。
The seventh invention uses two MEMS mirror arrays in which signal light input from an arbitrary input port is continuously reflected by two MEMS mirrors and output to an arbitrary output port between a plurality of input / output ports. In the optical output intensity control device of the optical switch that adjusts the angle of the two MEMS mirrors that determine the output path of the signal light and controls the output light intensity at the output port, the first control light is input. A first means for inputting from the port, outputting to the output port through two MEMS mirrors and detecting the light intensity, and a second control having a light intensity equal to the light intensity at the input port of the first control light A second means for inputting light from the output port, outputting the light to the input port via two MEMS mirrors, and detecting the light intensity; and the intensity of the first control light at the output port When at least one of the light intensities of the second control light at the input port is detected, the angles of the two MEMS mirrors are adjusted in the direction in which the light intensity increases, and the first control light at the output port is further adjusted. When the light intensity of the second control light at the input port is detected, the light intensity ratio is detected, and the larger of the two MEMS mirrors is detected according to the light intensity ratio. A first procedure for discriminating the MEMS mirror and adjusting the angle of one MEMS mirror having a large deviation so that the light intensity ratio becomes 1, and then the other MEMS mirror so that the light intensity ratio becomes a predetermined value. The second procedure for adjusting the angle is defined as one cycle, and when the light intensity ratio is adjusted to 1 in the first procedure, the light intensity of the first control light and the light of the first control light in the previous cycle The amount of change from strength is predetermined And control means for repeatedly sequentially first procedure and second procedure until below.

第８の発明は、第６または第７の発明において、２つのＭＥＭＳミラーのうち入力ポートに近い方を第１ミラー、出力ポートに近い方を第２ミラーとし、出力ポートにおける第１の制御光の光強度をＰ１、入力ポートにおける第２の制御光の光強度をＰ２とし、その光強度比を（Ｐ１／Ｐ２）としたときに、制御手段は、光強度比が１より大きい場合に、光強度比が１になるように第２ミラーの角度調整を行う第１の手順と、光強度比が１になったときに第２ミラーの角度を固定し、光強度比が１より大きくなるように第１ミラーの角度調整を行う第２の手順と、光強度比が１より大きい所定値または最大値になったときに第１ミラーの角度を固定し、再度第１の手順に戻り、第１の手順と第２の手順を順番に繰り返し、光強度比が１より小さい場合に、光強度比が１になるように第１ミラーの角度調整を行う第１の手順と、光強度比が１になったときに第１ミラーの角度を固定し、光強度比が１より小さくなるように第２ミラーの角度調整を行う第２の手順と、光強度比が１より小さい所定値または最小値になったときに第２ミラーの角度を固定し、再度第１の手順に戻り、第１の手順と第２の手順を順番に繰り返す構成である。 According to an eighth invention, in the sixth or seventh invention , of the two MEMS mirrors, the one closer to the input port is the first mirror, the one closer to the output port is the second mirror, and the first control light at the output port When the light intensity ratio is P1, the light intensity of the second control light at the input port is P2, and the light intensity ratio is (P1 / P2), the control means A first procedure for adjusting the angle of the second mirror so that the light intensity ratio becomes 1, and when the light intensity ratio becomes 1, the angle of the second mirror is fixed and the light intensity ratio becomes larger than 1. In this way, the second procedure for adjusting the angle of the first mirror and the angle of the first mirror is fixed when the light intensity ratio reaches a predetermined value or maximum value greater than 1, and the process returns to the first procedure again. Repeat the first procedure and the second procedure in order, the light intensity ratio is less than 1 1st procedure for adjusting the angle of the first mirror so that the light intensity ratio becomes 1, and when the light intensity ratio becomes 1, the angle of the first mirror is fixed and the light intensity ratio becomes A second procedure for adjusting the angle of the second mirror so as to be smaller than 1, and the angle of the second mirror is fixed when the light intensity ratio becomes a predetermined value or a minimum value smaller than 1, and the first procedure is performed again. Returning to the procedure, the first procedure and the second procedure are repeated in order.

第９の発明は、第６または第７の発明において、２つのＭＥＭＳミラーのうち入力ポートに近い方を第１ミラー、出力ポートに近い方を第２ミラーとし、出力ポートにおける第１の制御光の光強度をＰ１、入力ポートにおける第２の制御光の光強度をＰ２とし、その光強度比を（Ｐ２／Ｐ１）としたときに、制御手段は、光強度比が１より大きい場合に、光強度比が１になるように第１ミラーの角度調整を行う第１の手順と、光強度比が１になったときに第１ミラーの角度を固定し、光強度比が１より大きくなるように第２ミラーの角度調整を行う第２の手順と、光強度比が１より大きい所定値または最大値になったときに第２ミラーの角度を固定し、再度第１の手順に戻り、第１の手順と第２の手順を順番に繰り返し、光強度比が１より小さい場合に、光強度比が１になるように第２ミラーの角度調整を行う第１の手順と、光強度比が１になったときに第２ミラーの角度を固定し、光強度比が１より小さくなるように第１ミラーの角度調整を行う第２の手順と、光強度比が１より小さい所定値または最小値になったときに第１ミラーの角度を固定し、再度第１の手順に戻り、第１の手順と第２の手順を順番に繰り返す構成である。 According to a ninth invention, in the sixth or seventh invention , of the two MEMS mirrors, the one near the input port is the first mirror, the one near the output port is the second mirror, and the first control light at the output port When the light intensity ratio is P1, the light intensity of the second control light at the input port is P2, and the light intensity ratio is (P2 / P1), the control means A first procedure for adjusting the angle of the first mirror so that the light intensity ratio becomes 1, and when the light intensity ratio becomes 1, the angle of the first mirror is fixed and the light intensity ratio becomes larger than 1. The second procedure for adjusting the angle of the second mirror as described above, and the angle of the second mirror is fixed when the light intensity ratio reaches a predetermined value or maximum value greater than 1, and the process returns to the first procedure again. Repeat the first procedure and the second procedure in order, the light intensity ratio is less than 1 1st procedure for adjusting the angle of the second mirror so that the light intensity ratio becomes 1, and when the light intensity ratio becomes 1, the angle of the second mirror is fixed and the light intensity ratio becomes A second procedure for adjusting the angle of the first mirror so as to be smaller than 1, and the angle of the first mirror is fixed when the light intensity ratio becomes a predetermined value or a minimum value smaller than 1, and the first procedure is performed again. Returning to the procedure, the first procedure and the second procedure are repeated in order.

第１０の発明は、第６または第７の発明において、第１の手段は、第１の制御光として信号光を用い、出力ポートにおける信号光の光強度を検出する構成である。 According to a tenth aspect, in the sixth or seventh aspect , the first means uses the signal light as the first control light and detects the light intensity of the signal light at the output port.

第１１の発明は、第６または第７の発明において、第１の手段および第２の手段は、第１の制御光を出力する制御光用光源と、第２の制御光を出力する制御光用光源を共有し、１つの制御光用光源から出力される制御光を光カプラで２分岐して入力ポートおよび出力ポートからそれぞれ入力する構成である。 In an eleventh aspect based on the sixth or seventh aspect , the first means and the second means are a control light source for outputting the first control light and a control light for outputting the second control light. The control light output from one control light source is branched into two by an optical coupler and input from an input port and an output port, respectively.

第１２の発明は、第６または第７の発明において、第１の手段および第２の手段は、出力ポートにおける第１の制御光と、入力ポートにおける第２の制御光を切り替える光スイッチと、光スイッチで切り替えられた各制御光の光強度を検出する１つの受光器とを含み、制御手段は、光強度比に基づく制御に応じて光スイッチの切り替えタイミングを制御する構成である。 In a twelfth aspect based on the sixth or seventh aspect , the first means and the second means are: an optical switch that switches between the first control light at the output port and the second control light at the input port; And a single light receiver that detects the light intensity of each control light switched by the optical switch, and the control means is configured to control the switching timing of the optical switch according to the control based on the light intensity ratio.

第１３の発明は、第６または第７の発明において、第１の手段は、信号光の波長と異なる波長の第１の制御光を出力する制御光用光源を備え、信号光と波長分波して第１の制御光の光強度を検出する構成である。
In a thirteenth aspect based on the sixth or seventh aspect , the first means includes a light source for control light that outputs first control light having a wavelength different from the wavelength of the signal light, and the signal light and the wavelength demultiplexing Thus, the light intensity of the first control light is detected.

本発明は、２方向の制御光の出力光強度を検出し、その光強度比からＭＥＭＳ光スイッチの２つのミラーにおける角度が大きくずれている方のミラーを判別する。そして、最初にそのミラーの角度を調整し、次に他方のミラーの角度を調整し、これを繰り返すことにより、２つのミラーの順序を考慮せずに調整する場合に比べて効率よく角度調整を行い、短時間で出力光強度を最大かつ安定状態になるように制御することができる。 The present invention detects the output light intensity of the control light in two directions, and discriminates the mirror whose angle between the two mirrors of the MEMS optical switch is greatly deviated from the light intensity ratio. Then, the angle of the mirror is adjusted first, and then the angle of the other mirror is adjusted. By repeating this, the angle can be adjusted more efficiently than when adjusting without considering the order of the two mirrors. And the output light intensity can be controlled to be maximum and stable in a short time.

また、本発明は、２方向の制御光の一方の出力光強度が検出される場合に、その光強度を用いて光スイッチの出力光強度が大きくなるように２つのミラーの角度調整を行うことにより、２方向の制御光の出力光強度が得られる状態にもっていくことができる。さらに、２方向の制御光の出力光強度が得られたときには、その光強度比を用いた上記の制御を行うことにより、２つのミラーの角度調整を効率よく行い、短時間で出力光強度を最大かつ安定状態になるように制御することができる。 Further, in the present invention, when one output light intensity of control light in two directions is detected, the angle of the two mirrors is adjusted so that the output light intensity of the optical switch is increased using the light intensity. As a result, the output light intensity of the control light in two directions can be obtained. Furthermore, when the output light intensity of the control light in two directions is obtained, the above control using the light intensity ratio is performed to efficiently adjust the angle of the two mirrors, and the output light intensity can be reduced in a short time. It can be controlled to reach a maximum and stable state.

（光スイッチの出力光強度制御装置の第１の実施形態）
図１は、本発明の光スイッチの出力光強度制御装置の第１の実施形態を示す。
図において、信号光は光サーキュレータ１４−１を介してＭＥＭＳ光スイッチ１０の所定の入力ポートに入力され、所定の出力ポートから出力されて光サーキュレータ１４−２および光フィルタ１７を介して出力される。制御光１用光源１１−１から出力される制御光１は、光減衰器１２−１，光カプラ１３−１，光サーキュレータ１４−１を介してＭＥＭＳ光スイッチ１０の所定の入力ポートに入力され、所定の出力ポートから出力されて光カプラ１３−２，光フィルタ１６を介して制御光１用受光器１５−１に受光される。制御光２用光源１１−２から出力される制御光２は、光減衰器１２−２，光サーキュレータ１４−２を介してＭＥＭＳ光スイッチ１０の所定の出力ポートに入力され、所定の入力ポートから出力されて光サーキュレータ１４−１を介して制御光２用受光器１５−２に受光される。制御回路１８は、ＭＥＭＳ光スイッチ１０の接続する入出力ポートに応じたミラーの角度を設定するとともに、制御光１用受光器１５−１および制御光２用受光器１５−２で検出される各制御光の光強度に応じて、出力ポートにおける信号光の出力光強度が最大になるように各ミラーの角度調整を行う。 (First embodiment of output light intensity control device of optical switch)
FIG. 1 shows a first embodiment of an output light intensity control device for an optical switch of the present invention.
In the figure, signal light is input to a predetermined input port of the MEMS optical switch 10 via an optical circulator 14-1, output from a predetermined output port, and output via an optical circulator 14-2 and an optical filter 17. . The control light 1 output from the control light 1 light source 11-1 is input to a predetermined input port of the MEMS optical switch 10 via the optical attenuator 12-1, the optical coupler 13-1, and the optical circulator 14-1. The light is output from a predetermined output port and received by the control light 1 light receiver 15-1 through the optical coupler 13-2 and the optical filter 16. The control light 2 output from the light source 11-2 for the control light 2 is input to a predetermined output port of the MEMS optical switch 10 via the optical attenuator 12-2 and the optical circulator 14-2, and from the predetermined input port. The light is output and received by the control light 2 light receiver 15-2 via the optical circulator 14-1. The control circuit 18 sets the angle of the mirror according to the input / output port to which the MEMS optical switch 10 is connected, and detects each of the light detected by the control light 1 light receiver 15-1 and the control light 2 light receiver 15-2. The angle of each mirror is adjusted so that the output light intensity of the signal light at the output port is maximized according to the light intensity of the control light.

ここでは、信号光と制御光１の波長が異なるものとし、光フィルタ１６はＭＥＭＳ光スイッチ１０の出力光から制御光１のみを分波して制御光１用受光器１５−１に受光させる。また、光フィルタ１７は、ＭＥＭＳ光スイッチ１０の出力光から信号光のみを分波して出力する。さらに、信号光と制御光１の波長が異なる場合には、光カプラ１３−２と光サーキュレータ１４−２の位置を入れ替え、光カプラ１３−２，光フィルタ１６，１７を１つのＷＤＭカプラに置き換えることもできる。ただし、同方向に伝搬する信号光と制御光１が分離できれば、必ずしも波長を相違させる必要はない。また、制御光１の代わりに信号光をモニタする構成としてもよい。 Here, it is assumed that the wavelengths of the signal light and the control light 1 are different, and the optical filter 16 demultiplexes only the control light 1 from the output light of the MEMS optical switch 10 and causes the control light 1 light receiver 15-1 to receive it. The optical filter 17 demultiplexes and outputs only the signal light from the output light of the MEMS optical switch 10. Furthermore, when the wavelengths of the signal light and the control light 1 are different, the positions of the optical coupler 13-2 and the optical circulator 14-2 are switched, and the optical coupler 13-2 and the optical filters 16 and 17 are replaced with one WDM coupler. You can also. However, if the signal light propagating in the same direction and the control light 1 can be separated, the wavelengths do not necessarily have to be different. Further, the signal light may be monitored instead of the control light 1.

一方、制御光２は、光サーキュレータ１４−２，１４−１を介して、信号光および制御光１と逆方向に伝搬する光であり、波長は任意である。なお、制御光２をＭＥＭＳ光スイッチ１０に入力するための光サーキュレータ１４−２に代えて方向性を有する光カプラを用いてもよく、この場合にはこの光カプラを介して制御光２用光源１１−１の方向に伝搬してくる信号光および制御光１を遮断する光アイソレータまたは光フィルタを用いる。また、ＭＥＭＳ光スイッチ１０の入力側の光サーキュレータ１４−１についても、方向性を有する光カプラに代えることができる。 On the other hand, the control light 2 is light that propagates in the opposite direction to the signal light and the control light 1 via the optical circulators 14-2 and 14-1, and the wavelength is arbitrary. In addition, instead of the optical circulator 14-2 for inputting the control light 2 to the MEMS optical switch 10, a directional optical coupler may be used. In this case, the light source for the control light 2 is passed through this optical coupler. An optical isolator or an optical filter that blocks the signal light propagating in the direction of 11-1 and the control light 1 is used. The optical circulator 14-1 on the input side of the MEMS optical switch 10 can also be replaced with a directional optical coupler.

また、光減衰器１２−１，１２−２は、制御光１用光源１１−１から出力される制御光１の光強度と、制御光２用光源１１−２から出力される制御光の光強度が等しくなるように調整するものであり、各光源の出力光強度が等しくなるように調整されている場合には光減衰器を省くことができる。 The optical attenuators 12-1 and 12-2 are the intensity of the control light 1 output from the control light 1 light source 11-1 and the light of the control light output from the control light 2 light source 11-2. The light attenuators can be omitted when the light intensity is adjusted so that the output light intensities of the light sources are equal.

（光スイッチの出力光強度制御方法の第１の実施形態）
図２は、本発明の光スイッチの出力光強度制御方法の第１の実施形態を示す。本制御方法は、図１に示す制御回路１８におけるＭＥＭＳ光スイッチ１０のミラーの角度調整の処理手順になる。 (First embodiment of output light intensity control method of optical switch)
FIG. 2 shows a first embodiment of the output light intensity control method of the optical switch of the present invention. This control method is a procedure for adjusting the angle of the mirror of the MEMS optical switch 10 in the control circuit 18 shown in FIG.

制御回路１８は、ＭＥＭＳ光スイッチ１０の接続する入出力ポートに応じたミラー１，ミラー２の角度を設定し、制御光１用受光器１５−１および制御光２用受光器１５−２で検出される制御光１の光強度Ｐ１および制御光２の光強度Ｐ２を検出し、その光強度比として（Ｐ１／Ｐ２）を算出する（Ｓ１）。なお、ミラー１は入力ポート側、ミラー２は出力ポート側である。 The control circuit 18 sets the angles of the mirror 1 and the mirror 2 according to the input / output port to which the MEMS optical switch 10 is connected, and is detected by the control light 1 light receiver 15-1 and the control light 2 light receiver 15-2. The light intensity P1 of the control light 1 and the light intensity P2 of the control light 2 are detected, and (P1 / P2) is calculated as the light intensity ratio (S1). The mirror 1 is on the input port side, and the mirror 2 is on the output port side.

次に、光強度比（Ｐ１／Ｐ２）が１より大きいか小さいかを判定し、１より大きい場合には、光強度比（Ｐ１／Ｐ２）が１になるようにミラー２の角度調整を行う（Ｓ２，Ｓ３，Ｓ４，Ｓ５）。光強度比（Ｐ１／Ｐ２）が１になったときにミラー２の角度を固定し、そのときの制御光１の光強度Ｐ１を保持し、前サイクルのＳ４で光強度比（Ｐ１／Ｐ２）が１になったときの制御光１の光強度Ｐ１に対する変化量を算出する（Ｓ６）。なお、初回の変化量は所定値Ａより大きい値とする。この変化量と所定値Ａとを比較し、変化量が所定値Ａより大きい場合には、光強度比（Ｐ１／Ｐ２）が１より大きい所定値Ｂまたは最大値を超えるまでミラー１の角度調整を行う（Ｓ７，Ｓ８，Ｓ９，Ｓ10）。光強度比（Ｐ１／Ｐ２）が所定値Ｂまたは最大値を超えたときにミラー１の角度を固定し、Ｓ１またはＳ３の処理に戻る。以上が１サイクルであり、以下同様にミラー２、ミラー１の順番で角度調整を行う。 Next, it is determined whether the light intensity ratio (P1 / P2) is larger or smaller than 1. If it is larger than 1, the angle of the mirror 2 is adjusted so that the light intensity ratio (P1 / P2) becomes 1. (S2, S3, S4, S5). When the light intensity ratio (P1 / P2) becomes 1, the angle of the mirror 2 is fixed, the light intensity P1 of the control light 1 at that time is held, and the light intensity ratio (P1 / P2) in S4 of the previous cycle The amount of change with respect to the light intensity P1 of the control light 1 when becomes 1 is calculated (S6). The initial change amount is set to a value larger than the predetermined value A. The amount of change is compared with a predetermined value A. If the amount of change is larger than the predetermined value A, the angle of the mirror 1 is adjusted until the light intensity ratio (P1 / P2) exceeds a predetermined value B greater than 1 or a maximum value. (S7, S8, S9, S10). When the light intensity ratio (P1 / P2) exceeds the predetermined value B or the maximum value, the angle of the mirror 1 is fixed, and the process returns to S1 or S3. The above is one cycle, and the angle adjustment is performed in the order of the mirror 2 and the mirror 1 in the same manner.

Ｓ６において、ミラー２の角度調整により光強度比（Ｐ１／Ｐ２）が１になったときの制御光１の光強度Ｐ１と、前サイクルにおける光強度Ｐ１との変化量が所定値Ａより大きいうちは、以上の処理を繰り返す。一方、ミラー２の角度調整により光強度比（Ｐ１／Ｐ２）が１になり、かつ前サイクルにおける光強度Ｐ１との変化量が所定値Ａより小さくなった場合には、ミラー１，２の角度調整が十分に収束したものと判断し、終了する。 In S6, the amount of change between the light intensity P1 of the control light 1 when the light intensity ratio (P1 / P2) becomes 1 by adjusting the angle of the mirror 2 and the light intensity P1 in the previous cycle is larger than the predetermined value A. Repeats the above process. On the other hand, when the light intensity ratio (P1 / P2) becomes 1 by adjusting the angle of the mirror 2 and the amount of change from the light intensity P1 in the previous cycle is smaller than the predetermined value A, the angles of the mirrors 1 and 2 It is determined that the adjustment has sufficiently converged, and the process ends.

また、光強度比（Ｐ１／Ｐ２）が１より小さい場合には、光強度比（Ｐ１／Ｐ２）が１になるようにミラー１の角度調整を行う（Ｓ２，Ｓ11，Ｓ12，Ｓ13）。光強度比（Ｐ１／Ｐ２）が１になったときにミラー１の角度を固定し、そのときの制御光１の光強度Ｐ１を保持し、前サイクルのＳ12で光強度比（Ｐ１／Ｐ２）が１になったときの制御光１の光強度Ｐ１に対する変化量を算出する（Ｓ14）。なお、初回の変化量は所定値Ａにより大きい値とする。この変化量と所定値Ａとを比較し、変化量が所定値Ａより大きい場合には、光強度比（Ｐ１／Ｐ２）が１より小さい所定値Ｃまたは最小値を下回るまでミラー２の角度調整を行う（Ｓ15，Ｓ16，Ｓ17，Ｓ18）。光強度比（Ｐ１／Ｐ２）が所定値Ｃまたは最小値を下回ったときにミラー２の角度を固定し、Ｓ１またはＳ11の処理に戻る。以上が１サイクルであり、以下同様にミラー１、ミラー２の順番で角度調整を行う。 If the light intensity ratio (P1 / P2) is smaller than 1, the angle of the mirror 1 is adjusted so that the light intensity ratio (P1 / P2) becomes 1 (S2, S11, S12, S13). When the light intensity ratio (P1 / P2) becomes 1, the angle of the mirror 1 is fixed, the light intensity P1 of the control light 1 at that time is held, and the light intensity ratio (P1 / P2) in S12 of the previous cycle The amount of change with respect to the light intensity P1 of the control light 1 when becomes 1 is calculated (S14). The initial change amount is set to a value larger than the predetermined value A. The amount of change is compared with a predetermined value A. If the amount of change is larger than the predetermined value A, the angle adjustment of the mirror 2 is performed until the light intensity ratio (P1 / P2) falls below a predetermined value C or a minimum value smaller than 1. (S15, S16, S17, S18). When the light intensity ratio (P1 / P2) falls below the predetermined value C or the minimum value, the angle of the mirror 2 is fixed, and the process returns to S1 or S11. The above is one cycle, and the angle adjustment is performed in the order of the mirror 1 and the mirror 2 in the same manner.

Ｓ14において、ミラー１の角度調整により光強度比（Ｐ１／Ｐ２）が１になったときの制御光１の光強度Ｐ１と、前サイクルの光強度Ｐ１との変化量が所定値Ａより大きいうちは、以上の処理を繰り返す。一方、ミラー１の角度調整により光強度比（Ｐ１／Ｐ２）が１になり、かつ前サイクルの光強度Ｐ１との変化量が所定値Ａより小さくなった場合には、ミラー１，２の角度調整が十分に収束したものと判断し、終了する。 In S14, when the amount of change between the light intensity P1 of the control light 1 when the light intensity ratio (P1 / P2) becomes 1 by adjusting the angle of the mirror 1 and the light intensity P1 of the previous cycle is larger than the predetermined value A. Repeats the above process. On the other hand, when the light intensity ratio (P1 / P2) becomes 1 by adjusting the angle of the mirror 1 and the amount of change from the light intensity P1 in the previous cycle is smaller than the predetermined value A, the angles of the mirrors 1 and 2 It is determined that the adjustment has sufficiently converged, and the process ends.

なお、以上示した制御例は、制御光１の光強度Ｐ１と、制御光２の光強度Ｐ２との光強度比を（Ｐ１／Ｐ２）としたものであるが、その光強度比を（Ｐ２／Ｐ１）とした場合には、図２に示す処理手順に対して逆のパターンとなる。その例を図３に示すが、制御原理は同じである。 In the control example shown above, the light intensity ratio between the light intensity P1 of the control light 1 and the light intensity P2 of the control light 2 is (P1 / P2). The light intensity ratio is (P2). / P1), the pattern is the reverse of the processing procedure shown in FIG. An example is shown in FIG. 3, but the control principle is the same.

図４は、本発明における光スイッチの出力光強度の制御原理を示す。ここでは、図８に示すＭＥＭＳ光スイッチの２つのコリメータアレイ６，７およびミラーアレイ８，９のうち、所定の入出力ポートに対応する１組のコリメータ３，４と、１組のミラー１，２のみを示す。入力ポート５ａから入力する信号光は、ＭＥＭＳ光スイッチ１０のコリメータ３、ミラー１，２およびコリメータ４を介して対応する出力ポート５ｂに出力される。ミラー１，２の角度ずれをθ₁，θ₂とし、コリメータ３とミラー１との距離をｘ₁、ミラー１，２間の距離をｘ₂、ミラー２とコリメータ４との距離をｘ₃とする。 FIG. 4 shows the control principle of the output light intensity of the optical switch in the present invention. Here, out of the two collimator arrays 6 and 7 and the mirror arrays 8 and 9 of the MEMS optical switch shown in FIG. 8, one set of collimators 3 and 4 corresponding to a predetermined input / output port, and one set of mirrors 1 and 1. Only 2 are shown. The signal light input from the input port 5 a is output to the corresponding output port 5 b via the collimator 3, the mirrors 1 and 2, and the collimator 4 of the MEMS optical switch 10. The angle deviation between the mirrors 1 and ₂ is θ ₁ and θ ₂ , the distance between the collimator 3 and the mirror 1 is x ₁ , the distance between the mirrors 1 and ₂ is x ₂ , and the distance between the mirror 2 and the collimator 4 is x ₃ . To do.

ＭＥＭＳ光スイッチにおける信号光の出力光強度は、出力側のコリメータ４における入射位置ずれＬ₁と入射角度ずれ２(θ₁−θ₂)に依存する。信号光と同方向に入力される制御光１が出力されるコリメータ４における入射位置ずれＬ₁は、
Ｌ₁＝ｘ₂tan(２θ₁)＋ｘ₃tan(2(θ₁−θ₂))
となり、ミラー１の角度ずれθ₁に大きく依存する。一方、信号光と逆方向に入力される制御光２が出力されるコリメータ３における入射位置ずれＬ₂は、
Ｌ₂＝ｘ₂tan(-2θ₂)＋ｘ₁tan(2(θ₁−θ₂))
となり、ミラー２の角度ずれθ₂に大きく依存する。 The output light intensity of the signal light in the MEMS optical switch depends on the incident position deviation L ₁ and the incident angle deviation 2 (θ ₁ −θ ₂ ) in the collimator 4 on the output side. The incident position deviation L ₁ in the collimator 4 from which the control light 1 input in the same direction as the signal light is output is
L ₁ = x ₂ tan (2θ ₁ ) + x ₃ tan (2 (θ ₁ −θ ₂ ))
And greatly depends on the angular deviation θ ₁ of the mirror 1. On the other hand, the incident position deviation L ₂ in the collimator 3 from which the control light 2 input in the direction opposite to the signal light is output is
L ₂ = x ₂ tan (-2θ ₂ ) + x ₁ tan (2 (θ ₁ −θ ₂ ))
Therefore, it greatly depends on the angular deviation θ ₂ of the mirror 2.

一方、制御光１の入射角度ずれと制御光２の入射角度ずれはともに2(θ₁−θ₂) となり、入射角度ずれによる制御光１と制御光２の出力強度差は生じない。したがって、制御光１と制御光２の出力強度差は、入射位置ずれＬ₁，Ｌ₂の差によって生じることになる。 On the other hand, both the incident angle deviation of the control light 1 and the incident angle deviation of the control light 2 are 2 (θ ₁ −θ ₂ ), and there is no difference in output intensity between the control light 1 and the control light 2 due to the incident angle deviation. Therefore, the difference in output intensity between the control light 1 and the control light 2 is caused by the difference between the incident position deviations L ₁ and L ₂ .

ここで、制御光１と制御光２の入力光強度が等しく、制御光１と制御光２の出力光強度をＰ１，Ｐ２とする。このとき、制御光１と制御光２の出力光強度の光強度比（Ｐ１／Ｐ２）が１より大きい場合（Ｐ１＞Ｐ２）は、Ｌ₁＜Ｌ₂と見なすことができ、入射位置ずれＬ₂に大きく影響を与えているミラー２の角度ずれθ₂がミラー１の角度ずれθ₁に比べて大きいと判別できる。一方、光強度比（Ｐ１／Ｐ２）が１より小さい場合（Ｐ１＜Ｐ２）は、Ｌ₁＞Ｌ₂と見なすことができ、入射位置ずれＬ₁に大きく影響を与えているミラー１の角度ずれθ₁がミラー２の角度ずれθ₂に比べて大きいと判別できる。 Here, the input light intensities of the control light 1 and the control light 2 are equal, and the output light intensities of the control light 1 and the control light 2 are P1 and P2. At this time, when the light intensity ratio (P1 / P2) of the output light intensity of the control light 1 and the control light 2 is larger than 1 (P1> P2), it can be considered that L ₁ <L _2, and the incident position deviation L _It can be determined that the angular deviation θ ₂ of the mirror ₂ that greatly affects ₂ is larger than the angular deviation θ ₁ of the mirror 1. On the other hand, when the light intensity ratio (P1 / P2) is smaller than 1 (P1 <P2), it can be considered that L ₁ > L _2, and the angular deviation of the mirror 1 that greatly affects the incident position deviation L _1. It can be determined that θ ₁ is larger than the angular deviation θ ₂ of the mirror 2.

本発明はこの関係に基づき、角度が大きくずれている方のミラーを判別し、最初にそのミラーの角度を調整し、次に他方のミラーの角度を調整し、これを繰り返すことにより、２つのミラーの順序を考慮せずに調整する場合に比べて効率よく角度調整を行い、短時間で出力光強度を最大かつ安定状態になるように制御することができる。 Based on this relationship, the present invention discriminates the mirror whose angle is greatly shifted, first adjusts the angle of the mirror, then adjusts the angle of the other mirror, and repeats this to The angle can be adjusted more efficiently than in the case of adjusting without considering the order of the mirrors, and the output light intensity can be controlled to the maximum and stable state in a short time.

（光スイッチの出力光強度制御装置の第２の実施形態）
図５は、本発明の光スイッチの出力光強度制御装置の第２の実施形態を示す。
図において、本実施形態は、図１に示す第１の実施形態の構成における制御光１用光源１１−１および制御光２用光源１１−２を１つの制御光用光源１１とし、光カプラ１９で２分岐して制御光１および制御光２としてＭＥＭＳ光スイッチ１０に双方向から入力する。これにより、光カプラ１０の分岐比が１：１であれば、制御光１および制御光２の入力光強度は等しくなり、第１の実施形態で用いた光減衰器１２−１，１２−２は不要となる。その他の構成は第１の実施形態と同様である。 (Second embodiment of output light intensity control device of optical switch)
FIG. 5 shows a second embodiment of the output light intensity control device of the optical switch of the present invention.
In the figure, in the present embodiment, the control light 1 light source 11-1 and the control light 2 light source 11-2 in the configuration of the first embodiment shown in FIG. Are branched into two and input to the MEMS optical switch 10 as control light 1 and control light 2 from both directions. Thereby, if the branching ratio of the optical coupler 10 is 1: 1, the input light intensities of the control light 1 and the control light 2 are equal, and the optical attenuators 12-1 and 12-2 used in the first embodiment are used. Is no longer necessary. Other configurations are the same as those of the first embodiment.

（光スイッチの出力光強度制御装置の第３の実施形態）
図６は、本発明の光スイッチの出力光強度制御装置の第３の実施形態を示す。
図において、本実施形態は、図５に示す第２の実施形態の構成における制御光１用受光器１５−１および制御光２用受光器１５−２を１つの制御光用受光器１５とし、光カプラ１３−２および光フィルタ１６を介して入力する制御光１と、光サーキュレータ１４−１を介して入力する制御光２を光スイッチ２０で切り替えて制御光用受光器１５に入力する。光スイッチ２０は、制御回路１８からの同期制御により、例えば図２に示すＳ１，Ｓ３，Ｓ８，Ｓ11，Ｓ16の光強度検出処理で、制御光１と制御光２を切り替えてそれぞれの光強度を検出するようにする。その他の構成は第２の実施形態と同様である。なお、本実施形態の光スイッチ２０を用いた構成は、第１の実施形態にも適用することができる。 (Third embodiment of output light intensity control device of optical switch)
FIG. 6 shows a third embodiment of the output light intensity control device of the optical switch of the present invention.
In the figure, in this embodiment, the control light 1 light receiver 15-1 and the control light 2 light receiver 15-2 in the configuration of the second embodiment shown in FIG. The control light 1 input via the optical coupler 13-2 and the optical filter 16 and the control light 2 input via the optical circulator 14-1 are switched by the optical switch 20 and input to the control light receiver 15. The optical switch 20 switches the control light 1 and the control light 2 in the light intensity detection processing of S1, S3, S8, S11, and S16 shown in FIG. Try to detect. Other configurations are the same as those of the second embodiment. Note that the configuration using the optical switch 20 of the present embodiment can also be applied to the first embodiment.

（光スイッチの出力光強度制御方法の第２の実施形態）
図７は、本発明の光スイッチの出力光強度制御方法の第２の実施形態を示す。本制御方法は、図１，図５，図６に示す制御回路１８におけるＭＥＭＳ光スイッチ１０のミラーの角度調整の処理手順になる。 (Second embodiment of output light intensity control method of optical switch)
FIG. 7 shows a second embodiment of the output light intensity control method of the optical switch of the present invention. This control method is a procedure for adjusting the angle of the mirror of the MEMS optical switch 10 in the control circuit 18 shown in FIGS.

制御回路１８は、ＭＥＭＳ光スイッチ１０の接続する入出力ポートに応じたミラー１，ミラー２の角度を初期設定し、制御光１の光強度Ｐ１および制御光２の光強度Ｐ２を検出する（Ｓ21，Ｓ22）。このとき、光強度Ｐ１，Ｐ２がともに検出されない場合には、ミラー１，ミラー２の角度を再設定し、再度制御光１の光強度Ｐ１および制御光２の光強度Ｐ２を検出する（Ｓ23，Ｓ24，Ｓ22）。光強度Ｐ１，Ｐ２が同時に検出された場合には、図２に示す光強度比（Ｐ１／Ｐ２）または図３に示す光強度比（Ｐ２／Ｐ１）に応じた制御を行う（Ｓ25，Ｓ26）。 The control circuit 18 initializes the angles of the mirror 1 and the mirror 2 corresponding to the input / output port to which the MEMS optical switch 10 is connected, and detects the light intensity P1 of the control light 1 and the light intensity P2 of the control light 2 (S21). , S22). At this time, when the light intensities P1 and P2 are not detected, the angles of the mirror 1 and the mirror 2 are reset, and the light intensity P1 of the control light 1 and the light intensity P2 of the control light 2 are detected again (S23, S24, S22). When the light intensities P1 and P2 are detected simultaneously, control is performed according to the light intensity ratio (P1 / P2) shown in FIG. 2 or the light intensity ratio (P2 / P1) shown in FIG. 3 (S25, S26). .

一方、制御光１の光強度Ｐ１または制御光２の光強度Ｐ２のいずれか一方が先に検出された場合には、その光強度に基づいて、その光強度が大きくなる方向にミラー１，２の角度を適宜調整する（Ｓ25，Ｓ27，Ｓ28）。ここでミラー１，２の角度調整を終了してもよいが、さらに制御光１の光強度Ｐ１および制御光２の光強度Ｐ２を検出し（Ｓ22）、光強度Ｐ１，Ｐ２が同時に検出されるまでＳ27，Ｓ28の処理を繰り返してもよい。そして、光強度Ｐ１，Ｐ２が同時に検出されるようになったときに、図２に示す光強度比（Ｐ１／Ｐ２）または図３に示す光強度比（Ｐ２／Ｐ１）に応じた制御を行う（Ｓ25，Ｓ26）。 On the other hand, when either the light intensity P1 of the control light 1 or the light intensity P2 of the control light 2 is detected first, the mirrors 1, 2 are increased in the direction in which the light intensity increases based on the light intensity. Are appropriately adjusted (S25, S27, S28). Here, the angle adjustment of the mirrors 1 and 2 may be terminated, but the light intensity P1 of the control light 1 and the light intensity P2 of the control light 2 are further detected (S22), and the light intensities P1 and P2 are detected simultaneously. You may repeat the process of S27 and S28. Then, when the light intensities P1 and P2 are detected simultaneously, control is performed according to the light intensity ratio (P1 / P2) shown in FIG. 2 or the light intensity ratio (P2 / P1) shown in FIG. (S25, S26).

また、図２または図３に示すフローチャートは、制御光１の光強度Ｐ１または制御光２の光強度Ｐ２のいずれか一方が先に検出された場合にも対応可能である。例えば図２におてい、光強度Ｐ１のみが検出された場合（Ｐ２＝０）には、（Ｐ１／Ｐ２）は無限大になるので、（Ｐ１／Ｐ２）＞１と判断され、ミラー２の角度調整が行われる。一方、光強度Ｐ２のみが検出された場合（Ｐ１＝０）には、（Ｐ１／Ｐ２）は０であるので、（Ｐ１／Ｐ２）＜１と判断され、ミラー１の角度調整が行われる。 The flowchart shown in FIG. 2 or FIG. 3 is also applicable to the case where either the light intensity P1 of the control light 1 or the light intensity P2 of the control light 2 is detected first. For example, in FIG. 2, when only the light intensity P1 is detected (P2 = 0), (P1 / P2) becomes infinite, so it is determined that (P1 / P2)> 1, and the mirror 2 Angle adjustment is performed. On the other hand, when only the light intensity P2 is detected (P1 = 0), since (P1 / P2) is 0, it is determined that (P1 / P2) <1, and the angle adjustment of the mirror 1 is performed.

本発明の光スイッチの出力光強度制御装置の第１の実施形態を示す図。The figure which shows 1st Embodiment of the output light intensity control apparatus of the optical switch of this invention. 本発明の光スイッチの出力光強度制御方法の第１の実施形態を示すフローチャート。The flowchart which shows 1st Embodiment of the output light intensity control method of the optical switch of this invention. 本発明の光スイッチの出力光強度制御方法の第１の実施形態の変形例を示すフローチャート。The flowchart which shows the modification of 1st Embodiment of the output light intensity control method of the optical switch of this invention. 本発明の光スイッチの出力光強度の制御原理を説明する図。The figure explaining the control principle of the output light intensity of the optical switch of this invention. 本発明の光スイッチの出力光強度制御装置の第２の実施形態を示す図。The figure which shows 2nd Embodiment of the output light intensity control apparatus of the optical switch of this invention. 本発明の光スイッチの出力光強度制御装置の第３の実施形態を示す図。The figure which shows 3rd Embodiment of the output light intensity control apparatus of the optical switch of this invention. 本発明の光スイッチの出力光強度制御方法の第２の実施形態を示すフローチャート。The flowchart which shows 2nd Embodiment of the output light intensity control method of the optical switch of this invention. ＭＥＭＳ光スイッチの構成例を示す図。The figure which shows the structural example of a MEMS optical switch. 従来の角度制御例を示す図。The figure which shows the example of the conventional angle control.

Explanation of symbols

１，２ミラー
３，４コリメータ
５ａ入力ポート
５ｂ出力ポート
６，７コリメータアレイ
８，９ＭＥＭＳミラーアレイ
１０ＭＥＭＳ光スイッチ
１１−１制御光１用光源
１１−２制御光２用光源
１２光減衰器
１３，１９光カプラ
１４光サーキュレータ
１５−１制御光１用受光器
１５−２制御光２用受光器
１６，１７光フィルタ
１８制御回路
２０光スイッチ
DESCRIPTION OF SYMBOLS 1, 2 Mirror 3, 4 Collimator 5a Input port 5b Output port 6,7 Collimator array 8,9 MEMS mirror array 10 MEMS optical switch 11-1 Light source for control light 1 11-2 Light source for control light 2 12 Optical attenuator 13 , 19 Optical coupler 14 Optical circulator 15-1 Light receiver for control light 1 15-2 Light receiver for control light 2 16, 17 Optical filter 18 Control circuit 20 Optical switch

Claims

For an optical switch using two MEMS mirror arrays in which signal light input from an arbitrary input port between a plurality of input / output ports is continuously reflected by two MEMS mirrors and output to an arbitrary output port In the optical output intensity control method of the optical switch that adjusts the angle of the two MEMS mirrors that determine the output path of the signal light and controls the output light intensity at the output port,
A first control light is input from the input port, output to the output port via the two MEMS mirrors, and its light intensity is detected.
Second control light having a light intensity equal to the light intensity at the input port of the first control light is input from the output port and output to the input port via the two MEMS mirrors to detect the light intensity. And
A light intensity ratio between the light intensity of the first control light at the output port and the light intensity of the second control light at the input port is detected, and a deviation between the two MEMS mirrors is detected according to the light intensity ratio. The first procedure is to determine the larger MEMS mirror and adjust the angle of one MEMS mirror with a large deviation so that the light intensity ratio is 1, and then to the other so that the light intensity ratio becomes a predetermined value. The second procedure for adjusting the angle of the MEMS mirror is defined as one cycle, and when the light intensity ratio is adjusted to 1 in the first procedure, the light intensity of the first control light and the first procedure in the previous cycle. The light output intensity control method for an optical switch, wherein the first procedure and the second procedure are repeated in order until the amount of change in the light intensity of the control light becomes a predetermined value or less.

For an optical switch using two MEMS mirror arrays in which signal light input from an arbitrary input port between a plurality of input / output ports is continuously reflected by two MEMS mirrors and output to an arbitrary output port In the optical output intensity control method of the optical switch that adjusts the angle of the two MEMS mirrors that determine the output path of the signal light and controls the output light intensity at the output port,
A first control light is input from the input port, output to the output port via the two MEMS mirrors, and its light intensity is detected.
Second control light having a light intensity equal to the light intensity at the input port of the first control light is input from the output port and output to the input port via the two MEMS mirrors to detect the light intensity. And
When at least one of the light intensity of the first control light at the output port and the light intensity of the second control light at the input port is detected, the two MEMS mirrors in a direction in which the light intensity increases. Adjust the angle of
When both the light intensity of the first control light at the output port and the light intensity of the second control light at the input port are detected, the light intensity ratio is detected, and the light intensity ratio is determined according to the light intensity ratio. A first procedure for determining the MEMS mirror having the larger deviation between the two MEMS mirrors and adjusting the angle of the one MEMS mirror having the larger deviation so that the light intensity ratio becomes 1, The second procedure for adjusting the angle of the other MEMS mirror so that the intensity ratio becomes a predetermined value is one cycle, and the first control is performed when the light intensity ratio is adjusted to 1 in the first procedure. The first procedure and the second procedure are repeated in order until the amount of change between the light intensity of the light and the light intensity of the first control light in the previous cycle becomes a predetermined value or less. Output intensity control method.

In the optical output intensity control method of the optical switch according to claim 1 or 2 ,
Of the two MEMS mirrors, the one closer to the input port is the first mirror, the one closer to the output port is the second mirror, the light intensity of the first control light at the output port is P1, and the input port is at the input port. When the light intensity of the second control light is P2, and the light intensity ratio is (P1 / P2),
A first procedure for adjusting the angle of the second mirror so that the light intensity ratio becomes 1 when the light intensity ratio is greater than 1, and an angle of the second mirror when the light intensity ratio becomes 1. And adjusting the angle of the first mirror so that the light intensity ratio is greater than 1, and the first mirror when the light intensity ratio reaches a predetermined value or a maximum value greater than 1. The angle is fixed, the process returns to the first procedure again, the first procedure and the second procedure are repeated in order,
A first procedure for adjusting the angle of the first mirror so that the light intensity ratio becomes 1 when the light intensity ratio is less than 1, and an angle of the first mirror when the light intensity ratio becomes 1. And adjusting the angle of the second mirror so that the light intensity ratio becomes smaller than 1, and the second mirror when the light intensity ratio becomes a predetermined value or a minimum value smaller than 1. The optical output intensity control method for an optical switch is characterized in that the angle is fixed, the process returns to the first procedure again, and the first procedure and the second procedure are repeated in order.

In the optical output intensity control method of the optical switch according to claim 1 or 2 ,
Of the two MEMS mirrors, the one closer to the input port is the first mirror, the one closer to the output port is the second mirror, the light intensity of the first control light at the output port is P1, and the input port is at the input port. When the light intensity of the second control light is P2, and the light intensity ratio is (P2 / P1),
A first procedure for adjusting the angle of the first mirror so that the light intensity ratio becomes 1 when the light intensity ratio is greater than 1, and an angle of the first mirror when the light intensity ratio becomes 1. And adjusting the angle of the second mirror so that the light intensity ratio is greater than 1, and the second mirror when the light intensity ratio reaches a predetermined value or maximum value greater than 1. The angle is fixed, the process returns to the first procedure again, the first procedure and the second procedure are repeated in order,
A first procedure for adjusting the angle of the second mirror so that the light intensity ratio becomes 1 when the light intensity ratio is less than 1, and an angle of the second mirror when the light intensity ratio becomes 1. And adjusting the angle of the first mirror so that the light intensity ratio becomes smaller than 1, and the first mirror when the light intensity ratio becomes a predetermined value or a minimum value smaller than 1. The optical output intensity control method for an optical switch is characterized in that the angle is fixed, the process returns to the first procedure again, and the first procedure and the second procedure are repeated in order.

In the optical output intensity control method of the optical switch according to claim 1 or 2 ,
An optical output intensity control method for an optical switch, wherein the signal light is used as the first control light.

For an optical switch using two MEMS mirror arrays in which signal light input from an arbitrary input port between a plurality of input / output ports is continuously reflected by two MEMS mirrors and output to an arbitrary output port In the optical output intensity control device of the optical switch that adjusts the angle of the two MEMS mirrors that determine the output path of the signal light and controls the output light intensity at the output port,
First means for inputting a first control light from the input port, outputting the first control light to the output port via the two MEMS mirrors, and detecting the light intensity;
Second control light having a light intensity equal to the light intensity at the input port of the first control light is input from the output port and output to the input port via the two MEMS mirrors to detect the light intensity. A second means to:
A light intensity ratio between the light intensity of the first control light at the output port and the light intensity of the second control light at the input port is detected, and a deviation between the two MEMS mirrors is detected according to the light intensity ratio. The first procedure for determining the MEMS mirror having the larger one and adjusting the angle of the one MEMS mirror whose deviation is large so that the light intensity ratio becomes 1, and then the light intensity ratio becomes a predetermined value. The second procedure for adjusting the angle of the other MEMS mirror is defined as one cycle, and when the light intensity ratio is adjusted to 1 in the first procedure, the light intensity of the first control light and the previous cycle are adjusted. Light output intensity control of an optical switch, comprising: a control unit that sequentially repeats the first procedure and the second procedure until the amount of change from the light intensity of the first control light becomes a predetermined value or less. apparatus.

For an optical switch using two MEMS mirror arrays in which signal light input from an arbitrary input port between a plurality of input / output ports is continuously reflected by two MEMS mirrors and output to an arbitrary output port In the optical output intensity control device of the optical switch that adjusts the angle of the two MEMS mirrors that determine the output path of the signal light and controls the output light intensity at the output port,
First means for inputting a first control light from the input port, outputting the first control light to the output port via the two MEMS mirrors, and detecting the light intensity;
Second control light having a light intensity equal to the light intensity at the input port of the first control light is input from the output port and output to the input port via the two MEMS mirrors to detect the light intensity. A second means to:
When at least one of the light intensity of the first control light at the output port and the light intensity of the second control light at the input port is detected, the two MEMS mirrors in a direction in which the light intensity increases. Further, when both the light intensity of the first control light at the output port and the light intensity of the second control light at the input port are detected, the light intensity ratio is detected. Then, the MEMS mirror having the larger deviation between the two MEMS mirrors is determined according to the light intensity ratio, and the angle of one MEMS mirror having the larger deviation is adjusted so that the light intensity ratio becomes 1. The first procedure and the second procedure for adjusting the angle of the other MEMS mirror so that the light intensity ratio becomes a predetermined value are set as one cycle, and the light intensity ratio is adjusted to 1 in the first procedure. When Control means for sequentially repeating the first procedure and the second procedure until the amount of change between the light intensity of the first control light and the light intensity of the first control light in the previous cycle is equal to or less than a predetermined value; An optical output intensity control device for an optical switch, comprising:

In the optical output intensity control device of the optical switch according to claim 6 or 7,
Of the two MEMS mirrors, the one closer to the input port is the first mirror, the one closer to the output port is the second mirror, the light intensity of the first control light at the output port is P1, and the input port is at the input port . When the light intensity of the second control light is P2, and the light intensity ratio is (P1 / P2),
The control means includes
A first procedure for adjusting the angle of the second mirror so that the light intensity ratio becomes 1 when the light intensity ratio is greater than 1, and an angle of the second mirror when the light intensity ratio becomes 1. And adjusting the angle of the first mirror so that the light intensity ratio is greater than 1, and the first mirror when the light intensity ratio reaches a predetermined value or a maximum value greater than 1. The angle is fixed, the process returns to the first procedure again, the first procedure and the second procedure are repeated in order,
A first procedure for adjusting the angle of the first mirror so that the light intensity ratio becomes 1 when the light intensity ratio is less than 1, and an angle of the first mirror when the light intensity ratio becomes 1. And adjusting the angle of the second mirror so that the light intensity ratio becomes smaller than 1, and the second mirror when the light intensity ratio becomes a predetermined value or a minimum value smaller than 1. The optical output intensity control device for an optical switch is characterized in that the angle is fixed, the process returns to the first procedure again, and the first procedure and the second procedure are repeated in order.

In the optical output intensity control device of the optical switch according to claim 6 or 7,
Of the two MEMS mirrors, the one closer to the input port is the first mirror, the one closer to the output port is the second mirror, the light intensity of the first control light at the output port is P1, and the input port is at the input port . When the light intensity of the second control light is P2, and the light intensity ratio is (P2 / P1),
The control means includes
A first procedure for adjusting the angle of the first mirror so that the light intensity ratio becomes 1 when the light intensity ratio is greater than 1, and an angle of the first mirror when the light intensity ratio becomes 1. And adjusting the angle of the second mirror so that the light intensity ratio is greater than 1, and the second mirror when the light intensity ratio reaches a predetermined value or maximum value greater than 1. The angle is fixed, the process returns to the first procedure again, the first procedure and the second procedure are repeated in order,
A first procedure for adjusting the angle of the second mirror so that the light intensity ratio becomes 1 when the light intensity ratio is less than 1, and an angle of the second mirror when the light intensity ratio becomes 1. And adjusting the angle of the first mirror so that the light intensity ratio becomes smaller than 1, and the first mirror when the light intensity ratio becomes a predetermined value or a minimum value smaller than 1. The optical output intensity control device for an optical switch is characterized in that the angle is fixed, the process returns to the first procedure again, and the first procedure and the second procedure are repeated in order.

In the optical output intensity control device of the optical switch according to claim 6 or 7 ,
The first means is configured to detect the light intensity of the signal light at the output port using the signal light as the first control light.

In the optical output intensity control device of the optical switch according to claim 6 or 7 ,
The first means and the second means share a control light source that outputs the first control light and a control light light source that outputs the second control light, for one control light. An optical output intensity control device for an optical switch, wherein the control light output from the light source is split into two by an optical coupler and input from the input port and the output port, respectively.

In the optical output intensity control device of the optical switch according to claim 6 or 7 ,
The first means and the second means are the first control light at the output port, the optical switch for switching the second control light at the input port, and each control light switched by the optical switch. A light receiver for detecting the light intensity of
The optical output intensity control device for an optical switch, wherein the control means is configured to control switching timing of the optical switch in accordance with control based on the light intensity ratio.

In the optical output intensity control device of the optical switch according to claim 6 or 7 ,
The first means includes a control light source that outputs a first control light having a wavelength different from the wavelength of the signal light, and demultiplexes the signal light with a wavelength to obtain a light intensity of the first control light. An optical output intensity control device for an optical switch, characterized in that it is configured to detect.