JP4418295B2 - Optical element bonding device - Google Patents

Description

The present invention relates to an optical element joining apparatus for joining optical elements such as various lenses and a CCD (Charge Coupled Device).

As a method for positioning optical elements such as various lenses and CCDs with high accuracy and attaching them with high accuracy, for example, a method for aligning the optical axis of an imaging device is known (see, for example, Patent Document 1).
For example, as shown in FIG. 18, the planar lens 101 as the second optical element is bonded to the imaging element (entire package) 100 as the first optical element. It relates to a process of fixing to the upper surface of the image sensor 100 with an agent or the like (arrows shown in the figure). Note that reference numeral 102 in FIG. 18 indicates an effective pixel surface that senses light in the image sensor 100.

Usually, since the image sensor 100 is a package made of fired ceramics, the outer dimensions thereof vary. For this reason, the positional relationship between the outer shape of the image sensor 100 and the effective pixel surface 102 varies, and it is difficult to align the optical axes of the image sensor 100 and the planar lens 101 with high accuracy based on the respective outer shape standards.
Therefore, in the optical axis alignment method described in Patent Document 1, the center of the effective pixel surface 102 and the center of the planar lens 101 are detected by image processing, and imaging is performed so that the centers of the two coincide with each other by a robot or the like. The element 100 and the planar lens 101 are assembled (joined).
At the same time, the center of the effective pixel frame is obtained by calculation while correcting the angular deviation of the effective pixel edge line of the image sensor 100, so that the assembly is performed while correcting the angular deviation of the effective pixel surface 102 as well as the optical center. It is carried out.

By the way, with the increase in accuracy of optical products, there is a demand for higher positioning accuracy when bonding optical elements to each other. However, as described above, the outer shape of the image sensor 100 is a sintered ceramic. As shown in FIG. 19, the external dimensions of the image sensor 100 are not accurately shown. Therefore, as shown in FIG. 20, when the upper surface of the image sensor 100 and the effective pixel surface 102 are not parallel to the planar lens 101 when the outer shape of the image sensor 100 is held by the holding member 103 such as a jig. There is. 19 and 20 show a state where the accuracy of the outer shape of the image sensor 100 is not extremely high.
In this state, even if the center position of the effective pixel surface 102 of the image sensor 100 is detected by image processing, the center position cannot be accurately detected as shown in FIG. The adhesive layer 104 between them is not uniform, and the effective pixel surface 102 is inclined with respect to the planar lens 101. Therefore, when the image pickup device 100 and the flat lens 101 are assembled into a product, there is a possibility that a problem such as inability to focus on the entire image occurs and a good image quality is not ensured.

Further, even when the optical element that joins the planar lens is not the imaging device 100 but a CCD 110 having an external dimension formed accurately as shown in FIG. 22, for example, as described above, the adhesive layer 104 is also used. There was a risk of non-uniformity.
That is, the normal CCD 110 is provided with a glass layer 112 on the upper surface of the effective pixel surface 111 in order to protect the effective pixel surface 111 as shown in FIG. However, the thickness of the glass layer 112 is not accurate and varies depending on the location, and may be, for example, a wedge shape. For this reason, the upper surface of the glass layer 112 may not be parallel to the planar lens 101. Therefore, as shown in FIG. 23, the adhesive layer 104 may still be non-uniform. 22 and 23 show a state in which the thickness of the glass layer 104 is extremely different and has a wedge shape.

Therefore, in order to cope with the above-described problem, a surface matching device capable of performing surface matching between the first optical element and the second optical element without inclining the opposing surfaces is provided (for example, Patent Document 2).
The surface aligning apparatus described in Patent Document 2 includes a clamp portion that fixes a first optical element (first object to be processed), a clamp portion on one surface, and a convex shape on the opposite side of the one surface. A convex spherical block having a hemispherical surface, a base block having a concave portion that receives the hemispherical surface of the convex spherical block and rotatably holds the convex spherical block, and a second optical element (second processed object). A pressing unit that presses the bonding surface of the object) against the bonding surface of the first optical element, and a buffer unit that elastically supports the base block.

In this surface matching apparatus, when the joining surface of the second optical element is pressed against the joining surface of the first optical element by the pressing means, the base block is elastically supported by the buffering means. Easily match the surface by releasing the load applied to the Moreover, since the clamp part is rotatably hold | maintained through the convex spherical block, it can match | combine the joint surface of a 1st optical element according to the joint surface of a 2nd optical element. Thereby, the joint surfaces of both optical elements can be matched (parallel).
JP-A-5-316400 (FIGS. 1-9, etc.) JP 2003-172851 A (FIG. 1 etc.)

As described above, in the surface matching apparatus described in Patent Document 2, the bonding surfaces (opposing surfaces) of the optical elements can be aligned.
Here, in order to join the optical elements to produce an optical component, it is usually necessary to bond the optical elements using an adhesive or the like. In this case, the adhesive determines the strength of the optical component, that is, the adhesive strength between the two optical elements, and also affects the optical system such as an image because it is interposed between the two optical elements. Is. Therefore, it is important to set the thickness of the adhesive to a predetermined thickness.
However, in the surface aligning apparatus described in Patent Document 2, it is possible to match the bonding surfaces of the optical elements, but then bonding both optical elements while adjusting the film thickness to a predetermined thickness is possible. It was difficult.
For example, when a compound lens, which is an optical component in which optical elements are joined together, is applied to an endoscope, the endoscope is sterilized under high pressure and high temperature (autoclave sterilization), that is, saturated water vapor at a predetermined temperature and pressure. It is necessary to sterilize microorganisms and the like by heating with. At this time, as described above, if the film thickness of the adhesive is not uniform, there is a possibility that the adhesion between the optical elements may be peeled off. There was a risk of affecting the mirror image.

  The present invention has been made in consideration of such circumstances, and its purpose is to join both optical elements in a state where the thickness of the adhesive is uniform, to improve the adhesive strength and to influence the optical system. An object of the present invention is to provide an optical element bonding apparatus capable of reducing the amount.

In order to achieve the above object, the present invention provides the following means.
In the optical element bonding apparatus according to the present invention, the first optical element and the second optical element are once brought into close contact with each other, and the positional relationship in which the opposing surfaces are brought into close contact with each other is determined. An optical element bonding apparatus for applying an adhesive to at least one of the opposing surfaces of an optical element, and then adhering both optical elements by bringing both optical elements close to each other with an adhesive interposed therebetween, A first holding portion that is horizontally disposed to hold the first optical element in a detachable manner; movably supports the first holding portion; and the first optical element and the second optical element. A support means for fixing the first holding portion and determining the positional relationship when the optical element is in close contact, a second holding portion for detachably holding the second optical element, and the first The relative position between the holding part and the second holding part is changed, and the first optical element is changed. A moving means for enabling close contact with the second optical element together opposing faces of each other, and a control unit for controlling the moving means, through said first optical element or said second optical element, the first Reflected light imaged by the imaging unit, which has an imaging unit that irradiates light to one of the opposing surfaces of the first optical element or the second optical element and images the light reflected by the opposing surface Detecting means for detecting whether the first optical element and the second optical element are in close contact with each other based on a change pattern of the interference fringes . The amount of movement of the moving means is controlled so that the optical element is brought into close contact with the first optical element from a state in which the optical element is in contact with the first optical element. Movement amount of the moving means according to the film thickness of the agent It is characterized by controlling.

  In the optical element bonding apparatus according to the present invention, the first optical element is held by the first holding part and the second optical element is held by the second holding part, and then both holding parts are moved by the moving means. The opposite positions of both optical elements are brought into close contact with each other. At this time, since the first holding unit is supported by the support means so as to be movable, the posture of the first optical element changes according to the position, angle, etc. of the second optical element, and both optical elements Are in close contact with each other in a state in which they face each other (parallel state). That is, the facing surface of the first optical element is in a state following the facing surface of the second optical element. In addition, since the control unit controls the moving unit so that the second optical element is pressed into the first optical element from the state in which the second optical element is in contact with the first optical element. They can be brought into close contact with each other.

When the positional relationship in which the opposing surfaces are in close contact with each other is determined, the support means fixes the first holding unit and maintains the positional relationship. Thereafter, the control unit controls the moving means to separate the first optical element and the second optical element. After the separation, an adhesive is applied to at least one of the opposing surfaces of both optical elements, and then the control unit controls the moving means to bring the first optical element and the second optical element close to each other. At this time, the control unit brings the first optical element and the second optical element close to each other according to the desired film thickness of the adhesive. For example, when the desired film thickness is 20 μm, both optical elements are brought close to each other so that the distance between the opposing surfaces is 20 μm. The two optical elements can be joined by maintaining this state until the adhesive is solidified. Then, both optical elements can be joined in the state which made the film thickness uniform by removing both optical elements from both holding parts.
As described above, both optical elements can be bonded in a state where the opposing surfaces of both optical elements are copied and the thickness of the adhesive is uniform. Accordingly, the adhesive strength can be improved and the influence on the optical system can be reduced.
Further, since the close contact state between the first optical element and the second optical element can be detected by the detection means, the opposing surfaces of both optical elements can be surely followed.
Furthermore, the contact state can be detected based on the change pattern of the interference fringes of the reflected light imaged by the imaging unit. For example, when there is a slight gap between the first optical element and the second optical element, the distance of the light reflected on the facing surface through the first optical element or the second optical element is different. So interference fringes appear. On the other hand, no interference fringes appear when they are in close contact. In this way, it is possible to detect whether or not they are in close contact by the interference fringe change pattern.

The optical element bonding apparatus of the present invention comprises a measurement means to measure the relative movement amount of the previous SL said second holding portion and the first holding portion, wherein the control unit of the detection means The moving amount of the moving means is controlled based on the detection result and the measurement result of the measuring means .

In the optical element bonding apparatus according to the invention, after fixing the supporting lifting means, when moved away the first optical element and second optical element, so measuring the amount of movement of the moving means by measuring means, The separated distance can be accurately measured. Therefore, when the first optical element and the second optical element are brought close to each other according to the desired film thickness of the adhesive, the desired film thickness can be adjusted with high accuracy.

In the optical element bonding apparatus according to the aspect of the invention, the moving unit can move the support unit in a horizontal direction and a vertical direction, or the second holding unit can move in the horizontal direction and the vertical direction. It is characterized by comprising at least one of the moving mechanisms .

  In the optical element bonding apparatus according to the present invention, either the first holding unit or the second holding unit, or both the first holding unit and the second holding unit are moved by the moving stage or the moving mechanism. Thus, the relative positions of both holding portions, that is, the first optical element and the second optical element can be freely changed in the horizontal direction and the vertical direction.

Moreover, the optical element bonding apparatus of the present invention is characterized in that the support means includes an XYZ stage that can move the first holding portion in a horizontal direction and a vertical direction .

In the optical element bonding apparatus according to the present invention, the first optical element can be moved in the horizontal direction and the vertical direction by the XYZ stage when the first optical element and the second optical element are brought into close contact with each other. Therefore, the facing surface of the first optical element can be made to follow the posture of the facing surface of the second optical element. For example, when the opposing surface of the second optical element is a spherical surface and the opposing surface of the first optical element is a convex surface, the convex surface moves in the horizontal direction and the vertical direction to reliably follow the spherical surface. . Even if the second optical element is pushed into the first optical element by a predetermined amount, the XYZ stage moves in the vertical direction, so that a close contact state is ensured.
In addition, after the positional relationship in which the opposing surfaces are in close contact with each other is determined, the first holding unit can be easily fixed in the positional relationship by locking the XYZ stage.

Further, in the optical element bonding apparatus according to the present invention, the support means includes a rotation mechanism capable of rotating the first holding unit around the XY axis parallel to the horizontal direction and around the Z axis perpendicular to the XY axis. And a Z stage movable in the Z-axis direction .

In the optical element bonding apparatus according to the present invention, when the first optical element and the second optical element are brought into close contact with each other, the first optical element can be rotated around the XYZ axes by the rotation mechanism. The facing surface of the first optical element can be traced according to the attitude of the second optical element. In particular, even if the facing surface of the second optical element is tilted, the facing surface of the first optical element can be reliably followed according to the tilt. Further, even if the second optical element is pushed into the first optical element by a predetermined amount, the Z stage moves in the vertical direction, so that a close contact state is ensured.
In addition, after the positional relationship in which the opposing surfaces are in close contact with each other is determined, the first holding unit can be easily fixed in the positional relationship by locking the rotation mechanism and the Z stage.

Further, in the optical element bonding apparatus according to the present invention, the support means includes a rotation mechanism capable of rotating the first holding unit around the XY axis parallel to the horizontal direction and around the Z axis perpendicular to the XY axis. And an XYZ stage that can move on the XYZ axes .

In the optical element bonding apparatus according to the present invention, when the first optical element and the second optical element are brought into close contact with each other, the first optical element can be rotated around the XYZ axes by the rotation mechanism and the XYZ stage. In addition, since it can move in the horizontal direction and the vertical direction, the facing surface of the first optical element can be made to follow the posture of the facing surface of the second optical element. In particular, even if the facing surface of the second optical element is tilted and the position is shifted, the facing surface of the first optical element can be reliably traced according to the tilt and the position shift. Even if the second optical element is pushed into the first optical element by a predetermined amount, the XYZ stage can be moved in the vertical direction, so that a close contact state is ensured.
In addition, after the positional relationship in which the opposing surfaces are in close contact with each other is determined, the first holding unit can be easily fixed in the positional relationship by locking the rotation mechanism and the XYZ stage.

The optical element bonding apparatus according to the present invention detects the center position of the second optical element when the second optical element is held by the second holding portion, and the center position and the second position. A position detecting means for detecting the holding state of the second optical element by comparing with the holding position of the holding unit is provided .

In the optical element bonding apparatus according to the present invention, when the second optical element is held by the second holding unit, the holding state can be detected by the position detecting means. For example, it can be detected that the second holding unit holds a position away from the center position of the second optical element. In response to this detection result, for example, the second optical element can be held again, whereby the second optical element can be held in an optimum state.
In this manner, by detecting the holding state of the second optical element, it is possible to perform bonding to the first optical element in a more stable state, and thus it is possible to improve reliability.

The optical element bonding apparatus according to the present invention further includes a center position detecting unit that detects a center position of the first optical element, and the control unit is configured to detect a detection result of the position detecting unit and the center position detecting unit. Based on this, the moving means is controlled so that both optical elements come close to each other with the center positions of the first optical element and the second optical element being aligned .

  In the optical element bonding apparatus according to the present invention, the center position of the first optical element can be detected by the center position detecting means. Then, the control unit controls the moving means based on the detection result and the detection result from the position detecting means, so that the two optical elements are aligned with the center positions of the first optical element and the second optical element being matched. Elements can be brought close together. Therefore, both optical elements can be joined with their center axes aligned.

The optical element bonding apparatus of the present invention, the first optical element is an optical element having an effective pixel surface, said center position of the first optical element is a central position of the effective pixel surface It is a feature.

  In the optical element bonding apparatus according to the present invention, the center position of the second optical element can be aligned with the center position of the effective pixel surface of the first optical element. In particular, it is suitable when the first optical element is an optical element having an effective pixel surface such as a CCD.

Moreover, the optical element bonding apparatus of the present invention is characterized by comprising an adhesive means for applying the adhesive .

  In the optical element bonding apparatus according to the present invention, the adhesive can be easily and accurately applied by the adhesive means, so that the time required for the application can be shortened and the adhesive can be applied with high accuracy. Can do.

In the optical element bonding apparatus of the present invention, the adhesive is an ultraviolet curable adhesive, and is directed to the adhesive when the first optical element and the second optical element are brought close to each other. It is characterized by comprising ultraviolet irradiation means for irradiating ultraviolet rays .

  In the optical element bonding apparatus according to the present invention, since the adhesive is quickly solidified by irradiating the adhesive with the ultraviolet rays by the ultraviolet irradiation means, the time required for the bonding can be shortened.

  According to the optical element bonding apparatus according to the present invention, both optical elements can be bonded in a state where the opposing surfaces of both optical elements are copied and the thickness of the adhesive is uniform. Accordingly, the adhesive strength can be improved and the optical performance can be improved.

Hereinafter, a first embodiment of an optical element bonding apparatus according to the present invention will be described with reference to FIGS.
As shown in FIG. 1, the optical element bonding apparatus 1 according to the present embodiment temporarily brings a biconvex lens (first optical element) 2 and a concave / convex lens (second optical element) 3 into close contact with each other and faces each other. After determining the positional relationship in which the convex surface 2a of the biconvex lens 2 and the concave surface 3a of the concave / convex lens 3 are in close contact with each other, the two lenses 2 and 3 are separated and an adhesive is applied to at least one of the convex surface 2a or the concave surface 3a. A is applied, and then both the lenses 2 and 3 are brought close to each other with the adhesive A interposed therebetween, and the both lenses 2 and 3 are bonded and joined.

  The optical device bonding apparatus 1 according to the present embodiment includes a first bonding yatoe (first holding portion) 4 that is disposed substantially horizontally and holds the biconvex lens 2 in a detachable manner, and the first bonding yatoy 4. An XYZ stage (supporting means) 5 that fixes the first positional relationship when the biconvex lens 2 and the concavo-convex lens 3 are in close contact with each other, and determines the positional relationship, and the concavo-convex lens 3 are attached and detached. While changing the relative position of the 2nd jointing yatoi (2nd holding | maintenance part) 6 which hold | maintains possible, the 1st jointing joint 4 and the 2nd jointing joint 6 and biconvex lens 2 and the uneven | corrugated lens 3, The moving means 7 that enables the convex surface 2a and the concave surface 3a to be in close contact with each other, the control unit 8 that controls the moving means 7, the adhesive means 9 that applies the adhesive A, and the adhesive means 9 are applied. Ultraviolet irradiation means 1 for irradiating adhesive A with ultraviolet light L It is equipped with a door.

As shown in FIG. 2, the first joint Yato 4 includes a base portion 13 formed in a circular shape with a predetermined thickness by a metal material such as plastic or stainless steel, and an upper surface of the base portion 13. And a columnar protrusion 14 formed so as to protrude from the center. A tapered portion 15 that is recessed from the outer edge toward the center is formed at the tip of the protruding portion 14. The taper portion 15 is formed such that its central axis (which is also the central axis of the base portion 13) B is orthogonal to the lower surface of the base portion 13. The biconvex lens 2 is detachably held by being mounted on the taper portion 15 and adhered by an adhesive such as a not shown (not shown). In the present embodiment, when the biconvex lens 2 is held by the tapered portion 15, the biaxial lens 2 is held in a state where the optical axis is aligned with the central axis B of the tapered portion 15. This will be described in detail later.
Further, as shown in FIG. 1, the second jointed yatoy 6 is formed in the same size and the same shape with the same material as the first jointed yatoy 4. In other words, the second joint Yato 6 has a base part 16, a protruding part 17, and a tapered part 18. The concave-convex lens 3 is held by the tapered portion 18 so that the concave surface 3a is exposed. At this time, the optical axis of the concave-convex lens 3 is held so as to be aligned with the central axis B of the tapered portion 18 as described above.

The XYZ stage 5 is configured to be able to move the first joint Yato 4 in the XY direction (horizontal direction) and the Z direction (vertical direction) orthogonal to the XY direction.
That is, as shown in FIG. 1, the XYZ stage 5 includes a Z bearing portion 21 fixed on a base 20, a Z axis movable portion 22 movable in the Z axis direction within the Z bearing portion 21, and the Z axis An XY bearing portion 23 provided on the upper portion of the movable portion 22 and an XY-axis movable portion 24 provided on the upper surface of the XY bearing portion 23 and movable in the XY directions are provided.
The Z bearing portion 21 is formed, for example, in a square cross section, and surrounds the Z axis movable portion 22 from the periphery. The Z-axis movable part 22 is formed in a quadrangular prism shape that can move in the Z bearing part 21. The XY bearing portion 23 and the XY axis movable portion 24 are formed in a square shape in cross section, and the first joining Yato 4 is placed on the upper surface of the XY axis movable portion 24. It should be noted that when the first joint Yato 4 is placed on the upper surface of the XY-axis movable portion 24, the lower surface of the base portion 13 and the upper surface of the base 20 are adjusted to be parallel.
The XYZ stage 5 is capable of supplying air to the Z bearing portion 21 and the Z axis movable portion 22 and between the XY bearing portion 23 and the XY axis movable portion 24 and sucking the supplied air. Not equipped with an air pump. By supplying air with this air pump, the Z-axis movable part 22 and the XY-axis movable part 24 can be moved freely, and the Z-axis movable part 22 and the XY-axis movable part 24 are moved by sucking air. It can be fixed in position.

  The moving means 7 has a moving table 7a (moving mechanism) capable of moving the second joint Yato 6 in the XY direction (horizontal direction) and the Z direction (vertical direction) orthogonal to the XY direction. This moving table 7a can attach the 2nd joining Yato 6 to the lower surface side. In addition, the lower surface of the moving table 7 a is adjusted to be parallel to the upper surface of the base 20. In other words, the first joint Yato 4 and the second joint Yato 6 are adjusted so that their central axes B are parallel when attached to the upper surface of the XY-axis movable portion 24 and the lower surface of the moving table 7a. ing.

When the biconvex lens 2 and the concavo-convex lens 3 are brought into close contact with each other, the control unit 8 causes the concavo-convex lens 3 to be brought into close contact with the biconvex lens 2 in a state where the biconvex lens 2 is pushed in a predetermined amount. The amount of movement is controlled. In the present embodiment, the control unit 8 has an input unit (not shown), and controls the movement table 7a by inputting a movement amount to the input unit.
Further, when the biconvex lens 2 and the concavo-convex lens 3 are brought close to each other, the control unit 8 controls the moving amount of the moving table 7a according to the desired film thickness of the adhesive A. Also in this case, as described above, the movement table 7a is controlled by inputting the movement amount at the input unit.

The bonding means 9 has a movable discharge arm 9a, and can discharge a predetermined amount of adhesive A from its tip. The discharge arm 9a is controlled by the control unit 8. The adhesive A of the present embodiment is an ultraviolet curable adhesive that cures when irradiated with ultraviolet light L.
The ultraviolet irradiation means 10 has a movable irradiation arm 10a, and can irradiate ultraviolet rays L from its tip. The irradiation arm 10a is controlled by the control unit 8 in the same manner as the discharge arm 9a.

A case where the biconvex lens 2 and the concavo-convex lens 3 are bonded with the adhesive A by the optical element bonding apparatus 1 configured as described above will be described.
In the present embodiment, when the first and second jointed joints 4 and 6 are attached to the upper surface of the XY-axis movable unit 24 and the lower surface of the moving table 7a, the respective central axes B are substantially omitted in advance. It is adjusted to line up on the same axis. Therefore, the control unit 8 is set to control the movement of the moving table 7a only in the Z-axis direction.

  First, the biconvex lens 2 is held by the taper portion 15 of the first cemented joint 4 with the optical axis aligned with the central axis B of the first cemented joint 4. An example of this optical axis alignment will be described below. First, when the biconvex lens 2 is placed on the tapered portion 15, the center of the back surface 2 b coincides with the central axis B due to the shape of the tapered portion 15. Here, after the taper portion 15 and the biconvex lens 2 are temporarily bonded to each other with an adhesive such as a jar, the rotation is performed with a V block (not shown) in contact with the side surface of the base portion 13 of the first joint Yato 4 Let At this time, since the taper portion 15 is formed so that the central axis B is orthogonal to the lower surface of the base portion 13, the central axis B of the taper portion 15 is a rotation axis.

In a state where the first cemented joint 4 is rotated, light is irradiated from above the tapered portion 15 toward the biconvex lens 2 and an imaging point of light reflected by the biconvex lens 2 is imaged. Then, by comparing the positions of the rotation axis and the imaging point, it is possible to confirm the deviation between the optical axis of the biconvex lens 2 and the rotation axis (center axis B) of the tapered portion 15. For example, when the optical axis is inclined with respect to the rotation axis, the imaging point rotates around the rotation axis. Then, the optical axis can be aligned by finely adjusting the holding position of the biconvex lens 2 so that the imaging point is on the rotation axis while seeing this deviation, and then completely adhering. Thereby, the lower surface of the base part 13 of the 1st joint Yato 4 and the optical axis of the biconvex lens 2 can be made orthogonal, that is, the central axis B and the optical axis can be matched.
Further, the concave / convex lens 3 is also held by the second cemented joint 6 in a state in which the optical axis is aligned by the same method as described above, and the lower surface of the base portion 16 and the optical axis of the concave / convex lens 3 are made orthogonal.

Next, the first joint Yato 4 is attached to the upper surface of the XY-axis movable part 24 of the XYZ stage 5, and the second joint Yato 6 is attached to the lower surface of the moving table 7a. At this time, since the upper surface of the XY-axis movable portion 24, which is the installation surface of the first and second joint members 4 and 6, and the lower surface of the moving table 7a are adjusted to be parallel, The optical axis of the convex lens 2 and the optical axis of the concave / convex lens 3 are made parallel.
After the two lenses 2 and 3 are attached, air is supplied from the air pump to the XYZ stage 5, and the Z-axis movable part 22 and the XY-axis movable part 24 are set in a movable state.

  Next, the movement amount of the movement table 7a is input to the input unit. The amount of movement is an amount by which the biconvex lens 2 and the concavo-convex lens 3 are pressed into a predetermined amount and are in close contact with each other. Then, the control unit 8 moves the moving table 7a downward based on the amount of movement, bringing the biconvex lens 2 and the concavo-convex lens 3 into contact with each other as shown in FIG. Adhere closely. At this time, the first joint Yato 4 is movable in the XY direction and the Z direction by the XY-axis movable part 24 and the Z-axis movable part 22, so that the convex surface 2a of the biconvex lens 2 follows the concave surface 3a of the concave-convex lens 3. It adheres securely in the pressed state, and in close contact.

After the biconvex lens 2 and the concavo-convex lens 3 are in close contact with each other, air is sucked by the air pump in this state, and the Z-axis movable unit 22 and the XY-axis movable unit 24 are fixed at the moved positions. Thereby, the positional relationship in which the opposing surfaces of the biconvex lens 2 and the concavo-convex lens 3, that is, the convex surface 2a and the concave surface 3a are in close contact with each other is determined. After determining the positional relationship, the control unit 8 moves the moving table 7a upward by a predetermined amount to separate the biconvex lens 2 and the concave / convex lens 3 from each other.
After the separation, as shown in FIG. 4, the controller 8 moves the discharge arm 9 a and applies a predetermined amount of the adhesive A to the convex surface 2 a of the biconvex lens 2. The adhesive A may be applied to the concave surface 3a of the concave / convex lens 3 or to both the convex surface 2a and the concave surface 3a.

After application of the adhesive A, the moving amount of the moving table 7a is input to the input unit again. At this time, the amount of movement is input according to the desired film thickness of the adhesive A. For example, the movement amount is input so that the film thickness becomes 20 ± 10 μm.
The controller 8 moves the moving table 7a downward based on the amount of movement, and brings the concave / convex lens 3 close to the biconvex lens 2 with the adhesive A in between, as shown in FIG. That is, the distance between the convex surface 2a of the biconvex lens 2 and the concave surface 3a of the concave / convex lens 3 is 20 ± 10 μm.
And the control part 8 moves the irradiation arm 10a, and irradiates the ultraviolet-ray L toward the apply | coated adhesive A. FIG. Adhesive A begins to cure gradually upon irradiation of this ultraviolet ray L, and after a predetermined time has elapsed, adhesive A is completely cured, and biconvex lens 2 and concave-convex lens 3 are joined with a uniform film thickness. To do.

After the biconvex lens 2 and the concavo-convex lens 3 are joined, air is again supplied from the air pump to the XYZ stage 5 so that the XY axis movable part 24 and the Z axis movable part 22 are movable. After this state, the holding state between the concave-convex lens 3 and the second cemented joint 6 is released. For example, by heating between the tapered portion 15 of the second bonded Yatoi and the concavo-convex lens 3, the adhesion state with an adhesive such as a sag is released.
Then, the moving table 7a is moved upward. As a result, only the second joint lens 6 moves upward and is separated from the biconvex lens 2 and the concavo-convex lens 3. Thereafter, in the same manner as described above, the space between the taper portion 18 of the second cemented joint 6 and the biconvex lens 2 is heated to release the holding state (adhesion state). Thereby, the optical component in which the biconvex lens 2 and the concavo-convex lens 3 are joined can be taken out.

As described above, according to the optical element bonding apparatus 1 according to the present invention, the convex surface 2a of the biconvex lens 2 and the concave surface 3a of the concave / convex lens 3 are copied, and the film thickness of the adhesive A is uniform to 20 ± 10 μm. In this state, the biconvex lens 2 and the concave / convex lens 3 can be joined. Accordingly, the adhesive strength can be improved and the optical performance can be improved.
Moreover, the relative position of the biconvex lens 2 and the concavo-convex lens 3 can be freely changed by the moving table 7a through the first and second cemented joints 4 and 6 reliably and easily.
Also, since the adhesive A can be applied easily and accurately by the discharge arm 9a, it is possible to reduce the time required for the application and to apply the adhesive A with high accuracy. Furthermore, since the adhesive A is an ultraviolet curable adhesive A and the irradiation arm 10a can irradiate the ultraviolet light L, it is possible to shorten the time for joining, that is, the time for solidifying the adhesive A.

In the first embodiment, when the first joint Yato 4 and the second joint Yato 6 are respectively attached to the upper surface of the XY-axis movable portion 24 and the lower surface of the moving table 7a, the respective center shafts are previously stored. The movement table 7a is controlled to move only in the Z-axis direction by adjusting B so that they are arranged on substantially the same axis. However, the movement table 7a is controlled to move in the XY-axis direction and the Z-axis direction. You may comprise as follows.
Moreover, although the film thickness of the adhesive agent A was demonstrated as 20 +/- 10micrometer, you may set arbitrarily not only this distance. In particular, by setting the film thickness to 20 ± 10 μm and 10 ± 5 μm, an optical component in which the biconvex lens 2 and the concave / convex lens 3 are joined can be suitably used for an endoscope or the like.
Moreover, although the relative position of the 1st joining Yato 4 and the 2nd joining Yato 6 was changed with the moving table 7a, not only this but the moving means 7 makes the XYZ stage 5 XY direction and Z A moving stage movable in the axial direction may be provided, or both the moving stage and the moving table 7a may be provided.

Further, in the first embodiment, the XYZ stage 5 is made movable or fixed by switching the supply of air from the air pump to supply or suction. However, the pressure is not limited to air.
For example, as shown in FIG. 6, magnetic force and spring force may be used. That is, the XYZ stage 5 shown in FIG. 6 is provided on the lower surface of the Z-axis movable unit 22, the spring 30 that biases the Z-axis movable unit 22 upward, and the Z-axis provided on the side surface of the Z-axis movable unit 22. An electromagnet 31; a Z-axis permanent magnet 32 provided on a side surface of the Z bearing portion 21 so as to face the Z-axis electromagnet 31; an XY-axis electromagnet 33 provided on an upper surface of the XY bearing portion 23; An XY-axis permanent magnet 34 provided on the lower surface of the XY-axis movable unit 24 so as to face the electromagnet 33 is provided. The electromagnets 31 and 33 and the permanent magnets 32 and 34 are provided so as not to protrude from the respective surfaces.
The operation of the Z-axis electromagnet 31 is controlled by the control unit 8. When the Z-axis electromagnet 31 is operated, an attraction force acts between the Z-axis electromagnet 31 and the Z-axis movable unit 22 to be fixed. .
The XY-axis electromagnet 33 is controlled so that the polarity is switched by the control unit 8, and the XY-axis movable unit 24 is movable or fixed by switching the polarity.

In the XYZ stage 5 configured as described above, when the Z-axis electromagnet 31 is not operated, the Z-axis movable portion 22 is urged by the spring 30 and is movable in the Z-axis direction. Further, the polarity of the XY axis electromagnet 33 is controlled to be the same as the polarity of the XY axis permanent magnet 34. For example, when the polarity of the XY axis permanent magnet 34 is S pole, the polarity of the XY axis electromagnet 33 is changed to S pole. By doing so, a repulsive force acts between them, and the XY axis movable part 24 becomes movable.
In addition, after the biconvex lens 2 and the concavo-convex lens 3 are in close contact with each other, the Z-axis electromagnet 31 is operated to fix the Z-axis movable portion 22 by an attractive force and to change the polarity of the XY-axis electromagnet 33 to the XY axis. Control different from the polarity of the permanent magnet 34, for example, when the polarity of the XY axis permanent magnet 34 is S pole, the XY axis electromagnet 33 is set to N pole, so that the XY axis movable part 24 can be adjusted by the attraction force. Can be fixed.
Thus, since it is not necessary to use aerodynamic force, it is not necessary to draw air by a tube or the like. Therefore, the XYZ stage 5 can be configured more easily. In addition, since the electromagnet can be controlled by the control unit 8, it is easy to switch between movable and fixed.

Further, the XYZ stage 5 may be configured using a rolling bearing portion as shown in FIG. 7 instead of using magnetic force and spring force as described above.
That is, the XYZ stage 5 shown in FIG. 7 is provided with a Z-axis rolling bearing portion 35 between the Z-axis movable portion 22 and the Z-bearing portion 21 so that the Z-axis movable portion 22 can move in the Z-axis direction. Yes. A spring 36 that biases the Z-axis movable part 22 upward is provided on the lower surface of the Z-axis movable part 22. The upper portion of the Z-axis movable portion 22 is a Y bearing portion 22a that supports the Y-axis movable portion 37 via a Y-axis rolling bearing portion 38. The Y-axis movable part 37 also has a function as an X-bearing part that supports the X-bearing movable part 40 via the X-axis rolling bearing part 39. And the 1st joint Yato 4 is arranged on the upper surface of X axis movable part 40. Each rolling bearing portion 35, 38, 39 is fixed at a moved position by a lock mechanism (not shown).

  In the XYZ stage 5 configured as described above, when the biconvex lens and the concavo-convex lens 3 are brought into close contact with each other, the biconvex lens 2 moves in the XYZ directions via the first cemented Yateto 4. That is, each of the X-axis movable part 40, the Y-axis movable part 37, and the Z-axis movable part 22 moves the X-axis rolling bearing part 39, the Y-axis rolling bearing part 38, and the Z-axis rolling bearing part 35 in each direction. . Thereby, the convex surface 2a of the biconvex lens 2 can be made to follow the concave surface 3a of the concave-convex lens 3 reliably. Moreover, the biconvex lens 2 can be fixed by locking each rolling bearing part 35,38,39 after a close_contact | adherence with a locking mechanism. In particular, since the rolling bearing portion can be used, the rigidity can be increased.

Next, a second embodiment of the optical element bonding apparatus of the present invention will be described with reference to FIGS. In the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.
The difference between the second embodiment and the first embodiment is that in the first embodiment, when the biconvex lens 2 as the first optical element and the concave / convex lens 3 as the second optical element are brought into close contact with each other, The convex lens 2 is held movably in the X, Y, and Z directions, and the opposing surfaces of the biconvex lens 2 and the concave and concave lenses 3, that is, the convex surfaces 2 a and the concave surfaces 3 a are copied, but the optical element joining device 50 of the second embodiment. Is to make the opposing surfaces of both optical elements follow each other in a state where the first optical element is held rotatably about the XY axis and the Z axis.

That is, as shown in FIG. 10, the optical element bonding apparatus 50 according to this embodiment temporarily contacts a CCD (first optical element) 51 and a flat field lens (second optical element) 52, After determining the positional relationship between the mutually facing surfaces, that is, the glass surface 51a of the CCD 51 and the back surface 52a of the field lens 52, the CCD 51 and the field lens 52 are separated to at least either the glass surface 51a or the back surface 52a. The adhesive A is applied to one of them, and then the CCD 51 and the field lens 52 are brought close to each other with the adhesive A interposed therebetween, and the CCD 51 and the field lens 52 are bonded and bonded.
The CCD 51 has a glass layer 51c as a protection for the effective pixel surface 51b on the effective pixel surface 51b, and the upper surface of the glass layer 51c is the glass surface 51a.
Moreover, in this embodiment, it demonstrates as what the glass layer 51c is wedge-shaped. In particular, in FIGS. 10 to 13, the glass layer 51 c is extremely shown in a wedge shape.

  The optical element bonding apparatus 50 according to this embodiment includes a jig 53 (first holding portion) that is arranged substantially horizontally and holds the CCD 51 in a detachable manner, and holds the jig 53 movably. A support means 54 for fixing the jig 53 and determining the positional relationship when the lens and the field lens 52 are in close contact with each other, an adsorption cylinder (second holding portion) 55 for detachably holding the field lens 52, A moving means 56 that changes the relative position of the jig 53 and the suction cylinder 55 and enables the CCD 51 and the field lens 52 to be in close contact with each other, that is, the glass surface 51a and the back surface 52a. And a control unit 8 for controlling the moving means 56.

  Further, as shown in FIGS. 8 to 10, the optical element bonding apparatus 50 detects the center position of the field lens 52, that is, the center position of the back surface 52 a when the field lens 52 is held by the suction cylinder 55. At the same time, the position detection means 58 that detects the holding state of the field lens 52 by comparing the center position with the holding position of the suction cylinder 55, and the image processing camera (center) that detects the center position of the effective pixel surface 51b of the CCD 51. (Position detection means) 59, an adhesive device (adhesion means) 60 for applying the adhesive A, an ultraviolet irradiation device (ultraviolet irradiation means) 61 for irradiating the adhesive A applied by the adhesive device 60 with ultraviolet light L, and It has.

As shown in FIG. 10, the jig 53 can clamp and fix the outer shape of the CCD 51 with the glass surface 51a of the CCD 51 exposed.
As shown in FIG. 9, the support means 54 includes a rotation mechanism 65 capable of rotating the jig 53 around the XY axis parallel to the horizontal direction and the Z axis perpendicular to the XY axis, and the Z axis direction. And a movable Z stage 66.
Similarly to the first embodiment, the rotation mechanism 65 and the Z stage 66 are supplied or sucked from an air pump (not shown), and rotate around the XYZ axes by supplying air. It is possible to move freely in the Z-axis direction. Further, the rotation mechanism 65 and the Z stage 66 can be fixed at a position where the rotation mechanism 65 and the Z stage 66 are rotated or moved by sucking air.

Further, as shown in FIG. 8, the Z stage 66 is placed on a moving stage 69 that can move on a moving rail 68 provided on a bottom plate 67. The moving stage 69 is movable in the XY direction (horizontal direction) and the Z direction (vertical direction) with respect to the bottom plate 67.
In FIG. 8, a moving rail 69 extending only in the X direction is shown. That is, the moving stage 69 can move the entire support means 54, that is, the rotating mechanism 65 and the Z stage 66. The moving stage 69 is a part constituting the moving means 56.
Furthermore, the moving means 56 includes an orthogonal coordinate type robot (moving mechanism) 70 that can move the suction cylinder 55 in the XY and Z directions.

The orthogonal coordinate robot 70 includes an X-axis moving mechanism 71, a Y-axis moving mechanism (not shown), and a Z-axis moving mechanism 72. The X-axis moving mechanism 71 includes an X-axis rail 71a, an X-axis moving unit 71b that can move along the X-axis rail 71a, and an X-axis motor that drives the X-axis moving unit 71b via an endless belt (not shown). 71c. Further, for example, both ends of the X-axis rail 71a are movably connected to the Y-axis rail of the Y-axis moving mechanism, whereby the entire X-axis moving mechanism 71 is movable in the Y direction. .
The X-axis moving part 71b is attached with an extending part 72a of the Z-axis moving mechanism 72, and a plate member 73 is fixed to the extending part 72a. A handling unit 74 to which the proximal end side of the suction cylinder 55 is attached is attached to the lower surface of the plate member 73 so as to hang. That is, the suction cylinder 55 can be freely moved in the XYZ directions by the X-axis moving mechanism 71, the Y-axis moving mechanism, and the Z-axis moving mechanism 72. Further, as shown in FIG. 10, the suction cylinder 55 is rotated around the Z axis (θ operation) by the handling unit 74.
Further, the suction cylinder 55 is connected to a suction pump (not shown), and the field lens 52 can be attached to and detached from the tip by operating the suction pump.

Further, the image processing camera 59 is attached to the lower surface of the plate member 73 so as to be adjacent to the handling unit 74. Further, the bonding device 60 and the ultraviolet irradiation device 61 are attached to the plate member 73 so as to be adjacent to each other.
Similar to the handling unit 74, the image processing camera 59, the bonding device 60, and the ultraviolet irradiation device 61 can be simultaneously moved in the XYZ directions by the Cartesian coordinate robot 70. Among them, the bonding device 60 and the ultraviolet irradiation device 61 are attached to the plate member 73 via Z plates 75 that can move in the Z direction, and can move independently in the Z direction.
The ultraviolet irradiation device 61 may be configured to be movable in the XYZ directions independently, or may be installed in the vicinity of the irradiation position of the ultraviolet light L in advance.

On the bottom plate 67, an XY position detection camera 76 and an adsorption cylinder 55 for photographing the center position of the back surface 52 a of the field lens 52 held by the adsorption cylinder 55 adjacent to the moving stage 69 and the support means 54. A holding state confirmation camera 77 for photographing the holding state of the held field lens 52 is placed. The XY position detection camera 76 and the holding state confirmation camera 77 are image processing cameras, and constitute the position detection means 58.
For field lens storage, the field lens 52 is temporarily placed on the upper surface so as to be positioned on the bottom plate 67 on the opposite side of the position detection means 58 with the moving stage 69 and the support means 54 interposed therebetween. A gantry 78 is placed.

  In addition, each component described above is comprehensively controlled by the control unit 8. Each detection result detected by the position detection means 58 and the image processing camera 59 is sent to the control unit 8. Then, based on the detection result, the control unit 8 moves the field lens 52 and the CCD 51 so as to approach each other with the center position of the field lens 52 and the center position of the effective pixel surface 51b of the CCD 51 being matched. 56 is controlled.

A case where the field lens 52 and the CCD 51 are bonded with the adhesive A by the optical element bonding apparatus 50 configured as described above will be described.
First, the field lens 52 is set on the upper surface of the field lens storage stand 78 (S1), and the CCD 51 is fixed to the jig 53 fixed to the upper part of the rotation mechanism 65 (S2). After fixing, the Cartesian coordinate robot 70 is operated to move the handling unit 74 above the field lens storage stand 78 (S3). Then, the Z-axis moving mechanism 72 is operated to lower the handling unit 74 and the suction cylinder 55, and the field lens 52 is sucked and held at the tip of the suction cylinder 55 (S4).

After holding the field lens 52, the orthogonal coordinate robot 70 is moved again, and the field lens 52 is moved to the position detection means 58. That is, the field lens 52 is positioned directly above the XY position detection camera 76 and to the side of the holding state confirmation camera 77.
In this state, the field lens 52 and the suction cylinder 55 are photographed by both cameras 76 and 77, thereby detecting the center position of the back surface 52a of the field lens 52 and the holding position (center position) of the suction cylinder 55. Thereby, the stability of the holding state of the field lens 52 can be confirmed. For example, when the distance between the center position of the suction cylinder 55 and the center position of the back surface 52a of the field lens 52 is equal to or greater than the threshold value, that is, when the suction cylinder 55 holds the vicinity of the end of the field lens 52, The controller 8 determines that the holding state is unstable and returns the Cartesian coordinate robot 70 to the original position, and causes the suction cylinder 55 to hold the field lens 52 again. Thereafter, the holding state is confirmed again by the position detecting means 58. Thereby, the field lens 52 can be held reliably (stable).

  Next, after confirming the certainty of holding the field lens 52, the Cartesian coordinate robot 70 is moved to position the field lens 52 directly above the CCD 51 as shown in FIG. 10 (S5). At this time, air is supplied from the air pump to the rotation mechanism 65 and the Z stage 66, and the rotation mechanism 65 and the Z stage 66 are set in a movable state. Thereafter, the movement amount of the Z-axis movement mechanism 72 is input to the input unit of the control unit 8. This amount of movement is the amount by which the flat lens and the CCD 51 are pressed into a predetermined amount and are in close contact with each other. Accordingly, the control unit 8 operates the Z-axis moving mechanism 72 of the Cartesian coordinate robot 70 to slowly lower the handling unit 74 and the suction cylinder 55 in the Z-axis direction. Then, the back surface 52a of the field lens 52 is brought into contact with the glass surface 51a of the CCD 51 and is brought into close contact with the glass lens 51 while being pushed in a predetermined amount. Note that the field lens 52 is rotated around the Z axis (θ operation) by the handling unit 74 as necessary. At this time, the jig 53 can be rotated about the XYZ axes and can be moved in the Z-axis direction by the rotation mechanism 65 and the Z stage 66, and therefore, as shown in FIG. In response to the inclination, the CCD 51 rotates (turning operation) about the XYZ axes so that the glass surface 51a follows the back surface 52a, and is reliably pushed in and in close contact (S6).

After the field lens 52 and the CCD 51 are in close contact, air is sucked by the air pump in this state, and the rotation mechanism 65 and the Z stage 66 are fixed at the rotated and moved positions (S7). Accordingly, the positional relationship is determined in a state where the opposing surfaces of the field lens 52 and the CCD 51, that is, the back surface 52a and the glass surface 51a are in close contact with each other. After determining the positional relationship, the Z-axis moving mechanism 72 is operated to raise the handling unit 74 in the Z direction, and the field lens 52 is separated from the CCD 51. After the separation, the X-axis moving mechanism 71 and the Y-axis moving mechanism are operated to move the image processing camera 59 in the XY directions so as to be positioned directly above the CCD 51. Then, the effective pixel surface 51b of the CCD 51 is photographed by the image processing camera 59, and the center position of the effective pixel surface 51b is detected (S8). Then, after the X-axis moving mechanism 71 and the Y-axis moving mechanism are operated, the field lens 52 is again positioned right above the XY position detection camera 76 and to the side of the holding state confirmation camera 77, The center position of the back surface 52a of the field lens 52 is detected by both the cameras 76 and 77 (S9).
The detected center positions of the back surface 52 a of the field lens 52 and the effective pixel surface 51 b of the CCD 51 are sent to the control unit 8. Further, after detecting the center position of the effective pixel surface 51b, the center position of the field lens 52 is detected. However, the present invention is not limited to this process order, and the center position of the effective pixel surface 51b is detected after detecting the center position of the field lens 52. May be detected.

Thereafter, the control unit 8 lowers the Z plate 75 in the Z-axis direction so that the tip of the bonding device 60 is positioned in the vicinity of the upper side of the glass surface 51a of the CCD 51, and then the glass surface 51a as shown in FIG. A predetermined amount of adhesive A is applied (S10). After applying the adhesive A, the control unit 8 raises the Z plate 75 in the Z direction to return the bonding apparatus 60 to the original position. The adhesive A may be applied to the back surface 52a of the field lens 52 or may be applied to both. Further, the adhesive A may be applied prior to the detection of the center position of the field lens 52 or the CCD 51 described above.
Then, after applying the adhesive A, the movement amount of the Z-axis movement mechanism 72 is input to the input unit again. At this time, the amount of movement is input according to the desired film thickness of the adhesive A. For example, the movement amount is input so that the film thickness becomes 20 ± 10 μm. Based on the amount of movement, the control unit 8 brings the field lens 52 close to the CCD 51 with the adhesive A interposed therebetween, as shown in FIG. That is, the distance between the back surface 52a of the field lens 52 and the glass surface 51a of the CCD 51 is 20 ± 10 μm. At this time, the control unit 8 adjusts the center position of the effective pixel surface 51 b and the center position of the back surface 52 a of the field lens 52 based on the detection results from the position detection unit 58 and the image processing camera 59. Bring them close together (S11).

  After the field lens 52 and the CCD 51 are brought close to each other, the control unit 8 lowers the Z plate 75 in the Z direction so that the ultraviolet irradiation device 61 is positioned near the upper part of the field lens 52 and the CCD 51. Then, the adhesive A is irradiated with ultraviolet rays L (S12), and the adhesive A is cured. As a result, as shown in FIG. 13, the field lens 52 and the CCD 51 can be bonded together with a uniform film thickness (S13).

  After the field lens 52 and the CCD 51 are joined, air is supplied again from the air pump to the rotation mechanism 65 and the Z stage 66 so that the rotation mechanism 65 and the Z stage 66 are movable. After this state, the holding state of the suction cylinder 55 is released, and the X-axis movement mechanism 71, the Y-axis movement mechanism, and the Z-axis movement mechanism 72 are operated to move the suction cylinder 55 to the retracted position (S14). Thereby, the optical component in which the CCD 51 and the field lens 52 are joined can be taken out from the jig 53 (S15). Further, by moving the moving stage 69 along the moving rail 68 before taking out the optical component, for example, it is possible to carry out the optical component to an assembly line or the like.

As described above, according to the optical element bonding apparatus 50 of the present embodiment, the back surface 52a of the field lens 52 and the glass surface 51a of the CCD 51 are copied, and the film thickness of the adhesive A is made uniform to 20 ± 10 μm. In this state, the field lens 52 and the CCD 51 can be joined. Accordingly, the adhesive strength can be improved and the optical performance can be improved.
In particular, since the CCD 51 is movably supported by the rotation mechanism 65, even if the field lens 52 is tilted, the glass surface 51a is surely aligned with the tilt of the field lens 52, that is, according to the posture. Can be imitated. Further, since the Z stage 66 is provided, the field lens 52 and the CCD 51 can be reliably brought into close contact with each other.
Further, the relative position between the field lens 52 and the CCD 51 can be freely changed by the Cartesian coordinate robot 70 through the suction cylinder 55 and the jig 53 reliably and easily. Further, when the field lens 52 is held by the suction cylinder 55, the holding state of the field lens 52 can be detected by the position detector 58, so that the joining can be performed in a stable and optimal state.

Further, when the field lens 52 and the CCD 51 are joined with the film thickness made uniform, the position detection means 58 and the image processing camera 59 are used to position the center position of the suction tube 55 and the effective pixel surface 51b of the CCD 51. It can join in the state which matched the center position.
Further, since the adhesive A can be applied easily and accurately, the time required for the application can be reduced, and the adhesive A can be applied with high accuracy.
Furthermore, since the adhesive A is an ultraviolet curable adhesive A and the ultraviolet irradiation device 61 can irradiate the ultraviolet light L, it is possible to shorten the time for joining, that is, the time for solidifying the adhesive A. .
In addition, the optical component obtained by joining the field lens 52 and the CCD 51 can be easily and quickly carried out to an assembly line or the like by the moving stage 69.

In the first embodiment, the Cartesian coordinate robot 70 changes the relative position between the field lens 52 and the CCD 51, and the joined optical component is carried out by the moving stage 69. The relative position between the field lens 52 and the CCD 51 may be changed by operating the Cartesian coordinate robot 70 and the moving stage 69 simultaneously.
Moreover, although the film thickness of the adhesive agent A was demonstrated as 20 +/- 10micrometer, you may set arbitrarily similarly to 1st Embodiment not only this distance (for example, 10 +/- 5micrometer).

  In the second embodiment, when the field lens 52 and the CCD 51 are brought into close contact with each other, the control unit 8 moves the Cartesian coordinate robot 70 in the Z direction based on the value input to the input unit. However, the present invention is not limited to this. For example, the relative movement between the detection means for detecting whether or not the field lens 52 and the CCD 51 are in close contact with the jig 54 and the suction cylinder 55, that is, the field lens 52 and the CCD 51. Measuring means for measuring the relative movement amount of the rectangular coordinate type robot 70 may be controlled based on the detection result and the measurement result.

  For example, as shown in FIG. 15, a plurality of pressure sensors 80 for measuring the pressing force between the field lens 52 and the CCD 51 are provided on the lower surface of the Z stage 66 as detection means, and the plurality of pressure sensors 80 are connected to the Z stage. You may comprise with the spring 81 urging | biasing the lower surface of 66. Further, as a measuring means, a gauge (not shown) for measuring the relative movement amount of the field lens 52 and the CCD 51 may be used.

A case where the field lens 52 and the CCD 51 are brought into close contact with each other when the detection unit and the measurement unit are provided will be described.
First, the control unit 8 operates the Z-axis moving mechanism 72 of the Cartesian coordinate robot to slowly lower the suction cylinder 55 so that the back surface 52a of the field lens 52 is brought into contact with the glass surface 51a of the CCD 51. As a result, the Z stage 66 and the pressure sensor 80 are pushed in the Z-axis direction. When the pressure sensor 80 is pushed in, the spring 81 is shortened, so the spring force is increased and the pressure value measured by each pressure sensor 80 is increased. Then, for example, the controller 8 slowly lowers the suction cylinder 55 in the Z direction until the average value of the pressure values measured by the plurality of pressure sensors 80 reaches a threshold value. Then, when the average value of the pressure values measured by the plurality of pressure sensors 80 reaches a threshold value, the descent is stopped. By doing so, the back surface 52a of the field lens 52 and the glass surface 51a of the CCD 51 can be copied and brought into close contact with each other more reliably.
The control unit 8 may stop the Z-axis moving mechanism 72 when the pressure values measured by the plurality of pressure sensors 80 become the same value. By doing so, the back surface 52a of the field lens 52 and the glass surface 51a of the CCD 51 can be more reliably followed.

Next, after fixing the support means 54 and determining the positional relationship between the back surface 52a of the field lens 52 and the glass surface 51a of the CCD 51, the suction cylinder 55 is raised by the Z-axis moving mechanism 72, and the field lens 52 and the CCD 51 are separated from each other. At this time, the distance from the contact position to the separation position is measured with a gauge. Then, after applying the adhesive A, the control unit 8 lowers the suction cylinder 55 by the distance obtained by subtracting the film thickness of the adhesive A from the distance measured by the gauge to bring the field lens 52 close to the CCD 51. Thereby, the film thickness can be made uniform with higher accuracy.
Thus, since it has a gauge, it is easy to control the film thickness. Further, since the control unit 8 accurately detects the distance between the back surface 52a of the field lens 52 and the glass surface 51a of the CCD 51, for example, until reaching a predetermined distance from the glass surface 51a of the CCD 51, the field lens 52. Can be adjusted at a high speed, and after the predetermined distance is reached, speed adjustment such as slowly lowering the field lens 52 can be performed. Thereby, the time taken for joining can be further shortened.
Note that the pressure sensor 80 does not have to be plural, and at least one pressure sensor 80 may be used.

In FIG. 15, the detection means is configured by the plurality of pressure sensors 80, but is not limited to the pressure sensor 80 and may be any device that can detect the close contact state between the field lens 52 and the CCD 51.
For example, as shown in FIG. 16, the detection means has an image processing camera (imaging unit) 85 that irradiates light onto the glass surface 51a of the CCD 51 through the field lens 52 and images the light reflected by the glass surface 51a. In addition, it may be configured to detect whether or not the contact is made based on the change pattern of the interference fringes of the captured reflected light. Note that the image processing camera 85 is configured to irradiate light and image reflected light through the inside of the suction tube 55.

When the image processing camera 85 is provided, when the back surface 52a of the field lens 52 and the glass surface 51a of the CCD 51 are in close contact with each other, there is a slight gap between the back surface 52a and the glass surface 51a. The distance of the light reflected by the back surface 52a of the field lens 52 and the glass surface 51a of the CCD 51 is different at each location. This is a phase difference, and interference fringes are generated in the reflected light imaged. Thereby, it can be easily determined that the back surface 52a of the field lens 52 and the glass surface 51a of the CCD 51 are not in a copied state.
Further, when the suction cylinder 55 is further slowly lowered in the Z direction and the back surface 52a of the field lens 52 and the glass surface 51a of the CCD 51 are pressed, the back surface 52a of the field lens 52 and the glass surface 51a of the CCD 51 gradually follow. Thus, the interference fringes are reduced. That is, the interference fringe changes. Therefore, the contact state can be easily and reliably detected by detecting the interference fringe change pattern by the image processing camera 59.
The image processing camera 85 may be configured to irradiate the back surface 52a of the field lens 52 through the CCD 51 and to capture the light reflected by the back surface 52a.

Next, a third embodiment of the optical element bonding apparatus of the present invention will be described with reference to FIG. In the third embodiment, the same components as those in the second embodiment are denoted by the same reference numerals, and the description thereof is omitted.
The difference between the third embodiment and the second embodiment is that in the second embodiment, the support means moves the jig 53 around the XY axis parallel to the horizontal direction and around the Z axis perpendicular to the XY axis. In contrast to the rotation mechanism 65 that can rotate and the Z stage 66 that can move in the Z-axis direction, the support means 90 of the third embodiment includes the jig 53 in the XYZ axes in addition to the rotation mechanism 65. And an XYZ stage 91 that is movably supported.
In this case, even if the inclination and position of the back surface 52a of the field lens 52 are both shifted, the glass surface 51a of the CCD 51 can be surely made to follow the back surface 52a, which is more preferable.

The technical field of the present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention.
For example, in each of the above-described embodiments, the first optical element is a biconvex lens and a CCD, and the second optical element is an uneven lens and a field lens. However, the present invention is not limited to these, and any optical element may be used. Absent.
Further, as the support means, in the first embodiment, an XYZ stage movable in the XYZ directions is taken as an example, and in the second embodiment, a rotating mechanism rotatable around the XYZ axes and a Z stage movable in the Z direction are taken as examples. In the third embodiment, the rotation mechanism that can rotate around the XYZ axes and the XYZ stage that can move in the XYZ directions have been described as examples. However, these support means are not limited in each embodiment. For example, the support means described in the third embodiment may be applied to the first embodiment or the second embodiment. Further, the support means is not limited to these, and the positional relationship in which the first holding portion is movably supported and the opposing surfaces of the first optical element and the second optical element are in close contact with each other. After the determination, any configuration can be used as long as the first holding unit can be fixed.

Further, the detection means and measurement means described in the second embodiment may be applied to the first embodiment.
Moreover, in each embodiment, although the adhesive agent was apply | coated with the adhesion | attachment means, you may apply by this manual instead of this adhesion | attachment means. The adhesive may not be an ultraviolet curable adhesive.

1 is an overall configuration diagram showing a first embodiment of an optical element bonding apparatus according to the present invention. It is a figure which shows the 1st joint Yato of the optical element joining apparatus shown in FIG. 1, Comprising: (a) is a top view, (b) is a cross-sectional arrow CC figure in (a). It is a process figure in the case of joining a biconvex lens and an uneven | corrugated lens with the optical element joining apparatus shown in FIG. 1, Comprising: It is a figure which shows the state which contact | adhered the convex surface of a biconvex lens, and the concave surface of an uneven lens. FIG. 4 is a process diagram for bonding a biconvex lens and a concavo-convex lens by the optical element bonding apparatus shown in FIG. 1, after separating the biconvex lens and the concavo-convex lens from the state of FIG. 3, and bonding to the convex surface of the biconvex lens It is a figure which shows the state which apply | coated the agent. FIG. 5 is a process diagram for bonding a biconvex lens and a concavo-convex lens by the optical element bonding apparatus shown in FIG. 1, in which the biconvex lens and the concavo-convex lens are brought close to each other from the state of FIG. It is a figure which shows the state which joined the biconvex lens and the uneven | corrugated lens in the state which made the film thickness uniform. It is a figure which shows the modification of the XYZ stage of the optical element bonding apparatus shown in FIG. It is a figure which shows another modification of the XYZ stage of the optical element bonding apparatus shown in FIG. It is a whole block diagram which shows 2nd Embodiment of the optical element bonding apparatus which concerns on this invention. It is a perspective view which shows the support means of the optical element joining apparatus shown in FIG. FIG. 9 is a process diagram for bonding a CCD and a field lens by the optical element bonding apparatus shown in FIG. 8, and shows a state in which the field lens is moved right above the CCD. FIG. 9 is a process diagram when a CCD and a field lens are bonded by the optical element bonding apparatus shown in FIG. 8, in which the field lens is lowered from the state of FIG. It is a figure which shows the state made to contact | adhere. FIG. 12 is a process diagram for bonding a CCD and a field lens by the optical element bonding apparatus shown in FIG. 8, and after separating the CCD and the field lens from the state of FIG. 11, an adhesive is applied to the glass surface of the CCD. It is a figure which shows the state which apply | coated. FIG. 13 is a process diagram when a CCD and a field lens are bonded by the optical element bonding apparatus shown in FIG. 8, and the CCD and the field lens are brought close to each other from the state of FIG. It is a figure which shows the state which joined CCD and the field lens in the state which made thickness uniform. It is a flowchart which shows an example in the case of joining CCD and a field lens with the optical element joining apparatus shown in FIG. It is a block diagram which added the detection means to the support means of the optical element joining apparatus shown in FIG. It is the block diagram which added another detection means to the support means of the optical element joining apparatus shown in FIG. It is a figure which shows 3rd Embodiment of the optical element bonding apparatus which concerns on this invention, Comprising: It is a perspective view of a support means. It is a figure which shows one conventional process for adhere | attaching and attaching the image pick-up element which is a 1st optical element, and the plane lens which is a 2nd optical element. It is a front view of the image sensor shown in FIG. 18, and is a diagram showing a state where the accuracy of the outer shape is not extremely high. It is a front view which shows the state which fixed the image pick-up element shown in FIG. 18 to the jig | tool. It is a figure which shows the state which fixed the image pick-up element and flat lens shown in FIG. 18 by the conventional method using the adhesive agent. It is a front view of CCD which is a 1st optical element, Comprising: It is a figure which shows the state by which the glass layer is wedge shape. It is a figure which shows the state which fixed the planar lens shown in FIG. 18, and CCD shown in FIG. 22 by the conventional method using the adhesive agent.

Explanation of symbols

A Adhesive 1, 50 Optical element bonding apparatus 2 Biconvex lens (first optical element)
2a Convex surface (opposite surface) of a biconvex lens
3 Concave and convex lens (second optical element)
3a Concave lens surface (opposite surface)
4 First joint yatoi (first holding part)
5 XYZ stage (support means)
6 Second joint Yatoi (second holding part)
7 Moving means 8 Control unit 9 Adhesing means 10 Ultraviolet irradiation means 51 CCD (first optical element)
51a CCD glass surface (opposite surface)
51b Effective pixel surface 52 Field lens (second optical element)
52a Back side (opposite side) of field lens
53 Jig (first holding part)
54, 90 Support means 55 Adsorption cylinder (second holding part)
56 moving means 58 position detecting means 59 center position detecting means 60 bonding apparatus (bonding means)
61 UV irradiation equipment (UV irradiation means)
65 Rotating mechanism 66 Z stage 69 Moving stage 70 Cartesian coordinate robot (moving mechanism)
80 Pressure sensor 85 Image processing camera (imaging unit)
91 XYZ stage

Claims (11)

After the first optical element and the second optical element are brought into close contact with each other and the positional relationship in which the opposing surfaces are in close contact with each other is determined, the two optical elements are separated to face at least one of the two optical elements. An optical element bonding apparatus that applies an adhesive to a surface, and then attaches both optical elements by bringing both optical elements close to each other with the adhesive interposed therebetween,
A first holding part arranged substantially horizontally and detachably holding the first optical element;
Support means for movably supporting the first holding portion and fixing the first holding portion and determining the positional relationship when the first optical element and the second optical element are in close contact with each other. When,
A second holding unit that detachably holds the second optical element;
A moving unit that changes a relative position between the first holding unit and the second holding unit, and that allows the first optical element and the second optical element to be in close contact with each other with their facing surfaces facing each other; ,
A control unit for controlling the moving means ;
The first optical element or the second optical element is used to irradiate light on one of the first optical element or the second optical element, and the light reflected on the opposite surface is irradiated with the light. An image pickup unit that picks up an image, and detecting means for detecting whether or not the image is in close contact based on a change pattern of interference fringes of reflected light imaged by the image pickup unit,
When the first optical element and the second optical element are brought into close contact with each other, the control unit further pushes the second optical element from a state in contact with the first optical element by a predetermined amount. An optical element bonding apparatus characterized by controlling the amount of movement of the moving means so as to be in close contact, and controlling the amount of movement of the moving means according to the desired film thickness of the adhesive when bringing both optical elements close to each other . The optical element bonding apparatus according to claim 1,
Comprising a measuring means to measure the relative movement amount of the previous SL said second holding portion and the first holding portion,
The said control part controls the movement amount of the said moving means based on the detection result of the said detection means, and the measurement result of the said measurement means, The optical element joining apparatus characterized by the above-mentioned. In the optical element bonding apparatus according to claim 1 or 2 ,
The moving means includes at least one of a moving stage capable of moving the support means in a horizontal direction and a vertical direction, or a moving mechanism capable of moving the second holding portion in a horizontal direction and a vertical direction. An optical element bonding apparatus. In the optical element bonding apparatus according to any one of claims 1 to 3 ,
The optical element joining apparatus, wherein the support means includes an XYZ stage capable of moving the first holding portion in a horizontal direction and a vertical direction. In the optical element bonding apparatus according to any one of claims 1 to 3 ,
The support means includes a rotation mechanism capable of rotating the first holding unit around an XY axis parallel to the horizontal direction and a Z axis perpendicular to the XY axis, and a Z stage movable in the Z axis direction. An optical element bonding apparatus comprising: In the optical element bonding apparatus according to any one of claims 1 to 3 ,
The support means includes a rotation mechanism capable of rotating the first holding unit around an XY axis parallel to the horizontal direction and a Z axis perpendicular to the XY axis, and an XYZ stage movable respectively to the XYZ axes. An optical element bonding apparatus comprising: The optical element bonding apparatus according to any one of claims 1 to 6 ,
When the second optical element is held by the second holding unit, the center position of the second optical element is detected, and the center position is compared with the holding position of the second holding unit. An optical element bonding apparatus comprising a position detection unit for detecting a holding state of the second optical element. The optical element bonding apparatus according to claim 7 ,
A center position detecting means for detecting a center position of the first optical element;
Based on the detection results of the position detection means and the center position detection means, the control unit brings both optical elements close together in a state where the center positions of the first optical element and the second optical element are aligned. An optical element bonding apparatus characterized by controlling the moving means. In the optical element bonding apparatus according to claim 8 ,
The optical element joining apparatus, wherein the first optical element is an optical element having an effective pixel surface, and a center position of the first optical element is a center position of the effective pixel surface. The optical element bonding apparatus according to any one of claims 1 to 9 ,
An optical element bonding apparatus comprising an adhesive means for applying the adhesive. The optical element bonding apparatus according to any one of claims 1 to 10 ,
The adhesive is an ultraviolet curable adhesive,
An optical element bonding apparatus comprising: an ultraviolet irradiation means for irradiating ultraviolet rays toward the adhesive when the first optical element and the second optical element are brought close to each other.

Images