JP4428644B2 - Container recognition method for FOUP openers that can handle multiple types of containers - Google Patents

Description

The present invention relates to a container recognition method adaptable FOUP opener to a plurality of types of container used for transporting the semiconductor upper lobe, particularly commonly used as load ports for FOUP and FOSB, to any of these containers However, the present invention relates to a container recognition method for a FOUP opener that can deal with a plurality of types of containers that are free from malfunctions and can smoothly and safely carry out the delivery of workpieces.

The containers used to transport the semiconductor upper lobe (object to be processed), there is FOUP for the transport within the plant (Front Opening Unified Pod), FOSB (Front Opening for the transport between plants
Shipping Box).
FOUP, upon transferring a semiconductor upper lobe exclusively between processing apparatuses in the factory, in order to prevent the object to be processed is contaminated by the external environment, to be conveyed accommodated in a space that is controlled to be treated It is a forward open type container used. The FOUP opener communicates between the environment in the FOUP and the wafer transfer space in the processing apparatus without exposing the object to be processed to the external environment, and the object to be processed is transferred by a handling robot or the like disposed in the processing apparatus. It is a FOUP opening and closing device that plays a role of enabling the user to do this, and is usually called a load port. By using these FOUPs and FOUP openers, workpieces are transported between processing devices in the factory and transferred into the processing devices, thereby achieving a high product yield.

FOSB, upon transferring a semiconductor upper lobe exclusively between the factory, the article to be treated in order to prevent from being contaminated by the external environment and conveys the accommodated in a space that is spatially or semi-controlled is controlled to be treated It is a front open type container used for the above. Therefore, although the FOUP and the container size and the basic shape are not substantially changed, they have different structures according to the standards because of different uses and purposes. Also, the requirements for the external environment are not as strict as the FOUP.

As described above, FOUP and FOSB have different structures according to the standards, and the latch structure is also completely different. Therefore, dedicated machines are used to open and close the lid (door) that closes the opening.
A dual-purpose device that can open and close both the FOUP and FOSB lids is also being developed. However, the cost is still high, and the FOSB has a different shape depending on the manufacturer. There is also a problem.

Under these circumstances, the FOSB lid is manually opened and closed by an operator, and the FOUP opener may be used also as a load port for the FOSB in order to automate the subsequent processes. In this case, the FOUP opener as a load port for the FOUP is lowered as the port door removes the cover of the FOUP, holds it, and then moves between the FOUP and the processing device via the handling robot. Thus, the workpiece (substrate) is delivered. In contrast, a FOUP opener as a load port for FOSB does not require the port door to open and close the FOSB lid, only the port door is lowered, and then handled between the FOSB and the processing equipment. A workpiece (substrate) is delivered via a robot.

In this way, in the field where FOUP and FOSB are mixed and the FOUP opener is used not only as a load port for FOUP but also as a load port for FOSB, the container of the FOUP opener is once used. The container placed on the mounting table is FOUP
It is necessary to proceed to the next operation after confirming whether it is FOSB or FOSB. This is because if the lid is set (ie, FOUP) and it is set to have no lid from the beginning, the handling robot will move forward to collide with the lid of the FOUP. Also, due to an operator's mistake, there is a possibility that the FOSB whose lid is not opened is misunderstood as the lid is opened, and this is placed on the container mounting table of the FOUP opener. Therefore, from the viewpoint of safety, there is a demand for confirming whether or not there is a lid for closing each opening of the FOUP and FOSB placed on the container placing table.

Although it is considered that the container is identified by recognizing the shape of the bottom side of the container, the shape of the container may be different for each manufacturer and lacks reliability.
JP 2004-88017 A

The invention of the present application solves the above-mentioned problems of the conventional FOUP opener that can handle a plurality of types of containers, and whether the container placed on the container placing table of the FOUP opener is FOUP or FOSB Can be recognized by detecting the presence or absence of a lid (door) that closes each opening of FOUP and FOSB, and the subsequent loading of FOUP and FOSB is performed according to the work procedure corresponding to each container. A container recognition method for a FOUP opener that can handle a plurality of types of containers and can smoothly unload, that is, deliver work to be processed contained in these containers, and ensure safety. The issue is to provide.

The above problems can be solved by the following invention described in each claim of the present application.
That is, the invention thereof described in claim 1, since the FOUP is a front open type containers being conveyed through the plant and housed in a closed state of the semiconductor upper lobes, and in a closed state semi conductor wafer accommodated for FOSB a container front open to be conveyed between factories, used as a load port, the FOUP is a container placing table of the load port in the lid for closing the opening is closed is placed, the FOSB, in the placed into the container mounting table of the load port, the container recognition method adaptable FOUP opener with a plurality of types of containers with the lid for closing the opening is opened, the FOUP the port door opener, the lid detecting means for detecting the presence or absence of a lid for closing an opening of the container is provided, at the lid detecting means, mounted on the container mounting table of the lid of the container When the absence is detected and the presence of a lid is detected, the container is recognized as a FOUP with the lid closed, and further, it is determined whether or not there is a collision between the lid of the container and a resist pin provided on the port door. When it is determined that there is no collision, it is confirmed that the recognition is correct. When it is detected that there is no lid, the container is recognized as a FOSB with the lid opened, and the port door is further connected. The provided latch key is inverted 90 °, the presence or absence of a collision between the container and the latch key is determined, and when it is determined that there is no collision, it is confirmed that the recognition is correct. This is a container recognition method of a FOUP opener that can be applied to a container .

Since the invention described in claim 1 is configured as described above, the lid detecting means for detecting the presence or absence of a lid for closing the opening of the container provided on the port door is placed on the container mounting table. If the lid that closes the opening of the container is detected, it can be recognized that the container is FOUP. If the lid that closes the opening of the container placed on the container mounting table is not detected, the container is FOSB. I can recognize that.

In addition, it is determined whether or not there is a collision between the FOUP lid and the resist pin provided on the port door. When it is determined that there is no collision, it can be confirmed that the container is a FOUP, and the FOSB lid and the latch key the presence or absence of collision determination, when it is determined that there is no conflict, since the container can be confirmed that the FOSB the lid is opened, if the container is confirmed to be FOUP, the The port door removes the FOUP lid (FOUP door) and holds it down, and then the object to be processed (semiconductor wafer, etc.) is delivered between the FOUP and the processing apparatus via the handling robot. You can proceed to work. On the other hand, if it is confirmed that the container is a FOSB with the lid opened, it is not necessary for the port door to open and close the FOSB lid, only the port door is lowered, and then the FOSB and the processing device The work can be performed so that the workpiece is delivered to and from the machine via the handling robot. Thus, according to the work procedure corresponding to each of these FOUPs and FOSBs, the delivery work of the workpieces accommodated therein can be smoothly and safely advanced.

In addition , even if the FOSB is placed on the container mounting table of the load port with the lid that closes its opening accidentally closed, even if the lid detection means detects the presence of the lid , the FOSB lid and port door The presence or absence of a collision with the resist pin provided in the
The container is rather a FOUP, it is possible to confirm that the FOSB, is avoided to proceed with transfer operations subsequent treatment object in accordance with the work procedures corresponding to FOUP, ensuring the safety of work can do.

In addition, for example, the FOSB is erroneously placed on the container placement table of the load port with the lid closing the opening closed, and the placement position is incorrect (for example, behind the correct placement position, The load port is detected when the lid detection means detects the absence of the lid because the lid detection means has not been detected, or the FOUP closes the opening correctly. Because it was placed on the container mounting table, but the mounting position was wrong (for example, it was mounted behind the correct mounting position and beyond the detection capability of the lid detection means). Even when the lid detecting means detects the absence of the lid, it is determined whether or not there is a collision between the container and the latch key, it is determined that there is a collision, and it is confirmed that these detections are false detections. So you can check this Based on whether the container is FOSB, FOUP, whether these containers are placed at the correct placement position, by manual or semi-automatic means, Confirming whether the lid is opened and whether the FOUP lid is closed, and then proceeding with the delivery of the workpiece afterwards according to the correct work procedure corresponding to each of the FOSB and FOUP. This makes it possible to ensure work safety.

Further, the invention described in claim 2 is for a FOUP that is a front-open container that can be accommodated in a sealed state and transported in the factory, and can be accommodated in a sealed state. It is used as a load port for FOSB, which is a front-open container that is transported between factories. The FOUP is placed on the container mounting table of the load port with the lid that closes the opening closed. The FOSB is a container recognition method for a FOUP opener that can be applied to a plurality of types of containers and is mounted on the container mounting table of the load port with a lid that closes the opening thereof being opened. The port door is provided with a lid detecting means for detecting the presence or absence of a lid that closes the opening of the container, and is provided on the lid of the container placed on the container placing table and the port door. The presence or absence of a collision with the resist pin is determined. When it is determined that there is no collision, the lid detection means further detects the presence or absence of the lid of the container. A FOUP opener that can handle a plurality of types of containers, wherein the container is recognized as a FOSB with the lid open when it is detected that the container is a closed FOUP. This is a container recognition method.

Since the invention described in claim 2 is configured as described above, there are provided a step of confirming that the container is a FOUP and a step of confirming the detection of the container without the lid by the lid detecting means. However, prior to these steps, a step of determining whether or not there is a collision between the lid of the container placed on the container placing table and the resist pin provided on the port door is performed. Since the possibility of FOUP and the possibility of FOSB are determined, the recognition of the container type by the FOUP opener is highly accurate and can be executed on the safe side.

The invention described in claim 3 is characterized in that, in the invention described in claim 1, the lid detecting means is a photoelectric sensor.

The invention described in claim 4 is characterized in that, in the invention described in claim 2 , the lid detecting means is a limit switch.

By these, it is possible to detect the presence or absence of a lid for closing the opening of the container placed on the container placing table of the load port (FOUP opener) easily and accurately.

As described above, according to the container recognition method of the FOUP opener that can handle a plurality of types of containers of the present invention, the lid detecting means for detecting the presence or absence of a lid that closes the opening of the container provided in the port door includes: By detecting the presence or absence of a lid that closes the opening of the container placed on the container mounting table, it is possible to recognize whether the container is a FOUP or a FOSB, and the lid detecting means detects whether the container has a lid. In the case of detection, the recognition that the container in this case is FOUP can be confirmed. Further, when the lid detection means detects the absence of the lid of the container, this detection is not a false detection (this since the container, it is possible to confirm the recognition of being FOSB), the container (FOUP, FOSB) of later placed on the container placing table work procedure, corresponding to each container Can go proceed according work procedure can proceed the transfer operations of the object accommodated in respective containers smoothly and safely.

For FOUP is a container of the front open conveyed through the plant and housed in a closed state of the semiconductor upper lobes, and the front open container is transported between the housing to the factory in a state of being sealed semiconductor wafer FOSB because it is used as a load port of, FOUP is placed on the container placing table of the load port in the lid for closing the opening is closed, F OSB, the lid for closing the opening is opened is placed on the container placing table of the load port in a state, in containers recognition method adaptable FOUP opener to double several containers, the port door of the FOUP opener, lid detection for detecting the presence or absence of a lid for closing the opening of the container Means for detecting the presence / absence of a lid of the container placed on the container mounting table by the lid detection means, and when the presence of the lid is detected, the container is a FOUP with the lid closed. In addition, it is determined whether or not there is a collision between the container lid and the resist pin provided on the port door. When it is determined that there is no collision, it is confirmed that the recognition is correct, and it is detected that there is no lid. The container is recognized as a FOSB with the lid open, and the latch key provided on the port door is inverted 90 ° to determine whether there is a collision between the container and the latch key. Confirm that the recognition was correct. The lid detecting means may be a photoelectric sensor of (distance setting type).

Next, an embodiment of the present invention will be described.
FIG. 1 is a partial front view of a FOUP opener in which a container recognition method for a FOUP opener that can handle a plurality of types of containers according to the present embodiment is executed , FIG. 2 is a partial side view thereof , and FIG. 3 is a plan view thereof . FIG. 6 is a flowchart of the container type recognition operation and the delivery operation of the object to be processed contained in the container executed by the container recognition method of the FOUP opener, FIG. 8 is an external view of the FOUP, and FIG. FIG.
2 and 3 show a state in which FOUP is mounted on the FOUP mounting table of the FOUP opener as one type of container. In the following description, the lid of the container is often referred to as a door, but both are synonymous, including the door of the port door.

  As shown in FIGS. 2 and 3, the FOUP 1 that forms a container in which a plurality of semiconductor wafers (workpieces) 2 are stacked in multiple stages in the vertical direction and is contained in a sealed state is mounted on the FOUP of the FOUP opener 10. It is placed on a table (called a dock plate) 11. The FOUP opener 10 is disposed in a space opposite to the processing device of the port plate 12 constituting a part of the chamber wall of the processing device, and is integrally attached to the port plate 12. In FIG. 2, the space on the right side of the port plate 12 forms a room A of the processing apparatus, and this room A is configured as a clean room.

The FOUP opener 10 has a port door opening / closing device 13 on the room A side of the processing device, and the port door 14 provided in the port door opening / closing device 13 opens and closes an opening 15 formed in the port plate 12. A mechanism for holding the door 4 of the FOUP 1 detachably from the FOUP body 5 is provided inside. When the FOUP 1 moves forward in the direction of the port plate 12 while being placed on the dock plate 11 and the opening side end face is close to the port plate 12, the FOUP door attaching / detaching / holding mechanism of the port door 14 is FOUP door 4
The port door opening / closing device 13 removes the port door 14 from the opening 15, retracts it from the port plate 12, and retracts it to the lower area in the room A.

In this way, the opening 15 and the opening 3 of the FOUP 1 are opened, the FOUP door 4 is accommodated in the room A, and the wafer 2 in the FOUP 1 is ready to be transferred into the processing apparatus via a handling robot (not shown). It is done. Then, when a predetermined process is performed on the wafer 2 in the processing apparatus, the processed wafer 2 is transferred in the reverse direction and returned to the FOUP 1. Next, the FOUP door 4 is connected to the port door opening / closing device 13 and the port door 14 F.
By the operation of the OUP door attaching / detaching / holding mechanism, the FOUP 1 is sealed by being bound to the opening 3 of the FOUP 1 in the reverse order.

The drive portion of the port door opening / closing device 13 is accommodated in the FOUP opener 10 and is connected to the port door opening / closing device 13 through a vertically long opening (not shown) formed in the port plate 12.
Operate and move it back and forth and up and down.

The FOUP door attaching / detaching / holding mechanism provided inside the port door 14 is not shown in detail, but the general configuration thereof is as follows.
First, as shown in FIG. 1, the FOUP door attaching / detaching mechanism is provided with openings 16a and 16b for latch key in / out at two places on the left and right sides of the port door 14 as shown in FIG.
A latch key (not shown) protrudes from a and 16b, enters a key hole (not shown) formed in the FOUP door 4, and operates the latch mechanism housed in the FOUP door 4 in the latch release direction to open the FOUP door 4 Remove from 3. FOUP by reverse operation of the latch key
The door 4 can be attached to the opening 3.

Next, as shown in FIG. 1, the FOUP door holding mechanism is provided with suction pads 17a and 17b at two locations substantially upper left and substantially lower right in the view of the port door 14, and these suction pads 17a and 17b. Is connected to a vacuum source, and when the FOUP door attaching / detaching mechanism disengages the FOUP door 4 from the opening 3, the FOUP door 4 is adsorbed and held by the adsorbing force. Also,
Registration pins (hereinafter abbreviated as resist pins) 18a and 18b are implanted in the center of the suction pads 17a and 17b. These resist pins 18a, 18b
Is for positioning the port door 14 so that the FOUP door 4 can be held in a fixed position, and is inserted when the FOUP 1 is advanced into the holes 4a and 4b provided in the FOUP door 4 in accordance with the standard. Is done. The suction pads 17a and 17b suck and hold the FOUP door 4 after the resist pins 18a and 18b can be engaged with the holes 4a and 4b without any problem.

The FOUP door attaching / detaching / holding mechanism as described above does not perform its function when the FOSB (see FIG. 9) is placed on the dock plate 11. Because F
This is because the OSB is normally placed on the dock plate 11 with the lid (door) that closes the opening being removed manually and the lid being opened. The lid that closes the opening of FOSB
It is made more rugged than the lid (FOUP door 4) that closes the opening 3 of the FOUP 1.
It cannot be attached / detached by the door attaching / detaching mechanism.

In the lower left position of the port door 14 in FIG. 1, a lid for closing the opening 3 of the FOUP 1 (F
A lid detecting means 19 for detecting the presence or absence of the OUP door 4) is provided. This lid detecting means 19
Is constituted by a distance setting type photoelectric sensor. Then, the beam 20 is radiated in the FOUP 1 direction from the surface of the port door 14 opposite to the room A side, and the presence of the FOUP door 4 is detected.

When the FOSB is placed on the dock plate 11, the beam of the photoelectric sensor 19 is radiated in the FOUP1 direction in the same manner from the surface of the port door 14 opposite to the room A side.
This time, the absence of the FOSB lid is detected. However, this is a normal case in which the FOSB lid is removed in advance and the FOSB is correctly placed on the dock plate 11. The position where the lid detection means 19 is provided is not limited to the above position of the port door 14.

As the lid detection means, a limit switch 20 may be used as shown in FIGS. 4 and 5 instead of the photoelectric sensor 19. The limit switch 20 is a contact-type sensor, and detects the presence of a lid when the contact 20a at the tip thereof is pressed against the lid of the container.

As described above, the FOUP opener 1 according to the present embodiment can be used as a load port for a plurality of types of containers such as the FOUP 1 and the FOSB, and can support a plurality of types of containers. However, for that purpose, it is necessary to correctly recognize in advance what kind of container the container placed on the dock plate 11 is, and by the correct work procedure corresponding to each container based on this recognition, The wafer 2 that is the object to be processed accommodated in the container can be automatically transferred between the container and the processing apparatus via the handling robot.

Therefore, next, a prior recognition work as to what kind of container is placed on the dock plate 11, confirmation work of the recognition, and delivery of the processing object contained in the container based on the recognition A series of work flows will be described in detail with reference to FIG. 6 in the case where the photoelectric sensor 19 is used as the lid detecting means.

In this embodiment, the container is placed on the dock plate 11 with two types of lids, those with a lid and those without a lid, and the FOUP 1 without a lid is taken up with a lid. As a thing, FOSB is made into the container of work object. These series of work flows are programmed and incorporated in one area of the automatic control device of the FOUP opener 1.

  First, as to what kind of container the container placed on the dock plate 11 is, whether the photoelectric sensor 19 has a lid (door) for closing the opening of the container, that is, the lid Presence / absence is detected (step 1).

When the presence of a lid is detected in step 1, the container is recognized as FOUP 1 (step 2). Then, the dock plate 11 moves forward toward the port plate 12 (step 3).

When the dock plate 11 moves forward in the direction of the port plate 12 and the FOUP door 4 approaches a predetermined distance from the port door 14, the registration pins 18 a and 18 b provided on the port door 14 and the FOUP door 4 Whether or not there is a collision is determined (step 4).

If the container is correctly FOUP1, the resist pins 18a, 18b
Since these pins are immersed in the holes 4a and 4b of the door 4, the pins and the FOUP door 4 do not collide. In this case, NO is determined in step 4, and the process proceeds to step 5. In step 5, the FOUP door attaching / detaching mechanism built in the port door 14 releases the latch of the FOUP door 4 and causes the FOUP door 4 to leave the opening 3 (step 5).

Next, the FOUP door holding mechanism built in the port door 14 holds the FOUP door 4, and the port door opening / closing device 13 separates the port door 14 from the opening 15 and retracts it from the port plate 12. Lower and retreat to the lower area in the room A (step 6).

In this way, the FOUP 1 is opened and the interior of the FOUP 1 is in communication with the chamber A of the processing apparatus. Therefore, the wafer 2 that is the object to be processed accommodated in the FOUP 1 is handled between the FOUP 1 and the processing apparatus. Automatic delivery work via a robot becomes possible, and loading / unloading of the wafer 2 between the FOUP 1 and the processing apparatus is started (step 7).

In step 4, when the registration pins 18a and 18b collide with the FOUP door 4,
If YES is determined, the process proceeds to step 8. In this case, the container is not FOUP1,
It may have been FOSB correctly. This FOSB is placed on the dock plate 11 with the opening closed by the lid without accidentally removing the lid that closes the opening, and it is determined that the photoelectric sensor 19 has detected the presence of the lid. Is done. Therefore, in this case, it is confirmed that the container is not FOUP1 but FOSB, assuming that the container in step 2 is erroneously recognized as FOUP1. Then, since this FOSB has a lid for closing the opening, it is difficult to continue the subsequent transfer operation of the wafer 2 automatically by the FOUP opener 1, and the operation is stopped as an error (step 8).

The technical means for determining whether or not there is a collision between the resist pins 18a and 18b and the FOUP door 4 in step 4 and for recognizing the correct container type in step 8 constitute a first confirmation means.

If it is detected in step 1 that there is no lid, the container is recognized as FOSB (step 9). Then, the latch key built in the port door 14 is reversed 90 ° (step 10), and the dock plate 11 moves forward toward the port plate 12 (step 11).

The dock plate 11 moves forward toward the port door 14, and the FOSB door (lid)
When the port door 14 approaches a predetermined distance, it is determined whether or not there is a collision between the inverted latch key built in the port door 14 and the FOSB door (step 12).

  If the container is correctly FOSB, the FOSB lid has been removed beforehand, so that the latch key and the FOSB lid do not collide. In this case, NO is determined in step 12, and the process proceeds to step 13. In step 13, the port door opening / closing device 13 disengages the port door 14 from the opening 15, retracts it from the port plate 12, and lowers and retracts it to the lower region in the room A (step 13).

In this way, the FOSB is in communication with the room A of the processing apparatus.
B can be automatically transferred between the processing apparatus and the processing apparatus via the handling robot of the wafer 2 that is the object to be processed accommodated in the FOSB, and the wafer 2 can be transferred between the FOSB and the processing apparatus. Taking in and out is started (step 14).

If it is determined in step 12 that the latch key and the door of FOSB collide with each other, it is determined YES and the process proceeds to step 15. In such a case, for example, the FOSB is mistakenly placed on the dock plate 11 with the lid closing the opening closed, and the placement position is wrong (for example, behind the correct placement position). Therefore, the possibility that the photoelectric sensor 19 has detected the absence of the cover because of the fact that the photoelectric sensor 19 has been placed at a position where the detection capability of the photoelectric sensor 19 does not reach,
UP1 was correctly placed on the dock plate 11 with the FOUP door 4 closed.
It is possible that the photoelectric sensor 19 has detected that there is no cover because the mounting position is incorrect (for example, it has been mounted behind the correct mounting position and beyond the detection capability of the photoelectric sensor 19). Sex is conceivable.

None of these possible states are normal, so in this case,
Assuming that the detection of the container without the lid by the photoelectric sensor 19 in Step 1 was wrong,
The erroneous detection will be confirmed. Then, it is difficult for the FOUP opener 1 to continue the subsequent automatic wafer 2 delivery operation, and the operation is stopped as an error (step 15).
).

Latch key inversion operation in step 10, latch key and FO in step 12
Technical means for determining whether or not there is a collision with the SB lid (door), recognizing the correct container type in step 15, determining whether or not there is a lid, determining whether the placement position is correct, and the like are as follows. 2
The confirmation means is configured.

As described above, the FOUP opener 1 according to this embodiment has the container placed on the dock plate 11 being the FOUP 1 or the FOSB, and these containers are placed on the dock plate 11 in a correct state. It is possible to smoothly and safely advance the automatic delivery work of the object to be processed according to the correct work procedure according to the type of each container while determining and confirming whether or not it is done.

Next, a series of a flow of a prior recognition operation as to what kind of container is placed on the dock plate 11 and a delivery operation of the container to-be-processed object based on the recognition, The case where the limit switch 20 is used as the detection means will be described in detail with reference to FIG.

  First, regardless of what kind of container the container placed on the dock plate 11 is, the dock plate 11 moves forward toward the port plate 12 with the container placed ( Step 1).

When the dock plate 11 advances in the direction of the port plate 12 and the container approaches a predetermined distance from the port door 14, the resist pins 18a and 18b provided on the port door 14 and the container lid It is determined whether or not there is a collision with (door) (step 2).

When the container is FOUP 1, the resist pins 18 a and 18 b do not collide with the FOUP door 4. Also, even if the container is FOSB, if the FOSB is placed on the dock plate 11 with the lid properly closing the opening removed, the resist pins 18a, 18b and the FOSB door collide. There is nothing. In these cases, NO is determined in step 2, and the process proceeds to step 3. In step 3, the limit switch 20 detects whether or not there is a lid (door) for closing the opening of the container, that is, the presence or absence of the lid (step 3).

When the presence of a lid is detected in step 3, the container is recognized 1 as FOUP 1 (step 4). Then, the FOUP door attaching / detaching mechanism built in the port door 14 releases the latch of the FOUP door 4 and separates the FOUP door 4 from the opening 3 (step 5).

Next, the FOUP door holding mechanism built in the port door 14 holds the FOUP door 4, and the port door opening / closing device 13 separates the port door 14 from the opening 15 and retracts it from the port plate 12. Lower and retreat to the lower area in the room A (step 6).

In this way, the FOUP 1 is opened and the interior of the FOUP 1 is in communication with the chamber A of the processing apparatus. Therefore, the wafer 2 that is the object to be processed accommodated in the FOUP 1 is handled between the FOUP 1 and the processing apparatus. Automatic delivery work via a robot becomes possible, and loading / unloading of the wafer 2 between the FOUP 1 and the processing apparatus is started (step 7).

If it is detected in step 3 that there is no lid, the container is recognized as FOSB (step 9). Then, the port door opening and closing device 13 opens the port door 14 1
5 is moved away from the port plate 12 and moved back to the lower region in the room A (step 10).

In this way, the FOSB is in communication with the room A of the processing apparatus.
B can be automatically transferred between the processing apparatus and the processing apparatus via the handling robot of the wafer 2 that is the object to be processed accommodated in the FOSB, and the wafer 2 can be transferred between the FOSB and the processing apparatus. Taking in and out is started (step 11).

  In step 2, if the resist pins 18a and 18b collide with the container lid (door), it is determined as YES and the process proceeds to step 8. In this case, there is a high possibility that the container is FOSB, and it is determined that FOSB has been placed on the dock plate 11 in a state where the lid for accidentally closing the opening is closed. Then, since this FOSB has a lid for closing the opening, it is difficult to continue the subsequent transfer operation of the wafer 2 automatically by the FOUP opener 1, and the operation is stopped as an error (step 8).

As described above, when the limit switch 20 is used as the lid detecting means, the first confirmation means for confirming that the container is FOUP 1 (step 4), detection of the container without the lid by the limit switch 20 ( There is no second confirmation means for confirming step 3), but prior to these steps, step 2 is performed, where the container is FOU
Since the possibility of P1 and the possibility of FOSB are determined, the accuracy of recognition of the container type by the FOUP opener 1 is high, and it is on the safe side.

  The invention of the present application is not limited to the above embodiments, and various modifications can be made without departing from the scope of the invention.

It is a partial front view of the FOUP opener in which the container recognition method of the FOUP opener which can respond to a plurality of types of containers according to an embodiment of the present invention is executed . It is the same partial side view. It is the same top view. It is a partial front view of the FOUP opener showing a modification of the lid detection means, and is a view showing a partially broken partial side view as an attached view. It is the elements on larger scale of the figure shown as an attached figure in FIG. It is a flowchart of the recognition operation | work of the kind of container which the container recognition method of the FOUP opener performs, and the delivery operation | work of the to-be-processed object accommodated in the container when a photoelectric sensor is used as a lid | cover detection means. It is a flowchart of the recognition operation | work of the kind of container which the container recognition method of the FOUP opener performs, and the delivery operation | work of the to-be-processed object accommodated in the container when a limit switch is used as a lid | cover detection means. It is an external view of FOUP. It is an external view of FOSB.

1 ... FOUP (container), 2 ... semiconductor upper blade, 3 ... opening, 4 ... FOUP door, 4a,
4b ... hole, 5 ... FOUP body, 10 ... FOUP opener (container opening and closing device), 11 ... FOU
P mounting table (dock plate), 12 ... port plate, 13 ... port door opening and closing device, 14
... Port door, 15 ... Open, 16a, 16b ... Latch key in / out opening, 17a, 17b ...
Adsorption pads, 18a, 18b ... registration pins (registration pins), 19 ... lid detection means (photoelectric sensor), 20 ... lid detection means (limit switch).

Claims (4)

For FOUP is a container of the front open conveyed through the plant and housed in a closed state of the semiconductor upper teeth, and front open to be conveyed between factories and housed in a closed state semi conductor wafer Used as a load port for the FOSB container,
The FOUP is placed on the container placement table of the load port with the lid that closes the opening closed.
The FOSB is mounted on the container mounting table of the load port in a state where a lid for closing the opening is opened.
In the container recognition method of the FOUP opener that can handle multiple types of containers,
The port door of the FOUP opener is provided with a lid detecting means for detecting the presence or absence of a lid for closing the opening of the container,
In the lid detection means, the presence or absence of a lid of the container placed on the container placing table is detected,
When it is detected that there is a lid, the container is recognized as a FOUP with the lid closed, and further, it is determined whether or not there is a collision between the lid of the container and the resist pin provided on the port door. Confirm that the recognition was correct,
When it is detected that there is no lid, the container is recognized as a FOSB with the lid open, and the latch key provided on the port door is inverted 90 ° to determine whether there is a collision between the container and the latch key. And confirming that the recognition was correct when it was determined that there was no collision.
A container recognition method for a FOUP opener that can handle a plurality of types of containers. FOUP, which is a front-open container that accommodates a semiconductor wafer in a sealed state and is transported through a factory, and a front-open container that is accommodated in a sealed state and is transported between factories. Used as a load port for a certain FOSB,
The FOUP is placed on the container of the load port with the lid closing the opening closed.
Placed on the table,
The FOSB is placed on the container of the load port with a lid that closes the opening being opened.
Placed on the table,
In the container recognition method of the FOUP opener that can handle multiple types of containers,
The port door of the FOUP opener is provided with a lid detection means for detecting the presence or absence of a lid that closes the opening of the container,
It is determined whether or not there is a collision between the lid of the container placed on the container mounting table and a resist pin provided on the port door. When it is determined that there is no collision, the lid detecting means further detects the collision of the container. Detect the presence or absence of a lid,
When it is detected that there is a lid, the container recognizes that it is a FOUP with the lid closed;
When it is detected that there is no lid, the container is recognized as a FOSB with the lid open;
A container recognition method for a FOUP opener that can handle a plurality of types of containers. The FOUP opener container recognition method according to claim 1, wherein the lid detecting means is a photoelectric sensor. 3. The container recognition method for a FOUP opener capable of handling a plurality of types of containers according to claim 2 , wherein the lid detecting means is a limit switch.

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