JP4430733B2 - Method for producing rolled copper foil with excellent flexibility - Google Patents
Method for producing rolled copper foil with excellent flexibility Download PDFInfo
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- JP4430733B2 JP4430733B2 JP2009172133A JP2009172133A JP4430733B2 JP 4430733 B2 JP4430733 B2 JP 4430733B2 JP 2009172133 A JP2009172133 A JP 2009172133A JP 2009172133 A JP2009172133 A JP 2009172133A JP 4430733 B2 JP4430733 B2 JP 4430733B2
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims description 107
- 239000011889 copper foil Substances 0.000 title claims description 88
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000013078 crystal Substances 0.000 claims description 36
- 229910052802 copper Inorganic materials 0.000 claims description 19
- 239000010949 copper Substances 0.000 claims description 19
- 230000000149 penetrating effect Effects 0.000 claims description 19
- 238000005096 rolling process Methods 0.000 claims description 13
- 238000000137 annealing Methods 0.000 claims description 12
- 238000005097 cold rolling Methods 0.000 claims description 10
- 238000003723 Smelting Methods 0.000 claims 1
- 238000005452 bending Methods 0.000 description 14
- 238000010438 heat treatment Methods 0.000 description 9
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 238000005496 tempering Methods 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- SWXQKHHHCFXQJF-UHFFFAOYSA-N azane;hydrogen peroxide Chemical compound [NH4+].[O-]O SWXQKHHHCFXQJF-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000005098 hot rolling Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Metal Rolling (AREA)
Description
本発明は、フレキシブルプリント配線板(Flexible Printed Circuit、以下FPCとも称する)などの可撓性配線部材用として好適な圧延銅箔の製造方法に関する。 The present invention relates to a method for producing a rolled copper foil suitable for flexible wiring members such as a flexible printed circuit board (hereinafter also referred to as FPC).
FPCは、可撓性の樹脂基材に銅箔を積層し、接着剤又は加熱加圧により一体化したものであり、デジタルカメラ、携帯電話、HDD、プリンター、液晶パネルなどの配線部材として広く使用されている。また、FPCは折り曲げでき、狭い空間にも実装可能であるため、HDDやDVD及びCD−ROMなどのディスク関連機器の可動部、折りたたみ式携帯電話の折り曲げ部などに多く用いられている。 FPC is made by laminating a copper foil on a flexible resin base material and integrated by adhesive or heat and pressure, and is widely used as a wiring member for digital cameras, mobile phones, HDDs, printers, liquid crystal panels, etc. Has been. Further, since the FPC can be bent and can be mounted in a narrow space, the FPC is often used for a movable part of a disk-related device such as an HDD, a DVD, and a CD-ROM, and a folding part of a folding mobile phone.
FPCの一般的な製造工程としては、例えば、ポリイミドやポリエステルなどからなる基材(ベースフィルム)に表面処理された銅箔を接着剤で張り合わせ、全体を130〜180℃の温度に加熱することにより接着剤を硬化させた後、配線のパターニングを行い、その上に更に配線保護のためにカバーレイを施す。また、接着剤の代わりに、ベースフィルムと銅箔を130〜200℃で加熱加圧することによって一体化する方法もある。 As a general manufacturing process of FPC, for example, by bonding a surface-treated copper foil to a base material (base film) made of polyimide or polyester with an adhesive, and heating the whole to a temperature of 130 to 180 ° C. After the adhesive is cured, the wiring is patterned, and a coverlay is further applied thereon to protect the wiring. There is also a method of integrating the base film and the copper foil by heating and pressing at 130 to 200 ° C. instead of the adhesive.
FPCに使用する銅箔としては、上記した折り曲げ部用の配線部材としての用途から、電解銅箔よりも高い屈曲性を有するタフピッチ銅あるいは無酸素銅の圧延銅箔が使用されている。これらの圧延銅箔を製造するには、その銅素材を熱間圧延した後、所定の厚さとなるまで冷間圧延と焼鈍を繰り返し、最後に最終冷間圧延して所定の板厚に仕上げる。尚、FPC用の圧延銅箔の板厚は、通常は50μm以下であり、最近では十数μm以下と更に薄くなる傾向にある。 As the copper foil used for the FPC, rolled copper foil of tough pitch copper or oxygen-free copper having higher flexibility than the electrolytic copper foil is used from the above-described use as the wiring member for the bent portion. In order to produce these rolled copper foils, the copper material is hot-rolled, then cold rolling and annealing are repeated until a predetermined thickness is obtained, and finally the final cold rolling is performed to obtain a predetermined plate thickness. In addition, the plate | board thickness of the rolled copper foil for FPC is 50 micrometers or less normally, and it exists in the tendency which becomes still thinner with 10 or less micrometers recently.
これらタフピッチ銅や無酸素銅の圧延銅箔は、焼鈍することによって軟化して屈曲性が向上するため、焼鈍した状態でFPCに使用されている。しかしながら、FPCの屈曲性はベースフィルムやカバーレイと比較して屈曲性に劣る銅箔によって決まるため、FPC構成材料のうち銅箔の屈曲性が最も重要とされている。そのため、FPC用のタフピッチ銅あるいは無酸素銅からなる圧延銅箔については、機器の耐久性の観点から更に高い屈曲性が求められている。 These rolled copper foils of tough pitch copper and oxygen-free copper are used for FPC in an annealed state because they are softened by annealing and have improved flexibility. However, since the flexibility of the FPC is determined by the copper foil that is inferior to the flexibility of the base film and the coverlay, the flexibility of the copper foil is the most important among the FPC constituent materials. For this reason, rolled copper foil made of tough pitch copper or oxygen-free copper for FPC is required to have higher flexibility from the viewpoint of the durability of the equipment.
このような屈曲性に優れた圧延銅箔として、例えば特許第3009383号公報には、200℃で30分間加熱して再結晶組織に調質した状態において、15%以上の伸びを有し、且つ圧延面のX線回折で求めた(200)面の強度(I)が、微粉末銅のX線回折で求めた(200)面の強度(I0)に対し、I/I0>20である立方体集合組織を有することを特徴とする圧延銅箔が報告されている。 As such a rolled copper foil having excellent flexibility, for example, in Japanese Patent No. 3009383, it has an elongation of 15% or more in a state where it is tempered to a recrystallized structure by heating at 200 ° C. for 30 minutes, and The strength (I) of the (200) plane determined by X-ray diffraction of the rolled surface is I / I 0 > 20 with respect to the strength (I 0 ) of the (200) plane determined by X-ray diffraction of fine powder copper. A rolled copper foil characterized by having a certain cubic texture has been reported.
本発明は、このような従来の事情に鑑みてなされたものであり、屈曲性に優れた圧延銅箔の製造方法を提供することを目的とするものである。 This invention is made | formed in view of such a conventional situation, and it aims at providing the manufacturing method of the rolled copper foil excellent in the flexibility.
上記目的を達成するため、本発明が提供する屈曲性に優れた圧延銅箔の製造方法は、タフピッチ銅又は無酸素銅の鋳塊を熱間圧延して厚さ18mmとし、更に冷間圧延によって厚さ2.0mmにまで薄くして中間焼純した後、引き続き冷間圧延と焼鈍を繰り返して厚さ1.4〜0.14mmとし、最終圧延によって厚さ10〜33μmの最終板厚としてから、130〜200℃で30分最終焼鈍することにより、得られる銅箔の板厚方向の断面組織において、該銅箔の両表面間を板厚方向に貫通する結晶粒の断面面積率を41%以上に制御することを特徴とする。 In order to achieve the above object, the method for producing a rolled copper foil excellent in flexibility provided by the present invention is to hot-roll an ingot of tough pitch copper or oxygen-free copper to a thickness of 18 mm, and further by cold rolling. After thinning to 2.0 mm and intermediate annealing, cold rolling and annealing are repeated to obtain a thickness of 1.4 to 0.14 mm, and a final thickness of 10 to 33 μm is obtained by final rolling. In the sectional structure in the plate thickness direction of the copper foil obtained by final annealing at 130 to 200 ° C. for 30 minutes, the cross-sectional area ratio of the crystal grains penetrating between both surfaces of the copper foil in the plate thickness direction is 41%. Control is as described above.
本発明によれば、優れた屈曲性を備え、フレキシブルプリント配線板(FPC)などの可撓性配線部材用として好適な圧延銅箔を提供することができる。 ADVANTAGE OF THE INVENTION According to this invention, the rolled copper foil provided with the outstanding flexibility and suitable for flexible wiring members, such as a flexible printed wiring board (FPC), can be provided.
本発明者は、タフピッチ銅又は無酸素銅からなる圧延銅箔における屈曲性の改善向上について鋭意検討を進めた結果、圧延銅箔を焼鈍した状態の銅箔の断面組織において、銅箔の両表面の間を板厚方向に貫通した結晶粒の断面積が全体の断面積に対して占める比率(断面面積率)が大きくなるほど、銅箔の屈曲性が大幅に改善されることを見出した。 As a result of earnestly studying the improvement in flexibility in rolled copper foil made of tough pitch copper or oxygen-free copper, the present inventor has obtained a cross-sectional structure of the copper foil in a state where the rolled copper foil is annealed, and both surfaces of the copper foil. It has been found that the flexibility of the copper foil is greatly improved as the ratio (cross-sectional area ratio) of the cross-sectional area of the crystal grains penetrating in the direction of the plate thickness to the total cross-sectional area increases.
即ち、本発明の圧延銅箔においては、両表面の間を板厚方向に貫通した結晶粒の結晶粒の断面面積率を41%以上とすることにより、従来よりも屈曲性に優れた圧延銅箔を得ることができる。更に好ましくは、銅箔の両表面の間を板厚方向に貫通した結晶粒の断面面積率を61%以上とすることによって、銅箔を板厚方向に貫通した結晶粒が銅箔表面に現れる比率が急激に高まる傾向があり、このため銅箔の屈曲性がより一層改善される。 That is, in the rolled copper foil of the present invention, the rolled copper having better flexibility than the conventional one by setting the cross-sectional area ratio of the crystal grains that penetrated between both surfaces in the plate thickness direction to 41% or more. A foil can be obtained. More preferably, by setting the cross-sectional area ratio of the crystal grains penetrating between both surfaces of the copper foil in the plate thickness direction to 61% or more, the crystal grains penetrating the copper foil in the plate thickness direction appear on the copper foil surface. There is a tendency for the ratio to increase rapidly, and thus the flexibility of the copper foil is further improved.
板厚を貫通した結晶粒が多いほど銅箔の屈曲性が向上する理由は、以下のように考えられる。即ち、通常は屈曲による変形により転位が結晶粒内から発生し、この転位が粒界部に集積して、その粒界部分で破断が起こる。一方、結晶粒が銅箔の板厚を貫通した部分では、屈曲による変形は単結晶そのものの変形となり、結晶粒内に発生した転位が表面に抜けてしまうため、転位の集積が起こらず、繰り返しの変形に対して破断が起こり難くなるものと考えられる。 The reason why the flexibility of the copper foil is improved as the number of crystal grains penetrating the plate thickness increases is as follows. That is, dislocations are usually generated from within the crystal grains due to deformation due to bending, and the dislocations accumulate at the grain boundary part, and breakage occurs at the grain boundary part. On the other hand, in the part where the crystal grain penetrates the plate thickness of the copper foil, the deformation due to bending becomes the deformation of the single crystal itself, and the dislocation generated in the crystal grain escapes to the surface. It is considered that breakage is less likely to occur with respect to the deformation of.
銅箔を厚さ方向に貫通した結晶粒の断面面積率は、図1に示すように、銅箔1の断面金属組織の顕微鏡写真観察により、銅箔1の表面1aと表面1bの間を板厚dの方向に貫通した貫通結晶粒2の断面積Aを求め、貫通していない非貫通結晶粒3も含めた銅箔1全体の断面積Bに対する断面積Aの比、即ち断面積A/断面積Bとして算出する。具体的な断面積の測定は、銅箔を樹脂に埋め込み、その銅箔の断面を機械研磨して鏡面に仕上げ、アンモニア−過酸化水素水でエッチングした後、光学顕微鏡による組織写真から測定する。
As shown in FIG. 1, the cross-sectional area ratio of the crystal grains penetrating through the copper foil in the thickness direction is determined by observing the cross-sectional metal structure of the copper foil 1 between the
フレキシブルプリント配線板(FPC)に用いる圧延銅箔の厚みは、一般的に50μm以下であり、最近では更に薄くなりつつある。従って、銅箔の結晶粒の断面積を測定するに際しては、銅箔を折りたたんで何層かに積層して樹脂に埋め込むことが好ましい。また、断面積の顕微鏡観察に用いる銅箔のサンプリングは、局部的な粗大結晶粒や微細結晶粒の影響を小さくするために、銅箔の板厚の少なくとも100倍以上の長さとすることが望ましい。 The thickness of the rolled copper foil used for the flexible printed wiring board (FPC) is generally 50 μm or less, and recently it is becoming thinner. Therefore, when measuring the cross-sectional area of the crystal grains of the copper foil, it is preferable that the copper foil is folded and laminated into several layers and embedded in the resin. In addition, the sampling of the copper foil used for microscopic observation of the cross-sectional area is preferably at least 100 times longer than the thickness of the copper foil in order to reduce the influence of local coarse crystal grains and fine crystal grains. .
本発明の圧延銅箔の製造方法においては、上記した屈曲性に優れた圧延銅箔を得るため、タフピッチ銅又は無酸素銅の鋳塊を熱間圧延して厚さ18mmとし、更に冷間圧延によって厚さ2.0mmにまで薄くして中間焼純した後、引き続き冷間圧延と焼鈍を繰り返して厚さ1.4〜0.14mmとし、最終圧延によって厚さ10〜33μmの最終板厚とする。この圧延銅箔は焼鈍した状態で使用するが、そのための焼純(最終焼純)は130〜200℃で30分とする。 In the manufacturing method of the rolled copper foil of the present invention, in order to obtain the above-described rolled copper foil having excellent flexibility, an ingot of tough pitch copper or oxygen-free copper is hot rolled to a thickness of 18 mm, and further cold rolled. After thinning to a thickness of 2.0 mm by intermediate annealing, cold rolling and annealing are subsequently repeated to a thickness of 1.4 to 0.14 mm, and a final thickness of 10 to 33 μm is obtained by final rolling. To do. This rolled copper foil is used in an annealed state, and the tempering (final tempering) for that purpose is 130-200 ° C. for 30 minutes.
上記最終焼鈍は、圧延銅箔の粗面化工程におけるメッキなどの表面処理後に施される熱処理時か、あるいはFPCの製造工程におけるベースフィルムとの一体化時に曝される130〜200℃の温度での熱処理によって行われる。従って、本発明によれば、FPC製造に用いる状態、即ち最終圧延後に焼鈍された状態の圧延銅箔について、結晶粒の断面面積率を調べるだけで、その圧延銅箔の屈曲性を検査することが可能である。 The final annealing is performed at a temperature of 130 to 200 ° C. that is exposed during heat treatment performed after surface treatment such as plating in the roughening process of the rolled copper foil or when integrated with the base film in the FPC manufacturing process. The heat treatment is performed. Therefore, according to the present invention, for the rolled copper foil in the state used for FPC production, that is, the annealed state after the final rolling, the flexibility of the rolled copper foil is inspected only by examining the cross-sectional area ratio of the crystal grains. Is possible.
上記本発明の製造方法により得られる銅箔は、下記する条件により銅箔の両表面間を板厚方向に貫通する結晶粒の断面面積率を制御することができる。即ち、(1)最終圧延前の平均結晶粒径が同じであれば、最終圧延の圧下率が大きいほど貫通結晶粒の断面面積率を大きくすることができる。また、(2)最終圧延の圧下率が同一であれば、最終圧延前の平均結晶粒径が小さいほど貫通結晶粒の断面面積率を大きくすることができる。 The copper foil obtained by the manufacturing method of the present invention can control the cross-sectional area ratio of crystal grains penetrating between both surfaces of the copper foil in the plate thickness direction under the following conditions. That is, (1) If the average grain size before the final rolling is the same, the larger the rolling reduction of the final rolling, the larger the cross-sectional area ratio of the through crystal grains. Further, (2) if the rolling reduction of the final rolling is the same, the cross-sectional area ratio of the through crystal grains can be increased as the average crystal grain size before the final rolling is smaller.
このようにして得られる圧延銅箔は、銅箔の板厚方向の断面組織において、銅箔の両表面間を板厚方向に貫通する結晶粒の断面面積率を41%以上に制御することにより、屈曲回数が320万回以上にまで向上し、従来よりも屈曲性に優れた圧延銅箔を得ることができる。 The rolled copper foil thus obtained has a cross-sectional structure in the plate thickness direction of the copper foil, by controlling the cross-sectional area ratio of crystal grains penetrating between both surfaces of the copper foil in the plate thickness direction to 41% or more. Further, the number of bendings can be improved to 3.2 million times or more, and a rolled copper foil having better flexibility than the conventional one can be obtained.
高純度の電気銅を溶解し、厚さ200mm、幅650mmのタフピッチ銅(酸素含有量250ppm)の鋳塊を作製した。この鋳塊を18mmの板厚まで熱間圧延で薄くし、表面のスケールを面削により除去した後、冷間圧延により2.0mmの板厚まで薄くして、中間焼鈍・洗浄を行い、エッジ部をトリミングして600mm幅とした。その後、更に冷間圧延と焼鈍・洗浄を繰り返して所定の板厚とした後、その所定の板厚の銅箔を最終冷間圧延して0.016mm(16μm)の圧延銅箔を製造した。 High-purity electrolytic copper was melted to produce an ingot of tough pitch copper (oxygen content 250 ppm) having a thickness of 200 mm and a width of 650 mm. This ingot is thinned by hot rolling to a plate thickness of 18 mm, the scale on the surface is removed by chamfering, then thinned to a plate thickness of 2.0 mm by cold rolling, intermediate annealing and cleaning are performed, and an edge is obtained. The part was trimmed to a width of 600 mm. Thereafter, cold rolling and annealing / washing were repeated to obtain a predetermined plate thickness, and then the copper foil having the predetermined plate thickness was subjected to final cold rolling to produce a 0.016 mm (16 μm) rolled copper foil.
得られた板厚16μmの圧延銅箔を、フレキシブルプリント配線板(FPC)の製造工程での熱処理を模して、180℃で30分の熱処理を施した。この焼鈍された状態の圧延銅箔について、板厚方向に貫通した貫通結晶粒の断面面積率並びに屈曲寿命を測定した。また、上記と同様にして、ただし最終圧延前の板厚と平均結晶粒径を変えることにより結晶組織を制御して、板厚33μm及び10μmの圧延銅箔を製造し、同様の熱処理を施した後、貫通結晶粒の断面面積率並びに屈曲寿命を測定した。得られた結果を、下記表1に示した。 The obtained rolled copper foil with a plate thickness of 16 μm was subjected to heat treatment at 180 ° C. for 30 minutes, imitating heat treatment in the manufacturing process of the flexible printed wiring board (FPC). For the rolled copper foil in the annealed state, the cross-sectional area ratio and the bending life of the through crystal grains penetrating in the plate thickness direction were measured. Further, in the same manner as above, however, a rolled copper foil having a thickness of 33 μm and 10 μm was manufactured by changing the thickness and the average crystal grain size before the final rolling, and subjected to the same heat treatment. Thereafter, the cross-sectional area ratio and the bending life of the through crystal grains were measured. The obtained results are shown in Table 1 below.
尚、熱処理後の焼鈍された状態の圧延銅箔における貫通結晶粒の断面面積率は、以下のようにして求めた。即ち、板厚に対して200倍の長さとなるようにサンプリングを行い、その銅箔を積層させて樹脂に埋め込んだ後、銅箔の断面を機械研磨して鏡面に仕上げ、アンモニア−過酸化水素水でエッチングを行い、光学顕微鏡により銅箔断面の金属組織を観察した。具体的には、400倍の顕微鏡写真を撮影し、その組織写真から、銅箔を板厚方向に貫通する貫通結晶粒を着色し、画像ソフトを使用して全断面積に対する着色部の面積の比率を測定した。 In addition, the cross-sectional area ratio of the through crystal grain in the rolled copper foil in the annealed state after the heat treatment was obtained as follows. That is, sampling is performed so that the length is 200 times the plate thickness, the copper foil is laminated and embedded in a resin, and then the copper foil is mechanically polished to a mirror finish. Etching was performed with water, and the metal structure of the copper foil cross section was observed with an optical microscope. Specifically, a microphotograph of 400 times is taken, and from the structure photograph, the penetrating crystal grains penetrating the copper foil in the plate thickness direction are colored, and the area of the colored portion relative to the total cross-sectional area is measured using image software. The ratio was measured.
また、圧延銅箔の屈曲寿命については、図2に示す屈曲試験装置により測定した。即ち、この装置の固定板6と可動板7に試験用銅箔片5を固定し、可動板7を周期的に振動させることにより、試験用銅箔片5の中間部が所定の曲率半径でヘアピン状に屈曲され、ある屈曲回数に達した時点で破断する。この破断までの屈曲回数を屈曲寿命とした。尚、試験用銅箔片5の採取は、その長さ方向が圧延方向と平行になるように行った。また、測定条件は、試験用銅箔片5の幅12.7mm、試験用銅箔片5の長さ200mm、曲率半径2.5mm、振動ストローク25mm、振動速度500回/分とした。
Further, the bending life of the rolled copper foil was measured by a bending test apparatus shown in FIG. That is, the test
上記表1によれば、最終板厚が16μmの圧延銅箔の場合、焼鈍した状態の銅箔の断面組織において貫通結晶粒の断面面積率が41%以上である各試料は、銅箔の屈曲寿命が32万回を超え、断面面積率が41%未満の各試料と比較して屈曲性が大幅に改善されていることが分かる。また、銅箔の貫通結晶粒の断面面積率が61%以上であれば、屈曲寿命が42万回を超える結果が得られ、更に好ましいことが分かる。尚、試料7は従来一般的な条件で製造した圧延銅箔であり、その屈曲寿命は30万回に満たないものである。 According to Table 1 above, in the case of a rolled copper foil having a final plate thickness of 16 μm, each sample having a cross-sectional area ratio of the through crystal grains of 41% or more in the cross-sectional structure of the annealed copper foil is a bending of the copper foil. It can be seen that the flexibility is significantly improved as compared with each sample having a lifetime exceeding 320,000 times and a cross-sectional area ratio of less than 41%. Moreover, if the cross-sectional area ratio of the through crystal grains of the copper foil is 61% or more, the bending life exceeds 420,000 times, which is more preferable. Sample 7 is a rolled copper foil manufactured under conventional general conditions, and its bending life is less than 300,000 times.
また、最終板厚が33μm及び10μmの場合については、板厚が薄くなると屈曲性が向上し又板厚が厚くなると屈曲性が低下するために、上記最終板厚16μmの試料と単純に比較することはできない。しかしながら、試料10、12と試料11、13とを比較すると、貫通結晶粒の断面面積率を41%以上とすることで破断までの屈曲回数が増加し、断面面積率が41%未満の場合に比べて屈曲性が大きく改善されていることが明らかである。 Further, in the case where the final plate thickness is 33 μm and 10 μm, the flexibility is improved when the plate thickness is reduced, and the flexibility is lowered when the plate thickness is increased. Therefore, the final plate thickness is simply compared with the sample having the final plate thickness of 16 μm. It is not possible. However, when Samples 10 and 12 are compared with Samples 11 and 13, when the cross-sectional area ratio of the penetrating crystal grains is set to 41% or more, the number of bends until fracture increases, and the cross-sectional area ratio is less than 41%. It is clear that the flexibility is greatly improved as compared with that.
1 銅箔
1a、1b 表面
2 貫通結晶粒
3 非貫通結晶粒
5 試験用銅箔片
6 固定板
7 可動板
DESCRIPTION OF SYMBOLS 1
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