JP4437553B2 - Manifold block and valve unit using the same - Google Patents

Description

  The present invention relates to a manifold block to which component parts can be attached and a valve unit using the same.

  Conventionally, in slurry lines and various chemical liquid lines in the semiconductor industry, fluids such as chemical liquids containing slurry, acid chemical liquids, alkaline chemical liquids, and detergent solutions are branched from the primary flow path and supplied to the secondary flow paths. In addition, input from the secondary side flow path and merging are performed. If multiple chemical valves that control flow path switching are connected by piping, there is a problem that the piping space becomes large. Therefore, a valve unit that attaches component parts such as chemical valves to the manifold block is provided at the branching / merging position of the flow path. .

FIG. 24 is an external perspective view of a conventional valve unit 100. 25 is a plan view of the valve unit shown in FIG.
In the valve unit 100, the chemical valves 101 </ b> A, 101 </ b> B, and 101 </ b> C are attached to the upper surface of the manifold block 111 and are attached to the semiconductor manufacturing apparatus via the attachment plate 117. In the manifold block 111, joints 112A, 112B, 112C, and 112D are integrally formed and provided in different directions.

26 is an EE cross-sectional view of the valve unit 100 shown in FIG. 27 is a cross-sectional view of the valve unit shown in FIG. FIG. 28 is a cross-sectional view of the valve unit shown in FIG.
First, the manifold block used by the valve unit 100 will be described. Mounting holes 113A, 113B, 113C for mounting the chemical valves 101A, 101B, 101C through the diaphragm valve bodies 102A, 102B, 102C are formed on the upper surface of the manifold block 111 and communicate with the joints 112A, 112B, 112C, respectively. is doing. The manifold block 111 has communication channels 114A, 114B, and 114C formed coaxially with the mounting holes 113A, 113B, and 113C, and the communication channels 114A, 114B, and 114C open on the inner walls of the mounting holes 113A, 113B, and 113C. Valve seats 115A, 115B, and 115C are provided around the opening. The manifold block 111 has a common channel 116 formed in the horizontal direction from the joint 112D and communicates with the communication channels 114A, 114B, and 114C, respectively.

Next, the chemical liquid valves 101A, 101B, and 101C will be described.
The chemical liquid valves 101A, 101B, and 101C are air operated diaphragm valves. In the chemical valves 101A, 101B, 101C, the diaphragm valve bodies 102A, 102B, 102C are sandwiched between the cylinders 103A, 103B, 103C and the manifold block 111. The cylinders 103A, 103B, and 103C are covered with covers 104A, 104B, and 104C, and piston chambers 105A, 105B, and 105C are formed between the covers 104A, 104, and 104C. Piston chambers 105A, 105B, and 105C are slidably loaded with pistons 106A, 106B, and 106C, and the lower ends of the pistons 106A, 106B, and 106C pass through the cylinders 103A, 103B, and 103C, and the mounting holes 113A of the manifold block 111 are inserted. , 113B, 113C, and connected to the diaphragm valve bodies 102A, 102B, 102C.

The piston chambers 105A, 105B, 105C are airtightly partitioned into an upper chamber and a lower chamber by pistons 106A, 106B, 106C, and pilot ports 107A, 107B, 107C and 108A, 108B, 108C communicate with the upper chamber and the lower chamber, respectively. . Therefore, the valve unit 100 moves the pistons 106A, 106B, and 106C in the vertical direction by adjusting the pressure balance between the upper chamber and the lower chamber of the piston chambers 105A, 105B, and 105C, thereby moving the diaphragm valve body 102 to the valve seat 115A. , 115B, 115C.
The chemical valves 101A, 101B, and 101C, the manifold block 111, and the like are all made of resin for the appearance and the liquid contact portion, and ensure corrosion resistance.

  In such a valve unit 100, as shown in FIG. 27, the manifold block 111 is installed on the mounting plates 117A, 117B, and 117C, and the chemical valves 101A, 101B, and 101C are installed on the upper surface of the manifold block 111. Bolts 118 penetrating through the chemical liquid valves 101A, 101B, and 101C from above are inserted into the manifold block 111, and the tips are assembled to the mounting plates 117A, 117B, and 117C (for example, Patent Document 1 and Patent Document). 2, Patent Document 3, Patent Document 4, and Patent Document 5).

JP 2003-4151 A JP 2003-21248 A JP 2003-172466 A JP 2003-185039 A JP 2004-316667 A

However, the conventional valve unit 100 has the following problems.
(1) For example, when a chemical solution containing slurry flows to the valve unit 100, the chemical solution may adhere to the valve seats 115A, 115B, 115C and the diaphragm valve bodies 102A, 102B, 102C and condense. In this case, there is a possibility that fluid leakage may occur from the condensing portion, and therefore it is necessary to replace the valve seats 115A, 115B, 115C and the diaphragm valve bodies 102A, 102B, 102C. In the conventional valve unit 100, since the valve seats 115A, 115B, and 115C are integrally provided in one manifold block 111, even if the chemical solution condenses only on the valve seat 115A, the entire manifold block 111 must be replaced. There was a maintenance cost.
(2) Further, the flow path configuration of the semiconductor manufacturing apparatus varies from site to site depending on the installation status of peripheral devices and the like. In the conventional valve unit 100, since the positions of the joints 112A, 112B, 112C, and 112D are uniquely determined with respect to the manifold block 111, it is not possible to adapt to various flow path configurations flexibly. For this reason, manifold blocks 111 having different orientations of the joints 112A, 112B, and 112C have to be stocked, and maintenance is expensive.

  The present invention has been made to solve the above-described problems, and an object thereof is to provide an inexpensive manifold block that can cope with various flow path configurations with a small number of parts and a valve unit using the same.

In order to achieve the above object, a manifold block according to the present invention has the following configuration.
(1) In a manifold block to which a plurality of component parts can be attached, a valve chamber forming part communicating with the joint and the first communication channel is provided, and the valve chamber forming part and the component parts are attached when the component parts are attached. A first manifold block in which a valve seat is provided around an opening where the first communication channel opens to the valve chamber forming portion; and the surface in contact with the manifold block, the second communication flow channel communicating with the first communication flow channel is formed with a plurality, and a second manifold block formed with common flow channel that connects to each of the second connecting flow channel The first manifold block has a first seal groove in which a first convex groove is provided around an opening of a surface of the first communication channel that contacts the second manifold block. The second manifold block is formed with a second seal groove provided with a second uneven groove around the opening of the second communication flow path, and the first seal groove and the second seal groove A first concave and convex portion that is disposed between and seals a connecting portion of the first communication channel and the second communication channel and is fitted to the first convex and concave strip; 2 ridges are provided, and at least one of the first ridges or the first ridges has a press-fitting margin provided in the thickness direction, and at least the second ridges and the second ridges. One is a sealing member having a press-fitting allowance provided in the thickness direction, a female screw member attached to the mutually contacting surfaces of the first manifold block and the second manifold block, and the component parts to the first manifold block. A first fastening member that is inserted and fastened into one end opening of the female screw member, and a second fastening member that is inserted into the other end opening of the female screw member and fastened through the second manifold block; , characterized by having a.

(2) In a manifold block to which a plurality of component parts can be attached,
A valve chamber forming portion communicating with the joint and the first communication flow path, and when the component part is attached, the valve chamber is formed between the valve chamber forming portion and the component part; The first communication flow path is provided on a first manifold block provided with a valve seat around an opening where the first communication flow path opens in the valve chamber forming portion, and on a surface in contact with the first manifold block. A plurality of second communication channels communicating with each other, and a second manifold block formed with a common channel connected to each second communication channel, the component parts passing through the first manifold block and the second manifold block Disposed between a fastening member fastened to the second manifold block, a surface of the second manifold block that contacts the first manifold block, and the common flow path, A nut member provided with a screw hole for fastening the coupling member, the nut member is inserted from a surface perpendicular to the surface of the manifold block that contacts the first manifold block, and the fastening member is The screw hole is fastened .

(3) In the manifold block described in ( 2) , the first manifold block is provided with a first uneven groove around an opening of a surface of the first communication channel that contacts the second manifold block. A first seal groove is formed, and the second manifold block is formed with a second seal groove provided with a second uneven groove around the opening of the second communication channel, and the first seal groove A first concavo-convex ridge disposed between the second seal groove, sealing a connection portion of the first communication flow path and the second communication flow path, and fitting into the first concavo-convex ridge; A second ridge is fitted to the ridge, and at least one of the first ridge or the first ridge has a press-fitting margin provided in the thickness direction, and the second ridge At least one of the second ridges is in the thickness direction And a sealing member having a press-fitting allowance provided .

(4) In the manifold block according to any one of ( 1) to (3) , the first manifold block includes a first surface that opens the valve chamber forming portion and a second surface that contacts the second manifold block. Resin is molded into a rectangular parallelepiped shape in which the two surfaces form a square shape, and the joint is provided on one or more of the first surface and the outer surface connected perpendicularly to the second surface. It is characterized by that.
( 5 ) The invention described in ( 1 ) is characterized by having a rotation preventing mechanism for preventing the rotation of the female screw member when the second fastening member is fastened to the female screw member.

( 6 ) In the manifold block according to any one of ( 1) to (3) , the second manifold block has a counterbore for inserting a fastening member on a side opposite to a surface contacting the first manifold block. The fastening member is provided with an insertion hole so as to communicate with the counterbore from a surface perpendicular to the surface in contact with the first manifold block, loaded into the insertion hole, and inserted into the counterbore. It has the washer member in which the through-hole for penetrating was formed, It is characterized by the above-mentioned.

(7) In the manifold block described in ( 1), the female screw member includes a first mounting hole formed in a surface of the first manifold block that contacts the second manifold block, and the second manifold block. Both ends are inserted into a second mounting hole formed in a surface that contacts the first manifold block.

( 8 ) In the manifold block according to any one of (1) to ( 7 ), a surface that contacts the second manifold block is the same as a surface that the first manifold block contacts the second manifold block. A block body having a shape, comprising a joint block including a joint communicating with the second communication channel.
( 9 ) In the manifold block described in ( 8 ), the joint block is provided so as to be separable from a joint part communicating with the second communication channel and a body part attaching the joint part to the second manifold block. And an anti-rotation mechanism for preventing the joint portion from rotating relative to the main body portion.

( 10 ) In the manifold block according to any one of ( 1 ) to ( 9 ), a mounting plate attached to a surface of the second manifold block opposite to the surface that contacts the first manifold block; And an elastic member disposed between the second manifold block and the mounting plate and pressing the second manifold block against the first manifold block.

( 11 ) In order to achieve the above object, the valve unit of the present invention is characterized in that a valve is mounted on the manifold block described in any one of (1) to ( 10 ) above.

  In the manifold block of the present invention, the first manifold block is arranged on the second manifold block in accordance with the number of component parts, and the first communication channel of the first manifold block and the second communication channel of the second manifold block are communicated. Let Then, the joint of the first manifold block communicates with the common channel via the valve chamber forming portion of the first manifold block, the valve seat, the first communication channel, and the second communication channel of the second manifold block.

For example, when a chemical solution condenses on one of the valve seats, the first manifold block having the valve seat and the component parts attached thereto are removed from the second manifold block and replaced with a new first manifold block. Install. Therefore, just because the chemical solution is condensed on one of the valve seats, it is not necessary to replace the entire manifold block, and the maintenance cost is low.
In the manifold block of the present invention, since the first manifold block is divided from the second manifold block, the first manifold block can be attached to the second manifold block by changing the direction of the joint, and the flow path structure can be changed. It can be changed easily. Therefore, the number of manifold block stocks can be reduced, and maintenance costs can be reduced.
Therefore, according to the manifold block of the present embodiment, the first manifold block and the second manifold block can be used for various flow path configurations with a small number of parts, and the cost for maintenance and maintenance can be reduced and the cost can be reduced. Can be planned.

  In the manifold block of the present invention, the first surface where the valve chamber forming portion is opened and the second surface contacting the second manifold block of the first manifold block are square, and one or more of the outer surfaces are provided. Therefore, the first manifold block can be attached to the second manifold block 5 by changing the direction of the joint by 90 degrees on the second manifold block. Therefore, the manifold block of this invention can change a flow-path structure easily using the existing 1st manifold block.

In the manifold block of the present invention, the seal member mounted in the first and second seal grooves seals the connecting portion of the first communication channel and the second communication channel in the communication channel radial direction. Even when the second manifold block expands and contracts due to temperature changes and changes with time, the flow path connecting portion can be sealed.
In particular, when the first uneven groove of the first seal groove and the second uneven groove of the second seal groove are respectively engaged with the first uneven groove and the second uneven groove of the seal member, the first uneven groove or the first uneven groove. With the press-fitting allowance in the thickness direction provided on at least one of the first and second protrusions and the first uneven protrusion, the press-fit in the thickness direction provided on at least one of the second uneven line and the second uneven line Since the second convex and concave strips and the second concave and convex strips are tightly fitted by the margin, the connecting portions of the first manifold block and the second manifold block are sealed in the radial direction with respect to each other via the seal member.

The manifold block of the present invention includes an annular protrusion provided integrally with the first manifold block (or second manifold block) and an annular recess provided integrally with the second manifold block (or first manifold block). When the strips are fitted together, the protrusion provided on the convex strip is crushed in the radial direction of the flow path by the inner wall of the concave strip, and the connection portion between the first communication flow path and the second communication flow path is sealed. . Therefore, the manifold block according to the present invention eliminates the need to install a seal member between the first communication channel and the second communication channel, so that the number of parts can be reduced and the number of leaks can be reduced by one. .
In addition, the manifold block of the present invention provides a reliable seal by preventing the ridges from falling into the flow path by pressing the first taper surface of the ridges and the second taper surface of the ridges. Obtainable.

The manifold block according to the present invention fixes the female screw member by fastening the second fastening member penetrating from the second manifold block to the first manifold block side to the female screw member attached to the second manifold block. Even if the fastening member is repeatedly attached and detached, the female screw member does not come off the manifold block.
Further, the manifold block of the present invention has an anti-rotation mechanism for preventing the rotation of the female screw member when the second fastening member is fastened to the female screw member, so that the assembly work efficiency is good.

Manifold block of the present invention, a counterbore provided on the surface opposite to the surface in contact with the first manifold block of the second manifold block by inserting a fastening member to the second manifold block, the distal end portion of the female screw member of the fastening member by fastening the, since so as to fix the female screw member, reducing the nip amount sandwiching the second manifold block between the female screw member and the fastening member, expansion and contraction of the second manifold block fastening member The influence on the fastening force can be reduced.

Manifold block of the present invention includes a first mounting hole of the first manifold block both ends of the female screw member, by inserting the second mounting hole of the second manifold member, the first manifold block and the second manifold block Can be prevented from slipping laterally.

  In the manifold block of the present invention, a nut member is disposed between the surface of the second manifold block that contacts the first manifold block and the common flow path, and the fastening member that penetrates the first manifold block from the component part is the nut member. Since the first manifold block and the second manifold block are fixed to each other, the amount of sandwiching the second manifold block between the fastening member and the nut member is reduced, and the expansion of the second manifold block is performed. The influence which shrinkage has on the fastening force of a fastening member can be made small.

In the manifold block of the present invention, the joint block can be provided along the mounting direction of the component parts by changing the component parts and the first manifold block to attach the joint block to the second manifold block. Three-dimensional piping can be realized with a small number of parts such as joint blocks and second manifold blocks, and piping variations can be increased.
If the joint block can be separated from the joint part and the main body part, for example, when the socket is screwed into the joint part and the pipe is connected, the rotational force acts on the joint part, but the joint part is rotated by the anti-rotation mechanism. Because it is limited, it does not share with the socket.
And since the surface which contacts a 2nd manifold block is the same shape as the surface which contacts a 1st manifold block, a joint block is compatible with a 1st manifold block, and the component attached to the 1st manifold block Parts can be easily replaced with joints.

  In the manifold block of the present invention, even when the second manifold block repeatedly expands and contracts and the second manifold block is plastically deformed, the elastic member disposed between the second manifold block and the mounting plate is Since the two manifold blocks are pressed against the first manifold block, the sealing performance of the connection portion between the first communication channel and the second communication channel can be maintained.

  Since the valve unit of the present invention has a valve mounted on a manifold block that exhibits the above-described effects, the same effects as the manifold block of the present invention are exhibited.

  Next, an embodiment of a manifold block according to the present invention and a valve unit using the same will be described with reference to the drawings.

(First embodiment)
FIG. 1 is an external perspective view of a valve unit 1 according to the first embodiment of the present invention. FIG. 2 is a plan view of the valve unit 1 shown in FIG.
In the valve unit 1, chemical valves 101A, 101B, and 101C are attached to the manifold block 2 and assembled to the semiconductor manufacturing apparatus via the attachment plates 3A, 3B, and 3C. The valve unit 1 of the present embodiment is characterized in that the manifold block 2 can be divided into first manifold blocks 4A, 4B, 4C and a second manifold block 5. In the manifold block 2, the joints 6A, 6B, 6C, and 6D are directed in different directions, similarly to the manifold block 111 shown in FIGS. Since the chemical valves 101A, 101B, and 101C are as described in the prior art, in the present embodiment, the same reference numerals as those in the prior art are attached to the drawings, and description thereof is omitted as appropriate.

FIG. 3 is a cross-sectional view of the valve unit 1 shown in FIG. 4 is a cross-sectional view of the valve unit 1 taken along the line BB in FIG. FIG. 5 is a cross-sectional view taken along the line CC of the valve unit 1 shown in FIG.
The manifold block 2 is provided with one first manifold block 4 for each chemical solution valve 101. The first manifold blocks 4A, 4B, and 4C are arranged on the second manifold block 5 with their surfaces in contact with or in close proximity to save space. Since the first manifold blocks 4A, 4B and 4C have the same shape, only the first manifold block 4A will be described here, and the description of the first manifold blocks 4B and 4C will be omitted.

The first manifold block 4A is formed by molding a resin having high heat resistance and corrosion resistance such as PTFE (polytetrafluoroethylene) and PFA (tetrafluoroethylene perfluoroalkyl vinyl ether copolymer) into a substantially rectangular parallelepiped block shape. is there. In the first manifold block 4A, the upper surface (mounting surface) to which the chemical valve 101A is attached and the lower surface (contact surface) in contact with the second manifold block 5 are formed in the same square shape, and the four outer surfaces are in contact with the mounting surface. Connected perpendicular to the surface. One of the outer surfaces is provided with a joint 6A at the center. In the first manifold block 4A, a valve chamber forming portion 7A for forming a valve chamber between the chemical liquid valve 101A and the valve chamber forming portion 7A is formed in a cylindrical shape from the upper surface, and the diaphragm valve body along the outer periphery of the opening of the valve chamber forming portion 7A An annular groove 8A for attaching 102A is formed concentrically. In the first manifold block 4A, a first communication channel 9A is formed coaxially with the valve chamber forming portion 7A so as to penetrate in the vertical direction in the figure, and the first communication channel 9A is formed in the valve chamber forming portion 7A. A valve seat 10A is provided around an opening that opens in the inner wall. Also, in the manifold block 4 A, the connection hole 11A which connects the valve chamber forming section 7A and the joint 6A is formed in a circular arc shape on the outer side of the first connecting flow channel 9A.

  On the other hand, the second manifold block 5 is formed by molding a resin having high heat resistance and corrosion resistance such as PTFE and PFA into a substantially rectangular parallelepiped block shape. In the second manifold block 5, the upper surface (contact surface) that contacts the first manifold blocks 4A, 4B, and 4C and the lower surface (mounting surface) to which the mounting plates 3A, 3B, and 3C are attached have the same rectangular shape, Four outer surfaces connect perpendicularly to the upper and lower surfaces. The width of the upper surface of the second manifold block 5 is set to the same dimension as that of one side of the lower surface of the first manifold block 4A, and the second communication channels 12A, 12B, 12C are formed at equal intervals in the longitudinal direction. The second communication flow paths 12A, 12B, and 12C are formed in the vertical direction from the center position on the upper surface. The second manifold block 5 has a common channel 13 formed in the horizontal direction from the center position of the outer side surface, and communicates with the second communication channels 12A, 12B, and 12C, respectively. The joint 6 </ b> D is integrally provided on the end surface where the common flow path 13 is opened, and communicates with the common flow path 13. The first manifold block 4A, 4B, 4C is attached to the second manifold block 5 through H-shaped rings (seal members) 14A, 14B, 14C, and the first communication flow path 9A and the second communication flow are provided. The connecting portion of the path 12A is sealed.

7A and 7B are enlarged cross-sectional views of the seal portion, where FIG. 7A shows a state before the seal member is mounted, and FIG. 7B shows a state after the seal member is mounted.
The H-shaped rings 14A, 14B, and 14C are formed of PFA or modified PTFE that is slightly harder than PTFE, and the cross section thereof forms an H shape. Since the H-shaped rings 14A, 14B, and 14C have the same structure, here, the H-shaped ring 14A will be described as an example, and the description of the H-shaped rings 14B and 14C will be omitted. The H-shaped ring 14A has a thick ring shape, and on its lower surface, a second circumferential groove 16A is formed in the center of the thickness direction (radial direction) indicated by the arrow X in the figure, and the ring-shaped second uneven strip is formed. There is no. Similarly, on the upper surface of the H-shaped ring 14A, a first circumferential groove 15A is formed at the center in the thickness direction (radial direction) indicated by an arrow X in the figure, forming a ring-shaped first uneven strip.

On the other hand, on the lower surface of the first manifold block 4A, a first seal groove 17A is formed in an annular shape outside the opening of the first communication channel 9A. At the bottom of the first seal groove 17A, a first circumferential protrusion 18A extending toward the second manifold block 5 is projected to form a first ridge. The first irregularities have a first circumferential protrusion 18A corresponding to the first circumferential groove 15A of the H-shaped ring 14A, and are configured in an annular shape.
In addition, second seal grooves 19A, 19B, and 19C are formed on the upper surface of the second manifold block 5 outside the openings of the second communication channels 12A, 12B, and 12C, respectively. Since the second seal grooves 19A, 19B, and 19C have the same structure, the second seal groove 19A is described as an example here, and the description of the second seal grooves 19B and 19C is omitted. A second circumferential projection 20A extending toward the first manifold block 4A is projected from the bottom of the second seal groove 19A to form a second ridge. The second ridge / groove has a second circumferential protrusion 20A corresponding to the second circumferential groove 16A of the H-shaped ring 14A, and is configured in an annular shape.

FIG. 8 is an enlarged view of the first circumferential groove 15A.
As shown in FIG. 8, the first circumferential groove 15A of the H-shaped ring 14A is formed by an inner annular wall 141A and an outer annular wall 142A, and its depth H is substantially the same as the height of the first circumferential protrusion 18A. is there. The inner wall of the first circumferential groove 15A is provided with a press-fitting allowance P having a thickness in the thickness direction (radial direction) of the H-shaped ring 14A. This press-fitting allowance P is provided by the difference between the groove width W1 of the inner step portion 152A and the groove width W2 of the outer step portion 151A. That is, the groove width W1 of the inner step portion 152A is set to be smaller than the width W3 (see FIG. 7A) in the thickness direction of the first circumferential protrusion 18A, and the groove width W2 of the outer step portion 151A is the first It is set to be approximately the same as the width W3 (see FIG. 7A) in the thickness direction of the circumferential protrusion 18A. Therefore, as shown in FIG. 7B, the H-shaped ring 14A is arranged so that the tip ends of the first and second circumferential protrusions 18A and 20A abut against the bottoms of the first and second circumferential grooves 15A and 16A. When installed between the first and second seal grooves 17A and 19A, press-fitting allowances P are provided on both sides of the first and second circumferential protrusions 18A and 20A.
Since the second circumferential groove 16A has the same configuration as the first circumferential groove 15A, description thereof is omitted.

By the way, as shown in FIG. 6, the valve unit 1 of this embodiment includes mounting plates 3A, 3B, 3C, first manifold blocks 4A, 4B, 4C, second manifold block 5, and chemical valves 101A, 101B, 101C. The first bolt (first fastening member) 21 and the second bolt (second fastening member) 22 fastened from above and below are connected and integrated. Here, since the mounting structure of the chemical valve 101A, 101B, 101C is the same, in this embodiment, the mounting structure will be described by taking the chemical valve 101C as an example, and the description of the mounting structure of the chemical valve 101A, 101B is omitted. To do.

Through holes 24 and 25 for penetrating the first bolt 21 are formed in the chemical valve 101C and the first manifold block 4C, respectively, and the head of the first bolt 21 is engaged with the opening end surface of the through hole 24 of the chemical valve 101C. A step for stopping is provided. A cap 29 is attached to the upper opening portion of the through hole 24 of the chemical valve 101C in the drawing, and the first bolt 21 is blocked from the corrosive atmosphere.
In the second manifold block 5 and the mounting plate 3C, through holes 26 and 27 for passing through the second bolts 22 are formed at positions corresponding to the through holes 25 of the first manifold block 4C, and the through holes of the mounting plate 3C are formed. A stepped portion for locking the head of the second bolt 22 is provided on the opening end face of 27. A cap 29 is attached to the opening of the through-hole 27 of the attachment plate 3C to shield the second bolt 22 from the corrosive atmosphere.

  The first bolt 21 and the second bolt 22 are fastened to the nut (female screw member) 23 attached to the upper surface of the second manifold block 5 from above and below in the drawing. In the second manifold block 5, a press-fitting hole 28 is formed in the upper surface side opening of the through hole 26 in the drawing. The press-fitting hole 28 has an inner diameter smaller than the outer diameter of the nut 23 and press-fits the nut 23. The nut 23 is press-fitted so as not to rotate when the second bolt 22 is fastened. In this case, if the outer peripheral surface of the nut 23 is formed into a polygonal shape, a knurled eye is provided on the outer peripheral surface of the nut 23, or a jagged surface parallel to the axial direction is provided, the inner peripheral surface of the nut 23 and the press-fitting hole 28 is provided. The frictional resistance can be increased and the rotation of the nut 23 can be prevented more reliably. In the present embodiment, the “rotation prevention mechanism” is configured by the press contact surface between the inner peripheral surface of the press-fitting hole 28 and the outer peripheral surface of the nut 23, thereby improving the assembling operation efficiency.

  A method for assembling such a valve unit 1 will be described. FIG. 9 is an assembly diagram of the valve unit 1 shown in FIG. In FIG. 9, the cap 29 is omitted. Here, since the chemical liquid valves 101A, 101B, and 101C are assembled in the same manner, in this embodiment, the assembly of the chemical liquid valve 101C will be described, and the description of the assembly of the chemical liquid valves 101A and 101B will be omitted.

  When assembling the valve unit 1, first, the nut 23 is press-fitted into the press-fitting hole 28 of the second manifold block 5. Then, the mounting plate 3C is brought into contact with the lower surface of the second manifold block 5 so as to overlap the through holes 27 and 28, and the second bolt 22 is inserted from the mounting plate 3C side toward the second manifold block 5 side. The tip of the 2 bolt 22 is inserted into the lower end opening of the nut 23 and fastened. Thereby, the nut 23 is fixed in a state of being pulled downward by the second bolt 22.

Then, the H-shaped ring 14C is temporarily fixed to the second seal groove 19C by lightly inserting the second circumferential protrusion 20C of the second manifold block 5 into the second circumferential groove 16C of the H-shaped ring 14C. Then, the first manifold block 4C of the first manifold block 4C is lightly inserted into the first circumferential groove 15C of the H-shaped ring 14C, whereby the first manifold block 4C is connected to the second manifold block 5 via the H-shaped ring 14C. Align with. At this time, the lower surface of the first manifold block 4C is such that the upper surface and the same surface of the second manifold block 5, by adjusting the position of the first manifold block 4 C, the through-hole 25 of the first manifold block 4C nut 23, respectively. Thereafter, the first chemical liquid valve 101C is inserted into the through hole 24 of the chemical valve 101C through the four first bolts 21 and the tip of the first bolt 21 is inserted into the through hole 25 of the first manifold block 4C. Align with the manifold block 4C. Then, the first bolts 21 are passed through the through holes 25 of the first manifold block 4C, inserted into the upper end openings of the nuts 23, and fastened.

As the first bolt 21 is tightened to the nut 23, the H-shaped ring 14C is crushed in the axial direction. Since the resin H-shaped ring 14C is harder than rubber or the like, the first manifold block 4C and the second manifold block 5 are guided when the first bolt 21 is tightened, and the first communication channel 6C and the second communication channel are communicated. The opening of the channel 12C is aligned. Then, the first concavo-convex ridge of the H-shaped ring 14 C and the first concavo-convex ridge of the first manifold block 4 C , and the second concavo-convex ridge of the H-shaped ring 14 C and the second concavo-convex ridge of the second manifold block 5 are fitted. Match. Thereby, the first formed in the H-shaped ring 14 C, the press-fitting margin P of the second circumferential grooves 15 C, 16 C, and the first circumferential-shaped protrusion 18 C of the first manifold block 4 C of the second manifold block 5 When the tip end portions of the second circumferential protrusions 20 C are press-fitted, the first and second circumferential protrusions 18 C and 20 C are caused to have their meat by the press-fitting allowance P of the first and second circumferential grooves 15 C and 16 C. It is an interference fit in the thickness direction (radial direction). That is, first, second circumferential shaped protrusion 18 C, 20 C is pressurized pressed from both sides in the radial direction, between the first concave-convex strip and the second unevenness Article, and, in second uneven conditions and the second concave-convex Each space is sealed. Therefore, the connection portion between the first manifold block 4 C and the second manifold block 5 is reliably sealed via the H-shaped ring 14 C together. H-shaped ring 14 C, because it is made of resin, per chemical valve 101 dealing with chemical acid or alkali, can have corrosion resistance to the seal structure of the flow path connection portion.
In the valve unit 1 assembled in this manner, a cap 29 is attached to an opening through which the first and second bolts 21 and 22 are inserted.

Next, the effect of the manifold block 2 and the valve unit 1 of this embodiment is demonstrated.
In the manifold block 2 and the valve unit 1 shown in FIG. 3, external pipes are connected to the joints 6A, 6B, 6C, 6D using sockets or the like. For example, even if fluid is input to the joint 6D with the chemical valves 101A, 101B, 101C closed, the fluid is not output from any of the joints 6A, 6B, 6C, but the chemical valves 101A, 101B, 101C are selected. If the valve is opened, the fluid can be distributed and output to the joints 6A, 6B, 6C via the opened chemical liquid valves 101A, 101B, 101C. Further, for example, even if different types of fluids are input to the joints 6A, 6B, 6C with the chemical valves 101A, 101B, 101C closed, none of the fluids are output from the joint 6D, but the chemical valves 101A, 101B , 101C, the fluid can be merged in the common flow path 13 and output from the joint 6D.

By the way, when the chemical | medical solution with which the valve unit 1 contains slurry flows, for example, a chemical | medical solution may condense on valve seat 10A, 10B, 10C and diaphragm valve body 102A, 102B, 102C. In this case, there is a possibility that fluid leaks from the condensing site, so it is necessary to replace the valve seats 10A, 10B, 10C and the diaphragm valve bodies 102A, 102B, 102C. In this case, for example, if the chemical solution is condensed only in the valve seat 10A, the first bolt 21 is loosened, the chemical solution valve 101A and the first manifold block 4A are removed, and the chemical solution is replaced with a new first manifold block 4. The valve 101A may be attached. That is, the manifold block 2 and the valve unit 1 are replaced with the entire manifold block 2 like the manifold block 111 used in the conventional valve unit 100 shown in FIG. 24 because the chemical solution is condensed only on the valve seat 10A. There is no need to do. Therefore, the maintenance cost of the manifold block 2 and the valve unit 1 is low.

  When the valve unit 1 is installed in a semiconductor manufacturing apparatus, the flow path configuration varies from site to site depending on the installation status of peripheral devices. In the manifold block 2 and the valve unit 1, the first manifold blocks 4A, 4B, and 4C are divided with respect to the second manifold block 5, so that the first manifold blocks 4A, 4B, and 4C are removed from the second manifold block 5. Thus, the directions of the joints 6A, 6B, 6C can be changed, and the flow channel structure can be easily changed. As a result, the number of manifold block stocks is reduced, and maintenance costs are reduced.

  Therefore, according to the manifold block 2 and the valve unit 1 using the same according to the present embodiment, the first manifold blocks 4A, 4B, 4C and the second manifold block 5 can be used for various flow path configurations with a small number of parts. Costs for maintenance and maintenance can be reduced and costs can be reduced.

  In particular, since the lower surfaces of the first manifold blocks 4A, 4B, and 4C of this embodiment are square, the joints 6A, 6B, and 6C can be attached to the second manifold block 5 by changing the orientations by 90 degrees. Therefore, for example, when the joint 6C shown in FIG. 5 is directed in the same direction as the joint 6B, the first bolt 21 is loosened, the chemical valve 101C and the first manifold block 4C are removed, and the direction of the first manifold block 4C is changed. If the first bolt 21 is attached to the second manifold block 5 together with the chemical valve 101C by changing 180 degrees, the direction of the joint 6C can be easily changed. Therefore, the valve unit 1 can easily change the flow path structure using the existing first manifold blocks 4A, 4B, 4C.

  When the manifold block 2 is divided into the first manifold blocks 4A, 4B, 4C and the second manifold block 5, the seal of the connection portion between the first communication flow paths 9A, 6B, 6C and the second communication flow paths 12A, 12B, 12C Is a problem. In particular, since the first manifold blocks 4A, 4B, 4C and the second manifold block 5 are made of resin, for example, when a fluid of 70 to 80 degrees is flowed, the first manifold blocks 4A, 4B, 4C expand. The pressure contact force acting between the first manifold blocks 4A, 4B, 4C and the second manifold block 5 may become unstable. However, in the valve unit 1, the H-shaped rings 14A, 14B, 14C seal the connecting portions of the first communication flow paths 9A, 9B, 9C and the second communication flow paths 12A, 12B, 12C in the flow path radial direction. Regardless of the expansion / contraction of the first manifold blocks 4A, 4B, 4C and the second manifold block 5, the flow path connecting portion can be sealed.

Thus, the valve unit 1 attaches and detaches the first manifold blocks 4A, 4B, and 4C with respect to the second manifold block 5, changes the flow path structure, and performs maintenance. As a conventional valve unit 100 shown in FIG. 27, the chemical liquid valve 101A bolts 118, 101B, when fastened by inserting the mounting plate 117 A, 117 B, 117 C from 101C through the manifold block 111, the standard product It is difficult to use the bolt 118, and the second manifold block 5 and the mounting plates 3A, 3B, and 3C are separated in addition to the chemical valves 101A, 101B, and 101C and the first manifold blocks 4A, 4B, and 4C during maintenance. As a result, the maintainability deteriorates. Further, if the first bolt 21 is tightened with respect to the nut 23 that is just press-fitted into the upper surface of the second manifold block 5, the nut 23 may be detached from the press-fitting hole 28 while the first bolt 21 is repeatedly attached and detached. is there. On the other hand, the valve unit 1 fastens the nut 23 to the upper surface of the second manifold block 5 by fastening the second bolt 22 inserted into the second manifold block 5 from the mounting plates 3A, 3B, 3C to the nut 23. In order to fix, even if the 1st volt | bolt 21 is attached or detached repeatedly, the nut 23 cannot be removed easily and maintenance property is good.

(Second Embodiment)
Next, a manifold block according to a second embodiment of the present invention and a valve unit using the same will be described with reference to the drawings. FIG. 10 is an assembly diagram of the valve unit 30 according to the second embodiment of the present invention. FIG. 11 is a cross-sectional view of the joint block 32 shown in FIG.
Valve unit 30 of this embodiment is different from the first embodiment in that direct coupling in the vertical direction using a joint block 32, the other points are common to the first embodiment. Therefore, in this embodiment, it demonstrates centering on the point which is different from 1st Embodiment, and abbreviate | omits description about the common point of 1st Embodiment suitably.

  As shown in FIG. 10, the joint block 32 is provided with a main body 33 which is a resin molded product such as PTFE or PFA and a joint portion 34 which is also a resin molded product such as PTFE or PFA so as to be separable. Yes, attached to the second manifold block 5. The main body 33 has a lower surface (contact surface) in contact with the second manifold block 5 and an upper surface (mounting surface) opposite to the lower surface in the same square shape as the lower surface and the upper surface of the first manifold block 4 of the first embodiment. The first manifold block 4 is attached to the second manifold block 5 under the same conditions. As shown in FIG. 11, in the main body 33, a holding hole 35 for holding the joint portion 34 is formed in a cylindrical shape from the center of the contact surface, and an opening 36 having a smaller diameter than the holding hole 35 is coaxial with the holding hole 35. The step is provided between the holding hole 35 and the opening 36. As shown in FIG. 10, a plurality of key grooves 37 are formed on the inner peripheral surface of the holding hole 35 in parallel with the axial direction. And the through-hole 38 for inserting the 1st volt | bolt which is not shown in figure is formed in the four corners of the main-body part 33. As shown in FIG. In addition, the 1st volt | bolt used in this case shall be shorter than the 1st volt | bolt 21 of 1st Embodiment.

As shown in FIG. 11, the joint portion 34 has a female screw formed on the outer peripheral surface of the central barrel portion 41, an output portion 42 thinner than the barrel portion 41 is provided at one end, and a connecting portion 43 thicker than the barrel portion at the other end. Is provided. Connecting portion 43 is substantially the same outer diameter as the inner diameter of the holding hole 35, it is to avoid or al fastened securely body portion 33 abutted against an end face on the step between the holding hole 35 and the opening 36. As shown in FIG. 10, a convex key 44 is provided on the outer peripheral surface of the connecting portion 43 so as to engage with the key groove 37 of the main body portion 33. In the present embodiment, the key groove 37 and the convex key 44 constitute a “rotation stop mechanism”. In addition, it is the same as that of the 1st manifold block 4A of 1st Embodiment that the 1st seal groove 17A for attaching the H-shaped ring 14 and the 1st circumferential protrusion 18A are provided in the end surface of the connection part 43. FIG.

Such a valve unit 30 is assembled as follows.
As shown in FIG. 10, the assembly of the mounting plate 3, the second manifold block 5, and the nut 23 is the same as in the first embodiment. When the H-shaped ring 14A is installed in the second seal groove 19A of the second manifold block 5, the first seal groove 17A of the joint portion 34 is fitted to the H-shaped ring 14A, and the joint portion 34 is attached to the second manifold block 5. Position it. Then, the body part 33 is put on the joint part 34 so that the output part 42 of the joint part 34 is inserted from the holding hole 35 of the body part 33 into the opening part 36. At this time, the convex key 44 of the joint portion 34 is inserted into the key groove 37 of the main body portion 33. Then, a first bolt (not shown) is passed through the through hole 38 of the main body portion 33 from the upper side to the lower side and fastened to the nut 23.

In the first embodiment, the joints 6A, 6B, and 6C can be directed only in the horizontal direction. However, in this embodiment, the pipe can be connected to the joint portion 34 of the joint block 32 from the upper side in the drawing. . Therefore, according to the manifold block of this embodiment and the valve unit 30 using the same, it is possible to realize three-dimensional piping with a small number of parts such as the first manifold block 4, the joint block 32, and the second manifold block 5. Yes, the piping variation can be increased.
Further, when the socket is screwed into the body portion 41 of the joint portion 34 to connect the pipe, the rotational force acts on the joint portion 34, but the joint portion 34 is locked to the key groove 37 via the convex key 44, Since rotation is restricted, it does not rotate with the socket.
In addition, since the lower surface of the joint block 32 has the same shape as the lower surface of the first manifold block 4 of the first embodiment, the chemical solution is compatible with the first manifold block 4 and attached to the first manifold block 4. The valve 101 can be easily replaced with a joint.

Here, an example of a piping variation in which the joint direction is changed will be described. FIG. 12 is a diagram illustrating an example of changing the joint direction.
The valve unit 45 shown in FIG. 12 has components such as the chemical valve 101 attached to the first manifold block 4A, 4B, 4C on the upper surface of the second manifold block 47 and the first manifold block 4E and the joint block 32 on the lower surface. A manifold block 46 for mounting components is configured. For this reason, the valve unit 45 is provided with joints 6A to 6E in a three-dimensional manner, and the chemical valves 101A, 101B, 101C, and 101E are attached using upper and lower spaces to save space.

13 is a cross-sectional view of the valve unit 45 shown in FIG.
The second manifold block 47 is obtained by drilling the second communication flow paths 12E and 12F from the lower surface in the second manifold block 5 of the first embodiment and communicating with the common flow path 13, and the assembly shown in FIG. The joint block 32 is assembled so as to communicate with the second communication channel 12F by the method, and the chemical valve 101E is communicated with the second communication channel 12E via the first manifold block 4E by the assembly method shown in FIG. Assembled. The internal flow path of the second manifold block 47 has a common flow through the second communication flow path 12 from the other surface (upper surface) with respect to the linear common flow path 13 drilled in the horizontal direction from one surface (side surface). The first manifold block 4 and the joint are standardized by simply forming the second communication flow path 12 with a drill or the like in the field, simply by drilling so as to connect vertically to the path 13. By using the block 32, the flow channel structure can be easily changed three-dimensionally. That is, the manifold block 46 has a flow path structure by replacing the second manifold block 47, which is easy to process and inexpensive, without replacing the entire block like the conventional manifold block 111 shown in FIG. Can be changed at low cost.

(Third embodiment)
Next, a manifold block according to a third embodiment of the present invention and a valve unit using the same will be described with reference to the drawings. FIG. 14 is a cross-sectional view of a valve unit 60 according to the third embodiment of the present invention. FIG. 14 corresponds to FIG.
In the valve unit 60 of the present embodiment, the ridges 71 and 81 provided on the first manifold blocks 61, 62 and 63 are press-fitted into the ridges 74 and 84 provided on the second manifold block 64, thereby This is different from the first embodiment in which sealing is performed using the H-shaped rings 14A, 14B, and 14C in that the connection portions of the first communication channels 9A and 9B9C and the second communication channels 12A, 12B, and 12C are sealed. Therefore, here, it demonstrates focusing on the point which is different from 1st Embodiment, attaches | subjects the same code | symbol to a drawing about a common point, and abbreviate | omits description suitably.

  The valve unit 60 is obtained by fixing first manifold blocks 61, 62, 63 to a second manifold block 64. In this embodiment, for the sake of convenience of explanation, the seal structures for fixing the first manifold blocks 61, 62, 63 to the second manifold block 64 are different from each other, but they may all be the same seal structure. If all have the same seal structure, the first manifold block can be shared to reduce costs.

FIG. 15 is an enlarged cross-sectional view of a portion H in FIG.
In the first manifold block 63, the ridges 71 are provided so as to protrude from the surface in contact with the second manifold block 64 along the outer periphery of the opening of the first communication channel 9 </ b> C. The ridge 71 is formed in a cylindrical shape. On the outer peripheral surface of the tip of the ridge 71, a protrusion 72 protruding in the outer diameter direction of the flow path is provided in an annular shape. In addition, a taper 73 that is an example of a first taper surface is provided on the inner periphery of the tip of the protrusion 71 in correspondence with the protrusion 72.

  On the other hand, in the second manifold block 64, the recess 74 is provided in an annular shape along the opening of the second communication channel 12C. The inner side of the recess 74 is open to the second communication channel 12C. The concave strip 74 is provided with a support projection 75 on the inner side, and the tip portion of the convex strip 71 is fitted therein. That is, the support protrusion 75 is erected in the axial direction of the second communication channel 12C, and a taper 76, which is an example of a second taper surface, is provided on the outer surface. The inclination angle of the taper 76 corresponds to the inclination angle of the taper 73.

  In this seal structure, when the convex strip 71 of the first manifold block 63 is fitted into the concave strip 74 of the second manifold block 64, the protrusion 72 of the convex strip 71 is crushed by the wall of the concave strip 74, and the sealing force is increased. appear. At this time, the ridge 71 receives a reaction force from the inner wall of the ridge 74 and tends to fall into the first communication channel 9 </ b> C side. However, the support protrusion 75 of the recess 74 supports the tip portion of the protrusion 71 and prevents the protrusion 71 from falling. At this time, the taper 76 of the support protrusion 75 comes into surface contact with the taper 73 of the ridge 71 and pushes the tip of the ridge 71 toward the protrusion 72 side. Therefore, the protrusion 72 is tightly adhered to the inner wall of the recess 74 and sealed.

FIG. 16 is an enlarged cross-sectional view of a portion I in FIG.
The first manifold block 62 is provided in an annular shape along the outer periphery of the opening of the first communication channel 9 </ b> B so that the ridge 81 protrudes from the surface in contact with the second manifold block 64. The ridge 81 is formed in a substantially cylindrical shape. The protrusion 81 is provided with a protrusion 72 and a taper 73 similar to the protrusion 71 shown in FIG. The ridge 81 is provided with a step, and includes a proximal end portion 82 that is thicker than the distal end portion.

  On the other hand, in the second manifold block 64, the concave stripe 84 corresponding to the convex stripe 81 is provided in an annular shape along the opening of the second communication flow path 12C. The inside of the recess 84 is open to the second communication channel 12B. The recess 84 is provided with a support protrusion 75 and a taper 76 similar to the recess 74 shown in FIG. The recess 84 has a step opposite to the step of the protrusion 81 and is provided with a fitting recess 85. The fitting recess 85 has an outer diameter dimension set smaller than an outer diameter dimension of the base end portion 82 provided on the ridge 81, and a press-fitting allowance for press-fitting the base end portion 76 is provided in the flow path radial direction.

  In this sealing structure, the protrusion 72 of the protrusion 81 is crushed by the inner wall of the recess 84 to generate a sealing force, and the base end portion 82 is press-fitted into the fitting recess 85 to generate the sealing force. Therefore, in this sealing structure, the connection portion between the first communication channel 9B and the second communication channel 12B is double-sealed by the projection 72 and the base end portion 82 outside the projection 72. Therefore, for example, even if fluid leakage occurs from the protrusion 72, fluid leakage can be prevented at the base end portion 82, and the sealing performance can be improved.

FIG. 17 is an enlarged cross-sectional view of a portion J in FIG.
This seal structure is basically the same as the seal structure of the H portion shown in FIG. 14, but the first protrusion 72 and the second protrusion 87 are extended toward the outside of the flow path on the outer peripheral surface of the ridge 86. Thus, the difference is that the ring is provided. When the protrusion 86 is fitted to the recess 74, the first protrusion 72 and the second protrusion 87 are crushed by the inner wall of the recess 72 to generate a sealing force. At this time, since the support protrusion 75 prevents the protrusion 86 from falling down, the first protrusion 72 and the second protrusion 87 can be reliably crushed to obtain a stable sealing force. In addition, since the first protrusion 72 and the second protrusion 87 are crushed and sealed twice, fluid leakage can be more reliably prevented.

  As described above, the valve unit 60 according to the present embodiment includes the protrusions 71 and 81 provided integrally with the first manifold blocks 61, 62, and 63 without using a seal member such as the H-shaped ring 15. When fitted to the concave stripes 74, 84 of the block 64, the protrusions 72, 87 provided on the convex stripes 71, 81, 86 are crushed in the radial direction of the flow path, and the first communication flow paths 9A, 9B, The connection part of 9C and 2nd communication flow path 12A, 12B, 12C is sealed. Therefore, in the valve unit 60 of the present embodiment, it is necessary to mount the H-shaped rings 14A, 14B, and 14C at the connection portions between the first communication channels 9A, 9B, and 9C and the second communication channels 12A, 12B, and 12C. The number of parts can be reduced.

  In the seal structure using the H-shaped ring 14 as shown in FIG. 7, for example, between the first manifold block 4A and the H-shaped ring 15A and between the second manifold block 5 and the H-shaped ring 14A. Each had to be sealed. However, in the seal structure to which the valve unit 60 of the present embodiment is applied, only the portions where the ridges 71, 81, 86 are fitted into the ridges 74, 84 need be sealed. Therefore, according to the valve unit 60 of this embodiment, the location which seals the connection part of 1st communication flow path 9A, 9B, 9C and 2nd communication flow path 12A, 12B, 12C can be reduced.

  Further, the valve unit 60 of the present embodiment can concentrate the seal stress on the protrusions 72 and 87 by sealing at the portion where the protrusions 72 and 87 are crushed. Further, due to the fluid pressure applied to the first and second communication passages 9 and 12, the ridges 71, 81 and 86 are strongly pressed against the outer inner walls of the ridges 74 and 84, and the protrusions 72 and 87 are strongly crushed. Therefore, the seal stress can be increased.

  Moreover, the valve unit 60 of this embodiment presses the taper 73 of the ridges 71, 81, 86 and the taper 76 of the ridges 74, 84, so that the ridges 71, 81, 86 fall down inside the flow path. By preventing this, a reliable seal can be obtained.

(The first reference example)
Next, will be described with reference to the drawings first reference example of the valve unit with Ma two hold block and it. FIG. 18 is a cross-sectional view showing a fixing structure between the first manifold block 4C and the second manifold block 5 of the valve unit 200 according to the first reference example . FIG. 18 corresponds to FIG.
The valve unit 200 of the present reference example is different from the first embodiment in that both end portions of the nut 23 are inserted into the first manifold block 4C and the second manifold block 5, and the other points are different from the first embodiment. Common. Therefore, in this reference example , it demonstrates centering on the point which is different from 1st Embodiment, about the point which is common in 1st Embodiment, attaches | subjects the same code | symbol to drawing and abbreviate | omits description suitably.

The first manifold block 4 </ b> C has a mounting hole 201 (an example of a first mounting hole) formed coaxially with the through hole 25 from the surface in contact with the second manifold block 5. The valve unit 200 press-fits one end of the nut 23 into the press-fit hole 28 (an example of the second mounting hole) of the second manifold block 5. The upper end portion of the nut 23 protrudes from the upper surface of the second manifold block 5, and the protruding portion is inserted into the mounting hole 201 of the first manifold block 4C. Therefore, the valve unit 200 can prevent lateral displacement of the first and second manifold blocks 4C and 5 because the upper end portion of the nut 23 is inserted into the mounting hole 201 and the lower end portion of the nut 23 is inserted into the press-fit hole 28. . Further, by preventing the lateral displacement in this way, it is possible to eliminate the load applied to the portion that seals the connection portion between the first communication channel 9C and the second communication channel 12C, and to more reliably prevent fluid leakage. .

( Fourth embodiment)
Next, a manifold block according to a fourth embodiment of the present invention and a valve unit using the same will be described with reference to the drawings. FIG. 19 is a sectional view of a valve unit 210A according to the fourth embodiment of the present invention. FIG. 19 corresponds to FIG.
The valve unit 210A of the present embodiment is that an elastic member 211 such as an O-ring or a leaf spring is disposed between the mounting plate 3B and the second manifold hole block 5 in the valve unit 1 of the first embodiment. And different. Therefore, here, it demonstrates centering on a different point from 1st Embodiment, about a common point, the code | symbol same as 1st Embodiment is attached | subjected to drawing, and description is abbreviate | omitted suitably.

  In the second manifold block 5, an annular groove is formed on the surface in contact with the mounting plate 3 </ b> B so as to pass below the first and second bolts 21 and 22. An elastic member 211 is attached to the annular groove, and the elastic member 211 is crushed between the second manifold block 5 and the mounting plate 3B. Therefore, the elastic member 211 is elastically deformed between the second manifold block 5 and the mounting plate 3B to generate a repulsive force.

  Incidentally, the first and second manifold blocks 4B and 5 are resin molded products. When the valve unit 210A controls the high-temperature fluid, the high-temperature fluid may or may not flow in the common flow path 13 by the valve opening / closing operation of the chemical valves 101A, 101B, and 101C. When the high-temperature fluid flows through the common flow path 13, the temperature of the second manifold block 5 rises and thermally expands. On the other hand, when the high-temperature fluid does not flow into the common flow path 13, the second manifold block 5 decreases in temperature and contracts. As described above, the second manifold block 5 is easy to repeat expansion and contraction, and a portion deformed by being pressed against the bolts 21 and 22 at the time of expansion may be plastically deformed without returning to its original shape at the time of contraction. When the second manifold block 5 is plastically deformed, the bolts 21 and 22 are loosened, and the sealing force at the connection portion between the first communication channel 9 and the second communication channel 12 may be reduced.

  In this regard, in the valve unit 210A of the present embodiment, the second manifold block 5 is pressed against the first manifold block 4B by the repulsive force of the elastic member 211 when the second manifold block 5 repeatedly expands and contracts and is plastically deformed. It is done. Therefore, the sealing performance of the connecting portion between the first communication channel 9B and the second communication channel 12B is maintained.

  In particular, since the elastic member 211 is disposed at a position corresponding to the first and second bolts 21 and 22, the bolts 21 and 22 can be efficiently prevented from loosening.

20 is a cross-sectional view showing a modification of the valve unit 210A shown in FIG.
When the second manifold block 5 is made of a material having a high coefficient of thermal expansion, the amount of plastic deformation accompanying the thermal expansion is large, and the surface of the elastic member 211 that contacts the second manifold block 5 has a distorted shape. When deformed, the repulsive force of the elastic member 211 may not sufficiently act on the second manifold block 5. Therefore, in the valve unit 210 </ b> A shown in FIG. 20, a plate 212 made of a material that is hardly plastically deformed is disposed between the second manifold block 5 and the elastic member 211. Since the plate 212 is not deformed even when a high-temperature fluid flows through the second manifold block 5, the elastic member 211 can appropriately push the second manifold block 5 toward the first manifold block 4B via the plate 212.

( Second reference example )
Next, will be described with reference to the drawings second reference example of the valve unit with Ma two hold block and it. FIG. 21 is a cross-sectional view of a valve unit 220 according to a second reference example . 22 is a cross-sectional view taken along the line KK of FIG. 21 corresponds to FIG. 3, and FIG. 22 corresponds to FIG.
The valve unit 220 of this reference example fastens the first manifold block 4C to the second manifold block 223 by fastening the first bolt 21 inserted from the upper surface of the first manifold block 4C to the nut member 223 attached to the second manifold block 221. The point fixed to the manifold block 5 is different from the first embodiment. Therefore, here, it demonstrates centering on a different point from 1st Embodiment, about a common point, the code | symbol same as 1st Embodiment is attached | subjected to drawing, and description is abbreviate | omitted suitably.

The second manifold block 221 is basically the same as the second manifold block 5 of the first embodiment, but is provided with a mounting hole 222. The mounting hole 222 is provided between the surface where the second manifold block 221 contacts the first manifold block 4 </ b> C and the common flow path 13. Further, the mounting hole 222 is a surface (side surface) perpendicular to the surface of the second manifold block 221 that contacts the first manifold block 4C so as to be orthogonal to the common flow path 13 at a position corresponding to the first bolt 21. Is provided penetrating in a cylindrical shape. The nut member 223 has a cylindrical shape, and is press-fitted or fixed to the mounting hole 222 by adhesion. The nut member 223 is provided with screw holes 224 and 224 for fastening the first bolt 21. The nut member 223 is made of a metal material having rigidity to obtain a fastening force with the first bolt 21. The surface of the nut member 223 is coated to obtain corrosion resistance.

In such a valve unit 220, the first bolt 21 penetrating from the cover 104C to the cylinder 103C and the first manifold block 4C is fastened to the screw hole 224 of the nut member 223. The nut member 223 is disposed between the surface where the second manifold block 221 contacts the first manifold block 4C and the common flow path 13. Therefore, the amount M of the second manifold block 221 sandwiched between the nut member 223 and the first manifold block 4C is small. Since the pinching amount M is small in this manner, even if the coefficient of thermal expansion of the second manifold block 221 is large, the influence of expansion and contraction is unlikely to affect the fastening portion between the first bolt 21 and the nut member 223.

Therefore, according to the valve unit 220 of this reference example , the amount of absolute deformation of the second manifold block 221 is reduced, and the expansion and contraction of the second manifold block 221 gives the fastening force for fastening the first bolt 21 to the nut member 223. The influence can be reduced. In other words, the first bolt 21 can be prevented from loosening and the sealing performance can be maintained.

( Fifth embodiment)
Next, a fifth embodiment of the manifold block of the present invention and the valve unit using the same will be described with reference to the drawings. FIG. 23 is a cross-sectional view of a valve unit 230 according to the fifth embodiment of the present invention. FIG. 23 corresponds to FIG.
In the valve unit 230 of the present embodiment, the second bolt 22, which is an example of a fastening member, is inserted into a washer member 236 attached to the second manifold block 233 , and the second screw 22 is attached to the first manifold block 231. The point which is fastened to the nut 23 which is an example of a member is different from the second reference example . Therefore, is omitted here will focus on the difference from the second reference example are denoted by the same reference numerals as the second reference example in the drawings of the common points, the description as appropriate.

The first manifold block 231, the surface in contact with the second manifold block 233, mounting holes 232 for the nut 23 instrumentation wear is opened to the through hole 25 coaxially. The second manifold block 233 is provided with an insertion hole 235 penetrating from a surface perpendicular to the surface in contact with the first manifold block 231. The insertion hole 235 is provided between the upper surface of the second manifold block 233 and the common flow path 13. A washer member 236 is loaded in the insertion hole 235 . A through hole 237 is formed in the washer member 236 at a position corresponding to the through hole 26. The washer member 236 is formed by molding a metal material and is provided with a corrosion prevention coating. Further, the second manifold block 233 is provided with counterbore 234 from the surface (the lower surface in the drawing) opposite to the surface that contacts the first manifold block 231. The counterbore 234 is provided so as to communicate with the insertion hole 235. A cap 29 is attached to the counterbore 234 to prevent corrosion of the second bolt 22.

  In the valve unit 230 having such a configuration, the second bolt 22 is inserted from the counterbore 234 of the second manifold block 233 into the through hole 237 of the washer member 236 until the head of the second bolt 22 hits the washer member 236. The tip of the second bolt 22 is screwed into the nut 23 of the first manifold block 231. Thereby, the nut 23 is fixed by the second bolt 22. Then, the first bolt 21 is inserted into the cylinder 103C and the first manifold block 231 from the cover 104C and fastened to the nut 23, and the cover 104C and the cylinder 103C are fixed to the first manifold block 231.

In such a valve unit 230, the amount M of the second manifold block 233 sandwiched between the nut 23 and the washer member 236 is small. Therefore, even when the coefficient of thermal expansion of the second manifold block 233 is large, the absolute deformation amount of the second manifold block 233 sandwiched between the nut 23 and the washer member 236 is small, so that the plastic deformation of the second manifold block 233 is performed. However, the influence on the fastening force for fastening the first and second bolts 21 and 22 to the nut 23 can be reduced. In other words, in the valve unit 230 of the present embodiment, the tightening force for tightening the first and second bolts 21 and 22 to the nut 23 is unlikely to decrease, and the connection between the first communication channel 9C and the second communication channel 12C. The sealing force for sealing the part can be maintained.

  Further, since the second bolt 22 is inserted into the through hole 237 so as to abut against the metal washer member 236 and screwed into the nut 23, the head of the second bolt 22 is in direct contact with the second manifold block 233. Even when the second manifold block 233 expands and contracts, the vicinity of the head of the second bolt 22 is plastically deformed, and the fastening force of the second bolt 22 does not become weak. Therefore, the fastening force of the second bolt 22 can be maintained and fluid leakage can be prevented.

  Although the embodiments of the present invention have been described, the present invention is not limited to the above-described embodiments, and various applications are possible.

(1) For example, in the above-described embodiment, the first and second circumferential grooves are formed in the H-shaped ring 14 that is the sealing member to provide the first and second irregularities, and the first manifold block 4 has the first circumference. The first protrusions are provided to project first protrusions, and the second circumferential protrusions are provided to protrude from the second manifold block 5 to provide second protrusions. In contrast, the first and second circumferential protrusions are provided on the seal member to form the first and second irregularities, and the first circumferential groove is formed on the first manifold block 4 to provide the first irregularities. In addition, a second circumferential groove may be formed in the second manifold block to form a second uneven groove, and sealing may be performed in the flow path radial direction. Further, an elastic member such as an O-ring may be used as the seal member.

(2) For example, in the above embodiment, the insert-type nut 23 is used as the anti-rotation mechanism by press-fitting, but the anti-rotation mechanism may be fixed by an adhesive.

(3) For example, in the above embodiment, the chemical liquid valve 101 which is an air operated on / off valve is used as a component part. However, a manual on / off valve, a flow meter, a regulator, or the like may be used as a component part.
(4) For example, in the embodiment described above, the joints 6A, 6B, and 6C are provided on one of the outer surfaces of the first manifold blocks 4A, 4B, and 4C. For example, two or more joints 6 may be provided in one first manifold block 4.

(5) For example, in the second embodiment, the rotation prevention mechanism is provided by the key groove 37 and the convex key 44, but the engagement hole is provided in the joint portion, and the engagement rod penetrating the main body portion is used as the engagement hole. The rotation stop mechanism may be configured by inserting it into
(6) For example, in the second embodiment, the separable joint block 32 is used for the main body portion 33 and the joint portion 34, but a joint block in which the main body portion and the joint portion are integrally formed may be used.

(7) For example, in the third embodiment, the ridges are provided on the first manifold block side and the ridges are provided on the second manifold block side. However, the ridges are provided on the first manifold block side. A ridge may be provided on the block side.
(8) For example, in the second reference example , the nut member 223 has a cylindrical shape. In contrast, a part of the nut member 223 may be cut in the axial direction to have a D-shaped cross section. In this case, the nut member 223 is prevented from rotating, and the screw hole 234 can be easily aligned with the through holes 24 and 26 .
(9) For example, in the fifth embodiment, the nut 23 is provided in the first manifold block 231, but both end portions of the nut 23 are inserted into the first manifold block 231 and the second manifold block 233, and the first manifold block is inserted. The lateral displacement between H.231 and the second manifold block 233 may be prevented.

1 is an external perspective view of a valve unit according to a first embodiment of the present invention. It is a top view of the valve unit shown in FIG. It is AA sectional drawing of the valve unit shown in FIG. It is BB sectional drawing of the valve unit shown in FIG. It is CC sectional drawing of the valve unit shown in FIG. It is DD sectional drawing of the valve unit shown in FIG. It is an expanded sectional view of a seal part, (a) shows the state before mounting a seal member, and (b) shows the state after mounting a seal member. It is an enlarged view of a 1st circumferential groove. It is an assembly drawing of the valve unit shown in FIG. It is an assembly drawing of the valve unit which concerns on 2nd Embodiment of this invention. It is sectional drawing of the joint block shown in FIG. It is a figure which shows the example of a change of a joint direction. It is sectional drawing of the valve unit shown in FIG. It is sectional drawing of the valve unit which concerns on 3rd Embodiment of this invention. It is the H section expanded sectional view of FIG. It is the I section expanded sectional view of FIG. It is the J section expanded sectional view of FIG. It is sectional drawing which shows the fixation structure of the 1st manifold block and 2nd manifold block of the valve unit which concerns on a 1st reference example . It is sectional drawing of the valve unit which concerns on 4th Embodiment of this invention. It is sectional drawing which shows the modification of the valve unit shown in FIG. It is sectional drawing of the valve unit which concerns on a 2nd reference example . It is KK sectional drawing of FIG. It is sectional drawing of the valve unit which concerns on 5th Embodiment of this invention. It is an external appearance perspective view of the conventional valve unit. It is a top view of the valve unit shown in FIG. It is EE sectional drawing of the valve unit shown in FIG. It is FF sectional drawing of the valve unit shown in FIG. It is GG sectional drawing of the valve unit shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Valve unit 2 Manifold block 4 1st manifold block 5 2nd manifold block 6 Joint 7 Valve chamber formation part 9 1st communication flow path 10 Valve seat 12 2nd communication flow path 13 Common flow path 14 H-shaped ring (seal member)
17 First seal groove 19 Second seal groove 21 First bolt 22 Second bolt 23 Nut (female screw member)
28 Press-fit hole (second mounting hole)
30 Valve unit 31 Manifold block 32 Joint block 33 Main body part 34 Joint part 37 Key groove 44 Convex key 45 Valve unit 46 Manifold block 47 Second manifold block 101 Chemical valve (component parts)
60 valve unit 61 first manifold block 62 first manifold block 63 first manifold block 64 second manifold block 71 ridge 73 taper (first taper surface)
74 Concave ridge 75 Support protrusion 76 Taper (second taper surface)
81 ridge 86 ridge 84 ridge 200 valve unit 201 mounting hole (first mounting hole)
210A, 210B Valve unit 211 Elastic member 220 Valve unit 221 Second manifold block 223 Nut member 224 Screw hole 230 Valve unit 231 First manifold block 233 Second manifold block 234 Counterbore 235 Mounting hole 236 Washer member 237 Through hole

Claims (11)

In manifold blocks where multiple component parts can be mounted,
A valve chamber forming portion communicating with the joint and the first communication flow path, and when the component part is attached, the valve chamber is formed between the valve chamber forming portion and the component part;
A resin-made first manifold block provided with a valve seat around an opening where the first communication flow path opens in the valve chamber forming portion;
The surface in contact with the first manifold block, the second communication flow channel communicating with the first communication flow channel is formed with a plurality of resin formed a common flow path for connecting to the respective second connecting flow channel With two manifold blocks,
The first manifold block is formed in a rectangular parallelepiped shape in which a first surface that opens the valve chamber forming portion and a second surface that contacts the second manifold block form a square shape. The joint is provided on one or more of the outer surfaces connecting perpendicularly to the second surface and the second surface;
The first manifold block is formed with a first seal groove provided with a first uneven groove around an opening of a surface of the first communication channel that contacts the second manifold block,
The second manifold block is formed with a second seal groove provided with a second uneven groove around the opening of the second communication channel,
A first unevenness disposed between the first seal groove and the second seal groove, sealing a connection portion between the first communication channel and the second communication channel, and fitting into the first ridge. And a second concavo-convex ridge that fits into the second concavo-convex ridge, and at least one of the first concavo-convex ridge or the first concavo-convex ridge has a press-fitting allowance provided in the thickness direction, A seal member having a press-fitting allowance in which at least one of the second irregularities and the second irregularities is provided in the thickness direction;
A female screw member attached to surfaces of the first manifold block and the second manifold block that are in contact with each other;
A first fastening member inserted from the component part into the first manifold block and inserted into one end opening of the female screw member and fastened;
A second fastening member that is inserted into the second manifold block and inserted into the other end opening of the female screw member and fastened;
Manifold block characterized in that it comprises a. In manifold block set forth in 請 Motomeko 1,
A manifold block, comprising: a rotation preventing mechanism for preventing rotation of the female screw member when the second fastening member is fastened to the female screw member. In the manifold block according to claim 1 or claim 2 ,
The second manifold block is provided with a counterbore for inserting the second fastening member on a side opposite to the surface contacting the first manifold block, and is perpendicular to the surface contacting the first manifold block. An insertion hole is provided to communicate with the counterbore from a surface,
A manifold block comprising a washer member formed with a through hole for passing through the second fastening member inserted in the insertion hole and inserted into the counterbore. The manifold block according to claim 1,
The female screw member includes a first mounting hole formed in a surface of the first manifold block that contacts the second manifold block, and a first mounting hole formed in a surface of the second manifold block that contacts the first manifold block. 2. A manifold block characterized in that both end portions are inserted into two mounting holes. In the manifold block according to any one of claims 1 to 4 ,
The joint that includes a joint that communicates with the second communication channel, wherein the surface that contacts the second manifold block is a block body having the same shape as the surface that the first manifold block contacts the second manifold block. A manifold block characterized by having a block. In the manifold block according to claim 5 ,
The joint block is
A joint portion communicating with the second communication channel and a main body portion for attaching the joint portion to the second manifold block are provided to be separable;
A manifold block having a rotation stop mechanism for preventing the joint portion from rotating with respect to the main body portion. The manifold block according to any one of claims 1 to 6 ,
A mounting plate attached to a surface of the second manifold block opposite to the surface in contact with the first manifold block;
A manifold block, comprising: an elastic member disposed between the second manifold block and the mounting plate and pressing the second manifold block against the first manifold block.   In manifold blocks where multiple component parts can be mounted,
  A valve chamber forming portion communicating with the joint and the first communication flow path is provided, and the component parts are mounted.
A valve chamber is formed between the valve chamber forming portion and the component parts when cut;
  A first manifold block provided with a valve seat around an opening where the first communication flow path opens in the valve chamber forming portion;
  A second manifold block in which a plurality of second communication channels communicating with the first communication channel are formed on a surface contacting the first manifold block, and a common channel connected to each second communication channel is formed And
  A fastening member that is fastened to the second manifold block from the component part through the first manifold block;
  A nut member provided between the surface of the second manifold block that contacts the first manifold block and the common flow path and provided with a screw hole for fastening the fastening member;
  Inserting the nut member from a surface perpendicular to the surface of the manifold block that contacts the first manifold block, and fastening the fastening member to the screw hole;
Manifold block characterized by   The manifold block according to claim 8,
  The first manifold block is formed with a first seal groove provided with a first uneven groove around an opening of a surface of the first communication channel that contacts the second manifold block,
  The second manifold block is formed with a second seal groove provided with a second uneven groove around the opening of the second communication channel,
  A first unevenness disposed between the first seal groove and the second seal groove, sealing a connection portion between the first communication channel and the second communication channel, and fitting into the first ridge. And a second concavo-convex ridge that fits into the second concavo-convex ridge, and at least one of the first concavo-convex ridge or the first concavo-convex ridge has a press-fitting allowance provided in the thickness direction, At least one of the second uneven stripe and the second uneven stripe has a sealing member having a press-fitting allowance provided in the thickness direction;
Manifold block characterized by   In the manifold block according to claim 8 or 9,
  The first manifold block is formed by molding a resin in a rectangular parallelepiped shape in which a first surface where the valve chamber forming portion opens and a second surface contacting the second manifold block form a square shape, The manifold block is characterized in that the joint is provided on one or more of the first surface and the outer surface connected perpendicularly to the second surface. A valve unit comprising a valve mounted on the manifold block according to any one of claims 1 to 10.

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