JP4450225B2 - Fluid polishing equipment - Google Patents

Description

  The present invention relates to a fluid polishing apparatus, and is suitable for application to a slurry supply apparatus having a switching on-off valve for increasing the pressure of slurry and supplying it to a workpiece.

2. Description of the Related Art Conventionally, a fluid polishing apparatus is known that adjusts the flow rate of an orifice hole while supplying a slurry mixed with a polishing material such as abrasive grains to a workpiece having an orifice hole, for example, while expanding the hole diameter. (See Patent Document 1)
In this type of fluid polishing apparatus, a tank for stirring slurry so that it can be supplied to the outside, a pressure increasing device such as a pressure increasing piston for increasing the pressure of the slurry, and the direction of slurry flow between the tank, the pressure increasing apparatus, and the workpiece And an on-off valve device for switching between the two.

  By the opening / closing operation of the opening / closing valve device, the fluid polishing device increases the pressure of the slurry supplied from the tank by the pressure increasing device, and supplies the increased pressure slurry to the workpiece.

  In general, as shown in FIG. 5, the on-off valve portion of the on-off valve device includes a valve body 921 and a valve seat holder 940 that holds a rubber packing 948 as a pressure receiving member to which the valve body 921 can be separated and contacted. The valve body 921 abuts and separates from the rubber packing 948 so that the slurry flow is blocked and distributed.

Such a rubber packing 948 has a hole 948a for fixing to the valve seat holder 940 in the center where the valve body 921 does not abut, in order to achieve stability of the seal with the valve body 921. It is screwed and fixed to the screw portion 949 of the valve seat holder 940 by a screwing member such as a bolt 951.
JP 2005-177916 A

  In the prior art, the peripheral portion of the rubber packing 418 near the hole 948a is subjected to an initial stress due to screwing and fixing, so when the valve body 921 is strongly pressed against the rubber packing 948 when the slurry flow is interrupted, the hole 948a Excessive stress is applied to the near portion, and rubber packing cracks may occur starting from the hole 948a.

  Further, when the rubber packing 948 is screwed and fixed, since the outer periphery of the rubber packing 948 is not pressed against the valve seat holder 940, warpage may occur at the outer peripheral portion of the rubber packing 948.

  When such a rubber packing 948 is used for a long time, there is a problem that a seal failure occurs due to a crack starting from the hole 948a or a warp of the outer peripheral portion.

  The present invention has been made in view of such circumstances, and has an on-off valve device that circulates and shuts off the flow of slurry, and an object thereof is to extend the seal life of a pressure receiving member that seals with a valve body. And

  Another object of the present invention is to improve the seal life of the pressure receiving member that seals with the valve body, and to improve the operating efficiency of the on-off valve device and the like in the processing of workpieces, having an on-off valve device that circulates and shuts off the slurry flow. An object of the present invention is to provide a fluid polishing apparatus capable of improving the above.

    In order to achieve the above object, the present invention comprises the following technical means.

That is, the invention according to any one of claims 1 to 7 comprises a supply source for supplying a slurry mixed with an abrasive, a pressure increasing device for increasing the pressure of the slurry, and an opening / closing valve device for switching the flow direction of the slurry. In the fluid polishing apparatus for increasing the pressure of the slurry supplied from the supply source by the pressure increasing device and switching the increased pressure slurry to the workpiece by switching the slurry flow direction by
The on-off valve device has a valve body for circulating and blocking the flow of the slurry, and a valve seat holder having a pressure receiving member made of an elastic material with which the valve body can be contacted and separated,
The pressure receiving member is formed in a substantially cylindrical body, and an outer periphery of the substantially cylindrical body is held by a valve seat holder.

  With this configuration, the pressure receiving member made of an elastic material such as rubber packing does not need to have a notch such as a hole having a shape that easily concentrates stress. Therefore, the seal life of the pressure receiving member that seals with the valve body can be extended.

  Even if the method of gripping the pressure receiving member to the valve seat holder is by a screwing member that screw-fixes the pressure receiving member and the valve seat holder by screwing, the outer periphery of the pressure receiving member gripped by the outer periphery is Since it is the outer periphery of the substantially cylindrical body, it is not an outer peripheral shape in which stress is easily concentrated. Therefore, it is possible to avoid applying excessive stress to the pressure receiving member when blocking the slurry flow.

In the invention according to claim 2, the pressure receiving member is a rubber packing,
The rubber packing is formed of a material having solvent resistance.

  Thereby, even if the opening / closing operation of the on-off valve device is carried out for a long time, the pressure-receiving member is formed of a solvent-resistant material such as urethane rubber, so that it can be used for a long time in the slurry. , Material deterioration can be suppressed. Therefore, the seal life of the pressure receiving member can be further extended.

  Further, the invention according to claim 3 is characterized in that the pressure receiving member and the valve body are separated from and in contact with each other, whereby the flow of the increased slurry is circulated and blocked.

  According to this, in the on-off valve device, the part where the pressure receiving member and the valve body are arranged is preferably a part that circulates and blocks the flow of the increased slurry by separating and abutting each other. Accordingly, even when the valve body is strongly pressed against the pressure receiving member in order to distribute and block the increased flow of the slurry, excessive stress is applied to the pressure receiving member when the slurry flow is blocked. Since this can be avoided, the seal life of the pressure receiving member can be improved.

  In the inventions according to claims 4 and 5, the on-off valve device can have a relatively simple three-way valve structure including a valve body and a pressure receiving member. According to a fourth aspect of the present invention, the on-off valve device is a three-way valve that switches between a first flow of slurry from a supply source to the pressure increasing device and a second flow of slurry increased from the pressure increasing device to the workpiece. And a valve body is formed in a substantially cylindrical body, and can have a slurry flow path which can distribute | circulate a slurry inside. According to the fifth aspect, the pressure receiving member is disposed at one end of the valve body, and the second valve seat holder having the second pressure receiving member is disposed at the other end of the valve body. Can do.

  Therefore, for example, by a simple valve body operation of reciprocating in the extending direction such as the axial direction of the cylindrical valve body, the pressure receiving member disposed on the one end side and the other end side are disposed. A simple on-off valve device capable of switching between the first flow and the second flow by alternately pressing the valve body against the second pressure receiving member can be realized.

Further, in the invention according to claim 6, the fluid polishing apparatus according to any one of claims 1 to 5, wherein the on-off valve device and the pressure increasing device are used as a set, and two sets of the first on-off valve are provided. A device and a first pressure booster, a second on-off valve device and a second pressure booster,
While supplying the slurry from the supply source to the first pressure increasing device by the first on-off valve device of one set,
The workpiece is supplied with the slurry that has been increased in pressure by the second pressure increasing device by the second on-off valve device of the other set.

  In the fluid polishing apparatus having such a configuration, the first on-off valve device and the second on-off valve device alternately perform the operation of pressing the valve body against the pressure receiving member for blocking the slurry flow. The seal life is greatly improved.

  Further, in the invention according to claim 7, the fluid polishing apparatus according to any one of claims 1 to 5 is configured as a set of the on-off valve device and the pressure increasing device. It is characterized by.

  As described above, in the fluid polishing apparatus, even when the operation of pressing the valve body against the pressure receiving member for shutting off the slurry flow is repeatedly performed by a set of on-off valve devices, the seal life of the pressure receiving member can be improved.

  Furthermore, since the operation is repeatedly performed by one set of on-off valve devices, for example, the operating efficiency of the on-off valve device and the pressure increasing device that operates accompanying the on-off valve device can be improved as compared with the case of alternately performing two sets of on-off valve devices.

  Hereinafter, embodiments of the fluid polishing apparatus of the present invention will be described with reference to the drawings.

  FIG. 1 is a cross-sectional view showing an on-off valve device according to this embodiment. FIG. 2 is a block diagram showing an overall configuration of an example of the fluid polishing apparatus of the present embodiment. FIG. 3 is a partial cross-sectional view showing a main part of the present invention, in which a part III in FIG. FIG. 4 is a diagram showing an opening / closing operation of the valve body and the pressure receiving member in FIG. 3, and is a partial sectional view showing an open state in which the valve body and the pressure receiving member are separated from each other.

  In contrast to FIG. 4, FIG. 3 shows a closed state in which the valve body and the pressure receiving member are in contact with each other. 3 and 4 show the on-off valve device of FIG. 1 rotated 90 degrees for convenience of drawing.

  As shown in FIG. 2, the fluid polishing apparatus increases the pressure of the three-way valve 1 as an on-off valve device that switches the flow of the slurry 9, a supply source (hereinafter referred to as a tank) 2 that supplies the slurry 9, and the slurry 9. The pressure boosting cylinder 3 as a pressure boosting device and a shutoff valve (hereinafter referred to as a parts valve) 5 for supplying and stopping slurry supply to the workpiece 8 are configured. A check valve 4 is preferably provided between the parts valve 5 and the three-way valve 1 to prevent the backflow of the slurry 9 to the three-way valve 1.

  The fluid polishing apparatus adjusts the flow rate of the orifice hole while supplying the slurry 9 to the workpiece 8 having an orifice hole (not shown) to enlarge the hole diameter.

  The slurry 9 is mixed with an abrasive such as abrasive grains. The slurry is made of ceramic clay, for example, and is adjusted within a predetermined viscosity range.

  In the tank 2, the normal-pressure slurry 9 is stirred, and the slurry 9 is stored so that it can be supplied under slurry supply conditions such as within a predetermined viscosity range.

  The pressure-increasing piston 3 is a device that makes the internal volume variable by reciprocating the plunger. The internal volume is increased by the downward movement of the plunger in the figure, and the volume is reduced by the upward movement. When the plunger moves downward, the slurry 9 supplied from the tank 2 is sucked, and when the plunger moves upward, the slurry 9 is pressurized to form a high-pressure slurry.

  The parts valve 5 stops the supply of the slurry 9 to the workpiece 8 when the workpiece 8 to be processed for fluid polishing is exchanged, and after the workpiece 8 is exchanged, for example, from a fluid polishing completed product to a product before fluid polishing, This is a well-known shut-off valve that starts supplying the slurry 9 to the work 8.

  The three-way valve 1 is a device that switches the flow of the slurry 9 as shown in FIGS. 1 and 2. The three-way valve 1 includes a first flow of slurry 9 (flow in the direction indicated by the solid line in FIG. 1) that guides the normal-pressure slurry 9 in the tank 2 to the pressure-increasing piston 3, and a pressure-increasing cylinder. The second flow of the slurry 9 that switches the slurry 9 increased in pressure 3 to the parts valve 5 via a check valve (see FIG. 2) is switched.

  Specifically, as shown in FIG. 2, the three-way valve 1 includes a valve housing 10, a valve body 21, and a pressure receiving member that circulates and blocks a specific slurry 9 flow when the valve body 21 is separated and abutted (hereinafter, referred to as “a pressure receiving member”) Rubber packing) 48 and the like.

  The valve housing 10 includes a slurry introduction port 11 through which the slurry 9 in the tank 2 flows, a pressure increasing cylinder side opening 12 that guides the slurry 9 to the pressure increasing cylinder 3, and a part valve side opening 13 that guides the slurry 9 to the parts valve 5. And.

  In the valve housing 10, an atmospheric pressure slurry storage chamber 14, a variable volume space 15, and high pressure slurry storage chambers 16 and 17 are formed by a partition wall. This partition is arranged so that the valve body 21 can be inserted in a liquid-tight manner. The normal pressure slurry storage chamber 14, the variable volume space 15, and the high pressure slurry storage chambers 16 and 17 are formed with inner walls 14a, 15a and 16a with a partition interposed therebetween.

  In the normal pressure slurry storage chamber 14, a slurry inlet 11 and a pressure increasing cylinder side opening 12 are formed in the inner wall 14a. The pressure-increasing cylinder side opening 12 circulates and blocks to the atmospheric pressure slurry storage chamber 14 in accordance with the separation and contact between the other end 21a (specifically, the contact portion 25) of the valve body 21 and the second rubber packing 38. It is configured as follows.

  In the high-pressure slurry storage chambers 16 and 17, a parts valve side opening 13 is formed in the inner wall 16a. The part valve side opening 13 is always in communication with the high-pressure slurry storage chambers 16 and 17 through a holder 40 that holds the first rubber packing 48. Further, the part valve side opening 13 is provided with the slurry flow path 23 in the valve body 21 in accordance with the separation and contact between the one end portion 21 b (specifically, the contact portion 25) of the valve body 21 and the first rubber packing 48. It is comprised so that it may distribute | circulate and interrupt | block to the pressure increase cylinder side opening 12 via.

  The valve body 21 is formed in a substantially cylindrical body, and a flange portion 22 is provided in the approximate center. The flanger portion 22 is disposed so as to be movable in the axial direction in the variable volume space 15. Specifically, the flanger section 22 functions as a partition that secretly partitions the volume variable space 15 into a first volume variable space 15b and a second volume variable space 15c. Note that the first volume variable space 15b and the second volume variable space 15c are air (not shown) such as factory air via the first air supply port 18 and the second air supply port 19 formed in the inner wall 15a, respectively. It is supplied from a supply source.

  As shown in FIGS. 1 and 3, the contact portions 25 and 26 of the valve body 21 are made of a resin material for sealing by contacting and separating from the rubber packings 38 and 48.

  As shown in FIGS. 1 and 3, the first packing 48 is formed in a substantially cylindrical body made of an elastic material such as urethane rubber and is held by a holder 40. Specifically, the first packing 48 is accommodated in a step portion 43 d formed in the holder cylindrical portion 43 of the holder 40. The first rubber packing 48 is sandwiched between the packing pressing member 45 and the stepped portion 43 d and is held by the holder 40.

  The packing pressing member 45 has a male screw portion formed on the outer periphery, and is screwed and fixed to a female screw portion formed on the inner periphery of the stepped portion 43d by screw tightening. Here, the packing pressing member 45 constitutes a gripping member that grips the outer periphery 48 b of the first packing 48.

  As shown in FIG. 1, the holder 40 is integrally formed with a holder outer peripheral portion 41, a holder cylindrical portion 43, and a holder conical portion 42.

  In the present embodiment, the first rubber packing 48 is preferably formed of a material having solvent resistance with respect to the slurry 9 such as urethane rubber. The first rubber packing 48 preferably has a relatively high hardness such as urethane rubber.

  As shown in FIG. 1, the second rubber packing 38 is formed in a substantially annular body and is held by the second holder 30. Specifically, the inner periphery 38 a and the outer periphery 38 b of the second rubber packing 38 are sandwiched in the holder 40. The second holder 30 is provided with a communication hole 31, and this communication hole 31 always communicates the pressure increasing cylinder side opening 12 and the slurry flow path 23 in the valve body 21.

  In the present embodiment, as shown in FIG. 2, in the fluid polishing apparatus, the above-described set of the three-way valve 1 and the pressure increasing cylinder 3 is configured to prepare two sets for processing one workpiece 8. That is, two sets of a first three-way valve 1A and a first pressure-increasing cylinder 3, and a second three-way valve 1B and a second cylinder (not shown) are provided. For example, while the slurry 9 is supplied from the tank 2 to the first pressure-increasing cylinder 3 by the first three-way valve 1A of one group, the pressure is increased by the second pressure-increasing cylinder by the second three-way valve 1B of the other group. It is configured to supply the workpiece 8 with the slurry 9 made.

  Next, the operation of the fluid polishing apparatus having the above-described configuration, in particular, the three-way valve 1 will be described below with reference to FIGS.

  When factory air (hereinafter referred to as air) is supplied from the air supply port 18, the internal volume of the first variable volume space 15b is expanded, and the flange portion 22 of the valve body 21 moves to the right in FIG. When the valve body 21 moves to the right, the other end 21a of the valve body 21 is separated from the second rubber packing 38, and the other end 21a and the second rubber packing 38 are opened. On the other hand, the one end 21b of the valve body 21 contacts the first rubber packing 48, and the one end 21b and the first rubber packing 48 are closed.

  At this time, when the normal-pressure slurry 9 in the tank 2 flows into the normal-pressure slurry storage chamber 14 from the slurry introduction port 11, it is guided to the pressure-increasing cylinder 3 through the communication hole 31 and the pressure-increasing cylinder side opening 12. It is burned.

  The pressure-increasing cylinder 3 moves downward in the plunger. Due to the expansion of the internal volume, the normal-pressure slurry 9 guided to the pressure-increasing cylinder 3 is sucked in a predetermined amount according to the internal volume. When the plunger movement is changed to the upward movement, the internal volume is reduced, so that the sucked normal pressure slurry 9 is increased and a high pressure slurry 9 is formed.

  Next, air in the first variable volume space 15 b is extracted from the air supply port 18, and air is supplied from the air supply port 19. When air is supplied from the air supply port 19, the internal volume of the second variable volume space 15c increases, and the flange portion 22 of the valve body 21 moves to the left in FIG. When the valve body 21 moves in the left direction, the other end 21a of the valve body 21 contacts the second rubber packing 38, and the other end 21a and the second rubber packing 38 are closed. On the other hand, the one end 21b of the valve body 21 is separated from the first rubber packing 48, and the one end 21b and the first rubber packing 48 are in an open state.

  At this time, the high-pressure slurry 9 increased in pressure by the pressure-increasing cylinder 3 flows into the high-pressure slurry reservoirs 16 and 17 through the communication hole 31 and the slurry flow path 23, and passes through the parts valve side opening 13. A high-pressure slurry 9 is supplied to the parts valve 5.

  Next, the sealing state between the one end 21b of the valve body 21 and the first rubber packing 48 will be described with reference to FIGS.

  In the open state shown in FIG. 3, the high-pressure slurry 9 is vigorously discharged from the slurry flow path 23 in the valve body 21 into the high-pressure slurry storage chambers 16 and 17, and the discharged high-pressure slurry 9 is sent to the external parts valve 5. leak.

  In the closed state shown in FIG. 4, the slurry passage 23 is closed by the one end portion 21 b of the valve body 21 and the first rubber packing 48, and the high-pressure slurry 9 is kept confined in the slurry passage 23. . For this reason, the one end portion 21 b (specifically, the contact portion 26) is pressed against the first rubber packing 48 with a pressing load corresponding to the pressure of the high-pressure slurry 9.

  Such an open state (see FIG. 3) and a closed state (see FIG. 4) are repeated during machining of the workpiece 8.

  In the present embodiment, the first rubber packing 48 is formed in a substantially cylindrical body, and the outer periphery 48 b of the substantially cylindrical body is configured to be held by the holder 40.

  With such a configuration, the first rubber packing 48 does not need to have a notch such as a hole 948a (see FIG. 5) having a shape in which stress is likely to be concentrated as in the related art. Therefore, the sealing life of the first rubber packing 48 that seals in the closed state with the one end 21b of the valve body 21 can be extended.

  As a method of gripping the first rubber packing 48 to the holder 40, in this embodiment, the first rubber packing 48 and the holder 40 (specifically, the holder cylindrical portion 43) are screwed and fixed by the packing pressing member 45. is doing. Even if the first rubber packing 48 is gripped by the holder 40 by such a configuration, the outer periphery 48b of the first rubber packing 48 is an outer shape of a substantially cylindrical body, and thus is not an outer shape that easily concentrates stress. . Therefore, it is possible to avoid applying excessive stress to the first rubber packing 48 when the flow of the slurry 9 is interrupted.

  In the present embodiment, the first rubber packing 48 is sandwiched between the packing pressing member 45 and the holder cylindrical portion 43 and is gripped by screwing. Therefore, the first rubber packing 48 is detached from the holder 40. Can be easily done.

  Moreover, in this embodiment, it is preferable that the 1st rubber packing 48 is formed with the material which has solvent resistance with respect to the slurry 9, such as urethane rubber. Thereby, even if the opening and closing operation of the three-way valve 1 is performed for a long time, the first rubber packing 48 is formed of a solvent-resistant material such as urethane rubber, so that it is used in the slurry 9 for a long time. However, material deterioration can be suppressed. Therefore, the seal life of the first rubber packing 48 can be further extended.

  In the present embodiment, the first rubber packing 48 preferably has a relatively high hardness such as urethane rubber. Thereby, since the hardness of the 1st rubber packing 48 is set comparatively high, compared with the thing whose hardness is comparatively low with respect to the said pressing load, a deformation | transformation of the 1st rubber packing 48 can be restrained small. Therefore, it is possible to avoid stress concentration locally generated at the portion where the one end 21b of the valve body 21 is pressed.

  In the present embodiment, in the three-way valve 1, the portion where the first rubber packing 48 and the one end portion 21 b of the valve body 21 to be sealed are arranged at the portion where the flow of the high-pressure slurry 9 is circulated and blocked. is doing. Thus, even when the one end portion 21b of the valve body 21 is strongly pressed against the pressure receiving member in order to circulate and block the flow of the high-pressure slurry 9, excessive pressure is applied to the pressure receiving member when the slurry flow is blocked. Since stress can be avoided, the seal life of the pressure receiving member can be improved.

  In the present embodiment, the three-way valve 1 is configured such that the slurry flow is a first flow of the slurry 9 that guides the normal-pressure slurry 9 in the tank 2 to the pressure-increasing piston 3 (flow in the direction indicated by the arrow in FIG. 1). ) And the second flow of the slurry 9 that guides the slurry 9 increased in pressure by the pressure-increasing cylinder 3 to the parts valve 5 via a check valve (see FIG. 2). Is formed in a substantially cylindrical body and is configured to have a slurry flow path 23 through which the slurry 9 can flow.

  Further, the first rubber packing 48 is disposed at one end 21 b of the valve body 21, and the second rubber packing 38 is disposed at the other end 21 a of the valve body 21.

  With such a configuration, a relatively simple structure of the three-way valve 1 can be obtained. That is, the first rubber packing 48 disposed on the one end 21b side and the second rubber disposed on the other end 21b side by a simple valve body operation in which the cylindrical valve body 21 is reciprocated in the axial direction. A simple three-way valve 1 that can switch the first flow and the second flow by alternately pressing the valve bodies 21 against the packing 38 can be realized.

  Moreover, in this embodiment, in order to process one workpiece 8 in the fluid polishing apparatus, two sets of the first three-way valve 1A and the first pressure-increasing cylinder 3, and the second three-way valve 1B and the second cylinder are provided. I have.

  Accordingly, for example, while the slurry 9 is supplied from the tank 2 to the first pressure-increasing cylinder 3 by the first three-way valve 1A in one group, the second pressure-increasing cylinder is in the other group by the second three-way valve 1B. The workpiece 8 can be supplied to the slurry 9 whose pressure has been increased in step (a).

  In the fluid polishing apparatus having such a configuration, the first three-way valve 1A and the second three-way valve 1B alternately perform the operation of pressing the valve body 21 against the first rubber packing 48 for blocking the flow of the slurry 9. Therefore, the seal life of the first rubber packing 48 is greatly improved.

(Other embodiments)
(1) In the present embodiment described above, the structure of the three-way valve 1 is described as the structure of the on-off valve device. However, the structure of the on-off valve device is not limited to the three-way valve structure, and is used to circulate and shut off the slurry flow. Any structure may be used as long as it has a structure of the valve device and a pressure receiving member made of an elastic material that can contact and separate.

  (2) In the present embodiment described above, the configuration of the three-way valve 1 and the pressure-increasing cylinder 3 in the fluid polishing apparatus has been described as a configuration in which two sets are prepared in order to process one workpiece 8. The fluid polishing apparatus is not limited to two sets of the three-way valve 1 and the pressure-increasing cylinder 3, but may be one set.

  In such a fluid polishing apparatus, even if the set of three-way valves 1 repeatedly performs the operation of pressing the valve element 21 against the pressure receiving member 48 such as the first rubber packing for shutting off the slurry flow, The seal life of the member 48 can be improved.

  Further, since the operation is repeated with one set of the three-way valves 1, the operation efficiency of the three-way valve 1 and the pressure increasing cylinder 3 operating accompanying the three-way valve 1 can be improved as compared with the case where the two sets of the three-way valves 1A and 1B are alternately performed. .

It is sectional drawing which shows the on-off valve apparatus concerning embodiment of this invention. 1 is a block diagram showing an overall configuration of an example of a fluid polishing apparatus according to an embodiment of the present invention. It is a fragmentary sectional view which shows the principal part of this invention which expanded the III part in FIG. It is a figure which shows the opening / closing operation | movement of the valve body and pressure receiving member in FIG. 3, Comprising: It is a fragmentary sectional view which shows the open state which the valve body and pressure receiving member separated. It is a fragmentary sectional view which shows the structure around a prior art valve body and a pressure receiving member.

Explanation of symbols

1 Three-way valve (open / close valve device)
1A First three-way valve (first on-off valve device)
1B Second three-way valve (second on-off valve device)
2 Tank (supply source)
3 Booster cylinder (pressure booster)
4 Check valve 5 Parts valve (shutoff valve)
8 Workpiece 10 Valve housing 11 Slurry introduction port 12 Booster cylinder side opening 13 Parts valve side opening 14 Normal pressure slurry storage chamber 15 Volume variable space 15b, 15c First volume variable space, second volume variable space 16, 17 High pressure slurry storage Chamber 21 Valve body 21a Other end portion 21b One end portion 23 Slurry flow path 25, 26 Contact portion 30 Second holder 38 Second rubber packing 40 First holder (valve seat holder)
41 Holder outer peripheral portion 42 Holder cylindrical portion 43 Holder conical portion 43d Stepped portion 45 Packing pressing member (gripping member)
48 1st rubber packing (pressure receiving member)
48b outer circumference

Claims (7)

A supply source for supplying a slurry mixed with abrasives, a pressure increasing device for increasing the pressure of the slurry, and an on-off valve device for switching the flow direction of the slurry, and by switching the slurry flow direction by the on-off valve device. In the fluid polishing apparatus, the slurry supplied from the supply source is increased in pressure by the pressure increasing device, and the increased pressure slurry is supplied to the workpiece.
The on-off valve device is
A valve body for circulating and blocking the flow of the slurry;
A valve seat holder having a pressure receiving member made of an elastic material that can contact and separate the valve body;
The fluid polishing apparatus, wherein the pressure receiving member is formed in a substantially cylindrical body, and an outer periphery of the substantially cylindrical body is held by the valve seat holder. The pressure receiving member is a rubber packing,
The fluid polishing apparatus according to claim 1, wherein the rubber packing is made of a solvent-resistant material.   3. The fluid polishing apparatus according to claim 1, wherein the pressure receiving member and the valve body are separated from and abutted with each other to circulate and block the flow of the increased slurry. 4. The on-off valve device is a three-way valve that switches between a first flow of the slurry from the supply source to the pressure increasing device and a second flow of the slurry increased from the pressure increasing device to the workpiece. ,
The fluid according to any one of claims 1 to 3, wherein the valve body is formed in a substantially cylindrical body and has a slurry flow path through which the slurry can flow. Polishing equipment. The pressure receiving member is disposed at one end of the valve body,
The fluid polishing apparatus according to claim 4, wherein a second valve seat holder having a second pressure receiving member is disposed at the other end of the valve body. The fluid polishing apparatus according to any one of claims 1 to 5,
The set of the on-off valve device and the pressure booster has two sets of a first on-off valve device and a first pressure booster, a second on-off valve device and a second pressure booster,
While supplying the slurry from the supply source to the first pressure increasing device by the first on-off valve device of one set,
2. The fluid polishing apparatus according to claim 1, wherein the workpiece is supplied with the slurry that has been pressurized by the second pressure increasing device by the second opening / closing valve device. The fluid polishing apparatus according to any one of claims 1 to 5,
A fluid polishing apparatus characterized in that the on-off valve device and the pressure increasing device are combined into one set.

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