JP4451544B2 - Door opening and closing device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a door opening / closing device, and more particularly to an opening / closing door mechanism for dust prevention used in a clean room.
[0002]
[Prior art]
Conventionally, an open / close door used in a clean room has been required to have a dustproof function. Therefore, an open / close door provided with a suction mechanism at a friction portion of the door or a non-contact type door open / close device without a friction portion is used.
[0003]
In the case of a non-contact type door opening and closing device, if the first door member and the second door member are provided as a sliding door type, a slight gap is created at a location where they pass each other, but generally the clean room has a higher pressure than the outside of the clean room. Therefore, it is known that there is almost no intrusion of dust or the like from the outside even if there is a gap. On the other hand, a mechanism disclosed in Japanese Patent Application Laid-Open No. 2-167979 is adopted as a magnetic door opening / closing device that eliminates a frictional part that causes dust generation.
[0004]
However, according to the door opening and closing device using magnetism described in the above publication, since the electromagnet is used for both the supporting means for supporting the door so as to be opened and closed and the driving means for opening and closing the door, the manufacturing cost However, there is a problem that maintenance cost is required due to high power consumption. That is, the electromagnet is more expensive than the permanent magnet, and it is always necessary to supply electricity in order to maintain the function of the electromagnet. However, if the permanent magnet is used, the maintenance cost is not necessary.
[0005]
On the other hand, as a drive source for various wafer processing apparatuses installed in a clean room, there are many cases in which piping for supplying air pressure has already been installed. A drive source can be obtained.
[0006]
In addition, it is possible to guide in a non-contact state by fixing a plurality of permanent magnets to the door and movably providing them so as to face a round bar member made of a magnetic material. Even in such a portion, the magnetic attractive force acts, and instead it becomes a resistance during the movement.
[0007]
Accordingly, the present invention has been made in view of the above-described problems, and an object thereof is to provide a door opening / closing device that does not require manufacturing and maintenance costs.
[0008]
[Means for Solving the Problems]
In order to solve the above-described problems and achieve the object, according to the present invention, the first clean room maintained in the first atmospheric pressure state and the second atmospheric pressure state lower than the first atmospheric pressure state are maintained. A door opening / closing device that is disposed in an opening provided between the second clean room and that opens and closes the door by opening and closing the door member. A round bar member made of a magnetic material disposed along the upper edge, and held in a magnetic attraction state spaced a predetermined distance from the outer peripheral surface of the round bar member and fixed above the door member Upper support means composed of a plurality of first permanent magnets, lower support means disposed along the lower edge of the opening and supporting the lower side of the door member, and second permanent moving back and forth. Magnetic attraction by the magnet and the second permanent magnet In is characterized by comprising a composed driving means the door member and a magnetic member for the opening and closing.
[0009]
The driving means includes the second permanent magnet that reciprocates inside the hollow cylinder by air pressure, and a magnetic member that drives the door member to open and close by being magnetically attracted by the second permanent magnet. It is the pneumatic drive means comprised from these.
[0010]
The plurality of first permanent magnets are formed in a cylindrical shape having an upper surface portion, a side surface portion, and a bottom surface portion facing the round bar member, and the upper surface portion and the bottom surface portion have different polarities. The magnetic attraction state is maintained by being magnetized and covering a part of the bottom surface portion and the side surface portion with a first magnetic material.
[0011]
A first door member configured to close and open a first opening provided between the first processing apparatus disposed in the first clean room and the second clean room; 2nd which makes the 2nd opening provided between the 2nd processing apparatus arrange | positioned adjacent to the said 1st processing apparatus in the 1 clean room, and the said 2nd clean room into a closed state and an open state A door member; a pair of upper support means provided alongside an upper edge of the first opening and the second opening; and a lower edge of the first opening and the second opening A pair of the lower support means provided alongside, a pair of the drive means provided along the lower edge of the first opening and the second opening, the first door member, and the second Detecting means for detecting an open / closed state of the door member, the pair of driving means, and the detection It is connected to the stage, and the first door member and the second door member is characterized by comprising a control means for driving and controlling so as not to open at the same time.
[0012]
Then, a second magnetic material for covering the first permanent magnet is provided along a surface where the first door member and the second door member pass each other.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is an external perspective view of a door opening and closing device.
[0014]
In this figure, although the doors 4a and 4b for opening the openings 3a and 3b in an open state or a closed state (showing a closed state in the drawing) are provided as a representative, Needless to say, the number of sheets may be one, and whether to use two sheets or one sheet is appropriately set according to the process of the workpiece W.
[0015]
Now, on the clean room floor shown by hatching in the figure, in order to take out the work W from the work supply unit (not shown), the hand shown in the figure is moved and held in the directions of arrows X and Z, and then the arrow Y direction. The robot apparatus 53 is provided for transferring to the first clean room 1 that is maintained in the first atmospheric pressure state P1 after moving in the direction of arrow θ and turning in the direction of the arrow θ.
[0016]
The robot device 53 moves on the track 55 and travels in the second clean room 2 where the robot device 53 is maintained in the second atmospheric pressure state P2 lower than the first atmospheric pressure state P1. Between the first clean room 1 and the second clean room 2, there are provided openings 3a, 3b surrounded by an upper frame 8 on the upper side, a lower frame 9 on the lower side, and left and right wall surfaces, and this opening 3a. 3b, the workpiece W is taken in and out. In the openings 3a and 3b, a first door member 4a and a second door member 4b shown in the figure are provided in a sliding door type that moves in the directions of arrows D1 and D2, respectively. Control is performed so that the workpiece W is taken in and out of either the first processing device 51 on the back side or the second processing device 52 on the back side of the second door member 4b, and is not opened at the same time. Is done.
[0017]
As described above, when the door member is provided in the sliding door type, a slight gap is formed at a passing position, but the pressure in the clean room in which the processing apparatus is arranged as described above is higher than that in the clean room in which the robot apparatus is arranged (P1> P2). Therefore, even if there is a gap, there is almost no intrusion of dust or the like from the robot apparatus side.
[0018]
The first door member 4a and the second door member 4b arranged as described above are supported by their own weights by linear guides fixed to the lower frame 9, and are movable in the directions of arrows D1 and D2 and in the reverse direction. While being supported, it is individually driven by the driving devices 20 and 20. Further, the upper ends of the first door member 4 a and the second door member 4 b are moved by being magnetically attracted by the first permanent magnet 6 to the round bar members 5, 5 fixed to the upper frame 8. It is supported freely.
[0019]
FIG. 2 is a cross-sectional view taken along line AA in FIG. In this figure, components that have already been described are denoted by the same reference numerals and description thereof is omitted, and the door member that moves as described above is in a non-contact state with an interval of several millimeters within the recessed groove portion 11a of the resin cover 11. The resin cover 11 is fixed via a bracket 14 in order to use the iron cylindrical round bar member 5 provided as a guide.
[0020]
A plurality of first permanent magnets 6 are partially embedded inside the resin cover 11, and when the permanent magnets and the iron round bar member 5 are simply brought close to each other, they are completely magnetically attracted. When placed as a solid with iron on the top and with a permanent magnet on the bottom, if the weight of the object to which the permanent magnet is fixed is smaller than the magnetic attractive force of the iron and the permanent magnet, the solid with the magnet will be lifted by the iron. Here, the weight of the door member side is slightly larger than the attractive force of the permanent magnet 6 so that the posture of the plate-like door members 4a and 4b is maintained upright by the magnetic attractive force although it is non-contact. Yes.
[0021]
For this reason, the round bar member 5 is made of iron, and the door member is always kept upright at the nearest portion by maintaining the arc side surface in the attracted state by the first permanent magnet 6. That is, it is possible to more strictly limit the locations where magnetic attraction occurs than when the surfaces where the permanent magnet and the iron member face each other are flat surfaces.
[0022]
In addition, by covering the periphery of the first permanent magnet 6 with a resin cover 11 made of a resinous material, even when an iron member comes into contact with the permanent magnet, a non-magnetic resin cover is interposed. It becomes easy to pull apart easily. Moreover, when fixing a permanent magnet with respect to said bracket 14, if a resin cover is not provided, processing of the screw hole for attachment to a magnet main body, etc. will be needed, but by covering with the resin cover 11 which is easy to process, Processing to the permanent magnet body becomes unnecessary.
[0023]
Further, the first permanent magnet 6 is formed in a cylindrical shape having an upper surface portion, a side surface portion, and a bottom surface portion facing the round bar member, and the upper surface portion and the bottom surface portion are magnetized differently, and By covering a part of the bottom part and the side part with the first magnetic material 7, the magnetic force is adjusted by maintaining the magnetic attraction state. In addition, by fixing the second magnetic material 13 for covering the first permanent magnet 6 to the side surface of the resin cover 11 along the surface where the first door member 4a and the second door member 4b pass each other, The direction of the magnetic field lines is controlled to prevent unnecessary magnetic attraction to the door member on the other side when passing each other.
[0024]
Next, FIG. 3A shows a state of magnetic attraction of the round bar member 5 and the plurality of first permanent magnets 6, and an external perspective view in which the N pole and the S pole are magnetized differently in the thickness direction. 3B shows a state of magnetic attraction of the round bar member 5 and the plurality of first permanent magnets 6, and an external perspective view in which the N pole and the S pole are magnetized differently in the moving direction. FIG.
[0025]
In FIG. 3A, in order to increase magnetic attraction between the round bar member 5 and the plurality of first permanent magnets 6, N poles and S poles are alternately arranged, and flux F forms a closed magnetic flux circuit in the radial direction. is doing. In other words, the illustrated magnetic force works by making only one of the poles facing the round bar member 5.
[0026]
In addition, as shown in FIG. 3B, when the magnetic force is applied, the magnetic force is pulled from both sides, and the magnetic force becomes stronger. In this case, the direction of the magnetic force only has to work between the permanent magnet and the round bar member, but the permanent magnet exerts a magnetic force in all directions with respect to the surroundings. Therefore, in order to suppress the action of the magnetic force in an unnecessary direction, the first magnetic material 7 covers the half to the bottom of the magnet body. By doing so, the magnetic force of the lower half of the magnet does not work against the surroundings. In FIGS. 3A and 3B, the case where the shape of the permanent magnet is a cylindrical shape is shown. However, the shape is not limited to this, and any shape can be used as long as the permanent magnet can obtain a predetermined magnetic field line. Things can be used.
[0027]
Again, based on FIG. 2, the structure of door member 4a, 4b is demonstrated. Since the door members 4a and 4b are made of a vinyl chloride plate member 17 for the purpose of preventing electrification, for example, when the width is 1 m × 1 m or more, it is unstable in strength, and therefore is surrounded by a stainless steel frame 16 as a reinforcing material. It is fixed with. The bracket 14 is fixed to the door member by interposing a spacer 15 therebetween.
[0028]
In addition, the lower brackets 18 to which the linear blocks 19 that are movably supported by the two linear motion guides 30 fixed to the lower frame 9 to support the weight of the door members 4a and 4b are fixed are also illustrated. Thus, the spacer 15 is interposed and fixed to the door member by fastening.
[0029]
These brackets 18 are provided with small window portions 18a, and the distal end portion of the bracket 25 of the pneumatic drive device 20 enters the small window portions 18a so that the driving force of the drive device 20 is transmitted. It is configured. In the following, the configuration in the case of pneumatically driving the drive device will be described. As this drive device, from a moving bush that is reciprocally driven on a guide rail by being screwed to a ball screw fixed to an output shaft of a stepping motor. Needless to say, there may be various configurations. FIG. 4A is an external perspective view of the pneumatic driving device 20, and FIG. 4B is a cross-sectional view of the main part of the pneumatic driving device 20.
[0030]
In FIG. 4, the pneumatic drive device 20 uses a rodless cylinder which is a kind of air cylinder. The pneumatic drive device 20 is configured to be able to open and close the door at a low speed when starting and stopping, and to obtain a complete dustproof effect even when installed in a clean room.
[0031]
4 (a) and 4 (b), the pneumatic drive device 20 has end members 26 and 26 fixed so as to close both ends of a cylindrical member 35 formed of a hollow cylindrical nonmagnetic material. In addition, air is supplied / discharged from the pipe 24 connected to the end member 26 to the inside of the cylindrical member 35, and a shaft member 23a is fixed to both ends of the cylindrical member 35 so that the cylindrical member 35 is shown in the drawing. A second permanent magnet 22 is formed so that the left and right cylinder chambers are formed by making the inner peripheral surface of the first and second cylinders airtight.
[0032]
2 is provided on the outer peripheral surface of the cylindrical member 35 so as to move in the longitudinal direction of the cylindrical member 35, and the second permanent magnet in the cylindrical member 35 is provided. If 22 moves to either the left or right with the air supply, the magnetic body 21 is magnetically attracted so that it is similarly linked.
[0033]
Further, the end member 26 is provided with a hollow portion 26a in which the shaft 23a is accommodated, and the inner diameter dimension of the hollow portion 26a is set to be larger than the outer diameter of the shaft 23a by a clearance, and the shaft 23a. A spiral groove portion 23h is formed on the outer peripheral surface of the shaft so as to allow air to escape. By gradually letting the air in the cavity portion 26a escape outside the cylinder, the shaft 23a is accommodated in the cavity portion 26a and moved to the final position. It is configured to be able to. On the other hand, when the shaft 23a goes out of the hollow portion 26a, air is gradually supplied into the cylindrical member 35 through the spiral groove portion 23h, so that it does not protrude suddenly. With the damper function as described above, the door can be moved smoothly at a low speed at least at the time of stopping and starting. In addition to the piping for supplying and exhausting air, the hollow portion is provided with a piping having a throttle for exhausting air so that the stopping speed at the time of stopping can be controlled.
[0034]
In FIG. 1 again, while the processing apparatus is in operation, the first and second door members 4a and 4b are closed to prevent dust, but the first processing is performed when the processing is completed and the next processing is performed. The door member 4a is moved in the direction of the arrow D1 until a sensor (not shown) senses by supplying air to the pneumatic driving device 20 described above. At this time, the door starts to open at low speed and stops at low speed.
[0035]
In addition, the doors may overlap each other in this case. In this case, since the first permanent magnet is used, a magnetic force is applied to the guide portion of the other door, which may cause adverse effects. Therefore, when a plurality of doors are stacked in front and rear, the influence is eliminated by the second magnetic material 13 on the side surface of the guide portion as shown in FIG.
[0036]
In addition, this invention is not limited to said embodiment, The various structure prescribed | regulated to a claim is possible, For example, you may make it move a door to an up-down direction. As described above, the permanent magnet generates a magnetic force around the magnet. If it works in an unnecessary direction, it may cause adverse effects. However, as described above, it is not possible to apply a magnetic force only in the necessary direction. The necessary direction was solved by controlling the direction of magnetic force by covering with a magnetic material.
[0037]
Also, if the door opening / closing operation is fast, wind speed will be generated in the surrounding area and air flow in the clean room may be obstructed and dust may enter. That is, the opening / closing operation of the door member is started / stopped at a low speed to eliminate dust winding.
[0038]
Further, since the guide portion of the door member is non-contact, a slight gap can be formed in the upper part and further in the front-rear direction, but there is almost no dust intrusion from the second clean room side due to the pressure difference.
[0039]
【The invention's effect】
As described above, according to the present invention, it is possible to provide a door opening and closing device that does not require manufacturing and maintenance costs.
[Brief description of the drawings]
FIG. 1 is an external perspective view showing a schematic configuration of the present invention.
FIG. 2 is a cross-sectional view taken along line AA in FIG.
3A is an external perspective view showing a state of magnetic attraction of the first permanent magnet 6 in which the round bar member 5, the N pole, and the S pole are magnetized in the thickness direction, FIG. These are the external appearance perspective views which showed the mode of the magnetic attraction of the 1st permanent magnet 6 by which the round bar member 5, the N pole, and the S pole were magnetized in the moving direction.
4A is an external perspective view of the pneumatic driving device 20, and FIG. 4B is a cross-sectional view of the main part of the pneumatic driving device 20. FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 1st clean room 2 2nd clean room 3a, 3b 1st, 2nd opening part 4a, 4b 1st, 2nd door member 5 Round bar member 6 1st permanent magnet 7 1st ferromagnetic material 8 Upper frame 9 Lower frame 11 Resin cover 13 Second magnetic material 20 Driving device (pneumatic pressure)
21 Magnetic body 22 Second permanent magnet 24 Pipe 26 End member 35 Tube member

Claims (5)

A door disposed between an opening provided between a first clean room maintained in a first atmospheric pressure state and a second clean room maintained in a second atmospheric pressure state lower than the first atmospheric pressure state; A door opening and closing device that opens and closes the opening by opening and closing a member,
A round bar member made of a magnetic material disposed along the upper edge of the opening, and a magnetic attraction state spaced from the outer peripheral surface of the round bar member by a predetermined distance, and above the door member Upper support means composed of a plurality of first permanent magnets fixed to
A lower support means disposed along the lower edge of the opening and supporting the lower portion of the door member;
A door comprising: a second permanent magnet that reciprocates; and a driving unit that is magnetically attracted by the second permanent magnet, and includes a magnetic member that drives the door member to open and close. Switchgear. The drive means includes the second permanent magnet that reciprocates inside the hollow cylinder by air pressure, and a magnetic member that opens and closes the door member by being magnetically attracted by the second permanent magnet. The door opening and closing device according to claim 1, wherein the door opening and closing device is a pneumatic driving means. The plurality of first permanent magnets are formed in a cylindrical shape having an upper surface portion, a side surface portion, and a bottom surface portion facing the round bar member, and the upper surface portion and the bottom surface portion are magnetized with different polarities. The door opening / closing apparatus according to claim 1, wherein the magnetic attraction state is maintained by covering a part of the bottom surface portion and the side surface portion with a first magnetic material. A first door member that makes a first opening provided between the first processing apparatus disposed in the first clean room and the second clean room a closed state and an open state;
A second opening provided between the second processing apparatus disposed adjacent to the first processing apparatus and the second clean room in the first clean room is set to a closed state and an open state. Two door members;
A pair of upper support means provided along the upper edge of the first opening and the second opening;
A pair of lower support means provided along the lower edge of the first opening and the second opening;
A pair of the driving means provided along the lower edge of the first opening and the second opening;
Detecting means for detecting an open / closed state of the first door member and the second door member;
The pair of drive means, and a control means connected to the detection means and controlling the drive so that the first door member and the second door member are not simultaneously opened. The door opening and closing device according to claim 1. The door according to claim 4, wherein a second magnetic material for covering the first permanent magnet is provided along a surface where the first door member and the second door member pass each other. Switchgear.

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