JP4474643B2 - Surface-coated cermet cutting tool whose hard coating layer exhibits excellent chipping resistance in high-speed intermittent cutting - Google Patents
Surface-coated cermet cutting tool whose hard coating layer exhibits excellent chipping resistance in high-speed intermittent cutting Download PDFInfo
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この発明は、特に各種の鋼や鋳鉄などの被削材の断続切削加工を、高速切削条件で行った場合にも、硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具（以下、被覆サーメット工具という）に関するものである。 This invention is a surface-coated cermet cutting tool that exhibits excellent chipping resistance even when intermittent cutting of various materials such as steel and cast iron is performed under high-speed cutting conditions ( Hereinafter, it is related to a coated cermet tool.
従来、一般に、炭化タングステン（以下、ＷＣで示す）基超硬合金または炭窒化チタン（以下、ＴｉＣＮで示す）基サーメットで構成された基体（以下、これらを総称して工具基体という）の表面に、
（ａ）下部層が、Ｔｉの炭化物（以下、ＴｉＣで示す）層、窒化物（以下、同じくＴｉＮで示す）層、炭窒化物（以下、ＴｉＣＮで示す）層、炭酸化物（以下、ＴｉＣＯで示す）層、および炭窒酸化物（以下、ＴｉＣＮＯで示す）層のうちの１層または２層以上からなり、かつ３〜２０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層が、１〜１５μｍの平均層厚、および化学蒸着した状態でα型の結晶構造を有し、さらに、
組成式：（Ａｌ１−ＸＣｒＸ）２Ｏ３、（ただし、原子比で、Ｘ：０．０１〜０．１）、
を満足するＡｌとＣｒの複合酸化物［以下、α型（Ａｌ，Ｃｒ）2Ｏ3で示す）層、
以上（ａ）および（ｂ）で構成された硬質被覆層を蒸着形成してなる被覆サーメット工具が知られており、この被覆サーメット工具が、例えば各種の鋼や鋳鉄などの連続切削や断続切削に用いられることも良く知られるところである。
Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. ,
(A) The lower layer is a Ti carbide (hereinafter referred to as TiC) layer, a nitride (hereinafter also referred to as TiN) layer, a carbonitride (hereinafter referred to as TiCN) layer, a carbon oxide (hereinafter referred to as TiCO). A Ti compound layer consisting of one or two or more layers of carbonitride oxide (hereinafter referred to as TiCNO) layers and having an overall average layer thickness of 3 to 20 μm,
(B) the upper layer has an average layer thickness of 1 to 15 μm and an α-type crystal structure in the state of chemical vapor deposition;
Composition formula: (Al 1-X Cr X ) 2
A composite oxide of Al and Cr (hereinafter referred to as α-type (Al, Cr) 2 O 3 ) layer satisfying the following conditions:
There is known a coated cermet tool formed by vapor-depositing a hard coating layer composed of (a) and (b) above, and this coated cermet tool can be used for continuous cutting and intermittent cutting of various steels and cast irons, for example. It is well known that it is used.
また、上記の被覆サーメット工具において、これの硬質被覆層の構成層は、一般に粒状結晶組織を有し、さらに、下部層であるＴｉ化合物層を構成するＴｉＣＮ層を、層自身の強度向上を目的として、通常の化学蒸着装置にて、反応ガスとして有機炭窒化物を含む混合ガスを使用し、７００〜９５０℃の中温温度域で化学蒸着することにより形成して縦長成長結晶組織をもつようにすることも知られている。 Further, in the above-described coated cermet tool, the constituent layer of the hard coating layer generally has a granular crystal structure, and further, the TiCN layer constituting the Ti compound layer as the lower layer is intended to improve the strength of the layer itself. In a normal chemical vapor deposition apparatus, a gas mixture containing organic carbonitride is used as a reaction gas, and it is formed by chemical vapor deposition at a medium temperature range of 700 to 950 ° C. It is also known to do.
さらに、上記の被覆サーメット工具の硬質被覆層を構成するα型（Ａｌ，Ｃｒ）2Ｏ3層が、格子点にＡｌ、Ｃｒ、および酸素からなる構成原子がそれぞれ存在するコランダム型六方最密晶の結晶構造、すなわち図１にα型（Ａｌ，Ｃｒ）2Ｏ3の単位格子の原子配列が模式図［（ａ）は斜視図、（ｂ）は横断面１〜９の平面図］で示される結晶構造を有する結晶粒で構成されることも知られている。
近年の切削装置の高性能化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削加工は高速化の傾向にあるが、上記の従来被覆サーメット工具においては、これを鋼や鋳鉄などの通常の条件での連続切削加工や断続切削加工に用いた場合には問題はないが、特にこれを断続切削加工を高速加工条件で行うのに用いた場合には、硬質被覆層を構成するα型（Ａｌ，Ｃｒ）2Ｏ3層が機械的および熱的に十分な耐衝撃性を具備するものでないために、前記硬質被覆層にチッピング（微少欠け）が発生し易くなり、この結果比較的短時間で使用寿命に至るのが現状である。 In recent years, the performance of cutting machines has been remarkable. On the other hand, there has been a strong demand for labor saving and energy saving and further cost reduction for cutting work. For cermet tools, there is no problem when this is used for continuous cutting and interrupted cutting under normal conditions such as steel and cast iron. If you were the type α constituting the hard layer (Al, Cr) for 2 O 3 layer is not intended to comprise a mechanically and thermally sufficient impact resistance, chipping (fine in the hard coating layer Chipping) is likely to occur, and as a result, the service life is reached in a relatively short time.
そこで、本発明者等は、上述のような観点から、上記のα型（Ａｌ，Ｃｒ）2Ｏ3層が硬質被覆層の上部層を構成する被覆サーメット工具に着目し、特に前記α型（Ａｌ，Ｃｒ）2Ｏ3層の耐衝撃性向上を図るべく研究を行った結果、
（ａ）従来被覆サーメット工具の硬質被覆層を構成する上部層としてのα型（Ａｌ，Ｃｒ）2Ｏ3層は、例えば、通常の化学蒸着装置にて、
反応ガス組成：容量％で、ＡｌＣｌ３：２．３〜４％、ＣｒＣｌ３：０．０４〜０．２６％、ＣＯ２：６〜８％、ＨＣｌ：１．５〜３％、Ｈ2Ｓ：０．０５〜０．２％、Ｈ2：残り、
反応雰囲気温度：１０２０〜１０５０℃、
反応雰囲気圧力：６〜１０ｋＰａ、
の条件（通常条件という）で蒸着形成されるが、これを、
反応ガス組成：容量％で、ＡｌＣｌ３：６〜１０％、ＣｒＣｌ３：０．１〜０．６５％、ＣＯ２：１０〜１５％、ＨＣｌ：３〜５％、Ｈ2Ｓ：０．０５〜０．２％、Ｈ2：残り、
反応雰囲気温度：１０２０〜１０５０℃、
反応雰囲気圧力：３〜５ｋＰａ、
の条件、すなわち上記の通常条件に比して、反応ガス組成では、ＡｌＣｌ３、ＣｒＣｌ３、ＣＯ２、およびＨＣｌの含有割合を相対的に高く、かつ雰囲気圧力を相対的に低くした条件（反応ガス成分高含有調整低圧条件）で蒸着形成すると、この結果の反応ガス成分高含有調整低圧条件で形成したα型（Ａｌ，Ｃｒ）2Ｏ3層（以下、「改質α型（Ａｌ，Ｃｒ）2Ｏ3層」という）は、高温強度が一段と向上し、機械的熱的にすぐれた耐衝撃性を具備するようになることから、硬質被覆層の上部層が前記改質α型（Ａｌ，Ｃｒ）2Ｏ3層、下部層が上記Ｔｉ化合物層で構成された被覆サーメット工具は、特に激しい機械的熱的衝撃を伴なう高速断続切削加工でも、前記硬質被覆層がすぐれた耐チッピング性を発揮し、長期に亘ってすぐれた耐摩耗性を示すようになること。
In view of the above, the present inventors pay attention to the coated cermet tool in which the α-type (Al, Cr) 2 O 3 layer constitutes the upper layer of the hard coating layer, and particularly the α-type ( As a result of research to improve the impact resistance of the Al, Cr) 2 O 3 layer,
(A) The α-type (Al, Cr) 2 O 3 layer as the upper layer constituting the hard coating layer of the conventional coated cermet tool is, for example, a normal chemical vapor deposition apparatus.
Reaction gas composition: by volume%, AlCl 3: 2.3~4%, CrCl 3: 0.04~0.26%, CO 2: 6~8%, HCl: 1.5~3%, H 2 S : 0.05~0.2%, H 2: remainder,
Reaction atmosphere temperature: 1020 to 1050 ° C.
Reaction atmosphere pressure: 6 to 10 kPa,
It is formed by vapor deposition under the conditions (called normal conditions).
Reaction gas composition:% by volume, AlCl 3 : 6 to 10%, CrCl 3 : 0.1 to 0.65%, CO 2 : 10 to 15%, HCl: 3 to 5%, H 2 S: 0.05 ~0.2%, H 2: remainder,
Reaction atmosphere temperature: 1020 to 1050 ° C.
Reaction atmosphere pressure: 3 to 5 kPa,
In other words, in the reaction gas composition, the content ratio of AlCl 3 , CrCl 3 , CO 2 , and HCl is relatively high and the atmospheric pressure is relatively low (reaction) When vapor deposition is performed under a gas component high content adjustment low pressure condition, an α type (Al, Cr) 2 O 3 layer (hereinafter referred to as “modified α type (Al, Cr) formed under a control gas component high content adjustment low pressure condition” as a result. ) 2 O 3 layer ”) is further improved in high-temperature strength and has excellent mechanical and thermal shock resistance. Therefore, the upper layer of the hard coating layer is the modified α-type (Al , Cr) 2 O 3 layer, and the coated cermet tool in which the lower layer is composed of the above Ti compound layer is particularly resistant to chipping even in high-speed intermittent cutting with severe mechanical and thermal shock. It has excellent resistance over a long period of time To become that as shown the 耗性.
（ｂ）上記の従来被覆サーメット工具の硬質被覆層の上部層を構成するα型（Ａｌ，Ｃｒ）2Ｏ3層（以下、「従来α型（Ａｌ，Ｃｒ）2Ｏ3層」という）と上記（ａ）の改質α型（Ａｌ，Ｃｒ）2Ｏ3層について、
電界放出型走査電子顕微鏡を用い、図２（ａ），（ｂ）に概略説明図で例示される通り、表面研磨面の測定範囲内に存在する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面および（１０-１０）面の法線がなす傾斜角［図２(ａ)には前記結晶面の傾斜角が０度の場合、同（ｂ）には傾斜角が４５度の場合を示しているが、これらの角度を含めて前記結晶粒個々のすべての傾斜角］を測定し、この場合前記結晶粒は、上記の通り格子点にＡｌ、Ｃｒ、および酸素からなる構成原子がそれぞれ存在するコランダム型六方最密晶の結晶構造を有し、この結果得られた測定傾斜角に基づいて、相互に隣接する結晶粒の界面で、前記構成原子のそれぞれが前記結晶粒相互間で１つの構成原子を共有する格子点（構成原子共有格子点）の分布を算出し、前記構成原子共有格子点間に構成原子を共有しない格子点がＮ個（ただし、Ｎはコランダム型六方最密晶の結晶構造上２以上の偶数となるが、分布頻度の点からＮの上限を２８とした場合、４、８、１４、２４、および２６の偶数は存在せず）存在する構成原子共有格子点形態をΣＮ＋１で現し、個々のΣＮ＋１がΣＮ＋１全体に占める分布割合を示す構成原子共有格子点分布グラフを作成した場合（この場合前記の結果から、Σ５、Σ９、Σ１５、Σ２５、およびΣ２７の構成原子共有格子点形態は存在しないことになる）、上記従来α型（Ａｌ，Ｃｒ）2Ｏ3層は、図５に例示される通り、Σ３の分布割合が３０％以下の相対的に低い構成原子共有格子点分布グラフを示すのに対して、前記改質α型（Ａｌ，Ｃｒ）2Ｏ3層は、図４に例示される通り、Σ３の分布割合が６０〜８０％のきわめて高い構成原子共有格子点分布グラフを示し、この高いΣ３の分布割合は、反応ガスを構成するＡｌＣｌ３、ＣｒＣｌ３、ＣＯ２、およびＨＣｌの含有割合、さらに雰囲気反応圧力によって変化すること。
なお、上記の改質α型（Ａｌ，Ｃｒ）2Ｏ3層および従来α型（Ａｌ，Ｃｒ）2Ｏ3層において、相互に隣接する結晶粒の界面における構成原子共有格子点形態のうちのΣ３、Σ７、およびΣ１１の単位形態を模式図で例示すると図３（ａ）〜（ｃ）に示される通りとなる。
(B) an α-type (Al, Cr) 2 O 3 layer (hereinafter referred to as “conventional α-type (Al, Cr) 2 O 3 layer”) constituting the upper layer of the hard coating layer of the conventional coated cermet tool; Regarding the modified α-type (Al, Cr) 2 O 3 layer of (a) above,
Using a field emission scanning electron microscope, as illustrated in the schematic explanatory diagrams in FIGS. 2A and 2B, each crystal grain existing within the measurement range of the surface polished surface is irradiated with an electron beam, The tilt angle formed by the normal lines of the (0001) plane and the (10-10) plane, which are the crystal planes of the crystal grains, with respect to the normal line of the polished surface [FIG. 2 (a) shows the tilt angle of the crystal plane. (B) shows the case where the inclination angle is 45 degrees, all the inclination angles of the individual crystal grains including these angles are measured. In this case, the crystal grains Has a crystal structure of a corundum type hexagonal close-packed crystal in which constituent atoms composed of Al, Cr, and oxygen are present at lattice points as described above, and are adjacent to each other based on the measured tilt angle. Each of the constituent atoms forms one constituent atom between the crystal grains. The distribution of lattice points (constituent atom shared lattice points) is calculated, and N lattice points that do not share constituent atoms between the constituent atom shared lattice points (where N is 2 on the crystal structure of the corundum hexagonal close-packed crystal) Even if the upper limit of N is 28 from the point of distribution frequency, the even number of 4, 8, 14, 24, and 26 does not exist.) , When a constituent atomic shared lattice point distribution graph showing the distribution ratio of each ΣN + 1 in the entire ΣN + 1 is created (in this case, the constituent atomic shared lattice point forms of Σ5, Σ9, Σ15, Σ25, and Σ27 are The conventional α-type (Al, Cr) 2 O 3 layer is a relatively low constituent atomic shared lattice point distribution graph having a Σ3 distribution ratio of 30% or less as illustrated in FIG. Before showing Reforming α-type (Al, Cr) 2 O 3 layer, as illustrated in FIG. 4, the distribution ratio of Σ3 showed extremely high atom sharing lattice point distribution graph of 60-80%, the distribution of this high Σ3 ratio, AlCl 3 constituting the reaction gas, CrCl 3, CO 2, and the content of HCl, to further change by ambient reaction pressure.
In the modified α-type (Al, Cr) 2 O 3 layer and the conventional α-type (Al, Cr) 2 O 3 layer, among the constituent atomic shared lattice point forms at the interface between adjacent crystal grains The unit forms of Σ3, Σ7, and Σ11 are illustrated in schematic diagrams as shown in FIGS.
（ｃ）上記の改質α型（Ａｌ，Ｃｒ）2Ｏ3層は、α型（Ａｌ，Ｃｒ）2Ｏ3層自体が具備するすぐれた高温硬さと耐熱性に加えて、上記従来α型（Ａｌ，Ｃｒ）2Ｏ3層に比して一段と高い高温強度を具備するようになるので、これを硬質被覆層の上部層として蒸着形成してなる被覆サーメット工具は、同下部層であるＴｉＣＮ層が具備するすぐれた高温強度と相俟って、特に断続切削加工を高速切削条件で行うのに用いた場合にも、同じく前記従来α型（Ａｌ，Ｃｒ）2Ｏ3層を上部層として蒸着形成してなる従来被覆サーメット工具に比して、硬質被覆層が一段とすぐれた耐チッピング性を発揮すること。
以上（ａ）〜（ｃ）に示される研究結果を得たのである。
(C) The modified α-type (Al, Cr) 2 O 3 layer described above is the conventional α-type in addition to the excellent high-temperature hardness and heat resistance of the α-type (Al, Cr) 2 O 3 layer itself. Compared with the (Al, Cr) 2 O 3 layer, it has a higher high-temperature strength, so the coated cermet tool formed by vapor deposition as the upper layer of the hard coating layer is the TiCN which is the lower layer. Combined with the excellent high-temperature strength of the layer, the conventional α-type (Al, Cr) 2 O 3 layer is also used as the upper layer, particularly when intermittent cutting is performed under high-speed cutting conditions. Compared to conventional coated cermet tools that are formed by vapor deposition, the hard coating layer exhibits superior chipping resistance.
The research results shown in (a) to (c) above were obtained.
この発明は、上記の研究結果に基づいてなされたものであって、ＷＣ基超硬合金またはＴｉＣＮ基サーメットで構成された工具基体の表面に、
（ａ）下部層が、ＴｉＣ層、ＴｉＮ層、ＴｉＣＮ層、ＴｉＣＯ層、およびＴｉＣＮＯ層のうちの１層または２層以上からなり、かつ３〜２０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層が、１〜１５μｍの平均層厚、および化学蒸着した状態でα型の結晶構造を有し、さらに、
組成式：（Ａｌ１−ＸＣｒＸ）２Ｏ３、（ただし、原子比で、Ｘ：０．０１〜０．１）、
を満足すると共に、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面および（１０-１０）面の法線がなす傾斜角を測定し、この場合前記結晶粒は、格子点にＡｌ、Ｃｒ、および酸素からなる構成原子がそれぞれ存在するコランダム型六方最密晶の結晶構造を有し、この結果得られた測定傾斜角に基づいて、相互に隣接する結晶粒の界面で、前記構成原子のそれぞれが前記結晶粒相互間で１つの構成原子を共有する格子点（構成原子共有格子点）の分布を算出し、前記構成原子共有格子点間に構成原子を共有しない格子点がＮ個（ただし、Ｎはコランダム型六方最密晶の結晶構造上２以上の偶数となるが、分布頻度の点からＮの上限を２８とした場合、４、８、１４、２４、および２６の偶数は存在せず）存在する構成原子共有格子点形態をΣＮ＋１で現した場合、個々のΣＮ＋１がΣＮ＋１全体に占める分布割合を示す構成原子共有格子点分布グラフにおいて、Σ３に最高ピークが存在し、かつ前記Σ３のΣＮ＋１全体に占める分布割合が６０〜８０％である構成原子共有格子点分布グラフを示す改質α型（Ａｌ，Ｃｒ）2Ｏ3層、
以上（ａ）〜（ｃ）で構成された硬質被覆層を蒸着形成してなる、硬質被覆層が高速断続切削加工ですぐれた耐チッピング性を発揮する被覆サーメット工具に特徴を有するものである。
The present invention has been made based on the above research results, and on the surface of a tool base composed of a WC-based cemented carbide or TiCN-based cermet,
(A) a Ti compound layer in which the lower layer is composed of one or more of a TiC layer, a TiN layer, a TiCN layer, a TiCO layer, and a TiCNO layer, and has an overall average layer thickness of 3 to 20 μm,
(B) the upper layer has an average layer thickness of 1 to 15 μm and an α-type crystal structure in the state of chemical vapor deposition;
Composition formula: (Al 1-X Cr X ) 2
And using a field emission scanning electron microscope, each crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface is irradiated with an electron beam, and the normal to the surface polished surface is Then, the inclination angle formed by the normal lines of the (0001) plane and the (10-10) plane, which are crystal planes of the crystal grains, is measured. In this case, the crystal grains are composed of Al, Cr, and oxygen at lattice points. Each of the constituent atoms has a crystal structure of a corundum hexagonal close-packed crystal structure in which each constituent atom exists, and based on the measured tilt angle obtained as a result, at the interface between adjacent crystal grains. The distribution of lattice points (constituent atom shared lattice points) that share one constituent atom between them is calculated, and N lattice points that do not share constituent atoms between the constituent atom shared lattice points (where N is a corundum type) 2 or more due to the hexagonal close-packed crystal structure Even if the upper limit of N is 28 from the point of distribution frequency, the even number of 4, 8, 14, 24, and 26 does not exist). In the constituent atom sharing lattice point distribution graph showing the distribution ratio of each ΣN + 1 in the entire ΣN + 1, the constituent atom having the highest peak in Σ3 and the distribution ratio in the entire ΣN + 1 of the Σ3 is 60 to 80% Modified α-type (Al, Cr) 2 O 3 layer showing a shared lattice point distribution graph,
The hard coating layer formed by vapor-depositing the hard coating layer composed of the above (a) to (c) is characterized by a coated cermet tool that exhibits excellent chipping resistance in high-speed intermittent cutting.
以下に、この発明の被覆サーメット工具の硬質被覆層の構成層において、上記の通りに数値限定した理由を説明する。
（ａ）下部層のＴｉ化合物層
Ｔｉ化合物層は、改質α型（Ａｌ，Ｃｒ）2Ｏ3層の下部層として存在し、自身の具備するすぐれた高温強度によって硬質被覆層の高温強度向上に寄与するほか、工具基体と改質α型（Ａｌ，Ｃｒ）2Ｏ3層のいずれにも強固に密着し、よって硬質被覆層の工具基体に対する密着性を向上させる作用を有するが、その平均層厚が３μｍ未満では、前記作用を十分に発揮させることができず、一方その平均層厚が２０μｍを越えると、特に高熱発生を伴なう高速切削では熱塑性変形を起し易くなり、これが偏摩耗の原因となることから、その平均層厚を３〜２０μｍと定めた。
Hereinafter, the reason why the constituent layers of the hard coating layer of the coated cermet tool of the present invention are numerically limited as described above will be described.
(A) Ti compound layer of the lower layer The Ti compound layer exists as a lower layer of the modified α-type (Al, Cr) 2 O 3 layer, and the high temperature strength of the hard coating layer is improved by its excellent high temperature strength. In addition to the tool substrate and the modified α-type (Al, Cr) 2 O 3 layer, and thus has an effect of improving the adhesion of the hard coating layer to the tool substrate. If the layer thickness is less than 3 μm, the above-mentioned effect cannot be sufficiently exerted. On the other hand, if the average layer thickness exceeds 20 μm, thermoplastic deformation is likely to occur particularly in high-speed cutting accompanied by high heat generation, which is not balanced. Since it causes wear, the average layer thickness is determined to be 3 to 20 μm.
（ｂ）上部層の改質α型（Ａｌ，Ｃｒ）2Ｏ3層
上記の改質α型（Ａｌ，Ｃｒ）2Ｏ3層において、これの構成成分であるＡｌは層の高温硬さおよび耐熱性を向上させ、同Ｃｒ成分にはＡｌ成分との共存において、さらに一段と耐熱性を向上させる作用を有するが、Ｃｒの含有割合を示すＸ値が原子比で０．０１未満では前記作用に所望の向上効果を確保することができず、一方同Ｘ値が０．１を越えると高温強度に低下傾向が現れるようになることから、前記Ｘ値を０．０１〜０．１と定めた。
また、上記の改質α型（Ａｌ，Ｃｒ）2Ｏ3層の構成原子共有格子点分布グラフにおけるΣ３の分布割合は、上記の反応ガスを構成するＡｌＣｌ３、ＣｒＣｌ３、ＣＯ２、およびＨＣｌの含有割合、さらに雰囲気反応圧力を調整することによって６０〜８０％とすることができるが、この場合Σ３の分布割合が６０％未満では、高速断続切削加工で、硬質被覆層にチッピングが発生しない、すぐれた高温強度向上効果を確保することができず、したがってΣ３の分布割合は高ければ高いほど望ましいが、Σ３の分布割合を８０％を越えて高くすることは層形成上困難であることから、Σ３の分布割合を６０〜８０％と定めた。
さらに、上記改質α型（Ａｌ，Ｃｒ）2Ｏ3層は、上記の通りα型（Ａｌ，Ｃｒ）2Ｏ3層自体のもつすぐれた高温硬さと耐熱性に加えて、さらに一段とすぐれた高温強度を有するようになるが、その平均層厚が１μｍ未満では前記改質α型（Ａｌ，Ｃｒ）2Ｏ3層の有する前記の特性を硬質被覆層に十分に具備せしめることができず、一方その平均層厚が１５μｍを越えると、偏摩耗の原因となる熱塑性変形が発生し易くなり、摩耗が加速するようになることから、その平均層厚を１〜１５μｍと定めた。
(B) Modified α-type (Al, Cr) 2 O 3 layer of the upper layer In the above-mentioned modified α-type (Al, Cr) 2 O 3 layer, the constituent component Al is the high-temperature hardness of the layer and The Cr component has the effect of further improving the heat resistance in the coexistence of the Al component with the Cr component. However, when the X value indicating the Cr content ratio is less than 0.01 in terms of atomic ratio, the above effect is achieved. The desired improvement effect cannot be ensured. On the other hand, if the X value exceeds 0.1, the high temperature strength tends to decrease. Therefore, the X value is set to 0.01 to 0.1. .
In addition, the distribution ratio of Σ3 in the constituent atomic shared lattice distribution graph of the modified α-type (Al, Cr) 2 O 3 layer described above is AlCl 3 , CrCl 3 , CO 2 , and HCl constituting the reaction gas. However, in this case, when the distribution ratio of Σ3 is less than 60%, chipping does not occur in the hard coating layer by high-speed intermittent cutting. However, it is not possible to secure an excellent effect of improving high-temperature strength. Therefore, a higher distribution ratio of Σ3 is desirable, but it is difficult to increase the distribution ratio of Σ3 beyond 80% in terms of layer formation. , Σ3 distribution ratio was determined to be 60-80%.
Furthermore, the modified α-type (Al, Cr) 2 O 3 layer was further improved in addition to the excellent high-temperature hardness and heat resistance of the α-type (Al, Cr) 2 O 3 layer itself as described above. Although it has high-temperature strength, if the average layer thickness is less than 1 μm, the above-mentioned properties of the modified α-type (Al, Cr) 2 O 3 layer cannot be sufficiently provided in the hard coating layer, On the other hand, when the average layer thickness exceeds 15 μm, thermoplastic deformation that causes uneven wear tends to occur, and wear accelerates. Therefore, the average layer thickness is set to 1 to 15 μm.
なお、切削工具の使用前後の識別を目的として、黄金色の色調を有するＴｉＮ層を、必要に応じて硬質被覆層の最表面層として蒸着形成してもよいが、この場合の平均層厚は０．１〜１μｍでよく、これは０．１μｍ未満では、十分な識別効果が得られず、一方前記ＴｉＮ層による前記識別効果は１μｍまでの平均層厚で十分であるという理由からである。 In addition, for the purpose of identification before and after the use of the cutting tool, a TiN layer having a golden color tone may be vapor-deposited as the outermost surface layer of the hard coating layer as necessary, but the average layer thickness in this case is It may be 0.1 to 1 μm, and if the thickness is less than 0.1 μm, a sufficient discrimination effect cannot be obtained, while the discrimination effect by the TiN layer is sufficient for an average layer thickness of up to 1 μm.
この発明被覆サーメット工具は、各種の鋼や鋳鉄などの切削加工を、強い機械的熱的衝撃を伴なう断続切削加工を高速切削条件で行うのに用いた場合にも、硬質被覆層の上部層を構成する改質α型（Ａｌ，Ｃｒ）2Ｏ3層が、（Ａｌ，Ｃｒ）2Ｏ3自身のもつすぐれた高温硬さと耐熱性に加えて、一段とすぐれた高温強度を具備することから、すぐれた耐チッピング性を発揮し、使用寿命の一層の延命化を可能とするものである。 The coated cermet tool according to the present invention can be used to cut various types of steel and cast iron, etc., when performing intermittent cutting with strong mechanical thermal shock under high-speed cutting conditions. The modified α-type (Al, Cr) 2 O 3 layer constituting the layer has excellent high temperature strength in addition to the excellent high temperature hardness and heat resistance of (Al, Cr) 2 O 3 itself. Therefore, excellent chipping resistance is exhibited, and the service life can be further extended.
つぎに、この発明の被覆サーメット工具を実施例により具体的に説明する。 Next, the coated cermet tool of the present invention will be specifically described with reference to examples.
原料粉末として、いずれも２〜４μｍの平均粒径を有するＷＣ粉末、ＴｉＣ粉末、ＺｒＣ粉末、ＶＣ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ3Ｃ2粉末、ＴｉＮ粉末、ＴａＮ粉末、およびＣｏ粉末を用意し、これら原料粉末を、表１に示される配合組成に配合し、さらにワックスを加えてアセトン中で２４時間ボールミル混合し、減圧乾燥した後、９８ＭＰａの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を５Ｐａの真空中、１３７０〜１４７０℃の範囲内の所定の温度に１時間保持の条件で真空焼結し、焼結後、切刃部にＲ：０．０７ｍｍのホーニング加工を施すことによりＩＳＯ・ＣＮＭＧ１６０４１２に規定するスローアウエイチップ形状をもったＷＣ基超硬合金製の工具基体Ａ〜Ｆをそれぞれ製造した。 WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, TaN powder, and Co powder all having an average particle diameter of 2 to 4 μm are prepared as raw material powders. These raw material powders were blended into the composition shown in Table 1, added with wax, ball milled in acetone for 24 hours, dried under reduced pressure, and pressed into a green compact with a predetermined shape at a pressure of 98 MPa. The green compact was vacuum sintered at a predetermined temperature in the range of 1370 to 1470 ° C. for 1 hour in a vacuum of 5 Pa. After sintering, the cutting edge portion was R: 0.07 mm honing By processing, tool bases A to F made of a WC-based cemented carbide having a throwaway tip shape defined in ISO · CNMG 160412 were produced.
また、原料粉末として、いずれも０．５〜２μｍの平均粒径を有するＴｉＣＮ（質量比でＴｉＣ／ＴｉＮ＝５０／５０）粉末、Ｍｏ2Ｃ粉末、ＺｒＣ粉末、ＮｂＣ粉末、ＴａＣ粉末、ＷＣ粉末、Ｃｏ粉末、およびＮｉ粉末を用意し、これら原料粉末を、表２に示される配合組成に配合し、ボールミルで２４時間湿式混合し、乾燥した後、９８ＭＰａの圧力で圧粉体にプレス成形し、この圧粉体を１．３ｋＰａの窒素雰囲気中、温度：１５４０℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．０７ｍｍのホーニング加工を施すことによりＩＳＯ規格・ＣＮＭＧ１６０４１２のチップ形状をもったＴｉＣＮ基サーメット製の工具基体ａ〜ｆを形成した。 In addition, as raw material powders, TiCN (mass ratio TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC powder, all having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and pressed into a compact at a pressure of 98 MPa. The green compact was sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after the sintering, the cutting edge portion was subjected to a honing process of R: 0.07 mm. Tool bases a to f made of TiCN-based cermet having standard / CNMG 160412 chip shapes were formed.
ついで、これらの工具基体Ａ〜Ｆおよび工具基体ａ〜ｆのそれぞれを、通常の化学蒸着装置に装入し、まず、表３（表３中のｌ−ＴｉＣＮは特開平６−８０１０号公報に記載される縦長成長結晶組織をもつＴｉＣＮ層の形成条件を示すものであり、これ以外は通常の粒状結晶組織の形成条件を示すものである）に示される条件にて、表４に示される組み合わせおよび目標層厚でＴｉ化合物層を硬質被覆層の下部層として蒸着形成し、ついで、同じく表３に示される条件で改質α型（Ａｌ，Ｃｒ）2Ｏ3層（ａ）〜（ｆ）のうちのいずれかを同じく表４に示される組み合わせおよび目標層厚で硬質被覆層の上部層として蒸着形成することにより本発明被覆サーメット工具１〜１３をそれぞれ製造した。 Next, each of the tool bases A to F and the tool bases a to f was charged into a normal chemical vapor deposition apparatus. First, Table 3 (l-TiCN in Table 3 is disclosed in JP-A-6-8010). The combinations shown in Table 4 under the conditions shown in Table 4 below are the conditions for forming the TiCN layer having the vertically elongated crystal structure described, and other conditions for forming the normal granular crystal structure. Then, a Ti compound layer with a target layer thickness is deposited as a lower layer of the hard coating layer, and then modified α-type (Al, Cr) 2 O 3 layers (a) to (f) under the conditions shown in Table 3 The present invention coated cermet tools 1 to 13 were produced by vapor-depositing any one of the above as the upper layer of the hard coating layer with the combinations and target layer thicknesses shown in Table 4, respectively.
また、比較の目的で、表５に示される通り、硬質被覆層の上部層として、表３に示される条件で従来α型（Ａｌ，Ｃｒ）2Ｏ3層を形成する以外は同一の条件で従来被覆サーメット工具１〜１３をそれぞれ製造した。 For comparison purposes, as shown in Table 5, the same conditions except that a conventional α-type (Al, Cr) 2 O 3 layer is formed as the upper layer of the hard coating layer under the conditions shown in Table 3. Conventionally coated cermet tools 1 to 13 were produced.
ついで、上記の本発明被覆サーメット工具１〜１３および従来被覆サーメット工具１〜１３の硬質被覆層の上部層を構成する改質α型（Ａｌ，Ｃｒ）2Ｏ3層および従来α型（Ａｌ，Ｃｒ）2Ｏ3層のそれぞれについて、電界放出型走査電子顕微鏡を用いて、構成原子共有格子点分布グラフをそれぞれ作成した。
すなわち、上記構成原子共有格子点分布グラフは、上記の改質α型（Ａｌ，Ｃｒ）2Ｏ3層および従来α型（Ａｌ，Ｃｒ）2Ｏ3層の表面を研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に７０度の入射角度で１５ｋＶの加速電圧の電子線を１ｎＡの照射電流で、前記表面研磨面の測定範囲内に存在する結晶粒個々に照射して、電子後方散乱回折像装置を用い、３０×５０μｍの領域を０．１μｍ／ｓｔｅｐの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面および（１０-１０）面の法線がなす傾斜角を測定し、この結果得られた測定傾斜角に基づいて、相互に隣接する結晶粒の界面で、前記構成原子のそれぞれが前記結晶粒相互間で１つの構成原子を共有する格子点（構成原子共有格子点）の分布を算出し、前記構成原子共有格子点間に構成原子を共有しない格子点がＮ個（ただし、Ｎはコランダム型六方最密晶の結晶構造上２以上の偶数となるが、分布頻度の点からＮの上限を２８とした場合、４、８、１４、２４、および２６の偶数は存在せず）存在する構成原子共有格子点形態をΣＮ＋１で現した場合、個々のΣＮ＋１がΣＮ＋１全体に占める分布割合を求めることにより作成した。
Subsequently, the modified α-type (Al, Cr) 2 O 3 layer and the conventional α-type (Al, For each of the Cr) 2 O 3 layers, a constituent atom shared lattice point distribution graph was created using a field emission scanning electron microscope.
That is, the atom sharing lattice point distribution graphs, the above modified α-type (Al, Cr) 2 O 3 layer and conventional α-type (Al, Cr) of the surface of the 2 O 3 layer in a state in which the polishing surface, A crystal which is set in a lens barrel of a field emission scanning electron microscope and exists in the measurement range of the surface polished surface with an electron beam having an acceleration voltage of 15 kV at an incident angle of 70 degrees and an irradiation current of 1 nA on the polished surface. Irradiate each grain, and use an electron backscatter diffraction imaging apparatus, and a region of 30 × 50 μm at a spacing of 0.1 μm / step is the crystal plane of the crystal grain with respect to the normal of the surface polished surface The tilt angle formed by the normal lines of the (0001) plane and the (10-10) plane is measured, and based on the measured tilt angle obtained as a result, each of the constituent atoms is formed at the interface between adjacent crystal grains. Lattice points sharing one constituent atom between the crystal grains (configuration (Non-shared lattice points) distribution is calculated, and N lattice points that do not share constituent atoms between the constituent atomic shared lattice points (where N is an even number of 2 or more in the crystal structure of the corundum hexagonal close-packed crystal) However, when the upper limit of N is 28 from the point of distribution frequency, there is no even number of 4, 8, 14, 24, and 26) When the existing constituent atom shared lattice point form is expressed as ΣN + 1, It was created by determining the distribution ratio of ΣN + 1 in the entire ΣN + 1.
この結果得られた各種の改質α型（Ａｌ，Ｃｒ）2Ｏ3層および従来（Ａｌ，Ｃｒ）2Ｏ3層の構成原子共有格子点分布グラフにおいて、ΣＮ＋１全体（上記の結果からΣ３、Σ７、Σ１１、Σ１３、Σ１７、Σ１９、Σ２１、Σ２３、およびΣ２９のそれぞれの分布割合の合計）に占めるΣ３の分布割合をそれぞれ表４，５にそれぞれ示した。 In the graph of constituent atomic shared lattice distributions of various modified α-type (Al, Cr) 2 O 3 layers and conventional (Al, Cr) 2 O 3 layers obtained as a result, the entire ΣN + 1 (from the above results, Σ3, The distribution ratios of Σ3 in the total distribution ratios of Σ7, Σ11, Σ13, Σ17, Σ19, Σ21, Σ23, and Σ29) are shown in Tables 4 and 5, respectively.
上記の各種の構成原子共有格子点分布グラフにおいて、表４，５にそれぞれ示される通り、本発明被覆サーメット工具の改質α型（Ａｌ，Ｃｒ）2Ｏ3層は、いずれもΣ３の占める分布割合が６０〜８０％である構成原子共有格子点分布グラフを示すのに対して、従来被覆サーメット工具の従来α型（Ａｌ，Ｃｒ）2Ｏ3層は、いずれもΣ３の分布割合が３０％以下の構成原子共有格子点分布グラフを示すものであった。
なお、図４は、本発明被覆サーメット工具９の改質α型（Ａｌ，Ｃｒ）2Ｏ3層の構成原子共有格子点分布グラフ、図５は、従来被覆サーメット工具８の従来α型（Ａｌ，Ｃｒ）2Ｏ3層の構成原子共有格子点分布グラフをそれぞれ示すものである。
In each of the above-mentioned various constituent atomic share lattice point distribution graphs, as shown in Tables 4 and 5, each of the modified α-type (Al, Cr) 2 O 3 layer of the coated cermet tool of the present invention is a distribution occupied by Σ3. While the distribution graph of the constituent atomic shared lattice points is 60-80%, the conventional α-type (Al, Cr) 2 O 3 layer of the conventional coated cermet tool has a Σ3 distribution ratio of 30%. The following constituent atom shared lattice point distribution graph was shown.
FIG. 4 is a graph showing the distribution of constituent atomic shared lattice points of the modified α type (Al, Cr) 2 O 3 layer of the coated cermet tool 9 of the present invention, and FIG. , Cr) 2 O 3 layer, each showing a constituent atomic shared lattice point distribution graph.
また、この結果得られた本発明被覆サーメット工具１〜１３および従来被覆サーメット工具１〜１３の硬質被覆層の構成層の厚さを、走査型電子顕微鏡を用いて測定（縦断面測定）したところ、いずれも目標層厚と実質的に同じ平均層厚（５点測定の平均値）を示した。 Moreover, when the thickness of the constituent layer of the hard coating layer of the present invention coated cermet tools 1 to 13 and the conventional coated cermet tools 1 to 13 obtained as a result was measured using a scanning electron microscope (longitudinal section measurement) , Each showed an average layer thickness (average value of 5-point measurement) substantially the same as the target layer thickness.
つぎに、上記の本発明被覆サーメット工具１〜１３および従来被覆サーメット工具１〜１３各種の被覆サーメット工具について、いずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、
被削材：ＪＩＳ・ＳＣＭ４１５の長さ方向等間隔４本縦溝入り丸棒、
切削速度：３２０ｍ／ｍｉｎ、
切り込み：２ｍｍ、
送り：０．２ｍｍ／ｒｅｖ、
切削時間：１０分、
の条件（切削条件Ａという）での合金鋼の乾式高速断続切削試験（通常の切削速度は１５０ｍ／ｍｉｎ）、
被削材：ＪＩＳ・ＦＣ２５０の長さ方向等間隔４本縦溝入り丸棒、
切削速度：４３０ｍ／ｍｉｎ、
切り込み：１．５ｍｍ、
送り：０．１５ｍｍ／ｒｅｖ、
切削時間：１０分、
の条件（切削条件Ｂという）での鋳鉄の乾式高速断続切削試験（通常の切削速度は２００ｍ／ｍｉｎ）、さらに、
被削材：ＪＩＳ・Ｓ４０Ｃの長さ方向等間隔４本縦溝入り丸棒、
切削速度：３８０ｍ／ｍｉｎ、
切り込み：１．５ｍｍ、
送り：０．２ｍｍ／ｒｅｖ、
切削時間：１０分、
の条件（切削条件Ｃという）での炭素鋼の乾式高速断続切削試験（通常の切削速度は１８０ｍ／ｍｉｎ）を行い、いずれの切削試験でも切刃の逃げ面摩耗幅を測定した。この測定結果を表６に示した。
Next, for the various coated cermet tools of the present invention coated cermet tool 1-13 and the conventional coated cermet tool 1-13, all of them are screwed with a fixing jig to the tip of the tool steel tool,
Work material: JIS / SCM415 lengthwise equidistant 4 round grooved round bars,
Cutting speed: 320 m / min,
Cutting depth: 2mm,
Feed: 0.2mm / rev,
Cutting time: 10 minutes,
Dry high-speed intermittent cutting test (normal cutting speed is 150 m / min) of alloy steel under the above conditions (referred to as cutting condition A),
Work material: JIS / FC250 lengthwise equidistant round bars with 4 vertical grooves,
Cutting speed: 430 m / min,
Incision: 1.5mm,
Feed: 0.15mm / rev,
Cutting time: 10 minutes,
A dry high-speed intermittent cutting test (normal cutting speed is 200 m / min) of cast iron under the following conditions (referred to as cutting conditions B),
Work material: JIS · S40C lengthwise equal length 4 round bar with round groove,
Cutting speed: 380 m / min,
Incision: 1.5mm,
Feed: 0.2mm / rev,
Cutting time: 10 minutes,
A dry high-speed intermittent cutting test (normal cutting speed is 180 m / min) of carbon steel under the above conditions (referred to as cutting condition C), and the flank wear width of the cutting edge was measured in any cutting test. The measurement results are shown in Table 6.
表４〜６に示される結果から、本発明被覆サーメット工具１〜１３は、いずれも硬質被覆層の上部層が、Σ３の分布割合が６０〜８０％の構成原子共有格子点分布グラフを示す改質α型（Ａｌ，Ｃｒ）2Ｏ3層で構成され、機械的熱的衝撃がきわめて高い鋼や鋳鉄の高速断続切削でも、前記改質α型（Ａｌ，Ｃｒ）2Ｏ3層が自身の具備するすぐれた高温硬さおよび耐熱性に加えて、一段とすぐれた高温強度を有し、すぐれた耐チッピング性を発揮することから、硬質被覆層のチッピング発生が著しく抑制され、すぐれた耐摩耗性を示すのに対して、硬質被覆層の上部層が、Σ３の分布割合が３０％以下の構成原子共有格子点分布グラフを示す従来α型（Ａｌ，Ｃｒ）2Ｏ3層で構成された従来被覆サーメット工具１〜１３においては、いずれも高速断続切削では硬質被覆層の耐機械的衝撃性が不十分であるために、硬質被覆層にチッピングが発生し、比較的短時間で使用寿命に至ることが明らかである。 From the results shown in Tables 4 to 6, all of the coated cermet tools 1 to 13 of the present invention show a modified atomic shared lattice point distribution graph in which the upper layer of the hard coating layer has a Σ3 distribution ratio of 60 to 80%. quality α-type (Al, Cr) is constituted by 2 O 3 layer, even at high intermittent cutting mechanical thermal shock is very high steel or cast iron, the reforming α-type (Al, Cr) 2 O 3 layer is itself In addition to the excellent high-temperature hardness and heat resistance that it has, it has excellent high-temperature strength and excellent chipping resistance, so the occurrence of chipping in the hard coating layer is remarkably suppressed, and excellent wear resistance In contrast, the upper layer of the hard coating layer is a conventional α-type (Al, Cr) 2 O 3 layer showing a constituent atomic shared lattice point distribution graph with a Σ3 distribution ratio of 30% or less. All of the coated cermet tools 1 to 13 are high. It is clear that in high-speed interrupted cutting, the mechanical impact resistance of the hard coating layer is insufficient, so that chipping occurs in the hard coating layer and the service life is reached in a relatively short time.
上述のように、この発明の被覆サーメット工具は、各種の鋼や鋳鉄などの通常の条件での連続切削加工や断続切削加工は勿論のこと、特に高い高温強度が要求される高速断続切削加工でも硬質被覆層がすぐれた耐チッピング性を示し、長期に亘ってすぐれた切削性能を発揮するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, the coated cermet tool of the present invention can be used not only for continuous cutting and intermittent cutting under normal conditions such as various types of steel and cast iron, but also for high-speed intermittent cutting that requires particularly high high-temperature strength. Since the hard coating layer exhibits excellent chipping resistance and exhibits excellent cutting performance over a long period of time, it is sufficient for improving the performance of cutting equipment, saving labor and energy, and reducing costs It can respond to satisfaction.
Claims (1)
（ａ）下部層が、Ｔｉの炭化物層、窒化物層、炭窒化物層、炭酸化物層、および炭窒酸化物層のうちの１層または２層以上からなり、かつ３〜２０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層が、１〜１５μｍの平均層厚、および化学蒸着した状態でα型の結晶構造を有し、さらに、
組成式：（Ａｌ１−ＸＣｒＸ）２Ｏ３、（ただし、原子比で、Ｘ：０．０１〜０．１）、
を満足すると共に、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面および（１０-１０）面の法線がなす傾斜角を測定し、この場合前記結晶粒は、格子点にＡｌ、Ｃｒ、および酸素からなる構成原子がそれぞれ存在するコランダム型六方最密晶の結晶構造を有し、この結果得られた測定傾斜角に基づいて、相互に隣接する結晶粒の界面で、前記構成原子のそれぞれが前記結晶粒相互間で１つの構成原子を共有する格子点（構成原子共有格子点）の分布を算出し、前記構成原子共有格子点間に構成原子を共有しない格子点がＮ個（ただし、Ｎはコランダム型六方最密晶の結晶構造上２以上の偶数となるが、分布頻度の点からＮの上限を２８とした場合、４、８、１４、２４、および２６の偶数は存在せず）存在する構成原子共有格子点形態をΣＮ＋１で現した場合、個々のΣＮ＋１がΣＮ＋１全体に占める分布割合を示す構成原子共有格子点分布グラフにおいて、Σ３に最高ピークが存在し、かつ前記Σ３のΣＮ＋１全体に占める分布割合が６０〜８０％である構成原子共有格子点分布グラフを示すＡｌとＣｒの複合酸化物層、
以上（ａ）および（ｂ）で構成された硬質被覆層を蒸着形成してなる、硬質被覆層が高速断続切削加工ですぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具。 On the surface of the tool base composed of tungsten carbide based cemented carbide or titanium carbonitride based cermet,
(A) The lower layer is composed of one or more of a Ti carbide layer, a nitride layer, a carbonitride layer, a carbonate layer, and a carbonitride layer, and has an overall average of 3 to 20 μm. A Ti compound layer having a layer thickness,
(B) the upper layer has an average layer thickness of 1 to 15 μm and an α-type crystal structure in the state of chemical vapor deposition;
Composition formula: (Al 1-X Cr X ) 2 O 3, ( provided that an atomic ratio, X: 0.01 to 0.1),
And using a field emission scanning electron microscope, each crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface is irradiated with an electron beam, and the normal to the surface polished surface is Then, the inclination angle formed by the normal lines of the (0001) plane and the (10-10) plane, which are crystal planes of the crystal grains, is measured. In this case, the crystal grains are composed of Al, Cr, and oxygen at lattice points. Each of the constituent atoms has a crystal structure of a corundum hexagonal close-packed crystal structure in which each constituent atom exists, and based on the measured tilt angle obtained as a result, at the interface between adjacent crystal grains. The distribution of lattice points (constituent atom shared lattice points) that share one constituent atom between them is calculated, and N lattice points that do not share constituent atoms between the constituent atom shared lattice points (where N is a corundum type) 2 or more due to the hexagonal close-packed crystal structure Even if the upper limit of N is 28 from the point of distribution frequency, the even number of 4, 8, 14, 24, and 26 does not exist). In the constituent atom sharing lattice point distribution graph showing the distribution ratio of each ΣN + 1 in the entire ΣN + 1, the constituent atom having the highest peak in Σ3 and the distribution ratio in the entire ΣN + 1 of the Σ3 is 60 to 80% A composite oxide layer of Al and Cr showing a shared lattice point distribution graph,
A surface-coated cermet cutting tool in which the hard coating layer formed by vapor deposition of the hard coating layer configured in the above (a) and (b) exhibits excellent chipping resistance in high-speed intermittent cutting.
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