JP4482582B2 - Small precision positioning device using impact force accompanying rapid deformation of piezoelectric element - Google Patents

Description

  The present invention relates to a small precision positioning apparatus using an impact force accompanying rapid deformation of a piezoelectric element.

  Conventionally, this type of technology has the following. FIG. 17 is an explanatory diagram of the driving principle of an impact force generation mechanism accompanying rapid deformation of a conventional piezoelectric element. First, as shown in FIG. 17A, the positioning mechanism in which the inertial body 1 and the impact body 3 are attached to both sides of the piezoelectric element 2 is held by a static frictional force with the sliding surface 4. In this initial state, the positioning mechanism is separated from the object 5 to be positioned located on the base 6 by a distance d0.

  Next, as shown in FIG. 17, a positioning mechanism called an impact driving mechanism is moved to a state of contact with the object 5 to be positioned by applying a voltage to the piezoelectric element 2 [the principle of movement is as follows. The same as in the case of excluding the object 5 to be positioned in the description from FIG. 17 (c) to FIG. 17 (e). In the contact state, the impact body 3 of the positioning mechanism is integrated with the object 5 to be positioned.

  Next, as shown in FIG. 17 (c), when the piezoelectric element 2 is further expanded rapidly, the integrated impact body 3 and the object 5 to be positioned become static friction with the sliding surface 4. It overcomes the force and moves in the direction opposite to that of the inertial body 1, and finally stops due to the dynamic frictional force with the sliding surface 4, and the moving distance becomes d1. Next, when the expanded piezoelectric element 2 is gently contracted at a constant acceleration, the integrated impact body 3 and the object 5 to be positioned are pulled back only by the inertial body 1 while being held by the static friction force. Can do.

  Next, as shown in FIG. 17D, when the pulling operation is suddenly stopped when the piezoelectric element 2 contracts, the inertial body 1 positions the integrated impact body 3 and the positioning through the piezoelectric element 2. The object 5 to be positioned is collided with the object 5 to be moved, and the integrated object 5 to be positioned again causes a minute movement. Next, as shown in FIG. 17 (e), the integrated impact body 3 and the object 5 to be positioned stop after moving the distance d2, and again the static frictional force with the sliding surface 4 Is held, and one cycle is completed.

  As can be seen from the above principle, in this positioning mechanism, the impact body 3 of the impact body 3 is held in order to hold the position of the impact body 3 after the integrated impact body 3 and the object 5 to be positioned have moved the distance d1. The static frictional force with the sliding surface 4 must be greater than the inertial force that accompanies the process of slowly pulling back the piezoelectric element 2. For this purpose, a method of increasing the size of the impact body 3 or a method of applying a preload in the direction perpendicular to the sliding surface 4 of the impact body 3 has been used.

  FIG. 18 is a sectional view showing such a conventional positioning mechanism, and FIG. 19 is a right side view of FIG. As shown in FIG. 18, the inertial body 1 is attached to the left side of the piezoelectric element 2 with a screw 8, and the impact body is attached to the right side of the piezoelectric element 2 with an attachment 7. The inertial body 1 is guided by a seat 9 fixed to the case, and the seat 9 is provided with a linear guide. Further, adjustment of the spring 10 gives an appropriate frictional force to the sliding surface 4.

As shown in FIG. 19, precision rollers 12 are incorporated on both sides of the impact body 3 in order to maintain the straightness of the impact body 3 of the positioning mechanism.
JP 05-250036 A Japanese Patent Laid-Open No. 08-272450 Japanese Patent Publication No. 05-080685

  As described above, conventionally, in order to maintain the position of the impact body 3, a clamp mechanism including a combination of the spring 10 and the friction plate 11 has been used on the sliding surface 4 of the impact body 3. However, when an impact force is applied to the object to be positioned, first, the friction force of the clamping mechanism of the positioning mechanism is overcome, and then the friction force of the sliding surface 4 of the object 5 to be positioned (see FIG. 17) is overcome. Must.

  In such a process, kinetic energy cannot be used efficiently, and a certain part is consumed by the friction plate 11 as heat energy. Further, the rise in temperature due to the consumption of the thermal energy has a great influence on the wear of the friction plate 11 on the sliding surface 4, and when used for a long time, the accuracy of the positioning mechanism deteriorates and the adjustment of the clamping mechanism is also necessary. .

  In addition, because of the clamping by frictional force, the movement characteristics of each positioning mechanism vary greatly, so when performing multi-degree-of-freedom positioning control, it is necessary to use a large number of positioning mechanisms simultaneously. It was difficult to get. Further, since the impact body 3 and the object 5 to be positioned, which are regarded as being integrated, have different frictional forces with the sliding surfaces 4 and 6, when the impact force is received, the impact body 3 rebounds, Alternatively, since there is a phenomenon of the object 5 to be positioned popping out, a sensor for detecting the state of contact is necessary for precise positioning control. Furthermore, this positioning mechanism incorporates a linear guide, a precision roller, and the like in order to maintain straightness in the moving direction, and it is difficult to downsize the positioning mechanism.

  Therefore, the present invention eliminates the above-mentioned problems, minimizes the influence of the frictional force applied to the sliding surface of the impact body, and impacts due to rapid deformation of the piezoelectric element that can efficiently use kinetic energy. An object of the present invention is to provide a small precision positioning device using force.

In order to achieve the above object, according to a first aspect of the present invention , there is provided a small precision positioning device using an impact force accompanying rapid deformation of a piezoelectric element. (A) a case; and (b) provided in the case. An inertial body attached to one side of the piezoelectric element; (c) a rod-shaped impact body attached to the other side of the piezoelectric element provided in the case; and (d) a rod provided behind the inertial body. (E) the inertial body on both sides of the case and a hole drilled in the moving direction of the impactor; (f) the rod-shaped impactor and rod provided in the holes on both sides of the case; Guiding means for guiding; (g) means for applying a voltage pattern to the piezoelectric element from the outside; and (h) a seat fixed between the case and the inertial body or between the case and the rod-shaped impact body. A spring provided between , Comprising a, the spring is attached to the case, before Symbol casing is fixed to the base.

According to a second aspect of the present invention , there is provided a small precision positioning device using an impact force accompanying rapid deformation of a piezoelectric element, wherein: (a) a case; and (b) one side of the piezoelectric element provided in the case. An inertial body to be attached; (c) a rod-like impact body attached to the other side of the piezoelectric element provided in the case; (d) a rod provided at the rear of the inertial body; and (e) the case. (I) a guide means for guiding the rod-like impact body and the rod provided in the holes on both sides of the case; (G) means for applying a voltage pattern to the piezoelectric element from the outside, the small precision positioning device is arranged in a vertical direction, the inertial body is disposed on the piezoelectric element, and the rod-shaped impact body is disposed on the piezoelectric element. Lower part of the piezoelectric element Each of the rod-shaped impact body is configured so that a force for applying an initial preload in the moving direction of the rod-shaped impact body is given by a sum of weights of the inertial body, the piezoelectric element, and the impact body, and the case has a base It is fixed to.

  According to the present invention, the small precision positioning using the impact force associated with the rapid deformation of the piezoelectric element that can minimize the influence of the frictional force applied to the sliding surface of the impactor and efficiently use the kinetic energy. Equipment can be provided.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a configuration diagram of a small precision positioning mechanism using an impact force accompanying rapid deformation of a piezoelectric element according to a first embodiment of the present invention, FIG. 2 is an explanatory diagram of the positioning process, and FIG. 3 is a voltage applied to the piezoelectric element. It is explanatory drawing of a pattern.

  As shown in FIG. 1, an inertial body 21 and an impact body 23 are attached to both sides of the piezoelectric element 22, respectively. The inertial body 21 is a roller guide or a sliding surface 25 having a low friction coefficient, and the impact body 23 is a roller guide or a low friction. A coefficient sliding surface 26 is supported. A mechanism for applying a preload in the movement direction of the impact body 23 (impact body movement direction preload means) is configured by a spring 24 attached to the case 27. Further, the object 28 to be positioned located on the base 29 is fixed so as not to move even if the preload is applied.

  Next, the positioning operation will be described with reference to FIGS.

  (1) First, as shown in FIG. 2A, the piezoelectric element 22 is contracted and the impact body 23 is separated from the object 28 to be positioned by a distance d0.

  (2) Next, as shown in FIG. 2B, a case 27 including an inertial body 21, a piezoelectric element 22, an impact body 23, a roller guide or sliding surfaces 25 and 26 having a low friction coefficient, a spring 24, etc. The spring 24 is compressed so that it moves in the direction of the object 28 to be positioned, and further, the object 28 to be positioned does not move via the impactor 23. Thus, giving a certain amount of force to the object 28 to be positioned will be referred to as initial preload.

  (3) Subsequently, as shown in FIG. 2 (c), a voltage is rapidly applied to the piezoelectric element 22 (refer to the curve a shown in FIG. 3), and thereby the impact force accompanying the rapid expansion of the piezoelectric element 22 Is absorbed by the spring 24, and the remaining force acts on the object 28 to be positioned, and the object 28 to be positioned slightly moves the distance d1.

  (4) Next, as shown in FIG. 2 (d), immediately after the object 28 to be positioned stops or after a certain period of time [shown in FIGS. 3 (b), (d), (e). (See curve c)] By slowly applying a voltage to the piezoelectric element 22 (see curve b shown in FIG. 3), the piezoelectric element 22 shrinks at a certain speed, and at this time, the piezoelectric element 22 is integrated. The impact body 23 is brought into contact with the object 28 to be positioned by the action of the initial preload.

  (5) Finally, as shown in FIG. 2 (e), as soon as the piezoelectric element 22 reaches its original length, when the contraction of the piezoelectric element 22 is suddenly stopped, the inertia of the relatively large inertial body 21 is increased. The force acts against the object 28 to be positioned against the inertial force of the impact body 23, and the object 28 to be positioned finely moves again, and the moving amount at that time becomes d2, and one cycle is completed. To do.

  FIG. 4 is a top view of a small precision positioning mechanism using an impact force accompanying rapid deformation of the piezoelectric element according to the first embodiment of the present invention, and FIG. 5 is a cross-sectional view taken along line AA of FIG. As shown in these drawings, in this embodiment, a small precision positioning mechanism is disposed on a horizontal plane, and an inertial body 31 having a rod 31A at the rear and a rod-shaped impact body 33 are attached to both ends of the piezoelectric element 32. The inertia body 31 and the impact body 33 are supported by roller guides or sliding surfaces 35 and 36 having a low friction coefficient, respectively. Reference numeral 33 </ b> A denotes a tip portion of the impact body 33.

  Further, a force for applying an initial preload in the moving direction of the impact body 33 is given by compression of a spring 34 attached between the inertia body 31 and the case 37 (or base). A direct current power source for outputting the piezoelectric element 32 is wired to the control system via the electric wire 38. Also, a case 37 for storing a roller guide or sliding surfaces 35 and 36 having a low coefficient of friction disposed in the holes 37A and 37B of the inertial body 31, the piezoelectric element 32, the impact body 33, the spring 34, and the case 37. Is fixed to the base 39. The base 39 is configured by a stage or a robot hand driven manually or by an actuator (motor, air pressure, etc.).

  FIG. 6 is a top view of a small precision positioning mechanism using an impact force accompanying rapid deformation of a piezoelectric element according to a second embodiment of the present invention, and FIG. 7 is a sectional view taken along line BB in FIG. As shown in these drawings, in this embodiment, the force for applying the initial preload in the moving direction of the impact body 43 is a spring attached between a seat 48 fixed to the impact body 43 and the case 47. Given by 44 compressions. In FIG. 7, 47A and 47B are holes provided in the case 47, and a roller guide or sliding surfaces 45 and 46 having a low friction coefficient are provided therein.

  41 is an inertial body, 41A is a rod at the rear of the inertial body 41, 42 is a piezoelectric element, 43A is the tip of the impactor 43, 49 is an electric wire, and 50 is a base. FIG. 8 is a configuration diagram of a small precision positioning mechanism using an impact force accompanying rapid deformation of a piezoelectric element according to a third embodiment of the present invention. As shown in this figure, the first small precision positioning mechanism (No. 1) is provided on the side surface 54A of the object 54 to be positioned so as not to move even if the initial preload is applied. Acts, and the second small precision positioning mechanism (No. 2) acts on the other side surface 54B of the object 54 to be positioned. When the first small precision positioning mechanism (No. 1) is driven, the object 54 to be positioned moves slightly in the direction of the solid line, and when the second small precision positioning mechanism (No. 2) is driven, positioning is performed. The target 54 should move slightly in the direction of the dotted line. That is, it is configured to enable bidirectional positioning. In FIG. 8, 51A is a rod provided at the rear of an inertial body (not shown), 52 is a rod-shaped impact body, 53 is a case, and 55 is a base.

  FIG. 9 is a plan view of a small precision positioning mechanism using an impact force accompanying rapid deformation of a piezoelectric element showing a fourth embodiment of the present invention. As shown in this figure, in this embodiment, an object 64 to be positioned is set on a base (not shown) so as not to move even when an initial preload is applied, and the first side surface of the object 64 to be positioned is set. The first and second small precision positioning mechanisms (No. 1 and No. 2) are brought into contact with 64A, and the third small precision positioning mechanism (No. 3) is brought into contact with the second side face 64B of the object 64 to be positioned. ) Is in contact.

  The fourth and fifth small precision positioning mechanisms (No. 4 and No. 5) are brought into contact with the third side surface 64C of the object 64 to be positioned, and further, the fourth side surface of the object 64 to be positioned. The sixth small precision positioning mechanism (No. 6) is in contact with 64D. Therefore, by driving the first and second small precision positioning mechanisms (No. 1 and No. 2), the object 64 to be positioned is positioned in the right direction, and the fourth and fifth small precision positioning mechanisms (No. .4 and No. 5), the object 64 to be positioned is positioned in the left direction, and the object 64 to be positioned is moved upward by driving only the third small precision positioning mechanism (No. 3). The object 64 to be positioned is positioned downward by driving only the sixth small precision positioning mechanism (No. 6), and the first and fourth small precision positioning mechanisms (No. 1 and No. 1) are positioned. 4), the object 64 to be positioned is positioned clockwise, and the objects 64 to be positioned are driven by the second and fifth small precision positioning mechanisms (No. 2 and No. 5). It can be positioned in a clockwise direction.

  In other words, the object 64 to be positioned can be positioned not only in the front-rear and left-right directions, but can also be rotated. In addition, 61A is a rod provided at the rear of an inertial body (not shown), 62 is a rod-like impact body, and 63 is a case. FIG. 10 is a plan view of a small precision positioning mechanism using an impact force accompanying rapid deformation of a piezoelectric element according to a fifth embodiment of the present invention. In addition, in this embodiment, about the same part as above-mentioned 4th Embodiment, the same code | symbol is attached | subjected and those description is abbreviate | omitted.

  As shown in this figure, in this embodiment, an object 65 to be positioned is set on a base (not shown) so as not to move even if an initial preload is applied, and the first side surface of the object 65 to be positioned is set. 65A is in contact with the first and second small precision positioning mechanisms (No. 1 and No. 2), and the third small precision positioning mechanism (No. .3) abut. The fourth small precision positioning mechanism (No. 4) is brought into contact with the third side surface 65C of the object 65 to be positioned. Further, the fifth small precision positioning mechanism (No. 5) is brought into contact with the fourth side surface 65D of the object 65 to be positioned.

  Thus, of the five small precision positioning mechanisms from the first to the fifth, the object 65 to be positioned can be positioned not only front-rear and left-right but also rotated by a combination of driving. FIG. 11 is a plan view of a small precision positioning mechanism using an impact force accompanying rapid deformation of a piezoelectric element according to a sixth embodiment of the present invention.

  As shown in this figure, in this embodiment, the object 69 to be positioned has corner side surfaces 69A to 69D with four corners chamfered so that the base 69 does not move even when an initial preload is applied. The first small precision positioning mechanism (No. 1) and the second small precision positioning mechanism (No. 2) are sequentially placed on the side surfaces 69A to 69D of the object 69 to be positioned. The third small precision positioning mechanism (No. 3) and the fourth small precision positioning mechanism (No. 4) are in contact with each other.

  Therefore, among the four small precision positioning mechanisms from the first to the fourth, the object 69 to be positioned can be positioned not only in the front-rear and left-right directions, but also rotated by the combination of driving. In addition, 66A is a rod provided at the rear part of an inertial body (not shown), 67 is a rod-shaped impact body, and 68 is a case. FIG. 12 is a plan view of a small precision positioning mechanism using an impact force accompanying rapid deformation of a piezoelectric element according to a seventh embodiment of the present invention.

  As shown in this figure, in this embodiment, an object 76 to be positioned having a rotation center shaft 75 is set on a base (not shown) so as not to rotate even if an initial preload is applied. The first small precision positioning mechanism (No. 1) is located above the left side surface 76A of the object 76 to be positioned, the second small precision positioning mechanism (No. 2) is located below the left side surface 76A, and the positioning thereof. The third small precision positioning mechanism (No. 3) is brought into contact with the upper side of the right side surface 76C of the object 76 to be tested, and the fourth small precision positioning mechanism (No. 4) is brought into contact with the lower side of the right side surface 76C. Yes.

  Therefore, when the object 76 to be positioned is rotated clockwise, the object 76 to be positioned is driven by driving the small precision positioning mechanism (No. 1) and the small precision positioning mechanism (No. 4). Is rotated counterclockwise by driving a small precision positioning mechanism (No. 2) and a small precision positioning mechanism (No. 3). Note that 76B is a lower surface of the object 76 to be positioned, and 76D is an upper surface of the object 76 to be positioned. In this figure, 71A is a rod provided at the rear of the inertial body, 72 is a rod-shaped impact body, and 73 is a case.

  By configuring in this way, it is possible to perform minute rotation driving around the rotation center shaft 75. FIG. 13 is a cross-sectional view of a small precision positioning mechanism using an impact force accompanying rapid deformation of a piezoelectric element according to an eighth embodiment of the present invention. As shown in this figure, a small precision positioning mechanism is arranged in a vertical direction, an inertial body 81 is attached to the upper part of the piezoelectric element 82, and a rod-like impact body 83 is attached to the lower part of the piezoelectric element 82. In addition, holes 86A and 86B are formed in the upper and lower portions of the case 86 (for example, a tool holder), and roller guides or sliding surfaces 84 and 85 having a low friction coefficient are formed in these holes 86A and 86B, respectively. An inertial body 81 and an impact body 83 are guided. In addition, 83A is the front-end | tip part of the rod-shaped impact body 83, 87 is an electric wire.

  In this case, the force for applying the initial preload in the moving direction of the impact body 83 is given by the sum of the weights of the inertial body 81, the piezoelectric element 82, and the impact body 83 of the small precision positioning mechanism. Therefore, positioning can be performed by the sum of the weights of the inertial body 81, the piezoelectric element 82, and the impact body 83 without providing a spring as a mechanism for applying a preload.

  FIG. 14 is a perspective view in which a small precision positioning mechanism using an impact force accompanying rapid deformation of a piezoelectric element according to a ninth embodiment of the present invention is used for driving a workpiece. In addition, about the same part as 8th Embodiment, the same code | symbol is attached | subjected and those description is abbreviate | omitted. As shown in this figure, in this case, the small precision positioning mechanism is fixed to the tool holder 87 of the ultraprecision processing machine in the vertical direction, and the rotary precision chuck 89 of the ultraprecision processing machine is used by using the small precision positioning mechanism. Positioning is performed so that the center of the workpiece 88 being sucked is aligned with the center of the rotary vacuum chuck 89.

  In such a centering process, first, the rotary vacuum chuck 89 is rotated once, and the deviation of the center of the workpiece 88 and the position of the deviation are detected and recorded. Next, the position of the detected workpiece 88 of the maximum displacement is moved to the impact body 83 of the small precision positioning mechanism, and then the impact force due to the driving of the small precision positioning mechanism is the maximum of the workpiece 88. It works to eliminate the gap. This completes one cycle and can be repeated to the required accuracy.

  Further, by measuring the displacement of the inertial body 81 and impact body 83 of the small precision positioning mechanism while rotating the vacuum chuck 89, the error between the center of the workpiece 88 and the center of the rotary vacuum chuck 89 can be reduced. It is also possible to measure continuously. Reference numeral 90 denotes a support portion for the tool holder 87. FIG. 15 is a top view of a small precision positioning mechanism using an impact force accompanying rapid deformation of a piezoelectric element according to a tenth embodiment of the present invention.

  As shown in this figure, in this embodiment, a small precision positioning mechanism is arranged on a horizontal plane, an inertia body 91 and an impact body 93 are attached to both ends of a bimorph type piezoelectric element 92, and both sides of a case 98 of the impact body 93 are provided. Are supported by roller guides of holes 98A and 98B provided on the sliding surfaces or sliding surfaces 95 and 96 having a low coefficient of friction. Further, the force for applying the initial preload in the moving direction of the impact body 93 is given by the compression of the spring 94 attached between the seat 93 </ b> A of the impact body 93 and the case 98.

  A direct current power source for outputting the bimorph type piezoelectric element 92 is wired to the control system via the electric wire 97. By slowly applying a voltage to the bimorph type piezoelectric element 92, the bimorph type piezoelectric element 92 and the inertial body 91 bend like a dotted line, and then rapidly apply a voltage to the bimorph type piezoelectric element 92 so as to return to the original position. Is applied, the impact force due to the deformation is transmitted to the impact body 93 via the position where the bimorph piezoelectric element 92 and the impact body 93 are connected.

  FIG. 16 is a top view of a small precision positioning mechanism using an impact force accompanying rapid deformation of a piezoelectric element according to an eleventh embodiment of the present invention. As shown in this figure, in this embodiment, a small precision positioning mechanism is arranged on a horizontal plane, an inertial body 101 is connected to the outside of the shearing piezoelectric element 102, and an impact body 103 inside the shearing piezoelectric element 102 is connected to Fix it. The impactor 103 is supported by roller guides provided in holes 108A and 108B formed on both sides of the case 108 or sliding surfaces 105 and 106 having a low friction coefficient.

  Further, the force for applying the initial preload in the moving direction of the impact body 103 is given by the compression of the spring 104 attached between the seat 103 </ b> A of the impact body 103 and the case 108. The direct current for outputting the shear type piezoelectric element 102 is wired to the control system via the electric wire 107. By applying a voltage slowly to the shear type piezoelectric element 102, the shear type piezoelectric element 102 and the inertial body 101 bend like a dotted line, and then rapidly apply a voltage to the shear type piezoelectric element 102 so as to return to the original position. Is applied, the impact force due to the deformation is transmitted to the impact body 103 through a position where the shear type piezoelectric element 102 is connected to the impact body 103.

  As described above in detail, according to the above-described embodiment, the inertial body and the impact body are attached to both sides of the piezoelectric element, and the inertial body and the impact body are guided by the roller guide or the sliding surface having a low friction coefficient. A mechanism for applying a preload in the direction of movement of the body is arranged, and there is no friction plate for applying a frictional force in a direction perpendicular to the direction of movement of the body. It can be moved. In addition, the configuration of a multi-function small precision positioning device can be applied by providing a sensor.

  In the above-described embodiment, the inertial body is described as being attached to one side of the piezoelectric element. Needless to say, however, the inertial body need not be attached when the piezoelectric element has a weight. In addition, the piezoelectric element and the inertial body are configured to be integrated, and are included in the scope of the present invention.

  In addition, this invention is not limited to the said embodiment, A various deformation | transformation is possible based on the meaning of this invention, and these are not excluded from the scope of the present invention.

It is a block diagram of the small precision positioning mechanism using the impact force accompanying the rapid deformation | transformation of the piezoelectric element which shows 1st Embodiment of this invention. It is explanatory drawing of the positioning process of the small precision positioning mechanism using the impact force accompanying the rapid deformation | transformation of the piezoelectric element which shows 1st Embodiment of this invention. It is explanatory drawing of the voltage pattern applied to the piezoelectric element of the small precision positioning mechanism using the impact force accompanying the rapid deformation | transformation of the piezoelectric element which shows 1st Embodiment of this invention. It is a top view of the small precision positioning mechanism using the impact force accompanying the rapid deformation | transformation of the piezoelectric element which shows 1st Embodiment of this invention. It is the sectional view on the AA line of FIG. It is a top view of the small precision positioning mechanism using the impact force accompanying the rapid deformation | transformation of the piezoelectric element which shows 2nd Embodiment of this invention. It is the BB sectional view taken on the line of FIG. It is a block diagram of the small precision positioning mechanism using the impact force accompanying the rapid deformation | transformation of the piezoelectric element which shows 3rd Embodiment of this invention. It is a top view of the small precision positioning mechanism using the impact force accompanying the rapid deformation | transformation of the piezoelectric element which shows 4th Embodiment of this invention. It is a top view of the small precision positioning mechanism using the impact force accompanying the rapid deformation | transformation of the piezoelectric element which shows 5th Embodiment of this invention. It is a top view of the small precision positioning mechanism using the impact force accompanying the rapid deformation | transformation of the piezoelectric element which shows 6th Embodiment of this invention. It is a top view of the small precision positioning mechanism using the impact force accompanying the rapid deformation | transformation of the piezoelectric element which shows 7th Embodiment of this invention. It is sectional drawing of the small precision positioning mechanism using the impact force accompanying the rapid deformation | transformation of the piezoelectric element which shows 8th Embodiment of this invention. It is the perspective view which used the small precision positioning mechanism using the impact force accompanying the rapid deformation | transformation of the piezoelectric element which shows 9th Embodiment of this invention for the drive of a workpiece. It is a top view of the small precision positioning mechanism using the impact force accompanying the rapid deformation | transformation of the piezoelectric element which shows 10th Embodiment of this invention. It is a top view of the small precision positioning mechanism using the impact force accompanying the rapid deformation | transformation of the piezoelectric element which shows 11th Embodiment of this invention. It is explanatory drawing of the drive principle of the impact-force generation mechanism accompanying the rapid deformation | transformation of the conventional piezoelectric element. It is sectional drawing which shows the conventional positioning mechanism. It is a right view of FIG.

Explanation of symbols

21, 31, 41, 81, 91, 101 Inertial bodies 22, 32, 42, 82 Piezoelectric elements 23, 33, 43, 52, 62, 67, 72, 83, 93, 103 Impact bodies 24, 34, 44, 94 104 Spring 25, 26, 35, 36, 45, 46, 84, 85, 95, 96, 105, 106 Roller guide or low friction coefficient sliding surface 27, 37, 47, 53, 63, 68, 73, 86, 98, 108 Case 28, 54, 64, 65, 69, 76 Object 29, 39, 50, 55, 56 to be positioned Base 31A, 41A, 51A, 61A, 66A, 71A Provided at the rear of the inertial body Rod 33A, 43A, 83A Rod-shaped impact body tip 37A, 37B, 47A, 48B, 86A, 86B, 98A, 98B, 108A, 108B Case hole 38, 49, 8 97, 107 Electric wires 48, 93A, 103A Seats 54A, 54B, 64A, 64B, 64C, 64D, 65A, 65B, 65C, 65D Side surfaces 69A to 69D of the object to be positioned have corners with four corners chamfered. Side surface 75 Rotation center axis 76A Left side surface 76B of target object to be positioned Lower side surface 76C of target object to be positioned Right side surface 76D of target object to be positioned Upper side surface of target object to be positioned 87 Tool holder 88 Work piece 89 Rotary type Vacuum chuck 90 Tool holder support 92 Bimorph type piezoelectric element 102 Shear type piezoelectric element

Claims (6)

In a small precision positioning device that uses the impact force accompanying rapid deformation of piezoelectric elements,
(A) a case;
(B) an inertial body attached to one side of the piezoelectric element provided in the case;
(C) a rod-shaped impact body attached to the other side of the piezoelectric element provided in the case;
(D) a rod provided behind the inertial body;
(E) holes formed in the moving direction of the inertial body and the impact body on both sides of the case;
(F) guide means for guiding the rod-shaped impact body and the rod provided in the holes on both sides of the case;
(G) means for applying a voltage pattern to the piezoelectric element from the outside;
(H) a spring provided between the case and the inertial body, or between the case and a seat fixed to the rod-shaped impact body;
A small precision positioning apparatus using an impact force accompanying rapid deformation of a piezoelectric element, wherein the spring is attached to the case, and the case is fixed to a base. In a small precision positioning device that uses the impact force accompanying rapid deformation of piezoelectric elements,
(A) a case;
(B) an inertial body attached to one side of the piezoelectric element provided in the case;
(C) a rod-shaped impact body attached to the other side of the piezoelectric element provided in the case;
(D) a rod provided behind the inertial body;
(E) holes formed in the moving direction of the inertial body and the impact body on both sides of the case;
(F) guide means for guiding the rod-shaped impact body and the rod provided in the holes on both sides of the case;
(G) means for applying a voltage pattern to the piezoelectric element from the outside,
The small precision positioning device is arranged in a vertical direction, the inertial body is attached to the upper part of the piezoelectric element, the rod-like impact body is attached to the lower part of the piezoelectric element, and an initial preload is applied in the moving direction of the rod-like impactor. And the case is fixed to a base, and the piezoelectric element is rapidly deformed, and the force is given by the sum of the weight of the inertial body, the piezoelectric element and the impact body. Small precision positioning device that uses the impact force associated with. A small precision positioning device using an impact force accompanying rapid deformation of the piezoelectric element according to claim 1 is disposed horizontally, and the tip portion of the rod-shaped impact body is made to act on an object to be positioned. Small precision positioning device that uses the impact force accompanying rapid deformation of the piezoelectric element. A small precision positioning device using an impact force accompanying rapid deformation of the piezoelectric element according to claim 1 or 2 is arranged vertically, and the tip of the rod-shaped impact body is made to act on an object to be positioned. A compact precision positioning device using an impact force accompanying rapid deformation of a piezoelectric element. A small precision positioning device using an impact force accompanying rapid deformation of the piezoelectric element according to claim 1 is disposed at an inclination, and the tip of the rod-shaped impact body is applied to an object to be positioned. A small precision positioning device that uses the impact force accompanying rapid deformation of the piezoelectric element. The said base is comprised by the stage driven manually or with an actuator, or the robot hand, The impact force accompanying the rapid deformation | transformation of the piezoelectric element as described in any one of Claim 1 thru | or 5 characterized by the above-mentioned. Small precision positioning device used.

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