JP4482716B2 - Pattern correction device and tape cassette - Google Patents

Abstract

A pattern correction apparatus and a tape cassette are provided to install a correction tape unit and a thermal transfer unit within a cassette in one body, thereby performing a pattern correction process at a high speed and improving the correction degree. A pattern correction apparatus comprises a stage for loading a substrate thereon, a correcting head(6) for correcting defects of the substrate through a thermal transfer scheme, and a correcting head driver for driving the correcting head in an X-direction and a Y-direction perpendicular to the X-direction. The correcting head includes tape cassettes(11a-11d) for respectively receiving color correction tapes, and cassette-moving units(13a-13d) for moving the tape cassettes in the X-direction or the Y-direction. The tape cassette includes a tape unit(20), a thermal transfer unit, and a cassette for receiving the tape unit and the thermal transfer unit. The tape unit includes a supply reel(22) for receiving a correction tape, a winding reel(23) for winding the correction tape thereon, and a tape-moving unit for moving the correction tape along a predetermined path. The thermal transfer unit includes a thermal transfer load for thermally transferring a colored layer of the correction tape, a heater installed in the heat transfer load to heat the thermal transfer load to a predetermined temperature, and a load driver for upwardly and downwardly moving the thermal transfer load between a transfer position and a retreat position.

Description

The present invention relates to a pattern correction apparatus for correcting defects existing in a color filter substrate or a photomask substrate.
Furthermore, the present invention relates to a tape cassette containing a correction tape (transfer tape) used in a pattern correction device.

  In the manufacturing process of the color filter used in the liquid crystal display device, the manufacturing yield is improved by performing defect inspection on the color filter substrate once manufactured and correcting the detected defect. As a defect of the color filter, there is a white defect in which a part of the color filter element is missing. When correcting a white defect, a method is known in which a transfer film including a photosensitive colored layer is used and a colorant is embedded in a defective portion by a thermal transfer method (see, for example, Patent Document 1).

In the color filter correction apparatus described in the above-mentioned patent document, four transfer films of RGB and K (black) are used, each transfer film is mounted between a supply reel and a take-up reel, and a set of four reels is formed. It is stored in a single cassette. Then, the entire four reel sets are driven by one drive shaft provided on the head side, and the four transfer films are made to correspond by using one thermal transfer rod. Then, the cassette is moved relative to the fixed transfer heat transfer rod in the direction perpendicular to the transfer film traveling direction so that the desired color transfer film is positioned directly below the heat transfer rod, and the heat transfer rod is moved up and down. Thermal transfer processing is performed by movement. When the thermal transfer process at one place of the color filter is completed, the entire four take-up reels wind up the transfer film by a predetermined length, and then the next defect correction is performed.
JP-A-9-178933

  Currently, the demand for color filters for liquid crystal display devices is rapidly increasing, and high speed correction work is required for color filter correction devices, and there is a strong demand for accurately embedding colorants in defective portions. . However, the color filter correction apparatus described in the above patent document requires a considerable time to transfer the colorant of the transfer film to the substrate side of the color filter, and cannot cope with the processing speed requested by the user. Is the actual situation. Further, in the repairing process, the colorant is not uniformly embedded in the missing part, and partial white spots are generated or the colorant is transferred in a protruding shape. When such inaccurate thermal transfer is performed, it is necessary to perform correction processing again, which causes a decrease in the yield of color filter manufacturing.

An object of the present invention is to realize a pattern correction apparatus capable of correcting defects existing on various substrates at higher speed.
Furthermore, another object of the present invention is to provide a pattern correction apparatus capable of correcting defects present on various substrates with higher correction accuracy.
Furthermore, another object of the present invention is to provide a tape cassette used in a pattern correcting apparatus for correcting defects by a thermal transfer method.

A defect correction apparatus according to the present invention is a defect correction apparatus that corrects or removes a protrusion defect existing on the surface of a workpiece by a traveling polishing tape,
A stage to hold the workpiece,
A polishing unit for polishing the workpiece;
First polishing means for moving the polishing unit relative to the workpiece on the stage in a first direction orthogonal to the tape traveling direction, which is the traveling direction of the polishing tape, the polishing unit comprises:
Abrasive tape running means for running the abrasive tape;
A head chip which is mounted so as to be relatively movable in the first direction with respect to the polishing unit, and which makes the polishing tape contact the work surface;
And a second moving means for moving the head chip relative to the polishing unit along the first direction.

  As a result of various experiments and analyzes by the inventor of the thermal transfer type color filter correction device, it has been found that preheating the correction tape is extremely important in order to speed up the correction process. That is, in the correction method in which a masking opening is formed in the mask tape and the inside of the masking opening is embedded with the colorant and the cushion layer, it is necessary to heat and soften the cushion layer to a temperature higher than the glass transition point and then perform crimping with the thermal transfer rod. There is. On the other hand, if one thermal transfer rod is used for the four correction tapes R, G, B, and K, the correction tape cannot be pre-heated by the thermal transfer rod, so that it is considerable until the cushion layer is softened. It takes time. In addition, if a heating means for preheating the correction tape is provided separately from the thermal transfer rod, there is a problem that the structure becomes complicated. Furthermore, since the optimum thermal transfer temperature differs for each of the R, G, B, and K correction tapes, there is a limit to the correction using a single thermal transfer rod.

  Therefore, in the present invention, a thermal transfer rod is provided for each of the four color correction tapes, and the correction tape unit and the thermal transfer rod are integrated into a cassette. By providing a thermal transfer rod unit for each correction tape unit, it is possible to preheat the correction tape with the thermal transfer rod set to the optimum thermal transfer temperature of each correction tape, eliminating the need for preheating time and correction processing. Speeding up. Moreover, since the correction processing is performed at the optimum thermal transfer temperature for each color correction tape, the accuracy of the correction processing is also greatly improved.

Another defect correction apparatus according to the present invention is a defect correction apparatus that corrects or removes a protrusion defect existing on the surface of a workpiece by a traveling polishing tape,
A stage to hold the workpiece,
A gantry structure that moves relative to the stage in one direction;
First moving means for moving the gantry structure;
A correction head mounted on the gantry structure so as to be movable in a direction perpendicular to the moving direction;
Second correction means for moving the correction head, the correction head comprising:
A polishing unit that performs a polishing process on a workpiece, and an optical head that observes defects present in the workpiece, the polishing unit includes:
Abrasive tape running means for running the abrasive tape;
A head chip for bringing the polishing tape into contact with the work surface; and a guide means for guiding the head chip in a direction orthogonal to a tape traveling direction which is a traveling direction of the polishing tape;
Third moving means for moving the head chip relative to the polishing unit along the guide means;
During the polishing process, the polishing unit is moved in the first direction orthogonal to the traveling direction of the polishing tape by the first moving means or the second moving means, and the head chip is moved by the third moving means. , relative movement in the direction opposite direction to the direction of movement of the polishing unit along the first direction with respect to the polishing unit,
During polishing process, characterized in that it is maintained substantially stationary relative to the defect to the head chip is fixed.

Another defect correction apparatus according to the present invention is a defect correction apparatus that corrects or removes a protrusion defect existing on the surface of a workpiece by a traveling polishing tape,
A stage to hold the workpiece,
A gantry structure that moves relative to the stage in one direction;
A correction head mounted to be movable relative to the gantry structure, the correction head comprising:
A polishing unit that performs a polishing process on the workpiece; and a first moving mechanism that moves the polishing unit along a first direction.
Abrasive tape running means for running the abrasive tape along a second direction orthogonal to the first direction;
Is relatively movably attached to the to the polishing unit first direction, relative movement the polishing tape head chip and the head chip to contact the workpiece surface, the polishing unit along a first direction A second moving mechanism
During the polishing process, the polishing tape travels in the second direction, the polishing unit moves in the first direction, and the head chip moves relative to the direction opposite to the moving direction of the polishing unit along the first direction. Moving, the head chip is characterized in that it remains substantially stationary with respect to the defect to be corrected.

A tape polishing apparatus according to the present invention is a tape polishing apparatus used in a defect correction apparatus that corrects or removes a protrusion defect existing on the surface of a workpiece by a traveling polishing tape,
A winding reel that winds up the polishing tape, a supply reel that stores the polishing tape, a first rotation driving means that drives the winding reel in a direction to wind up the polishing tape and rolls up the polishing tape, and the supply reel Second rotation driving means for driving the tape in a rewinding direction opposite to the winding direction, a head chip for bringing the polishing tape into contact with the surface of the work, and a head for moving the head chip in a direction orthogonal to the tape running direction And a chip moving means.

The defect correction method according to the present invention is a defect correction method for correcting or removing a protrusion defect existing on the surface of a workpiece by a traveling polishing tape,
Abrasive tape running means for running the abrasive tape, a head chip for bringing the abrasive tape into contact with a projection defect existing on the work surface, and a head chip is moved in a first direction orthogonal to the tape running direction which is the running direction of the abrasive tape. Lowering the polishing unit on which the head chip moving means is mounted and bringing the polishing tape into contact with the protrusion defect;
A process of running a polishing tape to correct a protrusion defect on the workpiece surface;
While the polishing tape is running, the polishing unit is moved in the first direction, and the head chip is moved relative to the polishing unit in the direction opposite to the moving direction along the first direction. A process of moving;
And a step of raising the polishing unit to a predetermined position after the polishing process is completed.

  In another preferred embodiment of the pattern correcting apparatus according to the present invention, the correction tape moves in the XZ axis plane, the mask tape moves in the YZ axis plane orthogonal to the XZ axis plane, The correction tape and the mask tape are overlapped so as to be substantially orthogonal to each other when viewed in the Z-axis direction at a defect correction position for correcting the above. In this example, since the correction tape and the mask tape are driven and controlled to move in planes orthogonal to each other, it is possible to configure the two tapes to overlap at a defect correction position where the defect is corrected.

  In another preferred embodiment of the pattern correction device according to the present invention, a mask tape is positioned on the surface of the substrate, and then a masking opening is formed in the mask tape by the laser processing device, and then the correction tape of the selected color is accommodated. The tape cassette is moved in the X direction, the correction tape is positioned on the mask tape, and then the thermal transfer rod is lowered to press the correction tape against the mask tape.

  In another preferred embodiment of the pattern correction apparatus according to the present invention, the correction head is equipped with a squeegee for bringing the mask tape into close contact with the surface of the substrate, and the squeegee is moved in pressure contact with the mask tape. An air layer between the substrate surface and the mask tape is configured to be removed. When an air layer is interposed between the mask tape and the substrate surface, there is a problem that an accurate masking opening is not formed in the laser processing. Therefore, in this example, the surface of the mask tape located on the substrate surface is moved in pressure contact with the squeegee to remove the air layer interposed between the mask tape and the substrate. Thereby, a more accurate masking opening is formed, and the correction accuracy is improved.

  In the pattern correction apparatus according to the present invention, a color filter substrate is used as a substrate to be corrected for defects, and a color filter correction apparatus is realized by using four tape colors each storing R, G, B, and K correction tapes. Is done.

A tape cassette according to the present invention is a tape cassette containing a correction tape used in a pattern correction device or a color filter correction device for correcting defects in various patterns formed on a substrate by a thermal transfer method,
A tape unit including a supply reel storing a correction tape including a photosensitive colored layer, a first take-up reel for winding the correction tape, and a tape moving mechanism for moving the correction tape along a predetermined path;
A thermal transfer rod for thermally transferring the photosensitive colored layer of the correction tape to a defective portion of the substrate, a heater for heating the thermal transfer rod to a predetermined temperature, a transfer position for transferring the photosensitive colorant to the substrate, and a retracted position; A thermal transfer unit including a rod drive mechanism that moves up and down between, and a cassette for storing the tape unit and the thermal transfer unit,
The thermal transfer rod is disposed in a transfer path of the transfer tape, and the correction tape is in contact with the thermal transfer rod during a period in which the thermal transfer rod is located at the retracted position, and the correction tape is preheated by the thermal transfer rod. Features.

  In the present invention, the number of tape cassettes corresponding to the number of correction colors is used, and the correction tape unit and the thermal transfer unit are integrally formed into a cassette, so that the correction tape can be preheated and the correction of each color can be performed. Correction processing can be performed at the optimum thermal transfer temperature for each tape. As a result, the speed can be increased and the correction accuracy is improved.

  FIG. 1 is a diagram showing an overall configuration of a pattern correction apparatus according to the present invention, FIG. 1A is a diagrammatic plan view, and FIG. 1B is a diagrammatic side view. In this example, an apparatus for correcting a defect in a color filter substrate using a color filter substrate as a pattern substrate to be corrected will be described. The pattern correction apparatus includes a base 1 serving as a base, and a stage 2 made of an optically transparent material is fixedly disposed on the base 1. A color filter substrate 3 to be corrected is disposed on the stage 2 and held by, for example, vacuum suction. Further, two Y rails 4 a and 4 b extending in the Y direction are arranged in parallel on the side of the base 1. An X rail 5 having a gantry structure is movably disposed on the two Y rails. A correction head 6 for correcting defects existing in the color filter substrate is movably mounted on the X rail 5. For example, a linear motor or an AC servo motor is used as a moving mechanism of the X rail with respect to the Y rail and a driving mechanism of the correction head 6 in the X direction. The correction head 6 can be positioned directly above the defect to be corrected by moving in the X and Y directions by the XY drive mechanism based on the detected defect address information. Note that various known drive mechanisms can be used as the XY drive mechanism for moving the correction head in the X and Y directions, and detailed description thereof is omitted. An ultraviolet light source 7 for curing the photosensitive colorant thermally transferred to the color filter substrate is disposed below the stage 2. The ultraviolet light source 7 is driven by an XY drive mechanism (not shown) similarly to the correction head 6 and moves in the X and Y directions in synchronization with the correction head 6 in accordance with the defect add information.

  FIG. 2 is a plan view schematically showing the configuration of an example of the correction head 6. The correction head 6 includes a tape cassette unit 10, a mask tape unit 20, and an optical system unit 30.

  The tape cassette unit 10 includes four rectangular parallelepiped tape cassettes 11a to 11d in which R, G, B, and K (black) transfer tapes are housed, and these four tape cassettes 11a to 11d include Y It is arranged in parallel to the direction, and is connected to a drive plate (not shown), and is moved integrally in the Y direction by a servo motor 12 mounted on the drive plate. The tape cassettes 11a to 11d are connected to servo motors 12a to 12d, respectively, and individually move in the X direction with respect to the drive plate. The drive system of each tape cassette is constituted by, for example, a servo motor, a ball screw, and a guide rail provided on the drive plate.

  The mask tape unit 20 is arranged so as to be adjacent to the tape cassette unit 10. The mask tape unit 20 includes a mask tape supply reel 22 in which the mask tape 21 is accommodated, a take-up reel 23 for winding the mask tape after the correction process, and a pair of guide rollers 24a and 24b. The supply reel 22 and the take-up reel 22 are detachably mounted on two rotating shafts that are rotatably provided on the support plate 25. A servo motor 26 is connected to the rotating shaft on which the take-up reel 23 is mounted, and the mask tape 21 having a predetermined length is taken up for each correction process. The two guide rollers 24a and 24b are rotatably attached to the support plate 25. As the mask tape 21, for example, a polyimide film or an aramid film having a thickness of about 10 μm is used. In addition, since a polyimide film and an aramid film are optically transparent, the defect of a color filter can be observed through these films.

  The support plate 25 is configured to be movable in the X direction and the Z direction by a drive mechanism (not shown) provided in the correction head. Accordingly, the mask tape unit 20 reciprocates between two positions, ie, a correction position and a retraction position, which are two positions separated in the X direction. For example, the position in FIG. 2 is a retracted position, and during the correction process in which correction processing is performed using a mask tape and a correction tape, the position moves to the correction position on the right side of the drawing (defect position specified by the defect address information), Located directly above the defect to be corrected. After the correction process is completed, it moves to the left retracted position. Further, the mask tape unit is lowered in the Z direction during the process of forming the masking opening in the mask tape by the laser processing and the correction process, and presses the mask tape against the surface of the color filter substrate.

  As will be described later, the mask tape unit 20 is positioned below the tape cassette unit 10 when viewed in the Z-axis direction. During the correction process, the designated tape cassette (corresponding to tape cassette 11c in FIG. 2) moves in the X direction (toward the right side of the drawing), and a part of the tape cassette moves above the mask tape. The correction tape and the mask tape are configured to overlap each other. That is, the correction tape moves in the XZ plane, the mask tape moves in the YZ plane orthogonal to the XZ plane, and the correction tape and the mask tape are orthogonal to each other in the Z-axis direction at the defect correction position. And are positioned so as to overlap.

  An optical system unit 30 is provided on the opposite side of the tape cassette unit 10 across the mask tape unit 20. The optical system unit 30 observes a defect to be corrected and performs laser processing for forming a masking opening in the mask tape based on the shape and size of the observed defect. The optical system unit 30 includes a lens stage 31 on which objective lenses having different magnifications are mounted, an observation optical system 32 for observing defects, and a laser processing apparatus 33 for forming a masking aperture of a desired shape on a mask tape. And a coupling optical system (not shown) for optically coupling the objective lens and the observation optical system or the laser processing apparatus. The optical system unit 30 includes a lens stage 31 on which, for example, six objective lenses having different magnifications are mounted. The lens stage 31 is configured to be movable in the X and Y directions. By driving the lens stage in the XY plane, the objective lens having a desired magnification is positioned directly above the defect to be corrected. Can be displayed on a monitor. Further, the lens stage 31 is set so as to be movable also in the Z-axis direction, and the objective lens can be moved in the optical axis direction for focusing when observing defects and laser processing. Further, the lens stage 31 reciprocates between two positions, an observation and laser processing position separated from the X direction, and a retracted position. That is, it is located at the observation and laser processing position during the observation process and the laser processing process for observing the defect to be corrected, and moves in the X direction (right side of the drawing) during the correction process for correcting the defect using the correction tape. And located at the retracted position. Accordingly, during the correction process, the mask tape unit 20 is located immediately above the defect, and the designated color tape cassette is also located immediately above the defect.

  FIG. 3 is a diagram showing the overall configuration of the optical system unit 30. For the sake of clarity, only main components are shown, and optical elements such as lens elements are omitted. The observation optical system 32 has an illumination light source 34. The illumination light emitted from the illumination light source 34 is reflected by the half mirror 35, passes through the dichroic mirror 36, and enters the color filter 3 through the objective lens of the lens stage 31 and the mask tape 21. The reflected light from the color filter is collected again by the objective lens and forms an image on the two-dimensional CCD camera 37 through the dichroic mirror 36 and the half mirror 35. Therefore, by supplying the video signal from the two-dimensional CCD camera to the monitor, a defective image of the color filter is displayed on the monitor. The operator can identify the color of the color filter element to be corrected by observing the defect image on the monitor, and the shape and shape of the masking aperture based on the size and shape of the defect displayed on the monitor. Its size can be determined. Furthermore, the defect can be observed in more detail by exchanging from a low-magnification objective lens to a high-magnification objective lens. It is also possible to directly observe the surface of the color filter 3 by positioning the mask tape unit 20 at the retracted position.

  The laser processing apparatus 33 has a laser 38 for forming a masking opening in the mask tape 21. The laser 38 is, for example, a Q-switched YAG laser that generates light with a wavelength of 355 nm. The laser beam emitted from the laser 38 is shaped by the beam shaping device 39 into a laser beam having a beam diameter determined by the operator based on the size and shape of the defect. The laser light emitted from the beam shaping device is reflected by the dichroic mirror 36 and enters the mask tape 21 through the objective lens. When the short pulse laser beam is incident on the mask tape, a laser ablation action occurs on the mask tape, and an opening corresponding to the shape of the short pulse laser beam is formed on the mask tape. At the same time, since the underlying color filter element is also removed, a white defect portion having a shape corresponding to the shape of the pulse laser beam is formed.

  The optical path length between the lens stage 31 and the dichroic mirror 36 and the half mirror 35 is set to a considerably long distance, and the optical path length is such that the tape cassettes 11a to 11d are inserted between the dichroic mirror 36 and the mask tape unit. Set. In FIG. 3, the observation optical system and the laser processing apparatus are shown to be arranged on the same side. However, as shown in FIG. 2, these optical axes are arranged so as to be orthogonal to each other.

  During the laser processing step, the mask tape unit is lowered and the mask tape 21 comes into contact with the surface of the color filter substrate. However, when the contact between the mask tape and the color filter substrate is insufficient, a minute air layer is formed between the mask tape and the substrate. In such a case, the masking opening is not accurately formed in the mask tape, and for example, a problem occurs in which an opening larger than an opening having a predetermined size is formed. In order to eliminate this problem, as shown in FIG. 4, the mask tape can be pressed against the surface of the substrate using a squeegee 27 to prevent the formation of an air layer. That is, when the squeegee 27 is moved in pressure contact with the mask tape and moved along the direction of movement of the mask tape, the mask tape is deformed according to the shape of the substrate surface, so that the air layer is removed and the substrate surface of the mask tape is removed. Adhesion to is improved. As the squeegee, for example, a cylindrical body of an inert resin such as a fluororesin provided with a support member can be used.

  FIG. 5 is a diagram showing the structure of a tape cassette according to the present invention. The tape cassette 40 has a substantially rectangular parallelepiped case structure and is made of a material that blocks ultraviolet rays, such as iron, stainless steel, aluminum, carbon fiber material, and PET. Inside the tape cassette 40, a supply reel 42 storing a correction tape (transfer tape) 41 and a first take-up reel 43 for winding the correction tape after the correction processing are stored. The correction tape unwound from the supply reel 42 was detected by the encoder 44 and the cover film was separated from the correction tape while passing between the two rollers 45 and 46. The cover film is taken up by the second take-up reel 47, and the correction tape from which the cover film has been removed reaches a correction position for correcting the white spot defect of the color filter substrate. The thermal transfer rod device 60 is disposed at the correction position, and the white defect of the color filter substrate is corrected by the thermal transfer rod device. The correction tape that has been subjected to the correction process is wound around the first take-up reel 43 through the three guide rollers 48 to 50.

  The supply reel and the first and second take-up reels are detachably mounted on a rotating shaft that is rotatably mounted on a support plate (not shown), and can be replaced. In addition, a servo motor (not shown) is connected to the rotary shaft on which the take-up reel is mounted, and correction tape winding control is performed by the rotational torque of the servo motor, and an output signal from the encoder for each correction process. The correction tape of a predetermined length is wound up using. Further, the servo motor always applies a winding torque to the correction tape, and applies a predetermined tension to the correction tape. A guide roller is also rotatably attached to the support plate. The rotary shaft on which the second take-up reel 47 for taking up the cover film is mounted may be connected to the servo motor of the first take-up reel to take up the cover film, and is driven by another servo motor. It can also be set as the structure to do.

  The thermal transfer rod device 60 includes a guide block 61, and the guide block supports the thermal transfer rod 62 so as to be movable up and down. The guide block 61 is supported so as to be movable up and down with respect to the cassette 40 via a support member, and is moved up and down by a motor 63 to move between two positions, a correction position for correcting a defect and a retracted position. Two guide rollers 64 and 65 are rotatably attached to the guide block 61. These guide rollers serve to guide the correction tape. The thermal transfer rod 62 is positioned between the two guide rollers 64 and 65. A heater (not shown) is built in the thermal transfer rod 62, and the heater chip 66 provided at the tip is heated to a predetermined temperature to maintain the optimum thermal transfer temperature of the colored layer of the correction tape. That is, since the optimum thermal transfer temperature (correction temperature) is different for each color correction tape, in the present invention, the temperature of the thermal transfer rod mounted in each tape cassette is changed to the color of the correction tape stored in the cassette. The optimum heat transfer temperature of the layer is set, and correction processing (thermal transfer processing) is performed at the optimum heat transfer temperature for each color.

  A pressure sensor 67 and a motor 68 are attached to the side of the thermal transfer rod 62 opposite to the side where the heater chip 66 is mounted. The driving force of the motor 68 causes the thermal transfer rod 62 to move up and down between the thermal transfer position and the retracted position. When the thermal transfer rod is lowered, the pressure sensor 67 detects the pressure-bonding force to the correction tape 41, and controls the lowering amount of the thermal transfer rod based on the detection result. The thermal transfer rod 62 is set so that a heater chip 66 provided at the tip thereof protrudes below a line connecting the two guide rollers 64 and 65. Therefore, the correction tape 41 always comes into contact with the heater chip 66 provided at the tip of the thermal transfer rod 62 and is preheated.

  In the correction process, the motor 63 is driven to move the guide block 61 and the thermal transfer rod 62 downward so as to approach the color filter substrate. Then, the two guide rollers 64 and 65 are brought into contact with the color filter substrate located below through the correction tape 41 to press the correction tape against the color filter substrate. At that point, the descent stops. Next, the motor 68 is driven to lower the thermal transfer rod 62, and the crimping operation is performed. During this crimping operation, heat supplied from the thermal transfer rod is transmitted to the correction tape, and the colored layer of the correction tape is transferred to the color filter substrate through the masking opening. When the crimping operation is completed, the thermal transfer rod and the guide block are raised and stopped at the retracted position. Then, the servo motor that drives the take-up reel 43 starts driving, and a correction tape having a predetermined length is taken up on the take-up reel 43. In this state, the tip of the thermal transfer roller is located below the line segment connecting the two guide rollers 64 and 65, and is contacted with the correction tape for preheating.

  FIG. 6 is a diagrammatic sectional view showing an example of the correction tape (transfer film) 41. The correction tape 41 has a base film 41a, and a cushion layer 41b, a photosensitive colored layer 41c, and a cover film 41d are sequentially formed on the base film. The base film 41a is made of PET having a thickness of 75 μm, for example. The cushion layer 41b is made of, for example, a thermoplastic resin layer having a thickness of 20 μm, and softens when preheated by a thermal transfer rod, and functions as a cushion material layer. That is, when thermal transfer is performed using a thermal transfer rod, it functions as a cushion layer for uniformly embedding a colorant in a masking opening formed in a mask tape. The photosensitive colored layer 41c is a colored layer in which various color pigments are added to, for example, a photosensitive resin that is sensitive to ultraviolet light, and is formed to a thickness of, for example, 2.0 μm. Finally, the cover film 41d serves to prevent the characteristics of the photosensitive colored layer from being deteriorated by the surrounding environment (humidity and the like), and is made of, for example, polypropylene having a thickness of 1.2 μm.

  Since the photosensitive coloring layer 41c has different glass transition points in relation to the pigment, it is necessary to set the temperature of the thermal transfer rod at the time of thermal transfer to an optimum thermal transfer temperature. For example, as an example, the optimum set temperature of the thermal transfer rod of the R, G, B, K correction tape is set to R (140 ° C.), G (130 ° C.), B (110 ° C.), and K (110 ° C.). . For example, if the temperature of the thermal transfer rod is set to a temperature higher than the optimum thermal transfer, the colorant of the correction tape will melt too much, and when the mask tape is peeled off, protrusions are formed on the surface of the embedded colorant. End up. On the other hand, when the temperature is lower than the optimum thermal transfer temperature, the colorant of the correction tape is not sufficiently melted, the colorant is not uniformly embedded, and the correction fails. In order to eliminate such problems, in the present invention, a thermal transfer rod is provided for each correction tape, and each thermal transfer rod is set to an optimum thermal transfer temperature.

  Next, a series of correction processing steps will be described with reference to FIGS. FIG. 8A shows the configuration of the color filter substrate 3, and the color filter substrate 3 has a glass substrate 70 on which a black matrix (BM) 71 is formed in a grid pattern. Coloring elements of R, G, and B color filters are formed in a predetermined order in a region surrounded by the BM 71. In this example, it is assumed that a white defect 72 exists in the colored element B and the white defect 72 is corrected.

  The preceding defect inspection apparatus detects the white defect and its position (coordinates on the glass substrate), and sends address information of the defect to the correction apparatus. In the correction device, based on the address information of the defect to be corrected, the correction head driving mechanism is driven to move the correction head 6 in the X and Y directions, and the correction head 6 is positioned directly above the defect. Here, as the reference position on the correction head side, for example, the position of the low-magnification objective lens of the lens stage 31 located at the observation mode position is set as the reference position.

  When the correction head moves to the defect position, the operator specifies the position of the defect via the low-magnification objective lens (for example, 5 times) of the lens stage 31 in the observation mode. Next, the lens stage 31 is driven, a high-magnification objective lens (for example, 20 times) is positioned in the observation optical system, and the defect is observed in the high-magnification mode. By this defect observation, the operator specifies the color of the color filter element to be corrected and sets the area to be corrected. In this area setting, the shape of the masking opening formed in the mask tape 21 by laser processing is set. This masking opening is an area larger than the white defect to be corrected.

  Next, as shown in FIG. 8B, the mask tape unit is moved in the X direction, and the mask tape 21 is positioned directly above the defect. Further, the mask tape unit is lowered in the Z-axis direction, and the mask tape is brought into contact with the surface of the color filter substrate.

  Next, as shown in FIG. 8C, the squeegee 27 is brought into pressure contact with the mask tape 21 and is moved along the extending direction of the mask tape to remove the air layer existing between the mask tape and the color filter and Adhere closely.

  Next, as shown in FIG. 8D, laser processing is performed. In the laser processing process, the objective lens used in the defect observation process is shared. First, the laser processing device 33 is driven to irradiate the mask tape 21 with a predetermined number of pulses of laser light. When laser light of a predetermined number of pulses is irradiated, an opening corresponding to the shape of the laser light is formed in the mask tape by laser ablation, and the underlying colored element (B) is also removed. As a result, a masking opening having a shape set by the operator is formed in the mask tape 21, and the underlying coloring element is also removed, so that an opening 73 having the shape shown in FIG. 8E is formed.

  Next, a thermal transfer process is performed to embed the B colorant in the opening 73. First, the lens stage 31 moves to the right side of FIG. Next, the tape cassette 11b containing the B correction tape is selected, the tape cassette 11b moves in the Y direction, and further moves in the X direction, and is positioned immediately above the mask tape as shown in FIG. 8A. . At this time, the state shown in FIG. 2 is reached, and the front end side of the tape cassette 11c in which the B correction tape is stored is positioned so as to overlap the mask tape unit 20 in the Z-axis direction.

  Thereafter, the thermal transfer rod device 60 is lowered, and the correction tape 41 is pressed against the mask tape 21 by two guide rollers provided in the thermal transfer rod device. In this state, the thermal transfer rod presses the correction tape against the mask tape. Since the correction tape 41 is preheated by the thermal transfer rod, the cushion layer of the correction tape is softened. As a result, the softened thermoplastic resin of the cushion layer and the photosensitive colored layer formed on the surface thereof are pressed into the opening 73 by the pressing force of the thermal transfer rod at a predetermined temperature. Furthermore, the photosensitive colorant is melted by the heat transmitted from the thermal transfer rod and is in a state of being adhered to the surface of the glass substrate. In this state, ultraviolet light is irradiated from the back side of the glass substrate 70 through the transparent support stage 2. By this ultraviolet light irradiation, the molten photosensitive colorant is cured and the adhesion of the photosensitive colorant to the glass substrate is completed.

  Thereafter, the thermal transfer rod device is retracted upward, and then both the mask tape 21 and the correction tape 41 are separated from the color filter substrate. At that time, since the cured photosensitive colored layer is adhered to the glass substrate 70, only the photosensitive colored layer remains on the color filter substrate side, and the defect correction is completed. In addition, since the thickness of the photosensitive colored layer of the correction tape is substantially equal to the thickness of the colored element formed on the color filter substrate, the color filter substrate is corrected to a uniform height as a whole.

  FIG. 9 is a diagram showing an example of forming a masking opening in a mask tape. After performing the laser processing once, new mask tapes can be used sequentially by moving the mask tape 21 in the 1 pitch Y direction. However, since the masking opening formed in the mask tape is a very small opening of about several hundred μm, if the mask tape is moved in the Y direction by one pitch after one laser processing, the mask tape is wasted. Inconvenient consumption will occur. Therefore, the present invention utilizes the fact that the mask tape unit is configured to be movable in the X direction, and after the completion of one laser processing, the mask tape is moved in the X direction by one pitch, and twice. After the laser processing is completed, the mask tape is moved in the Y direction by one pitch. With this configuration, as shown in FIG. 10, since two masking openings are formed in the width direction of the mask tape, the mask tape can be effectively used, and the running cost of the color filter correcting device can be reduced. be able to.

The present invention is not limited to the above-described embodiments, and various modifications and changes can be made. For example, in the above-described embodiment, the example of correcting the white defect existing in the color filter substrate has been described. When correcting a black defect, a laser processing process is performed on a region including a foreign substance to form a masking opening and an underlying color layer is also removed to form an opening, and the colorant of the color is embedded in the opening. It is corrected by.
Further, the correction target is not limited to the color filter substrate, and is applied to the case of correcting patterns formed on various substrates such as a photomask.
Further, in the above-described embodiment, the aspect of correcting using a plurality of tape cassettes has been described. However, the present invention is also applicable to a case where a pattern formed on a substrate is corrected using a single tape cassette of a single color. It is possible.

It is a diagram which shows an example of the color filter correction apparatus by this invention. It is a diagram which shows an example of the correction head by this invention. It is a diagram which shows an example of an optical system unit. It is a diagram showing a configuration in which a mask tape is brought into close contact with a substrate using a squeegee. It is a diagram which shows an example of the tape cassette by this invention. It is sectional drawing which shows the structure of an example of a correction tape. It is a schematic sectional drawing which shows a series of processes in a correction process. It is a schematic sectional drawing which shows a series of processes in a correction process. It is a diagram which shows the example which forms a masking opening in a mask tape.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Base 2 Stage 3 Color filter board | substrate 4a, 4b Y rail 5 X rail 6 Correction head 7 Ultraviolet light source 10 Tape cassette unit 11a-11d Tape cassette
12, 13a to 13d Motor 20 Mask tape unit 21 Mask tape 22 Supply reel 23 Take-up reels 24a and 24b Guide roller 25 Support plate 26 Motor 27 Squeegee 30 Optical system unit 31 Lens stage 32 Observation optical system 33 Laser processing device 38 Laser 39 Beam forming device 40 Cassette 41 Correction tape 42 Supply reel 43 Take-up reel 44 Encoder 60 Thermal transfer device 61 Guide block 62 Thermal transfer rod 70 Substrate 71 Black matrix 72 White defect 73 Opening

Claims (15)

A stage that supports the substrate to be defect corrected;
A correction head for correcting defects existing on the substrate by a thermal transfer method;
In a pattern correction apparatus comprising a correction head drive mechanism for driving the correction head in the X direction and the Y direction perpendicular thereto,
The correction head has a plurality of tape cassettes each storing correction tapes of different colors, and a cassette moving mechanism for moving the tape cassette,
The tape cassette is
A tape unit including a supply reel storing the correction tape, a take-up reel for winding the correction tape, and a tape moving mechanism for moving the correction tape along a predetermined path;
Thermal transfer rod for thermally transferring the colored layer of the correction tape to the defective portion of the substrate, a heater built in the thermal transfer rod for heating the thermal transfer rod to a predetermined temperature, and a rod for moving the thermal transfer rod up and down between the transfer position and the retracted position A thermal transfer unit including a drive mechanism;
A pattern correcting apparatus comprising a cassette for storing the tape unit and the thermal transfer unit. A stage placed on a base and supporting a substrate to be defect corrected;
A correction head for correcting defects existing on the substrate by a thermal transfer method;
A correction head drive mechanism for driving the correction head in the X direction and the Y direction orthogonal thereto,
The correction head is
A plurality of tape cassettes each storing correction tapes of different colors, and a tape cassette unit having a cassette moving mechanism for moving the tape cassette;
A mask tape for masking around the defect to be corrected, and a mask tape unit having a drive mechanism for driving the mask tape;
An observation optical system for observing defects;
A laser processing device for forming a masking opening in the mask tape,
The tape cassette is
A tape unit including a supply reel storing the correction tape, a take-up reel for winding the correction tape, and a tape moving mechanism for moving the correction tape along a predetermined path;
Thermal transfer rod for thermally transferring the colored layer of the correction tape to the defective portion of the substrate, a heater built in the thermal transfer rod for heating the thermal transfer rod to a predetermined temperature, and a rod for moving the thermal transfer rod up and down between the transfer position and the retracted position A thermal transfer unit including a drive mechanism;
A pattern correcting apparatus comprising a cassette for storing the tape unit and the thermal transfer unit. 3. The pattern correction apparatus according to claim 1, wherein the thermal transfer rods stored in the respective tape cassettes are respectively set to optimum thermal transfer temperatures of the colored layers of the correction tapes stored in the tape cassettes. A pattern correction device.   4. The pattern correction apparatus according to claim 3, wherein the thermal transfer rod is disposed in a movement path of the correction tape, the correction tape is in contact with the thermal transfer rod during a period in which the thermal transfer rod is located at the retracted position, and the correction tape is the thermal transfer rod. The pattern correction device is preheated by the above.   5. The pattern correction device according to claim 1, wherein the correction tape is made of a base film, a thermoplastic resin, and a cushion layer that is softened by being preheated by a thermal transfer rod, and a predetermined tape. A pattern correction apparatus comprising: a photosensitive colored layer containing a color pigment; and a cover film for protecting the photosensitive colored layer. 6. The pattern correction apparatus according to claim 2, wherein the correction tape moves in a first direction , the mask tape moves in a second direction orthogonal to the first direction , and a defect is detected. The correction tape and the mask tape are overlapped so as to be substantially orthogonal to each other when viewed in the first direction and the third direction orthogonal to the second direction at the defect correction position for correcting . 7. The pattern correction apparatus according to claim 6, wherein a mask tape is positioned on the surface of the substrate at the defect correction position, and then a masking opening is formed in the mask tape by the laser processing apparatus, and then the color of the selected color is selected. A pattern in which a tape cassette containing a correction tape moves in the first direction, the correction tape is positioned on the mask tape, and then the thermal transfer rod is lowered to press the correction tape against the mask tape. Correction device.   8. The pattern correction apparatus according to claim 7, wherein a squeegee for closely attaching the mask tape to the surface of the substrate is mounted on the correction head, and the squeegee is moved in pressure contact with the mask tape to thereby move the substrate surface. A pattern correction apparatus configured to remove an air layer between the mask tape and the mask tape. The pattern correction apparatus according to any one of claims 1 to 8, wherein the substrate to be corrected for defects is a color filter substrate.
The correction head has four tape cassettes each containing R, G, B, and K correction tapes.   10. The pattern correction apparatus according to claim 1, wherein an optically transparent glass substrate is used as a stage for supporting the substrate to be defect-corrected, and a substrate is provided below the glass substrate. A pattern correction apparatus, comprising: a light source for curing the colorant thermally transferred to the substrate. A tape cassette containing a correction tape used for a pattern correction device or a color filter correction device for correcting defects of various patterns formed on a substrate by a thermal transfer method,
A tape unit including a supply reel storing a correction tape including a photosensitive colored layer, a first take-up reel for winding the correction tape, and a tape moving mechanism for moving the correction tape along a predetermined path;
A thermal transfer rod for thermally transferring the photosensitive colored layer of the correction tape to a defective portion of the substrate, a heater for heating the thermal transfer rod to a predetermined temperature, a transfer position for transferring the photosensitive colorant to the substrate, and a retracted position; A thermal transfer unit including a rod drive mechanism that moves up and down between, and a cassette for storing the tape unit and the thermal transfer unit,
The thermal transfer rod is arranged in the movement path of the correction tape, and the correction tape is in contact with the thermal transfer rod during a period in which the thermal transfer rod is located at the retracted position, and the correction tape is preheated by the thermal transfer rod. A featured tape cassette.   12. The tape cassette according to claim 11, wherein after the thermal transfer process is completed, the take-up reel winds the correction tape by a predetermined length, and after that, the correction tape is stored during the period until the next thermal transfer process is started. A tape cassette characterized in that a new portion comes into contact with a heater chip provided at the tip of a thermal transfer rod and preheating is performed.   13. The tape cassette according to claim 11, wherein the tape moving mechanism includes a first rotation shaft that rotatably supports the supply reel, and a second rotation shaft that rotatably supports the first take-up reel. It has a rotating shaft and a servo motor connected to the second rotating shaft, and the supply reel and the take-up reel are detachably mounted on the first rotating shaft and the second rotating shaft, respectively, and corrected. A tape cassette characterized in that the tape can be exchanged.   14. The tape cassette according to claim 11, wherein the cassette is made of a material that blocks ultraviolet light, and the photosensitive colorant of the correction tape is not exposed to light. .   15. The tape cassette according to claim 12, 13, or 14, wherein means for separating the cover film from the correction tape is provided between the supply reel and the thermal transfer rod in the movement path of the correction tape, and the cover film is separated. A tape cassette, wherein the tape is wound around a second take-up reel.

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