JP4483196B2 - Method for manufacturing piezoelectric element forming member - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for manufacturing a piezoelectric element forming member in which piezoelectric elements that are displaced by applying a voltage to a piezoelectric material layer are integrally formed, and the piezoelectric element forming member, piezoelectric element unit, and liquid jet head obtained thereby Particularly suitable for an ink jet recording head that discharges ink droplets from nozzle openings by pressurizing ink supplied to a pressure generating chamber communicating with nozzle openings for discharging ink droplets by a piezoelectric element It is.
[Prior art]
[0002]
A part of the pressure generation chamber communicating with the nozzle opening for discharging ink droplets is constituted by a vibration plate, and the vibration plate is deformed by a piezoelectric element to pressurize the ink in the pressure generation chamber to discharge ink droplets from the nozzle opening. As one of the ink jet recording heads, one using a longitudinal vibration mode piezoelectric actuator that extends and contracts in the axial direction of a piezoelectric element is known.
[0003]
As a piezoelectric element (piezoelectric vibrator) unit constituting such a longitudinal vibration mode piezoelectric actuator, a common internal electrode 11 and individual internal electrodes 12 are laminated with a piezoelectric body 13 interposed therebetween as shown in FIG. There is one constituted by a vibrator group 19 having a plurality of stacked piezoelectric vibrators 14 formed and a fixed substrate 15 that supports the vibrator group 19. In addition, the surface of the vibrator group 19 is electrically connected to the individual external electrode 16 that is electrically connected to the individual internal electrode 12 exposed at the distal end surface portion of the piezoelectric vibrator 14 and the common internal electrode 11 that is exposed to the proximal end surface portion. A common external electrode 17 is formed. And the connection end part of the flexible cable 18 is mounted in the contact part of each individual external electrode 16 and the common external electrode 17, and the flexible cable 18 is mounted by soldering etc. (for example, following patent document 1). .
[0004]
The piezoelectric element unit as described above is generally manufactured as follows.
[0005]
That is, first, as shown in FIG. 9, the conductive material 21 that becomes the common internal electrode 11 extending from the rear end to the vicinity of the tip is exposed on the surface, and the conductive material that becomes the individual internal electrode 12 extending from the tip to the end side of the active region. 20 and a piezoelectric material 22 are stacked, and a piezoelectric diaphragm 23 formed by baking after drying is prepared. Next, a mask material 24 is fixed to a region on the surface of the piezoelectric diaphragm 23 that serves as a boundary between the individual external electrode 16 and the common external electrode 17. The mask material 24 is provided in a strip shape in the boundary region, and is provided over both end portions on the individual electrode side (region to be a dummy vibrator described later), and has a substantially U-shape as a whole.
[0006]
Then, as shown in FIG. 10, the individual external electrode 16 and the common external electrode 17 are formed by depositing an electrode forming material for external connection on the entire surface except the lower surface of the piezoelectric diaphragm 23 to form an electrode layer. To do. When the mask material 24 is removed at the stage where the deposition is completed, a conductive layer is formed only on the three surfaces of the front end surface, the rear end surface, and one surface, and the rear end of the conductive material 21 exposed on the other surface is formed. A piezoelectric diaphragm electrically connected to the conductive layer can be obtained.
[0007]
Next, a region (inactive region) where only the common internal electrode 11 and the piezoelectric body 13 are laminated is positioned on a fixed substrate 15 such as metal and fixed with an adhesive (see FIG. 8). After that, a slit 25 is formed from the free end side of the piezoelectric material 22 to at least the rear end side of the individual internal electrode 12 by a dicing saw or wire saw cutting tool (not shown), and vibration as the piezoelectric vibrator 14 is performed. The region and the region to be the individual electrode are cut into comb teeth to complete the piezoelectric element unit. At this time, dummy vibrators wider than the piezoelectric vibrator 14 are formed at both ends on the individual electrode side.
[0008]
[Patent Document 1]
Japanese Patent Laid-Open No. 11-10875
[Problems to be solved by the invention]
In the manufacturing method described above, the individual external electrode 16 and the common external electrode 17 are completed by one deposition in a state where the mask material 24 is provided in the boundary region between them. If the individual external electrode 16 and the common external electrode 17 are brought into conduction, the piezoelectric effect cannot be obtained. Therefore, the two must be electrically insulated.
[0009]
However, in the manufacturing method described above, since the elongate strip-shaped mask material 24 is provided in the boundary region between the individual external electrode 16 and the common external electrode 17 for vapor deposition, the mask material 24 is likely to be bent during the vapor deposition. In recent years, in particular, there is a tendency to reduce the portion of the piezoelectric vibrating body that is not directly related to the piezoelectric vibration in terms of cost and other aspects, and the width dimension of the region masked by the mask material 24 also tends to be reduced. It is easy to bend. When the mask material 24 is bent, the bent portion of the mask material 24 is lifted from the surface of the piezoelectric diaphragm 23 to form a gap, and a vapor deposition material is formed in the gap, which is a boundary region between the individual external electrode 16 and the common external electrode 17. In the worst case, there is a problem that the individual external electrode 16 and the common external electrode 17 are short-circuited. Further, when the mask material 24 having a substantially U-shape is used, both ends of the band-shaped portion corresponding to the boundary region are in close contact with the surface of the piezoelectric diaphragm 23 and the central portion is lifted. It becomes easy.
[0010]
Such a problem occurs not only in an ink jet recording head that ejects ink, but also in other liquid ejecting heads that eject liquid other than ink.
[0011]
The present invention has been made in view of such circumstances, and a method for manufacturing a piezoelectric element forming member capable of reducing a defect rate by forming external electrodes with higher accuracy, and a piezoelectric element forming member obtained thereby, An object is to provide a piezoelectric element unit and a liquid jet head.
[0012]
[Means for Solving the Problems]
In order to achieve the above object, a method for manufacturing a piezoelectric element forming member according to the present invention provides a method for manufacturing a piezoelectric element forming member on a surface of a piezoelectric diaphragm in which individual internal electrodes and common internal electrodes are alternately stacked with a piezoelectric material interposed therebetween. A method of manufacturing a piezoelectric element forming member in which individual external electrodes that conduct and a common external electrode that conducts to a common internal electrode are respectively formed in layers,
The mask material is formed when an external electrode is formed by depositing a mask material in a boundary region between the individual external electrode formation region on the surface of the piezoelectric diaphragm and the common external electrode formation region and evaporating the external electrode formation material. Has a supporting member crossing the common external electrode forming region.
[0013]
That is, according to the present invention, the external electrode is formed by depositing a mask material in the boundary region between the individual external electrode formation region on the surface of the piezoelectric diaphragm and the common external electrode formation region and evaporating the external electrode formation material. In this case, the mask material has a support member that crosses the common external electrode formation region. For this reason, the mask material arranged in the boundary region between the individual external electrode forming region and the common external electrode forming region can be prevented from being lifted or bent by the weight of the support member, and the vapor deposition material can be prevented from entering the boundary region. To prevent short circuit. In particular, when the width dimension of the area masked with the mask material is reduced by reducing the portion not directly related to the piezoelectric vibration of the piezoelectric vibrating body, or the mask material having a substantially U shape is used. It is effective in the case. In addition, the supporting member can be easily held during the vapor deposition step, and the mask material can be positioned and arranged with high accuracy. Thus, the defect rate can be reduced by improving the deposition accuracy and forming the external electrodes with higher accuracy.
[0014]
In the method for manufacturing a piezoelectric element forming member of the present invention, when the mask material has a belt-like portion extending in the column direction of the piezoelectric vibrator, the middle portion of the belt-like mask material is likely to be lifted. Therefore, the effect of preventing the floating by providing the supporting member, improving the deposition accuracy and reducing the defect rate is remarkable and effective.
[0015]
In the method for manufacturing a piezoelectric element forming member of the present invention, when the support member is provided in a direction orthogonal to the column direction of the piezoelectric vibrator, a mask material provided along the column direction of the piezoelectric vibrator. It is possible to effectively prevent the middle part of the film from being lifted and to improve the deposition accuracy.
[0016]
In the method for manufacturing a piezoelectric element forming member of the present invention, when only one support member is provided at the center in the column direction of the piezoelectric vibrator, the mask provided along the column direction of the piezoelectric vibrator. It is possible to effectively prevent the central portion of the material that is most likely to be lifted, and to effectively improve the deposition accuracy.
[0017]
In the method for manufacturing a piezoelectric element forming member according to the present invention, the plurality of piezoelectric diaphragms are arranged side by side so that a front end side where the individual internal electrodes are exposed and a rear end side where the common internal electrodes are exposed are opposed to each other, and the mask material is The plurality of arranged piezoelectric diaphragms are simultaneously covered, and a first opening for forming individual external electrodes and a second opening for forming a common external electrode are formed. When the opening edges are connected across the second opening, a plurality of piezoelectric diaphragms are arranged, and a plurality of piezoelectric diaphragms are simultaneously deposited using a mask material covering them. When performing, since the support member is provided so as to cross the second opening formed in the region between the two piezoelectric diaphragms arranged side by side, the piezoelectric vibrator is provided between the first opening and the second opening. Provided in a strip shape along the row direction The floating of the strip-shaped portion of the mask material can be effectively prevented. And even when many are vapor-deposited simultaneously, vapor-deposition accuracy can be improved effectively.
[0018]
Further, the piezoelectric element forming member of the present invention is shared with the individual external electrodes that are electrically connected to the individual internal electrodes on the surface of the piezoelectric diaphragm in which the individual internal electrodes and the common internal electrodes are alternately laminated with the piezoelectric material interposed therebetween. Piezoelectric element forming members in which common external electrodes conducting to internal electrodes are formed in layers,
The common external electrode is continuously provided from the end surface where the common internal electrode of the piezoelectric diaphragm is exposed to the surface, and the common external electrode formation region on the surface has an electrode non-forming portion that crosses the region. In addition, the gist is that a thin film portion having a thickness smaller than that of other portions is formed on at least a part of the common external electrode on the end face.
[0019]
For this reason, the electrode non-forming portion that crosses the common external electrode formation region is used as a mask material disposed in the boundary region between the individual external electrode formation region and the common external electrode formation region when the common external electrode is formed by vapor deposition. It will be formed by the provided support member. Further, the thin film portion is formed corresponding to the support member. Therefore, during vapor deposition, the mask material disposed in the boundary region between the individual external electrode formation region and the common external electrode formation region is prevented from being lifted or bent by the weight of the support member, and the vapor deposition material wraps around the boundary region. Therefore, the piezoelectric element unit can be prevented from being short-circuited. In particular, when the width dimension of the area masked with the mask material is reduced by reducing the portion not directly related to the piezoelectric vibration of the piezoelectric vibrating body, or the mask material having a substantially U shape is used. It is effective in the case. In addition, the supporting member can be easily held during the vapor deposition step, and the mask material can be positioned and arranged with high accuracy. Thus, the defect rate can be reduced by improving the deposition accuracy and forming the external electrodes with higher accuracy.
[0020]
In the piezoelectric element forming member of the present invention, the electrode non-forming region provided in the boundary region between the individual external electrode forming region and the common external electrode forming region on the surface of the piezoelectric diaphragm extends in the column direction of the piezoelectric vibrator. In the case of having a band-shaped portion, the band-shaped electrode non-formation region is formed by a band-shaped mask material. Therefore, since the floating is likely to occur in the middle of the belt-shaped mask material, the effect of reducing the defect rate by providing the supporting member to prevent the floating, improving the deposition accuracy, and being effective is remarkable.
[0021]
In the piezoelectric element forming member of the present invention, when the electrode non-forming portion is provided in a direction orthogonal to the row direction of the piezoelectric vibrator, the electrode non-forming portion is a support member provided on the mask material. Will be formed. Therefore, it is possible to effectively prevent the intermediate portion of the mask material provided along the row direction of the piezoelectric vibrators from being lifted, and to further improve the deposition accuracy.
[0022]
In the piezoelectric element forming member of the present invention, when only one electrode non-forming portion and the thin film portion are provided at the central portion in the column direction of the piezoelectric vibrator, along the column direction of the piezoelectric vibrator. The center of the provided mask material that is most likely to be lifted is effectively prevented from being lifted, and the piezoelectric element unit is effectively improved in vapor deposition accuracy. In addition, the variation in the driving voltage applied to the piezoelectric vibrator due to the position of each of the piezoelectric vibrators arranged in a row is reduced compared to the case where a plurality of thin film portions are provided, and each piezoelectric vibrator can be displaced uniformly. .
[0023]
In the piezoelectric element forming member of the present invention, the common external electrode is formed by vapor deposition of an external electrode forming material in a state where a mask material is disposed in a boundary region between the individual external electrode forming region and the common external electrode forming region. When the thin film portion is continuously formed on the support member that crosses the common external electrode formation region provided in the mask material, the deposition accuracy is improved and the external electrode is formed with higher accuracy. As a result, the defect rate can be reduced.
[0024]
In addition, the piezoelectric element unit of the present invention fixes an inactive region of the piezoelectric element forming member according to any one of claims 6 to 10 to a fixed substrate, and at least from a free end side where an individual electrode exists. The gist is that a row of piezoelectric vibrators is formed by forming slits to the rear ends of the individual electrodes.
[0025]
For this reason, the electrode non-forming portion that crosses the common external electrode formation region is used as a mask material disposed in the boundary region between the individual external electrode formation region and the common external electrode formation region when the common external electrode is formed by vapor deposition. It will be formed by the provided support member. Further, the thin film portion is formed corresponding to the support member. Therefore, during vapor deposition, the mask material disposed in the boundary region between the individual external electrode formation region and the common external electrode formation region is prevented from being lifted or bent by the weight of the support member, and the vapor deposition material wraps around the boundary region. Therefore, the piezoelectric element unit can be prevented from being short-circuited. In particular, when the width dimension of the area masked with the mask material is reduced by reducing the portion not directly related to the piezoelectric vibration of the piezoelectric vibrating body, or the mask material having a substantially U shape is used. It is effective in the case. In addition, the supporting member can be easily held during the vapor deposition step, and the mask material can be positioned and arranged with high accuracy. Thus, the defect rate can be reduced by improving the deposition accuracy and forming the external electrodes with higher accuracy.
[0026]
The liquid ejecting head according to the present invention includes an individual external electrode electrically connected to the individual internal electrode on the surface of the piezoelectric diaphragm in which the individual internal electrode and the common internal electrode are alternately stacked with the piezoelectric material interposed therebetween, and a common internal electrode. The common external electrodes that are connected to the electrodes are formed in layers, and the inactive region is fixed to the fixed substrate, and a slit is formed from the free end side where the individual electrodes exist to at least the rear end of the individual electrodes. A liquid ejecting head including a piezoelectric element unit in which a row of vibrators is formed,
The common external electrode on the fixed end side is continuously provided from the end surface on the fixed end side of the piezoelectric diaphragm to the surface, and in the common external electrode forming region on the surface, there is an electrode non-forming portion that crosses the region. In addition, the gist is that a thin film portion having a thickness smaller than that of other portions is formed on at least a part of the common external electrode on the end face.
[0027]
For this reason, the electrode non-forming portion that crosses the common external electrode formation region is used as a mask material disposed in the boundary region between the individual external electrode formation region and the common external electrode formation region when the common external electrode is formed by vapor deposition. It will be formed by the provided support member. Further, the thin film portion is formed corresponding to the support member. Therefore, during vapor deposition, the mask material disposed in the boundary region between the individual external electrode formation region and the common external electrode formation region is prevented from being lifted or bent by the weight of the support member, and the vapor deposition material wraps around the boundary region. Therefore, the piezoelectric element unit can be prevented from being short-circuited. In particular, when the width dimension of the area masked with the mask material is reduced by reducing the portion not directly related to the piezoelectric vibration of the piezoelectric vibrating body, or the mask material having a substantially U shape is used. It is effective in the case. In addition, the supporting member can be easily held during the vapor deposition step, and the mask material can be positioned and arranged with high accuracy. Thus, the defect rate can be reduced by improving the deposition accuracy and forming the external electrodes with higher accuracy.
[0028]
In the liquid jet head of the present invention, the electrode non-formation region provided in the boundary region between the individual external electrode formation region on the free end side of the piezoelectric diaphragm surface and the common external electrode formation region on the fixed end side In the case of having a strip-shaped portion extending in the column direction, the strip-shaped electrode non-formation region is formed by a strip-shaped mask material. Therefore, since the floating is likely to occur in the middle of the belt-shaped mask material, the effect of reducing the defect rate by providing the supporting member to prevent the floating, improving the deposition accuracy, and being effective is remarkable.
[0029]
In the liquid jet head according to the aspect of the invention, when the electrode non-forming portion that crosses the common external electrode forming region on the surface is provided in a direction orthogonal to the column direction of the piezoelectric vibrator, the electrode non-forming portion is It will be formed by a support member provided on the mask material. Therefore, it is possible to effectively prevent the intermediate portion of the mask material provided along the row direction of the piezoelectric vibrators from being lifted, and to further improve the deposition accuracy.
[0030]
In the liquid ejecting head according to the aspect of the invention, when only one electrode non-forming portion and the thin film portion are provided at the central portion in the column direction of the piezoelectric vibrator, the electrode non-formation portion and the thin film portion are provided along the column direction of the piezoelectric vibrator. The center of the mask material, which is most likely to float, is effectively prevented from being lifted, and the piezoelectric element unit is improved in the deposition accuracy. In addition, the variation in the driving voltage applied to the piezoelectric vibrator due to the position of each of the piezoelectric vibrators arranged in a row is reduced compared to the case where a plurality of thin film portions are provided, and each piezoelectric vibrator can be displaced uniformly. .
[0031]
In the liquid ejecting head according to the aspect of the invention, the common external electrode has a mask material disposed in a boundary region between the individual external electrode formation region on the free end side of the piezoelectric diaphragm surface and the common external electrode formation region on the fixed end side. When the thin film portion is formed at a location corresponding to the support member that crosses the common external electrode formation region provided on the mask material, the deposition accuracy is improved. Thus, the defect rate can be reduced by forming the external electrodes with higher accuracy.
[0032]
DETAILED DESCRIPTION OF THE INVENTION
Next, embodiments of the present invention will be described in detail.
[0033]
1A and 1B are diagrams showing a piezoelectric element unit 1 using a piezoelectric element forming member of the present invention, wherein FIG. 1A is a perspective view and FIG. 1B is a side view.
[0034]
The piezoelectric element unit 1 has a piezoelectric vibration plate 23 as a piezoelectric vibrator forming member in which a plurality of piezoelectric vibrators 14 are formed in a row, and a tip portion which is one end of the piezoelectric vibration plate 23 as a free end. The stationary substrate 15 has a fixed substrate 15 on which the inactive region (region unrelated to the displacement of the piezoelectric vibrator 14) on the fixed end side is fixed with the rear end portion on the other end side as a fixed end. The piezoelectric element unit 1 is incorporated in, for example, a liquid ejecting head typified by an ink jet recording head, and used for a liquid ejecting head such as an ink jet recording apparatus.
[0035]
The piezoelectric vibration plate 23 includes the piezoelectric material layer 8 and the internal electrodes constituting the two poles of the piezoelectric vibrator 14, that is, the individual internal electrodes 12 constituting the individual electrodes electrically independent of the adjacent piezoelectric vibrator 14, A common internal electrode 11 that constitutes a common electrode that is electrically common to adjacent piezoelectric vibrators 14 is formed by being alternately stacked with the piezoelectric material layer 8 interposed therebetween.
[0036]
A plurality of slits 25 are formed in the piezoelectric diaphragm 23 by a wire saw or the like. The slits 25 extend from the free end side where the individual internal electrodes 12 are present to at least the rear end of the individual internal electrodes 12. Is formed. By forming the slit 25, the tip of the piezoelectric vibration plate 23 is cut into a comb shape, and a plurality of piezoelectric vibrators 14 are formed in a row. The bottom surface of the slit 25 on the fixed end side is an inclined surface having a deep surface on the piezoelectric diaphragm 23 and a shallow back surface.
[0037]
Here, positioning portions 26 wider than the respective piezoelectric vibrators 14 are formed on both outer sides in the width direction of the rows of the piezoelectric vibrators 14. The positioning portion 26 is provided to position the piezoelectric element unit 1 with high accuracy when the piezoelectric element unit 1 is incorporated into the liquid jet head.
[0038]
The individual internal electrode 12 is slightly exposed on the tip surface side of the piezoelectric material layer 8 and is electrically connected to an individual external electrode 16 described later. The rear end portion of the individual internal electrode 12 extends to just before reaching the inactive region bonded to the fixed substrate 15. On the other hand, the common internal electrode 11 is slightly exposed on the fixed end face side of the piezoelectric material layer 8 and is electrically connected to a common external electrode 17 described later. The front end of the shared internal electrode 11 extends to a little before reaching the front end of the piezoelectric material layer 8.
[0039]
A region where the individual internal electrode 12, the common internal electrode 11, and the piezoelectric material layer 8 are stacked is the piezoelectric vibrator 14 in the active region. When a voltage is applied to the individual internal electrode 12 and the common internal electrode 11, the piezoelectric material layer 8. Extensive displacement is exhibited by piezoelectric deformation. On the other hand, a region where the individual internal electrode 12 does not exist is an inactive region that is not related to displacement, and the piezoelectric vibrator 14 expands and contracts in a state in which this portion is fixed to the fixed substrate 15. The part vibrates.
[0040]
An individual external electrode 16 is formed on the free end side of the piezoelectric diaphragm 23, that is, the front end side where the individual internal electrode 12 is exposed, and a common external electrode is formed on the fixed end side, ie, the rear end side where the common internal electrode 11 is exposed. 17 is formed. In the boundary region between the region where the individual external electrode 16 is formed and the region where the common external electrode 17 is formed, a strip-shaped electrode non-forming region 9 extending in the column direction of the piezoelectric vibrator 14 is formed. In addition, on the surfaces of the outer positioning portions 26, electrode non-formation regions 5 are formed so as to be continuous with the electrode non-formation regions 9 and along both sides of the piezoelectric diaphragm 23.
[0041]
The individual external electrode 16 on the free end side is provided in a continuous layer shape from the surface of the piezoelectric diaphragm 23 to the end surface of the free end, and is electrically connected to the individual internal electrode 12 exposed on the end surface of the free end. The individual external electrode 16 extends to the fixed end side on the surface of each piezoelectric vibrator 14 and is connected to the flexible cable 18 at the fixed end side portion.
[0042]
The common external electrode 17 on the fixed end side is provided in a continuous layer shape from the surface of the piezoelectric diaphragm 23 to the end surface of the fixed end, and is electrically connected to the common internal electrode 11 exposed on the end surface of the fixed end. Further, in a region where the common external electrode 17 is formed on the surface of the piezoelectric diaphragm 23, the electrode non-forming portion 2 is formed across the region. The electrode non-forming portion 2 that crosses the region where the common external electrode 17 is formed on the surface is provided in a direction orthogonal to the column direction of the piezoelectric vibrators 14.
[0043]
Further, the common external electrode 17 on the end face of the fixed end is formed with a thin film portion 3 that is thinner than other portions so as to be continuous with the electrode non-forming portion 2. In this example, only one electrode non-forming portion 2 and one thin film portion 3 are provided at the center in the column direction of the piezoelectric vibrator 14. The common external electrode 17 is connected to the flexible cable 18 at both sides of the common external electrode 17 divided by the electrode non-forming part 2 and the thin film part 3.
[0044]
As described later, the common external electrode 17 is a boundary region between a region where the individual external electrode 16 on the free end side of the surface of the piezoelectric diaphragm 23 is formed and a region where the common external electrode 17 on the fixed end side is formed. That is, it is formed by vapor deposition of the external electrode forming material in a state where the mask material 4 (see FIGS. 3 to 4) is disposed in the electrode non-formation region 9. The thin film portion 3 is formed continuously to the support member 6 that crosses the formation region of the common external electrode 17 provided on the mask material 4, that is, at a position corresponding to the support member 6.
[0045]
The electrode non-forming part 2 and the thin film part 3 may be formed so as to be arranged in a plurality in the column direction of the piezoelectric vibrators 14. In addition, the thin film portion 3 is a region where the film thickness of the electrode is thinner than other portions of the common external electrode 17, but the electrode layer may not be formed at all. It is included in the “thin film portion”. When no electrode film is formed on the thin film portion 3, the common internal electrode 11 is exposed at this portion.
[0046]
FIG. 2 is a diagram illustrating an example of the liquid jet head 10 in which the piezoelectric element unit 1 is used.
[0047]
The liquid ejecting head 10 is configured by joining a flow path unit 33 in which a nozzle 31 and a pressure generating chamber 32 are formed, and a head case 35 in which the piezoelectric vibrator 14 is accommodated.
[0048]
The flow path unit 33 includes a flow path forming plate in which a space corresponding to a nozzle plate 36 in which the nozzles 31 are formed, a storage chamber 37 common to the pressure generation chamber 32, and a supply path 38 that communicates these. 44 and a diaphragm 40 that closes the opening of the pressure generating chamber 32 are laminated.
[0049]
The piezoelectric vibrator 14 is a vibrator in a longitudinal vibration mode that contracts in the longitudinal direction in a charged state in response to the input of a drive signal and extends in the longitudinal direction in the process of discharging from the charged state. The piezoelectric vibrator 14 has the tip fixed to the island 40A of the diaphragm 40 that forms a part of the pressure generating chamber 32, and the other end is fixed to the fixed substrate 15, and the piezoelectric element unit 1 described above is fixed. It is composed.
[0050]
The head case 35 is formed with a head flow path 34 for introducing a liquid such as an ink cartridge into the storage chamber 37 at a portion corresponding to the storage chamber 37. A supply pipe 43 is formed at the opening edge of the head flow path 34.
[0051]
In the liquid ejecting head 10, the pressure generating chamber 32 expands and contracts in response to the contraction / extension of the piezoelectric vibrator 14, and the suction of liquid such as ink and the discharge of liquid droplets are caused by the pressure fluctuation in the pressure generating chamber 32. To be done. Reference numeral 18 denotes a flexible cable for inputting a drive signal to the piezoelectric vibrator 14.
[0052]
Next, a method for manufacturing the piezoelectric element unit 1 will be described.
[0053]
That is, first, as shown in FIG. 3, a piezoelectric diaphragm 23 is prepared in which individual internal electrodes 12 and common internal electrodes 11 are alternately stacked with the piezoelectric material layer 8 interposed therebetween.
[0054]
The piezoelectric diaphragm 23 is formed by laminating an electrode material sheet to be the individual internal electrode 12, an electrode material sheet to be the common internal electrode 11, a piezoelectric material sheet such as lead zirconate titanate (PZT) to be the piezoelectric material layer 8, It was obtained by firing. In this state, the individual internal electrode 12 is exposed at an end face that is a free end of the piezoelectric diaphragm 23, and the common internal electrode 11 is exposed at an end face that is a fixed end of the piezoelectric diaphragm 23.
[0055]
Next, a mask material 4 having a predetermined shape made of a stainless steel sheet material or the like is disposed on the surface of the piezoelectric diaphragm 23. The mask material 4 includes the piezoelectric vibrator 14 in a boundary region between a region where the individual external electrode 15 on the free end side of the surface of the piezoelectric diaphragm 23 is formed and a region where the common external electrode 17 on the fixed end side is formed. It has the strip | belt-shaped part 7 extended in the row direction. Further, the mask material 4 extends from the center of the belt-like portion 7 toward the fixed end side, crosses the region where the common external electrode 17 is formed, and the piezoelectric diaphragm from both ends of the belt-like portion 7. 23 and a side portion 27 extending toward the free end side along both sides.
[0056]
Next, as shown in FIG. 4, in the state where the mask material 4 is disposed on the piezoelectric diaphragm 23, the surface of the piezoelectric diaphragm 23 is used as an external electrode forming material such as chromium, nickel, gold, platinum, or copper. By depositing a conductive material, the individual external electrode 16 and the common external electrode 17 are formed in a portion not covered with the mask material 4.
[0057]
At this time, the mask material 4 has a band-like portion 7 extending in the column direction of the piezoelectric vibrator 14, and the support member 6 is arranged in a direction perpendicular to the column direction at the center in the column direction of the piezoelectric vibrator 14. Only one is provided. For this reason, since it is easy to raise in the middle part of the belt-like part 7, the support member 6 effectively prevents the floating, and the deposition accuracy is improved and the defect rate is reduced.
[0058]
During the vapor deposition, the central portion of the end face on the fixed end side of the piezoelectric vibration plate 23 is hidden by the support member 6, so that the thin film portion 3 is formed with less adhesion of the vapor deposition material in this region. The Further, when the mask material 4 is removed after vapor deposition, the electrode non-formation region 9 is formed in a portion hidden in the band-like portion 7 of the mask material 4, and the electrode non-formation region 5 is formed in a portion hidden in the side portion 27. Is done. In addition, the electrode non-forming portion 2 is formed in a portion hidden by the support member 6.
[0059]
After that, after fixing the inactive region on the fixed end side to the fixed substrate 15, the slit 25 is formed by a wire saw or the like from the free end side where the individual electrode of the piezoelectric diaphragm 23 exists to the rear end of the individual electrode. Thus, the piezoelectric element unit 1 in which the rows of the piezoelectric vibrators 14 are formed is obtained (see FIG. 1).
[0060]
As described above, in the present embodiment, the belt-like portion 7 of the mask material 4 disposed in the boundary region between the region where the individual external electrode 16 is formed and the region where the common external electrode 17 is formed is formed on the support member 6. Lifting and bending due to weight are prevented. Further, the presence of the belt-like portion 7 creates a space for placing a pressing member for pressing the mask material 4 against the piezoelectric diaphragm 23, and can more effectively prevent the lifting. In this case, by making the width dimension of the support member 6 larger than the width dimension of the belt-like portion 7, it becomes easier to place the pressing member, which is more effective.
[0061]
In this way, the vapor deposition material can be prevented from wrapping around the boundary region, thereby preventing the occurrence of a short circuit. In particular, when the width of the region masked by the mask material 4 is reduced by reducing the portion not directly related to the piezoelectric vibration of the piezoelectric vibrating body, the mask material 4 having a substantially U shape is used. Is effective. Moreover, the supporting member 6 can be easily held during the vapor deposition step, and the mask material 4 can be positioned and arranged with high accuracy. Thus, the defect rate can be reduced by improving the deposition accuracy and forming the external electrodes with higher accuracy.
[0062]
5 to 7 show a second embodiment of the manufacturing method of the present invention.
[0063]
In this embodiment, a plurality of piezoelectric diaphragms 23 are arranged and vapor deposition is performed simultaneously. That is, first, a plurality of piezoelectric diaphragms 23 similar to those of the first embodiment are prepared, and as shown in FIG. 5, the plurality of piezoelectric diaphragms 23 are arranged at the free ends, that is, the tip side where the individual internal electrodes 12 are exposed ( The upper side in the figure and the fixed end, that is, the rear end side (the lower side in the figure) from which the common internal electrode 11 is exposed are arranged side by side. In the figure, three are arranged.
[0064]
The mask material 28 covers the plurality of arranged piezoelectric diaphragms 23 at the same time, and includes a first opening 29 for forming the individual external electrodes 16 and a second opening for forming the common external electrodes. 30 is formed. In order to form the external electrode layer on each piezoelectric diaphragm 23 with high accuracy using the mask material 28, it is necessary to position each piezoelectric diaphragm 23 with high accuracy. Therefore, each piezoelectric diaphragm 23 is positioned on a base (not shown) provided with a gripping member or the like for positioning and gripping the piezoelectric diaphragm 23, and the mask material 28 is arranged in that state.
[0065]
A portion that partitions the first opening 29 and the second opening 30 corresponds to the band-shaped portion 9, and portions that cover both sides of the piezoelectric diaphragm 23 on both sides of the first opening 29 are the side portions 27. It corresponds to.
[0066]
The second opening 30 is divided into a region where the right side on the fixed end side of the piezoelectric diaphragm 23 is exposed and a region where the left side is exposed. That is, the support member 6 is in a state in which the opening edges are connected across the second opening 30. That is, the support member 6 connects the band-like portion 7 to the partition portion 39 that partitions the first opening 29 and the second opening 30 in a region where the free end and the fixed end of the piezoelectric diaphragm 23 face each other. ing.
[0067]
From this state, as shown in FIG. 6, the mask material 4 is deposited on the surface of the piezoelectric vibration plate 23 in a state where the mask material 4 is disposed on the piezoelectric vibration plate 23. An individual external electrode 16 and a common external electrode 17 are formed in a portion not covered with the material 4.
[0068]
At this time, the mask material 4 has a band-like portion 7 extending in the column direction of the piezoelectric vibrator 14, and the support member 6 is arranged in a direction perpendicular to the column direction at the center in the column direction of the piezoelectric vibrator 14. Only one is provided. For this reason, since it is easy to raise in the middle part of the belt-like part 7, the support member 6 effectively prevents the floating, and the deposition accuracy is improved and the defect rate is reduced.
[0069]
As shown in FIG. 7, during the vapor deposition, the central portion of the end face on the fixed end side of the piezoelectric diaphragm 23 is hidden by the support member 6. The thin film portion 3 is formed. Further, when the mask material 4 is removed after vapor deposition, the electrode non-formation region 9 is formed in a portion hidden in the band-like portion 7 of the mask material 4, and the electrode non-formation region 5 is formed in a portion hidden in the side portion 27. Is done. In addition, the electrode non-forming portion 2 is formed in a portion hidden by the support member 6.
[0070]
After that, after fixing the inactive region on the fixed end side to the fixed substrate 15, the slit 25 is formed by a wire saw or the like from the free end side where the individual electrode of the piezoelectric diaphragm 23 exists to the rear end of the individual electrode. Thus, the piezoelectric element unit 1 in which the rows of the piezoelectric vibrators 14 are formed is obtained (see FIG. 1).
[0071]
As described above, in the present embodiment, when a plurality of piezoelectric diaphragms 23 are arranged and vapor deposition is simultaneously performed on a large number of piezoelectric diaphragms 23 using the mask material 28 covering them, two arranged piezoelectric diaphragms are arranged. Since the support member 6 is provided so as to cross the second opening 30 formed in the region between the diaphragms 23, the piezoelectric vibrator 14 is interposed between the first opening 29 and the second opening 30. It is possible to effectively prevent the band-shaped portion 7 of the mask material 28 provided in a band shape along the column direction from being lifted up. And even when many are vapor-deposited simultaneously, vapor-deposition accuracy can be improved effectively.
[0072]
In each of the above embodiments, the piezoelectric element unit and the liquid ejecting head of the present invention are applied to an ink jet recording head. However, the piezoelectric element unit and the liquid ejecting head of the present invention are for an ink jet recording apparatus. In this case, glue, nail polish, conductive liquid (liquid metal) or the like can be ejected. Furthermore, a recording head used for an image recording apparatus such as a printer, a color material ejecting head used for manufacturing a color filter such as a liquid crystal display, an organic EL display, and an electrode material used for forming an electrode such as an FED (surface emitting display). The present invention can also be applied to all liquid ejecting heads that discharge liquid, such as bio-organic ejecting heads used in head and biochip manufacturing. In these cases, the same effects can be obtained.
[0073]
【The invention's effect】
As described above, according to the method of manufacturing a piezoelectric element forming member of the present invention, the mask material arranged in the boundary region between the individual external electrode forming region and the common external electrode forming region is lifted or bent by the weight of the support member. Is prevented, and the vapor deposition material can be prevented from entering the boundary region, thereby preventing the occurrence of a short circuit. In particular, when the width dimension of the area masked with the mask material is reduced by reducing the portion not directly related to the piezoelectric vibration of the piezoelectric vibrating body, or the mask material having a substantially U shape is used. It is effective in the case. In addition, the supporting member can be easily held during the vapor deposition step, and the mask material can be positioned and arranged with high accuracy. Thus, the defect rate can be reduced by improving the deposition accuracy and forming the external electrodes with higher accuracy.
[0074]
Further, according to the piezoelectric element forming member, the piezoelectric element unit, and the liquid ejecting head of the present invention, the electrode non-forming portion that crosses the common external electrode forming region is formed when the common external electrode is formed by vapor deposition. It is formed by a support member provided on a mask material arranged in a boundary region between the region and the common external electrode formation region. Further, the thin film portion is formed corresponding to the support member. Therefore, during vapor deposition, the mask material disposed in the boundary region between the individual external electrode formation region and the common external electrode formation region is prevented from being lifted or bent by the weight of the support member, and the vapor deposition material wraps around the boundary region. Therefore, the piezoelectric element unit can be prevented from being short-circuited. In particular, when the width dimension of the area masked with the mask material is reduced by reducing the portion not directly related to the piezoelectric vibration of the piezoelectric vibrating body, or the mask material having a substantially U shape is used. It is effective in the case. In addition, the supporting member can be easily held during the vapor deposition step, and the mask material can be positioned and arranged with high accuracy. Thus, the defect rate can be reduced by improving the deposition accuracy and forming the external electrodes with higher accuracy.
[Brief description of the drawings]
1A and 1B are diagrams showing a piezoelectric element unit of the present invention, wherein FIG. 1A is a perspective view and FIG. 1B is a side view.
FIG. 2 is a cross-sectional view showing a recording head of the present invention.
3A and 3B are diagrams showing a manufacturing process of the piezoelectric element unit of the present invention, where FIG. 3A is a plan view and FIG. 3B is a side view.
4A and 4B are diagrams showing a manufacturing process of the piezoelectric element unit of the present invention, where FIG. 4A is a plan view, FIG. 4B is a cross-sectional view, and FIG. 4C is a front view.
FIG. 5 is a plan view showing a second example of the manufacturing process of the piezoelectric element unit of the present invention.
FIG. 6 is a plan view showing a second example of the manufacturing process of the piezoelectric element unit of the present invention.
FIG. 7 is a plan view showing a second example of the manufacturing process of the piezoelectric element unit of the present invention.
8A and 8B are diagrams showing a conventional piezoelectric element unit, in which FIG. 8A is a plan view and FIG. 8B is a side view.
9A and 9B are diagrams showing a manufacturing process of a conventional piezoelectric element unit, where FIG. 9A is a plan view and FIG. 9B is a side view.
10A and 10B are diagrams showing a manufacturing process of a conventional piezoelectric element unit, where FIG. 10A is a plan view and FIG. 10B is a side view.
[Explanation of symbols]
1 Piezoelectric element unit
2 Electrode non-formation part
3 Thin film part
4 Mask material
5 Electrode non-formation area
6 Support members
7 Strip
8 Piezoelectric material layer
9 Electrode non-formation area
10 Liquid jet head
11 Common internal electrode
12 Individual internal electrodes
13 Piezoelectric material
14 Piezoelectric vibrator
15 Fixed substrate
16 Individual external electrodes
17 Common external electrode
18 Flexible cable
19 Oscillator group
20 Conductive material (individual internal)
21 Conductive material (common internal)
22 Piezoelectric material
23 Piezoelectric diaphragm
24 Mask material
25 slits
26 Positioning part
27 Sides
28 Mask material
29 First opening
30 Second opening
31 nozzles
32 Pressure generation chamber
33 Channel unit
34 Head flow path
35 head case
36 Nozzle plate
37 Reservoir
38 Supply path
39 Partition
40 Diaphragm
40A island
43 Supply pipe
44 Flow path forming plate

Claims (5)

On the surface of the piezoelectric diaphragm in which individual internal electrodes and common internal electrodes are alternately stacked with a piezoelectric material sandwiched between them, individual external electrodes that conduct to the individual internal electrodes and common external electrodes that conduct to the common internal electrodes are respectively layered A method of manufacturing a piezoelectric element forming member formed in
The the individual external electrode formation region of the piezoelectric diaphragm surface, forming an external electrode by depositing an external electrode forming material is arranged a mask material in the boundary area between the common external electrode formation region, the external electrodes Forming a slit in the piezoelectric diaphragm after forming the plurality of piezoelectric vibrators in a row, and
The mask material has a support member that crosses the common external electrode formation region, and has a strip-like portion that extends linearly in the column direction in which the plurality of piezoelectric vibrators are formed from one end to the other end of the surface of the piezoelectric diaphragm. A method for manufacturing a piezoelectric element forming member.   The method for manufacturing a piezoelectric element forming member according to claim 1, wherein the support member is provided in a direction orthogonal to a row direction in which the plurality of piezoelectric vibrators are formed.   3. The method for manufacturing a piezoelectric element forming member according to claim 2, wherein only one supporting member is provided at a central portion in a column direction where the plurality of piezoelectric vibrators are formed.   The width dimension in the column direction in which the piezoelectric vibrator of the support member is formed is larger than the width dimension in the direction perpendicular to the column direction in which the piezoelectric vibrator of the band-shaped part is formed. The manufacturing method of the piezoelectric element formation member as described in any one of 1-3.   A plurality of the piezoelectric diaphragms are arranged side by side so that a front end side where the individual internal electrodes are exposed and a rear end side where the common internal electrodes are exposed are opposed to each other, and the mask material covers the plurality of arranged piezoelectric diaphragms simultaneously. A first opening for forming individual external electrodes and a second opening for forming a common external electrode are formed, and the support member has an opening edge across the second opening. The manufacturing method of the piezoelectric element formation member as described in any one of Claims 1-4 which has connected mutually.

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