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JP4497600B2 - Control method for constant power output DC power supply - Google Patents
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JP4497600B2 - Control method for constant power output DC power supply - Google Patents

Control method for constant power output DC power supply Download PDF

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Publication number
JP4497600B2
JP4497600B2 JP30672499A JP30672499A JP4497600B2 JP 4497600 B2 JP4497600 B2 JP 4497600B2 JP 30672499 A JP30672499 A JP 30672499A JP 30672499 A JP30672499 A JP 30672499A JP 4497600 B2 JP4497600 B2 JP 4497600B2
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Prior art keywords
output
power supply
power
outputs
positive
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JP2001128452A (en
Inventor
寛史 城
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Shindengen Electric Manufacturing Co Ltd
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Shindengen Electric Manufacturing Co Ltd
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Description

【0001】
【発明の属する分野】
本発明は、スイッチング電源装置に関するもので、特に定電力出力を給電する直流電源装置及びその出力電力制御に関するものである。
【0002】
【従来技術】
成膜装置等の電源装置には、従来、図3に示すような回路構成のスイッチング電源を使用している。図3において、1はスイッチング変換部で、D0は整流ダイオード、C1
は平滑コンデンサ、Q1〜Q4はパワートランジスタで4個でフルブリッジを形成し、
D1とD2は、夫々トランジスタQ3とQ4に対し逆導通方向に接続されたダイオード、
2は変換部の出力トランス、3はトランス出力の整流ダイオード、4と5は夫々、平滑フィルター用リアクトルとコンデンサである。
【0003】
成膜装置を制御するには定電力制御が必要であり、従って電源装置の出力特性は、図5に示すような特性になる。図5でVo は電源装置の出力電圧、Ioは出力電流である。
V1とI2は夫々、最大出力電圧と最大出力電流である。V2とI1は夫々、定電力特性の両端に位置する出力電圧と出力電流である。従ってA、B間が定電力範囲である。
図5において、例えばV1=500V、I2=40Aとすると、電源装置の出力容量は20KW(V1×I1)となるが、実際には、定電力制御を行っているため、この装置の最大出力はI1×V1(=I2×V2)で、I1=20A、V2=250Vとすると10KWとなる。
【0004】
従って出力トランスは20KWの容量をもちながら、10KWで使われているにすぎず、利用率が悪い。一方トランジスタQ1〜Q4等で構成されるスイッチング部は、パワートランジスタQ1〜Q4がフルブリッジに構成され、一定周期T(図4)で、よく知られているパルス巾制御(PWM)を行っている。図4において(a)〜(d)の波形はQ1〜Q4がオン状態にあることを示し、フルブリッジの出力(トランスの1次入力)は(e)の波形で示される、パルス巾tのパルス出力になる。定電力出力のため、電源装置出力電流が最大値になるときは、出力電圧が低くなり、従ってパルス巾tも小さくなるため、この電圧を整流して(波形(f))、平滑するときに、平滑用フィルタが大きくなる。
上記のように、従来の制御方式ではトランスの利用率が低く、フィルタが大きくなる等の欠点があった。
【0005】
【解決すべき課題】
本発明は、上記のような欠点を改善するためのもので、トランスの利用率を高め、出力電圧のリップル分の発生要因を低減し、トランスや平滑フィルタの小型化を計り、さらには電源装置の小型化を可能とする電源装置及びその制御方式を提供するものである。
【0006】
【解決手段】
上記課題を解決するため、請求項1の発明はパルス巾制御波形を出力するスイッチング変換部と、出力トランスと、前記出力トランスの出力を整流する整流平滑部を有する定電力出力直流電源装置を2台備え、一方の該電源装置の出力負端子と、他方の該電源装置の出力正端子間にスイッチ素子を接続し、又、該夫々電源装置の出力正端子間及び出力負端子間に夫々一方の該電源装置の出力端子側をカソードとする極性にダイオードを接続し、該一方の電源装置の出力正端子と他方の電源装置の出力負端子間より平滑用フィルタを経て直流定電力を給電するようにしたことを特徴とするもので、この構成により、夫々の回路の部品、特にトランスは自己のもつ容量を100%利用でき、その利用率の高さからトランスの小型化ができ、又、出力波形の変化分の少ないことから出力フィルタも小型化できる。又電源装置の構成において、比較的、大きさと重量の比率の大きいこれらの部品の小型化により電源装置の小型化ができる。
【0007】
上記課題を解決するため、請求項2の発明は、請求項1の構成の電源装置において、該夫々スイッチング変換部を同期運転せしめると共に夫々出力パルス巾を180°導通巾となし、且つ、各出力サイクルの始めに該スイッチ素子をONとして該夫々電源装置の出力を直列接続して電力を給電し、又、各出力サイクルの所定時間後、該スイッチ素子をOFFせしめて該夫々電源装置の出力を並列接続して電力を給電するようにしたことを特徴とする制御方式であり、この制御によりトランスは常時180°出力状態のため、自己のもつ容量を100%利用でき、又、各出力の出力サイクルの始めにスイッチ素子を、
ONすることにより直列接続から並列接続時又は並列接続から直列接続時におけるダイオード、11、12のリカバリ電流による制御の不安定化を防止できる。
【0008】
【実施の態様】
図1は、本発明の実施例を示す回路で、1-1と1-2は従来のスイッチング変換部1と同じ構成をもつスイッチング変換部、6はスイッチング変換部1-1の出力トランス、7はトランス6の出力の整流ダイオード、8はスイッチング変換部1-2の出力トランス、9はトランス8の出力の整流ダイオード、10は整流ダイオード7の出力の負側と整流ダイオード9の出力の正側を接続する高速のスイッチ(例えばパワートランジスタ)、11と12は2ケの変換回路の出力をこれらを介して並列運転できるように接続されたダイオード、13は同一鉄心に巻かれた二巻線をもつリアクトルで夫々の巻線を並列運転された正負各ラインに挿入されていて、コンデンサ14とともに平滑フィルタを構成する。
【0009】
図1の回路の動作波形を図2に示す。図1において、変換回路1-1と1-2は全く同じタイミングで、最大制御角(ほぼ180°)の状態で動作をさせる。従って、夫々の出力側の整流ダイオードで整流された波形は全く同一のものとなる(図2(a)、(b))。スイッチ
10が動作してないと、この2つの出力はダイオード12,13を介して並列運転状態となり、又、スイッチ10が動作しオン状態になると、この2つの出力はスイッチ10を介して直列運転状態となり、電源装置としての出力電圧Voは一回路出力電圧の2倍の電圧になる。
【0010】
これらの動作状態を使って次のような制御を行わせる。図2(c) に示すように、各出力サイクルの初めto でスイッチ10をオンにすると、整流ダイオード7の出力電圧V1
と整流ダイオード9の出力電圧V2(但しV1=V2)が直列接続され、合成出力電圧は
V1+V2となる。時間tsの後、t1 の時点でスイッチ10をOFFにする。その時点から2つの回路は並列となり合成出力電圧はV1(=V2)となり、その状態で出力サイクルの終わりt2 まで続く(tp期間)。t2 から次のサイクルの初めt’ 0 までの期間tr は、スイッチング変換部1-1と1-2におけるスイッチ動作を安定に行わせるための動作時間で、極めて短い時間である。t1 は制御可能な時間で、必要な総合出力電圧V0 (平均値)になるように制御する。
【0011】
従って合成された出力電圧はt1 がt2 と等しくなったとき最大となり
V0 max=2V1 (=2V2)、t1がt0になったとき最小となりV0min=
V1(=V2)である。従って出力電圧V0はV1から2V1までの間制御可能である。又出力の平滑フィルタの入力の電圧波形は、図2(d) に示すように、全出力サイクルに亘って電圧波高値の1/2 がベースにあり、出力リップルの要因となる制御部分が波高値の1/2 であるので、図4の波形(f)と較べて分かるように、本質的にリップル成分の少ない波形となり、従って出力の平滑フィルタも小さくてよい。
【0012】
電流については、図5に示すような定電力制御をするため、最大電流が流れるときは、出力電圧が最小で、従って出力サイクル全期間で2つの回路が並列となり、1つの回路では最大出力電流の1/2 を分担する容量があればよい(実際には出力電圧が増加したとき、直列期間が入っているため、最大所要電流容量は約20%大きくなる)。上記のように、トランスは常時ほぼ180°出力状態にあり、又、その状態で最大電流まで流すので、自己のもつ容量を100%利用できる。
【0013】
【発明の効果】
上記の説明のように、定電力出力特性をもつ直流電源装置の変換回路において、2つの変換回路出力の直・並列動作で出力電力制御を行わせることにより、2つの回路夫々は常時180°の期間出力している動作のため、夫々の回路の部品、特にトランスは自己のもつ容量を100%利用でき、その利用率の高さからトランスの小型化ができ、又、出力波形の変化分が少ないことから出力フィルタも小型化できる。電源装置の構成において、比較的、大きさと重量の比率の大きいこれらの部品の小型化により電源装置の小型化ができる。
【図面の簡単な説明】
【図1】 本発明の実施例回路図
【図2】 本発明実施例の動作波形図
【図3】 従来回路図
【図4】 従来回路の動作波形図
【図5】 定電力直流電源装置の出力特性図
【符号の説明】
1−1,1−2 : スイッチンク変換部
6,8 : 出力トランス
7,9 : 整流ダイオード
10 : スイッチ素子
11,12 : ダイオード
13 : リアクトル
14 : コンデンサ
[0001]
[Field of the Invention]
The present invention relates to a switching power supply apparatus, and more particularly to a DC power supply apparatus that supplies a constant power output and its output power control.
[0002]
[Prior art]
Conventionally, a switching power supply having a circuit configuration as shown in FIG. 3 is used for a power supply apparatus such as a film forming apparatus. In FIG. 3, 1 is a switching converter, D0 is a rectifier diode, C1
Is a smoothing capacitor, Q1 to Q4 are power transistors and form a full bridge with 4
D1 and D2 are diodes connected in the reverse conduction direction with respect to the transistors Q3 and Q4, respectively.
Reference numeral 2 denotes an output transformer of the conversion unit, 3 denotes a rectifier diode of the transformer output, and 4 and 5 denote a smoothing filter reactor and a capacitor, respectively.
[0003]
In order to control the film forming apparatus, constant power control is necessary. Therefore, the output characteristics of the power supply apparatus are as shown in FIG. In FIG. 5, Vo is the output voltage of the power supply device, and Io is the output current.
V1 and I2 are the maximum output voltage and the maximum output current, respectively. V2 and I1 are the output voltage and output current located at both ends of the constant power characteristic, respectively. Therefore, the constant power range is between A and B.
In FIG. 5, for example, if V1 = 500 V and I2 = 40 A, the output capacity of the power supply device is 20 kW (V1 × I1). If I1 × V1 (= I2 × V2), I1 = 20A, and V2 = 250V, 10KW is obtained.
[0004]
Therefore, the output transformer has a capacity of 20 KW and is only used at 10 KW, and the utilization rate is poor. On the other hand, in the switching section composed of the transistors Q1 to Q4, etc., the power transistors Q1 to Q4 are configured as a full bridge, and a well-known pulse width control (PWM) is performed at a constant period T (FIG. 4). . In FIG. 4, the waveforms (a) to (d) indicate that Q1 to Q4 are in the ON state, and the output of the full bridge (primary input of the transformer) has the pulse width t indicated by the waveform (e). Pulse output. When the power supply device output current reaches the maximum value due to constant power output, the output voltage becomes low, and therefore the pulse width t also becomes small. When this voltage is rectified (waveform (f)) and smoothed, The smoothing filter becomes larger.
As described above, the conventional control method has disadvantages such as a low utilization factor of the transformer and a large filter.
[0005]
【task to solve】
The present invention is intended to improve the above-mentioned drawbacks, increase the utilization factor of the transformer, reduce the factor of the output voltage ripple, reduce the size of the transformer and smoothing filter, and further provide a power supply device. The power supply apparatus and its control system that can be miniaturized are provided.
[0006]
[Solution]
In order to solve the above-mentioned problems, the invention of claim 1 provides two constant power output DC power supply units each having a switching converter that outputs a pulse width control waveform, an output transformer, and a rectifying and smoothing unit that rectifies the output of the output transformer. A switch element is connected between the output negative terminal of one of the power supply devices and the output positive terminal of the other power supply device, and one is connected between the output positive terminals and the output negative terminals of the power supply devices. A diode is connected in a polarity with the output terminal side of the power supply device as a cathode, and DC constant power is fed between the output positive terminal of the one power supply device and the output negative terminal of the other power supply device through a smoothing filter. With this configuration, each circuit component, particularly the transformer, can use 100% of its own capacity, and the transformer can be downsized due to its high utilization rate. Output wave Also it can be miniaturized output filter since little of variation. Further, in the configuration of the power supply device, the power supply device can be downsized by downsizing these components having a relatively large size to weight ratio.
[0007]
In order to solve the above-mentioned problems, the invention according to claim 2 is the power supply device according to claim 1, wherein the switching converters are operated synchronously, the output pulse width is 180 ° conduction width, and each output At the beginning of the cycle, the switch elements are turned on to connect the outputs of the respective power supply devices in series to supply power. After a predetermined time of each output cycle, the switch elements are turned off to turn off the outputs of the respective power supply devices. It is a control method characterized by supplying power by connecting in parallel. By this control, the transformer is always 180 ° output state, so that its own capacity can be used 100%, and the output of each output Switch element at the beginning of the cycle,
By turning it ON, it is possible to prevent instability of control due to the recovery current of the diodes 11 and 12 from the series connection to the parallel connection or from the parallel connection to the series connection.
[0008]
Embodiment
FIG. 1 is a circuit showing an embodiment of the present invention, wherein 1-1 and 1-2 are switching converters having the same configuration as the conventional switching converter 1, 6 is an output transformer of the switching converter 1-1, 7 Is an output rectifier of the switching converter 1-2, 9 is a rectifier diode of the output of the transformer 8, 10 is a negative side of the output of the rectifier diode 7, and a positive side of the output of the rectifier diode 9 A high-speed switch (for example, a power transistor), 11 and 12 are diodes connected so that the outputs of two conversion circuits can be operated in parallel through these, and 13 is a two-winding coil wound around the same iron core. Each of the windings is inserted into each of the positive and negative lines operated in parallel by a reactor having a smoothing filter together with the capacitor 14.
[0009]
FIG. 2 shows operation waveforms of the circuit of FIG. In FIG. 1, the conversion circuits 1-1 and 1-2 are operated at the same timing and at the maximum control angle (approximately 180 °). Therefore, the waveforms rectified by the rectifier diodes on the output side are exactly the same (FIGS. 2A and 2B). When the switch 10 is not operating, the two outputs are in parallel operation via the diodes 12 and 13, and when the switch 10 is operating and turned on, the two outputs are connected in series via the switch 10. As a result, the output voltage Vo as the power supply device is twice the output voltage of one circuit.
[0010]
The following control is performed using these operation states. As shown in FIG. 2 (c), when the switch 10 is turned on at the beginning of each output cycle, the output voltage V1 of the rectifier diode 7 is turned on.
And the output voltage V2 of the rectifier diode 9 (where V1 = V2) are connected in series, and the combined output voltage is V1 + V2. After time ts, switch 10 is turned off at time t1. From that point on, the two circuits are in parallel and the combined output voltage is V1 (= V2), and in that state continues until the end of the output cycle t2 (tp period). A period tr from t2 to the beginning t'0 of the next cycle is an operation time for stably performing the switching operation in the switching converters 1-1 and 1-2, and is an extremely short time. t1 is a controllable time and is controlled so as to be a necessary total output voltage V0 (average value).
[0011]
Therefore, the combined output voltage becomes maximum when t1 becomes equal to t2, and becomes V0 max = 2V1 (= 2V2), and becomes minimum when t1 becomes t0, and V0min =
V1 (= V2). Accordingly, the output voltage V0 can be controlled from V1 to 2V1. As shown in Fig. 2 (d), the voltage waveform at the input of the output smoothing filter is based on half of the voltage peak value over the entire output cycle, and the control part that causes output ripple is the wave. Since it is 1/2 of the high value, as can be seen from the waveform (f) in FIG. 4, the waveform has essentially a small ripple component, and therefore the output smoothing filter may be small.
[0012]
As for the current, constant power control as shown in FIG. 5 is performed. Therefore, when the maximum current flows, the output voltage is minimum, and therefore, the two circuits are in parallel throughout the entire output cycle. (In fact, when the output voltage increases, the maximum required current capacity is increased by about 20% because of the series period when the output voltage increases.) As described above, the transformer is always in an almost 180 ° output state, and since the maximum current is allowed to flow in this state, 100% of its own capacity can be used.
[0013]
【The invention's effect】
As described above, in the converter circuit of the DC power supply device having the constant power output characteristic, the output power control is performed by the series / parallel operation of the two converter circuit outputs so that each of the two circuits is always 180 °. Because of the period of output operation, each circuit component, especially the transformer, can use its own capacity 100%, the transformer can be downsized due to its high utilization rate, and the change in the output waveform Since there are few, an output filter can also be reduced in size. In the configuration of the power supply device, the power supply device can be reduced in size by reducing the size of these parts having a relatively large size to weight ratio.
[Brief description of the drawings]
1 is a circuit diagram of an embodiment of the present invention. FIG. 2 is an operation waveform diagram of an embodiment of the present invention. FIG. 3 is a conventional circuit diagram. FIG. 4 is an operation waveform diagram of a conventional circuit. Output characteristics [Explanation of symbols]
1-1, 1-2: Switching converters 6, 8: Output transformers 7, 9: Rectifier diode 10: Switch elements 11, 12: Diode 13: Reactor 14: Capacitor

Claims (1)

パルス巾制御波形を出力するスイッチング変換部と、出力トランスと、前記出力トランスの出力を整流する整流平滑部を有する定電力出力直流電源装置を2台備え、一方の該電源装置の出力負端子と、他方の該電源装置の出力正端子間にスイッチ素子を接続し、又、該夫々電源装置の出力正端子間及び出力負端子間に夫々一方の該電源装置の出力端子側をカソードとする極性にダイオードを接続し、該一方の電源装置の出力正端子と他方の電源装置の出力負端子間に、同一鉄心に巻かれた二巻線を夫々の巻線を並列運転された正負各ラインに挿入されて構成してあるリアクトルと、これらリアクトルの出力間に接続してあるコンデンサとを有する平滑フィルタを設け、該夫々スイッチング変換部を同期運転せしめると共に夫々出力パルス巾を180°導通巾となし、且つ、各出力サイクルの初めに該スイッチ素子をONとして該夫々電源装置の出力を直列接続して電力を給電し、又、各出力サイクルの所定時間後、該スイッチ素子をOFFせしめて該夫々電源装置の出力を並列接続して電力を給電するようにしたことを特徴とする定電力出力直流電源装置の制御方式。   Two constant power output DC power supply devices each having a switching converter that outputs a pulse width control waveform, an output transformer, and a rectifying and smoothing unit that rectifies the output of the output transformer, and an output negative terminal of one of the power supply devices The switching element is connected between the positive output terminals of the other power supply apparatus, and the polarity between the output positive terminals of the power supply apparatus and the negative output terminal is the cathode of the output terminal side of the one power supply apparatus. A diode is connected to the output positive terminal of one power supply device and the output negative terminal of the other power supply device, and two windings wound on the same iron core are connected to each positive and negative line operated in parallel. A smoothing filter having a reactor configured to be inserted and a capacitor connected between the outputs of these reactors is provided, and the switching converters are operated synchronously and the output pulse widths are respectively set. 80 ° conduction width, and at the beginning of each output cycle, the switch elements are turned on to connect the outputs of the power supply units in series to supply power, and after a predetermined time of each output cycle, the switch elements The constant power output DC power supply control method is characterized in that the power is supplied by connecting the outputs of the power supply devices in parallel by turning off the power.
JP30672499A 1999-10-28 1999-10-28 Control method for constant power output DC power supply Expired - Lifetime JP4497600B2 (en)

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US6751107B2 (en) 2002-03-27 2004-06-15 Shindengen Electric Manufacturing Co., Ltd. DC power supply device with constant power output level
JP4798572B2 (en) * 2004-02-09 2011-10-19 新電元工業株式会社 Switching power supply
CN1906837B (en) * 2004-03-18 2011-02-23 三井物产株式会社 DC-DC converter
JP4779573B2 (en) * 2005-10-27 2011-09-28 コニカミノルタビジネステクノロジーズ株式会社 Image forming apparatus
US9369051B2 (en) * 2013-10-02 2016-06-14 Texas Instruments Incorporated Interleaved forward converter with wide input and output dynamic range
CN105634296A (en) * 2016-03-07 2016-06-01 深圳晶福源科技股份有限公司 Electromobile charging power supply with wide-voltage and high-power output
KR20190022203A (en) * 2017-08-25 2019-03-06 주식회사 브이씨텍 Parallel Operation System for Minimizing Filter
WO2025127710A1 (en) * 2023-12-13 2025-06-19 엘지이노텍 주식회사 Power conversion device

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JPH0677442U (en) * 1993-03-31 1994-10-28 株式会社電設 Series-parallel switching circuit
JP3071072B2 (en) * 1993-07-14 2000-07-31 長野日本無線株式会社 DC power supply
JP2605456Y2 (en) * 1993-08-31 2000-07-17 信濃電気株式会社 Inverter circuit
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JP4098868B2 (en) * 1998-01-19 2008-06-11 Tdk株式会社 Switching power supply

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