JP4500918B2 - Microscope system and autofocus system - Google Patents

Description

【００５０】
例えば表１のような特性をもつ対物レンズ７が５０Ｘから１００Ｘへの対物レンズ変換を行うとすると、ステージ１の可動範囲は以下のような要素で決定できる。そのモデルを示したものが図８である。
【００５１】
ア）対物レンズ間同焦差Ｄ１
イ）焦点深度Ｄ２
ウ）作動距離（ＷＤ）Ｄ３
同図のように５０Ｘにおいて合焦位置であるならば、観察体が対物レンズと接触しないステージ範囲の要素として変換後の対物レンズのＷＤ分が挙げられる（同図Ａ）。
【００５２】
また変換前の５０Ｘのピント位置も焦点深度分の幅が挙げられるため、ステージ可動範囲の要素としては次に同図Ｂのように焦点深度が挙げられる。さらに同図では、対物レンズ取り付け面のみでモデル化しているが、もともと対物レンズ間の同焦差もステージ可動範囲を決定する項目である（同図Ｃ）。
【００５３】
従って、変換後の観察体と対物レンズか近づく方向へのステージ可動範囲は、
ステージ可動範囲（Ｄ）＝Ｄ３−Ｄ２−Ｄ１ …（１）
ただし、Ｄ１は観察体と対物レンズの近づく方向を正とする。
【００５４】
すなわち、例の５０Ｘ→１００Ｘの変換時には２９７［ｕｍ］となる。
【００５５】
一方、予測反射光は投射光が対物レンズの瞳径（レーザが通過する直径）で決定する場合には、レーザ光束の面積でレーザ強度が決定するため、瞳径の２乗の比で合焦位置における予測光強度が算出できる。すなわち、変換前の５０Ｘ合焦位置での積分時間を１［ｍｓｅｃ］とすると、１００Ｘ合焦位置で５０Ｘ使用時と同等の出力を得る場合の積分時間（Ｔｃｈ）は、
Ｔｃｈ＝１Ｘ［（２．０）^２／（１．０）^２］ …（２）
＝４．０［ｍｓｅｃ］
となる。また積分時間の制御範囲はシステム固有のマージンを合わせればさらに確実なものとすることができる。
【００５６】
本実施形態では、変換前の対物レンズ７の情報からステージ可動範囲および積分時間制御範囲を算出したが、これらをどちらか片方でも、観察体Ｓの保護として適応可能である。
【００５７】
また、本実施形態では対物レンズ切換のみの例を示したが、観察方法を切り換えた場合においても同様の算出を行えば、対物レンズと観察体の接触をなくすことができる。従って、本発明の顕微鏡用システムは、従来で得られなかった簡易性とＡＦ性能の両立を実現させることが可能となる。
【００５８】
以上述べた第３の実施形態によれば、対物レンズまたは観察方法切換時のオートフォーカス制御において、高さや反射率の異なる観察体と対物レンズの接触による相互の破損を防ぐことが可能なＡＦシステムが得られる。
【００５９】
【発明の効果】
以上詳述したように本発明によれば、対物レンズの倍率や種類、観察方法などの観察条件によらず、観察体の高さ条件が変化しても、対物レンズと観察体を接触させることなく合焦制御可能な顕微鏡システムを提供することができる。
【図面の簡単な説明】
【図１】本発明に係る顕微鏡システムの第１の実施形態を説明するための概略構成図。
【図２】図１のアクティブＡＦ手段を説明するための図。
【図３】図２の２分割ディテクタ（受光素子）で検出された信号の出力処理回路を説明するための図。
【図４】ＡＦ制御を説明するためのフローチャート。
【図５】本発明の第２の実施形態を説明するためのステージ（積載台）の断面モデル図。
【図６】本発明の第２の実施形態の変形例を説明するためのステージの断面モデル図。
【図７】本発明の第３の実施形態におけるレンズ切換時の合焦制御を説明するためのフローチャート。
【図８】本発明の第３の実施形態におけるレンズ切換時の合焦制御を説明するための図。
【図９】従来の顕微鏡システムにおける課題を説明するための図。
【符号の説明】
１…ステージ
２…光源
３…ＮＤフィルタ
６…キューブ
６．９…結像光学系
７…対物レンズ
８…ＡＦユニット
９…接眼レンズ
１０…ＴＶカメラ
１１…ＣＰＵ
１３…ステージモータ
１４…キューブ駆動装置
１５…キューブモータ
１６…レボルバ駆動装置
１７…レボルバモータ
１８…外部コントローラ
２０…レーザ光源
２１…コリメートレンズ
２２…遮蔽板
２３…偏光ビームスプリッタ
２４．２８…結像レンズ
２５…波長板
２６…ダイクロイックミラ
２７…分割ディテクタ
３０…受光素子
３１．３２…アナログ処理回路
３３．３４…アナログ―デジタル変換器
３５…ＣＰＵ[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a microscope system, and more particularly to a microscope active autofocus system.
[0002]
[Prior art]
In recent years, an inspection apparatus using a microscope has been automated, and an autofocus (AF) apparatus that automatically focuses on an observation body has become an essential function for automation.
[0003]
In general, autofocus is classified into a so-called passive method in which focusing is performed based on the contrast of an observation object, and an active method in which a distance from the observation object is calculated and focusing is performed.
[0004]
However, both systems are equipped with a light receiving element, which detects the light image of the observing body in the case of the passive method, and projects a projected or projected image from the AF system onto the observing body in the case of the active method. , The reflected light or reflected image from the observation body is detected.
[0005]
On the other hand, one of the autofocus performances is the range in which the object can be captured by the light receiving element. The larger the range, the more stable and high-speed auto is possible from anywhere, regardless of the characteristics of the object. Focus is possible.
[0006]
In order to improve the AF performance, it is indispensable to increase the sensitivity of the light receiving element. Therefore, as one means for increasing the sensitivity of the light receiving element, for example, in the focus detection apparatus disclosed in Japanese Patent Laid-Open No. There is disclosed a method for improving the apparent sensitivity by controlling the integration time when capturing a subject image using an element in accordance with the brightness of the subject image.
[0007]
Japanese Patent Application Laid-Open No. 57-67903 discloses a system that determines whether or not focus detection is possible based on the integration time.
[0008]
[Problems to be solved by the invention]
However, these means cannot be applied to a microscope. FIGS. 9A and 9B show a case where the height of the observation body S (for example, a specimen stored in a container) S is high, is focused once, and is projected onto the observation body S having a low height. It is a model figure at the time of applying the active AF of a system. The position of the X mark in the figure is the focus position.
[0009]
When the integration time control disclosed in Japanese Patent Laid-Open No. 54-45127 is performed on the model shown in the figure, if the integration time is increased, the reflected light of the observation body S as shown in (b) can be captured. The AF system can move the stage 1 up and down and guide the observation body S to focus.
[0010]
However, if the reflectance of the observation body S itself with respect to the projection light is low and the transmittance is high, for example, when the reflectance of the stage 1 on which the observation body S is loaded is higher than that of the observation body, the model in FIG. As described above, the AF system performs focusing control on the surface of the stage 1.
[0011]
When the stage 1 is driven so as to be brought into focus with respect to the surface of the stage 1, focusing on the surface of the stage 1 leads to contact between the objective lens 7 and the observation body S, as shown in FIG. The observation body or the objective lens 7 is damaged.
[0012]
Japanese Patent Application Laid-Open No. 57-67903 discloses a system that determines whether or not focus detection is possible based on the size of the integration time so that the AF system does not react excessively with noise or the like other than the observation object.
[0013]
However, if the intensity of light incident on the light receiving element changes depending on the objective lens and observation state, as in a microscope, even at the in-focus position of the same observation object, whether or not focus detection is possible is simply determined by the amount of integration time. It cannot be determined.
[0014]
The present invention has been made in order to solve the above-described problems. Even if the height condition of the observation object is changed regardless of the observation conditions such as the magnification , type, and observation method of the objective lens, It is an object of the present invention to provide a microscope system capable of controlling focusing without bringing an observation body into contact.
[0015]
[Means for Solving the Problems]
In order to achieve the object, the invention corresponding to claim 1 selects one of a light source for illuminating an observation object, observation object stacking means for loading the observation object, and a plurality of objective lenses, and Objective lens switching means for facing the observation body, driving means for driving at least one of the observation body stacking means and the objective lens in the optical axis direction of the objective lens facing the observation body, an illumination state from the light source, An observation condition switching unit that changes the observation condition of the observation object by changing a wavelength, an imaging optical system that forms an image of the observation object via the objective lens, and a distance measuring light or a light projecting means for projecting a projection image, comprising an integration type light receiving means for receiving the reflected light or reflected image reflected from said specimen, using said driving means based on an output signal from said light receiving means The observation object In the microscope system leading to a microscope system provided with the control means for changing in accordance with the maximum integration time of the light receiving means to the objective lens disposed in the optical path.
[0016]
According to the invention corresponding to claim 1, since the observation object capturing range is prevented from becoming larger than necessary, and focus control is not performed on the observation object stacking means. It is possible to avoid contact with the objective lens.
[0017]
In order to achieve the above object, an invention corresponding to claim 4 includes an observation object stacking means for loading an observation object, and an objective lens switching means for selecting one of a plurality of objective lenses and facing the observation object. And a driving means for driving at least one of the observation object stacking means and the objective lens in the optical axis direction of the objective lens facing the observation object, and an image of the observation object formed through the objective lens. comprising an image optical system, a light projecting means for projecting a distance measuring light or projection image with respect to the observation object, an integration type light receiving means for receiving the reflected light or reflected image reflected from the specimen, In the microscope system that guides the observation object to focus using the driving means based on the output signal from the light receiving means, the distance measuring light or the projection image reflected from the observation object stacking means is the light projection means. distance measuring light from the addition Projected image, a microscope system provided with the suppressing reflection suppressing means that reflected on the specimen mounting means.
[0018]
According to the invention corresponding to claim 4 , since the reflected light and the reflected image from the observation object stacking unit are not incident on the light receiving element, the focus control is not performed by the observation object stacking unit. and this to avoid contact of the specimen and the objective lens when it is possible.
[0019]
In order to achieve the above object, the invention corresponding to claim 6 includes an observation object stacking means for loading an observation object, and an objective lens switching means for selecting one of a plurality of objective lenses and facing the observation object. And a driving means for driving at least one of the observation object stacking means and the objective lens in the optical axis direction of the objective lens facing the observation object, and an image of the observation object formed through the objective lens. comprising an image optical system, a light projecting means for projecting a distance measuring light or projection image with respect to the observation object, an integration type light receiving means for receiving the reflected light or reflected image reflected from the specimen, in the microscope system leading to focus the specimen by using the drive means based on an output signal from said light receiving means, wherein the objective lens or the observation method switching instruction of the objective lens or the observation method switching When received, if the switching straight front focus state of the specimen is determined to near focus, or focus focus, at least one of the maximum integration time of the movable range and the light receiving means of said driving means in focus control after switching It is the microscope system provided with the prediction means to determine.
[0020]
According to the invention corresponding to the sixth aspect , the predicted pin position of the observation body and the predicted integration time of the light receiving element can be calculated from information such as the amount of focus deviation and the transmittance between the objective lenses or the observation method. The reflected light from the body loading means is suppressed, and the observation loading means is not controlled more than necessary from the predicted focus position, so that contact between the observation body and the objective lens can be avoided during focus control. It becomes.
[0021]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings.
[0022]
<First Embodiment>
FIG. 1 is a schematic configuration diagram for explaining a first embodiment of a microscope system according to the present invention. As shown in FIG. 1, an observation object stacking means that is movable in the vertical direction is provided, for example, a light source 2 for epi-illuminating an observation object S loaded on the stage 1, and the illumination light from the light source 2 is dimmed. The ND filter 3, the aperture stop 4, the field stop 5, and the cube 6 that changes the observation method are incident on the observation body S.
[0023]
The light beam from the observation body S passes through the objective lens 7 and the AF unit 8, a part of which is guided to the eyepiece lens 9, and the other light beam is incident on, for example, the TV camera 10 or a photography apparatus. It has become.
[0024]
Based on the defocus signal from the AF unit 8, the CPU 11, which is a control means, moves the stage 1 up and down by a drive means such as a stage motor 13 via the stage drive device 12 to change the relative distance between the observation body S and the objective lens 7. In order to adjust the focus or to change the observation method, the cube motor 15 is controlled via the cube driving device (cube driving control device) 14 or the objective lens 7 is converted via the revolver driving device 16. Then, the revolver motor 17 is controlled.
[0025]
Further, the control means, for example, the CPU 11 is configured to be able to turn on / off AF and switch the objective lens 7 and the observation method by an external controller 18 operated by a user.
[0026]
Here, the active AF means of the present invention will be described with reference to FIG. The configuration of the active AF means is that a polarizing beam splitter is provided via a collimating lens 21 for collimating P-polarized laser light emitted from the laser light source 20 and a shielding plate 22 for blocking half of the parallel light flux. 23 is incident.
[0027]
The polarization beam splitter 23 has such characteristics that the P-polarized component is reflected and the S-polarized component is transmitted so that the light beam not blocked by the shielding plate is reflected by 90 °. The laser light reflected by the polarization beam splitter 23 passes through the quarter-wave plate 25 via the imaging lens 24, becomes elliptically polarized light, and reflects only the wavelength of the laser light set on the optical axis of the objective lens 7. The incident dichroic mirror 26 is incident on the observation body S through the objective lens 7 along the path shown in the figure.
[0028]
As shown in the figure, the laser light reflected from the observation body S becomes an S-polarized component that passes through the polarizing beam splitter 23 through the quarter-wave plate 25 and is integrated through the imaging lenses 24 and 28. The light enters the two-divided detector 27 of the element.
[0029]
The output process from the light receiving element is shown in FIG. The two-divided output from the light receiving element 30 is input to the analog processing circuits 31 and 32, respectively, and then digitally converted by analog-digital converters (hereinafter abbreviated as AD) 33 and 34 and input to the AF arithmetic control unit 35. Defocus calculation is performed by the AF calculation control unit 35. Here, the CPU 35 controls the integration time so that the output from the light receiving element 30 has an appropriate dynamic range for analog processing during AD conversion.
[0030]
Here, a detailed description will be given regarding the integration time control of the light receiving element which is a feature of the present invention. When the observation object S has a low reflectivity and the reflectivity power of the observation object mounting table is high, if the integration time is increased unnecessarily so as to conform to the dynamic range of the analog processing, the reflected light from the stage 1 becomes the AF signal. Will be entered. When AF control is performed on the stage 1 under these conditions, the objective lens 7 and the observation body collide depending on the height of the observation body S and the working distance of the objective lens 7 (hereinafter abbreviated as WD).
[0031]
Therefore, in the present invention, the longest integration time is set in advance from the reflectance to which AF is applied and the distance from the focus position, and the integration time is prohibited from becoming longer than necessary, and the known stage 1 has a predetermined distance or more. In the above case, the reflected light from the stage 1 is prevented from being input as an AF signal. Accordingly, it is possible to prevent an accident in which the objective lens 7 and the observation body S collide.
[0032]
In addition, even for the same observation body S, the intensity of the reflected light from the observation body S varies depending on the magnification, type, and observation method of the objective lens 7, and thus the longest integration time is set for each objective lens 7.
[0033]
The AF control of the present embodiment configured as described above will be described with reference to FIG. When AF is started (S1), a preset longest integration time (PD signal) is determined based on the magnification and type of the objective lens 7 currently in the optical path (S2). Then, it is checked whether the PD signal conforms to the analog processing dynamic range, that is, whether the PD signal falls within the range from the analog processing range lower limit Var1 to the upper limit Var2 (S3). When the PD signal exceeds the upper limit of the analog range, processing for shortening the integration time is performed (S4, S5).
[0034]
On the other hand, when P is less than or equal to the lower limit of the analog range, control is performed to increase the integration time until the integration time reaches the longest integration time (S7, S8). If the reflected laser light does not enter the analog kinetic range even if the integration time is increased to the longest integration time, the observer manually drives the stage and moves the observation object closer to the in-focus position. The stage is not driven until a certain amount of reflected laser light is detected.
[0035]
If reflected laser light within the dynamic range of the analog processing circuits 31 and 32 is detected, is the difference between the signals PD-A and PD-B of the two-divided detector 27 (light receiving element 30) less than Vf? Check (S9), determine the direction of stage 1 based on the size of both (S10), perform stage control until the difference between PD-A and PD-B becomes a predetermined value Vf or less (Sll, S12), When the difference is less than Vf and it is determined that the subject is in focus, the AF control is terminated (S13).
[0036]
The microscope system of the present invention that is operated and controlled as described above can focus on the observation body S having different heights without causing the objective lens 7 and the observation body S to collide. Since special AF settings such as an upper limit and a lower limit for limiting the movement amount of 1 are unnecessary, convenience is enhanced.
[0037]
Therefore, the microscope sysdem according to the present invention can realize both simplicity and AF performance that have not been obtained in the past.
[0038]
The active AF method of this embodiment is an example using a so-called knife edge method, but the same effect can be obtained even if this is a method of projecting an image onto an observation body. Further, in this embodiment, the stage 1 is driven up and down for focusing control. However, the same effect can be obtained even when the objective lens 7 is driven.
[0039]
According to the first embodiment described above, the auto-focus control, can provide an AF system that can prevent mutual damage caused by contact of the specimen and the objective lens.
[0040]
<Second Embodiment>
Since the overall schematic configuration of the microscope system of the second embodiment is the same as that of the first embodiment, a stage (loading table) 1 on which the observation body S that is a feature of the present embodiment is loaded will be described here. FIG. 5 is a cross-sectional model diagram of the stage of this embodiment. Any one of the observation bodies S of A) to C) having different sizes is loaded on the stage 1 in FIG. When the reflectance of the observation body S is low and the transmittance is high, the reflected light from the hatched portion in the figure is input to the light receiving element of the AF system. Therefore, focusing / control is performed on the stage 1, and the objective lens 7 and the observation body S collide.
[0041]
Therefore, the stage 1 of the present embodiment is subjected to at least one process of absorbing coating, scattering, and transmission so that the projection light is not reflected on the hatched portion in the figure. Therefore, the reflected light from the stage 1 is not input to the light receiving element of the AF system, and it is possible to prevent the objective lens 7 and the observation body S from colliding by the AF control.
[0042]
6A and 6B, the reflected light is applied from the stage 1 to the light receiving element of the AF system in the same manner as in the above-described embodiment when the observation body S is supported perpendicularly to the projection light. It is possible to obtain the same effect without input.
[0043]
According to the second embodiment described above, it is possible to provide an AF system capable of preventing mutual damage due to contact between an observation object and an objective lens having different heights and reflectivities in AF control.
[0044]
<Third Embodiment>
Since the configuration of the microscope system of this embodiment is the same as that of the first embodiment, focus control at the time of lens switching, which is a feature of this embodiment, will be described here with reference to FIG.
[0045]
When switching of the objective lens 7 is instructed by the external controller 18 of FIG. 1 during AF tracking (S30), the in-focus state immediately before switching is checked (S31). When the objective lens 7 immediately before switching is not in the focused state or near the focused state, the focusing control as shown in the first embodiment is performed (S32).
[0046]
On the other hand, if it is determined that the objective lens 7 immediately before switching is in a focused state or in the vicinity of the focused state, the current focused position and the integration time from the observation body S, that is, the intensity of the reflected light intensity are stored as pre-conversion information. (S33, S34). The predicted focus position and the predicted reflected light intensity are calculated from the WD and numerical aperture (hereinafter abbreviated as “NA”) of the objective lens 7 after conversion from the pre-conversion information by an arithmetic expression described later (S35, S36).
[0047]
Then, the range of the stage 1 where the observation object S and the objective lens 7 do not collide, that is, the stage movable range is calculated from the predicted focus position (S37), and the longest integration time is calculated from the predicted reflected light intensity (S38). The focus control is at a level that does not exceed the stage movable range and the integration time control range, and guides the observation body S to the focus as in the first embodiment (S32).
[0048]
Here, a method for calculating the stage movable range and the integration time control range will be described.
[0049]
[Table 1]

[0050]
For example, if the objective lens 7 having the characteristics shown in Table 1 performs objective lens conversion from 50X to 100X, the movable range of the stage 1 can be determined by the following factors. FIG. 8 shows the model.
[0051]
A) Confocal difference between objective lenses D1
B) Depth of focus D2
C) Working distance (WD) D3
If the focus position is 50X as shown in the figure, the WD portion of the objective lens after conversion can be cited as an element of the stage range where the observation body does not contact the objective lens (A in the figure).
[0052]
Further, since the 50X focus position before conversion also includes a width corresponding to the depth of focus, an element of the stage movable range includes the depth of focus as shown in FIG. Furthermore, in the figure, modeling is performed only with the objective lens mounting surface, but the focal difference between the objective lenses is also an item that determines the stage movable range (C in the figure).
[0053]
Therefore, the stage movable range in the direction in which the converted observation object and the objective lens approach is
Stage movable range (D) = D3-D2-D1 (1)
However, D1 is positive in the direction in which the observation body and the objective lens approach.
[0054]
That is, in the example of conversion from 50X to 100X, 297 [um] is obtained.
[0055]
On the other hand, when the projected light is determined by the pupil diameter (diameter through which the laser passes) of the objective lens, the laser intensity is determined by the area of the laser beam, and thus the predicted reflected light is focused at the ratio of the square of the pupil diameter. The predicted light intensity at the position can be calculated. That is, assuming that the integration time at the 50X in-focus position before conversion is 1 [msec], the integration time (Tch) for obtaining an output equivalent to that when using 50X at the 100X in-focus position is
Tch = 1X [(2.0) ² /(1.0) ² ] (2)
= 4.0 [msec]
It becomes. Further, the integration time control range can be further ensured by combining the system-specific margins.
[0056]
In the present embodiment, the stage movable range and the integration time control range are calculated from the information of the objective lens 7 before conversion, but either one of them can be applied as protection for the observation object S.
[0057]
In the present embodiment, an example in which only the objective lens is switched is shown. However, if the same calculation is performed even when the observation method is switched, the contact between the objective lens and the observation object can be eliminated. Therefore, the microscope system according to the present invention can realize both simplicity and AF performance that have not been obtained in the past.
[0058]
According to the third embodiment described above, an AF system capable of preventing mutual damage due to contact between an observation object and an objective lens having different heights and reflectivities in autofocus control when switching an objective lens or an observation method. Is obtained.
[0059]
【The invention's effect】
As described above in detail, according to the present invention, the objective lens and the observation object are brought into contact with each other even if the height condition of the observation object changes regardless of the observation conditions such as the magnification and type of the objective lens and the observation method. It is possible to provide a microscope system that can control focusing without any problem.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram for explaining a first embodiment of a microscope system according to the present invention.
FIG. 2 is a diagram for explaining active AF means in FIG. 1;
3 is a diagram for explaining an output processing circuit of a signal detected by a two-divided detector (light receiving element) in FIG. 2;
FIG. 4 is a flowchart for explaining AF control.
FIG. 5 is a cross-sectional model view of a stage (loading table) for explaining a second embodiment of the present invention.
FIG. 6 is a cross-sectional model view of a stage for explaining a modification of the second embodiment of the present invention.
FIG. 7 is a flowchart for explaining focus control at the time of lens switching in the third embodiment of the present invention;
FIG. 8 is a diagram for explaining focusing control at the time of lens switching in the third embodiment of the present invention.
FIG. 9 is a diagram for explaining a problem in a conventional microscope system.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Stage 2 ... Light source 3 ... ND filter 6 ... Cube 6.9 ... Imaging optical system 7 ... Objective lens 8 ... AF unit 9 ... Eyepiece lens 10 ... TV camera 11 ... CPU
DESCRIPTION OF SYMBOLS 13 ... Stage motor 14 ... Cube drive device 15 ... Cube motor 16 ... Revolver drive device 17 ... Revolver motor 18 ... External controller 20 ... Laser light source 21 ... Collimating lens 22 ... Shielding plate 23 ... Polarizing beam splitter 24.28 ... Imaging lens 25 ... Wave plate 26 ... Dichroic mirror 27 ... Split detector 30 ... Light receiving element 31.32 ... Analog processing circuit 33.34 ... Analog-digital converter 35 ... CPU

Claims (7)

A light source for illuminating the observation body;
Observation body loading means for loading the observation body;
Objective lens switching means for selecting one of a plurality of objective lenses and facing the object;
Drive means for driving at least one of the observation object stacking means and the objective lens in the optical axis direction of the objective lens facing the observation object;
An imaging optical system that forms an image of the observation body via the objective lens;
A light projecting means for projecting distance measuring light or a projected image to the observation body;
Comprising an integration type light receiving means for receiving the reflected light or reflected image reflected from the specimen,
In a microscope system that guides the observation body to focus using the driving unit based on an output signal from the light receiving unit,
A microscope system comprising a control means for changing a longest integration time of the light receiving means in accordance with an objective lens arranged on the optical path . The microscope system according to claim 1, wherein the longest integration time is set for each of the plurality of objective lenses. The microscope system according to claim 1, wherein the control unit sets the longest integration time according to at least one of a magnification and a type of the objective lens. An observation object loading means for loading the observation object;
Objective lens switching means for selecting one of a plurality of objective lenses and facing the object;
Drive means for driving at least one of the observation object stacking means and the objective lens in the optical axis direction of the objective lens facing the observation object;
An imaging optical system that forms an image of the observation body via the objective lens;
A light projecting means for projecting distance measuring light or a projected image to the observation body;
Comprising an integration type light receiving means for receiving the reflected light or reflected image reflected from the specimen,
In a microscope system that guides the observation body to focus using the driving unit based on an output signal from the light receiving unit,
A microscope system comprising: a reflection suppressing unit that suppresses reflection of a distance measuring light or a projected image from the light projecting unit on the observation object stacking unit . The microscope system according to claim 4, wherein the reflection suppressing unit absorbs, scatters, and transmits light from the light projecting unit. An observation object loading means for loading the observation object;
Objective lens switching means for selecting one of a plurality of objective lenses and facing the object;
Drive means for driving at least one of the observation object stacking means and the objective lens in the optical axis direction of the objective lens facing the observation object;
An imaging optical system that forms an image of the observation body via the objective lens;
A light projecting means for projecting distance measuring light or a projected image to the observation body;
Comprising an integration type light receiving means for receiving the reflected light or reflected image reflected from the specimen,
In a microscope system that guides the observation body to focus using the driving unit based on an output signal from the light receiving unit,
Wherein upon receipt of an instruction of the objective lens or the observation method switching, if the switching straight-focus state before the specimen is determined to near focus, or focus case, the movable range and the said driving means in focus control after switching microscope system characterized by comprising a prediction means for determining at least one of the maximum integration time of the light receiving means. Driving means for driving at least one of an observation body loading means for loading an observation body and an objective lens facing the observation body in an optical axis direction of the objective lens;
Projection means for projecting distance measuring light or a projected image to the observation body via the objective lens;
An integrated light receiving means for receiving reflected light or reflected image reflected from the observation body,
In an autofocus system that guides the observation body to focus using the driving unit based on an output signal from the light receiving unit,
An autofocus system comprising a control means for changing a longest integration time of the light receiving means in accordance with an objective lens arranged on the optical path.

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