JP4501022B2 - Fluid coupling - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a fluid coupling, and more particularly, to a fluid coupling useful for connecting a mass flow controller, an on-off valve, a connection block interposed therebetween, and the like in a fluid control apparatus for semiconductor manufacturing.
[0002]
[Prior art]
A fluid control device for semiconductor manufacturing is configured by combining a mass flow controller for adjusting a flow rate, a pressure regulator for adjusting a pressure, and an on-off valve, and the like. As a preferred configuration, a configuration is proposed in which the mass flow controller and the on-off valve are connected via an appropriate connection block (see Japanese Patent Application Laid-Open No. 8-326943). FIG. 7 shows the configuration of the fluid coupling disclosed therein.
[0003]
In FIG. 7, the fluid coupling includes male and female joint members (91) and (92) each provided with annular protrusions (98) and (99) for holding a gasket on the butt end face, and both joint members (91) ( (92) an annular gasket (93) having a substantially square cross section interposed between the butted end faces, and a retainer for holding the gasket (93) to the female joint member (92) by holding the outer peripheral surface of the gasket (93). 94). Here, each joint member (91) (92) is a connecting block, a mass flow controller main body, or a block connected to an on-off valve. One of the butted end faces of these joint members (91) and (92) is male and the other is female, and a fitting recess (96) provided on the butted end face of the female joint member (92). ), The fitting protrusions (95) protruding in the axial direction are fitted to the abutting end faces of the male fitting member (91), thereby fitting the fitting members (91) (92) in the radial direction. Misalignment is prevented. Then, a retainer holding cylindrical portion (97) is formed on the abutting end surface of the female joint member (92), and the retainer (94) holds the retainer holding cylindrical portion (97), thereby providing a gasket. (93) is held by the female joint member (92).
[0004]
[Problems to be solved by the invention]
In the above-described conventional joint, the shape of the abutting surface of both joint members is made to match the shape of the gasket and retainer, and the substantially square gasket shown in FIG. In order to replace it with a C-shaped gasket, it is necessary to change the shape of both joint members. Similarly, in a known fluid coupling using a gasket having a C-shaped cross section, it is necessary to change the shape of both joint members in order to replace the gasket with the above-described gasket having a substantially square cross section. Therefore, for users of fluid control devices for semiconductor manufacturing that use both gaskets with different shapes, when one gasket is changed to the other gasket, a large change including both joint members is a burden. Therefore, there is a demand for a fluid coupling that can be used even if the shape of the fluid is changed.
[0005]
An object of the present invention is to provide a fluid coupling that can be used even when the shape of the gasket is changed.
[0006]
[Means for Solving the Problems and Effects of the Invention]
The fluid coupling according to the present invention includes first and second coupling members having fluid passages communicating with each other, an annular gasket having a substantially C-shaped cross section interposed between the butted end surfaces of both coupling members, and an outer periphery of the gasket. And a retainer for holding one of the joint members to hold the gasket, and a gasket storage recess having a flat gasket pressing surface pressed against the side surface of the gasket on the abutting surface of each joint member. An annular portion that bites into the side surface of the gasket having a substantially square cross section when the gasket having a substantially square cross section is replaced with an annular gasket having a substantially square cross section in the gasket housing recess of one of the joint members. The protrusion is provided so as not to interfere with the gasket having a substantially C-shaped cross section .
[0007]
The depth of the gasket housing recess of each joint member is slightly smaller than half the thickness of the gasket having a substantially C-shaped cross section, and the thickness of the gasket having a generally rectangular cross section is slightly larger than the thickness of the gasket having a generally C-shaped cross section. It is formed small. In addition, the retainer is provided with an elastic claw (gasket holding portion) that holds the outer periphery of the gasket, and the inner diameter of the claw is slightly smaller than the outer diameter of the gasket having a substantially C-shaped cross section. A small diameter portion having an outer diameter substantially equal to the inner diameter of the claw is provided on the outer periphery of the gasket.
[0008]
According to this fluid coupling, when the joint members are brought into close contact with each other, the gasket holding surfaces of the gasket housing recesses of both the joint members press both side surfaces of the gasket to achieve a seal. When the gasket having a substantially C-shaped cross section is replaced with a gasket having a substantially square cross section, the joint member provided with the annular protrusion is used as it is, and the other joint member is provided with the annular protrusion. What is necessary is just to change to a coupling member. According to the fluid coupling after the change, when the joint members are brought into close contact with each other, the annular projections in the gasket housing recesses of both joint members bite into the gasket, so that the seal is achieved. Even if it is exchanged, it can be handled with small changes. Here, on the side where it is difficult to replace the joint member that does not need to be changed, the side on which the joint member that needs to be changed is easy to replace (for example, the lower member of the upper member and the lower member, or the one with a smaller number of parts) ), The labor at the time of change is further reduced.
[0009]
When the gasket is replaced with a gasket having a substantially square cross section, an annular protrusion that bites into a side surface of the gasket having a substantially square cross section is preferably provided in the gasket housing recess of the other joint member. In this case, when replacing a gasket having a substantially C-shaped cross section with a gasket having a substantially square cross section, it is not necessary to change both of the joint members. Can be accommodated with minor changes.
[0010]
Each joint member is provided with a guide ring storage recess that is continuous with the outer periphery of the gasket storage recess and deeper than this, and the guide ring storage recess of either one of the joint members is fitted with the other joint member when the two joint members are butted together. It is preferable that a guide ring for guiding the guide ring housing recess is fitted, and a recess for avoiding interference with the retainer is provided on the inner peripheral surface of the guide ring. If it does in this way, in addition to said effect, the shift | offset | difference of the radial direction of the other joint member with respect to one joint member is suppressed small, and reliable sealing performance is ensured irrespective of the shape of a gasket.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings.
[0012]
In this specification, the top / bottom / left / right refers to the top / bottom / left / right of FIG. 2, the front means the chart side, and the rear means the back side of the figure. In addition, this up and down is for convenience, and may be upside down or lying down.
[0013]
1 and 2 show a part of a fluid control apparatus in which the fluid coupling of the present invention is used. The fluid control device (1) includes a plurality of block joints (5) (6) (7) (8) (9) (10) attached to the substrate (11), and these block joints (5) (6) (7) It is composed of a plurality of types of fluid controllers (2), (3) and (4) attached to (8), (9) and (10).
[0014]
The fluid controllers (2), (3), and (4) are, in order from the left, the first block valve (2), the mass flow controller (regulator) (3), and the second block valve (4). ) (6) (7) (8) (9) (10), in order from the left, block joint (5) with first V-shaped passage (5a) having an upward left opening and a right opening, upward A block joint (6) with a first L-shaped passage (6a) having a plurality of openings and a rear opening, a block joint (7) with a second V-shaped passage (7a) having an upward left opening and a right opening, respectively. A block joint (8) with a third V-shaped passage (8a) having an upward left opening and a right opening, respectively, and a block joint (9) with a second L-shaped passage (9a) having an upward opening and a rear opening. A block joint (10) with a third L-shaped passage (10a) having an upward opening and a rightward opening.
[0015]
A through hole (25) and a screw hole (26) are provided at predetermined positions of each block joint (5) (6) (7) (8) (9) (10). The passed bolt (not shown) is fixed to the board (11) by being screwed into a screw hole (not shown) of the board (11). In each fluid controller (2) (3) (4), the bolt (27) passed from above is connected to the screw hole (26) of the block joint (5) (6) (7) (8) (9) (10). ) Is fixed to the corresponding block joint (5) (6) (7) (8) (9) (10).
[0016]
The first block valve (2) includes a rectangular parallelepiped block main body (12) which is long to the left and right, a first actuator (13) and a second actuator (14) mounted on the upper surface of the main body (12), and a right side of the main body (12). A right block (15) with an inverted L-shaped passage (15a) attached to the surface and a rear block (16) with an inverted L-shaped passage (not shown) attached to the rear side of the main body, ) The left end is on the right half of the block joint (5) with the first V-shaped passage (5a), and the right block (15) is on the left half of the block joint (2) with the second V-shaped passage (7a) The rear block (16) is attached to the block joint (6) with the first L-shaped passage (6a).
[0017]
The main body (12) of the first block valve (2) has a first inflow passage (31) that opens downward at the left end and communicates with the right opening of the block joint (5) with the first V-shaped passage (5a). ), The first inflow path (31) through the first actuator (13), and the outflow path (32) leading to the rightward passage of the inverted L-shaped path (15a) of the right block (15), and the outflow path There is provided a downward second inflow passage (33) that is continuous with the second actuator (14) and communicates with the upward opening of the block joint (6) with the first L-shaped passage (6a). A downward passage of the inverted L-shaped passage (15a) of the right block (15) communicates with the left opening of the block joint (7) with the second V-shaped passage (7a).
[0018]
A left block (17) having an inverted L-shaped passage (17a) communicating with the inflow passage (not shown) of the regulator (3) projects to the left at the lower end of the left side surface of the regulator (3). The right block (18) having an inverted L-shaped passage (18a) communicating with the outflow passage (not shown) of the regulator is provided at the lower end of the right side surface of the regulator (3). Overhangs. The left passage block (17) is attached to the right half of the block joint (7) with the second V-shaped passage, so that the inverted L-shaped passage (17a) of the left block (17) and the first block valve ( 2) The inverted L-shaped passage (15a) of the right block (15) communicates with the block joint (7) with the second V-shaped passage (7a). The right block (18) of the adjuster (3) is attached to the left half of the block joint (8) with the third V-shaped passage (8a).
[0019]
The second block valve (4) includes a rectangular parallelepiped block main body (19) which is long to the left and right, a third actuator (20) and a fourth actuator (21) mounted on the upper surface of the main body (19), and a right side of the main body (19). It consists of a right block (22) with an inverted L-shaped passage (22a) attached to the surface and a rear block (23) with an inverted L-shaped passage attached to the rear side of the main body, and the left end of the main body (19) is In the right half of the block joint (8) with the third V-shaped passage (8a), the right block (22) is in the block joint (10) with the third L-shaped passage (10a) and the rear block (23) is in the second L Each is attached to a block joint (9) with a letter-shaped passage (9a). A fluid outflow portion (24) is provided in the rightward opening of the block joint (10) with the third L-shaped passage (10a).
[0020]
The main body (19) of the second block valve (4) has an inflow passage (34) that opens downward at the left end and communicates with the right opening of the block joint (8) with the third V-shaped passage (8a). A first outflow path (35) connected to the inflow path (34) via the third actuator (20) and leading to the rightward passage of the inverted L-shaped path (22a) of the right block (22), and the first outflow path A downward second outflow passage (36) is provided which is connected to the upper joint (35) via the fourth actuator (21) and communicates with the upward opening of the block joint (9) with the second L-shaped passage (9a). The right block (22) with the inverted L-shaped passage (22a) of the second block valve (4) and the block joint (10) with the third L-shaped passage (10a) are communicated with each other.
[0021]
Each member (5) (2) (6) (15) (7) (17) (18) (8) (4) (9) (22) (10) A joint (30) is provided.
[0022]
Referring to FIG. 3, a block joint (5) with a first V-shaped passage (5a) (hereinafter referred to as a first joint member) and a main body (12) of a first block valve (2) (hereinafter referred to as a second joint) A first embodiment of a fluid coupling according to the present invention provided between the first and second members will be described.
[0023]
The fluid coupling includes a first coupling member (5) having a first flow path (5a) and a second coupling member (12) having a second flow path (31) communicating with the first flow path (5a). Is a gasket having a substantially C-shaped cross section interposed between both joint members (5) and (12) and the butted end faces of both joint members (5) and (12). (51), a retainer (52) that holds the gasket (51) and holds it in the first joint member (5) in the illustrated example, and a guide ring attached to the outside of the retainer (52) (53) and screw means for connecting the joint members (5) and (12).
[0024]
On each butted end face of the first joint member (5) and the second joint member (12), there are annular gasket housing recesses (44) (45) surrounding the openings of the fluid passages (5a) and (31), and the outer periphery thereof. The guide ring storage recesses (46) and (47) which are connected to each other through the step portions (46a) and (47a) and deeper than this are provided. The bottom surfaces (44b) and (45b) of the gasket housing recesses (44) and (45) are flat and recessed slightly shallower than half the thickness of the gaskets (41) and (51) with respect to the butted end surfaces. An annular protrusion (45a) is formed on the inner peripheral edge of the gasket housing recess (45) of the second joint member (12).
[0025]
The gasket (51) having a substantially C-shaped cross section is called a C-ring, and includes a ring-shaped body (54) having a C-shaped cross section and a coil spring (55) housed therein.
[0026]
The retainer (52) is integrally formed of a stainless steel plate and has a cylindrical shape. The retainer (52) extends in the axial direction at one end and the gasket housing recess (44) of the first joint member (5) and the guide ring. A joint holding part (52a) fitted to the step part (46a) between the housing recess (46) is formed, and the other end extends radially and holds the outer periphery of the gasket (51). A shaped gasket holding portion (52b) is formed. The stainless steel plate is a thin plate, and both the joint holding portion (52a) and the gasket holding portion (52b) have some radial elasticity.
[0027]
The guide ring (53) is made of stainless steel, and the fitting portion (58) fitted into the guide ring housing recess (46) of the first joint member (5) and the second joint member (12 ) Guide ring storage recess (47) and a guide portion (59) loosely fitted, and the inner peripheral surface spans the fit portion (58) and the guide portion (59), and the retainer (52 A recess (53a) is formed in order to avoid interference with. The inner diameter of the fitting portion (58) is equal to the diameter of the stepped portion (46a) between the gasket storage recess (44) and the guide ring storage recess (46), and the outer diameter is the guide ring storage recess ( 46), the outer diameter of which is equal to the outer diameter of the guide ring storage recess (46). The inner diameter of the guide portion (59) is equal to the diameter of the step portion (47a) between the gasket storage recess (45) and the guide ring storage recess (47), and the outer diameter is the guide ring storage recess. It is smaller than the outer diameter of the location (47), and its end surface is separated from the bottom surface of the guide ring storage recess (47).
[0028]
As shown in the figure, the retainer (52) and the gasket (51) are held by the first joint member (5) in a state where the gasket (51) is fitted to the retainer (52), and the gasket (51) is positioned. Has been done. The second joint member (12) is abutted against the first joint member (5) holding the retainer (52) and the gasket (51). At this time, the second joint member (12) ) And the radial displacement is suppressed. According to this joint, when the joint members (5) and (12) are brought into close contact with each other, the bottom surfaces (44b) and (45b) of the gasket housing recesses (44) and (45) of the joint members (5) and (12) are Sealing is accomplished by pressing both sides of 51). The annular protrusion (45a) provided in the gasket housing recess (45) of the second joint member (12) is not involved in the seal.
[0029]
Next, a second embodiment of the fluid coupling according to the present invention will be described with reference to FIG. In this type of fluid coupling, it is necessary to replace the gasket at the time of maintenance. In this case, it is necessary to replace the gasket (51) having the substantially C-shaped cross section with the gasket (41) having the substantially rectangular cross section. In some cases. The gasket (41) having a substantially square cross section is made of stainless steel and has an inner diameter equal to the flow path diameter of both joint members (5) and (12) as shown in FIG. The outer diameter of the gasket (41) is smaller than the outer diameter of the gasket housing recess (44) (45). ) Is provided. Corresponding to this gasket (41), the specifications of the first joint member (5), the retainer (52) and the guide ring (53) are changed as follows. In addition, about the thing which is not changed, the same code | symbol as 1st Embodiment is attached | subjected and description is abbreviate | omitted.
[0030]
First, the first joint member indicated by reference numeral (5A) is formed to be symmetric with the second joint member (12). That is, the annular protrusion (45a) is formed on the inner peripheral edge of the gasket housing recess (45). Further, the retainer (42) has the same joint holding portion (42a) and gasket holding portion (42b) as the retainer (52), but the axial length of the retainer (42) (41) is formed relatively long to hold the position shifted from the center, and in FIG. 3 (52), it is formed relatively short to hold the center of the gasket (51). . Similarly to the guide ring (53), the guide ring (43) is composed of a fitting portion (58) and a guide portion (59), but does not interfere with the retainers (42) (52). The recesses (43a) and (53a) provided on the inner peripheral surface of (53) are formed in a rectangular shape in the guide ring (43) (43a) of FIG. 4 and are formed on the guide ring (53) of FIG. The thing (53a) has a trapezoidal shape.
[0031]
In this way, when the screw means of the fluid coupling is tightened, when the coupling members (5A) (12) are brought into close contact with each other, they are provided in the gasket housing recesses (44) (45) of both coupling members (5A) (12). The annular projections (44a) and (45a) bite into the side surface of the gasket (41) to achieve a seal. The retainer (42) and the gasket (41) are held by the first joint member (5A) in a state where the gasket (41) is fitted to the retainer (42), and the gasket (41) is positioned. The second joint member (12) is abutted against the first joint member (5A) holding the retainer (42) and the gasket (41). At this time, the second joint member (12) It is the same as that of 1st Embodiment that it is guided to the guide part (49) of 43), and the shift | offset | difference of radial direction is suppressed.
[0032]
Contrary to the above, it may be necessary to replace the gasket (41) having a substantially square cross section shown in FIG. 4 with a gasket (51) having a substantially C cross section shown in FIG. In this case, as shown in FIG. 5 (third embodiment), the gasket (41), the retainer (42) and the guide ring (43) of FIG. 4 are replaced with the gasket (51) and the retainer (52 ) And the guide ring (53), the first joint member (5A) having the specification for the gasket (41) having a substantially square cross section can be used without any problem. In a fluid coupling using a gasket (51) having a substantially C-shaped cross section, an annular protrusion (45a) is formed in the gasket housing recess (45) of the first coupling member (5A) as shown in FIG. When changing the gasket (51) to the gasket (41) having a substantially square cross section shown in FIG. 4, it is not necessary to change the first joint member (5A).
[0033]
According to the fluid coupling from the first embodiment to the third embodiment, the retainer (42) (52) can hold either the first or second coupling member (5) (5A) (12). When assembling the fluid control device (1) shown in FIGS. 1 and 2, each component (2) (4) (5) (5A) (6) (7) (8) (9) (10) (15 ), (17), (18), and (22) can be sequentially connected without distinguishing whether the butt end face is male or female. The second joint member (12) is guided by the guide portions (49) and (59) of the guide rings (43) and (53) and is abutted against the first joint members (5) and (5A). The amount of movement of the second joint member (12) in the radial direction with respect to the first joint members (5) and (5A) can be suppressed to a very small value.
[0034]
On the user side, either a gasket (41) having a substantially square cross section or a gasket (51) having a substantially C cross section can be used, and even when either one is changed to the other, It is not necessary to change the entire fluid coupling, and the shape of the gaskets (41) and (51) can be easily changed.
[0035]
In the above fluid coupling, a guide ring is not always necessary, and as shown in FIG. 6 (fourth embodiment), there may be no guide ring.
[0036]
In the figure, only the annular gasket storage recesses (44) (45) surrounding the openings of the fluid passages (5a) (31) are provided at the end faces of the first joint member (5A) and the second joint member (12). Is provided.
[0037]
Then, according to the fluid coupling in FIG. 5A, when the joint members (5A) (12) are brought into close contact with each other, the annular shape of the gasket housing recesses (44) (45) of both joint members (5A) (12) The protrusion (44a) (45a) bites into the gasket (61) having a substantially square cross section, so that the seal is achieved. According to the fluid coupling in FIG. The gasket holding surfaces (44b) and (45b) of the gasket housing recesses (44) and (45) of both joint members (5A) and (12) press the both side surfaces of the gasket (51) having a substantially C-shaped cross section when they are in close contact. By doing so, the seal is fulfilled.
[0038]
The gasket (51) having a substantially C-shaped cross section is held by a retainer (62) fitted to the central portion of the outer peripheral surface thereof. An annular groove (61a) into which the inner end of the retainer (62) is fitted is provided. With such a configuration, the retainer (62) used in both fluid couplings can be made common.
[0039]
Therefore, when replacing the gasket (51) having a substantially C-shaped cross section with the gasket (61) having a substantially square cross-section, conversely, when replacing the gasket (61) having a substantially square cross-section with a gasket (51) having a substantially C-shaped cross section. In this case, although the shapes of the gaskets (51) and (61) are greatly different, the same trouble as replacing the gasket with the same shape can be achieved.
[0040]
In FIG. 6 (b), the first joint member (5A) may of course be changed to the one with no protrusion (5) shown in FIG. In this case, when the gasket (51) having a substantially C cross section is replaced with the gasket (61) having a substantially square cross section, an operation of changing the joint members (5) and (5A) may be added.
[0041]
In each of the above embodiments, the annular protrusions (44a) and (45a) of the joint members (5), (5A) and (12) are provided on the inner peripheral edge, but the gaskets (41) and (61) having a substantially square cross section. These projections may be formed slightly closer to the center than the inner peripheral edge, as long as they do not interfere with the gasket (51) having a substantially C-shaped cross section. 5) Of course, it may be formed near the outer peripheral edge of (5A) (12).
[Brief description of the drawings]
FIG. 1 is an exploded perspective view of a fluid control apparatus using a fluid coupling according to the present invention.
FIG. 2 is a longitudinal sectional view of the control device shown in FIG.
FIG. 3 is an enlarged cross-sectional view showing a first embodiment of a fluid coupling.
FIG. 4 is an enlarged sectional view showing a second embodiment of the fluid coupling.
FIG. 5 is an enlarged cross-sectional view showing a third embodiment of the fluid coupling.
FIG. 6 is an enlarged cross-sectional view showing a fourth embodiment of the fluid coupling.
FIG. 7 is a longitudinal sectional view of a conventional fluid coupling.
[Explanation of symbols]
(5) (5A) First joint member
(5a) Fluid passage
(12) Second joint member
(31) Fluid passage
(41) (51) Gasket
(42) (52) Retainer
(43) (53) Guide ring
(44) (54) Gasket storage recess
(44a) (45a) Annular projection
(46) (47) Guide ring storage recess
(43a) (53a) Retainer storage recess

Claims (4)

First and second joint members (5), (5A), (12) having fluid passages (5a), (31) communicating with each other, and butt end faces of both joint members (5), (5A), (12) An annular gasket (51) having a substantially C-shaped cross section interposed therebetween, and a retainer (52) for holding the outer periphery of the gasket (51) and holding it on one of the joint members (5) (5A) (62 ) Have a flat gasket pressing surface (44b) (45b) that is pressed against the side surface of the gasket (51) on the abutting surface of each joint member (5) (5A) (12). Gasket housing recesses (44) and (45) are provided, and the gasket housing recess (45) of either one of the joint members (12) has an approximately C-shaped gasket (51) in an annular shape with a substantially square cross section. the annular projection bites when exchanged in the gasket (41) to the side of the cross section square of the gasket (41) (45a) is provided so as not to interfere with a substantially C-shaped gasket (51) Fluid coupling according to claim. When the gasket (51) having the substantially C-shaped cross section is replaced with the gasket (41) having the substantially square cross section, the annular protrusion (44a) that bites into the side surface of the gasket (41) having the substantially square cross section has the other joint member (5A The fluid coupling according to claim 1, which is also provided in the gasket housing recess (44).   Each joint member (5) (5A) (12) is provided with a guide ring storage recess (46) (47) that is continuous with the outer periphery of the gasket storage recess (44) (45) and deeper than this, either one The guide ring storage recess (47) of the other joint member (12) when the two joint members (5) (5A) (12) are brought into contact with the guide ring storage recess (46) of the joint member (5) (5A) of The guide ring (43) (53) is inserted into the guide ring (43) (53), and the recess (43a) (53a) is provided on the inner peripheral surface of the guide ring (43) (53) to avoid interference with the retainer (42) (52). The fluid coupling according to claim 1 or 2, wherein: The gasket (51) having a substantially C-shaped cross section is held by the retainer (62) by fitting the inner peripheral edge of the retainer (62) to the opening edge at the center of the outer peripheral surface. ) Is held between the butted end faces of the joint members (5), (5A), and (12).

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