JP4512737B2 - Ultrasonic vibration processing equipment - Google Patents

Description

  The present invention is provided with a rotating means for rotating a spindle and a vibrating means for ultrasonically vibrating the spindle in the axial direction, and applying a rotational motion and ultrasonic vibration to the tool held on the spindle for material removal processing. The present invention relates to an ultrasonic vibration processing apparatus to be performed and a method for manufacturing an electrodeposition tool used in the ultrasonic vibration processing apparatus.

  In recent years, with the progress of miniaturization and high functionality in many fields of industry, the demand for the precision (surface roughness, geometric deviation) of parts has shifted from the micron world to the nano world.

  By the way, materials used in fuel cells, robots, micromachines, IT, and semiconductor industries that are expected to grow in the future include ceramics, granite, hard metal, titanium, magnesium, silicon, glass, and hybrid materials thereof. There are many types of these materials, but there are many difficult-to-cut materials that are extremely hard and difficult to remove materials such as cutting or grinding. Therefore, the development of micromachining technology for such difficult-to-cut materials has been developed. desired.

  Although etching, electric discharge machining, and laser machining have been developed as techniques for performing fine machining on this difficult-to-cut material, machining is considered to be the most suitable method for pursuing machining accuracy and machining speed. This is because the technical capabilities of various machine tool manufacturers and peripheral device manufacturers have improved, and precision machining devices that realize nano machining have entered the practical stage.

  Targets of such precision machining equipment are small precision molds for the IT industry, fuel cell separators, light guide tubes, waveguides, microreactors, micromachine parts, etc., such as fuel cells Some of them are indispensable for living in the 21st century, when environmental issues are the most important issue, and their practical value is very high.

  However, machining by this conventional precision machining apparatus is not a difficult material such as brittle material such as ceramic, granite, glass and silicon, or extremely hard material such as super hard material. If processing hard materials, the level of processing accuracy is being reached, but it is not suitable for processing extremely hard materials (hard-to-cut materials) such as brittle materials and carbide. The processing accuracy is not satisfactory. That is, there is a drawback that the tool cannot be cut due to the cutting resistance, or the machining accuracy is lowered due to the deflection of the tool or machine tool.

  However, even if the rigidity of the machine tool is improved and the tool material / shape and cutting fluid are improved, a dramatic improvement cannot be expected. In other words, it has reached an area where high precision based on the maternal principle cannot be expected with conventional machining.

  Therefore, a so-called ultrasonic vibration processing apparatus has been conventionally proposed in which processing is performed by rotating a tool and ultrasonically oscillating, rather than simply performing a conventional process of cutting a material by rotating the tool.

  This is, for example, a configuration in which a material is processed by holding a cutting / grinding tool, rotating the spindle and ultrasonically oscillating the tool, and applying a rotational motion and ultrasonic vibration to the tool. (1) Reduction of friction between tools, workpieces (working materials) and chips, and (2) vibration by advancing the machining by making the blade vibrate in the ultrasonic region (20 kHz or more) (amplitude of several μm or less). (3) Softening action of workpiece due to Braha effect, (4) Reduction of heat transfer coefficient due to shortening of actual cutting / grinding time, etc. Machining can be progressed by (4) alone or by a synergistic effect. For example, it is possible to improve workability by adapting to machining that is in principle short of cutting speed, such as small diameter machining and hail machining. Because the cutting edge vibrates at a high frequency, a very fast acceleration is obtained, and machining is performed with an impact force that causes the cutting edge to collide with the workpiece. Because of the progress, the above difficult-to-cut materials are not good and can be processed well.

  However, such an ultrasonic vibration machining apparatus is very difficult to stably support the spindle so as not to disturb the ultrasonic vibration of the spindle holding the tool (for example, the ultrasonic vibration of the spindle). The part that becomes the node of flexural vibration due to vibration is fixedly supported on the housing part surrounding the spindle, and the spindle is rotated together with this housing, etc.), the spindle cannot be supported with good stability, and the shaft stability is very poor. It has a disadvantage that it becomes a configuration and this causes a loss of processing accuracy, and therefore, the conventional ultrasonic vibration processing apparatus can process difficult-to-cut materials that are extremely difficult to process, At present, nothing that has been developed so far can achieve ultra-high precision processing required for nano-processing.

  Therefore, it is possible to perform material removal processing (cutting and grinding) well even for extremely hard materials (difficult-to-cut materials) such as brittle materials and carbides, and achieve ultra-high precision processing accuracy. Obtaining technology is desired.

The present invention further promotes research and development on the conventionally proposed machining apparatus, can perform material removal processing (cutting processing and grinding processing) even for difficult-to-cut materials, and enables ultra-high precision processing. and it provides a breakthrough ultrasonic vibration machining equipment unprecedented for.

  The gist of the present invention will be described with reference to the accompanying drawings.

A rotating means 2 for rotating the spindle 1 and a vibrating means 3 for ultrasonically vibrating the spindle 1 in the axial direction are provided, and material removal is performed by applying rotational motion and ultrasonic vibration to the tool a held on the spindle 1. In an ultrasonic vibration machining apparatus that performs machining, the spindle 1 is fitted into a bearing body 4 that receives the spindle 1, and the bearing body 4 is formed between the spindle 1 and an inner surface 4 a of the bearing body 4. A fluid supply means 6 for supplying the fluid 5 to the gap portion s is provided so as to support the spindle 1 in a non-contact manner by the static pressure of the fluid 5, and the fluid 5 is filled in the gap portion s by the vibration means 3. when the spindle 1 is ultrasonically vibrated in the axial direction, and flexural vibration displacement surfaces to vibration displacement deflection in the radial direction of the spindle 1, which, without contact with the inner surface 4a of the bearing body 4 facing the and the spin Flexural vibration displacement surface Le 1 and between the inner surface 4a of the bearing member 4, the utilizing flexural vibration displacement of the deflection vibration displacement surface of the spindle 1 with the ultrasonic vibration, radial the spindle 1 The inner surface 4a of the bearing body 4 is provided at a position through a minute gap and a peripheral surface serving as the flexural vibration displacement surface of the spindle 1 so as to generate a squeeze dynamic pressure for non-contact support. The present invention relates to an ultrasonic vibration processing apparatus.

  In addition, the fluid supply means 6 includes a static pressure pad 7 capable of supplying fluid 5 into the bearing body 4 from a porous surface portion 7a provided on the inner surface 4a of the bearing body 4. The ultrasonic vibration machining apparatus according to claim 1.

  The static pressure pad 7 faces the spindle 1 as an inner surface 4a of the bearing body 4 so that the spindle 1 can be supported in a non-contact manner from as many directions as possible by the static pressure of the fluid 5. The ultrasonic vibration machining apparatus according to claim 2, wherein the ultrasonic vibration machining apparatus is provided at a plurality of locations.

  Further, the spindle 1 is formed in a shape having a protruding portion 1t protruding in a direction intersecting the axial direction, and the bearing body is formed in a shape in which the protruding portion 1t is supported in a thrust direction by the static pressure of the fluid 5. 4. The ultrasonic vibration machining apparatus according to claim 1, wherein an inner surface 4 a of 4 is formed.

  5. The ultrasonic vibration machining apparatus according to claim 1, wherein the vibration unit 3 includes an actuator 3 a that oscillates when a high-frequency voltage is applied. 6. Is.

  Further, the feed guide means 8 has a work holding portion 8a for holding the work W, and relatively moves the work W held by the work hold portion 8a and the tool a held by the spindle 1, and the feed guide means 8 Control means 9 for variably controlling the feed guide movement by means of and a measuring means 10 for measuring the machining resistance applied to the tool a. The feed guide is based on the measurement result sent from the measurement means 10 to the control means 9. 6. A constant-pressure feed processing machine P for adjusting and controlling a processing resistance applied to the tool a to a predetermined amount by variably controlling a feed guide moving speed of the means 8. The ultrasonic vibration machining apparatus according to any one of the above items.

  According to the present invention, a spindle holding a tool is fitted and disposed in a bearing body, and vibration motion is generated by a static pressure of a fluid supplied to a gap portion between the spindle and the inner surface of the bearing body and a squeeze dynamic pressure. Because it is configured to be able to support the shaft without interfering with the tool, it is possible to advance the machining while satisfactorily vibrating the tool without attenuating the ultrasonic vibration of the tool. Phenomenon can reduce cutting force (working resistance) very much, reduce heat generation, residual stress and work-affected layer, reduce cutting temperature, minimize work-affected layer and extend tool life. Machining based on the principle makes it possible to cut and grind even difficult-to-cut materials that are extremely hard and difficult to machine.

  Further, in the present invention, the spindle holding the tool is configured so that it can be firmly and stably supported by the static pressure of the fluid and the squeeze dynamic pressure in the bearing body. Since it can rotate very stably without blurring, it is excellent in machining accuracy, and thus high-precision machining can be realized.

  Therefore, the present invention could not be realized in the past, for example, processing of a hard glass mold using ceramic or mirror finishing of an injection mold by machining, waveguide, microreactor, injection nozzle, etc. It is an extremely innovative and highly practical ultrasonic vibration processing apparatus that can achieve highly accurate processing on hard and brittle materials (hard-to-cut materials) that are difficult to process.

  Further, in the invention described in claim 6, by providing a constant pressure feed processing machine, processing is performed by a so-called "constant pressure processing" method in which the feed speed is adjusted so that the processing resistance applied to the tool during processing is constant. Therefore, it is possible to further improve the accuracy of the processing shape, and to achieve an excellent ultrasonic vibration processing apparatus that can achieve higher accuracy processing.

  Embodiments of the present invention that are considered suitable (how to carry out the invention) will be briefly described with reference to the drawings, illustrating the operation of the present invention.

  When the spindle 1 is rotated and ultrasonically vibrated by the rotating means 2 for rotating the spindle 1 and the vibrating means 3 for ultrasonically vibrating the spindle 1 in the axial direction, the tool a held on the spindle 1 is rotated and moved. Ultrasonic vibration is applied.

  Here, the spindle 1 is fitted and disposed in a bearing body 4 that receives the spindle 1. The bearing body 4 is supplied with fluid 5 by the fluid supply means 6 to the gap s between the spindle 1 and the inner surface 4 a of the bearing body 4 by the fluid supply means 6, and the spindle 1 is driven by the static pressure of the fluid 5. Support non-contact.

  Therefore, the spindle 1 is supported in a non-contact state in the bearing body 4 by the static pressure of the fluid 5 without contacting the bearing body 4, that is, without disturbing the ultrasonic vibration of the spindle 1. Will be.

  Further, when the spindle 1 is ultrasonically vibrated, the peripheral surface of the spindle 1 is periodically displaced in the radial direction by the bending vibration of the spindle 1.

At this time, a surface (hereinafter referred to as a displacement surface) that is displaced in the radial direction of the spindle 1 and an inner surface 4a of the bearing body 4 facing the surface are relatively oscillated at a high frequency in the facing direction (contact / separation direction). In addition, since the distance between the two opposing surfaces is very close (because the inner surface 4a of the bearing body 4 is provided at a position close to the spindle 1), the displacement surface of the spindle 1 and the bearing When the fluid 5 is filled in the gap portion s between the body 4 and the inner surface 4a, a load capacity is generated between the two opposing surfaces, so that the squeeze dynamic pressure acts on the spindle 1. .

  That is, at the time of ultrasonic vibration, the spindle 1 is not only supported in a non-contact state by the static pressure but also in a non-contact state by the squeeze dynamic pressure.

Therefore, the spindle 1 that ultrasonically vibrates in the bearing body 4 is supported firmly and stably by the combination of the static pressure of the fluid 5 and the squeeze dynamic pressure without being disturbed by the ultrasonic vibration. Therefore, the rigidity of the spindle 1 (particularly, radial rigidity due to squeeze dynamic pressure) and damping characteristics can be improved, and the tool a which is held on the spindle 1 and applied with rotational motion and ultrasonic vibrations is subjected to shaft deflection. stable and rotational motion was not, and thus capable of performing good ultrasonic vibration in the axial direction.

  Therefore, according to the present invention, the spindle 1 holding the tool a is fitted and disposed in the bearing body 4, and the fluid 5 supplied to the gap portion s between the spindle 1 and the inner surface 4 a of the bearing body 4. Since the shaft can be supported without interfering with the vibration motion by the static pressure and the squeeze dynamic pressure, the machining can be advanced while the ultrasonic vibration of the tool a is satisfactorily vibrated without attenuating the ultrasonic vibration of the tool a. The cutting force (machining resistance) can be made very small by the ultra-fine machining phenomenon due to repeated impact force, and the heat generation, residual stress and machining layer are reduced, cutting temperature is lowered, machining layer is minimized, Tool life can be extended, so that difficult-to-cut materials that are extremely hard and difficult to machine due to machining based on the so-called maternity principle can be cut and ground well, and the spindle 1 holding this tool a , In the bearing body 4, the tool a can be supported in a strong and stable manner by the static pressure of the fluid 5 and the squeeze dynamic pressure. Therefore, it is excellent in processing accuracy, so that high-accuracy processing can be realized. Therefore, the present invention can be applied to, for example, processing of a mold for hard glass using ceramics or injection molding by machining. High-precision processing can be achieved on hard and brittle materials (hard-to-cut materials) that are difficult to process such as mirror finishing, waveguides, microreactors, injection nozzles, and the like.

  Further, for example, the fluid supply means 6 includes a static pressure pad 7 that supplies the fluid 5 into the bearing body 4 from a porous surface portion 7 a that is flush with the inner surface 4 a of the bearing body 4. In this case, since the fluid 5 can be directly supplied to the gap s from the surface portion 7a of the static pressure pad 7, for example, the fluid 5 can be supplied to and filled in the gap s quickly and reliably. can do.

  Further, for example, the static pressure pad 7 is simply provided on a plurality of locations facing the spindle 1 on the inner surface 4a of the bearing body 4 so that the static pressure of the fluid 5 can be easily applied from as many directions as possible. It can be set as the structure which can support the spindle 1 non-contactingly.

  Also, for example, a feed holding means 8 having a workpiece holding portion 8a for holding the workpiece W, a feed guide means 8 for relatively moving the workpiece W held by the workpiece holding portion 8a and the tool a held by the spindle 1, and the feed guide. The control means 9 variably controls the feed guide movement by the means 8 and the measurement means 10 for measuring the machining resistance applied to the tool a. Based on the measurement result sent from the measurement means 10 to the control means 9, In the case of a configuration including a constant pressure feed processing machine P that adjusts and controls the processing resistance applied to the tool a to a predetermined amount by variably controlling the feed guide moving speed of the feed guide means 8, for example, This is applied to tool a during material removal processing, such as increased machining resistance due to tool friction and clogging, and changes in machining resistance due to successive changes in the depth of cut in a three-degree-of-freedom curved surface such as a mold. The machining resistance to be applied to the tool a is measured by the measuring means 10, and when the machining resistance increases, the control means 9 causes the feed guide means 8 to change. Machining can be advanced by the “constant pressure machining” method in which the resistance applied to the tool a is constant, for example, by lowering the feed guide moving speed, so that the machining shape can be further increased without causing machining irregularities. Accuracy can be improved, and higher precision machining can be achieved.

  Specific embodiments of the present invention will be described with reference to the drawings.

  In this embodiment, a rotating means 2 for rotating the spindle 1 and a vibrating means 3 for ultrasonically vibrating the spindle 1 in the axial direction are provided, and rotational movement and ultrasonic vibration are applied to the tool a held on the spindle 1. It is an ultrasonic vibration machining device that applies and performs material removal processing such as cutting or grinding.

  Specifically, as shown in FIG. 1, a cutting / grinding machine M provided with a hybrid bearing (bearing body 4) that combines oil static pressure and squeeze dynamic pressure, and a tool used in the cutting / grinding machine M This is an ultrasonic vibration machining apparatus that integrates an on-machine production system B for a tool for producing a and a constant pressure feed machining machine P that holds and guides a workpiece W to realize ultrahigh precision machining.

  In the cutting / grinding machine M, the spindle 1 is fitted into a bearing body 4 that receives the spindle 1, and the bearing body 4 is a gap between the spindle 1 and the inner surface 4 a of the bearing body 4. The fluid supply means 6 for supplying the fluid 5 to s is provided so as to support the spindle 1 in a non-contact manner by the static pressure of the fluid 5. The fluid 5 is filled in the gap s, and the spindle 1 is driven by the vibration means 3. When an ultrasonic vibration is generated, the inner surface of the bearing body 4 is squeezed so that a squeeze dynamic pressure is generated between the displacement surface that is displaced in the radial direction of the spindle 1 and the inner surface 4a of the bearing body 4 facing the spindle. 4a is provided at a position close to the spindle 1.

  Specifically, as shown in FIG. 2, the tool holder 1 a of the spindle 1 is fitted and disposed in a housing-like bearing body 4 so as to protrude downward from the bearing body 4.

  As shown in FIG. 2, the fluid supply means 6 of the housing-like bearing body 4 supplies the fluid 5 into the bearing body 4 from a porous surface portion 7 a that is flush with the inner surface 4 a of the bearing body 4. It has a configuration in which the fluid 5 is supplied to the gap s so as to have a hydrostatic pad 7 to be supplied and soak out from the porous surface portion 7a. The static pressure pads 7 are provided at a plurality of locations facing the spindle 1 on the inner surface 4 a of the bearing body 4.

  Therefore, the fluid 5 can be supplied and filled directly and quickly from the surface portion 7a of the static pressure pad 7 into the gap portion s, and the gap portion can be supplied from the static pressure pads 7 provided at the plurality of locations. The spindle 1 can be supported in a non-contact manner from as many directions as possible by the static pressure of the fluid 5 supplied to s. Further, since the surface portion 7a is formed in a porous shape and is flush with the inner surface 4a of the bearing body 4, the static pressure pad 7 may hinder the generation of squeeze dynamic pressure. No.

  Further, as shown in FIG. 2, the spindle 1 is provided with the tool holder 1a at the lower end and the vibration means 3 at the upper end side, and a part of the center near the lower end is formed with a large diameter so as to be orthogonal to the axial direction. The inner surface shape 4a of the bearing body 4 is also formed in a partly concave shape in accordance with the shape of the spindle 1. Furthermore, a static pressure pad 7 is also provided on the inner surface 4a of the bearing body 4 facing the upper and lower surfaces of the projecting portion 1t of the spindle 1, respectively.

  Accordingly, the spindle 1 reliably receives the static pressure of the fluid 5 on the upper and lower surfaces of the projecting portion 1t, and is supported by the bearing body 4 in a non-contact manner in the thrust direction.

  As shown in FIG. 2, the vibration means 3 provided at the upper end of the spindle 1 has an actuator 3a that is connected to the upper end of the spindle 1 and oscillates when a high frequency voltage is applied.

  Therefore, by applying an ultrasonic voltage to the actuator 3, the actuator 3 oscillates in the axial direction of the spindle 1, the spindle 1 acts as a vibration horn, and the oscillation of the actuator 3 is held in the tool holder 1a. It is given to the tool a.

  In FIG. 2, reference numerals 2a and 2b denote a rotation motor 2a and a pulley 2b of the rotating means 2, and the rotation drive of the rotation motor 2a is transmitted to the spindle 1 by the pulley 2b to rotate the spindle 1.

In addition, when the spindle 1 is ultrasonically vibrated in the axial direction by the vibration means 3, as shown in FIG. At this time, when the flexural vibration amplitude of the spindle 1 is maximum, the displacement surface of the spindle 1 does not come into contact with the inner surface 4a of the bearing body 4 and is close to the spindle 1 (the displacement surface of the spindle 1 and the bearing The inner surface 4a of the bearing body 4 is interposed between the peripheral surface of the spindle 1 and a minute gap so that a squeeze dynamic pressure is generated between the inner surface 4a of the body 4 and the spindle 1 in a radial direction without contact. Position) , the inner surface 4a of the bearing body 4 is set. The fluid 5 employs oil in this embodiment.

  Therefore, when the spindle 1 vibrates ultrasonically, a good load capacity is generated between the displacement surface of the spindle 1 and the bearing body 4 facing the spindle 1, and the spindle 1 is squeezed by dynamic pressure. Non-contact support in the radial direction is made.

  As described above, in the grinding / cutting part M, the spindle 1 has both a thrust direction and a radial direction by the bearing body 4 having a hybrid bearing structure in which the static pressure of the fluid 5 (oil) and the squeeze dynamic pressure are combined. A spindle 1 which is a vibration horn that is well supported and serves as a rotor for transmitting the rotational drive of the rotating means 2 to the tool a and transmits the vibration of the vibrating means 3 to the tool a is a bearing body as this hybrid bearing. 4 has excellent rigidity and excellent damping characteristics. Therefore, the tool a held in the tool holder 1a of the spindle 1 is excellent in rotational motion with little swing and excellent in the axial direction. Sound wave vibration will be performed.

  Therefore, it has a good cutting and grinding function for difficult-to-cut materials that are difficult to machine, which is a characteristic of ultrasonic vibration machining. Is done.

  Specifically, as shown in FIG. 1, the constant pressure feed processing machine P has a workpiece holding portion 8 a that holds a workpiece W, and the workpiece W held by the workpiece holding portion 8 a and the spindle 1 hold it. Feed guide means 8 for relatively moving the tool a, control means 9 for variably controlling the feed guide movement by the feed guide means 8, and measurement for measuring machining resistance such as cutting resistance and grinding resistance applied to the tool a The processing resistance applied to the tool a is controlled to be a predetermined amount by variably controlling the feed guide moving speed of the feed guide means 8 based on the measurement result sent from the measurement means 10 to the control means 9. It is the structure which performs adjustment control so that it may become.

  Therefore, when the material removal processing is performed, for example, if the cutting force is changed, that is, the actual cutting amount is changed. As a result, the processing accuracy is lowered. In this respect, in this embodiment, the constant pressure feed processing machine is used. When the cutting force successively measured by the measuring means 10 is increased by P, the control means 9 lowers the feed guide moving speed of the feed guide means 8 (by the force feedback loop), so that the tool a A “constant pressure machining” method is possible in which machining is advanced by adjusting and controlling so that the applied cutting force is always constant.

  Therefore, by combining this constant pressure feed processing machine P with the above-described cutting / grinding machine M, the processing accuracy is further improved, and an excellent ultrasonic vibration processing device that realizes further high-precision processing.

  In addition, the on-machine production system B for producing the tool a used in the cutting / grinding machine M is specifically as follows. First, as shown in FIG. The tool base material 11 in this state is processed and formed into a predetermined tool shape by the base material processing means T (grinding machine, cutting machine, etc.).

  Next, as shown in FIG. 4B, the tool base material 11 processed and formed in this predetermined shape is used for the base treatment during the plating process in order to prevent electrodeposition peeling while being held on the spindle 1. Substrate treatment is performed by dipping in a common substrate treatment solution 13 such as chromic acid or hydrochloric acid.

  Next, as shown in FIG. 4 (c), the electrode base D 11 is electrodeposited with a nickel sulfate plating solution to fix the diamond abrasive grains 12 to the tool base 11. Thus, the electrodeposition tool a is completed. Note that the electrodeposition procedure of the electrodeposition means D is not limited to this embodiment, and any procedure may be used as long as it can electrodeposit the abrasive grains 12 as in this embodiment. Further, the abrasive grains 12 are not limited to the diamond abrasive grains 12 and may be appropriately selected depending on the application, such as cubic boron nitride abrasive grains (CBN abrasive grains).

Also, specifically, conductive Chakushudan D is actually measuring the vibration state said by the vibration means 3 by applying ultrasonic vibration to the tool substrate 11 which is processed and formed into a predetermined tool shape by the matrix processing means T Then, based on this measurement result, the position for electrodepositing the abrasive grains 12 is determined.

  Note that the actual measurement result of the vibration form is, for example, the actual measurement result of the axial amplitude and the radial amplitude of each part of the tool base material 11, and based on these measurement results, depending on the intended use, By determining the electrodeposition position of the abrasive grains 12 (diamond abrasive grains 12) at a desired position, the optimum electrodeposition tool a can be easily obtained.

  In addition, by using the electrodeposition tool a electrodeposited with the diamond abrasive grains 12 as the tool a used in the ultrasonic vibration processing apparatus while being held on the spindle 1, a steel material using a diamond tool, which has been conventionally difficult, is used. The cutting process (material removal process) is also possible, and in this respect, it is very practical.

  From the above, conventionally, the vibration form of the tool a when the ultrasonic vibration is applied while holding the tool a on the spindle 1 is very complicated, and a tool a suitable for this is selected from the existing tools a. Although difficult to use, according to the on-machine creation system B of the tool of this embodiment, the tool base material 11 is held on the spindle 1 and the vibration form is measured, and then the desired value determined based on the measurement result is determined. The optimum electrodeposition tool a can be easily manufactured by electrodepositing the abrasive grains 12 (diamond abrasive grains 12) at the position of 1. Therefore, an electrodeposition tool a that is truly suitable for an ultrasonic vibration processing apparatus can be obtained. It can be easily obtained.

That is, a rotating means 2 for rotating the spindle 1 and a vibrating means 3 for ultrasonically vibrating the spindle 1 in the axial direction are provided, and rotational movement and ultrasonic vibration are applied to the tool a held on the spindle 1. In the method of manufacturing an electrodeposition tool a used in an ultrasonic vibration machining apparatus for performing material removal processing, a tool base material 11 is held on the spindle 1, and the tool base material 11 in the held state is predetermined by a base material processing means T. Since the tool shape is processed and formed, the tool a (electrodeposition tool a) is produced by electrodepositing the abrasive grains 12 by the electrodeposition means D while the tool base material 11 is held on the spindle 1. When the electrodeposition tool a is held on the spindle 1 and rotated, the electrodeposition tool a rotates while rotating periodically, so-called the electrodeposition tool a with very little swinging is simplified. Can be manufactured.

Moreover, since this electrodeposition tool a is manufactured by electrodepositing abrasive grains 12 at predetermined positions by electrodeposition means D, the electrodeposition position of the abrasive grains 12 depends on the intended use of the electrodeposition tool a. Therefore, the electrodeposition tool a having a desired machining performance can be easily selected and manufactured.

In addition, in order to manufacture the electrodeposition tool a as described above while the tool base material 11 is held on the spindle 1 as described above, for example, the base material processing means T is formed into a predetermined tool shape. An ultrasonic vibration is applied to the tool base material 11 by the vibration means 3 to actually measure the vibration form. Based on the actual measurement results (for example, axial amplitude and radial amplitude of each part of the tool base material 11), It is also possible to arbitrarily determine the position for electrodepositing the abrasive grains 12. In other words, the vibration form of the tool a when the tool a is held on the spindle 1 and ultrasonic vibration is applied is very complicated, and it is difficult to select and use a tool a suitable for this from the existing tools a. However, in this embodiment, the tool base 11 is held on the spindle 1 and the vibration form is measured, and then the electrode 12 is electrodeposited at a desired position determined based on the measurement result. The tool a can be easily manufactured. Therefore, an electrodeposition tool a that is truly suitable for an ultrasonic vibration machining apparatus can be easily obtained.

  In this embodiment, the electrodeposition tool a produced by the on-machine creation system B of this tool is adopted as the tool a that is held on the spindle 1 of the cutting / grinding section M, and a “constant pressure machining” method is employed during machining. By adopting a configuration equipped with a constant pressure feed processing machine P to perform, mirror finishing of injection molds by machining or machining hard glass molds using ceramics, which could not be realized in the past, for example An ultra-vibrating and practical ultrasonic vibration processing device that can achieve highly accurate processing of hard and brittle materials (hard-to-cut materials) such as optical waveguides, microreactors, injection nozzles, etc. Will be realized.

  Note that the present invention is not limited to this embodiment, and the specific configuration of each component can be designed as appropriate.

It is a schematic explanatory drawing of the ultrasonic vibration processing apparatus which concerns on a present Example. It is explanatory sectional drawing of the spindle 1 and the bearing body 4 which concern on a present Example. It is a figure which shows the time of the ultrasonic vibration of the spindle 1 which concerns on a present Example. It is a schematic explanatory drawing which shows the manufacturing method of the electrodeposition tool a used for the ultrasonic vibration processing apparatus which concerns on a present Example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Spindle 1t Protrusion part 2 Rotating means 3 Vibration means 3a Actuator 4 Bearing body
4a Inner surface 5 of bearing body 6 Fluid 6 Fluid supply means 7 Static pressure pad 7a Surface portion 8 Feed guide means
8a Work holding part 9 Control means
10 Measuring means P Constant pressure feeding machine W Work a Tool, electrodeposition tool s Gap

Claims (6)

An ultrasonic vibration for providing a rotating means for rotating the spindle and a vibrating means for ultrasonically vibrating the spindle in the axial direction, and applying a rotational motion and ultrasonic vibration to the tool held on the spindle to perform material removal processing. In the processing apparatus, the spindle is fitted and disposed in a bearing body that receives the spindle, and the bearing body includes a fluid supply unit that supplies fluid to a gap portion between the spindle and the inner surface of the bearing body. The spindle is supported in a non-contact manner by the static pressure of the fluid, and when the fluid is filled in the gap portion and the spindle is ultrasonically vibrated in the axial direction by the vibration means, the spindle is flexed and displaced in the radial direction. a flexural vibration displacement surfaces, which without contacting the inner surface of the bearing body opposing, and, between the inner surface of the bearing member and flexural vibration displacement surface of the spindle, the greater By using the flexural vibration displacement plane of the bending vibration displacement of the spindle due to wave oscillation, the spindle so squeeze the dynamic pressure is generated in a non-contact supported in a radial direction, said inner surface of said bearing body of said spindle An ultrasonic vibration machining apparatus provided at a position through a minute gap and a peripheral surface serving as a flexural vibration displacement surface .   2. The ultrasonic vibration according to claim 1, wherein the fluid supply means includes a static pressure pad capable of supplying a fluid from a porous surface portion provided on an inner surface of the bearing body into the bearing body. Processing equipment.   The static pressure pads are provided at a plurality of locations facing the spindle on the inner surface of the bearing body so that the spindle can be supported in non-contact from as many directions as possible by the static pressure of the fluid. The ultrasonic vibration processing apparatus according to claim 2.   The spindle is formed in a shape having a protruding portion that protrudes in a direction crossing the axial direction, and the inner surface of the bearing body is formed in a shape that supports the protruding portion in the thrust direction by the static pressure of the fluid. The ultrasonic vibration processing apparatus according to claim 1, wherein:   The ultrasonic vibration machining apparatus according to claim 1, wherein the vibration unit includes an actuator that oscillates when a high-frequency voltage is applied thereto.   A feed guide unit that has a workpiece holding unit that holds the workpiece W, and that relatively moves the workpiece held by the workpiece holding unit and the tool held by the spindle, and a control that variably controls the feed guide movement by the feed guide unit. And a measuring means for measuring a machining resistance applied to the tool, and the tool is variably controlled based on a measurement result sent from the measuring means to the control means. The ultrasonic vibration machining apparatus according to claim 1, further comprising a constant-pressure feed machining machine that performs adjustment control so that a machining resistance applied to a predetermined amount.

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