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JP4512993B2 - Water treatment equipment - Google Patents
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JP4512993B2 - Water treatment equipment - Google Patents

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JP4512993B2
JP4512993B2 JP2004238298A JP2004238298A JP4512993B2 JP 4512993 B2 JP4512993 B2 JP 4512993B2 JP 2004238298 A JP2004238298 A JP 2004238298A JP 2004238298 A JP2004238298 A JP 2004238298A JP 4512993 B2 JP4512993 B2 JP 4512993B2
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water
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adsorption element
water treatment
organic substance
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勉 杉浦
和之 川田
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Toyobo Co Ltd
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Description

本発明は、有機物質を含有する水から有機物質を除去して浄化する装置に関し、特に各種工場、研究施設等から排出される有機溶剤等の有機物質を含有した産業排水の浄化に用いられる装置に関する。   The present invention relates to an apparatus for removing and purifying an organic substance from water containing the organic substance, and in particular, an apparatus used for purifying industrial wastewater containing an organic substance such as an organic solvent discharged from various factories, research facilities, etc. About.

従来より、有害有機物質を水から除去して浄化する装置としては、活性炭等の吸着材を用いた交換式吸着装置が広く用いられている。すなわち、活性炭等の吸着材を充填した槽に有機物質を含有した水を通流させ、吸着材により水中の有害有機物質を効率的に除去する事ができるシンプルな処理装置である。しかしながら、交換式吸着装置は有害有機物質を一定時間吸着し続け、吸着材の吸着能力が飽和に達すれば、新品への交換もしくは一度装置から吸着材を取り出して再生が必要となって連続浄化できず、更に、水の浄化は、空気の浄化と異なり、微生物の繁殖が不可避であり、吸着剤の寿命を縮めることもあって、交換および再生への労力、コストの増大が問題となり、また有害有機物質が作業員の健康に悪影響を及ぼすこともあった。かかる問題を解決するため、多量の吸着剤を用いることで、交換周期を延長させることも考えられるが、装置の大型化、設備投資が不可避となる。また、吸着剤である活性炭の表面を適度に疎水化させる等の吸着能力を向上させることも検討されているが(例えば特許文献1参照)、微量の有害物質を除去する場合には有効であっても、多量の有害有機物質を高い効率で処理することが要請される場合には根本的な解決手段になっておらず、特に研究所や工場等で用いる場合に満足できるものではなかった。また、従来の浄化装置では、吸着剤使用開始時と使用終了前(吸着剤取替え直前)では有害物質吸着性能が変化しており、安定に浄化処理することができないという問題点も有していた。   Conventionally, as an apparatus for removing harmful organic substances from water and purifying it, an exchangeable adsorption apparatus using an adsorbent such as activated carbon has been widely used. That is, it is a simple treatment apparatus that allows water containing an organic substance to flow through a tank filled with an adsorbent such as activated carbon and efficiently removes harmful organic substances in water by the adsorbent. However, the exchangeable adsorption device continues to adsorb toxic organic substances for a certain period of time, and if the adsorption capacity of the adsorbent reaches saturation, it can be continuously replaced by replacing it with a new one or removing the adsorbent from the device and regenerating it once. In addition, unlike the purification of air, the purification of water is unavoidable for the growth of microorganisms, and the life of the adsorbent may be shortened. Organic materials could adversely affect the health of workers. In order to solve such a problem, it is conceivable to extend the replacement cycle by using a large amount of adsorbent, but it is inevitable to enlarge the apparatus and invest in the equipment. In addition, although it has been studied to improve the adsorption ability such as appropriately hydrophobizing the surface of the activated carbon as an adsorbent (see, for example, Patent Document 1), it is effective in removing a trace amount of harmful substances. However, it is not a fundamental solution when it is required to treat a large amount of harmful organic substances with high efficiency, and it is not satisfactory particularly when used in laboratories and factories. In addition, the conventional purification apparatus has a problem that the toxic substance adsorption performance changes between the start of use of the adsorbent and before the end of use (immediately before the replacement of the adsorbent), and the purification process cannot be stably performed. .

特開平9−77508号公報JP-A-9-77508

本発明は、従来技術の課題を背景になされたもので、水の連続浄化を実現し、基本的に吸着剤の交換が必要なく、多量有害有機物質を高効率且つ安定に除去することができる処理装置を提供することを課題とするものである。   The present invention has been made against the background of the problems of the prior art, achieves continuous purification of water, basically eliminates the need for replacement of the adsorbent, and can remove a large amount of harmful organic substances with high efficiency and stability. It is an object to provide a processing apparatus.

本発明者らは、上記課題を解決するため、鋭意検討した結果、ついに本発明を完成するに到った。即ち本発明は(1)有機物質を含有する水から有機物質を吸着除去して水を浄化する装置であって、有機物質を含有する水を吸着素子に通流させて該吸着素子に有機物質を吸着させる吸着工程と、該吸着素子に高温の加熱ガスを通流させて該吸着素子に吸着された有機物質を脱着する脱着工程とを、交互に行う事を特徴とする水処理装置、(2)前記吸着素子に含まれる吸着材が活性炭及び/またはゼオライトである事を特徴とする前記(1)記載の水処理装置、(3)前記吸着素子がハニカム状構造を有する事を特徴とする前記(1)又は(2)記載の水処理装置、(4)前記吸着素子がフッ素、シリコン、炭化水素系化合物により撥水処理されている事を特徴とする前記(1)乃至(3)記載の水処理装置、(5)有機物質を含有する水を吸着素子に通流させて該吸着素子に有機物質を吸着させる吸着工程の後工程であり、該吸着素子に高温の加熱ガスを通流させて該吸着素子に吸着された有機物質を脱着する脱着工程の前工程で、ガスの通流により吸着素子内の水を除去するパージ工程を有する事を特徴とする前記(1)乃至(4)記載の水処理装置、(6)前記ガスの通流により吸着素子内の水を除去するパージ工程にて発生した水を水処理装置の入口に戻すように構成されている事を特徴とする前記(1)乃至(5)記載の水処理装置である。 As a result of intensive studies in order to solve the above problems, the present inventors have finally completed the present invention. That is, the present invention is (1) an apparatus for purifying water by adsorbing and removing an organic substance from water containing an organic substance, wherein the water containing the organic substance is passed through the adsorption element and the organic substance is passed through the adsorption element. A water treatment apparatus characterized by alternately performing an adsorption process for adsorbing water and a desorption process for desorbing an organic substance adsorbed on the adsorption element by passing a high-temperature heating gas through the adsorption element; 2) The water treatment apparatus according to (1) above, wherein the adsorbent contained in the adsorbing element is activated carbon and / or zeolite, and (3) the adsorbing element has a honeycomb structure. (1) to (3), wherein the water treatment device according to (1) or (2), (4) the adsorption element is subjected to water repellent treatment with fluorine, silicon, or a hydrocarbon compound. Water treatment equipment, (5) water containing organic substances Desorption, which is a subsequent step of the adsorption step of passing an adsorbing element to adsorb an organic substance on the adsorbing element, and desorbing the organic substance adsorbed on the adsorbing element by passing a high-temperature heated gas through the adsorbing element The water treatment device according to any one of (1) to (4) above, wherein (6) the gas flow is provided. The water treatment device according to any one of (1) to (5), wherein the water generated in the purge step for removing water in the adsorption element is returned to the inlet of the water treatment device. .

本発明による水処理装置は、多量の有害有機物質を高い効率で連続的に除去することができ、基本的に吸着剤の交換の必要が無いため、低コストで、安定に、高い能力で水中の有害有機物質を除去処理することができるという利点がある。   The water treatment apparatus according to the present invention can remove a large amount of harmful organic substances continuously with high efficiency, and basically does not require the replacement of the adsorbent. There is an advantage that harmful organic substances can be removed.

本発明にかかる水処理装置は、有機物質を含有する水を吸着素子に通流させて該吸着素子に有機物質を吸着させる吸着工程設備と、該吸着素子に高温の加熱ガスを通流させて該吸着素子に吸着された有機物質を脱着する脱着工程設備を備え、かかる工程を交互に行う水処理装置であることが好ましい。かかる構造を採用することにより、処理を連続的におこなうことができるからである。   The water treatment apparatus according to the present invention includes an adsorption process facility for allowing water containing an organic substance to flow through an adsorption element and adsorbing the organic substance to the adsorption element, and a high-temperature heating gas to flow through the adsorption element. It is preferable that the water treatment apparatus includes a desorption process facility for desorbing the organic substance adsorbed on the adsorption element, and alternately performs such a process. This is because the processing can be continuously performed by adopting such a structure.

より好ましい装置の構造としては、吸着素子が回転することができ、吸着工程で有機物質を吸着した吸着素子の部位が、吸着素子の回転により、脱着工程へ移動する構造を有する水処理装置である。   A more preferable apparatus structure is a water treatment apparatus having a structure in which the adsorbing element can rotate and the part of the adsorbing element that adsorbs the organic substance in the adsorption process moves to the desorption process by the rotation of the adsorbing element. .

以下、図面を参照して、本発明にかかる水処理装置について詳細に説明する。図2は本発明の好ましい実施形態の例である。図2に例示した水処理装置は、有害有機物質を含有した水を、原水導入ライン21を通じて図3に例示した円柱状または図4に例示した円筒状に形成された吸着素子22の吸着領域23に送られ、吸着材により有機物質を吸着除去して浄化水として排出する吸着工程を有する。   Hereinafter, a water treatment apparatus according to the present invention will be described in detail with reference to the drawings. FIG. 2 is an example of a preferred embodiment of the present invention. The water treatment apparatus illustrated in FIG. 2 has an adsorption region 23 of the adsorption element 22 formed in the columnar shape illustrated in FIG. 3 or the cylindrical shape illustrated in FIG. And an adsorbing step of adsorbing and removing the organic substance by the adsorbent and discharging it as purified water.

一方で前記吸着素子22は回転し、パージ領域24に送られ、ガスの通流により吸着素子表面に残存する水滴を除去するパージ工程を有することが好ましい。水滴を気流で除去することにより、加熱による有害有機物質の脱着が容易になるからである。パージガスを高温加熱気流とすることにより、後述する脱着工程を同時におこなってもよいが、エネルギーコスト等から考えて、パージ工程と脱着工程を別にすることが好ましい。   On the other hand, it is preferable that the adsorption element 22 has a purge process in which the adsorption element 22 rotates and is sent to the purge region 24 to remove water droplets remaining on the adsorption element surface by gas flow. This is because removal of water droplets with an air stream facilitates desorption of harmful organic substances by heating. Although the desorption process described later may be performed simultaneously by using the purge gas as a high-temperature heating airflow, it is preferable to separate the purge process and the desorption process from the viewpoint of energy cost.

ここで除去された水は、有機物質を含むものであり、集積して焼却等してもよいが、戻りライン25より装置入口の有機物質を含有する原水に戻すことが好ましい。かかる方法によれば、工程数を省略でき、効率的だからである。   The water removed here contains an organic substance and may be accumulated and incinerated. However, it is preferable to return to the raw water containing the organic substance at the inlet of the apparatus from the return line 25. This is because the number of steps can be omitted and this method is efficient.

また、吸着素子22は回転し、パージ工程の後工程で脱着領域26にて加熱ガスにより吸着素子を加熱する事で吸着した有害物質を脱着して再度吸着が行える状態に再生される脱着工程を有することが好ましい。加熱により有害有機物質を脱着した後、連続的に吸着工程に移動することができるからである。脱着工程により発生した有機物質を含有したガスは、直接燃焼装置や触媒燃焼装置、蓄熱式燃焼装置等の燃焼装置や活性炭素繊維を使用した溶剤回収装置等の一般的に用いられるガス処理装置にて処理する事ができる。   Further, the adsorption element 22 is rotated, and a desorption process is performed in which the adsorbed harmful substance is desorbed by heating the adsorption element with a heating gas in the desorption region 26 after the purge process and is regenerated so that the adsorption can be performed again. It is preferable to have. This is because after the harmful organic substance is desorbed by heating, it can be continuously moved to the adsorption step. Gases containing organic substances generated by the desorption process are used in general gas processing equipment such as direct combustion equipment, catalytic combustion equipment, thermal storage type combustion equipment, etc. and solvent recovery equipment using activated carbon fibers. Can be processed.

上記の吸着工程→パージ工程→脱着工程を連続的に繰り返す事で、有機物質を含有する水から有機物質を経済的に吸着除去できる装置となる。かかる連続的な吸着−加熱脱着により、低コストで、安定に、高い能力で水中の有害有機物質を除去処理することができ、更には藻等の発生を防ぐことができる。   By continuously repeating the above-described adsorption process → purge process → desorption process, the apparatus can economically adsorb and remove organic substances from water containing organic substances. By such continuous adsorption-heat desorption, it is possible to remove and remove harmful organic substances in water at low cost, stably and with high capacity, and to prevent generation of algae and the like.

本発明にかかる吸着素子の構造は、特に限定されるものではなく、粒状物を充填したもの、繊維状物を不織布等にしたもの等であってもよいが、図1に例示したハニカム状構造を有することが特に好ましい。ハニカム状構造とすることにより、粒状や繊維状に比べて圧力損失を極めて低くなり、処理能力を増大させることができ、ゴミ等の固形物による目詰まりが起こりにくく、更にはパージ工程においてガスの流通により吸着素子表面の水滴を除去する際にも、容易に水滴の除去が可能となるからである。 The structure of the adsorbing element according to the present invention is not particularly limited, and may be one filled with a granular material, one made of a fibrous material into a non-woven fabric, or the like. It is particularly preferred to have By adopting a honeycomb-like structure, pressure loss is extremely low compared to granular and fibrous forms, the processing capacity can be increased, clogging due to solids such as dust is less likely to occur, and furthermore, gas is not removed in the purge process. This is because even when water droplets on the surface of the adsorption element are removed by circulation, the water droplets can be easily removed.

本発明にかかる、吸着素子の運転は、連続的であることが好ましいが、除去すべき有害有機物質の量、処理水の量等を勘案して、間欠運転としてもよい。有害有機物質の量があるいは処理水の量が少ないような条件では、連続運転であることまで要求されず、運転コストを削減できるからである。   Although the operation of the adsorption element according to the present invention is preferably continuous, it may be intermittent operation in consideration of the amount of harmful organic substances to be removed, the amount of treated water, and the like. This is because, under the condition that the amount of harmful organic substances or the amount of treated water is small, it is not required that the operation is continuous, and the operation cost can be reduced.

本発明で用いる吸着剤は特に限定されるものではないが、活性炭またはゼオライトが水中での有害有機物質の吸着性能に優れており好ましい。中でもゼオライトは、親水性ゼオライトおよび疎水性ゼオライトがあるが、疎水性ゼオライトがより好ましい。これは、疎水性ゼオライトは親水性ゼオライトに比べてSi/Al比(モル比)が高い事で水分吸着率が低く、水よりも有機物質を優先的に吸着できる特徴があり、水中での有機物質の吸着性能がより優れているからである。また、疎水性ゼオライトは耐熱温度が著しく高く、脱着工程に置いてより高温の加熱空気を使用する事ができ、分子量が大きく、沸点の高い高温でしか脱着出来ない有機物質の場合でも適応が可能となるという効果も有する。   The adsorbent used in the present invention is not particularly limited, but activated carbon or zeolite is preferable because of its excellent ability to adsorb harmful organic substances in water. Among them, zeolites include hydrophilic zeolite and hydrophobic zeolite, and hydrophobic zeolite is more preferable. This is because hydrophobic zeolite has a low water adsorption rate due to its high Si / Al ratio (molar ratio) compared to hydrophilic zeolite, and can adsorb organic substances preferentially over water. This is because the adsorption performance of the substance is more excellent. Hydrophobic zeolite has a remarkably high heat-resistant temperature and can use heated air at a higher temperature in the desorption process, and can be applied even to organic substances that have high molecular weight and can be desorbed only at high temperatures with high boiling points. It also has the effect of becoming.

また、本発明にかかる装置に用いる吸着素子は、フッ素、シリコン、炭化水素系化合物により撥水処理されている事が好ましい。かかる処理を施すことにより、脱着工程における加熱処理の際、水の蒸発潜熱に必要とされるエネルギーを低減することができ、有害有機物質の脱着を容易にし、更には水よりも優先的に有機溶剤等の有害物質を選択的に吸着するようになり吸着性能が向上するという効果をも有するからである。特に好ましい処理剤はフッ素である。   The adsorbing element used in the apparatus according to the present invention is preferably water-repellent treated with fluorine, silicon, or a hydrocarbon compound. By performing such a treatment, the energy required for the latent heat of vaporization during the heat treatment in the desorption process can be reduced, desorption of harmful organic substances can be facilitated, and organic matter is given priority over water. This is because a harmful substance such as a solvent is selectively adsorbed and the adsorbing performance is improved. A particularly preferred treating agent is fluorine.

以下、実施例によりさらに本発明を詳細に説明するが、本発明はこれら実施例に限定されるものではない。
なお、評価は下記の方法によりおこなった。
(有機物質除去効果)
20ppmのトルエンを有する原水を温度25℃の水を3m3/minの流量で流し、10時間後と500時間運転後の各水処理装置出口のトルエン濃度を測定した。
(トルエン濃度評価)
ガスクロマトグラフ法により分析し測定した。
EXAMPLES Hereinafter, although an Example demonstrates this invention further in detail, this invention is not limited to these Examples.
The evaluation was performed by the following method.
(Organic substance removal effect)
Raw water containing 20 ppm of toluene was supplied at a flow rate of 3 m 3 / min with water at a temperature of 25 ° C., and the toluene concentration at the outlet of each water treatment apparatus after 10 hours and 500 hours of operation was measured.
(Toluene concentration evaluation)
Analysis and measurement were performed by gas chromatography.

〔実施例〕
吸着材としてSi/Al比(モル比)が1000で平均細孔径5.5Å、比表面積400m2/gのZSM−5型の疎水性ゼオライトを50重量%含有し、撥水剤として4フッ化エチレン樹脂を25wt%含有し、吸着領域、パージ領域、脱着領域に区分された450mmΦの直径で、厚み450mmの重量20kgの円柱状のハニカム状構造を有する吸着素子を使用した水処理装置に原水を導入した。
〔Example〕
Contains 50% by weight of ZSM-5 type hydrophobic zeolite having an Si / Al ratio (molar ratio) of 1000, an average pore size of 5.5 mm, and a specific surface area of 400 m 2 / g as an adsorbent, and tetrafluoride as a water repellent. Raw water is supplied to a water treatment apparatus containing an adsorption element containing 25 wt% of an ethylene resin and having a diameter of 450 mmΦ divided into an adsorption region, a purge region, and a desorption region and having a cylindrical honeycomb structure with a thickness of 450 mm and a weight of 20 kg. Introduced.

水処理装置の脱着工程における加熱ガスとして180℃の空気を使用し、脱着の風量は1m3/minとした。また、パージ工程おいては、空気を0.3m3/minで流した。また、吸着素子の回転数は2RPHの周期で回転させた。 180 ° C. air was used as a heating gas in the desorption process of the water treatment apparatus, and the desorption air flow was 1 m 3 / min. In the purge process, air was flowed at 0.3 m 3 / min. Further, the rotation speed of the adsorption element was rotated at a cycle of 2 RPH.

本実施例の水処理装置により浄化された水は、10時間後、500時間後、共にトルエン濃度が1ppm以下であった。吸着と脱着を連続して行い処理するため、性能低下がなく安定して高い効率で処理ができる。   The water purified by the water treatment apparatus of this example had a toluene concentration of 1 ppm or less after 10 hours and after 500 hours. Since adsorption and desorption are performed continuously, processing is stable and highly efficient with no performance degradation.

〔比較例〕
0.11m3の吸着層に平均細孔径16Å、比表面積1000m2/gで充填密度450g/lの円柱状の椰子殻活性炭を50kg充填した交換式吸着方式の水処理装置に原水を導入した。
[Comparative Example]
Raw water was introduced into a water treatment apparatus of an exchange type adsorption system in which 50 kg of cylindrical coconut shell activated carbon having an average pore diameter of 16 mm, a specific surface area of 1000 m 2 / g and a packing density of 450 g / l was packed in a 0.11 m 3 adsorption layer.

本比較例の水処理装置により浄化された水は、10時間後のトルエン濃度が1ppm以下であったが、500時間後にはトルエン濃度が入口と同じ20ppmであり、安定して高い効率で処理する事ができなった。これは実施例と異なり比較例は吸着のみの操作で吸着と再生を連続して実施しないために、直ぐに吸着材の吸着能力が飽和に達してしまうからである。   The water purified by the water treatment device of this comparative example had a toluene concentration of 1 ppm or less after 10 hours, but after 500 hours, the toluene concentration was 20 ppm, the same as the inlet, and was treated stably and with high efficiency. I could n’t do it. This is because, unlike the example, the comparative example does not continuously perform adsorption and regeneration by an operation of only adsorption, so that the adsorption capacity of the adsorbent immediately reaches saturation.

本発明の水処理装置は、水の連続浄化を実現し、基本的に吸着剤の交換が必要なく、多量有害有機物質を高効率且つ安定に除去することができる処理装置であるため、設備増大を必要とせずに、吸着剤交換作業を省略でき、コスト低減、有害物質安定除去、作業者の安全を実現でき、特に研究所や工場等の幅広い分野に利用することができ、産業界に寄与することが大である。   The water treatment apparatus of the present invention is a treatment apparatus that realizes continuous purification of water, basically eliminates the need for replacement of the adsorbent, and can remove a large amount of harmful organic substances with high efficiency and stability. It is possible to omit the adsorbent replacement work without the need to reduce costs, achieve stable removal of harmful substances, and ensure the safety of workers, and can be used in a wide range of fields such as laboratories and factories, contributing to the industry. It is great to do.

ハニカム状構造の図Illustration of honeycomb structure 本発明の好ましい一形態の例である、円柱型のハニカム構造状の吸着素子を用 いた場合の水処理装置。A water treatment apparatus using a columnar honeycomb-structured adsorption element, which is an example of a preferred embodiment of the present invention. 円柱状ハニカム装置の例Example of cylindrical honeycomb device 円筒状ハニカム装置の例Example of cylindrical honeycomb device

符号の説明Explanation of symbols

21 原水導入ライン
22 吸着素子
23 吸着領域
24 パージ領域
25 戻りライン
26 脱着領域
31 濃縮ガス
32 脱着用加熱ガス
33 原水
34 浄化水
35 円柱状ハニカム
36 回転方向
37 脱着ゾーン
38 吸着ゾーン
40 脱着用加熱ガス
41 原水
42 浄化水
43 円筒状ハニカム
44 回転方向
45 通流配管
46 ハニカム搭載用金属箱
DESCRIPTION OF SYMBOLS 21 Raw water introduction line 22 Adsorption element 23 Adsorption area 24 Purge area 25 Return line 26 Desorption area 31 Concentrated gas 32 Desorption heating gas 33 Raw water 34 Purified water 35 Cylindrical honeycomb 36 Rotation direction 37 Desorption zone 38 Adsorption zone 40 Desorption heating gas 41 Raw water 42 Purified water 43 Cylindrical honeycomb 44 Direction of rotation 45 Flow piping 46 Honeycomb mounting metal box

Claims (5)

有機物質を含有する水から有機物質を吸着除去して水を浄化する装置であって、有機物質を含有する水を吸着素子に通流させて該吸着素子に有機物質を吸着させる吸着工程と、吸着工程後の該吸着素子にガスを通流することにより吸着素子表面の水を除去するパージ工程と、パージ工程後の該吸着素子に高温の加熱ガスを通流させて該吸着素子に吸着された有機物質を脱着する脱着工程とを、連続的に繰り返す事を特徴とする水処理装置 An apparatus for purifying water by adsorbing and removing an organic substance from water containing an organic substance, wherein an adsorption step of passing the water containing the organic substance through the adsorption element and adsorbing the organic substance to the adsorption element; A purge process for removing water on the surface of the adsorption element by flowing a gas through the adsorption element after the adsorption process, and a high-temperature heated gas is passed through the adsorption element after the purge process to be adsorbed by the adsorption element. A water treatment apparatus characterized by continuously repeating a desorption process for desorbing organic substances . 前記吸着素子に含まれる吸着材が活性炭及び/又はゼオライトである事を特徴とする請求項1記載の水処理装置 The water treatment apparatus according to claim 1, wherein the adsorbent contained in the adsorption element is activated carbon and / or zeolite . 前記吸着素子がハニカム状構造を有する事を特徴とする請求項1または2記載の水処理装置 The water treatment apparatus according to claim 1, wherein in that the suction element has a honeycomb-like structure. 前記吸着素子がフッ素、シリコン、炭化水素系化合物により撥水処理されている事を特徴とする請求項1乃至3のいずれかに記載の水処理装置 The water treatment apparatus according to any one of claims 1 to 3 , wherein the adsorption element is subjected to water repellent treatment with fluorine, silicon, or a hydrocarbon compound . 前記ガスの通流により吸着素子表面の水を除去するパージ工程にて発生した水を水処理装置の入口に戻すように構成されている事を特徴とする請求項1乃至4のいずれかに記載の水処理装置 5. The apparatus according to claim 1 , wherein the water generated in the purge step of removing water on the surface of the adsorption element by the gas flow is returned to the inlet of the water treatment device. Water treatment equipment .
JP2004238298A 2004-08-18 2004-08-18 Water treatment equipment Expired - Lifetime JP4512993B2 (en)

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