JP4521746B2 - Link-type workpiece transfer robot - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a link type workpiece transfer robot used for transferring workpieces such as substrates and wafers in liquid crystal substrate manufacturing apparatuses, semiconductor manufacturing apparatuses, and the like.
[0002]
[Prior art]
In a liquid crystal substrate manufacturing apparatus and a semiconductor manufacturing apparatus, a link-type robot using a parallel link mechanism is known as a workpiece transfer robot used when transferring a workpiece such as a substrate or a wafer.
[0003]
The robot using the parallel link mechanism includes a front side parallel link whose one end is rotatably supported by a support frame, a rear side parallel link whose one end is connected to the other end of the front side parallel link, and a front side parallel link. Of the front-side parallel link so that the rear-side parallel link is rotated in an opposite direction to the rotation direction of the front-side parallel link by an angle twice the rotation angle of the front-side parallel link. A robot equipped with a displacement conversion mechanism that transmits the rotation to the rear-stage parallel link and a work holding hand attached to the free end of the rear-stage parallel link, and the relative rotation of the front-stage parallel link and the rear-stage parallel link. The work holding hand is moved in one direction along with the movement.
[0004]
As a conventional robot of this type, as disclosed in JP-A-7-205062, a belt / pulley mechanism is used as a displacement conversion mechanism provided between the rotation of the front-side parallel link and the rear-side parallel link. As shown in Japanese Patent Application Laid-Open No. 2001-185596, the displacement conversion mechanism is attached to a common base provided so as to connect the front-stage parallel link and the rear-stage parallel link. And a slider that slides along the linear guide, and a synchronization link that connects between the front-side parallel link and the slider and between the rear-side parallel link and the slider are known.
[0005]
[Problems to be solved by the invention]
In the conventional workpiece transfer robot using the parallel link mechanism, as described above, the displacement conversion mechanism including the belt pulley mechanism, the linear guide mechanism, the synchronous link, and the like is provided between the front side parallel link and the rear side parallel link. Since the displacement conversion mechanism is rotated together with the parallel link, the mass of the movable part of the robot increases and the moment of inertia increases. If the moment of inertia of the moving part of the robot increases, the robot cannot be started rapidly or stopped instantaneously, which reduces the robot's speed response and increases the time required to transfer the workpiece. It was inevitable.
[0006]
An object of the present invention is to provide a link-type workpiece transfer robot in which the moment of inertia of a movable part can be reduced to increase the quick response.
[0007]
[Means for Solving the Problems]
The present invention relates to a workpiece transfer robot that holds a workpiece and transfers it along one direction. The robot according to the present invention includes a support frame, a first link and a second link arranged in parallel to each other. And having a front-side parallel link in which one end of both links is rotatably supported with respect to the support frame, and a third link and a fourth link arranged in parallel to each other, and constant from one end of the third link A portion that is closer to the other end by the distance of the second link is connected to the other end of the first link and one end of the fourth link is connected to the other end of the second link, and the first and third links An intermediate connection link provided to connect between a connection point with the link and a connection point between the second link and the fourth link; one end at the other end of the third link and the other end of the fourth link; Tip link with the other end connected A first drive link having one end pivotably connected to the first link, and one end pivotally coupled to the other end of the first drive link and the other end pivotable to one end of the third link. Relative to the second drive link connected to the front drive side, the link drive device for driving the front-stage parallel link to relatively rotate the front-stage parallel link and the rear-stage parallel link, and the front-stage parallel link and the rear-stage parallel link. Linear guide mechanism that regulates the direction of displacement of the connection point of the first drive link and the second drive link that are generated during the rotational movement in a direction perpendicular to the transport direction, and the work holding fixed to the tip connection link It has a hand for use.
[0008]
The linear guide mechanism is attached to the support frame, and the first drive link and the second drive link maintain the state parallel to the third link and the first link, respectively, when the front parallel link is rotated. The parallel link is rotated in an opposite direction to the rotation direction of the front-side parallel link by an angle twice the rotation angle of the front-side parallel link, and the work holding hand is moved along the one direction. The length of each link and the distance between the link connecting portions are set.
[0009]
When configured as described above, the first drive link and the second drive link in which the direction of displacement of the connection point is regulated by the linear guide when the front-side parallel link is driven and rotated by a motor or the like are respectively provided. Holding the workpiece in order to rotate the rear-stage side parallel link in an opposite direction to the rotation direction of the front-stage side parallel link by an angle twice that of the front-stage side parallel link while maintaining a state parallel to the three links and the first link. The hand moves linearly along one direction perpendicular to the guide direction of the linear guide.
[0010]
If comprised as mentioned above, the displacement conversion mechanism which transmits the displacement of a front | former stage side parallel link to a back | latter stage side parallel link is supported by a support frame, and a member with a large mass in the connection part of a front | former stage side parallel link and a back | latter stage side parallel link Is not mounted, the mass of the movable part of the robot can be reduced, and the moment of inertia of the movable part can be reduced. Therefore, according to the present invention, it is possible to obtain a link-type workpiece transfer robot with high responsiveness capable of rapid start and instantaneous stop, shortening the time required for transferring the workpiece, a semiconductor manufacturing apparatus, a liquid crystal manufacturing apparatus, etc. The working efficiency in the manufacturing apparatus can be improved.
[0011]
In a preferred embodiment of the present invention, each of the above parts is configured as follows.
[0012]
That is, the front-side parallel link is disposed in parallel with the first link, one end of which is rotatably supported by the support frame and rotated with respect to the support frame about the first axis. And a second link that is rotatably supported by the support frame and pivoted relative to the support frame about the second axis.
[0013]
Further, the rear side parallel link is connected to the other end of the first link at a certain distance from the one end and is rotated with respect to the first link about the third axis. 3 links and a 4th link by which one end is connected with the other end of the 2nd link, and is rotated with respect to the 2nd link centering on the 4th axis.
[0014]
Further, the intermediate connection link rotates with respect to the first link and the third link about the third axis, and rotates with respect to the second link and the fourth link about the fourth axis. In the state where the center of rotation on one end side is aligned with the third axis, the first link and the third link are connected, and the center of rotation on the other end side is aligned with the fourth axis. Connect to the second link and the fourth link.
[0015]
In addition, the tip connection link has one end and the other end of the third link and the other end of the third link so as to rotate with respect to the third link and the fourth link about the fifth axis and the sixth axis, respectively. Connect to the other end of 4 links.
[0016]
One end of the first drive link is connected to the first link so as to rotate with respect to the first link about the seventh axis. The second drive link has one end connected to the other end of the first drive link so that the second drive link is rotated with respect to the first drive link and the third link about the eighth axis and the ninth axis, respectively. In addition, the other end is connected to one end of the third link.
[0017]
The linear guide mechanism is attached to the support frame and conveys the direction of displacement generated at the connection point of the first and second drive links in the process of relatively rotating the front side parallel link and the rear side parallel link. Guide to regulate in a direction perpendicular to the direction.
[0018]
The linear guide mechanism may include a linear guide having a linearly extending guide groove or guide rail, and a slider that slides along the guide groove or guide rail while being restrained by the guide groove or guide rail of the linear guide. it can.
[0019]
In this case, when the front-side parallel link is rotated, the first drive link and the second drive link are kept parallel to the third link and the first link, respectively, and the rear-side parallel link is moved to the front-side parallel link. The distance S1 between the first axis and the second axis, the third axis, and the fourth axis are used to rotate in the direction opposite to the direction of rotation of the preceding-stage parallel link by an angle twice the rotation angle. The distance S2 between the first axis and the fifth axis and the distance S3 between the fifth axis and the sixth axis are set to be equal, and the distance L1 between the first axis and the third axis is The distance L2 between the axis and the fourth axis, the distance L3 between the third axis and the fifth axis, and the distance L4 between the fourth axis and the sixth axis are set equal. To do. Also, a distance a between the first axis and the seventh axis, a distance b between the seventh axis and the eighth axis, and a distance d between the third axis and the ninth axis. Are set equal to each other, the distance e between the fifth axis and the ninth axis, the distance a between the first axis and the seventh axis, the seventh axis and the eighth axis, Is set equal to the sum of the distance b between and the distance c between the eighth axis and the ninth axis.
[0020]
In a preferred and more specific embodiment of the present invention, each part is configured as follows.
[0021]
In other words, the front-side parallel link includes a first link and a second link arranged in parallel to each other on the same plane, and one end of the first link and the second link has its axis line oriented in the vertical direction. Are respectively connected to the upper ends of a first shaft and a second shaft which are supported rotatably.
[0022]
The rear side parallel link includes a third link and a fourth link arranged in parallel on the same plane in a state of being positioned above the first link and the second link, from one end of the third link. A portion separated by a predetermined distance is pivotally connected to the other end of the first link via a third shaft extending in the vertical direction, and a fourth shaft having one end of the fourth link extending in the vertical direction. Via the other end of the second link.
[0023]
The intermediate connection link is provided in a state of being positioned above the third link and the fourth link. One end of the intermediate connection link is rotatably connected to the third shaft, and the other end is rotated to the fourth shaft. It is connected freely.
[0024]
The tip connecting link is provided in a state positioned above the third link and the fourth link, and one end and the other end of the third link are connected to the other end of the third link via the fifth shaft and the sixth shaft, respectively. And the other end of the fourth link is rotatably connected.
[0025]
The first drive link is disposed below the first link and the second link, and is rotatably connected to the first link via a seventh shaft. The second drive link is pivotally connected to the other end of the first drive link via an eighth shaft disposed below the first link and the second link and having one end extending in the vertical direction. The other end is rotatably connected to one end of the third link via a ninth shaft extending in the vertical direction.
[0026]
Further, a work holding hand is fixed to the leading link, and link driving for driving at least one of the first shaft and the second shaft to relatively rotate the front-stage parallel link and the rear-stage parallel link in the horizontal direction. A device is provided.
[0027]
Further, in order to restrict the direction of displacement generated at the connecting point of the first and second drive links in the process of relatively rotating the front-stage parallel link and the rear-stage parallel link to a direction perpendicular to the workpiece conveyance direction. A linear guide mechanism that guides the eight axes along a straight line extending in a direction perpendicular to the conveyance direction is attached to the upper portion of the support frame.
[0028]
In this case, the distance S1 between the first axis and the second axis, the distance S2 between the third axis and the fourth axis, and the distance S3 between the fifth axis and the sixth axis. Are set equal, the distance L1 between the first axis and the third axis, the distance L2 between the second axis and the fourth axis, the third axis and the fifth axis And a distance L4 between the fourth axis and the sixth axis are set equal to each other. Further, a distance a between the first axis and the seventh axis, a distance b between the seventh axis and the eighth axis, and a distance d between the third axis and the ninth axis are: Set equal, and the distance e between the fifth axis and the ninth axis is the distance a between the first axis and the seventh axis, and between the seventh axis and the eighth axis. Is set equal to the sum of the distance b and the distance c between the eighth axis and the ninth axis.
[0029]
DETAILED DESCRIPTION OF THE INVENTION
A preferred embodiment of the present invention will be described with reference to FIGS.
[0030]
FIGS. 1 to 15 are diagrams for explaining an embodiment of the present invention. FIG. 1 is a plan view showing a configuration of the robot according to the first embodiment of the present invention in one operation state, and FIG. 1 is a sectional end view taken along the line AA of FIG. 1, FIG. 3 is a sectional end view taken along the line BB of FIG. 1, FIG. 4 is a sectional end view taken along the line CC of FIG. 5B is an enlarged cross-sectional view of the linear guide mechanism portion of FIG. 5A, FIG. 6 is a cross-sectional end view of the EE line of FIG. 1, and FIG. 7 is an operation state of FIG. FIG. 2 is a plan view showing the configuration of the robot according to the present embodiment, different from FIG. 8A to 8C are plan views sequentially showing the operation process of the robot shown in FIG. 1, and FIGS. 9A and 9B show other operation processes of the robot shown in FIG. FIGS. 10A and 10B are plan views showing still another operation process of the robot shown in FIG. FIGS. 11A to 11C are plan views showing configurations in different operation processes of the second embodiment of the present invention. FIGS. 12A and 12B are still other views of the second embodiment. It is the top view which showed the operation | movement process. FIGS. 13A to 13C are plan views showing configurations in different operation processes of the third embodiment of the present invention, and FIG. 14 shows each link of the embodiment of FIG. FIG. 15 is an explanatory diagram showing the configuration of each link of the embodiment of FIG.
[0031]
1 to 7, reference numeral 1 denotes a plate-like support frame attached to an upper portion of a hollow housing 2. The illustrated support frame includes a frame main body 1a formed in a rectangular plate shape, and an end portion of the main body 1a. And an overhanging portion 1b projecting sideways from the side. The overhanging portion 1b is provided with its longitudinal direction oriented in a direction perpendicular to the workpiece conveying direction.
[0032]
A linear guide mechanism 3 is attached to the projecting portion 1b of the support frame. As shown in FIG. 5B, the linear guide mechanism 3 is formed to have a T-shaped cross section, and the longitudinal direction is the longitudinal direction of the overhanging portion 1b of the support frame 1 (with respect to the conveying direction of the workpiece). The guide rail 3a is bolted to the overhanging portion 1b in a state in which the guide rail 3a is aligned, and the slider 3b meshes with the guide rail 3a and is slidably guided in the longitudinal direction of the guide rail 3a. .
[0033]
A cylindrical first shaft holding cylinder 4 and a second shaft holding cylinder 5 having a central axis oriented in the vertical direction are fixed to the main body 1a of the support frame 1 side by side. The first shaft holding cylinder 4 is provided with its central axis positioned on the extension of the longitudinal direction of the guide rail 3a. The first shaft holding cylinder 4 is vertically arranged on the inner side of the first shaft holding cylinder 4. A first shaft 6 whose center axis coincides with the extending first axis O1 is rotatably supported via a bearing 7. The first shaft 6 is provided such that its upper end protrudes above the upper end of the shaft holding cylinder 4 and its lower end is introduced into the housing 2 through a hole provided in the support frame 1. The upper end of the first shaft 6 is fitted into a hole 8a1 provided at one end of the first link 8A, and the first shaft 6 and the first link 8A are fastened by screws, One end of the first link 8A is fixed.
[0034]
The second shaft holding cylinder 5 is provided in a state shifted with respect to the first shaft holding cylinder 4 in a direction perpendicular to the longitudinal direction of the guide rail 3a. A second shaft 9 having a center axis coinciding with a second axis O2 extending in the vertical direction is rotatably supported via a bearing 10.
[0035]
The second shaft 9 is provided so that the upper end of the second shaft 9 protrudes above the upper end of the shaft holding cylinder 5, and the upper end of the second shaft 9 is equal in length to the first link 8A. The second link 8B is fitted in a hole 8b1 provided at one end of the two links 8B, the second link 8B and the second shaft 9 are fastened by screws, and one end of the second link 8B is fixed to the second shaft 9. ing. The first link 8A and the second link 8B are arranged in parallel to each other on the same plane (horizontal plane), and the front-side parallel link 8 (see FIG. 7) is configured by both the links 8A and 8B.
[0036]
Although not shown in the figure, a link driving device that rotationally drives the first shaft 6 to rotate the front-side parallel link 8 is provided in the housing 2. This link drive device is composed of, for example, a motor, a speed reducer that reduces the rotation of the motor, and a power transmission mechanism such as a belt transmission mechanism that transmits the rotation of the output shaft of the speed reducer to the first shaft 6. The Therefore, in this example, the first shaft 6 is the drive shaft of the transport robot.
[0037]
As shown in FIG. 2, a hole 8a2 is formed at the other end of the first link 8A, and the lower end of the third shaft 11 whose center axis coincides with the third axis O3 extending in the vertical direction is in the hole 8a2. And is supported rotatably via a bearing 12.
[0038]
As shown in FIG. 3, a hole 8b2 is formed at the other end of the second link 8B, and the lower end of the fourth shaft 13 whose center axis coincides with the fourth axis O4 extending in the vertical direction is in the hole 8b2. Are supported rotatably via a bearing 14.
[0039]
As shown in FIG. 2, the third link 15 </ b> A disposed above the first link 8 </ b> A is fixed to the third shaft 11. The third link 15A is formed to be longer than the first link 8A, and a through hole 15a1 having an enlarged diameter portion on the first link 8A side is formed in a portion close to the other end side by a certain distance from one end thereof. The third shaft 11 is fitted in the through hole 15a1. An enlarged diameter portion 11a fitted to the enlarged diameter portion of the through hole 15a1 is formed at an intermediate portion of the third shaft 11, and the enlarged diameter portion 11a is fastened to the third link 15A with a screw. The 3rd link 15A is being fixed to.
[0040]
As shown in FIG. 3, the fourth link 13 is fixed to the fourth shaft 13 above the second link 8B. The fourth link 15B is formed to have the same length as the first link 8A and the second link 8B, and at one end thereof, a through hole 15b1 having an enlarged diameter portion on the second link 8B side is formed. The fourth shaft 13 is fitted in the through hole 15b1. An enlarged diameter portion 13a that fits into the enlarged diameter portion of the through hole 15b1 is formed in the middle portion of the fourth shaft 13, and the enlarged diameter portion 13a is fastened to the fourth link 15B with a screw, One end of the fourth link 15B is fixed to the shaft 13.
[0041]
The third link 15A and the fourth link 15B are arranged in parallel to each other on the same plane (horizontal plane), and the rear side parallel link 15 (see FIG. 7) is configured by both the links 15A and 15B.
[0042]
As shown in FIG. 6, the intermediate connection link 17 is disposed above the third link 15A and the fourth link 15B, and one end and the other end of the intermediate connection link 17 are connected to the third shaft via bearings 18 and 19, respectively. 11 and the upper end of the fourth shaft 13 are rotatably connected.
[0043]
As shown in FIG. 2, a through hole 15a2 having an enlarged diameter portion on the first link 8A side is formed at the other end of the third link 15A, and a fifth axis extending in the vertical direction is formed in this through hole. A fifth shaft 20 having a central axis coincided with O5 is fitted. The enlarged diameter portion 20a formed at the lower end of the fifth shaft 20 is fitted into the enlarged diameter portion of the through hole 15a2, and the enlarged diameter portion 20a at the lower end of the fifth shaft 20 and the third link 15A are fastened by screws. Thus, the fifth shaft 20 is fixed to the other end of the third link 15A.
[0044]
As shown in FIG. 3, a through hole 15b2 having an enlarged diameter portion on the second link 8B side is formed at the other end of the fourth link 15B, and a sixth axis extending in the vertical direction is formed in this through hole. A sixth shaft 21 having a center axis coincided with O6 is fitted. The enlarged diameter portion 21a formed at the lower end of the sixth shaft 21 is fitted into the enlarged diameter portion of the through hole 15b2, and the enlarged diameter portion 21a at the lower end of the sixth shaft 21 and the fourth link 15B are fastened by screws. Thus, the sixth shaft 21 is fixed to the other end of the fourth link 15B.
[0045]
As shown in FIG. 4, a tip connecting link 22 having a length equal to that of the intermediate connecting link 17 is disposed above the other end of the third link 15A and the other end of the fourth link 15B, and one end of the tip connecting link. And the other end are rotatably connected to the upper ends of the fifth shaft 20 and the sixth shaft 21 via bearings 23 and 24, respectively.
[0046]
As shown in FIG. 2, the first drive link 30 is arranged in a state of being positioned below the first link 8A and the second link 8B. In order to rotatably support one end of the first drive link 30, it is perpendicular to a hole 8 a 3 formed in an intermediate portion of the first link 8 </ b> A (a portion between the first shaft 6 and the third shaft 11). An upper end of a seventh shaft 31 whose center axis coincides with a seventh axis O7 extending in the direction is fitted, and the seventh shaft 31 is fixed to the first link 8A with a screw. One end of the first drive link 30 is rotatably connected to the lower end of the seventh shaft 31 via a bearing 32, and the other end of the first drive link 30 is centered on an eighth axis O8 extending in the vertical direction. Are connected to an eighth shaft 33 having a lower end fixed to the slider 3b of the linear guide mechanism 3 via a bearing 34.
[0047]
A second drive link 35 is provided in a state of being positioned between the first link 8A and the second link 8B and the first drive link 30, and one end of the second drive link 35 is connected to the eighth shaft. It is connected to 33 through a bearing 36.
[0048]
In the hole 15a3 provided at one end of the third link 15A, the upper end of the ninth shaft 37 whose center axis coincides with the ninth axis O9 extending in the vertical direction is fitted. The three links 15A are fastened with screws. The other end of the second drive link 35 is connected to the lower end of the ninth shaft 37 via a bearing 38.
[0049]
As described above, in the robot according to the present invention, since the eighth shaft 33 that connects the first drive link 30 and the second drive link 35 is fixed to the slider 3b of the linear guide mechanism 3, the front-side parallel link In the process of relatively rotating the 8 and rear side parallel links 15, the connecting point of the drive links 30 and 35 is the longitudinal direction of the guide rail 3 a of the linear guide mechanism 3 (direction perpendicular to the workpiece conveying direction). Guided by
[0050]
As shown in FIG. 8A and the like, a work holding hand 40 is attached to the tip connecting link 22. The workpiece holding hand 40 has its center line (center line extending in the workpiece transfer direction) perpendicular to the center line (center line of the guide rail 3a) Oa of the linear guide mechanism 3 (work transfer direction). It is attached in the state of facing. The illustrated hand 40 is a known one that includes a belt-like arm portion 40a fixed on the tip connecting link 22 and a fork-like work holding portion 40b connected to the tip of the arm portion 40a. A work 41 such as a semiconductor wafer is placed on the work holding part 40b.
[0051]
In the above description, the link driving device is configured to drive the front-side parallel link 8 by rotationally driving the first shaft 6, but the second shaft 9 is replaced with the first shaft 6. The link driving device may be configured to drive the front side parallel link 8 by driving, and the front side parallel link 8 is driven by driving both the first shaft 6 and the second shaft 9. As such, the link drive device may be configured.
[0052]
In order to make the configuration of the link of the workpiece transfer robot of this embodiment easy to understand, FIG. 14 is an explanatory diagram of the link configuration in which each link is indicated by a straight line and the link connecting shaft is indicated by a black circle.
[0053]
In the workpiece transfer robot according to the present invention, the first drive link 30 and the second drive link 35 are parallel to the third link 15A and the first link 8A, respectively, when the front-side parallel link 8 is rotated. The workpiece holding hand 40 is rotated by rotating the rear-stage parallel link 15 in the direction opposite to the rotation direction of the front-stage parallel link 8 by twice the rotation angle of the front-stage parallel link 8. The length of each link and the distance (link span) between the connecting portions of the links are set so as to move along the direction.
[0054]
Therefore, in the illustrated example, the link span condition is set as follows.
[0055]
That is, the distance S1 between the first axis O1 and the second axis O2, the distance S2 between the third axis O3 and the fourth axis O4, the fifth axis O5 and the sixth axis. The distance S3 to O6 is set equal, the distance L1 between the first axis O1 and the third axis O3, and the distance between the second axis O2 and the fourth axis O4 L2, the distance L3 between the third axis O3 and the fifth axis O5, and the distance L4 between the fourth axis O4 and the sixth axis O6 are set equal. Further, the distance a between the first axis O1 and the seventh axis O7, the distance b between the seventh axis O7 and the eighth axis O8, the third axis O3 and the ninth axis O9. And the distance e between the fifth axis O5 and the ninth axis O9 is equal to the distance a between the first axis O1 and the seventh axis O7; It is set equal to the sum of the distance b between the seventh axis O7 and the eighth axis O8 and the distance c between the eighth axis O8 and the ninth axis O9. These link span conditions are summarized as follows.
[0056]
S1 = S2 = S3 (1)
L1 = L2 = L3 = L4 (2)
a = b = d (3)
a + b + c = e (4)
In the present embodiment, the first drive link 30, the second drive link 35, and the linear guide mechanism 3 are used to rotate the front-side parallel link 8 and convert the rotation direction and rotation angle to the rear-side parallel. A displacement conversion mechanism that transmits to the link 15 is configured.
[0057]
The configuration of the workpiece transfer robot according to the present embodiment is as described above. Here, elements constituting the robot according to the present embodiment are listed together as follows.
[0058]
(A) Support frame 1.
[0059]
(B) It is provided with a first link 8A and a second link 8B arranged in parallel to each other on the same plane, and one end of the first link and the second link is rotatable to the support frame 1 with its axis line set in the vertical direction. A front-side parallel link 8 connected to the upper ends of the first shaft 6 and the second shaft 9 supported by the first shaft 6 and the second shaft 9, respectively.
[0060]
(C) A third link 15A and a fourth link 15B arranged in parallel on the same plane in a state of being positioned above the first link 8A and the second link 8B, and from one end of the third link 15A A portion that is close to the other end side by a certain distance is rotatably connected to the other end of the first link 8A via a third shaft 11 extending in the vertical direction, and one end of the fourth link 15B is vertically connected. A rear-stage parallel link 15 that is rotatably connected to the other end of the second link 8B via a fourth shaft 13 extending in the direction.
[0061]
(D) It is provided in a state of being positioned above the third link 15A and the fourth link 15B, and one end is rotatably connected to the third shaft 11 and the other end is the fourth shaft 13. An intermediate connection link 17 that is rotatably connected to the intermediate link 17.
[0062]
(E) Provided in a state of being positioned above the third link 15A and the fourth link 15B, one end and the other end of the third link 15A via the fifth shaft 20 and the sixth shaft 21, respectively. A tip connecting link 22 rotatably connected to the other end and the other end of the fourth link 15B.
[0063]
(F) The first drive link 30 disposed below the first link 8A and the second link 8B and rotatably connected to the first link 8A via the seventh shaft 31.
[0064]
(G) The first drive link 30 is rotatably connected to the other end of the first drive link 30 via an eighth shaft 33 that is disposed below the first link 8A and the second link 8B and has one end extending in the vertical direction. The second drive link 35 is rotatably connected to one end of the third link 15A via a ninth shaft 37 whose other end extends in the vertical direction.
[0065]
(H) A work holding hand 40 fixed to the tip connecting link 22.
[0066]
(I) A link driving device that drives at least one of the first shaft 6 and the second shaft 9 to relatively rotate the front-stage parallel link 8 and the rear-stage parallel link 15 in the horizontal direction.
[0067]
(J) Direction of displacement generated at the connection point of the first and second drive links 30 and 35 in the process of being attached to the support frame 1 and relatively rotating the front-stage parallel link 8 and the rear-stage parallel link 15 A linear guide mechanism 3 for guiding the eighth shaft 33 along a straight line extending in a direction perpendicular to the conveyance direction so as to regulate the angle in a direction perpendicular to the conveyance direction of the workpiece.
[0068]
Next, the operation of the robot of the above embodiment will be described with reference to FIGS. 8A, the first shaft 6 is rotated counterclockwise from the state shown in FIG. 1, and the front-side parallel link 8 is moved with respect to the center line Oa along the guide direction of the linear guide mechanism. The state is shown in which the first links 8A and 8B are brought close to the limit position by turning counterclockwise by an angle θ1. At this time, the distance x1 between the fifth axis O5 and the center line Oa of the linear guide mechanism 3 is maximized, and the work holding hand 40 is disposed at the most retracted position.
[0069]
When the first shaft 6 is rotated clockwise in the figure from the state of FIG. 8A, the front-side parallel link 8 is rotated clockwise. The clockwise rotation of the front side parallel link is transmitted to the rear side parallel link 15 via the drive links 30 and 35. Thereby, the rear stage side parallel link 15 rotates in the opposite direction (counterclockwise direction) to the front stage side parallel link 8. The positional relationship between the front-side parallel link 8 and the rear-side parallel link 15 is as shown in FIGS. 8B, 8C, 9A, 9B, 10A, and 10C. It changes sequentially like 10 (B).
[0070]
Among these changing processes, in the processes of FIGS. 8B and 8C, the front-side parallel link 8 is tilted counterclockwise with respect to the center line Oa of the linear guide mechanism. The inclination angle θ becomes θ2 (<θ1) and θ3 (<θ2), and the distance between the fifth axis O5 and the center line Oa of the linear guide mechanism is x2 (<x1) and x3 (<x2). Become. 9A, the front-stage parallel link 8 and the rear-stage parallel link 15 overlap each other, so that the inclination angle θ and the distance x become zero. This state is the same as the state shown in FIG.
[0071]
In the process shown in FIG. 9B, the front-side parallel link 8 is inclined clockwise by .theta.4 with respect to the center line Oa of the linear guide mechanism, and the fifth axis O5 and the center line Oa of the linear guide mechanism. The distance x between is x4. Further, in the states of FIGS. 10A and 10B, the front-side parallel link 8 is inclined by θ5 (> θ4) and θ6 (> θ5) clockwise with respect to the center line Oa of the linear guide mechanism. Thus, the distances x between the fifth axis O5 and the center line Oa of the linear guide mechanism are x5 (> x4) and x6 (> x5), respectively. In the state of FIG. 10 (B), the links constituting each parallel link are close to the limit position, and at this time, the work holding hand 40 reaches the most advanced position.
[0072]
In the present invention, the above-described link span conditions (1) to (4) are satisfied and a = b in FIG. 14, so that the first axis O1, the seventh axis O7, and An isosceles triangle is a triangle formed by three points where the eighth axis O8 intersects a plane on which the front-side parallel link is arranged and a plane parallel to the plane on which the rear-side parallel link is arranged.
[0073]
Further, since the connecting point of the first drive link 30 and the second drive link 35 is guided by the linear guide mechanism 3, the first drive is performed in the process in which the front side parallel link and the rear side parallel link are relatively rotated. The link 30 and the second drive link 35 are held in parallel with the third link 15A and the first drive link 8A, respectively. Therefore, as is apparent from FIG. 14, when the front-side parallel link 8 rotates in one direction by an angle θ, the rear-side parallel link 15 rotates 2θ in the other direction, and L1 = L2 = L3 = L4 As a result of the relative rotation of the front-stage parallel link 8 and the rear-stage parallel link 15, the tip connection link 22 provided at the tip of the rear-stage parallel link is the center of the linear guide mechanism. It is linearly moved in the transport direction (XX ′ direction) perpendicular to the line Oa.
[0074]
In the above example, the straight line connecting the first axis O1 and the second axis O2 on the plane where the first link 8A and the second link 8B are arranged, and the third link 15A and the fourth link 15B are arranged. Since the straight lines connecting the fifth axis O5 and the sixth axis O6 are both along the transport direction (X-X 'direction) on the flat surface, the fifth axis O5, The tip connecting link 22 is displaced while maintaining the state where the axis O6, the first axis O1 and the second axis O2 are aligned along a straight line extending in the transport direction. In such a configuration, since the center line of the work holding hand 40 can be attached in a state in which the center line of the work holding hand 40 coincides with the longitudinal direction of the tip connecting link 22, the positioning of the hand 40 can be facilitated.
[0075]
However, the present invention is not limited to such a configuration. As shown in FIGS. 11 and 12, the first axis line on the plane on which the first link 8A and the second link 8B are arranged. A straight line connecting O1 and the second axis O2 and a straight line connecting the fifth axis O5 and the sixth axis O6 on the plane on which the third link 15A and the fourth link 15B are arranged are set in the transport direction (X (X 'direction) may be arranged in a state inclined by one angle α.
[0076]
11 (A), 11 (B), 11 (C), 12 (A), and 12 (B), when the front-side parallel link 8 and the rear-side parallel link 15 are relatively rotated. The change in the positional relationship between the two parallel links is shown in order. In this example, when the front-side parallel link is driven and the rear-side parallel link is rotated, the tip link 22 is maintained in a state where it is inclined by a certain angle α with respect to the workpiece transport direction XX ′. While moving in the transport direction. In this case, by attaching the work holding hand so as to be inclined at an angle α in the direction opposite to the inclination direction of the tip link 22, the center line of the work holding hand can be made to coincide with the transport direction XX ′. it can.
[0077]
Similarly, as shown in FIG. 13, on the plane on which the first link 8A and the second link 8B are arranged, a straight line connecting the first axis O1 and the second axis O2, and the third link 15A and the second link A straight line connecting the fifth axis O5 and the sixth axis O6 on the plane on which the four links 15B are arranged is an angle β in the direction opposite to the example shown in FIGS. You may make it arrange | position in the state inclined. FIGS. 13A, 13B, and 13C show the positional relationship between the parallel links 8 and 15 when the front-side parallel link 8 and the rear-side parallel link 15 are relatively rotated. The changes are shown in order.
[0078]
FIG. 15 is an explanatory diagram of the link configuration similar to that of FIG. 14 for the example shown in FIG.
[0079]
In order to change the transfer direction of the workpiece appropriately, a turning mechanism for turning the support frame 1 around a turning axis extending in the vertical direction is provided, and the support frame 1 is moved to the housing 2 via the turning mechanism. It is preferable to support it.
[0080]
Further, in order to expand the workpiece conveyance range, the housing 2 supporting the support frame 1 is mounted on a movable table movable in a direction perpendicular to the workpiece conveyance direction (X′-X direction). You can also.
[0081]
In the above example, the support frame 1 is formed in an approximately L shape having a rectangular plate-like frame body 1a and an overhang portion 1b. However, the support frame 1 is necessarily limited to such a shape. For example, the frame main body may be formed in a disk shape. In the above example, the overhang portion 1b is provided on the support frame in order to support the linear guide mechanism, but the support frame 1 only needs to be able to support the front-side parallel link and the linear guide mechanism. When a sufficient space for supporting these is secured, the overhang portion 1b may not be provided.
[0082]
In the above example, the linear guide mechanism is constituted by the guide rail 3a and the slider 3b. However, the linear guide mechanism is constituted by a linearly extending guide groove and a slide slidably fitted in the guide groove. You can also.
[0083]
【The invention's effect】
As described above, according to the present invention, the displacement converting mechanism for transmitting the displacement of the front-side parallel link to the rear-side parallel link is supported by the support frame, and the mass at the connecting portion between the front-side parallel link and the rear-side parallel link is supported. Since no large member is mounted, the mass of the movable part of the robot can be reduced, and the moment of inertia of the movable part can be reduced. Therefore, according to the present invention, it is possible to obtain a workpiece transfer robot with high responsiveness capable of rapid start and instantaneous stop, shortening the time required to transfer the workpiece, and manufacturing semiconductor manufacturing equipment, liquid crystal manufacturing equipment, etc. The work efficiency in the apparatus can be improved.
[Brief description of the drawings]
FIG. 1 is a plan view showing a configuration of a robot according to a first embodiment of the present invention in one operation state.
FIG. 2 is a cross-sectional end view taken along line AA in FIG.
3 is a cross-sectional end view taken along the line BB in FIG. 1. FIG.
4 is a cross-sectional end view taken along the line CC of FIG. 1. FIG.
5A is a cross-sectional end view taken along the line DD of FIG. 1, and FIG. 5B is an enlarged cross-sectional view of the linear guide mechanism portion of FIG.
6 is a cross-sectional end view taken along the line EE of FIG. 1. FIG.
FIG. 7 is a plan view showing the configuration of the robot according to the first embodiment in which the operation state is different from the state of FIG.
8A to 8C are plan views sequentially illustrating the operation process of the robot shown in FIG.
FIGS. 9A and 9B are plan views showing another operation process of the robot shown in FIG. 1;
10A and 10B are plan views showing still another operation process of the robot shown in FIG.
FIGS. 11A to 11C are plan views showing configurations in different operation processes of the second embodiment of the present invention. FIGS.
12A and 12B are plan views showing still another operation process of the second embodiment. FIG.
FIGS. 13A to 13C are plan views showing configurations in different operation processes of the third embodiment of the present invention. FIGS.
FIG. 14 is an explanatory diagram showing the configuration of each link of the embodiment of FIG.
FIG. 15 is an explanatory diagram showing the configuration of each link of the embodiment of FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Support frame, 2 ... Housing, 3 ... Linear guide mechanism, 3a ... Guide rail, 3b ... Slider, 6 ... 1st axis | shaft, 8 ... Previous stage side parallel link, 8A ... 1st link, 8B ... 2nd link, DESCRIPTION OF SYMBOLS 9 ... 2nd axis | shaft, 11 ... 3rd axis | shaft, 13 ... 4th axis | shaft, 15 ... Later stage side parallel link, 15A ... 3rd link, 15B ... 4th link, 17 ... Intermediate | middle connection link, 20 ... 5th 21 ... sixth axis, 30 ... first drive link, 31 ... seventh axis, 33 ... eighth axis, 35 ... second drive link, 37 ... ninth axis.

Claims (3)

A link-type workpiece transfer robot that holds a workpiece and transfers it along one direction,
A support frame and a front-side parallel link having a first link and a second link arranged in parallel to each other and having one end of both links rotatably supported with respect to the support frame are arranged in parallel to each other. A portion having a third link and a fourth link, which is closer to the other end side by a certain distance from one end of the third link, is connected to the other end of the first link and one end of the fourth link is A rear-stage parallel link connected to the other end of the second link, a connection point between the first link and the third link, and a connection point between the second link and the fourth link are provided. An intermediate connection link, a tip connection link having one end and the other end connected to the other end of the third link and the other end of the fourth link, respectively, and one end rotatably connected to the first link. A first drive link and one end of the first drive link A second drive link that is rotatably connected to the other end of the link and has the other end rotatably connected to one end of the third link, and the front-stage parallel link and the rear-stage parallel link are relatively A link driving device that drives the front-side parallel link to rotate, and a connection point between the first driving link and the second driving link that occurs in the process of relatively rotating the front-side parallel link and the rear-side parallel link. A linear guide mechanism that regulates the direction of displacement in a direction perpendicular to the transport direction, and a work holding hand fixed to the tip connection link,
The linear guide mechanism is attached to the support frame;
When the front parallel link is rotated, the first drive link and the second drive link are kept parallel to the third link and the first link, respectively, and the rear parallel link is connected to the front parallel link. The length of each link and the link so that the work holding hand is moved along the one direction by rotating in the direction opposite to the rotation direction of the front-side parallel link by an angle twice the rotation angle. Link-type workpiece transfer robot in which the distance between the connecting parts is set. A link-type workpiece transfer robot that holds a workpiece and transfers it along one direction,
A support frame;
One end is rotatably supported by the support frame and is rotated with respect to the support frame about a first axis, and is disposed in parallel with the first link and has one end A front-side parallel link provided with a second link rotatably supported by the support frame and rotated with respect to the support frame about a second axis;
A third link that is connected to the other end of the first link by a fixed distance from the one end and rotated about the third axis about the third axis; A rear side parallel link provided with a fourth link connected to the other end of the second link and rotated with respect to the second link about a fourth axis;
One end is connected to the first link and the third link in a state where the center of rotation is aligned with the third axis, and the other end is connected to the second axis in a state where the center of rotation is aligned with the fourth axis. An intermediate connection link connected to the link and the fourth link;
One end and the other end are connected to the other end of the third link and the other end of the fourth link, respectively, and rotate with respect to the third link and the fourth link around the fifth axis and the sixth axis, respectively. A tip linkage link to be moved,
A first drive link, one end of which is connected to the first link and rotated with respect to the first link about a seventh axis;
One end is connected to the other end of the first drive link, the other end is connected to one end of the third link, and the first drive link and the eighth axis are respectively centered on the eighth axis and the ninth axis. A second drive link rotated with respect to the third link;
A workpiece holding hand fixed to the tip connecting link;
A link driving device that drives at least one of the first link and the second link to relatively rotate the front-side parallel link and the rear-side parallel link;
The direction of displacement generated at the connection point of the first and second drive links in the process of relatively rotating the front-stage parallel link and the rear-stage parallel link is restricted to a direction perpendicular to the workpiece conveyance direction. A linear guide mechanism for guiding
The linear guide mechanism is attached to the support frame;
A distance S1 between the first axis and the second axis, a distance S2 between the third axis and the fourth axis, and a distance S3 between the fifth axis and the sixth axis. Are set equal, the distance L1 between the first axis and the third axis, the distance L2 between the second axis and the fourth axis, the third axis and the second axis The distance L3 between the fifth axis and the distance L4 between the fourth axis and the sixth axis is set equal,
And a distance a between the first axis and the seventh axis, a distance b between the seventh axis and the eighth axis, and a distance between the third axis and the ninth axis. The distance d is set equal, and the distance e between the fifth axis and the ninth axis is equal to the distance a between the first axis and the seventh axis, and the seventh axis. A link-type workpiece transfer robot that is set equal to the sum of a distance b between the eighth axis and a distance c between the eighth axis and the ninth axis. A link-type workpiece transfer robot that holds a workpiece and transfers it along one direction,
A support frame;
A first link and a second link arranged in parallel to each other on the same plane, wherein one end of the first link and the second link is rotatably supported by the support frame with the axis line set in the vertical direction; A front-side parallel link connected to the upper ends of the first shaft and the second shaft,
A third link and a fourth link arranged in parallel on the same plane in a state of being positioned above the first link and the second link, the other end being a fixed distance from one end of the third link; A portion closer to the side is pivotally connected to the other end of the first link via a third shaft extending in the vertical direction, and one end of the fourth link extends in the vertical direction. A rear-side parallel link rotatably connected to the other end of the second link,
It is provided in a state of being positioned above the third link and the fourth link, and one end is rotatably connected to the third shaft and the other end is freely rotatable to the fourth shaft. An intermediate link linked to
The other end of the third link is provided in a state of being positioned above the third link and the fourth link, with one end and the other end extending in the vertical direction, respectively, via a fifth shaft and a sixth shaft. And a tip connecting link rotatably connected to the other end of the fourth link;
A first drive link disposed below the first link and the second link and rotatably connected to the first link via a seventh shaft;
The other end of the first drive link is pivotally connected to the other end of the first drive link via an eighth shaft disposed below the first link and the second link and having one end extending vertically. A second drive link rotatably connected to one end of the third link via a ninth shaft extending in the direction;
A workpiece holding hand fixed to the tip connecting link;
A link driving device that drives at least one of the first shaft and the second shaft to relatively rotate the front-stage parallel link and the rear-stage parallel link in the horizontal direction;
The direction of displacement generated at the connection point of the first and second drive links in the process of relatively rotating the front-stage parallel link and the rear-stage parallel link is restricted to a direction perpendicular to the workpiece conveyance direction. A linear guide mechanism for guiding the eighth shaft along a straight line extending in a direction perpendicular to the transport direction;
The linear guide mechanism is attached to the upper part of the support frame,
A distance S1 between the first axis and the second axis, a distance S2 between the third axis and the fourth axis, and a distance S3 between the fifth axis and the sixth axis. Are set equal to each other, a distance L1 between the first axis and the third axis, a distance L2 between the second axis and the fourth axis, and the third axis and the third axis The distance L3 between the five axes and the distance L4 between the fourth and sixth axes are set equal,
And a distance a between the first axis and the seventh axis, a distance b between the seventh axis and the eighth axis, and a distance between the third axis and the ninth axis. The distance d is set equal, and the distance e between the fifth axis and the ninth axis is equal to the distance a between the first axis and the seventh axis, and the seventh axis. A link-type workpiece transfer robot that is set equal to the sum of a distance b between the eighth axis and a distance c between the eighth axis and the ninth axis.

Images